Hitachi TM3030 Plus Instruction Manual

INSTRUCTION MANUAL

FOR

MODEL TM3030Plus

TABLETOP MICROSCOPE

(USER’S OPERATION/MAINTENANCE EDITION)

・Before using the instrument , read the safety instructions and

precautions carefully.

・Be sure to follow the instructions and warning of instruction manual

and warning label.

・Keep this manual in a safe place nearby so it can be refer red to

whenever needed.

Copyright C Hitachi High-Technologies Corporation 2014. May/2016 5th Edition
All rights reserved. Printed in Japan. Part No. 55E-8881-4 HR-G (HMS)

NOTICE:

1. Infor m at ion contained in this document is subject to

change without notice for improvement.

2. This manual is copyright ed by Hitachi High-Technologies
Corporation with all rights reserved.
No part of this manual may be reproduced, t ransmitted or
disclosed to a third party in any form or by any means
without the express written permission of Hitachi
High-Technologies Corporat ion.

3. Hitachi High-Technologies Corporation assumes no
liability for any direct, indirect, or consequential damages
arising from use not described in this manual.
Utmost care must be exercised when using the
instrument.

4. This document does not provide any warranty or
permission for industrial propert ies or any rig ht s t o grant
license lawfully and without infringement.

PREFACE

Thank you for your recent purchase of a TM3030Plus Tabletop Microscope.
The TM3030Plus Tabletop Microscope (“TM” for short) is designed to observe microstructure
of specimen surface prepared specifically for the TM, using an electron beam accelerated to
5 or 15kV as a light source.
This product involves the use of a vacuum and high voltages. In order to ensure the safe and
proper operation of the system, you are urged to receive a briefing on operation,
maintenance, and safety precautions by representatives of Hitachi’s service department or
technicians certified by the same. Carefully read the safety tips provided in this manual, and
use the system after you have thoroughly understood the safety precautions (“Safety Tips”
for short) contained in this publication. After reading this manual, keep it in a safe place for
future referen c e .

When allowing children and pupils (“minors”) to use the system, do so under the
supervision of a system administrator who is thoroughly familiar with the
above-mentioned safety tips, and by limiting their use to personal computer (PC)
operations and moving the specimen stage. Because minors can take unexpected
action out of curiosity, the system administrator should use utmost caution not to
operate the system miners independently or unmentioned way (in this manual).

ABOUT THIS INSTRUCTION MANUAL

 This Instruction Manual describes TM operating methods, maintenance and inspection

methods, items that are necessary to support these requirements, and items that require
special attention.

 The Instruction Manual consists of the following components:

Cautionary Items (warranty, installation, relocation, after service, the life length of the
system, and other items)
Safety (a summary of safety tips)
Chapter 1: SPECIFICATIONS AND INSTALLATION CONDITIONS (installation

conditions, customer-provided items, and so forth)

Chapter 2: INSTALLATION AND SETUP (installing an application, connecting the

system to the PC, and so forth)

Chapter 3: SYSTEM CONFIGURATION (configuration, descriptions of parts, and so

forth)
Chapter 4: OPERATIONS (image observation, saving image data, and so forth)
Chapter 5: MAINTENANCE (beam axis adjustment, servicing the various parts, taking

corrective action, and so forth)
Chapter 6: REPLACEMENT PARTS (consumables, finite-life items, and lists of spare

parts)
Chapter 7: 3D-VIEW (Option)
APPENDIX

- 1 -

 First, please read the sections on “IMPORTANT” and “For the Safe Handling of the

System” provided at the beginning of this Instruction Manual.

List of Abbreviations

Abbreviations that appear frequently in this Instruction Manual and their full spellings are
given below:
PC: Personal Computer
HV: High Voltage
DFP: Diaphragm Pump
TMP: Turbo Molecular Pump
FOV: Field of View

- 2 -

IMPORTANT

Product Warranty

Product Warranty

Hitachi High Technologies Corporation (“HHT”) warrants that the Model TM3030Plus Tabletop
Microscope is free of defect, either in material or manufacturing, based on the specifications
provided in this Instruction Manual, provided that the system is used in compliance with the
contents of the Instruction Manual.
If your product fails during the warranty period due to a manufacturing defect, it will be
repaired free of charge at HHT’s discretion. In the event of a repair, substitute parts may be
used or your system may be replaced with an equivalent product instead of repairing it. For
example, in the case of PCs, printers, and the like that are used in conjunction with the
system and that are frequently discontinued and replaced with newer models, it may not be
possible to provide the same model as the one that is needed to be replaced. The warranty
does not cover systems that have been discarded, systems that have been relocated without
notice to HHT, systems that are purchased from a reseller, and consumables or parts with a
limited warranty period that have failed after the warranty period.

Geographic Area of Warranty

The warranty is limited to within the borders of the country in which the product was
purchased.

Warranty Period

The warranty period is one (1) year from the completion date of installation.

Warranty Limitations and Exclusions

HHT does not extend any warranty, either implicitly or expressly, such as, but not limited to,
warranty for marketability or market suitability, or for a particular purpose or use, other than
the terms of warranty provided herein.
The warranty does not cover the situation where the information conveyed either orally or in
writing by a sales dealer or employees without HHT-stipulated approval procedures differs
from product specifications.
Even within the warranty period, if a given problem falls in any of the categories below, it will
be excluded from free-of-charge repair warranty coverage:
(1) A system failure arising from the use of the system in a place not in compliance with the

installation site standards established by HHT.

(2) A system failure arising from the use of the system with a power source not in

compliance with HHT-specified requirements (voltage and frequency) or due to a power
supply abnormality.

IMPORTANT - 1

(3) A system failure arising from the corrosion of its electrical circuits or deterioration of its

optical elements due to the use of the system under a strongly corrosive atmosphere,
such as chlorine gas, or in a dusty environment.

(4) A system failure arising from the use of hardware, software, or supplies that are not

provided by HHT.

(5) A system failure arising from servicing or repairing the system by individuals other than

a service department designated by HHT or from system modifications, such as
removal of a component by customer personnel.

(6) A system failure arising from the transport of the system after system installation, not

under HHT control.

(7) A system failure arising from a fire, earthquake, water damage or flooding, lightening,

civil unrest, a riot, a crime, terrorism, radioactive contamination, war, contamination by
harmful substances, and other accidents in the form of an act of God.

(8) A system failure arising from the use of consumables or parts past their warranty period

in the case of parts with a limited warranty period, or from the use of finite-life parts past

their replacement period.
(9) A system failure arising from disassembling or alteration not authorized by HHT.
(10) A system that has been discarded or sold or relocated without notice to HHT, or a

system that is bought from a reseller.
(11) A system failure arising from the use of the system, or by an operating method not

provided in this Instruction Manual, or from a repair performed not under HHT’s control.
(12) A system failure arising from the failure of the PC being used, or damage to the basic

software, application software, or data due to an instantaneous voltage sag caused by

a power outage or lightening.
(13) A system failure arising from the failure of the PC being used, or damage to the basic

software, application software, or data caused by shutting off the main power supply

unit for the PC without performing normal shutdown procedures.
(14) A system failure arising from damage to the basic software, application software, or

data caused by a computer virus.
(15) A system or a part from which the system or part nameplate (ID label) has been

removed or with an altered ID label.

Limitation of Liability

HHT’s liability is limited to liability for compensation on life, body, or tangible objects arising
from HHT’s negligence. HHT is not liable for any direct, indirect, special, incidental, or
consequential damage arising from the use of the product.

IMPORTANT - 2

Third-Party Intellectual Property

HHT disclaims any liability for claims made by a third party, such as on products made by using a
system delivered by HHT or an affiliate thereof, or on patents owned by a third party with respect
to the use of a delivered system.

Installation, Relocation, and After Service

Installation and Relocation

(1) Customers are not requested to install the system. For the safe and accurate use of the

system, the system will be installed by a maintenance service company designated by

HHT or by technicians trained and certified by HHT.
(2) For the installation, please refer to the Instruction Manual, and undertake preparations

at the customer’s responsibility in a manner that satisfies the requisite installation

conditions.
(3) Customers are requ est ed not t o r el oc at e t he s yst em . W hen re l ocat i ng t he s yst em ,

please contact in adva nce th e sales d epartm ent th at hand les yo ur accou nt or a

maintenance service company designated by HHT and request for the performance

of a relo cat i on s er vi c e.

After Service

(1) For any after service requirements, please contact the HHT's dealership.
(2) Any system relocated or sold without contacting in advance the sales d epar tm e nt t ha t

handles your account or a maintenance service company designated by HHT will be

ineligible to receive after service.
(3) For a period of seven (7) years after delivery of the instrument, maintenance service

will be available to support its normal operation.

Note, however, that such a system component as a personal computer (PC) to be

updated frequently for improvement has a limited time for repairability in maintenance

servicing. For such a component, the user may be requested to purchase a substitute

or equivalent product.

Even when more than seven years have elapsed from the date of delivery of the

instrument, maintenance service will be provided if necessary items are obtainable.

It should however be noted that maintenance service after a lapse of ten years from the

date of delivery does not mean an extension of the estimated service lifetime of the

instrument.

IMPORTANT - 3

Workshop and Training for Customers

For the safe and accurate use of the system, HHT provides workshop and training, either at
HHT’s facility or on an on-site visit basis. For procedures for receiving such training, please
consult the sales department that handles your account (it will be on a charge basis).

System Life

The life length of the system is seven (7) years from the commencement of its use, provided
that the system is properly maintained in terms of the periodic maintenance and inspection,
and the replacement and repair of any finite-life parts as provided in the Instruction Manual.

Disposal

At present, no substances that directly lead to environmental damage are used in the
system. However, because changes in relevant laws and directives can conceivable occur in
the future, when discarding the system, either do so by checking relevant laws and
regulations or consult the sales department that handles your account or a maintenance
service company designated by HHT.
When discarding a used PC or turning it over for recycling, please be sure to erase any data
remaining on the hard disk at the customer’s responsibility.
When disposing of any dry batteries installed on the PC, either hire a dedicated disposal
operator or turn them over to recycling operation by insulating the “+” and “-” terminals of the
battery with a tape.
Lithium batteries are used in the PC associated with the system. Since depending on how
they are handled, lithium batteries are liable to produce fumes or ignite, discard and dispose
of them appropriately under customer control in compliance with the applicable laws and
regulations. The same is true for customer-provided PCs.

IMPORTANT - 4

Miscellaneous

Leaked X-Rays

In the Model TM3030Plus Tabletop Microscope, the effective dose equivalent of leakage
X-ray radiation is less than 0.1 µSv/hour under its actual operating conditions, which satisfies
the requirement specified in the IEC61010-1 Ed 3:2010
In the ICRP recommendations, it is stated that electron microscopes, along with home
television sets, fall into a category of potential radiation sources that could produce undesired
byproduct X-rays. It is therefore required to ensure safety with sufficient care in operation of
the TM3030Plus T ableto p Microscope.

To be on the safe side, please observe the following cautionary instructions:

(1) Use the instrument properly according to the application purposes and procedures

specified in this manual and other accompanying technical documents.
(2) Do not remove the protective external parts from the instrument or mount any

unspecified parts on it.
(3) Do not modify the instrument for unlocking its safety mechanisms.
(4) The laws and regulations concerning radiation hazard prevention may be revised or

amended as required.

When using this instrument, be sure to check the latest issues of the relevant laws and

regulations, and take proper safety measures if necessary.

Handling of Chemical s

(1) When cleaning the system, any chemicals (ethyl or isopropyl alcohol) used by a

customer must be handled and disposed of at the customer’s responsibility.
(2) The chemicals should be handled, stored, and disposed of according to the instructions

provided by their suppliers.

Trademarks

®

Windows
Windows
The

is a registered trademark of (US) Microsoft Corporation.

®

7 is trademarks of (US) Microsoft Corporation.

®

mark is not provided in the body of text of this manual.

Application software for this unit contains the following copyrights.

LEADTOOLS
Copyright (C) 1991-1998 LEAD Technologies, Inc.
ActiveThreeD Plus
Copyright (C) 1991-2000 Sheridan Software Systems, Inc.

IMPORTANT - 5

Open source software license

We are using Open source software and show its license and copyright below.

 libjpeg (ijg-6b)

"This software is based in part on the work of the Independent JPEG Group."

"The Graphics Interchange Format(c) is the Copyright property of CompuServe
Incorporated. GIF(sm) is a Service Mark property of CompuServe Incorporated."

 libpng (1.2.5)

This copy of the libpng notices is provided for your convenience. In case of
any discrepancy between this copy and the notices in the file png.h that is
included in the libpng distribution, the latter shall prevail.

COPYRIGHT NOTICE, DISCLAIMER, and LICENSE:

If you modify libpng you may insert additional notices immediately following
this sentence.

libpng versions 1.0.7, July 1, 2000, through 1.2.5, October 3, 2002, are
Copyright (c) 2000-2002 Glenn Randers-Pehrson
and are distributed according to the same disclaimer and license as libpng-1.0.6
with the following individuals added to the list of Contributing Authors

Simon-Pierre Cadieux
Eric S. Raymond
Gilles Vollant

and with the following additions to the disclaimer:

There is no warranty against interference with your enjoyment of the
library or against infringement. There is no warranty that our
efforts or the library will fulfill any of your particular purposes
or needs. This library is provided with all faults, and the entire
risk of satisfactory quality, performance, accuracy, and effort is with
the user.

libpng versions 0.97, January 1998, through 1.0.6, March 20, 2000, are

IMPORTANT - 6

Copyright (c) 1998, 1999 Glenn Randers-Pehrson, and are
distributed according to the same disclaimer and license as libpng-0.96,
with the following individuals added to the list of Contributing Authors:

Tom Lane
Glenn Randers-Pehrson
Willem van Schaik

libpng versions 0.89, June 1996, through 0.96, May 1997, are
Copyright (c) 1996, 1997 Andreas Dilger
Distributed according to the same disclaimer and license as libpng-0.88,
with the following individuals added to the list of Contributing Authors:

John Bowler
Kevin Bracey
Sam Bushell
Magnus Holmgren
Greg Roelofs
Tom Tanner

libpng versions 0.5, May 1995, through 0.88, January 1996, are
Copyright (c) 1995, 1996 Guy Eric Schalnat, Group 42, Inc.

For the purposes of this copyright and license, "Contributing Authors"
is defined as the following set of individuals:

Andreas Dilger
Dave Martindale
Guy Eric Schalnat
Paul Schmidt
Tim Wegner

The PNG Reference Library is supplied "AS IS". The Contributing Authors
and Group 42, Inc. disclaim all warranties, expressed or implied,
including, without limitation, the warranties of merchantability and of
fitness for any purpose. The Contributing Authors and Group 42, Inc.
assume no liability for direct, indirect, incidental, special, exemplary,
or consequential damages, which may result from the use of the PNG

IMPORTANT - 7

Reference Library, even if advised of the possibility of such damage.

Permission is hereby granted to use, copy, modify, and distribute this
source code, or portions hereof, for any purpose, without fee, subject
to the following restrictions:

1. The origin of this source code must not be misrepresented.

2. Altered versions must be plainly marked as such and must not
be misrepresented as being the original source.

3. This Copyright notice may not be removed or altered from any
source or altered source distribution.

The Contributing Authors and Group 42, Inc. specifically permit, without
fee, and encourage the use of this source code as a component to
supporting the PNG file format in commercial products. If you use this
source code in a product, acknowledgment is not required but would be
appreciated.

A "png_get_copyright" function is available, for convenient use in "about"
boxes and the like:

printf("%s",png_get_copyright(NULL));

Also, the PNG logo (in PNG format, of course) is supplied in the
files "pngbar.png" and "pngbar.j pg (88x31) and "pngnow.png" (98x31).

Libpng is OSI Certified Open Source Software. OSI Certified Open Source is a
certification mark of the Open Source Initiative.

Glenn Randers-Pehrson
[e-mail]
October 3, 2002

IMPORTANT - 8

 zlib (1.1.4)

/* zlib.h -- interface of the 'zlib' general purpose compression library
version 1.1.4, March 11th, 2002

Copyright (C) 1995-2002 Jean-loup Gailly and Mark Adler

This software is provided 'as-is', without any express or implied warranty. In no event
will the authors be held liable for any damages arising from the use of this software.

Permission is granted to anyone to use this software for any purpose, including
commercial applications, and to alter it and redistribute it freely, subject to the
following restrictions:

1. The origin of this software must not be misrepresented; you must not claim that you
wrote the original software. If you use this software in a product, an acknowledgment
in the product documentation would be appreciated but is not required.

2. Altered source versions must be plainly marked as such, and must not be
misrepresented as being the original software.

3. This notice may not be removed or altered from any source distribution.

Jean-loup Gailly Mark Adler
[e-mail] [e-mail]

The data format used by the zlib library is described by RFCs (Request for
Comme nts) 1950 to 1952 in the files ftp://ds.internic.net/rfc/rf c 1950.t xt
(zlib format), rfc1951.txt (deflate format) and rfc1952.txt (gzip format).
*/

IMPORTANT - 9

For the Safe Handling of the System

Before using the Tabletop Microscope, carefully read the safety precautions provided below,
and please be sure to understand them thoroughly.

Precautions on human safety are displayed using the following headers combining the
safety alert symbol

and the phrases “WARNING” and “C AUTI ON”.

:

This Safety Alert Symbol is intended to alert the user to the presence
of potential danger that can be harmful to humans. In order to avoid
injury or death that can occur, comply with all the safety messages
that follow the symbol.

WARNING :

This indicates the presence of a dangerous condition that, if not
avoided, can potentially lead to severe injury or death.

CAUTION :

This indicates the presence of a dangerous condition that, if not
avoided, can potentially lead to minor or moderate injury.

Precautions concerning safety of things other than the person and notes for ensuring the
proper use are displayed by the following headword:

NOTICE

: This indicates the presence of a hazardous condition that, if not avoided, can

potentially lead to serious property damage, damage to the system, data
damage, or environmental pollution without endangering humans.

NOTE

: This item is used to provide an explanation to ensure the proper use of the

function and the accurate performance of measurements while avoiding
minor damage to the system.

 Please comply with all the warning labels attached on the device and all the cautionary

items and instructions described in instruction manuals. When this is neglected, death and
serious injury due to a fire and electric shock and the damage of the device might be
caused.

 The operation and the maintenance that the customer executes are only items described

to this manual. Do not perform operation or maintenance that is not provided in the
manual. For instance, the customer must not carry out the following items.

 Do not carry out modification of the instrument, and do not use non-specified parts.
 Do not use the device without the safety mechanisms.
 Do not use parts attached to this device for other devices.
 Do not install the device when delivering and do not transfer the device after

installation. Our engineer must carry out it.

SAFETY - 1

For the Safe Handling of the System

 When using the chemical such as the reagent, confirm properties of the material and

information on handling (MSDS etc.) and handle it properly.

 If any problem arises with respect to the system, please contact the Sales Department

that handles your account or a maintenance service company designated by HHT.

 The cautionary items and instructions provided on the system or in the Instruction Manual

have been developed with a great deal of care. Notwithstanding this fact, unexpected events
can occur. When operating the system, beyond complying with the instructions, it is
requested that the customer himself use adequate care.

SAFETY - 2

For the Safe Handling of the System

General Precautions on Safety

Notes that have not been described in the inst r uction manual ar e sho wn below.

WARNING

Accident by using the device continuously with abnormal condition

If an abnormal noise, a strange odor, or the generation of fumes occurs when the



system is being used, immediately turn it off, and unplug the power cord from the outlet.
After that, take safety measures according to the conditions under which the problem
occurred, and contact either the maintenance service company designated by HHT or
the service department of HHT (as provided at the end of the Instruction Manual). Using
the system in the abnormal condition can cause electric shock or fires.

Trouble by radiation of laser light

The CD/DVD drive internal to the PC contains a built-in laser light source. PCs



equipped with such laser devices are designed not to emit any laser beam harmful to
humans to the outside, under normal operating conditions. However, if the laser beam
leaks out of the system and gets into eyes, it can cause vision problems. Please read
the precautions on the laser provided in the Instruction Manual supplied with the PC,
and in addition, be sure to comply with the following safety tips:

(1) Do not open the panel for the laser device; there are no components that can be

repaired by customers.

(2) Do not attempt any adjustments on the laser device, such as control operations,

that are not provided in this Instruction Manual.

CAUTION

Tiredness by using the device for a long time

If you operate the system by viewing the monitor, fatigue can build up in your eyes or



body if you continue to view the monitor in the same posture for long hours. When
operating the system for long hours, be sure to take a break for 10 to 15 minutes every
hour to rest your eyes or body.

SAFETY - 3

For the Safe Handling of the System

Warnings Provided in the Instru ction Manual

Notes that have been described to the manual and thei r descr ipti on pl aces are shown
as follows.

WARNING

Use in humid and dusty place

Do not use the system near a sink, a humidifier, or any place near water, in a humid



basement room, or a dusty place or a place subject to fumes. A failure to heed this
precaution can result in electric shock or fires.

(Chapter 1. Specifications and Installation Conditions)

Electric Shock from High Voltages

Internally, the system uses maximum voltages of AC 240 V and DC 15 kV.



Touching any of the internal components or circuits when the system is powered on can
potentially result in severe injury or death from electric shock.
Do not remove the cover from the system.
When opening the electron gun and other components for maintenance purposes, be
sure to turn off the earth leakage breaker and the power switch, and unplug the power
cord before commencing the work.

(Chapter 5. Maintenance)

Electric Shock from Improper Grounding

When connecting the main unit to the power supply, be sure to use the grounded power



cable that satisfies law and rule at the site.
Using a power cable that doesn’t satisfy can potentially cause electric shock. Also, be
sure to connect the power cable to a grounded power outlet.
If a grounded power outlet is not available for some reason, provide a grounded table
tap or a conversion adapter. In such a case, be sure to provide an appropriate
grounding. Use a grounding wire with a minimum core wire size of 2.0 mm. In addition,
for connection use a minimum screw diameter of M4 and a thread count of 3. Be sure to
plug it in securely.

(Chapter 1. Specifications and Installation Conditions)

SAFETY - 4

For the Safe Handling of the System

Warnings Provided in the Instru ction Manual

(continued)

WARNING

Injury by heavy load

The system is a heavy object weighing approximately 65 kg (For Manual Stage) / 68 kg



(For Motor drive Stage). Install the system on a table with a minimum load bearing
capacity of 100 kg. Installing it on a table with an inadequate load bearing capacity can
cause the table to break, which can result in unexpected injury beyond damage to the
system.
To avoid injury from the falling or toppling of the system, do not install the equipment in
an unstable place or a place liable to fall or toppling due to an earthquake or other
events.
Do not install the device when delivering and do not transfer the device after installation.
Our engineer must carry out it.

(Chapter 1. Specifications and Installation Conditions)

As a rule, do not move the diaphragm pump because it is a heavy load of 4.5 kg. When



moving it by necessity, move it carefully after considering the length of piping and cable,
the safety to one's foot, and impact to the pump.

(Chapter 1. Specifications and Installation Conditions)

Injury by volatile solvent

When using a volatile solvent during the cleaning of parts for the system, verify



information (MSDS and the like) on the nature and handling of the solvent, and be sure
to handle it properly.

(1) Do not put such chemicals near an open fire.
(2) Ventilate a room.
(3) Wear the directed protection tool.

(Chapter 5. Maintenance)

SAFETY - 5

For the Safe Handling of the System

Warnings Provided in the Instru ction Manual

(continued)

CAUTION

Injury from Being Pinched

The specimen stage weighs approximately 5 kg. It might cause injury when operating it



grasping the parts other than the handle. When changing specimens, securely grasp
the handle, and use caution so that your hands will not be pinched.

(Chapter 4. Operation)

The electron gun weighs 2.5 kg. It might cause finger injury when opening and shutting.



Be sure not to pinch fingers when opening and shutting.

(Chapter 5. Maintenance)

The finger might get injured in the opening and shutting part of the top cover. Be sure



not to pinch fingers when opening and shutting.

(Chapter 5. Maintenance)

Burns from Touching the Filament Assembly and Peripheral
Components

After the system has been in use, the Wehnelt and the anode around the filament are



heated about 90C. Touching any of them can cause burns. Before undertaking any
filament replacement work, turn off the main unit and wait at least 30 minutes to allow it
to cool down.

(Chapter 5. Maintenance)

SAFETY - 6

For the Safe Handling of the System

WARNING and CAUTION Labels on the System

The warning and caution labels affixed on the Tabletop Microscope are shown on pages
SAFETY-7 to SAFETY-8.
Check the contents of the warning and caution labels against the actual equipment.
Inspect the warning and caution labels from time to time. Keep them in a clean condition so
that they can be read clearly from a safe distance.
If the warning and caution labels become faint due to aging, contact the Service Department
that services your account and request replacement labels.

WARNING

Hazardous voltage inside

Can cause death or severe injury.
Do not remove the cover.

For Manual Stage

P/N 52E-4125

For Motor drive Stage

WARNING

Beware of heavy load! (65kg)
Can cause injuries.

When lifting the heavy load do
carefully by two or more
persons not to jam hands or
feet.

P/N 55E-2764

WARNING

Beware of heavy load! (68kg)
Can cause injuries.

When lifting the heavy load do
carefully by two or more
persons not to jam hands or
feet.

P/N 55E-4104

WARNING

Hazardous voltage inside

Can cause death or severe injury.
Do not remove the cover.

P/N 52E-4125

Locations of WARNING and CAUTION Labels on the TM3030Plus Main Unit (on the Sides)

SAFETY - 7

For the Safe Handling of the System

WARNING and CAUTION Labels on the System

(continued)

WARNING

WARNING

Hazardous voltage inside

Can cause death or severe injury.
Do not remove the cover.

P/N 52E-4125

Hazardous voltage inside

Can cause death or severe injury.
Do not remove the cover.

P/N 52E-4125

Location of WARNING Labels (on the Back)

WARNING

Hazardous voltage inside

Can cause death or severe injury.
Do not remove the cover.

WARNING

Hazardous voltage (15kV) inside
Can cause death or sev ere injury.

Do not resolve the electron gun.

CAUTION

Beware of high temperature
(About 90C)
Can cause burns.

Wait over 30 minutes for cooling
down after introducing air, when
replacing the filament.

P/N 52E-4125

P/N 52E-6731

P/N 55E-4102

Location of WARNING Labels (Upper View)

WARNING

Hazardous voltage inside

Can cause death or severe injury.
Do not remove the cover.

P/N 52E-4125

Location of WARNING Label (Front View)

SAFETY - 8

For the Safe Handling of the System

To Av oid Se rious Prop erty Damage or Dam age to th e System

NOTICE

About the Power Supply

(1) Make sure the power supplied to the Tabletop Microscope is AC 100-240 V (Min. 90 V,

Max. 250 V), 500 VA or higher (50/60 Hz). Voltage fluctuations and superposed noise on

the power line can adversely affect the main unit.
(2) Be sure to connect the power line to a grounded power outlet. Verify that the grounding

for the outlet is connected with a grounding resistance of less than 100Ω Improper

grounding not only makes the system vulnerable to external noise; it is also dangerous due

to a potential for electric shock associated with floating voltages.

About the Cable Connection

To prevent a system malfunction, when connecting the power cable or a dedicated cable, be
sure to turn off the earth leakage breaker and the power switch. In particular, when plugging
or unplugging a USB cable, do so by turning off the PC. Remember that performing a “Safe
removal of hardware” step on the PC and receiving a “USB device can now be removed
safely” message does not mean that the USB has been turned off. Plugging or unplugging
the USB cable in this condition can potentially damage the system.

About the Detector

The semiconductor backscattered electron detector is vulnerable to damage. Scratches
made on the surface of the detector element can cause performance degradation. To prevent
damage to the semiconductor backscattered electron detector, when adjusting the height of
the specimen stub, be sure to use the special specimen height adjustment jig.

SAFETY - 9

For the Safe Handling of the System

To Av oid Se rious Prop erty Damage or Dam age to th e System

(continued)

NOTICE

About Tur bo Molecular Pump

This instrument has a built-in Turbo Molecular Pump (TMP) whose fan rotor spins rapidly
(90,000 rpm) to maintain a vacuum inside the specimen chamber. So, any excessive shock
might damage TMP. For proper use, follow the precautions below.

(1) Filament replacement

 Do not apply any shock to the electron gun part when opening/closing the electron

gun and performing beam axis alignment, which are needed in association with
filament replacement process.

(2) Specimen exchange

 Carefully draw out/insert the specimen stage to avoid any impact to the instrument.

(3) Relocation of the instrument

 Because this is a precision instrument and TMP should be fixed securely before

relocation, be sure to contact our service department when relocation is needed for
any reason. (As a rule, the customer is not allowed to relocate the instrument.)

 Any malfunction might occur in TMP if excessive shock is applied to the instrument

without TMP secured.

(4) Handling of installation table

 Do not apply excessive vibration or external shock to the table where the instrument is

placed.

 Be careful not to apply any vibration to the table especially when doing some work on

it.

About Power Outages

An instantaneous voltage sag caused by a power outage or lightening can potentially damage
the basic software, the application software, or data. As a countermeasure against
instantaneous voltage sag, the use of the system with a PC battery mounted is recommended.
If a power outage occurs, turn off the earth leakage breaker and the power switch to guard
against voltage surges that can occur when power is restored.
When powe r i s r es to r ed , th e sys t em r eturns to the c ond ition that e xis t e d before the po we r
outage. If the power outage occurred in the midst of evacuation, the system automatically
resumes evacuation. If the system was open to the atmosphere, that condition is
maintained as is.

SAFETY - 10

For the Safe Handling of the System

To Av oid Se rious Prop erty Damage or Dam age to th e System

(continued)

NOTICE

On the Power Supply for the PC

If power is shut off during access to the hard disk or other memory devices, a PC malfunction
can occur and the data and software stored on them can be destroyed. When finished with
the current operation, be sure to perform PC termination operations and then turn off the
power switch for the PC.

On Data Backup

In some cases, a PC failure or malfunction can cause data corruption. To avoid such a
problem, periodically copy the contents of the hard disk to another hard disk, CD-ROM, a
magneto-optical disk, or other external storage devices. Such periodic copying is referred to
as a backup. For further details on this topic, see the instruction manual supplied with the
PC.

About Application Software

Other application software programs should not be installed on the PC associated with the
system. Such programs, beyond producing unexpected operation screens, can adversely
affect the system and cause the system to fail to operate properly.

SAFETY - 11

For the Safe Handling of the System

To Av oid Se rious Prop erty Damage or Dam age to th e System

(continued)

NOTICE

About the Computer Virus

If a program or data suddenly becomes corrupt, an unexpected operation occurs, or an
abnormal screen appears, the infection of the PC by a computer virus must be suspected.
The computer virus refers to a malicious program that surreptitiously invades the PC, runs
the PC uncontrollably, or damages data. By the same token, the program that
detects/eliminates computer viruses is referred to as anti-virus software.
The PC and the recording media provided with the system are checked with anti-virus software
before they are shipped from the factory.
PCs can be infected by a virus through interchangeable storage media, such as virus-infected
CDs, DVDs, a USB-connected flash memory units, or through the network. Do not use files that
pose a risk of infection by a computer virus.
Before connecting inte rchangeable storage media or the network, be sure to check it with
anti-virus software with the most up to date virus definitions. When connecting to the network,
HHT recommends the establishment of a firewall as an anti-computer virus measure between
the system and the network. Setting up a firewall is a customer responsibility. HHT does not
warrant that all computer viruses can be prevented by setting up a firewall.
If there are concerns about a computer virus infection, check your system by using anti-virus
software.
Procuring anti-virus software and removing the viruses are a customer responsibility.
Remember that some anti-virus programs may not be able to remove all computer viruses.
HHT does not warrant anti-virus software products themselves.
Some virus detection/eradiation programs, when made memory resident, can have an
adverse impact on the operation of the Tabletop Microscope. If a problem arises after
anti-virus software is installed, either uninstall the anti-virus software or make it non-resident
(by not registering it in the Startup program. Alternatively, perf orm operations such as
manually starting it when the Tabletop Microscope control program is not running, detecting
the viruses, and closing it when the virus detection process is finished, or conducting the
scanning process when the control program for the system is not running.

SAFETY - 12

For the Safe Handling of the System

To Av oid Se rious Prop erty Damage or Dam age to th e System

(continued)

NOTICE

About Network Connection

For network connection, the PC is equipped with an Ethernet port. As connecting to the network
through the use of Ethernet requires sufficient knowledge on the network environment, perform
such a connection by consulting your network administrator.
(1) Providing a cable connection to the Ethernet port must be performed by either the system

installer or a service engineer. For these services, contact either the sales department

handling your account or the Service Department.
(2) When connecting the PC to a network, be sure to take adequate anti-computer virus

measures. For details, see the [About the computer virus] section in this chapter.
(3) The system is not supplied with an Ethernet cable; an appropriate cable should be

procured.
(4) Any change in settings for network connection should be performed with care. Unwittingly

changing the settings necessary for the operation of the system can render the system

inoperative.
(5) Do not install any special software necessary for network connection. Uninstalling it can

adversely impact the system or cause the system to fail to operate normally.

SAFETY - 13

For the Safe Handling of the System

For the Proper Use o f t he System While Avoiding Minor

Damage to It

Installing the Control Application

If the control application is installed using a privilege other than the administrator privilege,
when a user logs in by using power user or general user privileges, the control application
may fail to run properly. To avoid this problem, be sure to install the control application by
using Administrator privileges.

Properties of the PC Screen

Do not change the screen resolution by means of PC screen property settings. Changing it can
cause the system to fail to display screens properly, produce color changes, and a failure of the
system to run properly. Note that the screen resolution is set according to the following
parameters (by using the [Control Panel] and [Display] and [Screen Resolution]):
Resolution: 1,280×800 pixels

About PC Freezing

If the PC freezes (the mouse and the keyboard won’t work) for some reason, on the
keyboard press the [Ctrl], [Alt], and [Delete] keys simultaneously, and shut down the system
by following the instructions that appear in the dialog box (software resetting).
After that, close Windows normally, turn off the main unit, and restart it. If this condition occurs,
any data up to that point will be lost. If the PC fails to restart after a software reset operation,
verify that the hard disk access indicator light is off, and press the Power button for a long time to
turn it off forcibly. Since turning off power when the hard disk is still running can damage the hard
disk and disable the PC from starting, this technique should be used only as a last resort. For a
description on the hard disk access indicator light, see the instruction manual supplied with the
PC.

About the Power Saving Feature and the Screen Saver

On the PC used in conjunction with the system, disable any screen saver, the display power
saving feature, and power management settings.
If any of these items are enabled, USB communications can be disrupted, causing the PC to
freeze.

SAFETY - 14

For the Safe Handling of the System

For the Proper Use o f t he System While Avoiding Minor

Damage to It (continued)

Precautions on Operating the System

(1) When leaving the system unattended, turn off the Start button.
(2) Do not use large quantities of chemicals (such as conducting paste) that fix specimens

onto the specimen stub.
(3) When the system is not used, conduct evacuation at least once a week in order to

prevent any uneven distribution of the bearing grease used in the turbo molecular

pump. Also, keeping the system in a vacuum state helps to maintain the interior of the

system clean.

About the Environment around the System

In order to ensure a stable observation, use the system by paying attention to the
environment around the installation site for the system.
(1) Avoid installing the system in a place near power lines serving equipment such as a

large magnetic clutch and subject to sudden current or magnetic field changes.
(2) Install the system in a place away from sources of vibration, such as large machine

tools or transportation facilities (roads, railroads, and the like).

About Magnetic Fields Generated by a Notebook PC

Do not use the system by placing a notebook PC on its main unit. The effects of magnetic
fields generated from the notebook PC can cause image distortion during a high
magnification image observation.

About the Te mper ature and Humidity of the Room

The room in which the system is installed should be kept at a 15 to 30C room temperature
with a maximum humidity of 70% RH without condensation. The occurrence of water
condensation can cause system failure..

SAFETY - 15

(For Korea only)
(한국대상)

Information about the attached chemical substances

부속화학물질에 관한 정보

The attached chemical substances listed below do not correspond to
the standard of classification of the harmful factor under the laws of Korea.

첨부된 아래의 리스트의 화학물질은 산업안전보건법 시행 규칙 별표 11 의 2 제 1
호에 따라 유해인자의 분류기준에 해당하지 않습니다．

Table Chemical substances for TABLETOP MICROSCOPE.
TABLETOP MICROSCOPE

Product Name

No. Part No.

품명

1 539-2132 Vacuum Grease (Electron Grease)

. 용 화학물질

Notes

Attached
Presence

비고

첨부 유무

Yes / No

유 / 무

SAFETY - 16

Contents

PREFACE .............................................................................................................................. 1

ABOUT THIS INSTRUCTION MANUAL ............................................................................... 1

IMPORTANT ................................................................................................... IM PORTANT-1

Product Warranty ............................................................................................ IMPORT ANT-1

Installation, Relocation, and After Service ....................................................... IMPORTANT-3

Workshop and Training for Customers ............................................................ IMPORTANT-4

System Life ..................................................................................................... IMPORTANT-4

Disposal .......................................................................................................... IMPORTANT-4

Miscellaneous ................................................................................................. IMPORTAN T-5

For the Safe Handling of the System ....................................................... SAFETY- 1

General Precautions on Sa fety ........................................................................... SAFETY - 3

Warnings Provided in the Instruction Manual ...................................................... SAFETY- 4

WARNING ............................................................................................ SAFETY- 4

CAUTION ............................................................................................. SAFETY- 6

WARNING and CAUTION Labels on the System ................................................ SAFETY- 7

To Avoid Serious Property Damage or Damage to the System ........................... SAFETY- 9

NOTICE .............................................................................................................. SAFETY - 9

About the Power Supply ............................................................................... SAFETY- 9

About the Cable Connection ......................................................................... SAFETY- 9

About the Detector ....................................................................................... SAFETY- 9

About Turbo Molecular Pump ....................................................................... SAFETY - 10

About Power Outages .................................................................................. SAFETY - 10

On the Power Supply for the PC ................................................................... SAFETY- 11

On Data Backup ........................................................................................... SAFETY- 11

About Application Software .......................................................................... SAFETY- 11

About the Computer Vi rus ............................................................................ SAFETY - 12

About Network Connection ........................................................................... SAFETY - 13

For the Proper Use of the System While Avoiding Minor Damage to It ............... SAFETY- 14

Installing the Control Application .................................................................. SAFETY- 14

Properties of the PC Screen ......................................................................... SAFET Y - 14

About PC Freezing ....................................................................................... SAFETY - 14

About the Power Saving Feature and the Screen Saver ............................... SAFETY- 14

Precautions o n Op e rating the System .......................................................... SAFETY- 15

About the Environment around the System .................................................. SAFETY - 15

- i -

About Magnetic Fields Generated by a Notebook PC ................................... SAFETY- 15

About the Temperature and Humidity of the Room ....................................... SAFETY- 15

(For Korea only) Information about the attached chemical substances ......... SAFETY - 16

PRECAUTIONS ON HANDLING ............................................................... PRECAUTIONS-1

1. Precautions on Usi ng the System ........................................................ PRECAUTIONS-1

2. General Items ...................................................................................... PRECAUTIONS-1

3. Emergency Action ................................................................................ PRECAUTIONS-2

4. Precautions on Ope rating the System .................................................. PRE C AUTIONS-2

5. Miscellaneous ...................................................................................... PRECAUTIONS-2

6. Notice on Disturbance by Electromagnetic Wave ................................. PRECAUTIONS-2

1 SPECIFICATIONS AND INSTALLATION CONDITIONS ......................................... 1- 1

1.1 Overview ............................................................................................................... 1- 1

1.2 Features ................................................................................................................ 1- 2

1.3 Specifications ........................................................................................................ 1- 3

1.4 Recommended PC Spec ifications ......................................................................... 1- 4

1.5 Installation Condition ............................................................................................. 1- 5

1.6 Items to be Prepared ............................................................................................. 1- 9

2 INSTALLATION AND SETUP .................................................................................. 2- 1

2.1 Connecting to the PC ............................................................................................ 2- 1

2.2 Setting up the PC .................................................................................................. 2- 1

2.2.1 Screen Settings ......................................................................................... 2- 1

2.3 Installation of the TM3030Plus Application Program .............................................. 2- 12

2.3.1 Installation of the Application Program ....................................................... 2- 15

2.3.2 Installation of the Instruction Manual ......................................................... 2- 20

2.3.3 Setup of the System Files .......................................................................... 2- 25

2.3.4 Confirmation of the Installation .................................................................. 2- 27

2.3.5 Installation of the USB Driver Software ...................................................... 2- 28

2.3.6 Confirmation of the USB Driver Software ................................................... 2- 29

2.3.7 Setup of the Observation Screen Size ....................................................... 2- 31

2.3.8 Adding a User Account .............................................................................. 2- 36

2.4 Uninstallation of the TM3030Pl us Application Program ......................................... 2- 39

2.4.1 Uninstallation of the Application Program .................................................. 2- 39

2.4.2 Uninstallation of the Instruction Manual ..................................................... 2- 42

2.5 Upgrading of the TM3030Plus Application Program .............................................. 2- 44

2.5.1 Upgrading of the Application Program ....................................................... 2- 44

2.5.2 Upgrading of the Instruction Manual .......................................................... 2- 57

- ii -

2.6 About TM3030Plus Setup CD-ROM (Brief Explanation / Summary) ...................... 2- 66

2.6.1 Installing the Application ............................................................................ 2- 67

2.6.2 Upgrading the Application .......................................................................... 2- 68

2.6.3 Output Log Data ........................................................................................ 2- 69

2.6.4 About TM3030Plus Application .................................................................. 2- 69

2.6.5 Exit ............................................................................................................ 2- 69

3 SYSTEM CONFIGURATION ................................................................................... 3- 1

3.1 System Configuration ............................................................................................ 3- 1

3.2 Part Names ........................................................................................................... 3- 2

3.2.1 Main Unit ................................................................................................... 3- 2

3.2.2 Diaphragm Pump ...................................................................................... 3- 4

4 OPERATIONS ......................................................................................................... 4- 1

4.1 Summary of Operations ........................................................................................ 4- 1

4.1.1 Operation Units ......................................................................................... 4- 1

4.1.2 Operation Windows ................................................................................... 4- 2

4.2 Basic Operations ................................................................................................... 4- 4

4.2.1 Starting the System ................................................................................... 4- 5

4.2.2 Loading a Specimen and Adjusting its Height ............................................ 4- 8

4.2.3 Changing Specimens ................................................................................ 4- 13

4.2.4 Observation Condition Settings ................................................................. 4- 18

4.2.5 Signal Select / Observation Mode Settings ................................................ 4- 21

4.2.6 Starting Observation ................................................................................ 4- 25

4.2.7 Searching for Field of View ........................................................................ 4- 26

4.2.8 Setting a Magnification .............................................................................. 4- 30

4.2.9 Adjusting the Brightness / Contrast ............................................................ 4- 32

4.2.10 Coarse Focusing ...................................................................................... 4- 33

4.2.11 Fine Focusing .......................................................................................... 4- 35

4.2.12 Saving the Image Data ............................................................................. 4- 38

4.2.13 Checking the Image Data ......................................................................... 4- 41

4.2.14 Terminating the Image Observation ......................................................... 4- 41

4.2.15 Shutting Down the System ....................................................................... 4- 43

4.3 Detailed Description of Functions .......................................................................... 4- 45

4.3.1 Image Observation Area ............................................................................ 4- 45

4.3.2 Information / Comments Area .................................................................... 4- 45

4.3.3 File Menu ..................................................................................................

4.3

.4 Edit Menu .................................................................................................. 4- 48

4- 46

4.3.5 View Menu ................................................................................................ 4- 49

- iii -

4.3.6 Setting Menu ............................................................................................. 4- 54

4.3.7 Stage Menu ............................................................................................... 4- 59

4.3.8 Maintenance Menu .................................................................................... 4- 62

4.3.9 Help Menu ................................................................................................. 4- 63

4.3.10 Start / Stop Button .................................................................................... 4- 64

4.3.11 View Mode Selection Button .................................................................... 4- 66

4.3.12 Observation Condition Selection Button ................................................... 4- 67

4.3.13 Signal Select / Observation Mode Selection Button ................................. 4- 70

4.3.14 Quick Save Button ................................................................................... 4- 73

4.3.15 Save Button ............................................................................................. 4- 75

4.3.16 Magnification Button ................................................................................ 4- 78

4.3.17 Preset Buttons ......................................................................................... 4- 79

4.3.18 Brightness Button..................................................................................... 4- 80

4.3.19 Contrast Button ........................................................................................ 4- 82

4.3.20 Auto B/C Button ....................................................................................... 4- 84

4.3.21 Focus Button ............................................................................................ 4- 85

4.3.22 Auto Focus Button ................................................................................... 4- 86

4.3.23 Image Shift Reset Button ......................................................................... 4- 87

4.3.24 Rotation Button ........................................................................................ 4- 87

4.3.25 Edit Button ............................................................................................... 4- 89

4.3.26 Minimize Button ....................................................................................... 4- 95

4.3.27 Exit Button ............................................................................................... 4- 96

4.3.28 Setting for Save Window .......................................................................... 4- 97

4.3.29 Save Image Window ................................................................................ 4- 97

4.3.30 Digital Zoom Window ............................................................................... 4- 99

4.3.31 Data Entry / Measurement Window .......................................................... 4-103

4.3.32 Image Balance Window ........................................................................... 4-108

4.3.33 Preset Magnification Window ................................................................... 4- 110

4.3.34 Auto B/C Adjustment Window .................................................................. 4- 111

4.3.35 Control Sensitivity Window ....................................................................... 4- 112

4.3.36 Beam Axis Alignment Window .................................................................. 4- 113

4.3.37 Observation Screen Size Window ............................................................ 4- 115

4.3.38 Astigmatism Correction ............................................................................ 4- 116

4.3.39 User Information Window ......................................................................... 4- 117

4.3.40 Version Information Window ....................................................................

4- 118

5 MA

INTENANCE ...................................................................................................... 5- 1

5.1 Filament Replacement .......................................................................................... 5- 2

5.1.1 Ultrasonic Cleaning with Organic Solvent (Volatile Solvent) ...................... 5- 10

- iv -

5.2 Beam Axis Al ignment ............................................................................................ 5- 11

5.3 Condenser Lens Aperture Replacement ................................................................ 5- 21

5.4 Objective Aperture Replacement ........................................................................... 5- 25

5.5 Error Messages ..................................................................................................... 5- 29

5.5.1 Messages Displayed When the Application is Started ................................ 5- 29

5.5.2 Initial Startup Window (During Initialization) ............................................... 5- 31

5.5.3 Normal Observation Screen ...................................................................... 5- 34

5.5.4 Wait Message Window .............................................................................. 5- 51

5.5.5 Termination Process .................................................................................. 5- 53

6 REPLACEMENT PARTS ......................................................................................... 6- 1

6.1 Consumables ........................................................................................................ 6- 1

6.2 Limited Life Parts .................................................................................................. 6- 2

6.3 Spare Parts ........................................................................................................... 6- 4

7 3D-VIEW (Option) ................................................................................................... 7- 1

7.1 Functional Outline ................................................................................................. 7- 1

7.2 Measurement Method of 3D In formation ............................................................... 7- 3

7.3 Specifications ........................................................................................................ 7- 5

7.4 Installing and Uninstalling ...................................................................................... 7- 7

7.5 Environment Required for the Operation of 3D-Image Viewer ............................... 7- 7

7.6 Installing 3D-Image Viewer ................................................................................... 7- 8

7.7 Uninstalling 3D-Image Viewer ............................................................................... 7- 11

7.8 3D-Image Viewer Screen Configuration ................................................................ 7- 13

7.9 Menu Functions .................................................................................................... 7- 15

7.10 Image Settings View Function ............................................................................. 7- 23

7.11 Profile Settings View Function ............................................................................. 7- 28

7.12 Mouse Pointer ..................................................................................................... 7- 30

7.13 3D Viewer Functions ............................................................................................ 7- 31

7.14 Operation Procedures .......................................................................................... 7- 33

7.14.1 Procedure of 3D-Image Capture ............................................................. 7- 33

7.15 Displaying a 3D-Image by 3D-Image Viewer........................................................ 7- 39

7.15.1 Launching 3D-Image Viewer .................................................................. 7- 39

7.15.2 Importin g Image Data [Impo rt] ................................................................ 7- 40

7.16 Displaying a Profile and Measuring Roughness Parameters ................................ 7- 44

7.16.1 Measurement of Roughness [Line] .........................................................

7.1

6.2 Measurement of Roughness [Free] ........................................................ 7- 45

7- 44

7.16.3 Display of Roughness Parameters ......................................................... 7- 45

7.17 Measurement....................................................................................................... 7- 48

- v -

7.17.1 Measurement of Distance ....................................................................... 7- 48

7.17.2 Measurement on Profile View ................................................................. 7- 50

7.18 Fix Function ......................................................................................................... 7- 53

7.18.1 Image Fix 3 points .................................................................................. 7- 53

7.18.2 Image Fix 9 points .................................................................................. 7- 56

7.18.3 Profile Fix ............................................................................................... 7- 58

7.19 Saving ................................................................................................................. 7- 60

7.19.1 Saving 3D Data being Worked On .......................................................... 7- 60

7.19.2 Saving an Image or Cross Profile on Image View as a BMP Format

Image File .............................................................................................. 7- 61

7.19.3 Saving an Image or Profile on Image View as a CSV Format

Image File .............................................................................................. 7- 61

7.19.4 Conversion into TDV Format .................................................................. 7- 62

7.20 Print ..................................................................................................................... 7- 63

7.21 Model Display in Three Dimensions ..................................................................... 7- 66

7.22 Calibration of 3D Measurement ........................................................................... 7- 71

7.23 Setting of Calibration Condition ........................................................................... 7- 72

7.24 Calibration Operations ......................................................................................... 7- 75

7.24.1 Calibration of X, Y ................................................................................... 7- 75

7.24.2 Calibration of Z ....................................................................................... 7- 77

7.24.3 Calibration of Flat ................................................................................... 7- 79

7.25 Height Calibration Using a 30-degree Tilted Specimen Stub ................................ 7- 80

7.25.1 Example of Procedure for Flat Calibration by 30-degree Tilted Specimen

Stub ........................................................................................................ 7- 80

7.25.2 Example of Procedure for Z Calibration by 30-degree Tilted Specimen

Stub ........................................................................................................ 7- 83

APPENDIX ........................................................................................................... Appendix-1

APPENDIX 1 Roughness Parameters ................................................................ Appendix-1

APPENDIX 2 List of Messages........................................................................... Appendix-4

- vi -

PRECAUTIONS ON HANDLING

For safety, please comply with the following precautions:

1. Precautions on Using the System

WARNING (1) Do not remove the cover from the main unit.

Maximum voltages of AC 240 V and DC 15 kV prevail inside the main
unit, potentially causing severe injury or death from electric shock when
touched.

WARNING (2) Connect the grounding wires properly.

An improper grounding wire connection poses a potential electric shock
hazard beyond a failure of the system to run correctly.

WARNING (3) When stopping abnormally, the diaphragm pump remains hot, posing a

potential hazard of burns. In the event of a diaphragm pump problem,
contact a service engineer without touching it.

CAUTION (4) Cor r ectly measure and set the specimen size and height. An incorr ect

setting can potentially damage the specimen or components inside the
specimen chamber.

CAUTION (5) The turbo molecular pump is a limited life item. It should be replaced

after five years. When the bearings reach the end of their life, abnormal
heat generation, an abnormal noise, or abnormal stoppage can occur.
When replacing the TMP, please contact the Service Department.

CAUTION (6) The diaphragm pump is a limited life item. It should be overhauled after

five years. When the diaphragm reaches the end of its life, abnormal
heat generation, an abnormal noise, or abnormal stoppage can occur,
causing the entire pump to stop running. When having the DP
overhauled, please contact the Service Department.

2. General Items

System service operations other than those which are provided in this Instruction Manual
should be delegated to service engineers.

PRECAUTIONS - 1

3. Emergency Action

3a. Turn off the POWER switch located on the main unit.

3b. Unplug the power cord from the outlet.

3c. Contact a service engineer.

4. Precautions on Operating the System

4a. When leaving the system unattended, turn off the accelerating voltage.

4b. To avoid contamination of a specimen, do not use large amounts of a chemical

(such as conducting paste) that fixes the specimen onto the specimen stand.

5. Miscellaneous

The room in which the system is installed should be maintained under the following
conditions even when the system is idle:

Room temperature: 15°C to 30°C

Humidity: 45 to 70% RH (no condensation)
If the system is not used for a long time, leave it in an evacuated condition instead of opening
the specimen chamber to the atmosphere.

6. Notice on Disturbance by Electromagnetic Wave

Though this instrument is nothing of the sort which gives off electromagnetic wave
intentionally, electromagnetic wave is slightly emitt ed from electronic cir cuit in this instr ument.
Therefore, equipment which is capable of being interfered with by electromagnetic noise
must not be installed near the instrument.
Also, this instrument may cause an image trouble or malfunction if it receives external
electromagnetic noise. The room in which this instrument has been installed must be
controlled so that nobody will bring the following electric apparatus* into the room.
* Apparatus which will transmit radio wave such as specified low-power equipment including

mobile phone, transceiver and cordless phone.

PRECAUTIONS - 2

1 SPECIFICATIONS AND INSTALLATION CONDITIONS

1.1 Overview

The TM3030Plus is a tabletop microscope for the fine specimen image observation by
irradiating the specimen with the narrow-focused electron beam, and detecting secondary
electron and backscattered electron so as to be magnified and displayed on screen. The
main feature of this system is observation ability with high-magnification which cannot be
done with the optical microscope and it permits to get three-dimensional images with great
focal depth. Downsizing the traditional electron microscope and simplifying the operations,
even beginners who never used electron microscopes are allowed to use this Tabletop
Microscope easily.

Figure 1.1 External View of the TM3030Plus

1 - 1

1.2 Features

TM3030Plus has the following main features:

1. A compact desktop type.

2. Provides a great focal depth and permits high magnification observation when compared

with an optical microscope.

3. Elimination of cumbersome preparation of samples.

4. The capacity to mount specimens up to 70 mm across and 50 mm thick.

5. PC-based operation and the automated focus/brightness adjustment function.

6. A quick 3-minute starting time.

7. Only an indoor power supply is required. (AC100 to 240 V : 5 A or less).

8. Able to observe various targets by selecting observation mode and condition.

1 - 2

1.3 Specifications

Table 1.3 Specifications

1 Accele rating voltage 5 kV, 15 kV

Magnification 15x to 60,000x (image display magnification: 43steps (*1))

2

Maximum specimen

3

size
Maximum specimen

4

thickness
5 Specimen stage X:35 mm, Y:35 mm (X, Y only)
6 Electron gun Pre-centered cartridge filament
7 Stigma correction coil Provided
8 Image shift ±50 μm (15 kV mode: D=4.5 mm)

Detector High-sensitivity semiconductor backscattered electron
9

10 Control CPU method Notebook PC + dedicated microcomputer control

Monitor

11

(recommended)

12 Image data recording Hard disk mounted on PC, and other recording media
13 Recording pixels 1280×960 pixels (max.) / 640×480 pixels
14 Data display Micron marker, file No., date, comments
15 Automated function Auto brightness control, auto focusing adjustment

Auxiliary operation

16

function

Vacuum pump Compact turbo molecular pump: 30 l/s

17
18 Vacuum detector Pirani gauge

19 Frequency 50/60 Hz

Main unit power

20

supply

Dimensions/weight Main unit:

21

(*1) Magnification steps

15x, 18x, 20x, 25x, 30x, 40x, 50x, 60x, 80x, 100x, 120x, 150x, 180x, 200x, 250x, 300x,
400x, 500x, 600x, 800x, 1,000x, 1,200x, 1,500x, 1,800x, 2,000x, 2,500x, 3,000x,
4,000x, 5,000x, 6,000x, 7,000x, 8,000x, 9,000x, 10,000x, 12,000x, 15,000x, 18,000x,
20,000x, 25,000x, 30,000x, 40,000x, 50,000x, 60,000x

(*2) [D] denotes the distance between the specimen surface and the BSE detector.

Item Product Specifications

(digital zoom 2x, 4x), The minimum magnification depends
on the accelerating voltage, D (*2), and the screen size.
70 mm (diameter)

50 mm

detector
High-sensitivity secondary electron detector in the low
vacuum mode

LCD attached to the notebook PC (15-inch screen)

Raster rotation
Magnification preset (2 steps)

3

Diaphragm pump: 1 m

/h

AC 100 to 240 V (Min. 90 V, Max. 250 V), 500 VA
Built-in earth leakage breaker (5 A/(15 mA)): 3P outlet
connection

330(W)×606(D)×565(H) 65 kg (manual stage)
330(W)×633(D)×565(H) 68 kg (motor drive stage)

Diaphragm pump: 145×256×217 4.5 kg

1 - 3

1.4 Recommended PC Specifications

Table 1.4 Recommended PC Specifications

Item Details

PC Recommended PC specifications

®

OS: Windows
CPU: Intel
Memory capacity: 2 GB minimum
Display resolution: WXGA 1366 × 768 pixels (1677 million colors)
Display: 15-inch screen
Interface connector: USB2.0/3.0 PC-card slots (IEEE 1394 (6 pin) or Oxford

EDX) is indispensable.

File device: HDD, DVD-ROM drive installed

7 Professional (64 bit)

®

Core™ i5-2520M (or greater)

NOTE

: A PC display resolution of 1366 × 768 pixels or less may cause the application to

fail to start.
The use of a high-resolution monitor, such as SXGA (1280 × 1024 pixels), SXGA +
(1400 × 1050 pixels), etc. may render the size of observation images smaller.
Setting these monitors in the stretch mode, observation screens can be blurred.

1 - 4

1.5 Installation Condition

Install the TM3030Plus in the place of the following condition:

Table 1.5 Installation Conditions

Item Installation Conditions

General
requirements

Amplitude
(Vibration)

Magnetic
field

Flat location

1.

Avoid liquids

2.

Avoid external shock

3.

Avoid heat sources

4.

Avoid strong magnetic field (vertically from system: 15 mT, horizontally

5.

from system: 5 mT）

Avoid strong electric field

6.

Avoid dust

7.

Avoid vibration (follow the instructions below)

8.

Meet the following amplitude value for the installation site. The allowable
value is defined as the amount of image blurring is 0.2 mm or less in
photography at a magnification of 5,000x.

Allowable amplitude value (*)
Frequency  7 Hz, 4.0 µm p-p or less
7 Hz < frequency  10 Hz, 1.5 µm p-p or less

2

10 Hz < frequency, 2.0 cm/s

or less
Meet the following stray magnetic field value for the installation site. The
allowable value of AC magnetic field is defined as the amount of image
distortion (elongation, shrinkage, or bending) is 0.5 mm or less in
photography at a specified magnification or specified focus position
(D=4.5 mm). If D becomes longer, it becomes the more susceptible to the
influence of a stray magnetic field, and the allowable value of stray
magnetic fields becomes smaller.

Allowable stray magnetic field for the TM3030Plus (*)

Accelerating voltage: 5 kV
Magnification: 2 kx
D：4.5 mm
Accelerating voltage: 15 kV
Magnification: 5 kx
D：4.5 mm

AC magnetic field

(nT)

Horizontal Vertical Horizontal Vertical

376 607 425 686

289 369 327 417

1 - 5

DC magnetic field

fluctuation (nT)

(Peak-to-Peak)

Noise Meet the following noise level for the installation site. The allowable level

is defined as the amount of image blurring is 0.2 mm or less in
photography at a magnification of 5,000x.

Allowable noise level (*)
75 dB or less (frequency  150 Hz) [C characteristics: 72 dB or less
(frequency  150 Hz)]

Ambient

15 to 30C (⊿t = ±2.5C/h or less)

temperature
Ambient

45 to 70 [%RH] or less. (No condensation)

humidity
Main unit
power supply

Single-phase AC 100 to 240 V (Min. 90 V, Max. 250 V), 500 VA,
50/60 Hz
3P outlet (grounding resistance of less than 100 )

Installation

800 mm × 1,200 mm or wider

area

* Allowable values of Amplitude/Magnetic field/Noise are specified based on the amount of

image blurring of an image.
In Fast Mode, scanning speed is different from that in other modes, so the amplitude of the
image may become large.

WARNING

: Using the system at a humid or dusty place can result in electric shock or

fires. For installation, prevent a place close to a sink or a humidifier, a
humid basement room, and a dusty or smoky place.

WARNING

: When connecting the main unit to the power supply, be sure to use the

grounded power cable that satisfies law and rule at the site.
Using an unspecified power cable can potentially cause electric shock.
Also, be sure to connect the power cable to a grounded power outlet.
If a grounded power outlet is not available for some reason, prepare a
grounded power strip or a conversion adapter. In such a case, be sure to
provide an appropriate grounding. Use a grounding wire with a minimum
core wire size of 2.0 mm. In addition, for connection use screws with a
minimum screw diameter of M4 and a thread count of 3. Be sure to plug
it in securely.

1 - 6

WARNING

WARNING

: The system is a heavy object weighing approximately 65 kg (For Manual

Stage) / 68 kg (For Motor drive Stage). Install the system on a table with
a minimum load bearing capacity of 100 kg. Installing it on a table with
an inadequate load bearing capacity can cause the table to break, which
can result in unexpected injury beyond damage to the system.
To avoid injury from the falling or toppling of the system, do not install the
system in an unstable place or a place liable to fall or toppling due to an
earthquake or other events.
Install the system as it has a space of not less than 200 mm on the left
side so that the center of the gravity of the system is positioned near the
center of the table.
Do not install the device when delivering and do not transfer the device
after installation. Our engineer must carry it out.

: As a rule, do not move the diaphragm pump because it is a heavy load

of 4.5 kg. When moving it by necessity, move it carefully after
considering the length of piping and cable, the safety to one's foot, and
impact to the pump.

1 - 7

For layout, see Figure 1.5 below.

Power supply & grounding

* Recommended

Table layout

256

Diaphragm

pump

Main unit

Grounded power cable

145

USB cable

Notebook PC
power cable
(2.5 m)

250

800

PC

606(Manual Stage)/633(Motor Drive Stage)

200

330

374

1200

Units: mm

Recommended table size: 1200(W)×800(D)×700(H) mm
Minimum table size: 1000(W)×800(D)×700(H) mm
Withstand load: 100 kg or more
* The Chair is not included in the size
* Dimensions is reference

Figure 1.5 Layout Diagram (Example)

1 - 8

1.6 Items to be Prepared

Before the installation of TM3030Plus, prepare the following items.

Table 1.6 Customer-provided Items

PC Recommended PC (Refer to 1.4 Recommended PC Specifications)
Table

Recommended table
Size: 1,200 mm (W) × 800 mm (D) × 700mm (H) or larger
Withstand load: not less than 100 kg
Others: Flat, No casters

Others Ethyl alcohol

Metal polishing agent (Recommended supplier : Ted Pella
http://www.tedpella.com/material_html/polish.htm#pikal,
Part name : PIKAL(paste))
Ultrasonic cleaning system
Blower

1 - 9

2 INSTALLATION AND SETUP

2.1 Connecting to the PC

Connect the main unit and a PC as shown in the figure below.

1. Connect the USB cable coming from the main unit to the PC USB port.

Figure 2.1 Connecting a USB Cable to the PC

2. Plug the power cable of the PC in a customer-provided outlet.

3. Plug the power cable of the main unit in a customer-provided outlet.

2.2 Setting up the PC

2.2.1 Screen Settings

NOTE

1. Click the [Control Panel] from the [Start] button located in the lower left of the

: The setup process and the reference screen images described in this chapter are

designed for the PC belonging to the TM3030Plus main unit. Unspecified PCs may
require a different way for setup and show different screen images from those of
this chapter. In such a case, follow your PC’s instruction manual.

desktop.

2 - 1

Click

Figure 2.2.1-1 Start Button Window

2. Select [Small icons] from [View by] pull-down menu of [Control Panel].

Click

Figure 2.2.1-2 Adjust your computer’s settings Window

2 - 2

3. The following window appears. Click the [Personalization] icon.

Click

Figure 2.2.1-3 Adjust your computer’s settings Window

4. Scroll down and click the [Windows 7 Basic] icon.

Scroll down

Figure 2.2.1-4 Change the visuals and sounds on your computer Window

2 - 3

5. The window becomes black-and-white in a few seconds and recovers. Confirm the
[Windows color] becomes [Windows 7 Basic] and the [Screen saver] becomes [None].

Click

Figure 2.2.1-5 Change the visuals and sounds on your computer Window

NOTE

: TM3030Plus application program is recommended to be used with the setting

mentioned above. With using the [Windows Aero] function, observation screen
imaging speed may be reduced and it may prevent normal observation.

6. The following window appears. Click the [Screen saver] icon located in the lower right of
the screen and click the [Change power settings] located in the lower left of the [Screen
Saver Settings] window.

Click

Figure 2.2.1-6 Screen Saver Settings Window

2 - 4

7. The following window appears. Click of the [Show additional plans] to select [High
performance], and click [Change plan settings].

Figure 2.2.1-7 Select a power plan Window

8. The [Change settings for the plan: High performance] menu is displayed. Select [Never]

in the [Dim the display], [Turn off the display] and [Put the computer to sleep] items.
Then, click the [Save changes] button.

Click（Back to Figure 2.2.1-7）

NOTE

Figure 2.2.1-8 Change settings for the plan: High performance Window

: Configure the same above setting in the [Balanced] and [Power saver] modes.

After all the setting is done, set [Select a power plan] to [High performance].

2 - 5

9. Back to the [Power Options], and click [Choose what closing the lid does].

Click

Figure 2.2.1-9 Select a power plan Window

10. The following window appears. Change the setting of [On battery] and [Plugged in] for

[When I press the power button] to [Shut down]. Change the setting of [On battery] and
[Plugged in] for [When I close the lid] to [Do nothing].
Then, click the [Save changes] button.

Change to [Shut down]

Change to [Do nothing]

Click

Figure 2.2.1-10 Define power buttons and turn on password protection Window

2 - 6

NOTE

: When this application is running, do not use the screen saver or do not leave the

PC in the sleep or standby mode. If any of these actions are taken, USB
communication will be disrupted on Windows and application may not work
normally or image data may be lost during capturing.
When this communication error occurred, restart the application.

11. Return to the Select a power plan window and click [Personalization] and then [Display]

in the lower left of the window.

Click

Figure 2.2.1-11 Select a power plan Window

Click

Figure 2.2.1-12 Change the visuals and sounds on your computer Window

2 - 7

12. The following window appears. Click [Set custom text size (DPI)].

Click

Figure 2.2.1-13 Make it easier to read what’s on your screen Window

13. Confirm the setting is same as bellow (9 point Segoe UI at 96 pixels per inch. Scale to

this percentage of normal size: 100%) and click the [OK] button.

Figure 2.2.1-14 Custom DPI Setting Window

14. Back to the Display window and click the [Adjust resolution].

Click

Figure 2.2.1-15 Make it easier to read what’s on your screen Window

2 - 8

15. Confirm the setting is the same as bellow, and click the [OK] button.

Display: 1.Mobile PC Display
Resolution: recommended size of arranged PC
Orientation： Landscape

Figure 2.2.1-16 Change the appearance of your display Window

In the case of using English as a Display language for TM3030Plus application, please
operate the settings below.

16. Click [Control Panel] from the [Start] button in the left of the desktop window.

17. The following window appears. Click [Region and Language].

2 - 9

Click

Figure 2.2.1-17 Adjust your computer’s settings Window

18. The Region and Language window appears. Select [Administrative] tab and click

[Change system locale] button in the [Language for non-Unicode programs].

Figure 2.2.1-18 Region and Language Window

19. The Region and Language Settings window appears. From the pull down list of [Current

system locale], select [English (United States)] and click the [OK] button.

2 - 10

Figure 2.2.1-19 Region and Language Settings Window

20. The following window appears. Click the [Restart now] button.

Figure 2.2.1-20 Change System Locale Window

21. After restarting, open the [Administrative] tab in the Region and Language window and

confirm that the [Language for non-Unicode programs] is [English (United State)].

2 - 11

Figure 2.2.1-21 Region and Language Window

NOTE

: If not performing the above settings, texts may be corrupted in the TM3030Plus

application.

This is the end of the PC setup. About installation of TM3030Plus application program, refer
to 2.3.1 Installation of the Application Program.

2.3 Installation of the TM3030Plus Application Program

NOTE

: When installing the application, follow these precautions:

1. Log in as “TM3030PlusUSER”.

2. Do not connect the main unit to the PC with USB cable before completion of
the installation.

Main unit USB cable PC

Figure 2.3-1 Prohibition of the Connecting Main Unit to the PC

2 - 12

1. Turn on the PC and log in as “TM3030PlusUSER”. If no other user login name is set
additionally, the login window does not appear.

2. Insert the TM3030Plus setup CD-ROM into the CD/DVD drive.

3. The following window appears. Click the [Run SETUP.exe] icon.

Figure 2.3-2 AutoPlay Window

2 - 13

4. TM3030Plus Setup Tools starts automatically. If the User Account Control window
appears, click the [Yes ] button.

Click

Figure 2.3-3 User Account Control Window

5. The following window appears. Input Serial Number of the TM3030Plus in the dialog box

and click the [OK] button.
Serial Number is listed on the product nameplate located on the back of the main unit.

Figure 2.3-4 Input Serial Number Dialog Box

Figure 2.3-5 Product Nameplate

2 - 14

2.3.1 Installation of the Application Program

1. The following window appears. Click the [Installation for TM3030Plus application] button.

Click

Figure 2.3.1-1 TM3030Plus Setup Tools Window (Main Menu)

2. The following window appears. Click the [Installation of application program.] button.

Click

Figure 2.3.1-2 TM3030Plus Setup Tools Window (Installation)

2 - 15

NOTE : When this application is already installed, the message window shown below

appears. In this case, click the [OK] button to close the window. When any
application failure occurs and so the application is to be repaired, refer to 2.5.1 2
Repairing.

Figure 2.3.1-3 Message Window

3. The following window appears. Select [English [United States]] and click the [OK] button.

Figure 2.3.1-4 Choose Setup Language Window

4. The following window appears. Wait until the preparing finishes.

Figure 2.3.1-5 Preparing to Install Window

2 - 16

5. The following window appears. Click the [Next] button.

Click

Figure 2.3.1-6 InstallShield Wizard Window

6. The following window appears. Input a User Name and Organization. The items saved

before will be displayed by default. In this case, they can be used without changed.
Click the [Next] button.

Click

NOTE

Figure 2.3.1-7 Customer Information Window

: For using with all login user, select [Anyone who uses this computer (all users)] as

[Install this application for].
When selecting [Only for me (TM3030PlusUSER)], only the user who is now
installing the application can use it.

2 - 17

7. The following window appears. Click the [Install] button.

Click

Figure 2.3.1-8 Ready to Install the Program Window

8. The following window appears, and the application program starts to be installed.

Do not click the [Cancel] button during this installation.

Figure 2.3.1-9 Installing TM3030Plus Window

2 - 18

9. When installing, the following [Windows Security] window may appear. In such a case,
click the [Install] button.

Click

Figure 2.3.1-10 Windows Security Window

10. The following window appears. Click the [OK] button.

Figure 2.3.1-11 Attach Your Device Window

11. W hen the install process is completed, the following window appears.

Click the [Finish] button.

Click

Figure 2.3.1-12 InstallShield Wizard Completion Window

2 - 19

2.3.2 Installation of the Instruction Manual

1. The following window appears. Click the [Installation for TM3030Plus application] button.

Figure 2.3.2-1 TM3030Plus Setup Tools Window (Main Menu)

2. Install the instruction manual. Select [Installation of the instruction manuals] from the

Installation menu of the TM3030Plus Setup Tools.

Click

Figure 2.3.2-2 TM3030Plus Setup Tools Window (Installation)

2 - 20

NOTE : When this Instruction Manual is already installed, the window shown below

appears. In this case, click the [OK] button to close the window. After uninstalling
the Instruction Manual, re-install it. For the details of the uninstall process, refer to

2.4.2 Uninstallation of the Instruction Manual.

Figure 2.3.2-3 Message Window

3. The following window appears. Click the [OK] button.

Figure 2.3.2-4 Choose Setup Language Window

4. The following window appears. Wait until the preparing finishes.

Figure 2.3.2-5 Preparing to Install Window

2 - 21

5. The following window appears. Click the [Next] button.

Click

Figure 2.3.2-6 InstallShield Wizard

6. The following window appears. Click the [Next] button.

Figure 2.3.2-7 Customer Information Window

Click

NOTE

: For using with all login user, select [Anyone who uses this computer (all users)] as

[Install this application for].
When selecting [Only for me (TM3030PlusUSER)], only the user who is now
installing the application can use it.

2 - 22

7. The following window appears. Click the [Install] button.

Click

Figure 2.3.2-8 Ready to Install the Program Window

8. The instruction manual starts to be installed.

Do not click the [Cancel] button during this installation.

Figure 2.3.2-9 Installing TM3030Plus Manual Window

2 - 23

9. When the install process is completed, the following window appears. Click the [Finish]
button.

Click

Figure 2.3.2-10 InstallShield Wizard Completion Window

2 - 24

2.3.3 Setup of the System Files

1. The following window appears. Click the [Installation for TM3030Plus application] button.

Figure 2.3.3-1 TM3030Plus Setup Tools Window (Main Menu)

2. Setup the System Files. Select [Setup of system files] from the Installation menu of the

TM3030Plus Setup Tools.

Click

Figure 2.3.3-2 TM3030Plus Setup Tools Window (Installation)

2 - 25

3. After finishing the installation, the following window appears. Click the [OK] button.

Figure 2.3.3-3 System Installed Window

4. Click the [Exit] button in the [TM3030Plus Setup Tools] window.

Figure 2.3.3-4 TM3030Plus Setup Tools Window (Installation)

Click

5. Tak e out the setup CD-ROM from the CD/DVD drive.

NOTE

: Keep the TM3030Plus setup CD-ROM at hand because factory default system

data is saved in it.

2 - 26

2.3.4 Confirmation of the Installation

1. Confirm the [TM3030Plus] shortcut icon exists on the desktop.

Figure 2.3.4-1 TM3030Plus Shortcut Icon

2. Confirm the [TM3030Plus] is added in the program menu of the [Start] button.

Figure 2.3.4-2 Confirmation of Installation

3. Substantial application file is installed in the [C:¥Program Files(x86)¥TM3030Plus¥]

folder. Do not edit, move, or delete the installed file.

2 - 27

2.3.5 Installation of the USB Driver Software

Perform the following operations after installation of TM3030Plus application.

1. Shut down the main unit.
Connect the USB cable coming from the main unit to the PC USB port.

Main unit

USB cable

PC

Figure 2.3.5-1 Connecting the Main Unit and the PC

2. Turn on the main unit. The Plug-and-Play function recognizes the USB device, and

displays the following message for a few seconds in the lower part of the screen.

Figure 2.3.5-2 Installing device driver software Message

3. After the USB device driver is installed successfully, t he following message appears.

Figure 2.3.5-3 SemUsb Device Message

2 - 28

2.3.6 Confirmation of the USB Driver Software

1. Open [Device Manager] from [Control Panel] of the [Start] menu.

Figure 2.3.6-1 Device Manager Icon

* When [Device Manager] does not appear, select [Small icons] from [View by]

pull-down menu of [Control Panel].

Figure 2.3.6-2 Control Panel

Figure 2.3.6-3 Control Panel

2 - 29

2. [Device Manager] appears. Confirm [SEM USB Device] exists in [Universal Serial Bus
controllers]. If it doesn’t exist, install the USB driver software again.

Figure 2.3.6-4 Device Manager Window

3. Close [Device Manager].

2 - 30

2.3.7 Setup of the Observation Screen Size

NOTE

: When starting the TM3030Plus application program, follow these precautions:

1. Connect the main unit to the PC with a USB cable.

2. Start the application program after turning on the main unit. The application
doesn’t start when the main unit is shut down or the USB cable is unplugged.
(When initializing, this message appears.)

3. Do not shut down the main unit or unplug the USB cable while the application
is running.

1. Double-click the TM3030Plus shortcut icon on desktop to power up the main unit.

(2) Application starts.

USB cable

(1) Power UP

Main unit

PC

Figure 2.3.7-1 Connecting the Main Unit to the PC

2. The application starts up.

Figure 2.3.7-2 Application Startup Window

2 - 31

3. After installing the application, when the application starts up first, the [No data found in
Initial File. Do you default to start up PC?] message appears. Click the [OK] button.

Click

Figure 2.3.7-3 Default to Start Up Window

4. The [Set up the observation screen size when the application has started.] message

appears. Click the [OK] button.

Click

Figure 2.3.7-4 Observation Screen Size Setup Window

5. The message [No User Setting File found. Do you default to start up PC?] message.

Click the [OK] button.

NOTE

Click

Figure 2.3.7-5 Default to Start Up Window

: When initializing, do not shut down the main unit or unplug the USB cable.

2 - 32

6. When the application starts normally, the operation window appears.

Figure 2.3.7-6 Operation Window

7. Select [Observation Screen Size.] from the [Maintenance] menu in the operation window.

Figure 2.3.7-7 Maintenance Menu

2 - 33

8. The Observation Screen Size window and a red line appear in the operation window.

Figure 2.3.7-8 Observation Screen Size Window

9. Measure the red line appearing in the operation window with a ruler.

NOTE

Figure 2.3.7-9 Measuring the Observation Screen Size

: Measure the red line in 0.5 mm increments. Otherwise a wrong value may input

and magnification of the observation screen may not be accurate.

2 - 34

10. Input the length of the red line in the [Observation screen size] box of the Observation

Screen Size dialog, and click the [SET] button and the [Close] button.

* The observation screen size will change depending on the PC environment.

Click

Click

Figure 2.3.7-10 Observation Screen Size Window

11. Click the [Close] button to close the Observation Screen Size window.

12. Click the [X] button at the right side of the title bar in the operation window or select

[Exit] from the [File] menu to close the application program.

13. The following window appears. Click the [OK] button to close the application program.

Click

Figure 2.3.7-11 Application Closing Window

2 - 35

2.3.8 Adding a User Account

1. When starting the application with a new Windows user account, perform the operations

described in [2.2.7 Screen Settings] for each account. For the operation to create a
Windows user account, see the instruction manual supplied for the PC.

2. Turn on the main unit. Double-click the TM3030Plus shortcut icon on the desktop.

Figure 2.3.8-1 TM3030Plus Shortcut Icon

NOTE

: Before launching an application, check the following items:

1. Make sure the PC is connected to the main unit with a USB cable.

2. Start the application when the main unit is powered on. The application cannot
be started if the main unit is turned off or the USB cable is unplugged (an
initialization message will be displayed).

3. When the application is being started, do not turn off the main unit or unplug
the USB cable.

3. The application starts up.

Figure 2.3.8-2 Application Startup Screen

2 - 36

4. A [No User Setting File found. Do you default to start up PC?] message appears. Click
the [OK] button.

Click

Figure 2.3.8-3 Default to Start Up Window

5. When the application program starts normally, the following operation window appears.

For a description of image observation operations, see Chapter 4.

Figure 2.3.8-4 Operation Window

6. Select either the [X] button at the right edge of the title bar in the Operation window or

[Exit] from the [File] menu to close the application program.

2 - 37

7. The following confirmation window appears. Click the [OK] button to close the application
program.

Click

Figure 2.3.8-5 Close the Application Window

2 - 38

2.4 Uninstallation of the TM3030Plus Application Program

2.4.1 Uninstallation of the Application Program

NOTE

: Uninstall the TM3030Plus application program with a user name of

TM3030PlusUSER.

1. Open [Control Panel] from the Start menu.

2. Select [Programs and Features] from the [Control Panel].

Figure 2.4.1-1 Programs and Features Icon

3. The following window appears. Select [TM3030Plus] and click [Uninstall].

Figure 2.4.1-2 Uninstall or change a program Window

4. The following window appears. Click the [Yes] button.

2 - 39

Figure 2.4.1-3 Programs and Features Window

5. The following window appears. Wait a moment.

Click

Figure 2.4.1-4 Windows Installer Window

6. When the following window appears, click the [Yes] button.

Figure 2.4.1-5 User Account Control Window

7. The following window appears and the uninstallation starts.

Click

Figure 2.4.1-6 Windows configures TM3030Plus Window

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8. After finishing the uninstallation, confirm the [TM3030Plus] is removed from the
[Programs and Features] window.

9. Close the [Programs and Features] window.

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2.4.2 Uninstallation of the Instruction Manual

NOTE

: Uninstall the instruction manual with a user name of TM3030PlusUSER.

1. Open [Control Panel] from the Start menu.

2. Select [Programs and Features] from [Control Panel].

Figure 2.4.2-1 Programs and Features Icon

3. The following window appears. Select [TM3030Plus Manual] and click [Uninstall].

Figure 2.4.2-2 Uninstall or change a program Window

4. The following window appears. Click the [Yes] button.

Figure 2.4.2-3 Programs and Features Window

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Click

5. The following window appears. Wait a moment.

Figure 2.4.2-4 Windows Installer Window

6. When the following window appears, click the [Yes] button.

Click

Figure 2.4.2-5 User Account Control Window

7. After the uninstallation process is finished, confirm the [TM3030Plus Manual] is removed

from the [Programs and Features] window.

8. Close the [Programs and Features] window.

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2.5 Upgrading of the TM3030Plus Applicat ion Program

NOTE

: When upgrading the application, follow these precautions:

1. Login as TM3030PlusUSER.

2. Do not connect the main unit to the PC with USB cable before upgrading the
application.

Main unit USB cable PC

Figure 2.5 Prohibition of the Connecting Main Unit to the PC

2.5.1 Upgrading of the Application Program

1. Upgrading

In the case where the conventional TM3030Plus application program is already installed
and later version needs to be installed, apply the following process:

NOTE

: Confirm the version of the TM3030Plus application program by seeing the

[Upgrade for TM3030Plus application] in the TM3030Plus Setup Tools. The
now-installing version is shown in the [Version Information] of the [Help] menu.

1a. Power up the PC and login as TM3030PlusUSER. If no other users is added, the login

window does not appear.

1b. Insert the TM3030Plus setup CD-ROM to the CD/DVD drive.

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1c. The following window appears. Click [Run SETUP.exe].

Figure 2.5.1-1 AutoPlay Window

1d. Easy install tool starts automatically. If the User Account Control window appears, click

the [Yes] button.

Click

Figure 2.5.1-2 User Account Control Window

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1e. The following window appears. Input Serial Number in the dialog box, and click the

[OK] button.
Serial Number is listed on the product nameplate on the back of the main unit.

Figure 2.5.1-3 Input Serial Number Dialog Box

Serial No.

Figure 2.5.1-4 Product Nameplate

1f. The following window appears. Click the [Upgrade for TM3030Plus application] button.

Click

Figure 2.5.1-5 TM3030Plus Setup Tools Window (Main Menu)

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1g. The following window appears. Click the [Upgrade of application program.] button.

Click

Figure 2.5.1-6 TM3030Plus Setup Tool s Window (Upgrade)

1h. The following window appears. Click the [OK] button.

Figure 2.5.1-7 Choose Setup Language Window

1i. The following window appears. Click the [Yes] button.

Figure 2.5.1-8 Continue Setup Window

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10 1j. The following window appears. Wait until the preparation finishes.

Figure 2.5.1-9 Preparing to Install Window

1k. The following window appears. Click the [Next] button.

Figure 2.5.1-10 Resuming the InstallShield Wizard Window

Click

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1l. The application starts to be installed. Do not click the [Cancel] button during this

installation process.

Figure 2.5.1-11 Installing TM3030Plus Window

1m. If the following window appears, click the [OK] button.

Figure 2.5.1-12 User Account Control Window

NOTE

: When the TM3030Plus application program (Setup.exe) is installed with the

TM3030Plus Setup tools, the User Account Control window does not appear
because the change of the setting has been permitted on the User Account Control
window upon the startup of the TM3030Plus Setup tools.

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1n. The following window appears. Click the [OK] button.

Figure 2.5.1-13 Attach Your Device Window

1o. When the installation is completed successfully, the following window appears. Click

the [Finish] button.

Click

Figure 2.5.1-14 InstallShield Wizard Completed Window

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2. Repairing of the Application Program
When installing the application program of the same version as already installed, the
following [Repair] program appears. Use this function when some trouble occur with the
application program.

NOTE

: Confirm the version of the TM3030Plus application program by seeing the

[Upgrade for TM3030Plus application] in the TM3030Plus Setup Tools. The
now-installing version is shown in the [Version Information] of the [Help] menu.

2a. Click the [Upgrade for TM3030Plus application] button of the following TM3030Plus

Setup Tools main menu.

Click

Figure 2.5.1-15 TM3030Plus Setup Tools Window (Main Menu)

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2b. The following window appears. Click the [Upgrade of application program.] button.

Click

Figure 2.5.1-16 TM3030Plus Setup Tool s Window (Upgrade)

2c. The following window appears. Click the [OK] button.

Figure 2.5.1-17 Choose Setup Language Window

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2d. The following window appears. Wait until the preparation finishes.

Figure 2.5.1-18 Preparing to Install Window

2e. The following window appears. Click the [Next] button.

Figure 2.5.1-19 Welcome to the InstallShield Wizard Window

Click

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2f. The following window appears. Select the [Repair] button, and click the [Next] button.

Click

Figure 2.5.1-20 Program Maintenance Window

2g. The following window appears. Click the [Install] button.

Figure 2.5.1-21 Ready to Install the Program Window

Click

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