Keysight Technologies B1542A Pulsed IV Package User Manual

Keysight Technologies B1542A Pulsed IV Package for B1500A/EasyEXPERT

User’s Guide

Notices

No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Keysight Technologies as governed by United States and international copyright laws.

Manual Part Number

B1542-90000

Edition

Edition 1, July 2006 Edition 2, September 2006 Edition 3, February 2007 Edition 4, June 2007 Edition 5, July 2008 Edition 6, October 2009 Edition 7, October 2011 Edition 8, February 2012 Edition 9, August 2014 Edition 10, February 2017

Printed in:

Printed in Malaysia

Published by:

Keysight Technologies International Japan G.K. 9-1, Takakura-cho, Hachioji-shi, Tokyo 192-0033 Japan

Technology Licenses

The hardware and/or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license.

U.S. Government Rights

The Software is “commercial computer software,” as defined by Federal Acquisition Regulation (“FAR”) 2.101. Pursuant to FAR

12.212 and 27.405-3 and Department of Defense FAR Supplement (“DFARS”)

227.7202, the U.S. government acquires commercial computer software under the same terms by which the software is customarily provided to the public. Accordingly, Keysight provides the Software to U.S. government customers under its standard commercial license, which is embodied in its End User License Agreement (EULA), a copy of which can be found at http:/

/www.keysight.com/find/sweula. The license

set forth in the EULA represents the exclusive authority by which the U.S. government may use, modify, distribute, or disclose the Software. The EULA and the license set forth therein, does not require or permit, among other things, that Keysight: (1) Furnish technical information related to commercial computer software or commercial computer software documentation that is not customarily provided to the public; or (2) Relinquish to, or otherwise provide, the government rights in excess of these rights customarily provided to the public to use, modify, reproduce, release, perform, display, or disclose commercial computer software or commercial computer software documentation. No additional government requirements beyond those set forth in the EULA shall apply, except to the extent that those terms, rights, or licenses are explicitly required from all providers of commercial computer software pursuant to the FAR and the DFARS and are set forth specifically in writing elsewhere in the EULA. Keysight shall be under no obligation to update, revise or otherwise modify the Software. With respect to any technical data as defined by FAR 2.101, pursuant to FAR 12.211 and 27.404.2 and DFARS 227.7102, the U.S. government acquires no greater than Limited Rights as defined in FAR 27.401 or DFAR 227.7103-5 (c), as applicable in any technical data.

Warranty

THE MATERIAL CONTAINED IN THIS DOCUMENT IS PROVIDED “AS IS,” AND IS SUBJECT TO BEING CHANGED, WITHOUT NOTICE, IN FUTURE EDITIONS. FURTHER, TO THE MAXIMUM EXTENT PERMITTED BY APPLICABLE LAW, KEYSIGHT DISCLAIMS ALL WARRANTIES, EITHER EXPRESS OR IMPLIED, WITH REGARD TO THIS MANUAL AND ANY INFORMATION CONTAINED HEREIN, INCLUDING BUT NOT LIMITED TO THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE. KEYSIGHT SHALL NOT BE LIABLE FOR ERRORS OR FOR INCIDENTAL OR CONSEQUENTIAL DAMAGES IN CONNECTION WITH THE FURNISHING, USE, OR PERFORMANCE OF THIS DOCUMENT OR OF ANY INFORMATION CONTAINED HEREIN. SHOULD KEYSIGHT AND THE USER HAVE A SEPARATE WRITTEN AGREEMENT WITH WARRANTY TERMS COVERING THE MATERIAL IN THIS DOCUMENT THAT CONFLICT WITH THESE TERMS, THE WARRANTY TERMS IN THE SEPARATE AGREEMENT SHALL CONTROL.

Declaration of Conformity

Declarations of Conformity for this product and for other Keysight products may be downloaded from the Web. Go to http://

www.keysight.com/go/conformity. You can

then search by product number to find the latest Declaration of Conformity.

Latest Information

To get the latest firmware/software/electronic manuals/specifications/support information, go to www.keysight.com and type in the product number in the Search field at the top of the page.

This product complies with the WEEE Directive (2002/96/EC) marking requirements. The affixed label indicates that you must not discard this electrical/ electronic product in domestic household waste.

Product Category: With reference to the equipment types in the WEEE Directive Annex I, this product is classed as a “Monitoring and Control instrumentation” product.

Do not dispose in domestic household waste.

To return unwanted products, contact your local Keysight office or visit the following website for more information.

http://about.keysight.com/en/companyinfo/environment/

In This Manual

This manual provides the information about Keysight Technologies B1542A and consists of the following chapters.

• Chapter 1, Introduction

Describes product overview of Keysight B1542A.

• Chapter 2, Installation

Explains how to install Keysight B1542A.

• Chapter 3, Performing System Setup and Compensation

Explains how to perform system setup and how to update compensation data.

• Chapter 4, Performing Measurement

Describes measurement examples by using the pulsed IV test system.

• Chapter 5, PLSDIV Test Definitions

Provides reference information for application test definitions (PLSDIV test definitions) used for the pulsed IV measurement.

• Chapter 6, PLSDIV TIS Commands

Provides reference information for execution files (Plsdiv commands, PLSDIV TIS) used in the PLSDIV test definitions.

• Chapter 7, Status Code and Error Messages

Lists the status code and the error messages.

NOTE The pulsed IV test system consists of some instruments, oscilloscope, pulse

generator, source monitor unit, and so on. To use the instruments independently or for details of the instruments, see the manual of each instrument.

NOTE To get the latest firmware/software/manual/support information, go to

www.keysight.com and type in B1542A in the Search field at the top of the

page.

Contents

1. Introduction

Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

System Hardware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

System Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

Typical Technical Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

Accessories and Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

2. Installation

Inspection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

RF Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

DC Probes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

Hardware Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

Installing Instruments. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

Connecting Interface Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

Installing Pulsed IV Test System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

Connecting RF Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13

Connecting DC Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14

Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16

System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17

Installing Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17

Installing Cable Compensation Data . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17

After Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18

Updating Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19

Removing Pulsed IV Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19

Rack-mounting Instruments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

Rack-mounting Pulse/dc Switch Units . . . . . . . . . . . . . . . . . . . . . . . . . 2-21

3. Performing System Setup and Compensation

Pulsed IV System Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Starting System Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

If You Use DSO/MSO 9000 Series or S Series Oscilloscope . . . . . . . . . . 3-7

If You Use External Computer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8

System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

LAN Setup for DSO Control Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

SMU CH for Compensation Dialog Box. . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

Executing Action . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

Compensation Action . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13

Pgu Compensation Action . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13

4. Performing Measurement

Theory of Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Terminal Voltage and Source Output Value . . . . . . . . . . . . . . . . . . . . . . . 4-4

Before Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

Performing System Reset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

Pulse Waveform Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

Pulsed Id-Vd Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

Pulsed Id-Vg Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11

DC I-V Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13

5. PLSDIV Test Definitions

PLSDIV Capt Wave . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

PLSDIV DC IdVd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

PLSDIV DC IdVd SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10

PLSDIV DC IdVg . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13

PLSDIV DC IdVg SMU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16

PLSDIV IdVd, PLSDIV IdVd [2] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19

PLSDIV IdVg, PLSDIV IdVg [2] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-23

PLSDIV IV SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27

PLSDIV Reset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-31

PLSDIV Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-32

Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-34

6. PLSDIV TIS Commands

Command Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

Entering Plsdiv Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

Command Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

Defining Numeric/Vector Input Parameter . . . . . . . . . . . . . . . . . . . . . . . 6-6

Defining String/Numeric Input Parameters . . . . . . . . . . . . . . . . . . . . . . . 6-6

Defining Numeric Output Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6

Defining Vector Output Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

Defining String Output Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

Defining Format Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

Setup Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8

Command Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9

DispMessage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10

PlsdivCaptureMonData . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11

PlsdivCaptureTimeData . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

PlsdivCutoffVd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13

PlsdivCutoffVg . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13

PlsdivErrorMessage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13

PlsdivForceVd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14

PlsdivForceVg . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14

PlsdivInit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15

PlsdivMeasureId . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17

PlsdivSetAdjustStat . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18

PlsdivSetAveraging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18

PlsdivSetDeviceDelay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19

PlsdivSetMeasTime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20

PlsdivSetPulseWid th . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21

PlsdivSetSampling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21

PlsdivSetSmoothing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22

PlsdivSetTransTime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

PlsdivSetVgLevel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

PlsdivUninit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24

7. Status Code and Error Messages

1Introduction

Introduction

Keysight B1542A Pulsed IV Package for B15 00/Eas yEXP ERT is a soluti on package for the Keysight B1500A or Desk top Easy EX PERT users and pro vides the automated pulsed IV test environment. This chapter introduces Keysight B1542A, and consists of the following sections.

• “Overview”

• “Typical Technical Information”

• “Accessories and Options”

1-2 Keysight B1542A User’s Guide, Edition 10

Introduction

Overview

Keysight B1542A Pulsed IV Package expands the capabilities of Keysight B1500A Semiconductor Device Analyzer to enable the ultra short pulsed IV measurements with parametric characterization down to 10 ns pulse width for many new device structures such as silicon-on-insulator (SOI) transistors that are more susceptible to harmful thermal effects during characterization.

Using the B1542A, you can easily and effectively configure the pulsed IV test system and perform the pulsed IV measurement of MOSFET on the Keysight EasyEXPERT or Desktop EasyEXPERT application test environment.

The B1542A supports the B1500A as the DC source monitor. And the B1542A additionally supports the Keysight 4155B/4155C/4156B/4156C Semiconductor Parameter Analyzer and the Keysight E5260/E5270 Series of Parametric Measurement Solutions by using the Desktop EasyEXPERT software.

System Hardware

The pulsed IV test system can be configured by u sing the fo llowing equ ipment. See

Figure 1-1. The B1542A provides the accessories used to connect the equipment.

• Keysight B1500A Semiconductor Device Analyzer

• Oscilloscope, minimum two measurement channels, see Table 1-1

• Pulse Generator, minimum one output channel, see Table 1-2

• Switch Controller and Pulse/dc Switch Units, furnished with the B1542A

• Windows PC installed with Desktop EasyEXPERT Optional for the system with the B1500A. Absolute necessity for the system

with the following instrument.

• Keysight 4155B/C Semiconductor Parameter Analyzer

• Keysight 4156B/C Precision Semiconductor Parameter Analyzer

• Keysight E5260A/E5270B Measurement Mainframe

The pulsed IV system uses 3 channels of SMU. So Keysight E5262A/E5263A 2-channel SMU is not recommended. However it may be used if you change the connections manually. Because the pulsed IV measurement uses one SMU and the DC IV measurement uses only 2 ea. of SMU.

Keysight B1542A User’s Guide, Edition 10 1-3

Introduction

Oscilloscope

Pulse Generator

Switch Cont roller

Desktop EasyEXPERT

Windows PC

DC Source Monitor

(optional with B1500A)

Overview

Figure 1-1 Pulsed IV Test System by Using Keysight B1542A

Table 1-1 Oscilloscope Supported by Keysight B1542A

Keysight Model Number Remarks

54853A/54854A/54855A 2.5/4/6 GHz, 4 channels, 20 GSa/s DSO8000A series

MSO8000A series DSO80000B series 2/3/4/6/8/10/12/13 GHz, 4 channels, 40 GSa/s

DSO9104A/9254A/9404A MSO9104A/9254A/9404A

DSO90254A/90404A/90604A 2.5/4/6 GHz, 4 channels, 20 GSa/s DSOS104A/S204A/S254A

DSOS404A/S604A/S804A MSOS104A/S204A/S254A

MSOS404A/S604A/S804A

600 MHz or 1 GHz, 4 channels, 4 GSa/s

when using 1 or 2 channels, 20 GSa/s when using all channels

1/2.5/4 GHz, 4 channels, 20 GSa/s

1/2/2.5/4/6/8 GHz, 4 channels, 20 GSa/s DSO/MSO S series oscilloscope is supported

as DSO=DSO9000A series. See Table 3-3.

1-4 Keysight B1542A User’s Guide, Edition 10

Table 1-2 Pulse Generator Supported by Keysight B1542A

Keysight Model Number Remarks

81101A 50 MHz output, standalone 8110A with 81103A 150 MHz output, modular 81110A with 81111A 165 MHz output, modular 81150A 120 MHz output, standalone

System Software

The B1542A supports the pulsed IV measurement applications listed below. The programs used to perform the measurement are provided as the EasyEXPERT application test definition. Therefore the pulsed IV measurement can be performed easily on the EasyEXPERT or Desktop EasyEXPERT application test environment without creating the test programs. The B1542A also provides the test definition used for the system setup.

• Pulsed IV Id-Vd characteristics measurement

Introduction

Overview

• Pulsed IV Id-Vg characteristics measurement

• Pulsed IV waveform measurement

• DC Id-Vd characteristics measurement for B1500A

• DC Id-Vg characteristics measurement for B1500A

• Pulsed IV system reset

• Pulsed IV system setup

• DC I-V sweep measurement for 4155/4156/E5260/E5270

• DC Id-Vd characteristics measurement for 4155/4156/E5260/E5270

• DC Id-Vg characteristics measurement for 4155/4156/E5260/E5270

Keysight B1542A User’s Guide, Edition 10 1-5

Introduction Typical Technical Information

Typical Technical Information

The followings are the typical technical information of the pulsed IV test system configured by Keysight B154 2A. Those are not the specifi cations but the typical and supplemental data the test system can provide.

Gate pulse width: 10 ns to 1 s Gate pulse voltage: -4.5 V to 4.5 V Gate pulse base line voltage: -3.0 V to 3.0 V Gate pulse amplitude: maximum 4.5 V Gate pulse period: 100 s Drain pulse maximum measurement current: 80 mA Drain pulse current measurement resolution: 1 A Drain voltage range: -10 V to 10 V

1-6 Keysight B1542A User’s Guide, Edition 10

Accessories and Options

Table 1-3 li sts the available options for Keysight B1542A. And Table 1-4 lists the

contents of the B1542A.

Table 1-3 Options

Introduction

Accessories and Options

Model

Number

R1280A Return-to-Keysight - warranty and service plan R1282A Return-to-Keysight calibration plan

Table 1-4 Contents

Software license to use, media, and manual

Pulsed IV package software CD-ROM 1 Drain cable compensation data CD-ROM 1 Desktop EasyEX PERT software CD-ROM 1 User’s Guide, English 1

Drain cable set

Triaxial cable, 1.5 m 1 BNC(m)-Triax(f) adapter, floating guard 1 SMA(f)-BNC(m) adapter, precision type 1

Description

Description Quantity

SMA cable, 30 cm 1 DUT cable, 1.5 m 1 Magnet sheet (for fixing the bias-T) 1

Keysight B1542A User’s Guide, Edition 10 1-7

Introduction Accessories and Options

Description Quantity

Gate cable set

SMA(f)-BNC(m) adapter 1 SMA cable, 30 cm 1 SMA(f)-BNC(m) adapter, precision type 1 SMA cable, 1.5 m 1 DUT cable, 1.5 m 1 SMA (f)-(m)-(f) adapter 1 Terminator, dc-26.5 GHz, 3.5 m with option 011 1 SMA(m)-SMA(m) adapter 1 Magnet sheet (for fixing the divider) 1

Docking interface

BNC cable, 1.5 m 2 Triaxial cable, 1.5 m 1 GNDU-chassis adapter 1 Triaxial cable, 1.5 m 1 BNC(m)-(f)-(f) adapter 1 BNC(m)-Triax(f) adapter, floating guard 1 GPIB cable, 1 m 2 Torque wrench, 5 lb. 1 Torque wrench, 8 lb. 1 Open-end wrench, 5/16 inch 1 Open-end wrench, 11/32 inch 1

1-8 Keysight B1542A User’s Guide, Edition 10

Accessories and Options

Description Quantity

Pulse/dc switch set

Switch controller 1 Switch control cable (viking cable, D-sub 15 pin) 1 Switch control distributor 1 Drain pulse/dc switch unit 1 Gate pulse/dc switch unit 1 Triaxial cable, 1.5 m 2 D-sub 9 pin cable, 3 m 2 Wrench, T10 1 GPIB cable, 1 m 1

Rack-mount kit for pulse/dc switch units

Panel 1

Introduction

Rail kit for pulse/dc switch units 1 Rail kit for pulse/dc switch units 1 Support rail for rack-mounting oscilloscope (7 EIA maximum)

onto Keysight 1181B testmobile system cart Screw 12 Screw 2 Nut 8 Wire 3 Screw 8

Pulsed IV DC probe cable set

SMA(f)-SSMC cable 1 SMA(m)-SSMC cable 1 SSMC short-open cable, 50 mm 2 SSMC short-open cable, 75 mm 2

Keysight B1542A User’s Guide, Edition 10 1-9

Introduction Accessories and Options

1-10 Keysight B1542A User’s Guide, Edition 10

2 Installation

Installation

This chapter describes the inspection and installation instructions of Keysight B1542A pulsed IV package for B1500A/EasyEXPERT, and consists of the following sections. To perform the pulsed IV measurement, complete the hardware and software installation described in this chapter.

• “Inspection”

• “RF Probes”

• “DC Probes”

• “Hardware Installation”

• “Software Installation”

• “Rack-mounting Instruments” If you rack-mount the pulse/dc switch units, see “Rack-mounting Instruments” on

page 2-20 which describes how to install the rack-mount kit for the pulse/dc switch

units. After you complete the rack-mounting, see “Hardware Installation” on page

2-6 to install the system equipment.

CAUTION Using Torque Wrench and Open-end Wrench

For the RF measurements, it is important to carefully contact and fasten the connectors of the RF cables. The condition of the cable connections may change the measurement result characteristics. Therefore treat the RF cables carefully, especially the RF connectors, and use the torque wrench and the open-end wrench when you fasten the RF connectors. The wrenches are furnished with the B1542A.

CAUTION Using Cable Tie

Use a cable tie to secure the cables. Then, do not tug the cable tie. You must treat the RF cables carefully to avoid the damage.

NOTE Using Magnet Sheet

Use a magnet sheet to fix the di vider or th e bias-T to a metal plate. The m agnet sheet is furnished with the B1542A.

2-2 Keysight B1542A User’s Guide, Edition 10

Installation

Inspection

Perform the following inspections when the B1542A arrives at your site.

1. Before unpacking any components , inspect all boxes for any sign of damage that might have occurred during shipment, such as:

•dents

• scratches

•cuts

• water marks If you suspect any damage, notify your local Keysight Technologies sales or

service office.

2. When you open the boxes containing the B1542A, check the components against the contents lists attached to the boxes. See also Table 1-4.

If anything is missing, notify your local Keysight Technologies sales or service office.

Keysight B1542A User’s Guide, Edition 10 2-3

Installation

Terminator

SMA- Tee

SMA(m) -(m)

To drain

To gate

RF probe

Signal

Gnd

Signal

Gnd

Gate

Dra in

RF probe

Source/Well

RF Probes

The pulsed IV test system supports the measurement of the three-terminal MOSFET (source and well (substrate) are shorted). And its measurement path must be extended to the RF probes as shown in Figure 2-1 to achieve 10 ns minimum pulse width. One measurement path is for the gate terminal and the other path is for the drain terminal. Moreover the source/well terminal must be electrically connected to the ground via the shielding of the measurement path (RF probes and measurement cables). See Figure 2-2.

Figure 2-1 RF Probe Connection

Prepare two RF probes to perform the pulsed IV measurement. The RF probe must have the signal line and the grou nd lines as shown in Figure 2-2 . The signal line is to contact the gate or drain pad, and the ground lines are to contact the source/well pads. For the RF probe and its installation, consult your favorite prober vender.

Figure 2-1 shows the RF probes of Cascade Microtech, Inc.

Figure 2-2 Contact Pad and Probe Tip

2-4 Keysight B1542A User’s Guide, Edition 10

DC Probes

Terminator

Well

Gate

Source

Drain

This makes a current return path for the drain current signal.

This makes a current return path for the gate pulse signal.

This shorts Well and Source.

to Test system

DC probes

Signal

Gnd

The MOSFET contact pads for DC measurement shown in Figure 2-3, are more popular than the RF contact pads shown in Figure 2-2. If device under test is configured with DC contact pads, use DC probes instead of RF probes. The DC probes are better suited for contact with the DC contact pads than the RF probes. See Figure 2-3 for the contact pads and the DC probes. Required cables for connecting the DC probes ar e furnish ed with the B154 2A as the D C probe cable s et. For more information, see “Connecting DC Probes” on page 2-14.

When using DC probes, minimum pulse width should be limited to approximately 60 ns to 100 ns.

Figure 2-3 Contact Pad and DC Probe Connection

Installation

DC Probes

Keysight B1542A User’s Guide, Edition 10 2-5

Installation

Oscilloscope

Pulse generator

Switch controller

DC source monitor

Hard ware Installation

Hardware Installation

This section describes the instructions to install the B1542A. The installation instructions cover the connection of the control cables and the connection of the measurement cables to the RF or DC probes used to contact the device under test (MOSFET). The connection overview of the pulsed IV test system i s shown in

Figure 2-5.

• “Installing Instruments”

• “Connecting Interface Cables”

• “Installing Pulsed IV Test System”

• “Connecting RF Probes”

• “Connecting DC Probes”

Installing Instruments

The pulsed IV test system uses the DC source monitor, pulse generator, oscilloscope, and switch controller with switch units. Install the instruments to the appropriate place. See Figure 2-4 for example. For more information, see the manual of each instrument. It provides the required environment and the necessary and unique information for the instrument.

Figure 2-4 Installing Instruments

2-6 Keysight B1542A User’s Guide, Edition 10

Installation

Hard ware Installation

Connecting Interface Cables

Connect the instruments via GPIB or LAN as shown below. Requirements:

• GPIB cable, maximum 4 ea. Quantity depends on your system components (instruments and computer).

• LAN cable, 2 ea. only for using the DSO/MSO 9000 series or S series oscilloscope

Procedure:

1. Connect a GPIB cable between the DC source monitor and the pulse generator.

2. Connect a GPIB cable between the switch controller and one of above instruments.

3. For the Desktop EasyEXPERT users: Connect a GPIB cable between your computer and one of above instruments.

4. Connect the oscilloscope as shown below.

• For using the DSO/MSO 9000 series or S series oscilloscope:

a. Connect the B1500A or your computer to a LAN. b. Connect the oscilloscope to the LAN. Subnet mask must be the same for their network settings.

• For using the other oscilloscope:

Connect a GPIB cable between the oscilloscope and one of above instruments or computer.

Keysight B1542A User’s Guide, Edition 10 2-7

Installation Hard ware Installation

Installing Pulsed IV Test System

The connection overview of the pulsed IV test system is shown in Figure 2-5. To install the system, perform the following steps.

1. “Connecting Switch Controller” on page 2-10

2. “Making Measurement Path for Gate” on page 2-11

3. “Making Measurement Path for Drain” on page 2-12

4. “Connecting RF Probes” on page 2-13 or “Con necting DC P robes” on page 2-14

2-8 Keysight B1542A User’s Guide, Edition 10

Figure 2-5 Pulsed IV Test System Connection Overview

Scope

DC source monitor

Triaxial cables

Pulse generator

D-sub 9 pin cables

Viking cable

to Drain

to Gate

Switch controller

Switch control distributor

to SMU Force for gate voltage at DC test

to SMU Force

for drain voltage

at DC test

to SMU Force for drain DC bias

Drain pulse/dc switch unit

Gate pulse/dc switch unit

SMA cable, 0.3 m

SMA cable, 1.5 m

DUT cable, 1.5 m

to input channel for drain

to input channel for gate

Drain Current Monitor

Gate Pulse Monitor

SMU

BNC cable

to TRIGGER OUT

to AUX Trig In

to output channel

for gate pulse

Terminator

DUT cable, 1.5 m

Installation

Hard ware Installation

Keysight B1542A User’s Guide, Edition 10 2-9

Installation

D-sub 9 pin cables

Viking cable

Switch controller

Switch control distributor

Drain pulse/dc switch unit

Gate pulse/dc switch unit

Switch 1

Switch 2

Hard ware Installation

Connecting Switch Controller

1. Install the switch controller and connect the GPIB cable. See “Installing

Instruments” and “Connecting Interface Cables” on page 2-7.

2. Fix the switch control distributor to the appropriate place.

3. Connect the viking cable between the switch controller and the switch distributor.

4. Connect the D-sub 9 pin cable between the switch distributor Switch 1 connector and the gate pulse/dc switch unit.

5. Connect the D-sub 9 pin cable between the switch distributor Switch 2 connector and the drain pulse/dc switch unit.

Required accessories and equipment:

• Viking cable, 1 ea.

• D-sub 9 pin cable, 2 ea.

• Switch Controller, 1 ea.

• Switch Control Distributor, 1 ea.

• Gate Pulse/dc Switch Unit with divider, 1 ea.

• Drain Pulse/dc Switch Unit with bias-T, 1 ea.

Figure 2-6 Switch Controller, Switch Control Distributor, and Pulse/dc Switch Units

2-10 Keysight B1542A User’s Guide, Edition 10

Making Measurement Path for Gate

Scope

DC source monitor

Triaxial cable

Pulse generator

to SMU Force

for gate voltage

at DC test

Gate pulse/dc switch unit

SMA cable, 0.3 m

BNC cable

SMA cable, 1.5 m

to input channel

for gate (*2)

Gate Pulse Monitor

SMU

to output channel for gate pulse (*1)

(*1) Use BNC(m)-SMA(f) adapter for pulse generator. (*2) Use BNC(m)-SMA(f) adapter precision type for oscilloscope.

to TRIGGER OUT

to AUX Trig In

Gate Pulse Input

Connect the following accessories as shown in Figur e 2-7. And fi x the gate pulse/dc switch unit to the appropriate place. Use a torque wrench and an open-end wrench to fasten the SMA connectors.

Required accessories:

• BNC(m)-SMA(f) adapter, 1 ea., for pulse generator

• BNC(m)-SMA(f) adapter, precision type, 1 ea., for oscilloscope

• BNC cable, 1 ea.

• SMA cable, 0.3 m, 1 ea.

• SMA cable, 1.5 m, 1 ea.

• Triaxial cable, 1 ea.

Figure 2-7 Measurement Path for Gate

Installation

Hard ware Installation

Keysight B1542A User’s Guide, Edition 10 2-11

Installation

Scope

DC source monitor

Triaxial cables

to SMU Force

for drain voltage

at DC test

to SMU Force for drain DC bias

Drain pulse/dc switch unit

SMA cable, 0.3 m

Drain Current Monitor

SMU

to input channel for drain

BNC(m)-SMA(f) adapter precision type

Drain Bias Input

BNC(m)-Triax(f) adapter (floating guard)

Hard ware Installation

Making Measurement Path for Drain

Connect the following accessories as shown in Figure 2-8. And fix the drain pulse/dc switch unit to the appropriate place. Use a torque wrench and an open-end wrench to fasten the SMA connectors.

Required accessories:

• BNC(m)-SMA(f) adapter, precision type, 1 ea., for oscilloscope

• SMA cable, 0.3 m, 1 ea.

• BNC(m)-Triax(f) adapter, floating guard, 1 ea.

• Triaxial cable, 2 ea.

Figure 2-8 Mea surement Path for Drain

2-12 Keysight B1542A User’s Guide, Edition 10

Installation

to Drain

to Gate

SMA(m)-(m)

Terminator

SMA(f)-(m)-(f)

to Bias-T (RF+DC) or to Drain pulse/dc switch unit (DUT)

to Divider or to Gate pulse/dc switch unit (DUT)

DUT cable, 1.5 m

Hard ware Installation

Connecting RF Probes

Only for the RF probe users. Connect the following accessories as shown in Figure

2-9. Use a torque wrench and an open-end wrench to fasten the SMA connectors.

Required accessories:

• DUT cable, 1.5 m, 2 ea.

• SMA(f)-(m)-(f) adapter, 1 ea.

•50  Terminator, 1 ea.

• SMA(m)-(m) adapter, 1 ea., used to connect the path to the RF probe for gate Procedure:

1. Connect a DUT cable between a RF probe and the bias-T’ s RF+DC connector or the Drain pulse/dc switch unit’s DUT connector of the pulsed IV test system. And set the RF probe to the appropriate place.

2. Connect the SMA adapters, terminator, and a DUT cable between a RF probe and the divider or the Gate pulse/dc switch unit’s DUT connector of the pulsed IV test system. And set the RF probe to the appropriate place.

Figure 2-9 RF Probe Connections

Keysight B1542A User’s Guide, Edition 10 2-13

Installation

Terminator

Well

Gate

Source

Drain

Gate DC probe

Source DC probe

Signal

Gnd

SMA(f)-(m)-(f)

to Bias-T (RF+DC) or to Drain pulse/dc switch unit (DUT)

to Divider or to Gate pulse/dc switch unit (DUT)

DUT cable, 1.5 m

Drain DC probe

Well DC probe

Hard ware Installation

Connecting DC Probes

Only for the DC probe users. Connect the following accessories as shown in Figure

2-10. Use a torque wrench and an open-end wrench to fasten the SMA connectors.

Required accessories:

• DUT cable, 1.5 m, 2 ea.

• SMA(f)-(m)-(f) adapter, 1 ea.

•50  Terminator, 1 ea.

• SMA(m)-SSMC cable, 1 ea. (part of the pulsed IV DC probe cable set)

• SMA(f)-SSMC cable, 1 ea. (part of the pulsed IV DC probe cable set)

• SSMC short-open cable, 3 ea. (parts of the pulsed IV DC probe cable set) 50 mm or 75 mm cable length. Use appropriate one. For the external view and

the internal connection, see Figure 2-11.

Figure 2-10 DC Probe Connections

2-14 Keysight B1542A User’s Guide, Edition 10

Installation

50 mm or 75 mm

Black

SSMC(plug)

Yellow

Signal line and shield are shorted.

no signal pin

Hard ware Installation

Procedure:

1. Connect the SMA(m)-SSMC cable to the Gate DC probe.

2. Connect a SSMC short-open cable between the Gate DC probe and the W ell DC probe, and set the DC probe to the appropriate place. Then, the black sleeve plug must be the Gate side. This electrically connects the Well probe needle, Well probe shield, and Gate probe shield together.

3. Connect the SMA(f)-SSMC cable to the Drain DC probe, and set the DC probe to the appropriate place.

4. Connect a SSMC short-open cable between the Drain DC probe and the Source DC probe, and set the DC probe to the appropriate place. Then, the black sleeve plug must be the Drain side. This electrically connects the Source probe needle, Source probe shield, and Drain probe shield together.

5. Connect a SSMC short-open cable between the Well DC probe and the Source DC probe, and set the DC probe to the appropriate place. Then, the black sleeve plug must be the Source side. This electrically connects the Well probe needle, Well probe shield, and Source probe shield together.

6. Connect a DUT cable between the Drain DC probe’s SMA(f) connector and the bias-T’s RF+DC connector or the Drain pulse/dc switch unit’s DUT connector of the pulsed IV test system.

7. Connect the SMA(f)-(m)-(f) adapter, terminator, and a DUT cable between the Gate DC probe’s SMA(m) connector an d the divi der or the Gat e pul se/dc swi tch unit’s DUT connector of the pulsed IV test system.

Figure 2-11 SSMC Short-Open Cable

Keysight B1542A User’s Guide, Edition 10 2-15

Installation Software Installation

Software Installation

This section describes the instructions to install the pulsed IV system software.

• “System Requirements”

• “Installing Software”

• “Installing Cable Compensation Data”

• “After Software Installation”

• “Updating Software”

• “Removing Pulsed IV Software” To install the pulsed IV system software, perform the instructions described in

“Installing Software”, “Installing Cable Compensation Data”, and “After Software Installation” in this order.

To update the pulsed IV system software, perform the instruction described in

“Updating Software”.

NOTE This section uses the following conventions.

<system drive>: Drive the pulsed IV system software is installed <program folder>: Following folder For Windows 7 64 bit version, <system drive>:\Program Files (x86) For B1500A, Windows 7 32 bit version, and Windows XP,

<system drive>:\Program Files <data folder>: Following folder For Windows 7, <system drive>:\Program Data For Windows XP, <system dri ve>:\Documents and Settings\All Users\Application

Data

2-16 Keysight B1542A User’s Guide, Edition 10

Installation

Software Installation

System Requirements

The pulsed IV system software is allowed to be installed in the one of the following system controller.

• Keysight B1500A installed with EasyEXPERT software

• Windows PC installed with Desktop EasyEXPERT software If the B1500A is used as the DC s ource monit or , the revisi on number of Desktop

EasyEXPERT must be the same as the EasyEXPERT installed in the B1500A.

NOTE To install the pulsed IV system software, you must log on to Windows as an

administrator.

Installing Software

Install the pulsed IV system software as shown below.

1. Exit EasyEXPERT software or Desktop EasyEXPERT software. If the Start EasyEXPERT window is opened, close it.

2. Insert the Pulsed IV package software CD-ROM into the disk drive.

3. Execute the setup.exe in the CD-ROM.

4. Follow the instructions of the setup wizard. And wait until the program installation is completed.

5. After the installation, remove the CD-ROM from the disk drive.

Installing Cable Compensation Data

Install the drain cable compensation data as shown below.

1. If the Start EasyEXPERT window is opened, close it first.

2. Insert the Drain cable compensation data CD-ROM into the disk drive.

3. Execute the following file in the CD-ROM. \DrainSetup\drain_setup.msi

4. Follow the instructions of the setup wizard. And wait until the data installation is completed.

5. After the installation, remove the CD-ROM from the disk drive.

Keysight B1542A User’s Guide, Edition 10 2-17

Installation Software Installation

After Software Installation

1. Launch EasyEXPERT or Desktop EasyEXPERT. And click the Start EasyEXPERT button.

2. Open your workspace or create a new workspace.

3. Display the Application Test tab screen.

4. Import the pulsed IV test definitions listed below from the following folder. <program folder>\Agilent\PLSDIV\TestDefinitions\Import1st

• PLSDIV IdVd

• PLSDIV IdVd [2]

• PLSDIV IdVg

• PLSDIV IdVg [2]

• PLSDIV DC IdVd

• PLSDIV DC IdVg

• PLSDIV Capt Wave

• PLSDIV Setup

• PLSDIV Reset

• PLSDIV IV SMU

5. Import the pulsed IV test definitions listed below from the following folder. <program folder>\Agilent\PLSDIV\TestDefinitions\Import2nd

• PLSDIV DC IdVd SMU

• PLSDIV DC IdVg SMU

6. Open the PLSDIV Setup test definition and perform the system setup as described in Chapter 3, “Performing System Setup and Compensation.”

2-18 Keysight B1542A User’s Guide, Edition 10

Installation

Software Installation

Updating Software

Perform the following procedure to update the pulsed IV system software.

1. Launch EasyEXPERT or Desktop EasyEXPERT. And click the Start EasyEXPERT button.

2. Open your workspace.

3. Display the Application Test tab screen.

4. Remove checks from categories except for the Pulsed IV in the Category list.

5. Right-click a pulsed IV test definition in the Library list and click Delete Definition of This Test to open the confirmation dialog box. And click OK to delete the test definition from the present workspace.

Repeat this to delete all of the pulsed IV test definitions.

6. Remove the pulsed I V system soft ware now installed. See “Removing Pulsed IV

Software” on page 2-19.

7. Install the latest revision of the pulsed IV system software. See “Installing

Software” on page 2-17.

8. Install the drain cable compensation data. See “Installing Cable Compensation

Data” on page 2-17.

9. Import the pulsed IV test definitions. See “After Software Installation” on page

2-18.

Removing Pulsed IV Software

Perform the following procedure to remove the pulsed IV system software.

1. Exit EasyEXPERT software or Desktop EasyEXPERT software. If the Start EasyEXPERT window is opened, close it.

2. Open the Control Panel.

3. Uninstall the pulsed IV system software.

4. Open the Explorer.

5. Delete the <program folder>\Agilent\PLSDIV folder.

6. Delete the <data folder>\Agilent\PLSDIV folder.

Keysight B1542A User’s Guide, Edition 10 2-19

Installation

B1500A

Oscilloscope

Switch Controller

Switch Unit, 2 ea.

Pulse Generator

Blank Panel, 1 EIA

Rack-mounting Instruments

Rack-mounti n g Instrument s

Image of rack mount is shown in Figure 2-12. This figure shows the rack-mount position of the instruments. For rack mounting the instruments, see manual of instrument rack (Keysight E7590A: 1.3 m, E3661B: 1.6 m, E3662B: 2.0 m) and rack-mount kit. For the required parts for rack-mounting oscilloscope, pulse generator, and switch controller, see manual of each instrument.

Figure 2-12 Image of Rack Mount

See “Rack-mounting Pulse/dc Switch Units” on page 2-21 for rack-mounting the switch units. The required parts for rack -mounting the switch units and t he B1500A are listed in Table 2-1.

Table 2-1 Required Parts for Rack-mounting B1500A and Switch Units

Keysight Model No.

or Part No.

2-20 Keysight B1542A User’s Guide, Edition 10

Quantity Description

 1 Rack-mount kit for pulse/dc switch units,

furnished with the B1542A

5063-9218 1 Rack-mount flange kit for B1500A, 7 EIA

E3663AC 1 Support rail kit, for B1500A

Installation

Rack-mounting Instruments

Rack-mounting Pulse/dc Switch Units

Rack-mount pulse/dc switch units as shown below. The required parts are furnished with the B1542A. See Figure 2-14.

Required parts:

Reference

Designator

A B1542-00201 1 Panel B B1542-01211 1 Rail kit C B1542-01212 1 Rail kit

- 0515-0372 12 Screw

Procedure:

1. Assemble the rail kits B and C as shown in Figure 2-13.

2. Secure the rail assemblies B and C to the proper position of the system rack by using the typical rack-mounting method of the support rail kit.

3. Assemble the pulse/dc switch unit panel by mounting the following units on the panel A. Use screws listed above to fix the units.

Reference

Designator

Keysight Part No. Quantity Description

Keysight Part No. Description

D B1542-60001 Switch control distributor E B1542 -60002 Drain pulse/dc switch unit

F B1542-600 03 Gate pulse/dc switch unit

4. Align the pulse/dc switch unit panel (A with D, E, and F) with the rail assemblies secured to the system rack in the step 2, gently slide the panel on the rails until it stops, and secure the panel to the system rack by using the typical rack-mounting method of the rack-mount flange kit.

Keysight B1542A User’s Guide, Edition 10 2-21

Installation

B1542-01212

B1542-01211

Screw

Screw hole

Screw hole, not used

Rack-mounting Instruments

Figure 2-13 Assembling Rail Kit

Figure 2-14 Rack-mounting Pulse/dc Switch Units

2-22 Keysight B1542A User’s Guide, Edition 10

3 Performing System Setup and

Compensation

Performing System Setup and Compensation

This chapter describes how to perform system setup and compensation of the pulsed IV test system and consists of the following sections. The system setup can be performed by using the pulsed IV set up (PLSDIV Setup) test definition on the EasyEXPERT application test environment.

• “Pulsed IV System Setup”

• “Starting System Setup”

• “System Configuration”

• “Executing Action”

NOTE Before Starting System Setup

The pulsed IV test system must be installed correctly. See Chapter 2, “Installation.” Then do not forget to install the compensation data files.

NOTE Drain Cable Replacement

It is inadequate to replace only the defective part when you find any defect in the drain measurement path. The compensation data of the measurement path must be also updated after the replacement.

Order the drain cable set and replace it. After that, perform the compensation data installation. For the cable connection and the compensation data installation, see

Chapter 2, “Installation.”

3-2 Keysight B1542A User’s Guide, Edition 10

Performing System Setup and Compensation

Pulsed IV System Setup

The pulsed IV system setup items are listed below. The system setup must be performed and successfully completed before using the pulsed IV test system.

Accessories needed to perform the system setup are listed in Table 3-1. Prepare the accessories additionally to the system accessories and the system components.

• System Configuration This action is necessary to specify the interface address and the source or

measurement channels of PGU (pulse generator), DSO (digital sampling oscilloscope), and SMU (source monitor unit) used for the pulsed IV measurement. See “System Configuration” on page 3-10. For the setup parameters, see Table 3-3.

• Compensation This action is necessary to obtain and update the compensation factors of the

pulsed IV test system.

• Skew Measurement This action performs the skew measurement which is one of the measurements

performed in the Compensation action. If the skew measurement error occurs during the Compensation action is executed, you can perform only the skew measurement again by this action.

• Drain Cable Replacement This action is necessary to obtain and update the compensation factors of the

bias-T and the cable of the drain measurement path.

• Pgu Compensation This action obtains the compensation factors of the pulse generator. This action

should be executed before you perform the pulsed IV measurements which set the gate voltage automatic adjustment (VgAdjust) to off (Disable).

When you must perform the system setup is shown in Table 3-2. To execute an action, see “Executing A ction” on pag e 3-12.

Keysight B1542A User’s Guide, Edition 10 3-3

Performing System Setup and Compensation Pulsed IV System Setup

Table 3-1 Required Accessories to Perform System Setup

Accessory Quantity

Triaxial cable 2 BNC cable 1 BNC(m)-Triax(f) adapter, floating guard 1 BNC(m)-(f)-(f) adapter 1 GNDU-chassis adapter 1

Table 3-2 Pulsed IV System Setup

When the action must be executed Action

after system installation System Configuration

after changing interface address of an instrument System Configuration

Compensation

after changing a channel assignment System Configuration

Compensation after repair of oscilloscope Compensation after calibration of oscilloscope Compensation after replacing oscilloscope Compensation after replacing bias-T Drain Cable Replacement after replacing measurement cables to drain

terminal before starting the pulsed IV measurements with

the VgAdjust=Disable condition if the skew measurement error occurs Skew Measurement

3-4 Keysight B1542A User’s Guide, Edition 10

Drain Cable Replacement

Pgu Compensation

Performing System Setup and Compensation

Pulsed IV System Setup

Table 3-3 System Configuration Setup Parameters

Field name Description

Controller Select B1500A Internal or External PC. Instrumentations PGU, DSO, and SMU Specify the pulse generator (PGU), oscilloscope (DSO),

and DC source monitor (SMU) to be used. For DSO/MSO S series oscilloscope, set

DSO=DSO9000A series.

Visa Name

VISA interface ID of the GPIB interface. It must be GPIB0.

GPIB Address

PGU, DSO, and SMU Enter GPIB address of the pulse generator (PGU),

oscilloscope (DSO), and DC source monitor (SMU). If Controller=B1500 Internal, SMU field is not active. If DSO=DSO9000A series, DSO field is not active.

Option button Opens a dialog box. See “LAN Set up for DSO Cont ro l

Dialog Box” on page 3-10.

CH Assignment Gate PGU CH Enter DSO channel number for Gate pulse output.

Gate Monitor DSO CH Enter DSO channel number for Gate voltage monitor. Drain Monitor DSO

Enter DSO channel number for Drain voltage monitor.

CH Drain Bias SMU CH Enter SMU slo t number for Drain voltage output.

SMU for Compensation button Opens a dialog box. See “SMU CH for Compensation

Dialog Box” on page 3-11.

a. To know the Visa Name, use Keysight Connection Expert. See Figure 3-1 or Figure 3-2. b. To know the GPIB address of the instruments, use Keysight Connectio n Expert on the system

controller. Or see the manual of each instrument to know how to set the GPIB address.

Keysight B1542A User’s Guide, Edition 10 3-5

Performing System Setup and Compensation Starting System Setup

Starting System Setup

Perform the following procedures. If you use the DSO/MSO 9000 series or S series oscilloscope, also perform the procedure described in “If You Use DSO/MSO 9000

Series or S Series Oscilloscope” on page 3-7.

NOTE If you use an external computer as the system controller, skip the following

procedures and perform the procedures described in “If You Use External

Computer” on page 3-8.

1. Connect GPIB cable between the B1500A and the system instruments if it is still not connected.

2. Connect BNC cable between the pulse generator TRIGGER OUT connector and the oscilloscope AUX Trig In connector if it is still not connected.

3. Turn on the system instruments.

On the Keysight Connection Expert

On the EasyEXPERT

1. If the B1500A displays the Start EasyEXPERT window, close it first.

2. Launch Keysight Connection Expert (see Figure 3-1).

3. Check the GPIB configuration. The System Controller must be set to Yes.

4. Check the VISA interface ID. It must be GPIB0.

5. Close Keysight Connection Expert.

1. Launch EasyEXPER T.

2. Click th e Start EasyEXPERT button.

3. Open your workspace or create a new workspace.

4. Display the Application Test tab screen.

5. Open the PLSDIV Setup test definition.

6. Set the DcSwitch field to Yes. Do not set No.

7. Save the test setup to your preset group (My Favorite Setup).

3-6 Keysight B1542A User’s Guide, Edition 10

Figure 3-1 Keysight Connection Expert

GPIB0

System Controller

VISA interface ID

Performing System Setup and Compensation

Starting System Setup

If You Use DSO/MSO 9000 Series or S Series Oscilloscope

Perform the following procedure to know the IP address of the DSO/MSO 9000 series or S series oscilloscope and set it to Keysight Connection Expert. It must be also set to the system setup configuration (see IP Address in Table 3-5). Before performing this procedure, the oscilloscope and B1500A (or computer) must be connected to the LAN of the same subnet mask.

1. On the oscilloscope front panel, check the IP address of the oscilloscope. See the

2. If the B1500A (or computer) displays the Start EasyEXPERT window, close it

3. Launch Keysight Connection Expert.

4. Highlight LAN(TCPIP0).

5. Add the oscilloscope to the LAN instruments. Then use the IP address checked

6. Close Keysight Connection Expert.

Keysight B1542A User’s Guide, Edition 10 3-7

oscilloscope manual for checking the IP address (web address).

first.

at the step 1. Also the Device name must be inst0.

Performing System Setup and Compensation Starting System Setup

If You Use External Computer

Perform the following procedures if you use an external computer as the system controller. If you use the DSO/MSO 9000 series or S series oscilloscope, also perform the procedure described in “If You Use DSO/MSO 9000 Series or S Series

Oscilloscope” on page 3-7.

NOTE If You Use B1500A as DC Source Monitor

Launch Keysight Connecti on Exp ert o n the B1 500A and set t he GPI B config uration as follows.

• GPIB address: appropriate value, non 21 value

• System Controller: No

After that reboot the B1500A and leave the Start EasyEXPERT window on the B1500A screen.

1. Connect GPIB cable between the system controller and the system instruments if it is still not connected.

2. Connect BNC cable between the pulse generator TRIGGER OUT connector and the oscilloscope AUX Trig In connector if it is still not connected.

On the Keysight Connection Expert

On the Desktop EasyEXPERT

3. Turn on the system instruments.

1. If the computer displays the Start EasyEXPERT window, close it first.

2. Launch Keysight Connection Expert (see Figure 3-2).

3. Check the VISA interface ID. It must be GPIB0.

4. Close Keysight Connection Expert.

1. Launch Desktop EasyEXPERT.

2. Open the Execution Mode dialog box and set the execution mode as shown in

Table 3-4. The dialog box can be opened by selecting the Option > Execution

Mode menu on the Start EasyEXPERT window.

3. Click th e Start EasyEXPERT button.

4. Open your workspace or create a new workspace.

5. Display the Application Test tab screen.

6. Open the PLSDIV Setup test definition.

7. Set the DcSwitch field to Yes. Do not set No.

3-8 Keysight B1542A User’s Guide, Edition 10

Performing System Setup and Compensation

GPIB0

VISA interface ID

System Controller

GPIB address

hostname1

4156C (GPIB0::17::INSTR)

GPIB address of instrument

(ex. 4156C)

8. Save the test setup to your preset group (My Favorite Setup).

Table 3-4 Desktop EasyEXPERT Execution Mode

Mode Field name Setting value or description

Offline

Select this mode for using the 4155B, 4155C, 4156B, 4156C, E5260A (or E5262A/E5263A) , or E5270B .

Model Select 4155B, 4155C, 4156B, or 4156C to be

used. Or select B1500A for using the E5260A (or E5262A/E5263A) or E5270B.

Online Select this mode only for using the B1500A.

VISA interface ID VISA interface ID of the computer’s GPIB

interface. It must be GPIB0.

GPIB address Set the GPIB address of the B1500A.

a. Even though the execution mode is Offline, the pulsed IV system soft-

ware can control the DC source monitor.

Starting System Setup

Figure 3-2 Keysight Connection Expert

Keysight B1542A User’s Guide, Edition 10 3-9

Performing System Setup and Compensation System Configuration

System Configuration

The system configuration must be set after completing the system installation or after changing a channel assignment or after changing the interface address of the system components.

Procedure:

1. Open the PLSDIV Setup test setup from your preset group.

2. Set the Action field to System Configuration.

3. Click the Single button at the upper right corner on the EasyEXPERT screen or the Desktop EasyEXPERT screen. The Configuration dialog box is opened.

4. Set and save the system configuration parameters by using the Configuration dialog box. For the setup parameters, see Table 3-3.

LAN Setup for DSO Control Dialog Box

This dialog box is opened by clicking the Option button on the Configuration dialog box, and is used to set the IP address of the DSO/MSO 9000 series or S series oscilloscope. Set the IP address properly and click OK.

Table 3-5 LAN Setup for DSO Control Dialog Box

Field Name Description

IP Address Enter the IP address of the DSO/MSO 9000 series or S

series oscilloscope.

Device Name This field always displays inst0 which must be the

device name of the oscilloscope for the pulsed IV test system.

3-10 Keysight B1542A User’s Guide, Edition 10

SMU CH for Compensation Dialog Box

This dialog box is opened by clicking the SMU for Compensation button on the Configuration dialog box, and is used to specify the SMU used for the Compensation action.

In the default setting, the Compensation action will use the SMU specified by the Drain Bias SMU CH field on the Configuration dialog box. For example, if 2 has been set to this field, the Compensation action uses the SMU2 or the SMU installed in the slot number 2.

However, if you specify a SMU on the SMU CH for Compensation dialog box, see

Table 3-6, the Compensation action will use the SMU you specify, not the Drain

Bias SMU CH channel.

Table 3-6 SMU CH for Compensation

Field Name Description

Force SMU (Slot No.) Channel number (slot number) of the SMU used for

the Kelvin connection Force.

Sense SMU (Slot No.) Enter the channel number (slot number) of the SMU

used for the Kelvin connection Sense.

Performing System Setup and Compensation

System Configuration

If you are using the DC source monitor other than the 4155B/C, you do not need to specify the SMU. However, if you want to use the SMU other than the Drain Bias SMU CH channel, set the same value to the both fields. The Compensation action will use the specified SMU.

If you are using the 4155B/C, specify two SMUs because the 4155B/C does not have the Sense terminal. The Compensation action will use the specified two SMUs for making the Kelvin connection.

Keysight B1542A User’s Guide, Edition 10 3-11

Performing System Setup and Compensation Executing Action

Executing Action

Execute the action as shown below. Before starting the action, confirm that all system components are connected to th e system controller and available on the same GPIB bus and on the same LAN for the DSO/MSO 9000 series or S series oscilloscope.

1. Open the PLSDIV Setup test setup from your preset group.

2. Set the DcSwitch field to Yes. Do not set No.

3. Click the Extended Setup button and set the SWAddress value. SWAddress GPIB address of the switch controller. Integer, 1 to 32.

4. Select the action by using the Action field.

• System Configuration

See “System Configuration” on page 3-10.

• Compensation

See “Compensation Action” on page 3-13.

• Skew Measurement

• Drain Cable Replacement

• Pgu Compensation

See “Pgu Compensation Action” on page 3-13.

5. Click the Single button at the upper right corner of the EasyEXPERT screen or the Desktop EasyEXPERT screen.

6. Follow the pop-up window and dialog box to complete the action. You will get navigation for performing the system setup and completing the

action.

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Performing System Setup and Compensation

Executing Action

Compensation Action

Before starting the Compensation action, connect triaxial cables as follows.

1. Connect a triaxial cable to the Force connector of the SMU specified by the Drain Bias SMU CH field on t he Configurat ion dialog box or the S MU specified by the Force SMU (Slot No.) field on the SMU CH for Compensation dialog box if you set.

2. Connect a triaxial cable to the Sense connector of the SMU specified by the Drain Bias SMU CH field on t he Configurat ion dialog box or the S MU specified by the Sense SMU (Slot No.) field on the SMU CH for Compensation dialog box if you set.

If you are using the 4155B/C, connect the cable to the Force connector of the SMU specified by the Sense SMU (Slot No.) field on the SMU CH for Compensation dialog box.

Pgu Compensation Action

Previously, the Compensation action must be completed successfully. Before starting the Pgu Compensation action, click the Extended Setup button and

set the following parameters. They must be the values you are going to set when performing the pulsed IV measurements actually.

PulseBase PGU output baseline voltage, -3.0 to 3.0 V TransTime Pulse leading/trailing edge transition time, 2 ns to 500 ns MeasTime Measurement timing at the pulse top, -1 to 1

For the setup parameters, see “Parameters” on page 5-34.

Keysight B1542A User’s Guide, Edition 10 3-13

Performing System Setup and Compensation Executing Action

3-14 Keysight B1542A User’s Guide, Edition 10

4 Performing Measurement

Performing Measurement

This chapter describes the measurement examples by using the pulsed IV test system, and consists of the following sections.

• “Theory of Measurement”

• “Before Measurement”

• “Performing System Reset”

• “Pulse Waveform Measurement”

• “Pulsed Id-Vd Measurement”

• “Pulsed Id-Vg Measurement”

• “DC I-V Measurements”

NOTE Preparing Measurement Environment

Complete the installation described in Chapter 2, “Installation.” Complete the system setup and the compensation described in Chapter 3,

“Performing System Setup and Compensation.”

Turn on the instruments. And turn on the system controller if it is used. Launch EasyEXPERT or Desktop EasyEXPERT.

4-2 Keysight B1542A User’s Guide, Edition 10

Theory of Measurement

Sub

DC+RF

Divider

Oscilloscope drain voltage monitor channel

Gate pulse voltage

Drain voltage

Oscilloscope gate voltage monitor channel

Terminator

PGU

SMU

Bias-T

Figure 4-1 shows the pulsed IV measurement circuit diagram.

SMU (source monitor unit) applies DC voltage to the drain terminal through bias-T (bias network). And PGU (pulse generator) applies pulse voltage to the gate terminal through divider. Then the oscilloscope monitors the gate pulse through the divider. Also the oscilloscope monitors the drain pulse through the bias-T by using the another monitor channel.

The 50  terminator must be connected as shown in Figure 4-1 to keep the impedance matching of the instrument’s input/output terminals and to avoid the reflection at the gate terminal.

Figure 4-1 P ulsed IV Measurement Circuit Diagram

Performing Measurement

Theory of Measurement

Simplified measurement circuit is shown in Figure 4-2. Vpgu-out is the PGU output voltage (pulse top value). And VdSet is the SMU

output voltage. By applying VdSet and Vpgu-out to the MOSFET, the oscilloscope’s drain voltage monitor channel will capture the voltage drop caused by the shunt resistor Z (impedance of the drain voltage measurement path). And the drain current Id can be given by the following formula. Where, VdInt is the peak value of the negative pulse.

Id = (VdSet - VdInt) / Z

Keysight B1542A User’s Guide, Edition 10 4-3

Performing Measurement

Shunt resistor, Z

VdSet

VgMon

Vpgu-out

VdInt = VdSet Z Id

PGU

SMU

Sub

Theory of Measurement

The test system repeats this drain current measurement for all of the specified sweep voltage and gets the data to plot on the data display graph.

Figure 4-2 Simplified Measurement Circuit

VgMon, VdInt, and Id values will be the value obtained at the specific timing of the pulse top. It is the data extraction timing shown in Figure 5-9.

Terminal Voltage and Source Output Value

In Figure 4-2, VgMon and VdInt are the device terminal voltage. Vpgu-out and VdSet are the source output values. Moreover the values are not same becaus e of the several elements in the measurement path, shunt resistor , residual resistor , and so on. Therefore, it is required to select which value should be the target voltage before performing the measurement. To select it, use the drain voltage automatic adjustment function and the gate voltage automatic adjustment function in the pulsed IV test definitions.

If the drain voltage automatic adjustment function is ON, VdInt will be close to the target voltage Vd. And if the function is OFF, VdSet will be close to Vd.

If the gate voltage automatic adjustment function is ON, VgMon will be close to the target voltage Vg. And if the function is OFF, Vpgu-out will be close to Vg.

The target voltage Vd is calculated from the Test Parameters VdStart, VdStop, and VdStep in the pulsed IV test definition. And Vg is calculated from VgStart, VgStop, and VgStep.

4-4 Keysight B1542A User’s Guide, Edition 10

Performing Measurement

After adjustmentBefore adjustment

Drain monitor pulse

Device Delay

Gate monitor pulse

Drain monitor pulse

Gate monitor pulse

Before Measurement

Confirm or perform the followings before starting measurement.

1. Performing system reset Perform system reset. See “Performing System Reset” on page 4-6.

2. Deciding device delay time This is needed to set the DeviceDelay value of the Device Parameters on the

pulsed IV test setup screen. Connect the device under test (MOS FET) to the pulsed IV test system as sh own

in “RF Probes” on page 2-4, and measure the delay time between the gate monitor pulse and the drain monitor pulse by using the oscilloscope. Then decide the device delay time shown in Figure 4-3.

3. DcSwitch value on Extended Setup dialog box of pulse d IV test setup Set Yes to use the pulse/dc switch. Do not set No.

4. SWAddress value on Extended Setup dialog box of pulsed IV test setup Set GPIB address of the switch controller.

Figure 4-3 Device Delay Time

Keysight B1542A User’s Guide, Edition 10 4-5

Performing Measurement Performing System Reset

Performing System Reset

This test definition resets the pulsed IV test system. Execute this definition when the test system is in any abnormal condition.

1. Open the PLSDIV Reset test definition on the EasyEXPERT application test environment.

2. Click the Single button at the upper right corner of the EasyEXPERT screen. The system reset is performed.

Figure 4-4 PLSDIV Reset Test Definition

4-6 Keysight B1542A User’s Guide, Edition 10

Pulse Waveform Measurement

Pulse waveform measurement can be performed as follows.

Figure 4-5 PLSDIV Capt Wave Test Definition

Performing Measurement

Pulse Waveform Measurement

1. Open the PLSDIV Capt Wave test definition on the EasyEXPERT applicati on test environment.

2. Set the measurement condition to the Device Parameters, Test Parameters, and Extended Test Parameters. For the description of the entry fields, see “PLSDIV

Capt Wave” on page 5-4.

3. Connect the device under test (MOSFET) as shown i n “RF Pr obes ” on page 2-4.

4. Click the Single button at the upper right corner of the EasyEXPERT screen. Pulse waveform measurement is started.

Figure 4-6 is the measurement result example when DrainMonMode=Voltage,

and Figure 4-7 is the example when DrainMonMode=Current.

Keysight B1542A User’s Guide, Edition 10 4-7

Performing Measurement Pulse Waveform Measurement

Figure 4-6 Voltage Pulse Measurement Example

Figure 4-7 Current Pulse Measurement Example

4-8 Keysight B1542A User’s Guide, Edition 10

Pulsed Id-Vd Measurement

Pulsed Id-Vd measurement can be performed as follows.

Figure 4-8 PLSDIV IdVd Test Definition

Performing Measurement

Pulsed Id-Vd Measurement

1. Open the PLSDIV IdVd or PLSDIV IdVd [2] test definition on the EasyEXPERT application test environment.

2. Set the measurement condition to the Device Parameters, Test Parameters, and Extended Test Parameters. For the description of the entry fields, see “PLSDIV

IdVd, PLSDIV IdVd [2]” on page 5-19.

3. Connect the device under test (MOSFET) as shown i n “RF Pr obes ” on page 2-4.

4. Click the Single button at the upper right corner of the EasyEXPERT screen. Pulsed Id-Vd measurement is started.

Figure 4-9 shows the pulsed Id-Vd measurement result example.

Keysight B1542A User’s Guide, Edition 10 4-9

Performing Measurement Pulsed Id-Vd Measurement

Figure 4-9 Pulsed Id-Vd Measurement Examp le

4-10 Keysight B1542A User’s Guide, Edition 10

Pulsed Id-Vg Measurement

Pulsed Id-Vg measurement can be performed as follows.

Figure 4-10 PLSDIV IdVg Test Definition

Performing Measurement

Pulsed Id-Vg Measurement

1. Open the PLSDIV IdVg or PLSDIV IdVg [2] test definition on the EasyEXPERT application test environment.

2. Set the measurement condition to the Device Parameters, Test Parameters, and Extended Test Parameters. For the description of the entry fields, see “PLSDIV

IdVg, PLSDIV IdVg [2]” on page 5-23.

3. Connect the device under test (MOSFET) as shown i n “RF Pr obes ” on page 2-4.

4. Click the Single button at the upper right corner of the EasyEXPERT screen. Pulsed Id-Vg measurement is started.

Figure 4-11 shows the pulsed Id-Vg measurement result example.

Keysight B1542A User’s Guide, Edition 10 4-11

Performing Measurement Pulsed Id-Vg Measurement

Figure 4-11 Pulsed Id-Vg Measurement Example

4-12 Keysight B1542A User’s Guide, Edition 10

DC I-V Measurements

The PLSDIV system software also provides the test definitions for the DC I-V measurements. The test definitions use SMU and do not use oscilloscope and pulse generator. However, you can perform the measurement as shown in the previous sections.

Table 4-1 li sts the DC I-V test definitions and the instruments supported by them.

Table 4-1 DC I-V Test Definitions

Test Definition Suppo rted Instruments

PLSDIV DC IdVd B1500A

Performing Measurement

DC I-V Measurements

PLSDIV DC IdVg PLSDIV DC IdVd SMU E5260A (or E5262A/E5263A) PLSDIV DC IdVg SMU PLSDIV IV SMU

4155B/C and 4156B/C

E5270B

Keysight B1542A User’s Guide, Edition 10 4-13

Performing Measurement DC I-V Measurements

4-14 Keysight B1542A User’s Guide, Edition 10

5 PLSDIV Test Definitions

PLSDIV Test Definitions

This chapter describes the pulsed IV application test library (PLSDIV test definitions) that can be opened and executed in the EasyEXPERT application test environment. The library contains the test definitions shown in Table 5-1.

Each section in this chapter contains detailed descriptions of the test definition. Each entry:

1. Gives one definition

2. Shows the measurement result example

3. Describes the setup paramet ers

4. Describes the test output parameters

5. Explains any additional information The test definitions are shown in the alphabetical order.

NOTE This chapter uses the following conventions.

<system drive>:\Program Files

NOTE The PLSDIV test definitions are stored in the following folder.

<program folder>\Agilent\PLSDIV\TestDefinitions To use the PLSDIV test definitions, import the definitions to your workspace. The

test definitions can be imported by the following procedure.

1. Display the Application Test tab screen.

2. Click the Library button, and select Import Test Definition... to open the Test Definition Import dialog box.

3. Import the definitions by using the Test Definition Import dialog box.

Note that the PLSDIV test definitions need the pulsed IV .exe library (Plsdiv commands, PLSDIV TIS) described in Chapter 6, “PLSDIV TIS Commands.”

5-2 Keysight B1542A User’s Guide, Edition 10

PLSDIV Test Definitions

Table 5-1 Summary of PLSDIV Test Definitions

Test Definition Description

PLSDIV Setup This test definition must be executed after installing the pulsed IV test

system, changing channel assignment or GPIB address, or replacing

oscilloscope, cable, or bias-T.

PLSDIV Reset Initializes the pulsed IV test system. PLSDIV Capt Wave Controls SMU to apply the drain voltage, controls PGU to apply the gate

voltage pulse, controls the oscilloscope to monitor the gate voltage pulse

waveform and the drain voltage pulse waveform, calculates the drain current

pulse waveform if the drain monitor mode is current, and displays the gate

voltage pulse waveform and the drain voltage or current pulse waveform.

PLSDIV IdVd, PLSDIV IdVd [2]

PLSDIV IdVg, PLSDIV IdVg [2]

PLSDIV DC IdVd, PLSDIV DC IdVd SMU

PLSDIV DC IdVg, PLSDIV DC IdVg SMU

PLSDIV IV SMU For the DC IV sweep measurement. Controls SMUs to apply the primary and

Controls SMU (source monitor unit) to apply the drain voltage, controls PGU

(pulse generator) to apply the gate voltage pulse, controls the oscilloscope to

monitor the gate voltage and the drain voltage, calculates the drain current,

and displays the Id-Vd characteristics.

Controls SMU to apply the drain voltage, controls PGU to apply the gate

voltage pulse, controls the oscilloscope to monitor the gate voltage and the

drain voltage, calculates the drain current, and displays the Id-Vg

characteristics.

For the DC Id-Vd measurement. Controls SMUs to apply the drain voltage

and the gate voltage, measures the drain current, and displays the Id-Vd

characteristics.

For the DC Id-Vg measurement. Controls SMUs to apply the drain voltage

and the gate voltage and measure the drain current, and displays the Id-Vg

characteristics.

secondary sweep voltage, measures current, and displays the I-V

characteristics.

For the DC I-V test definitions and the supported instruments, see Figure 4-1 on page 4-13.

Keysight B1542A User’s Guide, Edition 10 5-3

PLSDIV Test Definitions

Drain monitor pulse

Gate monitor pulse

PLSDIV Capt Wave

This test definition controls SMU (source monitor unit) to apply the drain voltage, controls PGU (pulse generator) to apply the gate voltage pulse, controls the oscilloscope to monitor the gate voltage pulse waveform and the drain voltage pulse waveform, calculates the drain current pulse waveform if the drain monitor mode is current, and displays the gate voltage pulse waveform and the drain voltage or current pulse waveform.

Figure 5-1 Pulse Waveform Measurement Re sult Example

Device Parameters The following parameters are available to set the test condition.

Polarity Polarity of source output. Nch (applies the specified value) or

Pch (applies the negative specified value). See “Parameters” on

page 5-34.

Lg Gate length, in m.  1 nm, 4 digits or 1 nm resolution. Wg Gate width, in m.  1 nm, 4 digits or 1 nm resolution. Temp Temperature, in degree. 4 digits or 0.001 degree resolution. IdMax Maximum drain current measurement range, in A. 0 to 80 mA,

4 digits or 1 A resolution.

DeviceDelay Delay time caused by device under test, in s. -1 s to 1 s,

4 digits or 100 ps resolution. See “Parameters” on page 5-34.

5-4 Keysight B1542A User’s Guide, Edition 10

PLSDIV Test Definitions

Test Parameters The following parameters are available to set the source output.

PulseWidth Pulse width of PGU output pulse. 10 ns to 1 s, 4 digits or 1 ns

resolution. See “Parameters” on page 5-34.

Vg Voltag e applied to the g ate terminal. PGU output. -4.5 V to

4.5 V, 4 digits or 10 mV resolution.

PulseBase PGU output baseline voltage. -3.0 to 3.0 V, 4 digits or 10 mV

resolution. See “Parameters” on page 5-34. Pulse amplitude must be > 55 mV and < 4.5 V. To use the gate voltage automatic adjustment function, set the pulse amplitude to < 4.0 V.

Vd Voltage applied to the drain terminal. SMU output. -10 V to

10 V, 5 digits or 1 mV resolution.

PLSDIV Capt Wave

Extended Test Parameters

The following parameters are available to set the test condition. For more details, see “Parameters” on page 5-34.

TransTime Pulse leading/trailing edge transition time, in s. 2 ns to 500 ns, 3

digits or 1 ns resolution. For the 81101A, minimum value is 5 ns. For the 81150A, minimum value is 2.5 ns when the following

conditions are satisfied, or 7.5 ns.

• Pulse amplitude is 2.5 V or less.

• Both pulse base and top are within 2.5 V.

MeasTime Measurement timing at the pulse top. 0 to 1, 3 digits or 0.01

resolution.

SmplNum Oscilloscope sampling number. 16 to 262144, 6 digits or 1 step. SmthNum Oscilloscope smoothing number. 3 to 4001, 4 digits or 1 step. SmthStat Status of the oscilloscope smoothing. Enable or Disable. AvgNum Oscilloscope averaging number. 1 to 4095, 4 digits or 1 step. VdAdjust Status of the drain voltage automatic adjustment. Enable or

Disable.

VgAdjust Status of the gate voltage automatic adjustment. Enable or

Disable.

ConnectChk Status of the connection check at initialization. Enable or

Disable.

Keysight B1542A User’s Guide, Edition 10 5-5

PLSDIV Test Definitions PLSDIV Capt Wave

GateZero Status of the gate monitor channel zero measurement at

initialization. Enable or Disable.

RangingMode Measurement ranging mode. Auto or Fixed. DcSwitch Pulse/dc switch units. Yes (exists, pulsed IV measurement

connection will be automatically made) or No (none).

SWAddress GPIB address of the switch controller. Integer, 1 to 32. DrainMonMode Drain monitor mode. Current or Voltage.

Test Output The following output parameters are displayed after the test.

Time Oscilloscope time data, in s. GateMon Oscilloscope gate voltage waveform data, in V. DrainMon Oscilloscope drain current waveform, in A, if

DrainMonMode=Current.

Drain voltage waveform data, in V, if DrainMonMode=Voltage. The drain voltage waveform data will be the data after compensation. The drain current waveform data will be the data given by converting the drain

voltage waveform data.

5-6 Keysight B1542A User’s Guide, Edition 10

PLSDIV Test Definitions

PLSDIV DC IdVd

This test definition controls SMUs to apply the drain voltage and the gate voltage, measures the drain current, and displays the Id-Vd characteristics.

Device Parameters The following parameters are available to set the test condition.

Polarity Polarity of source output. Nch (applies the specified value) or

Pch (applies the negative specified value).

4 digits or 1 A resolution.

Test Parameters The following parameters are available to set the source output.

CableR Residual resistance of the gate measurement path f rom SMU to

terminator.  0 , 4 digits or 1 m resolution.

PLSDIV DC IdVd

TermR Resistance of terminator.  1 m, 4 digits or 1 m resolution.

TermR=No applies 1E+30 .

Gate SMU connected to the gate terminal. VgStart Secondary sweep start voltage for the gate terminal. -10 to 10

V, 4 digits or 10 mV resolution.

VgStop Secondary sweep stop voltage for the gate terminal. -10 to 10

V, 4 digits or 10 mV resolution.

VgStep Secondary sweep step voltage for the gate terminal.-10 to 10 V,

5 digits or 1 mV resolution.

Drain SMU connected to the drain terminal. VdStart Primary sweep start voltage for the d rain terminal. -10 to 10 V,

4 digits or 10 mV resolution.

VdStop Primary sweep stop voltage for the drain terminal. -10 to 10 V,

4 digits or 10 mV resolution.

VdStep Primary sweep step voltage for the drain terminal. -10 to 10 V,

5 digits or 1 mV resolution.

Keysight B1542A User’s Guide, Edition 10 5-7

PLSDIV Test Definitions PLSDIV DC IdVd

• VdStart, VdStop, VdStep

The parameters set the primary sweep source used to apply the drain voltage. The number of sweep points is given by the following formula. Then ignore the numbers after the decimal point. If VdStep=0, the measurement voltage is VdStart only.

Number of sweep points = (VdStop-VdStart) / VdStep + 1

• VgStart, VgStop, VgStep

The parameters set the secondary sweep source used to apply the gate voltage. The number of sweep points is given by the following formula. Then ignore the numbers after the decimal point. If VgStep=0, the measurement voltage is VgStart only.

Number of sweep points = (VgStop-VgStart) / VgStep + 1

• Gate voltage

T o apply the specified voltage (Vg) to the gate terminal, the SMU output voltage (VgSet) will be set to the following value.

VgSet = Vg * (TermR+CableR) / TermR

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PLSDIV Test Definitions

PLSDIV DC IdVd

Extended Test Parameters

Test Output The following output parameters are displayed after the test.

The following parameters are available to set the test condition. IgLimit Gate current compliance, in A. 1 nA to 100 mA, 3 digits or 1 nA

resolution. Set the value that covers current to the terminator. For example, the current is 100 mA for TermR=50  with Vg=5 V.

IntegTime Integration time. SHORT, MEDIUM, or LONG. HoldTime Hold time, in s. 0 to 655.35. 5 digits or 10 ms resolution. DelayTime Delay time, in s. 0 to 655.35. 5 digits or 100 s resolution. DcSwitch Pulse/dc switch units. Yes (exists, DC IV measurement

connection will be automatically made) or No (none).

SWAddress GPIB address of the switch controller. Integer, 1 to 32.

VgSet Gate voltage, in V. SMU output value. Vg Gate voltage, in V. Target value at the gate terminal. Vdrain Drain voltage, in V. SMU output value. Id Drain current, in A. IdPerWg Drain current per unit gate width, in A/m. IdPerWg = Id / Wg

Keysight B1542A User’s Guide, Edition 10 5-9

PLSDIV Test Definitions PLSDIV DC IdVd SMU

PLSDIV DC IdVd SMU

This test definition controls SMUs to apply the drain voltage and the gate voltage, measures the drain current, and displays the Id-Vd characteristics.

Device Parameters The following parameters are available to set the test condition.

Polarity Polarity of source output. Nch (applies the specified value) or

Pch (applies the negative specified value).

4 digits or 1 A resolution.

Test Parameters The following parameters are available to set the source output.

CableR Residual resistance of the gate measurement path f rom SMU to

terminator.  0 , 4 digits or 1 m resolution. TermR Resistance of terminator.  1 m, 4 digits or 1 m resolution.

TermR=No applies 1E+30 . Gate Channel number of the SMU connected to the gate terminal.

Slot1 to Slot8. Maximum channel number depends on the

configuration of DC source monitor. VgStart Secondary sweep start voltage for the gate terminal. -10 to 10

V, 4 digits or 10 mV resolution. VgStop Secondary sweep stop voltage for the gate terminal. -10 to 10

V, 4 digits or 10 mV resolution. VgStep Secondary sweep step voltage for the gate terminal.-10 to 10 V,

5 digits or 1 mV resolution. Drain Channel number of the SMU connected to the drain terminal.

Slot1 to Slot8. Maximum channel number depends on the

configuration of DC source monitor. VdStart Primary sweep start voltage for the d rain terminal. -10 to 10 V,

4 digits or 10 mV resolution.

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PLSDIV Test Definitions

PLSDIV DC IdVd SMU

VdStop Primary sweep stop voltage for the drain terminal. -10 to 10 V,

4 digits or 10 mV resolution.

VdStep Primary sweep step voltage for the drain terminal. -10 to 10 V,

5 digits or 1 mV resolution.

• VdStart, VdStop, VdStep The parameters set the primary sweep source used to apply the drain voltage.

The number of sweep points is given by the following formula. Then ignore the numbers after the decimal point. If VdStep=0, the measurement voltage is VdStart only.

Number of sweep points = (VdStop-VdStart) / VdStep + 1

• VgStart, VgStop, VgStep The parameters set the secondary sweep source used to apply the gate voltage.

The number of sweep points is given by the following formula. Then ignore the numbers after the decimal point. If VgStep=0, the measurement voltage is VgStart only.

Number of sweep points = (VgStop-VgStart) / VgStep + 1

• Gate voltage

Extended Test Parameters

T o apply the specified voltage (Vg) to the gate terminal, the SMU output voltage (VgSet) will be set to the following value.

VgSet = Vg * (TermR+CableR) / TermR

The following parameters are available to set the test condition. IgLimit Gate current compliance, in A. 1 nA to 100 mA, 3 digits or 1 nA

resolution. Set the value that covers current to the terminator. For example, the current is 100 mA for TermR=50  with Vg=5 V.

Ranging Current measurement ranging mode. Auto, LimitedAuto, or

Fixed.

Irange Current measurement range. 10 pA to 100 mA. 6 digits or 10

pA resolution. Available measurement range depends on the type of SMU.

ADCType Only for the E5260/E5270 series. Type of A/D converter.

HighSpeed or HighResolution

IntegMode Only for the E5260/E5270 series. Integration mode. Auto,

Manual, or PLC.

Keysight B1542A User’s Guide, Edition 10 5-11

PLSDIV Test Definitions PLSDIV DC IdVd SMU

IntegNum For E5260/E5270, this parameter is the coefficient used to

define the integration time or the number of averaging samples for the current measurement. Integer. See Table 5-2.

For 4155/4156, this parameter is the number of averaging samples if this value is positive, or the NPLC value if this value is negative . Integer, -1023 to 1023. IntegNum=-1023 to -101 give the same result as IntegNum= -100. The NPLC means the number of power line cycles for the current measurement.

HoldTime Hold time, in s. 0 to 655.35. 5 digits or 10 ms resolution. DelayTime Delay time, in s. 0 to 655.35. 5 digits or 100 s resolution. InstType Type of DC source monitor. E526x, E527x, or FLEX415x.

E526x: for Keysight E5260A E527x: for Keysight E5270B FLEX415x: for Keysight 4155/4156

InstAddress GPIB address of the DC source monitor. Integer, 1 to 32. DcSwitch Pulse/dc switch units. Yes (exists, DC IV measurement

connection will be automatically made) or No (none).

SWAddress GPIB address of the switch controller. Integer, 1 to 32.

Test Output The following output parameters are displayed after the test.

5-12 Keysight B1542A User’s Guide, Edition 10

PLSDIV Test Definitions

PLSDIV DC IdVg

This test definition controls SMUs to apply the drain voltage and the gate voltage, measures the drain current, and displays the Id-Vg characteristics.

Device Parameters The following parameters are available to set the test condition.

Polarity Polarity of source output. Nch (applies the specified value) or

Pch (applies the negative specified value).

4 digits or 1 A resolution.

Test Parameters The following parameters are available to set the source output.

CableR Residual resistance of the gate measurement path f rom SMU to

terminator.  0 , 4 digits or 1 m resolution.

PLSDIV DC IdVg

TermR Resistance of terminator.  1 m, 4 digits or 1 m resolution.

TermR=No applies 1E+30 .

Gate SMU connected to the gate terminal. VgStart Primary sweep start voltage for the gate terminal. -10 to 10 V,

4 digits or 10 mV resolution.

VgStop Primary sweep stop voltage for the gate terminal. -10 to 10 V,

4 digits or 10 mV resolution.

VgStep Primary sweep step voltage for the gate terminal. -10 to 10 V,

5 digits or 1 mV resolution.

Drain SMU connected to the drain terminal. VdStart Secondary sweep start voltage for the drain terminal. -10 to 10

V, 4 digits or 10 mV resolution.

VdStop Secondary sweep stop voltage for the drain terminal. -10 to 10

V, 4 digits or 10 mV resolution.

VdStep Secondary sweep step voltage for the drain terminal. -10 to 10

V, 5 digits or 1 mV resoluti on.

Keysight B1542A User’s Guide, Edition 10 5-13

PLSDIV Test Definitions PLSDIV DC IdVg

• VgStart, VgStop, VgStep The parameters set the primary sweep source used to apply the gate voltage. The

number of sweep points is given by the following formula. Then ignore the numbers after the decimal point. If VgStep=0, the measurement voltage is VgStart only.

Number of sweep points = (VgStop-VgStart) / VgStep + 1

• VdStart, VdStop, VdStep The parameters set the secondary sweep source used to apply the drain voltage.

The number of sweep points is given by the following formula. Then ignore the numbers after the decimal point. If VdStep=0, the measurement voltage is VdStart only.

Number of sweep points = (VdStop-VdStart) / VdStep + 1

• Gate voltage T o apply the specified voltage (Vg) to the gate terminal, the SMU output voltage

(VgSet) will be set to the following value. VgSet = Vg * (TermR+CableR) / TermR

5-14 Keysight B1542A User’s Guide, Edition 10

PLSDIV Test Definitions

PLSDIV DC IdVg

Extended Test Parameters

Test Output The following output parameters are displayed after the test.

The following parameters are available to set the test condition. IgLimit Gate current compliance, in A. 1 nA to 100 mA, 3 digits or 1 nA

resolution. Set the value that covers current to the terminator. For example, the current is 100 mA for TermR=50  with Vg=5 V.

connection will be automatically made) or No (none).

SWAddress GPIB address of the switch controller. Integer, 1 to 32.

VgSet Gate voltage, in V. SMU output value. Vg Target gate voltage, in V. Vdrain Drain voltage, in V. SMU output value. Id Drain current, in A. IdPerWg Drain current per unit gate width, in A/m. IdPerWg = Id / Wg

Keysight B1542A User’s Guide, Edition 10 5-15

PLSDIV Test Definitions PLSDIV DC IdVg SMU

PLSDIV DC IdVg SMU

This test definition controls SMUs to apply the drain voltage and the gate voltage, measures the drain current, and displays the Id-Vg characteristics.

Device Parameters The following parameters are available to set the test condition.

Polarity Polarity of source output. Nch (applies the specified value) or

Pch (applies the negative specified value).

4 digits or 1 A resolution.

Test Parameters The following parameters are available to set the source output.

CableR Residual resistance of the gate measurement path f rom SMU to

terminator.  0 , 4 digits or 1 m resolution.

TermR Resistance of terminator.  1 m, 4 digits or 1 m resolution.

TermR=No applies 1E+30 .

Gate Channel number of the SMU connected to the gate terminal.

Slot1 to Slot8. Maximum channel number depends on the configuration of DC source monitor.

VgStart Primary sweep start voltage for the gate terminal. -10 to 10 V,

4 digits or 10 mV resolution.

VgStop Primary sweep stop voltage for the gate terminal. -10 to 10 V,

4 digits or 10 mV resolution.

VgStep Primary sweep step voltage for the gate terminal. -10 to 10 V,

5 digits or 1 mV resolution.

Drain Channel number of the SMU connected to the drain terminal.

Slot1 to Slot8. Maximum channel number depends on the configuration of DC source monitor.

VdStart Secondary sweep start voltage for the drain terminal. -10 to 10

V, 4 digits or 10 mV resolution.

5-16 Keysight B1542A User’s Guide, Edition 10

PLSDIV Test Definitions

PLSDIV DC IdVg SMU

VdStop Secondary sweep stop voltage for the drain terminal. -10 to 10

V, 4 digits or 10 mV resolution.

VdStep Secondary sweep step voltage for the drain terminal. -10 to 10

V, 5 digits or 1 mV resoluti on.

• VgStart, VgStop, VgStep The parameters set the primary sweep source us ed to ap ply the gate voltage. The

number of sweep points is given by the following formula. Then ignore the numbers after the decimal point. If VgStep=0, the measurement voltage is VgStart only.

Number of sweep points = (VgStop-VgStart) / VgStep + 1

• VdStart, VdStop, VdStep The parameters set the secondary sweep source used to apply the drain voltage.

The number of sweep points is given by the following formula. Then ignore the numbers after the decimal point. If VdStep=0, the measurement voltage is VdStart only.

Number of sweep points = (VdStop-VdStart) / VdStep + 1

• Gate voltage

Extended Test Parameters

T o apply the specified voltage (Vg) to the gate terminal, the SMU output voltage (VgSet) will be set to the following value.

VgSet = Vg * (TermR+CableR) / TermR

The following parameters are available to set the test condition. IgLimit Gate current compliance, in A. 1 nA to 100 mA, 3 digits or 1 nA

resolution. Set the value that covers current to the terminator. For example, the current is 100 mA for TermR=50  with Vg=5 V.

Ranging Current measurement ranging mode. Auto, LimitedAuto, or

Fixed.

Irange Current measurement range. 10 pA to 100 mA. 6 digits or 10

pA resolution. Available measurement range depends on the type of SMU.

ADCType Only for the E5260/E5270 series. Type of A/D converter.

HighSpeed or HighResolution

IntegMode Only for the E5260/E5270 series. Integration mode. Auto,

Manual, or PLC.

Keysight B1542A User’s Guide, Edition 10 5-17

PLSDIV Test Definitions PLSDIV DC IdVg SMU

IntegNum For E5260/E5270, this parameter is the coefficient used to

define the integration time or the number of averaging samples for the current measurement. Integer. See Table 5-2.

E526x: for Keysight E5260A E527x: for Keysight E5270B FLEX415x: for Keysight 4155/4156

InstAddress GPIB address of the DC source monitor. Integer, 1 to 32. DcSwitch Pulse/dc switch units. Yes (exists, DC IV measurement

connection will be automatically made) or No (none).

SWAddress GPIB address of the switch controller. Integer, 1 to 32.

Test Output The following output parameters are displayed after the test.

5-18 Keysight B1542A User’s Guide, Edition 10

PLSDIV IdVd, PLSDIV IdVd [2]

VgStop

VgStart+VgStep

VgStart

Difference between these test definitions is data display. PLSDIV IdVd updates the graph every sweep point. And PLSDIV IdVd [2] updates the graph after the pulsed IV measurement. So PLSDIV IdVd [2] test speed is faster than PLSDIV IdVd.

Figure 5-2 P ulsed IV Id-Vd Measurement Result Example

PLSDIV Test Definitions

PLSDIV IdVd, PLSDIV IdVd [2]

Device Parameters The following parameters are available to set the test condition.

Polarity Polarity of source output. Nch (applies the specified value) or

Pch (applies the negative specified value). See “Parameters” on

page 5-34.

DeviceDelay Delay time caused by device under test, in s. -1 s to 1 s,

4 digits or 1 A resolution.

4 digits or 100 ps resolution. See “Parameters” on page 5-34.

Keysight B1542A User’s Guide, Edition 10 5-19

PLSDIV Test Definitions PLSDIV IdVd, PLSDIV IdVd [2]

Test Parameters The following parameters are available to set the source output.

PulseWidth Pulse width of PGU output pulse. 10 ns to 1 s, 4 digits or 1 ns

resolution. See “Parameters” on page 5-34.

VgStart Secondary sweep start voltage for the gate terminal.

PGU output. -4.5 V to 4.5 V, 4 digits or 10 mV resolution.

VgStop Secondary sweep stop voltage for the gate terminal.

PGU output. -4.5 V to 4.5 V, 4 digits or 10 mV resolution.

VgStep Secondary sweep step voltage for the gate terminal.

PGU output. 10 mV to 4.5 V, 4 digits or 10 mV resol ution.

PulseBase PGU output baseline voltage. -3.0 to 3.0 V, 4 digits or 10 mV

resolution. See “Parameters” on page 5-34.

VdStart Primary sw eep start voltage for the drain terminal. SMU output.

-10 V to 10 V, 5 digits or 1 mV resolution.

VdStop Primary sweep stop volt age for the drain term inal. SMU out put.

-10 V to 10 V, 5 digits or 1 mV resolution.

VdStep Primary sweep step voltage for the drain terminal. SMU output.

-10 V to 10 V, 5 digits or 1 mV resolution.

• VdStart, VdStop, VdStep The parameters set the primary sweep source used to apply the drain voltage.

The number of sweep points is given by the following formula. Then ignore the numbers after the decimal point. If VdStep=0, the measurement voltage is VdStart only.

Number of sweep points = (VdStop-VdStart) / VdStep + 1

• VgStart, VgStop, VgStep The parameters set the secondary sweep source used to apply the gate voltage.

The number of sweep points is given by the following formula. Then ignore the numbers after the decimal point. If VgStep=0, the measurement voltage is VgStart only.

Number of sweep points = (VgStop-VgStart) / VgStep + 1 Pulse amplitude must be > 55 mV and < 4.5 V. So |VgStart - PulseBase| and

|VgStop - PulseBase| must be > 55 mV and < 4.5 V. T o use the gate voltage automatic adjustment function, set the pulse amplitude to

< 4.0 V.

5-20 Keysight B1542A User’s Guide, Edition 10

PLSDIV Test Definitions

PLSDIV IdVd, PLSDIV IdVd [2]

Extended Test Parameters

The following parameters are available to set the test condition. For more details, see “Parameters” on page 5-34.

TransTime Pulse leading/trailing edge transition time, in s. 2 ns to 500 ns, 3

digits or 1 ns resolution. For the 81101A, minimum value is 5 ns. For the 81150A, minimum value is 2.5 ns when the following

conditions are satisfied, or 7.5 ns.

• Pulse amplitude is 2.5 V or less.

• Both pulse base and top are within 2.5 V.

MeasTime Measurement timing at the pulse top. 0 to 1, 3 digits or 0.01

resolution.

Disable.

VgAdjust Status of the gate voltage automatic adjustment. Enable or

Disable.

RangingMode Measurement ranging mode. Auto or Fixed. ConnectChk Status of the connection check at initialization. Enable or

Disable.

GateZero Status of the gate monitor channel zero measurement at

initialization. Enable or Disable.

DcSwitch Pulse/dc switch units. Yes (exists, pulsed IV measurement

connection will be automatically made) or No (none).

SWAddress GPIB address of the switch controller. Integer, 1 to 32.

Keysight B1542A User’s Guide, Edition 10 5-21

PLSDIV Test Definitions

Shunt resistor, Z

VdSet

VgMon

Vpgu-out

VdInt = VdSet Z Id

PGU

SMU

Sub

PLSDIV IdVd, PLSDIV IdVd [2]

Test Output The following output parameters are displayed after the test.

Idrain Drain current Id, in A. Vdrain Target drain voltage Vd, in V. VdSet Drain voltage, in V. SMU output value. VdInt Drain voltage, in V. Oscilloscope monitor value. VdConv Convergence result of the drain voltage automatic adjustment. Vgate Target gate voltage Vg, in V. VgMon Gate voltage, in V. Oscilloscope monitor value. VgConv Convergence result of the gate voltage automatic adjustment. IdPerWg Drain current per unit gate width, in A/m.

IdPerWg = Id / Wg

VgMon, VdInt, and Id values will be the value obtained at the data extraction timing on the pulse top. See Figure 5-9.

VdConv and VgConv returns 0 (convergence condition is satisfied) or -1 (not satisfied). If the automatic adjustment is OFF, 0 is returned.

If the drain voltage automatic adjustment function is ON, VdInt will be close to Vd. And if the function is OFF, VdSet will be close to Vd.

If the gate voltage automatic adjustment function is ON, VgMon will be close to Vg. And if the function is OFF, Vpgu-out will be close to Vg.

Figure 5-3 Test Output Parameters

5-22 Keysight B1542A User’s Guide, Edition 10

PLSDIV IdVg, PLSDIV IdVg [2]

VdStop

VdStart+VgStep

VdStart

Difference between these test definitions is data display. PLSDIV IdVg updates the graph every sweep point. And PLSDIV IdVg [2] updates the graph after the pulsed IV measurement. So PLSDIV IdVg [2] test speed is faster than PLSDIV IdVg.

Figure 5-4 Pulsed IV Id-Vg Measurement Result Example

PLSDIV Test Definitions

PLSDIV IdVg, PLSDIV IdVg [2]

Device Parameters The following parameters are available to set the test condition.

Polarity Polarity of source output. Nch (applies the specified value) or

Pch (applies the negative specified value). See “Parameters” on

page 5-34.

DeviceDelay Delay time caused by device under test, in s. -1 s to 1 s,

Keysight B1542A User’s Guide, Edition 10 5-23

4 digits or 1 A resolution.

4 digits or 100 ps resolution. See “Parameters” on page 5-34.

PLSDIV Test Definitions PLSDIV IdVg, PLSDIV IdVg [2]

Test Parameters The following parameters are available to set the source output.

PulseWidth Pulse width of PGU output pulse. 10 ns to 1 s, 4 digits or 1 ns

resolution. See “Parameters” on page 5-34.

VgStart Primary sweep start voltage for the gate terminal. PGU output.

-4.5 V to 4.5 V, 4 digits or 10 mV resolution.

VgStop Primary sweep stop voltage for the gate terminal. PGU output.

-4.5 V to 4.5 V, 4 digits or 10 mV resolution.

VgStep Primary sweep step voltage for the gate terminal. PGU output.

10 mV to 4.5 V, 4 digits or 10 mV resolution.

PulseBase PGU output baseline voltage. -3.0 to 3.0 V, 4 digits or 10 mV

resolution. See “Parameters” on page 5-34.

VdStart Secondary sweep start voltage for the drain terminal.

SMU output. -10 V to 10 V, 5 digits or 1 mV resolution.

VdStop Secondary sweep stop voltage for the drain terminal.

SMU output. -10 V to 10 V, 5 digits or 1 mV resolution.

VdStep Secondary sweep step voltage for the drain terminal.

SMU output. -10 V to 10 V, 5 digits or 1 mV resolution.

• VgStart, VgStop, VgStep The parameters set the primary sweep source used to apply the gate voltage. The

number of sweep points is given by the following formula. Then ignore the numbers after the decimal point. If VgStep=0, the measurement voltage is VgStart only.

Number of sweep points = (VgStop-VgStart) / VgStep + 1 Pulse amplitude must be > 55 mV and < 4.5 V. So |VgStart - PulseBase| and

|VgStop - PulseBase| must be > 55 mV and < 4.5 V. T o use the gate voltage automatic adjustment function, set the pulse amplitude to

< 4.0 V.

• VdStart, VdStop, VdStep The parameters set the secondary sweep source used to apply the drain voltage.

The number of sweep points is given by the following formula. Then ignore the numbers after the decimal point. If VdStep=0, the measurement voltage is VdStart only.

Number of sweep points = (VdStop-VdStart) / VdStep + 1

5-24 Keysight B1542A User’s Guide, Edition 10

PLSDIV Test Definitions

PLSDIV IdVg, PLSDIV IdVg [2]

Extended Test Parameters

The following parameters are available to set the test condition. For more details, see “Parameters” on page 5-34.

TransTime Pulse leading/trailing edge transition time, in s. 2 ns to 500 ns, 3

digits or 1 ns resolution. For the 81101A, minimum value is 5 ns. For the 81150A, minimum value is 2.5 ns when the following

conditions are satisfied, or 7.5 ns.

• Pulse amplitude is 2.5 V or less.

• Both pulse base and top are within 2.5 V.

MeasTime Measurement timing at the pulse top. 0 to 1, 3 digits or 0.01

resolution.

Disable.

VgAdjust Status of the gate voltage automatic adjustment. Enable or

Disable.

RangingMode Measurement ranging mode. Auto or Fixed. ConnectChk Status of the connection check at initialization. Enable or

Disable.

GateZero Status of the gate monitor channel zero measurement at

initialization. Enable or Disable.

DcSwitch Pulse/dc switch units. Yes (exists, pulsed IV measurement

connection will be automatically made) or No (none).

SWAddress GPIB address of the switch controller. Integer, 1 to 32.

Keysight B1542A User’s Guide, Edition 10 5-25

PLSDIV Test Definitions

Shunt resistor, Z

VdSet

VgMon

Vpgu-out

VdInt = VdSet Z Id

PGU

SMU

Sub

PLSDIV IdVg, PLSDIV IdVg [2]

Test Output The following output parameters are displayed after the test.

Vgate Target gate voltage Vg, in V. Idrain Drain current Id, in A. VgMon Gate voltage, in V. Oscilloscope monitor value. VgConv Convergence result of the gate voltage automatic adjustment. Vdrain Target drain voltage Vd, in V. VdSet Drain voltage, in V. SMU output value. VdInt Drain voltage, in V. Oscilloscope monitor value. VdConv Convergence result of the drain voltage automatic adjustment. IdPerWg Drain current per unit gate width, in A/m.

IdPerWg = Id / Wg

VgMon, VdInt, and Id values will be the value obtained at the data extraction timing on the pulse top. See Figure 5-9.

VdConv and VgConv returns 0 (convergence condition is satisfied) or -1 (not satisfied). If the automatic adjustment is OFF, 0 is returned.

If the drain voltage automatic adjustment function is ON, VdInt will be close to Vd. And if the function is OFF, VdSet will be close to Vd.

If the gate voltage automatic adjustment function is ON, VgMon will be close to Vg. And if the function is OFF, Vpgu-out will be close to Vg.

Figure 5-5 Test Output Parameters

5-26 Keysight B1542A User’s Guide, Edition 10

PLSDIV Test Definitions

PLSDIV IV SMU

This test definition controls SMUs to apply the primary and secondary sweep voltage, measures current, and displays the I-V characteristics.

Device Parameters The following parameter is available to set the test condition.

IDispRange Maximum value of the Y1 axis, in A. 1 mA to 100 mA, 6 digits

or 1 fA resolution.

Test Parameters The following parameters are available to set the source output.

SMU1 Channel number of the SMU used for the primary sweep

source. Slot1 to Slot8. Maximum channel number depends on the configuration of DC source monitor.

StartV1 Primary sweep start voltage. -100 to 100 V, 6 digits or 1 V

resolution.

StopV1 Primary sweep stop vo ltage. -100 to 100 V, 6 digits or 1 V

resolution.

PLSDIV IV SMU

StepV1 Primary sweep step voltage. -100 to 100 V, 6 digits or 1 V

resolution.

Comp1 Primary sweep current compliance, in A. -100 mA to 100 mA,

6 digits or 1 fA resolution.

• StartV1, StopV1, StepV1 The parameters set the primary sweep source used to apply the drain voltage.

The number of sweep points is given by the following formula. Then ignore the numbers after the decimal point. If StepV1=0, the measurement voltage is StartV1 only.

Number of sweep points = (StopV1-StartV1) / StepV1 + 1

• StartV2, StopV2, StepV2 The parameters set the secondary sweep source used to apply the gate voltage.

The number of sweep points is given by the following formula. Then ignore the numbers after the decimal point. If StepV2=0, the measurement voltage is StartV2 only.

Number of sweep points = (StopV2-StartV2) / StepV2 + 1

Keysight B1542A User’s Guide, Edition 10 5-27

PLSDIV Test Definitions PLSDIV IV SMU

SMU2 Channel number of the SMU used for the secondary sweep

source. Slot1 to Slot8. Maximum channel number depends on the configuration of DC source monitor.

StartV2 Secondary sweep start voltage. -100 to 100 V, 6 digits or 1 V

resolution.

StopV2 Secondary sweep stop voltage. -100 to 100 V, 6 digits or 1 V

resolution.

StepV2 Secondary sweep step voltage. -100 to 100 V, 6 digits or 1 V

resolution.

Comp2 Secondary sweep current compliance, in A. -100 mA to 100

mA, 6 digits or 1 fA resolution.

Hold Hold time, in s. 0 to 10. 4 digits or 1 ms resolution. Delay Delay time, in s. 0 to 1. 5 digits or 1 ms resolution. MeasCh Channel number of the SMU used f or the curr ent measurement.

Slot1 to Slot8. Maximum channel number depends on the configuration of DC source monitor.

RangeMode Current measurement ranging mode. Auto, LimitedAuto, or

Fixed.

MeasRange Current measurement range. 10 pA to 100 mA. 6 digits or 10

pA resolution. Available measurement range depends on the type of SMU.

ADCType Only for the E5260/E5270 series. Type of A/D converter.

HighSpeed or HighResolution

IntegMode Only for the E5260/E5270 series. Integration mode. Auto,

Manual, or PLC.

IntegNum For E5260/E5270, this parameter is the coefficient used to

define the integration time or the number of averaging samples for the current measurement. Integer. See Table 5-2.

5-28 Keysight B1542A User’s Guide, Edition 10

PLSDIV Test Definitions

PLSDIV IV SMU

Extended Test Parameters

Test Output The following output parameters are displayed after the test.

The following parameters are available to set the test condition. SMUType Type of DC source monitor. E526x, E527x, or FLEX415x.

E526x: for Keysight E5260A E527x: for Keysight E5270B FLEX415x: for Keysight 4155/4156

AddrGPIB GPIB address of the DC source monitor. Integer, 1 to 32.

SweepV1 Primary sweep source output data, in V. This is the X axis data

of the X-Y graph.

SweepV2 Secondary sweep source output data, in V. IMeas1 Cu rrent measurement da ta, in A.This is the Y1 axis data of the

X-Y graph.

Keysight B1542A User’s Guide, Edition 10 5-29

PLSDIV Test Definitions PLSDIV IV SMU

Table 5-2 Integration Time Setup Parameters for E5260/E5270

ADCType IntegMode IntegNum

HighSpeed Auto Value that defines the number of averaging samples given by the

following formula. 1 to 1023. Number of averaging sampl es = IntegNum  system-defined-value where system-defined-value is the number of averaging samples

automatically set by the E5260/E5270.

Manual Number of averaging samples. 1 to 1023.

PLC Value that defines the number of averaging samples given by the

following formula. 1 to 100. Number of averaging samples = IntegNum  128 The E5260/E5270 gets 128 samples in a power line cycle, repeats

this for the times you specify, and performs averaging to get the measurement data.

HighResolution Auto Value that defines the integration time given by the following

formula. 1 to 127. Integration time = IntegNum  system-defined-value where system-defined-value is the integration time automatically

set by the E5260/E5270.

Manual Value that defines the integration time given by the following

formula. 1 to 127. Integration time = IntegNum  80 s

PLC Value that defines the integration time given by the following

formula. 1 to 100. Integration time = IntegNum / power line frequency

5-30 Keysight B1542A User’s Guide, Edition 10

PLSDIV Reset

This test definition resets and initializes the pulsed IV test system.

Device Parameters None

Test Parameters None

PLSDIV Test Definitions

PLSDIV Reset

Extended Test Parameters

Test Output None

None

Keysight B1542A User’s Guide, Edition 10 5-31

PLSDIV Test Definitions PLSDIV Setup

PLSDIV Setup

This test definition is used to perform the system setup and the compensation of the pulsed IV test system. Select the action in the Actions field, set the extended parameters, and click the Single button to perform the action.

All instruments must be connected by GPIB cables before starting the system setup.

Device Parameters None

Test Parameters The following parameters must be set to perform the system setup.

DcSwitch Set Yes to use the pulse/dc switch. Do not set No. Actions Actions available for the pulsed IV system setup.

• System Configuration

• Compensation

• Skew Measurement

Extended Test Parameters

• Drain Cable Replacement

• Pgu Compensation For the actions, see “Pulsed IV System Setup” on page 3-3.

Set the switch controller GPIB address to the SWAddress field. The other fields are only for the Pgu Compensation action.

SWAddress GPIB address of the switch controller. Integer, 1 to 32. PulseBase Only for Pgu Compensation. P GU output baselin e voltage. -3.0

to 3.0 V, 4 digits or 10 mV resolution.

TransTime Only for Pgu Compensation. Pulse leading/trailing edge

transition time, in s. 2 ns to 500 ns, 3 digits or 1 ns resolution. For the 81101A, minimum value is 5 ns. For the 81150A, minimum value is 2.5 ns when the following

conditions are satisfied, or 7.5 ns.

• Pulse amplitude is 2.5 V or less.

• Both pulse base and top are within 2.5 V.

5-32 Keysight B1542A User’s Guide, Edition 10

Keysight Technologies B1542A Pulsed IV Package User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

1Introduction

Overview

System Hardware

System Software

Typical Technical Information

Accessories and Options

2 Installation

Inspection

RF Probes

DC Probes

Hard ware Installation

Installing Instruments

Connecting Interface Cables

Installing Pulsed IV Test System

Connecting RF Probes

Connecting DC Probes

Software Installation

System Requirements

Installing Software

Installing Cable Compensation Data

After Software Installation

Updating Software

Removing Pulsed IV Software

Rack-mounting Instruments

Rack-mounting Pulse/dc Switch Units

Pulsed IV System Setup

Starting System Setup

If You Use DSO/MSO 9000 Series or S Series Oscilloscope

If You Use External Computer

System Configuration

LAN Setup for DSO Control Dialog Box

SMU CH for Compensation Dialog Box

Executing Action

Compensation Action

Pgu Compensation Action

4 Performing Measurement

Theory of Measurement

Terminal Voltage and Source Output Value

Before Measurement

Performing System Reset

Pulse Waveform Measurement

Pulsed Id-Vd Measurement

Pulsed Id-Vg Measurement

DC I-V Measurements

5 PLSDIV Test Definitions

PLSDIV Capt Wave

PLSDIV DC IdVd

PLSDIV DC IdVd SMU

PLSDIV DC IdVg

PLSDIV DC IdVg SMU

PLSDIV IdVd, PLSDIV IdVd [2]

PLSDIV IdVg, PLSDIV IdVg [2]

PLSDIV IV SMU

PLSDIV Reset

PLSDIV Setup