Keithley Instruments 2636A Data Sheet

Series 2600A

• Combines a power supply,

true current source, DMM,
arbitrary waveform generator,
V or I pulse generator with
measurement, electronic load,
and trigger controller – all in
one instrument

• Family of products offers wide

dynamic range: 1fA to 10A and
1μV to 200V

• 20,000 rdg/s provides faster

test times and ability to capture
transient device behavior

• Precision timing and channel

synchronization (<500ns)

• USB port for saving data and

test scripts

• LXI Class C compliance supports

Side Text

high speed data transfer and
enables quick and easy remote
testing, monitoring, and
troubleshooting

• Software:

®

– TSP

Express for quick and

easy I-V test (embedded)

– ACS Basic Edition for

Scalable, integrated source and measure solutions

semiconductor component
characterization (optional)

System SourceMeter® Instruments

Series 2600A System SourceMeter instruments are Keithley’s latest I-V source-measure instruments for
use as either bench-top I-V characterization tools or as building block components of multi-channel
I-V test systems. For bench-top use, Series 2600A instruments feature an embedded TSP Express
Software Tool that allows users to quickly and easily perform common I-V tests without program­ming or installing software. For system level applications, Series 2600A’s Test Script Processor (TSP)
architecture along with other new capabilities such as parallel test execution and precision timing
provides the highest throughput in the industry, lowering the cost of test. To simplify the testing,
verification, and analysis of semiconductor components, the optional ACS Basic Edition software
is also available.

Series 2600A System SourceMeter instruments replace the popular Series 2600 System SourceMeter
instruments with a superset of features. 2600A instruments readily execute all 2600 commands.

CONNECT DUT CONFIGURE Test COLLECT Data

HI

SMU B

Sweep V

SMU A

Step V

G

Measure I

G

LO

Performing nested sweeps to characterize a transistor with TSP Express is quick and easy. Data can be exported to a .csv file for use with
spreadsheet applications such as Excel.

Quick and Easy Lab and
Bench-Top Use

Each Series 2600A SourceMeter instrument
is a complete I-V measurement solution with
unmatched ease of use, capability, and flexibility.
They simplify the process of making high-perfor­mance measurements.

Measure I

LO

D

D

The TSP Express Software Tool quickly sets up
and runs basic and advanced tests, including:
nested step/sweeps, pulse sweeps, and custom
sweeps for device characterization applications.
The resulting data can be viewed in graphical or

TSP Express runs on a PC connected to the
SourceMeter instrument via an Ethernet cable
(provided with the instrument). The intuitive
user interface resides on the built-in LXI web

page, so no software installation is needed.
tabular format and exported to a .csv file for use
with spreadsheet applications.

SOURCE AND M EASURE

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A G R E A T E R M E A S U R E O F C O N F I D E N C E

Series 2600A

Test 1

running

To

Device 1

GPIB or Ethernet
TSP-Link

Test 2

running

To

Device 2

Test 3

running

To

Device 3

System SourceMeter® Instruments

Simplify Semiconductor Component
Test, Verification, and Analysis

The optional ACS Basic Edition software maximizes the
productivity of customers who perform packaged part charac­terization during development, quality verification, or failure
analysis, with:

• Rich set of easy-to-access test libraries

• Script editor for fast customization of existing tests

• Data tool for comparing results quickly

• Formulator tool that analyzes captured curves and provides
a wide range of math functions

For more information about the ACS Basic Edition software,
please refer to the ACS Basic Edition data sheet.

Unmatched Throughput and Flexibility
for High Performance I-V Test Systems

TSP technology provides remarkable capabilities when a Series
2600A is integrated as part of a multi-channel I-V test system.

When you need to acquire data on a packaged part quickly, the wizard-based user
interface of ACS Basic Edition makes it easy to find and run the test you want, like
this common FET curve trace test.

For example, the embedded scripting capability allows test
scripts to be run by the instrument. Test scripts are complete test programs based on an easy to use
but highly efficient and compact scripting language called Lua <www.lua.org>. Since test scripts
can contain any sequence of routines that are executable by conventional programming languages
(including decision making algorithms), this feature allows entire tests to be managed by the instru­ment without sending readings back to a PC for decision making. This eliminates the delays caused
by GPIB traffic congestion and greatly improves overall test times.

Also, TSP technology offers “mainframe-less channel expansion.” The TSP-Link channel expansion
bus (which uses a 100 Base T Ethernet cable) allows multiple Series 2600A and other TSP instruments
to be connected in a master-slave configuration and behave as one integrated system. TSP-Link sup­ports up to 32 units or 64 SMU channels per GPIB or IP address, making it easy to scale a system to
fit the particular requirements of an application.

Parallel Test Capability

The Series 2600A takes system level performance to a new height with parallel testing capability. This
feature tests multiple devices in parallel to meet the high throughput requirements of production test
and advanced semiconductor lab applications.

This parallel testing capability enables each instrument in the system to run its own complete test
sequence, creating a fully multi-threaded test environment. Hence, the number of tests that can be
running in parallel on a Series 2600A system can be as many as the number of instruments in the
system. In contrast, most conventional test systems run a single thread test, usually on the controller

PC instead of the instrument itself. Testing multi­ple devices at the same time means dramatically
improved test throughput and reduced overall
cost of test.

When all or some of your test requirements
change, your Series 2600A system can be recon­figured via software without rewiring. The inter­nal software can match the different pin layouts
of the devices-under-test to the appropriate SMU­per-pin configurations.

Tight Timing and Synchronization

Today’s test engineers are challenged with
testing increasingly more complex and more
sensitive devices that require precise timing
and synchronization. Whether you need to
synchronize electrical and optical tests for an

<500ns

Side Text

Scalable, integrated source and measure solutions

Parallel testing with the Series 2600A

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SMU1

SMU2
SMU3

SMU4

A G R E A T E R M E A S U R E O F C O N F I D E N C E

All channels in the system are synchronized
to under 500ns.

SOURCE AND M EASURE

Series 2600A

System SourceMeter® Instruments

Ordering Information

2601A Single-channel System

2602A Dual-channel System

2611A Single-channel System

2612A Dual-channel System

2635A Single-channel System

Side Text

2636A Dual-channel System

Accessories Supplied

2600-ALG-2

Scalable, integrated source and measure solutions

2600-IAC

2600-Kit Mating Screw

CA-180-3A

TSP Express Software Tool
(embedded)

Test Script Builder Software
(supplied on CD)

ACS Basic Edition Software
(optional)

SourceMeter Instrument
(3A DC, 10A Pulse)

SourceMeter Instrument
(3A DC, 10A Pulse)

SourceMeter Instrument
(200V, 10A Pulse)

SourceMeter Instrument
(200V, 10A Pulse)

SourceMeter Instrument
(1fA, 10A Pulse)

SourceMeter Instrument
(1fA, 10A Pulse)

Low Noise Triax Cable
with Alligator Clips,
2m (6.6 ft.) (two
supplied with 2636A,
one with 2635A)

Safety Interlock Adapter
Connector (one supplied
with 2611A/2612A
and 2635A/2636A)

Terminal Connectors
with strain relief
and covers (2601A/
2602A/2611A/2612A)

TSP-Link/Ethernet
Cable (two per unit)

optoelectronic component or ensure that the same stress times are applied to the different pins of an
advanced semiconductor device, providing precision timing and synchronization between SMU chan­nels (and external instruments) has become a critical requirement.

A high performance trigger model that is hardware driven allows timing at each source-measure step
to be tightly controlled. It also synchronizes the operations between SMU channels and/or external
instrumentation at hardware speeds of <500ns.

Third-generation SMU Design
Ensures Faster Test Times

Based on the proven architecture of earlier Series 2600 instruments,
the Series 2600A’s new SMU design enhances test speed in several
ways. For example, while earlier designs used a parallel current rang­ing topology, the Series 2600A uses a patented series ranging topol­ogy, which provides faster and smoother range changes and outputs
that settle more quickly.

The Series 2600A SMU design supports two modes of operation for
use with a variety of loads. In normal mode, the SMU provides high
bandwidth performance for maximum throughput. In high capaci­tance (high-C) mode, the SMU uses a slower bandwidth to provide
robust performance with higher capacitive loads.

Each Series 2600A SMU channel offers a highly flexible, four-quad­rant source coupled with precision voltage and current meters. Each
channel can be configured as a:

• Precision power supply

• True current source

• DMM (DCV, DCI, ohms, and power with 5½-digit resolution)

• Electronic load (with sink mode capability)

• V or I pulse generator (Pulse width: 100µs and longer)

Current arbitrary waveforms
maximum output update
rates: 12,500 samples/
second.

Voltage arbitrary waveforms
maximum output update
rates: 20,000 samples/
second.

• V or I waveform generator

All analog-to-digital (A/D) converters in Series 2600A instruments are both high speed and high
precision for maximum flexibility. The two A/D converters per channel (one for I, one for V) can run
simultaneously, providing precise source-readback without sacrificing test throughput. These A/D
converters offer the versatility of programmable integration rates, allowing you to optimize for either
high speed (>20,000 rdgs/s at 0.001 NPLC setting) or for high resolution (up to 24 bits at 10 NPLC set­ting) measurements.

Digital I/O Interface

A back panel port on every Series 2600A instrument provides 14 bits of universal digital I/O to link
the instrument to a variety of popular component handlers and/or probe stations. These digital I/O
lines are compatible with the triggering technology of Keithley’s earlier Trigger-Link instruments.
These lines simplify integrating Series 2600A instruments into systems that employ other electrical,
mechanical, optical, or RF equipment.

TSP-Link Trigger Lines

The TSP-Link bus supports dedicated trigger lines that provide synchronous operations between mul­tiple Series 2600A instruments (and other TSP instruments, such as Series 3700 DMM/Switch Systems)
without the need for additional trigger connections.

Built-in Contact Check Function

The Contact Check function makes it simple to verify good device-under-test connections quickly and
easily before an automated test sequence begins. This eliminates the measurement errors and false
product failures associated with contact fatigue, breakage, contamination, loose or broken connec­tions, relay failures, etc.

SOURCE AND M EASURE

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A G R E A T E R M E A S U R E O F C O N F I D E N C E

Series 2600A

System SourceMeter® Instruments

TYPICAL APPLICATIONS
I-V functional test and

characterization of a
wide range of devices,
including:

• Discrete and passive
components

– Two-leaded –

Sensors, disk drive
heads, metal oxide
varistors (MOVs),
diodes, zener diodes,
sensors, capacitors,
thermistors

– Three-leaded –

Small signal bipolar
junction transistors
(BJTs), field-effect
transistors (FETs),
and more

• Simple ICs – Optos,
drivers, switches,
sensors

• Integrated devices –
small scale integrated
(SSI) and large scale
integrated (LSI)

– Analog ICs
– Radio frequency

integrated circuits
(RFICs)

– Application specific

integrated circuits (ASICs)

– System on a chip (SOC) devices

• Optoelectronic devices such as light­emitting diodes (LEDs), laser diodes,
high brightness LEDs (HBLEDs), vertical
cavity surface-emitting lasers (VCSELs),
displays

• Wafer level reliability
– NBTI, TDDB, HCI, electromigration

• Solar Cells

• Batteries

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Powerful Software Tools

In addition to the embedded TSP Express and optional ACS Basic
Edition software, the free Test Script Builder software tool is provided
to help users create, modify, debug, and store TSP test scripts. Table 1
describes key features of Series 2600A software tools.

Complete Automated System Solutions

While the ACS Basic Edition software only supports component char­acterization tests, wafer and cassette level testing can be performed
by Keithley’s ACS Integrated Test Systems. ACS systems are highly
configurable, instrument-based systems that generally include a
number of Series 2600A instruments. These systems are designed for
semiconductor device characterization, reliability/WLR, parametric,
and component functional testing.

The flexible software architecture of ACS Basic Edition allows
configuring systems with a wide range of controllers and test
fixtures, as well as the exact number of SourceMeter instruments
the application requires.

Table 1. Series 2600A software tools

Feature/

Functionality

Description

Supported
hardware

Supported
buses

Functionality

Data
management

Installation

ACS Basic Edition

Semiconductor characterization

software for component test,

verification, and analysis

24xx, 26xx, 26xxA, 4200-SCS, 237

GPIB, Ethernet

Intuitive, wizard-based GUI,

Rich set of test libraries

Formulator tool with wide range

of math functions

Optional purchase

A G R E A T E R M E A S U R E O F C O N F I D E N C E

TSP Express

Quick Start Tool for fast and easy

I-V testing, primarily for bench

and lab users

26xxA 26xx, 26xxA, 37xx

Ethernet only

Linear/Log Sweeps, Pulsing,
Custom sweeps, Single point
source-measures. Note: Uses

new 2600A’s new API’s for

precision timing and channel

synchronization

.csv export, basic curve

tracing (no math formula or

analysis support)

Not necessar y.

Embedded in the instrument.

Example ACS Integrated
Test System

Test Script

Builder (TSB)

Custom script

writing tool for TSP

instruments

GPIB, RS-232,

Ethernet

Custom scripts with

total flexibility

N/A

Free Download or

CD Install on PC.

Side Text

Scalable, integrated source and measure solutions

SOURCE AND M EASURE

Series 2600A

System SourceMeter® Instruments

In the first and third quadrants, Series 2600A instruments operate as a
source, delivering power to a load. In the second and fourth quadrants,
they operate as a sink, dissipating power internally.

+10A

+5A

+3A

+1.5A

+1A

0A

–1A

–1.5A

–3A

–5A

–10A

+35V–35V–40V

Side Text

–6V

Models 2601A and 2602A I-V capability

+10A

Scalable, integrated source and measure solutions

+1.5A

+1A

+0.1A

–0.1A

–1A

–1.5A

–10A

0A

–5V

Models 2611A and 2612A I-V capability

+10A

+20V–20V 0V

+20V–20V 0V

+40V+6V

+180V–180V–200V

+200V+5V

DC

Pulse

DC

Pulse

ACCESSORIES AVAILABLE

CABLES AND CONNECTORS

2600-BAN Banana Test Leads/Adapter Cable. For a single

2600-KIT Extra screw terminal connector, strain relief, and cover for a single SourceMeter

2600-TRIAX Triax Adapter. For a single 2601A/2602A/2611A/2612A SMU channel
7078-TRX-* 3-Slot, Low Noise Triax Cable. For use with 2600-TRIAX Adapter
7078-TRX-GND 3-Slot male triax to BNC adapter (guard removed)
8606 High Performance Modular Probe Kit. For use with 2600A-BAN
SC-200 Shielded Twisted Pair Cable. Recommended for general-purpose

2600-IAC Safety Interlock Adapter Connector (one supplied with 2611A/2612A/2635A/2636A)

DIGITAL I/O, TRIGGER LINK, AND TSP-LINK

2600-TLINK Digital I/O to TLINK Adapter Cable, 1m
CA-126-1 Digital I/O and Trigger Cable, 1.5m
CA-180-3A CAT5 Crossover Cable for TSP-Link and direct Ethernet connection (two supplied)

GPIB INTERFACES AND CABLES

7007-1 Double Shielded GPIB Cable, 1m (3.3 ft.)
7007-2 Double Shielded GPIB Cable, 2m (6.6 ft.)
KPCI-488LPA IEEE-488 Interface/Controller for the PCI Bus
KPXI-488 IEEE-488 Interface Board for the PXI Bus
KUSB-488A IEEE-488 USB-to-GPIB Interface Adapter

SWITCHING

Series 3700 DMM/Switch Systems
707A Semiconductor Switching Matrix Mainframe
7001 Switch Control Mainframe
7002-HD High Density Switch Mainframe

RACK MOUNT KITS

4299-1 Single Rack Mount Kit with front and rear support
4299-2 Dual Rack Mount Kit with front and rear support
4299-5 1U Vent Panel

SOFTWARE

ACS-BASIC Component Characterization Software

EXTENDED WARR ANTIES

2601A-EW 1 Year Extended Warranty for Model 2601A
2602A-EW 1 Year Extended Warranty for Model 2602A
2611A-EW 1 Year Extended Warranty for Model 2611A
2612A-EW 1 Year Extended Warranty for Model 2612A
2635A-EW 1 Year Extended Warranty for Model 2635A
2636A-EW 1 Year Extended Warranty for Model 2636A

CALIBRATION AN D VERIFICATION

2600-STD-RES Calibration Standard 1GW Resistor for Models 2635A and 2636A

2601A/2602A/2611A /2612A SMU channel

channel (one supplied with 2601A/2611A, two with 2602A/2612A)

use with Series 2600A System SourceMeter instruments

+1.5A

+1A

+0.1A

0A

–0.1A

–1A

–1.5A

–10A

–5V

Models 2635A and 2636A I-V capability

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Model 2602A/2612A
rear panel

(Single channels

DC

Pulse

+180V–180V–200V

+20V–20V 0V

+200V+5V

2601A, 2611A, 2635A
not shown)

Model 2636A rear panel

A G R E A T E R M E A S U R E O F C O N F I D E N C E