S e r i e s
Reference Manual
Precision Piezo Stage
(Open and Closed Loop Versions)
PPS-28
PPS-28
Piezo Positioner Stage
Reference Manual
Rev 3.02
MICRONIX USA, LLC
15375 Barranca Parkway, E-106
Irvine, CA 92618
Tel: 949-480-0538
Fax: 949-480-0538
Email: info@micronixusa.com
http://micronixusa.com
PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
1
Reference Manual
Contents
1. Introduction 3
1.1 Product Description ................................................................................................................................................. 3
1.2 Recommended Controllers ...................................................................................................................................... 4
1.3 Technical Data ......................................................................................................................................................... 4
1.4 Load Characteristics ................................................................................................................................................ 4
2. Model configurations 5
2.1 PPS-28 Order Numbers ............................................................................................................................................ 5
3. Preparing to Install the PPS-28 6
3.1 Installation Preparation ........................................................................................................................................... 6
3.2 Package Contents .................................................................................................................................................... 6
4. Installing the PPS-28 7
4.1 PPS-28 Installation ................................................................................................................................................... 7
4.1.1 General Mounting ........................................................................................................................................... 7
4.1.2 X-Y Mounting ................................................................................................................................................... 7
5. Connecting the PPS-28 9
5.1 Atmospheric Environments ..................................................................................................................................... 9
5.1.1 Open Loop Installation & Wiring Diagram ....................................................................................................... 9
5.1.2 Closed Loop/Encoder Installation & Wiring Diagram ...................................................................................... 9
5.2 Vacuum Environments .......................................................................................................................................... 10
5.2.1 Handling and Preparation.............................................................................................................................. 10
5.2.2 Open loop Installation & Wiring Diagram ..................................................................................................... 10
5.2.3 Closed Loop/Encoder Installation & Wiring Diagram .................................................................................... 11
6. Dimensions 12
6.1 PPS-28 20mm with Digital Encoder ....................................................................................................................... 12
6.2 PPS-28 20mm with Analog Encoder ...................................................................................................................... 13
7. Stacking Configurations 13
7.1 Configuration Examples (Additional configurations available upon request)....................................................... 13
8. Supplementary Information 14
8.1 Maintenance .......................................................................................................................................................... 14
8.2 Units and Conventions .......................................................................................................................................... 14
A. Appendix 15
A.1 DB-9 Male Motor Connector ................................................................................................................................. 15
A.2 2 Phase Piezo Motor Wiring Diagram.................................................................................................................... 15
A.3 Open Loop Vacuum Wiring Diagram ..................................................................................................................... 16
PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
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Reference Manual
A.3.1 Straight Through 9-Pin Feed Through ........................................................................................................... 16
A.4 Using the Encoder Module .................................................................................................................................... 17
A.4.1 Encoder Module Pin-out .................................................................................. Error! Bookmark not defined.
A.4.2 Operating and Electrical Specifications ............................................................ Error! Bookmark not defined.
A.4.3 Output Signals & Signal Termination for A quad B, Index and limits ............................................................ 18
A.4.4 Resolution ...................................................................................................................................................... 18
A.4.5 Digital Encoder Wiring Diagram .................................................................................................................... 19
A.4.6 Straight Through 25-Pin Feed Through ......................................................................................................... 19
A.5 Using an Analog Encoder ....................................................................................................................................... 20
A.5.1 Analog Encoder Overview ............................................................................................................................. 20
A.5.2 Encoder Pin-out ............................................................................................................................................. 20
A.5.3 Operating and Electrical Specifications ......................................................................................................... 20
A.5.4 Analog Output (Pins 1,2,6, and 7).................................................................................................................. 20
A.5.5 Index Window (Pins 3) ................................................................................................................................... 20
A.5.6 Resolution ...................................................................................................................................................... 21
A.5.7 Analog Encoder Wiring Diagram ................................................................................................................... 21
A.5.8 Straight Through 15-Pin Feed Through ......................................................................................................... 21
PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
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Reference Manual
PPS-28 20mm Open Loop
Or Internal 10nm Encoder
(Shown in center position)
Base
PPS-28 20mm with external 2nm encoder
(Shown in center position)
PPS-28 20mm with external Analog encoder
(Shown in center position)
1. Introduction
1.1 Product Description
The PPS-28 is a high-precision, long travel linear piezo stage. Miniature cross-roller
bearings assure high stiffness and guiding accuracy for loads up to 50N
(Horizontal orientation). It utilizes our patent-pending multi-phase piezo motor
resulting in high speed (>2mm/s) and high blocking force (>2N). The PPS-28 is
available in travel lengths of up to 103mm, and an optional linear encoder
provides nanometer repeatability. Vacuum, Ultra High Vacuum (10-9 torr) and/or
Cryo (<4 Kelvin) compatible versions are available.
Features:
§ Travel ranges of 26mm, 35mm, 51mm, 76mm, and 102mm
§ Load capacity up to 5kg
§ Optional linear encoder
Carriage
Bearings
Scale Bracket
Encoder Head
Encoder Scale
Encoder Bracket
PPS-28 Piezo Positioner Stage
Rev: 3.02
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Reference Manual
1.2 Recommended Controllers
The following controllers are available from MICRONIX USA:
§ MMC-100
§ MMC-110
1.3 Technical Data
1.4 Load Characteristics
Load Characteristics
Fx(N)
Fy(N)
Fz(N)
Mx(Nm)
My(Nm)
Mz(Nm)
PM-002
2
50
50
0.7
0.7
0.7
Motor
PM-002
Speed Max. (mm/sec)
2 (MMC-100), 10 (MMC-110)
Resolution Typical (nm)
<1 (open loop), 2 (digital encoder),
10 (analog encoder)
Bi-directional Repeatability (nm)
N/A (open loop), ± 20 (digital encoder),
±50 (analog encoder)
Uni-directional Repeatability (nm)
N/A (open loop), 20 (digital encoder),
50 (analog encoder
Accuracy (µm)
+/- 3 (+/- 1 on request)
PPS-28 Piezo Positioner Stage
Rev: 3.02
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Irvine, California
www.micronixsusa.com
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Reference Manual
2. Model configurations
2.1 PPS-28 Order Numbers
Contact MICRONIX USA for custom applications and stacking configurations.
Order No. PPS-28-
1
0
Piezo Motor PM-002 1
26mm Travel 1
51mm Travel 3
76mm Travel 4
102mm Travel 5
Open Loop 0
Analog (1Vpp), 10nm 2
Digital, 2nm 3
No Limit Switch 0
Non-vacuum 0
Vacuum prepared, 10-6 mbar 6
Vacuum prepared, 10-9 mbar 9
PPS-28 Piezo Positioner Stage
Rev: 3.02
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Irvine, California
www.micronixsusa.com
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Reference Manual
3. Preparing to Install the PPS-28
3.1 Installation Preparation
When mounting the stage it is important to consider the flatness of the mounting
surface, as the stage will conform to the shape of that mounting surface. A
surface that is not flat can adversely affect the performance and structural
integrity of the stage.
The stage is calibrated and guaranteed to be within specification at 20°C ±5°C
unless otherwise specified. Be sure to use the stage under the following
conditions:
§ Mount to a clean and flat surface which is free of debris, burrs or dings
§ An indoor atmosphere free of corrosive gasses, and condensation
§ Temperature range of 0-40°C
§ Relative humidity between 20-80%
§ Locate away from water, heat, and electrical noise
3.2 Package Contents
If product is damaged or there are missing components, contact MICRONIX USA
immediately. Do not discard product packaging in case of return shipment.
Package Should Contain:
§ PPS-28 Linear Stage
§ Reference Manual
§ Any other previously agreed upon components such as a controller
PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
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Reference Manual
4. Installing the PPS-28
All mounting patterns require M2.5 screws for mounting and M1.5 x 5mm dowel pins for
precision alignment. Additional brackets and screws may be needed for custom
applications.
4.1 PPS-28 Installation
4.1.1 General Mounting
For general mounting configurations, mount the base to the mounting surface.
Align carriage with clearance holes to access base mounting pattern. (Please
note, it is possible to move the carriage manually without damaging the stage)
Travel
A
B
26mm
45
40
51mm
90
50
76mm
120
80
102mm
150
80
Requires:
2x M1.5 x 5mm Dowel Pins
2x M2.5 x 5mm Socket Head Cap Screws
(optional) 2x M2 x 5mm Socket Head Cap
Screw for ear mounts
1. Align Carriage with Clearance
Hole. Install Dowel Pins and M2
Socket Head Cap Screw
2. Align carriage with
remaining clearance hole
and install second M2 Socket
Head Cap Screw
Customer Supplied
Base Plate or
Mounting Surface
Direction
of Travel
Clearance
Hole
PPS-28 Piezo Positioner Stage
Rev: 3.02
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Irvine, California
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Reference Manual
4.1.2 X-Y Mounting
For additional mounting configurations see section 8. Stacking Configurations
(Please note, it is possible to move the carriage manually without damaging the
stage)
Note: For stages assembled in an XY configuration in factory do not require disassembly
for base mounting
Travel
A
B
26mm
45
37
51mm
90
82
76mm
120
112
102mm
150
142
Direction
of Travel
Requires:
4x M1.5 x 4mm Dowel Pins
4X M2.5 Button Head Screws
2x M2 x 4mm Socket Head Screws
1. Align Carriage with
remaining clearance
holes and install
second M2 Socket
Head Cap Screw
Y-Axis Stage
2. Align X-Axis Stage
Carriage with Clearance
Holes. Install Dowel Pins
and M2 Socket Head Cap
Screw
PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
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Reference Manual
5. Connecting the PPS-28
5.1 Atmospheric Environments
For controller information refer to the appropriate MMC controller manual.
5.1.1 Open Loop Installation & Wiring Diagram
Connecting the PPS-28 in an open loop configuration only requires that the Dsub 9 Pin Motor Cable be connected to a compatible controller. No other
cables or components are needed.
5.1.2 Closed Loop/Encoder Installation & Wiring Diagram
Using the PPS-28 stage with an encoder requires a closed loop compatible
controller (MMC-100 or MMC-110) that recognizes encoder feedback. Connect
the stage as shown below.
5.1.2.1 Analog Encoder Wiring Diagram
PPS-28 Piezo Positioner Stage
Rev: 3.02
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Irvine, California
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Reference Manual
5.1.2.2 Digital Encoder Wiring Diagram
For a PPS-28 with a digital encoder, connect the stage as shown below
using the supplied 15 to 9 pin cable to connect the Encoder Module to
the Controller.
5.2 Vacuum Environments
5.2.1 Handling and Preparation
When preparing the stage for vacuum environments, take the necessary
precautions (such as wearing gloves, clean room clothing, etc.) when handling
the stage as to avoid any contaminants. Maximum Bake-out temperature is
100°C. MICRONIX USA supplies the stage with vacuum compatible connectors:
9-pin female PEEK connectors for open loop, 15-Pin female PEEK connector for
closed loop with analog encoder, 25-pin female PEEK connector for closed loop
with digital encoder.
5.2.2 Open loop Installation & Wiring Diagram
Connecting an open loop PPS-28 in a vacuum chamber requires the use of a
feed through connector at the vacuum chamber wall. The vacuum compatible
PPS-28 will be supplied with wiring for a straight through feed through not a cross
over gender changer. MICRONIX USA supplies test connectors that simulate the
vacuum feed through to allow functionality test prior to installation in a vacuum
chamber. For details regarding the pin-out and feed through specifications see
the Appendix A.3
PPS-28 Shown with 2nm
External Encoder
PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
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Reference Manual
5.2.3 Closed Loop/Encoder Installation & Wiring Diagram
Closed loop installation of the PPS-28 stage in vacuum environments requires an
intermediate feed through connector at the vacuum chamber wall that can
accommodate both the motor cable, and the encoder cable.
The vacuum compatible PPS-28 will be supplied with wiring for a straight through
feed through not a cross over gender bender. MICRONIX USA supplies test
connectors that simulate the vacuum feed through to allow functionality test
prior to installation in a vacuum chamber. For details regarding the pin-out and
feed through specifications see the Appendix A.4.5, A.5.5.
5.2.3.1 Analog Encoder Wiring Diagram
PPS-28 Piezo Positioner Stage
Rev: 3.02
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Irvine, California
www.micronixsusa.com
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Reference Manual
5.2.3.2 Digital Encoder Wiring Diagram
6. Dimensions
6.1 PPS-28 20mm with Digital Encoder.
L
Travel
A
B
C
45
26mm
37
1
40
90
51mm
82
5
50
120
76mm
112
7
80
150
102mm
142
9
80
* Grey parts for external closed loop
only
PPS-28 Piezo Positioner Stage
Rev: 3.02
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Irvine, California
www.micronixsusa.com
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Reference Manual
6.2 PPS-28 20mm with Analog Encoder
7. Stacking Configurations
7.1 Configuration Examples (Additional configurations available upon request)
L
Travel
A
B
C
45
26mm
37
1
40
90
51mm
82
5
50
120
76mm
112
7
80
150
102mm
142
9
80
Using Adapter Plate (P/N: 430517)
X-Y
PPS-28, PPS-20
PPS-28 & PR-32
PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
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Reference Manual
8. Supplementary Information
8.1 Maintenance
§ The PPS-28 series of Linear Piezo stages utilizes a maintenance free design. Do
not modify the stage or perform any maintenance unless specifically instructed
to do so by MICRONIX USA personal. If the stage is not performing up to the
original specifications, please contact MICRONIX USA.
§ The PPS-28 Linear Piezo stage is a precision mechanical device and should be
handled with care. Do not drop or mishandle the stage.
§ Do not touch the bearings, as this will contaminate the lubrication and
jeopardize the longevity of the stage.
§ Follow the Installation Preparation requirements and use proper cable
management to ensure a clean and safe operating environment.
8.2 Units and Conventions
All measurements in this document are in the metric system of units.
Metric Unit
English Unit
1 millimeter
0.0394 inches
1 micron
0.0000394 inches
1 Newton
0.2248 lbs
1 Newton-meter
8.85 in-lbs
PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
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Reference Manual
A. Appendix
A.1 DB-9 Male Motor Connector
A.2 2 Phase Piezo Motor Wiring Diagram
Pin
Description
Color
1
Phase 1
Red
2
Phase 2
Yellow
3
N/C
N/C
4
Not In Use
N/C
5
Ground
Black& Green
6
+5V
N/C
7
+5V
N/C
8
Not In Use
N/C
9
Not in Use
N/C
PPS-28 Piezo Positioner Stage
Rev: 3.02
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Irvine, California
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Reference Manual
A.3 Open Loop Vacuum Wiring Diagram
A.3.1 Straight Through 9-Pin Feed Through
PPS-28 Piezo Positioner Stage
Rev: 3.02
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Irvine, California
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Reference Manual
A.4 26BUsing the Digital Encoder
Module
When using the digital external
encoder configuration, the Encoder
Module should display two green LED’s
indicating a power source and proper
encoder alignment. A Red or Yellow
Signal Level LED indicates misalignment
of the Encoder Head, if this occurs
contact MICRONIX USA. Do not adjust
the Encoder Head or scale. For more
information refer to MicroE Systems
Mercury Encoders.
A.4.1
36BEncoder Module Pin-out
*-Limits must be specified at the time of order, and
calibrated at the factory.
Note: Tri-state alarm: A and B are tri-stated if the encoder
signal becomes too low for reliable operation.
Pin
Description
Pin
Description
1
*Right Limit+
9
Ground
2
Ground
10
*Left Limit+
3
*Right Limit-
11
*Left Limit-
4
Index-
12
Index+
5
B-
13
B+
6
A-
14
A+
7
+5V
15
(not used)
8
+5V
PPS-28 Piezo Positioner Stage
Rev: 3.02
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Reference Manual
A.4.2 Operating and Electrical Specifications
A.4.3 Output Signals & Signal Termination for A quad B, Index and limits
*Output signals are differential. Inverse signals are not shown for clarity.
**Note: At some interpolations values the index pulse may be aligned with other states of A or B
than the ones shown.
***Above are with reference to the sensor’s optical centerline
A.4.4 Resolution
All closed loop stages are supplied with 20µm scales. The digital encoder
module interpolates to a higher resolution as specified in the order. With a
digital encoder the MMC-100 has an achievable resolution of 2nm.
Power Supply
5VDC ±5% @ 140mA (No outputs terminated)
@ 180mA (A, B, I, and both limits
terminated); 50mA at the sensor
Operating Temperature
0 to 70°C
Humidity
10 - 90% RH non-condensing
PPS-28 Piezo Positioner Stage
Rev: 3.02
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
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Reference Manual
A.4.5 Digital Encoder Wiring Diagram
A.4.6 Straight Through 25-Pin Feed Through
A
C
D
E
B
J1
J2 J3
J4
J5
J6
J7
J8
Cable Descriptions:
A. PPS-28 Motor Cable - Vacuum Side (Female Dsub 25 Pin Peek Connector, 1.5m)
B. PPS-28 Encoder Cable - Vacuum Side (Female Dsub 25 Pin Peek Connect or, 1.5m)
C. Encoder Module Breakout Cable (Female Dsub 25 Pin to MII 6000 Interpolator Module, 1m)
D. M otor Breakout Cable (Female Dsub 25 Pin to Male Ds ub 9 Pin, 1.5m)
E. Encoder Module Adapter Cable (Female Dsub 15 Pin to Female Dsub 9 Pin, .5m)
Descr iption: Color J1 J2 J3 Color J4 J8
Phase 1 Red 1 1 13 Red 13 1
Phase 2 Yellow 2 2 12 W hit e ( Green TP) 12 2
Ground Black/Green 14 14 25 Black/Green 25 5
Shield - 15 15 24 - 24 Casi ng
+ 5VDC Red 4 4 10 Red 10
GND Black 17 17 22 B lack 22
DCLK - Gray 5 5 9 Gray 9
DCLK + W hit e ( Gray TP) 18 18 21 W hi t e (Gray TP) 21
M ISO - Violet 6 6 8 Violet 8
M ISO + W hi t e (Violet TP) 19 19 20 W hit e (Violet TP) 20
M OSI - Blue 7 7 7 Blue 7
M OSI + W hi t e (Blue TP) 20 20 19 W hit e (Blue TP) 19
nSS - Green 8 8 6 Green 6
nSS + W hi t e (Green TP) 21 21 18 W hit e ( Green TP) 18
CLK - B rown 9 9 5 B rown 5
CLK + W hi t e (B rown TP) 22 22 17 W h it e ( Brow n TP) 17
Shield - 16 16 23 -
NC
Phas
Phas
Grou
Female PEEK Dsub25 Connector - Rear View
131211109
25242322
87654
2120191817161514
321
Wiring Diagram:
Descr iption: J5 Color J6 J8
I ndex - 4 W hit e (P urple TP) 4 8
B - 5 W hit e (Yell ow TP)5 7
A - 6 W hit e ( Brow n TP) 6 6
+ 5VDC 7 Red 7 5
Ground 2 Bl ack 2 4
I ndex + 12 P urple 12 3
B + 13 Yellow 13 2
A + 14 Brown 14
1
PPS-28 Piezo Positioner Stage
Rev: 3.02
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Irvine, California
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Reference Manual
A.5 Using an Analog Encoder
A.5.1 Analog Encoder Overview
A PPS-28 with Analog encoder will need to be paired with an appropriate controller.
The MMC-100 has an Analog option. The PPS-28 with internal Analog encoder will be
supplied with a 15 pin connector that incorporates both motor and encoder signals.
A.5.2 Encoder Pin-out
Pin
Description
1
A+/Cos+
2
B+/Sin+
3
Index +
4
Ground
5
+5V
6
A-/Cos-
7
B-/Sin-
8
Index -
9
Not In Use
A.5.3 Operating and Electrical Specifications
A.5.4 Analog Output (Pins 1,2,6, and 7)
A.5.5 Index Window (Pins 3)
Power Supply
5VDC ±5% @ 330mA (60mA for sensor)
Operating Temperature
0 to 70°C
Humidity
10 - 90% RH non-condensing
PPS-28 Piezo Positioner Stage
Rev: 3.02
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Irvine, California
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Reference Manual
A.5.6 Resolution
All closed loop stages are supplied with 20µm scales. The interpolation is done
in the MMC-100 to a higher resolution as specified in the order. With an
analog encoder the MMC-100 has an achievable resolution of 10nm.
A.5.7 Analog Encoder Wiring Diagram
A.5.8 Straight Through 15-Pin Feed Through
Wiring Diagram:
Female PEEK Dsub15 Connector - Rear View
87654
151413121110
321
Standard Cable Descriptions:
A. PPS-28 Motor Cable - Vacuum Side (Female Dsub 15 Pin Peek Connector, 1.5m)
B. PPS-28 Encoder Cable - Vacuum Side (Female Dsub 15 Pin Peek Connector, 1.5m)
C. Encoder Cable (Female Dsub 15 Pin to Dsub 9 Pin 1.5m)
D.
Mot or Breakout Cable (Female Dsub 15 Pin to Male Dsub 9 Pin, 1.5m)
A
B
J1
J2
J3
J4
C
D
J6
J5
Descr iption: Color J1 J2 J3 J4 J5 J6
Phase 1 Red 1 1 8 8 (Red) 1
Phase 2 Yellow 2 2 7 7 (W hit e - Green TP) 2
Ground Black/Green 9 9 15 15 (B lack/Green) 5
Shield - 10 10 14 14 (Sh ield) Casi ng
GND Black 8 8 1 1 (B lack) 4
Cos + Brow n 7 7 2 2 (Brow n) 1
+ 5V Red 6 6 3 3 (R ed) 5
Cos - Orange 5 5 4 4 (W hit e - Brown TP) 6
Sin+ Yellow 4 4 5 5 (Yell ow ) 2
Sin- Green 12 12 12 12 (W hit e - Yellow TP) 7
I ndex- Blue 13 13 11 11 (Violet - W hit e TP) 8
I ndex+ Violet 14 14 10 10 ( Violet ) 3
Shield - 15 15 9 9 ( Shield)
Casi ng
Phas
Phas
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