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S535 Wafer Acceptance Test System
Administrative Guide
S535-924-01 Rev. B / January 2019
*PS535-924-01B*
S535-924-01B
Wafer Acceptance Test System
S535
Administrative Guide
© 2019, Keithley Instruments, LLC
Cleveland, Ohio, U.S.A.
All rights reserved.
Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,
without the prior written approval of Keithley Instruments, LLC, is strictly prohibited.
These are the original instructions in English.
All Keithley Instruments product names are trademarks or registered trademarks of Keithley
Instruments, LLC. Other brand names are trademarks or registered trademarks of their respective
holders.
Document number: S535-924-01 Rev. B / January 2019
Safety precautions
The following safety precautions should be observed before using this product and any associated instrumentation. Although
some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous
conditions may be present.
This product is intended for use by personnel who recognize shock hazards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the
product. Refer to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the
equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the
instrument. They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line
voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures
explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained
service personnel may perform installation and service procedures.
Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low
transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient
overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient
overvoltages often associated with local AC mains connections. Certain Keithley measuring instruments may be connected to
mains. These instruments will be marked as category II or higher.
Unless explicitly allowed in the specifications, operating manual, and instrument labels, do not connect any instrument to mains.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test
fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than
30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any
unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators
are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential
human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If
the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited
sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective
devices to limit fault current and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the
connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input
power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under
test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting
cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth)
ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the
voltage being measured.
For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or
accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be
impaired.
Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the
specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground)
connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use
of a lid interlock.
The symbol on an instrument means caution, risk of hazard. The user must refer to the operating instructions located in the
user documentation in all cases where the symbol is marked on the instrument.
The symbol on an instrument means warning, risk of electric shock. Use standard safety precautions to avoid personal
contact with these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be
properly disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains hazards that might result in personal injury or death. Always read
the associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may
invalidate the warranty.
The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor
injury or damage the instrument. Always read the associated information very carefully before performing the indicated
procedure. Damage to the instrument may invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits — including the power
transformer, test leads, and input jacks — must be purchased from Keithley. Standard fuses with applicable national safety
approvals may be used if the rating and type are the same. The detachable mains power cord provided with the instrument may
only be replaced with a similarly rated power cord. Other components that are not safety-related may be purchased from other
suppliers as long as they are equivalent to the original component (note that selected parts should be purchased only through
Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement
component, call a Keithley office for information.
Unless otherwise noted in product-specific literature, Keithley instruments are designed to operate indoors only, in the following
environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution degree 1 or 2.
To clean an instrument, use a cloth dampened with deionized water or mild, water-based cleaner. Clean the exterior of the
instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that
consist of a circuit board with no case or chassis (e.g., a data acquisition board for installation into a computer) should never
require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board
should be returned to the factory for proper cleaning/servicing.
Safety precaution revision as of June 2017.
S535 system ............................................................................................................. 1-1
Table of contents
Introduction .......................................................................................................................... 1-1
Systems documentation ....................................................................................................... 1-1
System description ............................................................................................................... 1-1
Optional accessories ................................................................................................................. 1-2
S535 site preparation and installation .................................................................... 2-1
Site preparation checklist ..................................................................................................... 2-1
Unpacking the S535 system ................................................................................................ 2-2
Unpacking system components ................................................................................................ 2-3
Unpacking the S535 system accessories ................................................................................ 2-12
Keithley field service engineer installation tasks ..................................................................... 2-15
Power and operating conditions ......................................................................................... 2-19
Supplied power cords .............................................................................................................. 2-19
Line power requirements ......................................................................................................... 2-20
System power dissipation........................................................................................................ 2-20
Operating environment conditions ........................................................................................... 2-21
Triaxial connector handling and avoiding contamination ................................................... 2-21
Lockout and tagout ............................................................................................................. 2-22
Installation and connections ............................................................................................... 2-24
Position the system cabinet..................................................................................................... 2-24
Cable harness routing ................................................................ ............................................. 2-25
Floor plan ........................................................................................................................... 2-25
System cabinet size and weight ......................................................................................... 2-27
Physically securing the system .......................................................................................... 2-28
Optional advanced seismic securement ............................................................................ 2-29
Equipment startup ................................................................................................... 3-1
Introduction .......................................................................................................................... 3-1
Initial equipment startup ....................................................................................................... 3-1
System startup ..................................................................................................................... 3-2
Before starting system software ........................................................................................... 3-3
Using Telnet .............................................................................................................................. 3-3
Start the KTE software ......................................................................................................... 3-4
IC process log messages .......................................................................................................... 3-4
Stopping the IC process ............................................................................................................ 3-4
Shut down using KTE ........................................................................................................... 3-5
Emergency OFF button ........................................................................................................ 3-5
Emergency shutdown procedure ............................................................................................... 3-5
Recovering from an emergency shutdown ................................................................................ 3-6
Safety interlocks ................................................................................................................... 3-6
Table of contents S535 Wafer Acceptance Test System Administrative Guide
Additional probe card adapter safety interlock cable ................................................................. 3-8
9139A-PCA, 9139B-PCA interlock connections for S535 systems ........................................... 3-9
LO patch panel and safety interlock ................................................................................... 3-10
Prober safety ...................................................................................................................... 3-10
Network information ........................................................................................................... 3-11
Maintenance ............................................................................................................. 4-1
Hardware replacement ......................................................................................................... 4-1
Handling and cleaning precautions ...................................................................................... 4-1
Special handling of static-sensitive devices .............................................................................. 4-2
Electrical hazard tasks ......................................................................................................... 4-3
Types of electrical hazard tasks ................................................................................................ 4-3
Repair and replacement ............................................................................................................ 4-3
Instrument removal and installation ..................................................................................... 4-4
Remove system power .............................................................................................................. 4-4
Heavy instrument removal and installation ................................................................................ 4-5
General replacement procedure ................................................................................................ 4-6
Adjustment ................................................................................................................................ 4-6
Restore system power .............................................................................................................. 4-7
Fuses ........................................................................................................................................ 4-7
Power distribution and emergency off .................................................................................. 4-8
Power distribution unit connections and power distribution basics ............................................ 4-9
System emergency off circuit .................................................................................................. 4-11
Data hub license ................................................................................................................ 4-12
Editing the icconfig_<QMO>.ini file .................................................................................... 4-13
Using NPLCs to adjust speed and accuracy ..................................................................... 4-13
Setting the number of power line cycles .................................................................................. 4-14
Setting a custom system speed .............................................................................................. 4-14
NPLC default differences ........................................................................................................ 4-15
Decommissioning an S535 test system ............................................................................. 4-15
Instrument specifications and documentation ...................................................... 5-1
Introduction .......................................................................................................................... 5-1
Switching .............................................................................................................................. 5-2
Model 707B Switch Matrix Mainframe ....................................................................................... 5-2
Sourcing and measuring ...................................................................................................... 5-3
Model 2636B System SourceMeter Instrument ................................ ......................................... 5-3
Model 2461-SYS System SourceMeter Instrument ................................................................... 5-3
TSP-Link controller ............................................................................................................... 5-4
Optional instrumentation ...................................................................................................... 5-4
Typical matrix connections ................................................................................................... 5-4
S535 standard 4-wire low-current on 7530-based system ........................................................ 5-5
S535 KTE communications .................................................................................................. 5-6
In this section:
Introduction .............................................................................. 1-1
Systems documentation ........................................................... 1-1
System description ................................................................... 1-1
Introduction
Section 1
S535 system
If you have any questions after reviewing this information, please contact your local Keithley
Instruments office, sales partner, or distributor. You can also call the corporate headquarters of
Keithley Instruments (toll-free inside the U.S. and Canada only) at 1-800-935-5595, or from outside
the U.S. at +1-440-248-0400. For worldwide contact numbers, visit the Keithley Instruments website
(tek.com/keithley).
Systems documentation
Documentation for your system is available at tek.com/keithley. Following is a list of documentation
for your system, including the document part numbers.
S535 Wafer Acceptance Test System Administrative Guide (S535-924-01)
S535 Wafer Acceptance Test System Reference Manual (S535-901-01)
Keithley Test Environment (KTE) Programmer's Manual (S500-904-01)
System description
The Keithley Instruments S535 Wafer Acceptance Test System is a configurable, instrument-based
system for wafer acceptance testing and semiconductor parametric characterization and testing.
Section 1: S535 system S535 Wafer Acceptance Test System Administrative Guide
1-2
The S535 systems have flexible hardware configurations that allow you to customize them to your
S535 system configuration options
DC source-measure units (SMUs)
Two to 16 SMU channels
Maximum number of SMUs depends on other items in
the system rack
Model 2461-SYS System SourceMeter
®
instruments
(quantity: 0 to 12)
Model 2636B System SourceMeter
®
instruments
(quantity: 2 to 8)
Model 2450 System SourceMeter
®
instrument (for use as
TSP® master controller only; quantity: 1)
6-slot switching matrix
One Model 707B Switch Matrix Mainframe with Model 7530
switch cards (quantity: 2 to 6)
Optional capacitance-voltage (C-V)
One channel of C-V (using one Model 4200A-SCS with one
Model 4210-CVU card)
Optional instruments
Model DMM7510 7-1/2 Digit Graphical Sampling Multimeter
(quantity: 0 to 2)
Included with each system
Computer inside cabinet
External 24-inch flat-panel monitor and keyboard tray
mounted on exterior of cabinet
Keithley Test Environment (KTE) system software
LO patch panel
Safety interlock system
Adjustable cable support arm
Other options
Advanced seismic securement kit for additional
resistance to seismic forces
specific needs. See the following table for a description of the main system configuration options.
Optional accessories
Optional items and accessories that may accompany the S535 system:
Cables to connect to the test fixture or the probe card adapter
9139A-PCA (probe card adapter)
9139B-PCA (probe card adapter)
Advanced seismic securement kit
S535-924-01 Rev. B / January 2019
In this section:
Site preparation checklist ......................................................... 2-1
Unpacking the S535 system..................................................... 2-2
Power and operating conditions ............................................. 2-19
Triaxial connector handling and avoiding contamination ........ 2-21
Lockout and tagout ................................................................. 2-22
Installation and connections ................................................... 2-23
Floor plan ............................................................................... 2-25
System cabinet size and weight ............................................. 2-27
Physically securing the system .............................................. 2-28
Optional advanced seismic securement ................................. 2-29
Site preparation checklist
S535 system preparation checklist
Site
Item
Is it necessary to have lifting equipment?
Is the flooring adequate and able to support the weight of the system while moving from receiving to the final
destination (see Floor plan (on page 2-25) for specifications)?
Are all of the corridors and hallways large enough to allow clearance for the system?
Are stairways adequate for moving the system through?
Are elevators needed to move the system? Can they support the size and weight of the system?
Are the doorways wide enough for the system?
If you are using a Keithley probe card adapter, you must supply a vacuum connection (50.80 cm Hg / 20 in.).
Floor plan
Item
Did you complete the system layout (see Floor plan (on page 2-25) for specifications)?
Does your layout show all of the locations for all of the equipment?
Does your system layout show the locations of all doors and aisles?
Does your layout allow for the proper clearance of the system for the front, rear, and the keyboard/monitor
arm?
Is there enough space for personnel safety, comfort, and freedom of movement?
Section 2
S535 site preparation and installation
The following site preparation checklist will help you prepare your site for the S535 system in your
facility. If you find that an item listed is not valid for your site, you can indicate it with "N/A."
Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide
2-2
S535 system preparation checklist (continued)
Floor plan
Did you take future expansions into consideration?
Electrical
power
Item
Is there sufficient space for any supplies or manuals?
Is adequate and proper electrical power available (see Line power requirements (on page 2-20) for
specifications)?
Is anything connected to the same power source that generates noise?
Is anything that requires substantial amounts of current connected to the same power source?
Did you prepare power outlets for service, testing, or maintenance?
Unpacking the S535 system
The Keithley field service engineer (FSE) is responsible for unpacking the S535 system cabinet and
the accessories. However, we recommend that you move the crate and the accessories box to the
area where the system is going to be used.
Here is a list of tools needed for unpacking:
Safety glasses
Gloves
Standard screwdriver
Socket wrench
Socket head: 19 mm (3/4 in.)
S535-924-01 Rev. B / January 2019
S535 Wafer Acceptance Test System Administrative Guide Section 2: S535 site preparation and installation
2-3
The following information will help the FSE unpack the system. Series 500 systems are shipped in a
wooden crate (see the following figure).
Figure 1: S535 system cabinet in shipping crate
Unpacking system components
Inspect the shock sensor on the outside of the shipping crate (see the following figure). If the shock
sensor indicates a shock condition, do a thorough inspection of all components in the system cabinet.
Figure 2: S535 crate shock sensor
S535-924-01 Rev. B / January 2019
Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide
2-4
Also, check the "TIP N TELL" indicator to ensure that the crate has not been tipped over (see the
following figure).
Figure 3: S535 crate tipping indicator
Carefully remove all system components from the crate. While unpacking, make sure there is no
component damage. Report any damage to the shipping agent immediately. Please reuse or recycle
packaging materials in accordance with your local requirements.
You need at least two people to unpack and move the S535 system cabinet.
S535-924-01 Rev. B / January 2019
S535 Wafer Acceptance Test System Administrative Guide Section 2: S535 site preparation and installation
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To unpack the system components:
1. Remove the crate clamps from the crate using a standard screwdriver.
Figure 4: Removing the crate clamps
2. Open the front of the crate. The front is identified by the wooden ramp support attached across
the panel (see the following figure).
3. Make sure the ramp support is pulled away from the crate. It is held in place with hook and loop
fasteners (such as Velcro®).
S535-924-01 Rev. B / January 2019
Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide
2-6
Figure 5: Opening the front of the crate
4. Attach the ramp using the two bolts that are attached to the bottom front of the crate.
Figure 6: Front of the crate with ramp down
S535-924-01 Rev. B / January 2019
S535 Wafer Acceptance Test System Administrative Guide Section 2: S535 site preparation and installation
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5. Remove the padding from the front of the S535 system cabinet.
Figure 7: Removing the padding
6. Remove the crate clamps and slide the outer box cover off the crate.
Figure 8: Sliding the outer box off the crate
S535-924-01 Rev. B / January 2019
Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide
2-8
7. Make sure that you retract the leveling feet on the bottom of the system (next to the casters) to
put weight on the casters and prepare the system to be rolled down the ramp.
Figure 9: Leveling feet
8. Remove the four bolts from the bottom of the crate that are attached to the bottom of the S535
system cabinet using a 19 mm socket head on a socket wrench.
Figure 10: System bolted to the crate
S535-924-01 Rev. B / January 2019
S535 Wafer Acceptance Test System Administrative Guide Section 2: S535 site preparation and installation
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Figure 11: Removing the bolts from the crate
9. Save the hardware (the four bolts and washers) that you remove from the bottom of the crate.
Figure 12: System crate hardware
10. Unlock the two casters that are on the front of the S535 system cabinet by moving the locks up.
S535-924-01 Rev. B / January 2019
Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide
2-10
Figure 13: System caster brakes
11. With two people, slide the S535 system cabinet down the ramp.
Figure 14: Rolling the system down the ramp
S535-924-01 Rev. B / January 2019
S535 Wafer Acceptance Test System Administrative Guide Section 2: S535 site preparation and installation
2-11
12. Remove the tape from the packing material using scissors, taking care not to scratch the S535
system cabinet.
Figure 15: Cutting the wrap off the system
13. Move the S535 system cabinet to its final destination.
The system cabinet is shipped from the factory with all of the instruments installed. Most equipment
connections and wiring of instruments in the system cabinet was done at the factory.
S535-924-01 Rev. B / January 2019
Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide
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Unpacking the S535 system accessories
The accessories are shipped in a separate box or in multiple boxes, depending on how many
accessories are ordered.
Figure 16: S535 system accessories
The accessories box contains a computer monitor, keyboard, and mouse. It also includes required
installation hardware, USB extension cables, cable support arm, connectors for the keyboard and
mouse, and any other accessories that may have been ordered with the system (for example, probe
card adapter, cables to connect to the test fixture or probe card adapter, or advanced seismic
securement kit). You will also find all of the documentation that is shipped with your order. Please
reuse or recycle packaging materials in accordance with your local requirements.
The following figures are examples of system accessories that may be included in your shipment.
What you receive may be different depending on your system configuration.
S535-924-01 Rev. B / January 2019
S535 Wafer Acceptance Test System Administrative Guide Section 2: S535 site preparation and installation
2-13
Figure 17: Typical system accessories
Figure 18: Monitor arm accessory
Figure 19: Keyboard tray and arm accessory
S535-924-01 Rev. B / January 2019
Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide
2-14
Figure 20: Cable support arm accessory
Model
Quantity
Description
CA-63-12
2
12 ft three-lug triaxial cables
237-TRX-T
1
Three-slot male to dual three-lug female triaxial tee adapter
237-BNC-TRX
1
High-voltage two-slot BNC to three-lug female triaxial adapter
Chuck cables for optional probe card adapters
A set of chuck cables is included with the optional 9139A-PCA and 9139B-PCA probe card adapters.
Model numbers of cables vary based on the prober you are using. For example, the Keithley Field
Service Engineer (FSE) will install the cables shown in the following table for Tel P8 probers.
If a different cable termination scheme is required, a customer-supplied solution can be used.
Optional probe card adapter vacuum requirement
9139A-PCA and 9139B-PCA probe card adapter requirement: A 50.80 cm (20 in.) Hg (which is the
same as 40.73 PSI) vacuum supply, with a hose connection of 0.64 cm (1/4 in.) outside diameter and
0.32 cm (1/8 in.) inside diameter.
For detailed information about the 9139A-PCA and 9139B-PCA probe card adapters, see the
9139A-PCA and 9139B-PCA Probe Card Adapter Instruction Manuals (part numbers 9139A-901-01
and 9139B-901-01). These manuals are available for download at tek.com/keithley.
S535-924-01 Rev. B / January 2019
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