Leybold vacuum TURBO.DRIVE 400, 800073V0002, 800073V0003, 800073V0004, 800073V0008 Operating Instructions Manual

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TURBO.DRIVE 400

Frequency Converter for Turbomolecular Pumps

Operating Instructions 17200492_002_A5

Part Numbers

800073V0002 800073V0003 800073V0004 800073V0008

ive (

DC 2

3) 4

V(X4)

EAT

Contents

Page

Important Safety Information 4

1 Description 7

1.1 Design and function 7

1.2 Standard equipment 7

1.3 Technical data 8

1.4 Ordering data 10

1.5 Accessories 10

2 Installation 13

2.1 Conforming utilization 13

2.2 Operating environment 14

2.3 Mounting the frequency converter 15

2.4 Connecting the pump 16

2.5 Connecting the power supply 16

2.6 Relay status 21

3 Operation 22

3.1 Start-up 22

3.2 Interfaces 23

3.2.1 RS 232 C interface (SERVICE X5) 26

3.2.2 RS 485 interface 27

3.2.3 Profibus DP 29

3.2.4 USB interface (X106) 30

3.2.5 Parameter list 31

3.2.6 Specific parameter data for the pumps 36

3.2.7 Warning codes for parameter 227 38

3.3 Switching on 40

3.4 Shutting down 41

3.5 Emergency shut down 41

3.6 Setting pumping speed and rotational speed 42

3.7 Operation at reduced current 43

3.8 Changing the frequency dependent normal operation level 44

3.9

3.10 Changing the start delay time 46

3.11 Selecting relay functions 47

3.12 Reading the error memory 47

Changing the maximum permissible run up time 45

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Contents / Safety Information

4 Maintenance 48

5 Troubleshooting 49

6 Waste Disposal 57

EC Conformance Declaration 59

Obligation to Provide Information

Before installing and commissioning the TURBO.DRIVE, carefully read these Operating Instructions and follow the information so as to ensure optimum and safe working right from the start.

The Oerlikon Leybold Vacuum TURBO.DRIVE 400 has been designed for safe and efficient operation when used properly and in accordance with these Operating Instructions. It is the responsibility of the user to carefully read and strictly observe all safety precautions described in this section and throughout the Operating Instructions. The TURBO.DRIVE

tion and under the conditions described in the Operating Instructions

personnel only. Consult local, state, and national agencies regarding specific requirements and regulations. Address any further safety, operation and/or maintenance questions to our nearest office.

must only be operated in the proper condi-

. It must be operated and maintained by trained

NOTICE

DANGER indicates an imminently hazardous situation which, if not avoided, will result in death or serious injury.

WARNING indicates a potentially hazardous situation which, if not avoided, could result in death or serious injury.

CAUTION indicates a potentially hazar if not avoided, could result in minor or moderate injury.

DANGER

WARNING

dous situation which,

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CAUTION

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Safety Information

NOTICE

WARNING

NOTICE is used to notify users of installation, operation, programming or maintenance information that is important, but not hazard related.

We reserve the right to alter the design or any data given in these Operating Instructions. The illustrations are not binding.

Retain the Operating Instructions for further use.

Important Safety Information

The frequency converter must only be connected to power supplies which meet the requirements for functional extra low voltage with positive isolation in accordance with IEC 364 (VDE 0100, Part 410, or local regulations) (PELV).

During operation the frequency converter may attain temperatures up to 75 °C. We recommend that the unit be installed so that it can not be touched inadvertently.

NOTICE

Inside the unit there is the risk of suffering burns from hot components.

The pump may be operated only with a suitable frequency converter and suitable connecting cables.

Ensure correct polarity.

Route all cables so as to protect them from damage.

Disconnect and connect the cable connections only while the pump is turning no longer (green status LED off) and with the mains power switched off (yellow power LED off). Otherwise there is the risk of damaging the TURBO.DRIVE 400.

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Description

DRIVE (X3)

HEAT SINK HEAT SINK

Pump

connection

connection male 24 V

upply voltage

Green LED STS

Yellow LED PWR

24 VDC (X4)

g surfaces

Coolin

off: Pump at standstill (< 3 Hz) flashes slowly 1/s: Start command is present (about 10 s after start) flashes fast 3/s: Running up or running down on: Normal operation

off: No supply voltage flashes: Supply voltage too low or too high on: Supply voltage is present

pin Sub-D connector

male for RS

TU R B O .DRIVE

TD 400

232 interface

LEDs

REMOTE connector

9 pin Sub-D (female)

Red LED ERR

Fig. 1.1 TURBO.DRIVE 400, front and rear side

off: No error, no warning flashes: Warning is present, pump can be operated

possibly with some restrictions

on: Fault is present, pump stopped or can not

be operated

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Description

connection

9-way Profibus

PRO FIBUS (X105) H IGH LOW

mal format

address in the h

setting the Profibus

Selector switches for

exadec

DRIVE (X3)

HEAT SINK HEAT SINK

24 VDC (X4)

Fig. 1.2 Rear side of TURBO.DRIVE 400 with additional Profibus interface

Selector switch for setting the bus

RS 485 (X104)

TU R B O .DRIVE

TD 400

address for RS 485 communication in the hexadecimal format

Fig. 1.3 Front side of TURBO.DRIVE 400 with additional RS 485 interface

TU R B O .DRIVE

TD 400

Abb. 1.4 FTURBO.DRIVE 400 front panel with additional USB interface

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USB connection

(X106)

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1 Description

1.1 Design and function

The TURBO.DRIVE 400 supplies power to the TW and SL series turbomolecular pumps and is used to control their operation.

The TURBO.DRIVE 400 is either integrated in the pump or it is separate and linked to the pump by means of a connecting cable.

The TURBO.DRIVE 400 requires a supply voltage of 24 V DC. It is equipped with interfaces for programmable controls (REMOTE) and an optional interface for serial communication.

Description

1.2 Standard equipment

Included with the delivery are the DC connector Hirose HS16P-3, four moving nuts M4 for affixing the frequency converter and the Operating Instructions.

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Description

1.3 Technical data

Supply voltage 24 V (± 10%)

Residual ripple

<3%

Output

Voltage 0 - 24 V 3~ Power 160 W Frequency 0 - 1500 Hz

When operating a TW 300, TW 300 H, TW 220/150(/15) S, SL 300

Nominal voltage 24 V Max. power consumption

190 W

Max. peak current, input side 8 A DC Required power output from the power supply ≥ 200 W

When operating a TW 70 H, TW 250 S. SL 80

Nominal voltage 24 V Max. power consumption

140 W

Max. peak current, input side 6 A DC Required power output from the power supply ≥ 150 W

Max. length of the DC cable (shielded)

at 3 x 1.5 mm at 3 x 2.5 mm

Relay output rating 42 V, 0.5 A

Ambient temperature

during operation 5 - 45 °C storage - 15 - + 70 °C

Relative air humidity 5 to 85 %

Overvoltage category II Contamination grade 2

Temp. of the cooling surface 5 - 55 °C

For Part Nos. 800073V0004 5 - 50 °C

Power consumption ≤ 20 W

2 2

non condensing

20 m

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Type of protection IP 20

Weight, approx. 0.7 kg

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18,5

DRIVE (X3)

HEAT SINK HEAT SINK

79,0

41,0

100

73,3

24 VDC (X4)

32*

27,6

Description

100

* Profibus-Version 20

* Profibus version 20

TURBO.DRIVE TD 400

15,9

18,2 63,8

Fig. 1.5 Dimensional drawing for the frequency converter; dimensions in mm

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Description

(

C24

3) V

(

A T

1.4 Ordering data

Frequency converter TURBO.DRIVE 400

with RS 232 C interface 800073V0002 with RS 485 C interface 800073V0003 with Profibus interface 800073V0004 wiht USB interface 800073V0008

Connecting cable pump - frequency converter

1.0 m long 152 47

2.5 m long 864 49

3.0 m long 864 40

5.0 m long 864 50

1.5 Accessories

OEM power supply (with screw terminals)

SITOP 24 V / 10 A (120/230 VAC / 50/60 Hz) 152 50

■ supplies the TURBO.DRIVE 400 with 24 V DC

■ other power supplies on request

24 V DC cable (TURBO.DRIVE 400 – OEM power supply)

3 m 200 12 732 5 m 200 12 733 10 m 200 12 734 20 m 200 12 735

Mains cable for power supply, 2 m long

with EURO plug 800102V0001 with US plug 5-15P 800102V1001

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Power supply unit - plug and play TURBO.POWER 300 800100V0002

■ supplies the TURBO.DRIVE 400 with 24 V DC

■ plug & play cables

■ desktop unit or rack mountable

24V DC Power cable TURBO.DRIVE 400 – TURBO.POWER 300)

1 m 800094V0100 3 m 800094V0300

5 m 800094V0500 10 m 800094V1000 20 m 800094V2000

Description

100 - 240 V AC

TURBO.POWER 300

T5A~250 V

Mains cable for TURBO.POWER 300, 3 m long with EURO plug 800102V0002 with US plug 6-15P 800102V1002 with UK plug 800102V0003

Power supply and control unit TURBO.CONTROL 300 800100V0001

■ supplies the TURBO.DRIVE 400 with 24 V DC

■ plug & play cables

■ desktop unit or rack mountable

■ with power switch

■ with start/stop switch for the turbomolecular pump

■ remote control

■ status LEDs and status relays

24V DC Control cable (TURBO.DRIVE 400 – TURBO.CONTROL 300)

1 m 800091V0100 3 m 800091V0300

5 m 800091V0500 10 m 800091V1000 20 m 800091V2000

START

NORMAL

POWER

ERROR

START

1 0

STOP

TURBO.CONTROL 300

Mains cable for TURBO.CONTROL 300, 3 m long with EURO plug 800102V0002 with US plug 6-15P 800102V1002 with UK plug 800102V0003

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Description

Mechanical accessories

off

Plug for connector REMOTE with integrated ON/OFF switch for the pump (Sub-D plug, 9 way) 152 48

Heat sink for frequency converter 800110V0001

Top hat rail adaptor (mounting aid for TURBO.DRIVE 400 and TURBO.POWER 300)

800110V0003

Accessories for serial interfaces

USB driver: the Windows driver can be downloaded from www.oerlikon.com after selecting menu item www.oerlikon.com in the menu Oerlikon Leybold Vacuum → Documentation → Download Software

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PC software "Turbo.Drive Server" for Windows 95 and higher, CD-ROM

■ Display, change, save and compare parameter lists

■ Integration of customer’s software

■ Record parameter data 800110V0102

(new parameter library for TURBO.DRIVE 400 is required, please ask us for a quotation) The software can also be downloaded from www.oerlikon.com in the menu Oerlikon Leybold Vacuum → Documentation → Download Software

GSD file for Profibus DP upon request The software can also be downloaded from www.oerlikon.com in the menu Oerlikon Leybold Vacuum → Documentation → Download Software

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2 Installation

2.1 Conforming utilization

The TURBO.DRIVE 400 supplies power to the TW series turbomolecular pumps and is used to control their operation.

The TURBO.DRIVE 400 is suited for operation of the following pumps:

■ TURBOVAC TW 70 H

■ TURBOVAC TW 220/150 S, TW 220/150/15 S,

TW 400/300/25 S

■ TURBOVAC TW 250 S

■ TURBOVAC TW 290 H

■ TURBOVAC TW 300, TW 300 H

Installation

■ TURBOVAC SL 80, SL 300

Other pumps may only be operated after approval from Oerlikon Leybold Vacuum or if the operation of such pumps is expressly permitted in the Operating Instructions for the specific pump.

The TURBO.DRIVE may only be operated with power supply units which meet PELV (Safety Extra Low Voltage) requirements.

The TURBO.DRIVE must only be opened by certified Oerlikon Leybold Vacuum Service Centres. Opening by unauthorised personnel voids warranty.

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Installation

2.2 Operating environment

See also Chapter 1.3 Technical Data.

Places of installation up to 1000 m above sea level (3300 ft) are possible without restrictions. At altitudes over 1000 m heat dissipation by the ambient air is impaired. Please consult us.

If the TURBO.DRIVE 400 has been integrated in the pump, it is cooled by the pump.

As to the cooling requirements for the separately fitted TURBO. DRIVE see Fig. 2.1. The bottom side of the frequency converter must not be allowed to attain too high temperatures; see technical data.

CAUTION

Max. magnetic induction levels are 15 mT, max. radioactive radiation spec. is 10

The frequency converter must only be used in rooms within buildings. It must not be operated in explosive gas atmospheres.

The frequency converter and the connecting lines must be protected against exposure to sprayed and condensing water.

During operation the frequency converter may attain temperatures up to 75 °C. We recommend that the unit be installed so that it can not be touched inadvertently.

Owing to the small quantity of combustible material and the proven safety of the instrument by testing in accordance with EN 61010, the risk through fire and burning can almost completely be excluded.

rad (103Gy).

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Installation

Heat sink and forced

cooling required

Ambient temperature

Operation possible

without additional cooling

12345

Motor current (Parameter 5)

eat sink required

(convection cooling)

Fig. 2.1 Cooling requirements for the TURBO.DRIVE 400 when fitted separately

2.3 Mounting the frequency converter

The frequency converter may be affixed with the aid of the enclosed M4 sliding nuts. The bottom side of the frequency converter must be cooled sufficiently.

Ensure an adequate supply and discharge of cooling air.

For special requirements please contact us.

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Installation

2.4 Connecting the pump

In the case of a separately fitted TURBO.DRIVE 400 connect the pump using the connecting cable.

NOTICE

WARNING

The pump may be operated only with a suitable frequency converter and suitable connecting cables.

Route all cables so as to protect them from damage.

2.5 Connecting the power supply

The power supply must meet the requirements given in Section 1.3. Peak currents in the kHz range may be present on the DC side. The power supply should have a current limiter of the current regulated type.

NOTICE

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Connect the frequency converter to the 24 V DC power supply or to the TURBO.CONTROL 300 or to the TURBO.POWER 300 via the 24 V DC cable.

Ensure correct polarity. Pin 1 + 24 VDC Pin 2 0 V Pin 3 GND

The frequency converter is equipped with an internal 8 AT (slow blow) fuse. It can only be replaced by Oerlikon Leybold Vacuum staff.

Connect the power supply to the mains.

acuum

Installation

REMOTE

93 - 132 / 187 - 264 V AC, 50/60 Hz

24 V DC

RIVE (X3)

HEAT SINK HEAT SINK

24 V DC (X4)

Pin 3 GND

Shielding

Pin 1 24 V

Pin 2 0 V

Fig. 2.2 Pin assignment of the DC connector (X4) Model Hirose HS16P-3

In the case of an integrated

connecting cable is omitted.

Fig. 2.3 Connecting the pump and the power supply

TURBO.DRIVE 400 the

DC cable, with shielding, max. 20 m

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Installation

OFF

MAINS

REMOTE IN

Programmable

logic control (PLC)

REMOTE

100 - 240 V ~

FRONT

T5 A

250 V ~

T5 A

250 V ~

REMOTE OUT

24 V POWER OUT

100 - 240 V ~

50 - 60 Hz

24 V DC Control cable

24 V DC (X4)

HEAT SINK HEAT SINK

DRIVE (X3)

REMOTE

TURBO.DRIVE 400 the

In the case of an integrated

connecting cable is omitted.

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Fig. 2.4 Connecting the pump and the TURBO.CONTROL 300

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100 - 240 V AC

50/60 Hz

T 5 A ~ 250 V

100 - 240 V AC

TURBO.POWER 300

Installation

24 V DC Power cable

24 V DC (X4)

HEAT SINK HEAT SINK

DRIVE (X3)

TURBO.DRIVE 400 the

In the case of an integrated

connecting cable is omitted.

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Fig. 2.5 Connecting the pump and the TURBO.POWER 300

Installation

Relay - Normal operation

■ While deceleration, acceleration, Stop:

n. c.

Relay functions

nom.

4 connected to 5 (as shown; passive)

■ During normal operation (f > 0,9·f

534

n. o.

com.

4 connected to 3 (active)

Relay - Error

291

n. c.

■ No error: 1 connected to 2 (as shown; passive)

■ Error is present: 1 connected to 9 (active)

n. o.

com.

TURBO.DRIVE 400

TURBO.DRIVE S

TURBO.DRIVE 300

TURBO.DRIVE 400

Contact open = STOP

Contact closed = START

24 V

0 V = STOP

24 V = START

Relay output rating: 42 V, 0.5 A

Start/Stop operation

Example 1: Operation via a PLC

Example 2: Operation via contacts

TURBO.DRIVE 300

TURBO.DRIVE 400

876

54321

Pin assignment of the connector

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Pin assignment for the Start/Stop input

Switching threshold for

7,2 kΩ

the Start/Stop control

5 V

24 V

input:

Low-Level: < 7,5±0,5 V

6,2 V

2,6 kΩ

High-Level: > 10 ±0,5 V

acuum

3,6 kΩ

TURBO.DRIVE 400

Caution: No power feed is

allowed at pin 7

Fig. 2.6 Pin assignment of the REMOTE (X1) connector

operating mode before that

Installation

NORMAL ERROR STATUS ERROR

OPERATION (green) (red)

setpoint

frequency

Start/ Pump Normal Error is Motor Relay Relay LED LED

stop rotating frequency present drive

signal ≥ 90% of

Stop no no no off passive passive off off Pump not operating

Input data / status Output data Operating mode

2.6 Relay status

Stop yes no no off passive passive flashes off Pump is decelerating

Stop yes yes no off passive passive flashes off Just after stop; pump was in the normal

Start no no no on passive passive off off Just after start

Start yes no no on passive passive flashes off Pump is accelerating

Start yes yes no on active passive green off Pump is in the normal operating mode

Stop no no yes off passive active off red Error is present; pump is at standstill

Stop yes no yes off passive active flashes red Error is present; pump is decelerating

Stop yes yes yes off passive active flashes red Error has just occurred

Start no no yes off passive active off red Error is present; pump is at standstill

Start yes no yes off passive active flashes red Error is present; pump is decelerating

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Start yes yes yes off passive active flashes red Error has just occurred

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Other modes are not possible; they indicate a failure affecting the TURBO.DRIVE 400.

Installation

3 Operation

3.1 Start-up

The TURBO.DRIVE 400 offers the possibility of gently running in pumps which were not operated for a period between 6 and 12 months.

For this set the parameter P119 “Bearing run-in function” to 1; thereafter start this function through the start command.

All three LEDs will flash rapidly, during acceleration the green LED flash more slowly.

The run can be cancelled by revoking the start command. Pausing is not possible.

After a completed run-in the pump stops. The LEDs continue to flash.

Parameter 119 remains set after the run and needs to be set manually to 0.

In all, the entire bearing run-in process may take up to 4 hours.

Turbomolecular pumps which were not operated for a period of over 12 months should be returned to us. For more information on this please contact your local sales partner.

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3.2 Interfaces

The frequency converter has a RS 232 interface as standard (SERVICE X5) and is optionally equipped with serial interfaces:

■ RS 485 C

■ Profibus DP

■ USB

The TURBO.DRIVE 400 is configured through the parameters according to the parameter list. Pxxx denotes parameter value xxx.

The PC software "TURBO.DRIVE Server" allows convenient access by the user to the parameters of the frequency converter. It can be downloaded from www.oerlikon.com in the menu Oerlikon Leybold Vacuum → Documentation → Download Software.

Operation

Interfaces priority level

The optional interface has the highest priority level, followed by the Service interface X5. The Remote input X1 has the lowest priority level. See also parameter 179 in Section

3.2.4.

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Operation

Applications which can be implemented with the aid of the serial interface:

Application Benefits to the customer How to do it

Networking of several pumps Savings relating to the costs for With Field Bus systems like and other equipment signalling cables Profibus

Automation Savings related to repetitive For example by a control

manual work computer

Avoidance of warnings and ■ Precise planning for Monitoring of: warnings before overload maintenance ■ Motor current P5 operation and early detection ■ Improved reliability of sensitive ■ Ball bearing temperature of a failing pump production processes in a P125 or P127

vacuum ■ Motor temperature P7

■ Frequency converter temperature P11

Standby operation ■ Extending the service life Reducing the rotor’s frequency

for the ball bearings through P24

■ Cutting energy consumption

Troubleshooting Quick analysis of problems Reading of error memories

P171, P174 and P176: error code, speed, operating hours for error

Slow pressure control by Dispensing with a flow controller Changing the rotor frequency changing the pumping speed through parameter 24

Reducing the maximum motor Cost savings through smaller With P139, motor current current power supply units if peak loads reduction factor

can be reduced

Starting the pump with a delay if Cost savings through smaller With P36, delay several consumers are power supply units connected to the same PSU if peak loads can be reduced

Frequency converter as a simple Dispensing with pressure gauges Monitor motor current P5; pressure gauge, since second function for “Normal motor current is dependent Operation” relay: relay switches on the vacuum conditions as soon as the motor

current threshold is tripped. Adjust second function: P29 Set motor current thresh.: P27

Lowering the normal operation Normal operating mode is Reduce frequency threshold threshold attained faster, processes through P25

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can be started faster

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Operation

TxD

RxD

1,4 and 6-9 are internally connected and must not be used.

GND

Fig. 3.1 Pin assignment for the socket at the frequency converter

(female) SERVICE X5

1,4 and 6-9 are internally connected and must not be used.

(2)

TxD

RxD

(3)

(5)

GND

TURBO.DRIVE

SERVICE X5

(2)

RxD

TxD

(3)

(5)

GND

Shield

9-pin IBM PC

RS 232

interface

Fig. 3.2 Providing a RS 232 connection

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Operation

3.2.1 RS 232 C interface (SERVICE X5)

Standards DIN 66020

Protocol acc. to VDI/VDE 3689

Transmission rate 19200 baud

Response delay default setting 10 ms

(parameter 180)

Address range non-addressable

Max. cable length 5 m

Interface connector 9 way Sub-D type,

socket on the instrument (female)

thread UNC4-40

Note: If on the controlling side an RS 232 interface in accordance with the PC standard with a 9-pin Sub-D male connector is present, then a straight through cable as shown in Fig. 3.2 may be used.

Refer also to Operating Instructions GA 05.281

Links for activation of the

bus terminator

0,5 A, 24 V DC

4 5

TxD/RxD +

TxD/RxD –

6 7

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Fig. 3.3 Pin assignment for the socket at the frequency converter for RS 485 interface (male)

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3.2.2 RS 485 interface

Standards ISO/IEC 8482, EIA 485

Protocol acc. to VDI/VDE 3689

Transmission rate 19200 baud fixed

Response delay default setting 10 ms

(parameter 180)

Address range 0 ... 15

Max. cable length 50 m (with bus termination)

Type of cable 2 wire twisted pair

(twisted pair cable)

Differential voltage levels logic "0": (see also “Standards”) transmitter: 1.5 ... 5 V

receiver: > 0.3 V

Operation

logic "1":

transmitter: - 1,5 ... - 5 V

receiver: ≤ - 0,3 V

Interface connector 9 way Sub-D type,

socket on the instrument (male)

thread UNC4-40

Note: After having changed the bus address through the rotary switch (see Fig. 1.3), the frequency converter must be switched off (yellow power LED off) and then on again so as to enable the new address setting.

Bus addresses over 15 can only be set via Parameter 37.

Refer also to Operating Instructions GA 05.281

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Operation

Bus terminator

for longer cable runs

120 Ω

Master

...

For longer cable runs:

Links for activation of the

bus terminator

X 5

(9)

(8)

(6)

TxD/RxD –

(7)

X 5

TxD/RxD +

TURBO.

X5 (7) X5 (8)

TURBO.

X5 (7) X5 (8)

DRIVE

+ 5 V

+ 3.3 V

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390 Ω

150

150 Ω

TURBO.DRIVE

390 Ω

Fig. 3.4 Connection of the RS 485 bus

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3.2.3 Profibus DP

The Profibus DP used has been defined in the standards EN 50170 and VDI/VDE 3689.

For more information on the Profibus system:

"The New Rapid Way to Profibus DP", Manfred Popp, Profibus Nutzerorganisation e.V., Haid-und-Neu-Str. 7 76131 Karlsruhe, Germany P/N: 4.072 www.profibus.com

Upon request we shall be pleased to provide detailed information on the hardware and the protocol used for the data.

Operation

Refer also to Operating Instructions GA 05.281

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Operation

3.2.4 USB Interface (X106)

Transmission rate 19,200 Baud

Response delay time 10 ms (default)

(parameter 180)

Address range non-addressable

Maximum cable length 5 m

Interface connector USB B

Notice: the USB interface has been electrically separated from the converter and is supplied from the side of the USB host with a current of approximately 15 mA. Via the protection diode, separation with respect to 33 V is maintained.

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Operation

3.2.5 Parameter list

* specific values for each pump; see table of pumps, Chapter 3.2.6; r = readable, w = writable

No. Designation Min. Max. Default Unit r/w Format Description

1 Converter type 0 65535 0 r u16 136 = Turbo.Drive 400

2 Software version 0 65535 10000 r u32 xx.yy: version, zz: correction index

3 Actual frequency 0 65535 0 Hz r u16 Actual rotor frequency

4 Actual intermediate 0 1500 30 0,1 V r u16 Actual intermediate circuit voltage

circuit voltage of the converter

5 Actual current 0 150 0 0,1 A r u16 Actual motor current

6 Actual electrical

power 0 65535 0 0,1 W r u16 Actual drive input power

7 Actual motor -10 150 0 °C r i16 Actual value of the motor

temperature temperature.

8 Save data command 0 65535 0 /w i16 A write command with any value

saves temporary data into nonvolatile memory.

11 Actual converter -10 150 0 °C r i16 Actual heat sink temperature

temperature of the converter.

16 Motor temperature 0 150

warning threshold warning threshold results in a

17 Nominal motor

current 5 60

18 Maximum frequency 750 1200

19 Minimum frequency 0 1200

20 Critical frequency 0 1200

23 Pump type 0 255

24 Setpoint frequency 0 1200

25 Normal operation 35 99 90 % r/w u16 Setpoint of the frequency dependent

°C r i16 Exceeding the motor temperature

warning.

0,1 A r u16 Maximum permissible motor current

Hz r u16 Highest permissible frequency

Hz r u16 Lowest permissible frequency

Hz r u16 Minimum frequency level. When the

pump is accelerating this frequency must be reached within the maximum passing time (P183).

r u16

Hz r/w u16 Setpoint of the rotor frequency

normal operation level

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Operation

No. Designation Min. Max. Default Unit r/w Format Description

27 Current norm. oper. 5 60 20 0,1 A r/w u16 Motor current dependent normal

operation level; ; If P29[0] = 1: Defines the normal operation level. Normal operation if P5 <= P27 Parameter cannot be changed during operation of the system

29 Relay function X1 0 8 0 r/w u16 If required, special functions can be

assigned to the normal operation and the error relay. Field 0

specifies the function for normal operation:

0 = Frequency dependent 1 = Motor current dependent 2 = Fieldbus controlled 3 = Trigger current bearing temperature (P122) 4 = Venting function (P247/P248) 5 = Pump at standstill (f < 3) 6 = Start command is present 7 = Ready for switch on (=STW Bit1) 8 = No mains power failure or no generator operation (P303 Bit 4 =1 = generator operation) Field 1 specifies the function for the error relay: 0 = Energised when an error is present 1 = Deenergised when an error is present 2 = Fieldbus controlled 3 = Venting function

32 Max. run-up time 30 2000 720 s r/w u16 Max. permissible time during which

36 Start delay time 0 255 0 0,1 min r/w u16 Delays the start of the pump to

38 Start counter 0 65535 0 r u16 Increments each time when passing

37 RS485 address 0 31 0 r/w u16 Parameterizable RS485 address;

through the address switch or a value entered here provided the address switch is set to 0. A change of this parameter setting will only be effective after the power supply has been switched off and on.

119 Bearing run-in 0 1 0 r/w u16 0=deactivated

function 1=new pump type starts with

Run in using the run-in sequence specified through the pump table without run-up time monitoring (a min at b Hz ….c min at d Hz…in total 4 stages for mechanical pumps)

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the pump must attain the normal operation threshold (P24*P25) with the start signal present.

allow leadtime for the fore vacuum pump for example.

through the critical speed range.

The address is specified either

run-in sequence

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Operation

No. Designation Min. Max. Default Unit r/w Format Description

122 Normal TMS 20 70 40 °C r/w u16 Switch-on temperature for fan when

P29[0]=3. For P125 > P122 the normal operation relay is energised.

125 Bearing temperature -10 150 0 °C r i16 Actual value of the bearing

temperature

126 Bearing temperature -10 150

warning threshold warning threshold results in a

127 Bearing temperature -10 150 0 °C r i16 Actual value of the bearing

128 Motor temperature -10 150 2 °C r i16 Falling below the motor temperature

lower warning lower warning threshold threshold results in a warning.

131 Motor temperature 10 150 -10 °C r i16 Falling below the motor temperature

lower error threshold - lower error threshold causes the

132 Bearing temperature -10 150

error threshold error threshold causes the pump to

133 Motor temperature -10 150

error threshold error threshold causes the pump to

134 Enable cooling fan 0 19 19 r/w 116 0 = Cooling fan off

on turbopump 19 = Cooling fan on

°C r i16 Exceeding the bearing temperature

warning

temperature

pump to be switched off.

°C r i16 Exceeding the bearing temperature

be switched off.

°C r i16 Exceeding the motor temperature

be switched off.

139 Current reduction 30 100 100 % r/w u16 Is used for the reduction of the

factor maximum consumption current, e.g. for adaptation of low performance power supplies. Note: values < 100 reduce the pump performance and increase the run-up time.

140 Intermediate circuit 0 150 0 0,1 A r i16 Actual average intermediate circuit

current current of the converter.

150 Standby frequency 0 1200

151 Enable standby 0 1 0 r/w u16 0 = normal speed (P24);

Hz r/w u16 Standby operation frequency

setpoint

1 = standby speed (P150)

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Operation

No. Designation Min. Max. Default Unit r/w Format Description

171 Error code memory 0 65535 0 r u16 Indexed parameter for storing the

most recent 40 error codes. The individual error memory entries are accessed via this parameter with additional index number. The last error code is accessed with index 0 and the oldest with index 39. See Section 5 Troubleshooting for the error codes.

174 Error rotor frequency 0 65535 0 Hz r u16 Actual speed, when error occurred.

Access analogously as for

parameter 171.

176 Error operating hours 0 0 h r u32 Operating hours, when error

2147483647 occurred. Access analogously as for

parameter 171.

179 Fallback PZD1 0 65535 1024 r/w u16 Response when cancelling the

control rights or in the case of a communication interruption of the bus adapter Behaviour in case bit 10 in the control word of the bus adapter is cancelled or when interrupting the communication between converter and bus adapter (see also P182). Here it is assumed that the respective bus adapters perform a cyclic communication on the USS side, so that the respective converter electronics is capable of detecting a communication interruption

The bits in parameter 179 represent an equivalent to the control word in the USS protocol.

The actions linked to these bits are run provided bit 10 in the control word (USS protocol for bus adapter) is cancelled or if there are interruptions in the communication between converter and bus adapter.

Here bit 10 is of special significance: Bit 10 = 0 The control rights are returned to the next lower priority level. All other bits are not relevant. Bit 10 = 1 The control rights remain unchanged. The actions linked to the other bits are run.

180 Resp. delay time 0 20 10 ms r/w u16 Response delay time; Pause time

between received and transmitted USS protocol string of the frequency converter's serial interface RS232 and RS485. We recommend not to change the default setting (10ms).

182 Watchdog timer USS 0 65535 10 0,1 s r/w u16 Delay when cancelling the

control rights of the bus adapter and time-out in the case of a communication interruption

Defines the time characteristic when cancelling bit 10 in the control word of the USS protocol or when an interruption in the communication between bus adapter and converter and electronics is detected. Handling when cancelling bit 10 or when there is an interruption on the communication side of the USS bus adapter, is the same.

Value 0.0: Indefinite time delay. In this way a change of the control right is inhibited.

Values 0.1 ..6553.5: A change in the control right corresponding to the setting of parameter 179 is only effected after the time span defined through parameter 182 has elapsed.

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Operation

No. Designation Min. Max. Default Unit r/w Format Description

183 Max. passing time 0 1800 500 s r u16 Max. permissible time during which

the pump must - with the start signal present - have passed through the critical speed range between 60 Hz and P20.

184 Converter operating 0 0 0,01 h r u32 Counts the operating hours of the

hours 2147483647 converter during active pump

operation.

227 Warning bits 1 0 65535 0 r u16 Active warnings described bit per bit.

See Section 3.2.6.

247 Vent on frequency 0 1200 300 Hz r/w u16 Frequency at which the venting valve

shall be switched on in the event of a mains power failure. Power failure venting can be enabled through P240.

248 Vent off frequency 0 1200 5 Hz r/w u16 Frequency at which the venting valve

shall be switched off in the event of a mains power failure. Power failure venting can be enabled through P240.

249 Generator operation 0 1 1 r/w u16 0 = inactive

1 = active

303 Actual operating 0 65535 0 r u16 Bit 0: Normal operation

status Bit 1: Ready for switch on

Bit 2: Speed is increasing Bit 3: Speed is dropping Bit 4: Generator operation Bit 5: Standby Bit 6: reserved Bit 7: reserved

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Operation

No. Designation Min. Max. Default Unit r/w Format Description

312 Catalog number 0 127 :CHAR r u16 Catalogue number of the converter.

of converter [8000xxV000x] One ASCII char per index.

313 Product name 0 127 [TD_400] :CHAR r u16 Product name of the converter.

(Index 0...10 usable) 0 127 :CHAR r u16 One ASCII char per index.

Only for DeviceNet purpose

315 Serial number of 0 127 :CHAR r u16 Serial number of the converter.

converter [xxxxxxxxxxx] One ASCII char per index. (Index 0...10 usable)

918 Act. Profibus addr. 0 65535 0 r u16 Active Profibus address

947 Current error number 0 65535 0 r u16 Currently pending error. See

Chapter 5 Troubleshooting.

3.2.6 Specific parameter data for the pumps

Bearing Motor

Ty pe of P u m p No m i na l M i ni m u m M i ni mu m M a x. M a x. M a x . t e mp . t e mp .

pump designation and setpoint setpoint frequency motor bearing motor warning warning

frequency frequency level current temp. temp. threshold threshold

P23 P18 / P24 P19 P20 P17 P132 P133 P126 P16

0 TW 220/150

TW 220/150/15 750 650 375 6.0 80 100 70 95

1 TW 400/300/25S

TW 250/200/40 800 650 375 6,0 80 100 70 95

2 TW 250S 860 750 340 5.0 67 100 60 95

3 TW 70 H 1200 910 340 5.0 67 90 60 85

4 TW 290 H /

TW 300 /

TW 300 H 1000 890 375 5.0 80 63 70 58

5 SL 80 1200 910 340 5.0 – 55 – 53

6 SL 300 1000 890 375 5.0 – 56 – 54

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acuum

Operation

Type of

pump designation [Hz]

P23 P150

0 TW 220/150

1 TW 400/300/25S

2 TW 250S 800

3 TW 70 H 910

4 TW 290 H /

5 SL 80 910

6 SL 300 960

Run-in sequence, bearing run-in function

Type of Pump Run-in Run-in Run-in Run-in Run-in Run-in pump designation speed 1 time 1 speed 2 time 2 speed 3 time 3 P23 [Hz] [s] [Hz] [s] [Hz] [s]

Pump Standby frequency

TW 220/150/15 700

TW 250/200/40 700

TW 300 /

TW 300 H 960

0 TW 220/150

TW 220/150/15 100 3600 300 5400 300 5400

1 TW 400/300/25S

TW 250/200/40 100 3600 300 5400 300 5400

2 TW 250S 100 3600 300 5400 500 5400

3 TW 70 H 180 3600 350 5400 600 5400

4 TW 290 H /

TW 300 /

TW 300 H 200 3600 430 5400 580 5400

5 SL 80 180 3600 430 5400 580 5400

6 SL 300 200 3600 430 5400 580 5400

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Operation

3.2.7 Warning codes for parameter 227

P227, Bit

0 Motor tempe-

1 Converter

2 Bearing over-

Designation Meaning Possible cause Remedy

rature warning

temperature warning

The motor temperature has passed the warning threshold

Overtemperature at the power output stage or within the frequency converter

The permissible warning threshold for the bearing temperature was exceeded.

Forevacuum pressure too high.

Gas flow too high

Fan defective

Water cooling switched off

Ambient temperature too high

Poor cooling

Forevacuum pressure too high.

Gas flow too high

Fan defective

Check the ultimate pressure of the backing pump and install a bigger backing pump if req.

Seal leak, check process

Replace fan

Switch on water cooling

Ensure max. ambient temperature of 45°C

Improve cooling

Check the ultimate pressure of the backing pump and install a bigger backing pump if req.

Seal leak, check process

Replace fan

3 Motor under-

temperature warning

4, 5 not used

6 Overspeed

warning

The minimum permissible motor temperature (warning threshold) is not reached.

Water cooling switched off

Ambient temperature too low

Pump cooling too high

acuum

Switch on water cooling

Ensure min. ambient temperature of 0°C

Reduce water cooling

Operation

P227, Bit

7, 8, 9, 10

11 Overload

12, 13

14 Power supply

Designation Meaning Possible cause Remedy

not used

warning

not used

voltage warning

The pump speed has dropped under the normal operation threshold

Supply voltage failure during active operation of the pump P4 > Umax or P4 < Umin

Forevacuum pressure too high.

Gas flow too high

Intermediate circuit voltage too low or maximum time for generator operation was exceeded.

DC power supply voltage below 24V

Check the ultimate pressure of the backing pump and install a bigger backing pump if req.

Seal leak, check process

15 Fan voltage

has failed

Mains voltage failure

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Operation

3.3 Switching on

Switch on the DC power supply. The yellow LED at the frequency converter lights up.

Switch on the turbomolecular pump at the frequency converter

■ via pins 7 and 8 of the socket REMOTE (X1) (For example via a remote control or with the aid of the plug with integrated ON/OFF switch: see Section 1.5 Accessories).

■ by a start command via the interface.

The turbomolecular pump accelerates. The green LED flashes. When the pump reaches normal operation the green LED lights up permanently.

After a mains power failure the pump can run up automatically once more.

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3.4 Shutting down

Switch off the pump at the frequency converter.

■ via contacts 7 and 8 of the socket REMOTE (X1).

■ apply a stop command via the interface.

■ for the power supply units offered or recommended by

Oerlikon Leybold Vacuum switch off the DC voltage.

After switching off, the green status LED will flash until the rotor of the turbomolecular pump is at standstill. This may take several minutes. With the DC power supply off, the turbomolecular pump will act as a generator supplying the frequency converter with energy as indicated by the yellow power LED.

Operation

If a failure occurs the turbomolecular pump will be shut down automatically. The red LED at the frequency converter lights up.

To shut down the frequency converter, switch the pump off and wait until the rotor of the turbomolecular pump has arrived at standstill (green status LED off).

Then switch the mains power off and wait until the yellow power LED is off. Then only disconnect any cable connections.

3.5 Emergency shut down

The emergency shutdown facility of a system controller must be capable of shutting the pump down as detailed in Chapter 3.3. The rotor of the turbomolecular pump may be stopped faster by venting the pump; for this refer to the Operating Instructions for the pump.

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Operation

3.6 Setting pumping speed and rotational speed

For the purpose of reducing the pumping speed of the pump because of application requirements or for other reasons it can make sense to reduce the rotational speed.

In order to permanently reduce the speed we recommend the following procedure:

With the aid of a Windows PC and the PC software “TURBO. DRIVE Server” change the setting for the parameter 24 “Setpoint frequency”. The possible values for parameter 24 will depend on the type of pump connected. Parameter 18 “Nominal pump frequency“ defines the maximum value and parameter 19 “Minimum setpoint frequency for the pump” defines the minimum value.

So as to retain the value saved for parameter 24 when switching the pump off, the parameter value needs to be saved permanently. For this enter any value (for example 1) for parameter 8. Thereafter changed parameters will be saved permanently.

Parameters which are typical for the specific type of pump (see Chapter 3.2.5) are reset to the factory defaults after having changed the type of pump and when switching on the power supply voltage again.

The rotational speed of the pump may be changed during operation also with the aid of a Windows PC and the PC software “TURBO.DRIVE Server”.

However, we here recommend a PLC compliant solution with the aid of the Profibus. The speed can be set over the Profibus in two ways:

■ by changing parameter 24 within the limits defined by parameters 19 and 18 or

■ by transfer as the main setpoint (for this also refer to VDI/VDE 3689).

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3.7 Operation at reduced current

Not all applications require that the TURBO.DRIVE 400 be operated at its maximum current. Operation at reduced current will allow operation off a smaller power supply unit or to operate two or more turbomolecular pumps off a power supply unit which in practice is just not strong enough to supply the maximum current for several connected pumps. However, this will increase the run up time, and the maximum gas throughput and backing pressure specifications are reduced.

For this proceed as follows:

With the aid of a Windows PC and the PC software “TURBO. DRIVE Server” change the setting for the parameter 139 “Current reduction factor”. The possible values for parameter 139 can be varied within the limits of 30 to 100 % of parameter 17 (current dependents on the type of connected pump. The newly entered current reduction factor will only be active after switching off and on again.

Operation

So as to retain the value saved for parameter 139 when switching the pump off, the parameter value needs to be saved permanently. For this enter any value (for example 1) for parameter 8. Thereafter changed parameters will be saved permanently.

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Operation

3.8 Changing the frequency dependent normal

operation level

Depending on the quality of the vacuum which needs to be provided by the turbomolecular pump it may make sense to reduce the frequency dependent normal operation threshold, so that the ready status can be attained faster by the vacuum system. The factory default of 90 % represents a good compromise so that a change will hardly ever be required.

For this proceed as follows:

With the aid of a Windows PC and the PC software “TURBO. DRIVE Server” change the setting for the parameter 25 “Frequency dependent normal operation level”. The possible values for parameter 25 can be varied within the limits of 35 to 99 % of parameter 24 (nominal speed depends on the type of connected pump).

So as to retain the value saved for parameter 25 when switching the pump off, the parameter value needs to be saved permanently. For this enter any value (for example 1) for parameter 8. Thereafter changed parameters will be saved permanently.

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3.9 Changing the maximum permissible run up time

In vacuum systems at a high backing pressure or with increased quantities of gas during the run up phase, the run up time for the turbomolecular pump may be longer. This will then cause the frequency converter to output an error message,

The maximum permissible run up time is changed as follows:

With the aid of a Windows PC and the PC software “TURBO. DRIVE Server” change the setting for the parameter 32 “Maximum run up time”. The possible values for parameter 32 can be varied within the limits of P183 to 2000 seconds. The default setting is 720 seconds. As a rule, no value below 720 seconds should be entered as this would give rise to unnecessary error messages. If a significantly higher value than 720 seconds is required, this may indicate that the turbomolecular pump is being overloaded. For this reason in such a case the temperature data from the frequency converter and the turbomolecular pump (parameter 7 = motor temperature, 11 = frequency converter temperature, 125/127 bearing temperature) should be specially monitored during application trials.

Operation

So as to retain the value saved for parameter 32 when switching the pump off, the parameter value needs to be saved permanently. For this enter any value (for example 1) for parameter 8. Thereafter changed parameters will be saved permanently.

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Operation

3.10 Changing the start delay time

Generally it will make sense to let the turbomolecular pump run up immediately after applying the start command. However when operating two or more turbomolecular pumps off a single power supply unit, it may make sense to start the pumps one after the other. One way of achieving this is to enter a start delay time differing from 0.

To set up the start delay time proceed as follows:

With the aid of a Windows PC and the PC software “TURBO. DRIVE Server” change the setting for the parameter 36 “Start delay time”. The possible values for parameter 36 can be varied within the limits of 0 to 25.5 minutes (0 to

255).

So as to retain the value saved for parameter 36 when switching the pump off, the parameter value needs to be saved permanently. For this enter any value (for example 1) for parameter 8. Thereafter changed parameters will be saved permanently.

acuum

3.11 Selecting relay functions

See parameter 29.

3.12 Reading the error memory

The TURBO.DRIVE 400 is capable of permanently saving up to 40 error events. The error codes are saved under parameter number 171. In addition to each error code the following is also saved:

■ Rotor frequency at the point of time when the error event in parameter 174 occurred.

■ The corresponding number of operating hours in parameter 176.

Operation

Access to each of the 40 groups of values is accomplished with the aid of an index value which needs to be stated besides the parameter number when accessing via the protocol in accordance with VDI / VDE 3689. The range of index numbers ranges from 0 to 39.

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Maintenance

4 Maintenance

The frequency converter is maintenance free. Repairs must only be done by Oerlikon Leybold Vacuum.

If required clean the frequency converter of dust with a dry cloth.

When removing a defective frequency converter from an installation, please note the information given in Chapter

3.4.

During all work on the pump which is being driven by the frequency converter, the system must be protected against being switched on. For this disconnect the DC power supply.

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Troubleshooting

5 Troubleshooting

Before you start searching for the source of the problem, you should carry out a few simple checks:

Are the connections in good working order?

■ Mains connection,

■ DC power supply to the frequency converter,

■ Connector cable between the frequency converter and

the pump

Is the forevacuum pressure sufficient?

After having removed the cause for the error reset the error message at the TURBO.DRIVE:

■ In case of error code 8 by switching the mains power off.

■ In case of the other errors by applying a STOP signal

via the socket REMOTE (X1) or a reset sequence via the serial interface or by switching the mains power off.

The error codes can only be read if a serial interface is present.

The following table has been provided as a guide when determining the causes of errors.

acuum

Troubleshooting

Error code

1 Overspeed

2 Pass through

Designation Meaning Possible Cause Remedy

warning

time error

The actual frequency exceeds the setpoint by over 10 Hz.

The pump has not reached the minimum speed after the maximum runup time has elapsed.

Frequency converter defective

Forevacuum pressure too high.

Gas flow too high

Rotor blocked

Contact Oerlikon Leybold Vacuum Service.

Check the ultimate pressure of the backing pump and install a bigger backing pump if req.

Seal leak, check process

Check if the rotor turns freely. Contact Oerlikon Leybold Vacuum Service if the rotor is damaged or blocked.

Shutdown

yes

3 Bearing

temperature error

4 Short circuit

error

5 Converter

temperature error

The maximum permissible bearing temperature was exceeded.

Overtemperature at the power output stage or within the frequency converter

Forevacuum pressure too high.

Gas flow too high

Fan defective

Water cooling switched off

Ambient temperature too high

Poor cooling

Check the ultimate pressure of the backing pump and install a bigger backing pump if req.

Seal leak, check process

Replace fan

Switch on water cooling

Ensure max. ambient temperature of 45°C

Improve cooling

yes

acuum

Troubleshooting

Error code

6 Run-up time

7 Motor tem-

Designation Meaning Possible Cause Remedy

error

perature error

The pump has not reached the normal operating frequency after the maximum run-up time.

The motor temperature has exceeded the shutdown threshold.

Forevacuum pressure too high.

Gas flow too high

Forevacuum pressure too high.

Gas flow too high

Fan defective

Water cooling switched off

Check the ultimate pressure of the backing pump and install a bigger backing pump if req.

Seal leak, check process

Check the ultimate pressure of the backing pump and install a bigger backing pump if req.

Seal leak, check process

Replace fan

Switch on water cooling

Shutdown

yes

8 Pump error Pump couldn’t

be identified or no pump is connected

61 Bearing tem-

perature warning, top

82 Fan voltage

has failed

83 Motor tempe-

rature low warning

Pump not connected correctly to frequency converter

Hardware defective

Check connection between pump and frequency converter

Contact Oerlikon Leybold Vacuum Service

yes

acuum

Troubleshooting

Error code

84 Motor over-

101 overload

103 Supply

Designation Meaning Possible Cause Remedy

temperature warning

warning

voltage warning

The pump speed has dropped under the normal operation threshold

Intermediate circuit voltage too low or maximum time for generator operation was exceeded.

Forevacuum pressure too high.

Gas flow too high

DC supply voltage below 24V

Mains voltage has failed

Check the ultimate pressure of the backing pump and install a bigger backing pump if req.

Seal leak, check process

Check the voltage at the power supply and if required set up correctly

Remedy the cause for the mains power failure

Shutdown

106 overload error The pump

speed has dropped under the minimum speed

111 Motor under-

temperature error

The minimum permissible motor temperature is not attained.

Forevacuum pressure too high.

Gas flow too high

Ambient temperature too low

Pump cooling too high

Check the ultimate pressure of the backing pump and install a bigger backing pump if req.

Seal leak, check process

Ensure min. ambient temperature of 0°C

Reduce water cooing

yes

acuum

Troubleshooting

Error code

116 Permanent

117 Motor current

126 Bearing tem-

Designation Meaning Possible Cause Remedy

overload error

error

perature sensor error top

The speed of the pump has dropped below the normal operation threshold and has stayed there for a longer period of time.

Motor current less than nominal current

Bearing temperature sensor defective

Forevacuum pressure too high.

Gas flow too high

Cable fault

Faulty connector

Sensor defective, short circuit or broken cable

Check the ultimate pressure of the backing pump and install a bigger backing pump if req.

Seal leak, check process

Contact Oerlikon Leybold Vacuum Service

Shutdown

yes

128 Motor tem-

perature sensor error

143 Overspeed

error

Motor temperature sensor defective

Sensor defective, short circuit or broken cable

Contact Oerlikon Leybold Vacuum Service

yes

acuum

Troubleshooting

Error code

– Yellow power

div. Red LED

Error Possible Cause Remedy

LED is not on

flashes

No DC power

DC power miswired

Frequency converter defective

Warning message. See Section “3.2.6 Warning codes” for the possible reasons of the warning.

Check cables and power supply

Ensure correct polarity of the DC cable.

Replace frequency converter. The following may damage the freq. converter:

■ Disconnection of the DC cable while the pump was still rotating

■ Non-compliance with the note related to connecting several pump to a single power supply.

The pump can continue to run, as long as operation limits are only exceeded for a short time. In case of longer exceeding send pump and frequency converter to the OLV service.

Shutdown

–

acuum

Troubleshooting

Error code

– Turbomolecu-

Error Possible Cause Remedy

lar pump does not start, ERROR LED does not light.

lar pump produces loud running noises and vibrations.

Interface protocol error

No communication via the serial interface.

REMOTE connector (X1) connected wrongly.

REMOTE and SERVICE connectors mixed up.

Wrong Profibus address set.

Rotor out of balance

Bearing defective

Use USS protocol.

Connect bus as shown in Section 3.2.

Connect as shown in Fig.

2.6

Connect correctly.

Set address between 0 and 126.

Balance the rotor

Replace the bearing

Shutdown

–

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Troubleshooting

Error code

– Turbomolecu-

– Running

Error Possible Cause Remedy

lar pump does not reach ultimate pressure.

pump can not be stopped via X1

Measurement instrument defective

Measurement sensors soiled

Leaks at the equipment, lines or the pump

Pump soiled

Forevacuum pump provides insufficient pumping speed or ultimate pressure which is too high.

Frequency parameters programmed wrongly

Pump has been started via the serial interface, the interface controls the pump

Inspect the measurement sensor

Clean or replace the sensors

Check for leaks

Clean the pump

Check the ultimate pressure of the forevacuum pump and install a highercapacity vacuum pump if necessary

Check parameters.

Disconnect the DC supply or connect serial interface and stop via bus

Shutdown

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Waste Disposal

6 Waste Disposal

The equipment may have been contaminated by the process or by environmental influences. In this case the equipment must be decontaminated in accordance with the relevant regulations. We offer this service at fixed prices. Further details are available on request.

Contamination

Contaminated parts can be detrimental to health and environment. Before beginning with any work, first find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Separate clean components according to their materials, and dispose of these accordingly. We offer this service. Further details are available on request.

This product complies with the European Community Regulation 2002/95 (RoHS Restriction of Hazardous Substances).

CAUTION

RoHS compliance

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Notes

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www.oerlikon.com

LV_11139_2011 04.11

Oerlikon Leybold Vacuum GmbH

Bonner Strasse 498 D-50968 Cologne Phone: +49-(0)221-347 0 Fax: +49-(0)221-347 1250 info.vacuum@oerlikon.com

Leybold vacuum TURBO.DRIVE 400, 800073V0002, 800073V0003, 800073V0004, 800073V0008 Operating Instructions Manual

Specifications and Main Features

Frequently Asked Questions

User Manual