Leybold vacuum Sogevac SV65 BI FC, Sogevac SV40 B FC Operating Instructions Manual

Sogevac®

SV40-65 BI FC

Single-stage, oil-sealed rotary vane pump

Operating instructions GA02341_002_A6
and spare parts list

Part-Nr:
960363V3001
960461V3001
960462V3001
960463V3001
960465V3001
960465V3002
and other variants

Document 300338321/002/A6
Original Operating Instructions

Contents

Page

Important Safety Information 3

1 Description 6

1.1 Principle of operation 6

1.2 Technical characteristics 7

1.3 Accessories 10

1.4 Lubricants 10

2 Transport and Storing 11

2.1 Transport and packaging 11

2.2 Mounting orientation 11

2.3 Storing 11

3 Installation 12

3.1 Setting up 12

3.2 Electrical connections 13

3.3 Oil filling 15

3.4 Start-up 15

4 Operation 15

4.1 Operation 15

4.2 Working in cycles in / out 16

4.3 Switching off / Shutdown 17

4.4 Conditions of use 17

4.5 Taking out of use 17

5 Maintenance 18

5.1 Safety Information 18

5.2 Maintenance Intervals 18

5.3 Oerlikon Leybold Vacuum Service 19

5.4 Maintenance Work 19

6 Troubleshooting 21

7 Spare parts 23

EC Conformance Declaration 26

Declaration of Contamination of Compressors,
Vacuum Pumps and Components 27

2

GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Important Safety Information

Indicates procedures that must be strictly observed to prevent hazards to
persons.

Indicates procedures that must be strictly observed to prevent damage to, or
destruction of the product.

Emphasizes additional application information and other useful information
provided within these Operating Instructions.

The Oerlikon Leybold Vacuum Sogevac® has been designed for safe and
efficient operation when used properly and in accordance with these
Operating Instructions. It is the responsibility of the user to carefully
read and strictly observe all safety precautions described in this section
and throughout the Operating Instructions. The Sogevac® must only be
operated indoor. In proper condition and under the conditions described
in the Operating Instructions. If not, the protection provided by the
equipment may be impaired. It must be operated and maintained by trained
personnel only. Consult local, state, and national agencies regarding specific
requirements and regulations. Address any further safety, operation and/or
maintenance questions to our nearest office.

Failure to observe the following precautions could result in serious
personal injury!

Sogevac® pumps are not designed:

■ for pumping of dusty, aggressive, corrosive, flammable or explosive gases or

gases mixtures,

■ for pumping of oxygen or other highly reactive gases with a greater

concentration than atmospheric concentration (>20%),

■ for working in flammable, explosive or dusty environment.

For all these cases, special materials must be used. In case of doubt, please
contact Oerlikon Leybold Vacuum.

See also the limits of use indicated in the CE declaration of conformity.

Never expose part of the body to the vacuum. There is a danger of injury.
Never operate the pump with an open and thus accessible inlet. Vacuum
connections as well as oil filling and oil draining openings must not be
opened during operation of the pump.

Depending on the process involved, dangerous substances and oil may escape
from the pump. Take the necessary safety precautions !

Disconnect the unit from the power supply before starting any work.

Pump must not be operated above 2000 m sea level.

Safety Information

Warning

Caution

Note

Warning

3

GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

The Sogevac® vacuum pumps have been manufactured according to the latest
technical standards and safety regulations. If not installed properly or not used
as directed, dangerous situations or damages could occur.

It is mandatory that these operating instructions be read and understood
prior to vacuum pump installation and start-up.

The pump complies to the standard EN 61010-1-2001.

High electric voltages! When touching parts at high electric voltages, there is
the risk of suffering severe injuries by an electric shock! Covers marked with this
symbol must only be opened by trained electricians after having reliably deen­ergised (lockout/tagout) the equipment and waited minimum 10 minutes.

Always operate the pump with a properly connected protective earth conductor
and make sure that the motor & FC connection box are closed.

Observe the manufacturer’s information and operating instructions for the
respective frequency converter (enclosed).

Use only the OLV frequency converter for the pumps equipped with one.

After having made changes to the wiring, check the motor’s direction of rotati­on.

Lay the connecting lines so that these cannot be damaged. Protect the lines
against humidity and contact with fluids. Avoid thermally stressing the lines by
unfavourable laying. Provide strain relief for the connecting lines so that the
plugs and the line connectors are not subjected to excessively high mechanical
stresses.

Lay electric feed lines so that there is no risk of tripping over these.

Take appropriate precautions to insure that the pump cannot start.

If the pump has pumped hazardous gases it will be absolutely necessary to
determine the nature of the hazard involved and take the appropriate safety
precautions.

Observe all safety regulations!

Take adequate safety precautions prior to opening the intake or exhaust port.

Failure to observe the following precautions could result in damage to
the equipment!

Liquid and solid particles must not enter the pump. Install the adequate
filters, separators and/or condensers. In case of doubt consult Oerlikon
Leybold Vacuum.

The intake line of the pump must never be connected to a device with over
atmospheric pressure. Design the exhaust line so that no pressure higher
than 1,15 bar abs. (0,15 bar rel.) can occur.

Operating of the pump without oil or operating with incorrect direction of
rotation can destroy the pump.

Caution

Safety Information

Warning

Warning

4

GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

5GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Never use discarded seals. Always assemble using new seals.

Respect the instructions concerning environment protection when discarding
used oil or exhaust filters!

The pump must be packaged in such a way that it will not be damaged
during shipping, and so that no harmful substances can escape from the
package.

We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.

Caution : hot surface ! In normal operation, the pump surface temperature can
reach 85°C. There is a risk of burning. Switch off the pump and let it cool down
before any intervention or take appropriate precautions. It is recommended to
use an oil casing or pump touching protection at high ambient temperatures.

As a touching protection, you can use the “Noise enclosure for SV40 BI + 65 BI
FC” P/N 960331NENC. The noise enclosure is an accessory not included in the
pump delivery.

All work on a pump which is “still warm from operation” should be done only
whilst wearing protective gloves.

Handle the pump only while vented and after having let it cool down.

Never remove the oil-fill or oil-drain plugs while the pump is running. There
exists the risk of suffering burns. Always wear protective gloves and protective
goggles also for protection against the oil.

Some pumps use perfluoropolyether (PFPE) as lubricant.

When handling PFPE you should observe the following:
During thermal decomposition at temperatures over 290 °C toxic and corrosive
gases are released. This is not likely to happen in a Sogevac® pump. When
handling PFPE keep it way from open fires. Do not smoke with PFPE on your
fingers.

Touch the inner sections of the pumps only while wearing clean gloves, and use
clean tools; do the necessary work in clean and dry rooms.

Do not allow the ingestion of any objects (screws, welding beads, nuts, washers,
pieces of wire, fittings etc.) through the intake port of the pump.

Objects falling into the pump can cause severe damage.

Note

Caution

Safety Information

Caution

Warning

6 GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

1 Description

Sogevac® pumps are designed for pumping of inert gases in the range of rough
vacuum, between atmospheric pressure and ultimate pressure of the pump.

When removing condensable vapours, periodic opening of the gas ballast valve
is required.

1.1 Principle of operation

The Sogevac® pumps are single-stage oil-sealed rotary vane vacuum pumps.
The rotor, having three slots in which the vanes are sliding, is eccentrically
installed in a pump cylinder (stator).

The vanes separate the interior space into 3 chambers. The volume of these
chambers varies with the rotation of the rotor.

The gas sucked into the inlet chamber is compressed and then pushed out at
the exhaust valve.

The oil injected in the inlet chamber guarantees the air-tightness, the
lubrication and cooling of the pump. It is dragged off by the compressed
gases and roughly separated by gravity when entering in the oil sump. A fine
separation is then operated in the exhaust filter. An internal transfer pushes the
collected oil back into the vacuum generator, the transfer is operated by a float
valve to avoid atmospheric air coming from the oil casing to the inlet of the
pump when no oil is present in the recovery system.

The oil circulation functions by differential pressures.

The pumps are equipped with a gas ballast valve for pumping condensable
vapours.

The anti suckback valve at the inlet flange avoids oil coming back into the
inlet line when the pump is stopped. This is valid for working pressures below
100 mbar and under the condition that the valve is kept clean and in good
condition. The anti suck-back valve is not a safety valve. If oil back flowing is to
be avoided by all means, it is necessary to mount a separate safety valve on the
pump inlet.

Some variants are equipped with a frequency converter giving a constant
pumping speed independently of the mains frequency and regulating
the pump power consumption. At high inlet pressures, the pump speed is
decreased.

Description

7GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Description

The pump speed can be reduced to 900 rpm (idle mode) to reduce the power
consumption w/o loss of end pressure on some pump variants. In this idle
mode, the pump inlet pressure must remain below 10 mbar.

Information to user

The user's manual or instruction manual for an intentional or unintentional
radiator shall caution the user that changes or modifications not expressly
approved by the party responsible for compliance could void the user's
authority to operate the equipment.

Note : This equipment has been tested and found to comply with the limits
for a Class A digital device, pursuant to part 15 of the FCC Rules. These limits
are designed to provide reasonable protection against harmful interference
when the equipment is operated in a commercial environment. This equipment
generates, uses, and can radiate radio frequency energy and, if not installed and
used in accordance with the instruction manual, may cause harmful interference
to radio communications Operation of this equipment in a residential area is
likely to cause harmful interference in which case the user will be required to
correct the interference at his own expense.

This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010­1, second edition, including Amendment 1, or a later version of the same
standard incorporating the same level of testing requirements

1.2 Technical characteristics

SV40 B FC

Technical data 50 Hz & 60 Hz

Nominal pumping speed m3/h ≥ 53

Pumping speed (according to PNEUROP) m

3

/h à 2 mbar ≥ 36

Ultimate partial pressure without gas ballast mbar ≤ 0,2

Ultimate total pressure with small gas ballast mbar ≤ 1,0

Water vap our tolera nce:

■ with small gas ballast approx. mbar 10

Water vap our tolera ble loa d:

■ with small gas ballast approx. kg.h

-1

0,34

Noise level (according to DIN 46 635) dB (A) ≤ 59

Motor power - Rated rotational speed kW - min

-1

1,6-1800

Mains voltage (+/- 10 %) AC ~ V 200

... 240

Protection - Insulation

1)

IP 20 - F

Leak rate mbar.I.s

-1

<1 x 10-3

Ambient temperature °C 18 ... 40

See pump nameplate for further data.

1)

Given by power & interface connections.

16AT 500 A @ 250 VAC

8 GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

SV65 BI FC

Technical data 50 Hz & 60 Hz

Nominal pumping speed m3/h 71

Pumping speed (Norme PNEUROP) m

3

/h à 2 mbar ≥ 50

Ultimate partial pressure without gas ballast mbar ≤ 0,2

Ultimate total pressure with small gas ballast mbar ≤ 1,0

Water vap our tolera nce:

■ with small gas ballast approx. mbar 10

Water vap our tolera ble loa d:

■ with small gas ballast approx. kg.h

-1

0,41

Noise level (Norme DIN 46 635) dB (A) ≤ 60

Motor power - Rated rotational speed kW - min

-1

1,5-1800

Mains voltage (+/- 10 %) AC ~ V 200

... 240

Protection - Insulation

1)

IP 20 - F

Leak rate mbar.I.s

-1

<1 x 10-3

Ambient temperature °C 18 ... 40

See pump nameplate for further data.

1)

Given by power & interface connections.

Description

9GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Description

SV40 BI FC & SV65 BI FC

10

-

1

1 10

1102103

10

1

10

3104105

10

2

mbar

Pa

29.918 29.530 25.980 0 29.9

Inches.Hg

Druck / pressure / pression

Saugvermögen / pumping speed / débit

bei / at / à 50 & 60 Hz

10

50

5

CFM

Saugvermögenskurven ohne Gasballast mit Gasballast
Pumping speed (volume flow rate) without gas ballast with gas ballast
Courbes de débit sans lest d'air avec lest d'air

m3.h

-

1

100

10

1

29.921

10

-

2

10

0

Torr

7,5.10

-

3

7,5.10

-

2

7,5.10

-

1

7,5.10

0

7,5.10

1

7,5.10

2

10

-

1

1 10

1102103

10

1

10

3104105

10

2

mbar

Pa

29.918 29.530 25.980 0 29.9

Inches.Hg

Druck / pressure / pression

Saugvermögen / pumping speed / débit

bei / at / à 50 & 60 Hz

10

50

5

CFM

Saugvermögenskurven ohne Gasballast mit Gasballast
Pumping speed (volume flow rate) without gas ballast with gas ballast
Courbes de débit sans lest d'air avec lest d'air

m3.h

-

1

100

10

1

29.921

10

-

2

10

0

Torr

7,5.10

-

3

7,5.10

-

2

7,5.10

-

1

7,5.1007,5.10

1

7,5.10

2

1 Pa = 10

-2

mbar

1 Torr = 1,33 mbar

SV40 BI FC SV65 BI FC

GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Description

1.3 Accessories

Specification Cat. Nr.

Adapter for tubing 712 41 608

1.4 Lubricants

The Sogevac® pumps should be run with vacuum pump oils with a viscosity
according to ISO category VG32. Use only the Oerlikon Leybold Vacuum oil
indicated on the name plate and pump. In case other oils are used, Oerlikon
Leybold Vacuum rejects all responsibility should any trouble occur.

Oil Conditioning Reference

Mineral LVO110 1 l 9 714 50 502

Ester LVO200 1 l L 200 01

Ester LVO200 2 l L 200 02

Ester LVO200 5 l L 200 05

Ester LVO200 20 l L 200 20

PFPE LVO420 1 l 9 714 66 761

Ordering information / Bestellinformation / Information de commande

P/N Motor GB Inlet

Einlass
Aspiration

Exhaust
Auslass
Refoulement

Oil & quantity
Öl & Menge
Huile & quantité

Power connection
Leistungsanschluss
Connexion puissance

Interface
Schnittstelle

SV40 BI FC

960363V3001 A Y1 40 KF C Mineral LVO110, 1 l C20 Sub-D9

SV65 BI FC

960461V3001 A N 40 KF 40 KF Ester LVO200, 2 l Hirschmann CA3GS

Sub-D9 + On/Off switch
Sub-D9 + Ein/Aus Schalter
Sub-D9 + Inter. Marche/Arrêt

960462V3001 A Y1 40 KF 40 KF PFPE LVO420, 2 l Hirschmann CA3GS

Sub-D9 + On/Off switch
Sub-D9 + Ein/Aus Schalter
Sub-D9 + Inter. Marche/Arrêt

960463V3001 A Y1 40 KF C Mineral LVO110, 2 l C20 Sub-D9

960465V3001 A Y1 40 KF C Ester LVO200, 2 l Hirschmann CA3GS Sub-D 9

960465V3002 A Y1 40 KF C PFPE LVO420, 2 l Hirschmann CA3GS Sub-D 9

Motor / Motor/ Moteur:

A = Single phase power supply 200-240V +/-10% 50Hz and 60Hz with frequency converter
= Wechselstromspeisung 200-240V +/-10% 50Hz und 60Hz mit Frequenzwandler
= Alimentation monophasée 200-240V +/-10% 50Hz et 60Hz avec convertisseur de fréquence

Gas ballast / Gasballast / Lest d’air:

Y1 = 0,5 m3/h manual / manuell / manuel

Exhaust / Auslass / Echappement

C = ½ ‘’ barbed hose fitting / ½ ‘’ Schlauchanschluss / Embout cannelé ½ ‘’

10

11

GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Transport and storing

2 Transport and Storing

2.1 Transport and packaging

Sogevac® vacuum pumps pass a rigorous operating test in our factory and are
packaged to avoid transport damages. Indications on the packaging must be
observed.

Please check packaging on delivery for transport damages.

The outer package bears a shock indicator, turning red at 50 g. Should the
shock indicator have reacted, a transportation damage may have occurred
and the freight forwarder must be advised.

Packing materials should be disposed off according to environmental laws or
re-cycled. These operating instructions are part of the consignment.

The connection ports are blanked off by plastic protective caps or self­adhesives. Take these caps or self-adhesives away before turning on the
pump.

2.2 Mounting orientation

See required space on drawings in paragraph 1.2.

Pumps which have been filled with oil must only be moved in the upright
position (horizontally). Otherwise oil may escape. The angle of slope may not
be over 10° max. Avoid any other orientations while moving the pump.

Only use the lifting lugs which are provided on the pump to lift the pump with
the specified lifting devices.

Make sure that these have been installed safety. Use suitable lifting equipment.
Make sure that all safety regulations are observed.

Use only lifting devices appropriated to the pump weight. Check name plate.
Do not use other pump elements than the lifting lugs as handles.

2.3 Storing

Before stocking the pump for a long time put it back in its original condition
(blank off inlet and exhaust ports with the shipping seals, drain the oil) and
store the pump in a dry place at room temperature.

Storage temperature: - 15°C to + 50°C.

Until the pump is put back in to service again, the pump should be stored
in a dry place, preferably at room temperature (20 °C - 168 °F). Before
taking the pump out of service, it should be properly disconnected from the
vacuum system, purged with dry nitrogen and the oil should be exchanged
too. The gas ballast must be closed and if the pump is to be shelved for
a longer period of time it should be sealed in a plastic bag together with a
desiccant (Silicagel).

If the pump has been shelved for over one year, standard maintenance must
be done and the oil must be exchanged too before the pump is put in to
service once more.

We recommend that you contact the service from Oerlikon Leybold Vacuum.

Caution

12 GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

3 Installation

It is essential to observe the following instructions step by step to ensure safe
start-up. Start-up may only be conducted by trained specialists.

The standard pump is not suitable for installation in explosion hazard ATEX
areas. Please contact us, if you are planning such an application. Before
installing the pump you must reliably disconnect it from the electrical power
supply and prevent the pump form running up inadvertently.

Observe all safety regulations.

3.1 Setting up

The pump must be set up or mounted horizontally on a flat surface. Special
mounting is not required.

The pump must be levelled within a tolerance of ± 2 degrees.

The following ambient operating environment must be observed:

■ Pollution degree 2

■ Ambient temperature: 18 °C to 40 °C (54 °F to 104 °F),

■ Ambient pressure = Atmospheric pressure.

■ Rel. humidity ≤ 95 % without condensation

In order to avoid over-heating of the pump, an undisturbed fresh airflow to
the pump is necessary.

Additional warning note : consider changes in ambient temperatures that might
occur when air conditioning is turned down, such as nights and weekends.

The pump must be kept clean (no dust deposit).

Normal presence of transient over-voltages due to the power mains.

NOTE : the usual transient over-voltage level corresponds to the category II of
the impulse withstand (over-voltage) of the IEC 60364-4-443.

Inlet connection

See safety instructions page 3.

■ The inlet flange can be connected with a vacuum-tight flexible hose

and/or pipe.

■ The pipes should cause no stresses on the pump’s flanges. If necessary,

compensators must be opened.

■ Restriction of the pipes must be avoided in order not to decrease the pumping

speed of the pump. The nominal diameter of the pipes has to be at least the
same as the diameter of pump’s inlet flange.

■ When removing condensable vapours, a gas ballast valve must be opened

periodically to avoid solvent build up in the oil.

■ Additional warning note: additional air flow may be needed during ballast, as

this increases pump temperature.

■ The inlet pressure must not be above atm. pressure.

See also indications on the pump nameplate.

Warning

Caution

Warning

Installation

13GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

3.2 Electrical connections

Ensure that incoming power to the pump is off before wiring the motor or
altering the wiring.

IEC & local electrical regulations must be followed.

Should the pump be connected to a standard wall socket, it must be checked
that a building protection rated 16 A is installed (fuse or breaker) to protect the
power cable. The frequency converter itself is self-protecting.

Even if the pump is not operating, live voltage is present in the frequency
converter ! Even after complete power disconnection, allow min. 10 minutes for
a complete capacitor discharge.

Voltage and frequency mentioned on the pump nameplate must agree with the
supply voltage.

See also the F/C manual enclosed at the end of the present document.

The control cable must be at least distant by 10 cm to the mains cable and
crossings shall be at 90°.

Pump control and power supply connection:
See « Ordering information » for the power supply & interface type on the
pump.

The power socket and cord are disconnection elements which must remain
accessible to the users.

Following power cables with connection IEC 320 / C19 exist:

Reference

UK 140307
l = 1.8 m

EUR Schuko plug 140306
l = 1.8 m

USA (high V) 140305
l = 1.8 m

Connection to exhaust side

■ No valve or restricting devices should be installed in the exhaust line of the

pump. If an exhaust line is installed, it must at least have the same diameter as
the exhaust flange. It should be installed in a manner so that no condensate can
enter the pump (siphon, slope).

The maximum exhaust pressure must neither exceed 1.15 bar absolute (0.15 bar
relative), nor fall under atmosphere pressure minus 15 mbar.

Pump exhaust to be connected if oil mist or process gases are to be avoided in
the pump area.

Corresponding pressure regulating devices to be installed by the user.

Installation

Warning

Warning

14 GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Following Hirschmann CA3GS power cables exist:

Reference

Switzerland 971457CH
l = 2.5 m

UK 971457GB
l = 2.5 m

EUR Schuko plug 971457EUR
l = 2.5 m

USA (high V) 971457NEMA
l = 2.5 m

sans prise 971457WW
l = 2.5 m

Control / interface connections for F/C pumps Sub-D9 Pin-out

Installation

P/N : 960461V3001
960462V3001

pin 1 : 24 V
pin 2 : NC
pin 3 : Rx Tx
pin 4 : NC
pin 5 : 0 V
pin 6 : valid Tx
pin 7 : Rx Tx
pin 8 : NC
pin 9 : 0 V

Sub-D female

P/N : 960363V3001
960463V3001

960465V3001
960465V3002

pin 1 : Analog output
pin 2 : 24 V
pin 3 : 10 V (potentiometer)
pin 4 : Digital input 2
pin 5 : NC
pin 6 : Potentiometer input
pin 7 : 0 V (potentiometer)
pin 8 : Digital input 1
pin 9 : 24 V

Sub-D male

For high speed operation, connect 8 and 9.
For low speed operation, connect 2 to 4.

(OPTION)

15GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Operation

The pump is protected against over-currents by two 5X20 mm internal fuses
rated 250 V, 16A Time lag T. 10A fuses can also be used under certain conditions.
Please contact us.

The fuse is mounted in a separate housing and can be exchanged from outside
using a screwdriver to open the fuse holder cap. See drawing below.

Exchange fuse only with electrically unplugged pump for at least 10 minutes.

3.3 Oil filling

The pump is delivered with its oil inside.

To fill in the oil, unscrew the oil fill plug and fill in until the oil level reaches the
“MAX” mark beside the oil sight glass.

1 l oil is needed for the SV40 BI FC .
2 l oil are needed for the SV65 BI FC.

3.4 Start-up

Always verify proper oil level before operating the pump.

4 Operation

4.1 Operation

To avoid overloading the motor, do not start the pump more than 6 times
within one hour. If more than 6 starts per hour are necessary keep the pump
running and mount a valve which opens and closes into the intake line.

Take note of warning labels on the pump.

Caution

Warning

16 GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Use ear protection in case of operation at high inlet pressures

Pumping of non-condensable gases

If the pump system contains mainly non condensable gases, the pumps should
be operated without gas ballast.

If the composition of the gases to be pumped is not known and if condensation
in the pump cannot be ruled out, run the pump with gas ballast valve open in
accordance with section below.

Pumping of condensable gases and vapors

With the gas ballast valve open and at operating temperature, the Sogevac®
pumps can pump pure water vapor up to the values indicated in the Technical
Data.

The gas ballast valve is opened by hand by a knob or a screwdriver on the
fan cover or by en EM valve 24 VDC. The running noise of the pump is slightly
louder if the gas ballast valve is open. Before pumping vapors ensure that the
pump has warmed up for approx. 30 min. with closed intake line and with open
gas ballast valve.

Don’t open the pump to condensable vapors until it has warmed to operating
temperature (approximately); pumping process gas with a cold pump results in
vapors condensing in the oil.

One sign of condensation of vapors in the pump is a rise of the oil level during
operation of the pump.

W h e n v a p o r s a r e p u m p e d , t h e p u m p m u s t n o t b e s w i t c h e d o f f i m m e d i a t e l y
after completion of the process because the condensate dissolved in the pump
oil may cause changes or corrosion. To prevent this, the pump must continue
to operate with open gas ballast valve and closed intake port until the oil is free
of condensate. We recommend operating the pump in this mode for at least 30
min. after completion of the process.

Daily ballasting is recommended when continuously pumping larger volumes
of condensable vapors.

In cycle operation, the pump should not be switched off between the cycles
but should continue to run with gas ballast valve open and intake port closed
(if possible via a valve). Power consumption is minimal when the pump is
operating at ultimate pressure.

Once all vapors have been pumped off from a process (e. g. during drying),
the gas ballast valve can be closed in order to improve the ultimate pressure.

4.2 Working in cycles in / out

We recommend strongly to limit starting of the pump to 5 or 6 per hour.
If the process need it, we recommend utilization of a pneumatic or
electromagnetic valve and to let the pump run continously.

Operation

Note

Caution

17GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Operation

4.3 Switching off / Shutdown

The intake port of the Sogevac® pumps contains an anti-suckback valve which
closes the intake port when the pump is switched off, thus maintaining the
vacuum in the connected apparatus and preventing oil from being sucked
back into the apparatus. The valve’s functioning is not impaired by gas ballast
operation.

If the pump has to be shutdown, drain the oil flush out the pump with fresh
oil and fill in the required amount of clean oil (see § 5.4). Close the connection
ports. Special preservation or flushing oils do not need to be used.

When the pump has been switched off due to over heating, initiated by the
motor or its temperature detector, the pump must be cooled down to the
ambient temperature, and must only be switched on again manually after
having eliminated the cause.

In order to prevent the pump from running up unexpectedly after a mains
power failure, the pump must be integrated into the control sytem in such a
way that the pump can only be started by a manual action. This applies equally
to emergency cut-off switches.

Close the gasballast.

4.4 Conditions of use

The Sogevac® SV BI (FC) pumps are intended to be used on clean processes, at
low inlet pressure, e.g. for backing turbo molecular pumps (TMP) in Analytical
or R&D applications like mass spectrometers, electronic microscopes, coating
installations, etc.

In normal operation, the Sogevac® SV BI (FC) pumps operated typically below
30 mbar inlet pressure or at ultimate pressure with open gas ballast (for pumps
having a gas ballast). Continuous duty is possible.

In the below listed abnormal conditions (but not limited to) the pump may stop
due to overheating of the power electronics or motor.

- Continuous operation at high inlet pressure

- Restricted, clogged or blocked exhaust filter or exhaust line

- Out of tolerance supply voltage

- Unsuitable, polluted or too old oil

- Too low oil level

- Too high ambient temperature

- Clogged fan hoods or impeded fresh air circulation

- Etc.

Caution

18 GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

4.5 Taking out of use

Please contact OLV for all relation question about the disposal of spares,
consummables or the entire pump

5 Maintenance

5.1 Safety Information

Observe all safety regulations.

All work must be done by suitably trained personnel. Maintenance or repairs
carried out incorrectly will affect the life and performance of the pump and may
cause problems when filling warranty claims.

Never mount used seals; always mount new seals.

5.2 Maintenance Intervals

The intervals stated in the maintenance schedule are approximate values for
normal pump operation. Unfavourable ambient conditions and/or aggressive
media may significantly reduce the maintenance intervals.

Maintenance job Frequency Section

Check the oil level Daily A

1st oil change Depends of process B

Subsequent oil changes Depends of process B
operation

Exhaust filter replacement Annually C

Gas ballast valve Monthly checking D

Anti-suck back valve checking Annually E

Fan cov er clea ning An nual ly F

Check the float valve Annually G

In order to simplify the maintenance work we recommend to combine several
jobs.

Maintenance works must be carried out with proper tools in an adequate work
space / bench equipped with sufficient lighting.

Use only OLV spare & consumables.

An overhaul at OLV is recommended every 3 years.

After maintenance operations, make sure the device is in a safe condition before
putting back into operation.

Maintenance

Warning

Caution

19GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

5.3 Oerlikon Leybold Vacuum Service

Whenever you send us in equipment, indicate whether the equipment is
contaminated or is free of substances which could pose a health hazard.

If it is contaminated, specify exactly which substances are involved. You must
use the form we have prepared for this purpose.

A copy of the form has been reproduced at the end of these Operating
Instructions: “Declaration of Contamination for Compressors, Vacuum Pumps
and Components”. Another suitable form is available from
www.oerlikon.com → Oerlikon Leybold Vacuum Systems → Documentation
→ Download Documents.

Attach the form to the equipment or enclose it with the equipment.

This statement detailing the type of contamination is required to satisfy legal
requirements and for the protection of our employees.

We must return to the sender any equipment which is not accompanied by a
contamination statement.

The pump must be packaged in such a way that it will not be damaged
during shipping, and so that no harmful substances can escape from the
package.

When disposing of used oil, please observe the relevant environmental
regulations.

5.4 Maintenance Work

Checking the oil

A. Oil level

The oil level shall be checked at least once a day and must be, while the pump
is in operation, close to the MAX marks. Should the oil level be below the MIN
mark switch off the pump, check it (see chapter 4) and add the required amount
of oil.
Oil level may drop when pump is operating due to oil distribution in the
pump.

B. Oil Change

Oil must be changed typically after the first year of service. Further oil changes
must be done annually. If there is considerable pollution, it could be necessary
to change the oil more frequently.

Oil changing must be done with a switched off and still warm pump. Open
the oil drain plug and let the used oil run out into an appropriate container.
Refasten the oil drain plug when oil runs sloup the pump briefly (5 sec. max.)
and switch of immediately. Reopen the oil drain plug and drain the rest of the
oil.

Additional warning note: more frequent oil changes may be necessary if the
ambient temperature is above 30 °C.

Before refastening the oil drain plug, inspect the o-ring and verify that it is
free of particulate and is seated properly. Replace if necessary.

Caution

Form

Contamination

Maintenance

Warning

20 GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Maintenance

The pump should be "flushed" if there is considerable pollution.

To flush the pump, for clean oil up to the minimum level, let the pump run for a
few minutes and drain the oil. Install a full charge of oil, 1 liter.

When disposing of used oil, please observe the relevant environmental
regulations.

C. Replacing the exhaust filters

Oil mist escaping from the exhaust during operation indicates that the filter is
probably clogged. Increased energy intake by the motor could also be the result
of a soiled exhaust filter. Pump switched off, open the exhaust hood, take out
the filter and replace it. Also check the gasket of the exhaut flange and change
it if necessary.

Take care about hot oil ! Risk of burning by touching !

D. Gas ballast valve cleaning

Contact Oerlikon Leybold Vacuum.

Clean the membrane, the seat and the knob.

Reassemble in the reverse sequence.

E. Anti-suck back valve checking

The anti-suck back valve should be checked at the same time as the inlet flange
sifter and if dirty, be cleaned with an appropriate solvent.

Also check, if there is no damage on the sealing part of the valve.

F. Fan cover cleaning

Soiling of the fan cover may lead to overheating of the motor and the pump.

Put off the cover and clean it with blast air.

Before starting the pump again, be sure that the cover has been
reassembled.

G. Checking the float valve

When replacing the exhaust filter, check the cleanliness and the proper
operation of the float valve. After having disassembled the exhaust flange and
oil casing, remove screw, pull on the float valve, clean the nozzle and check that
the float itself oscillates free around its axle and that the valve is tight. Clean the
float chamber of the oil casing. Reassemble in the reverse sequence.

Warning

Caution

21GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Troubleshooting

6 Troubleshooting

Fault Possible cause Remedy Reference
section *

Pump does not Pump is connected incorrectly. Connect the pump correctly. 3.3
start. Motor protection switch incorrectly set. Set motor protection switch properly or. 3.3
change fuse.
Operating voltage does not match motor. Replace the motor.
Motor is malfunctioning. Replace the motor.
Oil temperature is below 12 °C (54 °F). Heat the pump and pump oil or use 1.4
different oil.
Oil is too viscous. Use appropriate oil grade. 5.4-B
Exhaust filter / exhaust line is clogged. Replace the filter or clean the exhaust line. 5.4-D

Pump does not External leak Repair the pump.
reach ultimate Float valve does not close. Repair the valve. 5.4-H
pressure. Anti-suckback valve is malfunctioning. Repair the valve. 5.4-F
Inadequate lubrication due to:

■ unsuitable or contaminated oil, Change the oil (degas it, if necessary). 5.4-C

■ clogged oil filter, Replace the oil filter. 5.4-C

■ clogged oil lines. Clean the oil casing.

Vacuum lines are dirty. Clean vacuum lines.
Pump is too small. Check the process date; replace the
pump, if necessary.

Pumping speed is
too low. Precaution : install a dust filter in intake line.
Exhaust filter is clogged. Install new filter elements. 5.4-D
Connecting lines are too narrow or Use adequately wide and short 3.2
too long. connecting lines.
Anti-suckback valve is hard to open. Check spring free length.

After switching off System has a leak. Check the system.
pump under Anti-suckback is malfunctioning. Repair the valve. 5.4-F
vacuum, pressure
in system rises
too fast.

Pump gets too Cooling air supply is obstructed. Set pump up correctly. 3.1
hot Cooler is dirty. Clean the cooler.
Ambient temperature is too high. Set pump up correctly. 3.1
Process gas is too hot. Change the process.
Oil level is too low. Add oil to reach the correct oil level. 5.4-C
Oil is unsuitable. Change the oil. 5.4-C
Oil cycle is obstructed. Clean or repair the oil lines.
Exhaust filter / exhaust line is obstructed. Replace the exhaust filter, clean the 5.4-D
exhaust line.
Pump module is no longer usable. Replace the pump module. 5.4-K

22 GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Troubleshooting

Fault Possible cause Remedy Reference
section *

Oil in intake line Oil comes from the vacuum system. Check the vacuum system.
or in vacuum Anti-suckback valve is obstructed. Clean or repair the valve. 5.4-F
vessel. Sealing surfaces of anti-suckback valve Clean or repair the intake port and valve. 5.4-F
are damaged or dirty.
Oil level is too high. Drain the excess oil. 5.4-B

Pump’s oil Exhaust filters are clogged or damaged. Replace the filters. 5.4-C
consumption too Nozzle of float valve is clogged. Check the valve, clean the nozzle. 5.4
high, oil mist at Oil level is too high. Drain the excess oil. 5.4-B
exhaust.

Oil is turbid. Condensation. Degas the oil or change the oil and clean 4.1/5.4-B
the pump.
Precaution : open the gas ballast valve or
insert a condensate trap.
Clean the gas ballast intake filter. 5.4-G

Pump is Oil level is very low Add oil. 5.4-B
excessively noisy. (oil is no longer visible).
Oil filter is clogged. Change the oil and filter. 5.4-B
Large vacuum leak in system. Repair vacuum leak.
Contact Oerlikon Leybold Vacuum.

* Reference section : This coluum refers to the section in the Operating Instructions that contains the applicable repair information.

Never mount used seals. Always mount new seals.

23GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Spare parts

7 Spare parts

To guarantee safe operation of the Oerlikon Leybold Vacuum pump, only
original spare parts and accessories should be used. When ordering spare parts
and accessories, always state pump type and serial number. You can find part
numbers in the spare parts list.

Consummables and main spare parts kits for Sogevac® pumps are usually
available on stock at Oerlikon Leybold Vacuum’s service centers. The list of these
parts is given hereafter and in the spare parts table where the contents of each
kit is detailed.

■ Exhaust demisters

■ Oil

■ Service kit

■ Set of seals

■ Repair kit

We recommend to use these kits which have been defined to allow an
optimal maintenance or repair. Individual spare parts may need longer
delivery time.

24 GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Spare parts

19

19c

1

2

3

4

5

6

7

8

9

9a

11a

11

12

11c

11d

13

14

15

16

17

18

21

20

22

23

4

24

25

5

26

27

26

28

43

29

31

32

33

34

35

40

40a

40b

41

A

10

38

11b

19a

19b

41a

30

44

38

37

36

39a

39

1/2ECHELLE

ADETAIL

45

Power cable not

shown

25

GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Spare parts

S
V
4
0

B
I
F

C

S
V
6
5

B

I
F
C

Pos Qty SPECIFICATI ON

Dim e n si on s

(mm )

Material Ref, No, Notes



11MODULE COVE

R

971464070 Incl.2



11MODULE COVE

R

EK6 5 06 3 4 2 In c l .2



23SCREW CHC M6X12



31COOLING FAN 971424870



48SCREW CHC M8 X 30





510WASHE

R

W8





61RADIAL SHAFT SEAL PTFE

  



61RADIAL SHAFT SEAL FKM





71END PLATE PTFE - FKMEK6505725 Incl.4-6, 8, 13, 14





71END PLATE PTFE - FKMEK971472920Incl.4-6, 8, 13, 14





81GB SCREW NON-RETURN UNIT EK6700450

 



91MANUAL GAS BALLAST EK971472930



9a 1 O-RING FKM





10 1 EM GAS BALLAST 24 V DC ±10%, EK971472940 Incl 38



11 1 ROTOR WITH RINGS 71420760 Incl. 11a, 11c, 11d





11 1 ROTOR WITH RINGS EK971472810 Incl. 11a, 11b, 11c, 11d





11a 1 ROTOR RING





11b 1 ROTOR RING





11c 1 ROTOR RING





11d 1 ROTOR RING





12 1 VANES SET OF 3 71420810





12 1 VANES SET OF 3 EK971472820





13 1 O-RING FKM

 



14 1 O-RING FKM

 



15 1 RUBBER MOUNT (SET OF 4) DN30 H25 71212640 Incl.16



16 4 HEXAGONAL FLANGE NUT H M8



17 1 PUMP CYLINDER EQUIPPED EK6503297 With centering pins





17 1 PUMP CYLINDER EQUIPPED EK971472830 With centering pins





18 1 RADIAL SHAFT SEAL PTFE

  



18 1 RADIAL SHAFT SEAL FKM





19 1 MOTO

R

See Pos. 42



19a 1 MOTOR RING 71421150



19b 1 SCREW CHC M10 X 55



19c 1 FAN 71416840



19d 1 FAN COVE

R

71416830



19 1 MOTO

R

EK9 71 4 72 8 4 0 Pos. 4 2



19a 1 MOTOR RING 71416880



19b 1 SCREW CHC M10 X 70



19c 1 PROTECTION BOX

Upon r eq ues t



20 1 O-RING FKM

 



21 1 SPRING





22 1 INTAKE VALVE FKM





23 1 INTAKE FLANGE 25KF EK971472850 Incl. 4, 20, 21, 22



23 1 INTAKE FLANGE 40KF EK971472860 Incl. 4, 20, 21, 22



24 1 EXHAUST VALVE





25 1 VALV E STOP





26 4 SCREW CHC M8 X 12





27 1 GASKET FKM

 



28 1 OIL SIGHT GLASS G3/4





29 1 PLUG M - BARBED HOSE FITTING G1 1/4 M - DN13 971444130 Incl. 30



29 1 ADAPTE

R

G1 1/ 4 M - 2 5KF EK971 443480 Incl. 30



29 1 ADAPTE

R

G1 1/ 4 M - 4 0KF 711181 23 Incl. 30



30 1 O-RING FKM





31 4 SCREW CHC M8X20



32 1 EXHAUST FLANGE G1 1/4 71420440 Incl. 33



33 1 O-RING FKM

 



34 1 SPRING UNIT 71420370

 



35 1 EXHAUST FILTER WITH BYPASS 971471470





35 1 EXHAUST FILTER WITH BYPASS 71417300





36 1 GASKET FOR PIN





37 1 CENTERING PIN DN2.5 971427110



38 3 O-RING FKM

 



39 1 PLUG + O-RING G 1 71073040



39a 1 O-RING FKM

 



40 1 FLOAT VALVE COMPL. 71417210 Incl. 40a, 40b



40a 1 OIL RETURN VALV E SEAL FKM





40b 1 O-RING FKM





41 1 OIL CASING EK6700464 Incl. 5, 27 - 41a / excl. 29



41 1 OIL CASING EK971472870 Incl. 5, 27 - 41a / ex cl. 29



41a 2 O-RING FKM





42 1 FREQUENCY CONVERTER

200 - 240V

±10%

50/60 Hz

Upon r eq ues t

Auf Anfrage
Sur demande

With motor cable



43 1 DRAIN COUPLING G3 /4 712416 08



44 1 OIL RECOVERY PIPE 971461400



44 1 OIL RECOVERY PIPE 71417130



SHAFT SEAL KIT PTFE
SV40BI FC PTFE EK6700438



SHAFT SEAL KIT PTFE
SV65BI FC PTFE EK971472950



SHAFT SEAL KIT FKM
SV40BI FC FKM EK6700467



SHAFT SEAL KIT FKM
SV65BI FC FKM EK71417018



S

ET OFSEA L

S

SV40BI FC FKM-PTFE EK971472980





SET OF SEALS
SV65BI FC FKM-PTFE EK971472890





REPAIR K IT
SV40BI FC FKM - PTFE EK9714729 90



REPAIR K IT
SV65BI FC FKM - PTFE EK9714729 00



VACUUM GENERATOR WITH MAN GB
SV40BI FC FKM-PTFE EK6700437



VACUUM GENERATOR WITH MAN GB
SV65BI FC FKM-PTFE EK971472910



SERVICE KIT
SV40BI FC 971427660



SERVICE KIT
SV65BI FC 971423440

26 GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

27GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Declaration of Contamination of Compressors, Vacuum Pumps and Components

The repair and / or servicing of compressors, vacuum pumps and components will be carried out only if a correctly completed
declaration has been submitted. Non-completion will result in delay. The manufacturer can refuse to accept any equipment
without a declaration.

A separate declaration has to be completed for each single component.
This declaration may be completed and signed only by authorised and qualified staff.

Customer/Dep./Institute:______________________________

___________________________________________________

Address: ____________________________________________

___________________________________________

Person to contact: __________________________________

Phone: _________________ Fax: __________________

End user: _____________________________________

Reason for return  applicable please mark

 Repair  chargeable  warranty

 Exchange  chargeable  warranty

 exchange already arranged / received

Return only:  rent  loan  for credit

Calibration:  DKD  Factory calibration

 Quality test certificate DIN 55350-18-4.2.1

A. Description of the Leybold product Failure description: __________________________________

Material description: ______________________________________ __________________________________________________

Catalog number: ________________________________________ Additional parts: ____________________________________

Serial number: _________________________________________ Application Tool: ____________________________________

Type of o il ( Forev acuum pump s): ____ ____ ____ _________ ____ __ App lication Proc ess: _______ ____ ____ _________ ____ _____

B. Condition of the equipment
No

1)

Yes No Contamination: No1) Yes

1. Has the equipment been used

1)

  toxic  

2. Drained (Product/service fluid)   corrosive  

3. All openings sealed airtight  flammable  

4. Purged   explosive

2)

 

If yes which cleaning agent: ________________________________________ radioactive

2)

 

and which method of cleaning: ________________________________________ microbiological

2)

 

1) if answered with “No” go to D. other harmful substances  

C. Description of processed substances (Please fill in absolutely)

1. What substances have come into contact with the equipment:
Trade name and / or chemical term of service fluids and substances processed, properties of the substances; According to safety

data sheet
(e.g. toxic, inflammable, corrosive, radioactive)
Tradename: Chemical name:

a) _______________________________________________________________________________________________________

b) _______________________________________________________________________________________________________

c) _______________________________________________________________________________________________________

d) _______________________________________________________________________________________________________
No Yes

2. Are these substances harmful?  

3. Dangerous decomposition products when heated?  
If yes, which? ____________________________________________________________________________________________

__

2)

Components contaminated by microbiological, explosive or radioactive products/substances will not be accepted

without written evidence of decontamination.

D. Legally binding declaration
I / we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level.

Name of authorised person (block letters):_________________________________

Date________________ Signature of authorised person_____________________
firm stamp

Notes

28 GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

29

GA02341_002_A6 - 12/2013 - © Oerlikon Leybold Vacuum

Oerlikon
Leybold Vacuum GmbH

Bonner Strasse 498
D-50968 Cologne
Phone: [phone]
Fax: [phone]
[e-mail]

www.oerliko

n

leyboldvacuu

Germany

Oerlikon Leybold Vacuum GmbH

Bonner Strasse 498
D-50968 Cologne
Phone: [phone]
Fax: [phone]
[e-mail]
www.oerlikon.com/leyboldvacuum

Oerlikon Leybold Vacuum GmbH
Sales Area North

Branch Office Berlin
Industriestrasse 10b
D-12099 Berlin
Phone: [phone]
Fax: [phone]
[e-mail]

Oerlikon Leybold Vacuum GmbH
Sales Office South

Branch Office Munich
Karl-Hammerschmidt-Strasse 34
D-85609 Aschheim-Dornach
Phone: [phone]
Fax: [phone]
[e-mail]
[e-mail]

Oerlikon Leybold Vacuum GmbH
Service Competence Center

Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone: [phone]
Fax: [phone]
[e-mail]

Oerlikon Leybold Vacuum GmbH
Mobil Customer Service

Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone: [phone]
Fax: [phone]
[e-mail]

Oerlikon Leybold Vacuum
Dresden GmbH
Service Competence Center

Zur Wetterwarte 50, Haus 304
D-01109 Dresden
Service:
Phone: [phone]
Fax: [phone]
[e-mail]

Europe

Belgium

Oerlikon Leybold Vacuum
Nederland B.V.
Belgisch bijkantoor

Leuvensesteenweg 542-9A
B-1930 Zaventem
Sales:
Phone: [phone]
Fax: [phone]
[e-mail]
Service:
Phone: [phone]
Fax: [phone]
[e-mail]

France

Oerlikon Leybold Vacuum
France S.A.S.

7, Avenue du Québec
Z.A. de Courtaboeuf
F-91140 Villebon-sur-yvette
Sales and Service:
Phone: [phone]
Fax: [phone]
[e-mail]
[e-mail]

Oerlikon Leybold Vacuum
France S.A.S.

Valence Factory
640, Rue A. Bergès
B.P. 107
F-26501 Bourg-lès-Valence Cedex
Phone: [phone]
Fax: [phone]
[e-mail]

Great Britain

Oerlikon Leybold Vacuum
UK LTD.

Silverglade Business Park
Leatherhead Road Unit 9
KT9 2QL Chessington, Surrey
(London)
Sales:
Phone: [phone]
Fax: [phone]
[e-mail]
Service:
Phone: [phone]
Fax: [phone]
[e-mail]

Italy

Oerlikon Leybold Vacuum
Italia S.r.l.

Via Trasimeno 8
I-20128 Mailand
Sales:
Phone: [phone]
Fax: [phone]
[e-mail]
Service:
Phone: [phone]
Fax: [phone]
[e-mail]

Netherlands

Oerlikon Leybold Vacuum
Nederland B.V.

Proostwetering 24N
NL-3543 AE Utrecht
Sales and Service:
Phone: [phone]
Fax: [phone]
[e-mail]
[e-mail]

Switzerland

Oerlikon Leybold Vacuum
Schweiz AG

Leutschenbachstrasse 55
CH-8050 Zürich
Sales:
Phone: [phone]
Fax: [phone]
[e-mail]
Service:
Phone: [phone]
Fax: [phone]
[e-mail]

Spain

Oerlikon Leybold Vacuum
Spain, S.A.

C/ Huelva 7
E-08940 Cornellà de Llobregat
(Barcelona)
Sales:
Phone: [phone]
Fax: [phone]
[e-mail]
Service:
Phone: [phone]
Fax: [phone]
[e-mail]

America

USA

Oerlikon Leybold Vacuum
USA Inc.

5700 Mellon Road
USA-Export, PA 15632
Phone: [phone]
Fax: [phone]
[e-mail]
Sales:
Phone: [phone]
Fax: [phone]
Service:
Phone: [phone]
Fax: [phone]

Brazil

Oerlikon Leybold Vacuum
Brasil

Rod. Vice-Prefeito Hermenegildo Tonolli,
nº. 4413 - 6B
Distrito Industrial
Jundaí - SP
CEP 13.212-315
Sales and Service:
Phone: [phone]
Fax: [phone]
[e-mail]
[e-mail]

Asia

P. R. China

Oerlikon Leybold Vacuum (Tianjin)
International Trade Co. Ltd.

Beichen Economic
Development Area (BEDA),
No.8 Western Shuangchen Road
Tianjin 300400
China
Sales and Service:
Phone: [phone]
Fax: [phone]
Fax: [phone]
[e-mail]
[e-mail]

India

Oerlikon Leybold Vacuum
India Pvt Ltd.

No. 82(P), 4th Phase
K.I.A.D.B. Plot
Bommasandra Industrial Area
Bangalore - 560 099
Indien
Sales and Service:
Phone: [phone]
Fax: [phone]
[e-mail]
[e-mail]

Japan

Oerlikon Leybold Vacuum
Japan Co., Ltd.

Headquarter
23-3, Shin-Yokohama
3-chome
Tobu A.K. Bldg. 4th Floor
Kohoku-ku
Yokohama-shi 222-0033
Sales:
Phone: [phone]
Fax: [phone]
[e-mail]
[e-mail]

Oerlikon Leybold Vacuum
Japan Co., Ltd.

Tsukuba Technical Service Cente

r

1959, Kamiyokoba
Tsukuba, Ibaraki
305-0854 Japan
Service:
Phone: [phone]
Fax: [phone]
[e-mail]

Malaysia

Oerlikon Leybold Malaysia
Oerlikon Leybold Vacuum
Singapore Pte Ltd.

No. 1 Jalan Hi-Tech 2/6
Kulim Hi-Tech Park
Kulim, Kedah Darul
Aman 09000
Malaysia
Sales and Service:
Phone: [phone]
Fax: [phone]
[e-mail]
[e-mail]

South Korea

Oerlikon Leybold Vacuum
Korea Ltd.

3F. Jellzone 2 Tower
Jeongja-dong 159-4
Bundang-gu Sungnam-si
Gyeonggi-do
Bundang 463-384, Korea
Sales:
Phone: [phone]
Fax: [phone]
[e-mail]
Service:
623-7, Upsung-Dong
Cheonan-Si
Chungcheongnam-Do
Korea 330-290
Phone: [phone]
Fax: [phone]
[e-mail]

Singapore

Oerlikon Leybold Vacuum
Singapore Pte Ltd.

8 Commonwealth Lane
#01-01, Singapore 149555
Singapore
Sales and Service:
Phone: [phone]
Fax: [phone]
[e-mail]
[e-mail]

Taiwan

Oerlikon Leybold Vacuum
Taiwan Ltd.

No 416-1, Sec. 3
Chunghsin Road., Chutung
Hsinchu County 310
Taiwan, R.O.C.
Sales and Service:
Phone: [phone]
Fax: [phone]
[e-mail]
[e-mail]

Sales and Service