Laurell WS-400 Lite Operation Manual

Laurell Technologies
Operations Manual WS-400 Lite Series

®

WS-400 LITE SERIES SPIN PROCESSOR

OPERATION MANUAL

February 25, 2006 pg/kv

441 Industrial Drive

North Wales, PA 19454

[e-mail]

[e-mail]

P/N 10070021F6

~S/N: 06366

215-699-7278

www.laurell.com

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

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Laurell Technologies
Operations Manual WS-400 Lite Series

FEATURES

• Solid state electronics - microprocessor control

• Permanent EEPROM storage of programs and setup

• Ability to store multiple programs

• Closed loop motor control

• Substrate vacuum interlock with adjustable setpoint

• Lid closure interlock

• Door-latch on 8 and 15 series

• Motor seal purge interlock (Nitrogen or Clean Dry Air is required)

• Automatic power reduction after 10 minutes of non-use

• Step time resolution of 0.1 second

• Pilot air outputs available

• Time, rpm, and acceleration / deceleration programmable per step

• Password protected program lock and skip step

• Bidirectional motor capabilities (with optional HPD2 motor)

• Acceleration rates up to 30,000rpm/second (with optional HPD2 motor)

• PC interface with Spin 2000 or Spin 3000 software (requires 650 controller)

• Quality guaranteed – 100% manufactured and assembled in U.S.A.

• Warranty - 1 year on parts and service – see quotation for all terms and

conditions

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

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Operations Manual WS-400 Lite Series

TABLE OF CONTENTS

SECTION

FEATURES ..................................................................................................................... 2

SECTION 1 – HEALTH,SAFETY AND ENVIRONMENTAL ........................................... 6

PAGE NO.

1.1 LAURELL TECHNOLOGIES ENVIRONMENTAL, HEALTH AND SAFETY POLICY ..................... 7

1.2 HAZARD WARNINGS ........................................................................................................................7

1.2.1 LEVEL OF HAZARD INTENSITY ...............................................................................................8

1.2.2 HAZARD PICTOGRAMS ............................................................................................................9

1.2.3 HAZARD AVOIDANCE TEXT...................................................................................................10

1.3 EMERGENCY SHUTDOWN OPTION (station installations only) ................................................10

1.3.1 EMO (Emergency Machine Off) PROCEDURE ...................................................................... 11

1.4 PROTECTIVE APPAREL ................................................................................................................. 11

1.5 POTENTIAL EXPOSURE HAZARDS ..............................................................................................12

1.5.1 ELECTRICAL HAZARDS .........................................................................................................12

1.5.2 STATIC ELECTRICITY: BONDING AND GROUNDING ........................................................13

1.5.2.1 BONDING...........................................................................................................................13

1.5.2.2 GROUNDING .....................................................................................................................13

1.5.3 MOVING PARTS HAZARDS ....................................................................................................14

1.5.4 AUDIO NOISE HAZARDS ........................................................................................................14

1.5.5 CHEMICAL HAZARDS AND COMPATIBILITY .......................................................................14

1.5.6 SOLVENTS ...............................................................................................................................15

1.5.7 ISOPROPYL ALCOHOL - Example .........................................................................................16

1.5.8 HYDROGEN PEROXIDE - Example ........................................................................................16

1.5.9 SULFURIC ACID - Example.....................................................................................................17

1.5.10 HAZARDOUS WASTE............................................................................................................17

1.5.11 CHEMICAL DISPOSAL ..........................................................................................................18

1.5.12 ADDITIONAL SAFETY PRECAUTIONS ................................................................................ 18

1.6 ENVIRONMENTAL...........................................................................................................................20

1.6.1 MATERIAL SAFETY DATA SHEETS ......................................................................................20

1.6.2 MIXING INCOMPATIBLE CHEMICALS ................................................................................... 20

1.6.3 RECOMMENDED ABATEMENT TECHNOLOGY....................................................................21

1.6.4 LOCAL RESTRICTIONS (example).........................................................................................21

SECTION 2 - INSTALLATION ...................................................................................... 23

2.1 FACILITY REQUIREMENTS ............................................................................................................ 23

2.1.1 FACILITIES ...............................................................................................................................23

2.1.2 SPIN PROCESSOR POWER REQUIREMENTS......................................................................23

2.1.3 MAIN CIRCUIT BREAKER ....................................................................................................... 23

2.1.4 DIMENSIONS ............................................................................................................................23

2.1.5 AMBIENT TEMPERATURE ......................................................................................................23

2.1.6 SPIN PROCESSOR CHAMBER PRESSURE .......................................................................... 24

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distributed without express written permission from a corporate officer.

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Operations Manual WS-400 Lite Series

2.1.7 DISPENSE LIQUIDS .................................................................................................................24

2.1.8 EXHAUST REQUIREMENTS ...................................................................................................24

2.1.9 VACUUM PUMP (OPTION) ......................................................................................................24

2.1.10 SECONDARY CONTAINMENT AND SPILL PREVENTION FEATURES............................. 24

2.2 INSTALLATION................................................................................................................................25

2.2.1 SPIN PROCESSOR’S CONNECTIONS ................................................................................... 25

2.2.1.1 COMPRESSION FITTING ASSEMBLY ............................................................................26

2.2.2 TYPICAL INSTALLATION DRAWING Figure # 2-1................................................................27

2.2.3 DRAIN AND EXHAUST CONNECTION ...................................................................................28

2.2.4 INDECK CONNECTIONS .........................................................................................................30

SECTION 3 - OPERATION .......................................................................................... 31

3.1 POWER.............................................................................................................................................32

3.2 INTERLOCKS ...................................................................................................................................32

3.2.1 LID INTERLOCK .......................................................................................................................32

3.2.2 VACUUM INTERLOCK .............................................................................................................33

3.2.3 SEAL PURGE INTERLOCK .....................................................................................................34

3.2.4 POWER ON LID CHECK .......................................................................................................... 34

3.3 KEYPAD ...........................................................................................................................................35

3.3.1 OPERATIONAL KEYS..............................................................................................................36

3.4 THE LCD DISPLAY .......................................................................................................................... 38

3.4.1 LINE ONE OF LCD DISPLAY...................................................................................................39

3.4.2 LINE TWO OF LCD DISPLAY .................................................................................................. 40

3.4.3 LINE THREE OF LCD DISPLAY- SET POINT VALUES .........................................................40

3.4.4 LINE FOUR OF LCD DISPLAY – ACTUAL VALUES..............................................................42

3.5 PROGRAMMING .............................................................................................................................. 41

3.5.1 PROGRAMMING ACCELERATION/DECELERATION ........................................................... 42

3.6 NORMAL OPERATION (“OFF/RUN” MODE).................................................................................43

3.7 REMOVING/CHANGING CHUCKS .................................................................................................44

3.7.1 SCREW ON TYPE CHUCK.......................................................................................................44

3.7.2 BOLT ON TYPE CHUCK .......................................................................................................... 44

3.8 SOFTWARE VERSION ....................................................................................................................46

3.9 HIGH PERFORMANCE DRIVE MOTOR (HPD) ..............................................................................46

3.9.1 PROGRAMMING THE HPD......................................................................................................46

SECTION 4 - MAINTENANCE ...................................................................................... 49

4.1 ERROR MESSAGES ........................................................................................................................50

4.1.1 VACUUM LOSS ........................................................................................................................51

4.1.2 REMOVING, CLEANING AND INSTALLING THE VACUUM VALVE ....................................51

4.1.3 VACUUM CHUCK WET TEST..................................................................................................54

4.1.4 REMOVING, CLEANING AND REPLACING THE VACUUM CHUCK O-RING...................... 55

4.1.4.1 O-RING COMPOSITION, USES AND RECOGNITION ....................................................56

4.1.5 MOTOR OPERATION ...............................................................................................................57

4.1.6 MOTOR CALIBRATION............................................................................................................58

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distributed without express written permission from a corporate officer.

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Operations Manual WS-400 Lite Series

SECTION 5 - APPENDIX .............................................................................................. 59

5.1.1 INSTALLATION WS-400 6&8 LITE ..........................................................................................59

5.1.2a INSTALLATION WS-400 6&8 LITE INDECK ......................................................................... 60

5.1.2b INSTALLATION WS-400 6&8 LITE INDECK .........................................................................61

5.1.3 INSTALLATION INDECK CONTROLL PANEL .......................................................................62

5.1.4 INSTALLATION TUBING FOR INDECK .................................................................................. 63

5.2 AVAILABLE OPTIONS ....................................................................................................................64

5.3 WORKSHEETS ................................................................................................................................65

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distributed without express written permission from a corporate officer.

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Operations Manual WS-400 Lite Series

SECTION 1 – HEALTH, SAFETY AND ENVIRONMENTAL

INTRODUCTION

This chapter covers safety information pertaining to the spin processor system. The
spin processor uses high voltage electrical power, mechanical motion, and varying
temperatures in the processing of semiconductors. Safety precautions MUST be
followed when servicing or maintaining the spin processor system.

Service and maintenance personnel should be trained in:

• Electrical safety

• Hazardous Chemical Handling

• Mechanical Motion

NOTE:

Only LTC factory-trained personnel should service the spin processor system.

Some maintenance tasks may require more than one person to perform. The presence
of potentially hazardous chemicals may require two or more workers to safely complete
the tasks. Whenever possible turn off and lockout gases, chemical delivery valves, and
electrical power before service or maintenance is performed.

Possible hazards associated with the spin processor system are:

• Electrical shock

• Inhalation, exposure, and skin contact with solvent chemicals

• Fire

• Mechanical hazards

Safety procedures associated with the spin processor are noted within this section and
throughout this volume. The OEM components for your system also contain specific
safety instructions, which are provided in their respective documentation.

Each spin processor is configured to use specific chemical materials in its standard
process, as well as facility gases and fluids for certain maintenance tasks. These
chemical materials may be hazardous, flammable and/or toxic and require careful
handling. Safe handling procedures for these chemical materials are discussed in this
manual.

Laurell Technologies Corporation is not liable for damages resulting from improper
installation or misuse of their spin processor system. Every operator and service
person must read and thoroughly understand the operation and maintenance manuals,
as well as any additional information, provided by Laurell with respect to this product.

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

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Hazard

Alert Word

Hazard

Operations Manual WS-400 Lite Series

1.1 LAURELL TECHNOLOGIES ENVIRONMENTAL, HEALTH AND SAFETY POLICY

Laurell Technologies maintains an EHS (Environmental, Health and Safety) policy and
will periodically notify its customers of new issues, which may affect the way in which its
equipment is being used. All technical information regarding each customer and
process use is entered into the company wide database. Hard copy and electronic
backups are maintained as part of the company’s vital information and recovery policy.
This information is reviewed and updated if necessary on a daily basis.

1.2 HAZARD WARNINGS

Potential safety hazards associated with the spin processor system are clearly labeled
on the equipment and in this manual using the preferred hazard-warning trilogy of alert
words, pictograms, and avoidance techniques. This hazard-warning system is in
accordance with ANSI Standard Z535 and OSHA 29 CFR 1910.144-147. The labels
will be contained within a box border and will apply to the text immediately following the
warning. (See Figure # 1-2A)

Hazard Alert Labels are subdivided into three areas:

• The Level of Hazard Intensity

• Hazard Pictograms

• Hazard Avoidance Text

Pictogram

Warning

!

(Level of Intensity)

Keep hands away

MOVING

PARTS

HAZARD ALERT LABEL

from chamber area
while in operation.

Figure # 1-2A

Avoidance Text

The spin processor manual uses this system of hazard warnings before each service or
maintenance procedure that may involve hazards to personnel. When working on OEM
sub-systems please refer to the manufacturer’s documentation for specific hazard
warnings. READ and UNDERSTAND precautions and hazard warnings BEFORE
performing any service or maintenance task.

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distributed without express written permission from a corporate officer.

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Operations Manual WS-400 Lite Series

1.2.1 LEVEL OF HAZARD INTENSITY

Alert words are used to communicate the level of hazard intensity. The hazard alerts
provided in the manual utilize some or all of the following key words:

“CAUTION”- (Depicted by black lettering on a yellow background) - This
indicates potential hazard or unsafe practices or operations that could cause
damage to the tool or product. Proper precautions should be taken. (See Figure
# 1-2B)

“WARNING” - (Depicted by black lettering on an orange background) - This
indicates that an immediate hazard exists and special precautions are necessary.
Loss of life or limb may occur if WARNING labels are not heeded. (See Figure #
1-2C)

Caution

!

Figure # 1-2B

CAUTION ALERT

Warning

!

Figure # 1-2C

WARNING ALERT

“DANGER” - (Depicted by black lettering on a red background) - This indicates

that an immediate hazard exists, which, if not avoided, will result in serious injury
or death. (Typically not used on Laurell spin processor) (See Figure # 1-2D)

Danger

!

Figure # 1-2D

DANGER ALERT

NOTE: All Danger, Warning, and Cautionary notices must be carefully read,
thoroughly understood and strictly observed. The users of this product assume
the responsibility of implementing all Governmental, Federal, State, and Local
safety regulations applicable to the use of this product.

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distributed without express written permission from a corporate officer.

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Operations Manual WS-400 Lite Series

1.2.2 HAZARD PICTOGRAMS

Hazard Pictograms (pictorial hazard alert symbols/icons) are used to visually convey the
nature, avoidance technique, and possible consequences of a given hazard, if the
instructions are not followed. Pictograms help assure that non-English speaking
persons are alerted to potential hazards and how the hazard may be avoided.

Laurell Technologies Corporation has adopted a series of pictograms used to identify
various hazards, which may be present in the spin processor. These icons appear in
the manual and on the equipment wherever exposure to hazards is possible. Several
may be used in each manual; however, not all pictograms are applicable to each
system. Figure # 1-2E depicts some or all of the pictograms used on Laurell spin
processors. Service and maintenance personnel should become familiar with all of the
pictograms shown so that the hazard represented by each will be recognized on sight.

General

Hazard

Flammable

Material

Toxic

Chemical

Pinch Point

Hazardous

Voltage

Enclosed

Moving Parts

Chemical

Hazard

DO NOT

OPEN

Compressed

Gas

Figure # 1-2E

HAZARD PICTOGRAMS

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distributed without express written permission from a corporate officer.

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Operations Manual WS-400 Lite Series

1.2.3 HAZARD AVOIDANCE TEXT

Text is also used to convey methods of avoiding certain hazards and the consequences
that will occur if proper precautions are not taken. (See Figure # 1-2F)

Warning

!

Avoid mixing incompatible
materials in chamber or
waste stream.

INCOMPATIBLE

MATERIALS

Failure to follow operating
instructions could result
in death or injury.

Figure # 1-2F

AVOIDANCE TEXT

1.3 EMERGENCY SHUTDOWN OPTION (station installations only)

This spin processor is NOT equipped with its own EMO (Emergency Machine Off)
circuit; it should be powered by a system with EMO capability. If your safety department
or policies allow: simply having the incoming power plug far enough away from the spin
processor, properly labeled and fully accessible may be sufficient.

The EMO button area should be located within easy reach of the spin processor
operator. In the event of an emergency, pressing the EMO button will remove all power
to the spin processor.

After the EMO circuit has been reset and power has been restored, the spin processor
will automatically reset. The spin processor will revert to the normal “power up”
condition. The motor will revert to a “stopped” condition, and any process that was being
performed when the EMO occurred will have been terminated. Any wafer that was
being processed during this shutdown may have incurred some damage and should be
treated as such.

By following the normal steps, described in Section 3.6, for initiating the spin processor,
a new process may be started.

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distributed without express written permission from a corporate officer.

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Operations Manual WS-400 Lite Series

1.3.1 EMO (Emergency Machine Off) PROCEDURE

1. Locate the nearest EMO button.

2. Press the EMO button to immediately interrupt system
power.

EMO

Figure # 1-3

EMO (Emergency Machine Off) PROCEDURE

1.4 PROTECTIVE APPAREL

Always wear personal protective equipment when handling any potentially hazardous
chemicals. Use and maintenance of the spin processor may require using protective
gloves, an apron, and chemical goggles and/or face shield, depending on the operation.
Be sure to select protective apparel that is appropriate for the chemicals being used.
Refer to your company's safety policies and procedures for the personal protective
equipment required.

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distributed without express written permission from a corporate officer.

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240/115 Volts AC is used throughout the system. Do not attempt to

troubleshoot or make repairs. (Refer to Section 2 for spin processor

Operations Manual WS-400 Lite Series

1.5 POTENTIAL EXPOSURE HAZARDS

The following section will cover potential exposure hazards, which may occur while
operating the spin processor system.

NOTE: This section should be READ and UNDERSTOOD before using the spin
processor.

1.5.1 ELECTRICAL HAZARDS

WARNING

power requirements and main circuit breaker information.)

Caution: an extreme electrical hazard will exist if this system is immersed in liquid. The

system must not be located where it could be accidentally knocked into any open liquid
bath. An earthquake-proof base can be supplied for any system.

Electrical components are located internally, and electrical power is distributed
throughout the spin processor system. Access can only be gained by removal of the
bottom panel, which is secured by screws. Only LTC factory trained, qualified
technicians should be permitted to work on an uncovered machine. Use all precautions
and safety measures characteristically taken with AC and DC circuitry.

The spin processor should be locked and tagged out according to the procedure
outlined below before any maintenance or service is performed.

Maintenance tasks are categorized by “TYPE TASK” as described below. The spin
processor has no tasks that are above Type 2. The maintenance manual identifies
tasks that may have electrical energy present using the following conventions:

Type 1 - Equipment is fully de-energized (electrically "cold"). Lockout and tag-out

procedures should be used.

Type 2 - Equipment is energized. Live circuits are covered or insulated. Work is

performed at a remote location to preclude accidental shock.

Type 3 - Equipment is energized. Live circuits are exposed and accidental contact

is possible. Potential exposures are less than 30 volts, 42.2 volts peak,
240 volt-amps, and 20 Joules.

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distributed without express written permission from a corporate officer.

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Friction caused by liquids moving can cause a static electricity buildup.

Operations Manual WS-400 Lite Series

Type 4 - Equipment is energized. Live circuits are exposed and accidental contact

is possible. Voltage potentials are greater than 30 volts RMS, 42.2 volts
peak, 240 volt-amps, and 20 Joules, or radio frequency (RF) is present

Type 5 - Equipment is energized and measurements and adjustment require

physical entry into the equipment, or equipment configuration will not
allow the use of clamp-on probes.

NOTE: Unless otherwise noted, all maintenance should be performed with the
spin processor system power OFF. There are NO maintenance tasks that require
servicing of the spin processor while it is energized.

1.5.2 STATIC ELECTRICITY: BONDING AND GROUNDING

WARNING

If this charge is not properly dissipated, then fires or explosions may
occur. Be sure to follow appropriate bonding and grounding practices
when supplying flammable and combustible liquids to the spin
processor.

1.5.2.1 BONDING

Bonding is creating a metal-to-metal connection between the dispensing and receiving
containers to keep them both at the same electrical potential.

1.5.2.2 GROUNDING

Grounding is creating a metal-to-metal connection between the dispensing container
and a known grounded object to allow static electricity to dissipate into the ground.

For more information on Bonding and Grounding see NFPA 77, Static Electricity.

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distributed without express written permission from a corporate officer.

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CAUTION

The use of incompatible materials in the spin processor is not allowed.

Operations Manual WS-400 Lite Series

1.5.3 MOVING PARTS HAZARDS

WARNING

Use care when opening or closing lids. Lids are heavy, and if dropped

accidentally may crush or injure fingers.

WARNING

The chuck on the spin motor can spin in excess of 10,000 rpm. Keep
hands and other body parts away from process chamber area. (Refer
to Section 3.7 for information on changing chucks.)

1.5.4 AUDIO NOISE HAZARDS

Audible sound pressure readings were taken 3 feet (0.9 m) from the
system during normal operation. The background decibel level during
standby was measured to be 48 dB(A). The sound pressure readings
during normal operations were measured to be 51 dB(A). Readings of
less than 80 dB(A) are considered non-hazardous.

1.5.5 CHEMICAL HAZARDS AND COMPATIBILITY

The following section outlines some general guidelines for using chemicals. Refer to
Section 2 for more chemical information.

Each spin processor is configured to use specific chemicals for its
standard process and includes facility gases and fluids, and
maintenance chemicals.

If incompatible materials mix in the process chamber or in the waste
streams, a hazardous and/or toxic chemical reaction may occur. It is

WARNING

vitally important not to mix or use incompatible materials (i.e., acids
with bases, corrosives with organics, acids with organics, etc.). Before

any new chemical is used in the spin processor, the compatibility
of the material with other chemicals in the system and the
structural materials used in making the spin processor should be
investigated. (Refer to Section 1.6.2 for more information on

incompatible chemicals.)

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distributed without express written permission from a corporate officer.

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properly ventilated area that is also protected from splash hazards.

with your local jurisdiction having authority for specific requirements.

Operations Manual WS-400 Lite Series

CHEMICAL HAZARDS AND COMPATIBILITY CONTINUED

Residual chemicals may be left in the process chamber after

WARNING

processing has occurred. These potentially toxic or corrosive residues
may pose inhalation or dermal hazards. Be sure to adequately rinse
the process chamber before opening, wear appropriate personal
protective equipment and ensure that the spin processor is located in a

(Refer to Section 2.1 for facility requirements.)

1.5.6 SOLVENTS

The following section outlines some general guidelines for using solvents.

WARNING

WARNING

WARNING

WARNING

WARNING

Most solvents are extremely flammable. Keep all flammable liquids
away from ignition sources such as open flames or arcing electrical
equipment. Keep all chemicals in a well-ventilated area, preferably
in a cabinet designed for such storage.

Flammable liquids should be stored and transported in approved
safety cans only. When transferring flammable liquids from one
container to another, be sure the pouring and receiving containers
are bonded to each other and to a ground to prevent static electrical
sparks. (Refer to Section 2.1.9 for secondary containment)

Never store more than a one-day supply of flammable liquid in the
using area, unless it is stored in a cabinet approved for flammable
liquid storage.

Depending on your location of use, other local fire or building code
(e.g. UFC, UBC, NFPA, etc.) requirements may apply in the proper
storage, dispensing, and use of flammable materials. Please consult

(Refer to Section 1.6.4 for local restrictions.)

Before using solvents, read and understand the safety instructions,
provided by the supplier, on the container labels and MSDS (Material
Safety Data Sheets). (Refer to Section 1.6.1 for more information on
Material Safety Data Sheets.)

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distributed without express written permission from a corporate officer.

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1.5.7 ISOPROPYL ALCOHOL - Example

WARNING

Isopropyl alcohol is a colorless liquid with an odor resembling
alcohol. It causes irritation of the eyes, skin, and respiratory tract. It
is extremely flammable and should be stored separately. Wear eye
protection (safety glasses or a full-face shield), gloves, and an
apron as recommended by your company’s safety department or
the manufacturer. If isopropyl alcohol gets on your skin, rinse with
water for 15 minutes, refer to the manufacturers MSDS for first aid
instructions and contact your company’s safety department. Use
isopropyl alcohol under a fume hood or in a well-ventilated area.

Inhalation: Inhalation of vapors irritates the respiratory tract. Exposure to high
concentrations has a narcotic effect, producing symptoms of dizziness, drowsiness,
headache, staggering, unconsciousness, and possibly death.
Ingestion: Can cause drowsiness, unconsciousness, and death. Gastrointestinal pain,
cramps, nausea, vomiting, and diarrhea may also result. The single lethal dose for a
human adult = about 250 ml (8 ounces).
Skin Contact: May cause irritation with redness and pain. May be absorbed through
the skin with possible systemic effects.
Eye Contact: Vapors cause eye irritation. Splashes cause severe irritation, possible
corneal burns, and eye damage.

Chronic Exposure: Chronic exposure may cause skin irritation.
Aggravation of Pre-existing Conditions: Persons with pre-existing skin disorders or

impaired liver, kidney, or pulmonary function may be more susceptible to the effects of
this agent.

1.5.8 HYDROGEN PEROXIDE - Example
DANGER

Hydrogen Peroxide is a strong oxidizer; contact with other
material may cause fire and/or corrosive reaction. It may cause
burns to skin, eyes, and respiratory tract. Harmful if swallowed.

DANGER

Before using, read and understand the safety instructions
provided by the supplier on the container labels and Material
Safety Data Sheets.

Inhalation: Vapors are corrosive and irritating to respiratory tract. In severe cases,
exposures may result in pulmonary edema and death.
Ingestion: Corrosive and irritating to the mouth, throat, and abdomen. Large does
may cause symptoms of abdominal pain, vomiting, and diarrhea as well as blistering or
tissue destruction.
Skin Contact: Corrosive. Symptoms of redness, pain and severe burn can occur.

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Eye Contact: Vapors are very corrosive and irritating to the eyes. Symptoms include
pain, redness and blurred vision. Splashes can cause permanent tissue destruction.

Chronic Exposure: No information found.
Aggravation of Pre-existing Conditions: Persons with pre-existing skin disorders or

eye problems or impaired respiratory function may be more susceptible to effects of the
substance.

1.5.9 SULFURIC ACID - Example

DANGER

Sulfuric Acid is a poisonous and corrosive liquid. It will cause
severe burns to all body tissue. It may be fatal if swallowed or
contacted with skin. Harmful if inhaled. Affects teeth. Water
reactive. Cancer Hazard. Strong inorganic acid mists containing

DANGER

sulfuric acid can cause cancer.
Before using, read and understand the safety instructions provided

by the supplier on the container labels and Material Safety Data
Sheets.

Inhalation: Produces damaging effects on the mucous membranes and upper
respiratory tract. Symptoms may include irritation of the nose and throat and labored
breathing. May cause lung edema, a medical emergency.
Ingestion: Corrosive. Swallowing can cause severe burns of the mouth, throat, and
stomach, leading to death. Can cause sore throat, vomiting, and diarrhea. Circulatory
collapse with clammy skin, weak and rapid pulse, shallow respiration, and scanty urine
may follow ingestion or skin contact. Circulatory shock is often the immediate cause of
death.

Skin Contact: Symptoms of redness, pain, and severe burn can occur.
Eye Contact: Contact can cause blurred vision, redness, pain, and severe tissue burns.

Can cause blindness.
Chronic Exposure: Long-term exposure to mist or vapors may cause damage to teeth.
Chronic exposure to mists containing sulfuric acid is a cancer hazard.
Aggravation of Pre-existing Conditions: Persons with pre-existing skin disorders or
eye problems or impaired respiratory function may be more susceptible to the effects of
the substance.

1.5.10 HAZARDOUS WASTE

CAUTION

Normal operation and maintenance of the system creates
hazardous wastes that require special handling and disposal.
Disposal of these wastes must follow all codes, laws, and your
company’s safety and health requirements.

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distributed without express written permission from a corporate officer.

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1.5.11 CHEMICAL DISPOSAL

WARNING

Never mix empty acid, flammable liquid, or oxidizer containers in
the same waste cans. Chemicals must be handled in accordance
with local, state and federal regulations and within the guidelines
established by your company. NEVER dispose of chemically
contaminated wipes or clothes in regular trash. Contact your
companies Safety or Environmental Department for instructions on
how to handle and dispose of chemically contaminated trash.

1.5.12 ADDITIONAL SAFETY PRECAUTIONS

Full compliance with the following safety practices and those appearing earlier in this
chapter is expected.

1. Never work alone on live electrical circuits. You must be within sight or calling
distance of another employee who has the following qualifications:

• Knows how to remove power from the equipment.

• Knows how to apply artificial respiration.

• Is acquainted with emergency procedures, first aid locations, and the location

and use of fire extinguishers.

2. Turn off, lockout, and tag all hazardous energy sources (e.g., gas, pneumatic,
mechanical, gravitational, and electrical) before performing any maintenance.

3. Do not wear rings, wristwatches, or other jewelry on your hands or arms while
working on live electrical circuits.

4. Wear eye protection while working on live electrical circuitry where a flash might
occur. Do not wear contact lenses.

5. Replace all safety shields after completing setup, troubleshooting, and
maintenance procedures.

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distributed without express written permission from a corporate officer.

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6. Immediately report any unsafe conditions to your supervisor.

7. Comply with all applicable regulations governing the disposal of hazardous
materials. Dispose of waste materials in a manner that will prevent air or water
pollution and will not expose humans, animals, or vegetation to hazards.

8. Do not permit smoking or food in the work area.

9. Secure electrical cords and cables where they cannot be tripped over or
otherwise accidentally pulled from their connectors.

10. Be sure that all personnel know the location of the main circuit breaker in case of
an electrical emergency.

11. Locate fire extinguishers near the equipment. The extinguishers must be
approved for electrical or chemical fires in accordance with OSHA and local,
state, and federal codes.

12. Operating personnel must NOT remove covers or panels. Only qualified
maintenance personnel may make component replacements and internal
adjustments only.

13. Do not replace components with the power cable connected. Under certain
conditions dangerous voltages may exist, even when the power cable is
removed. To avoid injuries, always disconnect power; lock out the circuit
breaker and discharge circuits before performing a task.

14. Do not attempt internal service or adjustment unless a person capable of
rendering first aid is present. Be sure to follow your company’s safety
procedures.

15. Because of the danger of introducing additional hazards, do not install substitute
parts or make any unauthorized modification to the system.

16. Contact Laurell Field Service for service and repair to ensure that safety features
are maintained.

17. Maintain adequate safety precautions when handling toxic chemicals. Avoid
breathing dust or spray mist. Use chemicals only with adequate ventilation and
keep containers closed when they are not in use. Store chemicals in a locked
cabinet where they cannot be removed accidentally.

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distributed without express written permission from a corporate officer.

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1.6 ENVIRONMENTAL

1.6.1 MATERIALS SAFETY DATA SHEETS

Before introducing any new chemical, consult the factory specifications. The chemical
manufacturer or supplier provides MSDS (Material Safety Data Sheets) for each
chemical. The MSDS gives vital chemical safety information on the hazardous
components, the chemical’s physical properties, spill and leak procedures, waste
disposal information, and personal protective equipment required to handle the
chemicals involved. Follow the information on the MSDS when handling, refilling
chemical containers or cleaning up spilled or leaked materials. Before using solvents,
read and understand the safety instructions provided by the supplier on the container
labels and MSDS.

NOTE: Laurell Technologies Corporation recommends that copies of the MSDS
be kept with this manual and be made available to your employees. There are
several websites dedicated to providing chemical information. For reference,
Laurell has listed the following:

• http://www.laurell.com/otherinfo/chemres.asp

• www.hazard.com/msds/

• http://webbook.nist.gov/chemistry

1.6.2 MIXING INCOMPATIBLE CHEMICALS

It is important not to mix incompatible materials in the process chamber and/or waste
stream of the spin processor (i.e., mixing acids with bases, corrosives with organics,
and acids with organics...). Mixing incompatible materials can result in unwanted
chemical reactions in either the chamber, exhaust or drain line. Only compatible
materials are recommended for use within the spin processor system. Before any new
chemical is used, compatibility of the material with other chemicals in the system and
the materials used to construct the spin processor should be investigated. Some of this
information may be obtained from the MSDS or the chemical supplier.

NOTE: Use of incompatible materials in the spin processor is strictly forbidden
and should not be done under any circumstances.

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distributed without express written permission from a corporate officer.

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1.6.3 RECOMMENDED ABATEMENT TECHNOLOGY

The vapor by-products expected in the effluent of the spin processor system should be
handled and disposed of in accordance with any and all safety and legal abatement
procedures. The recommended abatement technologies for efficient removal of
hazardous process by-products are solvent destruction or solvent recovery. Several
methods exist that are capable of removing the process by-products from the effluent
stream. Some are reportedly more effective than others in terms of efficiency. The
oldest abatement technology is to exhaust this effluent into the house solvent system,
which is normally present in a wafer manufacturing facility.

The trend of the industry is to abate the process by-products at the point-of-use (POU),
which localizes containment of the process effluent allowing ease of handling. Various
POU technologies, as described below, are available for controlling these process
by-products.

• Thermal-oxidizers convert the effluent gases into other compounds using either

flame combustion or a heated catalytic process. The flame combustion requires
fuel (usually hydrogen or natural gas) to maintain the flame.

• POU dry scrubbers are chemical-absorbent materials that capture the effluent

onto absorbent granules. The benefits of dry scrubbers include cost
effectiveness, non-hazardous cartridge disposal, and, if available, recycling or
recovery of the solvent as a liquid.

More information on abatement technologies may be obtained from Semiconductor
Safety Association (a trade group) at [phone] or

http://seshaonline.org/

1.6.4 LOCAL RESTRICTIONS (example)

The use of IPA (Isopropyl Alcohol) creates an environmental concern. Certain local
jurisdictions have limitations on, and/or require permits for, the use of organic cleaning
solvents. For example, the San Francisco Bay Area Air Quality Management District
(BAAQMD) Regulation 2.1.118 limits the amount of volatile organic wipe cleaning
solvents that may be used without obtaining a specific permit to 20 gallons per year per
source area. Regular wipe down of the spin processor components could exceed this
regulation’s exemption limits alone or most likely when combined with similar operations
at an end-user’s facility.

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distributed without express written permission from a corporate officer.

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distributed without express written permission from a corporate officer.

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SECTION 2 - INSTALLATION

2.1 FACILITY REQUIREMENTS

2.1.1 FACILITIES

• The spin processor should be installed on a vibration free surface in a clean,

temperature and humidity controlled environment to provide the best conditions
for repeatable processing results.

• Seal Purge - N

moisture free. If moisture is present install an air dryer type filter. For particulate
control it is recommended that a point of use filter, 1 micron, or less, be installed
after the regulator and before the processor. The seal purge tubing MUST NOT
BE “T” to supply another output from the same regulator.

• Vacuum - 25 – 28” (635 – 711 mm) Hg of vacuum with a flow volume of 4.5

SCFM (0.11cm/m ) @ 0” Hg

• Exhaust see section 2.1.8 below

• Drain – Open to atmosphere – NOT restricted by a vapor trap (see Figure 2-2C)

/CDA (Clean Dry Air) 60 - 70 psi (4.1 – 4.8 bar). N2/CDA must be

2

2.1.2 SPIN PROCESSOR POWER REQUIREMENTS

• Power - 115 VAC 60 HZ, <3 Amps (7 foot (~200cm) cord with 3 pronged plug)

• Power - 220 – 240 VAC 50/60 HZ, <3 Amps (7 foot (~200cm) cord with correct

specified plug)

2.1.3 MAIN CIRCUIT BREAKER

• The circuit breaker on the spin processor is rated for 200A-interrupt current

capacity. SEMI S2 requires a minimum of 10,000 AIC for the main disconnect.
The end-user of the spin processor system should install a suitably rated circuit
breaker (minimum 10,000 AIC) for the circuit if they wish to meet SEMI S2
requirements

2.1.4 DIMENSIONS

• See Appendix for Basic System Dimensions and Installation Diagrams.

• Additional space will be required for pressure vessels and pneumatic fluid/N

control valves.

2

2.1.5 AMBIENT TEMPERATURE

• The Spin processor is designed to run in an ambient temperature of between 68 -

75° F (20 -24° C).

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distributed without express written permission from a corporate officer.

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2.1.6 SPIN PROCESSOR CHAMBER PRESSURE

• When optional exhaust is supplied to the chamber it should be maintained at an

operational negative pressure of ≥0.5 inches (5.08mm) of H

O. Actual exhaust

2

flow which provides optimal processing results is user defined. The exhaust flow
can be controlled by our optional down flow exhaust adapter.

2.1.7 DISPENSE LIQUIDS

• Automatic or manual syringe (optional)

2.1.8 EXHAUST REQUIREMENTS

• The spin processor is intended for use in an exhausted bench area. The end

user is responsible for providing exhaust for the bench area.

Volumetric

Flow rate

(CFM)*

Static
Pressure
(in H2O)*

Duct

Material

Type of Exhaust

Solvent Storage Cabinet Solvent Storage Cabinet not supplied by Laurell
Chamber Drain Port 25 (.71M3) .5 to 2.5” PP

Chemical / Solvent

Note: These measurements were taken in the exhaust duct 3 inches from the
system after the first elbow.

2.1.9 VACUUM PUMP (OPTION)

• LTC provided vacuum pump:

•

25 – 28” (635 – 711mm) Hg with a flow volume of 4.5 scfm (0.11cm/m ) @
0”Hg

•

Power - 100 – 115 or 220 – 230 VAC - 50 / 60 Hz.

•

It is recommended to install the pump in an open and well ventilated area.
Normal operating temperature after 1 hour of use is 75 ± 5°C (165 ± 9°F).
Pump is design for continuous use. The factory thermal protection
interlock is sensed on the motor windings and set for 135 ± 5°C (275 ±
9°F). The thermal reset temperature is 61 ± 9°C (142 ± 16°F). Caution:
Pump will be hot after continuous use. Allow time for cooling before
handling pump.

2.1.10 SECONDARY CONTAINMENT AND SPILL PREVENTION FEATURES

• When installed at the end-user site, secondary containment is recommended. It

should provide for the spin processor and the pressurized tank(s). All secondary
containment should incorporate appropriate gas detection, liquid sensors, and
alarms. If incompatible materials are used in the spin processor, (not
recommended by Laurell) containment should be designed to ensure that the

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distributed without express written permission from a corporate officer.

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materials could not be combined. Automatic shutoff capability should be
considered for bulk distribution systems. The secondary containment provided
should be able to contain 110% of the volume of the largest single container or
all vessels combined.

2.2 INSTALLATION

SEE FRONT OF MANUAL FOR “QUICK START INSTALLATION INSTRUCTIONS”.

The first step in the installation is to unpack the spin processor. Identify each
component on the packing list and verify that it was not damaged during shipping

. Any

loss or damage must be reported to the factory within 30 days from shipment.

Refer to section 2.1 “Facility Requirements” for required electrical power, vacuum, drain,
exhaust, and N

/CDA (Clean Dry Air). Since each spin processor is configured to meet

2

the needs of the end-user, requirements will vary for each application. It is
recommended that a point

-of-use filter (≤1 micron), a pressure regulator and a check

valve (5 PSI breaking pressure) be installed on all supply tubing connected to the spin
processor. Refer to installation drawing(s) in Section 5 for guidance.

2.2.1 SPIN PROCESSOR CONNECTIONS

• Follow the outline in section 2 “Facilities” to prepare for installation. Use

dedicated regulators and filters where appropriate.

• See “Quick Start Instructions” in front of manual for step-by-step

installation instructions.

• Install the processor on a stable, level and vibration free surface.

• Connect drain line to rear of spin processor’s drain adapter.

Instructions.

See Quick Start

• Connect vacuum source, using the provided 3/8” (9.52mm) O.D. x ¼”

(6.35mm) I.D. tubing, to the 3/8” fitting on the pneumatic vacuum control valve
located on the right rear side of spin processor. (Applicable only if vacuum­type chuck is used.) Note: vacuum supply tubing should be ¼” I.D. or

larger to provide sufficient volume quickly. See Quick Start

Instructions.

 Note: The 400A model has an external 24V vacuum solenoid.

Quick Start Instructions.

See

• Connect ¼” O.D. tubing for Seal Purge to N2 / CDA regulator. Set regulator to

60 -70 psi.

• Connect power cord to an appropriate AC source. Note: the circuit breaker,

located on the back of the processor, is also a power switch, which when

See Quick Start Instructions.

pressed and the button is extended, will turn the system off.

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distributed without express written permission from a corporate officer.

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Caution: an extreme electrical hazard will exist if this

system is

Operations Manual WS-400 Lite Series

“Installation Safety - Caution”

WARNING

immersed in liquid. The system must not be located where it could
be accidentally knocked into any open liquid bath. An earthquake­proof base can be supplied for any system.

2.2.1.1 COMPRESSION FITTING ASSEMBLY

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distributed without express written permission from a corporate officer.

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2.2.2 TYPICAL INSTALLATION DRAWING

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distributed without express written permission from a corporate officer.

Figure 2-1

INSTALLATION DRAWING 10070044

27

Laurell Technologies

Drain

Exhaust (optional)

Drain

Exhaust (optional)

Drain Cup

Operations Manual WS-400 Lite Series

2.2.3 DRAIN AND EXHAUST CONNECTIONS

Figure 2-2A is the standard drain configuration. Exhaust is optional on the LITE model.
Figure 2-2B is the down-flow exhaust option. An exhaust source of approximately 0.5”
to 2.5” H

O column, as measured with a differential pressure gauge, is sufficient for

2

processing. Figure 2-2C is our exhausted drain cup option. Figure 2-2D is a drawing of
the recommended drain configuration.

Figure 2-2A

Standard Configuration

Figure 2-2B

Optional Exhausted Drain Assembly

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distributed without express written permission from a corporate officer.

Figure 2-2C

Optional Exhausted Drain Cup Assembly

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Figure 2-2D

RECOMMENDED DRAIN CONFIGURATION

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distributed without express written permission from a corporate officer.

29

Laurell Technologies

Twist

-

lock interconnect

AC Power Cord

Vacuum sense tube

Vacuum Valve

To Controller

Motor’s S

eal

Circuit breaker / Power

switch

Operations Manual WS-400 Lite Series

2.2.4 INDECK CONNECTIONS

Indeck installations require cabling the remote control box assembly to the spin
processor. Two cables and one vacuum sensor hose are required, which can be
detached at the rear of the remote control box, see Figure 2-3A.

from spin module

cable connection from

spin module

Figure 2-3A

INDECK CONTROLLER – REAR VIEW

The spin processor vacuum, seal purge and remote connections are located on the
bottom of the spin processor housing (see photo below, Figure 2-3B).

Purge - N2/CDA

Figure 2-3B

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SECTION 3 - OPERATION PROCEDURES

GENERAL

All operational controls are interfaced through the spin processor’s membrane switch
keypad and the LCD (Liquid Crystal Display) figure 3-1. The display shows relevant
information specific to the programmable controller mode selected. (See Section 3.3 –
Keypad for illustrations.)

During normal operation the mode status, step-of-steps, program ID, set point RPM, set
point time, time remaining/time running (selectable using the up and down arrow keys),
actual wafer RPM, and valve status for each step of a program are displayed. Up to
twenty (20) process programs (labeled A through T), containing up to fifty-one (51)
steps each, can be permanently stored in non-volatile memory. Each program step
includes: time of step, wafer rotation speed in RPM, and acceleration/deceleration set
point (acceleration/deceleration rate is shown in program mode only).

Figure 3-1

INITIAL DISPLAY

A vacuum interlock assures that vacuum is activated before any program can run and
vacuum will not disengaged until the wafer comes to a complete stop. Units are
equipped with a vacuum sensor to additionally ensure that sufficient vacuum is provided
to hold down the substrate during operation of the spin processor. All spin processors
are equipped with a Purge Seal pressure switch to ensure that sufficient purge pressure
is provided. The Seal Purge switch will disable the spin processor operation if
insufficient pressure is detected. A safety lid interlock disallows motor rotation if an
open lid condition is detected. A design feature is included to avoid the accidental re­running of a process on the same wafer indicated by “END” as opposed to “OFF”. In
order to run a program twice on the same substrate, the lid must be opened or the
program must be changed. If you desire to run the same substrate more than once
simply press the F1 key twice. This allows the cycling of a program without opening the

The unit will automatically go into a sleep mode ~10 minutes of non-use, eliminating

lid.
power to display backlighting and vacuum valve control however the system is still fully
functional. Pressing any key will fully reactivate the unit.

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3.1 POWER

All units are equipped with a single pole over current circuit breaker with manual reset.
This breaker is located on the body of the spin processor housing near the AC cord
entry location (Indeck systems on the remote controller’s rear panel). Seeing the white
band of the “reset” button is indicative that the power has been interrupted. During
normal operation, the circuit breaker should never trip. If the circuit breaker does trip, a
visual and mechanical inspection of the unit should be performed before resetting the
circuit breaker.
This circuit breaker also serves as an “ON/OFF” switch for the unit. Pressing the “reset”
button will toggle power on and off to the unit.

3.2 INTERLOCKS

3.2.1 LID INTERLOCK

A hidden lid interlock switch disables the spin processor’s motor operation when the lid
is in the open position. If the lid is opened while running a program, the program will be
interrupted and the chuck rotation will stop slowly. This condition is noted by a flashing
“LID” indicator on the second line of the LCD display. The program can be continued
from the point at which it stopped by closing the lid and pressing the RUN/STOP

key.

(See Figure 3-2)

Figure 3-2

FLASHING LID DISPLAY

Flashing LID

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3.2.2 VACUUM INTERLOCK

Two conditions must be met to allow operation of systems equipped with a vacuum hold
down type chuck.

The first condition that must be present is a vacuum source with vacuum ≥15”Hg.
A factory preset sensor will not allow the system to operate with vacuum <15”Hg. This
interlock insures that adequate vacuum is applied to the substrate. Inadequate vacuum
will cause an unsafe condition and may cause a substrate to spin off the chuck and
cause breakage. A flashing value (measured in inches of Hg) of the vacuum applied to
the substrate is an indication that this requirement has not been met. Without proper
vacuum, a process cannot be started. If the vacuum falls below the required level while
a process is running, the program will be halted at that point and an E04 error message

1

will appear on the LCD display
to press the RUN/STOP

key on the keypad to re-start the program from where it

. Once vacuum has been re-established it is necessary

stopped.

The second required condition, which MUST

be present for the air operated

vacuum valve to function, is sufficient seal purge pressure. Since the vacuum

2

valve is pneumatic it must have enough N

2

is insufficient N

/CDA pressure the controller will flash “CDA” and “VACUUM”

/ CDA to operate. See section 3.2.3. If there

indicating no CDA or vacuum. (See Figure 3-3 for an illustration of this condition.) If
there is ≤ 60psi of CDA the vacuum screen may show that there is vacuum ≥ 15”Hg but
the lack of N2 / CDA will flash “CDA” and cause an E10 error. WITHOUT THE
PROPER N2/CDA PRESSURE THE SYSTEM WILL NOT OPERATE.

Press the VACUUM button on the keypad to turn on/off the vacuum valve. Once
actuated, the vacuum valve

cannot be turned off until the motor is stopped @ 0 RPM for

1 second. This safety feature insures that vacuum cannot be inadvertently turned off
until the chuck comes to a complete stop.

1

See Section 4.1 - Errors

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distributed without express written permission from a corporate officer.

Flashing Vacuum

Figure 3-3

FLASHING VACUUM DISPLAY

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3.2.3 SEAL PURGE INTERLOCK

All of our systems require at least 60 PSI (4.1 bar) of Nitrogen/CDA (Clean Dry Air) to
pressurize the labyrinth motor seal. If Nitrogen/CDA (Clean Dry Air) is < 60 PSI (4.1

bar) the processor WILL NOT OPERATE

. The seal’s purpose is to separate the
process chamber from the motor and electronics in order to insure long service-free
operation. The gas consumption is very low (≈3 cubic feet per hour). We recommend
a constant CDA supply even when the processor is not in use. Nitrogen/CDA
pressure is monitored by a pressure sensor interlock. This interlock will report an “E10”
error if the pressure should drop below the 60 PSI (4.1 bar) requirement during
operation. The interlock will not allow a new process to begin until the minimum
pressure of 60 PSI (4.1 bar) is met

. If the purge falls below the required level while a

program is running, the program will be halted at that point, an E10 error message will
be displayed, and a flashing “CDA” will appear on the LCD display
purge pressure has been re-established, it is necessary to press the RUN/STOP

2

, figure 3-4. Once

key on

the keypad to re-start the program.

Flashing CDA

Figure 3-4

FLASHING CDA DISPLAY

3.2.4 POWER ON LID CHECK

When powering on your equipment, the spin processor will initialize in an “END” mode.
This condition will persist until THE LID IS OPENED

. This ensures the proper operation
of the lid switch before the spin processor can be operated (see Section 3.6, #5 for
more on “END” mode).

2

See Section 4 - Errors

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SECTION 3.3 - KEYPAD

All operator interface actions are initiated through the membrane switch keypad, figure
3-5. The function of each key is as follows:

8

9

7

1

Figure 3-5

KEYPAD

5

4

3

10

2

6

NEVER flood or spray solvent such as acetone or any other type of cleaner

directly onto the keypad surface.
Always wet a wipe or cloth with the solvent and gently wipe the keypad surface.

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distributed without express written permission from a corporate officer.

Doing so may cause keypad failure.

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3.3.1 OPERATIONAL KEYS

1. RUN/STOP - this key is used to initiate or terminate a programmed sequence.
While a program is running the mode display will indicate RUN

. END indicates
that a complete program has run one time and will persist until the lid is opened
or another program selection is made. This key is disabled until the vacuum,
seal purge and lid interlocks are satisfied.

2. VACUUM - this key toggles the vacuum valve on and off. A flashing VACUUM
indicates the vacuum valve is de-energized. This key is interlocked such that the
vacuum cannot be turned off while a program is running or the chuck is in
motion. The value is displayed in inches of Hg when the vacuum valve is turned
on. The normal requirement to operate safely is 15” of Hg vacuum. This
requirement can be modified in the “setup” mode.

3. F1 - this special function key is used to toggle between the program “PGM” and
“RUN” modes. Pressing the F1

key will place the spin processor in the “program”
mode (PGM will now be displayed). A program can be run when in the PGM
mode. When running in the PGM mode, step, acceleration, speed and optional
valves are operational. The time value is ignored in the PGM mode. The user
can manual step through a program while it is running by pressing the “STEP”
key.

4. PROGRAM SELECT - this key is used to select the desired program to be run or
modified and is disabled while a program is running. Pressing this key ascends
or descends to the next program selection. The selection is controlled by using
the up and down direction keys, ↑↑↑↑

for A, B, C and ↓↓↓↓ for C, B, A.

5. STEP (Active in PGM mode only) - this key is used to advance a program
sequentially through its steps. STEP

is used during programming to enter and
view set values for each step. This key is always active when in the “program”
mode. It can be activated for the “run” mode by enabling a special function (call
factory for instruction sheet to activate “skip step”).

6. DEL STEP (Active in PGM mode only) - this key is only activated in the
“program” mode and is used to delete a step from the program indicated in the

PROGRAM SELECT

message will appear in the “actual time” area of the display. If the ENTER

area of the display. When pressed, a flashing delstep

key is
pressed within 5 seconds to acknowledge the command, the last step of the
selected program will be deleted from the program. This function is disabled
when there is only one step in the program or in the “setup” mode and “LOCK” is
set to one (1).

7. ENTER (Active in PGM mode only) - When deleting a step, it is used in
conjunction with the DEL STEP

key to acknowledge the command.

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8. ADD STEP (Active in PGM mode only) - this key is only activated in the
“program” mode and is used to add a step to the program indicated in the

PROGRAM SELECT

area of the display. The step area of the display will be
updated to the new number of steps in the program. The new step is added to
the end of the program. Pressing the STEP

key will advance to and allow
programming of the new step. This key is disabled when the maximum number
of steps (currently 51) in a program is reached or in the “setup” mode and
“LOCK” is set to one (1).

9. Cursor ←←←←(Left) & →→→→(Right) (Active in PGM mode only) - the cursor arrow keys

are used to position a blinking cursor over set point data to be changed (i.e.
TIME, RPM, and ACCELERATION).

10. Value ↑↑↑↑(UP) & ↓↓↓↓(DOWN) - during “program” mode these keys are used to

change values highlighted by the blinking cursor. Limits are placed on certain
parameters that match the performance of the system. Motor speeds (RPMs)
that exceed the capability of the installed motor cannot be programmed. In the
“run” mode these keys are used to select the method of counting of the “run time”
indicator and direction of PROGRAM SELECT
elapsed time mode while the ↓↓↓↓

key selects the time remaining mode.

key. The ↑↑↑↑ key selects the

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distributed without express written permission from a corporate officer.

37

Laurell Technologies

Normal

Program “A”

Running step 1

Vacuum

Set point

Actual

Run time

Set

Valves 1, 4, and

models)

RUN

Normal

002/004

V=22.1

A

Program “A”

Running step 2

Vacuum

min:sec

1000

1000

rpm

Set point

Actual

Run Time

Set

Seal Purge /

valv

1234

5678

Valves 1

– 8

Operations Manual WS-400 Lite Series

SECTION 3.4 - THE LCD DISPLAY

mode

time

of step

(Run) mode

of 4 steps

S-00:20.1

A-00:13.7

point

RPM

ACTUAL LCD DISPLAY VIEW

of 7 steps

selected

CDA/LID

Lid Open (flashing)

(optional on Lite
models)

RPM

Figure 3-6A

running

time

of step

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

point

RPM

Figure 3-6B

LCD DISPLAY LAYOUT

38

RPM

8 actuated

(optional on Lite

Laurell Technologies

Mode

Step

V

Program

Operations Manual WS-400 Lite Series

3.4.1 LINE ONE OF LCD DISPLAY

The first line of the display indicates the status and mode of the spin processor. (See
Figure 3-6A & 3-6B above) The information displayed on this line includes:

• MODE - displays either RUN, OFF or END, in the upper left corner, during

normal operation. It will display PGM
is entered when the RUN/STOP
Pressing the F1

key while the indicator displays OFF or END will allow changing

during “programming” mode. “Run” mode

key is pressed and all interlocks are satisfied.

between the “program” and “run” modes. The “program” mode is used to modify
or display the information for each step in a program.

• STEP - (e.g. 001/003) displays the present step number and the total number of

steps in the selected program. Currently up to fifty-one steps can be entered for
each of the twenty programs.

• V - Indicates the vacuum on the wafer in inches of Hg. “VACUUM” will flash if

the vacuum valve is off. The vacuum interlocks must be satisfied for the spin
processor to operate. A minimum vacuum setting (factory setting 15.0” Hg) is
required. If insufficient vacuum is detected, the value will be flashing. Pressing
the VACUUM

key will toggle the vacuum valve from “off” to “on”.

• PROGRAM SELECTED - the present program selected is shown in the upper

right corner of the display. The program is indicated with the letters (A – T). See
figure 3-7.

Selected

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

Figure 3-7

VACUUM SETTING

39

Laurell Technologies

min:sec

rpm

Error

S

Operations Manual WS-400 Lite Series

3.4.2 LINE TWO OF LCD DISPLAY

The second line of the display is used as a heading
third and fourth lines. The headings are min:sec

for information displayed on the

for the time of each step, and rpm for
spin speed in revolutions per minute. Additionally, error messages or conditions will be
displayed at the end of this line. An error example would be when the spin processor’s
lid is left open - the message LID

will flash here (See Figure 3-8)

Figure 3-8

FLASHING LID DISPLAY

3.4.3 LINE THREE OF LCD DISPLAY- SET POINT VALUES

The third line of the LCD display indicates the “set” data programmed for TIME and
RPM for each step in a program. (See Figure 3-9)

• S - used to indicate set point values.

• min:sec - displays the set point time in minutes and seconds for each step in a

program. The time resolution for each step is 0.1 seconds. The maximum value
that can be displayed is 99:59.9.

• rpm - display shows the set point RPM for each step in a program.

• valv - display shows valves which are enabled (optional – may show 4 or 8

valves)

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

Figure 3-9

SET POINT VALUES

40

Laurell Technologies

A

Operations Manual WS-400 Lite Series

3.4.4 LINE FOUR OF LCD DISPLAY - ACTUAL VALUES

The fourth line of the LCD display indicates the “actual” data for TIME and RPM for
each step in a program. (See Figure 3-10)

• A - used to indicate actual values.

• min:sec - displays the run time in minutes and seconds for each step in a

program. This can be displayed as either time remaining (down counting) or
elapsed time (up counting). Pressing ↑↑↑↑

or ↓↓↓↓ keys will toggle between the two

modes of counting. The time resolution for each step is 0.1 seconds.

• rpm - display shows the actual RPM during each step in a program.

Figure 3-10

ACTUAL VALUES

SECTION 3.5 - PROGRAMMING

1. Fill out the enclosed programming sheet(s).

2. Place unit in “programming” mode by pressing the F1
will appear in the mode area of the display to indicate that the unit is in
“programming” mode.

3. Select the program letter, “A” through “T”, to be modified using the PROGRAM
SELECT key. The program letter selection will be indicated in the upper right
area of the display.

4. Use ADD STEP

& DEL STEP keys to select or remove the number of steps

necessary in the program. Up to 51 steps can be programmed.

5. Use Cursor ←←←←(L) & →→→→(R) keys to position the cursor over the value to be
changed.

6. Use Value ↑↑↑↑(UP) & ↓↓↓↓(DOWN) keys to change set point values or enable and
disable valves. Repeat steps 5 and 6 until all parameters for a given step agree
with programming sheet.

key. The PGM message

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distributed without express written permission from a corporate officer.

41

Laurell Technologies

Intermediate spin speed between dispense

Operations Manual WS-400 Lite Series

7. Use STEP key to advance to the next step.

8. Repeat steps 5, 6, and 7 until all steps have been entered.

9. Use STEP

10. Press F1

 Example of a dynamic dispense coat program. This is for example only; the user

must find the best parameters for their process.

key to step through program and verify that all values are correct.

key to return to “run” mode.

PROGRAMMING EXAMPLE

Program: __A__

Step Time

99 59.9

Min Sec

1

5-7 300 - 1000

2

3-6

Speed
0-6,000

Same as
step 1

Accel
Index

0-15

015 is recommended This step is to get the chuck rotating at the

Same as
step 1 - 015

Comment

dispense step spin speed.

Dispense Step

Spin speed same as step 1.
Dispense time enough to coat substrate.
Dispense amount ~0.5 –1.0 ml / inch

3

4

5

3.5.1 PROGRAMMING ACCELERATION/DECELERATION (standard motor)

An acceleration/deceleration index value can be programmed for each step of a
process, figure 3-11. The display will show two associated acceleration numbers, only
one of which can be modified3. The acceleration index (ACL) is the first item on the
last display line, which can be changed. The second number is calculated
acceleration or deceleration in RPMs per second, this number is calculated and

3

Line 4 of LCD Display

2-3 1 – 3k

20-30

2 – 6k

Same as
step 1 - 015

Same as
step 1 - 015

speed and final speed. Can be the same
speed as dispense step. This step is not
always used.
Final spin speed to achieve target
thickness.

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

42

Laurell Technologies

Acceleration

Calculated

Operations Manual WS-400 Lite Series

cannot be changed. For example, if the first step of a program had a set speed of 3000
RPM and a calculated acceleration of 500 RPM per second, it would take 6 seconds to
reach 3000 RPM (Chuck and substrate mass may affect results).

PROCESSING TIP: The default value (015) will work well for most applications.
Entering values that exceed the capability of the motor will cause overshoots of
the set point speeds. Deceleration values should not exceed 1000 RPM/second,
while acceleration values in excess of 32,000 RPM/second are not usually
achievable with the standard motor.

Figure 3-11

PROGRAM MODE

index (settable)

acceleration

(readout only)

SECTION 3.6 - NORMAL OPERATION (“OFF/RUN” Mode)

1. Select the program to be run using the PROGRAM SELECT key. A letter “A”
through “T” (20 programs) will be indicated in the upper right corner of the
display.

2. Place a wafer on the chuck and, if equipped with a vacuum hold down chuck
press the VACUUM
the wafer will be required to start the motor. The requirement to activate vacuum
hold down should always be eliminated when using only
Contact the factory or read instructions sent with your new non-vacuum chuck to
reconfigure the system for non-vacuum use.

3. Close lid.

4. Press RUN/STOP
vacuum hold down requirement is met (vacuum chucks only), the seal purge
requirement is satisfied, and the lid is closed. The program will stop
automatically if the lid is opened, the CDA/N
(>60 PSI) or the vacuum requirement for hold down is not maintained. The
remaining process time will be maintained.

key to activate the vacuum valve. Sufficient vacuum to hold

non-vacuum chucks.

key to start a program. The program will not start until the

motor seal purge is not satisfied

2

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distributed without express written permission from a corporate officer.

43

Laurell Technologies

Thread

ed motor

Operations Manual WS-400 Lite Series

5. END is indicated in the mode display when a process has been completed and
the lid has not yet been opened for wafer removal. Restarting the same
sequence on the same wafer is not allowed until the lid is opened or a new
program is selected. Pressing F1

twice will override this interlock.

 PROCESSING TIP: For improved coating uniformity cover the 19mm hole

in the lid after the dispense step when using dynamic dispense. If using
static dispense cover the hole before processing.

SECTION 3.7 - REMOVING/CHANGING CHUCKS

3.7.1 SCREW ON TYPE CHUCK – Standard Drive Motor

• Hold the two horizontal arms on the column below the base of the chuck. Turn
the chuck counter-clockwise to remove (see fig. 3-12A), and clockwise to install,
making sure the chuck is snug (see fig.3-12B).

DO NOT OVER TIGHTEN (especially Teflon)!

•



shaft and chuck

 Horizontal arms

 Installed chuck

Figure 3-12A

3.7.2 PRESS-ON OR BOLT DOWN TYPE CHUCK – HPD2 Motor

Laurell Technologies uses a press-on or bolt down substrate chuck with our 300 mm
processor models and with all High Performance Drive (HPD2) motors. These two
styles of chucks are interchangeable – the press-on is a chuck which presses onto the
drive base and the bolt down bolts onto the drive base. See photos below to identify
which chuck design you have.

1. Press-on Chuck: To remove the chuck, gently lift up on the edges; lift one side
then the other. To install a chuck (see figure 3-13), align the 2 screw heads in
the base drive assembly with the corresponding holes in the chuck; place the
bottom of the chuck over the base drive assembly and press down. Be sure to
firmly push the chuck into place (it should only offer slight resistance).

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

Figure 3-12B

44

Laurell Technologies
Operations Manual WS-400 Lite Series

Figure 3-13

INSTALLING PRESS-ON CHUCK

2. Bolt Down Chuck Assembly: The first step in removing the bolt-on chuck is to

remove the screw cover insert (see figure 3-14a). Once the insert is removed,
you will notice 2 screw heads (fig. 3-14b). Use a 9/64” Allen wrench to remove
both screws and gently pull the chuck upward until it is free of the motor shaft
adapter (fig. 3-14c). Replacing the chuck is done by aligning the screw holes
and inserting it onto the motor shaft adapter, and tightening the screws. Then
press the insert back into place.

Do not force the chuck into position, or hit
with anything to seat it (STOP immediately and contact the factory for
advice).

NOTE: Laurell Technologies Corporation does not warranty any damage to
the equipment caused by incorrectly installing a chuck or substrate.

Figure 3-14a Figure 3-14b

REMOVING AND INSTALLING BOLT DOWN CHUCK

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distributed without express written permission from a corporate officer.

Figure 3-14c

45

Laurell Technologies
Operations Manual WS-400 Lite Series

SECTION 3.8 – SOFTWARE VERSION

The revision level of the software installed can be determined by powering the system
off then on, or by simultaneously pressing the DEL STEP

and ADD STEP keys while
the unit is in the “off” mode (with the lid closed). The version will be displayed for four
seconds on the display to the right of “rpm” Note: if “CDA” is flashing you will need to
supply Nitrogen or CDA (>60 PSI of N

or Clean Dry Air) to the system before the

2

software version is viewed (it shares the same part of the display).

SECTION 3.9 – HIGH PERFORMANCE DRIVE MOTOR (HPD2)

The HPD2 brushless motor is standard on our 15 series models and is optional with our
other spin processors. All models equipped with a HPD2 motor have an additional lid
interlock which prevents the opening of the lid while the tool is in operation. All HPD2
motors have an insert or bolt on type chuck (see section 3.7.2).

3.9.1 PROGRAMMING THE HPD2

The HPD2 uses the 400 controller and it is programmed in the same manner as our
standard motor with a few exceptions.

• ACCELERATION: The HPD2 is capable of extremely fast, up to 30,000

rpm/second, or slow acceleration rates. (Acceleration rates are greatly
influenced by chuck load so individual cases may vary.) Acceleration is
programmable from 2 to 30,000 rpm/sec.

CAUTION: When using a mechanical chuck always use low acceleration
rates to prevent the possibility of throwing a substrate from the chuck!

• SPIN SPEED: The HPD2 spin speed is programmable with both positive and

negative numbers. Positive numbers >+0001 will cause the motor to rotate
counter clockwise and negative values <-0001 will cause clockwise rotation.
Negative values can be entered by pressing the down arrow value key
through 0 value. See figure 3-15

EXAMPLE OF NEGATIVE SPIN SPEED VALUE

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distributed without express written permission from a corporate officer.

Figure 3-15

46

Laurell Technologies
Operations Manual WS-400 Lite Series

 PROCESSING TIP: An agitation type program is possible when using both

positive and negative spin speeds. The below example is meant to show how
agitation programming is possible. Call or email our sales department for details
if you need a continuous agitation mode for your work.

EXAMPLE OF AGITATION PROGRAMMING

Step Time

99 59.9

Min Sec

1

00.5 100 1 2 3 4 5 6 7 8 1000

Speed
0-6,000

Valves

X=ON

Accel

Comment

2

3

4

5

6

7

8

9

10

00.5 -100 1 2 3 4 5 6 7 8 1000

00.5 100 1 2 3 4 5 6 7 8 1000

00.5 -100 1 2 3 4 5 6 7 8 1000

00.5 100 1 2 3 4 5 6 7 8 1000

00.5 -100 1 2 3 4 5 6 7 8 1000

00.5 100 1 2 3 4 5 6 7 8 1000

00.5 -100 1 2 3 4 5 6 7 8 1000

00.5 100 1 2 3 4 5 6 7 8 1000

00.5 -100 1 2 3 4 5 6 7 8 1000

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

47

Laurell Technologies
Operations Manual WS-400 Lite Series

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

48

Laurell Technologies
Operations Manual WS-400 Lite Series

SECTION 4 - MAINTENANCE

Generally there is very little maintenance required with our processors. Normal
maintenance on the WS-400 Series spin processor is the cleaning the process bowl. It
is recommended to clean the process bowl when processing is completed at the end of
the day. Daily cleanup is a good practice and it prevents the excessive buildup of
material over time. An appropriate solvent or cleaner should be used (wear all required

2

personal protective equipment). It is recommended to leave the N
that the seal purge is constantly present and to leave the lid in the up position to allow
drying of residual moisture. Any questions regarding the maintenance of your spin
processor can be addressed at [e-mail]

• Care should be taken not to flood the process chamber during cleaning.

•

If unit is equipped with a vacuum chuck, it is important not to allow chemicals or

chemical cleaners to enter the vacuum path.

• NEVER flood or spray solvent such as acetone or any other type of cleaner

directly onto the keypad surface.

Doing so may cause keypad failure.

Always wet a wipe or cloth with the solvent and gently wipe the keypad
surface.

NOTE!
The vacuum path is not designed for any pressure. Air pressure or any liquid
forced or drawn into the vacuum chuck will very likely damage the vacuum
sensor, seals, motor and electronics. This type of damage is not covered by our
warranty

CDA supply on so

• CLEANING - Clean, rinse, then dry your spin processor after each use, taking

care to prevent any chemicals from entering the vacuum path. A good practice is
to cover the chuck during bowl cleaning. This can be done with a wafer with
vacuum turned on or use a cover such as Petri dish.

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

ALSO DO NOT FLOOD

49

Laurell Technologies

COVERED CHUCK FOR CLEANING

Operations Manual WS-400 Lite Series

THE AREA BETWEEN THE STATIONARY SEAL AND THE ROTATING SEAL.
THIS CAN CAUSE MOTOR OR ELECTRONICS DAMAGE.

Do not fill up or overflow the process chamber or bowl – fluids must not be
permitted to flow under the substrate. If the chuck face shows signs of chemical
residue, remove and clean immediately. Cleaning the o-ring surface will improve
the seal. Examine and adjust your process to prevent such occurrences. See
section 4.1.3 Vacuum Chuck Wet Test

See Fig. 4-1 below.



 WAFER CHUCK

 ROTATING SEAL

 STATIONARY SEAL

 DO NOT FLOOD IN THIS AREA

Figure 4-1

Do not at any time force fluids or pressuring gas in the center of the vacuum chuck.
Cleaning the vacuum path in this manner is dangerous and can cause significant
damage to your spin processor.

4.1 ERROR MESSAGES

The detection of abnormal operating conditions will cause the spin processor to shut
down while in the process of running a program.

These conditions are:

• Inability of spin processor motor to maintain the programmed speed parameters.

• Detection of vacuum loss to the wafer in systems equipped with a vacuum

sensor.

If either of these conditions occurs, the display will indicate the error status “Exx” in the
“mode” area of the display. The specific error codes are listed below.

CODE DESCRIPTION ACTION

E02 RS-232 buffer overflow Spin2000 only
E03 Motor speed control - Did not reach specified

Shut down spin processor

RPM
E04 Vacuum below required minimum detected Shut down spin processor
E05 Illegal command sent to spin processor from Ignore, Spin2000 only

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distributed without express written permission from a corporate officer.

50

Laurell Technologies
Operations Manual WS-400 Lite Series

Spin2000
E06 A/D time out reading vacuum Missed vacuum reading
E07 Motor exceeded maximum RPM Shut down spin processor
E08 No RPM feedback. Zero RPM Shut down spin processor,

remove any restriction to
rotation

E10 Purge Air pressure below setpoint.

Will not start new process.

Check “Seal Purge” hookup
and pressure (SEC 3.2.3)

Will shut down spin processor

Certain errors will cause the motor to shut down. The timer will stop. Pressing the F1
key clears errors and pressing the RUN
shut down. If you desire to restart the program from the beginning, press the F1
twice, then press the RUN

key to start.

key will restart the program at the point it was

key

If an error condition occurs, check the following:

• Record the time, conditions, program number, program step, and error code

• Determine if error is due to vacuum loss or motor speed. Correct any obvious

problems

• If condition persists, contact Support at Laurell Technologies Corporation for

assistance

• Vacuum source

• Seal Purge source pressure >60 PSI required

• Lock out power supply and turn chuck by hand making note of any excessive

drag

Note: Mechanical intervention during rotation is not permitted with this
equipment design and damage caused is not covered by our warranty.

4.1.1 VACUUM LOSS (On units equipped with vacuum sensor only.)

• Vacuum readings >20” Hg typically indicate sufficient vacuum hold is present.

<15” Hg vacuum (factory setpoint) is normally considered insufficient to operate
safely. A flashing “V=XX” display is an insufficient vacuum indicator where XX is
the actual vacuum value being read by sensor.

Note: the vacuum setpoint can be changed (contact the factory for the adjustment
procedure)

4.1.2 REMOVING, CLEANING AND INSTALLING THE VACUUM VALVE

• The vacuum valve is an air operated valve with an internal piston. Chemicals

such as photoresist or polyimides, which enter into the vacuum path, can prevent
this piston from moving. The piston will fail to operate due to chemical
contamination. If this happens and it is obvious that the vacuum valve is not

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distributed without express written permission from a corporate officer.

51

Laurell Technologies

1

2

3

Operations Manual WS-400 Lite Series

functioning properly, the following procedure can be performed to clean the
valve.

• NOTE: FOLLOW THIS PROCEDURE CLOSELY AND BE CAREFULL NOT TO

LOSE THE 3 SMALL O-RINGS!

- Carefully remove
the 4 socket head
screws.

Small o-rings

- Lift the 3 piece
assembly away
from the spinner
using great care
not to lose the
small face o-ring.

- The main assembly
consists of 3 pieces and
3 small o-rings

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distributed without express written permission from a corporate officer.

Backside view of the 3
piece assembly

52

Laurell Technologies

It is not always

4

5

spring.

6

Keep track of all parts while cleaning, so

7

factory.

8

9

Operations Manual WS-400 Lite Series

necessary to
disassemble the valve for
cleaning. The valve can
be soaked as a whole
unit.

- If you decide to
disassemble the valve, first
remove the bell screw.

- Remove the piston
by carefully sliding it
out of the center
assembly.

- After
removing the
screw lift off
the bell and
the actuation

as not to lose any for reassembly.

The parts can be
taken apart and
hand cleaned or
soaked in an
Acetone bath.

Never scrape the
parts when
cleaning!
This will degrade
the tolerances
needed for proper
operation.

- Take the
first section
and carefully
snap into
vacuum face
groove,
making sure
that the o ring
stays fully
seated.

- Reassemble
the center valve
assembly in the
same order that
the valve was
disassembled. If
any o-rings or
parts appear
degraded,
contact the

- Hold first
section into
groove and
attach the two
other sections.

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distributed without express written permission from a corporate officer.

53

Laurell Technologies

10

11

12

13

14

Operations Manual WS-400 Lite Series

screw loosely.

NOT totally tighten

until all four screws
have been
inserted.

- Press
the two
remaining
sections
onto the
first
section,
also
making
sure that
the o-rings
are firmly
in place.

- Insert each

DO

- With the
entire
assembly in
tact, insert
the first
screw.

- Tighten
screws firmly,
but do not
over tighten.
When
tightening the
screws, work
in a criss­cross pattern.

- Make sure
screws are secure,
but not over
tightened.

Also check to see
if all o-rings are in
place.

4.1.3 VACUUM CHUCK WET TEST

• To prevent chemicals from entering into the vacuum path, the chuck and o-ring

surface must be clean and defect free. A chuck wet test can be performed to
check the integrity of the o-ring seal. See Fig.4-2. Using a clear substrate, place
the wafer on the chuck and press the vacuum key. Using a bottle of DI water
spray water around the periphery of the substrate where it meets the chuck while
manually rotating the chuck. Check to see if there is any leakage across the o­ring.

• If there is no leakage, the chuck is ok to use.

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distributed without express written permission from a corporate officer.

54

Laurell Technologies
Operations Manual WS-400 Lite Series

• If leakage occurs, inspect the chuck and o-ring for defects. If the chuck is

damaged it is recommended that it is replaced with a new Laurell chuck. If the
chuck is defect free, wipe the chuck and o-ring surface with IPA. The cleaning
solution or solvent must be compatible with the o-ring material. Repeat wet test.
If wiping down the chuck and o-ring fails to prevent leakage remove and clean
the o-ring. See section 4.1.4.

Figure 4-2

Wet Testing 1.75” and 200mm Chuck

4.1.4 CLEANING AND REPLACING THE CHUCK O-RING

• To remove the o-ring from the chuck, insert a thin blunt instrument or o-ring puller

into the o-ring groove and pull upward. Be careful not to damage the o-ring or
chuck. Inspect the o-ring carefully. If the o-ring is cut, nicked or scratched it must
be replaced. Contact Laurell for part number and ordering information. If the o­ring is in good condition, wipe it with a cleaner and insert it back into the o-ring
groove. Use the following procedure to insert the o-ring.

2 - After the

1 - Carefully press the
o-ring into the chuck
face groove. Do so by
pressing in a small
section at a time.

small sections
have been
pressed in,
carefully press
around the
chuck until the
o-ring is fully
seated.

3 - The o-ring should
lay flat in the groove.

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

4 - There should
not be any areas
that do not lay flat.
If this occurs,
continue to press
around the chuck
until they are gone.

55

Laurell Technologies
Operations Manual WS-400 Lite Series

5 - Make a final
check to be sure
that the o-ring is
entirely seated.
Perform a chuck wet
test to ensure o-ring
sealing integrity.

4.1.4.1 O-RING COMPOSITION, USES & RECOGNITION

• We have determined that O-rings are the best way to insure a liquid-tight seal

between the chuck face and a non-porous substrate. The O-ring provides a
gripping as well as a sealing interface to our vacuum chuck and is normally
provided in two standard materials, Viton and EPDM.

The type O-ring which is installed on your chuck has been determined by the
chemicals which were specified when the spin processor was quoted. EPDM O­rings are most commonly used for solvents while Viton is the choice where acids
or Toluene are present. You should determine before using the equipment what
chemical you will be using as well as the type O-ring which is installed. A supply
of both type rings are usually shipped with each system in properly labeled clear
re-closable bags.

If O-rings become intermixed, an EPDM O-ring can usually be identified by the
dull finish as opposed to the relatively smooth texture of the Viton material (some
Viton O-rings are brown in color).

The vacuum chuck’s O-ring seal should NEVER deflect (> 0.002” / 50 microns). If
you experience substrate deflection or breakage this is not a design issue but
this is not normal so you

MUST STOP immediately and contact our support

department for application assistance. If you have thin or fragile material we
have developed successful approaches to eliminate or minimize deflection and
breakage.

When using the fragment adapter it is recommended that only one size O-ring
should be used at a time. The simultaneous use of O-rings can add more grip
and support to the substrate but if not absolutely identical thickness can cause a
vacuum leak or even cause the material to break. When both O-rings are used
an improper seal may develop allowing chemical to enter the vacuum path (a
leading cause of machine failure). Important:

The substrate must always fully

cover the face of the O-ring being used.

Note: If you notice a black residue on the O-ring or marking of the holding
surface either the O-ring is dirty or the material is being damaged by the process
chemistry.

STOP immediately especially if fluid passes the sealing surface after

being under vacuum.

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

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Laurell Technologies





Operations Manual WS-400 Lite Series

.

The fragment adapter must
be installed with a single
o-ring for fragments.

The inside o-ring is for



fragments ≥ 11mm x 11mm
The outside o-ring is for



fragments ≥ 20mm x 20mm



Only 1 size o-ring should be
installed in the adapter at
any one time.

Improper installation of two
simultaneous o-rings on the

fragment adapter

.

.

.

4.1.5 MOTOR OPERATION

• Manually turn chuck and check for free movement and no binding. The motor

should never

be overloaded or held from turning.

• If RPM display shows zeroes when the chuck is actually spinning, this would

indicate failure of the RPM sensor and an E08 error will appear.

• Deceleration of the motor from a high speed is usually far less controllable than

acceleration. When programming such steps, it is necessary to select a
deceleration rate that the motor can achieve. This usually requires setting the
acceleration index in the 1 to 5 range. If this is not done the momentum of the
chuck and motor will not allow the speed to follow the required motor speed
profile, causing an error. If this occurs, decrease the acceleration index in the
program step that goes to the lower speed. See Section 3.5.1 “PROGRAMMING
ACCELERATION/DECELERATION” of this manual for details.

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

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Laurell Technologies
Operations Manual WS-400 Lite Series

4.1.6 CALIBRATION MODE

Calibration is used to adjust rotation performance by allowing fine-tuning of the motor
controller for large changes in chuck and substrate mass, as well as motor efficiency
corrections in time. This is performed at the factory and is normally not required again.

NOTE: Contact the factory for detailed instruction

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

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Laurell Technologies
Operations Manual WS-400 Lite Series

SECTION 5 – APPENDIX

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

Figure 5-1-1

INSTALLATION WS-400 6&8 LITE

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Laurell Technologies
Operations Manual WS-400 Lite Series

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

Figure 5-1-2a

INSTALLATION WS-400 LITE INDECK

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Laurell Technologies
Operations Manual WS-400 Lite Series

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

Figure 5-1-2b

INSTALLATION WS-400 LITE INDECK

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Laurell Technologies
Operations Manual WS-400 Lite Series

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

Figure 5-1-3

INSTALLATION INDECK CONTROLL PANEL

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Laurell Technologies
Operations Manual WS-400 Lite Series

(Remote controller shown with pilot air valves for Full systems only and optional downflow

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

Figure 5-1-4

INSTALLATION TUBING FOR INDECK

exhaust)

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Laurell Technologies
Operations Manual WS-400 Lite Series

AVAILABLE OPTIONS

• Vacuum pump

• Adjustable down-flow exhaust and drain with differential pressure gauge

• Clear polycarbonate wafers – many sizes available

• Clear polycarbonate lid

• Custom vacuum non-vacuum chucks

• Manual syringe kit

• Manual EBR syringe

• High performance drive motors

• Higher speed – up to 10,000 RPM

• Drain diverter

• Drain catch cup

• Programmable exhaust

• Automatic syringe dispense

• Programmable dynamic linear or rotary dispense arm

• Spray and flood injectors

• Automatic EBR (Edge Bead Removal)

• Backside or simultaneous top & bottom dispense

• ESD controller

Note: Some options not available for all models.

Contact

[e-mail] for more information.

All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or

distributed without express written permission from a corporate officer.

64