Kobold MAS Series, MAS-1000, MAS-2000, MAS-1100, MAS-2100 Instruction Manual

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KOBOLD MAS Series

Thermal Mass

Flowmeters

March 1997

r2_12-13

Part Number:

IM-82

(412) 788-2830 · (800) 998-1020 · Fax (412) 788-4890

KOBOLD Instruments Inc

1801 Parkway View Drive · Pittsburgh, PA 15205

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MAS Instruction Manual

The purpose of this instruction manual is to cover the following Kobold Instruments Inc products:

Model MAS-1000 Flowmeter with Po

Model MAS-2000 Flowmeter with Polyamide body and no display.

Model MAS-3000 Flowmeter with stainless steel flow body and display.

Model MAS-4000 Flowmeter with stainless steel flow body and no display.

Model MAS-1100 Flowmeter with aluminum body and display.

Model MAS-2100 Flowmeter with aluminum body and no display.

Kobold Instruments’ MAS Series Flowmeters measure the mass flow rate of gases in ranges from 0-10 standard cubic centimeters per minute (SCCM) to 0-500 standard liters per minute (SLM). For most models, accuracy is 1.5% of full scale over a wide temperature and pressure range, and time response is 2 seconds to within 2% of final flow. Certain models are rated at 1% or 5% of full scale.

lyamide body and display.

INTRODUCTION

1.1

Purpose

The MAS is ideal for a complete range of gas flow applications including general process control, laboratories, instrument OEM’s, gas panels, and flow calibration.

Figure 1-1

Tiltable Display is Viewed

from any Angle

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MAS Instruction Manual

CAUTION! Any application whatsoever related to humanCAUTION! Any application whatsoever related to human

CAUTION! Any application whatsoever related to human

CAUTION! Any application whatsoever related to humanCAUTION! Any application whatsoever related to human respiration must have the written consent of Koboldrespiration must have the written consent of Kobold

respiration must have the written consent of Kobold

respiration must have the written consent of Koboldrespiration must have the written consent of Kobold Instruments Inc.Instruments Inc.

Instruments Inc.

Instruments Inc.Instruments Inc.

The versatile MAS Flowmeter digitally displays the mass flow rate directly in engineering units or percent of full scale. The

display is tiltable over 180° for easy viewing and can be removed

for remote mounting on a front panel.

The Kobold MAS directly monitors the mass flow rate of the gas. This means it measures molecular flow – the measurement quality of direct concern in most applications, such as human respiration, chemical processes, combustion, and heating or cooling. No temperature or pressure corrections are required, as in the case of most other flow monitoring devices like rotameters, turbine meters, and orifice plates.

Figure 1-2

MAS Operation and Features

Direct Monitoring of Mass Flow.

No temperature or pressure corrections required.

Unexcelled Performance.

● ±

1.5% accuracy.

●

0.5% repeatability.

●

2 second response time

Tiltable Display.

9 positions provide easy viewing from any angle.

Connector.

9-Pin "D" Sub-type. Has 0-5 VDC or 4-20 mA (optional) output signal linearly proportional to mass flow rate.

Input Power Jack.

Accepts 12 to15 VDC or 24 VDC input power from Kobold power supply or customer supplied power.

Inlet Screen.

Filters out particulates. Easily removable.

Digital Display.

Gives mass flow rate in engineering units.

Zero and Span Potentiometers.

Adjustable from outside of enclosure.

Patented Sensor Tube.

Straight, large-I.D. sensor tube is easy to clean.

Patented Laminar Flow Bypass.

Provides a variety of flow ranges. Unique cutouts make range changes easy.

Flow Body.

Corrosion resistant plastic or stainless steel.

FKM

rings standard.

"O"-

Inlet/Outlet Fittings.

Available with Female NPT or Swagelok® style compression fittings.

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Mounting Holes.

The MAS mounts in any position for convenience of installation.

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The MAS Flowmeter is a transducer requiring a 12-15 VDC (24 VDC optional) external power source. A 0-5 VDC or optional 4-20 mA output singal linearly proportional to gas mass flow rate is provided for recording, data-logging, or control. A 9-Pin “D” subconnector is provided for power input and signal output. The MAS is available in several basic configurations with either (female) or

/4 to 1/2 inch O.D. tube compression inlet/outlet fittings,

/4 inch NPT

with or without the digital display, or the optional power supply.

Gas enters the MAS flow body and divides into two flow paths. Most of the flow goes through the laminar flow bypass. This creates a pressure drop that forces a small fraction of the flow through the sensor tube.

TWO COILS

MAS Instruction Manual

1.2

Principle of

Operation

SENSOR TUBE

•

LAMINAR FLOW BYPASS

The patented* straight sensor tube is mounted parallel to the bypass flow path. Since both paths are perfectly laminar, the ratio of the total flow (

) to the sensed flow (

) is constant. Two

resistance temperature detector (RTD) coils around the sensor tube direct a constant amount of heat into the gas stream.

RTD COILS

, T

R2, T

Figure 1-3

Two Flow Paths

CONSTANT HEAT, H

FIRST LAW OF THERMODYNAMICS

(HEAT IN = HEAT OUT) H = m·

*U.S. Patent No. 4,487,062.

(T2 – T1) + H

1 Cp

H–H

m· =

Cp∆T

Figure 1-4

Measuring Sensor Flow

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MAS Instruction Manual

“GATES”

SECT. A-A

Figure 1-5

Changing Flow Ranges is Easy with MAS’s Patented Bypass

In actual operation, the gas mass flow carries heat from the upstream coil to the downstream coil. The resulting temperature difference T

is detected by the RTD coils and gives the output

2–T1

signal. Since the molecules of the gas carry away the heat, the output signal is directly and linearly proportional to gas mass flow.

MAS's patented laminar flow bypass makes changing of flow ranges easy with the proper calibration facilities. Each of the two bypasses in the optional Laminar Flow Bypass Set has a combination of rectangular slots along its circumference as shown in Figure 1-5 below.

1.3 Specifications

To change the flow range of your MAS, follow the instructions provided with the Kobold Model EL Laminar Flow Bypass Set and cut away the “gate(s)” leading to the right combination of laminar flow paths in one of the two bypasses. This procedure requires proper calibration facilities and minimal skill in electronics.

FLOW RANGES _________________________________________________________________

_________________________________________________________________

Flow ranges specified are for an equivalent flow of nitrogen at 760 mm

Hg and 21°C (70°F). Other ranges are available.

GASES

Most gases; check compatibility with wetted materials; specify when ordering.

Code SCCM Code S LM

01 0-10 07 0-1 02 0-20 08 0-2 03 0-50 09 0-5 04 0-100 10 0-10 05 0-200 11 0-20 06 0-500 12 0-30

13 0-40

DISPLAY

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31/2 digit LCD (0.5 inches tall); removable for remote mounting.

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OUTPUT SIGNAL

Linear 0-5 VDC standard, 1000 ohms min. load impedance; 4-20 mA optional, 50 to 500 ohms loop resistance.

POWER REQUIREMENTS

12-15 VDC nominal; 100 mA max (24 VDC optional, specify when ordering).

ACCURACY

±1.5% of full scale including linearity over 15 to 25 °C and 5 to 60

psia (0.35 to 4.2 kg/cm

); with special calibration ±1% of full scale

accuracy at a specific temperature and pressure is available.

REPEATABILITY

±0.5% of full scale.

TEMPERATURE COEFFICIENT

0.15% of full scale per °C, or better.

MAS Instruction Manual

PRESSURE COEFFICIENT

0.01% of full scale per psi (0.07 kg/cm2), or better.

RESPONSE TIME

800 ms time constant; 2 seconds (typical) to within ±2% of final

value over 25 to 100% of full scale.

PRESSURE DROP ____________________________________________________________

Typical Maximum Pressure Drop

_____________________________________________________________

Flow Rates (cm of Water)

100 SCCM .025

1 SLM .454 1 0 SL M 6.00 2 0 S L M 23.83 3 0 S L M 45.60

___________________________________________________________

4 0 S L M 83.36

GAS PRESSURE

150 psi (10 kg/cm2) gauge max; 20 psi (1.4 kg/cm2) gauge optimum.

LEAK INTEGRITY

–4

1×10

SCCS of helium max to outside environment.

GAS AND AMBIENT TEMPERATURE

0 to 50 °C.

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MAS Instruction Manual

1.15

(29.21)

3.05

(77.47)

4.16

(105.66)

(WITHOUT

DISPLAY)

5.38

(136.65)

3.50 (88.90)

/4" NPT

6.68 (169.67)

/4" SWAGELOCK

ALL DIMENSIONS IN INCHES

0.58

(14.73)

1.16

(29.46)

0.56

(14.22)

6-32 X 0.15 DP.

(SELF TAPPING)

0.75 (19.05)

0.38

(9.65)

0.13 (3.30)

2.75

(69.85)

3.00

(76.20)

0.125 DIA. THRU PANEL-2 PLACES;

FOR TWO 4-40 FLAT HEAD SCREWS

0.25 DIA. THRU; FOR 4 WIRES

0.88 (22.35)

1.00 (25.4) PANEL MOUNTING HOLES

DIMENSIONS IN INCHES

(DIMENSIONS IN MILLIMETERS IN PARENTHESES)

SIDE VIEW

END VIEW

BOTTOM VIEW

Dimensions

WETTED MATERIALS

5% glass-filled Polyamide 6/6; 316 stainless steel; FKM “O”-

rings standard, FFKM and silicone O-rings optional.

WEIGHT

2 lb. (0.9 kg) net; 3 lb. (1.4 kg) shipping.

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MAS Instruction Manual

Many options are available for your Kobold MAS. Please consult Kobold’s current Price List for the respective prices.

V4 (Optional) 4-20 mA output signal C( ) Cable assembly, specify cable type (round or ribbon) and

length T2 1-5 Channel Power Supply, in NEMA Box, 115 VAC T4 1-5 Channel Power Supply, in NEMA Box, 230 VAC T5 Power Supply, for one channel, 110 VAC T6 Power Supply, for one channel, 230 VAC UV Upstream valve DV Downstream valve M S Replacement mass flow sensor, includes “O”-rings and

mounting flanges OV

Complete set of FKM “O”-rings T P Tip plate for electrical enclosure RD–( ) Remote display

1.4

Options

* U.S. and foreign patents pending. ® Registered trademarks:

Swagelok, VCO, VCR–Crawford Fitting Co.

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MAS Instruction Manual

2 INSTALLATION

2.1 Receipt of Your MAS

2.2 Return Shipment

When packing carton for damage incurred in shipment. If the packing carton is damaged, the local carrier should be notified at once regarding their liability. Kobold’s Customer Service Department should also be notified immediately.

Customer Service Phone Number:

For our customers other than the USA, Canada and Mexico please call the distributor from whom you purchased your MAS or call our head office in Germany for the Kobold location nearest you:

Remove the packing slip from its envelope and verify that the carton contains all parts listed. Inspect the carton and packing material thoroughly to ensure that no spare parts or accessories are mistakenly discarded. In case of shortages, please contact Customer Service at the above phone number, or they may be contacted in writing at the address listed in the next section.

Please do not return any equipment without a Return Material Authorization, which is obtained from the Customer Service Department. Information describing the problem, corrective action or work to be performed at the factory, the purchase order number that the equipment was purchased under, and the name of the person to contact must be included with the returned equipment. The use of a Return Material Authorization is for your benefit. It makes the proper service and return of your equipment much easier to accomplish. Return shipping address:

the equipment is received, carefully check the outside

USA (412) 788-2830, or Fax (412) 788-4890

Germany 49(0)61-92-29-90 or Fax 49(0)61-92-23-398

Non-North American customers may contact the KOBOLD Messring GmbH Customer Service Department Technical Assistance at:

NOTE: Equipment returned for repair that is found to be completely operational will be subject to the current “no problem found” billing rate.

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USA KOBOLD INSTRUMENTS INC.

1801 Parkway View Drive Pittsburgh, PA 15205

Europe KOBOLD MESSRING GmbH

Nordring 22-24 65719 Hofheim/Ts. Germany

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CAUTION! The maximum pressure and temperature in theCAUTION! The maximum pressure and temperature in the

CAUTION! The maximum pressure and temperature in the

CAUTION! The maximum pressure and temperature in theCAUTION! The maximum pressure and temperature in the flow line in which your MAS is to be installed must notflow line in which your MAS is to be installed must not

flow line in which your MAS is to be installed must not

flow line in which your MAS is to be installed must notflow line in which your MAS is to be installed must not exceed 150 psig (10 kg/cmexceed 150 psig (10 kg/cm

exceed 150 psig (10 kg/cm

exceed 150 psig (10 kg/cmexceed 150 psig (10 kg/cm respectively.respectively.

respectively.

respectively.respectively.

gauge) or 150 gauge) or 150

gauge) or 150°

gauge) or 150 gauge) or 150

F (65F (65

F (65°

F (65F (65

C),C),

C),

C),C),

MAS Instruction Manual

In order to ensure a successful installation, inlet and outlet tubing or piping should be in a clean state prior to plumbing your MAS to the system. MAS is applicable to

clean gas onlyclean gas only

clean gas only because

clean gas onlyclean gas only particulates and other foreign matter may clog the sensor tube and laminar flow element over a period of time. If the gas contains particulate matter, install a high-efficiency, 50 to 100 micron, inline filter upstream of the MAS.

Do not locate the MAS Flowmeter in areas subject to sudden temperature changes, moisture, drafts, or near equipment radiating significant amounts of heat. Allow adequate space for cable connectors and wiring. If your MAS is to be mounted in other than a horizontal position, the zero will need adjustment. See Section

5.2, R

CAUTION! Be sure the arrow on the side of the transducerCAUTION! Be sure the arrow on the side of the transducer

CAUTION! Be sure the arrow on the side of the transducer

CAUTION! Be sure the arrow on the side of the transducerCAUTION! Be sure the arrow on the side of the transducer points in the direction of flow.points in the direction of flow.

points in the direction of flow.

points in the direction of flow.points in the direction of flow.

ECALIBRATION OVER THE SAME FLOW RANGE.

The MAS may be mounted to a chassis with two 6-32 self-tapping screws. See Section 1.3, S

PECIFICATIONS, for hole dimensions.

2.3

Mechanical

Installation

Your MAS is supplied with either

/4 , 3/8 or 1/2 inch compression inlet and outlet fittings. These

/4 inch female NPT (standard)

fittings should not be removed unless your MAS is being cleaned

or calibrated for a new flow range. VCO

available on special order.

/4-inch pipe requires a good quality

or VCR® fittings are

paste pipe thread sealant and should be installed in the inlet and

outlet fittings 1

CAUTION! Over-tightening will crack the fittings andCAUTION! Over-tightening will crack the fittings and

CAUTION! Over-tightening will crack the fittings and

CAUTION! Over-tightening will crack the fittings andCAUTION! Over-tightening will crack the fittings and shift calibration.shift calibration.

shift calibration.

shift calibration.shift calibration.

/2 turns beyond hand-tight.

For the first installation of compression fittings, simply insert the tubing into the fitting. Make sure that the tubing rests firmly on the shoulder of the fitting and that the nut is hand-tight. Scribe the nut at the six o’clock position. While holding the fitting body steady

with a back-up wrench, tighten the nut 1

/4 turns, watching the scribe mark make one complete revolution and continue to the nine o’clock position. After this, the fitting can be reconnected by snugging with a wrench. Do not fail to use a back-up wrench or the inlet fitting may be damaged.

2.4

Plumbing

Connections

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MAS Instruction Manual

Figure 2-1

Plumbing Requirements for Model’s 1100/2100

FLOW

➡

5.0"

(127 mm)

/2" NPT PIPE

(10 DIAMETERS)

EXAMPLE: Cross Section

CORRECT

/2" NPT pipe for

/2" NPT flow body

CAUTION! Do not mix or interchange parts of tube fittingsCAUTION! Do not mix or interchange parts of tube fittings

CAUTION! Do not mix or interchange parts of tube fittings

CAUTION! Do not mix or interchange parts of tube fittingsCAUTION! Do not mix or interchange parts of tube fittings made by different manufacturers.made by different manufacturers.

made by different manufacturers.

made by different manufacturers.made by different manufacturers.

INCORRECT Avoid use of compression fitting on inlet of flow body. The reduction of internal diameter of the fitting results in a “jet”, creating noise and affecting calibration. DO NOT reduce down right at the inlet with

/4" pipe.

2.50"

(63.5 mm)

/2" NPT PIPE

(5 DIAMETERS)

Finally, check the system’s entire flow path thoroughly for leaks before proceeding to Section 3, O

CAUTION! All instruments are leak-tested prior to shipping.CAUTION! All instruments are leak-tested prior to shipping.

CAUTION! All instruments are leak-tested prior to shipping.

CAUTION! All instruments are leak-tested prior to shipping.CAUTION! All instruments are leak-tested prior to shipping. To check your installation, test the fittings only. Do not useTo check your installation, test the fittings only. Do not use

To check your installation, test the fittings only. Do not use

To check your installation, test the fittings only. Do not useTo check your installation, test the fittings only. Do not use liquid leak detectors such as Snoop® to search for leaksliquid leak detectors such as Snoop® to search for leaks

liquid leak detectors such as Snoop® to search for leaks

liquid leak detectors such as Snoop® to search for leaksliquid leak detectors such as Snoop® to search for leaks inside or outside the MAS. Instead, monitor pressureinside or outside the MAS. Instead, monitor pressure

inside or outside the MAS. Instead, monitor pressure

inside or outside the MAS. Instead, monitor pressureinside or outside the MAS. Instead, monitor pressure decay.decay.

decay.

decay.decay.

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PERATION.

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MAS Instruction Manual

MAS flowmeters require a single +12 to +15 VDC power supply capable of providing a minimum current of 100 mA. The MAS can also be configured for +24 VDC power at 100 mA.

Operating power input is via either the DC power jack or the 9-pin “D” connector on the side of the enclosure. Kobold offers the Model MAS-5000 single channel power supplies for single transducer applications and the Model MAS-5100 for powering up to eight transducers through the "D" connector.

CAUTION! Do not supply + DC power at the “D” connectorCAUTION! Do not supply + DC power at the “D” connector

CAUTION! Do not supply + DC power at the “D” connector

CAUTION! Do not supply + DC power at the “D” connectorCAUTION! Do not supply + DC power at the “D” connector while using an MAS-5000 power supply at the DC powerwhile using an MAS-5000 power supply at the DC power

while using an MAS-5000 power supply at the DC power

while using an MAS-5000 power supply at the DC powerwhile using an MAS-5000 power supply at the DC power jack. Do not plug power connector into DB9 connector.jack. Do not plug power connector into DB9 connector.

jack. Do not plug power connector into DB9 connector.

jack. Do not plug power connector into DB9 connector.jack. Do not plug power connector into DB9 connector. Damage to electronics will result.Damage to electronics will result.

Damage to electronics will result.

Damage to electronics will result.Damage to electronics will result.

The standard MAS is provided with a 9-pin “D” sub type connector located on the side of the MAS enclosure as shown in Figure 2-2. The pin numbers for this “D” connector are also shown in Figure 22, and the pin assignments are given in Table 2-1 on the next page. The output signal is obtained from the 9-pin “D” connector. A 0 to 5 VDC output signal linearly proportional to gas mass flow rate is standard. A 4-20 mA current loop signal is optionally available. The mating connector is included.

2.5

Electrical

Connections

2.5.1

9-Pin “D”-Connector

Pin Assignments

When the MAS is configured for a remote display, connections are made via the 9-pin “D” connector. Power connections for the display and transducer are shared in this mode unless the accessory MAS-5000 power supply is used.

“D” CONNECTOR

7 8 9

1 2 3 4 5

DC POWER JACK

Figure 2-2

“D” Connector and DC

Power Jack Location and

Number Assignments

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MAS Instruction Manual

Figure 2-3

Printed Circuit Board Input/Output Solder Pad Assignments (wires shown are typical)

Table 2-1

The following connection points can be made through the “D” connector or, in OEM applications, made through the circuit board solder pad connections.

The display pad connections are shown for applications requiring remote mounting of the digital display. The letters appear on the display circuit board and are shown in Figure 2-3. ___________________________________________________________

____________________________________________________________

Pin No. Function Display Pad

1 No Connection N/A 2 Signal Common N/A 3 0 to +5 VDC Flow Signal N/A 4 + Power Supply (12 or 24 VDC)

*1, *2

(A) 5 Remote Display Flow Signal (D) 6 Remote Display Reference (C) 7 Power Common (B) 8 4 to 20 mA Return (Common) N/A

____________________________________________________________

9 4 to 20 mA Output N/A

NOTE: the numbers on the connector plug may not agree with the numbering system as it appears on our Figure 2-2 (on previous page). It is important to make sure that the proper wires are in the proper location rather than the proper number. Most connectors utilize a standard numbering scheme but there are a few that do not.

The remote display connects through the 9-pin “D” connector only. The pads A-D in the top right of the main circuit board are for integral display mounting only.

*1 Power supply voltage must be specified at time of order. Operating a 12 VDC meter at

*2 Do not supply + DC power at the “D” connector while using a power supply at the DC

Page 12

24 VDC will cause damage. Running a 24 VDC meter at 12 VDC will result in faulty operation.

power jack. Both supplies may be damaged.

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MAS Instruction Manual

As shown in Figure 2-4, the digital display on your MAS may be removed and mounted remotely on a front panel. The MAS transducer is mounted at any convenient location in your system.

Remote installation is not recommended unless you possess the proper soldering tools and skills to accomplish the job. Remote installation of the digital display is accomplished by following these steps:

1. Remove the digital display from your MAS by following the procedure described in Section 2.5.3, OEM E

TIONS.

LECTRICAL C ONNEC-

2. Gain access to the printed circuit board (PCB) also by following the procedure in Section 2.5.3, OEM E

LECTRICAL C ONNECTIONS.

3. Very carefully unsolder the four short leads from the PCB to the display.

4. Gain access to the display circuit board by removing the two snap rings (No. 36) and opening the “clam shell” display enclosure. Remove the four short wires by carefully unsoldering. Solder the longer four wires (26AWG, 100 ft. max shielded cable recommended) to the digital display and solder the other ends to the appropriate pin numbers of the 9-pin “D” connector as shown in Figure 2-3 and Table 2-1 (on previous page).

2.5.2

Remote Installation of

Digital Display

5. Reassemble the MAS, replacing the display base (No. 35) with the Model TP Plain Top Cover (No. 28).

6. Make the necessary plumbing connections to the unit.

7. Mount the digital display as shown in Figure 2-4 referring to the panel mounting hole dimensions in Section 1.3, S

PECIFICATIONS.

Figure 2-4

Remote Installation of

Digital Display

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MAS Instruction Manual

2.5.3 OEM Electrical Connections

The OEM version MAS flowmeter has an electrical port (hole) on its side for electrical input/outputs. This port is just above the input power jack (see Figure 2-2). Wires entering the MAS via this port are soldered to the printed circuit board as shown in Figure 2-

3. The solder pad assignments are given in Table 2-1.

How to Gain Access to the MAS’s Printed Circuit Board (PCB): To gain access to the PCB to make the solder connections, please refer to the exploded view in Appendix A and follow these simple steps.

1. If your MAS has the digital display:

(a) First, remove the display by carefully rotating the display until it hits the top plate. Slowly continue to rotate until this lever arm action snaps out the two yokes holding the display (Nos. 30). Use extra caution during this operation as excessive force will break the delicate wire connections. Carefully move the display assembly to expose the two screws securing the display base (No. 35). Do not exert excessive force on the display while rotating as doing so could crack the LCD display.

(b) Next, remove the two screws (Nos. 21) in the display base (No. 35) and the two screws (also Nos. 21) in the back of the enclosure (No. 10).

2.5.4 Using Kobold’s Single, Dual, and Flo-Box™ Electronics

(c) The top, front, and back sides of the enclosure can now be removed, (the front slides out towards you and perpendicular to the flow path) exposing the PCB.

2. If your MAS does not have the digital display:

(a) Remove the label (No. 29) from the plain top cover (No. 28) to expose the two screws (Nos. 21).

(b) Then follow steps 1(b) and 1(c) above.

To reassemble, just reverse the process.

For applications requiring flow totalization or alarms simply order the optional Model EC-( ) cable to connect to the rear panel of Kobold Instruments’ Single-Channel, Dual-Channel, or FloBox (1-5 Channels) Electronics. The Kobold electronics will provide you with a selectable digital readout for each channel, input power, high, low, or window alarms, and optional flow totalization.

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MAS Instruction Manual

Quick operating instructions are given on the first page of this manual.

Following are important notes and comments regarding the Quick Operating Instructions.

NOTE 1 R

EFERENCING THE FLOW RATE TO OTHER TEMPERATURE AND

PRESSURE CONDITIONS: The gas flow rate output of your MAS is referenced to “standard”

conditions of 21°C (70°F) and 760 mm of mercury (1 atmosphere),

unless you have specified otherwise. Be sure you know the reference conditions of your MAS, because it may make a difference if you are comparing the output of the MAS with another type of flow meter. For example, the output reading of the MAS will be approximately

7% lower if it is referenced to 0°C rather than 21°C. Appendix B

shows how to convert the flow rate output of your MAS to other standard conditions and how to find the flow rate referenced to the actual temperature and pressure conditions in the pipe where your MAS is located.

NOTE 2 A

CCURACY:

The standard accuracy of the MAS is ±1.5% of full scale. The ±1.5%

of full scale accuracy means the 0-5 VDC output signal is accurate

to within ±0.1 VDC, and the 4-20 mA output is accurate to within ±0.4 mA. This means, for example, that the output signal for zero flow can be as much as ± 0.1 VDC or ±0.4 mA. Please note if you get

an output signal at zero flow (as long as it is within either of these two ranges) it does not mean your MAS is malfunctioning. For MAS’s with the digital readout, the accuracy is simply 1.5% times the full scale flow rate listed on your MAS’s front label. For example, if your full scale is 10 SLM, the digital readout will be

accurate to ±0.2 SLM, and the reading at zero flow may be as much as ±0.2 SLM and still be within the stated accuracy specification.

OPERATION

3.1

Quick Operating

Instructions

3.2

Notes to Operating

Instructions

NOTE 3 O

VERRANGING:

If the flow rate exceeds the full scale range listed on your MAS’s front label, the output signal and digital display (if you have it) will read a higher value.

The MAS has not been calibrated for overranged flows and probably will be both non-linear and inaccurate. If the supply voltage is only 12 VDC, the overranged reading may only exceed the full scale reading by 10% maximum. If the supply voltage is higher, such as with the 24 VDC option, then the output can exceed full scale by as much as 50%, or more. If you have the digital display, the display can not exceed the four digits 1999. If the flow rate exceeds 1999 the

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MAS Instruction Manual

right most digits will blank and only the left-hand “1” will appear on the display.

Overrange conditions are indicated by the display and/or output going to a high level, above the full scale range. After the overrange condition has been removed, it may take several seconds for the MAS to recover and resume normal operation. This will not harm the instrument.

NOTE 4 O

PTIONAL 4-20 mA OUTPUT S IGNAL:

The 4-20 mA output signal current flows from the 4-20 mA output pin on the “D” connector through the load (50 to 500 ohms) to ground (see Section 2.5.1, 9-P

IN “D” CONNECTOR P IN A SSIGNMENTS).

Figures 3-1 and 3-2 illustrate single and multiple installations with current loop outputs.

NOTE 5 Z

ERO AND SPAN ADJUSTMENTS:

The zero and span potentiometers are accessed through marked ports on the right side of your MAS. If your zero output is more than

±1.5% of full scale, you may adjust the zero potentiometer when

you are absolutely certain that you have zero flow.

Since the output does not indicate negative numbers, it is necessary to adjust down from a slightly positive reading. Slowly rotate the zero pot clockwise until a positive reading is indicated. To complete the zero adjustment, slowly turn the pot counterclockwise until zero is reached.

Normally, span adjustments are not made unless you areNormally, span adjustments are not made unless you are

Normally, span adjustments are not made unless you are

Normally, span adjustments are not made unless you areNormally, span adjustments are not made unless you are calibrating your MAS, as described in Section 5. calibrating your MAS, as described in Section 5.

calibrating your MAS, as described in Section 5. The span

calibrating your MAS, as described in Section 5. calibrating your MAS, as described in Section 5. adjustment should not be used unless you have a known precise non-zero flow rate that you wish to match.

NOTE 6 A Unless specified otherwise, your MAS has been calibrated for

installation with the flow direction in the horizontal plane (±15°)

with the enclosure facing upward. If your actual installation orientation is different, you will have to make a small zero adjustment.

Page 16

TTITUDE:

Page 18

MAS Instruction Manual

Figure 3-1

Single Unit 4-20 Hookup

Figure 3-2

Multiple Installation

4-20 Hookup

Page 17

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MAS Instruction Manual

4 MAINTENANCE

4.1 General Statement

4.2 Flow Path Cleaning

Your MAS essentially requires no maintenance and has no regular maintenance schedule, other than periodic flow path cleaning if the gas is dirty. Calibrations may be scheduled once or twice yearly, depending on the accuracy to be maintained, or as needed.

It is recommended that your MAS be returned to KoboldIt is recommended that your MAS be returned to Kobold

It is recommended that your MAS be returned to Kobold

It is recommended that your MAS be returned to KoboldIt is recommended that your MAS be returned to Kobold Instruments if cleaning, repair, or recalibration are needed.Instruments if cleaning, repair, or recalibration are needed.

Instruments if cleaning, repair, or recalibration are needed.

Instruments if cleaning, repair, or recalibration are needed.Instruments if cleaning, repair, or recalibration are needed. This is usually your most cost-effective and reliableThis is usually your most cost-effective and reliable

This is usually your most cost-effective and reliable

This is usually your most cost-effective and reliableThis is usually your most cost-effective and reliable alternative.alternative.

alternative.

alternative.alternative.

The flow path (wetted parts) of the MAS are 5% glass-filled

Polyamide 6/6; 316 stainless steel (sensor tub e); and FKM “O”-rings

(standard).

CAUTION! IF YOU WISH TO CLEAN YOUR MAS PURGECAUTION! IF YOU WISH TO CLEAN YOUR MAS PURGE

CAUTION! IF YOU WISH TO CLEAN YOUR MAS PURGE

CAUTION! IF YOU WISH TO CLEAN YOUR MAS PURGECAUTION! IF YOU WISH TO CLEAN YOUR MAS PURGE IT THOROUGHLY BEFORE DISCONNECTING FROM THEIT THOROUGHLY BEFORE DISCONNECTING FROM THE

IT THOROUGHLY BEFORE DISCONNECTING FROM THE

IT THOROUGHLY BEFORE DISCONNECTING FROM THEIT THOROUGHLY BEFORE DISCONNECTING FROM THE GAS LINE WHEN TOXIC OR CORROSIVE GASES AREGAS LINE WHEN TOXIC OR CORROSIVE GASES ARE

GAS LINE WHEN TOXIC OR CORROSIVE GASES ARE

GAS LINE WHEN TOXIC OR CORROSIVE GASES AREGAS LINE WHEN TOXIC OR CORROSIVE GASES ARE USED. NEVER RETURN AN MAS TO KOBOLDUSED. NEVER RETURN AN MAS TO KOBOLD

USED. NEVER RETURN AN MAS TO KOBOLD

USED. NEVER RETURN AN MAS TO KOBOLDUSED. NEVER RETURN AN MAS TO KOBOLD INSTRUMENTS OR ANY OTHER REPAIR ORINSTRUMENTS OR ANY OTHER REPAIR OR

INSTRUMENTS OR ANY OTHER REPAIR OR

INSTRUMENTS OR ANY OTHER REPAIR ORINSTRUMENTS OR ANY OTHER REPAIR OR CALIBRATION FACILITY WITHOUT FULLYCALIBRATION FACILITY WITHOUT FULLY

CALIBRATION FACILITY WITHOUT FULLY

CALIBRATION FACILITY WITHOUT FULLYCALIBRATION FACILITY WITHOUT FULLY NEUTRALIZING ANY TOXIC GASES TRAPPED INSIDE.NEUTRALIZING ANY TOXIC GASES TRAPPED INSIDE.

NEUTRALIZING ANY TOXIC GASES TRAPPED INSIDE.

NEUTRALIZING ANY TOXIC GASES TRAPPED INSIDE.NEUTRALIZING ANY TOXIC GASES TRAPPED INSIDE.

4.2.1 Inlet and Outlet Screen

4.2.2 Laminar Flow Element (LFE)

Please refer to the exploded drawing of the MAS transducer in Appendix A when using the following procedures. All cleaning of the flow path can be accomplished with Freon™, alcohol, or any cleaner safe for the listed materials.

Remove inlet and outlet fittings (Nos. 13), pull out the LFE holddowns (Nos. 12) and either replace or clean the inlet and outlet screens (Nos. 14).

Remove the inlet and outlet fittings as in Section 4.2.1, I

NLET AND

OUTLET S CREEN. The LFE (either No. 24 or No. 25) has a slightly tapered shape with the larger diameter upstream (on the inlet side). To remove the LFE for cleaning, simply push it out the inlet side from the outlet side using a blunt object which does not mar the flow channels. A

/8" (9 mm) nut driver is perfect for the job. When cleaning, be sure to carefully clean all active flow channels in the LFE.

IMPORTANT:IMPORTANT:

IMPORTANT: When reinstalling the LFE it is of utmost

IMPORTANT:IMPORTANT: importance to press it in the correct distance. Refer to Figure 4-1 for the correct distance.

Page 18

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MAS Instruction Manual

.60

(15.24)

INLET

.85

(21.59)

(DIMENSIONS IN MILLIMETERS IN PARENTHESES)

CAUTION! Opening the sensor cavity will shift calibra-CAUTION! Opening the sensor cavity will shift calibra-

CAUTION! Opening the sensor cavity will shift calibra-

CAUTION! Opening the sensor cavity will shift calibra-CAUTION! Opening the sensor cavity will shift calibration.tion.

tion.

tion.tion.

DIMENSIONS IN INCHES

.61

(15.49)

OUTLET

.90

(22.86)

Do not remove the PCB Bracket (No. 7) unless it is absolutely necessary to gain access to the sensor cavity. Doing so will shift the calibration more than 1.5%. The remaining parts of the flow path are disassembled as shown in the exploded view in Appendix A. Note the position of the insulation blanket before removal and re-install in the same fashion. After removal, the sensor tube (No.

5) can be cleaned by purging, washing with a solvent, or by rodding out the 0.031 inch (.787 mm) internal diameter tube with a 0.029-

0.030 inch (.737-.762 mm) outside diameter rod or wire or with the Model CK Cleaning Stylet available from Kobold Instruments. To maximize the time response of your MAS, Kobold has designed the sensor tube with thin walls. extremely careful not to bend the sensor tube or to mar itsextremely careful not to bend the sensor tube or to mar its

extremely careful not to bend the sensor tube or to mar its

extremely careful not to bend the sensor tube or to mar itsextremely careful not to bend the sensor tube or to mar its inlet or outlet edges.inlet or outlet edges.

inlet or outlet edges.

inlet or outlet edges.inlet or outlet edges.

Therefore, when cleaning, beTherefore, when cleaning, be

Therefore, when cleaning, be

Therefore, when cleaning, beTherefore, when cleaning, be

Figure 4-1

Proper LFE Location

Within The Flow Body

4.2.3

Sensor Tube

It is important when reinstalling the sensor to make sure that no torque is imparted on the sensor tube. Torque can be eliminated by using a good quality oxygen compatible grease on the sensor sealing “O”-rings. The sensor assembly should slide freely into the cavity flanges without having to twist it. Twisting will impart undesirable torque on the sensor and could lead to long term shifting of the zero value. Also, take disturb or unravel the sensor windings.

EXTREMEEXTREME

EXTREME care to not

EXTREMEEXTREME

Page 19

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MAS Instruction Manual

5 FLOW CALIBRATION

5.1 General Flow Calibration Procedure

5.2 Recalibration Over the Same Flow Range

Flow calibration of your MAS requires a calibration standard of at least double accuracy and preferably an order of magnitude better.

NOTE: The factory calibration of your unit was done to MIL-STD45662 A, which has a 4:1 accuracy requirement. Most calibrations can be done using dry nitrogen and the “K”-factors and gas tables given in Appendix D. The standard 1.5% calibration of your MAS is best accomplished with the Kobold Instruments’ Series 100 CalBench™.

Flow recalibration is performed by using the following procedure. Please refer to the electrical schematics in Appendix B. Calibration checks and minor adjustments to the zero and full scale may be made via the access ports in the side of the enclosure. If the linearity needs adjustment (as may be required when installing a different laminar flow element bypass to change the range), go to STEP 4 through 8. If linearity does not need adjustment, complete only STEPS 1 through 3.

STEP 1 W

ARM-UP: Plug in the MAS to be calibrated and allow at

least 15 minutes warm-up time before attempting any adjustments.

STEP 2 Z

ERO A DJUST: Slide open the zero and span access ports on

the side of your MAS. Be careful to gently slide open and not bend back access port covers, as bending back may break covers. Using a voltmeter connected to the meter output pins, adjust the zero potentiometer (R5) for zero flow (4 mA for 4-20 mA outputs).

STEP 3 C

HECK F ULL S CALE: Generate the full scale flow using a

metering valve in line with the MAS under test. Compare the indicated flow rate with the flow standard reading. If they agree to

within ±10%, adjust the span potentiometer (R21) for exact

agreement.

If the readings do not agree within ± 10%, attempt to determine the

cause of disagreement. Possibilities are:

a) Partially clogged or dirty sensor tube b) Wrong or improper use of “K” factor c) Wrong or improper correction for temperature and pressure d) Leaks in the system or in the MAS e) Replacement of parts in the flow path do not exactly match the

original parts

Page 20

Page 22

This completes the calibration procedure. To adjust linearity, go to STEP 4.

MAS Instruction Manual

STEP 4 A

DJUSTING LINEARITY: First gain access to the printed

circuit board inside the MAS enclosure by using the procedure described in Section 2.5.3, OEM E

LECTRICAL C ONNECTIONS. Orient

the meter so that the component side of the circuit board is facing you. Plug in the meter and allow it to warm up for at least 15 minutes.

STEP 5 Z

ERO A DJUST: Connect a voltmeter to the meter output pins

and adjust the zero potentiometer (R5) for zero volts at zero flow (4 mA for 4-20 mA outputs).

___________________________________________________________________________________

_________________________________________________________________________________

INC. DEC. INC. DEC.

J1 0 0 0 J1 [XXXXX] 0 Adjust R25 (50%) J2 0 0 0 J2 0 [XXXXX] Adjust R27 (75%) J3 0 0 0 J3 [XXXXX] 0 Adjust R29 (100%)

Linearizer Jumper Array Jumpers Installed

_________________________________________________________________

Linearizer Jumper Array

STEP 6 CALIBRATE 25%: Use the calibration standard to set a flow rate of 25% of full scale. Adjust the span potentiometer (R21) for

1.25 volts (8 mA for 4-20 mA outputs) at the output of the meter.

Figure 5-1

STEP 7 C

ALIBRATE 50%: Increase the flow rate to 50% of full scale.

If the output is within ± 100 mV, no adjustment is necessary. If the

output is beyond these limits, install a jumper block at J1 in the appropriate position (increment (INC.) or decrement (DEC.); see Figure 5-1) and adjust R25 for the proper reading.

STEP 8 C

ALIBRATE 75% AND 100%: Set the flow to 75% of full scale.

If the output is outside the limits set in STEP 7, install a jumper block in J2 in the proper location and adjust R27 for the correct reading. Repeat this procedure for 100% flow, using J3 and R9 if necessary.

NOTE: If the curve being linearized is not monotonic (e.g., jumpers are in both increment and decrement positions), repeat STEPS 6 through 8 at least one more time.

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MAS Instruction Manual

5.3 Flow Calibration Over a Different Flow Range and/or Gas

The procedure for calibrating your MAS over a different flow range and/or gas is identical to that described in Section 5.2, R

ECALIBRATION

OVER THE S AME F LOW R ANGE, except that the range of the laminar flow element (LFE) may need changing.

The first step is to determine the equivalent nitrogen flow rate. To do so, you must first determine your “standard” gas conditions.

21°C (or 70°F) and 760 mm of mercury (1 atmosphere) is standard

for Kobold Instruments. Appendix C is helpful in this regard. You must then use the K-factor tables in Appendix D.

The next step is to procure from Kobold Instruments the Model EL Laminar Flow Bypass Set. This set of two patented Model EL LFE’s covers all ranges from 0-10 SCCM to 0-40 SLM, when the proper combination of “gates” to the individual laminar flow channels have been opened (see Section 1.2, P

RINCIPLE OF O PERATION).

The instruction manual for the Model EL LFE’s describes this procedure in detail.

NOTE: Potentiometer R15 shown in Appendix B is for speed of response and does not require any adjustment.

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MAS Instruction Manual

When it is suspected that your MAS is not operating correctly, a few simple checks can be made before dismantling for repair:

1. Make sure there are no leaks in the line.

2. Check that all cables are plugged in and are in good condition.

3. Check that the power supply is in the correct range.

4. Double-check connector pinouts.

This guide is provided to help locate the section of the MAS at fault. It is not intended to be an all-inclusive repair manual. In the case of most repairs, your MAS should be returned to the factory for service. ______________________________________________________________

Possible Corrective

Symptom Cause Action

______________________________________________________________

No output No power Plug in power supply

Clogged sensor Clean or replace sensor

PCB defective Repair or replace PCB

Inlet filter Clean or replace screen clogged

TROUBLE-

SHOOTING

6.1

General

6.2

Troubleshooting Guide

Will not zero Gas leak Find and correct leaks

Application Re-zero meter requires high pressure and nonhorizontal mounting

PCB defective Repair or replace

Reads full scale Defective sensor Return to factory with zero flow for replacement

Gas leak Find and correct leaks

Out of Dirty or clogged Clean or replace sensor calibration sensor

Change in See “K” factor tables composition of gas in Appendix D

Gas leak Find and correct leaks

PCB defective Repair or replace

LFE dirty Clean

Inlet filter screen Clean or replace

______________________________________________________________

clogged

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MAS Instruction Manual

Kobold Instruments will provide technical assistance over the phone to qualified repair personnel. Please call Customer Service Department, Technical Assistance, (412) 788-2830, Fax (412) 788-

4890. European customers can contact Kobold Messring GmbH for customer service and technical assistance at 49(0)61-92-29-90, Fax 49(0)61-92-23-398. Please have your Serial Number and Model Number when you call.

Page 24

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MAS Instruction Manual

If your MAS requires servicing or recalibration, please refer to the following ordering numbers. Kobold’s current Price List gives the respective prices.

IMPORTANT NOTE: For all servicing and recalibration, please return the entire MAS flow body to the factory.

R1 Standard Recalibration (1.5%) and Cleaning R2 Standard Recalibration (1.5%), Cleaning and Repair R3 Replacement Sensor and Standard Recalibration (1.5%)

If you wish to have Kobold calibrate with a different flow range and/or gas, please take note of the following.

NOTE 1 F The standard flow ranges given in Section 1.3, S

for nitrogen at standard conditions of 1 atmosphere and 21°C (70°F). For a given MAS Flowmeter, the range may vary for other

gases depending on their molecular weight and thermal properties.

NOTE 2 C Please specify the actual gas you intend to use. If you are using several gases, inform us and we will give you the required conversion factors. Unless otherwise specified, “standard” conditions shall be

1 atmosphere pressure and 21°C (70 °F) temperature. For example, if you require a 0°C (32°F) “standard” temperature, please specify

when ordering.

LOW RANGE:

PECIFICATIONS, are

ALIBRATION:

STANDARD

SERVICING AND

RECALIBRATION

Page 25

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MAS Instruction Manual

Exploded View of MAS Transducers and Parts Lists

APPENDIX A

Page 26

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MAS Instruction Manual

Aluminum Assembly

High-Flow, MAS-1100/2100

M82-0022

Page 27

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MAS Instruction Manual

Aluminum Flowbody High-Flo, MAS-1100/2100

M82–0017–X

Parts List M82-0017–XParts List M82-0017–X

Parts List M82-0017–X

Parts List M82-0017–XParts List M82-0017–X

ITEM:PIN

1 41-0175 Body, 820, Hi-Flow, Al 2 41-0176 Cap. End. 820. High Flow 3 40-0037 Holder. LFE. Mod 820 4 35-0084 Washer, Split, #06 5 35-0326 N u t , Hex. 6-32, SS

*6 35-0174 Rod. Threaded, 6-32 X 5"L

7 42-0098 LFE, Hi-Flow, Mod 820 8 40-0127 Bracket, Mounting, 820H

Page 28

DESCRIPTION

Page 30

MAS Instruction Manual

MAS Assembly

MAS-1000/2000

M82–0023

Page 29

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MAS Instruction Manual

Polyamide Flowbody MAS-1000/2000

M82–0018 A

Parts List M82-0018–XParts List M82-0018–X

Parts List M82-0018–X

Parts List M82-0018–XParts List M82-0018–X

ITEM:PIN

1 42-0053 2 40-0043 3 31-0001-906 4 42-0105 5 40-0042 6 42-0041 7 31-0001-908

Page 30

DESCRIPTION

Body, 820, Black Screen. Mod 820 (for > 10 SLPM Flows) O-Ring, FKM 3-906 Adaptor. Numb. Mod 850, 3⁄4-16 to 0.250 FNPT Screen. Inlet. Mod 820 Hold Down, LFE O-Ring,FKM, 3-908, Brown

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MAS Instruction Manual

Electronics Enclosure

Sub-Assembly MAS

M82–0019–XXXX B

Page 31

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MAS Instruction Manual

Parts List M82-0019–XXXXParts List M82-0019–XXXX

Parts List M82-0019–XXXX

Parts List M82-0019–XXXXParts List M82-0019–XXXX

ITEM:PIN

1 42-0033 Encl, 820, Front, White 2 42-0034 Encl, 820, Back, White

*3* 52-0038-11 PCA, 820 Flow Meter: 110/220 VAC; 0-5 VDC

4 42-0038 Bracket, PCB, 820 5 42-0044 Slides, Zero & Span

6 35-0346 Scr, FLH, Phl, #4 x 0.500"L, SLF TPG, Zinc

*7* 42-0052 Cover, Top, Mod 820 *8* 40-0038 Bracket, Adapter, 820 Display to 830 Body *9* 35-0288 Scr, FLH, Phl. 4-40 X 0.750"L, Type "B" Zinc

10* 82-0021 Display Sub-Assy: 820 11* 35-0024 Scr, Flh, Sch, 4-40 X 0.375"L 12* 55-0018 Conn, Kit, "DCD" Vend# TGA-46-00633 13* 35-0075 Scr, Pnh. Phl. 4-40 X 0.250"L 14* 35-0037 Washer, Split, #04 15* 39-0211 D-Connector Cover, 9-Pin

*Change with application, consult factory for specifics.

Page 32

DESCRIPTION

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MAS Instruction Manual

Sensor Compartment

Assembly: MAS

M82–0020–X B

Page 33

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MAS Instruction Manual

Parts List M82-0020–XParts List M82-0020–X

Parts List M82-0020–X

Parts List M82-0020–XParts List M82-0020–X

ITEM:PIN

1 41-0207 Plate, Sensor Mounting (Die Cast)

*2* 41-0173 Heat Sink (Die Cast)

3 43-0037-01 Sensor, Flow Capillary 4 41-0171 Bushing, Sensor O-Ring (Die Cast) 5 41-0170 Plate, Sensor Ring, 820 (Die Cast)

6 35-0130 Scr, Flh, Phl. 4-40 X 0.250"L

*7* 35-0092 Scr, Pnh, Phl. #4 X 0.562"L, Zinc, Type "B" *9* 35-0142 Scr, Flh, Phl, #4 X .375 L, Self Tpg, Zinc Type "B"

10* 39-0149 Insulation, Pcf. 1.2 for Sensor Compartment 11* 45-0052 Plate, Sensor Feed Thru Mod 820

*Change with application, consult factory for specifics.

DESCRIPTION

Page 34

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MAS Instruction Manual

Stainless Steel Low Flow

Dimensional Drawing

Side View

Bottom View

Tables

/4" O.D. Tube Fitting Type VCO VCR (9/16"-18 Thd.) Comp. (male) (male)

Dim.“L” 4.8 5.0 4.8

Outlet End View

Page 35

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MAS Instruction Manual

Stainless Steel Medium Flow Dimensional Drawing

Tables

Flow Range 0-20 0-30 0-50 SLM

Tube O.D.,1/4", 3/8"1/4", 3/8"1/4", 3/8" Inches

Flow Range, 0.706 1.06 1.77 SCFM

Tube O.D.,3/8"3/8" Inches

Fitting Type1/4"1/4" VCO1/4" VCR (9/16"-18 Thd.) Comp. (male) (male)

Dim. “L” 6.27 6.01 6.13

Fitting Type3/8"3/8" VCO3/8" VCR (9/16"-18 Thd.) Comp. (male) (male)

Dim. “L” 6.39 5.25 6.43

/8"

Side View

Bottom View

Outlet End View

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MAS Instruction Manual

Stainless Steel High Flow

Dimensional Drawing

Side View

Bottom View

Tables

Flow Range 0-100 0-200 0-300 SLM

Tube O.D.,3/8", 1/2"3/8", 1/2"1/2" Inches

Flow Range, 3.53 7.06 10.6 SCFM

Tube O.D.,1/2" Inches

Fitting Type3/8"3/8" VCO3/8" VCR (3/4"-16 Thd.) Comp. (male) (male)

Dim. “L” 11.36 11.81 11.93

Fitting Type1/2"— — (3/4"-16 Thd.) Comp.

Dim. “L” 11.36 — —

/2"1/2"

Outlet End View

Page 37

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MAS Instruction Manual

APPENDIX B

Conversion of Flow Rate to Other T and P Conditions

The flow rate of your MAS is referenced to certain “standard” conditions of temperature and pressure. Unless otherwise specified

in your order, these standard conditions are 21°C (70°F) and 760

mm of mercury (1 atmosphere). If you wish to convert to other “standard” conditions or to find the “actual” conditions in the pipe where your MAS is installed, use the following relationship:

(1)

()

= Refers to the standard conditions with which your MAS was

calibrated,

= Refers to the new standard conditions or to the actual

()

temperature and pressure conditions in the pipe,

= The gas mass flow rate referenced to the calibrated stan-

dard conditions (SCCM or SLM),

= The gas mass flow rate referenced to the new standard or

actual conditions (SCCM or SLM–“S” means “standard”; ACCM or ALM–“A” means “actual”),

P = Absolute pressure (kg/cm2 or psia), and

T = Absolute temperature (°D or °R) °K = °C + 273; °R = °F +

460)

EXAMPLE 1 C

HANGING “STANDARD” CONDITIONS:

If your MAS has a flow rate reading of 10.00 SLM and was

calibrated at standard conditions of 70°F (21°C) 1 atmosphere

(14.7 psia) and if you wish to convert this reading to standard

conditions of 32°F (0°C) and 1 atmosphere, then you would use

Equation (1) as follows:

14 7

460 + 32 460 + 70

(10.00) = 9.28 SLM

So, you can see that the flow rate referenced to 0°C will be

approximately 7% lower than when referenced to room conditions

of 21°C.

EXAMPLE 2 F

INDING THE “ACTUAL” FLOW RATE:

If the flow rate and calibrated standard conditions are as given in

Example 1 and you wish to find the actual flow rate at 100°F and

30 psig, then you would use Equation (1) as follows:

14 7

14 7 30

460 + 100

460 + 70

(10.00) = 3.47 ALM

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MAS Instruction Manual

The following tables provide K-factors and thermodynamic properties of gases commonly used with mass flow controllers and meters. The purpose of these tables is two-fold:

1. Calibrating an “actual” gas with a reference gas. This is particularly useful if the actual gas is not a common gas or if it is a so-called “nasty” gas (i.e., toxic, flammable, corrosive, etc.).

2. Interpreting the reading of a flow meter or flow controller which has been calibrated with a gas other than the actual gas.

In applying the tables, the following fundamental relationship is used:

1/Q2

= K1/K

(1)

Where:

Q = The volumetric flow rate of the gas referenced to standard

conditions of 0°C and 760 mm Hg (SCCM or SLM),

K = The “K” factor defined in equation (6),

()

= Refers to the “actual” gas, and

()

= Refers to the “reference” gas

The K-factor is derived from the first law of thermodynamics applied to the sensor tube, as described in Section 1.2, P

RINCIPLE OF

OPERATION:

∆

C T

(2)

where:

APPENDIX C

K Factors and

Gas Tables

For a Single Gas

H = The constant amount of heat applied to the sensor tube,

= The mass flow rate of the gas (gm/min),

= The coefficient of specific heat of the gas (Cal/gm); CP is given

in the Tables (at 0 °C),

∆T = The temperature difference between the downstream and

upstream coils,

N = A correction factor for the molecular structure of the gas

given by the following table:

________________________________________________________________ Number of Atoms in the Gas Molecule N

______________________________________________________________ Monatomic 1.040

Diatomic 1.000 Triatomic 0.941 Polyatomic 0.880

______________________________________________________________

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MAS Instruction Manual

The mass flow rate,

, can also be written as:

= ρQ (3)

where:

ρ = The gas mass density at standard conditions (g/1); ρ is given

in the tables (at 0 °C, 760 mm Hg).

Furthermore, the temperature difference, DT, is proportional to the output voltage, E, of the mass flow meter, or

∆T = aE (4)

where:

a = A constant.

If we combine Equations (3) and (4), insert them into Equation (2), and solve for Q, we get:

Q = (bN/ρC

) (5)

where:

b = H/aE = A constant if the output voltage is constant.

For our purposes, we want the ratio of the flow rate, Q actual gas to the flow rate of a reference gas, Q

, to produce the

, for an

same output voltage in a particular mass flow meter or controller. We get this by combining Equations (1) and (5):

= K1/K2 = (N

1/Q2

1/ρ2CP2

) (6)

Please note that the constant b cancels out. Equation (6) is the fundamental relationship used in the accompanying tables. For convenience, the tables give “relative” K-factors, which are the ratios K

In the third column of the tables, the relative K-factor is K K

references

, instead of the K-factors themselves.

1/K2

actual

, where the reference gas is a gas molecularly equivalent

to the actual gas. In the fourth column, the relative K-factor is

/KN2, where the reference gas is the commonly used gas,

actual

nitrogen (N

). The remaining columns give CP and r, enabling you

to calculate K1/K2 directly using Equation (6). In some instances, K1/K2 from the tables may be different from that which you calculate directly. The value from the tables is preferred because in many cases it was obtained by experiment.

Kobold calibrates every MAS mass flowmeter and controller with primary standards using the actual gas or a molecularly equivalent reference gas. The calibration certificate accompanying your MAS

Page 40

Page 42

will cite the reference gas used. When a reference gas is used, the actual flow rate will be within 2-4% of the calculated flow rate.

EXAMPLE 1: A MAS is calibrated for nitrogen (N2), and the flow rate is 1000 SCCM for a 5.000 VDC output signal. The flow rate for carbon dioxide at a 5.000 VDC output is:

//,

QQ KK

CO N CO N

22 2 2

0 74 1 000 1000 740

./.

Q SCCM

(

)

EXAMPLE 2: A MAS is calibrated for hydrogen (H

), and the flow rate is 100

SCCM for a 5,000 VDC output signal. The flow rate for nitrous oxide (N

0) is found as follows:

QQ K K

//,

NH N H

22 2 2

0 71 1 01 100 70 3

Q SCCM

(

./. .

)

Please note that the K-factors relative to nitrogen must be used in each case.

MAS Instruction Manual

EXAMPLE 3: We want a MAS to be calibrated for use with dichlorosilane (SiH preferred reference gas Freon-14 (CF

) at a 100 SCCM full scale flow. We wish to use the

2CL2

). What flow of CF4 must we

generate to do the calibration?

QQKK

SiH CL CF SiH CL CF

24224

100 0 869

== SCCM

100 0 869 115

Equation (6) is used for gas mixtures, but we must calculate N/rC for the mixture. The equivalent values of r, CP, and N for a dual gas mixture are given as follows:

The equivalent gas density is:

˙/˙˙

mm mm

ρρ ρ=

(

)

TT12

(

)

(7)

where:

˙˙˙

mmm

=+=

Total mass flow rate (gm/min),

()1= Refers to gas #1, and ()

= Refers to gas #2.

For Dual-Gas Mixtures

The equivalent specific heat is:

= F1 CP1 + F2 C

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MAS Instruction Manual

where:

Fm m

(

111

The equivalent value of N is:

The equivalency relationships for r, CP, and N for mixtures of more than two gases have a form similar to the dual-gas relationship given above.

IMPORTANT NOTE ABOUT K-FACTORS:IMPORTANT NOTE ABOUT K-FACTORS:

IMPORTANT NOTE ABOUT K-FACTORS:

IMPORTANT NOTE ABOUT K-FACTORS:IMPORTANT NOTE ABOUT K-FACTORS: Please note that if you have a mass flowmeter calibrated for a gas such as methane and wish to use the K-factors to measure a gas such as air, that the inaccuracy of the measurement can range from

±5 to 10%. The use of K-factors is, at best, only a rough approximation and should not be used in applications that require better than ±

5 to 10% accuracies.

It should also be noted that certain gases, in similar “families,” will work exceptionally well with K-factors; however, those instances are only true when similar thermal properties of the gas are present.

(

and

ρρ

)

(

)

ρρ

)(

)

˙/˙˙

NmmN mmN

(

)

1122

(

)

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MAS Instruction Manual

Actual Gas Chemical Ref. KFactor KFactor Cp Density Elastomer

Acetylene C2H Air N Allene (Propadiene) C3H Ammonia NH

Symbol Gas Rel. to Relative (Cal/g) (g/ l ) O-Ring* Valve

Ref. Gas N2 @ 0°C Seat

N N

.58 .4036 1.162

1.00 .240 1.293

..43 .352 1.787 KR

.73 .492 .760 NEO NEO

Argon Ar Ar 1.000 1.45 .1244 1.782 Arsine AsH Boron Trichloride BCl Boron Trifluoride BF Bromine Br Boron Tribromide Br Bromine Pentafluoride BrF Bromine Trifluoride BrF Bromotrifloromethane CBrF

3 3

3 2 3

5 3

N N N N N N N N

.67 .1167 3.478 KR

.41 .1279 5.227 KR KR

.51 .1778 3.025 KR

.81 .0539 7.130

.38 .0647 11.18 KR

.26 .1369 7.803 KR

.38 .1161 6.108 KR

.37 .1113 6.644

(Freon-13 B1) 1,3-Butadiene C4H Butane C4H 1-Butane C4H

2-Butane C4H8 CIS N 2-Butane C4H8 TRANS N Carbon Dioxide CO Carbon Disulfide CS

Carbon Monoxide CO N Carbon Tetrachloride CCl Carbon Tetrafluoride CF

N N N

N N

.32 .3514 2.413

.26 .4007 2.593 NEO KR

.30 .3648 .2.503 NEO KR

.324 .336 2.503 NEO KR

.291 .374 2.503

.74 .2016 1.964

.60 .1428 3.397

1.00 .2488 1.250

.31 .1655 6.860 KR

.42 .1654 3.926 KR

(Freon-14) Carbonyl Fluoride COF Carbonyl Sulfide COS N Chlorine CL Chlorine Trifluoride CIF

Chlorodifluoromethane CHClF

N N N

.54 .1710 2.945

.66 .1651 2.680

.86 .114 3.163 KR

.40 .1650 4.125 KR

.46 .1544 3.858 KR

(Freon-22) Chloroform CHCI Chloropentafluoroethane C2CIF

.39 .1309 5.326 KR

.24 .164 6.892 KR

(Freon-115) Chlorotrifluromethane CCIF

.38 .153 4.660 KR

(Freon-13) Cyanogen C2N

Cyanogen Chloride CICN N Cychlopropane C3H Deuterium D Diborane B2H

Dibromodifluoromethane CBr2F Dibromethane N Dichlorodifluoromethane CCI2F

N N N N

.61 .2613 2.322

.61 .1739 2.742 KR

.46 .3177 1.877 KR

1.00 .1722 1.799

.44 .508 1.235 KR

.19 .15 9.362 KR

.47 .075 7.76 KR

.35 .1432 5.395 KR

(Freon-12) Dichlorofluoromethane CHCl2FN2.42 .140 4.952 KR (Freon-21) Dichloromethylsilane (CH3)2SiCl2N Dichlorosilane SiH2Cl Dichlorotetrafluoroethane C2Cl2F

2 4

N N

.25 .1882 5.758 KR

.40 .150 4.506 KR

.22 .1604 7.626 KR

(Freon-114) 1,1-Difluoroethylene C2H2F

.43 .224 2.857 KR

(Freon-1132A) Dimethylamine (CH3)2NH N

.37 .366 2.011 KR

DRAWING NO. REV. SHEET

99-0224 D 1 of 3

12/95

*NOTE: If no O-Ring is

specified then O-Ring

to be used is FKM.

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MAS Instruction Manual

DRAWING NO. REV. SHEET

99-0224 D 2 of 3

*NOTE: If no O-Ring is specified then O-Ring to be used is FKM.

Actual Gas Chemical Ref. KFactor KFactor Cp Density Elastomer

12/95

Symbol Gas Rel. to Relative (Cal/g) (g/ l ) O-Ring* Valve

Ref. Gas N2 @ 0°C Seat

Dimeyl Ether (CH3)2ON2.39 .3414 2.055 KR 2,2-Dimethylpropane C3H Ethane C2H

N N

.22 .3914 3.219 KR

.50 .4097 1.342

Ethanol C2H6ON2.39 .3395 2.055 KR EthylAcetylene C4H

Ethyl Chloride C2H5CI N Ethylene C2H

Ethylene Oxide C2H4O) N Fluorine F

Fluoroform (Freon-23) CHF

N N

.32 .3513 2.413 KR

.39 .244 2.879 KR

.60 .1365 1.251

.52 .268 1.965 KR

.980 .1873 1.695 KR

.50 .176 3.127 KR

Freon-11 CCI3FN2.33 .1357 6.129 KR Freon-12 CCI2F Freon-13 CCIF Freon-13 B1 CFrF Freon-14 CF

.35 .1432 5.395 KR

.38 .153 4.660 KR

.37 .1113 6.644 KR

.42 .1654 3.926

Freon-21 CHCI2FN2.42 .140 4.952 KR Freon-22 CHCIF Freon-113 CCI2FCCIF2N Freon-114 C2Cl2F Freon-115 C2ClF Freon-C318 C4F

Germane GeH Germanium Tetrachloride GeCL

N N

.46 .1544 3.858 KR

.20 .161 8.360 KR

.22 .160 7.626 KR

.24 .164 6.892 KR

.17 .185 8.397 KR

.57 .1404 3.418

.27 .1071 9.565 KR

Helium He He 1.000 1.454 1.241 .1786 Hexafluoroethane C2F

.24 .1834 6.157 KR

(Freon-116) Hexane C6H Hydrogen H

Hydrogen Bromide HBr N Hydrogen Chloride HCl N Hydrogen Cyanide HCN N Hydrogen Fluoride HF N Hydrogen Iodide HI N Hydrogen Selenide H2Se N

N H

.18 .3968 3.845 KR

1.000 1.01 3.419 .0899

1.000 .0861 3.610 KR

1.000 .1912 1.627 KR KR

1.070 .3171 1.206 KR

1.000 .3479 .893 KR KR

1.000 .0545 5.707 KR

.79 .1025 3.613 KR

Hydrogen Sulfide H2SN2.80 .2397 1.520 KR Iodine Pentafluoride IF

Isobutane CH(CH3) Isobutylene C4H

N N

.25 .1108 9.90 KR

.27 .3872 3.593 KR

.29 . .3701 2.503 KR

Krypton Kr Ar 1.002 1.453 .0593 3.739 Methane CH

Methanol CH3OH N Methyl Acetylene C3H

Methyl Bromide CH2Br N Methyl Chloride CH3Cl N

.72 .5328 .715

.58 .3274 1.429

.43 .3547 1.787 KR

.58 .1106 4.236

.63 .1926 2.253 KR

Methyl Fluoride CH3FN2.68 .3221 1.518 KR Methyl Mercaptan CH3SH N Methyl Trichlorosilane (CH3) SiCl3N Molybdenum Hexafluoride MoF Monoethylamine C2H5NH Monomethylamine CH3NH

N N N

.52 .2459 2.146 KR

.25 .164 6.669 KR

.21 .1373 9.366 KR

.35 .387 2.011 KR

.51 .4343 1.386 KR

Neon NE Ar 1.006 1.46 .245 .900 Nitric Oxide NO N Nitrogen N Nitrogen Dioxide NO

N N

.990 .2328 1.339

1.000 .2485 1.25

.74 .1933 2.052

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MAS Instruction Manual

Actual Gas Chemical Ref. KFactor KFactor Cp Density Elastomer

Nitrogen Trifluoride NF Nitrosyl Chloride NOCl N

Symbol Gas Rel. to Relative (Cal/g) (g / l ) O-Ring* Valve

Ref. Gas N2 @ 0°C Seat

.48 .1797 3.168 KR

.61 .1632 2.920 KR

Nitrous Oxide N2ON2.71 .2088 1.964 Octafluorocyclobutane C4F

.17 .185 8.397 KR

(Freon-C318) Oxygen Difluoride OF Oxygen O Ozone O Pentaborane B5H Pentane C5HI

2 2 3

.63 .1917 2.406

N21.000 .2193 1.427 N N N

.446 .3 2.144

.26 .38 2.816 KR

.21 .398 3.219 KR

Perchloryl Fluoride CIO3FN2.39 .1514 4.571 KR Perfluoropropane C3F

Phosgene COCl Phosphine PH

Phosphorous Oxychloride POCl Phosphorous Pentafluoride PH Phosphorous Trichloride PCl Propane C3H Propylene C3H Silane SiH Silicon Tetrachloride SiCl Silicon Tetrafluoride SiF Sulfur Dioxide So Sulfur Hexafluoride SF

5 8 6 4

4 2 6

Sulfuryl Fluoride SO2F Teos N Tetrafluorahydrazine N2F

N N

.174 .197 8.388 KR

.44 .1394 4.418 KR

N21.070 .2374 1.517 KR N

N N N N N N N N N N

.36 .1324 6.843 KR

.30 .1610 5.620 KR

.30 .1250 6.127 KR

.36 .3885 1.967 KR

.41 .3541 1.877 KR

.60 .3189 1.433 KR

.28 .1270 7.580 KR

.35 .1691 4.643 KR

.69 .1488 2.858 KR

.26 .1592 6.516 KR

.39 .1543 4.562 KR

.090 KR KR

.32 .182 4.64 KR

Trichlorofluormethane CCl3FN2.33 .1357 6.129 KR (Freon-11) Trichlorisilane SiHCl 1,1,2-Trichloro-1,2,2 CCl2FCClF2N

.33 .1380 6.043 KR

.20 .161 8.360 KR

Trifluorethane (Freon-113) Trisobutyl Aluminum ( C4H9)Al N Titanium Tetrachloride TiCl Trichloro Ethylene C2HCl

N N

.061 .508 8.848 KR

.27 .120 8.465 KR

.32 .163 5.95 KR

Trimethylamine (CH3)3NN2.28 .3710 2.639 KR Tungsten Hexasfuoride WF Uranium Hexafluoride UF

6 6

Vinyl Bromide CH2CHBr N Vinyl Chloride CH2CHCl N

N N

.25 .0810 13.28 KR PTFE

.20 .0888 15.70 KR

.46 .1241 4.772 KR

.48 .12054 2.788 KR

Xenon Xe Ar .993 1.44 .0378 5.858

DRAWING NO. REV. SHEET

99-0224 D 3 of 3

12/95

*NOTE: If no O-Ring is specified then O-Ring to be used is FKM.

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MAS Instruction Manual

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MAS Instruction Manual

QUICK START INSTRUCTIONS .................................................................i

1 INTRODUCTION .......................................................................... 1

1.1 Purpose ................................................................................ 1

1.2 Principle of Operation .......................................................... 3

1.3 Specifications ....................................................................... 4

1.4 Options ................................................................................ 7

2 INSTALLATION ............................................................................ 8

2.1 Receipt of Your MAS ............................................................. 8

2.2 Return Shipment .................................................................. 8

2.3 Mechanical Installation ........................................................ 8

2.4 Plumbing Connections .......................................................... 9

2.5 Electrical Connections ........................................................ 10

2.5.1 9-Pin “D” Connector Pin Assignments .............................. 11

2.5.2 Remote Installation of Digital Display ............................. 13

2.5.3 OEM Electrical Connections ............................................ 14

2.5.4 Using Kobold’s Single, Dual, and Flo-Box™ Electronics . .. 14

TABLE OF

CONTENTS

3 OPERATION .............................................................................. 15

3.1 Quick Operating Instructions ............................................. 15

3.2 Notes to Operating Instructions .......................................... 15

4 MAINTENANCE ........................................................................ 18

4.1 General Statement ............................................................. 18

4.2 Flow Path Cleaning ............................................................ 18

4.2.1 Inlet and Outlet Screen .................................................... 18

4.2.2 Laminar Flow Element (LFE) .......................................... 18

4.2.3 Sensor Tube ..................................................................... 19

5 FLOW CALIBRATION ................................................................. 20

5.1 General Flow Calibration Procedure ................................... 20

5.2 Recalibration Over the Same Flow Range ........................... 20

5.3 Flow Calibration Over a Different Flow Range and/or Gas . . 22

6 TROUBLESHOOTING .................................................................. 23

6.1 General .............................................................................. 23

6.2 Troubleshooting Guide ....................................................... 23

7 STANDARD SERVICING AND RECALIBRATION ........................... 25

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MAS Instruction Manual

INDEX OF APPENDIX

A Aluminum Assembly, High-Flow: MAS-1100/2100 ................. 27

Aluminum Flowbody, High-Flow: MAS-1100/2100 ................. 28

MAS Assembly: MAS-1000/2000 ............................................ 29

Polyamide Flowbody: MAS-1000/2000 ..................................... 30

Electronics Enclosure Sub-Assembly: MAS ........................ 31-32

Sensor Compartment Assembly: MAS ............................... 33-34

Stainless Steel Low Flow Dimensional Drawing ..................... 35

Stainless Steel Medium Flow Dimensional Drawing .............. 36

Stainless Steel High Flow Dimensional Drawing ................... 37

B Conversion of Flow Rate to Other T and P Conditions ............ 38

C K-Factors and Gas Tables

For a Single Gas ................................................................ 39-41

For Dual-Gas Mixtures ...................................................... 41-42

Gas Tables ......................................................................... 43-45

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CAUTION! Any application whatsoever related to humanCAUTION! Any application whatsoever related to human

CAUTION! Any application whatsoever related to human

respiration must have the written consent of Kobold

respiration must have the written consent of Koboldrespiration must have the written consent of Kobold Instruments Inc.Instruments Inc.

Instruments Inc.

Instruments Inc.Instruments Inc.

CAUTION! The maximum pressure and temperature in theCAUTION! The maximum pressure and temperature in the

CAUTION! The maximum pressure and temperature in the

CAUTION! The maximum pressure and temperature in theCAUTION! The maximum pressure and temperature in the flow line in which your MAS is to be installed shall notflow line in which your MAS is to be installed shall not

flow line in which your MAS is to be installed shall not

flow line in which your MAS is to be installed shall notflow line in which your MAS is to be installed shall not exceed 150 psig (10 kg/cmexceed 150 psig (10 kg/cm

exceed 150 psig (10 kg/cm

exceed 150 psig (10 kg/cmexceed 150 psig (10 kg/cm respectively.respectively.

respectively.

respectively.respectively.

CAUTION! Be sure the arrow on the side of the transducerCAUTION! Be sure the arrow on the side of the transducer

CAUTION! Be sure the arrow on the side of the transducer

CAUTION! Be sure the arrow on the side of the transducerCAUTION! Be sure the arrow on the side of the transducer points in the direction of flow.points in the direction of flow.

points in the direction of flow.

points in the direction of flow.points in the direction of flow.

CAUTION! Over-tightening will crack the fittings andCAUTION! Over-tightening will crack the fittings and

CAUTION! Over-tightening will crack the fittings and

CAUTION! Over-tightening will crack the fittings andCAUTION! Over-tightening will crack the fittings and shift calibration.shift calibration.

shift calibration.

shift calibration.shift calibration.

CAUTION! Do not supply + DC power at the “D” connectorCAUTION! Do not supply + DC power at the “D” connector

CAUTION! Do not supply + DC power at the “D” connector

CAUTION! Do not supply + DC power at the “D” connectorCAUTION! Do not supply + DC power at the “D” connector while using a MAS-5000 power supply at the DC powerwhile using a MAS-5000 power supply at the DC power

while using a MAS-5000 power supply at the DC power

while using a MAS-5000 power supply at the DC powerwhile using a MAS-5000 power supply at the DC power jack. Do not plug power connector into DB9 connector.jack. Do not plug power connector into DB9 connector.

jack. Do not plug power connector into DB9 connector.

jack. Do not plug power connector into DB9 connector.jack. Do not plug power connector into DB9 connector. Damage to electronics will result. The “D” connector pinoutDamage to electronics will result. The “D” connector pinout

Damage to electronics will result. The “D” connector pinout

Damage to electronics will result. The “D” connector pinoutDamage to electronics will result. The “D” connector pinout is in Section 2.5.1.is in Section 2.5.1.

is in Section 2.5.1.

is in Section 2.5.1.is in Section 2.5.1.

gauge) or 150 gauge) or 150

gauge) or 150°

gauge) or 150 gauge) or 150

F (65.556 F (65.556

F (65.556°

F (65.556 F (65.556

C), C),

C),

C), C),

MAS Instruction Manual

CAUTIONS!

CAUTION! Do not mix or interchange parts of tube fittingsCAUTION! Do not mix or interchange parts of tube fittings

CAUTION! Do not mix or interchange parts of tube fittings

CAUTION! Do not mix or interchange parts of tube fittingsCAUTION! Do not mix or interchange parts of tube fittings made by different manufacturers.made by different manufacturers.

made by different manufacturers.

made by different manufacturers.made by different manufacturers.

CAUTION! All instruments are leak-tested prior to shipping.CAUTION! All instruments are leak-tested prior to shipping.

CAUTION! All instruments are leak-tested prior to shipping.

To check your installation, test the fittings only. Do not use

To check your installation, test the fittings only. Do not useTo check your installation, test the fittings only. Do not use liquid leak detectors such as Snoopliquid leak detectors such as Snoop

liquid leak detectors such as Snoop

liquid leak detectors such as Snoopliquid leak detectors such as Snoop inside or outside the MAS. Instead, monitor pressureinside or outside the MAS. Instead, monitor pressure

inside or outside the MAS. Instead, monitor pressure

inside or outside the MAS. Instead, monitor pressureinside or outside the MAS. Instead, monitor pressure decay.decay.

decay.

decay.decay.

CAUTION! If you wish to clean your MAS, purge itCAUTION! If you wish to clean your MAS, purge it

CAUTION! If you wish to clean your MAS, purge it

CAUTION! If you wish to clean your MAS, purge itCAUTION! If you wish to clean your MAS, purge it thoroughly before disconnecting from the gas line whenthoroughly before disconnecting from the gas line when

thoroughly before disconnecting from the gas line when

thoroughly before disconnecting from the gas line whenthoroughly before disconnecting from the gas line when toxic or corrosive gases are used. Never return a MAS totoxic or corrosive gases are used. Never return a MAS to

toxic or corrosive gases are used. Never return a MAS to

toxic or corrosive gases are used. Never return a MAS totoxic or corrosive gases are used. Never return a MAS to Kobold Instruments or any other repair or calibrationKobold Instruments or any other repair or calibration

Kobold Instruments or any other repair or calibration

Kobold Instruments or any other repair or calibrationKobold Instruments or any other repair or calibration facility without fully neutralizing any toxic gases trappedfacility without fully neutralizing any toxic gases trapped

facility without fully neutralizing any toxic gases trapped

facility without fully neutralizing any toxic gases trappedfacility without fully neutralizing any toxic gases trapped inside.inside.

inside.

inside.inside.

CAUTION! Opening the sensor cavity will shift calibration.CAUTION! Opening the sensor cavity will shift calibration.

CAUTION! Opening the sensor cavity will shift calibration.

CAUTION! Opening the sensor cavity will shift calibration.CAUTION! Opening the sensor cavity will shift calibration.

®®

to search for leaks to search for leaks

to search for leaks

to search for leaks to search for leaks

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MAS Instruction Manual

Refer to Section 3, OPERATION, for detailed instructions.

1. Install your MAS into the gas flow line. If you are using

/4-inch

pipe use a good quality paste pipe thread sealant for sealing and

tighten 1 to Section 2.4, P

CAUTION! Over-tightening will crack the fittings andCAUTION! Over-tightening will crack the fittings and

CAUTION! Over-tightening will crack the fittings and

CAUTION! Over-tightening will crack the fittings andCAUTION! Over-tightening will crack the fittings and shift calibration.shift calibration.

shift calibration.

shift calibration.shift calibration.

CAUTION! Be sure the arrow on the side of the trans-CAUTION! Be sure the arrow on the side of the trans-

CAUTION! Be sure the arrow on the side of the trans-

CAUTION! Be sure the arrow on the side of the trans-CAUTION! Be sure the arrow on the side of the transducer points in the direction of flow.ducer points in the direction of flow.

ducer points in the direction of flow.

ducer points in the direction of flow.ducer points in the direction of flow.

/2 turns beyond hand-tight. Do not over-tighten. (Refer

LUMBING C ONNECTIONS.)

The line pressure and temperature should not exceed 150 psig

(10 kg/cm

gauge) or 150°F = 65.556°C.

2. Apply power to your MAS. If you are using the Kobold MAS5000 power supply, plug the power supply into line power and the connector into the input power jack on the side of your MAS. (Refer to Figure 2-2 in Section 2, I

NSTALLATION.) If you are

providing your own power, use 12 to 15 VDC at 100 mA max. (24 VDC operation is made possible by board changes provided by Kobold.)

QUICK START

INSTRUCTIONS

CAUTION! Do not supply + DC power at the “D” connector while using an MAS-5000 power supply at the DC power jack. DO NOT plug power connector into DB9 connector. Damage to electronics will result. The “D” connector pinout diagram is in Section 2.5.1.

IMPORTANT!IMPORTANT!

IMPORTANT! Failure to follow proper power-up procedures

IMPORTANT!IMPORTANT! will result in a blown integrated circuit. Blown integrated circuits are the most common cause of instrument failure.

3. Upon application of power, the output signal will be at a high level for the first 10 to 20 seconds, after which (assuming zero flow) it will drop to zero (or 4 mA, depending on output configuration). Allow at least 15 minutes for warm-up.

4. After the warm-up period, your MAS is now monitoring the gas mass flow rate.

5. Output Signals: The output signal of MAS is either 0-5 VDC (standard) or 4-20 mA (optional). The output is linearly proportional to the gas mass flow rate. The full scale range and gas are shown on the front label of your MAS. Section 2.5, E

LECTRICAL

CONNECTIONS, describes the electrical output signal hookup.

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MAS Instruction Manual

For example, if you have a 0-5 VDC output signal, 5.00 VDC is the output signal for the full scale listed on your MAS; 2.50 VDC is for one-half of full scale; and 0.00 VDC is for zero flow. On the other hand, if you have 4-20 mA output signal, 20.00 mA is the output signal for the full scale; 12.00 mA is for one-half of full scale; and 4.00 mA is for zero flow.

6. The MAS with Integral or Remote Display: The 3

/2 digit LCD display reads directly in engineering units or percent of full scale. The full scale range and gas are shown on the front label of your MAS. The decimal point for the flow rate is set at the factory and will show automatically (e.g., “5.54” SLM or “76.4” %).

7. Overrange conditions are indicated by the display and/or output going to a high level, above the full scale range. After the overrange condition has been removed, it may take several seconds for the MAS to recover and resume normal operation.

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MAS Instruction Manual

CUSTOMER CAUTION! RE: OXYGEN SERVICE

Kobold Instruments Inc is not liable for any damages or personal injury, whatsoever, resulting from the use of Kobold Instruments’ Mass Flow Meters or Controllers for oxygen gas. Although Kobold does clean its mass flow meters and controllers prior to shipment, Kobold makes no claim or warranty that their cleanliness renders them safe for oxygen service. The customer must clean Kobold’s Mass Flow Meters or Controllers to the degree that the customer requires for his oxygen flow applications.

© COPYRIGHT KOBOLD INSTRUMENTS INC 1997 No part of this publication may be copied or distributed, transmitted, transcribed, stored in a retrieval system, or translated into any human or computer language, in any form or by any means, electronic, mechanical, manual, or otherwise, or disclosed to third parties without the express written permission of Kobold Instruments Inc. The information contained in this manual is subject to change without notice.

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