Datasheet HCTS08MS Datasheet (Intersil Corporation)

August 1995
HCTS08MS
Radiation Hardened
Quad 2-Input AND Gate
Features
• 3 Micron Radiation Hardened SOS CMOS
• Total Dose 200K RAD(Si)
2
• SEP Effective LET No Upsets: >100 MEV-cm
• Single Event Upset (SEU) Immunity < 2 x 10
/mg
-9
Errors/Bit-Day
(Typ)
• Dose Rate Survivability: >1 x 10
10
• Dose Rate Upset >10
RAD(Si)/s 20ns Pulse
12
Rads (Si)/Sec
• Latch-Up Free Under Any Conditions
o
• Military Temperature Range: -55
C to +125oC
• Significant Power Reduction Compared to LSTTL ICs
• DC Operating Voltage Range: 4.5V to 5.5V
• LSTTL Input Compatibility
- VIL = 0.8V
- VIH = VCC/2
• Input Current Levels Ii 5µA at VOL, VOH
Description
The Intersil HCTS08MS is a Radiation Hardened Quad 2-Input AND Gate. A high on both inputs force the output to a High state.
The HCTS08MS utilizes advanced CMOS/SOS technology to achieve high-speed operation. This device is a member of radiation hardened, high-speed, CMOS/SOS Logic Family.
The HCTS08MS is supplied in a 14 lead Ceramic Flatpack Package (K suffix) or a 14 lead SBDIP Package (D suffix).
Ordering Information
PART
NUMBER
HCTS08DMSR -55oC to +125oC Intersil Class
HCTS08KMSR -55oC to +125oC Intersil Class
HCTS08D/ Sample
HCTS08K/ Sample
HCTS08HMSR +25oC Die Die
TEMPERATURE
RANGE
+25oC Sample 14 Lead SBDIP
+25oC Sample 14 Lead Ceramic
SCREENING
LEVEL PACKAGE
14 Lead SBDIP
S Equivalent
14 Lead Ceramic
S Equivalent
Flatpack
Flatpack
Pinouts
METAL SEAL PACKAGE (SBDIP)
MIL-STD-1835 CDIP2-T14
TOP VIEW
A1
1 2
B1
3
Y1
4
A2
5
B2
6
Y2
7
GND
14 LEAD CERAMIC METAL SEAL
FLATPACK PACKAGE (FLATPACK)
MIL-STD-1835 CDFP3-F14
TOP VIEW
1A1 B1 Y1 A2 B2 Y2
GND
An Bn Yn
LLL
LHL HLL HHH
NOTE: L = Logic Level Low, H = Logic level High
2 3 4 5 6 7
TRUTH TABLE
INPUTS OUTPUTS
14
VCC
13
B4
12
A4
11
Y4
10
B3
9
A3
8
Y3
14 13
12 11 10
9 8
Functional Diagram
(1, 4, 9, 12)
An
(2, 5, 10, 13)
Bn
VCC B4 A4 Y4 B3 A3 Y3
(3, 6, 8, 11)
Yn
CAUTION: These devices are sensitive to electrostatic discharge; follow proper IC Handling Procedures. http://www.intersil.com or 407-727-9207
| Copyright © Intersil Corporation 1999
1
DB NA
Spec Number 518842
File Number 2136.2
Specifications HCTS08MS
Absolute Maximum Ratings Reliability Information
Supply Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .-0.5V to +7.0V
Input Voltage Range, All Inputs . . . . . . . . . . . . .-0.5V to VCC +0.5V
DC Input Current, Any One Input. . . . . . . . . . . . . . . . . . . . . . . . .±10mA
DC Drain Current, Any One Output. . . . . . . . . . . . . . . . . . . . . . .±25mA
(All Voltage Reference to the VSS Terminal)
Storage Temperature Range (TSTG) . . . . . . . . . . . -65oC to +150oC
Lead Temperature (Soldering 10sec) . . . . . . . . . . . . . . . . . . +265oC
Junction Temperature (TJ) . . . . . . . . . . . . . . . . . . . . . . . . . . +175oC
ESD Classification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Class 1
CAUTION: As with all semiconductors, stress listed under “Absolute Maximum Ratings” may be applied to devices (one at a time) without resulting in permanent damage. This is a stress rating only. Exposure to absolute maximum rating conditions for extended periods may affect device reliability. The conditions listed under “Electrical Performance Characteristics” are the only conditions recommended for satisfactory device operation..
Operating Conditions
Supply Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . +4.5V to +5.5V
Input Rise and Fall Times at 4.5V VCC (TR, TF). . . . . 100ns/V Max
Operating Temperature Range (TA) . . . . . . . . . . . . -55oC to +125oC
TABLE 1. DC ELECTRICAL PERFORMANCE CHARACTERISTICS
Thermal Resistance θ
SBDIP Package. . . . . . . . . . . . . . . . . . . . 74oC/W 24oC/W
Ceramic Flatpack Package . . . . . . . . . . . 116oC/W 30oC/W
Maximum Package Power Dissipation at +125oC
SBDIP Package. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 0.66W
Ceramic Flatpack Package . . . . . . . . . . . . . . . . . . . . . . . . . 0.43W
If device power e xceeds package dissipation capability, provide heat sinking or derate linearly at the following rate:
SBDIP Package. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13.5mW/oC
Ceramic Flatpack Package . . . . . . . . . . . . . . . . . . . . . .8.6mW/oC
Input Low Voltage (VIL). . . . . . . . . . . . . . . . . . . . . . . . . 0.0V to 0.8V
Input High Voltage (VIH) . . . . . . . . . . . . . . . . . . . . . . .VCC/2 to VCC
JA
θ
JC
(NOTE 1)
PARAMETERS SYMBOL
Quiescent Current ICC VCC = 5.5V,
Output Current (Sink)
Output Current (Source)
Output Voltage Low VOL VCC = 4.5V, VIH = 2.25V,
Output Voltage High VOH VCC = 4.5V, VIH = 2.25V,
Input Leakage Current
IOL VCC = 4.5V, VIH = 4.5V,
IOH VCC = 4.5V, VIH = 4.5V,
IIN VCC = 5.5V, VIN = VCC or
CONDITIONS
VIN = VCC or GND
VOUT = 0.4V, VIL = 0V
VOUT = VCC -0.4V, VIL = 0V
IOL = 50µA, VIL = 0.8V
VCC = 5.5V, VIH = 2.75V, IOL = 50µA, VIL = 0.8V
IOH = -50µA, VIL = 0.8V
VCC = 5.5V, VIH = 2.75V, IOH = -50µA, VIL = 0.8V
GND
GROUP
A SUB-
GROUPS TEMPERATURE
1 +25oC-10µA
2, 3 +125oC, -55oC - 200 µA
1 +25oC 4.8 - mA
2, 3 +125oC, -55oC 4.0 - mA
1 +25oC -4.8 - mA
2, 3 +125oC, -55oC -4.0 - mA
1, 2, 3 +25oC, +125oC, -55oC - 0.1 V
1, 2, 3 +25oC, +125oC, -55oC - 0.1 V
1, 2, 3 +25oC, +125oC, -55oC VCC
1, 2, 3 +25oC, +125oC, -55oC VCC
1 +25oC -0.5 +0.5 µA
2, 3 +125oC, -55oC -5.0 +5.0 µA
LIMITS
-V
-0.1
-V
-0.1
UNITSMIN MAX
Noise Immunity Functional Test
NOTES:
1. All voltages reference to device GND.
2. For functional tests, VO 4.0V is recognized as a logic “1”, and VO 0.5V is recognized as a logic “0”.
FN VCC = 4.5V,
VIH = 2.25V, VIL = 0.8V, (Note 2)
7, 8A, 8B +25oC, +125oC, -55oC 4.0 0.5 -
2
Spec Number 518842
Specifications HCTS08MS
TABLE 2. AC ELECTRICAL PERFORMANCE CHARACTERISTICS
GROUP
(NOTES 1, 2)
PARAMETER SYMBOL
Input to Output TPHL VCC = 4.5V 9 +25oC 2 18 ns
TPLH VCC = 4.5V 9 +25oC 2 20 ns
NOTES:
1. All voltages referenced to device GND.
2. AC measurements assume RL = 500, CL = 50pF, Input TR = TF = 3ns, VIL = GND, VIH = 3V.
TABLE 3. ELECTRICAL PERFORMANCE CHARACTERISTICS
PARAMETER SYMBOL CONDITIONS NOTES TEMPERATURE
Capacitance Power Dissipation
Input Capacitance CIN VCC = 5.0V, f = 1MHz 1 +25oC - 10 pF
CPD VCC = 5.0V, f = 1MHz 1 +25oC - 45 pF
CONDITIONS
A SUB-
GROUPS TEMPERATURE
10, 11 +125oC, -55oC 2 20 ns
10, 11 +125oC, -55oC 2 22 ns
1 +125oC, -55oC - 80 pF
LIMITS
LIMITS
UNITSMIN MAX
UNITSMIN MAX
1 +125oC - 10 pF
Output Transition Time
NOTE:
1. The parameters listed in Table 3 are controlled via design or process parameters. Min and Max Limits are guaranteed but not directly tested. These parameters are characterized upon initial design release and upon design changes which affect these characteristics.
PARAMETERS SYMBOL
Quiescent Current ICC VCC = 5.5V, VIN = VCC or GND +25oC - 0.2 mA
Output Current (Sink) IOL VCC = 4.5V, VIN = VCC or GND,
Output Current (Source) IOH VCC = 4.5V, VIN = VCC or GND,
Output Voltage Low VOL VCC = 4.5V and 5.5V, VIH = VCC/2,
TTHL TTLH
TABLE 4. DC POST RADIATION ELECTRICAL PERFORMANCE CHARACTERISTICS
VCC = 4.5V 1 +25oC - 15 ns
1 +125oC - 22 ns
200K RAD LIMITS
(NOTES 1, 2)
CONDITIONS TEMPERA TURE
+25oC 4.0 - mA
VOUT = 0.4V
+25oC -4.0 - mA
VOUT = VCC -0.4V
+25oC - 0.1 V VIL = 0.8V at 200K RAD, IOL = 50µA
UNITSMIN MAX
Output Voltage High VOH VCC = 4.5V and 5.5V, VIH = VCC/2,
VIL = 0.8V at 200K RAD, IOH = -50µA
Input Leakage Current IIN VCC = 5.5V, VIN = VCC or GND +25oC -5.0 +5.0 µA
+25oC VCC
-0.1
-V
Spec Number 518842
3
TABLE 4. DC POST RADIATION ELECTRICAL PERFORMANCE CHARACTERISTICS (Continued)
PARAMETERS SYMBOL
Specifications HCTS08MS
(NOTES 1, 2)
CONDITIONS TEMPERA TURE
200K RAD LIMITS
UNITSMIN MAX
Noise Immunity Functional Test
Input to Output TPHL VCC = 4.5V +25oC 2 20 ns
NOTES:
1. All voltages referenced to device GND.
2. AC measurements assume RL = 500, CL = 50pF, Input TR = TF = 3ns, VIL = GND, VIH = 3V.
3. For functional tests, VO 4.0V is recognized as a logic “1”, and VO 0.5V is recognized as a logic “0”.
COMFORMANCE GROUP MIL-STD-883 METHOD
Initial Test 100% 5004 1, 7, 9 1 (Note 2) Interim Test 100% 5004 1, 7, 9, 1, (Note 2) PDA 100% 5004 1, 7, Final Test 100% 5004 2, 3, 8A, 8B, 10, 11 Group A (Note 1) Sample 5005 1, 2, 3, 7, 8A, 8B, 9, 10, 11 Subgroup B5 Sample 5005 1, 2, 3, 7, 8A, 8B, 9, 10, 11, 1, 2, 3, (Note 2) Subgroup B6 Sample 5005 1, 7, 9 Group D Sample 5005 1, 7, 9
NOTES:
1. Alternate Group A testing in accordance with MIL-STD-883 Method 5005 may be exercised.
2. Table 5 parameters only.
FN VCC = 4.5V, VIH = 2.25V,
VIL = 0.8V at 200K RAD, (Note 3)
TPLH VCC = 4.5V +25oC 2 22 ns
TABLE 5. BURN-IN AND OPERATING LIFE TEST, DELTA PARAMETERS (+25oC)
GROUP B
PARAMETER
ICC 5 3µA
IOL/IOH 5 -15% of 0 Hour
TABLE 6. APPLICABLE SUBGROUPS
SUBGROUP DELTA LIMIT
+25oC ---
GROUP A SUBGROUPS
TESTED RECORDED
TABLE 7. TOTAL DOSE IRRADIATION
TEST READ AND RECORD
CONFORMANCE
GROUPS METHOD
Group E Subgroup 2 5005 1, 7, 9 Table 4 1, 9 Table 4 (Note 1)
NOTE:
1. Except FN test which will be performed 100% Go/No-Go.
PRE RAD POST RAD PRE RAD POST RAD
Spec Number 518842
4
Specifications HCTS08MS
TABLE 8. STATIC AND DYNAMIC BURN-IN TEST CONNECTIONS
OSCILLATOR
OPEN GROUND 1/2 VCC = 3V ± 0.5V VCC = 6V ± 0.5V
STATIC BURN-IN I TEST CONDITIONS (Note 1)
3, 6, 8, 11 1, 2, 4, 5, 7, 9, 10, 12,
13
STATIC BURN-IN II TEST CONNECTIONS (Note 1)
3, 6, 8, 11 7 - 1, 2, 4, 5, 9, 10, 12,
DYNAMIC BURN-IN I TEST CONNECTIONS (Note 2)
- 7 3, 6, 8, 11 14 1, 2, 4, 5, 9, 10,
NOTES:
1. Each pin except VCC and GND will have a resistor of 10KΩ± 5% for static burn-in.
2. Each pin except VCC and GND will have a resistor of 1KΩ± 5% for dynamic burn-in.
TABLE 9. IRRADIATION TEST CONNECTIONS
OPEN GROUND VCC = 5V ± 0.5V
3, 6, 8, 11 7 1, 2, 4, 5, 9, 10, 12, 13, 14
NOTE: Each pin except VCC and GND will have a resistor of 47KΩ± 5% for irradiation testing.
Group E, Subgroup 2, sample size is 4 dice/wafer 0 failures.
-14--
13, 14
50kHz 25kHz
--
-
12, 13
Spec Number 518842
5
HCTS08MS
Intersil Space Level Product Flow - ‘MS’
Wafer Lot Acceptance (All Lots) Method 5007
(Includes SEM)
GAMMA Radiation Verification (Each Wafer) Method 1019,
4 Samples/Wafer, 0 Rejects 100% Nondestructive Bond Pull, Method 2023 Sample - Wire Bond Pull Monitor, Method 2011 Sample - Die Shear Monitor, Method 2019 or 2027 100% Internal Visual Inspection, Method 2010, Condition A 100% Temperature Cycle, Method 1010, Condition C,
10 Cycles 100% Constant Acceleration, Method 2001, Condition per
Method 5004 100% PIND, Method 2020, Condition A 100% External Visual 100% Serialization 100% Initial Electrical Test (T0) 100% Static Burn-In 1, Condition A or B, 24 hrs. min.,
NOTES:
1. Failures from Interim electrical test 1 and 2 are combined for determining PDA 1.
2. Failures from subgroup 1, 7, 9 and deltas are used for calculating PDA. The maximum allowable PDA = 5% with no more than 3% of the
3. Radiographic (X-Ray) inspection may be performed at any point after serialization as allowed by Method 5004.
4. Alternate Group A testing may be performed as allowed by MIL-STD-883, Method 5005.
5. Data Package Contents:
o
+125
C min., Method 1015
failures from subgroup 7.
• Cover Sheet (Intersil Name and/or Logo, P.O. Number , Customer Part Number, Lot Date Code, Intersil P art Number , Lot Number, Quan­tity).
• Wafer Lot Acceptance Report (Method 5007). Includes reproductions of SEM photos with percent of step coverage.
• GAMMA Radiation Report. Contains Cover page, disposition, Rad Dose, Lot Number , Test Package used, Specification Numbers, Test equipment, etc. Radiation Read and Record data on file at Intersil.
• X-Ray report and film. Includes penetrometer measurements.
• Screening, Electrical, and Group A attributes (Screening attributes begin after package seal).
• Lot Serial Number Sheet (Good units serial number and lot number).
• Variables Data (All Delta operations). Data is identified by serial number. Data header includes lot number and date of test.
• The Certificate of Conformance is a part of the shipping invoice and is not part of the Data Book. The Certificate of Conformance is signed by an authorized Quality Representative.
100% Interim Electrical Test 1 (T1) 100% Delta Calculation (T0-T1) 100% Static Burn-In 2, Condition A or B, 24 hrs. min.,
o
C min., Method 1015
+125 100% Interim Electrical Test 2 (T2) 100% Delta Calculation (T0-T2) 100% PDA 1, Method 5004 (Notes 1and 2) 100% Dynamic Burn-In, Condition D, 240 hrs., +125
o
Equivalent, Method 1015 100% Interim Electrical Test 3 (T3) 100% Delta Calculation (T0-T3) 100% PDA 2, Method 5004 (Note 2) 100% Final Electrical Test 100% Fine/Gross Leak, Method 1014 100% Radiographic, Method 2012 (Note 3) 100% External Visual, Method 2009 Sample - Group A, Method 5005 (Note 4) 100% Data Package Generation (Note 5)
C or
Spec Number 518842
6
HCTS08MS
AC Timing Diagrams
VIH
VS
VIL
VOH
VOL
VOH
VOL
PARAMETER HCTS UNITS
VCC 4.50 V
VIH 3.00 V
VS 1.30 V
INPUT
TPLH
VS
TTLH
20%
OUTPUT
80%
OUTPUT
FIGURE 1
AC VOLTAGE LEVELS
TPHL
80%
20%
TTHL
AC Load Circuit
DUT TEST
CL
CL = 50pF RL = 500
POINT
RL
FIGURE 2
VIL 0 V
GND 0 V
Spec Number 518842
7
Die Characteristics
DIE DIMENSIONS:
87 x 88 mils
2.20 x 2.24mm
METALLIZATION:
Type: SiAl Metal Thickness: 11k
Å ± 1kÅ
GLASSIVATION:
Type: SiO
2
Thickness: 13kű 2.6kÅ
WORST CASE CURRENT DENSITY:
<2.0 x 10
5
A/cm
2
BOND PAD SIZE:
100µm x 100µm 4 mils x 4 mils
Metallization Mask Layout
HCTS08MS
HCTS08MS
B1 (2)
Y1 (3)
A2 (4)
B2 (5)
A1
(1) (14) (13)
VCC B4
(12) A4
(11) Y4
(10) B3
(9) A3
(6) (7) (8) Y2 GND Y3
8
Spec Number 518842
HCTS08MS
Packaging
LEAD FINISH
c1
-A-
-B-
S
bbb C A - B
BASE
PLANE
SEATING
PLANE
S1 b2
b
ccc C A - BMD
D
A
A
S S
e
NOTES:
1. Index area: A notch or a pin one identification mark shall be locat­ed adjacent to pin one and shall be located within the shaded area shown. The manufacturer’s identification shall not be used as a pin one identification mark.
2. The maximum limits of lead dimensions b and c or M shall be measured at the centroid of the finished lead surfaces, when solder dip or tin plate lead finish is applied.
3. Dimensions b1 and c1 apply to lead base metal only. Dimension M applies to lead plating and finish thickness.
4. Corner leads (1, N, N/2, andN/2+1) may be configured with a partial lead paddle. For this configuration dimension b3 replaces dimension b2.
5. Dimension Q shall be measured from the seating plane to the base plane.
6. Measure dimension S1 at all four corners.
7. Measure dimension S2 from the top of the ceramic body to the nearest metallization or lead.
8. N is the maximum number of terminal positions.
9. Braze fillets shall be concave.
10. Dimensioning and tolerancing per ANSI Y14.5M - 1982.
11. Controlling dimension: INCH.
S S
D
-D-
E
S2
-C-
BASE
METAL
M
SECTION A-A
Q
A
L
eA/2
aaa C A - B
M
b1
M
(b)
eA
S S
c
D
D14.3 MIL-STD-1835 CDIP2-T14 (D-1, CONFIGURATION C)
14 LEAD CERAMIC DUAL-IN-LINE METAL SEAL PACKAGE
(c)
SYMBOL
A - 0.200 - 5.08 -
b 0.014 0.026 0.36 0.66 2 b1 0.014 0.023 0.36 0.58 3 b2 0.045 0.065 1.14 1.65 ­b3 0.023 0.045 0.58 1.14 4
c 0.008 0.018 0.20 0.46 2
c1 0.008 0.015 0.20 0.38 3
D - 0.785 - 19.94 -
E 0.220 0.310 5.59 7.87 -
e 0.100 BSC 2.54 BSC ­eA 0.300 BSC 7.62 BSC -
eA/2 0.150 BSC 3.81 BSC -
L 0.125 0.200 3.18 5.08 -
Q 0.015 0.060 0.38 1.52 5 S1 0.005 - 0.13 - 6 S2 0.005 - 0.13 - 7
α
aaa - 0.015 - 0.38 ­bbb - 0.030 - 0.76 -
ccc - 0.010 - 0.25 -
M - 0.0015 - 0.038 2
N14 148
INCHES MILLIMETERS
90
o
105
o
90
o
105
NOTESMIN MAX MIN MAX
o
Rev. 0 4/94
-
All Intersil semiconductor products are manufactured, assembled and tested under ISO9000 quality systems certification.
Intersil products are sold by description only. Intersil Corporation reserves the right to make changes in circuit design and/or specifications at any time without notice. Accordingly, the reader is cautioned to verify that data sheets are current before placing orders. Information furnished by Intersil is believed to be accurate and reliable. However, no responsibility is assumed by Intersil or its subsidiaries for its use; nor for any infringements of patents or other rights of third parties which may result from its use. No license is granted by implication or otherwise under an y patent or patent rights of Intersil or its subsidiaries.
For information regarding Intersil Corporation and its products, see web site http://www.intersil.com
Sales Office Headquarters
NORTH AMERICA
Intersil Corporation P. O. Box 883, Mail Stop 53-204 Melbourne, FL 32902 TEL: (407) 724-7000 FAX: (407) 724-7240
EUROPE
Intersil SA Mercure Center 100, Rue de la Fusee 1130 Brussels, Belgium TEL: (32) 2.724.2111 FAX: (32) 2.724.22.05
ASIA
Intersil (Taiwan) Ltd. Taiwan Limited 7F-6, No. 101 Fu Hsing North Road Taipei, Taiwan Republic of China TEL: (886) 2 2716 9310 FAX: (886) 2 2715 3029
Spec Number 518842
9
HCTS08MS
Packaging
e
-A- -B-
b
0.004 H A - BMD
A
-C-
SEATING AND BASE PLANE
Q
(Continued)
S S
L
E3 E3
LEAD FINISH
c1
M
SECTION A-A
PIN NO. 1
ID AREA
E1
E
BASE
METAL
b1
(b)
0.036 H A - BMD
(c)
M
A A
S1
S S
C
-D-
-H-
LE2
NOTES:
1. Index area: A notch or a pin one identification mark shall be locat­ed adjacent to pin one and shall be located within the shaded area shown. The manufacturer’s identification shall not be used as a pin one identification mark. Alternately, a tab (dimension k) may be used to identify pin one.
2. If a pin one identification mark is used in addition to a tab, the lim­its of dimension k do not apply.
3. This dimension allows for off-center lid, meniscus, and glass overrun.
4. Dimensions b1 and c1 apply to lead base metal only . Dimension M applies to lead plating and finish thickness. The maximum lim­its of lead dimensions b and c or M shall be measured at the cen­troid of the finished lead surfaces, when solder dip or tin plate lead finish is applied.
5. N is the maximum number of terminal positions.
6. Measure dimension S1 at all four corners.
7. For bottom-brazed lead pac kages, no organic or polymeric mate­rials shall be molded to the bottom of the package to cover the leads.
8. Dimension Q shall be measured at the point of exit (bey ond the meniscus) of the lead from the body. Dimension Q minimum shall be reduced by 0.0015 inch (0.038mm) maximum when sol­der dip lead finish is applied.
9. Dimensioning and tolerancing per ANSI Y14.5M - 1982.
10. Controlling dimension: INCH.
K14.B
14 LEAD CERAMIC METAL SEAL FLATPACK PACKAGE
INCHES MILLIMETERS
SYMBOL
D
A 0.045 0.115 1.14 2.92 ­b 0.015 0.022 0.38 0.56 -
b1 0.015 0.019 0.38 0.48 -
c 0.003 0.009 0.08 0.23 -
c1 0.003 0.007 0.08 0.18 -
D - 0.390 - 9.91 3
E 0.235 0.260 5.97 6.60 ­E1 - 0.290 - 7.11 3 E2 0.125 - 3.18 - ­E3 0.030 - 0.76 - 7
e 0.050 BSC 1.27 BSC -
k 0.008 0.015 0.20 0.38 2 L 0.270 0.370 6.86 9.40 ­Q 0.010 0.020 0.25 0.51 8
S1 0.005 - 0.13 - 6
M - 0.0015 - 0.04 ­N14 14-
NOTESMIN MAX MIN MAX
Rev. 0 6/14/94
10
Spec Number 518842
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