Keithley Instruments 2602A Data Sheet

Series 2600A

• Combines a power supply, true

current source, 6½-digit DMM, arbitrary waveform generator, V or I pulse generator with measurement, electronic load, and trigger controller – all in one instrument

• Family of products offers wide

dynamic range: 1fA to 50A and 1µV to 200V

• 20,000 rdg/s provides faster

test times and ability to capture transient device behavior

• Precision timing and channel

synchronization (<500ns)

• USB port for saving data and

test scripts

• LXI Class C compliance supports

high speed data transfer and enables quick and easy remote testing, monitoring, and troubleshooting

• Software:

Express for quick and

– TSP

easy I-V test (embedded)

Scalable, integrated source and measure solutions

– ACS Basic Edition for

semiconductor component characterization (optional)

System SourceMeter® Instruments

See page 26 for Model 2651A Single-Channel System SourceMeter Instrument (High Power)

Series 2600A System SourceMeter instruments are Keithley’s latest I-V source measurement unit (SMU) instruments for use as either bench-top I-V characterization tools or as building block components of multi-channel I-V test systems. For bench-top use, Series 2600A instruments feature an embedded TSP Express Software Tool that allows users to quickly and easily perform common I-V tests without programming or installing software. For system level applications, the Series 2600A’s Test Script Processor (TSP) architecture, along with other new capabilities such as parallel test execution and precision timing, provides the highest throughput in the industry, lowering the cost of test. To simplify the testing, verification, and analysis of semiconductor components, the optional ACS Basic Edition software is also available.

Scalable, integrated source and measure solutions

CONNECT DUT CONFIGURE Test COLLECT Data

SMU B

Sweep V

SMU A

Step V

Measure I

Performing nested sweeps to characterize a transistor with TSP Express is quick and easy. Data can be exported to a .csv file for use with spreadsheet applications such as Excel.

Quick and Easy Lab and Bench-Top Use

Each Series 2600A SourceMeter instrument is a complete I-V measurement solution with unmatched ease of use, capability, and flexibility. They simplify the process of making high-performance measurements.

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Measure I

The TSP Express Software Tool quickly sets up and runs basic and advanced tests, including: nested step/sweeps, pulse sweeps, and custom sweeps for device characterization applications. The resulting data can be viewed in graphical or tabular format and exported to a .csv file for use with spreadsheet applications.

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TSP Express runs on a PC connected to the SourceMeter instrument via an Ethernet cable (provided with the instrument). The intuitive user interface resides on the built-in LXI web page, so no software installation is needed.

Series 2600A

System SourceMeter® Instruments

Simplify Semiconductor Component Test, Verification, and Analysis

The optional ACS Basic Edition software maximizes the productivity of customers who perform packaged part characterization during development, quality verification, or failure analysis, with:

• Rich set of easy-to-access test libraries

• Script editor for fast customization of existing tests

• Data tool for comparing results quickly

• Formulator tool that analyzes captured curves and provides a wide range of math functions

For more information about the ACS Basic Edition software, please refer to the ACS Basic Edition data sheet.

Unmatched Throughput and Flexibility for High Performance I-V Test Systems

TSP technology provides remarkable capabilities when a Series 2600A is integrated as part of a multi-channel I-V test system.

When you need to acquire data on a packaged part quickly, the wizard-based user interface of ACS Basic Edition makes it easy to find and run the test you want, like this common FET curve trace test.

For example, the embedded scripting capability allows test scripts to be run by the instrument. Test scripts are complete test programs based on an easy to use but highly efficient and compact scripting language called Lua <www.lua.org>. Since test scripts can contain any sequence of routines that are executable by conventional programming languages (including decision making algorithms), this feature allows entire tests to be managed by the instrument without sending readings back to a PC for decision making. This eliminates the delays caused

Scalable, integrated source and measure solutions

by GPIB traffic congestion and greatly improves overall test times.

Also, TSP technology offers “mainframe-less channel expansion.” The TSP-Link channel expansion bus (which uses a 100 Base T Ethernet cable) allows multiple Series 2600A and other TSP instruments to be connected in a master-slave configuration and behave as one integrated system. TSP-Link technology supports up to 32 units or 64 SMU instrument channels per GPIB or IP address, making it easy to scale a system to fit the particular requirements of an application.

Parallel Test Capability

The Series 2600A takes system level performance to a new height with parallel testing capability. This feature tests multiple devices in parallel to meet the high throughput requirements of production test and advanced semiconductor lab applications.

This parallel testing capability enables each instrument in the system to run its own complete test sequence, creating a fully multi-threaded test environment. Hence, the number of tests that can be running in parallel on a Series 2600A system can be as many as the number of instruments in the system. In contrast, most conventional test systems run a single thread test, usually on the controller

PC instead of the instrument itself. Testing multiple devices at the same time means dramatically improved test throughput and reduced overall cost of test.

When all or some of your test requirements change, your Series 2600A system can be reconfigured via software without rewiring. The internal software can match the different pin layouts of the devices-under-test to the appropriate SMU instrument-per-pin configurations.

Tight Timing and Synchronization

Today’s test engineers are challenged with testing increasingly more complex and more sensitive devices that require precise timing and synchronization. Whether you need to synchronize electrical and optical tests for an

<500ns

Scalable, integrated source and measure solutions

GPIB or Ethernet TSP-Link

Parallel testing with the Series 2600A

1.888.KEITHLEY

Device 1

(U.S. only)

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Test 1

running

Test 2

running

Device 2

Test 3

running

Device 3

A GREATER ME ASURE OF C ONFIDENC E

SMU1

SMU2 SMU3

SMU4

All channels in the system are synchronized to under 500ns.

SMU INSTRUMENTS

Series 2600A

System SourceMeter® Instruments

Ordering Information

2601A Single-channel System

2602A Dual-channel System

2611A Single-channel System

2612A Dual-channel System

2635A Single-channel System

2636A Dual-channel System

2651A Single-channel System

Accessories Supplied

Scalable, integrated source and measure solutions

2600-ALG-2

2600-Kit Mating Screw

CA-180-3A

TSP Express Software Tool (embedded)

Test Script Builder Software (supplied on CD)

ACS Basic Edition Software (optional)

SourceMeter Instrument (3A DC, 10A Pulse)

SourceMeter Instrument (200V, 10A Pulse)

SourceMeter Instrument (1fA, 10A Pulse)

SourceMeter Instrument (2000W, 50A Pulse)

Low Noise Triax Cable with Alligator Clips, 2m (6.6 ft.) (two supplied with 2636A, one with 2635A)

Terminal Connec tors with strain relief and covers (2601A/ 2602A/2611A/2612A)

TSP-Link/Ethernet Cable (two per unit)

optoelectronic component or ensure that the same stress times are applied to the different pins of an advanced semiconductor device, providing precision timing and synchronization between SMU instrument channels (and external instruments) has become a critical requirement.

A high performance trigger model that is hardware driven allows timing at each source-measure step to be tightly controlled. It also synchronizes the operations between SMU instrument channels and/ or external instrumentation at hardware speeds of <500ns.

Third-generation SMU Instrument Design Ensures Faster Test Times

Based on the proven architecture of earlier Series 2600 instruments, the Series 2600A’s new SMU instrument design enhances test speed in several ways. For example, while earlier designs used a parallel current ranging topology, the Series 2600A uses a patented series ranging topology, which provides faster and smoother range changes and outputs that settle more quickly.

The Series 2600A SMU instrument design supports two modes of operation for use with a variety of loads. In normal mode, the SMU instrument provides high bandwidth performance for maximum throughput. In high capacitance (high-C) mode, the SMU instrument uses a slower bandwidth to provide robust performance with higher capacitive loads.

Each Series 2600A SMU instrument channel offers a highly flexible, four-quadrant source coupled with precision voltage and current meters. Each channel can be configured as a:

• Precision power supply

• True current source

• DMM (DCV, DCI, ohms, and power with 6½-digit resolution)

Current arbitrary waveforms maximum output update rates: 12,500 samples/second.

Voltage arbitrary waveforms maximum output update rates: 20,000 samples/second.

• Electronic load (with sink mode capability)

• V or I pulse generator (Pulse width: 100µs and longer)

• V or I waveform generator

All analog-to-digital (A/D) converters in Series 2600A instruments are both high speed and high precision for maximum flexibility. The two A/D converters per channel (one for I, one for V) can run simultaneously, providing precise source-readback without sacrificing test throughput. These A/D converters offer the versatility of programmable integration rates, allowing you to optimize for either high speed (>20,000 rdgs/s at 0.001 NPLC setting) or for high resolution (up to 24 bits at 10 NPLC setting) measurements.

In addition to the high speed or high resolution modes, the Model 2651A offers a digitizing measurement mode that enables 1µs per point sampling. See the Model 2651A on page 26 for more information.

Digital I/O Interface

A back panel port on every Series 2600A instrument provides 14 bits of universal digital I/O to link the instrument to a variety of popular component handlers and/or probe stations. These digital I/O lines are compatible with the triggering technology of Keithley’s earlier Trigger-Link instruments. These lines simplify integrating Series 2600A instruments into systems that employ other electrical, mechanical, optical, or RF equipment.

Scalable, integrated source and measure solutions

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TSP-Link Trigger Lines

The TSP-Link bus supports dedicated trigger lines that provide synchronous operations between multiple Series 2600A instruments (and other TSP instruments, such as Series 3700 DMM/Switch Systems) without the need for additional trigger connections.

(U.S. only)

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Series 2600A

System SourceMeter® Instruments

TYPICAL APPLICATIONS I-V functional test and

characterization of a wide range of devices, including:

• Discrete and passive components

–Two-leaded –

Sensors, disk drive heads, metal oxide varistors (MOVs), diodes, zener diodes, sensors, capacitors, thermistors

– Three-leaded –

Small signal bipolar junction transistors (BJTs), field-effect transistors (FETs), and more

• Simple ICs – Optos, drivers, switches, sensors

• Integrated devices – small scale integrated (SSI) and large scale integrated (LSI)

Scalable, integrated source and measure solutions

–Analog ICs –Radio frequency

integrated circuits (RFICs)

– Application specific integrated

circuits (ASICs)

– System on a chip (SOC) devices

• Optoelectronic devices such as lightemitting diodes (LEDs), laser diodes, high brightness LEDs (HBLEDs), vertical cavity surface-emitting lasers (VCSELs), displays

• Wafer level reliability

– NBTI, TDDB, HCI, electromigration

• Solar Cells

• Batteries

Built-in Contact Check Function

The Contact Check function makes it simple to verify good device-under-test connections quickly and easily before an automated test sequence begins. This eliminates the measurement errors and false product failures associated with contact fatigue, breakage, contamination, loose or broken connections, relay failures, etc.

Powerful Software Tools

In addition to the embedded TSP Express and optional ACS Basic Edition software, the free Test Script Builder software tool is provided to help users create, modify, debug, and store TSP test scripts. Table 1 describes key features of Series 2600A software tools.

Complete Automated System Solutions

While the ACS Basic Edition software only supports component characterization tests, wafer and cassette level testing can be performed by Keithley’s ACS Integrated Test Systems. ACS systems are highly configurable, instrument-based systems that generally include a number of Series 2600A instruments. These systems are designed for semiconductor device characterization, reliability/WLR, parametric, and component functional testing.

The flexible software architecture of ACS Basic Edition allows configuring systems with a wide range of controllers and test fixtures, as well as the exact number of SourceMeter instruments the application requires.

Table 1. Series 2600A software tools

Feature/

Functionalit y

Description

Supported hardware

Supported buses

Functionality

Data management

Installation

ACS Basic Edition

Semiconductor characterization

software for component test,

verification, and analysis

24xx, 26x xA, 4200-SCS, 237

GPIB, Ethernet

Intuitive, wizard-based GUI,

Rich set of test libraries

Formulator tool with wide range

of math functions

Optional purchase

TSP Express

Quick Start Tool for fast and easy

I-V testing, primarily for bench

and lab users

26xxA 26xxA, 37xx

Ethernet only

Linear/Log Sweeps, Pulsing, Custom sweeps, Single point source-measures. Note: Uses

new 2600A’s new API’s for

precision timing and channel

synchronization

.csv export, basic curve

tracing (no math formula or

analysis support)

Not necessary.

Embedded in the instrument.

Example ACS Integrated Test System

Test Script

Builder (TSB )

Custom script

writing tool for TSP

instruments

GPIB, RS-232,

Ethernet

Custom scripts with

total ﬂ exibility

N/A

Free Download or

CD Install on PC.

Scalable, integrated source and measure solutions

SMU INSTRUMENTS

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(U.S. only)

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Series 2600A

System SourceMeter® Instruments

In the first and third quadrants, Series 2600A instruments operate as a source, delivering power to a load. In the second and fourth quadrants, they operate as a sink, dissipating power internally.

+10A

+5A

+3A

+1.5A

+1A

–1A

–1.5A

–3A

–5A

–10A

+35V–35V–40V

–6V

Models 2601A and 2602A I-V capability

+10A

Scalable, integrated source and measure solutions

+1.5A

+1A

+0.1A

–0.1A

–1A

–1.5A

–10A

–5V

Models 2611A and 2612A I-V capability

+20V–20V 0V

+40V+6V

+200V+5V

+180V–180V–200V

Pulse

ACCESSORIES AVAILABLE*

CABLES AND CONNECTORS

2600-BAN Banana Test Leads/Adapter Cable. For a single

2600-KIT Extra screw terminal connector, strain relief, and cover for a single SourceMeter

2600-TRIAX Triax Adapter. For a single 2601A /2602A/2611A/2612A SMU instrument channel 7078-TRX-* 3-Slot, Low Noise Triax Cable. For use with 2600-TR IA X Adapter 7078-TRX-GND 3-Slot male triax to BNC adapter (guard removed) 8606 High Performance Modular Probe Kit. For use with 2600A-BAN SC-200 Shielded Twisted Pair Cable. Recommended for general-purpose

DIGITAL I/O, TRIGGER LINK, AND TSP-LINK

2600-TLINK Digital I/O to TLINK Adapter Cable, 1m CA-126-1 Digital I /O and Trigger Cable, 1.5m CA-180-3A CAT5 Crossover Cable for TSP-Link and direct Ethernet connection (two supplied)

GPIB INTERFACES AND CABLES

7007-1 Double Shielded GPIB Cable, 1m (3.3 ft.) 7007-2 Double Shielded GPIB Cable, 2m (6.6 ft.) KPCI- 488LPA IEEE-488 Interface/Controller for the PCI Bus KPXI-488 IEEE-488 Interface Board for the PXI Bus KUSB-488B IEEE-488 USB-to-GPIB Interface Adapter

SWITCHING

Series 3700 DMM/Switch Systems 707A Semiconductor Switching Matrix Mainframe 7001 Switch Control Mainframe

RACK MOUNT KITS

4299-1 Single Rack Mount Kit with front and rear support 4299-2 Dual R ack Mount Kit with front and rear suppor t 4299-5 1U Vent Panel

SOFTWARE

ACS-BASIC Component Characteri zation Software

EXTENDED WARRANTIES

2601A-EW 1 Year Extended Warranty for Model 2601A 2602A-E W 1 Year Extended Warranty for Model 2602A 2611A-EW 1 Year Extended Warranty for Model 2611A 2612A-EW 1 Year Ex tended Warranty for Model 2612A 2635A-EW 1 Year Extended Warranty for Model 2635A 2636A-EW 1 Year Extended Warranty for Model 2636A

CALIBRATION AND VERIFICATION

2600-STD-RES Calibration Standard 1GΩ Resistor for Models 2635A and 2636A

*See page 27 for Model 2651A accessories.

2601A/2602A/2611A/2612A SMU instrument channel

channel (one supplied with 2601A /2611A, two with 2602A/2612A)

use with Series 2600A System SourceMeter instruments

Scalable, integrated source and measure solutions

+10A

+1.5A

+1A

+0.1A

–0.1A

–1A

–1.5A

–10A

Models 2635A and 2636A I-V capability Model 2651A I-V capability

SMU INSTRUMENTS

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–5V

(U.S. only)

+20V–20V 0V

+180V–180V–200V

www.keithley.com

Pulse

+200V+5V

A GREATER ME ASURE OF C ONFIDENC E

+50A

+20A

+10A

+5A

–5A

–10A

–20A

–50A

–10V

+10V

DC and Pulse

Pulse only

+20V–20V 0V

+40V–40V

2601A 2602A

System SourceMeter® Instruments

SPECIFICATION CONDITIONS

This document contains specifications and supplemental information for the Models 2601A and 2602A System SourceMeter Models 2601A and 2602A are tested. Upon leaving the factory, the 2601A and 2602A meet these specifications. Supplemental and typical values are non- warranted, apply at 23°C, and are provided solely as useful information.

Accuracy specifications are applicable for both normal and high capacitance modes. The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2601A

and 2602A) or SourceMeter CHANNEL B (2602A) ter minals under the following conditions:

1. 23°C ± 5°C, <70% relative humidity

2. After 2 hour warm-up

3. Speed normal (1 NPLC)

4. A/D auto-zero enabled

5. Remote sense operation or properly zeroed local operation

6. Calibration period = 1 year

instruments. Specifications are the standards against which the

SOURCE SPECIFICATIONS

VOLTAGE SOURCE SPECIFICATIONS

VOLTAGE PROGRAMMING ACCURACY

Range

100.000 mV 5 µV 0.02% + 250 µV 20 µV

Series 2600A specifications

1.00000 V 50 µV 0.02% + 400 µV 50 µV

6.00000 V 50 µV 0.02% + 1.8 mV 100 µV

40.0000 V 500 µV 0.02% + 12 mV 500 µV

TEMPERATUR E COEFFICIENT (0°–18°C and 28°–50°C)

Applicable for normal mode only. Not applicable for high capacitance mode.

MAXIMUM OUTPUT POW ER AND SOURCE/SINK LIMITS

±40.4V @ ±1.0A, ±6.06V @ ±3.0A, four quadrant source or sink operation.

VOLTAGE REGUL ATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV). NOISE 10Hz–20MHz: <20mV peak-peak (typical), <3mV RMS (typical), 6V range. CURRENT LIMIT/COMPLIANCE

Minimum value is 10nA. Accuracy same as current source.

OVER SHOOT: <±(0.1% + 10mV) typical. Step size = 10% to 90% of range, resistive load,

maximum current limit/compliance.

GUARD OFFSET VOLTAGE: <4mV typical. Current <10mA.

Programming

Resolution

: Bipolar current limit (compliance) set with single value.

CURRENT SOURCE SPECIFICATIONS

CURRENT PROGRAMMING ACCUR ACY

5, 6

Programming

Resolution

10 µA 0.05% + 1.8 mA 70 µA 10 µA 0.06% + 4 mA 150 µA

100 µA 0.5 % + 40 mA (typical)

: Bipolar voltage limit (compliance) set with a single value.

Range

100.000 nA 1 pA 0.06% + 100 pA 5 pA

1.00000 µA 10 pA 0.03% + 800 pA 25 pA

10.0000 µA 100 pA 0.03% + 5 nA 60 pA

100.000 µA 1 nA 0.03% + 60 nA 3 nA

1.00000 mA 10 nA 0.03% + 300 nA 6 nA

10.0000 mA 100 nA 0.03% + 6 µA 200 nA

100.000 mA 1 µA 0.03% + 30 µA 600 nA

1.00000 A

3.00000 A

10.0000 A

TEMPERATUR E COEFFICIENT (0°–18°C and 28°–50°C) MAXIMUM OUTPUT POW ER AND SOURCE/SINK LIMITS

±1.01A @ ±40.0V, ±3.03A @ ±6.0V, four quadrant source or sink operation.

CURR ENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA). VOLTAGE LIMIT/COMPLIANCE

Minimum value is 10mV. Accurac y is the same as voltage source.

OVER SHOOT: <±0.1% typical (step size = 10% to 90% of range, resistive load; see Current Source

Output Settling Time for additional test conditions).

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + volts)

: ±(0.15 × accuracy specification)/°C.

: 40.4W per channel maximum.

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + amps)

: ±(0.15 × accuracy specification)/°C.

: 40.4W per channel maximum.

Typical Noise

(peak-peak)

0.1Hz–10Hz

Typical Noise

(peak-peak)

0.1Hz–10Hz

ADDITIONAL SOURCE SPECIFICATIONS

TRA NSIENT R ESPONSE TIME: <70µs for the output to recover to within 0.1% for a 10% to 90%

step change in load.

VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value

after source level command is processed on a fixed range. 100mV, 1V Ranges: <50µs t ypical. 6V Ran ge: <10 0µs typical. 40V R ange CURR ENT SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value

3A Range: <80µs typical (current less than 2.5A, R 1A–10mA Ranges: <80µs t ypical (R 1mA Range: <100µ s ty pical. 100 µA Range: <150µs typical. 10µA R ange: <500µs typical. 1µA Range: <2.5ms typical. 100nA Range: <25ms t ypical.

DC FLOATING VOLTAGE: Output can be floated up to ±250VDC from chassis ground. REMOTE SENSE OPERAT ING RA NGE

VOLTAGE OUTPUT HE ADROOM:

OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in

VOLTAGE SOURCE RANGE CHA NGE OVERSHOOT: <300mV + 0.1% of larger range (typical).

CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% of larger range + 300mV/R

NOTES

1. Add 50µV to source accuracy specifications per volt of HI lead drop.

2. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

3. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,

4. For sink mode operat ion (quadrants II and I V), add 0.06% of limit range to the corresponding current lim it

5. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,

6. 10A range accessible only in pulse mode.

7. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

8. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,

9. For sink mode operat ion (quadrants II and I V), add 10% of compl iance range and ±0.02% of limit setting to

10. Add 150µs when measuri ng on the 1A range.

11. Add 50µV to source accuracy specifications per volt of HI lead drop.

: <150µs ty pica l.

× R

after source level command is processed on a fixed range. Values below for I

unless noted.

>6Ω).

load

Maximum voltage between HI and SENSE HI = 3V .

Maximum voltage between LO and SENSE LO = 3V .

40V Range: Max. output voltage = 42V – total voltage drop across source leads (maximum 1Ω

per source lead).

6V Ra nge: Max. output voltage = 8V – total voltage drop across source leads (maximum 1Ω per

source lead).

standby mode.

Overshoot into an 100kΩ load, 20MHz BW.

with source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling Time

for additional test conditions.

refer to “Operating Boundaries” in the Series 2600A Reference Manual for additional power derating information.

accuracy specifications. Specifications apply with sink mode operation enabled.

refer to “Operating Boundaries” in the Series 2600A Reference Manual for additional power derating information.

corresponding volta ge source spe cification. For 100mV range add an addit ional 60mV of uncertainty.

load

>2Ω).

= 1V

out

load

(typical

load

Series 2600A specifications

SMU INSTRUMENTS

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2601A 2602A

System SourceMeter® Instruments

SOURCE SPECIFICATIONS (continued)

PULSE SPECIFICATIONS

Region

Current Limit

1 1 A @ 40 V DC, no limit 100% 1 3 A @ 6 V DC, no limit 100% 2 1.5 A @ 40 V 100 ms 25% 3 5 A @ 35 V 4 ms 4% 4 10 A @ 20 V 1.8 ms 1%

MINIMUM PROGRAMMABLE PULSE WIDTH

source at a given I/V output and load can be longer than 100µs.

PULSE WIDTH PROGRAMMING RESOLUTION: 1µs. PULSE WIDTH PROGRAMMING ACCURACY PULSE WIDTH JITTER: 2µs (typical). QUADRANT DIAGRAM:

Maximum

+10A

–6V

Series 2600A specifications

+5A

+3A

+1.5A

+1A

–1A

–1.5A

–3A

–5A

–10A

NOTES

12. Times mea sured from the star t of pulse to the start off-time; see fig ure below.

Pulse Level

Start t

Bias Level

13. Thermally limited in sin k mode (quadrants II and IV ) and ambient temper atures above 30°C. See power equations in the reference m anual for more inform ation.

14. Typical performance for minimum settled pulse widths:

6 V 20 V 35 V 40 V

1.5 A 3 A 5 A 10 A

Typical tests were performed using remote operation, 4W sense, and best, fixed measurement range. For more

information on pul se scripts, see the Ser ies 2600A Reference Manual.

15. Times mea sured from the star t of pulse to the start off-time; see fig ure below.

Pulse Level

Bias Level

SMU INSTRUMENTS

10%

Source Value Load

Start t

10%

90%

Start t

off

2 Ω 2 Ω

7 Ω 27 Ω 27 Ω

2 Ω

7 Ω

2 Ω

90%

Start t

off

Maximum

Pulse Width

14, 15

: 100µs. NOTE: Minimum pulse width for settled

: ±5µs.

+20V–20V 0V

off

Source Settling

0.2% 150 µs 1% 2 00 µs

0.5% 500 µs

0.1% 400 µs

0.1% 1.5 ms

0.2% 150 µs

0.5% 500 µs

0.5% 200 µs

off

+35V–35V–40V

10%

(% of range) Min. Pulse Width

10%

Maximum

Duty Cycle

Pulse

+40V+6V

METER SPECIFICATIONS

VOLTAGE MEASUREMENT ACCURACY

Range

100.000 mV 1 µV

1.00000 V 10 µV

6.00000 V 10 µV

40.0000 V 100 µV

TEMPERATUR E COEFFICIENT (0°–18°C and 28°–50°C)

Applicable for normal mode only. Not applicable for high capacitance mode.

Default Display

Resolution

CURRENT MEASUREMENT ACCURACY

Range

Resolution

100.000 nA 1 pA <1 mV 0.05% + 100 pA

1.00000 µA 10 pA <1 mV 0.025% + 500 pA

10.0000 µA 100 pA <1 mV 0.025% + 1.5 nA

100.000 µA 1 nA <1 mV 0.02% + 25 n A

1.00000 mA 10 nA <1 mV 0.02% + 200 nA

10.0000 mA 100 nA <1 mV 0.02% + 2.5 µA

100.000 m A 1 µA <1 mV 0.02% + 20 µA

1.00000 A 10 µA <1 mV 0.03% + 1.5 mA

Default Display

3.00000 A 10 µA <1 mV 0.05% + 3.5 mA

10.0000 A

100 µA <1 mV 0.4% + 25 mA (typical)

CURR ENT MEASURE SETTLING T IME (Time for measurement to settle after a V

required to reach within 0.1% of final value after source level command is processed on a fixed range. Values for V

= 1V unless noted. Current R ange: 1mA. Settling Time: <100µs (typical).

out

TEMPERATUR E COEFFICIENT (0°–18°C and 28°–50°C)

Applicable for normal mode only. Not applicable for high capacitance mode.

CONTACT CHECK

Maximum Measurement

Speed

Time To Memory

For 60Hz (50Hz)

FAST 1 (1.2) ms

MEDIUM 4 (5) ms SLOW 36 (42) ms

Voltage

Burden

ADDITIONAL METER SPECIFICATIONS

MAXIMUM LOAD IMPEDANCE:

Normal Mode: 10n F (ty pical). High Capacitance Mode: 50µF (typical). COMMON MODE VOLTAGE: 250VDC. COMMON MODE ISOLATION: >1GΩ, <4500pF. OVER RANGE: 101% of source range, 102% of measure range. MAXIMUM SENSE LEAD RESISTANCE: 1kΩ for rated accuracy.

SENSE INPUT IMPEDANCE: >10 GΩ.

NOTES

16. Add 50µV to source accuracy specifications per volt of HI lead drop.

17. De-rate a ccurac y specifications for NPLC setting < 1 by increasing error term.

Add appropr iate % of range term using table below.

NPLC Setting

0.1 0.01% 0.01% 0.01% 0.01% 0.01%

0.01 0.08% 0.07% 0.1% 0.05% 0.05%

0.001 0.8 % 0 .6 % 1% 0.5 % 1.1 %

18. Applies when in single channel d isplay mode.

19. High Capacitance Mode accuracy is applicable for 23°C ±5°C only.

20. Applies when in single channel d isplay mode.

21. Four-wire remote sense only with current meter mode selec ted. Voltage measure set to 10 0mV or 1V range on ly.

22. 10A range accessible only in pulse mo de.

23. Compliance equal to 100mA.

24. High Capacitance Mode accuracy is applicable for 23°C ±5°C only.

25. Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.

100mV Range

1V–4 0V Ranges

16, 17

Input

Resistance

>10 GΩ >10 GΩ >10 GΩ

>10 GΩ

: ±(0.15 × accuracy specification)/°C.

Accuracy (1 Year)

±(% rdg. + amps)

: ±(0.15 × accuracy specification/°C.

Accuracy (1 Year)

±(% rdg. + ohms)

5% + 10 Ω

5% + 1 Ω 5% + 0.3 Ω

100nA Range

1µA–100m A

Ranges

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + volts)

0.015% + 150 µV

0.015% + 200 µV

0.015% + 1 mV

0.015% + 8 mV

23°C ±5°C

)

: Time

step

23°C ±5°C

1A–3A

Ranges

Series 2600A specifications

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2601A 2602A

System SourceMeter® Instruments

HIGH CAPACITANCE MODE

26, 27, 28

VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach 0.1% of final value after

source level command is processed on a fixed range. Current limit = 1A.

Voltage Source Range Settling Time with C

100 mV 200 µs (typical)

load

= 4.7µF

1 V 200 µs (typical) 6 V 200 µs (typical) 40 V 7 ms (typical)

CURR ENT MEASURE SETTLING TIME: Time required to reach 0.1% of final value after voltage

source is stabilized on a fixed range. Values below for V

Current Measure Range Settling Time

3 A – 1 A <120 µs (typical) (R 100 mA – 10 mA <100 µs (typical)

= 1V unless noted.

out

> 2Ω)

load

1 mA < 3 ms (typical) 100 µA < 3 ms (typical) 10 µA < 230 ms (typical) 1 µA < 230 ms (typical)

CAPACITOR LEAK AGE PERFORMA NCE USING HIGH-C SCRIPTS

Test: 5V step and measure. 200ms (typical) @ 50nA.

: Load = 5µF||10MΩ.

IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model

topology.

Series 2600A specifications

RS-232: Baud rates from 300bps to 115200bps. Programmable number of data bits, parity

type, and flow control (RTS/CTS hardware or none). When not programmed as the active host interface, the SourceMeter instrument can use the RS-232 interface to control other instrumentation.

ETHERNET: RJ-45 connector, LXI Class C, 10/100BT, no auto MDIX. EXPANSION INTERFACE: The TSP-Link expansion interface allows TSP enabled instruments to

trigger and communicate with each other.

Cable Type: Category 5e or higher LAN crossover cable.

Length: 3 meters maximum between each TSP enabled instrument. LXI COMPLIANCE: LXI Class C 1.2. LXI TIMING: Total Output Trigger Response Time: 245µs min., 280µs typ., (not speci-

fied) ma x. Receive LAN[0-7] Event Delay: Unknown. Generate LAN[0-7] Event Delay:

Unknow n.

DIGITAL I/O INTERFACE:

600mA

Solid State

+5V Pin

(on DIGITAL I/O

connector)

Digital I/O Pin

(on DIGITAL I/O

connector)

GND Pin

(on DIGITAL I/O

connector)

Fuse

100Ω

Rear Panel

5.1kΩ

+5VDC

Read by firmware

Written by firmware

Connector: 25-pin female D.

Input/Output Pins: 14 open drain I/O bits.

Absolute Ma ximum Input Voltage: 5.25V.

Absolute Minimum Input Voltage: –0.25V.

Maximum Logic Low Input Voltage: 0.7V, +850µA max.

MODE CHANGE DELAY:

100µA Cur rent Range and Above:

Delay into High Capacitance Mode: 10m s. Delay out of High Capacitance Mode: 10ms.

1µA and 10µA Current R anges:

Delay into High Capacitance Mode: 230ms.

Delay out of High Capacitance Mode: 10ms. VOLTMETER INPUT IMPEDANCE: 10G Ω in parallel with 3300pF. NOISE, 10Hz–20MHz (6V Range): <30mV peak-peak (typical). VOLTAGE SOURCE RANGE CHA NGE OVERSHOOT: <400mV + 0.1% of larger range (typical).

Overshoot into a 100kΩ load, 20MHz BW.

NOTES

26. High Capa citance Mode specif ications a re for DC measurements only.

27. 100nA range is not available i n High Capac itance Mode.

28. High Capacitance Mode utilizes locked ranges. Auto Ra nge is disabled.

29. Part of K I Factory script s. See reference manual for detai ls.

GENERAL

Minimum Logic High Input Voltage: 2.1V, +570µA. Maxi mum Source Current (flowing out of Digital I/O bit): +960µA. Maximum Sink Current @ Ma ximum Logic Low Voltage (0.7V): –5.0mA. Absolute Ma ximum Sink Current (flowing into Digital I/O pin): –11mA. 5V Power Supply Pin: Limited to 600mA, solid state fuse protected. Safety Interlock Pin: Active high input. >3.4V @ 24mA (absolute maximum of 6V) must be

externally applied to this pin to ensure 200V operation. This signal is pulled down to chas-

sis ground with a 10kΩ resistor. 200V operation will be blocked when the INTERLOCK

signal is <0.4V (absolute minimum – 0.4V). See figure below:

Coil

10kΩ

Chassis Ground

Resistance

145Ω ±10%

INTERLOCK Pin

(on DIGITAL I/O

connector)

Rear Panel

USB: USB 1.0 Host Controller (Memory Stick I/O). POWER SUPPLY: 100V to 250VAC, 50 –60Hz (auto sensing), 240VA max. COOLING: Forced air. Side intake and rear exhaust. One side must be unobstructed when rack

mounted.

EMC: Conforms to European Union Directive 2004/108/EEC, EN 61326-1. SAFET Y: Conforms to European Union Directive 73/23/EEC, EN 61010-1, and UL 61010-1. DIMENSIONS: 89mm high × 213mm wide × 460mm deep (3½ in × 8

Configuration (with handle and feet): 104mm high × 238mm wide × 460mm deep (4

⁄8 in × 17½ i n).

WEIGHT: 2601A: 4.75kg (10.4 lbs). 2602A: 5.50kg (12.0 lbs). ENVIRONMENT: For indoor use only.

Altitude: Maximum 2000 meters above sea level. Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C. Storage: –25°C to 65°C.

Read by firmware +220V Supply –220V Supply

To output stage

⁄8 in × 17½ in). Bench

⁄8 in ×

Series 2600A specifications

SEE PAGES 24 AND 25 FOR MEASUREMENT SPEEDS AND OTHER SPECIFICATIONS.

1.888.KEITHLEY

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SMU INSTRUMENTS

(U.S. only)

A GREATER ME ASURE OF C ONFIDENC E

2611A 2612A

System SourceMeter® Instruments

SPECIFICATION CONDITIONS

This document contains specifications and supplemental information for the Models 2611A and 2612A System SourceMeter Models 2611A and 2612A are tested. Upon leaving the factory the 2611A and 2612A meet these specifications. Supplemental and typical values are non- warranted, apply at 23°C, and are provided solely as useful information.

Accuracy specifications are applicable for both normal and high capacitance modes. The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2611A and

2612A) or SourceMeter CHANNEL B (2612A) terminals under the following conditions:

1. 23°C ± 5°C, <70% relative humidity.

2. After 2 hour warm-up.

3. Speed normal (1 NPLC).

4. A/D auto-zero enabled.

5. Remote sense operation or properly zeroed local sense operation.

6. Calibration period = 1 year.

instruments. Specifications are the standards against which the

SOURCE SPECIFICATIONS

VOLTAGE SOURCE SPECIFICATIONS

VOLTAGE PROGRAMMING ACCURACY

Programming

Range

200.000 mV 5 µV 0.02% + 375 µV 20 µV

Series 2600A specifications

2.00000 V 50 µV 0.02% + 600 µV 50 µV

Resolution

20.0000 V 500 µV 0.02% + 5 mV 300 µV

200.000 V 5 mV 0.02% + 50 mV 2 mV

TEMPERATUR E COEFFICIENT (0°–18°C and 28°–50°C)

Applicable for normal mode only. Not applicable for high capacitance mode.

MAXIMUM OUTPUT POW ER AND SOURCE/SINK LIMITS

±20.2V @ ±1.5A, ±202V @ ±100mA, four quadrant source or sink operation.

VOLTAGE REGUL ATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV). NOISE 10Hz–20MHz: <20mV peak-peak (typical), <3mV RMS (typical), 20V range. CURRENT LIMIT/COMPLIANCE

Minimum value is 10n A. Accuracy is the same as current source.

OVER SHOOT: <±(0.1% + 10mV) (typical). Step size = 10% to 90% of range, resistive load, maxi-

mum current limit/compliance.

: Bipolar current limit (compliance) set with single value.

GUARD OFFSET VOLTAGE: <4mV (current <10mA).

CURRENT SOURCE SPECIFICATIONS

CURRENT PROGRAMMING ACCUR ACY

6, 7

Programming

Resolution

20 µA 0.05% + 1.8 mA 70 µA 50 µA 0.06% + 4 mA 150 µA

200 µA 0.5% + 40 mA (typical)

: Bipolar voltage limit (compliance) set with a single value.

Range

100.000 nA 2 pA 0.06% + 100 pA 5 pA

1.00000 µA 20 pA 0.03% + 800 pA 25 pA

10.0000 µA 200 pA 0.03% + 5 nA 60 pA

100.000 µA 2 nA 0.03% + 60 nA 3 nA

1.00000 mA 20 nA 0.03% + 300 nA 6 nA

10.0000 mA 200 nA 0.03% + 6 µA 200 nA

100.000 mA 2 µA 0.03% + 30 µA 600 nA

1.00000 A

1.50000 A

10.0000 A

TEMPERATUR E COEFFICIENT (0°–18°C and 28°–50°C) 8: ±(0.15 × accuracy specification)/°C.

Applicable for normal mode only. Not applicable for high capacitance mode.

MAXIMUM OUTPUT POW ER AND SOURCE/SINK LIMITS

±1.515A @ ±20V , ±101mA @ ±200V , four quadrant source or sink operation.

CURR ENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA). VOLTAGE LIMIT/COMPLIANCE

Minimum value is 20mV. Accuracy is the same as voltage source.

OVER SHOOT: <±0.1% (typical). Step size = 10% to 90% of range, resistive load; see Current

Source Output Settling Time for additional test conditions.

SMU INSTRUMENTS

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + volts)

: ±(0.15 × accuracy specification)/°C.

: 30.3W per channel maximum.

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + amps)

: 30.3W per channel maximum.

Typical Noise

(Peak-Peak)

0.1Hz–10Hz

Typical Noise

(Peak-Peak)

0.1Hz–10Hz

ADDITIONAL SOURCE SPECIFICATIONS

TRA NSIENT R ESPONSE TIME: <70µs for the output to recover to within 0.1% for a 10% to 90%

step change in load.

VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to within reach 0.1% of final value

after source level command is processed on a fixed range.

Range Settling Time

200 mV <50 µs (typical) 2 V <50 µs (typical) 20 V <110 µs (typical) 200 V <700 µs (typical)

CURR ENT SOURCE OUTPUT SETTLING TIME: Time required to reach

source level command is processed on a fixed range. Values below for I

Current Range Settling Ti me

1.5 A – 1 A <120 µs (typical) (R 100 mA – 10 mA <80 µs (typical) 1 mA <100 µs (typical) 100 µA <150 µs (typical) 10 µA <50 0 µs (typical) 1 µA <2 ms (typical) 100 n A <20 ms (typical)

DC FLOATING VOLTAGE: Output can be floated up to ±250VDC from chassis ground. REMOTE SENSE OPERAT ING RA NGE

Maximum voltage between LO and SENSE LO = 3V .

VOLTAGE OUTPUT HE ADROOM:

200V Range: Max. output voltage = 202.3V – total voltage drop across source leads (maximum

1Ω per source lead).

20V Range: Max. output voltage = 23.3V – total voltage drop across source leads (maximum

1Ω per source lead).

OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in

standby mode.

VOLTAGE SOURCE RANGE CHA NGE OVERSHOOT: <300mV + 0.1% of larger range (typical).

Overshoot into a 200kΩ load, 20MHz BW.

CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% of larger range + 300mV/R

– With source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling Time for additional test conditions.

> 6Ω)

load

: Maximum voltage between HI and SENSE HI = 3V .

within

0.1% of final value after

· R

= 2V unless noted.

out

load

(typical

load

NOTES

1. Add 50µV to source accuracy specifications per volt of HI lead drop.

2. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

3. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer to “Op erating Bounda ries” in the Series 2600A Reference Manua l for additional power derati ng information.

4. For sink mode operat ion (quadrants II and I V), add 0.06% of limit range to the corresponding current lim it accuracy specifications. Specifications apply with sink mode operation enabled.

5. Accu racy specifications do not include connec tor leaka ge. Derate accuracy by V between 18°–28°C. Derate accu racy by V

6. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer to “Op erating Bounda ries” in the Series 2600A Reference Manua l for additional power derati ng information.

7. 10A range accessible only in pulse mode.

8. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

9. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer to “Op erating Bounda ries” in the Series 2600A Reference Manua l for additional power derati ng information.

10. For sink mode operation (quadrants I I and IV), add 10% of compl iance range and ±0.02% of limit setting to corresponding volta ge source specification. For 200mV range add an additional 12 0mV of uncerta inty.

11. Add 50µV to source accuracy specifications per volt of HI lead drop.

/2E11 + (0.15·V

out

/2E11) per °C when operating <18°C a nd >28°C.

out

/2E11 per °C when operating

out

PULSE SPECIFICATIONS

Region

Current Limit

1 100 mA @ 200 V DC, no limit 100% 1 1.5 A @ 20 V DC, no limit 100%

Maximum

2 1 A @ 180 V 8.5 ms 1%

1 A @ 200 V 2.2 ms 1%

3 4 10 A @ 5 V 1 ms 2.2%

MINIMUM PROGRAMMABLE PULSE WIDTH

source at a given I/V output and load can be longer than 100µs.

PULSE WIDTH PROGRAMMING RESOLUTION: 1µs. PULSE WIDTH PROGRAMMING ACCURACY PULSE WIDTH JITTER: 2µs (typical).

Maximum

Pulse Width

15, 16

: 100µs. NOTE: Minimum pulse width for settled

: ±5µs.

Maximum

Duty Cycle

Series 2600A specifications

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2611A 2612A

System SourceMeter® Instruments

SOURCE SPECIFICATIONS (continued)

PULSE SPECIFICATIONS (continued)

QUADRANT DIAGRAM:

+10A

+1.5A

+1A

+0.1A

–0.1A

–1A

–1.5A

–10A

–5V

+20V–20V 0V

NOTES

12. Times mea sured from the star t of pulse to the start off-time; see fig ure below.

Pulse Level

Series 2600A specifications

Start t

Bias Level

13. Thermally limited in sin k mode (quadrants II and IV ) and ambient temper atures above 30°C. See power eq uations in the reference manua l for more information.

14. Voltage source operation with 1.5 A current limit.

15. Typical performance for minimum settled pulse widths:

Typical tests were performed using remote operation, 4W sense, and best, fixed measurement range. For more

information on pul se scripts, see the Ser ies 2600A Reference Manual.

16. Times mea sured from the star t of pulse to the start off-time; see fig ure below.

Pulse Level

Bias Level

10%

Source Value Load

5 V

20 V

180 V

200 V (1.5 A Limit)

100 mA

1 A 1 A

10 A

Start t

10%

90%

Start t

off

90%

Start t

0.5 Ω 200 Ω 180 Ω 200 Ω 200 Ω 200 Ω 180 Ω

0.5 Ω

off

Source Settling

(% of range) Min. Pulse Width

off

+180V–180V–200V

10%

1% 300 µ s

0.2% 200 µs

0.2% 5 ms

0.2% 1.5 ms 1% 200 µ s 1% 500 µ s

0.2% 5 ms

0.5% 300 µs

10%

Pulse

+200V+5V

METER SPECIFICATIONS

Input

Resistance

>10 GΩ >10 GΩ >10 GΩ >10 GΩ

Voltage

17, 18

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + volts)

0.015% + 225 µV

0.02% + 350 µV

0.015% + 5 mV

0.015% + 50 mV

: ±(0.15 × accuracy specification)/°C.

18, 21

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + amps)

: ±(0.15 × accuracy specfication)/°C.

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + ohms)

5% + 10 Ω

5% + 1 Ω 5% + 0.3 Ω

VOLTAGE MEASUREMENT ACCURACY

Range

Resolution

200.000 mV 1 µV

2.00000 V 10 µV

20.0000 V 100 µV

200.000 V 1 mV

TEMPERATUR E COEFFICIENT (0°–18°C and 28°–50°C)

Applicable for normal mode only. Not applicable for high capacitance mode.

Default Display

CURRENT MEASUREMENT ACCURACY

Range

Resolution

100.000 nA 1 pA <1 mV 0.06% + 100 pA

1.00000 µA 10 pA <1 mV 0.025% + 500 pA

10.0000 µA 100 pA <1 mV 0.025% + 1.5 nA

100.000 µA 1 nA <1 mV 0.02% + 25 nA

1.00000 mA 10 nA <1 mV 0.02% + 200 nA

10.0000 mA 100 nA <1 mV 0.02% + 2.5 µA

100.000 mA 1 µA <1 mV 0.02% + 20 µA

1.00000 A 10 µA <1 mV 0.03% + 1.5 mA

Default Display

1.50000 A 10 µA <1 mV 0.05% + 3.5 mA

10.0000 A

CURR ENT MEASURE SETTLING T IME (Time for measurement to settle after a Vstep)

required to reach 0.1% of final value after source level command is processed on a fixed range. Values for V

= 2V unless noted. Current Range: 1mA. Settling Time: <100µ s (ty pica l).

out

TEMPERATUR E COEFFICIENT (0°–18°C and 28°–50°C)

Applicable for normal mode only. Not applicable for high capacitance mode.

CONTACT CHECK

Maximum Measurement

Speed

FAST 1 (1.2) ms

MEDIUM 4 (5) ms SLOW 36 (42) ms

Burden

100 µA <1 mV 0.4% + 25 mA (typical)

Time to Memory For 60Hz (50Hz)

ADDITIONAL METER SPECIFICATIONS

MAXIMUM LOAD IMPEDANCE:

Series 2600A specifications

: Time

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SMU INSTRUMENTS

(U.S. only)

A GREATER ME ASURE OF C ONFIDENC E

2611A 2612A

System SourceMeter® Instruments

METER SPECIFICATIONS (continued)

NOTES

17. Add 50µV to source accuracy specifications per volt of HI lead drop.

18. De-rate a ccurac y specifications for NPLC setting <1 by increasing error term. Add appropriate % of range term using table below.

NPLC Setting

0.1 0.01% 0.01% 0.01% 0.01% 0.01%

0.01 0.08% 0.07% 0.1% 0.05% 0.05%

0.001 0.8 % 0 .6 % 1% 0.5 % 1.1 %

19. Applies when in single channel d isplay mode.

20. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

21. Accuracy speci fications do not include connector leakage. D e-rate accurac y by V between 18°–28°C. Derate accu racy by V

22. Applies when in single channel d isplay mode.

23. Four-wire remote sense only and wit h current meter mode selected. Voltage measur e set to 200mV or 2V range on ly.

24. 10A range accessible on ly in pulse mode.

25. Compliance equal to 10 0mA.

26. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

27. Includes measurement of SENSE HI to HI a nd SENSE LO to LO contact resistances.

HIGH CAPACITANCE MODE

VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value

after source level command is processed on a fixed range. Current limit = 1A.

Voltage Source Range Settling Time with C

Series 2600A specifications

200 mV 600 µs (typical) 2 V 600 µs (typical) 20 V 1.5 ms (typical) 200 V 20 ms (typical)

CURR ENT MEASURE SETTLING TIME: Time required to reach within 0.1% of final value after

voltage source is stabilized on a fixed range. Values below for V

Current Measure Range Settling Time

1.5 A – 1 A <120 µs (typical) (R

100 mA – 10 mA <100 µs (typical) 1 mA < 3 ms (typical) 100 µA < 3 ms (typical) 10 µA < 230 ms (typical) 1 µA < 230 ms (typical)

CAPACITOR LEAK AGE PERFORMA NCE USING HIGH-C SCRIPTS

Test: 5V step and measure. 200ms (typical) @ 50nA.

MODE CHANGE DELAY:

100µA Cur rent Range and Above:

Delay into High Capacitance Mode: 10m s. Delay out of High Capacitance Mode: 10ms.

1µA and 10µA Current R anges:

Delay into High Capacitance Mode: 230ms.

Delay out of High Capacitance Mode: 10ms. VOLTMETER INPUT IMPEDANCE: 30GΩ in parallel with 3300pF. NOISE, 10Hz–20MHz (20V Range): <30mV peak-peak (typical). VOLTAGE SOURCE RANGE CHA NGE OVERSHOOT (for 20V range and below): <400mV + 0.1%

of larger range (typical). Overshoot into a 200kΩ load, 20MHz BW.

NOTES

28. High Capa citance Mode specif ications a re for DC measurements only.

29. 100nA r ange is not av ailable in High Capa citance Mode.

30. High Capacitance Mode utilizes locked ranges. Auto Ra nge is disabled.

31. Part of K I Factory script s, See reference manual for details.

SEE PAGES 24 AND 25 FOR MEASUREMENT SPEEDS AND OTHER SPECIFICATIONS.

SMU INSTRUMENTS

200mV Range

2V–200V

Ranges

/2E11 + (0.15 * V

out

100nA

Range

/2E11) per °C when operating <18° and >28°C.

out

1µA–100m A

Ranges

/2E11 per °C when operating

out

28, 29, 30

= 4.7µF

load

= 2V unless noted.

out

>6Ω)

load

: Load = 5µF||10MΩ.

1A–1. 5A

Ranges

GENERAL

IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model

topology.

RS-232: Baud rates from 300bps to 115200bps. Programmable number of data bits, parity

type, and flow control (RTS/CTS hardware or none). When not programmed as the active host interface, the SourceMeter instrument can use the RS-232 interface to control other instrumentation.

ETHERNET: RJ-45 connector, LXI Class C, 10/100BT, no auto MDIX. EXPANSION INTERFACE: The TSP-Link expansion interface allows TSP enabled instruments

to trigger and communicate with each other.

Cable Type: Category 5e or higher LAN crossover cable.

Length: 3 meters maximum between each TSP enabled instrument. LXI COMPLIANCE: LXI Class C 1.2. LXI TIMING: Total Output Trigger Response Time: 245µs min., 280µs typ., (not speci-

fied) ma x. Receive LAN[0-7] Event Delay: Unknown. Generate LAN[0-7] Event Delay:

Unknow n.

DIGITAL I/O INTERFACE:

+5V Pin

(on DIGITAL I/O

connector)

Digital I/O Pin

(on DIGITAL I/O

connector)

GND Pin

(on DIGITAL I/O

connector)

Connector: 25-pin female D.

Input/Output Pins: 14 open drain I/O bits.

Absolute Ma ximum Input Voltage: 5.25V.

Absolute Minimum Input Voltage: –0.25V.

Maximum Logic Low Input Voltage: 0.7V, +850µA max.

Minimum Logic High Input Voltage: 2.1V, +570µA.

Maxi mum Source Current (flowing out of Digital I/O bit): +960µA.

Maximum Sink Current @ Ma ximum Logic Low Voltage (0.7V): –5.0mA.

Absolute Ma ximum Sink Current (flowing into Digital I/O pin): –11mA.

5V Power Supply Pin: Limited to 600mA, solid state fuse protected.

Safety Interlock Pin: Active high input. >3.4V @ 24mA (absolute maximum of 6V) must

be externally applied to this pin to ensure 200V operation. This signal is pulled down to chassis ground with a 10kΩ resistor. 200V operation will be blocked when the INTER LOCK signal is <0.4V (absolute minimum –0.4V ). See figure below:

INTERLOCK Pin

(on DIGITAL I/O

connector)

rack mounted.

Configuration (with handle and feet): 104mm high × 238mm wide × 460mm deep (4

⁄8 in × 17½ i n).

× 9

WEIGHT: 2611A: 4.75kg (10.4 lbs). 2612A: 5.50kg (12.0 lbs). ENVIRONMENT: For indoor use only. Altitude: Maximum 2000 meters above sea level.

Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C.

Storage: –25°C to 65°C.

600mA

Solid State

Fuse

100Ω

Rear Panel

10kΩ

Chassis Ground

5.1kΩ

Coil

Resistance

145Ω ±10%

+5VDC

Read by firmware

Written by firmware

Read by firmware +220V Supply –220V Supply

To output stage

⁄8 in × 17½ in). Bench

⁄8 in

Series 2600A specifications

1.888.KEITHLEY

www.keithley.com

(U.S. only)

A GREATER ME ASURE OF C ONFIDENC E

2635A 2636A

System SourceMeter® Instruments

SPECIFICATION CONDITIONS

This document contains specifications and supplemental information for the Models 2635A and 2636A System SourceMeter Models 2635A and 2636A are tested. Upon leaving the factory the 2635A and 2636A meet these specifications. Supplemental and typical values are non- warranted, apply at 23°C, and are provided solely as useful information.

Accuracy specifications are applicable for both normal and high capacitance modes. The source and measurement accuracies are specified at the SourceMeter CHA NNEL A (2635A

and 2636A) or SourceMeter CH ANNEL B (2636A) terminals under the following conditions:

1. 23°C ± 5°C, <70% relative humidity.

2. After 2 hour warm-up

3. Speed normal (1 NPLC)

4. A/D auto-zero enabled

5. Remote sense operation or properly zeroed local sense operation

6. Calibration period = 1 year

instruments. Specifications are the standards against which the

SOURCE SPECIFICATIONS

VOLTAGE SOURCE SPECIFICATIONS

VOLTAGE PROGRAMMING ACCURACY

Programming

Range

Resolution

200.000 mV 5 µV 0.02% + 375 µV 20 µV

2.00000 V 50 µV 0.02% + 600 µV 50 µV

Series 2600A specifications

20.0000 V 500 µV 0.02% + 5 mV 300 µV

200.000 V 5 mV 0.02% + 50 mV 2 mV

TEMPERATUR E COEFFICIENT (0°–18°C and 28°–50°C)

Applicable for normal mode only. Not applicable for high capacitance mode.

MAXIMUM OUTPUT POW ER AND SOURCE/SINK LIMITS

±20.2V @ ±1.5A, ±202V @ ±100mA, four quadrant source or sink operation.

VOLTAGE REGUL ATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV). NOISE 10Hz–20MHz: <20mV pk-pk (typical), <3mV rms (typical), 20V range. CURRENT LIMIT/COMPLIANCE

Minimum value is 100pA. Accuracy is the same as current source.

OVER SHOOT: <±(0.1% + 10mV) typical (step size = 10% to 90% of range, resistive load,

maximum current limit/compliance).

: Bipolar current limit (compliance) set with single value.

GUARD OFFSET VOLTAGE: <4mV (cu rrent <10m A).

CURRENT SOURCE SPECIFICATIONS

CURRENT PROGRAMMING ACCUR ACY

Range

1.00000 nA 20 fA 0.15% + 2 pA 800 fA

10.0000 nA 200 fA 0.15% + 5 pA 2 pA

100.000 nA 2 pA 0.06% + 50 pA 5 pA

1.00000 µA 20 pA 0.03% + 700 pA 25 pA

10.0000 µA 200 pA 0.03% + 5 nA 60 pA

100.000 µA 2 nA 0.03% + 60 nA 3 nA

1.00000 mA 20 nA 0.03% + 300 nA 6 nA

10.0000 mA 200 nA 0.03% + 6 µA 200 nA

100.000 mA 2 µA 0.03% + 30 µA 600 nA

1.00000 A

1.50000 A

10.0000 A

TEMPERATUR E COEFFICIENT (0°–18°C and 28°–50°C)

Applicable for normal mode only. Not applicable for high capacitance mode.

MAXIMUM OUTPUT POW ER AND SOURCE/SINK LIMITS

±1.515A @ ±20V, ±101mA @ ±200V, four quadrant source or sin k operation.

CURR ENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA). VOLTAGE LIMIT/COMPLIANCE

Minimum value is 20mV. Accuracy is the same as voltage source.

OVER SHOOT: <±0.1% typical (step size = 10% to 90% of range, resistive load, maximum

current limit/compliance; see Current Source Output Settling Time for additional test conditions).

Programming

Resolution

20 µA 0.05% + 1.8 mA 70 µA

50 µA 0.06% + 4 mA 150 µA

5, 6

200 µA 0.5 % + 40 mA (typical)

: Bipolar voltage limit (compliance) set with a single value.

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + volts)

: ±(0.15 × accuracy specification)/°C.

: 30.3W per channel maximum.

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + amps)

: ±(0.15 × accuracy specification)/°C.

: 30.3W per channel maximum.

Typical Noise

(peak-peak)

0.1Hz–10Hz

Typical Noise

(peak-peak)

0.1Hz–10Hz

ADDITIONAL SOURCE SPECIFICATIONS

TRA NSIENT R ESPONSE TIME: <70µs for the output to recover to within 0.1% for a 10% to 90%

step change in load.

VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value

after source level command is processed on a fixed range.

Range Settling Time

200 mV <50 µs (typical) 2 V <50 µs (typical) 20 V <110 µs (typical) 200 V <700 µs (typical)

CURR ENT SOURCE OUTPUT SETTLING TIME: Time required to reach

source level command is processed on a fixed range. Values below for I

Current Range Settling Ti me

1.5 A – 1 A <120 µs (typical) (R 100 mA – 10 mA <80 µs (typical) 1 mA <100 µs (typical) 100 µA <150 µs (typical) 10 µA <50 0 µs (typical) 1 µA <2 ms (typical) 100 n A <20 ms (typical) 10 nA <40 ms (typical) 1 nA <150 ms (typical)

DC FLOATING VOLTAGE: Output can be floated up to ±250VDC. REMOTE SENSE OPERAT ING RA NGE

Maximum voltage between LO and SENSE LO = 3V .

VOLTAGE OUTPUT HE ADROOM:

200V Range: Max. output voltage = 202.3V – total voltage drop across source leads (maximum

1Ω per source lead).

20V Range: Max. output voltage = 23.3V – total voltage drop across source leads (maximum

1Ω per source lead).

OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in

standby mode.

VOLTAGE SOURCE RANGE CHA NGE OVERSHOOT: <300mV + 0.1% of larger range (typical).

Overshoot into a 200kΩ load, 20MHz BW.

CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% of larger range + 300mV/R

– With source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling

> 6Ω)

load

: Maximum voltage bet ween HI and SENSE HI = 3V .

within

0.1% of final value after

· R

= 2V unless noted.

out

load

(typical

load

Time for additional test condtions.

PULSE SPECIFICATIONS

Region

Current Limit

1 100 mA @ 200 V DC, no limit 100% 1 1.5 A @ 20 V DC, no limit 100%

Maximum

2 1 A @ 180 V 8.5 ms 1%

1 A @ 200 V 2.2 ms 1%

4 10 A @ 5 V 1 ms 2.2%

MINIMUM PROGRAMMABLE PULSE WIDTH

settled source at a given I /V output and load can be longer than 100µs.

PULSE WIDTH PROGRAMMING RESOLUTION: 1µs. PULSE WIDTH PROGRAMMING ACCURACY PULSE WIDTH JITTER: 50µs (typical). QUADRANT DIAGRAM:

+10A

+1.5A

+1A

+0.1A

–0.1A

–1.5A

–10A

–1A

–5V

Maximum

Pulse Width

14, 15

: 100µs. NOTE: Minimum pulse width for

: ±5µs.

+20V–20V 0V

+200V+5V

+180V–180V–200V

Pulse

Duty Cycle

Maximum

Series 2600A specifications

SMU INSTRUMENTS

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A GREATER ME ASURE OF C ONFIDENC E

2635A 2636A

System SourceMeter® Instruments

SOURCE SPECIFICATIONS (continued)

NOTES

1. Add 50µV to source accuracy specifications per volt of HI lead drop.

2. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

3. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer to “Operating Boundaries” in t he Series 2600A Reference Manual for additional power der ating information.

4. For sink mode operat ion (quadrants II and I V), add 0.06% of limit range to the corresponding current lim it accuracy specifications. Specifications apply with sink mode operation enabled.

5. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer to “Operating Boundaries” in t he Series 2600A Reference Manual for additional power der ating information.

6. 10A range accessible only in pulse mode.

7. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

8. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer to “Operating Boundaries” in the Series 2600A Reference Manual for additional power derating information.

9. For sink mode operat ion (quadrants II and I V), add 10% of compl iance range and ±0.02% of limit setting to corresponding volta ge source specification. For 200mV range add an additional 12 0mV of uncerta inty.

10. Add 50µV to source accuracy specifications per volt of HI lead drop.

11. Times mea sured from the star t of pulse to the start off-time; see fig ure below.

Pulse Level

90%

0.5 Ω

200 Ω

180 Ω 200 Ω 200 Ω 200 Ω

180 Ω

0.5 Ω

Start t

90%

Start t

off

10%

off

Source Settling

(% of range) Min. Pulse Width

1% 300 µ s

0.2% 200 µs

0.2% 5 ms

0.2% 1.5 ms 1% 200 µ s 1% 500 µ s

0.2% 5 ms

0.5% 300 µs

off

10%

off

Start t

Bias Level

Series 2600A specifications

12. Thermally limited in sin k mode (quadrants II and IV ) and ambient temper atures above 30°C. See power equations in the Reference M anual for more inform ation.

13. Voltage source operation with 1.5 A current limit.

14. Typical performance for minimum settled pulse widths:

200 V (1.5 A Limit)

Typical tests were performed using remote operation, 4W sense, and best, fixed measurement range. For more

information on pul se scripts, see the Ser ies 2600A Reference Manual.

15. Times mea sured from the star t of pulse to the start off-time; see fig ure below.

Pulse Level

Start t

Bias Level

10%

Source Value Load

5 V

20 V

180 V

100 mA

1 A 1 A

10 A

10%

METER SPECIFICATIONS

VOLTAGE MEASUREMENT ACCURACY

Range

Resolution

200.000 mV 1 µV

2.00000 V 10 µV

20.0000 V 100 µV

200.000 V 1 mV

TEMPERATUR E COEFFICIENT (0°–18°C and 28°–50°C)

Applicable for normal mode only. Not applicable for high capacitance mode.

Default Display

CURRENT MEASUREMENT ACCURACY

Range

100.0 0 pA

1.00000 nA

Resolution

22, 23

1 fA <1 mV 0.15% + 120 fA

22, 24

10 fA <1 mV 0.15% + 240 fA

10.0000 nA 100 fA <1 mV 0.15% + 3 pA

100.000 nA 1 pA <1 mV 0.06% + 40 pA

1.00000 µA 10 pA <1 mV 0.025% + 400 pA

10.0000 µA 100 pA <1 mV 0.025% + 1.5 nA

100.000 µA 1 nA <1 mV 0.02% + 25 n A

1.00000 mA 10 nA <1 mV 0.02% + 200 nA

10.0000 mA 100 nA <1 mV 0.02% + 2.5 µA

100.000 mA 1 µA <1 mV 0.02% + 20 µA

1.00000 A 10 µA <1 mV 0.03% + 1.5 mA

Default Display

1.50000 A 10 µA <1 mV 0.05% + 3.5 mA

10.0000 A

100 µA <1 mV 0.4 % + 25 mA

CURR ENT MEASURE SETTLING T IME (Time for measurement to settle after a Vstep)

required to reach within 0.1% of final value after source level command is processed on a fixed range. Values for V

= 2V unless noted. Current Range: 1mA. Settling Time: <100µ s (ty pica l).

out

TEMPERATUR E COEFFICIENT (0°–18°C and 28°–50°C)

Applicable for normal mode only. Not applicable for high capacitance mode.

CONTACT CHECK

Maximum Measurement

Speed

FAST 1 (1.2) ms

MEDIUM 4 (5) ms SLOW 36 (42) ms

Time to Memory

For 60Hz (50Hz)

ADDITIONAL METER SPECIFICATIONS

MAXIMUM LOAD IMPEDANCE:

Ω.

16, 17

Input

Resistance

>1014 Ω

>10

: ±(0.15 × accuracy specification)/°C.

Voltage

Burden

: ±(0.15 × accuracy specfication)/°C.

Accuracy (1 Year)

±(% rdg. + ohms)

5% + 10 Ω

5% + 1 Ω 5% + 0.3 Ω

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + volts)

0.015% + 225 µV

0.02% + 350 µV

0.015% + 5 mV

0.015% + 50 mV

Accuracy (1 Year)

23°C ±5°C

±(% rdg. + amps)

23°C ±5°C

Series 2600A specifications

: Time

SMU INSTRUMENTS

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A GREATER ME ASURE OF C ONFIDENC E

2635A 2636A

System SourceMeter® Instruments

METER SPECIFICATIONS (continued)

NOTES

16. Add 50µV to source accuracy specifications per volt of HI lead drop.

17. De-rate a ccurac y specifications for NPLC setting <1 by increasing error term. Add appropriate % of range term using table below.

NPLC Setting

0.1 0.01% 0.01% 0.01% 0.01% 0.01%

0.01 0.08% 0.07% 0.1% 0.05% 0.05%

0.001 0.8 % 0 .6 % 1% 0.5 % 1.1 %

18. Applies when in single channel d isplay mode.

19. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

20. Applies when in single channel d isplay mode.

21. Four-wire remote sense only and wit h current meter mode selected. Voltage measure set to 200mV or 2V range on ly.

22. 10-NPLC, 11-Point Median Filter, <200V ra nge, measurements made within 1 hour after zeroing. 23°C ± 1°C

23. Under default specification condit ions: ±(0.15% + 750fA).

24. Under default specification conditions: ±(0.15% + 1pA).

25. 10A range accessible only in pulse mo de.

26. Delay factor set to 1. Compl iance equal to 100mA.

27. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.

28. Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.

HIGH CAPACITANCE MODE

VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value

after source level command is processed on a fixed range. Current limit = 1A.

Series 2600A specifications

Voltage Source Range Settling Time with C

200 mV 600 µs (typical) 2 V 600 µs (typical) 20 V 1.5 ms (typical) 200 V 20 ms (typical)

CURR ENT MEASURE SETTLING TIME: Time required to reach within 0.1% of final value after

voltage source is stabilized on a fixed range. Values below for V

Current Measure Range Settling Time

1.5 A – 1 A <120 µs (typical) (R

100 mA – 10 mA <100 µs (typical) 1 mA < 3 ms (typical) 100 µA < 3 ms (typical) 10 µA < 230 ms (typical) 1 µA < 230 ms (typical)

CAPACITOR LEAK AGE PERFORMA NCE USING HIGH-C SCRIPTS

Test: 5V step and measure. 200ms (typical) @ 50nA.

MODE CHANGE DELAY:

100µA Cur rent Range and Above:

Delay into High Capacitance Mode: 10m s. Delay out of High Capacitance Mode: 10ms.

1µA and 10µA Current R anges:

Delay into High Capacitance Mode: 230ms.

of larger range (typical). Overshoot into a 200kΩ load, 20MHz BW.

NOTES

29. High Capa citance Mode specif ications a re for DC measurements only.

30. 100nA r ange and below are not ava ilable in high capacitance mode.

31. High Capacitance Mode utilizes locked ranges. Auto Ra nge is disabled.

32. Part of K I Factory script s. See reference manual for details.

SEE PAGES 24 AND 25 FOR MEASUREMENT SPEEDS AND OTHER SPECIFICATIONS.

200mV

Range

2V–200V

Ranges

100nA Range

29, 30, 31

= 4.7µF

load

1µA–100m A

Ranges

= 2V unless noted.

out

>6Ω)

load

: Load = 5µF||10MΩ.

1A–1. 5A

Ranges

GENERAL

IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model

topology.

RS-232: Baud rates from 300bps to 115200bps. Programmable number of data bits, parity

type, and flow control (RTS/CTS hardware or none). When not programmed as the active host interface, the SourceMeter instrument can use the RS-232 interface to control other instrumentation.

ETHERNET: RJ-45 connector, LXI Class C, 10/100BT, no auto MDIX. EXPANSION INTERFACE: The TSP-Link expansion interface allows TSP enabled instruments

to trigger and communicate with each other.

Cable Type: Category 5e or higher LAN crossover cable.

Length: 3 meters maximum between each TSP enabled instrument. LXI COMPLIANCE: LXI Class C 1.2. LXI TIMING: Total Output Trigger Response Time: 245µs min., 280µs typ., (not speci-

fied) ma x. Receive LAN[0-7] Event Delay: Unknown. Generate LAN[0-7] Event Delay:

Unknow n.

DIGITAL I/O INTERFACE:

+5V Pin

(on DIGITAL I/O

connector)

Digital I/O Pin

(on DIGITAL I/O

connector)

GND Pin

(on DIGITAL I/O

connector)

Connector: 25-pin female D.

Input/Output Pins: 14 open drain I/O bits.

Absolute Ma ximum Input Voltage: 5.25V.

Absolute Minimum Input Voltage: –0.25V.

Maximum Logic Low Input Voltage: 0.7V, +850µA max.

Minimum Logic High Input Voltage: 2.1V, +570µA.

Maxi mum Source Current (flowing out of Digital I/O bit): +960µA.

Maximum Sink Current @ Ma ximum Logic Low Voltage (0.7V): –5.0mA.

Absolute Ma ximum Sink Current (flowing into Digital I/O pin): –11mA.

5V Power Supply Pin: Limited to 600mA, solid state fuse protected.

Safety Interlock Pin: Active high input. >3.4V @ 24mA (absolute maximum of 6V) must

INTERLOCK Pin

(on DIGITAL I/O

connector)

rack mounted.

Configuration (with handle and feet): 104mm high × 238mm wide × 460mm deep (4

⁄8 in × 17½ i n).

× 9

WEIGHT: 2635A: 4.75kg (10.4 lbs). 2636A: 5.50kg (12.0 lbs). ENVIRONMENT: For indoor use only. Altitude: Maximum 2000 meters above sea level.

Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C.

Storage: –25°C to 65°C.

600mA

Solid State

Fuse

100Ω

Rear Panel

10kΩ

Chassis Ground

Rear Panel

Coil

Resistance

145Ω ±10%

5.1kΩ

+5VDC

Read by firmware

Written by firmware

Read by firmware +220V Supply –220V Supply

To output stage

⁄8 in × 17½ in). Bench

⁄8 in

Series 2600A specifications

SMU INSTRUMENTS

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www.keithley.com

(U.S. only)

A GREATER ME ASURE OF C ONFIDENC E

Series 2600A

System SourceMeter® Instruments

Applicable to Models 2601A, 2602A, 2611A, 2612A, 2635A, and 2636A. See page 28 for Model 2651A speciﬁ cations.

MEASUREMENT SPEED SPECIFICATIONS

1, 2, 3

MAXIMUM SWEEP OPERATION RATES (operations per second) FOR 60Hz (50Hz):

A/D Converter

Speed Trigger Origin

0.001 NPLC Internal 20000 (20000) 10500 (10500) 7000 (7000) 6200 (6200) 12000 (12000) 5900 (5900)

0.001 NPLC Digital I/O 8100 (8100) 7100 (7100) 5500 (5500) 5100 (5100) 11200 (11200) 5700 (5700)

0.01 NPLC Internal 5000 (4000) 4000 (3500) 3400 (3000) 3200 (2900) 4200 (3700) 3100 (2800)

0.01 NPLC Digital I/O 3650 (3200) 3400 (3000) 3000 (2700) 2900 (2600) 4150 (3650) 3050 (2775)

0.1 NPLC Inte rn al 580 (490) 5 60 (475) 550 (465) 550 (4 60) 575 (480) 545 (460)

0.1 NPLC Dig ital I/O 560 (470) 450 (460) 545 (460) 54 0 (450) 570 (480) 545 (460)

1.0 NPLC Internal 59 (49) 59 (49) 59 (49) 59 (49) 59 (49) 59 (49)

1.0 NPLC Dig ital I/O 58 (4 8) 58 (49) 59 (49) 59 (49) 59 (49) 59 (49)

Measure

To Memory Using

User Scripts

Measure

To GPIB Using

User Scripts

Source Measure

To Memory Using

User Scripts

Source Measure

To GPIB Using

User Scripts

Source Measure

To Memory Using

Sweep API

Source Measure

To GPIB Using

Sweep API

MAXIMUM SINGLE MEASUREMENT RATES (operations per second) FOR 60Hz (50Hz):

A/D Converter

Speed Trigger Origin

0.001 NPLC Internal 1900 (1800) 1400 (1400) 1400 (1400)

0.01 NPLC Internal 1450 (140 0) 1200 (1100) 1100 (1100)

0.1 NPLC Internal 450 (390) 425 (370) 425 (375)

1.0 NPL C Inte rn al 58 (4 8) 57 (48) 57 (48)

Series 2600A specifications

MAXIMUM MEASUREMENT RANGE CHANGE RATE: <150µs for ranges >10µA, typical. When changing to or from a range ≥1A, maximum rate is <450µs, typical. MAXIMUM SOURCE RANGE CHA NGE RAT E: <2.5ms for ranges >10µA, typical. When changing to or from a range ≥1A, maximum rate is <5.2ms, typical. MAXIMUM SOURCE FUNCTION CHANGE RATE: <1ms, typical. COMMA ND PROCESSING TIME: Maximum time required for the output to begin to change following the receipt of the smux.source.levelv or smux.source.leveli command. <1ms typical.

NOTES

1. Tests per formed with a 2602 A, 2612A, or 2636A on Cha nnel A using the following equipment: PC Hardware (Pentium® 4 2.4GHz, 512MB R AM, National Instruments PCI- GPIB). Driver (NI-486.2 Version 2.2 PCI-GPIB). Software

2. Exclude current measurement ranges less than 1m A.

3. 2635A/2636A with default measurement del ays and fi lters disabled.

(Microsoft

Windows® 2000, Microsof t Visual Studio 2005, VISA version 4.1).

Measure

To GP IB

Source Measure

To GP IB

Source Measure

Pass/Fail

To GP IB

Series 2600A specifications

TRIGGERING AND SYNCHRONIZATION SPECIFICATIONS

TRIGGER ING:

Trigger in to trigger out: 0.5µs, typical. Trigger in to source change: Trigger Timer accuracy: ±2µs, typical. Source change

SYNCHRONIZATION:

Single-node synchronized source change: Multi-node synchronized source change:

NOTES

4. Fixed source range, with no polarity change.

after L XI Trigger: 280µs, typical.

10 µs, typical.

<0.5µs, typical.

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Series 2600A

System SourceMeter® Instruments

Applicable to Models 2601A, 2602A, 2611A, 2612A, 2635A, and 2636A. See page 28 for Model 2651A speciﬁ cations.

SUPPLEMENTAL INFORMATION

FRONT PANEL INTERFACE: Two-line vacuum fluorescent display (V FD) with keypad and rotary knob.

Display:

• Show error messages and user defined messages

• Display source and limit settings

• Show current and voltage measurements

• View measurements stored in dedicated reading buffers

Keypad Operations:

• Change host interface settings

• Save and restore instrument setups

• Load and run factory and user defined test scripts (i.e. sequences) that prompt for input

and send results to the display

• Store measurements into dedicated reading buf fers

PROGRA MMING: Embedded Test Script Processor (TSP) accessible from any host interface. Responds

to individual instr ument control commands. Responds to high speed test scripts comprised of instrument control commands and Test Script Language (TSL) statements (e.g. branching, looping, math, etc.). Able to execute high speed test scripts stored in memory without host intervention.

Minimum Memory Available: 16MB (approximately 250,000 lines of TSL code). Test Scr ipt Bu ilder: Integrated development environment for building, running, and managing

TSP scripts. Includes an instrument console for communicating with any TSP enabled instrument in an interactive manner. Requires:

• VISA (NI-VISA included on CD)

• Microsoft .NET Framework (included on CD)

• Keithley I/O Layer (included on CD)

• Pentium III 800MHz or faster personal computer

• Microsoft Windows 98, NT, 2000, or XP

Software Interface: TSP Express (embedded), Direct GPIB/V ISA, READ/ WRITE for VB, VC/C++,

Series 2600A specifications

LabVIEW, LabWindows/CVI, etc.

REA DING BUFFERS: Dedicated storage area(s) reserved for measurement data. Reading buf fers

are arrays of measurement elements. Each element can hold the following items:

• Measurement

• Measurement status

• Timestamp

• Source setting (at the time the measurement was taken)

• Range information Two reading buffers are reserved for each SourceMeter channel. Reading buffers can be filled using the front panel STORE key and retrieved using the RECALL key or host interface.

Buffer Size, with timestamp and source setting: >60,000 samples. Buffer Size, without timestamp and source setting: >140,000 samples.

SYSTEM EXPANSION: The TSP-Link expansion interface allows TSP enabled instruments to

trigger and communicate with each other. See figure below:

Each SourceMeter instrument has two TSP-Link connectors to facilitate chaining instruments

together.

• Once SourceMeter instruments are interconnected via TSP-Link, a computer can access all of the resources of each SourceMeter instrument via the host interface of any SourceMeter instrument.

• A maximum of 32 TSP-Link nodes can be interconnected. Each SourceMeter instrument consumes one TSP-Link node.

TIMER: Free running 47-bit counter with 1MHz clock input. Reset each time instrument powers

up. Rolls over every 4 years.

Timestamp: TIMER value automatically saved when each measurement is triggered. Resolution: 1µs. Accuracy: ±100pp m.

Series 2600A specifications

Model 2602A/2612A rear panel (Single channels 2601A, 2611A, 2635A not shown)

1.888.KEITHLEY

(U.S. only)

www.keithley.com

Model 2636A rear panel

SMU INSTRUMENTS

A GREATER ME ASURE OF C ONFIDENC E

Keithley Instruments 2602A Data Sheet

Specifications and Main Features

Frequently Asked Questions

User Manual