MKS P9B, G, GM50A, GE50A, GV50A Instruction Manual
MKS Type P9B
Digital
Mass Flow Controller
1042936-001, Rev A
January, 2013
Instruction Manual
WARRANTY
Type P9B Mass Flow Controller
MKS Instruments, Inc. (MKS) warrants that for one (1) year from the date of shipment the equipment
described above (the “equipment”) manufactured by MKS shall be free from defects in materials and
workmanship.
For the period commencing with the date of shipment of this equipment and ending one (1) year later, MKS
will, at its option, either repair or replace any part which is defective in materials or workmanship without
charge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of the purchaser for any
breach of MKS of this warranty.
The purchaser, before returning any equipment covered by this warranty, which is asserted to be defective by
the purchaser, shall make specific written arrangements with respect to the responsibility for shipping the
equipment and handling any other incidental charges with the MKS Sales Representative or distributor from
which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home
office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and used in accordance with the
specifications recommended by MKS for the proper and normal use of the equipment. MKS shall not be
liable under any circumstances for indirect, special, consequential, or incidental damages in connection with,
or arising out of, the sale, performance, or use of the equipment covered by this warranty.
MKS recommends that all MKS pressure and flow products be calibrated periodically (typically) every 6 to
12 months) to ensure accurate readings. When a product is returned to MKS for this periodic re-calibration it
is considered normal preventative maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES, EXPRESSED OR
IMPLIED, INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED
WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST
INFRINGEMENT OF ANY PATENT.
Copyright © 2013 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means,
electronic or mechanical, including photocopying and recording, or by any information storage or retrieval
system, except as may be expressly permitted in writing by MKS Instruments, Inc.
Printed in the United States of America
Baratron
and Mass-Flo are registered trademarks of MKS Instruments, Inc., Andover, MA
DeviceNet™ is a trademark of Open DeviceNet Vendor Association, Inc., Coral Springs, FL
Elgiloy is a registered trademark of Elgiloy Specialty Metals, Elgin, IL
Teflon
Swagelok
is a registered trademark of E.I. du Pont de Nemours and Company, Wilmington, DE
and VCR are registered trademarks of Swagelok Marketing Company, Solon, OH
Protected by U. S. Patents 5461913, 6810308, 700465 and patents pending.
Table of Contents
Table of Contents
List of References ............................................................................................................................................... v
Mass Flow Device Safety Information ............................................................................................................. 1
Symbols Used in This Instruction Manual .................................................................................................................... 1
Symbols Found on the Unit ........................................................................................................................................... 1
Safety Procedures and Precautions ................................................................................................................................ 2
Sicherheitshinweise für das Massenflussgerät................................................................................................. 3
In dieser Betriebsanleitung vorkommende Symbole ..................................................................................................... 3
Erklärung der am Gerät angebrachten Symbole ............................................................................................................ 3
Sicherheitsvorschriften und Vorsichtsmaßnahmen ....................................................................................................... 4
Informations de sécurité pour appareils de mesure/contrôle de débit massique ......................................... 5
Symboles utilisés dans ce manuel d'utilisation .............................................................................................................. 5
Symboles figurant sur l'unité ......................................................................................................................................... 5
Mesures de sécurité et précautions ................................................................................................................................ 6
Medidas de seguridad del dispositivo de flujo de masa .................................................................................. 7
Símbolos usados en este manual de instrucciones ......................................................................................................... 7
Símbolos hallados en la unidad ..................................................................................................................................... 7
Procedimientos y precauciones de seguridad ................................................................................................................ 8
マスフロー機器の安全に関する情報 ............................................................................................................ 11
本取扱説明書のマーク ............................................................................................................................................. 11
本機器のマーク ......................................................................................................................................................... 11
安全対策について ..................................................................................................................................................... 13
질량 유량 장치 안전 정보 ................................................................................................................................ 15
본 지침 매뉴얼에 사용되는 기호들 ......................................................................................................................... 15
장치에 표시된 기호들 ............................................................................................................................................... 15
안전 절차 및 예방조치 .............................................................................................................................................. 16
Chapter One: General Information .............................................................................................................. 19
Introduction ................................................................................................................................................................. 19
How This Manual is Organized ................................................................................................................................... 20
Customer Support ........................................................................................................................................................ 21
Chapter Two: Overview ................................................................................................................................. 23
General Information .................................................................................................................................................... 23
How the MFC Works .................................................................................................................................................. 24
Operation of the MFC with Gases other than Nitrogen ............................................................................................... 24
Chapter Three: Installation and Configuration ........................................................................................... 26
Unpacking ................................................................................................................................................................... 26
Product Location and Requirements ............................................................................................................................ 27
Dimensions - P9B ....................................................................................................................................................... 28
Serial Label.................................................................................................................................................................. 31
Installation Procedure .................................................................................................................................................. 32
i
Table of Contents
Chapter Four: Analog and Digital Interface ............................................................................................... 35
Analog I/O Interface Cables ........................................................................................................................................ 35
Analog Interface Input and Output Options................................................................................................................. 36
Digital Interface Input and Output Options ................................................................................................................. 40
Chapter Five: Ethernet Interface Setup and Configuration ...................................................................... 47
Chapter Six: Embedded Web-Based GUI and Diagnostics ........................................................................ 59
Logging On to Your MFC ........................................................................................................................................... 59
Monitor Mode .............................................................................................................................................................. 59
Setup Mode .................................................................................................................................................................. 65
Tuning the MFC for Optional PC ................................................................................................................................ 73
Chapter Seven: Maintenance ........................................................................................................................ 77
General Information .................................................................................................................................................... 77
Recalibration ................................................................................................................................................................ 77
Flow Zero Adjustment ................................................................................................................................................. 77
Pressure Zero Adjustment ........................................................................................................................................... 79
Chapter Eight: Troubleshooting ................................................................................................................... 83
Troubleshooting Chart ................................................................................................................................................. 83
Appendix A: Product Specifications ............................................................................................................. 91
Performance Specifications –P9B ............................................................................................................................... 91
Specifications are subject to change without notice.Mechanical Specifications ........................................................ 91
Electrical Specifications ............................................................................................................................................. 92
Appendix B : Model Code Explanation ........................................................................................................ 96
Model Code Description .............................................................................................................................................. 96
Appendix C: Health and Safety Form ........................................................................................................ 102
......................................................................................................................................................................... 102
ii
List of References
List of Figures
Figure 1: 4-VCR Front View - (Normally Closed Valve) ................................................................................ 28
Figure 2: 4-VCR DeviceNet Inlet End (Left) and Outlet End (Right) Views - (Normally Closed Valve) ....... 28
Figure 3: 4-VCR Inlet End - 15 pin D and 9 pin D Views (Normally Closed Valve) ...................................... 29
Figure 4: 4-VCR Bottom View ......................................................................................................................... 29
Figure 5: C or W Seal Side View – Normally Closed ...................................................................................... 30
Figure 6: C or W Seal DeviceNet Inlet End (Left) and Outlet End (Right) Views – Normally Closed Valve . 30
Figure 7: C and W Seal Bottom View .............................................................................................................. 31
Figure 8: 4-VCR DeviceNet Top View ........................................................................................................... 31
Figure 9: 4-VCR 9 pin D and 15 pin D Top View ........................................................................................... 31
Figure 10: Serial Number Label (sample) ......................................................................................................... 31
Figure 11: Devicenet MAC ID Switches .......................................................................................................... 33
Figure 12: DeviceNet Connector Pin Diagram ................................................................................................. 40
Figure 13: Devicenet Baud Rate Switch ............................................................................................................ 42
Figure 14: Devicenet MAC ID Switches .......................................................................................................... 42
Figure 15: RS485 Baud Rate Switch ................................................................................................................ 45
Figure 16: RS485 MACID Switches ................................................................................................................ 45
Figure 17: Embedded GUI, MFC Device Page in Monitor Mode .................................................................... 60
Figure 18: Embedded GUI, Plot Page in Monitor Mode .................................................................................. 61
Figure 19: Embedded GUI, Diagnostics Page .................................................................................................. 63
Figure 20: Embedded GUI, Configuration Page in Monitor Mode .................................................................. 64
Figure 21: Setup Mode (Configuration Page) ................................................................................................... 65
Figure 22: Embedded GUI, Device Page in Setup Mode ................................................................................. 66
Figure 23: Embedded GUI, Creating A New Gas Instance .............................................................................. 67
Figure 24: Changing the Full Scale Flow Range .............................................................................................. 67
Figure 25: Embedded GUI, Plot Page in Setup Mode ...................................................................................... 68
Figure 26: Embedded GUI, Configuration Page in Setup Mode ...................................................................... 69
Figure 27: Embedded GUI, Optional PC Page in Setup Mode (15 pin D Analog Only) ................................. 71
Figure 28: Embedded GUI, Plot Page with Enabled Optional Input (15 pin D Analog Only) .......................... 72
Figure 29: Effects of the Proportional Control .................................................................................................. 73
Figure 30: Effects of the Integral Control .......................................................................................................... 74
iii
List of References
List of Tables
Table 1: Definition of Symbols Found on the Unit ............................................................................................ 1
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole .............................................................................. 3
Tableau 3: Définition des symboles sur l'unité ................................................................................................... 5
Tabla 4: Definición de los símbolos hallados en la unidad ................................................................................ 7
表 5: 本機器に使⽤されているマークについて ......................................................................................... 11
표 6: 장치에 표시된 기호들의 정의 .............................................................................................................. 15
Table 7: MKS Interface Cables ........................................................................................................................ 35
Table 8: Analog Interface – 9 Pin D Males Pinouts – Model Code A ............................................................. 36
Table 9: Analog Interface – 15 Pin D Males Pinouts – Model Code B ............................................................ 37
Table 10: Digital Interface - DeviceNet Connector Pinout – Model Code 6 ................................................... 40
Table 11: Network Status LED Indicators ....................................................................................................... 41
Table 12: Digital Interface – RS485 Using 9 Pin D – Model Code 5 .............................................................. 44
Table 13: RS485 Module Status LED Indicators ............................................................................................. 44
Table 14: Troubleshooting Chart ...................................................................................................................... 83
iv
List of References
List of References
The documents listed below are referenced throughout this manual.
[1] “DeviceNet Specification, Volume I: DeviceNet Communication Model and Protocol”, Open
DeviceNet Vendors Association, Inc. Release 2.0. ERRATA 4.0
[2] “DeviceNet Specification, Volume II: DeviceNet Profiles and Object Library”, Open DeviceNet
Vendors Association, Inc. Release 2.0. ERRATA 4.0
[3] “Sensor/Actuator Network Common Device Model”, SEMI Standards Document E54.1-0097.
[4] “Sensor/Actuator Network Communications Standard for DeviceNet”, SEMI Standards Draft
Document E54.4-0097.
[5] “Sensor/Actuator Network Specific Device Model for Mass Flow Devices”, SEMI Standards Draft
Document #2253C.
[6] “Sensor/Actuator Network Standard”, SEMI Standards Document E54-0097.
[7] SEMI E17. Guideline for Mass Flow Controller Transient Characteristics Tests
[8] SEMI E18. Guideline for Temperature Specifications of the Mass Flow Controller
[9] SEMI E27. Standard for Mass Flow Controller and Mass Flow Meter Linearity
[10] SEMI E28. Guideline for Pressure Specifications of the Mass Flow Controller
[11] SEMI E56. Test Method for Determining Accuracy, Linearity, Repeatability, Short Term
Reproducibility, Hysteresis, and Dead Band of Thermal Mass Flow Controllers
[13] SEMI E80. Test Method Determining Attitude Sensitivity of Mass Flow Controllers
[14] SEMI E52. Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers
[15] Supplement, Devicenet Profile, P9B MFC, Document No. 1042926-001
[16] Supplement, RS485 Command Specifications, P9B MFC, Document No. 1042928-001
v
List of References
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vi
Mass Flow Device Safety Information
Mass Flow Device Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning
Caution
The WARNING sign denotes a hazard. It calls attention to a procedure, practice,
condition, or the like, which, if not correctly performed or adhered to, could result
in injury to personnel.
The CAUTION sign denotes a hazard. It calls attention to an operating procedure,
practice, or the like, which, if not correctly performed or adhered to, could result in
damage to or destruction of all or part of the product.
Note
The NOTE sign denotes important information. It calls attention to a procedure, practice,
condition, or the like, which is essential to highlight.
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Table 1: Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No. 5007
Frame or Chassis
IEC 417, No. 5020
Off (Supply)
IEC 417, No. 5008
Equipotentiality
IEC 417, No. 5021
Earth (ground)
IEC 417, No. 5017
Direct Current
IEC 417, No. 5031
Protective Earth (ground)
IEC 417, No. 5019
Alternating Current
IEC 417, No. 5032
Both Direct and Alternating Current
IEC 417, No. 5033-a
Caution (refer to accompanying
documents)
ISO 3864, No. B.3.1
Class II Equipment
IEC 417, No. 5172-a
Caution, Risk of Electric Shock
ISO 3864, No. B.3.6
Three Phase
Alternating Current
IEC 617-2, No. 020206
Caution, Hot Surface
IEC 417, No. 5041
1
Mass Flow Device Safety Information
Safety Procedures and Precautions
Observe the following general safety precautions during all phases of operation of this instrument.
Failure to comply with these precautions or with specific warnings elsewhere in this manual violates
safety standards of intended use of the instrument and may impair the protection provided by the
equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with these
requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an
MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal adjustments must be
made by qualified service personnel only.
KEEP AWAY FROM LIVE CIRCUITS
Do not replace components with power cable connected. Under certain conditions, dangerous voltages may exist even
with the power cable removed. To avoid injuries, always disconnect power and discharge circuits before touching them.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, users must take responsibility to observe the proper safety precautions, completely purge
the instrument when necessary, and ensure that the material used is compatible with sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before its removal from a system, be sure to purge the unit completely with a clean dry gas to
eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn to protect personnel. To purge this
instrument properly, it must be purged in both the horizontal base down and horizontal base up configurations as defined
in SEM spec. Device has trapped volume in pressure sensor where gas which is higher than air but still hazardous can
accumulate.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for
such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the intended use of the
instrument. Assemble and tighten fittings according to manufacturer's directions.
CHECK FOR LEAK-TIGHT FITTINGS
Before proceeding to instrument setup, carefully check all plumbing connections to the instrument to ensure leak-tight
installation.
OPERATE AT SAFE INLET PRESSURES
This unit should never be operated at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, a suitable burst disc should be installed in the vacuum system to prevent
system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants of any kind to enter the unit before or during use. Contamination such as dust, dirt, lint, glass
chips, and metal chips may permanently damage the unit.
ALLOW PROPER WARM UP TIME FOR TEMPERATURE-CONTROLLED UNITS
Temperature-controlled unit will only meet specifications when sufficient time is allowed for the unit to meet, and
stabilize at, the designed operating temperature. Do not zero or calibrate the unit until the warm up is complete.
2
Sicherheitshinweise für das Massenflussgerät
Sicherheitshinweise für das Massenflussgerät
In dieser Betriebsanleitung vorkommende Symbole
Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser
Betriebsanleitung.
Warnung!
Vorsicht!
Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es
macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine
sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bz w.
ungenügende Berücksichtigung zu Verletzungen führen kann.
Das Symbol VORSICHT! weist auf eine Gefahr für das Gerät hin. Es macht auf
einen Bedienungsablauf, eine Arbeitsweise oder eine sonstige Gegebenheit
aufmerksam, deren unsachgemäße Ausführung bzw. ungenügende
Berücksichtigung zu einer Beschädigung oder Zerstörung des Gerätes oder von
Teilen des Gerätes führen kann.
Hinweis
Das Symbol HINWEIS macht auf wichtige Informationen bezüglich eines
Arbeitsablaufs, einer Arbeitsweise, eines Zustands oder einer sonstige Gegebenheit
aufmerksam.
Erklärung der am Gerät angebrachten Symbole
Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können.
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole
|
Ein (Energie)
IEC 417, No.5007
Aus (Energie)
IEC 417, No.5008
Erdanschluss
IEC 417, No.5017
Schutzleiteranschluss
IEC 417, No.5019
Masseanschluss
IEC 417, No.5020
Gleich- oder Wechselstrom
IEC 417, No.5033-a
Warnung vor einer Gefahrenstelle
(Achtung, Dokumentation beachten)
ISO 3864, No.B.3.1
Aquipotentialanschluss
IEC 417, No.5021
Durchgängige doppelte oder
verstärkte Isolierung
IEC 417, No.5172-a
Warnung vor gefährlicher
elektrischer Spannung
ISO 3864, No.B.3.6
IEC 417, No.5031
3
Gleichstrom
Wechselstrom
IEC 417, No.5032
Dreileiter-Wechselstrom (Drehstrom)
IEC 617-2, No.020206
Höhere Temperatur an leicht
zugänglichen Teilen
IEC 417, No.5041
Sicherheitshinweise für das Massenflussgerät
Sicherheitsvorschriften und Vorsichtsmaßnahmen
Folgende allgemeine Sicherheitsvorschriften sind während allen Betriebsphasen dieses Gerätes zu
befolgen. Eine Missachtung der Sicherheitsvorschriften und sonstiger Warnhinweise in dieser
Betriebsanleitung verletzt die für dieses Gerät und seine Bedienung geltenden Sicherheitsstandards,
und kann die Schutzvorrichtungen an diesem Gerät wirkungslos machen. MKS Instruments, Inc.
haftet nicht für Missachtung dieser Sicherheitsvorschriften seitens des Kunden.
Niemals Teile austauschen oder Änderungen am Gerät vornehmen !
Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am
Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein.
Nur so wird sichergestellt, dass alle Schutzvorrichtungen voll funktionsfähig bleiben.
Wartung nur durch qualifizierte Fachleute!
Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten
Fachleuten durchgeführt werden, niemals vom Bedienpersonal.
Vorsicht vor stromführenden Leitungen!
Ersetzen Sie keine Komponente von Geräten, die an Netzstrom angeschlossen sind. Unter Umständen kann gefährliche
Spannung auch dann bestehen, wenn das Netzanschlusskabel von der Strmversorgung entfernt wurde. Um Verletzungen
vorzubeugen sollten zuerst alle Geräte von der Stromversorgung getrennt und alle Stromkreusläufe entladen werden.
Vorsicht beim Arbeiten mit gefährlichen Stoffen!
Wenn gefährliche Stoffe verwendet werden, muss der Bediener die entsprechenden Sicherheitsvorschriften genauestens
einhalten, das Gerät, falls erforderlich, vollständig spülen, sowie sicherstellen, dass der Gefahrstoff die am Gerät
verwendeten Materialien, insbesondere Dichtungen, nicht angreift.
Spülen des Gerätes mit Gas!
Nach dem Installieren oder vor dem Ausbau aus einem System muss das Gerät unter Einsatz eines reinen Trockengases
vollständig gespült werden, um alle Rückstände des Vorgängermediums zu entfernen.
Anweisungen zum Spülen des Gerätes
Das Gerät darf nur unter einer Ablufthaube gespült werden. Schutzhandschuhe sind zu tragen.
Gerät nicht zusammen mit explosiven Stoffen, Gasen oder Dämpfen benutzen!
Um der Gefahr einer Explosion vorzubeugen, darf dieses Gerät niemals zusammen mit (oder in der Nähe von)
explosiven Stoffen aller Art eingesetzt werden, sofern es nicht ausdrücklich für diesen Zweck zugelassen ist.
Anweisungen zum Installieren der Armaturen!
Alle Anschlussstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten
Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muss gemäß den
Anweisungen des Herstellers vorgenommen werden.
Verbindungen auf Undichtigkeiten prüfen!
Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.
Gerät nur unter zulässigen Anschlussdrücken betreiben!
Betreiben Sie das Gerät niemals unter Drücken, die den maximal zulässigen Druck (siehe Produktspezifikationen)
übersteigen.
Geeignete Berstscheibe installieren!
Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird, sollte eine geeignete Berstscheibe in das
Vakuumsystem installiert werden, um eine Explosionsgefahr aufgrund von steigendem Systemdruck zu vermeiden.
Verunreinigungen im Gerät vermeiden!
Stellen Sie sicher, dass Verunreinigungen jeglicher Art weder vor dem Einsatz noch während des Betriebs in das
Instrumenteninnere gelangen können. Staub- und Schmutzpartikel, Glassplitter oder Metallspäne können das Gerät
dauerhaft beschädigen oder Prozess- und Messwerte verfälschen.
Bei Geräten mit Temperaturkontrolle korrekte Anwärmzeit einhalten!
Temperaturkontrollierte Geräte arbeiten nur dann gemäß ihrer Spezifikation, wenn genügend Zeit zum Erreichen und
Stabilisieren der Betriebstemperatur eingeräumt wird. Kalibrierungen und Nulleinstellungen sollten daher nur nach
Abschluss des Anwärmvorgangs durchgeführt werden.
4
Informations de sécurité pour appareils de mesure/contrôle de débit massique
p
Informations de sécurité pour appareils de mesure/contrôle de débit
massique
Symboles utilisés dans ce manuel d'utilisation
Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel.
Avertissement
Attention
L'indication AVERTISSEMENT signale un danger pour le personnel. Elle
attire l'attention sur une procédure, une pratique, une condition, ou toute
autre situation présentant un risque d'accident pour le personnel, en cas
d'exécution incorrecte ou de non-respect des consignes.
L'indication ATTENTION signale un danger pour l'appareil. Elle attire
l'attention sur une procédure d'exploitation, une pratique, ou toute autre
situation, présentant un risque de dégât ou de destruction partielle ou totale
du produit, en cas d'exécution incorrecte ou de non-respect des consignes.
Remarque
L'indication REMARQUE signale une information importante. Elle attire
l'attention sur une procédure, une pratique, une condition, ou toute autre situation,
résentant un intérêt particulier.
Symboles figurant sur l'unité
Le tableau suivant décrit les symboles pouvant apparaître sur l'unité.
Tableau 3: Définition des symboles sur l'unité
|
Marche (sous tension)
IEC 417, No.5007
Arrêt (hors tension)
IEC 417, No.5008
Terre (masse)
IEC 417, No.5017
Terre de protection (masse)
IEC 417, No.5019
Masse
IEC 417, No.5020
Courant continu et alternatif
IEC 417, No.5033-a
Attention : se reporter
à la documentation
ISO 3864, No.B.3.1
Equipotentialité
IEC 417, No.5021
Matériel de classe II
IEC 417, No.5172-a
Courant continu
IEC 417, No.5031
Courant alternatif
IEC 417, No.5032
Courant alternatif triphasé
IEC 617-2, No.020206
Attention : risque de
choc électrique
ISO 3864, No.B.3.6
Attention : surface brûlante
IEC 417, No.5041
5
Informations de sécurité pour appareils de mesure/contrôle de débit massique
Mesures de sécurité et précautions
Observer les précautions générales de sécurité suivantes pendant toutes les phases d'exploitation de cet
appareil. Le non-respect des ces précautions ou des avertissements du manuel constitue une violation
des normes de sécurité relatives à l'utilisation de l'appareil et peut compromettre la protection assurée
par l'appareil. MKS Instruments, Inc. rejette toute responsabilité en cas de non-respect des consignes
par les clients.
PAS DE REMPLACEMENT DE PIÈCES OU DE MODIFICATION DE L'APPAREIL
Ne pas installer de pièces de remplacement ni effectuer des modifications non autorisées sur l'appareil. Renvoyer
l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des
dispositifs de sécurité.
DÉPANNAGE UNIQUEMENT PAR DU PERSONNEL QUALIFIÉ
Le personnel d'exploitation ne doit pas essayer de sortir les composants du boîtier ou faire des réglages internes. Le
dépannage est réservé au personnel qualifié.
ÉLOIGNEMENT DES CIRCUITS SOUS-TENSION
Ne pas remplacer de composants lorsqu’un câble d’alimentation est branché. Dans certaines conditions, des tensions
dangereuses peuvent être présentes même après le retrait du câble d’alimentation. Pour éliminer tout risque de blessure,
procéder toujours à la déconnexion et décharger les circuits avant tout contact physique.
PRÉCAUTION EN CAS D'UTILISATION AVEC DES PRODUITS DANGEREUX
Si des produits dangereux sont utilisés, l'utilisateur est responsable du respect des mesures de sécurité appropriées, de la
purge complète de l'appareil quand elle s’avère nécessaire, et doit s’assurer que les produits utilisés sont compatibles
avec les matériaux d'étanchéité.
PURGE DE L'APPAREIL
Après l'installation de l'unité, ou avant son retrait d'un système, purger l'unité complètement avec un gaz propre et sec
afin d'éliminer toute trace du produit de flux utilisé précédemment.
UTILISATION DES PROCÉDURES APPROPRIÉES POUR LA PURGE
Cet appareil doit être purgé sous une hotte de ventilation. Le personnel doit porter des gants de protection.
PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF
Pour éviter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf en cas d'homologation
spécifique pour une telle exploitation.
UTILISATION D'ÉQUIPEMENTS ET PROCÉDURES DE SERRAGE APPROPRIÉS
Tous les équipements de l'appareil doivent être conformes à ses spécifications, et compatibles avec l'utilisation prévue de
l'appareil. Assembler et serrer les équipements conformément aux directives du fabricant.
VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS
Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation.
EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES
Ne jamais utiliser des pressions supérieures à la pression nominale maximum (se reporter aux spécifications de l'unité
pour la pression maximum admissible).
INSTALLATION D'UN DISQUE D'ÉCHAPPEMENT ADAPTÉ
En cas d'exploitation avec une source de gaz pressurisé, installer un disque d'échappement adapté dans le système à vide,
afin d'éviter une explosion du système en cas d'augmentation de la pression.
MAINTIEN DE L'UNITÉ À L'ABRI DES CONTAMINATIONS
Ne pas laisser des produits contaminants pénétrer dans l'unité avant ou pendant l'utilisation. Des produits contaminants
tels que des poussières et des fragments de tissu, de verre et de métal peuvent endommager l'unité de manière
permanente.
RESPECT DU TEMPS D'ÉCHAUFFEMENT APPROPRIÉ POUR LES UNITÉS Á RÉGULATION DE TEMPÉRATURE
Les unités à régulation de température sont conformes à leurs spécifications uniquement quand on leur laisse un temps
suffisant pour atteindre d'une manière stable la température d'exploitation. Ne pas remettre à zéro ou calibrer l'unité tant
que l'échauffement n'est pas terminé.
6
Medidas de seguridad del dispositivo de flujo de masa
Medidas de seguridad del dispositivo de flujo de masa
Símbolos usados en este manual de instrucciones
Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual.
Advertencia
Precaución
El símbolo de advertencia indica la posibilidad de que se produzcan daños
personales. Pone de relieve un procedimiento, prá ctica, estado, etc. qu e en caso
de no realizarse o cumplirse correctam ente puede causa r daños person ales.
El símbolo de precaución indica la posibilidad de producir daños al equipo.
Pone de relieve un procedimiento operativo, práctica, etc. que en caso de no
realizarse o cumplirse correctamente puede causar daños o la destrucción total
o parcial del equipo.
Nota
El símbolo de notas indica información de importancia. Este símbolo pone de relieve
un procedimiento, práctica o condición cuyo conocimiento es esencial destacar.
Símbolos hallados en la unidad
La tabla siguiente contiene los símbolos que puede hallar en la unidad.
Tabla 4: Definición de los símbolos hallados en la unidad
|
Encendido
(alimentación eléctrica)
IEC 417, N° 5007
(alimentación eléctrica)
IEC 417, N° 5008
Apagado
Puesta a tierra
IEC 417, N° 5017
Protección a tierra
IEC 417, N° 5019
Caja o chasis
IEC 417, N° 5020
Corriente continua y alterna
IEC 417, N° 5033-a
Precaución. Consulte los documentos
adjuntos
ISO 3864, N° B.3.1
Equipotencialidad
IEC 417, N° 5021
IEC 417, N° 5172-a
Riesgo de descarga eléctrica
ISO 3864, N° B.3.6
Corriente continua
IEC 417, N° 5031
Equipo de clase II
Precaución.
Corriente alterna
IEC 417, N° 5032
Corriente alterna trifásica
IEC 617-2, N° 020206
Precaución. Superficie caliente
IEC 417, N° 5041
7
Medidas de seguridad del dispositivo de flujo de masa
Procedimientos y precauciones de seguridad
Las medidas generales de seguridad descritas a continuación deben observarse durante todas las etapas
de funcionamiento del instrumento. La fMFC de cumplimiento de dichas medidas de seguridad o de las
advertencias específicas a las que se hace referencia en otras partes de este manual, constituye una
violación de las normas de seguridad establecidas para el uso previsto del instrumento y podría anular
la protección proporcionada por el equipo. Si el cliente no cumple dichas precauciones y advertencias,
MKS Instruments, Inc. no asume responsabilidad legal alguna.
NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE EL INSTRUMENTO
No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto
funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS
toda vez que sea necesario repararlo o efectuar tareas de mantenimiento.
LAS REPARACIONES DEBEN SER EFECTUADAS ÚNICAMENTE POR TÉCNICOS AUTORIZADOS
Los operarios no deben retirar las tapas del instrumento. El reemplazo de los componentes y las tareas de ajuste deben
ser realizadas únicamente por personal autorizado.
MANTÉNGASE ALEJADO DE LOS CIRCUITOS ACTIVOS
No reemplace componentes con el cable de alimentación eléctrica conectado. En algunos casos, puede haber presente
alto voltaje aun con el cable de alimentación eléctrica desconectado. Para evitar lesiones personales, desconecte siempre
el cable y descargue los circuitos antes de entrar en contacto con los mismos.
TENGA CUIDADO CUANDO TRABAJE CON MATERIALES TÓXICOS
Cuando se utilicen materiales tóxicos, es responsabilidad de los operarios tomar las medidas de seguridad
correspondientes, purgar totalmente el instrumento cuando sea necesario y comprobar que el material utilizado sea
compatible con los materiales de sellado.
PURGUE EL INSTRUMENTO
Una vez instalada la unidad o antes de retirarla del sistema, purgue completamente la unidad con gas limpio y seco para
eliminar todo resto de la sustancia líquida empleada anteriormente.
USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA
El instrumento debe purgarse debajo de una campana de ventilación y deben utilizarse guantes protectores.
NO HAGA FUNCIONAR EL INSTRUMENTO EN AMBIENTES CON RIESGO DE EXPLOSIÓN
Para evitar que se produzcan explosiones, no haga funcionar este instrumento en un ambiente con riesgo de explosiones,
excepto cuando el mismo haya sido certificado específicamente para tal uso.
USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE
Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se
debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.
COMPRUEBE QUE LOS ACCESORIOS SEAN A PRUEBA DE FUGAS
Antes de proceder con la instalación del instrumento, inspeccione cuidadosamente todas las conexiones de las tuberías
para comprobar que hayan sido instaladas a prueba de fugas.
HAGA FUNCIONAR EL INSTRUMENTO CON PRESIONES DE ENTRADA SEGURAS
No haga funcionar nunca el instrumento con presiones superiores a la máxima presión nominal (en las especificaciones
del instrumento hallará la presión máxima permitida).
INSTALE UNA CÁPSULA DE SEGURIDAD ADECUADA
Cuando el instrumento funcione con una fuente de gas presurizado, instale una cápsula de seguridad adecuada en el
sistema de vacío para evitar que se produzcan explosiones cuando suba la presión del sistema.
8
Medidas de seguridad del dispositivo de flujo de masa
MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES
No permita el ingreso de contaminantes en la unidad antes o durante su uso. Los productos contaminantes tales como
polvo, suciedad, pelusa, lascas de vidrio o virutas de metal pueden dañar irreparablemente la unidad.
CALIENTE ADECUADAMENTE LAS UNIDADES CONTROLADAS POR MEDIO DE TEMPERATURA
Las unidades controladas por medio de temperatura funcionarán de acuerdo con las especificaciones sólo cuando se las
caliente durante el tiempo suficiente para permitir que lleguen y se estabilicen a la temperatura de operación indicada.
No calibre la unidad y no la ponga en cero hasta que finalice el procedimiento de calentamiento.
9
マスフロー機器の安全に関する情報
マスフロー機器の安全に関する情報
本取扱説明書のマーク
本マニュアルでは警告、注意、ポイントのマークを⽤いて重要な事項を記載しています。
警告 この表⽰を無視して誤った取り扱い (⼿順や使⽤⽅法、条件など) をすると、⼈が重傷
注意
ポイント この表⽰は⼿順や使⽤⽅法、条件などに関する重要な情報が記載されていることを⽰
を負う可能性が想定される内容を⽰しています。必ずお読みください。
この表⽰を無視して誤った取り扱い (⼿順や使⽤⽅法など) をすると、 製品が損傷する
可能性が想定される内容を⽰しています。必ずお読みください。
しています。必ずお読みください。
本機器のマーク
以下の表では、本機器に使⽤されているマークについて説明いたします。
表 5: 本機器に使⽤されているマークについて
|
オン (電源)
IEC 417, No. 5007
オフ (電源)
IEC 417, No. 5008
接地 (アース)
IEC 417, No. 5017
保護接地 (アース)
IEC 417, No. 5019
フレームまたはシャーシ
IEC 417, No. 5020
直流と交流
IEC 417, No. 5033-a
注意 (付属書を参照)
ISO 3864, No. B.3.1
等電位
IEC 417, No. 5021
IEC 417, No. 5172-a
注意 (感電の危険あり)
ISO 3864, No. B.3.6
クラス 2 機器
11
直流
IEC 417, No. 5031
交流
IEC 417, No. 5032
三相交流
IEC 617-2, No. 020206
注意 (表⾯が熱くなっています)
IEC 417, No. 5041
マスフロー機器の安全に関する情報
12
マスフロー機器の安全に関する情報
安全対策について
本機器を使⽤する際は、必ず以下の安全対策を守ってください。これらの安全対策や本マニュアルの
警告を無視すると、機器本来の⽤途の安全基準を侵害することになり、機器が提供する保護機能が
損なわれる可能性があります。MKS Instruments, Inc. は、顧客側の安全対策の不履⾏に対して
は⼀切責任を負いかねます。
勝⼿に部品を変えたり、本体を改造しないこと
本機器に代⽤部品を使⽤したり、不正な改造を加えないでください。すべての安全システムを正しく機能させるた
めの修理やメンテナンスが必要な場合は、本機器を MKS Calibration and Service Center まで戻してください。
修理は必ず専⾨の修理サービスを利⽤すること
オペレータは絶対に本機器を分解しないでください。部品の交換や内部の調整は必ず専⾨の修理サービスを利
⽤してください。
電流が通じている回路から切断すること
電源ケーブルを接続したままで部品を交換しないでください。特定の状況では、電源ケーブルを取り外した状態
でも危険な電圧が残っている場合があります。感電などの事故を防ぐため、回路に触れる前に必ず電源から切
断し、放電してください。
危険な材料を使⽤する場合は慎重に機器を使⽤すること
危険な材料を使⽤する場合は、使⽤者は各⾃の責任の元で適切な安全対策を講じてください。必要に応じて
本機器を浄化してください。また、使⽤する材料に対するシーリング材の耐久性を確認してください。
機器を浄化すること
本機器を取り付けた後やシステムから取り外す前に、きれいな乾燥ガスで本機器を浄化し、使⽤した材料を完
全に取り除いてください。
浄化する場合は適切な⼿順で⾏うこと
本機器の浄化は換気フードの下で⾏う必要があります。また、浄化作業を⾏う⼈は必ず⼿袋を着⽤してください。
爆発の危険性のある環境で機器を使⽤しないこと
爆発が起きるのを防ぐため、本機器を爆発の危険性のある環境で使⽤しないでください。ただし、そのような環境
での使⽤が特別に保証されている場合は除きます。
適切な⾦具類を使⽤し、⼿順に従って⾦具の締めを⾏うこと
⾦具類は本機器の仕様と⼀致し、機器本来の⽤途に適合したものである必要があります。⾦具類の取り付け
や締めは、製造業者の指⽰に従ってください。
液体の漏れがないよう接続箇所を確認すること
本機器を設定する前に、すべての配管の接続を慎重に確認し、液体が漏れないようにしてください。
13
マスフロー機器の安全に関する情報
安全なインレット圧⼒で使⽤すること
定格の最⼤圧⼒を超える圧⼒の下で本機器を絶対に使⽤しないでください (最⼤許容圧⼒については仕様書
を参照)。
適切なバーストディスクを取り付けること
圧⼒のかかったガスを使⽤する場合は、万⼀システムが爆発した場合にシステムの圧⼒が上昇するのを防ぐため、
真空システムに適切なバーストディスクを取り付けてください。
本機器に異物やゴミが混⼊しないようにすること
本機器の使⽤前または使⽤中に、ほこりやゴミ、繊維、ガラスの破⽚、⾦属⽚などの異物やゴミが混⼊しないよ
うにしてください。本機器が損傷する可能性があります。
温度調整された機器を⼗分に温めてから使⽤すること
温度調整された機器が適切な作動温度にならないうちに使⽤すると、仕様通りの動作をしないことがあります。
本機器が⼗分に温まるまでは⽬盛りをゼロに合わせたり、較正しないでください。
14
질량 유량 장치 안전 정보
질량 유량 장치 안전 정보
본 지침 매뉴얼에 사용되는 기호들
매뉴얼 전체에 사용되는 경고, 주의 및 참고 메시지의 정의.
경고
주의
참고
경고 표시는 위험을 나타냅니다. 이 표시는 올바르게 수행되거나 지켜지지 않을
경우, 사람에게 상해를 입힐 수 있는 절차, 수행지침, 상태 또는 이와 유사한
상황들에 대한 주의를 환기시킵니다.
주의 표시는 위험을 나타냅니다. 이 표시는 올바르게 수행되거나 지켜지지 않을
경우, 제품의 일부나 전체에 손상이나 파손을 일으킬 수 있는 절차, 수행지침 또는
이와 유사한 상황들에 대한 주의를 환기시킵니다.
참고 표시는 중요한 정보를 나타냅니다. 이 표시는 강조할 만한 주요 절차,
수행지침, 상태 또는 이와 유사한 상황들에 대한 주의를 환기시킵니다.
장치에 표시된 기호들
다음 표는 장치에서 볼 수 있는 기호들을 설명합니다.
켬 (전원)
IEC 417, No. 5007
프레임 또는 섀시
IEC 417, No. 5020
IEC 417, No. 5033-a
주의 (동봉 문서 참조)
ISO 3864, No. B.3.1
표 6: 장치에 표시된 기호들의 정의
|
IEC 417, No. 5008
끔 (전원)
등전위성
IEC 417, No. 5021
직류와 교류 모두
클래스 II 장비
IEC 417, No. 5172-a
주의, 감전 위험
ISO 3864, No. B.3.6
접지(지면)
IEC 417, No. 5017
직류
IEC 417, No. 5031
보호 접지(지면)
IEC 417, No. 5019
교류
IEC 417, No. 5032
3상 교류
IEC 617-2, No. 020206
주의, 표면이 뜨거움
IEC 417, No. 5041
15
질량 유량 장치 안전 정보
안전 절차 및 예방조치
본 기계의 모든 작동 시에 다음의 일반 안전 예방조치를 준수하십시오. 아래 예방조치를
준수하지 않거나 본 매뉴얼의 다른 부분에 있는 특정 경고를 준수하지 않을 경우, 기계
사용 목적의 안전 기준을 위반하는 것이 되며, 장비가 제공하는 보호기능을 손상시킬 수
있습니다. MKS Instruments, Inc.는 고객이 본 요건을 준수하지 않는 경우에 대해서는
어떠한 책임도 지지 않습니다.
부품을 교체하거나 기계를 개조하지 마십시오
교체 부품을 설치하거나 기계에 허가되지 않은 어떠한 수정도 가하지 마십시오. 서비스와 수리가
필요한 경우에는 모든 안전 특성이 유지되도록 기계를 MKS 보정 서비스 센터(MKS Calibration and
Service Center)로 보내주십시오.
자격이 있는 사람에게만 서비스를 받으십시오
작동하는 사람은 기계 겉면을 제거해서는 안됩니다. 부품 교체 및 내부 조정은 자격이 있는 서비스
기사에게만 받으실 수 있습니다.
전류가 통하는 회로에서 분리해 보관하십시오
전원 케이블을 연결한 채로 부품을 교체하지 마십시오. 일부 환경에서는 전원 케이블을 제거한
상태라도 위험 전압이 존재할 수 있습니다. 부상을 방지하려면, 전원을 항상 분리하고 회로를
만지기 전에 회로를 방전시키십시오.
위험한 물질과 함께 작동할 때는 주의를 기울이십시오
위험한 물질이 사용되는 경우, 사용자는 필요시 기계를 완전히 청소하여, 적절한 안전 예방조치를
준수할 책임을 지키고, 사용된 물질이 봉인 물질과 함께 사용해도 무방하다고 보증할 수 있어야
합니다.
기계를 청소하십시오
장치를 설치한 후나 시스템에서 장치를 제거하기 전에는 반드시 깨끗한 건조성 기체로 장치를
완전히 청소하여 이전에 사용된 유량 물질의 모든 흔적을 제거하십시오.
청소 시에는 적절한 절차를 사용하십시오
본 기계는 환기 후드 아래에서 청소되어야 하며, 인체 보호를 위해 장갑을 착용해야 합니다.
폭발성 환경에서 작동하지 마십시오
폭발을 방지하려면, 폭발성 환경에서 작동하도록 특별히 승인받지 않은 경우 본 제품을 폭발성
환경에서 작동하지 마십시오.
적절한 조립부품과 조임 절차를 사용하십시오
모든 기계 조립부품은 제품 사양과 일치해야 하고, 기계의 사용 목적에 부합해야 합니다.
제조업체의 지시에 따라 조립부품을 조립하고 조이십시오.
누출방지 조립부품을 점검하십시오
16
질량 유량 장치 안전 정보
기계 설치를 진행하기 전에 기계의 모든 연관 연결부를 점검해 누출방지 설치가 되었는지
확인하십시오.
안전한 흡입 압력에서 작동하십시오
이 장치는 절대 정격 최대 압력보다 높은 압력에서 작동해서는 안됩니다(최대 허용 압력에
대해서는 제품 사양을 참조하십시오).
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질량 유량 장치 안전 정보
적합한 안전 파열판을 설치하십시오
가압 가스 공급원에서 작동시, 시스템 폭발이 시스템 압력 상승을 일으키는 것을 방지하기 위해
적합한 안전 파열판이 진공 시스템에 설치되어야 합니다.
장치를 오염이 없는 곳에 보관하십시오
장치를 사용하기 전이나 사용 중에는 어떠한 종류의 오염 물질도 허용해서는 안됩니다. 먼지, 때,
보풀, 유리 조각, 금속 조각과 같은 오염 물질은 영구적으로 장치를 손상시킬 수 있습니다.
온도 제어 장치의 경우 알맞은 시동 시간을 두십시오
온도 제어 장치는 장치가 설계 작동 온도와 일치하고 이 온도에서 안정화될 수 있도록 충분한
시간을 허용해야만 사양에 맞게 작동합니다. 시동이 완료될 때까지 장치를 영점 설정하거나
보정하지 마십시오.
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Introduction Chapter One: General Information
Chapter One: General Information
Introduction
MKS Instruments P9B MFC represents state-of-the-art technology meeting the advanced process
requirements of next generation toolsets. This device integrates thermal flow and pressure sensor technologies
together with MKS real-time feedback control system providing typical flow control response times of about
750 milliseconds with either a normally closed or normally open valve. Incorporation of pressure
measurement along with thermal flow measurement enables a device providing multi-gas, multi-range and
pressure insensitive capabilities.
The P9B MFC includes an integrated multifunctional local display and an embedded, web-based user
interface. The device is available with full scale flow ranges of 5 sccm to 50 slm (N2 equivalent) in standard
1.125” C-seal, W-seal surface mount or ¼” VCR form factors. Both digital and analog I/O are available
and selectable as an option
Design Features
Increases Throughput and Performance
Accurate flow control for both the calibration and the user selected gas.
Pressure insensitivity through real time pressure measurement and feedback.
Enables better chamber matching through increased MFC accuracy of any process gas.
Increases tool uptime through reduction of “No Problem Found” MFC replacements.
Includes embedded diagnostics software that allows users to check MFC functionality without
removing the MFC.
E-diagnostics through embedded Ethernet interface.
Reduce Overall Costs
Reduces MFC inventory through multi-gas, multi-range availability.
Minimizes overall footprint of gas delivery module.
Easy to Integrate and Operate
Straightforward configuration and diagnostics through Ethernet user interface which:
Uses standard web browser (e.g. IE8 or Firefox) – no special software required.
Includes remote PC application.
Easy viewing of flow rate, gas type, full scale and Ethernet address via its LED display.
This MFC’s design incorporates an advanced flow sensor, a pressure sensor, a control valve, and an
optimized bypass. The latest generation two-element sensing circuit provides accurate, repeatable
performance even in low flow ranges (< 10 sccm). A low temperature effect from ambient temperature
change and minimal attitude sensitivity effect are also ensured. Pressure measurement enables the device to
adjust dynamically to changing source pressure resulting form regulator settings and pressure transients.
Attitude sensitivity is completely accounted for with advanced attitude circuitry. The optimized sensor/bypass
arrangement minimizes the flow splitting error for gases with different properties, which dramatically
improves measurement accuracy when gases other than the calibration gas are used.
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Chapter One: General Information How This Manual is Organized
Control (I/O) Interfaces
The P9B MFCs are available with either analog or digital interface I/O which is specified by the user at time
of ordering.
Analog I/O is available via either a 9 pin D or 15 pin D. The 9 pin D option provides for setpoint I/O along
with a valve override function. The 15 pin D option provides for setpoint I/O, valve override and the ability
to control to an optional input. Analog I/O are covered in detail in this manual.
The digital control I/O may be via RS485 or DeviceNet. An overview of each along with connector, power
supply and switch information is included in this manual. Protocol specifics (profile) are included in separate
documentation.
Reliability
To provide excellent reliability, the design contains a low mechanical and electronic components count and
has successfully passed the following test:
STRIFE, including temperature cycling and vibration (sine and random tests)
EMC Directive 2004/108/EC for CE Mark compliance (with a metal braided, shielded cable, properly
grounded at both ends)
ODVA Compliance (DeviceNet version)
Cleanliness Features
The
P9B uses only metal for all external seals. The metal seals eliminate gas permeation and ensure
extremely low external leakage under pressure or vacuum conditions relative to atmosphere. The internal
valve control plug is Teflon which is chemically stable and not prone to out-gassing or particle generation.
MFC’s mechanical design incorporates minimal wetted surface area and volume as well as virtual leaks,
The
assuring rapid dry-down. To further enhance its cleanliness, internal surfaces are precision machined to a 10
microinch Ra surface finish that are electropolished. The instrument is assembled and double-packaged in a
Class 100 clean room environment.
How This Manual is Organized
Before installing the device in a system and/or operating it, carefully read and familiarize yourself with
all precautionary notes in the Mass Flow Device Safety Information section at the front of this manual.
In addition, observe and obey all
Chapter One: General Information introduces the product and describes the organization of the manual.
Chapter Two: Provides an overview on the use of Mass Flow Control
Chapter Three: Installation and Configuration
Chapter Four: Analog and Digital Interface
Chapter Five: Ethernet Interface Setup and Configuration
Chapter Six: Embedded Web-Based GUI and Diagnostics
WARNING and CAUTION notes provided throughout the manual.
Chapter Seven: Maintenance
Chapter Eight: Troubleshooting provides a reference should the instrument appears to malfunction.
Appendix A: Product Specifications lists the specifications of the instrument.
Appendix B : Model Code Explanation describes the model code.
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