Keithley Instruments 2400 Users Guide

Model 2400 SeriesSourceMeter

®

User’s Manual

A GREATER MEASURE OF CONFIDENCE

WARRANTY

Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a
period of 1 year from date of shipment.

Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables,
rechargeable batteries, diskettes, and documentation.

During the warranty period, we will, at our option, either repair or replace any product that proves to be
defective.

To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in
Cleveland, Ohio. You will be given prompt assistance and return instructions. Send the product, transportation
prepaid, to the indicated service facility. Repairs will be made and the product returned, transportation prepaid.
Repaired or replaced products are warranted for the balance of the original warranty period, or at least 90 days.

LIMITATION OF WARRANTY

This warranty does not apply to defects resulting from product modification without Keithley’s express written
consent, or misuse of any product or part. This warranty also does not apply to fuses, software, non­rechargeable batteries, damage from battery leakage, or problems arising from normal wear or failure to follow
instructions.

THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUD­ING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE.
THE REMEDIES PROVIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.

NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR
ANY DIRECT, INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF
THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS
BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAM­AGES SHALL INCLUDE, BUT ARE NOT LIMITED TO: COSTS OF REMOVAL AND INSTALLATION,
LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY PERSON, OR DAMAGE TO PROPERTY.

BELGIUM: Keithley Instruments B.V.
CHINA: Keithley Instruments China
FRANCE: Keithley Instruments Sarl
GERMANY: Keithley Instruments GmbH
GREAT BRITAIN: Keithley Instruments Ltd
INDIA: Keithley Instruments GmbH
ITALY: Keithley Instruments s.r.l.
NETHERLANDS: Keithley Instruments B.V.
SWITZERLAND: Keithley Instruments SA
TAIWAN: Keithley Instruments Taiwan

Bergensesteenweg 709 • B-1600 Sint-Pieters-Leeuw • 02/363 00 40 • Fax: [phone]

Yuan Chen Xin Building, Room 705 • 12 Yumin Road, Dewai, Madian • Beijing 100029 • 8610-62022886 • Fax: [phone]
B.P. 60 • 3, allée des Garays • 91122 Palaiseau Cédex • 01 64 53 20 20 • Fax: [phone]
Landsberger Strasse 65 • D-82110 Germering • 089/84 93 07-40 • Fax: [phone]
The Minster • 58 Portman Road • Reading, Berkshire RG30 1EA • 0118-9 57 56 66 • Fax: [phone]
Flat 2B, WILOCRISSA • 14, Rest House Crescent • Bangalore 560 001 • 91-80-509-1320/21 • Fax: [phone]
Viale S. Gimignano, 38 • 20146 Milano • 02/48 30 30 08 • Fax: [phone]
Postbus 559 • 4200 AN Gorinchem • 0183-635333 • Fax: [phone]
Kriesbachstrasse 4 • 8600 Dübendorf • 01-821 94 44 • Fax: [phone]

1 Fl. 85 Po Ai Street • Hsinchu, Taiwan, R.O.C. • 886-3572-9077 • Fax: [phone]

10/99

2400 Series SourceMeter

User’s Manual

®

©1999, Keithley Instruments, Inc.

All rights reserved.

Cleveland, Ohio, U.S.A.

Fifth Printing, July 2000

Document Number: 2400S-900-01 Rev. E

Manual Print History

The print history shown below lists the printing dates of all Revisions and Addenda created
for this manual. The Revision Level letter increases alphabetically as the manual undergoes sub­sequent updates. Addenda, which are released between Revisions, contain important change in­formation that the user should incorporate immediately into the manual. Addenda are numbered
sequentially. When a new Revision is created, all Addenda associated with the previous Revision
of the manual are incorporated into the new Revision of the manual. Each new Revision includes
a revised copy of this print history page.

Revision A (Document Number 2400S-900-01)........................................................... August 1998

Revision B (Document Number 2400S-900-01)..........................................................January 1999

Addendum B (Document Number 2400S-900-02) ..........................................................April 1999

Revision C (Document Number 2400S-900-01)..............................................................April 1999

Addendum C (Document Number 2400S-900-02) ..................................................November 1999

Revision D (Document Number 2400S-900-01).......................................................... January 2000

Revision E (Document Number 2400S-900-01) ................................................................July 2000

All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc.
Other brand names are trademarks or registered trademarks of their respective holders.

Safety Precautions

The following safety precautions should be observed before using this product and any associated in­strumentation. Although some instruments and accessories would normally be used with non-hazardous
voltages, there are situations where hazardous conditions may be present.

This product is intended for use by qualified personnel who recognize shock hazards and are familiar
with the safety precautions required to avoid possible injury. Read the operating information carefully
before using the product.

The types of product users are:

Responsible body

ensuring that the equipment is operated within its specifications and operating limits, and for ensuring
that operators are adequately trained.

Operators

and proper use of the instrument. They must be protected from electric shock and contact with hazardous
live circuits.

Maintenance personnel

setting the line voltage or replacing consumable materials. Maintenance procedures are described in the
manual. The procedures explicitly state if the operator may perform them. Otherwise, they should be
performed only by service personnel.

Service personnel

ucts. Only properly trained service personnel may perform installation and service procedures.

Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable con­nector jacks or test fixtures. The American National Standards Institute (ANSI) states that a shock haz­ard exists when voltage levels greater than 30V RMS, 42.4V peak, or 60VDC are present.

practice is to expect that hazardous voltage is present in any unknown circuit before measuring

Users of this product must be protected from electric shock at all times. The responsible body must en­sure that users are prevented access and/or insulated from every connection point. In some cases, con­nections must be exposed to potential human contact. Product users in these circumstances must be
trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or
above 1000 volts,

As described in the International Electrotechnical Commission (IEC) Standard IEC 664, digital multi­meter measuring circuits (e.g., Keithley Models 175A, 199, 2000, 2001, 2002, and 2010) are Installation
Category II. All other instruments’ signal terminals are Installation Category I and must not be connect­ed to mains.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with
impedance limited sources. NEVER connect switching cards directly to AC mains. When connecting
sources to switching cards, install protective devices to limit fault current and voltage to the card.

Before operating an instrument, make sure the line cord is connected to a properly grounded power
receptacle. Inspect the connecting cables, test leads, and jumpers for possible wear, cracks, or breaks
before each use.

For maximum safety, do not touch the product, test cables, or any other instruments while power is ap­plied to the circuit under test. ALWAYS remove power from the entire test system and discharge any
capacitors before: connecting or disconnecting cables or jumpers, installing or removing switching
cards, or making internal changes, such as installing or removing jumpers.

is the individual or group responsible for the use and maintenance of equipment, for

use the product for its intended function. They must be trained in electrical safety procedures

are trained to work on live circuits, and perform safe installations and repairs of prod-

no conductive part of the circuit may be exposed.

perform routine procedures on the product to keep it operating, for example,

A good safety

.

Do not touch any object that could provide a current path to the common side of the circuit under test or power
line (earth) ground. Always make measurements with dry hands while standing on a dry, insulated surface ca­pable of withstanding the voltage being measured.

The instrument and accessories must be used in accordance with its specifications and operating instructions
or the safety of the equipment may be impaired.

Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications
and operating information, and as shown on the instrument or test fixture panels, or switching card.

When fuses are used in a product, replace with same type and rating for continued protection against fire hazard.

Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth
ground connections.

If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation
requires the use of a lid interlock.

If a screw is present, connect it to safety earth ground using the wire recommended in the user documen­tation.

!

The symbol on an instrument indicates that the user should refer to the operating instructions located in
the manual.

The symbol on an instrument shows that it can source or measure 1000 volts or more, including the com­bined effect of normal and common mode voltages. Use standard safety precautions to avoid personal contact
with these voltages.

The

WARNING

read the associated information very carefully before performing the indicated procedure.

heading in a manual explains dangers that might result in personal injury or death. Always

The

CAUTION

invalidate the warranty.

Instrumentation and accessories shall not be connected to humans.

Before performing any maintenance, disconnect the line cord and all test cables.

To maintain protection from electric shock and fire, replacement components in mains circuits, including the
power transformer, test leads, and input jacks, must be purchased from Keithley Instruments. Standard fuses,
with applicable national safety approvals, may be used if the rating and type are the same. Other components
that are not safety related may be purchased from other suppliers as long as they are equivalent to the original
component. (Note that selected parts should be purchased only through Keithley Instruments to maintain ac­curacy and functionality of the product.) If you are unsure about the applicability of a replacement component,
call a Keithley Instruments office for information.

To clean an instrument, use a damp cloth or mild, water based cleaner. Clean the exterior of the instrument
only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Prod­ucts that consist of a circuit board with no case or chassis (e.g., data acquisition board for installation into a
computer) should never require cleaning if handled according to instructions. If the board becomes contami­nated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

heading in a manual explains hazards that could damage the instrument. Such damage may

Rev. 10/99

T able of Contents

1 Getting Started

General information ................................................................... 1-2

Warranty information .......................................................... 1-2

Contact information ............................................................ 1-2

Manual addenda .................................................................. 1-2

Safety symbols and terms ................................................... 1-2

Inspection ............................................................................ 1-3

Options and accessories ...................................................... 1-3

Product overview ........................................................................ 1-5

Front and rear panel familiarization ........................................... 1-6

Front panel summary .......................................................... 1-6

Rear panel summary ........................................................... 1-8

Power-up .................................................................................... 1-9

Line power connection ........................................................ 1-9

Power-up sequence ........................................................... 1-10

System identification ......................................................... 1-10

Line frequency setting ....................................................... 1-11

Fuse replacement .............................................................. 1-12

Cooling fan ............................................................................... 1-12

Display ..................................................................................... 1-13

Display format .................................................................. 1-13

EDIT key ........................................................................... 1-13

TOGGLE key .................................................................... 1-13

Status and error messages ................................................. 1-14

Remote display programming ........................................... 1-14

Front panel tests ................................................................ 1-14

Default settings ......................................................................... 1-15

Saving and restoring user setups ....................................... 1-15

Factory default settings ..................................................... 1-16

Remote setups ................................................................... 1-18

Menus ....................................................................................... 1-19

Main menu ........................................................................ 1-19

Rules to navigate menus ................................................... 1-22

Editing source and compliance values .............................. 1-23

Toggling the source and measure display fields ................ 1-23

Disabling front panel display ............................................ 1-23

Configuration menus ......................................................... 1-24

2 Connections

Connection overview .................................................................. 2-2

Front/rear terminals selection .............................................. 2-2

Connections to DUT ................................................................... 2-3

Sensing methods .................................................................. 2-4

Guarding methods ............................................................... 2-7

3 Basic Source-Measure Operation

WARNING - CAUTION ............................................................ 3-2

Operation overview .................................................................... 3-3

Source-measure capabilities ................................................ 3-3

Compliance limit ................................................................. 3-5

Setting the compliance limit ................................................ 3-5

Basic circuit configurations ................................................. 3-6

Operation considerations ............................................................ 3-7

Warm-up .............................................................................. 3-7

Auto zero ............................................................................. 3-7

NPLC caching ..................................................................... 3-8

V-source protection ............................................................. 3-9

Source delay ...................................................................... 3-10

Basic source-measure procedure .............................................. 3-12

Output control ................................................................... 3-12

Front panel source-measure procedure ............................. 3-12

Remote command source-measure procedure ................... 3-15

Measure only ............................................................................ 3-17

Front panel measure only .................................................. 3-17

Remote command measure only ....................................... 3-18

Sink operation ........................................................................... 3-19

Battery charging/discharging ............................................. 3-20

Sink programming example .............................................. 3-21

4 Ohms Measurements

Ohms configuration menu .......................................................... 4-2

Ohms measurement methods ...................................................... 4-3

Selecting ohms measurement method ................................. 4-4

Auto ohms measurements ................................................... 4-4

Manual ohms measurements ............................................... 4-5

Ohms sensing .............................................................................. 4-7

Sense selection .................................................................... 4-8

Offset-compensated ohms .......................................................... 4-9

Enabling/disabling offset-compensated ohms ..................... 4-9

Offset-compensated ohms procedure ................................ 4-10

Ohms source readback ............................................................. 4-10

Ohms source readback selection ....................................... 4-11

6-wire ohms measurements ...................................................... 4-11

Remote ohms programming ..................................................... 4-11

Remote ohms commands .................................................. 4-12

Ohms programming example ............................................ 4-12

5 Pulse Mode Operation (Model 2430 only)

Overview .................................................................................... 5-2

Pulse characteristics ................................................................... 5-3

Pulse width .......................................................................... 5-3

Output off-time ................................................................... 5-5

Pulse duty cycle .................................................................. 5-5

Fast pulse output ................................................................. 5-6

Pulse jitter ........................................................................... 5-7

Pulse energy limitations (10A range) ......................................... 5-8

Pulse Mode configuration .......................................................... 5-9

Front panel Pulse Mode configuration ................................ 5-9

Remote command Pulse Mode configuration ................... 5-10

Basic Pulse Mode operation ..................................................... 5-10

Front panel pulse-measure procedure ............................... 5-10

Pulse-ohms measurements ................................................ 5-12

Remote command pulse-measure operation ..................... 5-13

Pulse-measure considerations .................................................. 5-14

Measurement speed ........................................................... 5-14

Filter .................................................................................. 5-15

Auto range ......................................................................... 5-15

Concurrent measurements ................................................. 5-15

Ohms source readback ...................................................... 5-15

Toggle key ......................................................................... 5-15

Offset-compensated ohms ................................................. 5-15

Source delay ...................................................................... 5-16

Trigger delay ..................................................................... 5-16

Input triggers ..................................................................... 5-16

Output triggers .................................................................. 5-16

Auto output-off ................................................................. 5-17

Output-off state ................................................................. 5-17

Turning source on ............................................................. 5-17

SCPI signal oriented measurement commands ................. 5-17

6 Source-Measure Concepts

Compliance limit ........................................................................ 6-2

Types of compliance ............................................................ 6-2

Maximum compliance values .............................................. 6-3

Compliance examples .......................................................... 6-3

Compliance principles ......................................................... 6-4

Determining compliance limit ............................................. 6-4

Overheating protection ............................................................... 6-6

Overheating conditions ........................................................ 6-6

Power equations to limit overheating .................................. 6-7

Source-delay-measure cycle ....................................................... 6-9

Sweep waveforms .............................................................. 6-10

Operating boundaries ................................................................ 6-12

Source or sink .................................................................... 6-12

Duty cycle .......................................................................... 6-12

I-Source operating boundaries .......................................... 6-18

V-Source operating boundaries ......................................... 6-22

Source I measure I and source V measure V ..................... 6-24

Basic circuit configurations ...................................................... 6-26

Source I ............................................................................. 6-26

Source V ............................................................................ 6-27

Measure only (V or I) ........................................................ 6-28

Guard ........................................................................................ 6-29

Cable guard ....................................................................... 6-29

Ohms guard ....................................................................... 6-31

Guard sense ....................................................................... 6-32

Data flow ................................................................................... 6-34

Buffer considerations ........................................................ 6-36

7 Range, Digits, Speed, and Filters

Range and digits ......................................................................... 7-2

Range ................................................................................... 7-2

Digits ................................................................................... 7-5

Remote range and digits programming ............................... 7-5

Speed .......................................................................................... 7-6

Setting speed ....................................................................... 7-7

Remote speed programming ................................................ 7-8

Filter ........................................................................................... 7-8

Front panel filter control ...................................................... 7-9

Remote filter programming ............................................... 7-11

8 Relative and Math

Relative ....................................................................................... 8-2

Front panel rel ..................................................................... 8-2

Remote rel programming .................................................... 8-3

Math operations .......................................................................... 8-4

Built-in math functions ....................................................... 8-4

Front panel math operations ................................................ 8-6

Remote math operations ..................................................... 8-7

User-defined math functions ............................................... 8-9

9 Data Store

Data store overview .................................................................... 9-2

Front panel data store ................................................................. 9-2

Storing readings .................................................................. 9-2

Recalling readings ............................................................... 9-2

Buffer statistics ................................................................... 9-3

Timestamp format ............................................................... 9-4

Timestamp accuracy ........................................................... 9-5

Buffer considerations .......................................................... 9-5

Remote command data store ...................................................... 9-6

Data store commands .......................................................... 9-6

Data store programming example ....................................... 9-7

10 Sweep Operation

Sweep types .............................................................................. 10-2

Linear staircase sweep ...................................................... 10-2

Logarithmic staircase sweep ............................................. 10-3

Custom sweep ................................................................... 10-4

Source memory sweep ...................................................... 10-5

Configuring and running a sweep .......................................... 10-11

Front panel sweep operation ........................................... 10-11

Remote sweep operation ................................................. 10-19

Pulse Mode sweeps (Model 2430 only) ................................. 10-24

Front panel Pulse Mode sweep procedure ...................... 10-25

Remote Pulse Mode sweep operation ............................. 10-26

11 T riggering

Front panel trigger operation .................................................... 11-2

Front panel trigger model .................................................. 11-2

Configuring triggering ...................................................... 11-7

Remote trigger operation ....................................................... 11-10

Remote trigger model ..................................................... 11-10

Remote trigger commands .............................................. 11-17

Trigger link ............................................................................. 11-18

Input trigger requirements ............................................... 11-18

Output trigger specifications ........................................... 11-19

Triggering examples ............................................................... 11-19

Front panel trigger example ............................................ 11-19

External trigger example ................................................. 11-22

Remote trigger example .................................................. 11-26

Pulse Mode triggering (Model 2430) ..................................... 11-27

Trigger models ................................................................ 11-27

Invalid trigger settings ..................................................... 11-31

12 Limit T esting

Types of limits .......................................................................... 12-2

Pass/fail information .......................................................... 12-2

Data flow ........................................................................... 12-3

Limit 1 test (compliance) .................................................. 12-3

Limit 2, limit 3, and limit 5-12 tests .................................. 12-3

Limit test modes ................................................................ 12-3

Binning .............................................................................. 12-4

Operation overview .................................................................. 12-4

Grading mode .................................................................... 12-4

Sorting mode ..................................................................... 12-7

Binning systems ........................................................................ 12-9

Handler interface ............................................................... 12-9

Handler types ................................................................... 12-10

Basic binning systems ..................................................... 12-11

Digital output clear pattern .............................................. 12-13

Configuring and performing limit tests .................................. 12-15

Configuring limit tests ..................................................... 12-15

Performing front panel limit tests .................................... 12-17

Remote limit testing ............................................................... 12-19

Limit commands .............................................................. 12-19

Limit test programming example .................................... 12-20

13 Digital I/O Port, Safety Interlock, and Output Configuration

Digital I/O port ......................................................................... 13-2

Port configuration .............................................................. 13-2

Digital output configuration .............................................. 13-3

Controlling digital output lines ......................................... 13-4

Safety interlock ........................................................................ 13-5

Front panel output configuration .............................................. 13-6

Configure OUTPUT menu ................................................ 13-6

Output-off states ................................................................ 13-8

Remote output configuration .................................................. 13-10

Output configuration commands ..................................... 13-10

Output configuration programming example .................. 13-11

14 Remote Operations

Differences: remote vs. local operation .................................... 14-2

Operation enhancements (remote operation) .................... 14-2

Local-to-remote transition ................................................ 14-2

Remote-to-local transition ................................................ 14-3

Selecting an interface ............................................................... 14-3

GPIB operation ........................................................................ 14-4

GPIB standards ................................................................. 14-4

GPIB connections ............................................................. 14-4

Primary address ................................................................. 14-6

General bus commands ............................................................ 14-6

REN (remote enable) ........................................................ 14-7

IFC (interface clear) .......................................................... 14-7

LLO (local lockout) .......................................................... 14-7

GTL (go to local) .............................................................. 14-7

DCL (device clear) ............................................................ 14-8

SDC (selective device clear) ............................................. 14-8

GET (group execute trigger) ............................................. 14-8

SPE, SPD (serial polling) .................................................. 14-8

Front panel GPIB operation ..................................................... 14-9

Error and status messages ................................................. 14-9

GPIB status indicators ....................................................... 14-9

LOCAL key .................................................................... 14-10

Programming syntax ............................................................... 14-10

Command words ............................................................. 14-10

Query commands ............................................................. 14-12

Case sensitivity ................................................................ 14-12

Long-form and short-form versions ................................ 14-13

Short-form rules .............................................................. 14-13

Program messages ........................................................... 14-14

Response messages ......................................................... 14-16

Message exchange protocol ............................................ 14-16

RS-232 interface operation ..................................................... 14-17

Sending and receiving data .............................................. 14-17

Baud rate ......................................................................... 14-17

Data bits and parity ......................................................... 14-17

Terminator ....................................................................... 14-18

Flow control (signal handshaking) .................................. 14-18

RS-232 connections ......................................................... 14-18

Error messages ................................................................ 14-19

Programming example .................................................... 14-20

15 Status Structure

Overview .................................................................................. 15-2

Status byte and SRQ .......................................................... 15-2

Status register sets ............................................................. 15-2

Queues ............................................................................... 15-2

Clearing registers and queues ................................................... 15-4

Programming and reading registers .......................................... 15-5

Programming enable registers ........................................... 15-5

Reading registers .............................................................. 15-6

Status byte and service request (SRQ) ..................................... 15-7

Status Byte Register .......................................................... 15-8

Service Request Enable Register ....................................... 15-9

Serial polling and SRQ ...................................................... 15-9

Status byte and service request commands ..................... 15-10

Status register sets .................................................................. 15-11

Register bit descriptions .................................................. 15-11

Condition registers .......................................................... 15-15

Event registers ................................................................. 15-16

Event enable registers ...................................................... 15-16

Queues .................................................................................... 15-18

Output queue ................................................................... 15-18

Error queue ...................................................................... 15-18

16 Common Commands

Command summary ................................................................. 16-2

Command reference ................................................................. 16-3

*IDN? — identification query ........................................... 16-3

*OPC — operation complete............................................. 16-3

*OPC? — operation complete query................................. 16-3

*SAV <NRf> — save......................................................... 16-4

*RCL <NRf> — recall ...................................................... 16-4

*RST — reset..................................................................... 16-4

*TRG — trigger................................................................. 16-4

*TST? — self-test query.................................................... 16-5

*WAI — wait-to-continue.................................................. 16-5

17 SCPI Signal Oriented Measurement Commands

Command summary ................................................................. 17-2

Configuring measurement function .......................................... 17-2

:CONFigure:<function> .................................................... 17-2

Acquiring readings ................................................................... 17-3

:FETCh? ............................................................................ 17-3

[:SENSe[1]]:DATA[:LATest]? .......................................... 17-4

:READ? ............................................................................. 17-4

:MEASure[:<function>]? .................................................. 17-5

18 SCPI Command Reference

Reference tables ....................................................................... 18-2

Calculate subsystems ............................................................. 18-21

CALCulate[1].......................................................................... 18-21

Select (create) math expression name ............................. 18-21

Assign unit suffix ............................................................ 18-25

Define math expression ................................................... 18-26

Enable and read math expression result .......................... 18-29

CALCulate2 ............................................................................ 18-30

Select input path .............................................................. 18-30

Null feed reading ............................................................. 18-30

Read CALC2 ................................................................... 18-31

Configure and control limit tests ..................................... 18-32

Composite testing ............................................................ 18-36

Clear test results ............................................................. 18-38

CALCulate3 ............................................................................ 18-39

Select statistic .................................................................. 18-39

Acquire statistic .............................................................. 18-39

:DISPlay subsystem ................................................................ 18-40

Control display ................................................................ 18-40

Read display .................................................................... 18-41

Define :TEXT messages .................................................. 18-42

FORMat subsystem ................................................................ 18-43

Data format ...................................................................... 18-43

Data elements .................................................................. 18-45

CALC data elements ....................................................... 18-49

Byte order ........................................................................ 18-50

Status register format ....................................................... 18-50

OUTPut subsystem ................................................................. 18-51

Turn source on or off ....................................................... 18-51

Interlock control .............................................................. 18-51

Output-off states .............................................................. 18-52

:ROUTe subsystem ................................................................. 18-53

Select input jacks ............................................................. 18-53

SENSe1 subsystem ................................................................. 18-53

Select measurement functions ......................................... 18-53

Select measurement range ............................................... 18-56

Select auto range ............................................................. 18-59

Set compliance limit ........................................................ 18-60

Set measurement speed ................................................... 18-62

Configure and control filter ............................................. 18-63

SOURce subsystem ................................................................ 18-64

SOURce[1] ...................................................................... 18-64

Control source output-off ................................................ 18-64

Select function modes ..................................................... 18-65

Select sourcing mode ...................................................... 18-65

Select range ..................................................................... 18-66

Set amplitude for fixed source ......................................... 18-68

Set voltage limit ............................................................... 18-71

Set delay .......................................................................... 18-73

Configure voltage and current sweeps ............................. 18-74

Configure list ................................................................... 18-80

Configure memory sweep ................................................ 18-82

Set scaling factor ............................................................. 18-84

Sweep and list program examples ................................... 18-85

Soak time ......................................................................... 18-86

Pulse Mode delays (Model 2430 only) ........................... 18-87

SOURce2 ......................................................................... 18-88

Setting digital output ....................................................... 18-88

Clearing digital output ..................................................... 18-90

STATus subsystem ................................................................. 18-91

Read event registers ........................................................ 18-91

Program event enable registers ....................................... 18-91

Read condition registers .................................................. 18-91

Select default conditions ................................................. 18-91

Error queue ...................................................................... 18-92

:SYSTem subsystem ............................................................... 18-93

Default conditions ........................................................... 18-93

Control remote sensing ................................................... 18-94

Select guard mode ........................................................... 18-94

Initialize memory ............................................................ 18-95

Control beeper ................................................................. 18-95

Control auto zero ............................................................. 18-96

Control NPLC caching .................................................... 18-96

Select power line frequency setting ................................ 18-97

Error queue ...................................................................... 18-98

Simulate key presses ....................................................... 18-99

Read version of SCPI standard ..................................... 18-100

RS-232 interface ........................................................... 18-101

Query timestamp ........................................................... 18-101

Reset timestamp ............................................................ 18-102

Auto reset timestamp .................................................... 18-102

Auto range change mode .............................................. 18-102

:TRACe subsystem ............................................................... 18-103

Read and clear buffer .................................................... 18-103

Configure and control buffer ......................................... 18-103

Select timestamp format ............................................... 18-105

Trigger subsystem ................................................................ 18-106

Clear input triggers ....................................................... 18-106

Initiate source/measure cycle ........................................ 18-106

Abort source/measure cycle .......................................... 18-107

Program trigger model .................................................. 18-107

A Specifications

Accuracy calculations ............................................................. A-38

Measure accuracy ............................................................. A-38

Source accuracy ............................................................... A-38

Source-Delay-Measure (SDM) cycle timing .......................... A-39

Definitions ........................................................................ A-39

Timing diagrams .............................................................. A-40

B Status and Error Messages

Introduction ............................................................................... B-2

Status and error messages .......................................................... B-2

Eliminating common SCPI errors ............................................. B-8

C Data Flow

Introduction ............................................................................... C-2

FETCh? .............................................................................. C-3

CALCulate[1]:DATA? ........................................................ C-3

CALCulate2:DATA? .......................................................... C-3

TRACe:DATA? ................................................................... C-4

CALCulate3:DATA? .......................................................... C-4

D IEEE-488 Bus Overview

Introduction ............................................................................... D-2

Bus description .......................................................................... D-3

Bus lines .................................................................................... D-5

Data lines ............................................................................ D-5

Bus management lines ........................................................ D-5

Handshake lines .................................................................. D-5

Bus commands ........................................................................... D-7

Uniline commands .............................................................. D-8

Universal multiline commands ........................................... D-8

Addressed multiline commands ......................................... D-9

Address commands ............................................................ D-9

Unaddress commands ......................................................... D-9

Common commands ......................................................... D-10

SCPI commands ............................................................... D-10

Command codes ............................................................... D-10

Typical command sequences ............................................ D-12

IEEE command groups ..................................................... D-13

Interface function codes .......................................................... D-14

E IEEE-488 and SCPI Conformance Information

Introduction ............................................................................... E-2

F Contact Check Function

Introduction ................................................................................ F-2

Overview .................................................................................... F-2

Description .......................................................................... F-2

Block diagram ..................................................................... F-3

Operation .................................................................................... F-4

DUT connections ................................................................ F-4

Contact check threshold resistances .................................... F-5

Contact check failure indications ........................................ F-5

Auto and manual ohms ....................................................... F-5

Trigger model operation ...................................................... F-6

Sweep and binning considerations ............................................. F-6

Sweep limitations ................................................................ F-6

Limit test sequence ............................................................. F-7

Binning failure indications (grading mode) ...................... F-10

Front panel contact check operation ........................................ F-12

Menu selections ................................................................ F-12

Using contact check .......................................................... F-13

Remote contact check operation .............................................. F-14

Contact check remote commands ..................................... F-14

Contact check programming example .............................. F-16

Contact check command reference .......................................... F-17

Configure and control contact check ................................. F-17

Configure and control contact check limit test ................. F-17

Configure and control contact check event detection ....... F-19

Contact check defaults ............................................................. F-19

G GPIB 488.1 Protocol

Introduction ............................................................................... G-2

Selecting the 488.1 protocol ...................................................... G-2

Protocol differences .................................................................. G-3

Message exchange protocol (MEP) ................................... G-3

Using SCPI-based programs .............................................. G-3

Bus hold-off ....................................................................... G-4

Trigger-on-talk ................................................................... G-4

Message available .............................................................. G-4

General operation notes ..................................................... G-4

GPIB reading speed comparisons ............................................. G-5

Sweep operation ................................................................. G-5

Single-shot operation ......................................................... G-7

List of Illustrations

1 Getting Started

Figure 1-1 SourceMeter front panel .......................................................... 1-6

Figure 1-2 SourceMeter rear panel ............................................................ 1-8

Figure 1-3 Main menu tree ...................................................................... 1-21

2 Connections

Figure 2-1 Terminal voltage differentials (rear panel) .............................. 2-3

Figure 2-2 Two-wire connections (local sense) ......................................... 2-4

Figure 2-3 Four-wire connections (remote sense) ..................................... 2-5

Figure 2-4 High-impedance guarding (cable guard) ................................. 2-7

Figure 2-5 Guarded ohms measurements (ohms guard) ........................... 2-9

3 Basic Source-Measure Operation

Figure 3-1 Fundamental source measure configuration ............................ 3-7

4 Ohms Measurements

Figure 4-1 Ohms configuration menu tree ................................................ 4-2

Figure 4-2 2-wire resistance sensing ......................................................... 4-7

Figure 4-3 4-wire resistance sensing ......................................................... 4-8

5 Pulse Mode Operation (Model 2430 only)

Figure 5-1 Pulse period ............................................................................. 5-2

Figure 5-2 Pulse-measure timing .............................................................. 5-3

Figure 5-3 Pulse-measure timing (auto zero off) ...................................... 5-6

Figure 5-4 Pulse-only timing ..................................................................... 5-7

6 Source-Measure Concepts

Figure 6-1 Source-delay-measure (SDM) cycle ........................................ 6-9

Figure 6-2 Simplified trigger model ........................................................ 6-10

Figure 6-3 Three basic sweep waveform types ....................................... 6-11

Figure 6-4 Model 2400 operating boundaries (T
Figure 6-5 Model 2410 operating boundaries (T
Figure 6-6 Model 2420 operating boundaries (T
Figure 6-7 Model 2425/2430 operating boundaries (T

Figure 6-8 I-Source output characteristics .............................................. 6-19

Figure 6-9 I-Source limit lines ................................................................ 6-19

Figure 6-10 I-Source operating examples ................................................. 6-21

Figure 6-11 V-Source output characteristics ............................................. 6-23

Figure 6-12 V-Source limit lines ............................................................... 6-23

≤ 30˚C) ................... 6-13

amb

≤ 30˚C) ................... 6-14

amb

≤ 30˚C) ................... 6-15

amb

≤ 30˚C) ......... 6-17

amb

Figure 6-13 V-Source operating examples ................................................ 6-25

Figure 6-14 Source I ................................................................................. 6-26

Figure 6-15 Source V ................................................................................ 6-27

Figure 6-16 Measure only (V or I) ............................................................ 6-28

Figure 6-17 High-impedance measurements ............................................ 6-30

Figure 6-18 In-circuit ohms measurements .............................................. 6-31

Figure 6-19 In-circuit ohms measurements using guard sense ................. 6-33

Figure 6-20 Data flow front-panel ............................................................ 6-35

7 Range, Digits, Speed, and Filters

Figure 7-1 Speed configuration menu tree ................................................ 7-7

Figure 7-2 Moving average and repeating filters .................................... 7-10

Figure 7-3 Filter configuration menu tree ............................................... 7-11

8 Relative and Math

Figure 8-1 Math configuration menu tree ................................................. 8-7

Figure 8-2 Connections for voltage coefficient tests ................................. 8-8

10 Sweep Operation

Figure 10-1 Linear staircase sweep ........................................................... 10-2

Figure 10-2 Logarithmic staircase sweep

(example 5-point sweep from 1 to 10 volts) .......................... 10-3

Figure 10-3 Custom pulse sweep .............................................................. 10-4

Figure 10-4 Custom sweep with different pulse durations ....................... 10-5

Figure 10-5 Six-point test branching example .......................................... 10-8

Figure 10-6 Typical diode I-V curve and test points (not to scale) ........... 10-9

Figure 10-7 Sweep configuration menu tree ........................................... 10-12

Figure 10-8 Connections for diode I-V tests ........................................... 10-20

Figure 10-9 Diode I-V curve ................................................................... 10-20

Figure 10-10 Pulse Mode linear staircase sweep ...................................... 10-24

11 T riggering

Figure 11-1 Front panel trigger model ...................................................... 11-3

Figure 11-2 Trigger configuration menu tree ............................................ 11-9

Figure 11-3 Remote trigger model .......................................................... 11-11

Figure 11-4 Measure action .................................................................... 11-15

Figure 11-5 Rear panel pinout ................................................................ 11-18

Figure 11-6 Trigger link input pulse specifications ................................ 11-18

Figure 11-7 Trigger link output pulse specifications .............................. 11-19

Figure 11-8 Trigger model for front panel trigger example .................... 11-21

Figure 11-9 DUT test system .................................................................. 11-22

Figure 11-10 Trigger link connections ...................................................... 11-22

Figure 11-11 Operation model for triggering example ............................. 11-25

Figure 11-12 Trigger model for remote trigger example .......................... 11-27

Figure 11-13 2430 Pulse Mode trigger model (front panel operation) ..... 11-28

Figure 11-14 2430 Pulse Mode trigger model (remote operation) ............ 11-29

12 Limit T esting

Figure 12-1 Limit tests .............................................................................. 12-2

Figure 12-2 Grading mode limit testing .................................................... 12-5

Figure 12-3 Immediate binning ................................................................. 12-7

Figure 12-4 End binning ............................................................................ 12-7

Figure 12-5 Sorting mode limit testing ..................................................... 12-8

Figure 12-6 Handler interface connections ............................................... 12-9

Figure 12-7 Binning system single-element devices ............................... 12-11

Figure 12-8 Binning system multiple-element devices ........................... 12-13

Figure 12-9 Digital output auto-clear timing example ............................ 12-14

Figure 12-10 Limits configuration menu tree ............................................ 12-17

Figure 12-11 Diode pass/fail limits ........................................................... 12-20

13 Digital I/O Port, Safety Interlock, and Output Configuration

Figure 13-1 Digital I/O port ...................................................................... 13-2

Figure 13-2 Sink operation ........................................................................ 13-3

Figure 13-3 Source operation .................................................................... 13-4

Figure 13-4 Using test fixture interlock .................................................... 13-6

Figure 13-5 Output configuration menu tree ............................................. 13-7

14 Remote Operations

Figure 14-1 IEEE-488 connector .............................................................. 14-4

Figure 14-2 IEEE-488 connections ........................................................... 14-5

Figure 14-3 IEEE-488 connector location ................................................. 14-6

Figure 14-4 RS-232 interface connector ................................................. 14-19

15 Status Structure

Figure 15-1 SourceMeter status register structure ..................................... 15-3

Figure 15-2 16-bit status register ............................................................... 15-5

Figure 15-3 Status byte and service request (SRQ) .................................. 15-7

Figure 15-4 Standard event status ........................................................... 15-12

Figure 15-5 Operation event status .......................................................... 15-13

Figure 15-6 Measurement event status .................................................... 15-14

Figure 15-7 Questionable event status ..................................................... 15-15

18 SCPI Command Reference

Figure 18-1 ASCII data format ............................................................... 18-43

Figure 18-2 IEEE-754 single precision data format (32 data bits) ......... 18-44

Figure 18-3 Key-press codes ................................................................. 18-100

A Specifications

Figure A-1 Case I timing diagram .......................................................... A-40

Figure A-2 Case II timing diagram ......................................................... A-41

Figure A-3 Case III timing diagram ........................................................ A-42

Figure A-4 Case IV timing diagram ....................................................... A-42

Figure A-5 Case V timing diagram ......................................................... A-43

Figure A-6 Case VI timing diagram ....................................................... A-43

C Data Flow

Figure C-1 Data flow block diagram ........................................................ C-2

D IEEE-488 Bus Overview

Figure D-1 IEEE-488 bus configuration ................................................... D-4

Figure D-2 IEEE-488 handshake sequence .............................................. D-6

Figure D-3 Command codes ................................................................... D-11

F Contact Check Function

Figure F-1 Source of Kelvin resistance errors ........................................... F-2

Figure F-2 Contact check block diagram .................................................. F-3

Figure F-3 Contact check DUT connections ............................................. F-4

Figure F-4 Contact check limit test sequence ........................................... F-7

Figure F-5 Grading mode contact check limit testing ............................... F-8

Figure F-6 Sorting mode contact check limit testing ................................ F-9

List of Tables

1 Getting Started

Table 1-1 Line frequency remote commands ........................................... 1-11

Table 1-2 Power line fuse ......................................................................... 1-12

Table 1-3 Basic display commands .......................................................... 1-14

Table 1-4 Factory default settings ............................................................. 1-16

Table 1-5 Main menu ................................................................................ 1-19

Table 1-6 Measurement configuration menus ........................................... 1-25

Table 1-7 Source and range configuration menus ..................................... 1-26

Table 1-8 Rel, filter, and limit configuration menus ................................. 1-27

Table 1-9 Trigger configuration menu ...................................................... 1-28

Table 1-10 Sweep, digits, speed, and data store configuration menus ....... 1-29

Table 1-11 Output and display configuration menus .................................. 1-30

Table 1-12 Sweep, digits, speed, and output configuration menus ............. 1-31

3 Basic Source-Measure Operation

Table 3-1 Source-measure capabilities ....................................................... 3-4

Table 3-2 Compliance limits ....................................................................... 3-5

Table 3-3 Compliance commands .............................................................. 3-6

Table 3-4 Auto source delay ..................................................................... 3-11

Table 3-5 Basic source-measure commands ............................................. 3-16

Table 3-6 Basic source-measure programming example .......................... 3-17

Table 3-7 Measure only programming example ....................................... 3-19

Table 3-8 Sink programming example ...................................................... 3-21

4 Ohms Measurements

Table 4-1 Auto ohms default test currents .................................................. 4-3

Table 4-2 Remote commands for basic ohms measurements ................... 4-12

Table 4-3 Auto ohms programming example ........................................... 4-12

5 Pulse Mode Operation (Model 2430 only)

Table 5-1 Basic pulse-measure commands ............................................... 5-13

Table 5-2 Basic pulse programming example ........................................... 5-14

6 Source-Measure Concepts

Table 6-1 Compliance limits ....................................................................... 6-3

Table 6-2 Compliance examples ................................................................. 6-5

Table 6-3 Buffer considerations ................................................................ 6-36

7 Range, Digits, Speed, and Filters

Table 7-1 Range and digits commands ...................................................... 7-5

Table 7-2 Range and digits programming example .................................... 7-6

Table 7-3 Speed commands ........................................................................ 7-8

Table 7-4 Filter commands ....................................................................... 7-11

Table 7-5 Filter programming example .................................................... 7-12

8 Relative and Math

Table 8-1 Rel commands ............................................................................ 8-3

Table 8-2 Rel programming example ......................................................... 8-3

Table 8-3 Math commands ......................................................................... 8-7

Table 8-4 Voltage coefficient programming example ................................. 8-8

Table 8-5 Commands for user-defined math functions .............................. 8-9

Table 8-6 User-defined math function programming example ................. 8-10

9 Data Store

Table 9-1 Data store commands ................................................................. 9-6

Table 9-2 Data store example ..................................................................... 9-7

10 Sweep Operation

Table 10-1 Logarithmic sweep points ........................................................ 10-4

Table 10-2 Source memory saved configurations ...................................... 10-7

Table 10-3 Linear and log staircase sweep commands ............................ 10-19

Table 10-4 Staircase sweep programming example (diode test) .............. 10-21

Table 10-5 Custom sweep commands ...................................................... 10-21

Table 10-6 Custom sweep programming example ................................... 10-22

Table 10-7 Source memory sweep commands ......................................... 10-22

Table 10-8 Source memory sweep programming example ...................... 10-23

Table 10-9 Pulse Mode linear staircase sweep programming example .... 10-26

11 Triggering

Table 11-1 Remote trigger commands ..................................................... 11-17

Table 11-2 Commands for remote triggering example ............................ 11-26

12 Limit Testing

Table 12-1 Limit commands .................................................................... 12-19

Table 12-2 Commands to control Digital I/O port for limit testing ......... 12-20

Table 12-3 Limits test programming example ......................................... 12-21

Table 12-4 Limit test results summary ..................................................... 12-21

13 Digital I/O Port, Safety Interlock, and Output Configuration

Table 13-1 Digital output line settings ........................................................ 13-5

Table 13-2 Output configuration commands ............................................ 13-10

Table 13-3 Output configuration programming example ......................... 13-11

14 Remote Operations

Table 14-1 General bus commands ............................................................. 14-6

Table 14-2 RS-232 connector pinout ........................................................ 14-19

Table 14-3 PC serial port pinout ............................................................... 14-19

15 Status Structure

Table 15-1 Common and SCPI commands to reset registers

and clear queues ......................................................... 15-4

Table 15-2 Data format commands for reading status registers ................. 15-6

Table 15-3 Status Byte and Service Request Enable Register

commands ................................................................ 15-10

Table 15-4 Status byte programming example ......................................... 15-10

Table 15-5 Condition register commands ................................................. 15-15

Table 15-6 Event register commands ........................................................ 15-16

Table 15-7 Event enable registers commands ........................................... 15-17

Table 15-8 Program and read register programming example ................. 15-17

Table 15-9 Error queue commands ........................................................... 15-19

16 Common Commands

Table 16-1 IEEE-488.2 common commands and queries .......................... 16-2

Table 16-2 *OPC programming example ................................................... 16-3

Table 16-3 *SAV, *RCL programming example ........................................ 16-4

Table 16-4 *TRG programming example ................................................... 16-5

17 SCPI Signal Oriented Measurement Commands

Table 17-1 Signal oriented measurement command summary ................... 17-2

18 SCPI Command Reference

Table 18-1 CALCulate command summary ............................................... 18-3

Table 18-2 DISPlay command summary .................................................... 18-7

Table 18-3 FORMat command summary ................................................... 18-8

Table 18-4 OUTPut command summary .................................................... 18-8

Table 18-5 ROUTe command summary ..................................................... 18-9

Table 18-6 SENSe command summary ...................................................... 18-9

Table 18-7 SOURce command summary ................................................. 18-12

Table 18-8 STATus command summary ................................................... 18-16

Table 18-9 SYSTem command summary ................................................. 18-17

Table 18-10 TRACe command summary ................................................... 18-18

Table 18-11 TRIGger command summary ................................................. 18-19

B Status and Error Messages

Table B-1 Status and error messages ......................................................... B-3

D IEEE-488 Bus Overview

Table D-1 IEEE-488 bus command summary ............................................ D-7

Table D-2 Hexadecimal and decimal command codes ............................ D-10

Table D-3 Typical addressed multiline command sequence .................... D-12

Table D-4 Typical addressed common command sequence ..................... D-12

Table D-5 IEEE command groups ........................................................... D-13

Table D-6 SourceMeter interface function codes ..................................... D-14

E IEEE-488 and SCPI Conformance Information

Table E-1 IEEE-488 documentation requirements ..................................... E-3

Table E-2 Coupled commands .................................................................... E-4

F Contact Check Function

Table F-1 Recommended contact resistance threshold values ................... F-5

Table F-2 Contact check menu selections ................................................ F-12

Table F-3 Contact check remote commands ............................................ F-15

Table F-4 Contact check programming example ...................................... F-16

Table F-5 Contact check defaults ............................................................. F-19

G GPIB 488.1 Protocol

Table G-1 SCPI/488.1 reading speed comparisons for

measure-only sweep operation (rdgs/sec) ................... G-5

Table G-2 SCPI/488.1 reading speed comparisons for

source-measure sweep operation (rdgs/sec) ............... G-5

Table G-3 SCPI/488.1 reading speed comparisons for source-measure-limit

test sweep operation (rdgs/sec) ................................... G-6

Table G-4 SCPI/488.1 reading speed comparisons for source-memory

sweep operation (rdgs/sec) ......................................... G-6

Table G-5 SCPI/488.1 reading speed comparisons for measure-only

single-shot operation (rdgs/sec) .................................. G-7

Table G-6 SCPI/488.1 reading speed comparisons for source-measure

single-shot operation (rdgs/sec) .................................. G-7

Table G-7 SCPI/488.1 reading speed comparisons for source-measure-limit

test single-shot operation (rdgs/sec) ........................... G-7

Getting Started

•

General information — Covers general information that includes warranty informa-

tion, contact information, safety symbols and terms, inspection, and available options
and accessories.

•

Product overview — Summarizes the features of the SourceMeter.

•

Front and rear panel familiarization — Summarizes the controls and connectors of

the instrument.

•

Power-up — Covers line power connection, line voltage settings, fuse replacement,

and the power-up sequence.

•

Cooling fan

•

Display — Provides information about the SourceMeter display.

•

Default settings — Covers factory default setups and saving and recalling user setups.

•

Menus — Covers the main and configuration menus as well as rules to navigate menus.

— Covers the cooling fan in the Models 2410, 2420, 2425, and 2430.

1

1-2 Getting Started

General information

Warranty information

Warranty information is located at the front of this manual. Should your SourceMeter
require warranty service, contact the Keithley representative or authorized repair facility in
your area for further information. When returning the instrument for repair, be sure to fill out
and include the service form at the back of this manual to provide the repair facility with the
necessary information.

Contact information

Worldwide phone numbers are listed at the front of this manual. If you have any questions,
please contact your local Keithley representative or call one of our Application Engineers at
1-800-348-3735 (U.S. and Canada only).

Manual addenda

Any improvements or changes concerning the instrument or manual will be explained in an
addendum included with the manual. Be sure to note these changes and incorporate them into
the manual.

Safety symbols and terms

The following symbols and terms may be found on the instrument or used in this manual.

!

The symbol on an instrument indicates that the user should refer to the operating
instructions located in the manual.

The symbol on the instrument shows that high voltage may be present on the termi­nal(s). Use standard safety precautions to avoid personal contact with these voltages.

The

WARNING

injury or death. Always read the associated information very carefully before performing the
indicated procedure.

The

CAUTION

ment. Such damage may invalidate the warranty.

heading used in this manual explains dangers that might result in personal

heading used in this manual explains hazards that could damage the instru-