Motorola MPXV5100, MPX5100 Datasheet

Freescale Semiconductor, Inc.

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated

The MPX5100/MPXV5100 series piezoresistive transducer is a state-of­the-art monolithic silicon pressure sensor designed for a wide range of appli­cations, but particularly those employing a microcontroller or microprocessor
with A/D inputs. This patented, single element transducer combines advanced
micromachining techniques, thin-film metallization, and bipolar processing to
provide an accurate, high level analog output signal that is proportional to the
applied pressure.

Features

nc...

I

• 2.5% Maximum Error over 0° to 85°C

• Ideally suited for Microprocessor or Microcontroller-Based
Systems

• Patented Silicon Shear Stress Strain Gauge

• Available in Absolute, Differential and Gauge Configurations

• Ideal for Automotive and Non-Automotive Applications

V

S

GAIN STAGE #2

AND

GROUND

REFERENCE

SHIFT CIRCUITRY

SENSING
ELEMENT

THIN FILM

TEMPERATURE

COMPENSATION

AND

GAIN STAGE #1

cale Semiconductor,

PINS 1 AND 5 THROUGH 8 ARE NO CONNECTS
FOR SMALL OUTLINE PACKAGE

PINS 4, 5, AND 6 ARE NO CONNECTS FOR
UNIBODY PACKAGE

Frees

GND

Figure 1. Fully Integrated Pressure Sensor Schematic

Order number: MPX5100/D

Rev 9, 3/2004

MPX5100/MPXV5100

SERIES

INTEGRATED PRESSURE SENSOR

Differential 0 to 100 kPa (0 to 14.5 psi)
Absolute 15 to 115 kPa (2.18 to 16.68 psi)

0.2 to 4.7 Volts Output

UNIBODY PACKAGESMALL OUTLINE

PACKAGE

MPX5100D

CASE 867

MPXV5100GC6U

CASE 482A

MPX5100DP

CASE 867C

MPXV5100GC7U

V

out

CASE 482C

PIN NUMBER

1 N/C 5 N/C

2 V

3 GND 7 N/C

4 V

NOTE: Pins 1, 5, 6, 7, and
8 are internal device
connections. Do not
connect to external
circuitry or ground. Pin1 is
noted by the notch in the
lead.

out

S

6 N/C

8 N/C

MPX5100GSX

CASE 867F

PIN NUMBER

1 V

2 GND 5 N/C

3 V

NOTE: Pins 4, 5, and 6
are internal device
connections. Do not
connect to external
circuitry or ground. Pin1 is
noted by the notch in the
lead.

out

S

4 N/C

6 N/C

© Motorola, Inc. 2004

For More Information On This Product,

Go to: www.freescale.com

MPX5100/MPXV5100 SERIES

Freescale Semiconductor, Inc.

Table 1. MAXIMUM RATINGS

Rating Symbol Value Unit

Maximum Pressure (P1 > P2)

Storage Temperature

Operating Temperature

NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.

Table 2. OPERATING CHARACTERISTICS (V

shown in Figure 4 required to meet electrical specifications.)

Characteristic Symbol Min Typ Max Unit

Pressure Range

Gauge, Differential: MPX5100D/MPX5100G/MPXV5100G
Absolute: MPX5100A

Supply Voltage

Supply Current

Minimum Pressure Offset

@ V

nc...

I

cale Semiconductor,

Frees

= 5.0 Volts

S

Full Scale Output

@ V

= 5.0 Volts

S

Full Scale Span

@ V

= 5.0 Volts

S

Accuracy

Sensitivity

Response Time

Output Source Current at Full Scale Output

Warm-Up Time

Offset Stability

NOTES:

1. 1.0kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range.

3. Offset (V

4. Full Scale Output (V

5. Full Scale Span (V
minimum rated pressure.

6. Accuracy (error budget) consists of the following:

• Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range.

• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is

• Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from

• TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C.

• TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative to 25°C.

• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of V

7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a
specified step change in pressure.

8. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.

9. Offset Stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

(1)

(2)

(3)

(0 to 85°C)

(4)

Differential and Absolute (0 to 85°C)

(5)

Differential and Absolute (0 to 85°C)

(6)

(7)

(8)

(9)

) is defined as the output voltage at the minimum rated pressure.

off

applied.

) is defined as the output voltage at the maximum or full rated pressure.

FSO

) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

FSS

(NOTE)

P

max

T

stg

T

A

= 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit

S

P

OP

V

S

I

o

V

off

V

FSO

V

FSS

— — — ± 2.5 %V

V/P — 45 — mV/kPa

t

R

I

o+

— — 20 — ms

— — ± 0.5 — %V

cycled to and from the minimum or maximum operating temperature points, with zero differential pressure

minimum or maximum rated pressure at 25°C.

0

15

4.75 5.0 5.25 Vdc

— 7.0 10 mAdc

0.088 0.20 0.313 Vdc

4.587 4.700 4.813 Vdc

— 4.500 — Vdc

— 1.0 — ms

— 0.1 — mAdc

400 kPa

–40° to +125° °C

–40° to +125° °C

—
—

FSS

100
115

at 25°C.

Table 3. MECHANICAL CHARACTERISTICS

Characteristics Typ Unit

Weight, Basic Element (Case 867)

Weight, Basic Element (Case 482)

4.0 grams

1.5 grams

kPa

FSS

FSS

2 Motorola Sensor Device Data MOTOROLA

For More Information On This Product,

Go to: www.freescale.com

Freescale Semiconductor, Inc.

ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING

Figure 2 shows the sensor output signal relative to pressure
input. Typical, minimum, and maximum output curves are
shown for operation over a temperature range of 0° to 85°C
using the decoupling circuit shown in Figure 4. The output will
saturate outside of the specified pressure range.

Figure 3 illustrates both the Differential/Gauge and the Abso­lute Sensing Chip in the basic chip carrier (Case 867). A fluoro­silicone gel isolates the die surface and wire bonds from the
environment, while allowing the pressure signal to be transmit­ted to the sensor diaphragm.

Transfer Function MPX5100D/MPX5100G/MPXV5100G Series

5

V

= VS x (0.009 x P + 0.04)

out

± (Pressure Error x Temperature Factor x 0.009 x V

= 5.0 V ± 0.25 Vdc

V

S

4

PE = 2.5
TM = 1
Temperature = 0–85°C

nc...

I

3

2

OUTPUT VOLTAGE (V)

1

MAX

MIN

MPX5100/MPXV5100 SERIES

The MPX5100/MPXV5100 series pressure sensor operating
characteristics, and internal reliability and qualification tests are
based on use of dry air as the pressure media. Media, other
than dry air, may have adverse effects on sensor performance
and long-term reliability. Contact the factory for information re­garding media compatibility in your application.

Figure 4 shows the recommended decoupling circuit for in­terfacing the output of the integrated sensor to the A/D input of
a microprocessor or microcontroller. Proper decoupling of the
power supply is recommended.

Figure 1.

)

S

TYPICAL

SPAN RANGE (TYP)

OUTPUT RANGE (TYP)

cale Semiconductor,

Frees

FLUORO SILICONE

GEL DIE COAT

WIRE BOND

LEAD FRAME

0

0 10 20 30 40 50 60 70 80 90 100

Figure 2. Output versus Pressure Differential

DIE

DIFFERENTIAL/GAUGE ELEMENT

Figure 3. Cross-Sectional Diagrams

1.0 µF0.01 µF

PRESSURE (kPa)

STAINLESS STEEL

METAL COVER

EPOXY PLASTIC

CASE

DIE
BOND

(Not to Scale)

V

WIRE BOND

LEAD FRAME

+5 V

S

IPS

GND

FLUORO SILICONE

GEL DIE COAT

V

out

470 pF

110

DIE

ABSOLUTE ELEMENT

OUTPUT

OFFSET

(TYP)

STAINLESS STEEL

METAL COVER

EPOXY PLASTIC

CASE

DIE
BOND

Figure 4. Recommended Power Supply Decoupling and Output Filtering

(For additional output filtering, please refer to Application Note AN1646)

MOTOROLA Motorola Sensor Device Data 3

For More Information On This Product,

Go to: www.freescale.com

MPX5100/MPXV5100 SERIES

Transfer Function (MPX5100D, MPX5100G, MPXV5100G)

Freescale Semiconductor, Inc.

nc...

I

cale Semiconductor,

Frees

Nominal Transfer Value: V

± (Pressure Error x Temp. Mult. x 0.009 x VS)
V

Temperature Error Multiplier

4.0

3.0

2.0

1.0

0.0

NOTE: The Temperature Multiplier is a linear response from 0° to –40°C and from 85° to 125°C.

Pressure Error Band

3.0

2.0

1.0

0.0

Error (kPa)

–1.0

–2.0

–3.0

= VS (P x 0.009 + 0.04)

out

= 5.0 V ± 5% P kPa

S

MPX5100D/MPX5100G/MPXV5100G Series

Temp Multiplier

–40 3
0 to 85 1
+125 3

–40 –20 0 20 40 60

Temperature in °C

MPX5100D/MPX5100G/MPXV5100G Series

Error Limits for Pressure

0 20 40 60 80 100

120

13012010080

140

Pressure in kPa

Pressure Error (max)

0 to 100 kPa ± 2.5 kPa

4 Motorola Sensor Device Data MOTOROLA

For More Information On This Product,

Go to: www.freescale.com