MKS HPS 917 Maintance Manual

HPSTM Products Series 917
Pirani Vacuum Sensor System
OPERATION AND
MAINTENANCE MANU AL
Pirani Vacuum Sensor System
AUGUST 1999
PART #109170020 REV.B
Pirani Vacuum Sensor System
Part # 1091700XX
– __ __ Serial # __ __ __ __ __ __ Please fill in these numbers and have
them readily available when calling for service or additional information. (The part number can be found on your packing slip, and the serial number is located on the back panel of the Pirani controller.)
For more information or literature, contact: MKS Instruments Inc., HPSTM Products, Inc.
5330 Sterling Drive Boulder, CO 80301 USA
Phone: 303-449-9861
800-345-1967
FAX: 303-442-6880
© 1994, 1996 by MKS Instruments Inc., HPSTM Products Inc. All rights reserved.
SensaVac is a trademark of MKS Instruments, Inc. Teflon is a registered trademark of DuPont Co.
VCR® is a registered trademark of Swagelok® Company.
Pirani Vacuum Sensor System
Table of Contents
Table of Contents
Package Contents ..................................................................... 1
Symbols Used in this Manual.................................................... 1
Safety Precautions and Other Procedures ................................ 2
Specifications............................................................................ 4
Controller................................................................................................. 4
Sensor T ube ............................................................................................ 5
Feature and Control Locations .................................................. 6
Typical Applications for the Series 917 Pirani System .............. 7
About the HPS™ Series 917 Pirani Vacuum Sensor System.... 8
Installing the Series 917 Pirani System..................................... 9
Pirani Sensor Installation ........................................................................ 9
Location............................................................................................................................ 9
Orientation........................................................................................................................ 9
Contamination .................................................................................................................. 9
Venting to Atmosphere.................................................................................................... 9
Vacuum Connection ........................................................................................................ 9
Pirani Controller Installation....................................................................1 0
Controller Mounting ....................................................................................................... 10
Electrical Connection of the Pirani Sensor to the Controller ...................................... 10
AC Power Cord.............................................................................................................. 11
Fuse Replacement ........................................................................................................ 12
Accessory Connector................................................................................................... 12
Relay Inductive Loads and Arc Suppression .............................................................. 13
Operating the Series 917 Pirani System.................................. 14
Reading Pressure ...................................................................................1 4
Adjusting the Set Points ................................................................................................ 15
Buffered Analog Output................................................................................................. 16
Use with Computers ...................................................................................................... 16
Leak Detection ............................................................................................................... 16
Using the Series 917 Pirani System with Other Gases............ 18
Calibrating for Other Gases....................................................................18
Calibrating for Direct Measurement ........................................................1 8
Maintaining the Series 917 Pirani System............................... 19
Troubleshooting and Service...................................................................19
Cleaning the Series 917 Pirani Controller Front P anel.............................1 9
Testing the Pirani Sensor ............................................................................................. 20
Cleaning the Pirani Sensor ........................................................................................... 20
Accessories............................................................................. 21
Product Warranty..................................................................... 22
Notes....................................................................................... 23
Pirani Vacuum Sensor System
Pirani Vacuum Sensor System
Package Contents
Please be sure that your Series 917 Pirani Vacuum Sensor System package contains these items:
1 Series 917 Pirani Controller 1 female, 15-pin, subminiature D (D-sub) accessory connector 1 power cord 1 HPS™ Series 917 Pirani Vacuum Sensor System
User's Manual
The Series 917 System's Pirani Sensor and its connecting cable are sold separately. Please refer to page 21 for necessary ordering information.
If any items are missing from the package, call HPSTM Customer Service at 1-303-449-9861 or 1-800-345-1967.
If the unit has been damaged in shipping, notify the carrier immediately. Keep all shipping materials and packaging for claim verification.
Symbols Used in this Manual
The first two symbols below, located on your Series 917 Controller and/or Sensor, identify critical safety concerns. They are used throughout this manual to further define the safety concerns associated with the part.
The last two symbols identify other information in this manual that is essential to highlight or useful in achieving optimal performance from the part.
CAUTION: Risk of electrical shock. CAUTION: Refer to manual.
Failure to heed message could result in personal injury and/or serious damage to the equipment.
Failure to heed message could result in damage to the equipment.
Information calling attention to important procedures, practices, or conditions.
1Pirani Vacuum Sensor System
Safety Precautions and Other Procedures
Do not use te Serie 917 System's Pirani Sensor with explosive gas mixtures or with gases that are combustible in air.
If the control circuit fails or an exothermic catalytic reaction occurs at the sensor wire, the wire could ignite the gas mixture.
Prevent chances of explosion when using with gases other than air or nitrogen.
The sensor is calibrated for air/nitrogen, so the measured pressure will differ from the true pressure of another gas. Calibrations diverge widely at higher pressures. With no linear relationship for the gases, a gas correction factor could lead to hazardous overpressure. Capacitance manometers and mechanical dial gauges are best suited for higher pressures. Refer to page 18 for use with other gases.
Take precautions to avoid overpressure during system backfill.
When backfilling, do not use the Series 917 Pirani System to read pressures above 100 Torr. In a system which is filled with a pressurized source, install a safety relief valve or burst disc to safely limit pressure and prevent an explosion.
The Series 917 Pirani Controller contains lethal voltages within the casing.
Avoid the danger of electrical shock. Disconnect the power cord before opening the Controller case.
Turn off power to the Controller before plugging or unplugging cables to the Sensor.
The Controller is grounded through the conductor of the power cord. Plug the cord only into a properly grounded outlet. If the protective ground connection is lost, all accessible conductive parts may pose a risk of electrical shock.
Prevent personnel injury by making sure that only qualified technicians service the Series 917 Pirani System.
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Pirani Vacuum Sensor System
No operations personnel should remove covers, casings, or plug-in components. Any part replacement or internal adjustments must be performed by a qualified technician only.
To prevent damage to the Series 917 Pirani Controller, use th e correct line voltage.
The Controller must be used with only the specified line voltage. Use only a fuse of the correct type, voltage, and current rating. Only qualified personnel should change line voltage or fuse ratings if required.
Outside of the U.S., use only a harmonized, detachable cord set that has conductors with a cross-sectional area equal to or greater than 0.75 mm2. Power cables should be approved by a European agency such as VDE, Semko, or SEV.
The Series 917 Pirani System and all its accessories must be used as instructed by MKS Instruments, HPSTM Products, to ensure safe operation. Use or modification of the equipment in a manner not consistent with specifications may render the product's inherent protection useless.
3Pirani Vacuum Sensor System
Specifications
Controller
Measuring Range 1.0 x 10-3 to 7.6 x 10+2 Torr
1.0 to 7.6 x 10+5 mTorr
1.0 x 10-3 to 1.0 x 10+3 mbar
1.0 x 10-1 to 1.0 x 10+5 Pa
Useful Set Point Range 5.0 x 10-3 to 1.0 x 10+2 Torr
5.0 to 1.0 x 10+5 mTorr
6.5 x 10-3 to 1.3 x 10+2 mbar
6.5 x 10-1 to 1.3 x 10+4 Pa
Operating Temperature Range 0o to 50oC (32o to 122oF) Storage Temperature Range -10o to 55oC (14o to 131oF) Operating Humidity 95% maximum (noncondensing) Installation Category Overvoltage Category II,
Pollution Degree 2
Number of Channels 1 Front Panel Controls 2 nonvolatile, independent relay set
points; power on-off switch
Relay Contact Rating SPDT, 2 A @ 50 VAC resistive
2 A @ 30 VDC
Relay Response 150 msec maximum Power Requirement 90 to 130 VAC, 50/60 Hz
or
210 to 250 VAC, 50/60 Hz
Power Consumption 7 W Output Voltage 0.03 to 3.25 VDC buffered analog,
1 kW maximum impedance
Fuse Rating, Size T 0.1 A, Ø 5 mm x 20 mm
for 90 to 130 VAC, T 0.04 A, Ø 5 mm x 20 mm
for 210 to 250 VAC
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Pirani Vacuum Sensor System
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