Keithley Instruments 220 Data Sheet

LOW-LEVEL SOURCES
220 and 230 Programmable Sources
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The demand on researchers, designers, and evaluation engineers for better device characterization has generated a widespread need for programmable, low-level DC sources. And, as an experienced manufacturer of automatic wafer measuring equipment, Keithley knows the importance to the user of instrument compatibility and ease of system integration. The 220 programmable current source and 230 programmable voltage source find major applications in semiconductor charac­terization, materials research, and ATE systems.
Both models incorporate a 100-step, programmable memory buffer, useful in applications where either a fixed number of outputs is repeated or a complex waveform of discrete steps must be generated.
In system applications, the buffer can be loaded through the bus, and the 220 or 230 can be com­manded to sequence through memory while the controller is busy on other tasks.
The TRIGGER IN/OUT feature, when used in the STEP mode, allows the source to synchronize the measurements of other instruments. The TRIGGER OUT occurs after the completion of dwell time; TRIGGER IN causes the 220 or 230 to advance to its next program step. This provides the capability
220 Rear Panel
QZZQ
230 Rear Panel
to perform a preset source measure­ment without a computer.
Four TTL-compatible input and output (I/O) lines are provided on each model to receive and generate system com­mands. In a typical application, a source can be programmed to generate an SRQ (service request) to the control­ler if a system element such as a foot pedal switch, mechanical stop, or over­temperature condition is detected.
The I/O can provide a means for the customer to shut down the power supply for safety in a system environ­ment. Digital I/O is an example of the
convenience features that make the Models 220 and 230 easy to use in your test system.
The 230-1 is a special version of the 230 with the necessary connectors for compatibility with the Model 82 Simultaneous C-V Systems.
MODEL 220 CURRENT SOURCE
•±0.5pA to ±101mA DC output
•1014Ω output resistance
•±1V to ±105V programmable V-LIMIT
MODEL 230 VOLTAGE SOURCE
•±50µV to ±101V DC output
•±2mA, ±20mA, ±100mA programmable I-LIMIT
•Remote sensing
ORDERING INFORMATION
220 Programmable Current Source
with instruction manual, programming guide, Model 6011 Input Leads, 1.5m (5 ft), Triax to Clips
230 Programmable Voltage Source with
instruction manual and programming guide
230-1 Programmable Voltage Source with
instruction manual and programming guide (for Model 82, 82-WIN Simultaneous CV Systems)
This product is available with an Extended Warranty. See page 635 for complete order­ing information.
www.keithley.com
QUESTIONS?
1-800-552-1115 (U.S. only)
Call toll free for technical assistance,
product support or ordering information, or
visit our website at www.keithley.com.
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LOW-LEVEL SOURCES
220 and 230 Programmable Sources
IEEE-488 BUS
IMPLEMENTATION (220, 230)
MULTILINE COMMANDS: DCL, LLO, SDC,
GET, GTL, UNT, UNL, SPE, SPD.
UNILINE COMMANDS: IFC, REN, EOI,
SRQ, ATN.
INTERFACE FUNCTIONS: SH1, AH1, T6,
TE0, L4, LE0, SR1, RL1, PP0, DC1, DT1, C0, E1.
INTERNAL PROGRAMMABLE PARAME-
TERS: Display Mode, Output, Prefix Data
Format, EOI, SRQ (including mask for over Limit), Program Mode, Range, Trig­ger Mode, Terminator Character, Inputs (Source, Limit, Dwell Time, 100-Point Memory Locations), Output Status, Digi­tal Self Test.
DIGITAL I/O PORT: A separate I/O port
consisting of four input and four output lines as well as common (IEEE-488) and +5V DC. Outputs will drive one TTL load. Inputs represent one TTL load. The 220 or 230 can be programmed to generate an “SRQ” upon any change in the four bit input data. Mating connector supplied.
ACCESSORIES AVAILABLE
TEST LEADS (220)
6011 Input Leads, 2-Slot Male Triax to
Alligator Clips, 1.5m (5 ft)
6011-10 Input Leads, 2-Slot Male Triax to
Alligator Clips, 3m (10 ft)
CABLES (220 & 230)
7007-1 Shielded IEEE-488 Cable, 1m (3.3 ft) 7007-2 Shielded IEEE-488 Cable, 2m (6.6 ft) 7008-3 IEEE-488 Digital Cable, 0.9m (3 ft) 7008-6 IEEE-488 Digital Cable, 1.8m (6 ft) 7024-3 Low Noise Triax Cable, 0.9m (3 ft)
(220 only)
7024-10 Low Noise Triax Cable, 3m (10 ft)
(220 only)
ADAPTERS (220)
6146 Triax Tee Adapter 6147 2-Slot Male Triax to Female BNC
Adapter 6167 Guarded Input Adapter 6172 2-Slot Male to 3-Lug Female Triax
Adapter
RACK MOUNT KITS (220 & 230)
10191 Single Fixed Rack Kit 10192 Dual Fixed Rack Kit 4288-4 Rack Mount Kit
See page 235 for descriptions of all accessories.
QUESTIONS?
1-800-552-1115 (U.S. only)
Call toll free for technical assistance,
product support or ordering information, or
visit our website at www.keithley.com.
MODEL 220 CURRENT SOURCE
RANGE OUTPUT 18°–28°C SIZE 0°–18°C & 28°–50°C range) 3dB BANDWIDTH
100 mA ±101.00 mA 0.1 % + 50 µA 50 µA 0.01 % + 2 µA 100 ppm 0.1 Hz to 30 kHz
10 mA ±19.995 mA 0.05% + 10 µA 5 µA 0.005 % +200 nA 100 ppm 0.1 Hz to 100 Hz
1 mA ±1.9995 mA 0.05% + 1 µA 500 nA 0.005% + 20 nA 100 ppm 0.1 Hz to 100 Hz
100 µA ±199.95 µA 0.05% +100 nA 50 nA 0.005% + 2 nA 100 ppm 0.1 Hz to 100 Hz
10 µA ±19.995 µA 0.05% + 1 nA 5 nA 0.005% + 200 pA 100 ppm 0.1 Hz to100 Hz
1 µA ±1.9995 µA 0.1 % + 1 nA 500 pA 0.01 % + 20 pA 100 ppm 0.1 Hz to 100 Hz
100 nA ±199.95 nA 0.3 % +100 pA 50 pA 0.02 % + 2 pA 100 ppm 0.1 Hz to100 Hz
10 nA ±19.995 nA 0.3 % + 10 pA 5 pA 0.02 % + 200 fA 200 ppm 0.1 Hz to 10 Hz
1 nA ±1.9995 nA 0.4 % + 2 pA 500 fA 0.02 % + 200 fA 400 ppm 0.1 Hz to 10 Hz
OUTPUT RESISTANCE: >10 OUTPUT CAPACITANCE: <20pF. LINE REGULATION: <0.01% for AC power line changes
within specified limits.
VOLTAGE LIMIT: Bipolar, 1V to 105V in 1V programmable
steps.
RESPONSE TIME: <3ms to within 0.1% of programmed
change.
TRANSIENT RECOVERY TIME: <3ms to rated accuracy fol-
lowing any change in compliance voltage.
GUARD OUTPUT:
Maximum Load Capacitance: 10nF. Maximum Load Current: Absolute total (Output +
Guard) not to exceed 105mA.
Accuracy: ±1mV (excluding output lead voltage drop).
MAXIMUM (1 Year) STEP COEFFICIENT/°C (pk-pk of
ACCURACY TEMPERATURE NOISE
14
(on 1nA range).
PROGRAM MEMORY:
Number of Locations: 100. Range of Dwell Times: 3ms to 999.9s.
Accuracy of Dwell Time: ±(0.05%+200µs). OUTPUT LOAD: Output load must be non-inductive. EXTERNAL TRIGGER: TTL-compatible EXTERNAL TRIG-
GER INPUT and OUTPUT. OUTPUT CONNECTIONS: Teflon
nector (Specialty Connector #30JR121-1) for output; five-
way binding posts for GUARD, OUTPUT COMMON, and
CHASSIS; BNC (chassis isolated) connectors for EXTER-
NAL TRIGGER INPUT and OUTPUT, Amphenol or Cinch
Series 87 IEEE and printed circuit digital I/O port. All con-
nections on rear panel.
®
insulated 2-lug triax con-
MODEL 230 VOLTAGE SOURCE
RANGE OUTPUT 18°–28°C SIZE 0°–18°C & 28°–50°C
100 V ±101.00 V 0.05 % + 50 mV 50 mV 0.005% + 0.5 mV
10 V ±19.995 V 0.05 % + 10 mV 5 mV 0.005% +100 µV
1 V ±1.9995 V 0.05 % + 1 mV 500 µV 0.005% + 25 µV
100 mV ±199.9 mV 0.075% + 300 µV 50 µV 0.01 % + 25 µV
MAXIMUM CURRENT LIMIT: ±100mA (–0, +20%). SELECTABLE CURRENT LIMIT: ±100mA, ±20mA, ±2mA (–0,
+20%).
LINE REGULATION: <0.01% for AC power line changes within
specified limits.
NOISE: (150µV + 50ppm range) p-p, 0.1Hz to 300Hz; 5mV p-p,
0.1Hz to 300kHz. Specification applies for local sensing only, typical.
RESPONSE TIME: <3ms to within 0.1% of programmed change
for Current Limit of at least 20mA.
TRANSIENT RECOVERY TIME: <3ms to rated accuracy for
Current Limit of at least 20mA.
OUTPUT IMPEDANCE:
SELECTED OUTPUT
CURRENT LIMIT IMPEDANCE
MAXIMUM (1 Year) STEP COEFFICIENT/°C
2mA 1 mΩ +10 mH
20 mA 1 m+ 2 mH
100 mA 1 m+ 1 mH
ACCURACY TEMPERATURE
SENSING: Rear panel selectable REMOTE and LOCAL sensing. REMOTE SENSING:
Maximum Lead Drop (per lead): 0.5V.
Maximum Sense Lead Resistance (per lead): 5. PROGRAM MEMORY:
Number of Locations: 100.
Range of Dwell Times: 3ms to 999.9s
Accuracy of Dwell Time: ±(0.05% + 200µs). EXTERNAL TRIGGER: TTL-compatible EXTERNAL TRIGGER
INPUT and OUTPUT. OUTPUT CONNECTIONS: Five-way binding posts for OUT-
PUT, OUTPUT SENSE, COMMON, COMMON SENSE, and
CHASSIS GROUND; BNC (chassis isolated) connectors for
EXTERNAL TRIGGER INPUT and OUTPUT. All connections
on rear panel.
GENERAL (220, 230)
DISPLAY: 0.5 in LED digits, 4½-digit signed mantissa, 1-digit
signed exponent.
SYSTEMS COMPATIBILITY: IEEE-488-1978. LIMIT INDICATIONS:
Model 220 (Voltage Limit): “V-LIMIT” LED will blink. Model 230 (Current Limit): “I-LIMIT” LED will blink.
MAXIMUM ALLOWABLE COMMON MODE VOLTAGE (OUT-
PUT or OUTPUT COMMON to CHASSIS): 250V rms, DC to
60Hz.
SELF TEST: Digital RAM, ROM, front panel LEDs upon power
ON.
EMC: Conforms to European Union Directive 89/336/EEC.
SAFETY: Conforms to European Union Directive 73/23/EEC
(meets EN61010-1/IEC 1010).
WARM-UP: 1 hour to rated accuracy. POWER: 105–125 or 210–250V AC (internal switch selected), 50
or 60Hz, 60W maximum (80VA maximum). 90–105 or 180–210V AC operation available.
COOLING: Internal fan for forced air cooling. ENVIRONMENTAL LIMITS: Operating: 0°–50°C; up to 35°C at
70% non-condensing relative humidity. Storage: –25° to 70°C.
DIMENSIONS, WEIGHT: 127mm high × 216mm wide × 359mm
deep (5 in × 8½ in × 14in). Net weight 4.4kg (9 lb 11 oz).
ACCESSORIES SUPPLIED (220): Model 6011 Triaxial Test Lead
(3 ft). (220, 230): Instruction manual, programming guide.
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www.keithley.com
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