Keysight E5250A User Manual

Keysight Technologies E5250A
Low Leakage Switch Mainframe

User’s Guide

Notices

Copyright Notice

© Keysight Technologies 1995-2015
No part of this manual may be reproduced in

any form or by any means (including electronic
storage and retrieval or translation into a for­eign language) without prior agreement and
written consent from Keysight Technologies
as governed by United States and interna­tional copyright laws.

Manual Part Number

E5250-90000

Edition

Edition 1, October 1995
Edition 2, January 1997
Edition 3, August 1997
Edition 4, January 2000
Edition 5, May 2000
Edition 6, January 2001
Edition 7, August 2003
Edition 8, July 2005
Edition 9, May 2008
Edition 10, July 2009
Edition 11, August 2011
Edition 12, September 2015

Printed in:

Printed in Malaysia

Published by:

Keysight Technologies, Inc.
1400 Fountaingrove Parkway
Santa Rosa, CA 95403 USA

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The hardware and/or software described in
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with the terms of such license.

Declaration of Conformity

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and for other Keysight products may be down­loaded from the Web. Go to http://

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on “Declarations of Conformity.” You can then
search by product number to find the latest
Declaration of Conformity.

U.S. Government Rights

The Software is “commercial computer soft­ware,” as defined by Federal Acquisition Reg­ulation (“FAR”) 2.101. Pursuant to FAR 12.212
and 27.405-3 and Department of Defense FAR
Supplement (“DFARS”) 227.7202, the U.S.
government acquires commercial computer
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license set forth in the EULA represents the
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among other things, that Keysight: (1) Furnish
technical information related to commercial
computer software or commercial computer
software documentation that is not customar­ily provided to the public; or (2) Relinquish to,
or otherwise provide, the government rights
in excess of these rights customarily provided
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rel ease , per form , di spla y, or disclo se co mmer ­cial computer software or commercial com­puter software documentation. No additional
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revise or otherwise modify the Software. With
respect to any technical data as defined by
FAR 2.101, pursuant to FAR 12.211 and

27.404.2 and DFARS 227.7102, the U.S. gov­ernment acquires no greater than Limited
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227.7103-5 (c), as applicable in any technical
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Warranty

THE MATERIAL CONTAINED IN THIS DOCU­MENT IS PROVIDED “AS IS,” AND IS SUBJECT
TO BEING CHANGED, WITHOUT NOTICE, IN
FUTURE EDITIONS. FURTHER, TO THE MAXI­MUM EXTENT PERMITTED BY APPLICABLE
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REGARD TO THIS MANUAL AND ANY INFOR­MATION CONTAINED HEREIN, INCLUDING
BUT NOT LIMITED TO THE IMPLIED WAR­RANTIES OF MERCHANTABILITY AND FIT­NESS FOR A PARTICULAR PURPOSE.
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OF THIS DOCUMENT OR OF ANY INFORMA­TION CONTAINED HEREIN. SHOULD KEY­SIGHT AND THE USER HAVE A SEPARATE
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TERMS COVERING THE MATERIAL IN THIS
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Latest Information

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manuals/specifications/support information,
go to www.keysight.com and type in the prod­uct number in the Search field at the top of the
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User’s Guide

B2900-9001x

xxxx 201x

Edition x

COMPLIANCE WITH GERMAN NOISE REQUIREMENTS

This is to declare that this product is in conformance with the German Regulation on Noise
Declaration for Machines (Lärmangabe

-3.GSGV Deutschland).

• Herstellerbescheinigung

GERÄUSCHEMISSION

Lpa < 70 dB

am Arbeitsplatz

normaler Betrieb

nach DIN 45635 T. 19

• Manufacturer’s Declaration

ACOUSTIC NOISE EMISSION

Lpa < 70dB

operator position

normal operation

per ISO 7779

nach der Maschinenlärminformation-Verordnung

South Korean Class A EMC declaration

This equipment is Class A suitable for professional use and is for use in electromagnetic
environments outside of the home.

Safety Summary

The following general safety precautions must be observed during all phases of operation,
service, and repair of this instrument. Failure to comply with these precautions or with
specific warnings elsewhere in this manual may impair the protections provided by the
instrument. In addition, it violates safety standards of design, manufacture, and intended
use of the instrument. Keysight Technologies assumes no liability for customer’s failure to
comply with these requirements.

Product manuals may be provided on CD-ROM or in printed form. Printed manuals are an
option for many products. Manuals may also be available on the Web. Go to

www.keysight.com and type the product model number in the Search field at the top of the

page.

NOTE Do not use this instrument in any manner not specified by the manufacturer. The protective

features of this instrument may be impaired if it is used in a manner not specified in the
operation instructions.

This instrument is an INDOOR USE product.

This instrument complies with INSTALLATION CATEGORY II for mains input and
INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION DEGREE 2
defined in IEC 61010-1.

If an instrument is marked CAT I (IEC Measurement Category I), or it is not marked with a
measurement category, its measurement terminals must not be connected to line-voltage
mains.

Safety of any system incorporating the equipment is the responsibility of the assembler of
the system.

WARNING Dangerous Voltage, capable of causing death, are present in this instrument. Use extreme

caution when handling, testing, and adjusting.

• DANGEROUS PROCEDURE WARNINGS

Warnings, as WARNING on the previous page, shall be complied. Procedures
throughout in this manual prevent you from potentially hazard. Their instructions
contained in the warnings must be followed.

• BEFORE APPLYING POWER

Verify that all safety precautions are taken. Make all connections to the instrument
before applying power. Note the instrument's external markings described under
“Safety Symbols”.

• GROUND THE INSTRUMENT

This is Safety Class I instrument. To minimize shock hazard, the instrument chassis and
cabinet must be connected to an electrical ground. The power terminal and the power
cable must meet International Electrotechnical Commission (IEC) safety standards.

• DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE

Do not operate the instrument in the presence of flammable gases or fumes. Operation
of any electrical instrument in such an environment constitutes a definite safety hazard.

• DO NOT REMOVE COVERS

No operator serviceable parts inside. Refer servicing to qualified personnel. To prevent
electrical shock do not remove covers.

• IN CASE OF DAMAGE

Instruments that appear damaged or defective should be made inoperative and
secured against unintended operation until they can be repaired by qualified service
personnel. Return the instrument to a Keysight Technologies sales or service office for
services and repair to ensure that safety features are maintained.

• USE ONL Y THE SPECIFIC ACCESSORIES

Specific accessories satisfy the requirements for specific characteristics for using the
instrument. Use the specific accessories, cables, adapters, and so on for safety
reasons.

Safety Symbols

>

^



CAT I

The general definitions of safety symbols used on equipment or in manuals are listed below.

Direct current.

Alternating current.

Earth ground terminal.

Protective conductor terminal. For protection against electrical shock in case of a fault.
Used with field wiring terminals to indicate the terminal which must be connected to
ground before operating equipment.

Frame or chassis terminal. A connection to the frame (chassis) of the equipment which
normally includes all exposed metal structures.

Grounded terminal which indicates the earth potential.

On supply.

Off supply.

Standby supply. The equipment will be marked with this symbol is not completely
disconnected from AC mains when power switch is in the standby position.

In position of a bi-stable push switch.

Out position of a bi-stable push switch.

Hazardous voltage and potential for electrical shock. Do not touch terminals that have this
symbol when the equipment is on.

Hot surface. Avoid contact. Surfaces are hot and may cause personal injury if touched.

Low temperature or freezing conditions. Avoid contact. Surfaces are cold and may cause
personal injury if touched.

Caution, refer to accompanying documentation. The equipment will be marked with this
symbol when it is necessary for the user to refer to the instruction manual.

Read operator's manual. To indicate that the operator's manual or card should be read
before continuing the operation.

Affixed to product containing static sensitive devices--use anti-static handling procedures
to prevent electrostatic discharge damage to component.

IEC Measurement Category I

The CE mark shows that the product complies with all applicable European Directives.

The CSA mark is a registered trademark of the Canadian Standards Association.

The RCM mark is a registered trademark of the Australian Communications Authority. This
signifies compliance with the Australian EMC Framework Regulations under the terms of
the Radio communications Act.

This ISM device complies with Canadian ICES-001.
Cet appareil ISM est conforme à la norme NMB-001 du Canada.

This is the symbol for an Industrial, Scientific and Medical, Group 1 Class A product. (CISPR

11)

Korea’s safety and EMC mark
China RoHS - Environmentally Green Product Label

China RoHS - Product with Toxic Substance 40 yr EPUP

The Chinese mark for paper-based packaging materials; Paperboard and Corrugated
Fiberboard

Plastic Material Coding Identification

WARNING A WARNING notice denotes a hazard. It calls attention to an operating procedure, practice,

or the like that, if not correctly performed or adhered to, could result in personal injury or
death. Do not proceed beyond a WARNING notice until the indicated conditions are fully
understood and met.

CAUTION A CAUTION notice denotes a hazard. It calls attention to an operating procedure, practice,

or the like that, if not correctly performed or adhered to, could result in damage to the
product or loss of important data. Do not proceed beyond a CAUTION notice until the
indicated conditions are fully understood and met.

This product complies with the WEEE Directive (2002/96/EC) marking requirements. The
affixed label indicates that you must not discard this electrical/ electronic product in
domestic household waste.

Product Category: With reference to the equipment types in the WEEE directive Annex 1,
this product is classified as a “Monitoring and Control instrumentation” product.

Do not dispose in domestic household waste.

To return unwanted products, contact your local Keysight office or visit the following
website for more information.

http://about.keysight.com/en/companyinfo/environment/

In This Manual

This manual is a user’s guide for Keysight E5250A, and consists of the following chapters.

1. "Introduction"

Provides an overview of the E5250A Low Leakage Switch Mainframe, E5252A 10×12
Matrix Switch, and E5255A 24 (8×3) Channel Multiplexer.

2. "Installation"

Describes requirements to install the E5250A and tasks for installation.

3. "Executing Self-Test and Leak Test"

Describes how to execute the three Self-Test items (Controller Test, Front Panel
Interface Test, and Relay Test) and the Leak Test.

4. "Setting up Measurement Environment"

Explains how to connect your instruments to the E5250A input, and how to connect the
E5250A output to your wafer prober or test fixture.

5. "Controlling the E5250A"

Introduces several methods for controlling the E5250A, gives basic information for
controlling the relay switches on the plug-in cards, and describes how to use Virtual
Front Panel (VFP) utility furnished with the E5250A.

6. "Programming the E5250A"

Describes how to create programs that contain SCPI commands to control the E5250A.

7. "Command Reference"

Describes the SCPI commands available to operate the E5250A via GPIB interface and
the status reporting structure.

8. "VXIplug&play Driver"

Introduces the VXIplug&play driver available for the E5250A.

9. "Executing Sample Programs"

Explains how to execute and modify the sample programs stored in the program disk
that is furnished with the E5250A.

10. "Error Messages"

Lists and describes the error messages for the E5250A.

11. "SCPI Command Summary"

This is a quick reference for the SCPI subsystem commands available for the E5250A.

NOTE For the specifications of the E5250A/E5252A/E5255A, see Data Sheet.

To get the latest Data Sheet, go to www.keysight.com/find/swm and click “Technical
Support” and “Specifications”.

Text Conventions

The following text conventions are used in this manual:

Screen Text

Represents text that appears on screen of the controller.

Italic Refers to a related document, or is used for emphasis.

Contents

1. Introduction

Keysight E5250A Product Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3

Front Panel Tour . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4

Rear Panel Tour . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4

Keysight E5252A Product Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6

Keysight E5255A Product Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8

Options and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12

2. Installation

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2

To Inspect the E5250A and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3

Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4

Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4

Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4

Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6

Storage and Shipping Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6

Installing the E5250A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-7

To Install Plug-in Card. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8

To Install Blank Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-9

To Configure E5255A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-10

E5255A Configuration Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-13

To Set GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-17

To Connect GPIB Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-17

Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-18

Performance Verification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-18

Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-18

Keysight E5250A User’s Guide, Edition 12

Contents

3. Executing Self-Test and Leak Test

Executing Self-Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

To Execute Self-Test (Standalone) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

To Execute Self-Test using External Controller . . . . . . . . . . . . . . . . . . . . 3-6

Using the Self-Test Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

To Start the Self-Test Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

To Execute Self-Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

To Execute Leak Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15

4. Setting up Measurement Environment

Connector Plates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Connector Plates for the E5252A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Connector Plates for E5255A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Blank Plate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Connecting 8-Channel Shielded Coaxial Cable . . . . . . . . . . . . . . . . . . . . . . 4-5

Mounting Connectors Directly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

To Make Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

To Connect Connectors to DUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13

Connecting the E5250A Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15

To Connect Instruments to Input Connectors . . . . . . . . . . . . . . . . . . . . . 4-15

To Connect Bias Source to the E5255A Bias Input . . . . . . . . . . . . . . . . . 4-18

To Connect GNDU to the E5250A Input . . . . . . . . . . . . . . . . . . . . . . . . . 4-18

Connecting the E5250A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

To Connect the E5252A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

To Connect the E5255A Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22

Measurement Cable Length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23

Keysight E5250A User’s Guide, Edition 12

Contents

5. Controlling the E5250A

Methods for Controlling the E5250A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-3

Creating Your Own Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-3

Modifying a Sample Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4

Using the Virtual Front Panel (VFP) Utility . . . . . . . . . . . . . . . . . . . . . . . . .5-4

Switch Control Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5

Channel List and Channel Configuration . . . . . . . . . . . . . . . . . . . . . . . . . .5-6

Connection Rule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9

Connection Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-10

Bias Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11

Couple Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-13

E5252A Channel List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-15

E5255A Channel List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-19

Using Virtual Front Panel Utility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-25

Functions of Virtual Front Panel Ut ility . . . . . . . . . . . . . . . . . . . . . . . . . .5-26

Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-27

Starting the Virtual Front Panel Utility . . . . . . . . . . . . . . . . . . . . . . . . . . .5-27

Confirming the E5250A Card Configurations . . . . . . . . . . . . . . . . . . . . . .5-28

Changing the VFP Setup Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-29

Defining Labels for the E5250A Input Ports . . . . . . . . . . . . . . . . . . . . . . .5-31

Making Connections and Changing the Setup Data . . . . . . . . . . . . . . . .5-33

Saving/Loading the Setup Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-42

6. Programming the E5250A

SCPI Programming Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3

SCPI Command Hierarchy . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-4

Controlling E5250A by Using HP BASIC . . . . . . . . . . . . . . . . . . . . . . . . . .6-5

Creating a Control Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-6

Defining Channel Configuration Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-8

Defining Connection Rule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-8

Keysight E5250A User’s Guide, Edition 12

Contents

Defining Connection Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9

Using Bias Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10

Using Couple Port (for E5252A only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11

Controlling Relay Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

Programming Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13

Channel Creation Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14

Bias Mode Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16

Couple Port Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19

Using the VFP Data Upload Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22

VFP Data Upload Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

Programming Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-25

Before Executing Your Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26

Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-27

Using the Capacitance Compensation Routine . . . . . . . . . . . . . . . . . . . . . 6-28

Capacitance Compensation Routine . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29

Required Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30

Programming Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32

Before Executing Your Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32

Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-32

7. Command Reference

Common Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4

Common Commands for E5250A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4

*CLS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5

*ESE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5

*ESR? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7

*IDN? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8

*OPC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9

*RST . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10

*SRE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-11

Keysight E5250A User’s Guide, Edition 12

Contents

*STB? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-13

*TST? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-14

*WAI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-14

:DIAGnostic Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-15

:DIAGnostic Command Tree . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-15

:DIAGnostic:TEST:CARD:CLEar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-16

:DIAGnostic:TEST:CARD[:EXECute]? . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-16

:DIAGnostic:TEST:CARD:STATe? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-17

:DIAGnostic:TEST:FRAMe:CLEar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-17

:DIAGnostic:TEST:FRAMe[:EXECute]? . . . . . . . . . . . . . . . . . . . . . . . . . . .7-18

:DIAGnostic:TEST:FRAMe:STATe? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-19

:ROUTe Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-20

:ROUTe Command Tre e. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-20

[:ROUTe]:BIAS:CHANnel:DISable:CARD . . . . . . . . . . . . . . . . . . . . . . . . .7-22

[:ROUTe]:BIAS:CHANnel:DISable[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . .7-22

[:ROUTe]:BIAS:CHANnel:DISable[:LIST]? . . . . . . . . . . . . . . . . . . . . . . . . .7-23

[:ROUTe]:BIAS:CHANnel:ENABle:CARD . . . . . . . . . . . . . . . . . . . . . . . . . .7-24

[:ROUTe]:BIAS:CHANnel:ENABle[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . .7-25

[:ROUTe]:BIAS:CHANnel:ENABle[:LIST]? . . . . . . . . . . . . . . . . . . . . . . . . .7-26

[:ROUTe]:BIAS:PORT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-27

[:ROUTe]:BIAS:PORT? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-28

[:ROUTe]:BIAS[:STATe] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-29

[:ROUTe]:BIAS[:STATe]? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-30

[:ROUTe]:CLOSe:CARD? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-30

[:ROUTe]:CLOSe[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-31

[:ROUTe]:CLOSe[:LIST]? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-31

[:ROUTe]:CONNection:RULE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-32

[:ROUTe]:CONNection:RULE? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-32

[:ROUTe]:CONNection:SEQuence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-33

[:ROUTe]:CONNection:SEQuence? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-34

[:ROUTe]:COUPle:PORT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-35

Keysight E5250A User’s Guide, Edition 12

Contents

[:ROUTe]:COUPle:PORT? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-36

[:ROUTe]:COUPle[:STATe] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-37

[:ROUTe]:COUPle[:STATe]? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-38

[:ROUTe]:FUNCtion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39

[:ROUTe]:FUNCtion? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39

[:ROUTe]:OPEN:CARD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-40

[:ROUTe]:OPEN[:LIST] . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-40

[:ROUTe]:OPEN[:LIST]? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-41

:SYSTem Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42

:SYSTem Command Tree . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-42

:SYSTem:CCONfig? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-43

:SYSTem:CDEScription? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-44

:SYSTem:CPON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-45

:SYSTem:CTYPe? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-46

:SYSTem:ERRor? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-47

:SYSTem:VERSion? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-47

Status Reporting Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48

Status Reporting Structure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48

Status Byte Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-50

Service Request Enable Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-52

Standard Event Status Register . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-53

Standard Event Status Enable Register . . . . . . . . . . . . . . . . . . . . . . . . . 7-54

Output Queue . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-55

8. VXIplug&play Driver

System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3

Installing VXIplug&play Driver. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4

Driver Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5

hpe5250a_biasChanCard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7

hpe5250a_biasChanList . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7

Keysight E5250A User’s Guide, Edition 12

Contents

hpe5250a_biasChanList_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-8

hpe5250a_biasPort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-9

hpe5250a_biasState . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-9

hpe5250a_close. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-10

hpe5250a_closeCard_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-10

hpe5250a_closeList. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-11

hpe5250a_closeList_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-12

hpe5250a_cmd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-12

hpe5250a_cmdData_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-13

hpe5250a_cmdInt . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-13

hpe5250a_cmdInt16Arr_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-14

hpe5250a_cmdInt16_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-14

hpe5250a_cmdInt32Arr_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-15

hpe5250a_cmdInt32_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-15

hpe5250a_cmdReal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-16

hpe5250a_cmdReal64Arr_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-16

hpe5250a_cmdReal64_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-17

hpe5250a_cmdString_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-17

hpe5250a_compenC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-18

hpe5250a_connRuleSeq . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-19

hpe5250a_couplePort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-20

hpe5250a_coupleState . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-21

hpe5250a_dcl. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-21

hpe5250a_error_message. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-22

hpe5250a_error_query. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-22

hpe5250a_errorQueryDetect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-23

hpe5250a_errorQueryDetect_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-23

hpe5250a_esr_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-24

hpe5250a_func . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-24

hpe5250a_init . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-25

hpe5250a_opc_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-25

hpe5250a_openCard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-26

Keysight E5250A User’s Guide, Edition 12

Contents

hpe5250a_openList. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-26

hpe5250a_openList_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-27

hpe5250a_readStatusByte_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-27

hpe5250a_reset. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-28

hpe5250a_revision_query. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-28

hpe5250a_selectCompenFile. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-29

hpe5250a_self_test. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-30

hpe5250a_testClear . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-30

hpe5250a_testExec_Q . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-31

hpe5250a_timeOut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-31

hpe5250a_timeOut_Q. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-31

9. Executing Sample Programs

Vth and Capacitance Measurement Program . . . . . . . . . . . . . . . . . . . . . . . . 9-3

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3

Setting up the Measurement Environment . . . . . . . . . . . . . . . . . . . . . . . . 9-7

Executing the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-9

Modifying the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-11

HCI Measurement Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17

Adding the Bias Source Control Routine . . . . . . . . . . . . . . . . . . . . . . . . . 9-23

Setting up the Measurement Environment . . . . . . . . . . . . . . . . . . . . . . . 9-24

Executing the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-27

Modifying the Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-35

10. Error Messages

Standard SCPI Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-3

Command Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-3

Execution Error . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-7

Device-Dependent Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-8

Query Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-9

Keysight E5250A User’s Guide, Edition 12

Contents

E5250A Specific Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-10

E5250A Channel Related Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-11

E5250A Card/Mode/Port Related Errors . . . . . . . . . . . . . . . . . . . . . . . .10-12

11. SCPI Command Summary

Keysight E5250A User’s Guide, Edition 12

Contents

Keysight E5250A User’s Guide, Edition 12

1 Introduction

Introduction

This chapter gives an overview of Keysight E5250A, E5252A, and E5255A.

• “Keysight E5250A Product Description”

• “Keysight E5252A Product Description”

• “Keysight E5255A Product Description”

• “Options and Accessories”

1- 2 Keysight E5250A User’s Guide, Edition 12

Keysight E5250A Product Description

Keysight E5250A Low Leakage Switch Mainframe is a computer-controlled
switching matrix mainframe designed for semiconductor dc characteristics
measurement applications. The E5250A has four slots for installing the modules
(plug-in cards) listed in

These cards can be used in various switching matrix configurations in the E5250A.
For example, using four E5252As, you can configure a maximum 10-input
48-output switching matrix, or using four E5255As, you can configure a maximum
2-input × 96-output multiplexer.

Table 1-1 Available Plug-in Cards for E5250A

Table 1-1.

Model No. Description

E5252A 10×12 Matrix Switch
E5255A 24 (8×3) Channel Multiplexer

Introduction

Keysight E5250A Product Description

Figure 1-1 E5250A Front Panel

Keysight E5250A User’s Guide, Edition 12 1- 3

Introduction
Keysight E5250A Product Description

Front Panel Tour

The E5250A has 2 hard keys and 4 LED indicators on the front panel as shown in

Figure 1-1.

LINE key Used to turn the E5250A on or off.

Line LED Turns on when the E5250A is turned on.

Local/Self Test key If "Remote" LED is on, pressing this key releases the

E5250A from remote GPIB control by an external controller.

If "Remote" LED is off, pressing this key executes the Relay
Test. Before pressing this key, make sure the Relay Test
Adapter is connected. For details of Relay Test, refer to
Chapter 3. During Relay Test execution, the LED in this key
is ON.

Remote LED Turns on when the E5250A is in the GPIB remote status.

System Fail LED Turns on if system error occurs in the E5250A. Contact your

nearest Keysight Technologies Service Center.

Fail LED Turns on if the E5250A fails Self-test (including Relay Test).

If this LED turns on after executing Relay Test, a plug-in
card may be defective. And if this LED turns on after turning
the E5250A on again, the E5250A is defective. If so, contact
your nearest Keysight Technologies Service Center.

Rear Panel Tour

Rear panel of the E5250A is shown in Figure 1-2. The E5250A has 4 slots for
installing plug-in cards, and 10 input connectors for connecting measurement cables
from instruments.

SMU INPUT SMU INPUT connectors are for semiconductor dc

characteristics measurements.

The E5250A has six SMU INPUT ports, which are triaxial type
connectors. The connectors can also be used for a maximum
three Kelvin connection inputs by coupling two ports as
follows:

• SMU INPUT 1 and 2

• SMU INPUT 3 and 4

• SMU INPUT 5 and 6

1- 4 Keysight E5250A User’s Guide, Edition 12

Introduction

Keysight E5250A Product Description

AUX INPUT AUX INPUT connectors are for C-V measurements, pulse

input, and so on.

The E5250A has 4 AUX INPUT ports: HF1, HF2, CV1, CV2.
These are BNC type connectors.

The AUX INPUT connectors are used only with the E5252A
and are not used with the E5255A.

CAUTION The maximum measurement voltage that can be applied to any input terminal is

±200 Vdc. The maximum measurement current is 1 Adc at ±200 Vdc. The
maximum voltage that can be applied between input terminals is 300 Vdc. Do not
apply an input signal over these limits to the E5250A inputs. If you do, the E5250A
will be damaged.

If you use a bias source that has current limit capability, set the bias source current
limit to less than 1 Adc.

Figure 1-2 E5250A Rear Panel

Keysight E5250A User’s Guide, Edition 12 1- 5

Introduction
Keysight E5252A Product Description

Keysight E5252A Product Description

The E5252A 10×12 Matrix Switch is a 10-input to 12-output switching matrix card
for the E5250A. The E5252A is designed for semiconductor dc parametric
measurement applications that need to switch some instruments connected to
Device Under Test (DUT), or need to scan instrument input/output for many DUTs,
automatically.

The E5250A can be installed with maximum four E5252As. And the input terminals
of the E5252As are connected together inside the E5250A. So, the E5250A can
configure a 10×24 matrix (two E5252As), 10×36 matrix (three E5252As), and
10×48 matrix (four E5252As). The E5252A block diagram and output connectors
are shown in

Figure 1-3 E5252A Block Diagram

Figure 1-3 and Figure 1-4.

1- 6 Keysight E5250A User’s Guide, Edition 12

Introduction

Keysight E5252A Product Description

Input Ports The E5252A has 10 input ports via the E5250A.

Input paths for SMU1 and SMU2 are designed for low current
measurement.

There are actually only six input paths, so two of the input paths
are shared by three ports each as follows:

• SMU5, HF1, and CV1 ports share same input path

• SMU6, HF2, and CV2 ports share same input path

So, for these two input paths, you can only use one input port at
a time. For example, you cannot use HF1 and CV1 input ports
at the same time.

Output Ports The E5252A has 12 output ports. Two ports can be coupled for

Kelvin connection output for a maximum of six Kelvin outputs:

• OUTPUT1 and OUTPUT2

• OUTPUT3 and OUTPUT4

• OUTPUT5 and OUTPUT6

• OUTPUT7 and OUTPUT8

• OUTPUT9 and OUTPUT10

• OUTPUT11 and OUTPUT12

The output ports are triaxial connectors.

Figure 1-4 E5252A Output Ports

WARNING Do not touch the force and guard terminals of the output connectors while the

E5250A is turned on. Dangerous voltages up to the maximum input voltage
may be present at the output connectors.

Ne touchez pas les bornes de force et de protection des connecteurs de sortie
pendant que le E5250A est en marche. Des tensions dangereuses, allant jusqu'à
la tension maximale d'entrée, peuvent être présentes aux connecteurs de sortie.

Keysight E5250A User’s Guide, Edition 12 1- 7

Introduction
Keysight E5255A Product Description

Keysight E5255A Product Description

The E5255A 24 (8×3) Channel Multiplexer is a 2-input to 24-output multiplexer
card for the E5250A. The E5255A consists of 3 blocks (three 2×8 multiplexers). So,
one E5255A can be configured as a 2×8 multiplexer, 2×16 multiplexer, or 2×24
multiplexer. "2-input" means one BIAS input and one IV input.

The E5255A is designed for semiconductor device reliability testing which needs to
automatically scan instrument input/output for many DUTs.

A maximum of four E5255As can be installed in the E5250A, which can use the
multiplexers in several configurations. For example, the E5250A can configure
twelve 8-output multiplexers, six 16-output multiplexers, four 24-output
multiplexers, three 32-output multiplexers, two 48-output multiplexers, or one
96-output multiplexer.

The E5255A block diagram is shown in Figure 1-5.

BIAS Input The BIAS INPUT ports are used to apply ac or dc bias to DUT.

BIAS INPUT ports are BNC connectors. Each BIAS INPUT
port is assigned to a 2×8 multiplexer block as shown in

1-2. And you can make internal connections to connect a BIAS

INPUT port to multiple blocks. Refer to Chapter 2.

Table

IV Input IV input is used for measuring/forcing dc current/voltage. You

can connect the IV input to desired SMU INPUT connector
(SMU1 to SMU6) of the E5250A by making an internal
connection. Refer to Chapter 2. The E5250A AUX INPUT
connectors are not used with the E5255A.

OUTPUT
Connectors

1- 8 Keysight E5250A User’s Guide, Edition 12

The E5255A has three 8-channel coaxial output connectors as
shown in
multiplexer as shown in Table 1-2.

Figure 1-6. Each output connector is assigned to a 2×8

Resistors Resistors connected between BIAS path and IV path are for

protecting DUT from electrical damage. When shipped from
factory, 0 Ω resistance is used in the E5255A. You can easily
replace with desired resistors. Refer to Chapter 2. The
following resistors are furnished with the E5255A:

•0 Ω resistors (3 sets with 10 resistors in each set)

• 1.2 kΩ resistors (3 sets with 10 resistors in each set)

•22 kΩ resistors (3 sets with 10 resistors in each set)
If you replace initial 0 Ω resistors with other resistors, you must

cut the initial resistors. Then, if you need 0 Ω resistors again,
use the ones listed above.

CAUTION Power consumption by protective resistors

• If only one E5255A is installed in the mainframe, total power consumption by
resistors must be less than 16 W.

• If multiple E5255As are installed in the mainframe, total power consumption by
resistors must be less than 32 W.

Introduction

Keysight E5255A Product Description

WARNING For selecting protective resistors, consider the current flows to resistor when

DUT shorts, and make sure the power consumption by resistor will be within
specification of resistor.

Do not use resistors that have specifications inadequate for your applications,
which will result in resistors heating up, burning, or smoking.

Be careful about the heating of the rear panel of mainframe or plug-in card,
which may be heated by resistors, even if you follow this warning.

Keysight E5250A User’s Guide, Edition 12 1- 9

BIAS Input 1

Output

Resistor

IV Inpu t 1

BLOCK 1

1 2 34 56 7 8

BIAS Input 3

Output

Resistor

IV Inpu t 3

BLOCK 3

17 18 19 20 21 22 23 24

BIAS Input 2

Output

Resistor

IV Inpu t 2

BLOCK 2

9 10111213141516

Introduction
Keysight E5255A Product Description

Figure 1-5 E5255A Block Diagram

1- 10 Keysight E5250A User’s Guide, Edition 12

Table 1-2 E5255A Input/Output Connectors

Introduction

Keysight E5255A Product Description

2×8 multiplexer

Block No.

Block1 BIAS1 (51) Output 1 to 8 Left

Block2 BIAS2 (52) Output 9 to 16 Center

Block3 BIAS3 (53) Output 17 to 24 Right

Figure 1-6 E5255A BIAS INPUT Connectors and OUTPUT Connectors

WARNING Do not touch the force and guard terminals of the OUTPUT connectors while

the E5250A is turned on. Dangerous voltages up to the maximum input voltage
may be present at the OUTPUT connectors.

Ne touchez pas les bornes de force et de protection des connecteurs de sortie
pendant que le E5250A est en marche. Des tensions dangereuses, allant jusqu'à
la tension maximale d'entrée, peuvent être présentes aux connecteurs de sortie.

BIAS INPUT

(Port No.)

Output Port No.

OUTPUT
Connector
(Location)

CAUTION The maximum voltage that can be applied to any input terminal is ±200 Vdc. The

maximum current is 1 Adc at ±200 Vdc. The maximum voltage that can be applied
between input terminals is 300 Vdc. Do not apply an input signal over these limits to
the E5255A inputs. If you do, the E5255A will be damaged.

If you use a bias source that has current limit capability, set the bias source current
limit to less than 1 Adc.

Keysight E5250A User’s Guide, Edition 12 1- 11

Introduction
Options and Accessories

Options and Accessories

This section lists the options and accessories available for the E5250A.

Tabl e 1-3 lists the options available for the E5250A.

Table 1-3 Options

Model

Number

E5250A Low Leakage Switch Mainframe

Option Item Description

E5250A-301 Relay Test Adapter

E5250A-A6J ANSI Z540 compliant calibration

E5250A-UK6 Commercial cal. certificate w/ test data

1- 12 Keysight E5250A User’s Guide, Edition 12

Tabl e 1-4 lists accessories furnished with the E5250A, E5252A, and E5255A.

Table 1-4 Furnished Accessories

Introduction

Options and Accessories

Model

Number

Description Qty.

E5250A Keysight E5250A User's Guide 1

E5250A VXI Plug&Play Driver disk

a

Keysight E5250A Program Disk (LIF format, 3.5 inch disk) 1

Module Extractor 1

Wrench (for removing plug-in card) 1

Power Cable 1

E5252A Keysight E5252A Installation Guide 1

Wrench (for removing plug-in card) 1

E5255A Keysight E5255A Installation Guide 1

BNC Short Cap 3
BIAS Input Modification Kit (BNC Open Cap × 2, wire × 2) 1
0 Ω Resistor Set (10 resistors) 3

1.2 kΩ Resistor Set (10 resistors) 3

1

22 kΩ Resistor Set (10 resistors) 3

Wrench (for removing plug-in card) 1

a. For the latest system requirements, go to http://

www.keysight.com/find/swm and get the information.

Keysight E5250A User’s Guide, Edition 12 1- 13

Introduction
Options and Accessories

Contents of the E5250A Program Disk:

Virtual Front
Panel Utility

VFP Data Upload
Library

Capacitance
Compensation
Routine

Sample Programs Three sample programs: one for Vth and C measurement using

Self-test Utility Self-test and relay test program for the E5250A. Runs on the

Interactive control program for the E5250A. Runs on Keysight
4155/4156's built-in IBASIC controller. Refer to Chapter 5.

Subprogram library used for uploading the E5250A control data
(made by Virtual Front Panel Utility) to your program. Runs on
HP BASIC. Refer to Chapter 6.

Subprogram to compensate for capacitance error caused by the
E5250A and E5252A. Runs on HP BASIC. This subprogram is
used to compensate the capacitance data measured by Keysight
4284A Precision LCR Meter. Refer to Chapter 6.

the E5252A, and two for HCI test and analysis using the
E5255A. Runs on HP BASIC. Refer to Chapter 9.

4155/4156's built-in IBASIC controller. Refer to Chapter 3.

1- 14 Keysight E5250A User’s Guide, Edition 12

Tabl e 1-5 lists accessories available for the E5250A.

Table 1-5 Available Accessories

Introduction

Options and Accessories

Model

Number

E5252A 10×12 Matrix Switch
E5255A 24 (8×3) Channel Multiplexer

16494A Triaxial Cable

16494B Kelvin Triaxial Cable (4156 kelvin to E5250 kelvin)

16494C Kelvin Triaxial Cable (4142 kelvin to E5250 kelvin)

16494D 8 Channel Shielded Coaxial Cable

16494E Wide Temperature 8 Channel Shielded Coaxial Cable

16495C Connector plate with 6 connectors for 16494D

16495D Connector plate with 12 connectors for 16494D

16495E Blank plate
16495F Connector plate with 12×triaxial, intlk, GNDU

16495G Connector plate with 24×triaxial, intlk, GNDU

Option

Item

16494A-001 1.5 m length

16494A-002 3 m length

16494A-003 80 cm length

16494B-001 1.5 m length

16494B-002 3 m length

16494B-003 80 cm length

16494C-001 1.5 m length

16494C-002 3 m length

16494D-001 1.5 m length

16494D-002 3 m length

16494E-001 3m length

16495F-001 Bulkhead feedthrough connectors (female to female)

16495F-002 Connectors to contacts for soldering

16495G-001 Bulkhead feedthrough connectors (female to female)

16495G-002 Connectors to contacts for soldering

Description

Keysight E5250A User’s Guide, Edition 12 1- 15

Introduction
Options and Accessories

1- 16 Keysight E5250A User’s Guide, Edition 12

2 Installation

Installation

This chapter describes requirements to install Keysight E5250A and the tasks for
installation, and is organized into the following three sections:

• “To Inspect the E5250A and Accessories” describes how to inspect the E5250A
when you receive it.

• “Requirements” explains the information required for operating, storing, and
shipping the E5250A.

• “Installing the E5250A” describes how to install the E5250A.

• “Maintenance” describes about performance verification and cleaning.

WARNING The maximum input voltage of the E5250A is ±200 V. And dangerous voltages

may be present at the E5250A output terminals. To prevent electric shock, you
must observe the following safety precautions when using the E5250A.

• Use a three-conductor AC power cable to connect cabinet (if used) and the
E5250A to an electric ground (safety ground).

• Before you touch any connections to these terminals, turn the instrument
off, disconnect the power cable, and discharge any capacitors.

• Warn workers around the E5250A about dangerous conditions.

La tension d'entrée maximale de la E5250A est de ± 200 V. Une tension
dangereuse émanant du dispositif Keysight E5250A peut être sortie aux bornes
Force, Guard et Sense. Les précautions suivantes doivent être obserées contre
commotion électrique accidentelle.

• Utilisez un cordon d'alimentation CA à trois connecteurs pour connecter la
cabine (si utilisée) et l'instrument à la mise électrique à la terre (sol de
sécurité).

• Avant de mettre l'instrument sous tension, connectez la borne de
verrouillage à un circuit de verrouillage.

• Informez les personnes se trouvant à proximité de l'appareil à propos des
conditions dangereuses.

2- 2 Keysight E5250A User’s Guide, Edition 12

Installation

To Inspect the E5250A and Accessories

To Inspect the E5250A and Accessories

When you receive and open the box that contains the E5250A, check the following:

• Before unpacking any components, inspect all boxes for any signs of damage
that might have occurred during shipment such as:

•Dents

• Scratches

•Cuts

• Water marks

• When you open the boxes that contain the E5250A, check the components
against the contents lists that are attached to the boxes.

• After installing the E5250A, check the E5250A operation by executing self-test
shown in Chapter 3.

If anything is wrong, notify your local Keysight Technologies sales office.

When shipping the E5250A

When you unpack the E5250A, retain all packing materials for future use. If it
becomes necessary to reship the E5250A, repack it in the original packing materials
and shipping carton.

Keysight E5250A User’s Guide, Edition 12 2- 3

Installation
Requirements

Requirements

This section describes the following requirements for the E5250A.

• “Power Requirements”

• “Power Cable”

• “Operating Environment”

• “Storage and Shipping Environment”

Power Requirements

The E5250A can operate from any single-phase AC power source supplying
100-240 V (±10 %) at 50/60 Hz. The maximum power consumption is 100 VA.

Power Cable

WARNING FIRE HAZARD: Use only the power cable supplied with your instrument.

Using other types of power cable may cause overheating of the power cable,
resulting in fire.

SHOCK HAZARD: The power cable provides the chassis ground through a
third conductor. Be sure to connect to a three-conductor type power outlet with
the correct pin grounded.

RISQUE D’INCENDIE : utilisez uniquement le câble d'alimentation fourni
avec votre appareil. L’utilisation d’autres types de câble d’alimentation peut
provoquer une surchauffe du câble d’alimentation et provoquer un incendie.

RISQUE DE CHOC ÉLECTRIQUE: le câble d’alimentation fournit la masse
du châssis par le biais d’un troisième conducteur. Assurez-vous de connecter la
prise d'alimentation de type trois conducteurs avec la broche correcte mise à la
terre.

NOTE The detachable power cable may be used as an emergency disconnecting device.

Removing the power cable will disconnect AC input power to the instrument.

2- 4 Keysight E5250A User’s Guide, Edition 12

Installation

Requirements

Option 900

• Plug: BS 1363/A,
V, 1 0 A

250

• PN: 8120-4420

Option 904

• Plug: NEMA 6-15P,

250 V, 10 A

• PN: 8120-3996

Option 918

• Plug: JIS C 8303,
V, 1 2 A

125

• PN: 8121-0743

Option 922

Option 901

• Plug: AS/NZS 3112,
V, 10 A

250

• PN: 8120-4419

Option 906

• Plug: SEV 1011,
V, 10 A

250

• PN: 8120-4416

Option 919

• Plug: Israel SI 32,
V, 10 A

250

• PN: 8121-0724

Option 923

Option 902

• Plug: IEC 60277-1,
250 V, 10 A

• PN: 8121-1226

Option 912

• Plug: SB 107-2-D1,
250

V, 10 A

• PN: 8121-1655

Option 920

• Plug: IRAM 2073,
250 V, 10 A

• PN: 8121-0725

Option 927

Option 903

• Plug: NEMA 5-15P,
125 V, 10 A

• PN: 8120-6825

Option 917

• Plug: IS 1293 and
IS

6538, 250 V, 10 A

• PN: 8121-1690

Option 921

• Plug: CEI 23-16,

V, 1 0 A

250

• PN: 8121-0722

Option 930

• Plug: GB 1002
figure

3, 250 V, 10 A

• PN: 8120-8376

Option 931

• Plug: CNS 10917-2,
125 V, 10 A

• PN: 8121-1635

• Plug: SANS 164-1,
250 V, 10 A

• PN: 8121-0564

Option 932

• Plug: CS 0017,

V, 10 A

250

• PN: 8121-1638

• Plug: NEMA WD-6,
250 V, 10 A

• PN: 8120-0674

• Plug: NBR 14136,
250 V, 10 A

• PN: 8121-1809

Keysight E5250A User’s Guide, Edition 12 2- 5

Installation
Requirements

Connect the power cable to the IEC 60320 connector on the rear of the instrument. If
the wrong power cable was shipped with your instrument, contact your nearest
Keysight Sales and Support Office.

The AC input on the back of your instrument is a universal AC input. It accepts
nominal line voltages in the range of 100 to 240 VAC.

Operating Environment

The E5250A must be operated within the following environmental conditions:

• Temperature: 5 °C to 40 °C (41 °F to 104 °F)

• Humidity: 5 % to 80 % RH at 40 °C (104 °F), non-condensing

• Altitude: 0 m to 2000 m

Storage and Shipping Environment

The E5250A should be stored or shipped in environments within the following
limits:

• Temperature: −40 °C to 70 °C (−40 °F to 158 °F).

• Humidity: 5 % to 90 % RH at 65 °C (149 °F).

• Altitude: 0 m to 15,240 m

Protect the E5250A from temperature extremes to prevent condensation from
forming inside the E5250A.

2- 6 Keysight E5250A User’s Guide, Edition 12

Installation

Installing the E5250A

Installing the E5250A

This section describes how to install the E5250A.

• “To Install Plug-in Card”

• “To Install Blank Panel”

• “To Configure E5255A”

• “E5255A Configuration Examples”

• “To Set GPIB Address”

• “To Connect GPIB Cable”

WARNING To prevent electrical shock, turn off the mainframe and remove the power

cable before starting the instruction.

Afin d'éviter toute décharge électrique, mettez l'appareil hors tension et
débranchez le cordon d'alimentation avant de commencer l'instruction.

CAUTION Be careful about the module pins used for internal connection to the mainframe. The

pins can be damaged easily.

Use clean handling and anti-static procedures when removing, configuring, and
installing the modules. The modules contain components that can be damaged by
static electricity.

NOTE Plug-in module is shipped from the factory after the specifications are confirmed.

Keysight can guarantee that the modules will function and that the module
performance is designed to meet its specifications. However, if you have any
trouble, contact your nearest Keysight Technologies service center.

If you require that the modules be guaranteed to their specifications (for ISO
compliance, etc.), then you must perform a calibration on the instrument (modules
and mainframe together). For calibration, contact your nearest Keysight
Technologies service center.

Keysight E5250A User’s Guide, Edition 12 2- 7

Installation
Installing the E5250A

To Install Plug-in Card

The E5252As and E5255As are plug-in cards (modules). You install these cards in
card slots 1 to 4 of the E5250A. The following procedure explains the card
installation and removal:

1. Turn off the E5250A, then wait at least 10 seconds before you remove or install
a card.

2. Remove a blank panel or a card attached to the slot you want to install a new
card, as follows.

To remove blank panel, do as follows:

a. Loosen the screws on both the left and right edges of the blank panel by

using the wrench furnished with the E5250A.

b. Remove the blank panel.

To remove a card, do as follows:

a. Screw the Module Extractor into the screw hole for the extractor. See Figure

2-1. Module Extractor is furnished with the E5250A.

b. Loosen the screws on left and right edges of the card by using the wrench

furnished with the E5250A.

c. Gently pull the Module Extractor to extract the card from the card slot.

3. Install the card as follows:

a. Align the card with the left and right slot guide rails. The component side

should be facing up.

b. Push the card into the slot until you feel it seat firmly into the connector at

the back of the card slot.

c. Screw in the screws on the left and right edges of the card by using the

wrench furnished with the E5250A.

4. Execute the Relay Test and Leak Test:

After installing the cards, perform the Relay Test and Leak Test described in
Chapter 3 to check the operation and leak current of the E5250A with installed
cards.

CAUTION If you want to confirm that the E5250A with installed cards meets its specifications,

return the E5250A with installed cards to your nearest Keysight Technologies
Service Center to do the Performance Verification.

2- 8 Keysight E5250A User’s Guide, Edition 12

Figure 2-1 Module Extractor and Location of the Screw Hole

Keysight E5252A

Keysight E5255A

Screw Hole
for Module Extractor

Module Extractor

Installation

Installing the E5250A

To Install Blank Panel

CAUTION To prevent thermal damage to the E5250A cards, be sure that blank panels

(Keysight part number E5250-60003) are installed in all unused slots.

If the blank panel is not installed to cover an unused slot, install the blank panel as
follows:

1. Align the blank panel over the unused slot.

2. Screw in the screws on the left and right edges of the blank panel by using the
wrench furnished with the E5250A.

Keysight E5250A User’s Guide, Edition 12 2- 9

Installation
Installing the E5250A

To Configure E5255A

The Keysight E5255A has three 2-input 8-output multiplexers. You can configure
several multiplexers by modifying some internal connections. Component locations
on the E5255A are shown in
blocks and the components is shown in Table 2 -1. Table 2-2 shows the initial setting
of the E5255A internal connections. The setting does not depend on the slot in
which the module is installed.

Table 2-1 Multiplexer Blocks and Components

Figure 2-2, and the relationship of the multiplexer

Multiplexer

block

Block 1 holder 1 - BIASout1 IVin1 IVout1 DIP SW1

Block 2 holder 2 BIASin2 BIASout2 IVin2 IVout2 DIP SW2

Block 3 holder 3 BIASin3 - IVin3 IVout3 DIP SW3

Table 2-2 Keysight E5255A Initial Setup

Block number IVin cable connection BIASin/BIASout Protective resistor

Resistor

holder

1 SMU1 BIAS INPUT 51 0 Ω
2 SMU2 BIAS INPUT 52 0 Ω
3 SMU3 BIAS INPUT 53 0 Ω

BIASin BIASout

IVin

cable

IVout

connector

To Modify IV Input

IV input connection is defined by the connection of IVin cable and the setting of
DIP switch shown in

“E5255A Configuration Examples”.

Figure 2-2. For actual examples of modifications, see

DIP SW

Each DIP switch has four bit switches. Bits 1 to 3 are used to specify which SMU
input connector is connected to the IV input. Bit 4 of DIP switch is used to specify
whether the protective resistors are 0 Ω or not. The DIP switches must be set
properly after you complete the internal connection. Make sure you set the DIP
switches correctly. If not, dangerous voltages may be applied to unexpected output
connectors.

2- 10 Keysight E5250A User’s Guide, Edition 12

Figure 2-2 Keysight E5255A Component Locations

SMU6

SMU5

SMU4

SMU3

SMU2

SMU1

IVout3
connector

IVout2
connector

IVout1
connector

IVin1
cable

IVin3
cable

IVin2
cable

DIPSW 2

DIPS W3

DIPS W1

Resistors
(Total 24)

Resistor holder1

Screws
(Total 48)

Block 1

Block3

Block 2

Resistor holder3

Resistorholder2

BIASin2
terminal

BIASin3
terminal

BIASout1
terminal

BIASout2
terminal

SMU input connectors

BIT1(1)

BIT3 (4)

BIT4(R)

BIT2 (2)

Resistors BIT4

0ohm 0

other 1

To BIAS INPUT 51 To BIAS INPUT 52

To B IAS INPUT 53

IVin cable DIP SWs etting
connection BIT1B IT2 B IT3

SMU1 1 0 0
SMU2 0 1 0
SMU3 1 1 0
SMU4 0 0 1
SMU5 1 0 1
SMU6 0 1 1

1: ON

0: OFF

Module pins

Installation

Installing the E5250A

To Modify BIAS Input

Each multiplexer block has an independent BIAS input. You can change the BIAS
input internally using the BIASin/BIASout terminals shown in Figure 2-2, or
externally using the BIAS INPUT connectors. For actual examples of modifications,
see

“E5255A Configuration Examples”.

To Use Multiplexer Blocks on another E5255A

When a module is installed in a mainframe slot, six module pins are connected to
the mainframe internal bus. So, if multiplexers on different E5255As use the same
module pin, the IV inputs are connected together via the internal bus.

Keysight E5250A User’s Guide, Edition 12 2- 11

Installation
Installing the E5250A

For example, if a mainframe installs four E5255As which the IVin1 cable is
connected to the SMU1 input connector and the IVin2 and IVin3 cables are not
connected, the E5250A configures a 32-output multiplexer that uses the SMU
INPUT 1 connector as the IV input.

To Mount Protective Resistors

To protect the device (DUT) from electrical damage, you can mount resistors
between the IV input and BIAS input of multiplexer. The following procedure
shows how to mount the resistors. See

When shipped from the factory, 0 Ω resistors are mounted, and bit 4 of all DIP
switches is set to OFF (0).

1. Cut the original resistors (0 Ω) off.

2. Loosen the screws from both sides of the resistor holder.

3. Put resistors in holder, and tighten screws. And confirm that the resistors are
held properly. Resistors should be mounted on each multiplexer block that you
will use (8 resistors/block).

4. Set bit 4 to ON (1) for the DIP switch of the related block. For example, if you
mount resistors for Block 1 and 2 multiplexers, set bit 4 to ON for DIP SW1 and
SW2.

Figure 2-2 for the component locations.

To Select Protective Resistors

Be careful about the following when selecting protective resistors. Also, be careful
about the heating of the rear panel of mainframe or plug-in module, which may be
heated by resistors, even if you follow this warning.

• If only one E5255A is installed in the mainframe:

Total power consumption by resistors must be less than 16W.

• If multiple E5255As are installed in the mainframe:

Total power consumption by resistors must be less than 32W.

• Consider the current flows to resistor when DUT shorts, and make sure the
power consumption by resistor will be within specification of resistor. Do not
use resistors that have specifications inadequate for your applications, which
will result in resistors heating up, burning, or smoking.

2- 12 Keysight E5250A User’s Guide, Edition 12

E5255A Configuration Examples

The following example configurations are described:

• “24-output multiplexer (3-BIAS inputs, 1-IV input, 1 module)”

• “24-output multiplexer (1-BIAS input, 1-IV input, 1 module)”

• “96-output multiplexer (1-BIAS input, 1-IV input, 4 modules)”

24-output multiplexer (3-BIAS inputs, 1-IV input, 1 module)

To make this multiplexer, you need a E5255A. See Figure 2-3 for example setup.
The example uses the SMU INPUT 1 connector as the IV input, and uses 0 Ω
resistors.

Figure 2-3 24-output multiplexer (3-BIAS inputs, 1-IV input, 1 module)

Installation

Installing the E5250A

1. Connect the IVin1 cable to the SMU1 input connector on the E5255A.

2. Connect the IVin2 cable to the IVout1 connector.

3. Connect the IVin3 cable to the IVout2 connector.

Keysight E5250A User’s Guide, Edition 12 2- 13

Installation
Installing the E5250A

4. Set bit 1 to ON (1) and bit 2 thru 4 to OFF (0) for DIP SW1 to SW3.

5. Install the module into the slot 1 of the mainframe. For installing module, see

“To Install Plug-in Card” on page 2-8.

24-output multiplexer (1-BIAS input, 1-IV input, 1 module)

To make this multiplexer, you need a E5255A, two wires (furnished), and two BNC
open caps (furnished). See
SMU INPUT 1 connector as the IV input, and uses 0 Ω resistors.

Figure 2-4 24-output multiplexer (1-BIAS input, 1-IV input, 1 module)

Figure 2-4 for example setup. The example uses the

1. Connect the IVin1 cable to the SMU1 input connector on the E5255A.

2. Connect the IVin2 cable to the IVout1 connector.

3. Connect the IVin3 cable to the IVout2 connector.

4. Set bit 1 to ON (1) and bit 2 thru 4 to OFF (0) for DIP SW1 to SW3.

2- 14 Keysight E5250A User’s Guide, Edition 12

Installation

Keysight E5255A

BNC T-adapter

To Bias Source

BNC cable

24 (8x3) CH MULTIPLEXER

51 52

53

BIAS INPUT( 200V /1A Max)

CAT I

Installing the E5250A

5. Connect wires between BIASout1 and BIASin2, also between BIASout2 and
BIASin3.

6. Install the module into the slot 1 of the mainframe. For installing module, see

“To Install Plug-in Card” on page 2-8.

7. Connect BNC open caps to BIAS INPUT 52 and 53 connectors. So, the BIAS
INPUT 51 connector will be the BIAS input.

This example internally connects all BIAS INPUT connectors together. So, when
bias is applied to a BIAS INPUT connector, the bias will also be applied to all the
other BIAS INPUT connectors.

Do not forget to connect the BNC open caps to the unused BIAS INPUT connectors.
Otherwise, you will be shocked if you touch the connectors while bias is applied.
DO NOT connect the BNC short cap to the connectors. If you do, the E5255A and
the Bias Source will be destroyed when the bias is applied.

To connect BIAS inputs externally.

You can use the BIAS INPUT connectors instead of the BIASin/out internal
connections shown above. See
two BNC-T type (f-m-f) adapters. Recommended parts for the BNC-T type adapters
are listed below.

Figure 2-5. This example uses three BNC cables and

• Keysight part number 1250-0781: female(side)-male(center)-female(side)

• Keysight part number 1250-2405: male(side)-female(center)-female(side)

Figure 2-5 Interconnection of BIAS INPUT Connectors

Keysight E5250A User’s Guide, Edition 12 2- 15

Installation
Installing the E5250A

96-output multiplexer (1-BIAS input, 1-IV input, 4 modules)

To make this multiplexer, you need four E5255As, eight wires (furnished), five
BNC open caps (furnished), and three BNC cables. The example uses the SMU
INPUT 1 connector as the IV input, and uses 0

1. See “24-output multiplexer (1-BIAS input, 1-IV input, 1 module)” and make
four 24-output multiplexers. Then the IVin1 cable on all modules must be
connected to the SMU1 input connector.

2. Install the modules into the mainframe. For installing module, see “To Install

Plug-in Card” on page 2-8.

3. Connect BNC open caps to the BIAS INPUT 51 connector of the module in the
slot 1 and all BIAS INPUT 52 connectors.

4. Connect BNC cables between the following connectors:

• BIAS INPUT 51 (slot 4) and BIAS INPUT 53 (slot 3)

• BIAS INPUT 51 (slot 3) and BIAS INPUT 53 (slot 2)

• BIAS INPUT 51 (slot 2) and BIAS INPUT 53 (slot 1)

So, the BIAS INPUT 53 connector of the module in the slot 4 will be the BIAS
input.

Ω resistors.

Figure 2-6 96-output multiplexer (1-BIAS input, 1-IV input, 4 modules)

Do not forget to connect the BNC open caps to the unused BIAS INPUT connectors.
Otherwise, you will be shocked if you touch the connectors while bias is applied.
DO NOT connect the BNC short cap to the connectors. If you do, the E5255A and
the Bias Source will be destroyed when the bias is applied.

2- 16 Keysight E5250A User’s Guide, Edition 12

Installation

Installing the E5250A

To Set GPIB Address

Every device on the GPIB bus must have a unique address.

If you need to change the GPIB address of the E5250A, make sure the E5250A is
turned off. With a small flatblade screwdriver, set the GPIB ADDRESS switch on
the rear panel to the new address (0 to 30).

The new GPIB address is recognized only at power on. The E5250A leaves the
factory with the GPIB address set to 22.

To Connect GPIB Cable

To connect the E5250A with a computer or peripheral device via GPIB (IEEE Std.

488), connect an GPIB cable between the GPIB connector on the E5250A rear panel
and the GPIB connector on the peripheral device.

Including the controller, a total of 15 GPIB interfaces can be connected on the same
GPIB bus. The following are rules for connecting GPIB interfaces:

• If total number of interfaces ≤ 10:
Max. total cable length = number of interfaces × 2 m.

• If total number of interfaces > 10:

Max. total cable length = 20 m.

• Maximum cable length between interfaces is 4 m.

• Star connection and cascade connection are allowed. Loop connection is not
allowed.

Keysight E5250A User’s Guide, Edition 12 2- 17

Installation
Maintenance

Maintenance

Maintenance should be performed periodically to keep the E5250A in good
condition.

Performance Verification

Performance verification must be performed periodically so that the instruments
satisfy the specifications, and keep a good condition. It is recommended to perform
the performance verification once a year at least. For the performance verification,
contact your nearest Keysight Technologies Service Center. Trained service
personnel will perform the performance verification.

Cleaning

Before performing cleaning, turn off the instrument, and disconnect power cable
from the rear panel. Use a dry cloth to clean the external case parts.

To prevent electrical shock, do not perform cleaning when the instrument is turned
on, and do not use a wet cloth.

2- 18 Keysight E5250A User’s Guide, Edition 12

3 Executing Self-Test and Leak Test

Executing Self-Test and Leak Test

This chapter describes how to execute the Self-Test and the Leak Test.

The Self-Test consists of three tests that check the operation of Keysight E5250A
firmware, LEDs, and key that are on the E5250A front panel, and the relays on the
cards installed in the E5250A.

Self-Test should be executed every day as an operation check before using the
E5250A.

The Leak Test checks leakage current of cards installed in the E5250A.

Leak Test can be executed by using Keysight 4155/4156 Semiconductor Parameter
Analyzer with the Self-Test Utility program that is on the E5250A Program Disk
furnished with the E5250A.

NOTE Performance Verification

The Self-Test and the Leak Test cannot be used to verify the specifications of the
E5250A, E5252A, and E5255A.

To verify the specifications, return the E5250A with the cards installed to your
nearest Keysight Technologies Service Center. The performance verification should
be done by service personnel who are trained to service the E5250A, and should be
performed once a year.

• “Executing Self-Test” introduces the test items of the Self-Test and describes
how to execute the Self-Test.

• “Using the Self-Test Utility” describes how to execute the Self-Test and the
Leak Test interactively from Keysight 4155/4156 semiconductor parameter
analyzer.

3- 2 Keysight E5250A User’s Guide, Edition 12

Executing Self-Test

The Self-Test of the E5250A consists of the following three tests:

Table 3-1 E5250A Self-Test Items

Tes t I te m Description Executed by Refer to

Executing Self-Test and Leak Test

Executing Self-Test

Controller
Test

Front
Panel
Interface
Test

Relay Test Checks the operation of

Checks the operation of
the E5250A firmware.

Checks the operation of
the LEDs and key that
are on the E5250A front
panel.

the relays on the cards
installed in the E5250A.

Turning on the E5250A. page 3-4

Entering SCPI Command. page 3-6

Using Self-Test Utility. page 3-10

Entering SCPI Command page 3-6

Using Self-Test Utility. page 3-10

Pressing the Local/
Self Test key.

Entering SCPI Command. page 3-6

Using Self-Test Utility. page 3-10

page 3-4

Keysight E5250A User’s Guide, Edition 12 3- 3

Executing Self-Test and Leak Test
Executing Self-Test

To Execute Self-Test (Standalone)

Controller Test is executed automatically when you turn on the E5250A. You
execute the Relay Test by pressing the
panel.

Executing the Controller Test

1. Turn on the E5250A.

Local/Self Test

key on the E5250A front

2. Wait until the LED in the

Local/Self Test

key turns off.

If System Fail LED or Fail LED stays on after executing the Controller Test, contact
your nearest Keysight Technologies Service Center.

Executing the Relay Test

Requirements:

• Relay Test Adapter (E5250A-301)

• BNC Short Caps (3 caps are furnished with each E5255A)

Procedure:

1. Disconnect all cables from the E5250A input connectors.

2. Open all outputs of the plug-in cards as follows: If cable is connected to output
connector of plug-in card, open output at DUT end of cable. If end of cable is
Kelvin connection, disconnect the cable or make non-Kelvin connection at end
of cable.

3. Attach the Relay Test Adapter to the E5250A input connectors as shown in

Figure 3-1.

4. Set switch on the Relay Test Adapter to Relay Test position.

5. For each E5255A card installed in the E5250A:

a. Disconnect any cables from the BIAS INPUT connectors of the E5255A.

b. Connect a BNC Short Cap to each E5255A BIAS INPUT connector.

6. (If Remote LED is on, press the

Local/Self Test

key to return to Local control.

The Remote LED should turn off.)

7. Press the

8. Wait until the LED in

Local/Self Test

key. The Relay Test executes.

Local/Self Test

key turns off.

3- 4 Keysight E5250A User’s Guide, Edition 12

NOTE If Fail LED is ON after Relay Test

Relay Test Adapter

After executing the relay test, if the Fail LED turns on, the cause is one of the
following:

• The Relay Test Adapter is not connected or a cable is still connected to input
connector.

• Output is not open. See step 2 of previous procedure.

• You did not properly install the E5255A. See “To Configure E5255A” on page

2-10.

• A plug-in card may be defective. Contact your nearest Keysight Technologies
Service Center.

Figure 3-1 Relay Test Adapter Connection

Executing Self-Test and Leak Test

Executing Self-Test

NOTE Settings after Relay Test

After Relay Test, the E5250A settings are changed to same as after :SYST:CPON
command execution.

Keysight E5250A User’s Guide, Edition 12 3- 5

Executing Self-Test and Leak Test
Executing Self-Test

To Execute Self-Test using External Controller

You can execute Self-Test from an external controller by using SCPI commands in a
program.

This section describes the requirements, SCPI commands, and a sample program for
Self-Test execution from an external controller. For details about the SCPI
commands, refer to Chapter 7.

Requirements

• Controller

• GPIB Cable

• Relay Test Adapter

• BNC Short Caps (3 caps are furnished with each E5255A)

SCPI Commands for Self-Test

Tabl e 3-2 shows the SCPI commands used to execute Self-Test. Keyword of the

SCPI command first level is :DIAG.

The :DIAG commands ignore the E5250A channel configuration mode (NORMAL
or AUTO).

For :DIAG commands that require a card number, you specify 1, 2, 3, 4, or ALL.

If the Fail LED turns on after executing the Self-Test, the E5250A or modules may
be defective. Contact your nearest Keysight Technologies Service Center.

NOTE Before executing Relay Test, be careful about following:

• Attach the Relay Test Adapter to the E5250A input connectors. Refer to Figure

3-1. Then set the switch on the adapter to the Relay Test position.

• Open all outputs of the plug-in cards as follows: If cable is connected to output
connector of plug-in card, open output at DUT end of cable. If end of cable is
Kelvin connection, disconnect the cable or make non-Kelvin connection at end
of cable.

• For each E5255A installed in the E5250A, connect a BNC short cap to each
E5255A BIAS INPUT connector.

3- 6 Keysight E5250A User’s Guide, Edition 12

Table 3-2 SCPI Commands for Self-Test

Tes t It em Description SCPI Command

Executing Self-Test and Leak Test

Executing Self-Test

Controller
Test

Executes Controller Test,
then returns test result.

Returns test result. :DIAG:TEST:FRAM:STAT? CONT

Clears test result. :DIAG:TEST:FRAM:CLE CONT

Front Panel
Interface

Executes I/F Test, then
returns test result.

(I/F) Test

Returns test result. :DIAG:TEST:FRAM:STAT? FPAN

Clears test result. :DIAG:TEST:FRAM:CLE FPAN

Relay Test Executes Relay Test, then

returns test result.

Returns test result. :DIAG:TEST:CARD:STAT? ALL

Clears test result. :DIAG:TEST:CARD:CLE ALL or

NOTE Front Panel Interface Test

After the :DIAG:TEST:FRAM:EXEC? FPAN command is executed, the Remote,
System Fail, Fail, and Local/Self Test LEDs on the E5250A front panel blink for
about 10 seconds. If an LED does not blink, the LED is defective.

:DIAG:TEST:FRAM:EXEC? CONT

:DIAG:TEST:FRAM:EXEC? FPAN

:DIAG:TEST:CARD:EXEC? ALL

or Card No. (1, 2, 3, or 4)

or Card No. (1, 2, 3, or 4)

Card No. (1, 2, 3, or 4)

Confirm that the four LEDs are blinking, then press the

Local/Self Test

key on the

E5250A front panel within 10 seconds. The LEDs should stop blinking.

If you do not press the

Local/Self Test

key within 10 seconds, the E5250A returns a

fail result for the Front Panel Interface Test, which turns on the Fail LED.

If you pressed
it means the

Local/Self Test

Local/Self Test

key within 10 seconds, and the Fail LED still turns on,

key is defective.

If you find any problem, contact your nearest Keysight Technologies Service
Center.

Keysight E5250A User’s Guide, Edition 12 3- 7

Executing Self-Test and Leak Test
Executing Self-Test

Self-Test Programming Example

This sample program is effective for an E5250A that has four cards installed. If your
E5250A does not have four cards installed, delete the Relay Test program lines for
the empty card slots. The program runs on HP BASIC.

10 ! Self-Test by External Controller
20 !
30 REAL A
40 ASSIGN @Hp5250 TO 722
50 OUTPUT @Hp5250;":DIAG:TEST:FRAM:CLE CONT"
60 OUTPUT @Hp5250;":DIAG:TEST:FRAM:CLE FPAN"
70 OUTPUT @Hp5250;":DIAG:TEST:CARD:CLE ALL"
80 DISP "Press Continue to go to Controller Test."
90 PAUSE
100 ! Controller Test
110 OUTPUT @Hp5250;":DIAG:TEST:FRAM:EXEC? CONT"
120 ENTER @Hp5250;A
130 IF A=0 THEN GOTO 160
140 DISP "Failed. Press Continue to go to I/F Test."
150 GOTO 170
160 DISP "Passed. Press Continue to go to I/F Test."
170 PAUSE
180 ! Front Panel I/F Test
190 OUTPUT @Hp5250;":DIAG:TEST:FRAM:EXEC? FPAN"
200 DISP "Press Local/Self Test Key within 10 sec."
210 ENTER @Hp5250;A
220 IF A=0 THEN GOTO 250
230 DISP "Failed. Press Continue to go to Relay Test."
240 GOTO 260
250 DISP "Passed. Press Continue to go to Relay Test."
260 PAUSE
270 ! Relay Test
280 OUTPUT @Hp5250;":DIAG:TEST:CARD:EXEC? 1"
290 ENTER @Hp5250;A
300 IF A=0 THEN GOTO 330
310 DISP "Card 1 failed. Press Continue to test Card 2"
320 GOTO 340
330 DISP "Card 1 passed. Press Continue to test Card 2"
340 PAUSE
350 OUTPUT @Hp5250;":DIAG:TEST:CARD:EXEC? 2"
360 ENTER @Hp5250;A
370 IF A=0 THEN GOTO 400
380 DISP "Card 2 failed. Press Continue to test Card 3"
390 GOTO 410
400 DISP "Card 2 passed. Press Continue to test Card 3"
410 PAUSE
420 OUTPUT @Hp5250;":DIAG:TEST:CARD:EXEC? 3"

3- 8 Keysight E5250A User’s Guide, Edition 12

Executing Self-Test and Leak Test

Executing Self-Test

430 ENTER @Hp5250;A
440 IF A=0 THEN GOTO 470
450 DISP "Card 3 failed. Press Continue to test Card 4"
460 GOTO 480
470 DISP "Card 3 passed. Press Continue to test Card 4"
480 PAUSE
490 OUTPUT @Hp5250;":DIAG:TEST:CARD:EXEC? 4"
500 ENTER @Hp5250;A
510 IF A=0 THEN GOTO 540
520 DISP "Card 4 failed."
530 GOTO 550
540 DISP "Card 4 passed."
550 END

Line Number Description

30 to 90 Clears all previous test results.

100 to 170 Executes the Controller Test, then returns test result.

180 to 260 Executes the Front Panel Interface Test, then returns the test

result.

270 to 340 Executes the Relay Test for the card installed in slot 1 of the

E5250A, then returns test result.

350 to 410 Executes the Relay Test for the card installed in slot 2 of the

E5250A, then returns test result.

420 to 480 Executes the Relay Test for the card installed in slot 3 of the

E5250A, then returns test result.

490 to 550 Executes the Relay Test for the card installed in slot 4 of the

E5250A, then returns test result.

Keysight E5250A User’s Guide, Edition 12 3- 9

Executing Self-Test and Leak Test
Using the Self-Test Utility

Using the Self-Test Utility

The Self-Test Utility is a Self-Test program for the E5250A, and runs on the
Keysight 4155/4156's built-in IBASIC controller.

Self-Test Utility can execute all Self-Test items listed in Table 3-1 and can also
execute the Leak Test, which checks leakage current of the E5250A with installed
cards. You execute the Self-Test items and Leak Test interactively (using softkeys)
from the 4155/4156.

This section explains the operation of the Self-Test Utility.

• “Requirements”

• “To Start the Self-Test Utility”

• “To Execute Self-Test”

• “To Execute Leak Test”

Requirements

The following equipment is required to execute the Self-Test Utility:

Table 3-3 Required Equipment

Keysight

Model/Part No.

4155 or 4156 Semiconductor

Parameter Analyzer

10833A/B/C GPIB Cable 1

E5250-17003 E5250A Program

Disk (furnished)

E5250A-301
(E5250-60002)

1250-0929 BNC Short Cap 3 for each E5255A

3- 10 Keysight E5250A User’s Guide, Edition 12

Relay Test Adapter 1 Relay Test

Description Qty. Usage

1 Executing

Self-Test
Utility

1

(furnished with the
E5255A)

Executing Self-Test and Leak Test

Using the Self-Test Utility

To Start the Self-Test Utility

1. Before turning on the 4155/4156 and E5250A, connect the GPIB cable between
the E5250A and the 4155/4156.

2. Turn on the 4155/4156 and E5250A.

3. Set the 4155/4156 to "SYSTEM CONTROLLER" mode on SYSTEM:
MISCELLANEOUS page.

4. Insert the E5250A Program Disk into the 4155/4156 disk drive.

5. Press the

Display

key twice to display the "All IBASIC" screen. This key is

located in the IBASIC area on the 4155/4156 front panel.

6. Select GET softkey on the 4155/4156 screen. The following is displayed:

GET "_"

7. Type SELFTEST between the double quotations of GET statement. Then press

Enter

key. Wait until the 4155/4156 finishes getting the file.

8. Press

Run

key, which is in the IBASIC area on the 4155/4156 front panel. The

following message is displayed:

Input E5250A GPIB Address (default 722):?

9. To use default GPIB address 722, just press the
address of your E5250A, then press

Enter

Enter

key. If not, type the GPIB

key. MAIN MENU of the E5250A

Self-Test Utility and following softkeys are displayed on the 4155/4156:

Softkey Description

SELF TEST Displays the SELF TEST MENU.

LEAK TEST Displays the LEAK TEST MENU.

QUIT Quits the Self-Test Utility.

Keysight E5250A User’s Guide, Edition 12 3- 11

Executing Self-Test and Leak Test
Using the Self-Test Utility

To Execute Self-Test

On the MAIN MENU of the E5250A Self-Test Utility, select the SELF TEST
softkey to display the E5250A SELF TEST MENU and following softkeys:

Softkey Description

CARD1 RELAY For executing Relay Test for Card1.

CARD2 RELAY For executing Relay Test for Card2.

CARD3 RELAY For executing Relay Test for Card3.

CARD4 RELAY For executing Relay Test for Card4.

CONTROLLER Executes Controller Test immediately.

FRONT PANEL Executes Front Panel I/F Test immediately.

MAIN MENU Returns to MAIN MENU of Self-Test Utility

immediately.

Also, the most recent Self-Test result (P/F/N) is displayed on the 4155/4156 screen.

Figure 3-2 Example of SELF TEST MENU

E5250A Test Utility

** SELF TEST MENU **

CARD1 RELAY ... Start Slot1 E5255A Relay Test [N]
CARD2 RELAY ... Start Slot2 E5255A Relay Test [N]
CARD3 RELAY ... Start Slot3 E5255A Relay Test [N]
CARD4 RELAY ... Start Slot4 E5255A Relay Test [N]
CONTROLLER ... Start E5250A Controller Test [P]
FRONT PANEL ... Start E5250A Front Panel UIF Test [N]
MAIN MENU ... Return to MAIN MENU

[P] indicates test was passed.
[F] indicates test was failed.
[N] indicates test was not executed.

Prepare the relay test adapters
before you select "CARDn RELAY" key.

Select desired softkey.
_

3- 12 Keysight E5250A User’s Guide, Edition 12

Executing Self-Test and Leak Test

Using the Self-Test Utility

Executing the Controller Test

To execute the controller test, press the CONTROLLER softkey.

If [F] result is displayed after the test, the E5250A is defective. Contact your
nearest Keysight Technologies Service Center.

Executing the Front Panel Interface Test

To execute the front panel interface test, do the following:

1. Press the FRONT PANEL softkey.

2. Confirm that the following four LEDs on the E5250A front panel are blinking.
And press the

• Remote LED

• System Fail LED

• Fail LED

• Local/Self Test LED

Local/Self Test

key on the E5250A front panel within 10 seconds.

NOTE Fail Condition for Front Panel Interface Test

If an LED does not blink after selecting the FRONT PANEL softkey, the LED is
defective.

If you do not press the

If you pressed
it means the

Local/Self Test

Local/Self Test

Local/Self Test

key within 10 seconds, the Fail LED turns on.

key within 10 seconds, and the Fail LED still turns on,

key is defective.

Contact your nearest Keysight Technologies Service Center.

Keysight E5250A User’s Guide, Edition 12 3- 13

Executing Self-Test and Leak Test
Using the Self-Test Utility

Executing the Relay Test

To execute the Relay Test, do the following:

1. Press the CARDn RELAY softkey (n=1 to 4). The following message is

displayed on the 4155/4156 screen depending on card:

• Message for the E5252A:

Attach the relay test adapter on input terminal and
open all output of slot n.

• Message for the E5255A:

Attach the relay test adapter and the BNC short cap to
E5250A/E5255A input. And open all output of slot n.

Where, n=1 to 4.

And the following softkeys are displayed.

Softkey Description

CONTINUE Executes the Relay Test for the card immediately.

CANCEL Cancels the Relay Test execution.

2. Disconnect all cables from the E5250A input terminals. And attach the Relay
Test Adapter to the E5250A input terminals. For each E5255A card, connect a
BNC short cap to each E5255A BIAS INPUT port.

3. Open all outputs of the plug-in cards as follows:

If cable is connected to output connector of plug-in card, open output at DUT
end of cable. If end of cable is Kelvin connection, disconnect the cable or make
non-Kelvin connection at end of cable.

4. Press the CONTINUE softkey to execute the Relay Test.

Or press the CANCEL softkey to cancel test execution.

5. Repeat steps 1 to 4 for the each card you want to test.

If [F] result is displayed after executing the Relay Test, the card is defective.
Contact your nearest Keysight Technologies Service Center.

3- 14 Keysight E5250A User’s Guide, Edition 12

Executing Self-Test and Leak Test

Using the Self-Test Utility

To Execute Leak Test

NOTE Leak Test is for checking leakage current of the E5250A with plug-in cards

installed. If leak test result is too large for your application, contact nearest Keysight
Technologies Service Center. Leak test does not verify specifications of the E5250A
and installed cards.

The Leak Test applies 10 Vdc to the specified input port of the E5250A, and
measures the leakage current. The test limits are shown in

You specify an input port of the E5250A, and specify the 4155/4156 SMU to use.
The Leak Test automatically connects the specified input port to each output port
consecutively, and uses the 4155/4156 SMU to measure the leakage current for each
channel.

You need to execute this test for each input port.

Table 3-4 Test Limits of Leak Test

Card Instrument Connection Input Port Test Limit

E5252A 4155 non-Kelvin IV1, IV2 ±4.12 pA

Tabl e 3-4.

IV3, IV4, IV5, IV6 ±1.01 nA

4156 non-Kelvin IV1, IV2 ±1.14 pA

IV3, IV4, IV5, IV6 ±1.01 nA

Kelvin IV1, IV2 ±2.24 pA

IV3, IV4, IV5, IV6 ±2.02 nA

E5255A 4155 non-Kelvin IV1 to IV6 ±4.12 pA

4156 non-Kelvin IV1 to IV6 ±1.14 pA

Keysight E5250A User’s Guide, Edition 12 3- 15

Executing Self-Test and Leak Test
Using the Self-Test Utility

To execute the Leak Test, do the following:

1. On MAIN MENU of the E5250A Self-Test Utility, select LEAK TEST softkey.
The following message is displayed:

Input 4155/4156 GPIB address (default 817):?

2. To use default GPIB address 817 for the 4155/4156, just press

If not, type GPIB address of the 4155/4156, then press

Enter

Enter

key.

key.

The LEAK TEST MENU with the following softkeys are displayed:

Softkey Description

START TEST For defining the Leak Test connection. Need to define the

E5250A input port and 4155/4156 SMU port.

MAIN MENU Returns to MAIN MENU of the Self-Test Utility.

3. Select START TEST softkey. Following message/softkeys are displayed:

Select IV Port of Leak Test by softkey.

Softkey Description

IVn (n=1 to 6) For specifying the E5250A SMU INPUTn port for which

you want to perform the leak measurement. If only the
E5255As are installed, only IVn softkeys displayed are for
SMU INPUTn internally connected to the E5255A IV input.

CANCEL Cancels the Leak Test execution.

3- 16 Keysight E5250A User’s Guide, Edition 12

Executing Self-Test and Leak Test

Using the Self-Test Utility

4. Select desired IVn softkey (n=1 to 6) for input port you want to test.

If the E5252A is installed in your E5250A, and the 4156 is used for the Relay
Test, then when you press IV1, IV3, or IV5 softkey, the following message and
softkeys are displayed:

Is IVn Port a Kelvin connection?

Where n=1, 3, or 5.

Softkey Description

YES Declares that the port specified by the IVn softkey is used

for the Kelvin connection.

NO Declares that the port specified by the IVn softkey is used

for the non-Kelvin connection.

CANCEL Cancels the Leak Test execution.

Select the YES or NO softkey.

The following message and the softkeys are displayed:

Select SMU channel for IVn leak measurement by softkey.

Where n=1 to 6.

Softkey Description

SMUm
(m= 1 to 6)

Declares that you will connect the 4155/4156 SMUm to the
E5250A port specified by the IVn softkey. SMU5 and
SMU6 are displayed only if 5th and 6th SMU are installed
in the 41501 expander of the 4155/4156.

CANCEL Cancels the Leak Test execution.

Keysight E5250A User’s Guide, Edition 12 3- 17

Executing Self-Test and Leak Test
Using the Self-Test Utility

5. Select the desired SMUm softkey (m=1 to 6). Following message is displayed
depending on the connection type:

• Message for Kelvin connection:

Disconnect Kelvin cable from IVn terminal.
And disconnect all cables from output terminals.

• Message for non-Kelvin connection:

Disconnect cable from IVn terminal.
And disconnect all cables from output terminals.

Where n=1 to 6. And the following softkeys are displayed.

Softkey Description

CONTINUE To continue setting up the Leak Test.

CANCEL Cancels the Leak Test execution.

6. Disconnect all cables from the E5250A input/output terminals. Then connect
triaxial cable or Kelvin triaxial cable to the 4155/4156 SMU terminal you
specified in step 5 because the next step executes the zero offset cancel.

7. Select the CONTINUE softkey. The following message is displayed depending
on the connection type:

• Message for Kelvin connection:

Connect SMUm to IVn by Kelvin cable.

• Message for non-Kelvin connection:

Connect SMUm to IVn by cable.

Where m=1 to 6 (specified by SMUm softkey) and n=1 to 6 (specified by IVn
softkey).

And the following softkeys are displayed.

Softkey Description

CONTINUE Executes the Leak Test. Consecutively connects input port

specified by IVn softkey to each output port and makes
leak measurement.

CANCEL Cancels the Leak Test execution.

3- 18 Keysight E5250A User’s Guide, Edition 12

Executing Self-Test and Leak Test

Using the Self-Test Utility

8. Connect the cable from the 4155/4156 SMU port specified by the SMUm

softkey (m=1 to 6) in step 5 to the E5250A input port specified by the IVn
softkey (n=1 to 6) in step 4.

• Use Kelvin triaxial cable for Kelvin connection

• Use triaxial cable for non-Kelvin connection

9. Press the CONTINUE softkey to execute the Leak Test.

After the Leak Test is completed for the input port specified by the IVn softkey,
the test result (PASS or FAIL) is displayed on the 4155/4156 screen. And the
following softkeys are displayed:

Softkey Description

RE PORT CRT Displays the Leak Test results on the 4155/4156 screen.

LEAK TEST Returns to the LEAK TEST MENU.

To display the leak current measurement data on the 4155/4156 screen, press the
RE PORT CRT softkey.

10. To return to the LEAK TEST MENU, select the LEAK TEST softkey. And to
perform the Leak Test for another input port, repeat steps 3 to 9.

Keysight E5250A User’s Guide, Edition 12 3- 19

Executing Self-Test and Leak Test
Using the Self-Test Utility

3- 20 Keysight E5250A User’s Guide, Edition 12

4 Setting up Measurement Environment

Setting up Measurement Environment

This chapter explains how to connect your instruments to Keysight E5250A input,
and how to connect the E5250A output to your wafer prober or test fixture.

You can connect the E5250A output (E5252A or E5255A) to your prober or fixture
in the following three ways:

• Via the available connector plates.

• (For E5255A only) Directly using Keysight 16494E coaxial cable.

• Via connectors that you mount directly on your own connector plate or test
fixture.

This chapter explains how to do this in the following sections:

• “Connector Plates” introduces connector plates available for the plug-in card.
For installing the connector plates on your shielding box for prober or fixture,
refer to Keysight 16495 Installation Guide.

• “Connecting 8-Channel Shielded Coaxial Cable” explains how to use the
16494E coaxial cable, which is used to directly connect the E5255A output to
the DUT, DUT socket, or any fixture you want without using a connector plate.

• “Mounting Connectors Directly” describes connector hole dimensions for
mounting connectors directly on your own connector plate or test fixture, and
describes the information to connecting the connectors to prober, socket or DUT.

• “Connecting the E5250A Input” explains how to connect instruments to the
E5250A input.

• “Connecting the E5250A Output” describes the information to connect the
plug-in card output to a connector plate, connectors on your own shielding box
and so on.

• “Measurement Cable Length” is a reference for deciding total cable length at
your site by calculating the total guard capacitance according to the cable length
from instrument to Device Under Test (DUT).

4- 2 Keysight E5250A User’s Guide, Edition 12

Setting up Measurement Environment

Connector Plates

Connector Plates

A connector plate is the interface to connect the E5250A to your prober or test
fixture. The following connector plates are available for the E5250A. To install the
connector plate, refer to Keysight 16495 Installation Guide.

Connector Plates for the E5252A

16495F Half size connector plate for E5252A

16495F-001 has 12 triaxial through connectors (female to
female), an Intlk connector, and a GNDU connector (triaxial
through, female to female). The back of the Intlk connector is
designed for soldering.

16495F-002 has 12 triaxial connectors, an Intlk connector, and
a GNDU connector. The back of each connector is designed for
soldering.

16495G Full size connector plate for E5252A

16495G-001 has 24 triaxial through connectors (female to
female), an Intlk connector, and a GNDU connector (triaxial
through, female to female). The back of the Intlk connector is
designed for soldering.

16495G-002 has 24 triaxial connectors, an Intlk connector, and
a GNDU connector. The back of each connector is designed for
soldering.

Connector Plates for E5255A

16495C Half size connector plate for E5255A

The 16495C has six 8-channel shielded coaxial connectors, an
Intlk connector, and a GNDU connector. The back of each
connector is designed for soldering.

16495D Full size connector plate for E5255A

The 16495D has twelve 8-channel shielded coaxial connectors,
an Intlk connector, and a GNDU connector. The back of each
connector is designed for soldering.

Keysight E5250A User’s Guide, Edition 12 4- 3

Setting up Measurement Environment
Connector Plates

Blank Plate

16495E Half size blank plate.

This plate is used to cover openings when you made too big
openings for mounting the connector plate. You will use this
plate to cover openings if you mount the half size connector
plate in openings made for the full size connector plate.

4- 4 Keysight E5250A User’s Guide, Edition 12

Setting up Measurement Environment

Total 8 ea.

DUT

Shielding (Ground)

A

B

SMU

Input

BIAS

B

A

Force

Bias line

Guard

Bias line

Ground

Connecting 8-Channel Shielded Coaxial Cable

Connecting 8-Channel Shielded Coaxial Cable

This section introduces Keysight 16494E wide temperature 8-channel shielded
coaxial cable, and explains how to connect the 16494E to the Device Under Test
(DUT).

WARNING Do not connect the 16494E cable to the E5255A or any instrument until

connecting to the DUT as described below. If you ignore this warning, you
maybe exposed to dangerous voltage.

Ne branchez pas le câble 16494E au E5255A ou tout autre instrument avant
que la connexion au DUT ne soit réalisée, comme décrit ci-dessous. Vous
pouvez être exposé à des tensions dangereuses en ignorant cet avertissement.

The 16494E coaxial cable is used to connect the E5255A output directly to the DUT,
DUT socket, or any fixture you want without using the connector plate. One 16494E
is used for one 8-channel output connector of the E5255A. To use 24 output
channels (three 8-channel output connectors), you need three 16494Es.

Instrument Side The instrument side of the 16494E cable can be connected directly to the E5255A

output.

DUT Side Solder the open side of the 16494E directly to DUT, DUT socket, or your test fixture

as shown in

Figure 4-1 Example of DUT Connection

NOTE For highly accurate current forcing and measurements with minimized leakage,

extend the guard to surround the signal lines as close as possible to the DUT.

Keysight E5250A User’s Guide, Edition 12 4- 5

Figure 4-1.

Setting up Measurement Environment
Mounting Connectors Directly

Mounting Connectors Directly

Previous sections described the information to use the available accessories, also the
16495 Installation Guide provides the information how to install connector plates
on the shielding box. However, you may need to directly mount connectors on your
own connector plate or test fixture.

In this case, you need to make connector holes and directly mount the connectors
yourself. This section has dimension information about the holes you need to make.
Do the following:

1. Select the appropriate parts for your situation. Refer to Tab le 4-1.

2. Make holes and mount the connectors. Refer to Table 4-2.

For kelvin connection, use the 16494B Kelvin cable. Kelvin cable requires the
kelvin triaxial connector which has two connector holes and three screw holes.

3. Make interlock circuit as shown in “To Make Interlock Circuit” on page 4-8.

4. Make cable connection between connector and DUT (device under test). Refer
to

“To Connect Connectors to DUT” on page 4-13.

Tabl e 4-1 lists the parts required to mount connectors on your shielding box. From

this table, select the parts that you need to mount. Quantity of parts depends on your
site.

4- 6 Keysight E5250A User’s Guide, Edition 12

Table 4-1 Recommended Parts

2 − ∅11.3 ∅3.2 2 − M3 x 0.5

14 11 11 14

2.8

10.3

∅11.3

10.3

63.5

59

12

6

4

−

R1.5

2

− ∅

3

10

o

1.8

8.2

5

.

1

Setting up Measurement Environment

Mounting Connectors Directly

Usage

Making interlock
circuit

Keysight

Part No.

1252-1419 Interlock Connector (6 pin, female)

N1254A-402 Switch

1450-0641 LED (VF ≅ 2.1 V @ IF = 10 mA)

Connecting
E5252A output

Connecting
E5255A output

8150-5680

1250-2457 Triaxial Connector (female)

8121-1191 Low Noise Coaxial Cable

1251-2367 Connector Frame (female)

1251-0179 Coaxial Connector (female) (8ea. required for one frame.)

Wire (24 AWG, 600 V, 150 °C)

0380-3070 Screw (2ea. required for one frame.)

2260-0002 Nut (2ea. required for one frame.)

2190-0913 Washer (2ea. required for one frame.)

8121-1191 Low Noise Coaxial Cable

Table 4-2 Dimensions of Connector Holes

Kelvin Triaxial Connector (in mm) Triaxial Connector (in mm)

Description

8 Channel Shielded Coaxial Connector (in mm) Interlock Connector (in mm)

Keysight E5250A User’s Guide, Edition 12 4- 7

Setting up Measurement Environment
Mounting Connectors Directly

To Make Interlock Circuit

The interlock circuit is to prevent electric shock when touching measurement
terminals.

You must install an interlock circuit on shielding box to prevent dangerous voltages
when door of the shielding box is open.

Figure 4-2 shows the pin assignments of the interlock connector mounted on your

own connector plate or test fixture.

Figure 4-2 Interlock Connector Pin Assignments

WARNING Dangerous voltage, instrument maximum output voltage may appear at Force,

Guard, and Sense terminals if the Interlock terminal is closed.

Une tension dangereuse, une tension de sortie maximale de l'appareil peut
apparaître aux bornes Force, Guard et Sense si la borne Interlock est fermée.

To Install Interlock Circuit

Install the interlock circuit as follows.

1. Mount two mechanical switches on your shielding box, so that the switches
close when the door of the shielding box is closed, and open when the door is
opened. For the dimensions of the switch, refer to

2. Use wire to connect the two switches in series between pin number 1 and 2 (or

3) of the interlock connector. See

For example, Keysight 4155/4156 is connected to the interlock circuit, it cannot
force more than ±40 V when the door is open. When door is closed, it can force
more than ±40 V.

4- 8 Keysight E5250A User’s Guide, Edition 12

Figure 4-2.

Figure 4-3.

Setting up Measurement Environment

3.1

35.6

8.1

14

NC

NO

COM

6.4

22.2

27.8

2.8

6.3 15.9 18.8

4.7510.3 4.3

2.8

2.8

3.2

10.3

2.8

3.1

Switch off

Units: mm

15.3

Mounting Connectors Directly

Figure 4-3 Dimensions of Interlock Switch (Keysight N1254A-402)

Keysight E5250A User’s Guide, Edition 12 4- 9

Setting up Measurement Environment
Mounting Connectors Directly

To Install LED Circuit

The 4155/4156 semiconductor parameter analyzer's Intlk connector provides the
interlock signal and a LED drive signal.

If a LED is connected between pin 4 and pin 5 (or 6) of the interlock connector, the
LED lights to indicate high voltage output when more than ±40 V is forced from an
SMU in the 4155/4156.

To install LED circuit on your shielding box, do following:

1. Mount LED on your shielding box. For the dimensions of the LED, refer to

Figure 4-4.

2. Use wire to connect the LED between pin 4 and pin 5 (or 6) of the interlock
connector. Refer to

Figure 4-4 Dimensions of LED (Keysight part number 1450-0641)

Figure 4-2.

4- 10 Keysight E5250A User’s Guide, Edition 12

Setting up Measurement Environment

Mounting Connectors Directly

To Connect Interlock Circuit to Instrument

Before beginning the measurement, connect the interlock circuit to the interlock
connector of the instrument as follows.

• For Keysight 4155/4156 semiconductor parameter analyzer:

Connect Intlk connector of the 4155/4156 to the interlock connector by using
Keysight 16493J Interlock cable that is furnished with the 4155/4156. You can
connect it directly without using any adapter.

• For the instruments which has a BNC-Type interlock connector:

If you use an instrument that has a BNC-type interlock connector (such as
Keysight 4142B), connect interlock connectors of instrument and the interlock
circuit as follows:

Required Parts:

Keysight

Model No.

16435A 1 Interlock Cable Adapter

16493J 1 Interlock Cable

Procedure:

1. Connect interlock connector of instrument to the BNC connector of the
16435A (interlock cable adapter) by using the BNC cable that is furnished
with the adapter.

2. Connect the 16435A adapter to the interlock connector by using the 16493J
Interlock cable.

Quantity Description

Keysight E5250A User’s Guide, Edition 12 4- 11

Setting up Measurement Environment
Mounting Connectors Directly

NOTE To Check Interlock Circuit

If you use the 4155/4156, you can easily check the interlock circuit as follows:

1. Connect the Intlk connector of the 4155/4156 to your interlock circuit.

2. Press

System

front-panel key, then select CALIB/DIAG primary softkey to

display the SYSTEM: SELF-CALIBRATION/DIAGNOSTICS page.

3. In the CALIB/DIAG field, select DIAG secondary softkey.

4. In the CATEGORY field, select I/O PERIPH secondary softkey.

5. Move pointer to the 403 (INT.) Interlock LED field.

6. Select EXECUTE secondary softkey.

7. Confirm the following:

• LED turns on within 1 sec from when interlock circuit is shorted.

• LED turns off within 1 sec from when interlock circuit is open.

To stop the interlock test, select STOP secondary softkey.

4- 12 Keysight E5250A User’s Guide, Edition 12

Setting up Measurement Environment

to
DUT

Coaxial cable

Triaxial
connector

Insulator

Plate

Guard

Sense

Common

Guard

Force

Common

to
DUT

Coaxial cable

Triaxial
connector

Insulator

Plate

Guard

Sense

Common

Wire

Guard

Force

Common

Mounting Connectors Directly

To Connect Connectors to DUT

Following figure shows a connection example from the connector to DUT. Use
low-noise coaxial cable (Keysight part number: 8121-1191).

Kelvin connections non-Kelvin connections

This connection is available only for the
Kelvin connectors. This connection can cancel
effects of cable resistance by connect sense
line and force line as close as possible to DUT
terminal.

Following connection is for the Kelvin
connectors. For the triaxial connectors or the
8 ch shielded connectors, ignore SENSE
terminal, and make connection only for
FORCE terminal. Measurement results
include residual resistance from the
connection cable.

CAUTION Never connect the guard terminal to any output, including circuit common, chassis

ground, or the guard terminal of any other unit. Doing so may result in an
emergency condition.

Keysight E5250A User’s Guide, Edition 12 4- 13

Setting up Measurement Environment

Insulator (black)

Outerconductor
(for Guard signal)

Insulator (clear)

Conductive layer (black)

Center conductor
(forForce/Sense signal)

approx.10to15mm

min 2 mm

Coverhere using sleeve

Mounting Connectors Directly

For highly accurate current forcing and measurements while minimizing leakage,
surround all force and sense lines from SMU by a guard as far as possible, and make
cables stable by taping.

For reducing capacitance measurement error, tape the cables to any grounded
materials such as shielding box. If you use probe card, grounding the probe card also
reduces capacitance measurement error.

NOTE Low-Noise Coaxial Cable

When you make a SMU output connection by using low-noise coaxial cable
(Keysight part number: 8121-1191), shave the Conductive layer and the Insulator
(clear) by knife so that the Center Conductor is insulated from the Conductive layer.
Refer to following figure.

4- 14 Keysight E5250A User’s Guide, Edition 12

Setting up Measurement Environment

Connecting the E5250A Input

Connecting the E5250A Input

This section explains how to connect instruments to the E5250A.

• “To Connect Instruments to Input Connectors”

• “To Connect Bias Source to the E5255A Bias Input”

• “To Connect GNDU to the E5250A Input”

WARNING Turn off the E5250A and all instruments connected to the E5250A. And do not

turn them on until the connection described in this section is completed. If you
ignore this warning, you may be exposed to dangerous voltage.

Éteignez le E5250A et tous les instruments connectés au E5250A. Et ne les
remettez pas sous tension avant que la connexion décrite dans cette section ne
soit achevée. Vous pouvez être exposé à des tensions dangereuses en ignorant
cet avertissement.

To Connect Instruments to Input Connectors

The E5250A input connector has six SMU input connectors and four AUX input
connectors.

Tabl e 4-3 shows cables required to connect the instrument for typical applications

using the E5250A.

You can make Kelvin connections when using the 4156 HRSMU, 41501 HPSMU,
4142B SMU, E5270 SMU. Use cables as follows:

• 4156/41501: Keysight 16494B-003 Kelvin triaxial cable

• 4142B: Keysight 16494C-001 Kelvin triaxial cable

• E5270: Keysight 16494B-001 Kelvin triaxial cable

To connect Kelvin triaxial cable to the E5250A input, use pairs (couple ports) of
SMU INPUT connectors (1&2, 3&4, or 5&6) of the E5250A.

The input signal for each Kelvin input is as follows:

• Odd input port number: FORCE

• Even input port number: SENSE

Keysight E5250A User’s Guide, Edition 12 4- 15

Setting up Measurement Environment
Connecting the E5250A Input

Table 4-3 E5250A Input Connections

Application

DC
Measurement

Instrument

Keysight

Model No.

4155 MPSMU SMU1 to 6 16494A-003 Triaxial cable

4156 HRSMU SMU1 to 6 16494B-003 Kelvin Triaxial cable or

41501 HPSMU SMU1 to 6 16494B-003 Kelvin Triaxial cable or

4142B SMU SMU1 to 6 16494C-001 Kelvin Triaxial cable or

Output

Connector

VSU AUX1 to 4 BNC cable

VMU AUX1 to 4 BNC cable

Intlk − 16493J Interlock cable

VSU AUX1 to 4 BNC cable

VMU AUX1 to 4 BNC cable

Intlk − 16493J Interlock cable

MPSMU SMU1 to 6 16494A-003 Triaxial cable

PGU HF1 or 2 BNC cable

GNDU SMU1 to 6 16493H GNDU cable

VSU AUX1 to 4 BNC cable

VMU AUX1 to 4 BNC cable

GNDU SMU1 to 6 16493H GNDU cable

Intlk − 16435A Interlock cable adapter

E5250A

Input

Connector

(for direct connection to Connector Plate)

16494A-003 Triaxial cable

(for direct connection to Connector Plate)

16494A-003 Triaxial cable

and E5250-60004 Adapter

− 16493H GNDU cable

(for direct connection to Connector Plate)

16494A-001 Triaxial cable

and E5250-60044 Adapter

− 16493H GNDU cable

(for direct connection to Connector Plate)

and 16493J Interlock cable
(for direct connection to Connector Plate)

Cable Required

4- 16 Keysight E5250A User’s Guide, Edition 12

Setting up Measurement Environment

Connecting the E5250A Input

Application

C
Measurement

Pulse Input Pulse

Bias Input Power

Keysight

Model No.

C Meter High, Low CV1 and 2 BNC cable

Generator

Supply

In the table above,

• AUX means CV1, CV2, HF1, or HF2 connector.

• The E5250A does not have input connectors for the interlock. Connect directly

• Can't use Keysight 41422A/41423A (HCU/HVU) of the 4142B with the

• To connect instrument output that uses banana plug to AUX connector, use Dual

Figure 4-5 shows an example of connecting the E5250A to the 4156.

Instrument

Output

Connector

OUTPUT HF1 or 2 BNC cable

OUTPUT AUX1 to 4 BNC cable

from instrument to the connector plate which has an interlock connector.

E5250A.

Banana plug to BNC Adapter (Keysight part number 1251-2277).

E5250A

Input

Connector

Cable Required

Figure 4-5 Connection Example with Keysight 4156

Keysight E5250A User’s Guide, Edition 12 4- 17

Setting up Measurement Environment
Connecting the E5250A Input

To Connect Bias Source to the E5255A Bias Input

The E5255A BIAS INPUT connector is a BNC-type connector.

Use BNC cable to connect the bias source to the BIAS INPUT of the E5255A.

If output terminal of the bias source is a banana plug, use a Dual Banana Plug to
BNC Adapter (Keysight part number 1251-2277).

To Connect GNDU to the E5250A Input

Ground Unit (GNDU) of Keysight 4142B Modular DC Source/Monitor or Keysight
41501 Expander (for Keysight 4155/4156) is usually connected to GNDU connector
on the connector plate by using Keysight 16493H GNDU cable. This connection
allows current over 1A.

If you want to connect the GNDU through the E5250A to connector plate, test
fixture or DUT, connect the GNDU to the E5250A input as shown below.

CAUTION Make sure current to GNDU is less than 1 A if you connect GNDU to the E5250A.

The maximum input current of the E5250A is 1A.

Required Parts:

Keysight

Model/Part No.

16493H 1 GNDU Cable

E5250-60044 1 Triaxial to Dual Triaxial Adapter

Procedure:

1. Connect the adapter to the E5250A SMU INPUT connector (1&2, 3&4 or 5&6)
as shown in

2. Connect the GNDU cable between the instrument GNDU connector and the
triaxial connector on the adapter.

4- 18 Keysight E5250A User’s Guide, Edition 12

Figure 4-6.

Quantity Description

Figure 4-6 Connection of Triax-Dual Triax Adapter

By this connection, input signal for SMU INPUT connectors is as follows:

SMU INPUT Port Number Input Signal

Setting up Measurement Environment

Connecting the E5250A Input

1, 3, or 5 Force

2, 4, or 6 Sense

If you make non-Kelvin connection for the E5250A outputs, use the odd input port
only. Because non-Kelvin connection uses only Force signal for measurement.

Keysight E5250A User’s Guide, Edition 12 4- 19

Setting up Measurement Environment

B

A

SMU

Input

AUX

B

A

Force or Sense

Signal line

Guard

Ground

Ground

Connecting the E5250A Output

Connecting the E5250A Output

This section describes how to connect the E5252A and E5255A output to connector
plate, your test fixture, and so on.

• “To Connect the E5252A Output”

• “To Connect the E5255A Output”

WARNING Turn off the E5250A and all instruments connected to the E5250A. And do not

turn them on until the connection described in this section is completed. If you
ignore this warning, you may be exposed to dangerous voltage.

Éteignez le E5250A et tous les instruments connectés au E5250A. Et ne les
remettez pas sous tension avant que la connexion décrite dans cette section ne
soit achevée. Vous pouvez être exposé à des tensions dangereuses en ignorant
cet avertissement.

To Connect the E5252A Output

The E5252A output connector is shown in Figure 4-7. The E5250A input signal
(SMU input or AUX input) appears at the E5252A output connector as shown in

Figure 4-7 when input-output switching path is made.

Figure 4-7 E5252A Output Connector and Output Signal

You can easily connect the E5252A output connector to the connector plate or your
test fixture by using cables shown in

Tabl e 4-4.

4- 20 Keysight E5250A User’s Guide, Edition 12

Table 4-4 E5252A Output Cable

Connector Plate Side

E5252A Side

Keysight Model No. Description

16494A-001 Triaxial cable, 1.5 m (for non-Kelvin connection)

16494A-002 Triaxial cable, 3 m (for non-Kelvin connection)

16494B-001 Kelvin Triaxial cable, 1.5 m (for Kelvin connection)

16494B-002 Kelvin Triaxial cable, 3 m (for Kelvin connection)

For Kelvin connection, use Kelvin triaxial cable listed in Table 4-4. To make a
Kelvin output port (1, 3, 5, 7, 9 and 11), couple two E5252A output ports as follows:

Kelvin Output Port Output Port Number

Setting up Measurement Environment

Connecting the E5250A Output

1 1 (Force) and 2 (Sense)

3 3 (Force) and 4 (Sense)

5 5 (Force) and 6 (Sense)

7 7 (Force) and 8 (Sense)

9 9 (Force) and 10 (Sense)

11 11 (Force) and 12 (Sense)

Figure 4-8 shows the 16494B Kelvin triaxial cable for the E5252A.

Figure 4-8 16494B Kelvin Triaxial Cable for E5252A

Keysight E5250A User’s Guide, Edition 12 4- 21

Setting up Measurement Environment

B

A

SMU

Input

BIAS

B

A

Force

Bias line

Guard

Bias line

Ground

To
E5255A

To
Connector Plate

FEMALE

MALE

Connecting the E5250A Output

To Connect the E5255A Output

The E5255A output connector is shown in Figure 4-9. The E5250A SMU INPUT
signal or the E5255A BIAS INPUT signal appears at the E5255A output connector
as shown in

Figure 4-9 E5255A Output Connector and Output Signal

You can easily connect the E5255A output to the connector plate or your test fixture
by using the cable shown in
to the E5255A output ports labeled as 1−8, 1−8 (9−16), or 1−8 (17−24).

Table 4-5 E5255A Output Cable

Figure 4-9 when input-output switching path is made.

Table 4-5 and Figure 4-10. The cable can be connected

Keysight Model No. Description

16494D-001 8-Ch Shielded Coaxial cable, 1.5m

16494D-002 8-Ch Shielded Coaxial cable, 3m

Figure 4-10 16494D 8-Channel Shielded Coaxial Cable for E5255A

4- 22 Keysight E5250A User’s Guide, Edition 12

Setting up Measurement Environment

Measurement Cable Length

Measurement Cable Length

This section describes how to calculate the total guard capacitance when using a
Source Monitor Unit (SMU), such as in Keysight 4155/4156 Semiconductor
Parameter Analyzer, Keysight 4142B Modular DC Source/Monitor, Keysight E5270
Series of Parametric Measurement Solution, and so on.

When using an SMU, the length of measurement cables is limited by the guard
capacitance of the cables. Guard capacitance means the capacitance between the
signal line (FORCE or SENSE) and the GUARD line.

Tabl e 4-6 lists the guard capacitance for each element of the E5250A measurement

environment.

When using the 4155/4156/4142B/E5270, the maximum limit of the guard
capacitance is approximately 900 pF. So, you add the following and total must be
less than 900 pF:

• Guard capacitance of cable from SMU to E5250A SMU INPUT.

• Guard capacitance of E5250A and installed plug-in cards.

• Guard capacitance of cable from plug-in card output to connector plate.

• Guard capacitance of cable from connector plate to DUT.

• Other capacitances, such as for probe card.

The following is an example to calculate the guard capacitance of a measurement
environment:

Installed Plug-in cards: Four E5252A cards (145 pF + 8 pF × 3)

Input Cable: 16494A-003 (75 pF)

Output Cable: 16494A-001 (125 pF)

Cable from Connector
Plate to DUT:

Probe Card: Guard Capacitance approximately 10 pF (example)

In this environment, the total guard capacitance (Cg-total) is as follows.

Cg-total = 145+(8×3)+75+125+(130×2)+10 pF = 639 pF < 900 pF

Even if you use other instruments, you can use the table for reference about the
measurement cable length and capacitance.

Keysight E5250A User’s Guide, Edition 12 4- 23

8121-1191, 2 m (130 pF × 2)

Setting up Measurement Environment
Measurement Cable Length

Table 4-6 Guard Capacitances of E5250A Measurement Environment (Typ ical)

Connection Keysight Model/Part No.

from SMU to
E5250A

E5250A and
Plug-in Card

from Card
Output to
Connector
Plate

16494A-003 (for non-Kelvin) 80 cm 75 pF

16494B-003 (for Kelvin) 80 cm 90 pF

16494C-001 (for 4142B) 1.5 m 140 pF
E5252A (only 1 card is installed) − 145 pF
E5252A (more 1 card) − 8 pF/extra card
E5255A (only 1 card is installed) − 180 pF
E5255A(more 1 card) − 60 pF/extra card

16494A-001 (for non-Kelvin) 1.5 m 125 pF

16494A-002 (for non-Kelvin) 3 m 240 pF

16494B-001 (for Kelvin) 1.5 m 140 pF

16494B-002 (for Kelvin) 3 m 260 pF

16494C-001 (for 4142B) 1.5 m 140 pF

16494C-002 (for 4142B) 3 m 260 pF

Cable

Length

Guard

Capacitance

16494D-001 1.5 m 125 pF

16494D-002 3 m 240 pF

16494E-003 3 m 240 pF

from
Connector
Plate to DUT

4- 24 Keysight E5250A User’s Guide, Edition 12

Keysight Part No. 8121-1191 X m 130 pF per m