Melexis MLX90210 Technical data

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Pressure Sensor IC

Features and Benefits

0 -1.0 Bar Range
Compact Design
High Long Term Stability
Low Cost

Applications

Medical Instrumentation (Blood Pressure)
Consumer Appliances
Sports Equipment
Pressure Difference and Flow monitoring

Ordering Information

Part No. Temperature Suffix Package Temperature Range
MLX90210 C CA -0C to 70C Commercial
MLX90210 C UD -0C to 70C Commercial

MLX90210

Functional Diagram

1

V

EXC+

2

V

OUT+

15

V

EXC-

16

V

OUT-

MLX902xx Name of Sensor Rev Y.X 22/Aug/98 Page 1

MLX90210 Pressure Sensor IC Page 1 Rev 1.0 12/January/01

Description

The MLX90210 is a discrete micromachined
pressure sensor IC suitable for pressure ranges
between 0 to 1.0 Bar. The pressure medium must be
dry and non-corrosive, such as air.
The 90210 is packaged in a plastic/ceramic package,
(CA) or can be ordered as unpackaged die (UD)
The principal of the circuit is a piezoresistive bridge
which is realized in silicon through a special
micromachine process. As pressure is applied to the
bridge, a differential voltage change is seen across
the V
V
The MLX90210 is a versatile pressure sensor
solution which can be directly interfaced with other
Melexis ICs such as the MLX90308, which provides
amplification, signal conditioning as well as the bias
current to supply the sensor itself.

pins, while a bias voltage is applied to the

OUT

pins.

EXC

MLX90210

Pressure Sensor IC

MLX90210 Electrical Specifications

DC Operating Parameters TA = 25C, VDD = 5V (note 3), Pressure = 1.0 Bar full scale.

Parameter Min Typ Max Units

Excitation voltage
Zero Pressure Offset
Sensitivity
TC of the Sensitivity (1)
Bridge Resistance
Burst pressure

Operating Temp
Storage Temp (2)

V

OFF

S
TCS
RBR

0 5 12 V

-30 0 +30 mV
14 22 30 mV/V/bar

-0.17 -0.001 -0.26 °C-1
12 14 16 kOhm
2 Bar
0

-55 150 °C

70 °C

MLX90210 Mechanical Dimensions (4)

Membrane Size
Chip Thickness 0.61mm

Chip Size 1.90mm X 1.90mm

0.81mm X 0.81mm

Notes:

1) Temperature range refers to operation and deposit in an inert environment

2) Temperature range refers to operation and deposit in an inert environment

3) To prevent measurement errors, measure above 3V VDD in impulse mode

4) Tolerance of 10% unless otherwise specified.

MLX90210 Pressure Sensor IC Page 2 Rev 1.0 12/January/01