– __ __
Serial # __ __ __ __ __ __
Please fill in these numbers and have
them readily available when calling for
service or additional information.
(The part number can be found on your
packing slip, and the serial number is
located on the back panel of the Pirani
controller.)
For more information or literature, contact:
MKS Instruments Inc., HPSTM Products, Inc.
Please be sure that your Series 917 Pirani Vacuum Sensor System package
contains these items:
1 Series 917 Pirani Controller
1 female, 15-pin, subminiature D (D-sub) accessory connector
1 power cord
1 HPS™ Series 917 Pirani Vacuum Sensor System
User's Manual
The Series 917 System's Pirani Sensor and its connecting cable are sold
separately. Please refer to page 21 for necessary ordering information.
If any items are missing from the package, call HPSTM Customer
Service at 1-303-449-9861 or 1-800-345-1967.
If the unit has been damaged in shipping, notify the carrier immediately. Keep
all shipping materials and packaging for claim verification.
Symbols Used in this Manual
The first two symbols below, located on your Series 917 Controller and/or
Sensor, identify critical safety concerns. They are used throughout this
manual to further define the safety concerns associated with the part.
The last two symbols identify other information in this manual that is
essential to highlight or useful in achieving optimal performance from the part.
CAUTION: Risk of electrical shock.
CAUTION: Refer to manual.
Failure to heed message could result in personal injury and/or
serious damage to the equipment.
Failure to heed message could result in damage to the
equipment.
Information calling attention to important procedures,
practices, or conditions.
1Pirani Vacuum Sensor System
Safety Precautions and
Other Procedures
Do not use te Serie 917 System's Pirani Sensor with
explosive gas mixtures or with gases that are
combustible in air.
If the control circuit fails or an exothermic catalytic reaction occurs at the
sensor wire, the wire could ignite the gas mixture.
Prevent chances of explosion when using with gases other
than air or nitrogen.
The sensor is calibrated for air/nitrogen, so the measured pressure will differ
from the true pressure of another gas. Calibrations diverge widely at higher
pressures. With no linear relationship for the gases, a gas correction factor
could lead to hazardous overpressure. Capacitance manometers and
mechanical dial gauges are best suited for higher pressures. Refer to page 18
for use with other gases.
Take precautions to avoid overpressure during
system backfill.
When backfilling, do not use the Series 917 Pirani System to read pressures
above 100 Torr. In a system which is filled with a pressurized source, install a
safety relief valve or burst disc to safely limit pressure and prevent an
explosion.
The Series 917 Pirani Controller contains lethal voltages
within the casing.
Avoid the danger of electrical shock. Disconnect the power cord before
opening the Controller case.
Turn off power to the Controller before plugging or
unplugging cables to the Sensor.
The Controller is grounded through the conductor of the power cord. Plug the
cord only into a properly grounded outlet. If the protective ground connection
is lost, all accessible conductive parts may pose a risk of electrical shock.
Prevent personnel injury by making sure that only qualified
technicians service the Series 917 Pirani System.
2
Pirani Vacuum Sensor System
No operations personnel should remove covers, casings, or plug-in
components. Any part replacement or internal adjustments must be
performed by a qualified technician only.
To prevent damage to the Series 917 Pirani Controller, use
th e correct line voltage.
The Controller must be used with only the specified line voltage. Use only a
fuse of the correct type, voltage, and current rating. Only qualified personnel
should change line voltage or fuse ratings if required.
Outside of the U.S., use only a harmonized, detachable cord set that has
conductors with a cross-sectional area equal to or greater than 0.75 mm2.
Power cables should be approved by a European agency such as VDE,
Semko, or SEV.
The Series 917 Pirani System and all its accessories must be
used as instructed by MKS Instruments, HPSTM Products, to
ensure safe operation. Use or modification of the equipment
in a manner not consistent with specifications may render
the product's inherent protection useless.
3Pirani Vacuum Sensor System
Specifications
Controller
Measuring Range1.0 x 10-3 to 7.6 x 10+2 Torr
1.0 to 7.6 x 10+5 mTorr
1.0 x 10-3 to 1.0 x 10+3 mbar
1.0 x 10-1 to 1.0 x 10+5 Pa
Useful Set Point Range5.0 x 10-3 to 1.0 x 10+2 Torr
5.0 to 1.0 x 10+5 mTorr
6.5 x 10-3 to 1.3 x 10+2 mbar
6.5 x 10-1 to 1.3 x 10+4 Pa
Operating Temperature Range0o to 50oC (32o to 122oF)
Storage Temperature Range-10o to 55oC (14o to 131oF)
Operating Humidity95% maximum (noncondensing)
Installation CategoryOvervoltage Category II,
Pollution Degree 2
Number of Channels1
Front Panel Controls2 nonvolatile, independent relay set
points; power on-off switch
Relay Contact RatingSPDT, 2 A @ 50 VAC resistive
2 A @ 30 VDC
Relay Response150 msec maximum
Power Requirement90 to 130 VAC, 50/60 Hz
or
210 to 250 VAC, 50/60 Hz
Power Consumption7 W
Output Voltage0.03 to 3.25 VDC buffered analog,
1 kW maximum impedance
Fuse Rating, SizeT 0.1 A, Ø 5 mm x 20 mm
for 90 to 130 VAC,
T 0.04 A, Ø 5 mm x 20 mm
for 210 to 250 VAC
4
Pirani Vacuum Sensor System
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