
6517A Electrometer/High Resistance Meter
Keithley’s 51⁄2-digit Model 6517A Electrometer/High
Resistance Meter offers accuracy and sensitivity specifications unmatched by any other meter of this type. It also
offers a variety of features that simplify measuring high
resistances and the resistivity of insulating materials. With
reading rates of up to 125 readings/second, the Model
6517A is also significantly faster than competitive electrometers, so it offers a quick, easy way to measure lowlevel currents.
Exceptional Performance Specifications
The half-rack-sized Model 6517A has a special low current
input amplifier with an input bias current of <3fA with
just 0.75fA p-p (peak-to-peak) noise and <20µV burden
voltage on the lowest range. The input impedance for
voltage and resistance measurements is 200T
• Measures resistances up to
16
10
Ω
• 1fA–20mA current measurement
range
• <20µV burden voltage on lowest
current ranges
Ω input impedance
• 200T
• <3fA bias current
• Up to 125 rdgs/s
• 0.75fA p-p noise
• Built-in ±1kV voltage source
• Unique voltage reversal method
for high resistance
measurements
• Optional plug-in scanner cards
Ordering Information
Electrometer/High
7A
651
Extended warranty, service, and
calibration contracts are available.
Accessories Supplied
237-ALG-2 Low Noise Triax
Cable, 3-slot Triax to Alligator
Clips, 2m (6.6 ft)
8607 Safety High Voltage Dual
Test Leads
6517-TP Thermocouple Bead
Probe
CS-459 Interlock Connector
Resistance Meter
ideal circuit loading. These specifications ensure the accuracy and sensitivity needed for accurate low
current and high impedance voltage, resistance, and charge measurements in areas of research such
as physics, optics, nanotechnology, and materials science. A built-in ±1kV voltage source with sweep
capability simplifies performing leakage, breakdown, and resistance testing, as well as volume (
cm) and surface resistivity (
Ω/square) measurements on insulating materials.
Wide Measurement Ranges
The Model 6517A offers full autoranging over the full span of ranges on current, resistance, voltage,
and charge measurements:
• Current measurements from 1fA to 20mA
• Voltage measurements from 10µV to 200V
• Resistance measurements from 50
Ω to 1016Ω
• Charge measurements from 10fC to 2µC
ACCESSORIES AVAILABLE
CABLES
6517-ILC-3 Interlock Cable
7007-1 Shielded IEEE-488 Cable, 1m (3.2 ft)
7007-2 Shielded IEEE-488 Cable, 2m (6.5 ft)
7009-5 RS-232 Cable
7078-TRX-3 Low Noise Triax Cable, 3-Slot Triax Connectors,
7078-TRX-10 Low Noise Triax Cable, 3-Slot Triax Connectors,
7078-TRX-20 Low Noise Triax Cable, 3-Slot Triax Connectors,
8501-1
8501-2 Trigger Link Cable, 2m (6.6 ft)
8503
8607 1kV Source Banana Cables
AD
237-BNC
237-TRX-NG Triax Male-Female Adapter with Guard
237-
237-TRX-TBC 3-Lug Female Triax Bulkhead Connector
7078-
0.9m (3 ft)
3m (10 ft)
6m (20 ft)
rigger Link Cable, 1m (3.3 ft)
T
rigger Link Cable to 2 male BNCs, 1m (3.3 ft)
T
APTERS
riax Adapter
Male BNC to 3-Lug F
TRX
-
Disconnected
-T 3-Slot Male Triax to Dual 3-Lug Female Triax Tee
TRX
Adapter
(1.1kV rated)
TRX-TBC 3-Lug Female Triax Bulkhead Connector with Cap
emale T
PROBES
6103C Voltage Divider Probe
6517-RH Humidity Probe with Extension Cable
6517-TP Temperature Bead Probe (included with 6517A)
TEST FIXTURE
8009 Resistivity Test Fixture
SOFTWARE
6524 High Resistance Measurement Software
RACK MOUNT KITS
4288-1 Single Fixed Rack Mounting Kit
4288-2 Dual Fixed Rack Mounting Kit
CANNER CARDS
S
6521 Low Current Scanner Card
6522 Voltage/Low Current Scanner Card
OTHER
1050 Padded Carrying Case
6517A-EW 1 Year Warranty Extension
KPCI-488 IEEE-488.2 Interface for PCI Bus
KUSB-488 IEEE-488.2 USB to GPIB Interface Adapter
Ω for near
Ω-
-
Simplifies measuring high resistances and the resistivity of insulating materials
1.888.KEITHLEY (U.S. only)
www.keithley.com
A GR
TER M
EA
EASU
RE OF CONFIDENCE
LOW LEVEL MEASUR E & SOURCE

6517A
Electrometer/High Resistance Meter
Simple DMM-like Operation
The Model 6517A is designed for easy, DMM-like operation via the front
panel, with single-button control of important functions such as resistance
measurement. It can also be controlled via a built-in IEEE-488 interface,
which makes it possible to program all functions over the bus through a
computer controller.
Model 617 DDC Compatibility
If you already own one of Keithley’s standard-setting Model 617 electrometers, you can easily substitute the 6517A in your test configuration to
enhance its measurement performance. Minimal software revisions will be
required.
High Accuracy High Resistance Measurements
The Model 6517A offers a number of features and capabilities that help
ensure the accuracy of high resistance measurement applications. For
example, the built-in voltage source simplifies determining the relationship
between an insulator’s resistivity and the level of source voltage used. It is
well suited for capacitor leakage and insulation resistance measurements,
tests of the surface insulation resistance of printed circuit boards, voltage
coefficient testing of resistors, and diode leakage characterization.
A test sequence in the Model 6517A incorporates a new voltage reversal
method for measuring very high resistances, especially in materials and
devices where the inherent background currents in the sample previously
made accurate measurements impossible. The optional Model 6524 software package simplifies operating the Model 6517A via a computer con
troller and makes it easy to optimize the test parameters (delay time, voltage, etc.) for the specific material or device under test. The Model 6517A
meter, the software, and a resistivity fixture are available as a combination
for specific material or device testing applications. Refer to the Model 65
for more information.
Temperature and Humidity Stamping
Humidity and temperature can influence the resistivity values of materials
significantly. To help you make accurate comparisons of readings acquired
Simplifies measuring high resistances and the resistivity of insulating materials
under varying conditions, the Model 6517A offers a built-in type K thermocouple and an optional Model 6517-RH Relative Humidity Probe. A built-in
data storage buffer allows recording and recalling readings stamped with
the time, temperature, and relative humidity at which they were acquired.
Accessories Extend Measurement Capabilities
A variety of optional accessories can be used to extend the Model 6517A’s
applications and enhance its performance.
Scanner Cards. Two scanner cards are available to simplify scanning multiple signals. Either card can be easily inserted in the option slot of the
instrument’s back panel. The Model 6521 Scanner Card offers ten channels
of low-level current scanning. The Model 6522 Scanner Card provides ten
channels of high impedance voltage switching or low current switching.
Test Fixture. The Model 8009 Resistivity Chamber is a guarded test fixture
for measuring volume and surface resistivities of sample materials. It has
stainless-steel electrodes built to ASTM standards. The fixture’s electrode
dimensions are pre-programmed into the Model 6517A, so there’s no need
to calculate those values then enter them manually. This accessory is
designed to protect you from contact with potentially hazardous voltages
—opening the lid of the chamber automatically turns off the Model
6517A’s voltage source.
Applications
The Model 6517A is well suited for low current and high impedance voltage, resistance, and charge measurements in areas of research such as
physics, optics, and materials science. Its extremely low voltage burden
makes it particularly appropriate for use in solar cell applications, and its
built-in voltage source and low current sensitivity make it an excellent
solution for high resistance measurements of nanomaterials such as polymer based nanowires. Its high speed and ease of use also make it an excellent choice for quality control, product engineering, and production
test applications involving leakage, breakdown, and resistance testing.
Volume and surface resistivity measurements on non-conductive materials
are particularly enhanced by the Model 6517A’s voltage reversal method.
1.888.KEITHLEY (U.S. only)
LOW LEVEL MEASUR E & SOURCE
www.keithley.com
A GREATER MEASURE OF CONFIDENCE