Series 2600A
• Combines a power supply, true
current source, 6½-digit DMM,
arbitrary waveform generator,
V or I pulse generator with
measurement, electronic load,
and trigger controller – all in
one instrument
• Family of products offers wide
dynamic range: 1fA to 50A and
1µV to 200V
• 20,000 rdg/s provides faster
test times and ability to capture
transient device behavior
• Precision timing and channel
synchronization (<500ns)
• USB port for saving data and
test scripts
• LXI Class C compliance supports
high speed data transfer and
enables quick and easy remote
testing, monitoring, and
troubleshooting
• Software:
®
Express for quick and
– TSP
easy I-V test (embedded)
Scalable, integrated source and measure solutions
– ACS Basic Edition for
semiconductor component
characterization (optional)
System SourceMeter® Instruments
See page 26 for Model 2651A Single-Channel
System SourceMeter Instrument (High Power)
Series 2600A System SourceMeter instruments are Keithley’s latest I-V source measurement unit
(SMU) instruments for use as either bench-top I-V characterization tools or as building block components of multi-channel I-V test systems. For bench-top use, Series 2600A instruments feature an
embedded TSP Express Software Tool that allows users to quickly and easily perform common I-V
tests without programming or installing software. For system level applications, the Series 2600A’s
Test Script Processor (TSP) architecture, along with other new capabilities such as parallel test execution and precision timing, provides the highest throughput in the industry, lowering the cost of test.
To simplify the testing, verification, and analysis of semiconductor components, the optional ACS
Basic Edition software is also available.
Scalable, integrated source and measure solutions
CONNECT DUT CONFIGURE Test COLLECT Data
HI
SMU B
Sweep V
SMU A
Step V
G
Measure I
G
LO
Performing nested sweeps to characterize a transistor with TSP Express is quick and easy. Data can be exported to a .csv file for use with
spreadsheet applications such as Excel.
Quick and Easy Lab and
Bench-Top Use
Each Series 2600A SourceMeter instrument
is a complete I-V measurement solution with
unmatched ease of use, capability, and flexibility.
They simplify the process of making high-performance measurements.
SMU INSTRUMENTS
1.888.KEITHLEY
(U.S. only)
www.keithley.com
Measure I
LO
D
D
The TSP Express Software Tool quickly sets up
and runs basic and advanced tests, including:
nested step/sweeps, pulse sweeps, and custom
sweeps for device characterization applications.
The resulting data can be viewed in graphical or
tabular format and exported to a .csv file for use
with spreadsheet applications.
A GREATER ME ASURE OF C ONFIDENC E
TSP Express runs on a PC connected to the
SourceMeter instrument via an Ethernet cable
(provided with the instrument). The intuitive
user interface resides on the built-in LXI web
page, so no software installation is needed.
Series 2600A
System SourceMeter® Instruments
Simplify Semiconductor Component
Test, Verification, and Analysis
The optional ACS Basic Edition software maximizes the
productivity of customers who perform packaged part characterization during development, quality verification, or failure
analysis, with:
• Rich set of easy-to-access test libraries
• Script editor for fast customization of existing tests
• Data tool for comparing results quickly
• Formulator tool that analyzes captured curves and provides
a wide range of math functions
For more information about the ACS Basic Edition software,
please refer to the ACS Basic Edition data sheet.
Unmatched Throughput and Flexibility
for High Performance I-V Test Systems
TSP technology provides remarkable capabilities when a Series
2600A is integrated as part of a multi-channel I-V test system.
When you need to acquire data on a packaged part quickly, the wizard-based user
interface of ACS Basic Edition makes it easy to find and run the test you want, like
this common FET curve trace test.
For example, the embedded scripting capability allows test
scripts to be run by the instrument. Test scripts are complete test programs based on an easy to use
but highly efficient and compact scripting language called Lua <www.lua.org>. Since test scripts
can contain any sequence of routines that are executable by conventional programming languages
(including decision making algorithms), this feature allows entire tests to be managed by the instrument without sending readings back to a PC for decision making. This eliminates the delays caused
Scalable, integrated source and measure solutions
by GPIB traffic congestion and greatly improves overall test times.
Also, TSP technology offers “mainframe-less channel expansion.” The TSP-Link channel expansion
bus (which uses a 100 Base T Ethernet cable) allows multiple Series 2600A and other TSP instruments to be connected in a master-slave configuration and behave as one integrated system. TSP-Link
technology supports up to 32 units or 64 SMU instrument channels per GPIB or IP address, making it
easy to scale a system to fit the particular requirements of an application.
Parallel Test Capability
The Series 2600A takes system level performance to a new height with parallel testing capability. This
feature tests multiple devices in parallel to meet the high throughput requirements of production test
and advanced semiconductor lab applications.
This parallel testing capability enables each instrument in the system to run its own complete test
sequence, creating a fully multi-threaded test environment. Hence, the number of tests that can be
running in parallel on a Series 2600A system can be as many as the number of instruments in the
system. In contrast, most conventional test systems run a single thread test, usually on the controller
PC instead of the instrument itself. Testing multiple devices at the same time means dramatically
improved test throughput and reduced overall
cost of test.
When all or some of your test requirements
change, your Series 2600A system can be reconfigured via software without rewiring. The internal software can match the different pin layouts
of the devices-under-test to the appropriate SMU
instrument-per-pin configurations.
Tight Timing and Synchronization
Today’s test engineers are challenged with
testing increasingly more complex and more
sensitive devices that require precise timing
and synchronization. Whether you need to
synchronize electrical and optical tests for an
<500ns
Scalable, integrated source and measure solutions
GPIB or Ethernet
TSP-Link
Parallel testing with the Series 2600A
1.888.KEITHLEY
Device 1
(U.S. only)
www.keithley.com
Test 1
running
To
Test 2
running
To
Device 2
Test 3
running
To
Device 3
A GREATER ME ASURE OF C ONFIDENC E
SMU1
SMU2
SMU3
SMU4
All channels in the system are synchronized
to under 500ns.
SMU INSTRUMENTS
Series 2600A
System SourceMeter® Instruments
Ordering Information
2601A Single-channel System
2602A Dual-channel System
2611A Single-channel System
2612A Dual-channel System
2635A Single-channel System
2636A Dual-channel System
2651A Single-channel System
Accessories Supplied
Scalable, integrated source and measure solutions
2600-ALG-2
2600-Kit Mating Screw
CA-180-3A
TSP Express Software Tool
(embedded)
Test Script Builder Software
(supplied on CD)
ACS Basic Edition Software
(optional)
SourceMeter Instrument
(3A DC, 10A Pulse)
SourceMeter Instrument
(3A DC, 10A Pulse)
SourceMeter Instrument
(200V, 10A Pulse)
SourceMeter Instrument
(200V, 10A Pulse)
SourceMeter Instrument
(1fA, 10A Pulse)
SourceMeter Instrument
(1fA, 10A Pulse)
SourceMeter Instrument
(2000W, 50A Pulse)
Low Noise Triax Cable
with Alligator Clips,
2m (6.6 ft.) (two
supplied with 2636A,
one with 2635A)
Terminal Connec tors
with strain relief
and covers (2601A/
2602A/2611A/2612A)
TSP-Link/Ethernet
Cable (two per unit)
optoelectronic component or ensure that the same stress times are applied to the different pins of
an advanced semiconductor device, providing precision timing and synchronization between SMU
instrument channels (and external instruments) has become a critical requirement.
A high performance trigger model that is hardware driven allows timing at each source-measure step
to be tightly controlled. It also synchronizes the operations between SMU instrument channels and/
or external instrumentation at hardware speeds of <500ns.
Third-generation SMU Instrument
Design Ensures Faster Test Times
Based on the proven architecture of earlier Series 2600 instruments, the Series 2600A’s new SMU instrument design enhances
test speed in several ways. For example, while earlier designs
used a parallel current ranging topology, the Series 2600A uses
a patented series ranging topology, which provides faster and
smoother range changes and outputs that settle more quickly.
The Series 2600A SMU instrument design supports two modes
of operation for use with a variety of loads. In normal mode,
the SMU instrument provides high bandwidth performance for
maximum throughput. In high capacitance (high-C) mode, the
SMU instrument uses a slower bandwidth to provide robust performance with higher capacitive loads.
Each Series 2600A SMU instrument channel offers a highly flexible, four-quadrant source coupled with precision voltage and
current meters. Each channel can be configured as a:
• Precision power supply
• True current source
• DMM (DCV, DCI, ohms, and power with 6½-digit resolution)
Current arbitrary waveforms
maximum output update rates:
12,500 samples/second.
Voltage arbitrary waveforms
maximum output update rates:
20,000 samples/second.
• Electronic load (with sink mode capability)
• V or I pulse generator (Pulse width: 100µs and longer)
• V or I waveform generator
All analog-to-digital (A/D) converters in Series 2600A instruments are both high speed and high
precision for maximum flexibility. The two A/D converters per channel (one for I, one for V) can run
simultaneously, providing precise source-readback without sacrificing test throughput. These A/D
converters offer the versatility of programmable integration rates, allowing you to optimize for either
high speed (>20,000 rdgs/s at 0.001 NPLC setting) or for high resolution (up to 24 bits at 10 NPLC setting) measurements.
In addition to the high speed or high resolution modes, the Model 2651A offers a digitizing measurement mode that enables 1µs per point sampling. See the Model 2651A on page 26 for more information.
Digital I/O Interface
A back panel port on every Series 2600A instrument provides 14 bits of universal digital I/O to link
the instrument to a variety of popular component handlers and/or probe stations. These digital I/O
lines are compatible with the triggering technology of Keithley’s earlier Trigger-Link instruments.
These lines simplify integrating Series 2600A instruments into systems that employ other electrical,
mechanical, optical, or RF equipment.
Scalable, integrated source and measure solutions
SMU INSTRUMENTS
1.888.KEITHLEY
www.keithley.com
TSP-Link Trigger Lines
The TSP-Link bus supports dedicated trigger lines that provide synchronous operations between multiple Series 2600A instruments (and other TSP instruments, such as Series 3700 DMM/Switch Systems)
without the need for additional trigger connections.
(U.S. only)
A GREATER ME ASURE OF C ONFIDENC E
Series 2600A
System SourceMeter® Instruments
TYPICAL APPLICATIONS
I-V functional test and
characterization of a
wide range of devices,
including:
• Discrete and passive
components
–Two-leaded –
Sensors, disk
drive heads, metal
oxide varistors
(MOVs), diodes,
zener diodes,
sensors, capacitors,
thermistors
– Three-leaded –
Small signal bipolar
junction transistors
(BJTs), field-effect
transistors (FETs),
and more
• Simple ICs – Optos,
drivers, switches,
sensors
• Integrated devices –
small scale integrated
(SSI) and large scale
integrated (LSI)
Scalable, integrated source and measure solutions
–Analog ICs
–Radio frequency
integrated circuits
(RFICs)
– Application specific integrated
circuits (ASICs)
– System on a chip (SOC) devices
• Optoelectronic devices such as lightemitting diodes (LEDs), laser diodes,
high brightness LEDs (HBLEDs),
vertical cavity surface-emitting lasers
(VCSELs), displays
• Wafer level reliability
– NBTI, TDDB, HCI, electromigration
• Solar Cells
• Batteries
Built-in Contact Check Function
The Contact Check function makes it simple to verify good device-under-test connections quickly and
easily before an automated test sequence begins. This eliminates the measurement errors and false
product failures associated with contact fatigue, breakage, contamination, loose or broken connections, relay failures, etc.
Powerful Software Tools
In addition to the embedded TSP Express and optional ACS Basic Edition software, the free Test
Script Builder software tool is provided to help users create, modify, debug, and store TSP test
scripts. Table 1 describes key features of Series 2600A software tools.
Complete Automated System Solutions
While the ACS Basic Edition software only supports component characterization tests, wafer and cassette level testing can be performed
by Keithley’s ACS Integrated Test Systems. ACS systems are highly
configurable, instrument-based systems that generally include a
number of Series 2600A instruments. These systems are designed for
semiconductor device characterization, reliability/WLR, parametric,
and component functional testing.
The flexible software architecture of ACS Basic Edition allows configuring
systems with a wide range of controllers and test fixtures, as well as the
exact number of SourceMeter instruments the application requires.
Table 1. Series 2600A software tools
Feature/
Functionalit y
Description
Supported
hardware
Supported
buses
Functionality
Data
management
Installation
ACS Basic Edition
Semiconductor characterization
software for component test,
verification, and analysis
24xx, 26x xA, 4200-SCS, 237
GPIB, Ethernet
Intuitive, wizard-based GUI,
Rich set of test libraries
Formulator tool with wide range
of math functions
Optional purchase
TSP Express
Quick Start Tool for fast and easy
I-V testing, primarily for bench
and lab users
26xxA 26xxA, 37xx
Ethernet only
Linear/Log Sweeps, Pulsing,
Custom sweeps, Single point
source-measures. Note: Uses
new 2600A’s new API’s for
precision timing and channel
synchronization
.csv export, basic curve
tracing (no math formula or
analysis support)
Not necessary.
Embedded in the instrument.
Example ACS Integrated
Test System
Test Script
Builder (TSB )
Custom script
writing tool for TSP
instruments
GPIB, RS-232,
Ethernet
Custom scripts with
total fl exibility
N/A
Free Download or
CD Install on PC.
Scalable, integrated source and measure solutions
SMU INSTRUMENTS
1.888.KEITHLEY
www.keithley.com
(U.S. only)
A GREATER ME ASURE OF C ONFIDENC E
Series 2600A
System SourceMeter® Instruments
In the first and third quadrants, Series 2600A instruments operate as a
source, delivering power to a load. In the second and fourth quadrants,
they operate as a sink, dissipating power internally.
+10A
+5A
+3A
+1.5A
+1A
0A
–1A
–1.5A
–3A
–5A
–10A
+35V–35V–40V
–6V
Models 2601A and 2602A I-V capability
+10A
Scalable, integrated source and measure solutions
+1.5A
+1A
+0.1A
–0.1A
–1A
–1.5A
–10A
0A
–5V
Models 2611A and 2612A I-V capability
+20V–20V 0V
+20V–20V 0V
+40V+6V
+200V+5V
+180V–180V–200V
DC
Pulse
DC
Pulse
ACCESSORIES AVAILABLE*
CABLES AND CONNECTORS
2600-BAN Banana Test Leads/Adapter Cable. For a single
2600-KIT Extra screw terminal connector, strain relief, and cover for a single SourceMeter
2600-TRIAX Triax Adapter. For a single 2601A /2602A/2611A/2612A SMU instrument channel
7078-TRX-* 3-Slot, Low Noise Triax Cable. For use with 2600-TR IA X Adapter
7078-TRX-GND 3-Slot male triax to BNC adapter (guard removed)
8606 High Performance Modular Probe Kit. For use with 2600A-BAN
SC-200 Shielded Twisted Pair Cable. Recommended for general-purpose
DIGITAL I/O, TRIGGER LINK, AND TSP-LINK
2600-TLINK Digital I/O to TLINK Adapter Cable, 1m
CA-126-1 Digital I /O and Trigger Cable, 1.5m
CA-180-3A CAT5 Crossover Cable for TSP-Link and direct Ethernet connection (two supplied)
GPIB INTERFACES AND CABLES
7007-1 Double Shielded GPIB Cable, 1m (3.3 ft.)
7007-2 Double Shielded GPIB Cable, 2m (6.6 ft.)
KPCI- 488LPA IEEE-488 Interface/Controller for the PCI Bus
KPXI-488 IEEE-488 Interface Board for the PXI Bus
KUSB-488B IEEE-488 USB-to-GPIB Interface Adapter
SWITCHING
Series 3700 DMM/Switch Systems
707A Semiconductor Switching Matrix Mainframe
7001 Switch Control Mainframe
RACK MOUNT KITS
4299-1 Single Rack Mount Kit with front and rear support
4299-2 Dual R ack Mount Kit with front and rear suppor t
4299-5 1U Vent Panel
SOFTWARE
ACS-BASIC Component Characteri zation Software
EXTENDED WARRANTIES
2601A-EW 1 Year Extended Warranty for Model 2601A
2602A-E W 1 Year Extended Warranty for Model 2602A
2611A-EW 1 Year Extended Warranty for Model 2611A
2612A-EW 1 Year Ex tended Warranty for Model 2612A
2635A-EW 1 Year Extended Warranty for Model 2635A
2636A-EW 1 Year Extended Warranty for Model 2636A
CALIBRATION AND VERIFICATION
2600-STD-RES Calibration Standard 1GΩ Resistor for Models 2635A and 2636A
*See page 27 for Model 2651A accessories.
2601A/2602A/2611A/2612A SMU instrument channel
channel (one supplied with 2601A /2611A, two with 2602A/2612A)
use with Series 2600A System SourceMeter instruments
Scalable, integrated source and measure solutions
+10A
+1.5A
+1A
+0.1A
0A
–0.1A
–1A
–1.5A
–10A
Models 2635A and 2636A I-V capability Model 2651A I-V capability
SMU INSTRUMENTS
1.888.KEITHLEY
–5V
(U.S. only)
+20V–20V 0V
+180V–180V–200V
www.keithley.com
DC
Pulse
+200V+5V
A GREATER ME ASURE OF C ONFIDENC E
+50A
+20A
+10A
+5A
–5A
–10A
–20A
–50A
0A
–10V
+10V
DC and
Pulse
Pulse
only
+20V–20V 0V
+40V–40V
Loading...