Keysight (Agilent) B1500A Users Guide

Agilent B1500A

Semiconductor Device
Analyzer

User’s Guide

Agilent Technologies

Notices

© Agilent Technologies 2005, 2006, 2007

No part of this manual may be reproduced in
any form or by any means (including elec­tronic storage and retrieval or translation
into a foreign language) without prior agree­ment and written consent from Agilent
Technologies, Inc. as governed by United
States and international copyright laws.

Manual Part Number

B1500-90004

Edition

Edition 1, July 2005
Edition 2, December 2005
Edition 3, April 2006
Edition 4, January 2007
Edition 5, June 2007

Agilent Technologies, Inc.
5301 Stevens Creek Blvd
Santa Clara, CA 95051 USA

Warranty

The material contained in this docu­ment is provided “as is,” and is sub­ject to being changed, without notice,
in future editions. Further, to the max­imum extent permitted by applicable
law, Agilent disclaims all warranties,
either express or implied, with regard
to this manual and any information
contained herein, including but not
limited to the implied warranties of
merchantability and fitness for a par­ticular purpose. Agilent shall not be
liable for errors or for incidental or
consequential damages in connec­tion with the furnishing, use, or per­formance of this document or of any
information contained herein. Should
Agilent and the user have a separate
written agreement with warranty
terms covering the material in this
document that conflict with these
terms, the warranty terms in the sep­arate agreement shall control.

Tec hn ol og y L i c e ns es

The hardware and/or software described in
this document are furnished under a license
and may be used or copied only in accor­dance with the terms of such license.

defined in FAR 52.227-19(c)(1-2) (June

1987). U.S. Government users will receive
no greater than Limited Rights as defined in
FAR 52.227-14 (June 1987) or DFAR

252.227-7015 (b)(2) (November 1995), as
applicable in any technical data.

Restricted Rights Legend

If software is for use in the performance of a
U.S. Government prime contract or subcon­tract, Software is delivered and licensed as
“Commercial computer software” as
defined in DFAR 252.227-7014 (June 1995),
or as a “commercial item” as defined in FAR

2.101(a) or as “Restricted computer soft­ware” as defined in FAR 52.227-19 (June

1987) or any equivalent agency regulation or
contract clause. Use, duplication or disclo­sure of Software is subject to Agilent Tech­nologies’ standard commercial license
terms, and non-DOD Departments and
Agencies of the U.S. Government will
receive no greater than Restricted Rights as

DECLARATION OF CONFORMITY

According to ISO/IEC Guide 22 and CEN/CENELEC EN 45014

Manufacturer’s Name:

Agilent Technologies International sarl

Manufacturer’s Address:
Supplier’s Address:

Rue de la Gare 29
CH - 1110 Morges
Switzerland

Declares under sole responsibility that the product as originally delivered
Product Name:

Semiconductor Device Analyzer

High Power Source/Monitor Unit Mo du le
Medium Power Source/Monitor Unit Module
High Resolution Source/Monitor Unit Module
Multi Frequency Capacitance Measurement Unit Module

Model Number:

Agilent B1500A

Agilent B1510A
Agilent B1511A
Agilent B1517A
Agilent B1520A

Product Options:

This declaration covers all options of the above product(s)

complies with the essential requirements of the following applicable European Directives, and carries
the CE marking accordingly:

Low Voltage Directive (73/23/EEC, amended by 93/68/EEC)
EMC Directive (89/336/EEC, amended by 93/68/EEC)

and conforms with the following product standards
EMC Standard

IEC 61326:2002 / EN 61326:02
CISPR 11:1999+A2 / EN 55011:1998+A1

IEC 61000-4-2:2001 / EN 61000-4-2:1995+A1+A2
IEC 61000-4-3:2002 / EN 61000-4-3:1996+A1+A2
IEC 61000-4-4:1995+A1+A2 / EN 61000-4-4:1995+A1
IEC 61000-4-5:2001 / EN 61000-4-5:1995+A1
IEC 61000-4-6:2001 / EN 61000-4-6:1996+A1
IEC 61000-4-11:2001 / EN 61000-4-11:1994+A1

Canada: ICES-001:1998
Australia/New Zealand: AS/NZS 2064.1

Limit

Group 1 Class A
4 kV CD, 8 kV AD
3 V/m, 80-1000 MHz

0.5 kV signal lines, 1 kV power lines

0.5 kV line-line, 1 kV line-ground
3 V, 0.15-80 MHz
1 cycle, 100%

The product was tested in a typical configuration with Agilent Technologies test systems.

Safety

IEC 61010-1:2001 / EN 61010-1:2001
Canada: CSA C22.2 No. 1010.1:1992, NRTL/C

Supplementary Information:
This DoC applies to above-listed products placed on the EU market after:

Jun 14, 2005

Date

Toshiyuki Kawaji

QA Manager
Agilent Technologies

• Herstellerbescheinigung

GEÄUSCHEMISSION
Lpa < 70 dB
am Arbeitsplatz
normaler Betrieb
nach DIN 45635 T. 19

• M

anufacturer’s Declaration

ACO

USTIC NOISE EMISSION
Lpa < 70dB
operator position
normal operation
per ISO 7779

NOTE This ISM device complies with Canadian ICES-001.

Cet appareil ISM est conforme ?Hla norme NMB-001 du Canada.

This product complies with the WEEE Directive (2002/96/EC) marking requirements.
The affixed label indicates that you must not discard this electrical/ electronic product
in d

omestic household waste.

Product Category: With reference to the equipment types in the WEEE Directive
Ann

ex I, this product is classed as a “Monitoring and Control instrumentation”

product.

Do not dispose in domestic household waste.

To return unwanted products, contact your local Agilent office, or see
www

.agilent.com/environment/product/ for more information.

Microsoft and Windows are registered trademarks of Microsoft Corporation. All other trademarks are the property of their
respective owners. EasyEXPERT is a trademark of Agilent Technologies.

Safety Summary

The following general safety precautions must be observed during all phases of
operation, service, and repair of this instrument. Failure to comply with these
precautions or with specific warnings elsewhere in this manual may impair the
protections provided by the equipment. In addition, it violates safety standards of
design, manufacture, and intended use of the instrument. Agilent Technologies, Inc.
assumes no liability for customer’s failure to comply with these requirements.

NOTE Agilent B1500 complies with INSTALLATION CATEGORY II for mains input and

INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION
DEGREE 2 defined in IEC 1010-1.

Agilent B1500 is an INDOOR USE product.

NOTE LED in Agilent B1500 is Class 1 in accordance with IEC 825-1. CLASS 1 LED PRODUCT.

• GROUND THE INSTRUMENT

T

his is Safety Class I instrument. To minimize shock hazard, the instrument chassis

and c

abinet must be connected to an electrical ground. The power terminal and the
power cable must meet International Electrotechnical Commission (IEC) safety
standards.

• DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE

o not operate the instrument in the presence of flammable gases or fumes.

D
Ope

ration of any electrical instrument in such an environment constitutes a

definite safety hazard.

• KEEP AWAY FROM LIVE CIRCUITS

eration personnel must not remove instrument covers. Component replacement

Op
and in

ternal adjustments must be made by qualified maintenance personnel. Do
not replace components with power cable connected. Under certain conditions,
dangerous voltages may exist even with the power cable removed. To avoid
injuries, always disconnect power and discharge circuits before touching them.

• DO NOT SERVICE OR ADJUST ALONE

not attempt internal service or adjustment unless another person, capable of

Do
ren

dering first aid and resuscitation, is present.

• DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT

Because of the danger of introducing additional hazards, do not install substitute
pa

rts or perform any unauthorized modification to the instrument. Return the
instrument to a Agilent Technologies Sales and Service Office for services and
repair to ensure that safety features are maintained.

• DANGEROUS PROCEDURE WARNINGS

arnings, such as example below, precede potentially dangerous procedures

W
th

roughout this manual. Instructions contained in the warnings must be followed.

WARNING Dangerous Voltage, capable of causing death, are present in this instrument. Use

extreme caution when handling, testing, and adjusting.

Safety Symbols

>

The general definitions of safety symbols used on equipment or in manuals are listed
below.

Instruction manual symbol: the product will be ma



necessary for the user to refer to the instruction manual in order to protect against

mage to the instrument.

da

Indicates dangerous voltage and potential for electrical shock. Do not touch terminals
that have this symbol when instrument is on.

Protective conductor terminal. For protection against electrical shock in case of a fault.
Used with field wiring terminals to indicate the terminal which must be connected to

d before operating equipment.

groun

Frame or chassis terminal. A connection to the frame (chassis) of the equipment which
normally includes all exposed metal structures.

Indicates earth (ground) terminal.

Alternating current.

`

Direct current.

STANDBY (Supply).

Means INSTALLATION CATEGORY I. Measurement terminals on the rear panel comply

&$7,

with INSTALLATION CATEGORY I.

WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice, condition

or the like, which, if not correctly performed or adhered to, could result in injury or
death to personal.

rked with this symbol when it is

CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,

practice, condition or the like, which, if not correctly performed or adhered to, could
result in damage to or destruction of part or all of the product.

HIGH VOLTAGE SHOCK HAZARD

Agilent B1500 can force dangerous voltages (200 V for HPSMU, and 100 V for
MPSMU/HR

SMU) at the force, guard, and sense terminals. To prevent electric
shock hazard, the following safety precautions must be observed during the use of
Agilent B1500.

• Use a three-conductor AC power cable to connect cab

inet (if used) and Agilent

B1500 to an electric ground (safety ground).

• If you do not use Agilent 16442 Test Fixture, make sure to connect the Interlock

termi

nal to a switch that turns off when the shielding box access door is opened.

• Confirm periodically that interlock function works normally.

• Before touching the connections of the force, guard, and sense terminals, turn

Ag

ilent B1500 off and discharge any capacitors whenever possible. If you do
not turn Agilent B1500 off, complete “all” of the following items, regardless of
any Agilent B1500 settings.

• T erminate measurem ent by pressing Stop k ey, confirm that the Measurement

s indicator is not lit.

statu

• Confirm that the

High Voltage indicator is not lit.

• Open the shielding box access door (open the Interlock terminal).

• Discharge any capacitors if the capacitance is connected to an SMU.

• Warn workers in the vicinity of Agilent B1500 about dangerous conditions.

高電圧感電注意

Agilent B1500のフォース、ガード、センス端子には、危険電圧が出力されることが
あります（HPSMU の場合は最大± 200 Vdc、MPSMU

Vdc）。感電事故防止のため、必ず以下の事柄を守ってください。

/HRSMU の場合は最大± 100

•3極電源ケーブルを使用して Agilent

• Agilent 16442 テスト・フィクスチャ以外のフィクスチャ、あるいはプローバを

使用する場合には、シールド・ボックスにインターロック回路を接続すること。
インターロック回路とは、シールド・ボックスの蓋を開けた時に Agilent
の Interlock 端子を開放にすることができる回路のことをいいます。

• インターロック機能が正常であることを定期的に確認すること。

• フォース、ガード、センス端子に繋がる接続部に触れる前には、測定器の電源

を切ること。また、測定系にキャパシタが接続されている場合は、キャパシタ
を放電すること。電源を切らない場合は、以下の事項を全て実施すること。

• Stopキーを押して Measurementインジケータが消灯したことを確認すること。

• 高電圧警告（High Voltage）インジケータが消灯していることを確認するこ

と。

• シールド・ボックスの蓋を開ける（Interlock 端子を開放する）こと。

• キャパシタが SMU に接続されているならば、キャパシタを放電すること。

• 周囲のほかの作業者に対しても、高電圧危険に対する注意を徹底すること。

B1500 を設置すること。

B1500

PRECAUTIONS POUR COMMOTION A HAUTE TENSION

Une tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU/
HRSM

U; 100 Vdc) émanant du dispositif Agilent B1500 peut être sortie aux bornes
de force, d'appareil de protection ou de détection. Les précautions suivantes doivent
être obserées contre commotion électrique accidentelle:

• Mettre à la terre le dispositif Agilent B1500 au moyen du câble d'alimentation

tripo

lair.

• En cas de hors service du disp ositif d'e ssai, FIXTUR E Agilent 1 6442, connecter

les bo

rnes de verrouillage (Interlock) de façon à ce que soit ouverte lorsque le

cle de la boîte de blindage est ouvert.

couver

• Essayer périodiquement le fonctionnement normal de verrouillage.

• Avant de toucher la partie connexion à partir des bornes de force, d'appareil de

pr

otection et de détection, mettre hor s tension le di spositif A gilent B1500 . Et, en
cas de condensateurs connectés au circuit de mesure, décharger ces
condensateurs. Lorsque l'alimentation n'est pas mise hors tension , les 4

t

ructions suivantes doivent être exécutées:

ins

• Finir la mésure en appuyant sur la touche “Stop”; verifier que l'indicateur

“Measurem

•S'assurer que soit allumé l'indicateur d'alarme de la haute tension.

• Ouvrir le convercle de la boîte de blindage (Ouvrir les bornes de

ver

rouillage).

ent” n'est pas allumé.

• En cas de condensateurs connectés à SMU, décharger les condensateurs.

•Alerter d'autres personnes autour de vous contre le danger de haute tension.

Achtung! Gefährliche Spannung

Von den Geräten Agilent B1500 können Spannungen an den Anschlüssen “Force,

Gu

ard und Sense” von bis zu 200 V ausgehen. Um elektrischem Schlag vorzubeu-

gen, ist bei der Benützung der Geräte Agilent B1500 folgendes zu beachten:

• Erden Sie das Kabinett (falls verwendet) sowie die Geräte Agilent B1500 mittels
dre

iadriger Netzleitungen.

• Wenn die Meßfassung, Agilent 16442, zwar angeschlossen, jedoch nicht
ve

rwendet wird, schließen Sie die Verriegelungsklemme (Interlock) so an, daß

geöffnetem Deckel die Stromzuführung zu Agilent 16442 auf jeden Fall

bei

terbrochen wird.

un

• Vergewissern Sie sich regelmäßig daß die Verriegelungsfunktion korrekt
arbe

itet.

• Schalten Sie die Geräte Agilent B1500 aus, und entladen Sie alle Kapazitäten
be

vor Sie die Anschlüsse “Force, Guard und Sense” berühren. Falls Sie die
Geräte Agilent B1500 nicht ausschalten, führen Sie unabhängig von den
Geräteeinstellungen folgende Schritt durch:

• Beenden Sie die gegenwärtige Messung durch Drücken der Stop Taste (die

urem

Meas

• Vergewissern Sie sich daß die Hochspannungswarnlampe erloschen ist.

• Öffnen Sie den Deckel der Meßfassung Agilent 16442 (die

Ve

rriegelungsklemme (Interlock) öffnen).

ent Leuchtdiode erlischt).

• Entladen Sie alle an SMUs angeschlossenen Kondensatoren (falls

vor

handen).

• Informieren Sie Personen in unmittelbarer Nähe d er Geräte Ag ilent B1500 über
die

Gefährlichkeit der bestehenden Hochspannung, und sichern Sie den Zugang

zum Prüf

platz zum Schutz Dritter.

Precautionary Statement

Agilent B1500 Semiconductor Device Analyzer operates in the Microsoft Windows XP
Professional environment. Agilent B1500 requires Agilent EasyEXPERT software, a
specially-designed Windows XP application program.

• About guarantee and support for Agilent B1500

ilent Technologies guarantees and supports the performance of Agilent B1500

Ag
for

the same condition as the preload condition when shipped from the factory.

• About updating Agilent EasyEXPERT and the Windows Update

Agilent Technologies confirms the operation of Agilent EasyEXPERT patch
prog

rams and important Windows security patches, and provides recommended
update information. Visit Agilent B1500 support site, download the patches, and
perform the software update.

• About Windows XP application programs and peripherals (including driver)

Using commercial products on Agilent B1500 is your responsibility. Agilent

chnologies cannot provide compatibility information for commercial products. If

Te
problems arise, perform Agilent B1500 system recovery.

•About servicing

Bench repair service is available at your
center. Be aware that the B1500 configuration might be updated to the latest one
without notice because of support issues.

The internal hard disk drive (HDD) might be initialized during servicing. If

ripherals are connected, they will be removed.

pe

When Agilent B1500 is returned, the internal HDD might be initialized. Peripherals
will

be returned separately.

•Other notes

• Back up the internal HDD to prevent loss of data by accident or failure.

• Protect Agilent B1500 from computer viruses.

• I

f you connect Agilent B1500 to the network, take care to protect it from

uter virus.

comp

nearest Agilent Technologies service

Working in Comfort

To optimize your comfort and productivity, it is important that you set up your work area
correctly and use your instrument properly. With that in mind, we have developed some
set-up and use recommendations for you to follow based on established ergonomic
principles. Improper and prolonged use of keyboards and input devices are among
those tasks that have been associated with repetitive strain injury (RSI) to soft tissues
in the hands and arms. If you experience discomfort or pain while using the instrument,
discontinue use immediately and consult your physician as soon as possible. For more
information on RSI you may wish to consult the About Repetitive Strain Injury section.
Please study the recommendations described below. Included there are references to
relevant parts of international standards, regulations and guidelines, such as ISO 9241
and the European Community Display Screen Equipment directive. You may also wish
to consult your employer’s human resources department or other relevant departments
for guidance specific to your company.

About Repetitive Strain Injury

Because your comfort and safety are our primary concern, we strongly recommend

h

at you use the instrument in accordance with established ergonomic principles and

t
recommendations. Scientific literature suggests that there may be a relationship
between injury to soft tissues -especially in the hands and arms- and prolonged
improper use of keyboards or other equipment requiring repeated motions of the
hands and forearms. This literature also suggests that there are many other risk
factors that may increase the chance of such injury, commonly called Repetitive Strain
Injury.

What is RSI?

Repetitive Strain Injury (RSI -also known as cumulative trauma disorder or repetitive

tio

n injury) is a type of injury where soft tissues in the body, such as muscles,

mo
nerves, or tendons, become irritated or inflamed. RSI has been a reported problem for
those who perform repetitive tasks such as assembly line work, meatpacking, sewing,
playing musical instruments, and computer work. RSI also has been observed in those
who frequently engage in activities such as carpentry, knitting, housework, gardening,
tennis, windsurfing and lifting children.

What causes RSI?

The specific causes of RSI have not been established. Nevertheless, the incidence of

I h

as been associated with a variety of risk factors, including:

RS

• Too many uninterrupted repetitions of an activity or motion.

• Performing an activity in an awkward or unnatural posture.

• Maintaining static posture for prolonged periods.

• Failing to take frequent short breaks.

• Other environmental and psychosocial factors.

In addition, there have been reports associating the occurrence of RSI with the use of
ke

boards, mice, and other input devices. Also, certain medical conditions, such as

y
rheumatoid arthritis, obesity and diabetes, may predispose some people to this type of
injury.

What if I experience discomfort?

If you are experiencing any discomfort, seek professional medical advice immediately.

pically, the earlier a problem is diagnosed and treated, the easier it is to resolve.

Ty

Mice and Other Input Devices

Various aspects of using mice and other inpu
discomfort or injury. Observing the following recommendations may reduce that risk.

• Try to keep your hand, wrist, and forearm in a neutral position while using your

e or other input device.

mous

• If you use your thumb to rotate the ball on a trackball or spaceball, keep it in a

relaxe

d, natural shape, and maintain a neutral posture in your hand, wrist, and

forearm.

• Hold the mouse gently by draping your fingers over it. Keep your hand relaxed and

ers loose. Do not grip the mouse tightly.

fing

• It takes very little pressure or force from your fingers to activate the buttons or

sc

roll wheel on your mouse, scrolling mouse, trackball, or other input device.
Using too much force can place unnecessary stress on the tendons and muscles
in your hands, wrists, and forearms.

• If you are using a scrolling mouse, be sure to keep your fingers and hand in a
xed, neutral position when activating the scroll wheel. Also, this type of mouse

rela
features software that can minimize the number of mouse movements or button
clicks.

• When using a mouse, trackball, or other input device, position it as close to the

yboard as possible, and keep it at the same level as you do not have to stretch

ke
while using it.

• Be sure to keep your mouse and trackball clean. Regular removal of accumulated

ust and dirt helps ensure proper tracking and reduces unnecessary hand and

d
wrist motions.

t devices may increase your risk of

In This Manual

This manual describes the front panel operation, installation, and functions of Agilent
Technologies B1500. This manual consists of the following chapters:

• Chapter 1, “Getting Started”

This chapter describes the basic operations of Agilent B1500.

• Chapter 2, “Introduction”

This chapter describes overview, specifications, accessories and options of
Ag

nt B1500.

ile

• Chapter 3, “Installation”

This chapter explains how to install Agilent B1500, and how to connect the device
un

der test to a test fixture.

• Chapter 4, “Using EasyEXPERT”

This chapter provides the reference inform

• Chapter 5, “Classic Test Definition”

This chapter provides the reference inform

• Chapter 6, “Application Test Definition”

This chapter provides the reference information of the application test definition.

• Chapter 7, “Function Details”

This chapter explains the several functions and initial settings of Agilent B1500.

• Chapter 8, “Built-in Programming Tool”

This chapter provides information about the built-in mathematical functions and
r

e

ad out functions.

• Chapter 9, “If You Have a Problem”

This chapter explains how to solve a problem if you encounter any problem, and
de

scribes error codes. This chapter also describes how to perform the system

recovery and the data backup/recovery.

ation of Agilent EasyEXPERT software.

ation of the classic test definition.

NOTE To get the latest firmware/software/electronic manuals/support information, visit

Agilent Technologies support site (http://www.home.agilent.com), and click
Additional Test & Measurement Products > Parametric Test, click Semiconductor
Parameter/Device Analyzer Series, and click B1500A Semiconductor Device Analyzer.
You can reach Agilent B1500A support site.

Online Documents

The following electronic documentation files are stored in Agilent B1500’s internal
hard disk drive. The files provide the information of how to use Agilent B1500 and
Agilent EasyEXPERT software.

Folder: C:\Program Files\Agilent\B1500\Documents

• B1500_help.chm

A part of Agilent B1500A User’s Guide.
from the Help menu on the EasyEXPERT main screen.

• B1500_Self_Trng.mht

Agilent B1500A Self-paced Training Manual that

This is the online help that can be opened

can be opened by a browser

Utilities

The following Windows execution files are stored in Agilent B1500’s internal hard disk
drive. For more information, see Chapter 7, “Function Details”.

Folder: C:\Program Files\Agilent\B1500\EasyEXPERT\Utilities

•ProberControl folder

This folder stores the execution files that can be used to control the chuck
mo

ement of a prober. See the readme file in this folder.

v

• SetupFileConverter.exe

This execution file is used to convert Agilent 4155/4156 setup file (.MES file) to
Agile

nt B1500A/EasyEXPERT setup file (.XTS file).

•sleep.exe

This execution file is used to put a wait time in the test execution flow of an
appli

cation test.

•XSLT folder

This folder stores the XSLT filters that can be used to export test record.

NOTE These execution files are just sample. If the samples damage your devices, Agilent

Technologies is NOT LIABLE for the damage. And the operation is not guaranteed.

Contents

1. Getting Started

2. Introduction

Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

Agilent EasyEXPERT Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

Front View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

Rear View. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-9

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

Measurement Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12

GNDU - Ground Unit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12

About SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13

B1510A HPSMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14

B1511A MPSMU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17

B1517A HRSMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

B1520A MFCMU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-24

Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26

Hardware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-28

Agilent EasyEXPERT Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-49

General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-55

Accessories and Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-56

3. Installation

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2

Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-3

Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

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Contents

Storaging/Shipping Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Ventilation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Inspection and Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

To Inspect B1500 and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

To Perform Initial Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

To Change GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

To Enable System Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

Installing Plug-in Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

Module Type and Locations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

Installing Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15

To Connect 16442B Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16

To Connect Connector Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18

Connecting the interlock terminal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20

To Connect ASU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21

To Connect SCUU/GSWU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25

To Connect GNDU Adapter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29

Mounting Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30

To Make an Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32

To Connect GNDU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-35

To Connect SMU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36

To Connect MFCMU Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-42

Connecting Measurement Devices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-43

Using Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-44

Using Connector Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-46

0A/B2201A . . . . . . . . . 3-50

Capacitance Compensation When Using Agilent B2

Required Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-51

To Create Compensation Data File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-53

Agilent B1500 User’s Guide, Edition 5

20

Contents

Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-56

Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-56

Self-test and Diagnostics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-56

Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-56

4. Using EasyEXPERT

Start EasyEXPERT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Workspace Configurator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

If there is no workspace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5

If there is one workspace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

If there are Workspace more than two . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

Main Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

Main Screen GUI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11

Test Result Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17

Test Results Data Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17

Export in My Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18

Test Results Data Folder Export. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18

Test Results Data Auto Export . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

Test Results Data Properties. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21

Data Display Manager . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22

Data Display Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23

Application Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24

Quick Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26

Repeat Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28

Organize Preset Group. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31

Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-33

SMU Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-33

SMU Zero Cancel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-34

CMU Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-35

Agilent B1500 User’s Guide, Edition 5

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Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-39

Main Frame . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-39

Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-40

Switching Matrix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-41

Event Log. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-42

ASU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-42

Extended Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-43

Switching Matrix Operation Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-44

Standby Channel Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-46

Data Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-47

Data Display GUI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-48

Display Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-58

Graph Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-59

List Display Properties. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-60

Tool Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-60

Data Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-63

Miscellaneous Operations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-64

Preview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-70

Preview Window GUI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-70

Preview Settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-72

5. Classic Test Definition

I/V Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

Channel Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

Multi Channel I/V Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

Channel Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10

I-V List Sweep. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12

Agilent B1500 User’s Guide, Edition 5

Contents

Channel Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-13

Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14

To Define Vector Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16

I/V-t Sampling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19

Channel Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-20

Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21

C-V Sweep. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-23

Channel Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-24

Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25

Switching Matrix Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27

Direct Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-29

Channel Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-30

Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-32

Advanced Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-33

Command Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-35

compenReZ. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-37

compenImZ. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-38

compenReY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-39

compenImY . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-40

Function Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-41

Auto Analysis Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-42

Display Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-45

SMU Range Setup Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-47

ADC and Integration Time Setup Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-49

Advanced Setup Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 -50

CMU Range Setup Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-51

Advanced Setup Window for C-V Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-52

Agilent B1500 User’s Guide, Edition 5

Contents

6. Application Test Definition

Test Definition Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

Test Specification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

Define vector data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9

Define Layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

Test Output. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16

Analysis Parameter Definition. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17

Test Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18

Defining/Editing Test Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19

Debugging Test Contents. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

Variable Inspector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24

External Variable Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-25

Local Variable Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26

Program Component . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28

Auto Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29

Data Display Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32

Display Data Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-33

GPIB I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-35

Message. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40

Data Store Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-41

Command Execution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-42

Using Command Execution. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-44

Command Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-44

Defining Numeric/Vector Input Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-45

Defining String/Numeric Input Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . 6-45

Defining Numeric Output Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-46

Defining Vector Output Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-46

Agilent B1500 User’s Guide, Edition 5

Contents

Defining String Output Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-46

Defining Format Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-47

Setup Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-48

7. Function Details

I/V Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3

Available Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3

Output Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4

Basic Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4

Subordinate Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6

Synchronous Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8

Pulsed Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9

Multi Channel I/V Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12

I/V-t Sampling Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13

Available Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13

Operation Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13

Setup Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-15

Time Data and Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-17

Source Output Sequence and Time Origin. . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-18

Sampling Completion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-18

C-V Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 -19

Available Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-19

Setup Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-19

Measurement Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-21

Four-Terminal Pair Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-23

Error Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-24

Sweep Abort Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-26

When abort occurs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-26

Standby Function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27

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Standby Channels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27

Standby State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-27

Output Sequence of Standby Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-28

To Use Standby Function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-29

Bias Hold Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-30

Current Offset Cancel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-31

SMU CMU Unify Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-33

Atto Sense and Switch Unit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-35

SMU Ranging Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-37

To Set Ranging Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-37

Auto Ranging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-38

Limited Auto Ranging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39

Fixed Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39

Compliance Range. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39

Enhanced Auto Ranging for Current Measurement. . . . . . . . . . . . . . . . . . . . . 7-40

SMU Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-41

Polarity and Output Area. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-41

Power Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42

To Set Compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-43

SMU Pulse. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-44

To Set Pulse Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-44

SMU Measurement Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45

Integration Time. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45

Overhead Time. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-47

To Specify Source Output Time. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-47

Wait Time. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48

Multiple Measurement Channels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-49

SMU Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-50

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SMU Series Resistor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-51

Interlock Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-52

Auto Power Off Function. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-53

Initial Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-54

Utility Programs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-56

Prober Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-56

SetupFileConverter.exe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-57

sleep.exe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-59

XSLT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-60

Desktop EasyEXPERT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-70

About Desktop EasyEXPERT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-71

System Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-72

To Install Desktop EasyEXPERT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-73

Before Starting Desktop EasyEXPERT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-73

To Start Desktop EasyEXPERT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-74

Execution Mode dialog box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-74

Start EasyEXPERT window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-75

To Change Execution Mode and GPIB Settings . . . . . . . . . . . . . . . . . . . . . . . 7-76

To Move the EasyEXPERT Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-76

To Update Desktop EasyEXPERT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-77

Using 4155B/4156B/4155C/4156C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-78

8. Built-in Programming Tool

Variables and Expressions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3

Expressions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-4

Built-in Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7

Read Out Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15

Functions for Marker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15

Functions for Cursor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15

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Functions for Line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-16

Functions for Two Line Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17

Script Program Statements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-19

9. If You Have a Problem

When You Operate B1500A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3

Power On Trouble . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3

SCUU is not Detected . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3

ASU is not Detected. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-4

External GPIB Devices are not Detected. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-4

To Simplify the Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-5

When You Perform Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-6

Measurement Takes More Time than Specified. . . . . . . . . . . . . . . . . . . . . . . . . 9-6

Noise Affects the Measured Values. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-7

Voltage Measurement Error is Large . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-8

SMU Oscillates for High-Frequency Device Measurements. . . . . . . . . . . . . . . 9-8

SMU Oscillates for Negative Resistance Measurements. . . . . . . . . . . . . . . . . . 9-9

Large Current Causes High Temperature (Thermal Drift). . . . . . . . . . . . . . . . 9-10

Measurement Damages the Device under Test . . . . . . . . . . . . . . . . . . . . . . . . 9-10

Leaving Connections Damages Devices after Measurement. . . . . . . . . . . . . . 9-10

Unexpected Sampling Measurement Data is Returned . . . . . . . . . . . . . . . . . . 9-11

MFCMU Causes Unbalance Condition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 - 11

Before Shipping to Service Center . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-12

To Check Module Slots . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-12

To Check ASU/HRSMU Combination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-12

To Make Backup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-12

B1500A System Recovery. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-13

To Initialize Database. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-13

To Update EasyEXPERT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-14

To Restore Database. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-14

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Data Backup and Recovery . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-15

Folders to Backup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-15

To Make Database Backup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-16

To Restore Database Backup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 -16

To Make Backup of Other Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17

To Restore Backup of Other Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-18

Error Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-19

Agilent EasyEXPERT Operation Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-19

Agilent FLEX Execution Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-44

Agilent B1500A Self-test/Calibration Error. . . . . . . . . . . . . . . . . . . . . . . . . . . 9-56

Setup File Converter Execution Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-63

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Agilent B1500 User’s Guide, Edition 5