Keysight Technologies B1500A Configuration Manual

Keysight Technologies

B1500A Semiconductor Device Analyzer

Configuration Guide

Introduction

Keysight B1500A Semiconductor Device Analyzer of Precision Current-Voltage Analyzer Series
is an all in one analyzer supporting IV, CV, pulse/dynamic IV and more, which is designed for
all-round characterization from basic to cutting-edge applications. It provides a wide range of
measurement capabilities to cover the electrical characterization and evaluation of devices, materials,
semiconductors, active/passive components, or virtually any other type of electronic device with
uncompromised measurement reliability and efficiency. In addition, the B1500A’s modular architecture
with ten available slots allows you to add or upgrade measurement modules if your measurement
needs change over time.

Keysight EasyEXPERT group+ GUI based characterization software is available either on the
B1500A’s embedded Windows 7 platform with 15-inch touch screen or on your PC to accelerate
the characterization tasks. It supports efficient and repeatable device characterization in the entire
characterization process from measurement setup and execution to analysis and data management
either interactive manual operation or automation across a wafer in conjunction with a semiautomatic
wafer prober. EasyEXPERT group+ makes it easy to perform complex device characterization
immediately with hundreds of ready-to-use measurements (application tests) furnished, and allows
you the option of storing test condition and measurement data automatically af ter each measurement
in a unique built-in database (workspace), ensuring that valuable information is not lost and that
measurements can be repeated at a later date. Keysight B1500A provides the complete solution for
device characterization with these versatile capabilities.

Table of Contents

Introduction......................................................................................................... 02

Supported Plug-in Modules ............................................................................... 03

Maximum Module Configuration ........................................................................ 04

B1500A Configuration Options and Contents .................................................... 05

B1500A Upgrade Options and Contents ............................................................ 11

Accessories ......................................................................................................... 13

CMU Accessories ................................................................................................ 14

HV-SPGU Accessories ..................................................................................... 16

WGFMU Accessories ....................................................................................... 17

Other Accessories ............................................................................................ 18

B1500A Configuration ........................................................................................ 24

03 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

Supported Plug-in Modules

The B1500A supports ten slots for plug-in modules.

Slots

Module Name

B1510A High power
source/monitor unit
(HPSMU)
B1511B Medium power
source/monitor unit
(MPSMU)

B1517A High resolution
source/monitor unit
(HRSMU)

B1514A 50 µs Pulse
medium current source/
monitor unit (50 µs
Pulse MCSMU)
B1520A Multi-frequency
capacitance measure­ment unit (MFCMU)

B1525A High voltage
semiconductor pulse
generator unit
(HV-SPGU)

B1530A Waveform
generator/fast measure­ment unit (WGFMU)

occupied

2 – Range up to 200 V/1 A with 4-quadrant operation

1 – Range up to 100 V/0.1 A with 4-quadrant operation

1 – Range up to 100 V/0.1 A with 4-quadrant operation

1 – Range up to 30 V/1 A pulsed (0.1 A DC) with 4-quadrant operation

1 – AC impedance measurement (C-V, C-f, C-t)

1 – High voltage output up to ±40 V applicable for non-volatile memory testing

1 – Ultra-fast IV measurement capability for the pulsed IV and transient IV such as NBTI/PBTI,

Key Features

– Minimum measurement resolution 10 fA/2 µV

– Minimum measurement resolution 10 fA/0.5 µV
– Optional ASU (atto-sense and switch unit) for 100
– aAresolution and IV/CV switching capability

– Minimum measurement resolution 1 fA /0.5 µV
– Optional ASU (atto-sense and switch unit) for 100
– aAresolution and IV/CV switching capability

– Pulse measurement from 50 μs pulse width with 2 μs resolution
– Oscilloscope view (voltage/current waveform viewer) is supported
– Minimum measurement resolution 10 pA/0.2 µV

– 1 kHz to 5 MHz frequency range with minimum 1 mHz frequency resolution
– 25 V built-in DC bias and 100 V DC bias with SMU and SCUU (SMU CMU Unif y Unit)
– Easy and fast yet accurate IV and CV automated connection change by SCUU

– Two-level and three-level pulse capability by single channel
– Flexible arbitrary waveform generation with 10 ns resolution (arbitrary linear waveform generation

function)

– Two channels per module

RTN, etc.
– Waveform generation with 10 ns programmable resolution
– Simultaneous high-speed IV measurement capability (200 MSa/s, 5 ns sampling rate) 10 V peak-to-peak

output
– No load line effect accurate pulsed IV measurement by dynamic SMU technology

– Spot, sweep and more measurement

capabilities

– Sampling (time domain) measurement

from 100 μs

– Pulse measurement from 500 μs pulse

width

– Accurate Quasi-Static Capacitance

Voltage (QS-CV) measurement with
leakage current compensation

04 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

Maximum Module Configuration

The total power consumption of all SMU modules cannot exceed 84 W. Under this rule,
the B1500A can contain any combination of the following SMUs:

– Up to 10 MPSMUs
– Up to 10 HRSMUs
– Up to 4 HPSMUs
– Up to 4 MCSMUs

Only one single-slot MFCMU can be installed per B1500A mainframe. Up to five single­slot HV-SPGUs can be installed per mainframe. Up to five single-slot WGFMUs can be
installed per mainframe.

When one or more WGFMU modules are installed in the B1500A mainframe, the
following table applies. Multiply the values given below by the number of installed
modules of that type and add the products together. The sum of the products must be
less than or equal to 59 for the configuration to be permissible.

MPSMU 2
HRSMU 2
HPSMU 14
MCSMU 5
MFCMU 7
HV-SPGU 12
WGFMU 10

VGA video
output port

GPIB port

B1514A MCSMU

B1520A MFCMU

B1511B MPSMU

B1517A HRSMU

B1510A HPSMU

B1530A WGFMU

B1525A HV-SPGU

LAN, USB, external trigger
in/out and digital I/O ports

Built-in ground unit (GNDU)

05 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration Options and Contents

Model/Option Description Contents Qty Additional Information

B1500A Semiconductor Device Analyzer

Mainframe

B1500A mainframe 1

USB keyboard and
mouse

Stylus pen 1

Interlock cable 1

Triaxial cable 2 Triaxial cable x 1, GNDU cable x 1
GNDU Kelvin adapter 1

Miscellaneous 1 Power cable, CR-ROMs, software license entitlement document, etc.

Select the cable length (mandatory)

B1500A- 015 1.5 m cable length - - Length of cable bundled in the mainframe and package options is
B1500A-030 3 m cable length - -

Select the power line frequency (mandatory)

B1500A-050 50 Hz power line frequency - - Power line frequency is specified by option 050
B1500A-060 60 Hz power line frequency - -

Select package options (mandatory and mutually exclusive)

B1500A-A00 Standard Pack 0 - Empty

Package for Custom Solution
(No module is included.)

B1500A-A01 Standard Pack 1 -Standard

Package (Mid PWR unit 4ea,
Cables)

B1500A-A02 Standard Pack 2 -High

Resolution Package (High
Resolution unit 4ea, Cables)

B1500A-A03

Standard Pack 3 -High Power
Package(High PWR unit 2ea,
Mid PWR unit 2ea, Cables)

- - -

MPSMU 4 Installed MPSMU module
Triaxial cable 8 Cable length is 1.5 m or 3.0 m

HRSMU 4 Installed HRSMU module
Triaxial cable 8 Cable length is 1.5 m or 3.0 m

HPSMU 2 Installed HPSMU module
MPSMU 2 Installed MPSMU module
Triaxial cable 8 Cable length is 1.5 m or 3.0 m

1

specified by option 015 (1.5 m) or 030 (3.0 m).

(50 Hz) or 060 (60 Hz).

06 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration Options and Contents, continued

Model/Option Description Contents Qty Additional Information

Select package options (mandatory and mutually exclusive) - continued

B1500A-A04 Standard Pack 4 - Flash Pack(Mid

PWR unit 2ea, Hi-Res unit 2ea, PG,
Accessories)

MPSMU 2 Installed MPSMU module
HRSMU 2 Installed HRSMU module
HV-SPGU 1 Installed HV-SPGU module
SPGU cable 2 SPGU Cable (SMA to Coaxial)
SPGU synchronous
cable
1644 0A 1 16440A SMU/PGU pulse generator selector

Control cable 1 Control cable (40 cm) between 16445A and 16440A (16440A-003)

16445A 1 16445A Selector adapter for 16440A

2 SPGU synchronous cable (16493Q, SMA to SMA, 8 cm).

Control cable 1 Digital I/O cable, 1.5 m, between B1500A and 16445A (16445A-001)

Triaxial cable 2 Triaxial cable (1.5 m) bundled in 16440A
Triaxial cable 8 Cable length is 1.5 m or 3.0 m

Select add-on packages (optional)

B1500A-A10 Add-on Package - High Power Source

Monitor Unit (B1510A) 1ea, Cables

B15 0 0 A-A11

B1500A-A17 Add-on Package - High Resolution

B1500A-A1A Add-on Package - B1514A Medium

B15 0 0 A-A1B Add-on Package - B1514A Medium

B1500A-A20 Add-on Package - Capacitance

Add-on Package - Mid Power Source
Monitor Unit (B1511B) 1ea, Cables

Source Monitor Unit (B1517A) 1ea,
Cables

current source/monitor unit 1ea w/
connection box

current source/monitor unit 2ea w/
connection box

Measurement Unit (B1520A) 1ea,
Cable 1ea

HPSMU 1 Installed HPSMU module
Triaxial cable 2 Cable length is 1.5 m or 3.0 m
MPSMU 1 Installed MPSMU module
Triaxial cable 2 Cable length is 1.5 m or 3.0 m
HRSMU 1 Installed HRSMU module
Triaxial cable 2 Cable length is 1.5 m or 3.0 m

MCSMU 1 Installed MCSMU module
Triaxial cable 2 Cable length is 1.5 m or 3.0 m
N1255A 1 N1255A Connection box for B1514A MCSMU

MCSMU 2 Installed MCSMU module
Triaxial cable 4 Cable length is 1.5 m or 3.0 m
N1255A 1 N1255A Connection box for B1514A MCSMU
MFCMU 1 Installed MFCMU module
CMU cable 1 CMU cable. Cable length is 1.5 m or 3.0 m

07 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration Options and Contents, continued

Model/Option Description Contents Qty Additional Information

Select add-on packages (optional) - continued

B1500A-A25 Add-on Package - Pulse

Generator Unit (B1525A) 1ea,
Cables

HV-SPGU 1 Installed HV-SPGU module
SPGU cable 2 SPGU Cable (SMA to Coaxial)

B1500A-A28 Add-on Package - Atto Sense

Unit 1ea for High Resolution
Source Monitor Unit

B1500A-A29 Add-on Package - Atto Sense

Unit 1ea, for Mid Power Source
Monitor Unit (only for B1511B)

B1500A-A30 Add-on Package - B1530A 1ea,

Remote Sense Unit 2ea, Cables

SPGU synchronous
cable

ASU 1 Atto sense switch unit (E5288A ASU), 1 ea.

Triaxial and D-sub
cable for ASU

ASU 1 Atto sense switch unit (E5288A ASU), 1 ea.
Triaxial and D-sub
cable
WGFMU 1 Installed WGFMU module
RSU 2 Remote-sense and switch unit (RSU)

2 SPGU synchronous cable (16493Q, SMA to SMA, 8 cm).

1 A set of triaxial D-sub Cable for ASU (16493M).

Cable length is 1.5 m or 3.0 m

1 A set of triaxial D-sub Cable for ASU (16493M).

Cable length is 1.5 m or 3.0 m

RSU cable 2 RSU cable between WGFMU and RSU.

Cable length is 1.5 m or 3.0 m

08 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration Options and Contents, continued

Model/Option Description Contents Qty Additional Information

Select add-on packages (optional) - continued

B1500A-A31 Add-on Package - B1530A 1ea,

Connector Adaptor, Remote
Sense Unit 2ea, Cables

WGFMU 1 Installed WGFMU module
RSU 2 Remote-sense and switch unit (RSU)
RSU cable (2.4 m) 2 RSU cable (2.4 m) between WGFMU and connector adapter.

Cable length can’t be selected by option 015/030.

RSU cable (0.6 m) 2 RSU cable (0.6 m) between connector adapter and RSU.

Cable length can’t be selected by option 015/030.

Connector adapter 2 Connector adapter for RSU cable, female - female (16493R-801).

This can be used for a shield box to hook up the RSU cable.

B1500A-A3P Add-on Package - Probe cable

kit for B1530A(8 probe cables.
B1530A not included)

SSMC cable,
50 mm

SSMC cable,
75 mm

SMA-SSMC cable,
200 Mm

SMA cable,
200 mm

2 SSMC short-open cable for current return path, 50 mm (16493R-101)

2 SSMC short-open cable for current return path, 75 mm (16493R-102)

2 SMA-SSMC cable between RSU and DC probe, 200 mm (16493R-202)

2 SMA-SMA cable between RSU and RF probe, 200 mm (16493R-302)

09 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration Options and Contents, continued

Model/Option Description Contents Qty Additional Information

Select add-on packages (optional) - continued

B1500A-A5F Add-on Pack - Test Fixture for

packaged device (16442B 1ea)

Select calibration options (optional)

B1500A-A6J ANS I Z54 0 -1-1994 Calib r a t ion - - ANSI Z540 compliant calibration
B1500A-UK6 Commercial Calibration

Certificate with Test Data

Select manual options (mandatory)

B1500A-0B0 Download the Product Manual

from the Keysight website
B1500A-ABA English Documentation Printed manuals 1 Printed manuals in the selected language.
B1500A-ABJ Japanese Documentation

Optical disk drive (optional)

B1500A-DR1 Replace a built-in DVD-R drive

with a read-only DVD drive

Optical disk drive (optional)

B1500A-1CM Rack Mount Kit for B1500A Rack mount kit 1 Rack mount flange kit 310.4mm H (7U) - two flange brackets

Test Fixture 1 Test fixture for packaged device (16442B)

Accessory case 1 Accessory case for furnished accessories.

Blank PTFE board 1 Blank PTFE board for DUT stage
28-pin socket module 1 28-pin DIP (dual-in-line) package socket

module
Universal socket
module
Universal socket
module
Connection pin 10 Connection pin set for universal socket

Mini-banana to
pin-plug
Pin-plug to pin-plug 9 3ea per each color (black, red, blue)
Mini-banana to clip 9 3ea per each color (black, red, blue)
Mini-banana to
mini-banana

- - Test Data for ISO 9001/2 Commercial

- - Select if no printed manual is needed.

DVD drive (read only) 1 DVD-R drive of the mainframe is replaced with DVD drive (ready-only)

1 Universal socket module, 0.075 inch pitch

1 Universal socket module, 0.05 inch pitch

module

12 4ea per each color (black, red, blue)

9 3ea per each color (black, red, blue)

Calibration. This option provides measurement

test data for the standard commercial calibration

and test equipment trace information.

(1CM033A)

10 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration Options and Contents, continued

Model/Option Description Contents Qty Additional Information

WGFMU learning kit (optional)

B1530A- 0KN Self-paced Sample Program

Learning Kit for B1530A
WGFMU

Startup assistance

PS-S20-01 Recommended Startup

Assistance

Sample devices 4 Sample device is the assembly made from two SMA (female)

connectors, a printed circuit board, and a discrete device. (1kΩ, 1MΩ,

N-MOS FET and blank board)

SMA cable 2 SMA (m) – SMA (m) cable (20 cm) for connecting to the sample device
Printed manual 1 Sample Program Learning Kit User’s Guide

- - Startup assistance & product training

11 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Upgrade Options and Contents

The B1500AU allows to upgrade the B1500A mainframe and/or installed modules. Upgrade and installation must be performed at the
service center. The serial number and the configured module information are needed to order the upgrade. In addition to the selected
upgrade options, a few mainframe components can be required to replace for the prerequisite of the upgrade. Contact Keysight for the
quotation of the upgrade including the service charge.

B1500A upgrade options

Model/Option Description Contents Qty Additional Information

B1500AU Upgrade kit for B1500A - - Various upgrade option can be ordered as the option of B1500AU.

Module upgrade options (optional)

B1500AU-010 Addition of B1510A High power

source/monitor unit module

B1500AU-11B Addition of B1511B Medium power

source/monitor unit module

B1500AU-141 Addition of B1514A Medium

current source/monitor unit 1ea w/
connection box

B1500AU-142 Addition of B1514A Medium

current source/monitor unit 1ea w/o
connection box

B1500AU-017 Addition of B1517A High resolution

source/monitor unit module

B1500AU-088 Addition of E5288A Atto sense

and switch unit (ASU. HRSMU is
required.)

B1500AU-089 Addition of E5288A Atto sense and

switch unit (B1511B MPSMU is
required.)

B1500AU-020 Addition of B1520A Multi frequency

capacitance measurement unit
module

B1500AU-025 Addition of B1525A High voltage

semiconductor pulse generator unit
module

B1500AU-030 Addition of B1530A Waveform

generator/fast measurement unit
module with two RSUs

WGFMU and RSU cable options (mandatory for B1500AU-030)

B1500AU-W 01 0.6m/2.4m cable set between

WGFMU and RSU(2ea). Require
prober I/F with adapter

B1500AU-W02 3m Cable between WGFMU and RSU

(2ea)

B1500AU-W 03 5m Cable between WGFMU and RSU

(2ea)

B1500AU-W 0 4 0.6m/4.4m Cable set between

WGFMU and RSU(2ea). Require
prober I/F with adapter

B1500AU-W05 1.5m Cable between WGFMU and

RSU (2ea)

HPSMU 1 HPSMU module. No cable is included. Order B1500AU-T01/T02 or

16494A triaxial cable if necessary.

MPSMU 1 MPSMU module. No cable is included. Order B1500AU-T01/T02 or

16494A triaxial cable if necessary.

MCSMU 1 MCSMU module. No cable is included. Order B1500AU-T01/T02 or

16494A triaxial cable if necessary.
N1255A 1 N1255A Connection box for B1514A MCSMU
MCSMU 1 MCSMU module. No cable is included. Order B1500AU-T01/T02 or

16494A triaxial cable if necessary.

HRSMU 1 HRSMU module. No cable is included. Order B1500AU-T01/T02 or

16494A triaxial cable if necessary.
ASU 1 Atto sense switch unit (E5288A ASU). ASU will be tied with HRSMU.

No cable is included. Order B1500AU-A01/A02 or 16493M.

ASU 1 Atto sense switch unit (E5288A ASU). ASU will be tied with

MPSMU. No cable is included. Order B1500AU-A01/A02 or

16493M.
MFCMU 1 MFCMU module. No cable is included. Order B1500AU-C01/C02 or

N1300A cable and accessories.

HV-SPGU 1 HV-SPGU module. No cable is included. Order B1500AU-S01/S02,

or 16493P SMA-BNC cable and 16493Q if necessary.

WGFMU 1 WGFMU module. No cable is included. Order B1500AU-W01, W02,

W03, W04 or W05 for WGFMU-RSU cable.
RSU 2 Remote-sense and switch unit (RSU)

RSU cable 2 0.6 m (2ea) and 2.4m (2ea) RSU cables

RSU cable 2 3 m RSU cable

RSU cable 2 5 m RSU cable

RSU cable 2 0.6 m (2ea) and 4.4m (2ea) RSU cables

RSU cable 2 1.5 m RSU cable

12 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A upgrade options, continued

Model/Option Description Contents Qty Additional Information

Cable options (optional)

B1500AU-A0 1 Triax and Dsub cable for ASU (1.5 m) Triaxial 1 Triaxial cable (16494A-001, 1.5 m)

D-sub cable 1 D-sub cable for ASU (16493M-001, 1.5 m)

B1500AU-A02 Triax and Dsub cable for ASU (3 m) Triaxial 1 Triaxial cable (16494A-002, 3 m)

D-sub cable 1 D-sub cable for ASU (16493M-002, 3 m)

B1500AU-T01 Addition of 16494A-001 Triaxial

cable (1.5 m)

B1500AU-T02 Addition of 16494A-002 Triaxial

cable (3 m)

B1500AU-C01 Addition of N1300A-001 CMU cable

for B1500 (1.5 m)

B1500AU-C02 Addition of N1300A-002 CMU cable

for B1500 (3 m)

B1500AU-S01 Addition of two 16493P-001 SPGU

cables (1.5 m)

B1500AU-S02 Addition of two 16493P-002 SPGU

cables (3 m)

EasyEXPERT extension support

B1500AU-SW S EasyEXPERT upgrade, extension

support and subscription

B1500A mainframe upgrade/modification - It is required to upgrade/modify the mainframe at the service center.

B1500AU-W N7 OS upgrade from Windows XP to

Windows 7

B1500AU-PC1 B1500A Mainframe upgrade

(including OS, CPU, mother board,
HDD, VGA output)

B1500AU-DR1 Replace DVD-R drive with read-only

drive

Learning product options

B1500AU-ABA Paper manual set, English Printed manuals 1 Printed manuals in the selected language.
B1500AU-ABJ Paper manual set, Japanese
B1500AU-0KN Self-paced sample program learning

kit for B1530A WGFMU

Rack mount kit

1CM033A Rack Mount Kit for B1500A Rack mount kit 1 Rack mount flange kit 310.4mm H (7U) - two flange brackets (1CM033A)

Installation

R-51U-501 Service center - - Installation

Calibration

R-50G-711 Calibration for Hardware Upgrade - ­R-50G-721 Z540 Calibration for Hardware

Upgrade

Startup assistance

PS-S20-01 Recommended Startup Assistance - - Startup assistance & product training

Triaxial cable 1 Triaxial cable (16494A-001, 1.5 m)

Triaxial cable 1 Triaxial cable (16494A-002, 3 m)

CMU cable 1 CMU cable (N1300A-001, 1.5 m)

CMU cable 1 CMU cable (N1300A-002, 3 m)

SPGU cable 1 SMA-BNC cable (16493P-001, 1.5 m)

SPGU cable 1 SMA-BNC cable (16493P-002, 3 m)

Software
entitlement
document

Embedded OS 1 Upgrade the embedded OS from Windows XP to Windows 7 (Windows

Embedded OS
and a set of PC
hardware of the
mainframe

DVD drive 1 Replace the DVD-R drive with DVD drive (read-only) Available only for S/N

Sample devices 4 Sample device is the assembly made from two SMA (female) connectors,

SMA cable 2 SMA (m) – SMA (m) cable (20 cm) for connecting to the sample device
Printed manual 1 Sample Program Learning Kit User’s Guide

- -

1 This provides the software entitlement document for the license for Easy-

EXPERT sof tware revision 5.5 or later. If you do not have it, it is required to
order option SWS when you upgrade software revision 5.5 or later.

Embedded Standard 7) without hardware upgrade. It is available only for
S/N JP49090101 or later.

1 Upgrade the embedded OS from Windows XP to Windows 7 (Windows

Embedded Standard 7) with PC hardware upgrade. According to the
mainframe configuration, it can be required to upgrade other hardware
parts.

JP49090101 or later.

a printed circuit board, and a discrete device. (1kΩ, 1MΩ, N-MOS FET and
blank board)

Calibration

13 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

Accessories

SMU accessories

Triaxial cable: Triaxial cable has three leads, a central conductor for the signal, an encapsulating conductor that shields the center
signal by employing the same voltage thus decreasing a possible leakage current, and an outer conductor that serves as common.

Model/Option Description Contents Qty Additional Information

16494A Triaxial Cable - - Order with the option.

Select cable length option

16494A-001 Triaxial Cable (1.5 m) Triaxial cable 1

16494A-002 Triaxial Cable (3 m) Triaxial cable 1

16494A-003 Triaxial Cable (80 cm) Triaxial cable 1

16494A-004 Triaxial Cable (40 cm) Triaxial cable 1

16494A-005 Triaxial Cable (4 m) Triaxial cable 1

Kelvin Triaxial cable: Kelvin Triaxial cable consists of two central twisted parallel leads that are connected to Force and Sense
terminals of a SMU. A common guard and an outer conductor that is connected to Common further shield the two leads. By Kelvin
connection it is possible to limit the influence of the connection leads on a lower resistively measurement to a minimum. Kelvin Triaxial
cables should be employed when performing very sophisticated measurements.

Guard

Force
(Sense)

Common

Model/Option Description Contents Qty Additional Information

16493K Kelvin Triaxial Cable - - For B1500/E5260/E5270. Order with the option.

Select cable length option

16493K-001 Kelvin Triaxial Cable (1.5 m) Kelvin Triaxial cable 1

16493K-002 Kelvin Triaxial Cable (3 m) Kelvin Triaxial cable 1

Model/Option Description Contents Qty Additional Information

16494B Kelvin Triaxial Cable - - For E5250A input port. Order with the option.

Select cable length option

16494B-001 Kelvin Triaxial Cable (1.5 m) Kelvin Triaxial cable 1

16494B-002 Kelvin Triaxial Cable (3 m) Kelvin Triaxial cable 1

16494B-003 Kelvin Triaxial Cable (80 cm) Kelvin Triaxial cable 1

ASU cable and accessory

Model/Option Description Contents Qty Additional Information

16493M Triax and Dsub Cable for ASU - - Order with the option.

Select cable length option

16493M-001 Triax and Dsub Cable for ASU (1.5 m) A set of triaxial D-sub

Cable

16493M-002 Triax and Dsub Cable for ASU (3 m) A set of triaxial D-sub

Cable

1

1

Model/Option Description Contents Qty Additional Information

N1254A Accessories for instruments and fixtures - - Order with the option.

Select cable length option

N1254A-108 ASU Magnetic Stand Magnetic Stand 1

14 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

Ground Unit cable and accessory

GNDU has triaxial type connector as well as SMU. However the terminal assignment is different from SMU. Force and sense are
integrated into a single terminal. A central conductor is Sense, the inner shield is Force, and the outer shield is Common. 16493L GND
unit cable is designed for the GNDU that can sink the current up to 4.2 A. The GNDU to Kelvin adapter separates the Force and Sense
for cabling like SMU.

Model/Option Description Contents Qty Additional Information

16493L GNDU Cable - - Order with the option.

Select cable length option

16493L-001 GNDU Cable (1.5 m) GNDU Cable 1

16493L-002 GNDU Cable (3 m) GNDU Cable 1

16493L-003 GNDU Cable (5 m) GNDU Cable 1

Model/Option Description Contents Qty Additional Information

16493N Ground Unit Cable for B2200/B2201 Input (Kelvin Triaxial) - - Order with the option.

Select cable length option

16493N-001 Ground Unit Cable for B2200/B2201 Input (Kelvin Triaxial,

2 m)

GNDU Cable 1 GNDU cable for

B2200A/B2201A
switching matrix
nput port, 2 m

Model/Option Description Contents Qty Additional Information

N1254A Accessories for instruments and fixtures - - Order with the option.

Select cable length option

N125 4A-10 0 GNDU to Kelvin adapter GNDU to Kelvin adapter 1 Furnished with B1500A mainframe.

CMU Accessories

CMU cable

Model/Option Description Contents Qty Additional Information

N1300A CMU cable - - Order with the option.

Select cable length option

N1300A-001 CMU cable (1.5 m) CMU cable 1

N1300A-002 CMU cable (3 m) CMU cable 1

15 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

CMU Accessories, continued

SMU CMU Unify Unit (SCUU): The SCUU multiplexes the output from two SMUs (MPSMUs and/or HRSMUs) and the CMU. The SCUU outputs are two
sets of Kelvin triaxial ports for IV measurement, and a pair of CMU-H and CMU-L of the shielded two terminal pair configuration for CV measurement. The
SCUU also allows the SMUs to act as DC bias source in conjunction with the CMU. The GSWU contains a relay that automatically opens for IV measurements
and closes for CV measurements, forming a guard return path to improve CV measurement accuracy.

Model/Option Description Contents Qty Additional Information

N1301A CMU Accessories - - Order with the option.

SCUU options

N1301A-10 0 SMU CMU Unify Unit (SCUU) SCUU 1 SCUU is attached to the rear panel of B1500A. One CMU

and two SMUs are required.

N1301A-10 2 SMU CMU Unify Unit Cable (3 m) SCUU Cable 1 SCUU cable is attached to the rear panel of B1500A. One

CMU, two SMUs and N1301A-100 SCUU are required.
The SCUU cable enables to place the SCUU 3 m away
from the rear panel. N1301A-110 magnet stand is
recommended to hold the SCUU. Since 1.5 m or 3 m
triaxial cable is attached beyond the SCUU, note the total
cable length will be longer than 3 m.

N1301A-110 SCUU Magnet Stand Magnet Stand 1

N1301A-200 Guard Switch Unit (GSWU) GSWU 1 SCUU is required to use the GSWU. Select the same

cable length as triaxial cable from the SCUU.

Pin cable 2

N1301A-201 GSWU cable (1.5 m) GSWU cable 1

N1301A-202 GSWU cable (3 m) GSWU cable 1

16 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

HV-SPGU Accessories

SPGU cable

Model/Option Description Contents Qty Additional Information

16493P SPGU Cable (SMA-to-Coaxial) - - Order with the option.

Select cable length option

16493P-001 SPGU Cable (1.5 m) SPGU cable 1

16493P-002 SPGU Cable (3 m) SPGU cable 1

SPGU Synchronous cable

SPGU synchronous cable is semirigid SMA cable. It is used to connect between sync-in and out to synchronize the timing between
SPGU modules.

Model/Option Description Contents Qty Additional Information

16493Q SPGU Synchronous Cable - - Order with the option.

Select cable length option

16493Q-001 SPGU Synchronous Cable (8 cm) SPGU Synchronous

Cable

1 SPGU synchronous cable (SMA to SMA, 8 cm).

SMU/PGU selector: 16440A SMU/PGU selector is used to switch the measurement resource connected to the device. The measure­ment resource can be SPGU or SMU. A selector provides two switching channels. 16445A selector adapter is required to control the
16440A SMU/PGU selector.

Model/Option Description Contents Qty Additional Information

1644 0A SMU/Pulse generator selector 16440 A 1 16440A SMU/PGU pulse generator selector. Order with

the option.

Select cable length option

1644 0A- 003 Control cable (40 cm) Control cable 1

Model/Option Description Contents Qty Additional Information

16445A SMU/PGU Selector Connection

Adapter

16445A 1 16445A Selector adapter for 16440A.

Order with the option.

16445A-001 Control Cable for B1500A to 16445A

(1.5 m)

16445A-002 Control Cable for B1500A to 16445A

(3 m)

Control cable 1 Digital I/O cable from B1500A to 16445A

Control cable 1

17 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

WGFMU Accessories

Model/Option Description Contents Qty Additional Information

16493R - - Order with the option.

WGFMU to RSU cable length option

16493R-001 WGFMU to RSU cable (0.6 m) WGFMU to RSU cable 1

16493R-002 WGFMU to RSU cable (2.4 m)

16493R-003 WGFMU to RSU cable (3 m)

16493R-004 WGFMU to RSU cable (5 m)

16493R-005 WGFMU to RSU cable (4.4 m)

16493R-006 WGFMU to RSU cable (1.5 m)

Cable option for connection with DC probe

16 4 9 3R-101 SSMC short-open cable for current

return path (50 mm)

16 4 9 3R-102 SSMC short-open cable for current

return path (75 mm)

16 4 9 3R-103 SMA-SSMC cable between RSU and

DC probe (200 mm)

SSMC short-open cable 1

SMA-SSMC cable 1

Cable option for connection with RF probe

16493R-302 SMA-SMA cable between RSU and RF

probe (200 mm)

Other WGFMU accessories

16493R-801 WGFMU connection adapter

(female-female)

16493R-802 Magnet stand for RSU (1 ea) Magnet stand 1 Two stands are required for one WGFMU.

SMA-SMA cable 1

connection adapter 1 This can be used for a shield box to hook up the RSU

cable.

16493R-803 Sync terminal connection cable Sync cable 1

18 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

Other Accessories

Test fixture: Keysight 16442B test fixture is designed for testing packaged devices and electronic components. You can mount the
suitable socket module on the 16442B, which allows you to easily connect various devices to measurement units. The 16442B has 6
triaxial, 6 BNC, 1 GNDU input ports and interlock connector.

Model/Option Description Contents Qty Additional Information

16442B Test Fixture for Semicon-

ductor Devices

Accessory case

16442B-890 Extra accessories case Accessories case 1

Test Fixture 1 Test fixture for packaged device (16442B)

Accessory case 1 Accessory case for furnished accessories.

Blank PTFE board 1 Blank PTFE board for DUT

stage

28-pin socket module 1 28-pin DIP (dual-in-line)

package socket module

Universal socket module 1 Universal socket module,

0.075 inch pitch

Universal socket module 1 Universal socket module,

0.05 inch pitch

Connection pin 10 Connection pin set for

universal socket module

Mini-banana to pin-plug 12 4ea per each color (black,

red, blue)

Pin-plug to pin-plug 9 3ea per each color (black,

red, blue)

Mini-banana to clip 9 3ea per each color (black,

red, blue)

Mini-banana to
mini-banana

9 3ea per each color (black,

red, blue)

19 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

Other Accessories, continued

Test fixture accessories

Model/Option Description Contents Qty Additional Information

N1254A Accessories for instruments and fixtures - - Order with the options.

Extra module options

N1254A-200 Socket module for 4-pin TO package socket module 1

N1254A-201 Socket module (28-pin DIP) socket module 1

N1254A-202 Socket module (18-pin DIP) socket module 1

N1254A-204 Universal socket module 0.1 inch pitch Universal socket module 1

N1254A-205 Universal socket module 0.075 inch pitch Universal socket module 1

N1254A-206 Universal socket module 0.05 inch pitch Universal socket module 1

N1254A-207 Blank PTFE board Blank PTFE board 1

Extra pin/wire options

N1254A-30 0 Connection pins set Connection pin 10 Connection pin set for universal socket module.

N1254A-301 Mini banana - pin plug (black) Mini-banana to pin-plug 1

N1254A-302 Mini banana - pin plug (red) Mini-banana to pin-plug 1

N1254A-30 3 Mini banana - pin plug (blue) Mini-banana to pin-plug 1

N1254A-30 4 Pin plug - pin plug (black) Pin plug to pin plug 1

N1254A-305 Pin plug - pin plug (red) Pin plug to pin plug 1

N1254A-306 Pin plug - pin plug (blue) Pin plug to pin plug 1

N1254A-307 Mini banana - mini clip (black) Mini banana to mini clip 1

N1254A-308 Mini banana - mini clip (red) Mini banana to mini clip 1

N1254A-309 Mini banana - mini clip (blue) Mini banana to mini clip 1

N1254A-310 Mini banana - mini banana (black) Mini banana to mini banan 1

N1254A-311 Mini banana - mini banana (red) Mini banana to mini banan 1

N1254A-312 Mini banana - mini banana (blue) Mini banana to mini banan 1

B1500 mainframe furnished accessories

Model/Option Description Contents Qty Additional Information

16444A B1500 Accessories - - Order with the option.

Extra accessory options

16444A-001 USB keyboard USB keyboard 1

16444A-002 USB mouse USB mouse 1

16444A-003 Stylus pen Stylus pen 1

20 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

Other Accessories, continued

Interlock cable and accessory

Model/Option Description Contents Qty Additional Information

16493J Interlock cable - - Order with the option.

Select cable length option

16493J-001 Interlock cable (1.5 m) Interlock cable 1

16493J-002 Interlock cable (3 m) Interlock cable 1

16493J-003 Interlock cable (5 m) Interlock cable 1

Model/Option Description Contents Qty Additional Information

N1254A Accessories for instruments and fixtures - - Order with the options.

Select cable length option

N1254A-402 Interlock micro switch Switch 1 Interlock micro switch (3101-4439)

Digital I/O cable and accessories

Model/Option Description Contents Qty Additional Information

16493G Digital I/O control cable - - Order with the option.

Select cable length option

16493G-001 Digital I/O control cable, (1.5 m) Control cable 1

16493G-002 Digital I/O control cable, (3 m) Control cable 1

Model/Option Description Contents Qty Additional Information

N1253 A Digital I/O accessories - - Order with the option.

Select cable length option

N125 3A-10 0 Digital I/O T-cable Digital I/O T-cable 1 Digital I/O T-cable has 2 male and 1 female

connectors in order to connect more than two
units. In order to connect three units, order one
N1253A-100 and one 16493G cable.

N1253 A-200 Digital I/O BNC box Digital I/O BNC box 1 Adapter for connecting Digital I/O port with

BNC trigger port of other instruments. Box
which has 8 BNC connectors for connecting
with BNC trigger port of other instruments
and 25 pin D-sub connector for connecting
this box to B1500A. In order to use this box for
connection, need D-sub 25 pin straight cable
(16493G) and BNC cable.

21 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

Other Accessories, continued

BNC cable: The maximum voltage is 40 V, and Maximum current is 200 mA.

Model/Option Description Contents Qty Additional Information

16493B Coaxial Cable - - Order with the option.

Select cable length option

16493B-001 Coaxial Cable (1.5 m) Coaxial Cable 1

16493B-002 Coaxial Cable (3 m) Coaxial Cable 1

Adapters:

Model/Option Description Contents Qty Additional Information

N1254A Accessories for instruments and fixtures - - Order with the options.

Select cable length option

N125 4A-10 1 Triax(m) to BNC (f) adaptor 1250-2648 1

N125 4A-10 2 Triaxial (f) to Coaxial (m) adapter 1250-2649 1

N125 4A-10 3 Triaxial (m) to Coaxial (f) adapter 1250-2650 1

N125 4A-10 4 Triaxial (f) to Coaxial (m) adapter 1250-2651 1

N125 4A-10 5 Triaxial (f) to Coaxial (m) adapter 1250-2652 1

N1254A-106 Triaxial (m) to Coaxial (f) adapter 1250-2653 1

N125 4A-107 Triaxial (m) to Triaxial (f) adapter 1250-2654 1

N/A Triaxial (f) to Triaxial (f) adapter 1250-2618 1 Order 1250-2618.

22 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

Other Accessories, continued

Connector Plate: Connector plate can be used to feed the cable through a shielding box.

Model/Option Description Contents Qty Additional Information

16495F Connector Plate with 12

Triaxial Interlock and GNDU
connectors

Select connector type option

16495F-0 01 Bulkhead Feedthru

Connectors

16495F-0 02 Connectors to contacts for

soldering

Model/Option Description Contents Qty Additional Information

16495G Connector Plate with 24

Triaxial, Interlock and GNDU
connectors

Select connector type option

16495G-001 Bulkhead Feedthru

Connectors

16495G-00 2 Connectors to contacts for

soldering

- - Order with the option.

Connector plate 1

Connector plate 1

- - Order with the option.

Connector plate 1

Connector plate 1

23 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

Other Accessories, continued

Connector Plate, continued

Model/Option Description Contents Qty Additional Information

16495H Connector Plate with 6

Triax., 6 BNC, Interlock and
GNDU connectors

Select connector type option

16495H-0 01 Bulkhead Feedthru

Connectors

16495H-0 02 Connectors to contacts for

soldering

Model/Option Description Contents Qty Additional Information

16495J Connector Plate with 8

Triax., 4 BNC, Interlock and
GNDU connectors

Select connector type option

16495J-001 Bulkhead Feedthru

Connectors

16495J-002 Connectors to contacts for

soldering

- - Order with the option.

Connector plate 1

Connector plate 1

- - Order with the option.

Connector plate 1

Connector plate 1

Model/Option Description Contents Qty Additional Information

16495K Connector plate with

universal cable holder

Select connector type option

16495K- 001 Bulkhead Feedthru

Connectors

- - Order with the option.

Connector plate 1 16495K does not have any connections. This plate provides the

cable hole and the cover with rubber used to block the light from
the cable hole. This can be used to feed the E5288A ASU or the
N1301A-200 GSWU through the shielding box.

24 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration

Example-1. For IV characterization of 2-terminal device

Model/Option Description Qty

B1500A Semiconductor Device

Analyzer Mainframe

B1500A- 015/0 30 1.5 m or 3 m length of

bundled cables

B1500A-A00 Empty package for custom

solution, contains no
measurement module

B1500A-A11 (or
A17)

B1500A-A5F Test fixture for packaged

Adds one MPSMU (or
HRSMU) and two triaxial
cables

device measurement, adds
one 16442B (Optional)

1

1

1

2

1

Example-2. For IV characterization of 4-terminal device

Model/Option Description Qty

B1500A Semiconductor Device

Analyzer Mainframe

B1500A- 015/ 030 1.5 m or 3 m length of

bundled cables

B1500A-A01 (or
A02)

B1500A-A5F Test fixture for packaged

Four MPSMU (or HRSMU)
and eight triaxial cables

device measurement, adds
one 16442B (Optional)

1

1

1

1

25 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration, continued

Example-3. For IV characterization of 4-terminal device with ASU

Model/Option Description Qty

B1500A Semiconductor Device

Analyzer Mainframe

B1500A- 015/0 30 1.5 m or 3 m length of

bundled cables

B1500A-A01 (or
A02)

B1500A-A29 (or
A28)

B1500A-A5F Test fixture for packaged

Four MPSMU (or HRSMU)
and eight triaxial cables

Adds one ASU, one D-sub
cable, and one triaxial cable

device measurement, adds
one 16442B (Optional)

1

1

1

1

1

Example-4. For IV/CV characterization of 4-terminal device

Model/Option Description Qty

B1500A Semiconductor Device

Analyzer Mainframe

B1500A- 015/ 030 1.5 m or 3 m length of

bundled cables

B1500A-A01 (or
A02)

B1500A-A20 Capacitance measurement

N1301A Accessories for CMU 1

N1301A-10 0 SMU CMU unify unit (SCUU) 1

N1301A-10 2 SCUU cable, 3 m (Optional)

N1301A-110 SCUU magnetic stand

N1301A-200 Guard switch unit (GSWU)

N1301A-201/ 202 GSWU cable, 1.5 m or 3

B1500A-A5F Test fixture for packaged

Four MPSMU (or HRSMU)
and eight triaxial cables

add-on package, adds the
MFCMU and one CMU cable

* Note the total cable
length.

(Optional)

(Optional)

m (Optional. Required if
GSWU is ordered.)

device measurement, adds
one 16442B (Optional)

1

1

1

1

1

1

1

1

1

26 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration, continued

Example-5. For 50µs pulse using one MCSMU for 4-terminal device

Model/Option Description Qty

B1500A Semiconductor Device

Analyzer Mainframe

B1500A- 015/ 030 1.5 m or 3 m length of

bundled cables

B1500A-A00 Empty package for custom

solution, contains no
measurement module

B15 0 0 A-A11
(or A17)

B1500A-A1A Adds one MCSMU,

B1500A-A5F Test fixture for packaged

16494A Triaxial cable (Select cable

Adds one MPSMU (or
HRSMU) and two triaxial
cables

connection box (N1255A)
and two triaxial cables

device measurement, adds
one 16442B (Optional)

length option)

1

1

1

2

1

1

4

Example-6. For 50µs pulse using two MCSMU for 4-terminal device

Model/Option Description Qty

B1500A Semiconductor Device

Analyzer Mainframe

B1500A- 015/0 30 1.5 m or 3 m length of

bundled cables

B1500A-A00 Empty package for custom

solution, contains no
measurement module

B15 0 0 A-A11
(or A17)

B15 0 0 A-A1B Adds two MCSMU,

B1500A-A5F Test fixture for packaged

16494A Triaxial cable (Select cable

Adds one MPSMU (or
HRSMU) and two triaxial
cables

connection box (N1255A)
and four triaxial cables

device measurement, adds
one 16442B (Optional)

length option)

1

1

1

1

1

1

6

27 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration, continued

Example-7. For flash memory cell characterization (2 pulse channels)

Model/Option Description Qty

B1500A Semiconductor Device

Analyzer Mainframe

B1500A- 015/ 030 1.5 m or 3 m length of

bundled cables

B1500A-A04 Flash memory cell

measurement package

B1500A-A5F Test fixture for packaged

device measurement, adds
one 16442B (Optional)

1

1

1

1

Example-8. For flash memory cell characterization (3 or 4 pulse channels)

Model/Option Description Qty

B1500A Semiconductor Device

Analyzer Mainframe

B1500A- 015/ 030 1.5 m or 3 m length of

bundled cables

B1500A-A04 Flash memory cell

measurement package

B1500A-A25 Adds one HVSPGU and two

SPGU cables

1644 0A SMU/PGU pulse generator

selector

1644 0A- 003 Control cable, 40 cm for

second selector

B1500A-A5F Test fixture for packaged

device measurement, adds
one 16442B (Optional)

1

1

1

1

1

1

1

28 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

B1500A Configuration, continued

Example-9. For NBTI measurement using WGFMU with DC probe

Model/Option Description Qty

B1500A Semiconductor Device

Analyzer Mainframe

B1500A- 015/ 030 1.5 m or 3 m length of

bundled cables

B1500A-A00 Empty package for custom

solution, contains no
measurement module

B1500A-A11 (or
A17)

B1500A-A30 (or
A31)

B1500A-A3P WGFMU probe cable kit 1

Adds one MPSMU (or
HRSMU) and two triaxial
cables

WGFMU, RSU and cables 1

(if the connection adapter is
required)

1

1

1

2

29 | Keysight | B1500A Semiconductor Device Analyzer - Configuration Guide

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