10. Cleanroom Specification.......................................................................................................................... 20
10.1 Recommended Suction Rate............................................................................................................ 20
10.2 Suction Joint ..................................................................................................................................... 20
11. Maintenance ............................................................................................................................................ 21
11.1 Maintenance Schedule ..................................................................................................................... 21
11.2 Visual Inspection of the Machine Exterior......................................................................................... 21
11.3 Cleaning............................................................................................................................................ 21
11.4 Interior Inspection ............................................................................................................................. 22
11.5 Internal Cleaning............................................................................................................................... 23
11.6 Lubricating the Guides and Ball Screw............................................................................................. 23
11.6.1 Other than Cleanroom Specification.......................................................................................... 23
11.6.2 Cleanroom Specification............................................................................................................ 24
11.6.3 How to Apply Grease................................................................................................................. 25
11.7 Replacing/Adjusting the Stainless Sheet .......................................................................................... 26
11.8 Reduction Belt [Motor Reversing Type]:........................................................................................... 31
11.8.1 Inspecting the Belt......................................................................................................................... 31
11.8.2 Applicable Belt .............................................................................................................................. 31
11.8.3 Adjusting the Belt Tension ............................................................................................................ 31
●SA5R, SA6R ............................................................................................................................... 31
●SA7R........................................................................................................................................... 32
●SS7R, SS8R, HS8R.................................................................................................................... 32
11.8.4 Replacing the Belt......................................................................................................................... 33
●SA5R, SA6R ............................................................................................................................... 33
●SA7R........................................................................................................................................... 36
●SS7R, SS8R, HS8R.................................................................................................................... 39
11.9 Replacing the Motor.......................................................................................................................... 41
11.9.1 Motor Straight Type....................................................................................................................... 41
●SA5C, SA6C .....................................................................................................................
.......... 41
●SA5C, SA6C ............................................................................................................................... 45
●SS7C
........................................................................................................................................... 50
●SS8C, HS8C............................................................................................................................... 55
11.9.2 Motor Reversing Type................................................................................................................... 59
●SA5R, SA6R ............................................................................................................................... 59
●SA7R........................................................................................................................................... 63
●SS7R, SS8R, HS8R.................................................................................................................... 65
Appendix · How to use the home mark ........................................................................................................... 67