LEVIFLOW® Ultrasonic Flowmeters
Ultraclean Fluid Handling
LEVIFLOW® Integrated Flowmeter LFIF
LFIF-06: 10 l/min
Ultraclean Non-Invasive Flow Measurement!
ULTRASONIC FLOW MEASUREMENT
INTRODUCTION
The LEVIFLOW® LFIF flowmeter is designed for non-invasive flow
measurements of high purity fluids. Figure 1 illustrates the
operating principle. Two piezoelectric transducers, mounted at
both sides of the measuring tube of the fluid stream, generate
and receive an ultrasonic wave. The wave going in direction of the
flow (with-stream wave) is accelerated and the wave going
against (against-stream wave) the flow direction is slowed down.
The two waves are processed by a signal converter. The
difference of the transmit time of both waves is proportional to the
Figure 1: Operating principle of LFIF ultrasonic flowmeter.
1
2
velocity of the fluid.
The standard configuration of the LEVIFLOW® LFIF flowmeter
consists of a flow sensor and an integrated converter with a
digital signal processor (DSP) for processing the sensor signals.
The compact integration of flow-sensor and converter reduces
cabling effort and setup significantly. An analog and digital output
is provided and can be configured with a PC software. A two wire
RS485 bus allows communication and configuration with a PC.
SYSTEM BENEFITS
No contamination due to non-invasive measurement.
3b
3c
No moving parts -> no particle generation.
Straight through flow path with no corners and dead
zones.
3a
Easy configurable flow sensor parameters (PC software).
Improved signal stability (viscosity change and bubble
Figure 2: System Overview
robustness) compared to flowmeters like vortex types.
Simple and compact design with one connection cable.
Low pressure loss.
1
Excellent price/performance ratio.
APPLICATIONS
Flow monitoring of high purity liquid processes in
Semiconductor manufacturing.
CMP slurry flow measurement.
2
Flow measurement in chemical manufacturing.
Flow control in combination with Levitronix MagLev
pump systems.
Figure 3: Flowmeter components
Flow switch applications.
SPECIFICATIONS
Characteristics Specification
Flow Range [l/min] 0 – 10 l/min
Accuracy of Reading
@ 20 °C Water
For > 1.7 l/min: ± 2%
For < 1.7 l/min: ± 34 ml/min
Kinematic Viscosity 0.36 – 1.3 mm2/s (0.36 – 1.3 cSt)
Sound Speed 1450 – 1550 m/s (water)
Fluid Temperature
10 – 80 oC (50 – 176 oF )
Ambient must be < 40 °C at 80 °C fluid temperature
Ambient Temperature 0 – 50 oC (32 - 122 oF)
Maximum Fluid Pressure 0.5 MPa = 5 bar
Power Supply
Inrush (start-up) current
24 VDC ±10%, 38 mA
Peak < 690 mA during < 1 ms
Pressure Drop 380 mbar at 10 l/min and 20 °C water
Wet Parts / Fittings PFA / Tube 3/8” (OD = 9.52, ID = 6.38 mm)
Table 1: Specifications of flowmeter LFIF-06 (all data based on calibration with water at 20 oC with zeroing and ambient at 25°C)
Characteristics Specification
Weight ~ 80 g for flowmeter and ~ 180 g for 5m extension cable
Housing Materials PPS for housing body, FKM for sealing gaskets
PEEK for screws, PET for label
IP Classification IP-65 (indoor)
Electrical Connector Circular type (IP-65), lock-release mounting
Cables Separate extension cable with connector (see Figure 4)
Interfaces
(see also Figure 4)
RS485 with Modbus protocol
Analog Output with 0-20 mA (4-20mA configurable)
Digital Output:
Measurement Error, Flow Alarm, Volume Counter Pulse,
Pulsed Flow Output (0-1000Hz)
Configuration
Parameters
(Levitronix Config. SW)
Viscosity Linearization (up to 10 points)
Low Cutoff Alarm Outputs (low and high)
Damping Time (filter) Volume Counter
Wire
Pin #
Color
6 Brown
Connector Type:
Hirose HR-30-6P-6S
Open Wires
5 Red
4 Yellow
3 Orange
2 Green
1 Blue
Figure 4: Basic dimensions of flowmeter LFIF-06 and LFE-E cables with interface specifications
Pos. Article Name Part # Feature/Description Note
1 LFIF-06 100-30393
2a LFE-E.1-50 190-10371
2b LFE-E.2-50 190-10372
2c LFE-E.3-50 190-10383
YN-485I-TR, USB to RS485
3
Adaptor-TR Isolated
100-30392
Integrated Flowmeter for 10 l/min Calibration parameters are stored in flowmeter.
Extension Cable 5m PVC
Extension Cable 5m PVC
Extension Cable 5m PVC
Structure/Design
Purpose Communication over fieldbus of flowmeter with PC.
Table 2: Order information for standard components and accessories
Wire
Description
Size
AWG26
DC24V-
0.18 mm2
AWG26
DC24V+
0.18 mm2
AWG28
RS485-
0.11 mm2
AWG28
RS485+
0.11 mm2
AWG28
Analog Out+ Flow Value
0.11 mm2
AWG28
Digital Out+ Error
0.11 mm2
Waterproof lock-release mounting connector type for flowmeter connection.
Open wires at cable end for connecting to other equipment.
Waterproof lock-release mounting connector type for flowmeter connection.
Open wires at cable end, integrated pull-up resistor on digital output (flow switch app.).
Waterproof lock-release mounting connector type for flowmeter connection.
Open wires at cable end, integrated conversion for analog output from current to voltage.
USB connector with termination resistor (3a) and cable with connector pair (3 b+c) for
external RS485 wire connection. Magnetically isolated. Cable length is 2m.
Standard
Designation
Power Supply
Field Bus Modbus protocol for communicati on with PC
Specification
Supply Voltage: 24 VDC ±10%
DC24V- to be connected to earth.
Current: 0 – 20 mA (load resistance < 500 Ohm)
Reference is DC24V-
Note: Cable LFE-E.3 contains integrated resistor for
conversion to 0 – 10V output.
Open collector with nominal load DC 30V/10mA
Reference is DC24V-
Note: Cable LFE-E.2 contains integrated pull-up
resistor for electrical definition of default signal.
LEVITRONIX® THE COMPANY
Levitronix
is the world-wide leader in magnetically levitated bearingless motor technology. Levitronix was the first company to introduce
bearingless motor technology to the Semiconductor, Medical and Life Science markets. The company is ISO 9001 certified. Production
and quality control facilities are located in Switzerland. In addition, Levitronix is committed to bring other highly innovative products like the
LEVIFLOW
®
flowmeter series to the market.
Headquarter and
European Contact
Levitronix GmbH
Technoparkstr. 1
CH-8005 Zurich
Switzerland
Phone: +41 44 445 19 13
Fax: +41 44 445 19 14
E-Mail: salesEurope@levitronix.com
US Contact Japan Contact Taiwan Contact
Levitronix Technologies LLC
20 Speen Street, Suite 102
Framingham, Massachusetts 01701
USA
Phone: +1 508 861 3800
Fax: +1 508 861 3837
E-Mail: salesUS@levitronix.com
Levitronix Japan K.K.
Wing Eight 5floor, 4-16-4
Asakusabashi, Taito-ku
Tokyo, 111-0053 Japan
Phone: +81 3 5823 4193
Fax: +81 3 5823 4195
E-Mail: salesJapan@levitronix.com
First Release: 25-Sep-15 L ast Update: 14-Jun-17 PL-4510-00, RevC, DCO# RD
Levitronix Taiwan
5F, No. 251, Dong Sec. 1, Guangming
6th Rd., Chu Pei City,
Hsin-Chu 302, Taiwan, R.O.C.
Phone: +886 3 657 6209
Fax: +886 988 321472
E-Mail: salesAsia@levitronix.com
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