E4980A Precision LCR Meter
20 Hz to 2 MHz
Data Sheet
Agilent
2
All specifications apply to the conditions of a 0 to 55 °C temperature range, unless
otherwise stated, and 30 minutes after the instrument has been turned on.
Specifications (spec.): Warranted performance. Specifications include guardbands to
account for the expected statistical performance distribution, measurement uncertainties,
and changes in performance due to environmental conditions.
Supplemental information is provided as information that is useful in operating the instrument, but is not covered by the product warranty. This information is classified as either
typical or nominal.
Typical (typ.): Expected performance of an average unit without taking guardbands into
account.
Nominal (nom.): A general descriptive term that does not imply a level of performance.
When measurement conditions fall under multiple categories in a table, apply the best value.
For example, basic accuracy Ab is 0.01% under the following conditions;
Measurement time mode SHORT
Test frequency 125 Hz
Test signal voltage 0.3 Vrms
Definitions
How to Use Tables
3
Measurement functions
Measurement parameters
• Cp-D, Cp-Q, Cp-G, Cp-Rp
• Cs-D, Cs-Q, Cs-Rs
• Lp-D, Lp-Q, Lp-G, Lp-Rp, Lp-Rdc
1
• Ls-D, Ls-Q, Ls-Rs, Ls-Rdc
1
•R-X
•Z-θd, Z-θr
•G-B
•Y-θd, Y-θr
• Vdc-Idc
1
Definitions
Cp Capacitance value measured with parallel-equivalent circuit model
Cs Capacitance value measured with series-equivalent circuit model
Lp Inductance value measured with parallel-equivalent circuit model
Ls Inductance value measured with series-equivalent circuit model
D Dissipation factor
Q Quality factor (inverse of D)
G Equivalent parallel conductance measured with parallel-equivalent circuit model
Rp Equivalent parallel resistance measured with parallel-equivalent circuit model
Rs Equivalent series resistance measured with series-equivalent circuit model
Rdc Direct-current resistance
R Resistance
X Reactance
Z Impedance
Y Admittance
θd Phase angle of impedance/admittance (degree)
θr Phase angle of impedance/admittance (radian)
B Susceptance
Vdc Direct-current voltage
Idc Direct-current electricity
Deviation measurement function: Deviation from reference value and percentage of
deviation from reference value can be output as the result.
Equivalent circuits for measurement: Parallel, Series
Impedance range selection: Auto (auto range mode), manual (hold range mode)
Trigger mode: Internal trigger (INT), manual trigger (MAN), external trigger (EXT), GPIB
trigger (BUS)
Basic Specifications
1. Option E4980A-001 is required.
Table 1. Trigger delay time
Range 0 s - 999 s
Resolution 100 µs (0 s - 100 s)
1 ms (100 s - 999 s)
Table 2. Step delay time
Range 0 s - 999 s
Resolution 100 µs (0 s - 100 s)
1 ms (100 s - 999 s)
Measurement terminal: Four-terminal pair
Test cable length: 0 m, 1 m, 2 m, 4 m
Measurement time modes: Short mode, medium mode, long mode.
Table 3. Averaging
Range 1 - 256 measurements
Resolution 1
Test signal
Table 4. Test frequencies
Test frequencies 20 Hz - 2 MHz
Resolution 0.01 Hz (20 Hz - 99.99 Hz)
0.1 Hz (100 Hz - 999.9 Hz)
1 Hz (1 kHz - 9.999 kHz)
10 Hz (10 kHz - 99.99 kHz)
100 Hz (100 kHz - 999.9 kHz)
1 kHz (1 MHz - 2 MHz)
Measurement accuracy ± 0.01%
Table 5. Test signal modes
Normal Program selected voltage or current at the measurement
terminals when they are opened or short-circuited, respectively.
Constant Maintains selected voltage or current at the device under test
(DUT) independently of changes in impedance of DUT.
4
5
Signal level
Table 6. Test signal voltage
Range 0 Vrms - 2.0 Vrms
Resolution 100 µVrms (0 Vrms - 0.2 Vrms)
200 µVrms (0.2 Vrms - 0.5 Vrms)
500 µVrms (0.5 Vrms - 1 Vrms)
1 mVrms (1 Vrms - 2 Vrms)
Accuracy Normal ±(10% + 1 mVrms) Test frequency ≤ 1 MHz: spec.
Constant
1
±(6% + 1 mVrms) Test frequency > 1 MHz: typ.
Table 7. Test signal current
Range 0 Arms - 20 mArms
Resolution 1 µArms (0 Arms - 2 mArms)
2 µArms (2 mArms - 5 mArms)
5 µArms (5 mArms - 10 mArms)
10 µArms (10 mArms - 20 mArms)
Accuracy Normal ±(10% + 10 µArms) Test frequency ≤ 1 MHz: spec.
Constant
1
±(6% + 10 µArms) Test frequency > 1 MHz: typ.
Output impedance: 100 Ω (nominal)
Test signal level monitor function
• Test signal voltage and test signal current can be monitored.
• Level monitor accuracy.
Table 8. Test signal voltage monitor accuracy (Vac)
Test signal voltage
2
Test frequency Specification
5 mVrms - 2 Vrms ≤ 1 MHz ± (3% of reading value + 0.5 mVrms)
> 1 MHz ± (6% of reading value + 1 mVrms)
Table 9. Test signal current monitor accuracy (lac)
Test signal current
2
Test frequency Specification
50 µArms - 20 mArms ≤ 1 MHz ± (3% of reading value + 5 µArms)
> 1 MHz ± (6% of reading value + 10 µArms)
1. When auto level control function is on.
2. Monitored test signal level.
6
Measurement display ranges
Table 10 shows the range of measured value that can be displayed on the screen.
Table 10. Allowable display ranges for measured values
Parameter Measurement display range
Cs, Cp ± 1.000000 aF to 999.9999 EF
Ls, Lp ± 1.000000 aH to 999.9999 EH
D ± 0.000001 to 9.999999
Q ± 0.01 to 99999.99
R, Rs, Rp, ± 1.000000 aΩ to 999.9999 EΩ
X, Z, Rdc
G, B, Y ± 1.000000 aS to 999.9999 ES
Vdc ± 1.000000 aV to 999.9999 EV
Idc ± 1.000000 aA to 999.9999 EA
θr ± 1.000000 arad to 3.141593 rad
θd ± 0.0001 deg to 180.0000 deg
D% ± 0.0001 % to 999.9999 %
a: 1 x 10
-
18
, E: 1 x 10
18
7
Absolute measurement accuracy
The following equations are used to calculate absolute accuracy.
Absolute accuracy Aa of |Z|, |Y|, L, C, R, X, G, B (L, C, X, and B accuracies apply
when Dx ≤ 0.1, R and G accuracies apply when Qx ≤ 0.1 )
Equation 1. Aa = Ae + Acal
Aa Absolute accuracy (% of reading value)
Ae Relative accuracy (% of reading value)
Acal Calibration accuracy (%)
where G accuracy is applied only to G-B measurements.
D accuracy (when Dx ≤ 0.1)
Equation 2. De + θcal
Dx Measured D value
De Relative accuracy of D
θcal Calibration accuracy of θ (radian)
Q accuracy (When Qx × Da < 1)
Equation 3.
±
(Qx
2
×
Da)
(1 Qx × Da)
Qx Measured Q value
Da Absolute accuracy of D
θ accuracy
Equation 4. θe + θcal
θe Relative accuracy of θ (degree)
θcal Calibration accuracy of θ (degree)
±
8
G accuracy (when Dx ≤ 0.1)
Equation 5. Bx + Da (S)
Bx = 2πfCx =
1
2πfLx
Dx Measured D value
Bx Measured B value (S)
Da Absolute accuracy of D
f Test frequency (Hz)
Cx Measured C value (F)
Lx Measured L value (H)
where the accuracy of G is applied to Cp-G measurements.
Absolute accuracy of Rp (when Dx ≤ 0.1)
Equation 6.
±
Rpx × Da
(Ω)
Dx Da
Rpx Measured Rp value (Ω)
Dx Measured D value
Da Absolute accuracy of D
Absolute accuracy of Rs (when Dx ≤ 0.1)
Equation 7. Xx × Da (Ω)
Xx = 1 = 2πfLx
2πfCx
Dx Measured D value
Xx Measured X value (Ω)
Da Absolute accuracy of D
f Test frequency (Hz)
Cx Measured C value (F)
Lx Measured L value (H)
±
9
Relative accuracy
Relative accuracy includes stability, temperature coefficient, linearity, repeatability, and
calibration interpolation error. Relative accuracy is specified when all of the following
conditions are satisfied:
• Warm-up time: 30 minutes
• Test cable length: 0 m, 1 m, 2 m, or 4 m (Agilent 16047A/B/D/E)
• DC bias current level monitor ≤ 100 mA
• The DC bias current does not exceed a set value within each range of the DC
bias current
• A “Signal Source Overload” warning does not appear.
When the test signal current exceeds a value in table 11 below, a “Signal
Source Overload” warning appears.
Table 11.
Test signal voltage Test frequency Condition
1
≤ 2 Vrms – –
> 2 Vrms ≤ 1 MHz the smaller value of either 110 mA or
130 mA - 0.0015 × Vac × (Fm / 1 MHz) × (L_cable + 0.5)
> 1 MHz 70 mA - 0.0015 × Vac × (Fm / 1 MHz) × (L_cable + 0.5)
Vac [V] Test signal voltage
Fm [Hz] Test frequency
L_cable [m] Cable length
• OPEN and SHORT corrections have been performed.
• Bias current isolation: Off
• The optimum impedance range is selected by matching the impedance of DUT to the
effective measuring range.
|Z|, |Y|, L, C, R, X, G, and B accuracy (L, C, X, and B accuracies apply when
Dx ≤ 0.1, R and G accuracies apply Qx ≤ 0.1)
Relative accuracy Ae is given as:
Equation 8. Ae = [Ab + Zs /|Zm| × 100 + Yo × |Zm| × 100 ] × Kt
Zm Impedance of DUT
Ab Basic accuracy
Zs Short offset
Yo Open offset
Kt Temperature coefficient
D accuracy
D accuracy De is given as
• when Dx ≤ 0.1
Equation 9. De = ±Ae/100
Dx Measured D value
Ae Relative accuracies of |Z|, |Y|, L, C, R, X, G, and B
• when Dx > 0.1, multiply De by (1 + Dx)
1. When the calculation result is a negative value,
0 A is applied.
10
Q accuracy (when Q x De < 1)
Q accuracy Qe is given as:
Equation 10. Qe = ±
(Qx
2
× De)
(1 Qx × De)
Qx Measured Q value
De Relative D accuracy
θ accuracy
θ accuracy θe is given as:
Equation 11. θe =
180 × Ae
(deg)
π× 100
Ae Relative accuracies of |Z|, |Y|, L, C, R, X, G, and B
G accuracy (when Dx ≤ 0.1)
G accuracy Ge is given as:
Equation 12. Ge = Bx × De (S)
Bx = 2πfCx =
1
2πfLx
Ge Relative G accuracy
Dx Measured D value
Bx Measured B value
De Relative D accuracy
f Test frequency
Cx Measured C value (F)
Lx Measured L value (H)
Rp accuracy (when Dx ≤ 0.1)
Rp accuracy Rpe is given as:
Equation 13. Rpe = ±
Rpx × De
(Ω)
Dx De
Rpe Relative Rp accuracy
Rpx Measured Rp value (Ω)
Dx Measured D value
De Relative D accuracy
Rs accuracy (when Dx ≤ 0.1)
Rs accuracy Rse is given as:
Equation 14. Rse = Xx × De (Ω)
Xx = 1 = 2πfLx
2πfCx
Rse Relative Rs accuracy
Dx Measured D value
Xx Measured X value (Ω)
De Relative D accuracy
f Test frequency (Hz)
Cx Measured C value (F)
Lx Measured L value (H)
±
±
11
Example of C-D accuracy calculation
Measurement conditions
Test Frequency: 1 kHz
Measured C value: 100 nF
Test signal voltage: 1 Vrms
Measurement time mode: Medium
Measurement temperature: 23 °C
Ab = 0.05%
|Zm| = 1 / (2π×1 × 10
3
× 100 × 10-9) = 1590 Ω
Zs = 0.6 mΩ×(1 + 0.400/1) × (1 + √(1000/1000) = 1.68 mΩ
Yo = 0.5 nS × (1 + 0.100/1) × (1 + √(100/1000) = 0.72 nS
C accuracy: Ae = [0.05 + 1.68 m/1590 × 100 + 0.72 n × 1590 × 100] × 1 = 0.05%
D accuracy: De = 0.05/100 = 0.0005
Basic accuracy
Basic accuracy Ab is given below.
Table 12. Measurement time mode = SHORT
Test signal voltage
Test 5 mVrms - 50 mVrms - 0.3 Vrms - 1 Vrms - 10 Vrms frequency [Hz] 50 mVrms 0.3 Vrms 1 Vrms 10 Vrms 20 Vrms
20 - 125 (0.6%) × 0.60% 0.30% 0.30% 0.30%
(50 mVrms/Vs)
125 - 1 M (0.2%) × 0.20% 0.10% 0.15% 0.15%
(50 mVrms/Vs)
1 M - 2 M (0.4%) × 0.40% 0.20% 0.30% 0.30%
(50 mVrms/Vs)
Table 13. Measurement time mode = MED, LONG
Test signal voltage
Test 5 mVrms - 50 mVrms - 0.3 Vrms - 1 Vrms - 10 Vrms frequency [Hz] 50 mVrms 0.3 Vrms 1 Vrms 10 Vrms 20 Vrms
20 - 125 (0.25%) × 0.25% 0.10% 0.15% 0.15%
(30 mVrms/Vs)
125 - 1 M (0.1%) × 0.10% 0.05% 0.10% 0.15%
(30 mVrms/Vs)
1 M - 2 M (0.2%) × 0.20% 0.10% 0.20% 0.30%
(30 mVrms/Vs)
Vs [Vrms] Test signal voltage
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