MKS Spectra 138A Instruction Manual

Instruction Manual

MKS Spectra Type 138A

Portable Analytical System

LP101017 Rev 1.02

April 2002

As part of our continuous product improvement policy, we are always pleased to
receive your comments and suggestions about how we should develop our product
range. We believe that the manual is an important part of the product and would
welcome your feedback particularly relating to any omissions or inaccuracies you
may discover.

You can send your comments to:-

MKS Instruments, Spectra Products
Cowley Way
Crewe
Cheshire
CW1 6AG
U.K.
[phone] Tel.
[phone] Fax.

In North America you can send your comments to:-

MKS Instruments Spectra Products.
380 Woodview Ave.
Morgan Hill

CA 95037

USA
[phone] Office
[phone] Fax
1-800-VAC CHECK

http://www.spectra-rga.com

Windows and Windows 95 are trademarks of the Microsoft Corporation.
Swagelok is a registered trademark of the Crawford Fitting Company and is fully recognised.
Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA.
Cajon®, VCR® and VCO® are registered trademarks of Cajon Company, Macedonia, OH.
Channeltron is a registered trademark of the Gallilao Corp.
Viton is a registered trademark of
Conflat is registered trademark of Varian and associates
All other brand or product names are trademarks or registered trademarks of their respective companies.

Copyright © 1999 MKS Instruments Spectra Products.

All rights reserved. No part of this work may be reproduced or transmitted in any form or by any
means, electronic or mechanical, including photocopying and recording, or by any information storage
or retrieval system, except as may be expressly permitted in writing by MKS Instruments Spectra
Products.

EC DECLARATION OF CONFORMITY

Spectra SensorTech Ltd.
Cowley Way
Crewe
Cheshire
CW1 6AG
United Kingdom

DECLARES THAT THE FOLLOWING PRODUCTS:

LM62, LM10 VACSCAN 100
LM63, LM10, LM4 VACSCAN PLUS 100, 200
LM61, LM10, LM4, LM9 SATELLITE 100, 200, 300
LM56 MICROVISION
LM70, LM76 MICROVISION PLUS
LM77 VISION 1000P
LM79 VISION 1000I
LM89 VISION 1000B
LM90 VISION 1000 C / E
LM78 VAC CHECK
LM80 MINILAB

ARE IN CONFORMITY WITH THE FOLLOWING EUROPEAN

DIRECTIVES:

89/336/EEC ELECTROMAGNETIC COMPATIBILITY DIRECTIVE

73/23/EEC LOW VOLTAGE DIRECTIVE AS AMMENDED 93/68 EEC

THE APPLICABLE STANDARDS ARE:

EN 61326:1998 ELECTRICAL EQUIPMENT FOR MEASUREMENT,

CONTROL & LABORATORY USE

EN 61010-1:1993 SAFETY REQUIREMENTS FOR ELECTRICAL

EQUIPMENT FOR MEASUREMENT,
CONTROL & LABORATRY USE.
SIGNED:

T.R.ROBINSON
EUROPEAN OPERATIONS MANAGER
DATE: 1

ST

JULY 2001

Additional Installation Maintenance and Operating Instructions

In order to comply with European regulations, the following procedures must be followed :-

A) INSTALLATION

1) The installation procedures given in the operating and technical manuals must be
followed, in addition to these instructions.

2) The mains power cable must conform to local regulations and must have a protective
earth (PE) conductor securely connected to the power plug protective earth contact.

3) The short earthing braid supplied with some products must be fitted between the
terminal on the RF head and one of the CF40 vacuum flange bolts.

4) Only cables supplied with the equipment may be used for interconnections. If extension
cables are required to obtain a greater separation between control unit and RF head, or if
longer serial communications cables are required, they must be supplied by Spectra
SensorTech Ltd.

5) Cables attached to all other ancillary signal and control ports must have a length of less
than 3 metres. If greater length is required, Spectra SensorTech Ltd must be contacted
for technical guidance on possible EMC and safety issues.

6) The vacuum system on which the analyser/RF head is mounted must be earthed, to a
protective earth, preferably to the same protective earth as the control unit.

B) OPERATION

1) The equipment is not authorised for use as a critical component in a life support or safety
critical system without the express written approval of Spectra SensorTech Ltd.

2) All instructions given in the operating manual must be followed.

3) Adjustments are strictly limited to those accessible from the control panel and computer
keyboard and only when running software supplied by Spectra SensorTech Ltd.

C) MAINTENANCE

WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE
EQUIPMENT

1) Maintenance functions must only be carried out by competent persons.

2) During the warranty period, faulty equipment must be returned to Spectra SensorTech

3) There are no user replaceable parts in the electronic equipment. Certain components are

4) Equipment enclosures embody certain special fastening and bonding devices that affect

Ltd., unless special arrangements are made.

EMC and safety critical and must not be substituted. Replacement parts are available
from Spectra SensorTech Ltd.

EMC and safety performance. These must be correctly re-fitted after servicing.

WARRANTY

Type 138A Portable Analytical System

MKS Instruments Spectra Products (MKS Spectra) warrants that the
equipment described in the face of this warranty (the “equipment”)
manufactured by MKS Spectra shall be free from defects in materials and
workmanship for a period of one year from shipment. For the period
commencing with the date of shipment of this equipment and ending one
year later, MKS Spectra will, at its option, either repair or replace any part
which is defective in materials or workmanship without charge to the
purchaser. The foregoing shall constitute the exclusive and sole remedy of
the purchaser for any breach by MKS spectra of this warranty.

The purchaser, before returning any equipment covered by this warranty,
which is asserted to be defective by the purchaser, shall make specific
written arrangements with respect to the responsibility for shipping and
handling the equipment and any other incidental charges with MKS
Spectra UK Global Product Support department.
This warranty does not apply to any equipment that has not been used in
accordance with the specifications recommended by MKS Spectra for the
proper and normal use of the equipment. MKS Spectra will not be liable
under any circumstances for consequential or incidental damages in
connection with or arising out of the sale performance or use of the
equipment covered by this warranty.

INDEMNITY

Where the customer uses the goods or the services supplied by MKS
Instruments Spectra Products either in (MKS Spectra) the
manufacture, supply or distribution of any other goods; or in the
provision of a service; (including without limitation, where the
customer uses the goods or the services supplied by MKS Spectra in
the manufacture and distribution of chemicals or as part of a
manufacturing facility for chemicals) then the customer shall
indemnify and hold harmless MKS Spectra from and against all loss,
damages, costs and expenses awarded against or incurred by MKS
Spectra in respect of such use by the customer or arising out of the
manufacture, supply or distribution of those goods or the provision of
that service (or without limitation arising out of the manufacture and

distribution of those chemicals or the use of the goods or services as
part of that manufacturing facility).

Document Control

Revision 1.00
Date 20 Feb 2001
Change New document based on MKS Instruments UK document

1380004D

Contents

Errata and addenda...............................................................i

Section 1. Safety ..........................................................3

1.1. Symbols used in this manual .................................................................. 3

1.2. Warning symbols.................................................................................... 4

1.2.1. General.........................................................................................4

1.2.2. Other symbols.............................................................................4

1.3. Safety procedures and precautions ......................................................... 5

Section 2. Overview...............................................10

Section 3. Installation........................................... 15

3.1. Environmental Requirements ............................................................... 15

3.2. Electrical Connections.......................................................................... 16

3.3. Testing.................................................................................................. 16

Section 4. Setup and operation.......................................... 19

4.1. Setup..................................................................................................... 19

4.2. Operation.............................................................................................. 19

4.3. Switching on......................................................................................... 20

4.4. Cold Cathode Gauge............................................................................. 20

4.5. Switching Off ....................................................................................... 21

4.6. Bakeout Heater ..................................................................................... 21

PAS Trolley Manual
LP101017 Rev 1.02 Page i

4.7. Inlet System...........................................................................................22

4.8. Operation via flexible connection .........................................................22

4.9. Operation with remote mounted analyser..............................................23

4.10. Operation with atmospheric inlet ........................................................24

Section 5. Troubleshooting ............................27

Section 6. Troubleshooting ............................31

6.1. General..................................................................................................31

6.2. Primary Pump........................................................................................31

6.3. Turbo Pump...........................................................................................31

6.4. Cold Cathode Gauge .............................................................................31

6.5. RGA Head............................................................................................. 32

6.6. Service/Repair.......................................................................................32

Appendix 1. Related documents..................35

Appendix 2. Returns form..................................37

PAS Trolley Manual
LP101017 Rev 1.02 Page ii

Errata and addenda

This page is deliberately left blank.

PAS Trolley Manual
LP101017 Rev 1.02 Page i

This page is deliberately left blank.

PAS Trolley Manual
LP101017 Rev 1.02 Page ii

Section 1.

Safety

WARNING

1.1. Symbols used in this manual

Definitions of WARNING, CAUTION and NOTE messages used in this manual.

WARNING

CAUTION

NOTE

Please read this section of the

manual. It contains important

safety information.

The WARNING sign denotes a

hazard to personnel.
WARNING boxes are used where
failure to observe the instructions

could result in personal injury or

death.

The CAUTION sign denotes a

hazard to equipment.

CAUTION boxes are used where

failure to observe the instructions

could result in damage to the

equipment or associated

equipment.

The NOTE sign denotes important
information. It calls attention to a
procedure, practice, condition, or
the like, which is essential to
highlight.

PAS Trolley Manual
LP101017 Rev 1.02 Page 3

CAUTION and WARNING instructions MUST be observed. MKS Spectra accepts
no liability for any injury or damage resulting from a failure to observe CAUTION
or WARNING instructions.

1.2. Warning symbols

1.2.1.General

Various warning labels and symbols may be attached to the instrument their
general use is explained below.

The Exclamation Mark (ISO 3864, No.B.3.1) label.
Caution refer to the accompanying documents.
General caution.
Refer to the manual for detailed instructions.

The Electric Shock (ISO 3864, No.B.3.6) symbol.
Caution, risk of electric shock.
This is generally used on the instruments to warn of the
presence of hazardous voltages.

Hot Surface (IEC 417, No.5041) symbol.

Caution risk of burns injury.
Generally used to indicate that the surface may become very
hot during normal operation.

1.2.2. Other symbols

|

On (Supply)

PAS Trolley Manual
LP101017 Rev 1.02 Page 4

Off (Supply) Earth (ground) Protective earth

IEC 417,

No.5007

IEC 417, No.

5017

IEC 417,
No.5017

(ground)

IEC417, No.5019

Frame or chassis
IEC 417,
No.5020

Both direct and
alternating current

IEC 417, No.5033-a

Equipotentiality
IEC 417,
No.5021

Class II equipment
IEC 417, No. 5172­a

Direct current
IEC417, No.5031

Three phase
alternating current
IEC 617-2
No.020206

Alternating
current
IEC417, No.5032

1.3. Safety procedures and precautions

Observe the following general safety precautions during all phases of
operation of this instrument. Failure to comply with these precautions or with
specific warnings elsewhere in this manual violates safety standards of
intended use of the instrument and may impair the protection provided by the
equipment. MKS Instruments assumes no liability for the customer’s failure
to comply with these requirements.

SERVICE BY QUALIFIED PERSONNEL ONLY

Operating personnel must not attempt component replacement and
internal adjustments. Any service must be performed by qualified
service personnel only.

GROUNDING THE PRODUCT

This product is grounded through the grounding conductor of the
power cord. To avoid electrical shock, plug the power cord into a
properly wired receptacle before connecting it to the product input or
output terminals. A protective ground connection by way of the
grounding conductor in the power cord is essential for safe operation.

DANGER ARISING FROM LOSS OF GROUND

PAS Trolley Manual
LP101017 Rev 1.02 Page 5

Upon loss of the protective-ground connection, all accessible
conductive parts (including knobs and controls that may appear to be
insulating) can render an electrical shock.

GROUND AND USE PROPER ELECTRICAL FITTINGS

Dangerous voltages are contained within this instrument. All
electrical fittings and cables must be of the type specified, and in
good condition. All electrical fittings must be properly connected
and grounded.

USE THE PROPER POWER CORD

Use only a power cord that is in good condition and which meets the
input power requirements specified in the manual.
Use only a detachable cord set with conductors that have a cross­sectional area equal to or greater than 1.5 mm2. The power cable
should be approved by a qualified agency such as VDE, Semko, or
SEV.

USE THE PROPER POWER SOURCE

This product is intended to operate from a power source that does not
apply more voltage between the supply conductors, or between either
of the supply conductors and ground, than that specified in the
manual.

USE THE PROPER FUSE

Use only a fuse of the correct type, voltage rating, and current rating,
as specified for your product.

KEEP AWAY FROM LIVE CIRCUITS

Do not replace components with power cable connected. Under
certain conditions, dangerous voltages may exist even with the power
cable removed. To avoid injuries, always disconnect power and
discharge circuits before touching them.

USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS

If hazardous materials are used, observe the proper safety
precautions, completely purge the instrument when necessary, and
ensure that the material used is compatible with the materials in this
product, including any sealing materials.

PAS Trolley Manual
LP101017 Rev 1.02 Page 6

DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT

To avoid explosion, do not operate this product in an explosive
environment unless it has been specifically certified for such
operation.

USE PROPER FITTINGS AND TIGHTENING PROCEDURES

All instrument fittings must be consistent with instrument
specifications, and compatible with the intended use of the
instrument. Assemble and tighten fittings according to
manufacturer’s directions.

CHECK FOR LEAK-TIGHT FITTINGS

Carefully check all vacuum component connections to the instrument
to ensure leak-tight installation.

OPERATE AT SAFE INLET PRESSURES

Never operate at pressures higher than the rated maximum pressure
(refer to the product specifications for the maximum allowable
pressure).

INSTALL A SUITABLE BURST DISC

When operating from a pressurized gas source, install a suitable burst
disc in the vacuum system to prevent system explosion should the
system pressure rise.

KEEP THE UNIT FREE OF CONTAMINANTS

Do not allow contaminants to enter the unit before or during use.
Contamination such as dust, dirt, lint, glass chips, and metal chips
may permanently damage the unit or contaminate the process.

ALLOW THE UNIT TO WARM UP

If the unit is used to control dangerous gases, they should not be
applied before the unit has completely warmed up. Use a positive
shutoff valve to ensure that no erroneous flow can occur during
warm up.

AVOID EXPLOSIVE GAS MIXTURES

PAS Trolley Manual
LP101017 Rev 1.02 Page 7