Keithley Instruments 2612 Data Sheet

www.keithley.com
1.888.KEITHLEY (U.S. only)
A GREATER MEASURE OF CONFIDENCE
SOURCE AND MEASURE
1
Scalable, integrated source and measure solutions
Series 2600 System SourceMeter instruments offer electronic component and semiconductor device manufacturers a scalable, high through­put, highly cost-effective solution for precision DC, pulse, and low frequency AC source­measure testing. Building on the tightly integrat­ed source-measure technology originally devel­oped for Keithley’s popular Series 2400 SourceMeter line, Series 2600 instruments pro­vide from two to four times the test speed of competitive solutions in I-V functional test appli­cations. They also offer higher source-measure channel density and a significantly lower cost of ownership than competing products. The analog-to-digital converters provide simultane­ous I and V measurements in less than 100µs (10,000 rdgs/s) and source-measure sweep speeds of less than 200µs per point (5,500 points/s). This high speed source-measure capa­bility, plus advanced automation features and time-saving software tools make Series 2600 SourceMeter instruments an ideal solution for I-V testing of a wide range of devices.
System scalability without a mainframe
Series 2600 instruments incorporate an innova­tive technology that makes it possible to create multi-channel I-V test systems economically, but without sacrificing test throughput. TSP-Link is a high speed system expansion interface, which test system builders can use to connect multiple
Series 2600 System SourceMeter
®
Multi-Channel I-V Test Solutions
Combines a precision power
supply, true current source, DMM, arbitrary waveform generator, V or I pulse generator with measurement, electronic load, and trigger controller—all in one instrument
Contact check function ensures
high integrity measurements
10,000 readings/s and 5,500
source-measure points/s to memory provide faster test times
The embedded Test Script
Processor (TSP™) offers unparalleled system automation and two to four times the test throughput of competitive products in I-V functional test applications
Family of products offers wide
dynamic range: 1pA to 10A and 1µV to 200V
TSP-Link™ master/slave
connection seamlessly inte­grates multiple Series 2600 SourceMeter channels into a system that can be programmed and controlled as a single instrument
Free Test Script Builder software
simplifies creating powerful test scripts for programming custom test functions
Free LabTracer™ 2.0 software
available for curve tracing and fast, easy startup
Each SourceMeter channel is
electrically isolated for high integrity measurements and wiring flexibility
Industry’s highest SMU rack
density for automated test applications
TSP-Link makes it easy to scale the system's channel count to match the application.
2 Channel System
SMU A
SMU B
2602
3 Channel System
SMU A
Master
SMU B
2602
SMU C
Slave
2601
16+ Channel System
SMU A
Master
SMU B
2602
SMU C
Slave
SMU D
2602
Slave
SMU E
2601
GPIB
TSP-Link In
TSP-Link Out
GPIB
TSP-Link In
TSP-Link Out
GPIB
TSP-Link In
TSP-Link Out
GPIB
TSP-Link In
TSP-Link Out
GPIB
TSP-Link In
TSP-Link Out
GPIB
TSP-Link In
TSP-Link Out
To PC
To PC
To PC
www.keithley.com
1.888.KEITHLEY (U.S. only)
A GREATER MEASURE OF CONFIDENCE
SOURCE AND MEASURE
2
Scalable, integrated source and measure solutions
Series 2600 System SourceMeter
®
Multi-Channel I-V Test Solutions
Series 2600 instruments in a master/slave configuration. Once connected, all the Series 2600 instru­ments in a system can be programmed and operated under the control of the master unit, just as if they were housed in the same chassis. By eliminating the need for a chassis/mainframe, the TSP-Link provides virtually unlimited flexibility to scale a test system’s channel count up or down as the appli­cation requires, while ensuring seamless integration.
New capabilities for increasing test speed and lowering test cost
The Test Script Processor (TSP)
Any Series 2600-based system can run high speed, embedded test scripts on the master unit’s Test Script Processor (TSP), the other major new technology on which the Series 2600 is based. The test sequence is processed and run on the embedded computer in the instrument, rather than from an external PC controller, so delays due to GPIB traffic congestion are eliminated. TSP test scripts allow throughput gains of up to 10× over equivalent PC-based programs controlling the same instruments via GPIB. TSP test scripts can be loaded and run from the front panel or over the system’s GPIB inter­face. A single TSP test script, running on the master unit, can control all the SourceMeter channels in the system and acquire data from any Series 2600 instrument connected to the TSP-Link, which sup­ports connections for up to 64 Series 2600 instruments.
TSP for advanced automation
A Series 2600-based system can stand alone as a complete measurement and automation solution for semiconductor device or component testing, with the master unit controlling sourcing, measuring, pass/fail decisions, test sequence flow control, binning, and the component handler or prober. In contrast with existing embedded test sequencers for instrumentation, the TSP test scripts offer far greater programming flexibility, including support for:
• Instrument command queuing
• Modular subroutines with passable parameters
• Pass/fail and limit testing
• A wide range of math operations
• Flexible branching and looping capability
• Flexible external triggering
• Intelligent digital I/O read and write capability
• RS-232 communication
ACCESSORIES AVAILABLE
CABLES AND CONNECTORS
2600-BAN Banana Test Leads/Adapter Cable. For a single
Series 2600 SMU channel
2600-KIT Extra screw terminal connector, strain relief, and
cover for a single SourceMeter channel (one supplied with 2601/2611, two with 2602/2612)
2600-TRIAX Triax Adapter. For a single Series 2600 Source-
Meter (two needed for use with 2602/2612)
7078-TRX-* 3-Slot, Low Noise Triax Cable. For use with
2600-TRIAX Adapter
8606 High Performance Modular Probe Kit. For use
with 2600-BAN
SC-200 Shielded Twisted Pair Cable. Recommended for
general-purpose use with Series 2600 System SourceMeter instruments
2600-IAC Safety Interlock Adapter Connector (one supplied
with 2611/2612)
DIGITAL I/O, TRIGGER LINK AND TPS-LINK
2600-TLINK Digital I/O to TLINK Adapter Cable, 1m
CA-126-1 Digital I/O and Trigger Cable, 1.5m
CA-180-3A CAT5 Crossover Cable for TSP-Link (one supplied)
GPIB INTERFACES AND CABLES
7007-1 Double Shielded GPIB Cable, 1m (3.3 ft.) 7007-2 Double Shielded GPIB Cable, 2m (6.6 ft.) KPCI-488 GPIB/IEEE-488 Interface Board for the PCI Bus KUSB-488 GPIB/IEEE-488 Interface Module for the USB Bus
SWITCHING
7002-HD High Density Switch Mainframe 7002-HD-MTX1 Differential 6×32 Matrix Card 7002-HD-MUX1 Differential Quad 1×40 Multiplexer Card
RACK MOUNT KITS
4299-1 Single Rack Mount Kit with front and rear support 4299-2 Dual Rack Mount Kit with front and rear support
SOFTWARE
LabTracer™ 2.0 Curve Tracing Software (downloadable)
EXTENDED WARRANTIES
2601-EW 1 Year Extended Warranty for Model 2601 2602-EW 1 Year Extended Warranty for Model 2602 2611-EW 1 Year Extended Warranty for Model 2611 2612-EW 1 Year Extended Warranty for Model 2612
Factory and custom TSP test scripts
The Test Script Processor is programmed with a simple BASIC-style programming language that runs in real time on the instrument. Keithley provides built-in test scripts for:
• Sweeping
• Pulsing
• Waveform generation
• Common component tests like binary search, V
F
, VTH, LIV (light intensity/
current/voltage)
A number of test scripts are included in the instrument, while others can be down­loaded at no charge from www.keithley. com. These pre-written factory test scripts can be used as provided or easily custom­ized for a given application, so production users can get their systems up and run­ning faster than ever before.
Users can also create custom test scripts in several different ways, including a pro­gramming tool called Test Script Builder. Custom scripts can be downloaded from the PC to the master SourceMeter unit and saved in non-volatile memory. All four models provide 16 megabytes of non­volatile memory for storing up to 50,000 lines of TSP code and more than 100,000 readings.
Ordering Information
2601 Single-channel System
SourceMeter Instrument (High Current)
2602 Dual-channel System
SourceMeter Instrument (High Current)
2611 Single-channel System
SourceMeter Instrument (200V)
2612 Dual-channel System
SourceMeter Instrument (200V)
ACCESSORIES SUPPLIED
2600-IAC Safety Interlock Adapter Connector (one supplied with 2611/2612)
Test Script Builder software LabTracer Software (downloadable) IVI/VISA drivers for Visual Basic, VC/C++,
LabVIEW, TestPoint, and LabWindows™/CVI Mating screw terminal connectors with
strain relief and covers (2600-Kit) TSP-Link cable (CA-180-3A)
www.keithley.com
1.888.KEITHLEY (U.S. only)
A GREATER MEASURE OF CONFIDENCE
3
SOURCE AND MEASURE
Scalable, integrated source and measure solutions
Series 2600
System SourceMeter
®
Multi-Channel I-V Test Solutions
Third-generation SMU design ensures faster test times
The Series 2600's new SMU design enhances test speed in several ways. For example, while earlier designs used a parallel current ranging topolo­gy, the Series 2600 uses a series ranging topology (patent pending), which provides faster and smoother range changes and outputs that settle more quickly. It also allows the current output limit to be programmed inde­pendently of the measurement current range for fast charging of capacitive loads and more intuitive operation during bench use.
Each Series 2600 SourceMeter channel offers a highly flexible, four­quadrant source coupled with precision voltage and current meters/ limiters. Each channel can be configured as a:
• Precision power supply (up to 200V and 3A DC/10A pulsed output with 1pA readback resolution)
• True current source
• DMM (DCV, DCI, ohms, power, with 5
1
⁄2-digit resolution)
• Power V or I pulse generator (Pulse width: 200µs and longer—source and measure)
• Power V or I waveform generator (20-point sine wave up to 400Hz in a TSP test script)
• Electronic load (with sink mode capability)
High speed and precision A/Ds with simultaneous source-readback
All Series 2600 instruments provide four-quadrant operation and can be connected in series or in parallel to extend their dynamic range. In the first and third quadrants, they operate as a source, delivering power to a load. In the second and fourth quadrants, they operate as a sink, dissipat­ing power internally. They measure voltage and current simultaneously with up to 5
1
⁄2-digit resolution, and they display voltage, current, resist-
ance, or power readings.
Two analog-to-digital converters per channel (one for I, one for V) can run simultaneously, providing precise source-readback without sacrificing test throughput. These A/D converters offer the flexibility of programmable integration rates, allowing the user to optimize for either high speed (>10,000 rdgs/s at 0.001 NPLC setting) or for high resolution (up to 24 bits at 10 NPLC setting) to make high accuracy measurements.
Digital I/O Interface
A back panel port on every Series 2600 instrument provides 14 bits of uni­versal digital I/O to link the instrument to a variety of popular handlers for sorting and binning components after testing. These I/O lines are also backward-compatible with Keithley’s earlier Trigger Link instrument trig­gering technology. These lines simplify integrating Series 2600 instruments into systems that employ other external instrumentation, including Series 2400 SourceMeter instruments, Series 7000 switch mainframes, and Series 2700 Integra data acquisition/multimeter systems.
Built-in Contact Check Function
The Contact Check function makes it simple to verify good connections quickly and easily before an automated test sequence begins. This elimi­nates measurement errors and false product failures associated with con­tact fatigue, breakage, contamination, loose or broken connection, relay failures, etc.
Models 2601 and 2602 I-V capability
Models 2611 and 2612 I-V capability
Series vs. parallel ranging topologies
FeedbackSource
+3A
+1A
–1A
–3A
+10A
+1.5A +1A
+0.1A
–5V +5V
FeedbackSource
+6V–6V
+40V–40V
DC
+20V–20V
+200V–200V
–0.1A
–1A –1.5A
–10A
DC
Pulse Mode, duty cycle limited
www.keithley.com
1.888.KEITHLEY (U.S. only)
A GREATER MEASURE OF CONFIDENCE
SOURCE AND MEASURE
4
Scalable, integrated source and measure solutions
Series 2600
System SourceMeter
®
Multi-Channel I-V Test Solutions
Spanning I-V test applications from R&D to functional test
The Series 2600 SourceMeter Instruments provide simple-to-use yet pow­erful solutions for R&D testing. At the same time, they offer the speed and reliability needed for volume production testing.
High power and simplicity for R&D applications
In R&D and device characterization environments, Series 2600 instruments offer high testing versatility for both interactive and automated testing. The free downloadable LabTracer 2.0 software allows users to configure and control up to eight Series 2600 or 2400 SourceMeter channels quickly and easily for curve tracing or device characterization. It provides a simple graphical user interface for setup, control, data acquisition, and graphing of DUT data from SourceMeter instruments. When used together, LabTracer and SourceMeter instruments offer lab users a powerful, easy-to­use, and economical alternative to chassis-based solutions.
Graphical instrument setup. LabTracer 2.0 supports up to eight Series 2600 SourceMeter channels. Model 2400 and Model 2410 SourceMeter instruments are also supported for extended voltage capability. Drop­down menus in LabTracer 2.0’s instrument setup window allow config­uring any channel of a SourceMeter instrument for fixed point or sweeping operation. Once the instrument is configured, a single key press is all it takes to execute a test.
Once a test is complete, data is displayed in the spreadsheet panel and graphing panel. Measurement data can be manipulated in the spread­sheet by applying a formula to the results. For more detailed analysis, data can also be exported to Microsoft
®
Excel with a simple cut and
paste.
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