Page 1
6517A Electrometer/High Resistance Meter
Keithley’s 51⁄2-digit Model 6517A Electrometer/High
Resistance Meter offers accuracy and sensitivity specifications unmatched by any other meter of this type. It also
offers a variety of features that simplify measuring high
resistances and the resistivity of insulating materials. With
reading rates of up to 125 readings/second, the Model
6517A is also significantly faster than competitive electrometers, so it offers a quick, easy way to measure lowlevel currents.
Exceptional Performance Specifications
The half-rack-sized Model 6517A has a special low current
input amplifier with an input bias current of <3fA with
just 0.75fA p-p (peak-to-peak) noise and <20µV burden
voltage on the lowest range. The input impedance for
voltage and resistance measurements is 200T
• Measures resistances up to
16
10
Ω
• 1fA–20mA current measurement
range
• <20µV burden voltage on lowest
current ranges
Ω input impedance
• 200T
• <3fA bias current
• Up to 125 rdgs/s
• 0.75fA p-p noise
• Built-in ±1kV voltage source
• Unique voltage reversal method
for high resistance
measurements
• Optional plug-in scanner cards
Ordering Information
Electrometer/High
7A
651
Extended warranty, service, and
calibration contracts are available.
Accessories Supplied
237-ALG-2 Low Noise Triax
Cable, 3-slot Triax to Alligator
Clips, 2m (6.6 ft)
8607 Safety High Voltage Dual
Test Leads
6517-TP Thermocouple Bead
Probe
CS-459 Interlock Connector
Resistance Meter
ideal circuit loading. These specifications ensure the accuracy and sensitivity needed for accurate low
current and high impedance voltage, resistance, and charge measurements in areas of research such
as physics, optics, nanotechnology, and materials science. A built-in ±1kV voltage source with sweep
capability simplifies performing leakage, breakdown, and resistance testing, as well as volume (
cm) and surface resistivity (
Ω/square) measurements on insulating materials.
Wide Measurement Ranges
The Model 6517A offers full autoranging over the full span of ranges on current, resistance, voltage,
and charge measurements:
• Current measurements from 1fA to 20mA
• Voltage measurements from 10µV to 200V
• Resistance measurements from 50
Ω to 1016Ω
• Charge measurements from 10fC to 2µC
ACCESSORIES AVAILABLE
CABLES
6517-ILC-3 Interlock Cable
7007-1 Shielded IEEE-488 Cable, 1m (3.2 ft)
7007-2 Shielded IEEE-488 Cable, 2m (6.5 ft)
7009-5 RS-232 Cable
7078-TRX-3 Low Noise Triax Cable, 3-Slot Triax Connectors,
7078-TRX-10 Low Noise Triax Cable, 3-Slot Triax Connectors,
7078-TRX-20 Low Noise Triax Cable, 3-Slot Triax Connectors,
8501-1
8501-2 Trigger Link Cable, 2m (6.6 ft)
8503
8607 1kV Source Banana Cables
AD
237-BNC
237-TRX-NG Triax Male-Female Adapter with Guard
237-
237-TRX-TBC 3-Lug Female Triax Bulkhead Connector
7078-
0.9m (3 ft)
3m (10 ft)
6m (20 ft)
rigger Link Cable, 1m (3.3 ft)
T
rigger Link Cable to 2 male BNCs, 1m (3.3 ft)
T
APTERS
riax Adapter
Male BNC to 3-Lug F
TRX
-
Disconnected
-T 3-Slot Male Triax to Dual 3-Lug Female Triax Tee
TRX
Adapter
(1.1kV rated)
TRX-TBC 3-Lug Female Triax Bulkhead Connector with Cap
emale T
PROBES
6103C Voltage Divider Probe
6517-RH Humidity Probe with Extension Cable
6517-TP Temperature Bead Probe (included with 6517A)
TEST FIXTURE
8009 Resistivity Test Fixture
SOFTWARE
6524 High Resistance Measurement Software
RACK MOUNT KITS
4288-1 Single Fixed Rack Mounting Kit
4288-2 Dual Fixed Rack Mounting Kit
CANNER CARDS
S
6521 Low Current Scanner Card
6522 Voltage/Low Current Scanner Card
OTHER
1050 Padded Carrying Case
6517A-EW 1 Year Warranty Extension
KPCI-488 IEEE-488.2 Interface for PCI Bus
KUSB-488 IEEE-488.2 USB to GPIB Interface Adapter
Ω for near
Ω-
-
Simplifies measuring high resistances and the resistivity of insulating materials
1.888.KEITHLEY (U.S. only)
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TER M
EA
EASU
RE OF CONFIDENCE
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Page 2
6517A
Electrometer/High Resistance Meter
Simple DMM-like Operation
The Model 6517A is designed for easy, DMM-like operation via the front
panel, with single-button control of important functions such as resistance
measurement. It can also be controlled via a built-in IEEE-488 interface,
which makes it possible to program all functions over the bus through a
computer controller.
Model 617 DDC Compatibility
If you already own one of Keithley’s standard-setting Model 617 electrometers, you can easily substitute the 6517A in your test configuration to
enhance its measurement performance. Minimal software revisions will be
required.
High Accuracy High Resistance Measurements
The Model 6517A offers a number of features and capabilities that help
ensure the accuracy of high resistance measurement applications. For
example, the built-in voltage source simplifies determining the relationship
between an insulator’s resistivity and the level of source voltage used. It is
well suited for capacitor leakage and insulation resistance measurements,
tests of the surface insulation resistance of printed circuit boards, voltage
coefficient testing of resistors, and diode leakage characterization.
A test sequence in the Model 6517A incorporates a new voltage reversal
method for measuring very high resistances, especially in materials and
devices where the inherent background currents in the sample previously
made accurate measurements impossible. The optional Model 6524 software package simplifies operating the Model 6517A via a computer con
troller and makes it easy to optimize the test parameters (delay time, voltage, etc.) for the specific material or device under test. The Model 6517A
meter, the software, and a resistivity fixture are available as a combination
for specific material or device testing applications. Refer to the Model 65
for more information.
Temperature and Humidity Stamping
Humidity and temperature can influence the resistivity values of materials
significantly. To help you make accurate comparisons of readings acquired
Simplifies measuring high resistances and the resistivity of insulating materials
under varying conditions, the Model 6517A offers a built-in type K thermocouple and an optional Model 6517-RH Relative Humidity Probe. A built-in
data storage buffer allows recording and recalling readings stamped with
the time, temperature, and relative humidity at which they were acquired.
Accessories Extend Measurement Capabilities
A variety of optional accessories can be used to extend the Model 6517A’s
applications and enhance its performance.
Scanner Cards. Two scanner cards are available to simplify scanning multiple signals. Either card can be easily inserted in the option slot of the
instrument’s back panel. The Model 6521 Scanner Card offers ten channels
of low-level current scanning. The Model 6522 Scanner Card provides ten
channels of high impedance voltage switching or low current switching.
Test Fixture. The Model 8009 Resistivity Chamber is a guarded test fixture
for measuring volume and surface resistivities of sample materials. It has
stainless-steel electrodes built to ASTM standards. The fixture’s electrode
dimensions are pre-programmed into the Model 6517A, so there’s no need
to calculate those values then enter them manually. This accessory is
designed to protect you from contact with potentially hazardous voltages
—opening the lid of the chamber automatically turns off the Model
6517A’s voltage source.
Applications
The Model 6517A is well suited for low current and high impedance voltage, resistance, and charge measurements in areas of research such as
physics, optics, and materials science. Its extremely low voltage burden
makes it particularly appropriate for use in solar cell applications, and its
built-in voltage source and low current sensitivity make it an excellent
solution for high resistance measurements of nanomaterials such as polymer based nanowires. Its high speed and ease of use also make it an excellent choice for quality control, product engineering, and production
test applications involving leakage, breakdown, and resistance testing.
Volume and surface resistivity measurements on non-conductive materials
are particularly enhanced by the Model 6517A’s voltage reversal method.
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www.keithley.com
A GREATER MEASURE OF CONFIDENCE
Page 3
6517A
Electrometer/High Resistance Meter
VOLTS ACCURACY TEMPERATURE
1
DIGIT 18°–28°C 0°–18°C & 28°–50°C
5
ANGE RESOLUTION ±(%rdg+counts) ±(%rdg+counts)/°C
R
V 10 µV 0.025 + 4 0.003 + 2
2
⁄2-
(1 Year)
1
COEFFICIENT
20 V 100 µV 0.025 + 3 0.002 + 1
200 V 1 mV 0.06 + 3 0.002 + 1
1
When properly zeroed, 51⁄2-digit, 1 PLC (power line cycle), median filter on, digital filter = 10
readings.
MRR:60dB on 2V, 20V, >55dB on 200V, at 50Hz or 60Hz ±0.1%.
N
MRR:>120dB at DC, 50Hz or 60Hz.
C
NPUT IMPEDANCE:>200T
I
heck on).
c
MALL SIGNAL BANDWIDTH AT PREAMP OUTPUT:Typically 100kHz (–3dB).
S
AMPS A
ANGE RESOLUTION ±(%rdg+counts) ±(%rdg+counts)/°C
R
20 p
200 p
5
A 100 aA
A 1 fA
n parallel with 20pF, <2pF guarded (10M
Ω i
CCURACY TEMPERATURE
1
1 Year)
1
⁄2-DIGIT 18°–28°C 0°–18°C & 28°–50°C
2
2
(
30 0.1 + 5
1 +
5 0.1 + 1
1 +
OEFFICIENT
C
Ω w
ith zero
2 nA 10 fA 0.2 + 30 0.1 + 2
20 nA 100 fA 0.2 + 5 0.03 + 1
200 nA 1 pA 0.2 + 5 0.03 + 1
2 µA 10 pA 0.1 + 10 0.005 + 2
20 µA 100 pA 0.1 + 5 0.005 + 1
200 µA 1 nA 0.1 + 5 0.005 + 1
2 mA 10 nA 0.1 + 10 0.008 + 2
20 mA 100 nA 0.1 + 5 0.008 + 1
1
When properly zeroed, 51⁄2-digit, 1PLC (power line cycle), median filter on,
digital filter = 10 readings.
2
aA =10–18A, fA=10–15A.
INPUT BIAS CURRENT: <3fA at T
INPUT BIAS CURRENT NOISE: <750aA p-p (capped input), 0.1Hz to 10Hz band-
width, damping on. Digital filter = 40 readings.
INPUT VOLTAGE BURDEN at T
ranges. <100µV on 200pA, 200nA, 200µA ranges. <2mV on 2mA range. <4mV on
. Temperature coefficient = 0.5fA/°C.
CAL
±1°C: <20µV on 20pA, 2nA, 20nA, 2µA, 20µA
C
AL
20mA range.
TURE COEFFICIENT OF INPUT VOLTAGE BURDEN:
TEMPERA
V/°C on pA, nA,
<10µ
µA ranges.
PREAMP SETTLING TIME (to 10% of final value): 2.5s typical on pA ranges, damp-
ing off, 4s typical on pA ranges damping on, 15ms on nA ranges, 2ms on µA and
mA ranges.
NMRR: >95dB on pA, 60dB on nA, µA, and mA ranges at 50Hz or 60Hz ±0.1%.
COULOMBS ACCURACY TEMPERATURE
1
5
⁄2-DIGIT
OLUTION ±(%rdg+counts) ±(%rdg+counts)/°C
S
E
ANGE
R
2
20
200
2
1
Specifications apply immediately after charge acquisition. Add
(4fA +
where
2
When properly zeroed, 51⁄2-digit, 1PLC (power line cycle), median filter on,
digital filter = 10 readings.
INPUT BIAS CURRENT: <4fA at
R
fC 0.4 + 5 0.04 + 3
nC
nC
nC
C 10 pC 0.4 + 5 0.04 + 1
µ
|QAV|
T
A
Q
10
fC 0.4 + 5 0.04 + 1
100
1 pC 0.4 + 5 0.04 + 1
_____
) T
A
RC
= period of time in seconds between the coulombs zero and measurement
= average charge measured over TA, and RC = 300,000 typical.
AV
T
. T
CAL
1,2
(1 Year)
°–28°C 0°–18°C & 28°–50°C
8
1
emperature coefficient = 0.5fA/
COEFFICIENT
°C.
OHMS (Normal Method)
TEMPERATURE
1
CCURACY
1
DIGIT (10–100% Range) (10–100% Range)
⁄2-
5
RESO- 18°–28°C (1 Yr.) 0°–18°C & 28°–50°C AUTO AMPS
A
RANGE LUTION ±(% rdg+counts) ±(% rdg+counts) V SOURCE RANGE
2MΩ 10 Ω 0.125 + 1 0.01 + 1 40 V 200 µA
0M
2
Ω 100Ω 0
00 M
2
Ω 1kΩ 0
G
2
Ω 10kΩ 0
.125 + 1 0.01 + 1 40 V 20 µA
.15 + 1 0.015 + 1 40 V 2 µA
.225 + 1 0.035 + 1 40 V 200 nA
20 GΩ 100 kΩ 0.225 + 1 0.035 + 1 40 V 20 nA
200 G
Ω 1MΩ 0.35 + 1 0.110 + 1 40 V 2 nA
2TΩ 10 MΩ 0.35 + 1 0.110 + 1 400 V 2 nA
20 T
Ω 100 MΩ 1.025 + 1 0.105 + 1 400 V 200 pA
00 T
2
Ω 1GΩ 1
1
Specifications are for auto V-source ohms, when properly zeroed, 51⁄2-digit, 1PLC, median filter on,
igital filter = 10 readings. If user selectable voltage is required, use manual mode. Manual mode displays resist-
d
ance (up to 10
selected Amps range.
1
8
Ω) calculated from measured current. Accuracy is equal to accuracy of V-source plus accuracy of
.15 + 1 0.125 + 1 400 V 20 pA
PREAMP SETTLING TIME: Add voltage source settling time to preamp settling time in Amps specification.
OHMS (ALTERNATING POLARITY METHOD)
The alternating polarity sequence compensates for the background (offset) currents of the material or device under
test. Maximum tolerable offset up to full scale of the current range used.
Using Keithley 8009 fixture
REPEATABILITY:
ACCURACY: (V
where: ∆
V
V
I
MEAS
∆IBG× R/V
Err + I
SRC
I
is a measured, typical background current noise from the sample and fixture.
B
G
is the alternating polarity voltage used.
A
LT
Err is the accuracy (in volts) of the voltage source using V
S
RC
Err is the accuracy (in amps) of the ammeter using V
+ 0.1% (1σ) (instrument temperature constant ±1°C).
ALT
Err × R)/V
MEAS
ALT
VOLTAGE SOURCE ACCURACY TEMPERATURE
1
⁄2-DIGIT 18°–28°C 0°–18°C & 28°–50°C
RANGE RESOLUTION ±(% setting + offset) ±(% setting+offset)/°C
100 V 5 mV 0.15 + 10 mV 0.005 + 1 mV
1000 V 50 mV 0.15 + 100 mV 0.005 + 10 mV
MAXIMUM OUTPUT CURRENT:
±10mA; active current limit at <11.5mA for 100V range.
±1mA; active current limit at <1.15mA for 1000V range.
SETTLING TIME: <8ms to rated accuracy for 100V range.
NOISE: <150µV p-p from 0.1Hz to 10Hz for 100V range.
5
<50ms to rated accuracy for 1000V range.
<1.5mV p-p from 0.1Hz to 10Hz for 1000V range.
OEFFICIENT
C
as the setting.
A
LT
/R as the rdg.
T
AL
(1 Year) COEFFICIENT
Model 6517A specifications
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Page 4
6517A
TEMPERATURE (Thermocouple)
THERMOCOUPLE 18°–28°C
YPE RANGE ±(% rdg + °C)
T
1
K
Excluding probe errors, T
–25°C to 150°C ± (0.3% + 1.5°C)
± 5°C, 1 PLC integration time.
CAL
HUMIDITY
RANGE 18°–28°C, ±(% rdg + % RH)
–100% ± (0.3% +0.5)
0
1
Humidity probe accuracy must be added. This is ±3% RH for Model 6517-RH, up to 65°C probe
environment, not to exceed 85°C.
IEEE-488 BUS IMPLEMENTATION
IMPLEMENTATION: SCPI (IEEE-488.2, SCPI-1993); DDC (IEEE-488.1).
TRIGGER TO READING DONE: 150ms typical, with external trigger.
RS-232 IMPLEMENTATION: Supports: SCPI 1991.0.
aud Rates:300, 600, 1200, 2400, 4800, 9600, 19.2k.
B
PROTOCOLS: Xon/Xoff,
CONNECTOR: DB-9 TXD/RXD/GND.
7- or 8-bit ASCII, parity-odd/even/none.
Model 6517A specifications
CCURACY (1 Year)
A
ACCURACY (1 Year)
Electrometer/High Resistance Meter
ENERAL
1
1
1
ISPLAY:6
D
ANGING:Automatic or manual.
R
CONVERSION TIME: Selectable 0.01PLC to 10PLC.
MAXIMUM INPUT: 250V peak, DC to 60Hz sine wave; 10s per minute maximum
AXIMUM COMMON MODE VOLTAGE (DC to 60Hz sine wave):
M
SOLATION (Meter COMMON to chassis):Typically 10
I
INPUT CONNECTOR: Three lug triaxial on rear panel.
2V ANALOG OUTPUT: 2V for full range input. Non-inverting in Volts mode,
REAMP OUTPUT:Provides a guard output for Volts measurements. Can be
P
EXTERNAL TRIGGER: TTL compatible External Trigger and Electrometer
GUARD: Switchable voltage guard available.
DIGITAL I/O AND TRIGGER LINE: Available, see manual for usage.
EMI/RFI: Meets VDE-0871 and FCC Class B limits.
EMC: Conforms to European Union Directive 89/336/EEC.
SAFETY: Conforms to European Union Directive 73/23/EEC (meets EN61010-1/
READING STORAGE: 15706 max. readings (SCPI mode), 100 readings (DDC
READING RATE:
1
0.01PLC, digital filters off, front panel off, temperature + RH off.
2
Binary transfer mode.
DIGITAL FILTER: Median and averaging.
ENVIRONMENT: Operating: 0°–50°C; relative humidity 70% non-condensing,
WARM-UP: 1 hour to rated accuracy (see manual for recommended procedure).
POWER: 105–125V or 210–250V (external switch selected), 90–110V (internal
PHYSICAL: Case Dimensions: 90mm high × 214mm wide × 369mm deep
digit vacuum fluorescent multiline.
⁄2-
on mA ranges.
lectrometer, 500V peak; V Source, 750V peak.
E
500pF.
inverting when measuring Amps, Ohms, or Coulombs. Output impedance
0k
1
Ω.
sed as an inverting output or with external feedback in Amps and Coulombs
u
modes.
Complete.
IEC 1010).
mode).
To internal buffer 125 readings/second
To IEEE-488 bus 115 readings/second
Bus transfer 2500 readings/second
up to 35°C.
switch selected), 50–60Hz, 50VA.
(3
Working Dimensions: From front of case to rear including power cord and
Storage: –25° to +65°C.
1
⁄2 in. × 81⁄2 in. × 141⁄2 in.).
IEEE-488 connector: 15.5 inches.
G
1
0
n parallel with
Ω i
1
1,2
2
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