6517A
• Measures resistances up to
16
10
Ω
• 1fA–20mA current measurement
range
• <20µV burden voltage on lowest
current ranges
• 200TΩ input impedance
• <3fA bias current
• Up to 125 rdgs/s
• 0.75fA p-p noise
• Built-in ±1kV voltage source
• Unique voltage reversal method
for high resistance
measurements
• Optional plug-in scanner cards
Ordering Information
6517A Electrometer/High
Extended warranty, service, and
calibration contracts are available.
Accessories Supplied
237-ALG-2 Low Noise Triax
Cable, 3-slot Triax to Alligator
Clips, 2m (6.6 ft)
8607 Safety High Voltage Dual
Test Leads
6517-TP Thermocouple Bead
Probe
CS-459 Interlock Connector
Resistance Meter
Electrometer/HighResistance Meter
Keithley’s 51⁄2-digit Model 6517A Electrometer/High
Resistance Meter offers accuracy and sensitivity specifications
unmatched by any other meter of this type. It also offers a
variety of features that simplify measuring high resistances
and the resistivity of insulating materials. With reading rates
of up to 125 readings/second, the Model 6517A is also significantly faster than competitive electrometers, so it offers a
quick, easy way to measure low-level currents.
Exceptional Performance Specifications
The half-rack-sized Model 6517A has a special low current
input amplifier with an input bias current of <3fA with just
0.75fA p-p (peak-to-peak) noise and <20µV burden voltage
on the lowest range. The input impedance for voltage and
resistance measurements is 200TΩ for near-ideal circuit
tivity needed for accurate low current and high-impedance voltage, resistance, and charge measurements
in areas of research such as physics, optics, nanotechnology, and materials science. A built-in ±1kV voltage source with sweep capability simplifies performing leakage, breakdown, and resistance testing, as well
as volume (Ω-cm) and surface resistivity (Ω/square) measurements on insulating materials.
Wide Measurement Ranges
The Model 6517A offers full autoranging over the full span of ranges on current, resistance, voltage, and
charge measurements:
• Current measurements from 1fA to 20mA.
• Voltage measurements from 10µV to 200V.
• Resistance measurements from 50Ω to 10
• Charge measurements from 10fC to 2µC.
ACCESSORIES AVAILABLE
CABLES
6517-ILC-3 Interlock Cable
7007-1 Shielded IEEE-488 Cable, 1m (3.2 ft)
7007-2 Shielded IEEE-488 Cable, 2m (6.5 ft)
7009-5 RS-232 Cable
7078-TRX-3 Low Noise Triax Cable, 3-Slot Triax Connectors,
7078-TRX-10 Low Noise Triax Cable, 3-Slot Triax Connectors,
7078-TRX-20 Low Noise Triax Cable, 3-Slot Triax Connectors,
8501-1 Trigger Link Cable, 1m (3.3 ft)
8501-2 Trigger Link Cable, 2m (6.6 ft)
8503 Trigger Link Cable to 2 male BNCs, 1m (3.3 ft)
8607 1kV Source Banana Cables
ADAPTERS
237-BNC-TRX Male BNC to 3-Lug Female Triax Adapter
237-TRX-NG Triax Male-Female Adapter with Guard
237-TRX-T 3-Slot Male Triax to Dual 3-Lug Female Triax Tee
237-TRX-TBC 3-Lug Female Triax Bulkhead Connector
7078-TRX-TBC 3-Lug Female Triax Bulkhead Connector with Cap
0.9m (3 ft)
3m (10 ft)
6m (20 ft)
Disconnected
Adapter
(1.1kV rated)
loading. These specifications ensure the accuracy and sensi-
16
Ω.
PROBES
6103C Voltage Divider Probe
6517-RH Humidity Probe with Extension Cable
6517-TP Temperature Bead Probe (included with 6517A)
TEST FIXTURE
8009 Resistivity Test Fixture
SOFTWARE
6524 High Resistance Measurement Software
TestPoint Software Package
RACK MOUNT KITS
4288-1 Single Fixed Rack Mounting Kit
4288-2 Dual Fixed Rack Mounting Kit
SCANNER CARDS
6521 Low Current Scanner Card
6522 Voltage/Low Current Scanner Card
OTHER
1050 Padded Carrying Case
5156 Calibration Standard Set
6517EW 1 Year Warranty Extension
KPCI-488 IEEE-488 Interface/Controller for the PCI Bus
KPC-488.2AT IEEE-488 Interface Card for IBM PC/AT (full slot)
KPC-TM Trigger Master Interface
Features simplify measuring high resistances and the resistivity of insulating materials
1.888.KEITHLEY (U.S. only)
www.keithley.com
A GREATER MEASURE OF CONFIDENCE
LOW I/HIGH R PRODUCTS
6517A
Electrometer/HighResistance Meter
Simple DMM-like Operation
The Model 6517A is designed for easy, DMM-like operation via the front panel,
with single-button control of important functions such as resistance measurement. It can also be controlled via a built-in IEEE-488 interface, which makes it
possible to program all functions over the bus through a computer controller.
Model 617 DDC Compatibility
If you already own one of Keithley’s standard-setting Model 617 electrometers,
you can easily substitute the 6517A in your test configuration to enhance its
measurement performance. Minimal software revisions will be required.
High Accuracy High Resistance Measurements
The Model 6517A offers a number of features and capabilities that help ensure
the accuracy of high resistance measurement applications. For example, the
built-in voltage source simplifies determining the relationship between an
insulator’s resistivity and the level of source voltage used. It is well suited for
capacitor leakage and insulation resistance measurements, tests of the surface
insulation resistance of printed circuit boards, voltage coefficient testing of
resistors, and diode leakage characterization.
A test sequence in the Model 6517A incorporates a new voltage reversal
method for measuring very high resistances, especially in materials and
devices where the inherent background currents in the sample previously
made accurate measurements impossible. The optional Model 6524 software
package simplifies operating the Model 6517A via a computer controller and
makes it easy to optimize the test parameters (delay time, voltage, etc.) for the
specific material or device under test. The Model 6517A meter, the software,
and a resistivity fixture are available as a combination for specific material or
device testing applications. Refer to the Model 65 for more information.
Temperature and Humidity Stamping
Humidity and temperature can influence the resistivity values of materials significantly. To help you make accurate comparisons of readings acquired under
varying conditions, the Model 6517A offers a built-in type K thermocouple and
an optional Model 6517RH Relative Humidity Probe. A built-in data storage buffer allows recording and recalling readings stamped with the time, temperature, and relative humidity at which they were acquired.
Accessories Extend Measurement Capabilities
A variety of optional accessories can be used to extend the Model 6517A’s
applications and enhance its performance.
Scanner Cards. Two scanner cards are available to simplify scanning multiple
signals. Either card can be easily inserted in the option slot of the instrument’s
back panel. The Model 6521 Scanner Card offers ten channels of low-level current scanning. The Model 6522 Scanner Card provides ten channels of highimpedance voltage switching or low-current switching.
Test Fixture. The Model 8009 Resistivity Chamber is a guarded test fixture for
measuring volume and surface resistivities of sample materials. It has stainlesssteel electrodes built to ASTM standards. The fixture’s electrode dimensions
are pre-programmed into the Model 6517A, so there’s no need to calculate
those values then enter them manually. This accessory is designed to protect
you from contact with potentially hazardous voltages —opening the lid of the
chamber automatically turns off the Model 6517A’s voltage source.
NIST-Traceable Calibration
The optional Model 5156 Calibration Unit allows you to acquire NIST-traceable
calibration specifications. It includes all the standards needed to calibrate the
6517A’s 20pA–2µA current ranges and the 2nC–2µC charge ranges.
Applications
The Model 6517A is well suited for low current and high impedance voltage,
resistance, and charge measurements in areas of research such as physics,
optics, and materials science. Its extremely low voltage burden makes it particularly appropriate for use in solar cell applications, and its built-in voltage
source and low current sensitivity make it an excellent solution for high resistance measurements of nanomaterials such as polymer based nanowires. Its
high speed and ease-of-use also make it an excellent choice for quality control,
product engineering, and production test applications involving leakage,
breakdown, and resistance testing. Volume and surface resistivity measurements on non-conductive materials are particularly enhanced by the Model
6517A’s voltage reversal method.
Features simplify measuring high resistances and the resistivity of insulating materials
1.888.KEITHLEY (U.S. only)
LOW I/HIGH R PRODUCTS
www.keithley.com
A GREATER MEASURE OF CONFIDENCE
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