INSTRUCTION MANUAL
FOR
MODEL TM3000
TABLETOP MICROSCOPE
・Before using the instrument , read the safety instructions and
precautions carefully.
・Be sure to follow the instructions and warning of instruction manual
and warning label.
・Keep this manual in a safe place nearby so it can be refer red to
whenever needed.
Copyright C Hitachi High-Technologies Corporation 2010.
All rights reserved. Printed in Japan. Part No. 55E-9001-1 HT-R (H-HMS)
NOTICE:
1. Inform at ion contained in this document is subject to
change without notice for improvement.
2. This manual is copyrighted by Hitachi High-Technologies
Corporation with all rights reserved.
No part of this manual may be reproduced, transmitted or
disclosed to a third party in any form or by any means
without the express written permission of Hitachi
High-Technologies Corporation.
3. Hitachi High-Technologies Corporation assumes no
liability for any direct, indirect, or consequential damages
arising from use not described in this manual.
Utmost care must be exercised when using the
instrument.
4. This document does not pr ovide any warranty or
permission for industrial propert ies or any rig hts to grant
license lawfully and without infringement.
PREFACE
Thank you for your recent purchase of a TM3000 Tabletop Microscope.
The TM3000 Tabletop Microscope (“TM” for short) is designed to observe and evaluate
specimens that are prepared specifically for the TM, using an electron beam accelerated to 5
or 15kV as a light source.
This product involves the use of a vacuum and high voltages. Only properly trained
personnel are authorized to operate and service this system. In order to ensure the safe and
proper operation of the system, you are urged to receive a briefing on operation,
maintenance, and safety precautions by representatives of Hitachi’s service department or
technicians certified by the same. Carefully read the safety tips provided in this manual, and
use the system after you have thoroughly understood the safety precautions (“Safety Tips”
for short) contained in this publication.
When allowing children and pupils (“minors”) to use the system, do so under the
supervision of a system administrator who is thoroughly familiar with the
above-mentioned safety tips, and by limiting their use to personal computer (PC)
operations and moving the specimen stage. Because minors can take unexpected
action out of curiosity, the system administrator should use utmost caution to ensure
that the safety tips are complied with and the system is not handled in a manner
departing from the range of operations provided in the Instruction Manual. Also,
securely control the system so that minors will not use the system on a solo basis.
ABOUT THIS INSTRUCTION MANUAL
● This Instruction Manual describes TM operating methods, maintenance and inspection
methods, items that are necessary to support these requirements, and items that require
special attention.
● The Instruction Manual consists of the following components:
Cautionary Items (warranty, installation, relocation, after service, the life length of the
system, and other items)
Safety (a summary of safety tips)
Chapter 1 : Specifications and Installation Conditions (installation condit ions,
customer-provided items, and so forth)
Chapter 2 : Installation and Setup (installing an application, connecting the system to the
PC, and so forth)
Chapter 3 : System Configuration (configuration, descriptions of parts, and so forth)
Chapter 4 : Operations (image observation, saving image data, and so forth)
Chapter 5 : Maintenance (beam axis adjustment, servicing the various parts, taking
corrective action, and so forth)
Chapter 6 : Replacement Parts (consumables, finite-life items, and lists of spare parts)
- 1 -
● First, please read the sections on “IMPORTANT” and “For the Safe Handling of the
System” provided at the beginning of this Instruction Manual.
List of Abbreviations
Abbreviations that appear frequently in this Instruction Manual and their full spellings are
given below:
PC : Personal Computer
HV : High Voltage
DFP : Diaphragm Pump
TMP : Turbo Molecular Pump
FOV : Field of View
- 2 -
IMPORTANT
Product Warranty
Product Warranty
Hitachi High Technologies Corporation (“HHT”) warrants that the Model TM3000 Tabletop
Microscope is free of defect, either in material or manufacturing, based on the specifications
provided in this Instruction Manual, provided that the system is used in compliance with the
contents of the Instruction Manual.
If your product fails during the warranty period due to a manufacturing defect, it will be
repaired free of charge at HHT’s discretion. In the event of a repair, substitute parts may be
used or your system may be replaced with an equivalent product instead of repairing it. For
example, in the case of PCs, printers, and the like that are used in conjunction with the
system and that are frequently discontinued and replaced with newer models, it may not be
possible to provide the same model as the one that is needed to be replaced. The warranty
does not cover systems that have been discarded, systems that have been relocated without
notice to HHT, systems that are purchased from a reseller, and consumables or parts with a
limited warranty period that have failed after the warranty period.
Geographic Area of Warranty
The warranty is limited to within the borders of the country in which the product was
purchased.
Warranty Period
The warranty period is one (1) year from the completion date of installation.
Warranty Limitations and Exclusions
HHT does not extend any warranty, either implicitly or expressly, such as, but not limited to,
warranty for marketability or market suitability, or for a particular purpose or use, other than
the terms of warranty provided herein.
The warranty does not cover the situation where the information conveyed either orally or in
writing by a sales dealer or employees without HHT-stipulated approval procedures differs
from product specifications.
Even within the warranty period, if a given problem falls in any of the categories below, it will
be excluded from free-of-charge repair warranty coverage:
(1) A system failure arising from the use of the system in a place not in compliance with
the installation site standards established by HHT.
(2) A system failure arising from the use of the system with a power source not in
compliance with HHT-specified requirements (voltage and frequency) or due to a
power supply abnormality.
IMPORTANT - 1
(3) A system failure arising from the corrosion of its electrical circuits or deterioration of
its optical elements due to the use of the system under a strongly corrosive
atmosphere, such as chlorine gas, or in a dusty environment.
(4) A system failure arising from the use of hardware, software, or supplies that are not
provided by HHT.
(5) A system failure arising from servicing or repairing the system by individuals other
than a service department designated by HHT or from system modifications, such as
removal of a component by customer personnel.
(6) A system failur e arising from the transport of the system after system installation, not
under HHT control.
(7) A system f ailur e arising from a fire, earthquake, water damage or flooding, light ening,
civil unrest, a riot, a crime, terrorism, radioactive contamination, war, contamination by
harmful substances, and other accidents in the form of an act of God.
(8) A system failure arising from the use of consumables or parts past their warranty
period in the case of parts with a limited warranty period, or from the use of finite-life
parts past their replacement period.
(9) A system failur e arising from disassembling or alteration not authorized by HHT.
(10) A system that has been discarded or sold or relocated without notice to HHT, or a
system that is bought from a reseller.
(11) A system failure arising from the use of the system, or by an operating method not
provided in this Instruction Manual, or from a repair performed not under HHT’s
control.
(12) A system failure arising from the failure of the PC being used, or damage to the basic
software, application software, or data due to an instantaneous voltage sag caused by
a power outage or lightening.
(13) A system failure arising from the failure of the PC being used, or damage to the basic
software, application software, or data caused by shutting off the main power supply
unit for the PC without performing normal shutdown procedures.
(14) A system failure arising from damage to the basic software, application software, or
data caused by a computer virus.
(15) A system or a part from which the system or part nameplate (ID label) has been
removed or with an altered ID label.
Limitation of Liability
HHT’s liability is limited to liability for compensation on life, body, or tangible objects arising
from HHT’s negligence. HHT is not liable for any direct, indirect, special, incidental, or
consequential damage arising from the use of the product.
IMPORTANT - 2
Third-Party Intellectual Property
HHT disclaims any liability for claims made by a third party, such as on products made by using a
system delivered by HHT or an affiliate thereof, or on patents owned by a third party with respect
to the use of a delivered system.
Installation, Relocation, and After Service
Installation and Relocation
(1) Cust om ers are not requested to install the system. For the safe and accurate use of
the system, the system will be installed by a maintenance service company
designated by HHT or by technicians trained and certified by HHT.
(2) For the inst allation, please refer to the Instruction Manual, and undertake
preparations at the customer’s responsibility in a manner that satisfies the requisite
installation conditions.
(3) Customer s ar e r eq u est ed n ot to r e loc at e t he s yst em. When relocating the syst em ,
please cont act in a dvanc e the sa les dep artm ent th at hand les yo ur acc ount or a
maintenance service company designated by HHT and request for the
performa nc e of a r e locat i on service.
After Service
(1) For any after service requirements, please contact the HHT's dealership.
(2) Any system relocated or sold without contacting in advance the sales depar tment
that handles your account or a maintenance service company designated by HHT
will be ineligible to receive after service.
(3) For a period of seven (7) years after delivery of the instrument, maintenance service
will be available to support its normal operation.
Note, however, that such a system component as a personal computer (PC) to be
updated frequently for improvement has a limited time for repairability in maintenance
servicing. For such a component, the user may be requested to purchase a substitute
or equivalent product.
Even when more than ten years have elapsed from the date of delivery of the
instrument, maintenance service will be provided if necessary items are obtainable.
It should however be noted that maintenance service after a lapse of ten years from
the date of delivery does not mean an extension of the estimated service lifetime of
the instrument.
IMPORTANT - 3
Workshop and Training for Customers
For the safe and accurate use of the system, HHT provides workshop and training, either at
HHT’s facility or on an on-site visit basis. For procedures for receiving such training, please
consult the sales department that handles your account (it will be on a charge basis).
System Life
The life length of the system is seven (7) years from the commencement of its use, provided
that the system is properly maintained in terms of the periodic maintenance and inspection,
and the replacement and repair of any finite-life parts as provided in the Instruction Manual.
Disposal
At present, no substances that directly lead to environmental damage are used in the
system. However, because changes in relevant laws and directives can conceivable occur in
the future, when discarding the system, either do so by checking relevant laws and
regulations or consult the sales department that handles your account or a maintenance
service company designated by HHT.
When discarding a used PC or turning it over for recycling, please be sure to erase any data
remaining on the hard disk at the customer’s responsibility.
When disposing of any dry batteries installed on the PC, either hire a dedicated disposal
operator or turn them over to recycling operation by insulating the “+” and “-” terminals of the
battery with a tape.
Lithium batteries are used in the PC associated with the system. Since depending on how
they are handled, lithium batteries are liable to produce fumes or ignite, discard and dispose
of them appropriately under customer control in compliance with the applicable laws and
regulations. The same is true for customer-provided PCs.
IMPORTANT - 4
Miscellaneous
Leaked X-Rays
Unlike equipment that emits X-rays to the outside for use, electron microscopes are not
subject to filing requirements under the Radiation Damage Prevention Act or the Ionizing
Radiation Damage regulations. The International Committee on Radiation Protection (ICRP),
identify electron microscopes, as well as home television sets, as potential, undesirable
sources of X-rays as byproducts. The system should be used within the scope of intended
objectives and operating methods provided in the Instruction Manual. When used properly in
accordance with the Instruction Manual, the system poses no danger of exposure to leaked
X-rays.
Handling of Chemicals
(1) When cleaning the system, any chemicals (ethyl or isopropyl alcohol) used by a
customer must be handled and disposed of at the customer’s responsibility.
(2) The chemicals should be handled, stored, and disposed of according to the
instructions provided by their suppliers.
Electromagnetic Wave Interference
The system is in compliance with Class A of EN standard EN61326-1（First edition 2006）
(except for PC). When installed in close proximity to other types of electrical or electronic
equipment, the system and the adjacent equipment can exert adverse impact on one another.
In particular, the system should be installed away from television sets or the radio. In addition,
the room in which the system is installed should be controlled so that none of the following
electrical devices* are brought near it:
＊
Designated low-power devices that produce electromagnetic waves, such as mobile
telephones, transceivers, and cordless telephone handsets.
Trademarks
Windows
Windows
The
Ⓡ
is a registered trademark of (US) Microsoft Corporation.
Ⓡ
Vista and WindowsⓇ 7 are trademarks of (US) Microsoft Corporation.
Ⓡ
mark is not provided in the body of text of this manual.
IMPORTANT - 5
For the Safe Handling of the System
Before using the Tabletop Microscope, carefully read the safety precautions provided
below, and please be sure to understand them thoroughly.
Precautions on human safety are displayed using the following headers combining the
safety alert symbol and the phras es “ D A NG ER” , “WARNING”, a nd “CAUTION ”:
： This Safety Alert Symbol is intended to alert the user to the presence of
potential danger that can be harmful to humans. In order to avoid injury
or death that can occur, comply with all the safety messages that follow
the symbol.
WARNING: This indicates the presence of a dangerous condition that, if not
avoided, can potentially lead to severe injury or death.
CAUTION: This indicates the presence of a dangerous condition that, if not
avoided, can potentially lead to minor or moderate injury.
Precautions concerning safety of things other than the person and notes for ensuring the
proper use are displayed by the following headword:
NOTICE: This indicates the presence of a hazardous condition that, if not avoided,
can potentially lead to serious property damage, damage to the system,
data damage, or environmental pollution without endangering humans.
NOTE
: This item is used to provide an explanation to ensure the proper use of
the function and the accurate performance of measurements while
avoiding minor damage to the system.
・ Please comply with all the warning labels attached on the device and all the
cautionary items and instructions described in instruction manuals. When this is
neglected, death and serious injury due to a fire and electric shock and the damage
of the device might be caused.
・ The operation and the maintenance that the customer executes are only items
described to this manual. Do not perform operation or maintenance that is not
provided in the manual. For instance, the customer must not carry out the following
items.
・ Do not carry out modification of the instrument, and do not use non-specified parts.
・ Do not use the device without the safety mechanisms.
・ Do not use parts attached to this device for other devices.
・ Do not install the device when delivering and do not transfer the device after
installation. Our engineer must carry out it.
SAFETY - 1
・ When using the chemi cal such as the re agent, confirm p ropert ies of the ma terial
and information on handling (MSDS etc.) and handle it properly.
・ If any problem arises with respect to the system, please contact the Sales
Department that handles your account or a maintenance service company
designated by HHT.
・ The cautionary items and instructions provided on the system or in the Instruction
Manual have been developed with a great deal of care. Notwithstanding this fact,
unexpected events can occur. When operating the system, beyond complying with the
instructions, it is requested that the customer himself use adequate care.
SAFETY - 2
For the Safe Handling of the System
General Precautions on Safety
Notes that have not been described in the inst ructi on manual ar e sho wn below.
WARNING
Accident by using the device continuously with abnormal condition
• If an abnormal noise, a strange odor, or the generation of fumes occurs when the
system is being used, immediately turn it off, and unplug the power cord from the outlet.
After that, take safety measures according to the conditions under which the problem
occurred, and contact either the maintenance service company designated by HHT or
the service department of HHT (as provided at the end of the Instruction Manual).
Using the system in the abnormal condition can cause electric shock or fires.
Trouble by radiation of laser light
• The CD/DVD drive inter nal to the PC contains a built-in laser light source. PCs
equipped with such laser devices are designed not to emit any laser beam harmful to
humans to the outside, under normal operating conditions. However, if the laser beam
leaks out of the system and gets into eyes, it can cause vision problems. Please read
the precautions on the laser provided in the Instruction Manual supplied with the PC,
and in addition, be sure to comply with the following safety tips:
(1) Do not open the panel for the laser device; there are no components that can be repaired
by customers.
(2) Do not attempt any adjustments on the laser device, such as control operations, that
are not provided in this Instruction Manual.
CAUTION
Tiredness by using the device for a long time
• If you operate the system by viewing the monitor, fatigue can build up in your eyes or
body if you continue to view the monitor in the same posture for long hours. When
operating the system for long hours, be sure to take a break for 10 to 15 minutes every
hour to rest your eyes or body.
SAFETY - 3
For the Safe Handling of the System
Warnings Provided in the Instruction Manu al
Notes that have been described to the manual and their description places are shown
as follows.
WARNING
Use in humid and dusty place
• Do not use the system near a sink, a humidifier, or any place near water, in a humid
basement room, or a dusty place or a place subject to fumes. A failure to heed this
precaution can result in electric shock or fires.
(Chapter 1. Specifications and Installation Conditions)
Electric Shock from High Voltages
• Internally, the system uses maximum voltages of AC 240 V and DC 15 kV.
Touching any of the internal components or circuits when the system is powered on can
potentially result in severe injury or death from electric shock.
Do not remove the cover from the system.
When opening the electron gun and other components for maintenance purposes, be sure
to turn off the earth leakage breaker and the power switch, and unplug the power cord
before commencing the work.
(Chapter 5. Maintenance)
Electric Shock from Improper Grounding
• W hen connecting the main unit to the power supply, use the grounded three-prong
power cable supplied with the system.
Using a power cable not supplied with the system can potentially cause electric shock.
Also, be sure to connect the power cable to a grounded three-prong power outlet.
If a grounded three-prong power outlet is not available for some reason, provide a
grounded three-prong table tap or a conversion adapter. In such a case, be sure to
provide an appropriate grounding. Use a grounding wire with a minimum core wire size
of 2.0mm. In addition, for connection use a minimum screw diameter of M4 and a
thread count of 3. Be sure to plug it in securely.
(Chapter 1. Specifications and Installation Conditions)
SAFETY - 4
For the Safe Handling of the System
Warnings Provided in the Instruction Manu al
(continued)
WARNING
Injury by heavy load
• The system is a heavy object weighing approximately 63 kg. Install the system on a
table with a minimum load bearing capacity of 100 kg. Installing it on a table with an
inadequate load bearing capacity can cause the table to break, which can result in
unexpected injury beyond damage to the system.
To avoid injury from the falling or toppling of the system, do not install the equipment in
an unstable place or a place liable to fall or toppling due to an earthquake or other
events.
Do not install the device when delivering and do not transfer the device after
installation. Our engineer must carry out it.
(Chapter 1. Specifications and Installation Conditions)
• As a rule, do not move the diaphragm pump because it is a heavy load of 4.5 kg. When
moving it by necessity, move it carefully after considering the length of piping and
cable, the safety to one's foot, and impact to the pump.
(Chapter 1. Specifications and Installation Conditions)
Injury by volatile solvent
• When using a volatile solvent during the cleaning of parts for the system, verify
information (MSDS and the like) on the nature and handling of the solvent, and be
sure to handle it properly.
(1) Do not such chemicals near an open fire.
(2) Ventilate a room.
(3) Wear the directed protection tool.
(Chapter 5. Maintenance)
SAFETY - 5
For the Safe Handling of the System
Warnings Provided in the Instruction Manu al
(continued)
CAUTION
Injury from Being Pinched
• The specimen stage's weight is approximately 5 kg. It might cause injury when
operating it grasping the parts other than the handle. When changing specimens,
securely grasp the handle, and use caution so that your hands will not be pinched.
(Chapter 4. Operation)
• The electron gun weighs is 2.5 kg. It might cause finger injury when opening and
shutting. Be sure not to pinch fingers when opening and shutting.
(Chapter 5. Maintenance)
• The finger might get injured in the opening and shutting part of the top cover. Be sure
not to pinch fingers when opening and shutting.
(Chapter 5. Maintenance)
Burns from Touching the Filament Assembly and Peripheral
Components
• After the system has been in use, the Wehnelt and the anode around the filament are
heated about 90℃. Touching any of them can cause burns. Before undertaking any
filament replacement work, turn off the main unit and wait at least 30 minutes to allow it
to cool down.
(Chapter 5. Maintenance)
SAFETY - 6
For the Safe Handling of the System
WARNING and CAUTION Labels on the System
The warning and caution labels affixed on the Tabletop Microscope are shown on pages
SAFETY - 7 to SAFETY - 8.
Check the contents of the warning and caution labels against the actual equipment.
Inspect the warning and caution labels from time to time. Keep them in a clean condition so
that they can be read clearly from a safe distance.
If the warning and caution labels become faint due to aging, contact the Service Department
that services your account and request replacement labels.
WARNING
Hazardous voltage inside
Can cause death or severe injury.
Do not remove the cover.
P/N 52E-4125
Locations of WARNING and CAUTION Labels on the TM3000 Main Unit (on the Sides)
WARNING
Beware of heavy load! (63kg)
Can cause injuries.
When lifting the heavy load do
carefully by two or more
persons not to jam hands or
feet.
WARNING
Hazardous voltage inside
Can cause death or severe injury.
Do not remove the cover.
P/N 55E-2764
P/N 52E-4125
SAFETY - 7
For the Safe Handling of the System
WARNING and CAUTION Labels on the System
(continued)
Hazardous voltage inside
Can cause death or severe injury.
Do not remove the cover.
WARNING
Hazardous voltage inside
Can cause death or severe injury.
Do not remove the cover.
WARNING
Hazardous voltage (15kV) inside
Can cause death or severe injury.
Do not resolve the electron gun.
Beware of high temperature
(About 90°C)
Can cause burns.
Wait over 30 minutes for cooling
down after introducing air, when
replacing the filament.
WARNING
P/N 52E-4125
P/N 52E-4125
P/N 52E-6731
CAUTION
P/N 55E-4102
Location of WARNING Labels (on the Back)
Location of WARNING Labels (Upper View)
Location of WARNING Label (Front View)
WARNING
Hazardous voltage inside
Can cause death or severe injury.
Do not remove the cover.
P/N 52E-4125
WARNING
Hazardous voltage inside
Can cause death or severe injury.
Do not remove the cover.
P/N 52E-4125
SAFETY - 8
For the Safe Handling of the System
To Avoid Serious Prop erty Damage or Damag e to the Sy stem
NOTICE
About the Power Supply
(1) Make sure the power supplied to the Tabletop Microscope is AC 100－240V (Min. 90V,
Max. 250V), 500 V A o r h igher ( 5 0 / 6 0Hz ). Vo l tage fl uc tua ti on s and superposed noise
on the power line can adversely affect the main unit.
(2) Be sure to connect the power line to a grounded three-prong outlet. Verify that the
grounding for the outlet is connected with a grounding resistance of less than 100Ω
Improper grounding not only makes the system vulnerable to external noise; it is also
dangerous due to a potential for electric shock associated with floating voltages.
About the Cable Connection
To prevent a system malfunction, when connecting the power cable or a dedicated cable, be
sure to turn off the earth leakage breaker and the power switch. In particular, when plugging
or unplugging a USB cable, do so by turning off the PC. Remember that performing a “Safe
removal of hardware” step on the PC and receiving a “USB device can now be removed
safely” message does not mean that the USB has been turned off. Plugging or unplugging
the USB cable in this condition can potentially damage the system.
About the Detector
The semiconductor backscattered electron detector is vulnerable to damage. Scratches made
on the surface of the detector element can cause performance degradation. To prevent
damage to the semiconductor backscattered electron detector, when adjusting the height of
the specimen stub, be sure to use the special specimen height adjustment jig.
SAFETY - 9
For the Safe Handling of the System
To Avoid Serious Prop erty Damage or Damag e to the Sy stem
(continued)
NOTICE
About Power Outages
An instantaneous voltage sag caused by a power outage or lightening can potentially damage
the basic software, the application software, or data. As a countermeasure against
instantaneous voltage sag, the use of the system with a PC battery mounted is recommended.
If a power outage occurs, turn off the earth leakage breaker and the power switch to guard
against voltage surges that can occur when power is restored.
When powe r i s r es to r ed , t he sys t em re t ur ns to t he c on di t i on t hat e xis t e d before the po we r
outage. If the power outage occurred in the midst of evacuation, the system automatically
resumes evacuation. If the system was open to the atmosphere, that condition is maintained
as is.
On the Power Supply for the PC
If power is shut off during access to the hard disk or other memory devices, a PC malfunction
can occur and the data and software stored on them can be destroyed. When finished with
the current operation, be sure to perform PC termination operations and then turn off the
power switch for the PC.
On Data Backup
In some cases, a PC failure or malfunction can cause data corruption. To avoid such a
problem, periodically copy the contents of the hard disk to another hard disk, CD-ROM, a
magneto-optical disk, or other external storage devices. Such periodic copying is referred to
as a backup. For further details on this topic, see the instruction manual supplied with the
PC.
About Application Software
Other application software programs should not be installed on the PC associated with the
system. Such programs, beyond producing unexpected operation screens, can adversely
affect the system and cause the system to fail to operate properly.
SAFETY - 10
For the Safe Handling of the System
To Avoid Serious Prop erty Damage or Damag e to the Sy stem
(continued)
NOTICE
About the Computer Virus
If a program or data suddenly becomes corrupt, an unexpected operation occurs, or an
abnormal screen appears, the infection of the PC by a computer virus must be suspected.
The computer virus refers to a malicious program that surreptitiously invades the PC, runs
the PC uncontrollably, or damages data. By the same token, the program that
detects/eliminates computer viruses is referred to as anti-virus software.
The PC and the recording media provided with the system are checked with anti-virus software
before they are shipped from the factory.
PCs can be infected by a virus through interchangeable storage media, such as virus-infected
CDs, DVDs, a USB-connected flash memory units, or through the network. Do not use files that
pose a risk of infection by a computer virus.
Before connecting inte rchangeable storage media or the network, be sure to check it with
anti-virus software with the most up to date virus definitions. When connecting to the network,
HHT recommends the establishment of a firewall as an anti-computer virus measure between
the system and the network. Setting up a firewall is a customer responsibility. HHT does not
warrant that all computer viruses can be prevented by setting up a firewall.
If there are concerns about a computer virus infection, check your system by using anti-virus
software.
Procuring anti-virus software and removing the viruses are a customer responsibility.
Remember that some anti-virus programs may not be able to remove all computer viruses.
HHT does not warrant anti-virus software products themselves.
Some virus detection/eradiation programs, when made memory resident, can have an
adverse impact on the operation of the Tabletop Microscope. If a problem arises after
anti-virus software is installed, either uninstall the anti-virus software or make it non-resident
(by not registering it in the Startup program. Alternatively, perform operations such as
manually starting it when the Tabletop Microscope control program is not running, detecting
the viruses, and closing it when the virus detection process is finished, or conducting the
scanning process when the control program for the system is not running.
SAFETY - 11
For the Safe Handling of the System
To Avoid Serious Prop erty Damage or Damag e to the Sy stem
(continued)
NOTICE
About Network Connection
For network connection, the PC is equipped with an Ethernet port. As connecting to the network
through the use of Ethernet requires sufficient knowledge on the network environment, perform
such a connection by consulting your network administrator.
(1) Providing a cable connection to the Ethernet port must be performed by either the system
installer or a service engineer. For these services, contact either the sales department
handling your account or the Service Department.
(2) When connecting the PC to a network, be sure to take adequate anti-computer virus
measures. For details, see the [About the computer virus] section in this chapter.
(3) The system is not supplied with an Ethernet cable; an appropriate cable should be
procured.
(4) Any change in settings for network connection should be performed with care.
Unwittingly changing the settings necessary for the operation of the system can render
the system inoperative.
(5) Do not install any special software necessary for network connection. Uninstalling it can
adversely impact the system or cause the system to fail to operate normally.
SAFETY - 12
For the Safe Handling of the System
For the Proper Use of the S ystem While Avoiding Minor
Damage to It
Installing the Control Application
If the control application is installed using a privilege other than the administrator privilege,
when a user logs in by using power user or general user privileges, the control application
may fail to run properly. To avoid this problem, be sure to install the control application by
using Administrator privileges.
Properties of the PC Screen
Do not change the screen resolution by means of PC screen property settings. Changing it can
cause the system to fail to display screens properly, produce color changes, and a failure of the
system to run properly. Note that the screen resolution is set according to the following
parameters (by using the [Screen Properties] and [Advanced display] tabs):
Color palette: 16,777,216 colors
Desktop area: 1024×768 pixels
Font size: small
About PC Freezing
If the PC freezes (the mouse and the keyboard won’t work) for some reason, on the
keyboard press the [Ctrl], [Alt], and [Delete] keys simultaneously, and shut down the system
by following the instructions that appear in the dialog box (software resetting).
After that, close Windows normally, turn off the main unit, and restart it. If this condition occurs,
any data up to that point will be lost. If the PC fails to restart after a software reset operation,
verify that the hard disk access indicator light is off, and press the Power button for a long time to
turn it off forcibly. Since turning off power when the hard disk is still running can damage the hard
disk and disable the PC from starting, this technique should be used only as a last resort. For a
description on the hard disk access indicator light, see the instruction manual supplied with the
PC.
About the Power Saving Feature and the Screen Saver
On the PC used in conjunction with the system, disable any screen saver, the display power
saving feature, and power management settings.
If any of these items are enabled, USB communications can be disrupted, causing the PC to
freeze.
SAFETY - 13
For the Safe Handling of the System
For the Proper Use of the S ystem While Avoiding Minor
Damage to It (continued)
Precautions on Operating the System
(1) When leaving the system unattended, turn off the Start button.
(2) Do not use large quantities of chemicals (such as conducting paste) that fix specimens
onto the specimen stub.
(3) When the system is not used, conduct evacuation at least once a week in order to
prevent any uneven distribution of the bearing grease used in the turbo molecular
pump. Also, keeping the system in a vacuum state helps to maintain the interior of the
system clean.
About the Environment around the System
In order to ensure a stable observation, use the system by paying attention to the environment
around the installation site for the system.
(1) Avoid installing the system in a place near power lines serving equipment such as a
large magnetic clutch and subject to sudden current or magnetic field changes.
(2) Install the system in a place away from sources of vibration, such as large machine
tools or transportation facilities (roads, railroads, and the like).
About Magnetic Fields Generated by a Notebook PC
Do not use the system by placing a notebook PC on its main unit. The effects of magnetic
fields generated from the notebook PC can cause image distortion during a high magnification
image observation.
About the Temperature and Humidity of the Room
The room i n wh i ch t he syst e m i s i nst a l le d s hou l d be k e pt at a 15 to 3 0°C room temperature
with a maximum humidity of 70% RH without condensation. The occurrence of water
condensation can cause system failure.
SAFETY - 14
Contents
PREFACE ........................................................................................................................... 1
ABOUT THIS INSTRUCTON MANUAL .............................................................................. 1
IMPORTANT.................................................................................................. IMPORTANT-1
Product Warranty............................................................................................ IMPORTANT-1
Installation, Relocation, and After Service....................................................... IMPORTANT-3
Workshop and Training for Customers............................................................ IMPORTANT-4
System Life..................................................................................................... IMPORTANT-4
Disposal.......................................................................................................... IMPORTANT-4
Miscellaneous................................................................................................. IMPORTANT-5
For the Safe Handling of the System....................................................... SAFETY- 1
General Precautions on Safety ........................................................................... SAFETY- 3
Warnings Provided in the Instruction Manual...................................................... SAFETY- 4
WARNING............................................................................................ SAFETY- 4
CAUTION............................................................................................. SAFETY- 6
WARNING and CAUTION Labels on the System................................................ SAFETY- 7
To Avoid Serious Property Damage or Damage to the System........................... SAFETY- 9
About the Power Supply............................................................................... SAFETY- 9
About the Cable Connection......................................................................... SAFETY- 9
About the Detector ....................................................................................... SAFETY- 9
About Power Outages .................................................................................. SAFETY- 10
On the Power Supply for the PC................................................................... SAFETY- 10
On Data Backup........................................................................................... SAFETY- 10
About Application Software.......................................................................... SAFETY- 10
About the Computer Virus............................................................................ SAFETY- 11
About Network Connection........................................................................... SAFETY- 12
For the Proper Use of the System While Avoiding Minor Damage to It ............... SAFETY- 13
Installing the Control Application.................................................................. SAFETY- 13
Properties of the PC Screen......................................................................... SAFETY- 13
About PC Freezing....................................................................................... SAFETY- 13
About the Power Saving Feature and the Screen Saver............................... SAFETY- 13
Precautions o n Operating the Sy ste m.......................................................... SAFETY- 14
About the Environment around the System.................................................. SAFETY- 14
About Magnetic Fields Generated by a Notebook PC................................... SAFETY- 14
About the Temperature and Humidity of the Room....................................... SAFETY- 14
- i -
PRECAUTIONS ON HANDLING............................................................... PRECAUTIONS-1
1. Precautions on Using the System........................................................ PRECAUTIONS-1
2. General Items...................................................................................... PRECAUTIONS-1
3. Emergency Action............................................................................... PRECAUTIONS-2
4. Precautions on Operating the System................................................. PRECAUTIONS-2
5. Miscellaneous ..................................................................................... PRECAUTIONS-2
6. Electromagnetic Wave Interference..................................................... PRECAUTIONS-2
1 SPECIFICATIONS AND INSTALLATION CONDITIONS................................ 1- 1
1.1 Overview ............................................................................................................... 1- 1
1.2 Features................................................................................................................ 1- 2
1.3 Specifications........................................................................................................ 1- 3
1.4 Installation Conditions ........................................................................................... 1- 4
1.5 PC Specifications .................................................................................................. 1- 7
1.6 Customer-provided Items ...................................................................................... 1- 7
2 INSTALLATION AND SETUP.................................................................................. 2- 1
2.1 Connecting to the PC............................................................................................ 2- 1
2.2 Setting up the PC.................................................................................................. 2- 2
2.2.1 Installing an Application ............................................................................. 2- 2
2.2.2 Installing an Instruction Manual.................................................................. 2- 10
2.2.3 Setup of System Files................................................................................ 2- 15
2.2.4 Checking the Installation of Application...................................................... 2- 17
2.2.5 Installing the USB Driver Software............................................................. 2- 18
2.2.6 Checking the Driver Software..................................................................... 2- 19
2.2.7 Screen Settings.......................................................................................... 2- 21
2.2.8 Changing the Default Input Language........................................................ 2- 38
2.2.9 Setting an Observation Screen Size........................................................... 2- 42
2.2.10 Adding a User Account ............................................................................ 2- 47
2.2.11 Uninstalling an Application Program......................................................... 2- 50
2.2.12 Uninstalling an Instruction Manual............................................................ 2- 52
2.3 Upgrade................................................................................................................ 2- 54
2.3.1 Upgrade of an Application.......................................................................... 2- 54
2.3.2 Upgrade (Repair) of Application................................................................. 2- 59
2.3.3 Downgrade of Application.......................................................................... 2- 61
2.3.4 Upgrade of Instruction Manual................................................................... 2- 62
2.3.5 Upgrade (Repair) of Instruction Manual...................................................... 2- 66
2.3.6 Downgrade of Instruction Manual............................................................... 2- 67
2.4 About TM3000 Setup Disk (A Brief Explanation /Summary) .................................. 2- 68
2.4.1 Installing an Application ............................................................................. 2- 69
- ii -
2.4.2 Upgrade for TM3000 Application................................................................ 2- 70
2.4.3 Output Log Data......................................................................................... 2- 71
2.4.4 About TM3000 Application......................................................................... 2- 71
2.4.5 Exit............................................................................................................. 2- 71
3 SYSTEM CONFIGURATION.................................................................................... 3- 1
3.1 System Configuration ............................................................................................ 3- 1
3.2 Part Names ........................................................................................................... 3- 2
3.2.1 Main Unit.................................................................................................... 3- 2
3.2.2 Diaphragm Pump....................................................................................... 3- 4
3.3 PC......................................................................................................................... 3- 5
4 OPERATIONS ......................................................................................................... 4- 1
4.1 Summary of Operations......................................................................................... 4- 1
4.1.1 Operation Units.......................................................................................... 4- 1
4.1.2 Operation Windows.................................................................................... 4- 2
4.2 Basic Operations................................................................................................... 4- 4
4.2.1 Starting the System.................................................................................... 4- 5
4.2.2 Fixing a Specimen and Adjusting its Height ............................................... 4- 8
4.2.3 Changing Specimens................................................................................. 4- 12
4.2.4 Starting Observing an Image...................................................................... 4- 18
4.2.5 Selecting a Display Mode........................................................................... 4- 19
4.2.6 Setting an Observation Mode..................................................................... 4- 21
4.2.7 Setting an Observation Condition............................................................... 4- 22
4.2.8 Adjusting the Brightness/Contrast of an Image........................................... 4- 22
4.2.9 Coarse Adjustment of the Focus................................................................ 4- 24
4.2.10 Selecting an Observation FOV................................................................. 4- 25
4.2.11 Setting an Image Mode ............................................................................ 4- 30
4.2.12 Setting a Magnification............................................................................. 4- 30
4.2.13 Fine Focusing .......................................................................................... 4- 33
4.2.14 Saving the Image Data............................................................................. 4- 36
4.2.15 Checking the Image Data......................................................................... 4- 38
4.2.16 Terminating the Image Observation......................................................... 4- 39
4.2.17 Shutting Down the System....................................................................... 4- 40
4.3 Detailed Description of Functions.......................................................................... 4- 42
4.3.1 Image Viewing Area................................................................................... 4- 42
4.3.2 Information/Comments Area ...................................................................... 4- 42
4.3.3 File Menu................................................................................................... 4- 43
4.3.4 Edit Menu................................................................................................... 4- 45
4.3.5 View Menu................................................................................................. 4- 46
- iii -
4.3.6 Setting Menu.............................................................................................. 4- 48
4.3.7 Stage Menu ............................................................................................... 4- 50
4.3.8 Maintenance Menu..................................................................................... 4- 53
4.3.9 Help Menu ................................................................................................. 4- 54
4.3.10 Start/Stop Button...................................................................................... 4- 55
4.3.11 View Mode Selection Button .................................................................... 4- 57
4.3.12 Image Mode Button.................................................................................. 4- 58
4.3.13 Observation Condition Selection Button................................................... 4- 61
4.3.14 Quick Save Button ................................................................................... 4- 63
4.3.15 Save Button ............................................................................................. 4- 65
4.3.16 Magnification Button................................................................................. 4- 67
4.3.17 Preset Buttons ......................................................................................... 4- 68
4.3.18 Brightness Button..................................................................................... 4- 68
4.3.19 Contrast Button........................................................................................ 4- 70
4.3.20 Auto B/C Button ....................................................................................... 4- 72
4.3.21 Focus Button............................................................................................ 4- 73
4.3.22 Auto Focus Button.................................................................................... 4- 74
4.3.23 Image Shift Reset Button......................................................................... 4- 75
4.3.24 Rotation Button ........................................................................................ 4- 75
4.3.25 Edit Button ............................................................................................... 4- 76
4.3.26 Minimize Button ....................................................................................... 4- 83
4.3.27 Exit Button ............................................................................................... 4- 83
4.3.28 Setting for Save Window.......................................................................... 4- 84
4.3.29 Save Image Window ................................................................................ 4- 85
4.3.30 Digital Zoom Window ............................................................................... 4- 87
4.3.31 Data Entry/Measurement Window............................................................ 4- 91
4.3.32 Image Balance Window............................................................................ 4- 96
4.3.33 Preset Magnification Window................................................................... 4- 97
4.3.34 Auto B/C Adjustment Window.................................................................. 4- 97
4.3.35 Control Sensitivity Window....................................................................... 4- 98
4.3.36 Beam Axis Alignment Window.................................................................. 4- 99
4.3.37 Observation Screen Size Window........................................................... 4-101
4.3.38 Astigmatism Correction........................................................................... 4-102
4.3.39 User Information Window........................................................................ 4-103
4.3.40 Version Information Window ................................................................... 4-104
5 MAINTENANCE....................................................................................................... 5- 1
5.1 Filament Replacement........................................................................................... 5- 2
5.2 Beam Axis Adjustment .......................................................................................... 5- 10
5.3 Condenser lens Aperture Replacement................................................................. 5- 19
- iv -
5.4 Objective Aperture Replacement........................................................................... 5- 23
5.5 Error Messages..................................................................................................... 5- 27
5.5.1 Messages That are Displayed When a Given Application is Started.......... 5- 27
5.5.2 Initial Startup Window (During Initialization)............................................... 5- 29
5.5.3 Normal Observation Screen....................................................................... 5- 31
5.5.4 Wait Message Window............................................................................... 5- 47
5.5.5 Termination Process.................................................................................. 5- 49
6 REPLACEMENT PARTS......................................................................................... 6- 1
6.1 Consumables ........................................................................................................ 6- 1
6.2 Limited Life Parts................................................................................................... 6- 2
6.3 Spare Parts........................................................................................................... 6- 4
REQUIREMENTS FOR CONFORMITY......................................................................... CE- 1
DECLARATION OF CONFORMITY.............................................................................. CE- 2
- v -
PRECAUTIONS ON HANDLING
For safety, please comply with the following precautions:
1. Precautions on Using the System
WARNING (1) Do not remove the cover from the main unit.
Maximum voltages of AC 240 V and DC 15 kV prevail inside the main
unit, potentially causing severe injury or death from electric shock when
touched.
WARNING (2) Connect the grounding wires properly.
An improper grounding wire connection poses a potential electric shock
hazard beyond a failure of the system to run correctly.
WARNING (3) When stopping abnormally, the diaphragm pump remains hot, posing a
potential hazard of burns. In the event of a diaphragm pump problem,
contact a service engineer without touching it.
CAUTION (4) Correctly measure and set the specimen size and height. An incorrect
setting can potentially damage the specimen or components inside the
specimen chamber.
CAUTION (5) The turbo molecular pump is a limited life item. It should be replaced
after five years. When the bearings reach the end of their life, abnormal
heat generation, an abnormal noise, or abnormal stoppage can occur.
When replacing the TMP, please contact the Service Department.
CAUTION (6) The diaphragm pump is a limited life item. It should be overhauled after
five years. When the diaphragm reaches the end of its life, abnormal
heat generation, an abnormal noise, or abnormal stoppage can occur,
causing the entire pump to stop running. When having the DP
overhauled, please contact the Service Department.
2. General
Items
System service operations other than those which are provided in this Instruction Manual
should be delegated to service engineers.
PRECAUTIONS - 1
3. Emergency Action
3a. Turn off the POWER switch located on the main unit.
3b. Unplug the power cord from the outlet.
3c. Contact a service engineer.
4. Precautions on Operating the System
4a. When leaving the system unattended, turn off the accelerating voltage.
4b. To avoid contamination of a specimen, do not use large amounts of a chemical (such
as conducting paste) that fixes the specimen onto the specimen stand.
5. Miscellaneous
The room in which the system is installed should be maintained under the following
conditions even when the system is idle:
Room temperature : 15°C to 30°C
Humidity : 45 to 70% RH (no condensation)
If the system is not used for a long time, leave it in an evacuated condition instead of opening
the specimen chamber to the atmosphere.
6. Electromagnetic Wave Interference
The TM3000 is in compliance with EN Standard EN61326-1：2006 Class A(except for PC).
Do not install the system near a device in which data is subject to adverse impact by
electromagnetic noise within the tolerance value of the Standard.
The data stored in the system is vulnerable to electromagnetic noise, and the system itself is
liable to malfunction when subjected to such noise. The room in which the system is installed
should be controlled so that any of the following electrical devices＊ will not be brought into
it:
＊ Special, small-power consumption devices such as mobile telephones, transceivers, and
cordless telephone handsets.
PRECAUTIONS - 2
Loading...