S e r i e s
Reference Manual
Micro Precision Actuator, UHV
MPA-20
MPA-20
Linear Actuator
Reference Manual
Rev 1.01
MICRONIX USA, LLC
15375 Barranca Parkway, E-106
Irvine, CA 92618
Tel: 949-480-0538
Fax: 949-480-0538
Email:
info@micronixusa.com
http://micronixusa.com
MPA-20 Micro Precision Actuator
Rev: 1.01
1
Reference Manual
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
Contents
1. Introduction 2
1.1 Product Description 2
1.2 Recommended Controllers 2
1.3 Technical Data 3
1.4 Load Characteristics 3
2. Model Configurations 4
2.1 MPA-20 Order Numbers 4
3. Preparing to Install the MPA-20 5
3.1 Installation Preparation 5
3.2 Package Contents 5
4. Installing the MPA-20 6
4.1 MPA-20 12 mm Installation 6
5. Technical Specifications 7
5.1 Electrical Connections 7
5.1.1 Motor Pinout & Cable 7
5.1.2 Stepper Motor 7
5.2 Limit Switches 8
5.2.1 Electrical Specification 8
5.2.2 Limit Switch Schematic 8
5.2.3 Direction of Motion 8
5.3 Dimensions 9
5.3.1 MPA-20 12 mm 9
6. Supplementary Information 10
6.1 Maintenance 10
6.2 Units and Conventions 10
MPA-20 Micro Precision Actuator
Rev: 1.01
2
Reference Manual
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
1. Introduction
1.1 Product Description
The MPA-20 linear actuator is specifically designed for applications with ultra high vacuum
(10-9 mbar) conditions. Typical applications include actuation of manual drive stages and
mirror mounts. It utilizes a 2-phase stepper motor and two mechanical limit switches. The MPA20 is compatible with the MMC-200 controller.
Features:
§ Travel range of 12 mm
§ Gear reduction 4:1
§ Hermetically sealed limit switches
§ Force max. 100 N
§ Integrated thermal element
§ Other motor/gear options available upon request
1.2 Recommended Controllers
The following controllers are available from MICRONIX USA:
§ MMC-200
Locking Nut
Front Mount
Switch Arm
Gear Reduction
Limit Switches
Stepper Motor
MPA-20 Micro Precision Actuator
Rev: 1.01
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Reference Manual
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
1.3 Technical Data
Motor
SM-005
Screw Pitch (mm)
0.5
Gear Ratio
4:1
Speed Max. (mm/sec)
1.25
Resolution Calculated (μm)
0.625 (with micro-stepping)
Resolution Typical (μm)
0.1
Bi-directional Repeatability (μm)
± 1
Uni-directional Repeatability (μm)
1
Accuracy (μm)
10
1.4 Load Characteristics
Load Characteristics
Fx(N)
Fy(N)
Fz(N)
SM-005
10
100
10
MPA-20 Micro Precision Actuator
Rev: 1.01
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Reference Manual
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
2. Model Configurations
2.1 MPA-20 Order Numbers
Contact MICRONIX USA for custom versions.
Order No. MPA-20-
1 1 0 1 9
SM-005 1
12 mm 1
No Encoder 0
Mechanical Limit Switches 1
Ultra High Vacuum, 10-9
mbar 9
MPA-20 Micro Precision Actuator
Rev: 1.01
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Reference Manual
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
3. Preparing to Install the MPA-20
3.1 Installation Preparation
The actuator is calibrated and guaranteed to be within specification at 20°C
±5°C. Be sure to use the actuator under the following conditions:
§ Mount to a clean and flat surface which is free of debris, burrs or dings
§ An indoor atmosphere free of corrosive gases, excessive dust, and
condensation
§ Temperature range of 0-40°C
§ Relative humidity between 20-80%
§ Locate away from water, heat, and electrical noise
3.2 Package Contents
If product is damaged or there are missing components, contact MICRONIX USA
immediately. Do not discard product packaging in case of return shipment.
Package Should Contain:
§ MPA-20 Linear Actuator
§ Locking Nut
§ Reference Manual
§ Any other previously agreed upon components such as a controller and
cable
MPA-20 Micro Precision Actuator
Rev: 1.01
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Reference Manual
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
4. Installing the MPA-20
4.1 MPA-20 12 mm Installation
The MPA-20 can be installed to motorize manual drives, mirror mounts or other
applications. While installing, support the MPA-20 by holding the motor/gear
reduction unit to avoid applying torque to the housing. In place of the spherical
actuator tip, a 4-40 thread may be used for pulling applications. When preparing
the stage for vacuum environments, take the necessary precautions (such as
wearing gloves, clean room and clothing, etc.) when handling the stage as to
avoid any contaminants.
Requires:
1x MPA-20 Linear Actuator
1x Locking Nut
1x 17mm Hex Wrench (not supplied)
1. Unscrew Locking
Nut from MPA-20
2. Insert MPA-20 into
Mounting Surface
Customer Supplied
Mounting Surface
3. Tighten Locking Nut
using 17mm wrench
Locking Nut
MPA-20 Micro Precision Actuator
Rev: 1.01
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Reference Manual
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
5. Technical Specifications
5.1 Electrical Connections
5.1.1 Motor Pinout & Cable
Pin
Description
1
Motor Phase A+
2
Motor Phase A-
3
Motor Phase B+
4
Motor Phase B-
5
Limit Switch Common
6
Limit Switch – (near motor)
7
Limit Switch +
8
Thermal Element -
9
Thermal Element +
For compatibility with MICRONIX USA controllers, Pin 5, 7 and shield are
internally connected. Negative limit only, positive limit is connected to
Ground.
Limit Switch Common (pin 5) is connected to ground in MICRONIX USA
controllers.
5.1.2 Stepper Motor
Motor Type
2 Phase Bipolar
Phase Current
1.2 A max.
Step Angle
1.8 °
Steps
200
Leadscrew Pitch
0.5 mm/rev
Gear Reduction
4:1
Resolution/Fullstep
0.625 µm
MPA-20 Micro Precision Actuator
Rev: 1.01
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Reference Manual
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
5.2 Limit Switches
The mechanical limit switches are normally closed (when not activated) and
should be connected to a compatible controller that recognizes these settings.
Failure to properly set up the limit switches in the controller will result in physical
damage to the MPA-20 Linear Actuator.
The mechanical limit switches are factory calibrated for a minimum travel of
12mm (when the switches are initially activated). Customer adjustment of the
limit switches is not recommended. For custom travel lengths, please contact
MICRONIX USA.
5.2.1 Electrical Specification
Contact Rating
1A at 28V
Contact Type
Open collector (NPN) Normally Closed
Operating Temperature
-184 to +260 °C
5.2.2 Limit Switch Schematic
5.2.3 Direction of Motion
Positive
Direction
Positive Limit
(Mechanical)
Negative Limit
(Mechanical)
+
Limit Switch
Common (Pin 5)
- Limit Switch (Pin 6)
+ Limit Switch (Pin 7)
MPA-20 Micro Precision Actuator
Rev: 1.01
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Reference Manual
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
5.3 Dimensions
5.3.1 MPA-20 12 mm
MPA-20 Micro Precision Actuator
Rev: 1.01
10
Reference Manual
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
6. Supplementary Information
6.1 Maintenance
§ The MPA-20 linear actuator is a delicate mechanical device and should be
handled with care. Do not drop or mishandle the actuator.
§ Keep hands clear of all moving parts while the actuator is in motion to
avoid personal injury.
§ Follow the Safe Operating Environment requirements and use proper cable
management to ensure a clean and safe operating environment.
§ The MPA-20 is designed to support axial loads only, do not apply radial
loads.
§ Allow for easy access to the stage in case of servicing.
6.2 Units and Conventions
All measurements in this document are in the metric system of units.
Metric Unit
English Unit
1 millimeter
0.0394 inches
1 micron
0.0000394 inches
1 Newton
0.2248 lbs
1 Newton-meter
8.85 in-lbs
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