MELEXIS MLX90240S Datasheet

MLX902xx Name of Sensor Rev Y.X 22/Aug/98 Page 1
MLX90240
Pressure Sensor IC
MLX90240 Pressure Sensor IC Page 1 Rev 1.0 25/April/00
Features and Benefits
0-350mBar Range Compact Design High Long Term Stability Low Cost
Applications
Medical Instrumentation (Blood Pressure) Consumer Appliances Sports Equipment Pressure Difference and Flow monitor ing
Ordering Information
Part No. Temperature Suffix Package Temperature Range MLX90240 S CA -20C to 85C Industrial MLX90240 S UD -20C to 85C Industrial
Description
The MLX90240 is a discrete micromachined pressure sensor IC suitable for pressure ranges between 0 to 350mBar. The pressure medium must be dry and non-corrosive, such as air. The 90240 is packaged in a plastic/ceramic package, (CA) or can be ordered as unpackaged die (UD) The principal of the circuit is a piezoresistive bridge which realized in silicon through a special micromachine process. As pressure is applied to the bridge, a differential voltage change is seen across the V
OUT
pins, while a bias voltage is applied to the
V
EXC
pins. The MLX90240 is a versatile pressure sensor solution which can be directly interfaced with other Melexis ICs such as the MLX90308, which provides amplification, signal conditioning as well as the bias current to supply the sensor itself.
Functional Diagram
1
1
1
1
V
EXC+
V
OUT+
V
EXC-
V
OUT-
MLX90240
Pressure Sensor IC
MLX90240 Pressure Sensor IC Page 2 Rev 1.0 25/April/00
MLX90240 Electrical Specifications
DC Operating Parameters TA = 25C, VDD = 5V, Pressure = 350mBar full scale.
Parameter Min Typ Max Units
Excitation voltage
0 5 12 V
Offset
-25 0 +25 mV
TC of the Offset
-15 -21 -25 µV/°C
Sensitivity
43 58 71 mV/V/bar
TC of the Sensitivity (1)
-0.17 -0.21 -0.26 %/°C
Bridge impedance
12 14 16 kOhm
TC of the Bridge (1)
0.057 0.063 0.066 %/°C
Non linearity (3)
+/- 0.15 +/- 0.30 %FS
Hysteresis
0.1 % FS
Offset Long term stability (2)
0.5 %FS
Sensitivity Long term stability (2)
0.3 %
Burst pressure
5x FS pressure
Operating Temp
-20
85 °C
Storage Temp
-40 125 °C
Notes:
1) Between 0 and 70°C
2) After: 100 thermos cycles 0 – 70°C
3) 1 mil pressure cycles 0 – 350 mbar
4) Typical 0.5% FS for 0-500 mbar range
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