Introduction
SM9001
SURFACE/VOLUME RESISTANCE
MEASUREMENT ELECTRODE
SM9002
VERIFICATION FIXTURE FOR
SURFACE RESISTANCE MEASUREMENT
Instruction Manual
May 2019 Revised edition 3
SM9001A981-03 19-05H
EN
Protective
stand
SM9001
Counter-electrode with integrated stand
SM9002
Verification Fixture
for Surface Resistance Measurement
(Option)
Cables
• (D2+D1)
Surface resistivity: s = × (Measured value)
D2D1
• D12 (Measured value)
Volume resistivity: v = ×
4t 10
s : Surface resistivity (Ω)
v : Volume resistivity (Ω•mm)
: Circular constant = 3.14
D1 : Diameter of the main electrode (mm)
D2 : Diameter of the ring electrode (mm)
t : Thickness of sample (mm)
D2
D1
t
Ring electrode
Main electrode
Counter electrode
Object to be
measured
Thank you for purchasing the HIOKI Model SM9001 Surface/Volume Resistance Measurement Electrode and the HIOKI Model SM9002 Verification Fixture for Surface Resistance Measurement . To obtain maximum performance
from the device, please read this manual first, and keep it handy for future reference.
Initial Inspection
When you receive the device, inspect it carefully to ensure that no damage occurred during shipping. If damage is evident, or if it fails to operate according to
the specifications, contact your dealer or Hioki representative.
Overview
The SM9001, an electrode for measuring the surface resistance and volume resistance of flat samples, is an optional product designed for use with Hioki Super
Megohm Meters and Digital Super Megohm Meters/Micro-ammeters. It complies with JIS C 2170 (IEC 61340-2-3) and is capable of reliable measurement
in applications ranging from evaluation of electrostatic countermeasures to
high-resistance measurement in materials development and other fields.
Safety Information
This manual contains information and warnings essential for safe operation of
the device and for maintaining it in safe operating condition. Before using it, be
sure to carefully read the following safety precautions.
Mishandling this device during use could result in injury or
death, as well as damage to the device. Be certain that you
understand the instructions and precautions in the manual
before use. We disclaim any responsibility for accidents or
injuries not resulting directly from device defects.
Safety Symbols
Indicates cautions and hazards. When the symbol is printed on the instrument, refer to a corresponding topic in the Instruction Manual.
Indicates DC (Direct Current).
The following symbols in this manual indicate the relative importance of cautions
and warnings.
Indicates an imminently hazardous situation that will result in death or
serious injury to the operator.
Indicates a potentially hazardous situation that may result in death or
serious injury to the operator.
Indicates a potentially hazardous situation that may result in minor or
moderate injury to the operator or damage to the device or malfunction.
Usage Notes
Follow these precautions to ensure safe operation and to obtain the full benefits
of the various functions.
• Before using the device, make sure that the insulation on the
cable is undamaged and that no bare conductors are improperly exposed. Using the device in such conditions could
cause an electric shock, so contact your dealer or Hioki representative for repair.
• The maximum rated voltage between input terminals and
ground is 1000 VDC. Attempting to measure voltages exceeding 450V with respect to ground could damage the device and
result in personal injury.
• To avoid shock and short circuits, turn off all power before
connecting the device.
• Do not allow the device to get wet, and do not take measurements with wet hands. This may cause an electric shock.
• Do not use the device where it may be exposed to oil, chemicals, or solvents. Contact with these substances may cause
cracking in the device, resulting in damage or electric shock.
• Do not slant the device or place it on top of an uneven surface. Dropping or knocking down the device can cause injury
or damage to the device.
• This device is not designed to be entirely water- or dust-proof.
Do not use it in an especially dusty environment, nor where it
might be splashed with liquid. This may cause damage.
• Do not store or use the device where it could be exposed to direct sunlight, high temperature or humidity, or condensation.
Under such conditions, the device may be damaged and insulation may deteriorate so that it no longer meets specifications.
• To avoid damage to the device, protect it from physical shock
when transporting and handling. Be especially careful to
avoid physical shock from dropping.
• To prevent an electric shock accident, confirm that the white or
red portion (insulation layer) inside the cable is not exposed. If
a color inside the cable is exposed, do not use the cable.
Instrument Installation
Avoid the following locations that could cause an accident or damage to the device.
Exposed to direct sunlight
Exposed to high temperature
In the presence of corrosive or explosive gases
Electrode structure
Dimensions
Mass Approx. 2.5 kg (88.2 oz.)
Accessories
Electrodes
Option
Product warranty
period
Main electrode : Floating structure
Ring electrode : Fixed to enclosure
Approx. 100×223H mm (including handle and barrier)
Approx. 3.94” × 8.78”H
Connection Cable length: Approx. 1 m
Instruction manual ..................................... 1
Counter-electrode with integrated stand.... 1
Dimensions: Approx. 154W×155D×25H mm
Mass: Approx. 1.2 kg (42.3 oz.)
Electrode dimensions: Approx. 100 mm×100 mm
Protective stand ......................................... 1
Carrying case (with lock) ........................... 1
Short bar .................................................... 1
Counter-electrode connection cable .......... 1
Cable length : Approx. 700 mm (27.56”)
Mass : Approx. 27.0 g (1.0 oz.)
Electrode rubber
Material: Conductive rubber
Profile : Main electrode ; 30.5 mm (D1),
Model SM9002 Verification Fixture for Surface Resistance
Temperature and humidity range during inspection
18°C to 28°C (64.4°F to 82.4°F),
60% RH or less. (non-condensing)
3 years (The electrode rubbers, which are consumables,
are not covered by the warranty.)
(isolated from ring electrode)
: Ring electrode ; 57.0 mm (inner diameter)(D2),
Measurement
Measurement functionality
Reference standards
Measurement
items
Measurement
ranges
Electrode internal
resistance
Maximum rated
voltage to earth
Resistance when
shorted
IEC61340-2-3:2000
JIS C2170:2004
Surface resistance measurement [Rs]
The surface resistance of the sample is measured after placing
the electrode at roughly the center of the sample or at least 10
mm from the edge of the sample.
Volume resistance measurement [Rv]
The volume resistance of the sample is measured after placing
the sample on the counter-electrode with integrated stand and
then placing the electrode at roughly the center of the sample or
at least 10 mm from the edge of the sample.
*Switch measurement targets by switching terminal connections.
Resistance measurement range: 1×103 Ω to 1×1013 Ω
The minimum resistance measurement is determined by the specifications of DSM series and SM series Super Megohm Meters.
Between main electrode and ring electrode
1000 V DC
Between main electrode and ring electrode
: 1×10
: 1×10
14
Ω or more
3
Ω or less
(6.06”W × 6.10”D × 0.98”H),
Thickness: 3 mm
63.0 mm (outer diameter),
Thickness: 3 mm
Indicates advisory items related to performance or correct operation of
the device.
Stowing the electrode in its
carrying case
Exposed to water, oil, other chemicals, or solvents
Exposed to high humidity
or condensation
Exposed to high levels of
particulate dust
Subject to vibration
Specifications
General Specifications
Operating environment
Operating temperature and humidity
Storage temperature and humidity
Dielectric strength
Indoors, altitude up to 2000 m (6562 feet),
Pollution degree 2
0°C to 40°C (32°F to 104°F), 80%RH or less.
(non-condensing)
-10°C to 50°C (14°F to 122°F), 80%RH or less.
(non-condensing)
Between input terminals (together) and SM9001 enclosure:
7504 V DC, for 15 seconds
Exposed to strong electromagnetic fields
Near electromagnetic
radiators
Near induction heating systems. (e.g., high-frequency
induction heating systems
and IH cooking utensils)
Supported
models
Conversion to resistivity (JIS C2170:2004/ IEC 61340-2-3:2000)
Super Megohm Meter SM series, DSM series
Names of Parts
Short bar
Handle
Input cable
Output cable
Protective stand
Counter-electrode terminal
SM9001
Counter-electrode with integrated stand
Counter-electrode
surface
Stand surface
Main electrode rubber
Ring electrode
rubber
Bottom of SM9001
Top of SM9001
Guard terminal
(Blue)
Common terminal (gray)
Output terminal
(Red)
Barrier
1. Connect the short bar to the surface resistance measurement [Rs] terminals
(common terminal [gray] and output terminal [red]).
2. Place the sample on the stand surface of the counter-electrode with integrat-
ed stand and gently place the SM9001 on top of the sample at least 10 mm
from the edge, lowering it from directly above.
3. Verify that no voltage is being output from the Super Megohm Meter. Con-
nect the input cable to the Super Megohm Meter's input terminal and the output cable to the Super Megohm Meter's output terminal.
4. Operate the Super Megohm Meter to start measurement.
For more information about measurement, see the Super Megohm Meter's
instruction manual.
1. Connect the short bar to the volume re-
sistance measurement [Rv] terminals
(common terminal [gray] and guard terminal [blue]).
2. Place the sample on the counter-elec-
trode surface of the counter-electrode
with integrated stand and gently place
the SM9001 on top of the sample at least
10 mm from the edge, lowering it from directly above so that it does not extend
beyond the counter-electrode surface.
3. Connect the included counter-electrode
connection cable to the output terminal
(red) and the counter-electrode terminal.
4. Verify that no voltage is being output
from the Super Megohm Meter. Connect
the input cable to the Super Megohm
Meter's input terminal and the output cable to the Super Megohm Meter's output
terminal.
5. Operate the Super Megohm Meter to
start measurement.
For more information about measurement, see the Super Megohm Meter's instruction manual.
3
Counter-electrode
connection cable
1
4
2
High-resistance test surface Low-resistance test surface
Flip over
1. Connect the short bar to the surface resistance measurement [Rs] terminals
(common terminal [gray] and output terminal [red]).
2. Gently place the SM9001 on the SM9002's low-resistance test surface, low-
ering it from directly above.
3. Apply 10 V and read the resistance value after 15 sec.
4. Stop applying the voltage. Lift up the SM9001 and rotate the SM9002 90°.
5. Repeat steps (3) and (4) until the SM9002 has been rotated through 360°.
1. Connect the short bar to the surface resistance measurement [Rs] terminals
(common terminal [gray] and output terminal [red]).
2. Gently place the SM9001 on the SM9002's high-resistance test surface, low-
ering it from directly above.
3. Apply 100 V and verify that a stable resistance value of 1 TΩ±5% is obtained.
• To avoid breaking the cable, do not bend or pull it.
• Avoid stepping on or pinching cables, which could damage
the cable insulation.
• The cable is hardened under the 0 degree or colder environment. Do not bend or pull it to avoid tearing its shield or cutting cable.
• Keep the cables well away from heat sources, as bare conductors could be exposed if the insulation melts.
• When placing the SM9001 in contact with the sample, do so gently and from
directly above the sample.
• Check the surface of the electrode rubber for dirt, foreign matter, scratches,
or other impediments to proper operation.
• Place the measurement target (or when measuring volume resistance, the
counter-electrode) on a level surface.
• While performing measurement, avoid contact with the SM9001. Avoid subjecting the SM9001 to excessive force by pulling on or twisting cables.
• Do not subject the electrode rubber to twisting (friction) or mechanical shock.
• If unable to obtain stable measurement results, clean the surface of the
SM9001's electrode rubber with industrial-use ethanol (use a concentration
of at least 95%). If cleaning fails to yield improvement, remove the SM9001's
electrode rubber and clean the entire unit with industrial-strength ethanol
(use a concentration of at least 95%). For more information, see "Removing
and reattaching the electrode rubber."
• To protect the electrode rubber, place the SM9001 on its protective stand
when not using it to measure samples and avoid sitting it directly on the bottom surface. When placing the SM9001 on the protective stand, do so carefully and avoid subjecting the stand to excessive force.
Measuring surface resistance
Maintenance and Service
• If damage is suspected, check the "Before Returning for Repair" section
before contacting your dealer or Hioki representative.
• Use the original packing materials when transporting the device, if possible.
Cleaning
To clean the device, wipe it gently with a soft cloth moistened with water or mild
detergent. Never use solvents such as benzene, acetone, ether, ketones, thinners or gasoline, as they can deform and discolor the case. Clean the electrode
rubber with industrial-use ethanol (use a concentration of at least 95%).
About electrode rubber
Removing and reattaching the electrode rubber
• The electrode rubber can be removed by gripping it carefully so as not to
scratch it and pulling it off.
• The electrode rubber has a top and a bottom. Check for proper orientation
before reattaching it. The surface that makes contact with the measurement
target is thinner, while the surface that makes contact with the metal portion
of the SM9001 is thicker.
• Gently insert the electrode rubber and then fit it tightly against the metallic
surface by pushing it against a level base such as the counter-electrode.
Contact your dealer or Hioki representative if:
• The electrode rubber no longer covers the adjacent metal
• The electrode rubber exhibits visible damage
• The electrode rubber is excessively dirty and efforts at cleaning prove to be
ineffective
Before Returning for Repair
If abnormal operation occurs, check the following items.
Symptom Check Items Solution
Are the terminals connected properly?
Connect the terminals
securely.
Measurement functionality
Low-resistance measurement
Resistance measurement electrodes connected to a measuring
instrument are secured to the inspection fixture, and a judgment
is made concerning whether the system is functioning properly.
(Test voltage: 10 V DC)
Verification consists of a series of repeated measurements
Measurement items
Circuit design
Maximum rated voltage to earth
while varying the phase position of the fixture and electrodes by
90°.
High-resistance measurement
Resistance measurement electrodes connected to a measuring
instrument are secured to the inspection fixture, and a judgment
is made concerning whether the system is functioning properly.
(Test voltage: 100 V DC)
Low-resistance measurement
The circuit consists of contact electrodes arranged in a radial
pattern at the center and ring measurement electrode positions
and twenty 10 MΩ±1% resistors placed at an even interval.
The circuit forms a 500 kΩ±1% parallel connection.
High-resistance measurement
The circuit consists of contact electrodes placed at the center
and ring measurement electrode positions and one 1 TΩ±5%
resistor.
100 V DC
Appearance
Using the fixture
The following describes how the fixture is used in a typical application. Customers needing to perform a rigorous verification process that complies with JIS C
2170:2004 should be sure to check the actual JIS document.
Low-resistance measurement
Pre-Operation Inspection
Before using the device, check it and verify that it operates properly to make
sure that it suffered no damage during storage or transportation.
Check the following before using the device.
Check Items Diagnose and Solution
Is the insulation of the cable to be used damaged,
or is bare metal exposed?
Is there a break in a cable?
• Between the main electrode rubber and the input
cable's inner wire
• Between the guard terminal (blue) and the input
cable's outer wire
• Between the output terminal (red) and the output
cable
Is the electrode's internal resistance at least
14
1×10
• Place the SM9001 in a horizontal orientation and
take a measurement while the main electrode
and ring electrode are not in contact with anything.
(Applied voltage: 100 V/1 min.)
Ω?
Measurement Procedures
When measuring insulation resistance, a dangerous voltage will
be applied to the electrodes in the START, MEASURE, and
CHARGE states. To avoid electric shock, do not touch the electrodes.
Do not use a damaged
cable doing so may
result in electric shock.
Have the SM9001
repaired if there is a
break in a cable.
Remove dirt and other
foreign matter from
between the main electrode and ring electrode.
Measuring volume resistance
Connect the short bar to
The resistance value is
abnormal.
Has the short bar been
connected properly?
Is the electrode rubber
dirty?
the proper pair of terminals for the type of measurement you intend to
perform.
Clean the electrode rubber.
SM9002
Verification Fixture for Surface
Resistance Measurement
The SM9002 Verification Fixture for Surface Resistance Measurement is a system verification fixture for use in measuring surface resistance as required by
Section 8.4 of JIS C 2170:2004 (IEC 61340-2-3:2000). The SM9002 is an option
designed specifically for use with the SM9001 and cannot be used for system
verification of other devices.
Specifications
General Specifications
Operating environment
Operating temperature and humidity
Storage temperature and humidity
Dielectric strength
Electrode structure
Dimensions Approx. 100×56H mm (3.94” × 2.20”H)
Mass Approx. 300 g (10.6 oz.)
Product warranty
period
Indoors, altitude up to 2000 m (6562 feet),
Pollution degree 2
18°C to 28°C (64.4°F to 82.4°F), 60% RH or less.
(non-condensing)
-10°C to 50°C (14°F to 122°F), 80% RH or less.
(non-condensing)
Between electrodes (together) and SM9002 enclosure:
1120 V DC, for 15 seconds
High-resistance : Chrome-plated metal (brass)
Low-resistance : Gold-plated copper cladding formed on
PC board
3 years
If the acquired resistance values are both within 5% of 500 kΩ, then the system
is operating properly.
High-resistance measurement
• Some Super Megohm Meter models are capable of generating a terminalto-ground voltage of 1,000 V, but the SM9002 is rated for a maximum terminal-to-ground voltage of 100 V.
• Check the SM9002 test surface and the SM9001 electrode rubber for dirt,
foreign matter, scratches, or other impediments to proper operation.
• While performing measurement, avoid contact with the SM9001. Avoid
subjecting the SM9001 to excessive force by pulling on or twisting cables.
• Due to the delicate nature of the contact with the SM9001, you may obtain
out-of-range measured values even if the product is operating properly if
the SM9001 has not been placed on the surface from directly above.
Remove and then reposition the SM9001 if the value is out of range.
• If unable to obtain stable measurement results, clean the surface of the
SM9001's electrode rubber and the SM9002 test surface with industrialuse ethanol (use a concentration of at least 95%). If cleaning fails to yield
improvement, remove the SM9001's electrode rubber and clean the entire
unit with industrial-strength ethanol (use a concentration of at least 95%).
For more information, see "Removing and reattaching the electrode rubber."
• Place the SM9002 on a level surface.
• The SM9002 should be stored in a pouch inside the SM9001's included
carrying case.
• Do not touch the test surface or get it dirty.
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