MEMSIC MX210AL, MX210AC Datasheet

The MX210A is a very low cost dual-axis acceleration sensor on a monolithic IC. With no moving
parts, the device is extremely reliable and is manufactured on a submicron CMOS process
enabling small geometries and small die size, resulting in low overall cost and high functionality.
The MX210A is primarily designed for applications requiring high performance and where overall
system cost is a driving factor in component selection. The MX210A measures acceleration with
a full-scale range of up to ± 10

g and produces an Analog signal output. Typical noise floor is 750

µg/√Hz rms, allowing signals below 1.0 milli-g to be resolved in 1 Hz bandwidth. Frequency
response extends to 40 Hz. The frequency response can be extended to 160 Hz with the imple­mentation of a simple external circuit. See Application Note (AN-00MX-003).

The MX210A is a dc accelerometer with the capability to measure both ac acceleration,
(typical of vibration) or dc accelerations, (such as inertial force or constant, gravity-induced accel­erations).

The MX210A offers a calibrated temperature sensor output with a positive temperature
coefficient of 5.0 mV/°C. This device can be temperature compensated easily. The change in
sensitivity over the temperature range –40°C to 125°C is predictable and follows the physical gas
laws. The following equation can be used to predict the sensitivity at any given temperature: S

IN

X (TIN)

2.67

= S

FIN

X (T

FIN

)

2.67

Temperature in °K See Application Note (AN-00MX-002).

The MX210A is available in a metal can (TO-100) or an LCC surface mount device;both
are hermetically sealed and are operational over the temperature range -40°C to 125°C.

General Description

MX210A (ABSOLUTE)

Features

Low Cost, 10g, Dual Axis Accelerometer
with Analog Outputs

• Dual axis acceleration outputs

• Analog outputs, absolute

• 1.0 mg Resolution in 1Hz bandwidth

• 40 Hz Bandwidth expandable to 160 Hz

See Application Note (AN-00MX-003)

• Quiescent Supply Voltage: 3.5 mA

• 50,000g shock survival

• 2.70V to 5.25V Single Supply

• On-chip mixed signal processing

• Continuous sensors self test

• Temperature sensor output (Tout) 5mV/°K

• Packaged in 8 pin LCC SMD or

10 pin TO-100 THRU-HOLE

• Hermetically sealed packaging

• Reference voltage (V

REF

) 2.50V

Applications

• Automotive - Vehicle Security/Active Suspension/ABS/HED Angle Control

• Security - Gas Line/Elevator/Fatigue Sensing

• Office Automation Equipment - Computer Peripherals/Disk Drives/PDA’s/Mouse

Smart Pens/Cell Phones/Printer Head Acceleration Sensor

• Gaming - Joystick/RF Interface/Menu Selection

• White Goods - Spin/Vibration Control

Information furnished by MEMSIC is believed to be
accurate and reliable. However, no responsibility is
assumed by MEMSIC for its use, nor for any infringe­ments of patents or other rights of third parties which
may result from its use. No license is granted by
implications or otherwise under any patent or patent
rights of MEMSIC.

Technical information.
Subject to change without notice.

®MEMSIC, Inc. 2000.
100 Burtt Road, Andover, MA 01810
Tel: [phone] • Fax: [phone]
www.memsic.com

MX210A ANALOG Data Sheet H 7/31/01

Page 1 of 8

Data Sheet

MX210A

Block Diagram of MX21XX

MX210A SPECIFICATIONS
Analog Electrical Characteristics

ZERO g BIAS LEVEL Each axis

0g Offset vs.
Temperature

4

1.15 1.25 1.35

2.0

V

mg/°C

Min Typ Max

Parameter Conditions

MEMSIC MX210A Units

Information furnished by MEMSIC is believed to be
accurate and reliable. However, no responsibility is
assumed by MEMSIC for its use, nor for any infringe­ments of patents or other rights of third parties which
may result from its use. No license is granted by
implications or otherwise under any patent or patent
rights of MEMSIC.

Technical information.
Subject to change without notice.

Page 2 of 8

Data Sheet

®MEMSIC, Inc. 2000.
100 Burtt Road, Andover, MA 01810
Tel: [phone] • Fax: [phone]
www.memsic.com

MX210A

MX210A ANALOG Data Sheet H 7/31/01

Measurements @ 25°C Acceleration = 0g unless otherwise noted
VDD, VDA = 5.0V unless otherwise specified

SENSOR Each axis
Measurement Range

1

Nonlinearity Best Fit Straight
Alignment Error

2

Line

+/- 10.0

2%

+/- 1.0

g
% of FS
degrees

NOISE PERFORMANCE
Noise Density

5

@ +25°C 750 1000 µg/√Hz rms

in 40 Hz Bandwidth

FREQUENCY RESPONSE
3 dB Bandwidth 40 Hz
3 dB Bandwidth

7

160 Hz

Tout Voltage 25°C 1.23 1.25 1.27 V
Temp sensor sensitivity 5 mV/°K

V REFERENCE

9

25°C 2.4 2.5 2.6 V

SELF TEST
Voltage Delta at outputs Continuous,
@5V Supply Output rails with 5.0 V
@2.7V Supply failure 2.7 V

X, Y OUTPUTS

10

Current drive
capabilities, -2.5 +2.5 mA
source/sink

TEMPERATURE RANGE
Operating Range

2.7 5.25 V

3.0 3.5 mA

4.0 4.5 mA
200 400 ms

-40 125 °C

POWER SUPPLY
Operating Voltage Range
Specified Performance
Quiescent Supply Current @ 5V
Quiescent Supply Current @ 2.7V
Turn-On Time

6

NOTES

1

Guarantee by measurements of initial offset
and sensitivity.

2

Alignment error is specified as the angle between
the true and indicated axis of sensitivity.

3

Cross-axis sensitivity is the algebraic sum of the
alignment and the inherent sensitivity errors.

4

Specification refers to the maximum change in
parameter from its initial value at 25°C to its
worst case value at Tmin to Tmax of the specified
temperature range.

5

Noise density (µg/√Hz rms) is the average noise at any
frequency in the bandwidth of the device.

6

The voltage is required to ramp full scale before
making a measurement.

7

Note: Frequency compensating circuit will achieve
160 Hz operations. See Application Note (AN-00MX-002) .
Application boards available.

8

Defined as the output change from ambient to
maximum temperature or minimum. For more
details refer to Application Note (AN-00MX-002).

9

For more details refer to Application Note
(AN-00MX-001).

10

Operating at maximum current drive capabilities,

shifting of baseline sensitivity may occur.

All min and max specifications are subject to change

without notification.

Temperature Changes

8

Delta from 25°C per formula

S

IN

X (TIN)

2.67

= S

FIN

X (T

FIN

)

2.67

SENSITIVITY Each axis
ANALOG OUTPUTS

Sensitivity

45 50 55

mV/g

Cross-Axis Sensitivity

3

X sensor to Y sensor +/- 2 %

Data Sheet

ORDERING GUIDE

Model Package Style

MX210AC TO-100 Metal Can
MX210AL LCC-8 SMD

*

PACKAGE CHARACTERISTICS

Package ThetaJA ThetaJC Device Weight

TO-100 150°C/W 25°C/W 0.04 oz
LCC-8 110°C/W 22°C/W 0.02 oz

Page 3 of 8

®MEMSIC, Inc. 2000.
100 Burtt Road, Andover, MA 01810
Tel: [phone] • Fax: [phone]
www.memsic.com

MX210A

MX210A ANALOG Data Sheet H 7/31/01

TO-100

LCC-8

TO-100

TOP

VIEW

TOP

VIEW

+g

+g

+g

+g

X

X

Y

Y

Axes of Sensitivity

LCC-8

Axes of Sensitivity

NOTE

Drops onto hard surfaces can cause shocks of greater than 50,000g
and exceed the absolute maximum rating of the device.
Care should be exercised in handling to avoid damage.

CAUTION

ESD (electrostatic discharge) sensitive device.

*Stresses above those listed under "Absolute Maximum Ratings" may cause permanent damage
to the device. These are stress ratings only; the functional operation of this device at these or any
other conditions above those indicated in the operational sections of this specification is not implied.
Exposure to absolute maximum rating conditions for extended periods may affect device reliability.

ABSOLUTE MAXIMUM RATINGS*

Symbol Parameter Rating Units

VDD Supply Voltage to Ground Potential -0.5 to 7.0 Volts

T

STG

Storage Temperature -65 to +150 Deg C

Acceleration 50,000 g

*

LCC parts are shipped in tape and reel packaging.