IWAKI PUMPS PDS-105 RA, PDS-105 RB Instruction Manual
Iwaki
Photoresist Dispensing Pump
PDS-105 RA/RB
Safety instructions Overview Installation Operation Maintenance
Instruction manual
Thank you for choosing our product.
Please read through this instruction manual before use.
This instruction manual describes important precautions and instructions for the product. Always keep it on hand for quick reference.
©2011 IWAKI CO., LTD.
Specication
Order conrmation
Open the package and check that the product conforms to your order. If any problem or
inconsistency is found, immediately contact your distributor.
a. Check if the delivery is correct.
Check the nameplate to see if the information such as model codes and production number are as or-
dered.
MODEL
Model code
Production number
1P417431
b. Check if the required number of accessories is provided.
<Attached accessories>
• R-03-PB8F signal wire connector (one each)
• R-03-PB5F motor wire connector (one each)
c. Check if the delivery is damaged or deformed.
Check for transit damage and loose bolts.
Order conrmation
2
Contents
Order conrmation .......................................................................................................................................... 2
Safety instructions .................................................................... 5
Warnings ........................................................................................................................................................ 6
Cautions ......................................................................................................................................................... 7
Precautions for use ...................................................................................................................................... 8
Overview .................................................................................... 9
Introduction ................................................................................................................................................... 9
Pump structure & Operating principle ........................................................................................................ 9
Discharge process ................................................................................................................................ 9
Suction process .................................................................................................................................. 10
Part names ................................................................................................................................................... 11
Identication codes .................................................................................................................................... 12
Installation ...............................................................................13
Before installation ....................................................................................................................................... 13
Installation/Piping/Wiring .......................................................................................................................... 14
Installation ................................................................................................................................................ 14
Piping ....................................................................................................................................................... 14
Wiring ....................................................................................................................................................... 15
Applicable motor drivers .......................................................................................................................... 16
Operation ..................................................................................17
Pump setting ............................................................................................................................................... 17
Pulse input & Motor rotation ..................................................................................................................... 17
Number of pulses & Flow volume ....................................................................................................... 17
Number of pulses & Flow rate ............................................................................................................. 17
Return to origin ......................................................................................................................................... 18
Home sensor output is "OFF" ............................................................................................................. 18
Home sensor output is "ON" ............................................................................................................... 18
Operation programming ........................................................................................................................... 18
Time based control (when using an Oriental Motor SG9200-2 pulse controller) ................................ 19
Flow based control (when using a pulse signal as a start signal) ....................................................... 20
Pump operation ........................................................................................................................................... 21
Contents
3
Maintenance ............................................................................ 22
Troubleshooting .......................................................................................................................................... 22
Inspection .................................................................................................................................................... 23
Daily inspection ........................................................................................................................................ 23
Specication/Outer dimension .................................................................................................................. 24
Specication ............................................................................................................................................. 24
Pump ................................................................................................................................................... 24
Stepping motor .................................................................................................................................... 25
Encoder (RB type) ............................................................................................................................... 25
Home sensor ....................................................................................................................................... 25
Pressure sensor .................................................................................................................................. 25
Outer dimension ....................................................................................................................................... 26
PDS-105R A/B .................................................................................................................................... 26
4
Contents
Safety instructions
Fire ban
Read through this section before use. This section describes important
information for you to prevent personal injury or property damage.
■ Symbols
In this instruction manual, the degree of risk caused by incorrect use is noted with the follow-
ing symbols. Please pay attention to the information associated with the symbols.
Indicates mishandling could lead to a fatal or serious
WARNING
CAUTION
accident.
Indicates mishandling could lead to personal injury or prop-
erty damage.
Safety instructions
A symbol accompanies each precaution, suggesting the use of "Caution", "Prohibited actions"
or specic "Requirement".
Caution marks Prohibited marks Requirement marks
Caution
Electrical
shock
Prohibited
Do not rework
or alter
Requirement
Wear
protection
Export Restrictions
Technical information contained in this instruction manual might be treated as controlled tech-
nology in your countries, due to agreements in international regime for export control.
Please be reminded that export license/permission could be required when this manual is
provided, due to export control regulations of your country.
Safety instructions
5
Requirement
WARNING
Turn off power before work
Risk of electrical shock. Be sure to turn off power to stop the pump and
related devices before service is performed. Let other people know about
the situation by displaying a notice such as "POWER OFF (Maintenance)"
near the power switch.
Stop operation
If you notice any abnormal or dangerous conditions, suspend operation
Requirement
Prohibited
Do not remodel
Wear
protectors
immediately and inspect/solve problems.
Do not use the pump in any condition other than its intended purpose
The use of the pump in any conditions other than those clearly specied
may result in failure or injury. Use this product in specied conditions only.
Do not modify the pump
Alterations to the pump carries a high degree of risk. It is not the manufac-
turer's responsibility for any failure or injury resulting from alterations to the
pump.
Wear protective clothing
Always wear protective clothing such as an eye protection, chemical re-
sistant gloves, a mask and a face shield during disassembly, assembly or
maintenance work. The specic solution will dictate the degree of protec-
tion. Refer to MSDS precautions from the solution supplier.
6
Requirement
WARNING
Spill precautions
Ensure protection and containment of solution in the event of plumbing or
pump damage (secondary containment).
CAUTION
Qualied personnel only
The pump should be handled or operated by qualied personnel with a
Safety instructions
Requirement
Prohibition
Requirement
Prohibition
full understanding of the pump. Any person not familiar with the product
should not take part in the operation or maintenance of the pump.
Use specied power only
Do not apply any power other than that specied on the nameplate. Other-
wise, failure or re may result. Ensure the pump is properly grounded.
Ventilation
Fumes or vapours can be hazardous with certain solutions. Ensure proper
ventilation at the operation site.
Do not install or store the pump:
• In a ammable atmosphere.
• In a dusty/humid environment.
• In a corrosive atmosphere.
Flushing before operation
Requirement
Requirement
Requirement
Requirement
Flush the inside of the pump and piping with pure water or the liquid to be
delivered before the start of operation.
Static electricity
When low electric conductivity liquids such as ultra-pure water and fluor
TM
inactive liquid (e.g. Fluorinert
) are handled, the static electricity may be
generated in the pump and may cause static discharge. Take counter-
measures to remove the static electricity.
Before returning product
Be sure to drain chemicals and clean the inside of the pump before return
so that a harmful chemical does not spill out in transit.
Disposal of a used pump
Dispose of any used or damaged pump in accordance with relevant regu-
lations. Consult a licensed industrial waste products disposing company.
CAUTION
7
Precautions for use
• Electrical work should be performed by a qualied electrician. Otherwise,
personal injury or property damage could result.
• Do not install the pump:
–In a ammable atmosphere.
–In a dusty/humid place.
– In a corrosive atmosphere.
• Allow sufficient space around the pump for easy access and maintenance.
• Use care handling the pump. Do not drop. An impact may affect pump
performance. Do not use a pump that has been damaged to avoid the risk
of electrical damage or shock.
Caution
Caution
Caution
• The pump is not waterproof. Do not operate the pump while wet with solu-
tion or water. Failure or injury may result. Immediately dry off the pump if it
gets wet.
• Do not close discharge line during operation. Solution may leak or piping
may break.
• Solution in the discharge line may be under pressure. Release the pres-
sure from the discharge line before disconnecting plumbing or disassembly
of the pump to avoid solution spray.
• Wear protective clothing when handling or working with pumps. Consult
solution MSDS for appropriate precautions. Do not come into contact with
residual solution.
Caution
Caution
Requirement
Caution
Precautions for use
8
Overview
Pump working principle, part names and identication codes are described in this section.
Introduction
Pump structure & Operating principle
The rotational motion of the stepping motor is changed to linear motion by the direct drive unit. Liquid is loaded
into the pump head and then delivered to a discharge line as the bellows reciprocates.
Principle of operation
● The bellows expands and contracts as the ball screw reciprocates.
● The reciprocating motion of the bellows compresses or expands the shape of the tubephragm via hydraulic
uid.
● Volumetric change is created in the tubephragm.
● Liquid is taken in as the tubephragm expands and is pushed out as it contracts in sync with the action of the
check valves (pump head valves).
Overview
■ Discharge process
Stepping motor
Cylinder
Ball screw
OUT
Hydraulic fluid
Bellows
Tubephragm
Check valve
Introduction
9
Loading...