Keithley Instruments 2602 Data Sheet

Page 1

Series 2600 System SourceMeter

• Combines a precision power

supply, true current source, DMM, arbitrary waveform generator, V or I pulse generator with measurement, electronic load, and trigger controller—all in one instrument

• Contact check function ensures

high integrity measurements

• 10,000 readings/s and 5,500

source-measure points/s to memory provide faster test times

• The embedded Test Script

Processor (TSP™) offers unparalleled system automation and two to four times the test throughput of competitive products in I-V functional test applications

• Family of products offers wide

dynamic range: 1pA to 10A and 1µV to 200V

• TSP-Link™ master/slave

connection seamlessly inte-

Scalable, integrated source and measure solutions

grates multiple Series 2600 SourceMeter channels into a system that can be programmed and controlled as a single instrument

• Free Test Script Builder software

simplifies creating powerful test scripts for programming custom test functions

• Free LabTracer

2.0 software available for curve tracing and fast, easy startup

• Each SourceMeter channel is

electrically isolated for high integrity measurements and wiring flexibility

• Industry’s highest SMU rack

density for automated test applications

Multi-Channel I-V Test Solutions

Series 2600 System SourceMeter instruments offer electronic component and semiconductor device manufacturers a scalable, high throughput, highly cost-effective solution for precision DC, pulse, and low frequency AC sourcemeasure testing. Building on the tightly integrated source-measure technology originally developed for Keithley’s popular Series 2400 SourceMeter line, Series 2600 instruments provide from two to four times the test speed of competitive solutions in I-V functional test applications. They also offer higher source-measure channel density and a significantly lower cost of ownership than competing products. The analog-to-digital converters provide simultaneous I and V measurements in less than 100µs (10,000 rdgs/s) and source-measure sweep speeds of less than 200µs per point (5,500 points/s). This high speed source-measure capability, plus advanced automation features and time-saving software tools make Series 2600 SourceMeter instruments an ideal solution for I-V testing of a wide range of devices.

System scalability without a mainframe

Series 2600 instruments incorporate an innovative technology that makes it possible to create multi-channel I-V test systems economically, but without sacrificing test throughput. TSP-Link is a high speed system expansion interface, which test system builders can use to connect multiple

Master

TSP-Link makes it easy to scale the system's channel count to match the application.

2 Channel System

SMU A SMU B

2602

3 Channel System

SMU A SMU B

2602

SMU C

Slave

2601

16+ Channel System

SMU A SMU B

2602

SMU C

Slave

SMU D

2602

Slave

SMU E

2601

GPIB

TSP-Link In

TSP-Link Out

GPIB

TSP-Link In

TSP-Link Out

GPIB

TSP-Link In

TSP-Link Out

GPIB

TSP-Link In

TSP-Link Out

GPIB

TSP-Link In

TSP-Link Out

GPIB

TSP-Link In

TSP-Link Out

•

To PC

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Page 2

Series 2600 System SourceMeter

Multi-Channel I-V Test Solutions

Series 2600 instruments in a master/slave configuration. Once connected, all the Series 2600 instru-

Ordering Information

2601 Single-channel System

2602 Dual-channel System

2611 Single-channel System

2612 Dual-channel System

Accessories Supplied

2600-IAC Safety Interlock Adapter Connector (one supplied with 2611/2612)

Test Script Builder software LabTracer Software (downloadable) IVI/VISA drivers for Visual Basic, VC/C++,

LabVIEW, TestPoint, and LabWindows™/CVI Mating screw terminal connectors with

strain relief and covers (2600-Kit) TSP-Link cable (CA-180-3A)

Factory and custom TSP test scripts

The Test Script Processor is programmed with a simple BASIC-style programming language that runs in real time on the instrument. Keithley provides built-in test scripts for:

• Sweeping

• Pulsing

• Waveform generation

• Common component tests like binary search, V current/voltage)

A number of test scripts are included in the instrument, while others can be downloaded at no charge from www.keithley. com. These pre-written factory test scripts can be used as provided or easily customized for a given application, so production users can get their systems up and running faster than ever before.

Users can also create custom test scripts in several different ways, including a programming tool called Test Script Builder. Custom scripts can be downloaded from the PC to the master SourceMeter unit and saved in non-volatile memory. All four models provide 16 megabytes of nonvolatile memory for storing up to 50,000 lines of TSP code and more than 100,000 readings.

SourceMeter Instrument (High Current)

SourceMeter Instrument (200V)

, VTH, LIV (light intensity/

ments in a system can be programmed and operated under the control of the master unit, just as if they were housed in the same chassis. By eliminating the need for a chassis/mainframe, the TSP-Link provides virtually unlimited flexibility to scale a test system’s channel count up or down as the application requires, while ensuring seamless integration.

New capabilities for increasing test speed and lowering test cost

The Test Script Processor (TSP)

Any Series 2600-based system can run high speed, embedded test scripts on the master unit’s Test Script Processor (TSP), the other major new technology on which the Series 2600 is based. The test sequence is processed and run on the embedded computer in the instrument, rather than from an external PC controller, so delays due to GPIB traffic congestion are eliminated. TSP test scripts allow throughput gains of up to 10× over equivalent PC-based programs controlling the same instruments via GPIB. TSP test scripts can be loaded and run from the front panel or over the system’s GPIB interface. A single TSP test script, running on the master unit, can control all the SourceMeter channels in the system and acquire data from any Series 2600 instrument connected to the TSP-Link, which supports connections for up to 64 Series 2600 instruments.

TSP for advanced automation

A Series 2600-based system can stand alone as a complete measurement and automation solution for semiconductor device or component testing, with the master unit controlling sourcing, measuring, pass/fail decisions, test sequence flow control, binning, and the component handler or prober. In contrast with existing embedded test sequencers for instrumentation, the TSP test scripts offer far greater programming flexibility, including support for:

• Instr ument command queuing

• Modular subroutines with passable parameters

• Pass/fail and limit testing

• A wide range of math operations

• Flexible branching and looping capability

• Flexible external triggering

• Intelligent digital I/O read and write capability

• RS-232 communication

ACCESSORIES AVAILABLE

CABLES AND CONNECTORS

2600-BAN Banana Test Leads/Adapter Cable. For a single

Series 2600 SMU channel

2600-KIT Extra screw terminal connector, strain relief, and

cover for a single SourceMeter channel (one supplied with 2601/2611, two with 2602/2612)

2600-TRIAX Triax Adapter. For a single Series 2600 Source-

Meter (two needed for use with 2602/2612)

7078-TRX-* 3-Slot, Low Noise Triax Cable. For use with

2600-TRIAX Adapter

8606 High Performance Modular Probe Kit. For use

with 2600-BAN

SC-200 Shielded Twisted Pair Cable. Recommended for

general-purpose use with Series 2600 System SourceMeter instruments

2600-IAC Safety Interlock Adapter Connector (one supplied

with 2611/2612)

DIGITAL I/O, TRIGGER LINK, AND TPS-LINK

2600-TLINK Digital I/O to TLINK Adapter Cable, 1m CA-126-1 Digital I/O and Trigger Cable, 1.5m CA-180-3A CAT5 Crossover Cable for TSP-Link (one supplied)

Scalable, integrated source and measure solutions

GPIB INTERFACES AND CABLES

7007-1 Double Shielded GPIB Cable, 1m (3.3 ft.) 7007-2 Double Shielded GPIB Cable, 2m (6.6 ft.) KPCI-488LP IEEE-488 Interface/Controller for the PCI Bus KPXI-488 IEEE-488 Interface Board for the PXI Bus KUSB-488A IEEE-488 USB-to-GPIB Interface Adapter

SWITCHING

7002-HD High Density Switch Mainframe 7002-HD-MTX1 Differential 6×32 Matrix Card 7002-HD-MUX1 Differential Quad 1×40 Multiplexer Card

RACK MOUNT KITS

4299-1 Single Rack Mount Kit with front and rear support 4299-2 Dual Rack Mount Kit with front and rear support

SOFTWARE

LabTracer™ 2.0 Curve Tracing Software (downloadable)

EXTENDED WARRANTIES

2601-EW 1 Year Extended Warranty for Model 2601 2602-EW 1 Year Extended Warranty for Model 2602 2611-EW 1 Year Extended Warranty for Model 2611 2612-EW 1 Year Extended Warranty for Model 2612

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Page 3

Series 2600

FeedbackSource

Series vs. parallel ranging topologies

+3A

+1A

+6V–6V

–1A

–3A

Models 2601 and 2602 I-V capability

Scalable, integrated source and measure solutions

+10A

+1.5A +1A

+0.1A

–5V +5V

+20V–20V

System SourceMeter Multi-Channel I-V Test Solutions

Third-generation SMU design ensures faster test times

The Series 2600's new SMU design enhances test speed in several ways. For example, while earlier designs used a parallel current ranging topology, the Series 2600 uses a series ranging topology (patent pending), which provides faster and smoother range changes and outputs that settle more

FeedbackSource

+40V–40V

+200V–200V

quickly. It also allows the current output limit to be programmed independently of the measurement current range for fast charging of capacitive loads and more intuitive operation during bench use.

Each Series 2600 SourceMeter channel offers a highly flexible, fourquadrant source coupled with precision voltage and current meters/ limiters. Each channel can be configured as a:

• Precision power supply (up to 200V and 3A DC/10A pulsed output with 1pA readback resolution)

• True current source

• DMM (DCV, DCI, ohms, power, with 5

⁄2-digit resolution)

• Power V or I pulse generator (Pulse width: 200µs and longer—source and measure)

• Power V or I waveform generator (20-point sine wave up to 400Hz in a TSP test script)

• Electronic load (with sink mode capability)

High speed and precision A/Ds with simultaneous source-readback

All Series 2600 instruments provide four-quadrant operation and can be connected in series or in parallel to extend their dynamic range. In the first and third quadrants, they operate as a source, delivering power to a load. In the second and fourth quadrants, they operate as a sink, dissipating power internally. They measure voltage and current simultaneously with up to 5

⁄2-digit resolution, and they display voltage, current, resist-

ance, or power readings. Two analog-to-digital converters per channel (one for I, one for V) can run

simultaneously, providing precise source-readback without sacrificing test throughput. These A/D converters offer the flexibility of programmable integration rates, allowing the user to optimize for either high speed (>10,000 rdgs/s at 0.001 NPLC setting) or for high resolution (up to 24 bits at 10 NPLC setting) to make high accuracy measurements.

Models 2611 and 2612 I-V capability

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–0.1A

–1A –1.5A

–10A

Digital I/O Interface

A back panel port on every Series 2600 instrument provides 14 bits of uni-

DC Pulse Mode,

duty cycle limited

versal digital I/O to link the instrument to a variety of popular handlers for sorting and binning components after testing. These I/O lines are also backward-compatible with Keithley’s earlier Trigger Link instrument triggering technology. These lines simplify integrating Series 2600 instr uments into systems that employ other external instrumentation, including Series 2400 SourceMeter instruments, Series 7000 switch mainframes, and Series 2700 Integra data acquisition/multimeter systems.

Built-in Contact Check Function

The Contact Check function makes it simple to verify good connections quickly and easily before an automated test sequence begins. This eliminates measurement errors and false product failures associated with contact fatigue, breakage, contamination, loose or broken connection, relay failures, etc.

A GREATER MEASURE OF CONFIDENCE

Page 4

Series 2600

System SourceMeter Multi-Channel I-V Test Solutions

Graphical instrument setup. LabTracer 2.0 supports up to eight Series 2600 SourceMeter channels. Model 2400 and Model 2410 SourceMeter instruments are also supported for extended voltage capability. Dropdown menus in LabTracer 2.0’s instrument setup window allow configuring any channel of a SourceMeter instrument for fixed point or sweeping operation. Once the instrument is configured, a single key press is all it takes to execute a test.

Spanning I-V test applications from R&D to functional test

The Series 2600 SourceMeter Instruments provide simple-to-use yet powerful solutions for R&D testing. At the same time, they offer the speed and reliability needed for volume production testing.

High power and simplicity for R&D applications

In R&D and device characterization environments, Series 2600 instruments offer high testing versatility for both interactive and automated testing. The free downloadable LabTracer 2.0 software allows users to configure and control up to eight Series 2600 or 2400 SourceMeter channels quickly and easily for curve tracing or device characterization. It provides a simple graphical user interface for setup, control, data acquisition, and graphing of DUT data from SourceMeter instruments. When used together, LabTracer and SourceMeter instruments offer lab users a powerful, easy-touse, and economical alternative to chassis-based solutions.

Once a test is complete, data is displayed in the spreadsheet panel and graphing panel. Measurement data can be manipulated in the spreadsheet by applying a formula to the results. For more detailed analysis, data can also be exported to Microsoft paste.

Excel with a simple cut and

Scalable, integrated source and measure solutions

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Page 5

Series 2600

System SourceMeter Multi-Channel I-V Test Solutions

TYPICAL APPLICATIONS

• I-V functional test and characterization of a wide range of devices, including:

- Discrete and passive components

- Two-leaded – Resistors, disk drive heads, metal oxide

varistors (MOVs), diodes, zener diodes, sensors, capacitors, thermistors

- Three-leaded – Small signal bipolar junction transistors

(BJTs), field-effect transistors (FETs), and more

- Parallel test – Two- and three-leaded component arrays

- Simple ICs – Optos, drivers, switches, sensors

• Integrated devices – Small Scale Integrated (SSI) and Large Scale Integrated (LSI).

- Analog ICs

- Radio frequency integrated circuits (RFICs)

- Application specific integrated circuits (ASICs)

- System on a chip (SOC) devices

• Optoelectronic devices such as light-emitting diodes (LEDs), laser diodes, high brightness LEDs (HBLEDs), vertical cavity surface-emitting lasers (VCSELs), displays

• R&D and device characterization of these types of devices

Scalable, integrated source and measure solutions

Dramatic throughput improvements for production test

Series 2600 instruments help component manufacturers improve their test throughput dramatically, as well as provide test solutions that can handle today’s devices, which often have higher pin counts and more analog circuitry than earlier designs. In the past, manufacturers have been forced by the lack of optimized test solutions for multi-channel source-measure applications to choose between bulky, expensive mainframe-based systems, slow instrument-based systems employing PC control, or fast instrumentbased systems that require complex development. The Series 2600 offers:

• The highest density available in any SMU-based system to address growing pin counts.

• The industry’s fastest throughput, which helps reduce the cost of test. The speed of the onboard processor and TSP test scripts, combined with the tight triggering synchronization offered by the TSP-Link bus, makes high speed parallel testing practical.

• A lower capital investment. By eliminating the need for a mainframe/ chassis, they allow test engineers to configure a readily scalable system at a significantly lower cost per channel than other solutions.

Test Script Builder software

Test Script Builder is a free software tool that is provided with all Series 2600 SourceMeter instruments to help users create, modify, debug, and store TSP test scripts. It provides a project/file manager window to store and organize test scripts, a text-sensitive program editor (like Visual Basic) to create and modify test TSP code, and an immediate instrument control window to send GPIB commands and receive data from the instrument. The immediate window allows viewing the output of a given test script and simplifies debugging.

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Store and organize test scripts in the file manager window.

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Create and modify test TSP code in the context sensitive editor window.

The immediate window displays test script output and assists in debugging.

Page 6

2601

System SourceMeter

2602

Multi-Channel I-V Test Solutions

SPECIFICATION CONDITIONS

This document contains specifications and supplemental information for the Models 2601 and 2602. Specifications are the standards against which the Models 2601 and 2602 are tested. Upon leaving the factory the 2601 and 2602 meet these specifications. Supplemental and typical values are nonwarranted, apply at 23°C, and are provided solely as useful information.

The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2601 and

2602) or SourceMeter CHANNEL B (2602) terminals under the following conditions:

1. 23°C ± 5°C, <70% relative humidity.

2. After 2 hour warm-up.

3. Speed normal (1 NPLC).

4. A/D auto-zero enabled.

5. Remote sense operation or properly zeroed local operation.

6. Calibration period = 1 year.

SOURCE SPECIFICATIONS

VOLTAGE PROGRAMMING ACCURACY

RANGE

100.000 mV 5µV 0.02% + 250 µV 20 µV

1.00000 V 50 µV 0.02% + 400 µV 50 µV

6.00000 V 50 µV 0.02% + 1.8 mV 100 µV

40.0000 V 500 µV 0.02% + 12 mV 500 µV

TEMPERATURE COEFFICIENT (0°–18°C & 28°–50°C): ±(0.15 × accuracy specification)/°C. MAXIMUM OUTPUT POWER AND SOURCE/SINK LIMITS

@ ±1.0A, ±6.06V @ ±3.0A, four quadrant source or sink operation.

VOLTAGE REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV). NOISE 10Hz–20MHz (peak-peak): 25mV typical into a resistive load. CURRENT LIMIT/COMPLIANCE

value is 10nA. Accuracy same as current source.

OVERSHOOT: <±(0.1% + 10mV) typical (step size = 10% to 90% of range, resistive load, maximum

current limit/compliance).

GUARD OFFSET VOLTAGE: <10mV typical (Iout ≤ 100mA).

PROGRAMMING

RESOLUTION

: Bipolar current limit (compliance) set with single value. Minimum

CURRENT PROGRAMMING ACCURACY

RANGE

100.000 nA 1 pA 0.06% + 100 pA 5 pA

1.00000 µA 10 pA 0.03% + 600 pA 25 pA

10.0000 µA 100 pA 0.03% + 2 nA 50 pA

100.000 µA 1 nA 0.03% + 30 nA 3 nA

1.00000 mA 10 nA 0.03% + 200 nA 5 nA

10.0000 mA 100 nA 0.03% + 3 µA 200 nA

100.000 mA 1 µA 0.03% + 20 µA 500 nA

1.00000 A

3.00000 A

TEMPERATURE COEFFICIENT (0°–18°C & 28°–50°C): ±(0.15 × accuracy specification)/°C. MAXIMUM OUTPUT POWER AND SOURCE/SINK LIMITS

@ ±40.0V, ±3.03A @ ±6.0V, four quadrant source or sink operation.

CURRENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA). VOLTAGE LIMIT/COMPLIANCE

Minimum value is 10mV. Accuracy same as voltage source.

OVERSHOOT:<0.1% typical (step size = 10% to 90% of range, resistive load; see CURRENT SOURCE

OUTPUT SETTLING TIME for additional test conditions).

PROGRAMMING

RESOLUTION

2 2

10 µA 0.05% + 900 µ A 60 µA 10 µA 0.06% + 1.5 mA 150 µA

: Bipolar voltage limit (compliance) set with a single value.

ACCURACY (1 Year)

23°C ±5°C

±(% rdg. + volts)

: 40.4W per channel maximum. ±40.4V

ACCURACY (1 Year)

23°C ±5°C

±(% rdg. + amps)

: 40.4W per channel maximum. ±1.01A

TYPICAL NOISE

(peak-peak)

0.1Hz–10Hz

TYPICAL NOISE

(peak-peak)

0.1Hz–10Hz

ADDITIONAL SOURCE SPECIFICATIONS

TRANSIENT RESPONSE TIME: <70µs for the output to recover to 0.1% for a 10% to 90% step

change in load.

VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach 0.1% of final value, when

changing from 10% to 90% of range, after source level command is processed on a fixed range.

100mV, 1V R anges: <50µs typical. 6V Range: <100µs typical. 40V Range: <150µs typical.

CURRENT SOURCE OUTPUT SETTLING TIME: Time required to reach 0.1% of final value, when

changing from 10% to 90% of range, after source level command is processed on a fixed range. Values below for Iout · Rload = 2V unless noted.

3A–10mA Ranges: <80µs typical (current less than 2.5A, Rload >1.5Ω). 1mA Range: <100µs typical. 100µA Range: <150µs typical. 10µA Range: <500µs typical. 1µA Range: <2.5ms typical. 100nA Range: <25ms typical.

DC FLOATING VOLTAGE: Output can be floated up to ±250VDC from chassis ground. REMOTE SENSE OPERATING RANGE

Maximum voltage between HI and SENSE HI = 3V. Maximum voltage between LO and SENSE LO = 3V.

VOLTAGE OUTPUT HEADROOM:

40V Range: Max. output voltage = 42V – total voltage drop across source leads (maximum 1Ω per

source lead).

6V Range: Max. output voltage = 8V – total voltage drop across source leads.

OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in

standby mode.

VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: Overshoot into a 100kΩ load, 20MHz BW,

300mV typical.

CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% + 300mV/Rload of larger range typical.

(See CURRENT SOURCE OUTPUT SETTLING TIME for additional test conditions.)

NOTES

1. Add 50µV to source accuracy specifications per volt of HI lead drop.

2. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer to Section 8 – Operating Boundaries in the Series 2600 Reference Manual for additional power derating information.

3. For sink mode operation (quadrants II and IV), add 12% of limit range and ±0.02% of limit setting to corresponding current limit accuracy specifications. For 1A range add an additional 40mA of uncertainty.

4. For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to corresponding voltage source specification. For 100mV range add an additional 60mV of uncertainty.

5. Add 150µs when measuring on the 1A range.

Series 2600 specifications

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Page 7

2601

System SourceMeter

2602

Multi-Channel I-V Test Solutions

METER SPECIFICATIONS

VOLTAGE MEASUREMENT ACCURACY

RANGE

100.000 mV 1 µV

1.00000 V 10 µV

6.00000 V 10 µV

40.0000 V 100 µV

TEMPERATURE COEFFICIENT (0°–18°C & 28°–50°C): ±(0.15 × accuracy specification)/°C.

DISPLAY

RESOLUTION

CURRENT MEASUREMENT ACCURACY

RANGE

100.000 nA 1 pA <1 mV 0.05 % + 100 pA

1.00000 µA 10 pA <1 mV 0.025% + 300 pA

10.0000 µA 100 pA <1 mV 0.025% + 1.5 nA

100.000 µA 1 nA <1 mV 0.02 % + 25 nA

1.00000 mA 10 nA <1 mV 0.02 % + 200 nA

10.0000 mA 100 nA <1 mV 0.02 % + 2.5 µ A

100.000 mA 1 µA <1 mV 0.02 % + 20 µA

1.00000 A 10 µA <1 mV 0.03 % + 1.5 mA

Series 2600 specifications

3.00000 A 10 µA <1 mV 0.05 % + 3.5 mA

TEMPERATURE COEFFICIENT (0°–18°C & 28°–50°C): ±(0.15 × accuracy specification)/°C.

CONTACT CHECK

SPEED

FAST 1 (1.2) ms 5% + 10 MEDIUM 4 (5) ms 5% + 1 SLOW 36 (42) ms 5% + 0.3

DISPLAY

RESOLUTION

MAXIMUM MEASUREMENT

TIME TO MEMORY FOR 60Hz (50Hz)

ADDITIONAL METER SPECIFICATIONS

LOAD IMPEDANCE: Stable into 10,000pF typical. COMMON MODE VOLTAGE: 250VDC. COMMON MODE ISOLATION: >1GΩ, <4500pF. OVERRANGE: 101% of source range, 102% of measure range. MAXIMUM SENSE LEAD RESISTANCE:1kΩ for rated accuracy. SENSE INPUT IMPEDANCE: >10GΩ.

NOTES

1. Add 50µV to source accuracy specifications per volt of HI lead drop.

2. Four-wire remote sense only.

3. Applies when in single channel display mode.

4. Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.

INPUT

RESISTANCE

>10 GΩ >10 GΩ >10 GΩ >10 GΩ

VOLTAGE BURDEN

ACCURACY (1 Year)

±(% rdg. + volts)

0.015% + 150 µV

0.015% + 200 µV

0.015% + 1 mV

0.015% + 8 mV

ACCURACY (1 Year)

±(% rdg. + amps)

ACCURACY (1 Year)

23°C ±5°C

±(%rdg. + ohms)

23°C ±5°C

GENERAL

HOST INTERFACES: Computer control interfaces. IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model

topology.

RS-232: Baud rates from 300 bps to 115200 bps. Programmable number of data bits, parity

type, and flow control (RTS/CTS hardware or none). When not programmed as the active host interface, the SourceMeter can use the RS-232 interface to control other instrumentation.

EXPANSION INTERFACE: The TSP-Link expansion interface allows TSP enabled instruments to

trigger and communicate with each other.

Cable Type: Category 5e or higher LAN crossover cable. Length: 3 meters maximum between each TSP enabled instrument.

DIGITAL I/O INTERFACE:

Connector: 25-pin female D. Input/Output Pins: 14 open drain I/O bits. Absolute Maximum Input Voltage:5.25V. Absolute Minimum Input Voltage:–0.25V. Maximum Logic Low Input Voltage: 0.7V, +850µA max. Minimum Logic High Input Voltage:2.1V, +570µA. Maximum Source Current (flowing out of Digital I/O bit): +960µA. Maximum Sink Current @ Maximum Logic Low Voltage (0.7V): –5.0mA. Absolute Maximum Sink Current (flowing into Digital I/O pin): –11mA. 5V Power Supply Pin: Limited to 600mA, solid state fuse protected.

600mA

Solid State

+5V Pin

(on DIGITAL I/O

connector)

Digital I/O Pin

(on DIGITAL I/O

connector)

GND Pin

(on DIGITAL I/O

connector)

Output Enable Pin: Active high input pulled down internally to ground with 10kΩ resistor.

When the Output Enable input function has been activated, each SourceMeter channel will not turn on unless the Output Enable pin is driven to >2.1V (nominal current = 2.1V / 10kΩ = 210µA).

POWER SUPPLY: 100V to 240VAC, 50–60Hz (manual setting), 240VAmax. COOLING: Forced air. Side intake and rear exhaust. One side must be unobstructed when rack

mounted.

WARRANTY: 1 year. EMC: Conforms to European Union Directive 89/336/EEC, EN 61326-1. SAFETY: Conforms to European Union Directive 73/23/EEC, EN 61010-1, and UL 61010-1. DIMENSIONS: 89mm high × 213mm wide × 460mm deep (3

Configuration (with handle & feet): 104mm high × 238mm wide × 460mm deep (4

⁄8in × 171⁄2in).

WEIGHT: 2601:4.75kg (10.4 lbs). 2602: 5.50kg (12.0 lbs). ENVIRONMENT: For indoor use only.

Altitude: Maximum 2000 meters above sea level. Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C. Storage: –25°C to 65°C.

Fuse

100Ω

Rear Panel

5.1kΩ

+5VDC

Read by firmware

Written by firmware

⁄2in × 83⁄8in × 171⁄2in). Bench

⁄8in ×

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Page 8

2611

+1.5A

+10A

–10A

–1A

+1A

+0.1A –0.1A

–1.5A

+200V+5V

–5V

+20V–20V 0V

+180V

–180V–200V

System SourceMeter

2612

SPECIFICATION CONDITIONS

This document contains specifications and supplemental information for the Models 2611 and 2612. Specifications are the standards against which the Models 2611 and 2612 are tested. Upon leaving the factory the 2611 and 2612 meet these specifications. Supplemental and typical values are nonwarranted, apply at 23°C, and are provided solely as useful information.

The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2611 and

2612) or SourceMeter CHANNEL B (2612) terminals under the following conditions:

1. 23°C ± 5°C, <70% relative humidity.

2. After 2 hour warm-up.

3. Speed normal (1 NPLC).

4. A/D auto-zero enabled.

5. Remote sense operation or properly zeroed local sense operation.

6. Calibration period = 1 year.

SOURCE SPECIFICATIONS

VOLTAGE PROGRAMMING ACCURACY

RANGE

200.000 mV 5 µV 0.02% + 375 µV 20 µV

2.00000 V 50 µV 0.02% + 600 µV 50 µV

20.0000 V 500 µV 0.02% + 5 mV 300 µV

200.000 V 5mV 0.02% + 50 mV 2mV

TEMPERATURE COEFFICIENT (0°–18°C & 28°–50°C): ±(0.15 × accuracy specification)/°C. MAXIMUM OUTPUT POWER AND SOURCE/SINK LIMITS

±20.2V @ ±1.515A, ±202V @ ±101mA, four quadrant source or sink operation.

VOLTAGE REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV). NOISE 10Hz–20MHz: <5mV RMS typical, 20V range, 1A limit. CURRENT LIMIT/COMPLIANCE

value is 10nA. Accuracy same as current source.

OVERSHOOT: <±(0.1% + 10mV) typical (step size = 10% to 90% of range, resistive load, maximum

current limit/compliance).

GUARD OFFSET VOLTAGE: <4mV (current ≤10mA).

PROGRAMMING

RESOLUTION

: Bipolar current limit (compliance) set with single value. Minimum

CURRENT PROGRAMMING ACCURACY

RANGE

100.000 nA 2 pA 0.06% + 100 pA 5 pA

1.00000 µA 20 pA 0.03% + 800 pA 25 pA

10.0000 µA 200 pA 0.03% + 5 nA 60 pA

100.000 µA 2 nA 0.03% + 60 nA 3 nA

1.00000 mA 20 nA 0.03% + 300 nA 6 nA

10.0000 mA 200 nA 0.03% + 6 µ A 200 nA

100.000 mA 2 µA 0.03% + 30 µA 600 nA

1.00000 A

1.50000 A

10.0000 A

TEMPERATURE COEFFICIENT (0°–18°C & 28°–50°C): ±(0.15 × accuracy specification)/°C. MAXIMUM OUTPUT POWER AND SOURCE/SINK LIMITS

±1.515A @ ±20.2V, ±101mA @ ±202V, four quadrant source or sink operation.

CURRENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA). VOLTAGE LIMIT/COMPLIANCE

Minimum value is 10mV. Accuracy same as voltage source.

OVERSHOOT:<0.1% typical (step size = 10% to 90% of range, resistive load; see CURRENT SOURCE

OUTPUT SETTLING TIME for additional test conditions).

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PROGRAMMING

RESOLUTION

2 2 2, 5

20 µA 0.05% + 1.8 mA 70 µA 50 µA 0.06% + 4 mA 150 µ A

200 µA 0.5 % + 40 mA

: Bipolar voltage limit (compliance) set with a single value.

ACCURACY (1 Year)

23°C ±5°C

±(% rdg. + volts)

ACCURACY (1 Year)

23°C ±5°C

±(% rdg. + amps)

Multi-Channel I-V Test Solutions

ADDITIONAL SOURCE SPECIFICATIONS

TRANSIENT RESPONSE TIME: <70µs for the output to recover to 0.1% for a 10% to 90% step

change in load.

VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach 0.1% of final value after

source level command is processed on a fixed range.

200mV, 2V R anges: <50µs typical. 20V Range: <100µs typical. 200V Range: <700µs typical.

CURRENT SOURCE OUTPUT SETTLING TIME: Time required to reach 0.1% of final value after source

level command is processed on a fixed range. Values below for Iout · Rload = 2V unless noted.

1.5A–1A Ranges: <120µs typical (Rload >6Ω). 100mA–10mA Ranges: <80µs typical. 1mA Range: <100µs typical. 100µA Range: <150µs typical.

NOISE

(peak-peak)

0.1Hz–10Hz

: 30.603W per channel maximum.

NOISE

(peak-peak)

0.1Hz–10Hz

: 30.603W per channel maximum.

DC FLOATING VOLTAGE: Output can be floated up to ±250VDC from chassis ground. REMOTE SENSE OPERATING RANGE

VOLTAGE OUTPUT HEADROOM:

200V Range: Max. output voltage = 202.3V – total voltage drop across source leads (maximum

1Ω per source lead).

20V Range: Max. output voltage = 23.3V – total voltage drop across source leads (maximum

1Ω per source lead).

OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in

standby mode.

VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: Overshoot into a 100kΩ load, 20MHz BW,

300mV typical.

CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% + 300mV/Rload + 60nA of larger range

typical. (See CURRENT SOURCE OUTPUT SETTLING TIME for additional test conditions.)

PULSE SPECIFICATIONS

REGION

MINIMUM PROGRAMMABLE PULSE WIDTH8:200µs. NOTE: Minimum pulse width for settled source

at a given I/V output and load can be longer than 200µs. See note 11 for typical settling times.

PULSE WIDTH PROGRAMMING RESOLUTION: 1µs. PULSE WIDTH PROGRAMMING ACCURACY TYPICAL PULSE WIDTH JITTER: 50µs.

MAXIMUM CURRENT

1 100 mA @ 200 V DC, no limit 100% 1 1.5 A @ 20 V DC, no limit 100% 2 1 A @ 180 V 8.5 ms 1%

3 4 10 A @ 5 V 1 ms 2.2%

1 A @ 200 V 2.2 ms 1%

: Maximum voltage between HI and SENSE HI = 3V.

Maximum voltage between LO and SENSE LO = 3V.

LIMIT

10µA Range: <500µs typical. 1µA Range: <2ms typical. 100nA Range: <20ms typical.

MAXIMUM PULSE

WIDTH

: ±25µs.

Series 2600 specifications

MAXIMUM DUTY

CYCLE

SOURCE AND MEASURE

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Page 9

2611

Pulse Level

Bias Level

Start t

off

90%

10%

off

10%

System SourceMeter

2612

Multi-Channel I-V Test Solutions

SOURCE SPECIFICATIONS (continued)

PULSE SPECIFICATIONS (continued)

NOTES

1. Add 50µV to source accuracy specifications per volt of HI lead drop.

4. For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to corresponding voltage source specification. For 200mV range add an additional 120mV of uncertainty.

5. 10A range accessible only in pulse mode.

6. Accuracy specifications do not include connector leakage. Derate accuracy by Vout/2E11 per °C when operating between 18°–28°C. Derate accuracy by Vout/2E11 + (0.15 * Vout/2E11) per °C when operating <18°C and >28°C.

7. 150mV under pulse conditions with compliance set to 1A.

8. Times measured from the start of pulse to the start of off-time; see figure below.

9. Thermally limited in sink mode (quadrants 2 and 4) and ambient temperatures above 30°C. See power equations in the reference manual for more information.

10. Voltage source operation with 1.5A current limit.

11. Typical performance for minimum settled pulse widths:

Series 2600 specifications

Source Value Load

5 V

20 V

180 V

200V (1.5A limit)

100 mA

1 A 1 A

10 A

Typical tests were performed using remote operation, 4W sense, Keithley 2600-BAN cables and best, fixed measurement range. For more information on pulse scripts, see the Series 2600 Reference Manual.

0.5 Ω 200 Ω 180 Ω 200 Ω 200 Ω

20 Ω

180 Ω

0.5 Ω

Source Settling

(% of range) Min. Pulse Width

1% 300 µs

0.2% 200 µs

0.2% 5ms

0.2% 1.5 ms 1% 200 µs 1% 500 µs

0.2% 5ms

0.5% 300 µs

METER SPECIFICATIONS

VOLTAGE MEASUREMENT ACCURACY

RANGE

200.000 mV 1µV

2.00000 V 10 µV

20.0000 V 100 µV

200.000 V 1mV

TEMPERATURE COEFFICIENT (0°–18°C & 28°–50°C): ±(0.15 × accuracy specification)/°C.

DISPLAY

RESOLUTION

CURRENT MEASUREMENT ACCURACY

RANGE

100.000 nA 1 pA <1 mV 0.05 % + 100 pA

1.00000 µA 10 pA <1 mV 0.025% + 500 pA

10.0000 µA 100 pA <1 mV 0.025% + 1.5 nA

100.000 µA 1 nA <1 mV 0.02 % + 25 nA

1.00000 mA 10 nA <1 mV 0.02 % + 200 nA

10.0000 mA 100 nA <1 mV 0.02 % + 2.5 µA

100.000 mA 1 µA <1 mV 0.02 % + 20 µA

1.00000 A 10 µA <1 mV 0.03 % + 1.5 mA

1.50000 A 10 µA <1 mV 0.05 % + 3.5 mA

10.0000 A

TEMPERATURE COEFFICIENT (0°–18°C & 28°–50°C): ±(0.15 × accuracy specification)/°C.

CONTACT CHECK

SPEED

FAST 1 (1.2) ms 5% + 10 MEDIUM 4 (5) ms 5% + 1 SLOW 36 (42) ms 5% + 0.3

DISPLAY

RESOLUTION

MAXIMUM MEASUREMENT

TIME TO MEMORY FOR 60Hz (50Hz)

100 µA <1 mV 0.4 % + 25 mA

1, 7

INPUT

RESISTANCE

>10 GΩ >10 GΩ >10 GΩ >10 GΩ

6, 7

VOLTAGE BURDEN

ACCURACY (1 Year)

±(% rdg. + volts)

0.015% + 225 µV

0.02 % +350 µV

0.015% + 5 mV

0.015% + 50 mV

ACCURACY (1 Year)

±(% rdg. + amps)

ACCURACY (1 Year)

23°C ±5°C

±(%rdg. + ohms)

23°C ±5°C

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ADDITIONAL METER SPECIFICATIONS

NOTES

1. Add 50µV to source accuracy specifications per volt of HI lead drop.

2. Four-wire remote sense only.

3. Applies when in single channel display mode.

4. Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.

5. 10A range accessible only in pulse mode.

6. De-rate accuracy by Vout/2E11 per °C when operating between 18°–28°C. Derate accuracy by Vout/2E11 + (0.15 * Vout/2E11) per °C when operating <18°C and >28°C.

7. De-rate accuracy specifications for NPLC setting <1 by increasing error term. Add appropriate % of range term using table below:

NPLC 200mV 2V–200V 100nA 1µA–100mA 1A–1.5A

Setting Range Ranges Range Ranges Ranges

0.1 0.01% 0.01% 0.01% 0.01% 0.01%

0.01 0.08% 0.07% 0.1 % 0.05% 0.05%

0.001 0.8 % 0.6 % 1 % 0.5 % 1.1 %

A GREATER MEASURE OF CONFIDENCE

Page 10

2611

10kΩ

Coil

Resistance

145Ω ±10%

Read by firmware

INTERLOCK Pin

(on DIGITAL I/O

connector)

Rear Panel

Chassis Ground

To output stage

+220V Supply –220V Supply

System SourceMeter

2612

Multi-Channel I-V Test Solutions

GENERAL

HOST INTERFACES: Computer control interfaces. IEEE-488: IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model topology. RS-232: Baud rates from 300 bps to 115200 bps. Programmable number of data bits, parity type, and flow control (RTS/CTS hard-

ware or none). When not programmed as the active host interface, the SourceMeter can use the RS-232 interface to control other instrumentation.

EXPANSION INTERFACE: The TSP-Link expansion interface allows TSP enabled instruments to trigger and communicate with

each other.

Cable Type: Category 5e or higher LAN crossover cable. Length: 3 meters maximum between each TSP enabled instrument.

DIGITAL I/O INTERFACE (see 2601/02 GENERAL specifications for circuit diagram):

insure 200V operation. This signal is pulled down to chassis ground with a 10kΩ resistor. 200V operation will be blocked when the INTERLOCK signal is <0.4V (absolute minimum of –0.4V). See figure below:

Series 2600 specifications

POWER SUPPLY: 100V to 240VAC, 50–60Hz (manual setting), 240VAmax. COOLING: Forced air. Side intake and rear exhaust. One side must be unobstructed when rack mounted. WARRANTY: 1 year. EMC: Conforms to European Union Directive 89/336/EEC, EN 61326-1. SAFETY: Conforms to European Union Directive 73/23/EEC, EN 61010-1, and UL 61010-1. DIMENSIONS: 89mm high × 213mm wide × 460mm deep (3

104mm high × 238mm wide × 460mm deep (4

WEIGHT: 2611:4.75kg (10.4 lbs). 2612: 5.50kg (12.0 lbs). ENVIRONMENT: For indoor use only.

Altitude: Maximum 2000 meters above sea level. Operating: 0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C. Storage: –25°C to 65°C.

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⁄2in × 83⁄8in × 171⁄2in). Bench Configuration (with handle & feet):

⁄8in × 93⁄8in × 171⁄2in).

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SOURCE AND MEASURE

Page 11

Series 2600

System SourceMeter Multi-Channel I-V Test Solutions

SPEED SPECIFICATIONS

MAXIMUM SWEEP OPERATION RATES (operations per second) FOR 60Hz (50Hz):

A/D CONVERTER

SPEED

0.001 NPLC Internal 10000 (10000) 8000 (8000) 5500 (5500) 3600 (3600) 4900 (4900) 3100 (3100)

0.001 NPLC Digital I/O 2700 (2650) 2100 (2100) 2300 (2300) 1900 (1875) 2200 (2150) 1800 (1775)

0.01 NPLC Internal 4000 (3500) 3600 (3200) 2750 (2700) 2300 (2100) 2800 (2500) 2100 (1975)

0.01 NPLC Digital I/O 1900 (1775) 1600 (1500) 1700 (1600) 1450 (1400) 1600 (1500) 1400 (1325)

0.1 NPLC Internal 565 (475) 555 (470) 540 (450) 510 (440) 535 (455) 505 (430)

0.1 NPLC Digital I/O 490 (420) 470 (405) 470 (410) 450 (390) 470 (400) 450 (390)

1.0 NPLC Internal 59 (49) 59 (49) 58 (49) 58 (48) 58 (49) 58 (48)

1.0 NPLC Digital I/O 58 (48) 58 (48) 58 (48) 57 (48) 57 (48) 57 (48)

TRIGGER ORIGIN

MEASURE

TO MEMORY

MEASURE

TO GPIB

SOURCE MEASURE

TO MEMORY

MAXIMUM SINGLE MEASUREMENT RATES (operations per second) FOR 60Hz (50Hz):

A/D CONVERTER

SPEED

0.001 NPLC Internal 1110 (1000) 880 (880) 840 (840)

0.01 NPLC Internal 950 (900) 780 (760) 730 (710)

0.1 NPLC Internal 390 (345) 355 (320) 340 (305)

1.0 NPLC Internal 57 (48) 56 (47) 56 (47)

MAXIMUM MEASUREMENT RANGE CHANGE RATE: >4500/second typical. When changing to or

Series 2600 specifications

from a range ≥1A, maximum rate is >2000/second typical.

MAXIMUM SOURCE RANGE CHANGE RATE: >400/second, typical. MAXIMUM SOURCE FUNCTION CHANGE RATE: >500/second, typical. EXTERNAL TRIGGER INPUT: The Digital I/O interface signals can be configured to behave as trigger

inputs.

Input Latency (time from trigger input to start of measurement or source change):

<150µs, typical.

Input Jitter: <100µs, typical.

COMMAND PROCESSING TIME: Maximum time required for the output to begin to change follow-

ing the receipt of the smux.source.levelv or smux.source.leveli command. <1ms typical.

TRIGGER ORIGIN

MEASURE

TO GPIB

SOURCE MEASURE

TO GPIB

SOURCE MEASURE

PASS/FAIL

TO GPIB

SOURCE MEASURE

TO GPIB

SOURCE MEASURE

PASS/FAIL

TO MEMORY

SOURCE MEASURE

PASS/FAIL

TO GPIB

NOTES

1. See the Speed Specifications Test Conditions Appendix in the Series 2600 Reference Manual for more information regarding test conditions.

Specifications are subject to change without notice. Rev. B

Model 2601/2611 Rear Panel

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Page 12

Series 2600

System SourceMeter Multi-Channel I-V Test Solutions

SUPPLEMENTAL INFORMATION

FRONT PANEL INTERFACE: 2-line vacuum fluorescent display (VFD) with keypad and rotary knob.

Display:

• Show error messages and user defined messages

• Display source and limit settings

• Show current and voltage measurements

• View measurements stored in non-volatile reading buffers

Keypad Operations:

• Change host interface settings

• Save and restore instr ument setups

• Load and r un factor y and user defined test scripts (i.e. sequences) that prompt for input and send results to the display

• Store measurements into non-volatile reading buffers

PROGRAMMING: Embedded Test Script Processor (TSP) accessible from any host interface. Responds

to individual instrument control commands. Responds to high speed test scripts comprised of instrument control commands and Test Script Language (TSL) statements (e.g. branching, looping, math, etc.). Able to execute high speed test scripts stored in memory without host intervention.

Minimum Memory Available: 3 Mbytes (approximately 50,000 lines of TSL code). Test Script Builder: Integrated Development Environment for building, running, and managing

TSP scripts. Includes an Instrument Console for communicating with any TSP enabled instrument in an interactive manner. Requires:

• VISA (NI-VISA included on CD)

• Microsoft .NET Framework (included on CD)

• Keithley I/O Layer (included on CD)

• Pentium III 800MHz or faster personal computer

• Microsoft Windows 98, NT, 2000, or XP

Drivers: IVI/VISA drivers for VB, VC/C++, LabVIEW, TestPoint, and LabWindows/CVI

READING BUFFERS: Non-volatile storage area(s) reserved for measurement data. Reading buffers are

arrays of measurement elements. Each element can hold the following items:

• Measurement

• Measurement status

• Timestamp

• Source setting (at the time the measurement was taken)

• R ange information Two reading buffers are reserved for each SourceMeter channel. Reading buffers can be filled using

the front panel STORE key and retrieved using the RECALL key or host interface.

Buffer Size, with timestamp and source setting: >50,000 samples. Buffer Size, without timestamp and source setting: >100,000 samples. Battery Backup: Lithium-ion battery backup. 30 days of non-volatile storage @ 23°C, and

>4 hours of charge time. 3 year battery life @ 23°C. 1.5 year battery life @ 50°C.

FACTORY TSPSCRIPTS: See SYSTEM EXPANSION: The TSP-Link expansion interface allows TSP enabled instr uments to trigger

and communicate with each other. See figure below:

Each SourceMeter has two TSP-Link connectors to facilitate chaining instruments together.

• Once SourceMeter instr uments are interconnected via TSP-Link, a computer can access all of the resources of each SourceMeter via the host interface of any SourceMeter.

• A maximum of 64 TSP-Link nodes can be interconnected. Each SourceMeter consumes one TSP-Link node.

TIMER: Free running 47 bit counter with 1MHz clock input. Reset each time instrument powers up.

Rolls over every 4 years.

Timestamp: TIMER value automatically saved when each measurement is triggered. Resolution: 1µs. Accuracy: 50ppm.

www.keithley.comfor Keithley-supported application-specific scripts.

Series 2600 specifications

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SOURCE AND MEASURE

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