IWAKI PUMPS FS-15HT1, FS-15HT2, FS-30HT1, FS-30HT2, FS-60HT1 Instruction Manual

Read this manual before use of product

IWAKI
Pneumatic Drive Bellows Pump

FS Series
Instruction Manual

Thank you for having selected IWAKI's Pneumatic Drive Bellows Pump FS Series.
This instruction manual, which is divided into 5 sections, namely “Safety Section,”
“Outline Section,” “Installation Section,” “Operation Section” and “Maintenance
Section,” deals with the correct handling and operation procedures for the pump. To
make maximum use of the pump and to ensure safe and long operation of the pump,
please read this manual thoroughly and carefully prior to operating the pump.

Contents

IMPORTANT INSTRUCTIONS

..................................................................

1

Safety Section (Instructions to prevent accidents)

.................................

2

OUTLINE OF PRODUCT

..........................................................................

6

1. Unpacking and Inspection

....................................

7

2. Operation Principle

...............................................

7

3. Identification Codes

..............................................

8

4. Specifications

.......................................................

8

5. Outer Dimensions/Mass

.......................................

9

6. Names of Parts and Structure of Pump

.............

11

7. Description on Body and Label

..........................

13

INSTALLATION SECTION

......................................................................

14

1. Before Use

.........................................................

15

2. Installation, Piping, and Wiring

...........................

18

OPERATION SECTION

.........................................................................

32

1. Preparation

.........................................................

33

2. Pump Operation

.................................................

33

3. Points to Be Observed in Operation

...................

34

MAINTENANCE SECTION

.....................................................................

35

1. Causes of Trouble and
Troubleshooting

..................................................

36

2. Maintenance and Inspection

..............................

38

3. Consumable Parts

..............................................

39

This instruction manual should be kept on hand by the end user for quick
reference. It is recommended that each user, after reading the instruction
manual thoroughly, place it in a position close to the pump system and where it
may be easily accessed by any user at any time whenever necessary.

- 1 -

Types of Symbols

Indicates that "Warning" or "Caution" must be exercised. Inside
this triangle, a concrete and practical image provided as a warning
or caution message is depicted.

Indicates a prohibited action or procedure. Inside or near this cir­cle, a concrete and practical image of the activity to be avoided is
depicted.

Indicates an important action or procedure which must be per­formed or carried out without fail. Failure to follow the instructions
herein can lead to malfunction or damage to the pump.

For the Safe and Correct Handling of the Pump

• Read the "Safety Instructions" sections carefully to prevent accidents involving your customers or
other personnel and to avoid damage or loss of other assets. Always follow the instructions and
advice found in these sections.

• Observe and abide by the instructions described in this manual. These instructions are very
important for protecting pump users from potentially dangerous conditions and situations related
with the use of the pump system.

• The symbols relate to the following meanings described below:

Nonobservance or misapplication of the
contents of the "Warning" section could
lead to a serious accident, including death
or injury.

Nonobservance or misapplication of the
contents of the "Caution" section could
lead to serious physical injury to the user
or serious damage to the product.

Warning

Caution

Important Instruction

- 2 -

WARNING

• Look around

Make sure there is no one around the pump when connecting the power cable. The
power supply switch is not provided on the pump. Connecting the power cable and
supply air to the pump starts pump operation.

• Do not remodel pump

Never try to remodel the pump. Remodeling may be a cause of serious accident or
damage. Iwaki takes no responsibility for accidents or damages that may result due
to any remodeling without first obtaining permission from Iwaki.

• For specified application only

The use of a pump in any application other than those clearly specified may result in
injury or damage to the pump. Use the pump strictly in accordance with the pump
specifications and application range.

• Do not drain

Never discharge hazardous liquid, including but not limited to chemical liquid, over
the ground or floor in the plant directly.
Abide by local regulations when disposing of hazardous substances.

• Do not touch

Touching the pump or piping which is extremely hot due to the circulation of a hot
liquid may cause severe burns. Arrange adequate hand-protective measures when
feeding a liquid at temperatures higher than 50 °C.

CAUTION

• Do not exceed the specified voltage

Do not supply power voltage in excess of the level specified. Otherwise, a fire or
electric shock may resulted.

• Wear protectors

Never fail to wear protective gear (protective goggles, cap, mask, acid-resistant
gloves) when disassembling, assembling, or maintaining the pump. In addition,
clean the pump carefully with pure water before working on the pump.

• Qualified operator only

The pump must be operated only by operator(s) who have been trained in the safe
operation of the pump.

Safety Section

CAUTION

• Lifting pump

If a lifting rope or chain breaks or is cut when lifting the pump, a fatal or serious
injury to person may result from the accident. Select a lifting rope or chain which is
strong enough for the load of the pump. Furthermore, no person should be allowed
to get under the pump while it is being lifted.

• Power OFF

Make sure no one turns on the power switch while work is being done on the pump.
Be sure to turn off the power switch before you start any maintenance/repair work
concerning the pump. If the working site is noisy or under conditions of low visibility,
you should display a notice which clearly states "POWER Off(Maintenance)," near
the power switch in order to inform other personnel about the situation. Power ON
executed by any other person than the operator/service personnel may result in a
serious accident. The operator must take special precautions to avoid accidents.

• Storage limit

Do not store the pump in places where an explosive atmosphere is located, dust is
generated, or corrosive gas (such as chlorine gas) is present. Otherwise, a fire may
be caused or the health of personnel may be jeopardized.

• Ventilate site

When handling a toxic liquid or odorant, ventilate the working site well. In addition,
wear protective gear (protective mask, goggles, gloves, etc.).

• Disposal of used pump

Disposal of used or damaged pumps must be done in accordance with local laws
and regulations. (Consult a licensed industrial waste products disposing company.)

• Send-back to Iwaki

When sending the pump back to Iwaki, drain the liquid out of the pump and clean
thoroughly with water to prevent any accidents during transportation.

• Pump stroke speed

Do not run the pump at a stroke speed higher than the max. stroke speed which is
shown on the item 4. Specifications on page 8. A stroke speed higher than Max.
stroke speed shortens the life of the bellows.

- 3 -

Safety Section

- 4 -

Safety Section

CAUTION

• Supply air pressure

Supply air pressure must be maintained within specified supply air pressure range.
Otherwise, the bellows may be deformed.

• Liquid temperature range

Pumped liquid temperature should be 5-180 deg.C.

• Prohibited liquids

Do not operate the pump with the following liquids.

· Liquid easily crystallized

· Liquid containing slurry

· Solvent naphtha

• Liquids to be handled with care

Stripper, solvent-type liquid, hydrazine or fuming sulfuric acid should be handled
carefully.

• Air exhaust port

Do not narrow the air exhaust port (for example by reducing the tube diameter).
Otherwise the bellows may be deformed due to the residual pressure.

• During pump operation

· Make sure to open both the suction and discharge-side valves fully. In addition,
confirm that the piping is fully supplied with liquid.

Pump type Liquid temperature range Supply air pressure range

FS-15·30·60

5-50 deg.C 0.147-0.490 (MPa)

51-100 deg.C 0.147-0.294 (MPa)

101-180 deg.C 0.147-0.196 (MPa)

- 5 -

Safety Section

CAUTION

• Stopping pump operation

· When stopping pump operation, release the pressure on the discharge side first.
Otherwise, the bellows may be deformed due to the residual pressure on the
pump discharge side.

· If a valve is provided on the discharge side, do not close the valve upon stopping
the pump. The resulting impactive pressure may deform the bellows or connect­ing plate.

• Pump at halt

Do not supply air to both the right and left air-supply ports at the same time, to pre­vent the bellows from becoming deformed.

• Note for electrode

There is a case which electrode could not detect leakages. This comes from oper­ating condition (supply air pressure etc) and size of crakes on the bellows. please
contact IWAKI for detail.

• Static electricity

When low electric conductivity liquids such as ultra-pure water and fluor inactive liq­uid (e.g. FluorinertTM) are handled, the static electricity may be generated in the
pump, which may cause static discharge and pump break down. Take countermea­sures to avoid and remove the static electricity.

- 6 -

OUTLINE OF PRODUCT

1. Unpacking and Inspection ................. 7

2. Operating Principle ............................ 7

3. Identification Codes ........................... 8

4. Specifications .................................... 8

5. Outer Dimensions/Mass .................... 9

6. Names of Parts and

Structure of Pump ........... 11

7. Description on Body and Label ....... 13

This section deals with operating principle, type and specifications of the
pump as an introduction of the pneumatic drive bellows pump.

- 7 -

After unpacking the product, check the following points
to ascertain that the product is exactly as you ordered.
If you find anything wrong, please contact your dealer.

[1] Does the model indicated on the nameplate repre-

sent what you ordered?

[2] Has the pump or any part of it been damaged as the

result of an accident or mishandling in transit?

[3] Have all the special accessories, if ordered, been

delivered with the pump? e.g.:
1 Controller

(AC-1 type, FD type, SC type, FDC-1 type)

2 Quick exhaust valve

1. Unpacking and Inspection

Iwaki's air-driven bellows pumps are made entirely of
fluororesin and designed for semiconductor manufac­turing processes.

The pump unit consists of two air chambers and a pair
of bellows. These bellows move reciprocally in the air
chambers for suction and discharge, by which the liquid
is pumped continuously.

[1] Liquid is sucked into the pump head through the

suction port by the expansion (suction motion) of
the bellows.

[2] The liquid is then forced out of the pump head

through the discharge port by the compression(dis­charge motion) of the bellows.

2. Operation Principle

Wiring depends on type of controller.

OUT

IN

Bellows Air chamber

Compression

Air supply

Pump head

Suction

Air exhaust

OUT

IN

Compression

Air supply

Suction

Air exhaust

: Liquid flow
: Air supply flow

Suction/compression: Created by bellows stroke

- 8 -

3. Identification Codes

FS - 15 H T 1 - 01

asdfgh

a Series code

FS: Pump for medium & high temperature liquid and low to high-pressure applications.

s Maximum discharge volume

FS-15 : 15 L/min.
FS-30 : 30 L/min.
FS-60 : 55 L/min.

d Liquid temp. H : 5-180 deg.C
f Pump connection port (discharge port/suction port)

T: Tube type connection (standard)

g Connection between pumphead and bellows

1: Mechanical connection type
2: Weld type

h Special specifications

No symbol : Standard
01 : Special specifications (01, 02

······

)

4. Specifications

Note 1. The maximum discharge volume value is based on pure water at room temperature.
Note 2. Supply air pressure must be limited to 0.147-0.294MPa to get the max. stroke speed. Max. stroke speed must

be 180 spm or less if supply air pressure exceeds 0.295MPa and below 0.490MPa.

Note 3. The self-priming value is based on the maximum stroke speed with pure water at room temperature.

Item FS-15HT1/T2 FS-30HT1/T2 FS-60HT1/T2

General
Specification

Max. discharge volume (Note 1) 15 L/min 30 L/min 55 L/min
Max. stroke speed (Note 2) 240 spm 220 spm 200 spm
Self-priming ability (Note 3) 1 m
Liquid temp. range (deg.C) 5-50 51-100 101-180 5-50 51-100 101-180 5-50 51-100 101-180

Supply air pressure range (MPa)

0.147-

0.490

0.147-

0.294

0.147-

0.196

0.147-

0.490

0.147-

0.294

0.147-

0.196

0.147-

0.490

0.147-

0.294

0.147-

0.196

Liquid-contacting material PFA, PTFE

Pump connection port

PFA 1/2" tube

(O.D. 12.7 ×I.D. 9.52 mm)

PFA tube

(O.D. 19 ×I.D. 16 mm)

PFA tube

(O.D. 25 ×I.D. 22 mm)

Supply air connection port Rc 1/4" Rc 1/4" Rc 3/8"
Max. air consumption

(at max. discharge volume,
max. supply air pressure)

200

Nl/min

160

Nl/min

110

Nl/min

370

Nl/min

280

Nl/min

170

Nl/min

670

Nl/min

440

Nl/min

300

Nl/min

Ambient temp. 0~40 deg.C
Driving method External forced switching of driving air

Proximity
switch
arrangement

Type High-frequency type proximity switch
Output type NPN DC open/close output
Source voltage DC10V~DC30V

2 m 2 m

5. Outer Dimensions/Mass

- 9 -

201

213

166

315

1010

96

77

84

8

74

(100)

120

(144)

15.5

(100)

IN

OUT

2- 12.7 × 9.52

φφ

AIR SUP. 2-Rc1/4

FS-15HT Mass : 6.3kg

Unit : mm

248

272

208

390

AIR SUP. 2-Rc1/4

105

93

9

(100)

10

115
151

10

(180) (100)

23

OUT

IN

2- 19 × 16

φφ

FS-30HT Mass : 11.7kg

Unit : mm

- 10 -

287

251

441

317

AIR SUP. 2-Rc3/8

152

(100)

127

107

11

12

194

12

(100)(223)

27

OUT

IN

2- 25 × 22

φφ

FS-60HT Mass : 21.5kg

Unit : mm

6. Names of Parts and Structure of Pump

- 11 -

FS-15·30·60HT1

53

52

51

6

10

18

26

2230
23

25

24

1516

35 1 41 13 14 17 21 27 11 12 19 205437

9

3738

3940

8

34

33

31

2

29

32

28

50

49

36

48

47

46444342 45

SECTION : N

N : LEAK SENSOR

No. Parts Name

Q'ty

Material Remarks No. Parts Name

Q'ty

Material Remarks

1 Pump head 1 PTFE 28 Proximity switch 2
2 Tube 2 PFA 29 Pan head screw 4 Stainless steel
3 Bellows 2 PTFE 30 O ring 2 FKM
4 Valve case 4 PFA 31 Cylinder head cover 2 PPE
5 Valve 4 PFA 32 Switch holder A 2 PPE
6 Bellows plate 2 ADC12 4F coating 33 Switch holder B 2 PPE
7 Split flange 4 SUS304 34 Pan head screw 8 PPS
8 Hex. bolt 12 Stainless steel 35 Cap 8 PP

9 Spring washer 12 Stainless steel 36 Joint 2 PP CP-C6-R1/8
10 O ring 2 FKM 37 Stud bolt 4 SUS304 PTFE coated
11 Pump shaft 2 SUS304 Hard chrome plated 38 Hex. nut 8 Stainless steel
12 Connecting plate 2 SUS304 39 Plate washer 8 Stainless steel
13 Connecting shaft 2 SUS304 40 Conical spring washer 24 Stainless steel
14 Shaft cover 2 SUS304 4F coating 41 O ring 2 FKM
15 Hex. nut 2 Stainless steel 42 Leak sensor 4 SUS304
16 Spring washer 2 Stainless steel 43 Gasket 4 PTFE
17 E shape stop ring 2 Stainless steel 44 O ring 4 FKM
18 O ring 2 FKM 45 Gasket C 4 PTFE
19 Hex. bolt 4 Stainless steel 46 Plate washer 4 Stainless steel
20 Spring washer 4 Stainless steel 47 Spring washer 8 Stainless steel
21 Cylinder head 2 ADC12 4F coating 48 Hex. nut 8 Stainless steel
22 Lip seal 2 Filler charged PTFE 49 FF cord (black) 2 AWG26 1.3 dia.
23 Packing stopper 2 SUS304 50 FF cord (white) 2 AWG26 1.3 dia.
24 Bearing 2 Filler charged PTFE 51 Cap. plug 2 Stainless steel 4F coating
25 Stop ring 2 Stainless steel 52 Hex. nut 4 Stainless steel
26 Screw 8 Stainless steel 53 Handle 2 Stainless steel 4F coating
27 O ring 4 FKM