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Keysight Technologies
4080 Series of Parametric Testers
Are You Ready to Migrate to
the Platform that Solves Your
Toughest Test Challenges?
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Introduction
Advanced measurement challenges require new solutions
Semiconductor manufacturing processes and new process technologies have
created difcult challenges for production parametric test systems
– Variations in device parameters at and below the 45 nanometer level are much harder to control,
and require much more parametric test data to be captured than in the past.
– The use of “technology boosters,” such as high-k gate dielectrics and strained silicon, necessitate
more and dif ferent types of testing than in previous generations of silicon.
– The pulse generation requirements of state-of-the art ash memory cells have exceeded the
capabilities of previously available parametric testers.
– The RF testing needs of high-speed processes create both calibration and throughput restraints
in production.
These factors demand new and more innovative test methodologies to keep pace with the needs of
production parametric wafer testing.
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03 | Keysight | 4080 Series of Parametric Testers – Brochure
The Keysight 4080 Series overcomes difcult process
test challenges
Keysight Technologies, Inc. solutions represent a revolutionary improvement in production
parametric testing The 4080 Series is designed to meet the measurement challenges
presented by both current and cutting-edge semiconductor technologies. The 4082A
combines digital architecture improvements and an ultra-fast CPU with synchronous and
asynchronous parallel test capabilities. This improves the throughput of both conventional and advanced processes. The 4082F supports new high-voltage semiconductor
pulse generator (HV-SPGU) modules with pulsing capabilities, which are optimized for
the characterization of state-of-the-art ash memory cell technologies. The 4082A’s and
4082F’s revolutionary test capabilities provide benets for both current and advanced
production parametric test. For customers who have RF device testing needs, the 4083A
offers PNA support for RF S-parameter measurement with an optional 8 x 10 RF matrix.
This provides unprecedented DC and RF test capability for both development and
production parametric test.
Keysight 4080 Series of Parametric Testers
4083A DC/RF
parametric test system
– RF matrix*
– RF direct path*
– RF PNA support
4082F flash memory cell
parametric test system
– SPGU mainframe and
HV-SPGU modules
(optional)
4082A parametric test system
– Pulse switch and
high-frequency switching
matrix*
– High-speed capacitance
measurement unit (HSCMU)*
– Source/monitor units (SMU)
– DC switching matrix
* Available option
In addition to meeting the testing challenges of advanced processes, the exible 4080 Series can also boost measurement throughput for
existing process technologies.
– Pulse switch and
high-frequency switching
matrix*
– High-speed capacitance
measurement unit (HSCMU)*
– Source/monitor units (SMU)
– DC switching matrix
– SPGU mainframe and
HV-SPGU modules
(optional)
– Pulse switch and
high-frequency switching
matrix*
– High-speed capacitance
measurement unit (HSCMU)*
– Source/monitor units (SMU)
– DC switching matrix
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04 | Keysight | 4080 Series of Parametric Testers – Brochure
Innovative design increases speed and reduces costs
Architecture improvements boost measurement throughput
The 4080 Series employs cutting-edge architecture (including an ultra-fast CPU) that
can yield speed improvements of up to 10 to 20 percent on test plans transferred from
the Keysight 4070 Series of testers. This provides an immediate boost to measurement
throughput without having to make any fundamental changes to the measurement
methodology or to the test code being executed. You can expand the test capacity of
existing wafer fabs with the 4080 Series and realize lower cost-of-test without having
to change any of your SPECS or SPECS-FA test plans.
GBIP
System cabinet
Pulse generator
(HV SPGU)
Spectrum
analyzer
Digital volt meter
Capacitance meter
SPECS or
SPECS-FA
Linux controller
Factory automation ready.
High-speed
optical
interface
Measurement resources integrated
in the testhead for fast and
accurate measurement.
Network
Testhead
Ultra fast CPU
Up to 8 SMUs 8 x 10 RF
HSCMU
DC matrix
Probe card
Prober
analyzer
matrix
HF matrix &
pulse switch
Digital architecture improvements
and an ultra-fast CPU speedup test
execution
Optional RF matrix improves RF
test throughput and extends probe
card life.
Superior DC performance with the
proprietory Cool Guard relay and
high-resolution SMU.
Linux-based, easy-to-use
measurement environment.
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05 | Keysight | 4080 Series of Parametric Testers – Brochure
Core platform provides powerful measurement
capabilities
The Keysight 4080 Series covers a wide range of parametric test needs
The 4080 Series offers a wide range of measurement capabilities required for fundamental
parametric test. For example, you can easily perform DC and capacitance measurements
such as Vth, Ids, Idof f, and Cox, to name just a few. The 4080 Series supports three types
of SMUs for DC measurement. In addition, the 4080 Series supports an HSCMU module
with 1 kHz to 2 MHz capacitance measurement capability. Several other instrument
options, such as a digital volt meter (DVM), a spectrum analyzer and an external LCR
meter, provide enhanced measurement capabilities. The DVM measurement resolution
of 0.1 μV is helpful in evaluating low-voltage applications such as Cu metal resistance,
which is critical for determining RC delays. The spectrum analyzer supports automated
ring oscillator measurement in conjunction with an optional high-frequency (HF) matrix.
Advanced technology provides unmatched low-level measurement
performance
All 4080 Series testers support two types of DC switching matrix cards: a standard
lowcurrent version and an ultra low-current version. Measurement resolution of 10 fA
and 2 μV is achieved by using MPSMUs and the standard DC matrix card. The ultra
low-current DC matrix card, which is based on Keysight’s proprietary Cool Guard relay
technology, enables measurement resolution down to 1 fA (using the HRSMUs) and 0.1 μV
(using the supported DVM). In addition, dielectric absorption, noise oor and settling time
are all reduced, resulting in increased throughput. This ultra low-current measurement
capability is essential for many leading-edge process technologies when evaluating
important parameters such as inter-metal leakage and memory cell leakage currents.
Keysight’s Cool Guard relay technology
provides 1 fA current measurement resolution
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06 | Keysight | 4080 Series of Parametric Testers – Brochure
Advanced asynchronous and synchronous parallel test technology . . .
Virtual multiple testhead technology dramatically improves
measurement throughput
All 4080 Series testers feature powerful virtual multiple testhead technology that
enables asynchronous test. This ground-breaking technology allows separate measurement tasks to run independently. Unlike conventional parallel test schemes, no measure-
ment time is ever wasted. As soon as one set of resources nishes making a measurement it can immediately start the next measurement. The net effect is like having
independent multiple testheads in a single tester, which greatly increases measurement
throughput.
Competitor’s parallel test
TR1
TR2 TR6R2
TR3 TR4 TR5R1
C1
C2 C3 C4
Keysight’s asynchronous parallel test
TR1 TR2 TR6R2
TR3 R1 TR5
TR4
C1 C2 C3 C4
Keysight’s virtual multiple testhead technology
eliminates measurement dead time and provides
the fastest possible parallel testing throughput.
New virtual multiple testhead technology
SMUs
Gaps indicate
measurement
“dead time.”
Time saved
G2
D8
D7
D6
D5
S2
B2
nMOS block
SMUs
CMU
G1
D4
D3
D2
D1
S1
B1
pMOS block
T2
T1
B1
Cap
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07 | Keysight | 4080 Series of Parametric Testers – Brochure
. . . provides unmatched measurement throughput and lower costs
Synchronously measure up to eight devices
In addition to supporting asynchronous parallel measurement, 4080 Series testers also
support ultra-fast synchronous parallel measurement. With the 4080 Series, you can use
all of the installed SMUs (up to eight) to make simultaneous synchronous measurements.
Synchronous parallel measurement is an extremely ef cient measurement technique
when measuring a small array of devices (such as a group of resistors or transistors),
where each device under test (DUT) requires only a single SMU.
The 4080 Series supports synchronous parallel
measurement on up to eight SMUs. For example,
when performing a BVdss sweep measurement,
eight transistors can be measured at once.
B S D
D
D
D
D
D
D
D
G
A
A
A
A
A
A
A
A
Parallel test capabilities lower cost-of-test
Keysight’s asynchronous and synchronous parallel test capabilities can reduce test times
by 50 percent or more* over conventional serial techniques. The net result is dramatically
improved throughput and lower cost-of-test.
The 4080 Series task view allows you to analyze
the progress of test s running in parallel. This
information can be used to identify bottlenecks
and improve throughput.
1. *Percent test time is reduced depends upon the TEG design and test plan optimization.
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08 | Keysight | 4080 Series of Parametric Testers – Brochure
The Keysight 4082F is a complete ash cell testing
solution
Fast and efcient production test of NAND and NOR ash technologies
The 4082F has the same superb parametric test capabilities as the 4082A. It is the rst
production parametric test system to support a semiconductor pulse generator unit
(SPGU) mainframe as well as high-voltage (HV-SPGU) modules that are fully integrated
into the system hardware. The HV-SPGU offers best-in-class pulse generation capability
for modern advanced ash memory testing. The powerful capabilities shown below
enable you to meet almost any ash cell testing need from R&D to production.
Features Benets
Voltage output from –40 V to +40 V
(80 Vpp)
Voltage resolution of 0.4 mV Enables the creation of waveforms with accurate and precise
Two channels per module, with up to
ve modules supported
Arbitrary Linear Waveform
Generation (ALWG)
Meets the needs of modern NAND ash memory test
pulse levels to characterize multilevel cell (MLC) structures
and other advanced ash devices
Allows you to have up to ten independent, synchronized pulse
channels for ash cell testing
Supports creation of customized waveforms and permits
characterization of next-generation ash device such as
those using trapped-charge schemes
The 4082F’s HV-SPGUs can output three-level
waveforms at +/- 40 V (8 0 V peak-to-peak), which
enables the characterization of advanced NAND
cell ash memory processes.
The arbitrary linear waveform generation
capability of the 4082F ’s HV-SPGUs makes
it easy to create complex waveforms.
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09 | Keysight | 4080 Series of Parametric Testers – Brochure
The Keysight 4083A provides all-in-one DC to RF test
capability
Advanced RF test capabilities improve throughput and reduce costs
Supporting all of the measurement capabilities of the 4082A and 4082F, the 4083A
is designed to meet the most difcult characterization challenges posed by RF semiconductor devices. The 4083A supports an Keysight PNA Network Analyzer for highfrequency S-parameter measurements up to 20 GHz, easily meeting the testing needs
of modern RF devices. To help those unfamiliar with RF measurement, the 4083A is
furnished with a library of both RF and RFCV algorithms. The 4083A is also the rst
production parametric tester to offer an 8 x10 RF matrix option integrated in the testhead
that supports 20 GHz measurements. With the ability to measure up to ve RF test
structures in a single touchdown, the 4083A RF matrix both improves measurement
throughput and increases probe card lifetime by reducing contact wear-and-tear.
Production-ready capabilities
The 4083A easily integrates into high-volume manufacturing environments. With
10 RF ports and up to 48 DC pins, the 4083A supports direct-docking style probe cards.
This makes it easy for operators to change probe cards and it also supports the use of
automated probe card changers. The 4083A also provides automated software to
calibrate the RF measurement resources automatically (SOLT, SOL, and Open/Short
de-embedding), and this software can easily be used by a technician or operator.
The 4083A’s optional RF matrix enables
up to 5 RF tes t structures to be measured
in a single touchdown. This improves
throughput and reduces RF probe card
wear and tear.
The 4083A test head direc t docking
scheme suppor ts 10 RF por ts and up to
48 DC pins. It allows probe cards to be
changed either by operators or automated probe card changers.
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10 | Keysight | 4080 Series of Parametric Testers – Technical Overview
Code reusability enables fast production ramp-up
Compatibility with existing platforms reduces transition costs
Keysight SPECS and SPECS-FA test plans and algorithms created on 4070 Series test
platforms will run without modication on the Linux-based 4080 Series. This minimizes
transition costs, permits the reuse of existing code, and lowers the cost of ownership by
enabling the use of lower-cost Linux workstations. It also enables existing wafer fabs to
ramp up quickly and to take advantage of superior 4080 Series performance to boost
throughput. This compatibility protects your measurement investment by making it easy
to transition from the 4070 Series to the 4080 Series and to maintain a mixed tester
environment.
Keysight SPECS-FA provides seamless SECS/GEM integration
Keysight SPECS-FA, the factory automation version of Keysight SPECS, offers all
the features and capabilities of Keysight SPECS and fully supports SEMI automation
standards E5 (SECS II), E30 (GEM), E87 (CMS), E39 (OSS), E40 (PMS), E90 (STS), and
E94 (CJM). In addition, Keysight SPECS-FA can report the status of both the 4080 Series
tester and the wafer prober in real time. This means the host controller always knows the
exact status of the test cell. These capabilities have made Keysight SPECS-FA the
de facto worldwide industry standard for 300 mm wafer fabs.
SPECS-FA is compatible with SEMI standards and enables the easy monitoring of each tes t cell in “lights-out”
production environments.
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11 | Keysight | 4080 Series of Parametric Testers – Technical Overview
Are you ready to migrate to the platform that can
solve your most difcult parametric test challenges?
Keysight 4082A
Next-generation parametric tester with unparalleled
measurement throughput and accuracy
– Improved tester architecture can reduce
test times by 10 to 20 percent
– Synchronous and asynchronous parallel test
can improve throughput by 50 percent or more*
– 1 fA and 0.1 μV measurement resolution
– Optional HSCMU
– Ring oscillator measurement solution option
* Percent test time is reduced depends upon the TEG design and test plan optimization.
Keysight 4082F
Production-ready solution for state-of-the-art flash
memory evaluation
– Same measurement capabilities as the 4082A
– Integrated HV-SPGUs
– Up to 10 channels total
– ± 40 V output capability
– Two or three level pulsing on each channel
– ALWG capability
– Fast and reliable operation
4070 Series 4080 Series
Keysight 4083A
Production RF measurements as easy as DC
– Same measurement capabilities as the 4082A and 4082F
– Integrated PNA option for S-parameter and RFCV
measurement
– Easy-to-use RF calibration routines
– Optional 20 GHz 8 x 10 RF matrix improves
throughput and extends probe card life
Contact your local Keysight representative to learn more about how
the 4080 Series can lower your cost-of-test.
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12 | Keysight | 4080 Series of Parametric Testers – Brochure
myKeysight
www.keysight.com/find/mykeysight
A personalized view into the information most relevant to you.
Three-Year Warranty
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Keysight’s commitment to superior product quality and lower total cost
of ownership. The only test and measurement company with three-year
warranty standard on all instruments, worldwide.
Keysight Assurance Plans
www.keysight.com/find/AssurancePlans
Up to five years of protection and no budgetary surprises to ensure your
instruments are operating to specification so you can rely on accurate
measurements.
www.keysight.com/go/quality
Keysight Technologies, Inc.
DEKRA Certified ISO 9001:2008
Quality Management System
Keysight Channel Partners
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Get the best of both worlds: Keysight’s measurement expertise and product
breadth, combined with channel partner convenience.
www.keysight.com/find/4080
For more information on Keysight
Technologies’ products, applications or
services, please contact your local Keysight
office. The complete list is available at:
www.keysight.com/find/contactus
Americas
Canada (877) 894 4414
Brazil 55 11 3351 7010
Mexico 001 800 254 2440
United States (800) 829 4444
Asia Pacic
Australia 1 800 629 485
China 800 810 0189
Hong Kong 800 938 693
India 1 800 112 929
Japan 0120 (421) 345
Korea 080 769 0800
Malaysia 1 800 888 848
Singapore 1 800 375 8100
Taiwan 0800 047 866
Other AP Countries (65) 6375 8100
Europe & Middle East
Austria 0800 001122
Belgium 0800 58580
Finland 0800 523252
France 0805 980333
Germany 0800 6270999
Ireland 1800 832700
Israel 1 809 343051
Italy 800 599100
Luxembourg +32 800 58580
Netherlands 0800 0233200
Russia 8800 5009286
Spain 800 000154
Sweden 0200 882255
Switzerland 0800 805353
Opt. 1 (DE)
Opt. 2 (FR)
Opt. 3 (IT)
United Kingdom 0800 0260637
For other unlisted countries:
www.keysight.com/find/contactus
(BP-09-23-14)
This information is subject to change without notice.
© Keysight Technologies, 2014
Published in USA, November 20, 2014
5989-7089EN
www.keysight.com
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