SM7110
HIOKI SM7110A961-06
SM7120
Instruction Manual
SUPER MEGOHM METER
Oct. 2022 Revised edition 6
SM7110A961-06 22-10H
Read carefully before use.
Keep for future reference.
When using the instrument for the
rst time
Names and Functions of Parts
Preparing for Measurement
p.29
p.18
Troubleshooting
Maintenance and Service
Error display and solution
p.175
p.178
EN
[600472516]
Contents
HIOKI SM7110A961-06
Contents
Introduction ................................................ 1
Verifying Package Contents ..................... 2
Measurement Procedure........................... 5
Safety Information ..................................... 6
Operating Precautions .............................. 9
1 Overview 17
1.1 Product Overview and Features ... 17
1.2 Names and Functions of Parts ..... 18
1.3 ScreenCongurationand
Operation ........................................ 23
Measurement screens ................................23
Settings screens .........................................23
1.4 Displayed Contents of
Measurement Screen ..................... 24
1.5 Basic Key Operation ...................... 26
Displaying measurement screen ................26
Displaying the various menu settings
screens .......................................................26
Selecting settings items ..............................27
Methods for changing numerical values .....28
2 Preparing for
Measurement 29
2.1 Connecting Power Cord to
instrument ....................................... 29
2.2 Connecting Measurement Leads
to Instrument .................................. 30
2.3 Connecting Electrode .................... 30
2.4 Connecting Humidity Sensor ........ 32
2.5 Grounding Instrument ................... 32
2.6 If Measured Object Is to Be
Charged Before Measurement
(Pre-charge) .................................... 34
2.7 For Safe Measurement ................... 35
2.8 Outputting Measurement
Current Value Converted to
Analog Signal ................................. 36
2.9 TurningOn/OInstrument ............ 37
2.10 Inspection Before Use ................... 38
3 Basic Measurement 39
3.1 Setting Measured Value Display
Mode ................................................ 39
Changing display notation ..........................40
Changing displayed digits ...........................40
3.2 Setting Applied Measurement
Voltage ............................................ 41
3.3 Setting Measurement Speed ......... 43
3.4 Changing Current Range ............... 44
3.5 Connecting Measurement Leads
or Electrode to Object to Be
Measured ........................................ 45
3.6 Starting/Stopping Measurement ... 46
3.7 ConrmingMeasurementResults 46
Detecting a measurement abnormality .......46
Temperature measurement indication ........46
3.8 Basic Measurement Examples ...... 47
4 Applied Measurement 49
4.1 Starting Measurement After
Measured Value Becomes
Stable (Delay Function) ................. 49
4.2 Reducing Variation in Measured
Values (Average Function) ............ 50
4.3 Automatic Inspection (Sequence
Program Function) ......................... 52
4.4 Setting Voltage Value for
Resistance Calculation .................. 56
4.5 Changing Measurement Starting
Conditions (Trigger Function) ....... 58
Setting the trigger mode .............................58
Inputting an external trigger ........................59
4.6 Maintaining Measurement
Accuracy (Self-Calibration
Function) ......................................... 60
4.7 Setting Interlock Function ............. 62
How to deactivate the interlock ...................63
4.8 Setting Pre-charge ......................... 64
4.9 Limiting Current Flowing
Through Measured Object
(Current Limiter) ............................. 65
4.10 Auto-Range Timeout Function ...... 67
4.11 Contact Check (Various Setting) .. 68
4.12 Canceling Capacitance of
Measurement Fixture (Fixture
Capacitance Open Correction
Function) ......................................... 71
4.13 Contact Check (Executing
Contact Check, Setting
Reference Value) ............................ 72
4.14 Setting Resistivity Calculation
(Resistivity Measurement
Function) ......................................... 74
4.15 Further Accelerating
Measurement (Function of
Updating Drawing During
Measurement) ................................. 77
4.16 Sweep Function .............................. 78
Enabling and disabling the step function ....78
Sweep function settings ..............................80
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3
4
5
6
7
8
9
10
Appx. Ind.
SM7110A961-06
i
Contents
HIOKI SM7110A961-06
Performing sweep measurement ................88
5 Measurement Methods
Suitable for Various
Objects to Be Measured 89
5.1 Measuring Components or
Circuits ............................................ 89
Measurement with use of a
measurement xture ...................................90
Measurement without use of a
measurement xture ...................................91
Automatic measurement .............................92
5.2 Measuring Flat Sample .................. 94
Measurement using pin type terminals .......94
Measurement using an electrode for
measuring surface resistance .....................94
Measurement using an electrode for a
at sample ..................................................95
Volume resistance measurement and
surface resistivity measurement (the
functional role of the guard electrode) ........95
5.3 Measuring a Liquid Sample ........... 98
When using an electrode for liquid
samples ......................................................98
5.4 Measurement With Use of
Shielding Box ................................. 99
5.5 Measuring Current ....................... 100
6 Judging Measured
Value (Comparator
Function) 101
6.1 Setting Judgment Sound ............. 103
6.2 ConrmingJudgmentResults .... 104
7 Saving and Loading
Settings (Panel Saving
and Loading) 105
7.1 Saving Settings (Panel Saving
Function) ....................................... 106
7.2 Loading Settings (Panel
Loading Function) ........................ 107
7.3 Changing Panel Name ................. 108
7.4 Deleting Panel Contents .............. 109
8 System Setting 111
8.2 Disabling Key Operation (Key
Lock Function) ..............................112
8.3 Browsing, Deleting, and
Outputting Internal Memory Data 113
Browsing and deleting data ...................... 11 4
8.4 Checking Voltage Error (Voltage
Monitor Check Function) ..............115
8.5 Preventing Test From Being
Incorrectly Started (Double
Action Function) ............................116
8.6 Adjusting Screen Contrast ...........116
8.7 Adjusting Backlight Brightness ...117
8.8 Changing Power Frequency
Setting (Power Frequency
Setting Function) ...........................117
8.9 Initializing Settings (Reset) ..........118
Default setting list ..................................... 11 9
8.10 Checking Instrument Information 121
9 External Control
(EXT I/O) 123
9.1 Switching Current Sink (NPN) /
Current Source (PNP) .................. 124
9.2 External Input/Output Terminals
and Signals ................................... 124
Instrument-side connector and mating
connectors ................................................124
Instrument-side connector pin
assignment ...............................................125
Function of each of the signals .................126
9.3 Timing Chart ................................. 128
From when measurement starts to
when judgment result is acquired .............128
Output signal status on start-up ................134
Flowchart for acquiring a judgment
result or a measured value with the
external trigger setting ..............................134
9.4 InternalCircuitConguration ..... 135
Electrical Specications ............................136
Examples of connection ............................137
9.5 Assembling Male Connector for
EXT I/O (Accessory) ..................... 138
9.6 EXT I/O Terminal Input and
Output Testing .............................. 139
9.7 Settings for External Input and
Output ........................................... 140
Trigger logic ..............................................140
Trigger lter ...............................................141
GO-signal outputting logic level ................142
EOM signal output mode ..........................143
8.1 Setting Sound of Key Operation .. 111
ii
Contents
HIOKI SM7110A961-06
10 Communications (USB,
RS-232C, GP-IB) 145
10.1 Summary and Features of
Interface ........................................ 145
10.2 USB Interface ................................ 146
Installing the USB driver ...........................146
Connecting the USB cable ........................146
Setting the instrument ...............................147
10.3 RS-232C Interface ........................ 148
Connecting the RS-232C cable ................148
Setting the instrument ...............................149
Setting the controller (Computer or PLC) .149
10.4 GP-IB Interface ............................. 150
Connecting the GP-IB cable .....................150
Setting the instrument ...............................150
10.5 Settings Common to Interfaces .. 152
Outputting measured values (data
output function)
(RS-232C and USB only) ..........................152
Displaying communication commands
(communication monitor function) .............153
10.6 Control by Using Commands ...... 154
Remote state ............................................154
Local state ................................................154
Appx. 3 Sample calculation of
resistance measuring
accuracy (SM7110) ........... Appx.3
Appx. 4 Countermeasures
Against Noise ................... Appx.4
Appx. 5 Using Instrument as
Ammeter (If Operated
in Combination With
External Power Supply) ... Appx.7
Appx. 6 Assembling Switching
Unit for Objects to be
Measured .......................... Appx.8
Connecting objects to be measured and
the switching unit to the instrument .....Appx.8
Selecting relays to be installed in the
switching unit .......................................Appx.9
Circuit diagram of the switching unit ..Appx.10
Including current-limiting resistor
(protective resistance) and relay ........Appx.10
Current-limiting resistor ...................... Appx.11
Appx. 7 Modifying Measurement
Lead ................................ Appx.12
Appx. 8 Mounting Instrument in
Rack ................................ Appx.15
Appx. 9 Dimensional Diagram .... Appx.18
11
12
3
4
5
6
11 Specications 155
11.1 GeneralSpecications ................ 155
11.2 Input/Output/Measurement
Specications ............................... 156
Basic specications ..................................156
Accuracy specications ............................157
11.3 Functionspecications ............... 161
11.4 InterfaceSpecications ............... 169
11.5 ExternalI/OSpecications .......... 171
12 Maintenance and
Service 175
12.1 Troubleshooting ........................... 175
Q&A (Frequently Asked Questions) ..........175
Error display and solution .........................178
12.2 Inspection, Repair and Cleaning 180
Appendix Appx.1
Appx. 1 Internal Circuits ............... Appx.1
Appx. 2 Changes in Current
Running through
Insulator ............................ Appx.2
Index Ind.1
7
8
9
10
Appx. Ind.
iii
Contents
HIOKI SM7110A961-06
iv
Introduction
HIOKI SM7110A961-06
Thank you for purchasing the Hioki SM7110/SM7120 Super Megohm Meter. To obtain maximum
performance from the instrument, please read this manual rst, and keep it handy for future
reference.
Following manuals are provided along with these models. Refer to manuals relevant to your
purpose.
Type Contents Printed
Instruction Manual
(This document)
Communications
Command Instruction
Manual
Operating instructions, functions,
specications, etc.
Explanation of communications
(including message references
and measured value formats)
–
CD-stored
File name
SM7110A964-XX
Introduction
1
2
–
3
Latest instruction manual
The contents of this manual are subject to change, for example as a result of
product improvements or changes to specications. The latest edition can be
downloaded from Hioki’s website.
https://www.hioki.com/global/support/download
Product registration
Register your product in order to receive important product information.
https://www.hioki.com/global/support/myhioki/registration
Trademark
• Microsoft and Windows are either registered trademarks or trademarks of Microsoft Corporation
in the United States and other countries.
• TEFLON is a registered trademark or a trademark of The Chemours Company FC, LLC.
Notation
(Bold character)
*
SET
[ ]
4
5
6
7
8
Additional information is presented below.
Operation keys are displayed in bold.
9
Names on the screen are indicated with brackets [ ].
10
Appx. Ind.
1
Verifying Package Contents
HIOKI SM7110A961-06
Accuracy
Hioki expresses accuracy as error limit values specied in terms of percentages of reading, of full
scale, and of setting, and digits.
Full scale
(Maximum
displayable value)
Reading
(Displayed value)
Digits
(Resolution)
Setting
(Set value)
Refers to the maximum displayable value of each measurement range. The
instrument has measurement ranges whose values are equal to the maximum
displayable values. The limit values of full-scale errors are expressed in percent of
full scale (% of full scale. % f.s.).
Refers to the displayed value of the measuring instrument. The limit values of
reading errors are expressed in percent of reading (% of reading, % rdg).
Refers to the smallest change in the indication on the digital measuring instrument,
i.e., the numeral one in the right most place. The limit values of digit errors are
expressed in terms of digits (dgt).
Refers to the set value, such as a voltage value or current value, to be outputted
from the instrument. The limit values of setting errors are expressed in percent of
setting (% of setting).
Verifying Package Contents
When you receive the instrument, inspect it carefully to ensure that no damage occurred during
shipping. In particular, check the accessories, panel switches, keys, and connectors. If damage
is evident, or if it fails to operate according to the specications, contact your authorized Hioki
distributor or reseller.
Main unit and Included Accessories
Conrm that these contents are provided.
Model SM7110 or SM7120
Super Megohm Meter
Shorting plug
(For connecting the GROUND terminal
Instruction Manual
CD (Communications Command Instruction
Manual, USB driver)*
with the OUTPUT terminal [or the GUARD
terminal])
* The latest version can be downloaded from
our website.
Male connector for EXT I/O Power cord
2
Verifying Package Contents
HIOKI SM7110A961-06
Options
The following options are available for the instrument. Contact your authorized Hioki distributor or
reseller when ordering. Options are subject to change. Please check Hioki’s website for the latest
information. Options are subject to change. Please check Hioki’s website for the latest information.
Measurement leads
See p. 11.
Model L2230 Pin Type Lead (Red) Model L2231 Pin Type Lead (Black)
Length: 1 m Length: 1 m
Terminal shape: Triaxial BNC Terminal shape: Banana
Maximum rated voltage: 2000 V Maximum rated voltage: 2000 V
Maximum rated current: 1 A Maximum rated current: 1 A
Model L2232 Clip Type Lead (Red) Model L2233 Clip Type Lead (Black)
Length: 1 m Length: 1 m
Terminal shape: Triaxial BNC Terminal shape: Banana
Maximum rated voltage: 2000 V Maximum rated voltage: 2000 V
Maximum rated current: 1 A Maximum rated current: 1 A
1
2
3
4
5
Model L2234 Open Lead (Red) Model L2235 Open Lead (Black)
Length: 3 m Length: 3 m
Terminal shape: Triaxial BNC Terminal shape: Banana
Maximum rated voltage: 2000 V Maximum rated voltage: 2000 V
Maximum rated current: 1 A Maximum rated current: 1 A
Communication cables
Model 9637 RS-232C Cable
(9pin-9pin/1.8m)
Model 9638 RS-232C Cable
(9pin-25pin/1.8m)
6
7
8
9
Model 9151-02 GP-IB
Connector Cable (2 m)
10
Appx. Ind.
3
Verifying Package Contents
HIOKI SM7110A961-06
Electrodes
Conversion of the connectors is required to connect these electrodes. Contact your authorized
Hioki distributor or reseller.
Model SME-8301 Surface Resistance
Measurement Electrode
Model SME-8310 Plate Sample Electrode Model SME-8311 Electrode for Flat Sample
Model SME-8320 Weight Electrode Model SME-8330 Liquid Sample Electrode
Model SME-8350 Shielding Box Model SME-8360 Electrode for Chip Capacitor
Model SME-8302 Electrode for Surface
Resistance
Model SM9001 Surface/Volume Resistance
Measurement Electrode
Model SR-2 Standard Resistor
Temperature and humidity sensor Other
Model Z2011 Humidity Sensor Model DSM8104F Interlock Cable
Required to use the interlock function in
combination with Model SME-8310, SME-8311, or
SME-8350.
4
Measurement Procedure
HIOKI SM7110A961-06
Be sure to read “Operating Precautions” (p. 9) beforehand.
Measurement Procedure
Installing, connecting, and turning on the instrument
Install the instrument. (p. 10)
Connect the power cord to the instrument. (p. 29)
Connect the measurement lead, electrode, and the
Humidity Sensor to the instrument. (p. 30)
Connect other devices to the instrument via the
external interface (as needed).
• Use the EXT I/O. (p. 124)
• Connect a computer to the instrument for communications
through USB, RS-232C, or GP-IB. (p. 145)
Turn on the instrument. (p. 37)
(It takes at least 30 minutes to complete a warm-up.)
Connect the measurement lead and
electrode to the instrument.
Turn on the instrument.
Connect the power cord
to the instrument.
Connect the temperature
and humidity sensor to
the instrument.
Use the EXT I/O.
Communicate with the computer
through USB, RS-232C, or GP-IB.
1
2
3
4
5
Setting the instrument (p. 39)
Set the measurement conditions (as needed).
• Basic setting (p. 39)
• Customized setting for measurement conditions (p. 49)
• Setting related to the system (p. 111)
• Default setting table (p. 119)
Starting the measurement
Execute the open correction. (p. 68)
If contact check is set to ON, execute the open correction.
Connect the measurement lead to an object to be
measured. (p. 45)
Start the measurement. (p. 46)
Check the measured values. (p. 46)
When the pre-charge function is enabled, the instrument charges the object to be measured through the
CHARGE terminal. (p. 64)
Press the STOP key to end the measurement. (p. 46)
6
7
8
9
10
Appx. Ind.
If the trigger source setting is set to [EXTERNAL], the measurement automatically stops in completion
of each measurement.
Ending
Turn o the instrument. (p. 37)
5
Safety Information
HIOKI SM7110A961-06
Safety Information
This instrument is designed to conform to IEC61010 Safety Standards, and has been thoroughly
tested for safety prior to shipment. However, using the instrument in a way not described in this
manual may negate the provided safety features.
Before using the instrument, be certain to carefully read the following safety notes:
DANGER
Mishandling during use could result in injury or death, as well as damage to the
instrument. Be certain that you understand the instructions and precautions in
the manual before use.
WARNING
With regard to the electricity supply, there are risks of electric shock, heat
generation, re, and arc ash due to short circuits. If persons unfamiliar with
electricity measuring instrument are to use the instrument, another person
familiar with such instruments must supervise operations.
Notation
In this manual, the risk seriousness and the hazard levels are classied as follows.
DANGER
WARNING
CAUTION
IMPORTANT
Indicates an imminently hazardous situation that will result in death or serious injury
to the operator.
Indicates a potentially hazardous situation that may result in death or serious injury to
the operator.
Indicates a potentially hazardous situation that may result in minor or moderate injury
to the operator or damage to the instrument or malfunction.
Indicates information related to the operation of the instrument or maintenance tasks
with which the operators must be fully familiar.
Indicates a high voltage hazard.
If a particular safety check is not performed or the instrument is mishandled, this may
give rise to a hazardous situation; the operator may receive an electric shock, may
get burnt or may even be fatally injured.
Indicates prohibited actions.
6
Indicates the action which must be performed.
Symbols on the instrument
HIOKI SM7110A961-06
Indicates cautions and hazards. When the symbol is printed on the instrument, refer to a
corresponding topic in the Instruction Manual.
Safety Information
Indicates that dangerous voltage may be present at this terminal.
Indicates the ON side of the power switch.
Indicates the OFF side of the power switch.
Indicates a grounding terminal.
Indicates DC (Direct Current).
Indicates AC (Alternating Current).
Symbols for various standards
Indicates the Waste Electrical and Electronic Equipment Directive (WEEE Directive) in EU
member states.
Indicates that the product conforms to regulations set out by the EU Directive.
1
2
3
4
5
6
7
8
9
10
Appx. Ind.
7
Safety Information
HIOKI SM7110A961-06
Measurement categories
To ensure safe operation of measuring instruments, IEC61010 establishes safety standards
for various electrical environments, categorized as CAT II to CAT IV, and called measurement
categories.
DANGER
• Using a measuring instrument in an environment designated with a higher-
numbered category than that for which the instrument is rated could result in a
severe accident, and must be carefully avoided.
• Never use a measuring instrument that lacks category labeling in a CAT II to
CAT IV measurement environment. Doing so could result in a serious accident.
CAT II: When directly measuring the electrical outlet receptacles of the primary electrical
circuits in equipment connected to an AC electrical outlet by a power cord (portable
tools, household appliances, etc.)
CAT III: When measuring the primary electrical circuits of heavy equipment (xed installations)
connected directly to the distribution panel, and feeders from the distribution panel to
outlets
CAT IV: When measuring the circuit from the service drop to the service entrance, and to the
power meter and primary overcurrent protection device (distribution panel)
Distribution Panel
Service Entrance
Service Drop
CAT IV
Power Meter
Internal Wiring
CAT III
Fixed Installation
CAT II
T
Outlet
8
Operating Precautions
HIOKI SM7110A961-06
Operating Precautions
Follow these precautions to ensure safe operation and to obtain the full benets of the various
functions.
DANGER
If the measurement lead or the instrument is damaged, there is a risk of electric
shock. Before using the instrument, perform the following inspection:
• Before using the instrument check that the coating of the measurement leads
are neither ripped nor torn and that no metal parts are exposed. Using the
instrument under such conditions could result in electric shock. Replace the
measurement leads with those specied by our company.
• Verify that the instrument operates normally to ensure that no damage occurred
during storage or shipping. If you nd any damage, contact your authorized
Hioki distributor or reseller.
To prevent an electric shock, conrm that the braided conductor for shielding
wire is not exposed. If a braided conductor for shielding wire is exposed, do not
use the cable.
1
2
3
4
Instrument installation
Installing the instrument in inappropriate locations may cause a malfunction of
instrument or may give rise to an accident. Avoid the following locations:
• Exposed to direct sunlight or high temperature
• Exposed to corrosive or combustible gases
• Exposed to a strong electromagnetic eld or electrostatic charge
• Near induction heating systems (such as high-frequency induction heating
systems and IH cooking equipment)
• Susceptible to vibration
• Exposed to water, oil, chemicals, or solvents
• Exposed to high humidity or condensation
• Exposed to high quantities of dust particles
Do not place the instrument on an unstable table or an inclined place. Dropping or
knocking down the instrument can cause injury or damage to the instrument.
This instrument is not drip-proof. Water droplets on the connector may result in
malfunctions.
5
WARNING
6
7
8
CAUTION
9
10
Appx. Ind.
9
Operating Precautions
HIOKI SM7110A961-06
Installing the instrument
To prevent overheating, be sure to leave the specied clearances around the instrument.
• Install with the bottom surface facing downward.
• Vents must not be obstructed.
50 mm or more50 mm or more
15 mm or more
“Extending and retracting the stands” (p. 20)
10 mm or more
Rear
Handling the instrument
To avoid electric shock, do not remove the instrument’s case. The internal
components of the instrument carry high voltages and may become very hot
during operation.
To avoid damage to the instrument, protect it from physical shock when transporting
and handling. Be especially careful to avoid physical shock from dropping.
This instrument may cause interference if used in residential areas. Such use must be avoided
unless the user takes special measures to reduce electromagnetic emissions to prevent
interference to the reception of radio and television broadcasts.
DANGER
CAUTION
10
Before connecting the power cord to the instrument
HIOKI SM7110A961-06
DANGER
Use only the designated power cord with this instrument. Use of other power
cords may cause re.
WARNING
• Before turning the instrument on, make sure the supply voltage matches that
indicated on its power connector. Connection to an improper supply voltage
may damage the instrument and present an electrical hazard.
• To avoid electrical accidents and to maintain the safety specications of this
instrument, connect the power cord provided only to a 3-contact (two-conductor
+ ground) outlet.
CAUTION
• Do not connect the supply voltage improperly. Doing so may damage the instrument’s
internal circuitry.
• To avoid damaging the cords, unplug it by grasping the connector, not the cord.
Operating Precautions
1
2
3
4
Before connecting the measurement leads and electrode to the instrument
WARNING
• Do not use the instrument with circuits that exceed its ratings or specications.
Doing so may damage the instrument or cause it to become hot, resulting in
electric shock.
• The maximum rated voltage to earth of the input terminal is 1000 V DC for Model
SM7110 and 2000 V DC for Model SM7120. Do not apply any higher voltage
input to the input terminal.
• Use only the specied measurement lead. If using a measurement lead other
than the one specied, you cannot perform measurement safely.
• To avoid electric shock, do not exceed the lower of the ratings shown on the
instrument and test leads.
Before connecting the Humidity Sensor to the instrument
CAUTION
• The sensor used in the Humidity Sensor is a thin, precision platinum lm. Be aware
that excessive voltage pulses or static discharges can destroy the lm.
• Avoid subjecting the tip of the Humidity Sensor to physical shock, and avoid sharp
bends in the leads. These may damage the probe or break a wire.
• Note that the ambient temperature does not exceed the temperature range specied
in “Specications of Model Z2011 Humidity Sensor” (p. 160).
5
6
7
8
9
10
Appx. Ind.
11
Operating Precautions
HIOKI SM7110A961-06
Before connecting the measurement leads or electrode to an object to be
measured
WARNING
Between either of the following terminals, a maximum voltage of 1000 V may be
generated depending on the measurement voltage settings.
• Between the OUTPUT terminal and the INPUT terminal
• Between the OUTPUT terminal and the GUARD terminal
To avoid danger, be sure to turn o the instrument before connecting the
measured object to the measurement terminal.
If the GUARD terminal and the GROUND terminal are connected with each other,
be aware that high voltage is also generated between the OUTPUT terminal and
the ground.
Before grounding the instrument
WARNING
• During measurements of an object grounded by one wire, if the OUTPUT
terminal and the GROUND terminal are connected with each other, a maximum
voltage of 2000 V to the earth is applied on the GUARD terminal, INPUT
terminal, and an external electrode (the shielding side of measurement lead),
according to the measurement voltage settings. Take precautions to avoid an
electric shock.
• If the GUARD terminal and the GROUND terminal are connected with each other,
a maximum voltage of 2000 V is applied between the OUTPUT terminal and the
ground (the GROUND terminal is grounded), according to the measurement
voltage settings. Take precautions to avoid an electric shock.
Before performing a measurement
• While measuring insulation resistance, and when pressing the START key,
dangerous voltage is applied to the measurement terminals. To avoid electric
shock, do not touch the measurement leads.
• Even after the STOP key is pressed, the measurement voltage may remain in
the measured object. Because there is a risk of an electric shock, take care
to not touch metallic parts to which the voltage is applied until they are fully
discharged.
• The set voltage is applied to the measured object. Take precautions to avoid an
electric shock.
WARNING
12
Before performing an automatic measurement
HIOKI SM7110A961-06
CAUTION
To protect the relay contacts, switching the measurement terminals with relays
leaving a measurement voltage output requires a protective resistor* inserted in
series in the circuit.
Protective resistance value ≥ (Measurement voltage) / (Maximum allowable
current)
* Implements resistance to prevent the current owing through the contact from
exceeding the maximum allowable current of the contact
Before using the shielding box
Operating Precautions
1
2
A maximum measurement voltage of 2000 V may be generated between the
GUARD terminal or the OUTPUT terminal and the GROUND terminal according to
a connecting manner of the shorting plug.
Be sure to connect the external case of the shielding box to the GROUND
terminal.
To prevent an electric shock, use the interlock function (p. 62).
In addition, take sucient precautions to avoid an electric shock.
Before removing the measured object
If a high-voltage is used to measure resistance, because measurement voltage
may remain in the measured object even after the measurement has ended, there
is the risk of an electric shock if you try to immediately remove the object. Set the
time in Discharge 2 relatively longer and remove the measured object after the
dangerous voltage has been discharged.
WARNING
WARNING
3
4
5
6
7
Before controlling the instrument externally
Read the following precautions before also using the interlock function.
WARNING
To avoid electric shock or damage to the equipment, always observe the following
precautions when connecting to connectors:
• Be careful to avoid exceeding the ratings of connectors.
• During operation, a wire becoming dislocated and contacting another
conductive object can be serious hazard. Use screws to secure the RS-232C
connector, GP-IB connector, and EXT I/O terminal.
• Ensure that devices and systems to be connected to the RS-232C connector,
GP-IB connector, EXT I/O terminal, or INTER LOCK terminal are properly
isolated.
8
9
10
Appx. Ind.
13
Operating Precautions
HIOKI SM7110A961-06
CAUTION
You must not operate the EXT I/O MODE switch (NPN/PNP) during the instrument
turned on.
Select the external I/O mode between NPN and PNP based on devices that are
externally connected (p. 124).
Before connecting the communication cable to the instrument
DANGER
To avoid electrical hazards and damage to the instrument, do not apply voltage
exceeding the rated maximum to the EXT I/O terminal.
CAUTION
• Use a common ground for both the instrument and the computer. Use of dierent
ground circuits will result in a potential dierence between the instrument’s ground
and the computer’s ground. If the communications cable is connected while such a
potential dierence exists, it may result in equipment malfunction or failure.
• Before connecting any communications cable to the instrument or disconnecting any
communications cable from the instrument, always turn o the instrument and the
computer. Failure to do so could result in equipment malfunction or damage.
• After connecting the communications cable, tighten the screws on the connector
securely. Failure to secure the connector could result in equipment malfunction or
damage.
Before performing the open correction
If an open correction is carried out, a measurement voltage is instantly output
from the measurement terminal.
Before carrying out an open correction (pressing the F2 key [EXEC]), check that
no human body is in contact with any jigs or measurement circuits. There is the
risk of an electric shock because a maximum voltage of 2000 V is produced.
WARNING
Before using the instrument as an ammeter
See “Appx. 5 Using Instrument as Ammeter (If Operated in Combination With External Power
Supply)” (p. Appx.7).
14
CAUTION
• To avoid malfunctions of the instrument, insert an adequate protective resistor
between the external power supply and the object to be measured. A short-circuit of
the terminals of the object causes the instrument to be subject to a voltage output
from the external power supply.
• To avoid malfunctions of the instrument, limit the input current at up to 1.8 mA during
the testing using a measurement voltage of between 1000 V and 2000 V.
Operating Precautions
HIOKI SM7110A961-06
Precautions during shipment
Store the packaging in which the instrument was delivered, as you will need it when transporting
the instrument.
CD precautions
• Exercise care to keep the recorded side of discs free of dirt and scratches. When writing text
on a disc’s label, use a pen or marker with a soft tip.
• Keep discs inside a protective case and do not expose to direct sunlight, high temperature, or
high humidity.
• Hioki is not liable for any issues your computer system experiences in the course of using this
disc.
1
2
3
4
5
6
7
8
9
10
Appx. Ind.
15
Operating Precautions
HIOKI SM7110A961-06
16
Product Overview and Features
HIOKI SM7110A961-06
1
Overview
1.1 Product Overview and Features
This instrument is an insulation resistance meter containing a highly sensitive ammeter and a lownoise voltage supply.
Employing the triaxial BNC connector enables the instrument to measure high resistance such as
resistance of insulators with no inuence of exogenous noise.
The maximum measurement voltages of Model SM7120 and Model SM7110 are 2000 V and 1000 V,
respectively.
Stable measurements for a variety of items
• The triaxial BNC connector is used to have external noise resistant structures.
• The maximum measurement voltage is 2000 V, so various objects can be simply measured with
a single instrument.
• The instrument has a wide measuring range. (Depends on applied voltage)
• Resistance measuring range: (p. 158); Current measuring range: 0.1 fA to 2 mA
• Because temperature and humidity can be measured simultaneously, change in resistance can
be checked against the change in temperature and humidity.
• The contact check function enables you to perform stable measurements even when a voltage
applied to measured objects is 2000 V or higher.
1
Overview
Suitable for production lines
• High-speed measurement; it takes only 6.4 ms from input of a trigger to output of the INDEX
signal.
• The frequency change function of contact check reduces interference with other devices in the
production line.
• It is not necessary to correct cable length even when changing production line construction
because the instrument automatically corrects the cable length of contact check.
• Because you can check the control status with the command monitor function and the external
I/O monitor function, you can quickly construct a production line.
• Because the external I/O is compatible with both NPN and PNP types, you can immediately use it
on your production line.
What can be measured
• Insulation resistance between capacitor terminals
• Insulation resistance between a battery terminal and a case
• Insulation resistance between coils of common mode lters
• Checking breakdown voltage
• Surface resistivity and volume resistivity of lm, etc.
• Insulation resistance of liquid sample
17
Names and Functions of Parts
HIOKI SM7110A961-06
1.2 Names and Functions of Parts
Front
The model illustrated below is
Model SM7120.
HIGH VOLTAGE LED
Lights up while a high voltage
is output.
Measurement terminals
Connect measurement leads to these terminals.
See p. 11.
11
Screen
Monochrome graphic LCD
Operation keys (p. 21)
Measurement
terminal
INPUT
11
GUARD
22
GROUND
33
OUTPUT
44
22 4433 55
Description
This is a measurement input terminal.
Has triaxial structure. The central conductor is for measurement input. The secondoutermost electrode is connected with the GUARD terminal. The second-outermost
electrode is connected with the GROUND terminal.
Electromagnetic shielding wire
Guard wire for
measurement
Measurement input wire
This is a guard terminal.
It is the common side of the ammeter.
Used in order to take the guard that cancels the eect of the a leakage current owing
through the retainer, measurement xture, etc. of the measured object.
The GUARD terminal has a negative (−) electrical polarity.
This is a ground terminal.
Used to reduce the eects of noise and minimize the risk of an electric shock.
Usually connected to the OUTPUT terminal or the GUARD terminal with the shorting
plug.
This is a voltage output terminal.
Insulation resistance is measured between this OUTPUT terminal and the INPUT
terminal.
The electrical polarity of the OUTPUT terminal is positive (+).
Additionally installing the shield
wires in the measurement
line enables the instrument to
perform stable measurement
with no inuence of exogenous
noise.
18
Names and Functions of Parts
HIOKI SM7110A961-06
Rear
Measurement
terminal
CHARGE
55
Description
This is a charge voltage output terminal.
Used to pre-charge objects before measurement.
The pre-charge voltage is output between the CHARGE terminal and the GROUND
terminal. The voltage is same as the measurement voltage. The CHARGE terminal has
the same electric potential as the OUTPUT terminal, and its electrical polarity is positive
(+).
11 22 33 44 55 66
77 88 99 1010 1111 1212
1
Overview
Name Description
Power switch See p. 37.
11
Power inlet
22
Vents Keep the vents clear of obstructions.
33
Serial number
44
D/A OUTPUT terminal Outputs a voltage proportional to the measured value. (p. 36)
55
INTER LOCK terminal
66
EXT I/O terminal
77
EXT I/O MODE
88
switch
Connect the accessory power cord to this inlet. (p. 29)
See p. 11.
Indicates the serial number.
The serial number consists of 9 digits. The rst two (from the left)
indicate the year of manufacture, and the next two indicate the month of
manufacture.
Do not remove this label because it is required for product support.
Used when the interlock function is enabled to prevent an electric shock.
(p. 62)
See p. 13.
Connects an external controller to this connector. (p. 123)
See p. 13.
Left: Current sink (NPN), Right: Current source (PNP) (p. 124)
USB connector
99
GP-IB connector
1010
RS-232C connector
1111
TEMP. SENSOR terminal Connects Model Z2011 Humidity Sensor to this terminal. (p. 32)
1212
Connects a computer to one of these connectors. (p. 145)
19
Names and Functions of Parts
HIOKI SM7110A961-06
Bottom
Stands
Right
Extending and retracting the stands
Vent Handle
Do not apply heavy downward pressure with the stand extended. The stand could be
damaged.
Left
CAUTION
Vents
20
Operation keys
HIOKI SM7110A961-06
Names and Functions of Parts
1010 1111
11
1515
11
22
33
These keys also serve as the
numeric keypad to enter the
numerical values.
1616
Key Description
Switches the measurement mode.
The mode changes every time the key is pressed in the following order:
Resistance, Current, Surface resistance, Volume resistance, Liquid
volume resistance, and returns back to Resistance.
Switches the present current range to the next upper one. You can change
settings on the measurement screen. The range changes every time the key is
pressed in the following order:
20 p, 200 p, 2 n, 20 n, 200 n, 2 u, 20 u, 200 u, and 2 m.
Some ranges are not available depending on the measurement speed setting.
Switches the present current range to the next lower one. You can change settings
on the measurement screen.
The range changes every time the key is pressed in the reverse order of the
above.
22
33
44
55
66
1212
1
Overview
77
88
1313 1414
99
1010
1111
1212
Switches the present measurement voltage to the next upper one.
44
55
66
77
88
The voltage changes every time the key is pressed in the following order:
0.1, 0.5, 1, 2.5, 5, 10, 25, 50, 100, 250, 500, 1000, (1500, and 2000).
Switches the present measurement voltage to the next lower one. The voltage
changes every time the key is pressed in the reverse order of the above.
Displays the comparator settings screen.
Displays the panel load / panel save screen.
Switches the measurement speed. You can change settings on the measurement
screen.
The speed changes every time the key is pressed in the following order:
FAST, FAST2, MED, SLOW, SLOW2, and returns back to FAST.
Some measurement speeds are not available depending on the current
range setting.
99
Disables the remote control (communicating with an external device) and enables
the key operation.
Starts measurement.
Stops measurement.
• Moves the cursor to another setting item or digit.
• Changes numerical values.
1313
• Cancels the setting.
• Returns to the measurement screen from other screens.
21
Names and Functions of Parts
HIOKI SM7110A961-06
Key Description
1414
1515
1616
to
Settles the setting.
Inputs the trigger if the external trigger setting is used.
Moves the screen to another menu settings screen.
Function keys. Selects item on each settings screen.
22
Screen Conguration and Operation
HIOKI SM7110A961-06
1.3 Screen Conguration and Operation
The screens of the instrument consists of the measurement screens and the settings screens.
Measurement screens
Resistance value measurement mode (initial screen)
1
Overview
Current value measurement mode
Surface resistivity measurement mode
Liquid volume resistivity measurement mode
Settings screens
Comparator settings screen
You can also display the screen if you select the [COMP] tab on the menu settings screen.
Panel load / panel save screen Menu settings screen
Volume resistivity measurement mode
See “List of menu settings screens” (p. 27).
23
Displayed Contents of Measurement Screen
HIOKI SM7110A961-06
1.4 Displayed Contents of Measurement Screen
11 22 33 44 55 77
88
99
1010
1111
Performs contact check.
(Available only with contact
check setting set to [ON])
Displays menu settings screen (p. 27)
Name Description
Displays the presently set trigger.
Trigger setting
11
[INT] Internal trigger
[EXT] External trigger
66
1212
1313
1414
Enables change of the
measurement conditions
Changes measurement condition
contents to be displayed.
Sampling data Appears during the sampling data.
22
Self-calibration Appears during the self-calibration.
33
Voltage monitor check
44
Contact check
55
Open correction
66
execution result
Interlock
Key lock
77
Remote [RMT]
Measurement judgment Displays the judgment result if the comparator function is enabled.
88
Voltage monitor value The voltage produced by the instrument is displayed.
99
Temperature
1010
Humidity
1111
Measured value
1212
Appears when the voltage monitor check function is enabled.
Highlighted in reverse video if the voltage is abnormal.
Appears when the contact check function is enabled.
Highlighted in reverse video if a contact error occurs.
Displays the result when the open correction is executed once.
[I.LOCK] Appears while the interlock function is activated.
[K.LOCK] Appears while the key lock function is activated.
Displays [I.LOCK] while both the interlock and the key lock functions are
activated.
Appears while the instrument is placed in the remote status
(communicating with an external device).
Pressing the LOCAL key disables the remote control.
Displays temperature and humidity if the Humidity Sensor is connected.
Displays an error message if the Humidity Sensor is not connected to the
instrument (p. 179).
See “2.4 Connecting Humidity Sensor” (p. 32).
Displays the measured value corresponding to the measured value display
mode (p. 39).
24
Measurement
HIOKI SM7110A961-06
1313
conditions
Displayed Contents of Measurement Screen
Name Description
[MES. V]
[SPEED]
[RANGE]
[DELAY]
[AVG]
Applied voltage for
measurement (p. 41)
Measurement speed
(p. 43)
Current range (p. 44)
Delay function (p. 49)
Average function (p. 50)
Pressing the F3 key [MONI]
changes the contents to be
displayed.
1
Overview
Measurement
conditions
1414
(Sequence program)
See “4.3 Automatic Inspection (Sequence
Program Function)” (p. 52).
25
Basic Key Operation
HIOKI SM7110A961-06
1.5 Basic Key Operation
Displaying measurement screen
You can also press the ESC key to return to the measurement screen.
Displaying the various menu settings screens
This section shows an example of switching the measurement screen to the [SYS] screen.
1
2
Select
(left or right)
In this manual, the procedure to display the settings screen is described as follows:
Procedure to display the settings screen: (Measurement screen) MENU key >
(That is to say, to display the settings screen, on the measurement screen, press the MENU key,
and then press the keys
26
[SYS] tab
and to select the [SYS] tab.)
List of menu settings screens
HIOKI SM7110A961-06
Basic Key Operation
1
Overview
[MEAS] screen
Conguring settings for measurement
[COMP] screen
Conguring settings for measured value judgment
[SYS] screen
Conguring system settings
[C.CHK] screen
Conguring settings for open correction and contact check
[ELEC] screen
Conguring settings for calculating resistivity
[I/O] screen
Conguring settings for external control
[IF] screen
Conguring settings for interface
Selecting settings items
Move
[INFO] screen
Displays the information of this instrument.
Select
27
Basic Key Operation
HIOKI SM7110A961-06
Methods for changing numerical values
The two options are available: using the cursor keys and using the numeric keypad.
1
Move
(If using the cursor keys)
2
Move to the next
digit (left or right)
Change the numerical
value (up or down)
(If using the numeric keypad)
Move to the next
digit (left or right)
Settle
Cancel
Settle
Cancel
28
If you press the ESC key while changing the numerical value, the numerical value change will be canceled.
If you press the ENTER key, the changed content is settled.
Connecting Power Cord to instrument
HIOKI SM7110A961-06
2
Preparing for Measurement
2.1 Connecting Power Cord to instrument
Be sure to read “Before connecting the power cord to the instrument” (p. 11) beforehand.
Check that the power switch is
1
in the o position ( ).
Check that the power voltage
2
is in the range indicated on the
rear, and then connect the power
cord to the power inlet.
Connect the plug of the power
3
cord into an outlet.
1
2
Power inlet
2
Preparing for Measurement
29
Connecting Measurement Leads to Instrument
HIOKI SM7110A961-06
2.2 Connecting Measurement Leads to Instrument
Be sure to read “Before connecting the measurement leads and electrode to the instrument”
(p. 11) beforehand.
The measurement leads are optional. (p. 3)
Required leads: Measurement lead (red) and measurement lead (black) ×1 each
INPUT terminal
Red
* Connect the black lead to the GROUND
terminal if both the GROUND and OUTPUT
terminals are grounded.
OUTPUT terminal*
How to connect measurement lead (red) to the instrument
Attach the connector to
1
the INPUT terminal.
INPUT terminal
Tighten the screw by
2
turning it clockwise.
Black
2.3 Connecting Electrode
Be sure to read “Before connecting the measurement leads and electrode to the instrument”
(p. 11) beforehand.
Electrodes are optional. (p. 4)
To connect a electrode to the instrument, refer to the Instruction Manual that comes with each of
the electrode.
30
Model SME-8310 Plate Sample Electrode
HIOKI SM7110A961-06
DSM8104F Interlock Cable
SME-8310 Plate Sample Electrode
Z5010 Conversion Adapter
Model SME-8350 Shielding Box
Connecting Electrode
2
Preparing for Measurement
SM7110, SM7120 Super Megohm Meter
DSM8104F Interlock Cable
SME-8350 Shielding Box
Enlarged view
Model SME-8360 Electrode for Chip Capacitor
SME-8360 Electrode for Chip Capacitor
Z5010 Conversion Adapter
Z5010 Conversion Adapter
SM7110, SM7120 Super Megohm Meter
SM7110, SM7120 Super Megohm Meter
31
Connecting Humidity Sensor
HIOKI SM7110A961-06
2.4 Connecting Humidity Sensor
Be sure to read “Before connecting the Humidity Sensor to the instrument” (p. 11) beforehand.
The Humidity Sensor is optional. (p. 4)
Required sensor: Model Z2011 Humidity Sensor
Install the Humidity Sensor close to the object to be measured. This enables the environment,
temperature and humidity, around the object also to be measured simultaneously.
TEMP. SENSOR
terminal
2.5 Grounding Instrument
Be sure to read “Before grounding the instrument” (p. 12) beforehand.
Choose between connecting the OUTPUT terminal with the GROUND terminal (ground) and
connecting the GUARD terminal with the GUARD terminal using the shorting plug.
(1) If measuring insulation resistance or ground insulation resistance of the measured object * with
one line grounded (Grounding the OUTPUT terminal)
Grounding the OUTPUT terminal allows the negative setting voltage to be applied to the GROUND
terminal.
To measure an object whose one line is grounded, connect the shorting plug as shown in the gure below.
Connect the grounded line of the object with the GROUND terminal (OUTPUT), and the nongrounded line with the INPUT terminal.
If you connect the grounded line of the object with the INPUT terminal, and the non-grounded line
with the GROUND terminal, a current will leak to the ground, causing an error of the measured
value.
SM7110/SM7120
INPUT
GUARD
GROUND
OUTPUT
Ammeter
A
Measurement
−
voltage
+
source
Current limiter
32
CHARGE
Shorting plug
IMPORTANT
Be sure to connect the GROUND terminal to the OUTPUT terminal.
Even when the GROUND terminal is not connected to the OUTPUT terminal, the positive (+)
voltage can be applied on the ground side terminal of the measured object if the GROUND
terminal is connected to the ground terminal of the object. In that case however, noise can be
easily superimposed on the input circuit, resulting in unstable measurement.
Grounding Instrument
HIOKI SM7110A961-06
* Arrester, transformer, power transmission line, distribution line, etc.
(1) If setting a guard using a retainer, measurement xture, etc. (Grounding the GUARD terminal)
Connect the GROUND terminal to the GUARD terminal.
Grounding the GUARD terminal allows the positive setting voltage output from the OUTPUT
terminal to be applied.
Measurement can be done more safely because the potential of the guard circuit equals to the
ground potential. (See the gure below.)
SM7110/SM7120
INPUT
GUARD
GROUND
OUTPUT
CHARGE
Shorting plug
Ammeter
A
Measurement
−
voltage
+
source
Current limiter
(2) If measured objects are not grounded
Connect the GROUND terminal to the OUTPUT terminal or the GUARD terminal. Either of them
can be connected to.
2
Preparing for Measurement
33
If Measured Object Is to Be Charged Before Measurement (Pre-charge)
HIOKI SM7110A961-06
2.6
If Measured Object Is to Be Charged Before
Measurement (Pre-charge)
When objects such as capacitors with high electrostatic capacity are measured automatically, the
measurement time can be shortened if the measured object is charged prior to measurement (precharge).
Set the pre-charge to [ON] (charges objects). (p. 64)
See “Measurement without use of a measurement xture” (p. 91).
Connect Model L2233 Clip Type Lead (Black), etc. to the CHARGE terminal. (See the gure below.)
• In addition to the measurement cables, you will need two black cables for the charge. (Connect to
the CHARGE and GROUND terminals)
• A charge is carried out during measurement of the connected object (while the measurement
voltage is applied).
CHARGE terminal
Shorting plug
SM7110/SM7120
Ammeter
A
Measurement
−
voltage
+
source
Current limiter
Negative
side
Measured
object
Positive
Rc
Rx
Negative side Positive side
Rc is the measured object after measurement of Rx.
Example of connection (grounding an measured object)
side
Measured
object to be
charged
INPUT
GUARD
GROUND
OUTPUT
CHARGE
When not using the CHARGE terminal, you can charge up the object Rx, which is connected
between the OUTPUT side and the INPUT terminal, by applying a measurement voltage for a
sucient period of time before starting a measurement.
34
For Safe Measurement
HIOKI SM7110A961-06
2.7 For Safe Measurement
The INTER LOCK terminal is internally connected to Pin 24 of the EXT I/O terminal.
Read “Before controlling the instrument externally” (p. 13) beforehand.
Operating the instrument incorrectly will cause an electric shock because measurement voltage is
output when measurement starts.
Use the interlock function to perform measurement safely.
For example, if the signal for the open lid of the shielding box is connected to the INTER LOCK
terminal on the back of the instrument, the interlock function is activated when the lid is open.
If the pins of the INTER LOCK terminals are open-circuited with the interlock function set to [ON],
the interlock function is activated with the result that the output of measurement voltage and the
measurement function are disabled.
See “4.7 Setting Interlock Function” (p. 62).
How to connect cable for interlock
2
Preparing for Measurement
INTER LOCK terminal
Check the orientation
1
of the slots in the BNC
connector and ensure
that it ts into the
bayonet lugs of the
instrument side.
Bayonet lugs of
INTER LOCK terminal
Align the slots in the
2
BNC connector along
the bayonet lugs of the
instrument, and insert
the BNC connector
into the instrument
connector.
Turn the BNC connector
3
clockwise to lock it.
BNC connector slots
35
Outputting Measurement Current Value Converted to Analog Signal
HIOKI SM7110A961-06
2.8 Outputting Measurement Current Value Converted to Analog Signal
Use the D/A output function to log the output together with the output of other measuring
instruments such as recorders.
A voltage of 2.0 V is output if the measured current value reaches the maximum display value of
the present current range’s scale.
If the measured value is out of the present current range, a voltage of 2.5 V is output.
(Example: With the current range setting set to 20 pA, a voltage of 2.0 V is output when the value
“19.9999 pA” is displayed)
No instrument settings are required.
How to connect the output cable to the instrument
D/A OUTPUT terminal
Check the orientation
1
of the slots in the BNC
connector and ensure
that it ts into the
bayonet lugs of the
instrument side.
Bayonet lugs of
D/A OUTPUT terminal
BNC connector slots
5 V
Align the slots in the
2
BNC connector along
the bayonet lugs of the
instrument, and attach
the BNC connector to the
instrument connector.
1 k
Ω
Turn the BNC connector
3
clockwise to lock it.
Output terminal (+)
36
GND terminal (GND)
Turning On/O Instrument
HIOKI SM7110A961-06
• The GND terminal of D/A output is connected to the ground (case metal part).
• The output impedance is 1 kΩ. Use connected instruments with input impedance of 10 MΩ or
more. (The output voltage is divided by the output resistance and the input impedance. For 1 MΩ,
it is lower by 0.1%.)
• External noises may be superimposed on an analog signals if cables are connected to the
instrument. If necessary, use a band-limiting lter, etc. in the connected instrument.
• The output voltage is updated with each current measurement sampling cycle.
• The recorded wave form will be in a staircase pattern (because the output circuit response is very
fast with respect to the update period).
• Output voltage is reduced to 1/10 (or increases by 10 times) even at the same resistance value
according to the change of range in auto-range. It is recommended to use the manual range.
• An output is set to 0 V when settings are changed (the range is changed, etc.) or when the
instrument is turned o. Moreover, an irregular voltage with an amplitude that is within the
maximum output voltage is output at the moment when the power switch on the rear is ipped to
the on position.
• Set the measurement speed to [FAST] and the self-calibration to [OFF] (execute manually) to
ensure that the D/A output response time is at its fastest.
See “3.3 Setting Measurement Speed” (p. 43) and “4.6 Maintaining Measurement Accuracy
(Self-Calibration Function)” (p. 60).
2
Preparing for Measurement
2.9 Turning On/O Instrument
Turn the instrument on or o using the power switch on the rear.
For more accurate measurement, warm up the instrument for 30 minutes or more after turning on
the instrument.
Power OFF ( )Power ON (I)
The self-test is executed automatically after startup (ROM/RAM check).
If an error is displayed on the LCD screen, the instrument is necessary to be repaired. Please
contact your authorized Hioki distributor or reseller.
See “Error display and solution” (p. 178).
37
Inspection Before Use
HIOKI SM7110A961-06
2.10 Inspection Before Use
Before using the instrument, verify that it operates normally to ensure that no damage occurred
during storage or shipping. If you nd any damage, contact your authorized Hioki distributor or
reseller.
Verifying the instrument and the peripheral devices
Inspection items Solution
Is the power cord insulation torn, or is any
metal exposed?
Do not use the instrument if damage is found, as an electric
shock or short-circuit accidents could result.
Contact your authorized Hioki distributor or reseller.
Is the insulation of the connected lead or
the connection cords torn, or is any metal
exposed?
Is the instrument damaged?
Verifying the instrument on start-up
Inspection items Solution
Does the fan rotate when the instrument is
turned on? Are “Model name” and “Version
number” displayed on the screen?
Is the measurement screen displayed after
the self-test?
If any damage is found, it may cause an electrical shock. If
this happens, replace the measurement probe or connection
cords with ones specied by Hioki.
If the fan does not rotate, or if “Model name” and “Version
number” are not displayed, the instrument may be
malfunctioning. Request repairs.
Model name
Version number
If the screen does not display anything, the instrument may
be malfunctioning internally. Request repairs.
38
Setting Measured Value Display Mode
HIOKI SM7110A961-06
3
Basic Measurement
3.1 Setting Measured Value Display Mode
Press the MODE key to switch the measured value display modes.
However, the display mode cannot be switched while performing sweep measurement.
Resistance value measurement mode (initial screen) Current value measurement mode
3
Basic Measurement
Surface resistivity measurement mode
Liquid volume resistivity measurement mode
Measurement conditions must be set to measure surface resistivity and volume resistivity.
See “4.14 Setting Resistivity Calculation (Resistivity Measurement Function)” (p. 74).
Volume resistivity measurement mode
39
Setting Measured Value Display Mode
HIOKI SM7110A961-06
Changing display notation
Procedure to display the settings screen: (Measurement screen) MENU key > [MEAS] tab
[EXP] Exponential notation: Displays values, expressed in exponential notation, to ve decimal
places. (Example: 1.00000E+16
[UNIT] Decimal notation: Displays values, expressed in decimal notation, that have six
signicant gures. (Example: 10.0000 P
) (default setting)
Ω
)
Ω
Changing displayed digits
Procedure to display the settings screen: (Measurement screen) MENU key > [MEAS] tab
Press the [F1], [F2], [F3], or [F4] key to change the number of the displayed digits.
3 digits to 6 digits (Default setting: 6 digits)
40
Setting Applied Measurement Voltage
HIOKI SM7110A961-06
3.2 Setting Applied Measurement Voltage
If using the internal power supply
Press the VOLT▲ key or the VOLT▼ key on the measurement screen to change the applied
measurement voltage.
Pressing the F4 key [MODIFY] enables also the function keys to be used to select the voltage.
IMPORTANT
If the measurement voltage setting or the charge setting is changed after the current limiter has
been set and if the current limiter exceeds the upper limit, the current limiter is set to the largest
value among the settable values.
See “4.9 Limiting Current Flowing Through Measured Object (Current Limiter)” (p. 65).
The numerical value can also be changed with the numeric keypad.
See “Methods for changing numerical values” (p. 28).
Select the voltage.
1
0.1, 0.5, 1, 2.5, 5, 10, 25, 50, 100, 250, 500, 1000, 1500*, 2000* (Default setting: 0.1)
* Can be set only for Model SM7120
3
Basic Measurement
Pressing the F4 key [EDIT] enables the numerical value to be changed in increments of 0.1 V.
Move to the next
digit (left or right)
Change the
numerical value
(up or down)
Settle
Cancel
41
Setting Applied Measurement Voltage
HIOKI SM7110A961-06
Select a status in which the instrument is placed on completion of the measurement
2
between the electric discharge and the high-impedance.
[DISC (D)] Sets to the electric discharge status (default setting).
[HI-Z (Z)] Sets to the high-impedance status.
When the sweep function is enabled:
The instrument will be in the electric discharge state when sweep measurement ends,
regardless of this setting.
If using the external power supply
Set the voltage value for resistance calculation to [EXT.V].
See “4.4 Setting Voltage Value for Resistance Calculation” (p. 56).
42
Setting Measurement Speed
HIOKI SM7110A961-06
3.3 Setting Measurement Speed
The slower measurements are, the more the accuracy improves.
Pressing the SPEED key on the measurement screen changes the measurement speed.
See “Current measurement accuracy” (p. 157).
Some measurement speeds are not available depending on the current range setting. If the
measurement speed cannot be changed, check the current range.
See “Available setting depending on current ranges and measurement speed” (p. 43).
Press the SPEED key on the measurement screen.
Pressing the F4 key [MODIFY] enables also the function keys to be used to select the
measurement speed.
3
FAST, FAST2, MED, SLOW, SLOW2 (Default setting: SLOW2)
The measurement speed changes every time the F3 key [↓] is pressed in the following order:
FAST, FAST2, MED, SLOW, and SLOW2.
The measurement speed changes every time the F4 key [↑] is pressed in the following order:
SLOW2, SLOW, MED, FAST2, and FAST.
Available setting depending on current ranges and measurement speed
: Setting available, –: Setting not available
Basic Measurement
Range
Measurement
speed
20 pA – – –
200 pA – –
2 nA
20 nA
200 nA
2 µA
20 µA
200 µA
2 mA
FAST FAST2 MED SLOW SLOW2
– – –
43
Changing Current Range
HIOKI SM7110A961-06
3.4 Changing Current Range
Change the current range if the measured current value or the measured resistance value exceeds
the measurable range or if measurement with another measurement accuracy is preferred.
See “Current measurement accuracy” (p. 157).
No setting for resistance range is required (If the current range is set to [AUTO], the resistance
range will be automatically selected).
Some ranges are not available depending on the measurement speed setting. If the current range
cannot be changed, check the measurement speed.
See “Available setting depending on current ranges and measurement speed” (p. 43).
Press the RANGE▲ key or the RANGE▼ key on the measurement screen.
Pressing the F4 key [MODIFY] enables also the function keys to be used to select the current
range.
20 pA, 200 pA, 2 nA, 20 nA, 200 nA, 2 uA, 20 uA, 200 uA, 2 mA, AUTO (Default setting: AUTO)
Pressing the F1 key [AUTO] sets the range to AUTO immediately.
Pressing the F2 key [HOLD] xes the current range on the presently selected range.
Pressing the F3 key [↓] switches the current range to the next upper range.
Pressing the F4 key [↑] switches the current range to the next lower range.
44
Connecting Measurement Leads or Electrode to Object to Be Measured
HIOKI SM7110A961-06
3.5 Connecting Measurement Leads or Electrode to Object to Be Measured
Be sure to read “Before connecting the measurement leads or electrode to an object to be
measured” (p. 12) beforehand.
Connect the measurement leads or electrode (both are optional) to the object to be measured.
Measurement xtures can be available depending on the object to be measured.
Using measurement xtures is
recommended
Using a measurement xture is not
recommended
(Use measurement leads.)
For measurement examples using electrodes and a measurement xture, see “5 Measurement
Methods Suitable for Various Objects to Be Measured” (p. 89).
To connect a electrode to objects to be measured, refer to Instruction Manual that comes with each
of the electrodes.
• Objects to be measured (components, circuits, etc.) are the
same in form.
• Objects to be measured are is extremely small in size.
• Large amount of objects are to be measured.
• Objects are to be measured using numerous points.
• Objects to be measured are dierent in form from each other.
• Objects to be measured are large in size.
• Objects to be measured are heavy in weight.
• Small amount of objects are to be measured.
If measuring resistance values and electric currents
Pin type test lead Clip type test lead
3
Basic Measurement
45
Starting/Stopping Measurement
HIOKI SM7110A961-06
3.6 Starting/Stopping Measurement
Be sure to read “Before performing a measurement” (p. 12) beforehand.
Internal trigger (INT) (default
setting)
External trigger (EXT) Pressing the START key results in a measurement voltage applied.
• An measurement voltage is reduced to 0 V when the measurement is stopped. No trigger cannot be
accepted.
• A voltage between the OUTPUT terminal and the INPUT terminal is discharged (placed in a discharge
state with the current limiter connected). (The output of the CHARGE terminal is basically the same as
the OUTPUT terminal. Therefore, the CHARGE terminal is also discharged in a manner similar to the
OUTPUT terminal.)
Pressing the START key results in a measurement voltage applied, and
then starts a measurement.
Pressing the STOP key stops applying the voltage and the
measurement.
Inputting a trigger signal starts a measurement.
Pressing the STOP key stops applying the voltage.
3.7 Conrming Measurement Results
Detecting a measurement abnormality
If the measurement is not correctly performed, an error message appears on the screen, and ERR
signal is output from EXT I/O terminal.
See “Measurement errors” (p. 179).
Temperature measurement indication
If the Humidity Sensor is not connected to the instrument
(Display: [--.--°C], [--.-%rh])
The Humidity Sensor is not connected to the instrument. Thus, temperature cannot be measured.
If the temperature measurement is not necessary, connecting the Humidity Sensor to the instrument
is not required.
Out-of-range indication
The out-of-range indication for each of the parameters is displayed due to causes listed below.
Parameters
Resistance value
Current
Surface resistivity Rs
Volume resistivity Rv
Liquid volume resistivity RL
Temperature
Out-of-range
indication
The measured value exceeds the indication range
[Current Over Range]
[+Over°C] The measured value is greater than 80.0°C.
[-Over°C] The measured value is smaller than -40.0°C.
of the present current range.
* This means that the resistance is low.
Cause
46
Humidity [Over%rh] The measured value is greater than 90%RH.
3.8 Basic Measurement Examples
HIOKI SM7110A961-06
Measurement of the resistance value of a capacitor is explained as an example here.
Examples of setting contents
Measured value display mode Resistance value measurement mode (initial screen)
Measurement voltage [100 V]
Current range [AUTO]
Measurement speed [SLOW2]
Set the trigger source to the internal trigger (INT).
Press the MODE key to display the Resistance measurement screen. (p. 39)
1
Basic Measurement Examples
3
Basic Measurement
The instrument displays values that include the input resistance of 1kΩ (±10%).
Press the VOLT key or VOLT key to set the measurement voltage to [100 V].
2
(p. 41)
Press the SPEED key to set the measurement speed to [SLOW2]. (p. 43)
3
47
Basic Measurement Examples
HIOKI SM7110A961-06
Press the RANGE key or RANGE key to set the range to [AUTO]. (p. 44)
4
Connect the clip type test lead to both terminals the of capacitor.
5
Press the START key to start a measurement.
6
A measurement voltage of 100 V is applied on both ends of the capacitor and the resistance
value is measured.
Press the STOP key to stop the measurement.
7
48
Starting Measurement After Measured Value Becomes Stable (Delay Function)
HIOKI SM7110A961-06
4
Applied Measurement
4.1 Starting Measurement After Measured Value Becomes Stable (Delay Function)
For the case of external trigger (EXT), set the time from when a trigger is input to when a
measurement starts. (The delay time elapses after a trigger is input each time.) With the trigger
source setting set to the internal trigger (INT), no delay time elapses after the trigger. Set it on the
Measurement screen.
Press the F4 key [MODIFY] to enable the measurement conditions to be changed.
1
4
Applied Measurement
Pressing the ESC key cancels the changes of the measurement conditions.
Set the delay time.
2
0 ms to 9999 ms (Default setting: 0 ms)
Pressing the F4 key [EDIT] enables the numerical value to be changed in increments of
1 ms.
Move to the next
digit (left or right)
Settle
Change the
numerical value
(up or down)
Cancel
The numerical value can also be changed with the numeric keypad. See “Methods for changing
numerical values” (p. 28).
49
Reducing Variation in Measured Values (Average Function)
HIOKI SM7110A961-06
4.2 Reducing Variation in Measured Values (Average Function)
The average for the set number of measured values will be displayed as the result. This function
can reduce the variation in the measured values. Set it on the Measurement screen.
Press the F4 key [MODIFY] to enable the measurement conditions to be changed.
1
Pressing the ESC key cancels the changes of the measurement conditions.
Select whether to perform the average process or not.
2
[AUTO] If measured value uctuates signicantly, the instrument discards the internal average
value and calculates another average value. Set [AVG] to [HOLD], and then set the
average frequency.
[HOLD] Moving average (However, arithmetic averages are calculated with the trigger source
setting set to the external trigger and the sequence measurement set to o.)
[OFF] Does not perform the average process (default setting).
50
Reducing Variation in Measured Values (Average Function)
HIOKI SM7110A961-06
If [HOLD] is selected, set the average frequency.
3
2 to 255 times (default setting: 2 times)
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
Move to the next
digit (left or right)
Change the
numerical value
(up or down)
Numerical value can also be changed with the numeric keypad. See “Methods for changing
numerical values” (p. 28).
Settle
Cancel
4
Applied Measurement
51
Automatic Inspection (Sequence Program Function)
HIOKI SM7110A961-06
4.3 Automatic Inspection (Sequence Program Function)
Be sure to read “Before removing the measured object” (p. 13) beforehand.
After a test pattern including discharge, charge, measurement and discharge is set, the tests can
be executed in sequence (sequence measurement).
Thus, the time of applying the measurement voltage to the object to be measured can be controlled
accurately.
The sequence measurement can inspect objects under the equal condition by setting the following
items rst.
[DCHG1] Discharge 1 Sets the discharge time before measurements start.
[CHARG] Charge Sets the charging (voltage application) time before
measurements start.
[MEAS] Measurement Sets the measurement time. The measured value is output at
this time.
[DCHG2] Discharge 2 Sets the discharge time after measurements complete.
Set them on the Measurement screen.
Press the F4 key [MODIFY] to enable the measurement conditions to be changed.
1
If no items are displayed, press F3 key [MONI] to switch the measurement condition display.
However, sequence measurement cannot be selected while the sweep function is enabled
(sequence measurement will be disabled).
Pressing the ESC key cancels the changes of the measurement conditions.
52
Select whether to perform sequence measurement or not.
2
[ON] Ye s
[OFF] No (default setting) (Measurement will be done continuously.)
If [ON] is selected, set the save number.
HIOKI SM7110A961-06
3
0 to 9 (default setting: 0)
Press the F3 key [↓] or F4 key [↑] to select a number.
Set the discharge time before measurements start.
4
Press F3 key [ms/s] to switch the unit.
0 ms s to 999.9 s (default setting: 0.0 s)
Automatic Inspection (Sequence Program Function)
4
Applied Measurement
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
If the setting of the voltage output function for no voltage output is set to [DISC (D)], the
measurement object is discharged while no measurement is performed. The instrument will not
discharge voltage if it is disconnected from the measured object by external relays or if the setting of
the voltage output function for no voltage output is set to high impedance ([Hi-Z]).
In such case, set Discharge 1 ([DCHG1]). Also, set the setting to Discharge 1 ([DCHG1]) when
electric charge is remaining in the measured object due to repeated measurement.
53
Automatic Inspection (Sequence Program Function)
HIOKI SM7110A961-06
Set the charging (voltage application) time before a measurement starts.
5
Press F3 key [ms/s] to switch the unit.
0 ms to 999.9 s (default setting: 0.0 s)
Set the measurement time.
6
Press F3 key [ms/s] to switch the unit.
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
1 ms to 999.9 s (default setting: 0.1 s)
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
The time specied for sequencing measurement
For the sequencing measurement, the instrument measures a measuring object repeatedly during
the measurement time specied in the [MEAS] eld at a measurement speed specied in the
[SPEED] eld.
Example: [SPEED]=FAST(4.1 ms), [MEAS]=24 ms
[MEAS] setting
Practically, the measurement lasts 0.6 ms longer than the specied time.
24 ms
54
Sequencing
measureme
4.1 ms 4.1 ms 4.1 ms 4.1 ms 4.1 ms 4.1 ms
nt
Actual measurement time
t
Automatic Inspection (Sequence Program Function)
t
t
4.1 ms 4.1 ms 4.1 ms 4.1 ms 4.1 ms 4.1 ms
24 ms
HIOKI SM7110A961-06
In the following case, the actual measurement time the sequencing measurement requires
becomes longer than the measurement time specied in the [MEAS] eld.
When the specied time of the sequencing measurement is shorter than the interval calculated
from the measurement speed setting specied in the [SPEED] eld.
Example: [SPEED]=FAST(4.1 ms), [MEAS]=1 ms
[MEAS] setting
1 ms
Practically, the measurement lasts 3.1 ms longer than the specied time.
4.1 ms
Sequencing
measureme
As described above, the overall time of the sequencing measurement becomes longer, which does
not aect charging and discharging times.
Set the discharge time after measurement completes.
7
Press F3 key [ms/s] to switch the unit.
0 ms to 999.9 s (default setting: 0.0 s)
Actual measurement time
nt
t
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
4
Applied Measurement
During discharge states (and also stopped states), the circuit between the measurement input terminal
and the OUTPUT terminal is connected to another circuit consisting of the current limiter and the input
resistance (approximately 1 k
series.
) in the current measurement block that are connected to each other in
Ω
55
Setting Voltage Value for Resistance Calculation
HIOKI SM7110A961-06
4.4 Setting Voltage Value for Resistance Calculation
Although resistance values are calculated from currents and voltages measured by this instrument,
you can also set the voltage to any optional value and enables the instrument to calculate
resistance values.
Procedure to display the settings screen: (Measurement screen) MENU key >
Select the voltage to be used for calculating resistance values.
1
[EXT.V] Use any optional voltage. (when the external power supply is used)
[VMONI] Use the voltage measured by the instrument (voltage monitor value).
[MES.V] Use the voltage set as the applied voltage for measurement (default setting).
If high-speed measurements are carried out with the V mode set to [VMONI], resistance values can be
measured to be lower than actual values because measurements start before measurement voltages
suciently increase.
If the sweep function is enabled, you will not be able to select [EXT.V].
[MEAS] tab
If [EXT.V] is selected, set the voltage value.
2
0.1 V to 5000.0 V (default setting: 0.1 V)
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
56
Setting Voltage Value for Resistance Calculation
HIOKI SM7110A961-06
Move to the next
digit (left or right)
Change the
numerical value
(up or down)
Numerical value can also be changed with the numeric keypad. See “Methods for changing
numerical values” (p. 28).
Settle
Cancel
4
Applied Measurement
57
Changing Measurement Starting Conditions (Trigger Function)
HIOKI SM7110A961-06
4.5 Changing Measurement Starting Conditions (Trigger Function)
The following two methods are available to set the measurement starting conditions.
External trigger After the START key is pressed, when the external trigger signal is input, a
measurement starts.
Internal trigger When the START key is pressed, the internal triggers are generated automatically and
measurements are repeatedly performed.
WARNING
When the START key is pressed, a hazardous voltage is generated at the
measurement terminal. To avoid an electric shock, do not touch the tip of the
measurement lead.
Setting the trigger mode
Procedure to display the settings screen: (Measurement screen) MENU key > [MEAS] tab
[EXTERNAL] External trigger
[INTERNAL] Internal trigger (default setting)
If the sweep function is enabled, you will not be able to select [EXTERNAL].
58
Inputting an external trigger
HIOKI SM7110A961-06
• For inputting triggers using the keys
After the START key is pressed on the Measurement screen, when the ENTER (TRIG) key is
pressed, a measurement is performed once.
• For inputting triggers to the EXT I/O
When the TRIG terminal of the EXT I/O terminal on the rear is short-circuited with the ISO_COM
terminal, a measurement is performed once. (p. 124)
• For inputting triggers to the communications interface
When the command
once.
IMPORTANT
• If it is set to the internal trigger, the trigger input to the EXT I/O and the command
ignored.
• Measurement can be interrupted in the middle by pressing the STOP key.
*TRG
is sent to the communication interface, a measurement is performed
Changing Measurement Starting Conditions (Trigger Function)
*TRG
are
4
Applied Measurement
59
Maintaining Measurement Accuracy (Self-Calibration Function)
HIOKI SM7110A961-06
4.6 Maintaining Measurement Accuracy (Self-Calibration Function)
The self-calibration corrects the oset voltage and the gain drift in the internal circuit.
The default setting is [ON]: thus, the self-calibration is executed automatically every time the set
interval elapses (default setting: 600 s).
Regardless of whether the self-calibration is set to on or o, the self-calibration is automatically
executed once at a startup and ve minutes later.
IMPORTANT
• Executing self-calibration is a condition for maintaining the measurement accuracy of the
instrument. If this function is set to [OFF], manually calibrate the instrument regularly. Be sure
to perform self-calibration manually especially after warming-up the instrument or when the
ambient temperature has changed by 2°C or more.
• A trigger generated during self-calibration causes the instrument to suspend an immediate
measurement. Once the self-calibration is complete, the instrument starts the measurement,
with the result that it takes longer between the trigger input and the end of the measurement.
How to execute the self-calibration manually
Pressing the F2 key [EXEC] while the settings screen is displayed executes the self-calibration
once.
Procedure to display the settings screen: (Measurement screen) MENU key >
Select whether to perform the self-calibration automatically or not.
1
[ON] Yes (default setting)
[OFF] No (It is necessary to execute self-calibration manually at periodic intervals.)
[MEAS] tab
60
Maintaining Measurement Accuracy (Self-Calibration Function)
HIOKI SM7110A961-06
If [ON] is selected, set the self-calibration interval.
2
1 s to 600 s (default setting: 600 s)
Move to the next
digit (left or right)
Change the
numerical value
(up or down)
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
Settle
4
Applied Measurement
Cancel
Numerical value can also be changed with the numeric keypad. See “Methods for changing
numerical values” (p. 28).
61
Setting Interlock Function
HIOKI SM7110A961-06
4.7 Setting Interlock Function
It is considered to be safe to install the interlock on another installation because the measurement
voltage is not output when a shielding box lid is open.
Use the interlock function for such a case.
The output of measurement voltage and the measurement function are disabled when the interlock
function is activated.
If the interlock setting is set to [ON] while the terminals of the INTER LOCK terminal are open, the
interlock function is activated and the interlock cannot be set to [OFF] on the settings screen.
Either deactivate the interlock (p. 63) or set the interlock setting to [OFF] by using the following
method.
• Turn o the instrument once and then turn on it again while pressing both the MENU key and the
down cursor key.
• Send the command
communication.
First, connect the instrument and the shielding box with each other.
See “2.7 For Safe Measurement” (p. 35).
:INTerlock OFF
through the USB, the RS-232C, or the GP-IB
Procedure to display the settings screen: (Measurement screen) MENU key >
[ON] Enabled
[OFF] Disabled (default setting)
Press the F3 key [ON].
1
The conrmation dialog box is displayed.
[MEAS] tab
62
To cancel the settings, press the F4 key [CANCEL] or the ESC key.
Press the F2 key [OK].
2
Interlock function is [ON] (Enabled).
How to deactivate the interlock
HIOKI SM7110A961-06
To deactivate the interlock, perform one of the following ways:
• Input 0 V to the INTER LOCK terminal.
• Short-circuit between the INTER LOCK terminal core wire and shield.
• Connect the signals INTERLOCK and ISO_COM in the EXT I/O terminal with each other to shortcircuit them.
See “9 External Control (EXT I/O)” (p. 123).
INTER LOCK terminal
Setting Interlock Function
4
Short-circuit between the terminals to deactivate the interlock.
Applied Measurement
63
Setting Pre-charge
HIOKI SM7110A961-06
4.8 Setting Pre-charge
The CHARGE terminal can be used to charge measured objects before measurement (precharge). Thus, this setting enables required times for automatic measurements for objects such as
capacitors to decrease.
IMPORTANT
If the measurement voltage setting or the charge setting is changed after the current limiter has
been set and if the current limiter value exceeds the upper limit, the current limiter is set to the
largest value among the settable values.
See “4.1 Starting Measurement After Measured Value Becomes Stable (Delay Function)” (p. 49).
To connect objects to the instrument, see “2.6 If Measured Object Is to Be Charged Before
Measurement (Pre-charge)” (p. 34).
Procedure to display the settings screen: (Measurement screen) MENU key >
[ON] Charges objects to be measured.
[OFF] Does not charge objects to be measured. (default setting)
[MEAS] tab
64
Limiting Current Flowing Through Measured Object (Current Limiter)
HIOKI SM7110A961-06
4.9 Limiting Current Flowing Through Measured Object (Current Limiter)
The current limiter can be used to limit currents owing through measured objects. Thus, the
measured objects can be charged faster, and it will also prevent objects from being damaged.
The current in the CHARGE terminal can also be restricted by the current limiter.
The value you can set varies according to the charge setting (p. 64) and the measurement
voltage setting (p. 41) (p. 66).
IMPORTANT
If the measurement voltage setting or the charge setting is changed after the current limiter has
been set and if the current limiter exceeds the upper limit, the current limiter is set to the largest
value among the settable values.
Procedure to display the settings screen: (Measurement screen) MENU key > [MEAS] tab
1.8 mA, 5 mA, 10 mA, 50 mA (default setting: 5 mA)
4
Applied Measurement
Press the F3 key [↓] or F4 key [↑] to select a value.
65
Limiting Current Flowing Through Measured Object (Current Limiter)
HIOKI SM7110A961-06
Current limiter set value
Charge setting Set voltage range Set value Total current
ON 0.1 V to 250.0 V 50 mA 50 mA 5 mA 45 mA
10 mA 10 mA 5 mA 5 mA
5 mA 5 mA 5 mA 0 mA
250.1 V to 1000.0 V 10 mA 10 mA 5 mA 5 mA
5 mA 5 mA 5 mA 0 mA
1000.1 V to 2000.0 V 1.8 mA 1.8 mA 1.8 mA 0 mA
OFF 0.1 V to 250.0 V 50 mA 50 mA 50 mA 0 mA
10 mA 10 mA 10 mA 0 mA
5 mA 5 mA 5 mA 0 mA
250.1 V to 1000.0 V 10 mA 10 mA 10 mA 0 mA
5 mA 5 mA 5 mA 0 mA
Current value
Measurement
system
Charging
system
1000.1 V to 2000.0 V 1.8 mA 1.8 mA 1.8 mA 0 mA
• The set voltage range of 1000.1 V to 2000.0 V is available for Model SM7120 only.
• Limiter accuracy: ±10%
However, the value is dened only when the output is equal to or greater than the minimum
generated voltage (a voltage drop due to the output impedance of the voltage generating circuit
and the input impedance of the measurement circuit).
• If the sweep function is enabled, the highest set voltage in the step list will be used.
Limit current Minimum generated voltage
50 mA 60 V
Measurement system
Charging system
10 mA 12 V
5 mA 6 V
1.8 mA 2.4 V
45 mA 0.9 V
5 mA 0.1 V
66
Auto-Range Timeout Function
HIOKI SM7110A961-06
4.10
Auto-Range Timeout Function
If the guarding and shielding of the instrument and measurement paths are not eective enough,
the instrument can be adversely aected by external noises or other factors, resulting in unstable
measurement. If you use the auto-range function in such environments, the instrument will
repeatedly switch between ranges, causing measurement to continue with a voltage outputted.
Using the auto-range timeout function can forcibly stop range switching in order to start
measurement once the range switching has repeated four times. The range switching count will be
reset at the start of the next measurement.
Activate this function under the following conditions:
• When a measured value is not updated due to repeated range switching
• When a measured value is not updated and the HIGH VOLTAGE LED is steadily on even after
the measurement time set in [MEAS] has elapsed during auto-testing (sequence program
function)
IMPORTANT
When the auto-range timeout function is activated, the instrument may perform measurement
using a range other than the most appropriate one. This will cause a value that falls outside
the accuracy guarantee range or the message [Current Over Range] to appear. When the
displayed value falls outside the accuracy guarantee range, the symbol [VAL?] will appear at the
top-right of the measurement screen. Please be advised that measured values with the symbol
[VAL?] may not accurate enough for use. In addition, please recheck the guarding and shielding
of the measurement paths for validity. Note that the symbol [?] will appear in the list screen of the
internal memory and sweep list measurement screen.
4
Applied Measurement
Procedure to display the settings screen: (Measurement screen) MENU key > [MEAS] tab
[ON] Auto-range timeout enabled
[OFF] Auto-range timeout disabled (default setting)
67
Contact Check (Various Setting)
HIOKI SM7110A961-06
4.11
Contact Check (Various Setting)
While measuring the insulator, if a measurement xture of the measurement system is not in
contact with the measured object, even defective insulation may be wrongly determined to be pass.
To avoid such erroneous judgment, the contact check function is used to check if the measurement
xture is brought into contact with the measured object to be measured.
Moreover, because inaccurate contact checks are performed if the capacitance is changed with the
cable length changing, the correction is required depending on the cable length.
Because the instrument can automatically correct the cable length, the auto-correction of the cable
length allows the instrument to be used immediately after the cable length is changed.
To perform the contact check accurately, congure the following settings.
Procedure to display the settings screen: (Measurement screen) MENU key >
[FREQ] Contact check frequency
[WORK.C] Capacitance of object to be measured
[CABLE] Length of measurement cable
[DELAY] Delay time
Setting of [FREQ]
Set the frequency of the signal applied during the open correction or the contact check.
245 kHz, 300 kHz (default setting: 300 kHz)
[C.CHK] tab
68
Setting of [WORK.C]
HIOKI SM7110A961-06
Set the capacitance of the object to be measured.
[LOW] If the capacitance of the objects to be measured is 10 pF or less
[NORMAL] If the capacitance of the objects to be measured exceeds 10 pF (default setting)
Contact Check (Various Setting)
If the capacitance of the object to be measured is unknown, select [NORMAL] and then execute the
open correction with the object connected to the instrument to obtain its capacitance.
See“4.12 Canceling Capacitance of Measurement Fixture (Fixture Capacitance Open Correction
Function)” (p. 71).
Setting of [CABLE]
Set the cable length.
[AUTO] The cable length is automatically detected and set.
[EDIT] Optional numerical values can be set.
4
Applied Measurement
0.5 m to 3.0 m (Can be set in increments of 0.1 m, default setting: 1.0 m)
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
If using an accessory or an optional cable, press the F4 key [EDIT] to specify its length.
If the cable is modied or extended, it is recommended to press the F3 key [AUTO].
Pressing the F3 key [AUTO] executes the cable length correction once. If you change the
cables, press the F3 key [AUTO] to execute the cable length correction again.
69
Contact Check (Various Setting)
HIOKI SM7110A961-06
Setting of [DELAY]
Set the wait time from the TRIG input to the start of the contact check
0 ms to 9999 ms (default setting: 0 ms)
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
70
Canceling Capacitance of Measurement Fixture (Fixture Capacitance Open Correction Function)
HIOKI SM7110A961-06
4.12
Canceling Capacitance of Measurement Fixture
(Fixture Capacitance Open Correction Function)
Be sure to read “Before performing the open correction” (p. 14) beforehand.
This function measures the capacitance of a measurement xture with its terminals open. The
xture capacitance open correction function can reduce the impact of residual impedance of the
measurement xture (such as lead or xture) and improve the measurement accuracy.
• If the contact check function is set to [ON], always execute “xture capacitance open correction” before
measurement.
• When the open correction is executed once, [OPEN] is displayed on the front indicator of the instrument.
• Execute the xture capacitance correction again after changing any of the contact check settings.
Connect the measurement xture such as a measurement lead to the instrument.
1
Do not connect to any measured object to the measurement xture.
Procedure to display the settings screen: (Measurement screen) MENU key >
tab
Press the F2 key [EXEC].
2
4
[C.CHK]
Applied Measurement
The open correction is executed, acquiring the correction value.
The data acquired by executing “xture capacitance open correction” is saved even after the
instrument is turned o.
A capacitance of between 0.000 pF and 99.999 pF can be corrected.
Press the F2 key [OK].
3
A short-circuit between the INPUT and OUTPUT terminals will cause the xture capacitance
open correction to fail, displaying a result “NG.” Check a short-circuit between the terminals.
71
Contact Check (Executing Contact Check, Setting Reference Value)
HIOKI SM7110A961-06
4.13
Contact Check (Executing Contact Check, Setting
Reference Value)
Be sure to read “Before performing a measurement” (p. 12) beforehand.
The contact check can be performed with the cable connected to the object to be measured.
The instrument judges the contact check result to be pass or fail by detecting a dierence of the
capacitance between that obtained when the cable is open and that obtained during the contact
check.
Judgment if the contact check function is set to ON
If the contact check function setting set to [ON], the indicator [C.CHK] is displayed on the
measurement screen.
Pressing the F2 key [C.CHK] on the measurement screen or the F2 key [EXEC] on the contact
check setting screen executes the contact check once.
The contact check also starts at the start of measurement.
The contact check measures a capacitance by applying a high-frequency signal and determines the
connection condition based on a dierence between the measured capacitance and that measured
with the terminals open.
Resistance value measurement mode
(initial screen)
If the contact check function is [ON], always execute the xture capacitance open correction before
measurement.
If using an external power supply, set the applied voltage source to [EXTERNAL].
See“3.2 Setting Applied Measurement Voltage” (p. 41).
If the capacitance value of the measurement system is less than the contact check reference value
(contact error), [C.CHK] highlighted in reverse video (no object is connected to the instrument). In
this case, inspect the instrument and the measurement xture.
Measurement is completed and data is output normally even if a contact error occurs.
The instrument uses the system of detecting electrostatic capacitance. Hence it cannot be used for
purely resistive objects that have less low capacitance components.
72
Contact Check (Executing Contact Check, Setting Reference Value)
HIOKI SM7110A961-06
Procedure to display the settings screen: (Measurement screen) MENU key > [C.CHK] tab
Select whether to perform contact check or not.
1
[ON] Enabled (The contact check is executed before starting measurement.)
[OFF] Disabled (default setting)
Executes contact check.
Set the capacitance reference value for judgment.
2
Set the minimum capacitance value for measurement objects.
Judgments are delivered by comparing measured values to this reference value.
A contact error occurs if the capacitance is less than this value.
4
Applied Measurement
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
Move to the next
digit (left or right)
Change the
numerical value
(up or down)
Numerical value can also be changed with the numeric keypad. See “Methods for changing
numerical values” (p. 28).
Settle
Cancel
73
Setting Resistivity Calculation (Resistivity Measurement Function)
HIOKI SM7110A961-06
4.14 Setting Resistivity Calculation (Resistivity Measurement Function)
Use of a electrode conforming to JIS or other standards enables the instrument to directly calculate
the surface resistivity and volume resistivity from the measured resistance.
Set the measured value display mode to [RS] (surface resistivity), [RV] (volume resistivity), or [RL]
(liquid volume resistivity).
See “3.1 Setting Measured Value Display Mode” (p. 39).
Examples of electrodes and connection points for measurement to distinguish between volume
resistivity and surface resistivity are given below.
(1) Example of electrodes
Volume resistivity
A
B
Object to be
measured
C
The product of the measured volume resistance and the electrode constant is called volume
resistivity (ρv), while the product of the surface resistance and the electrode constant is called
surface resistivity (ρs).
See“Calculation formula” (p. 164) in the specications about the calculation formulas.
D
2
D
1
t
A Main electrode Main electrode
B Guard electrode Counter electrode
C Counter electrode Guard electrode
(2) Access point
Main electrode: INPUT terminal
Guard electrode: GUARD terminal
Counter electrode: OUTPUT terminal
Surface
resistivity
74
Setting Resistivity Calculation (Resistivity Measurement Function)
HIOKI SM7110A961-06
Procedure to display the settings screen: (Measurement screen) MENU key > [ELEC] tab
Select whether to set the model name of the option or to directly enter the electrode constant.
[OPTION] If the option connected to the instrument is selected, the numerical value is set
automatically.
[EDIT] Set optional numerical values.
4
If [OPTION] is selected
Select a model connected to the instrument by pressing the F3 key [↓] or F4 key [↑].
Settle
Cancel
Option Main electrode (D1) Counter electrode (D2)
SM9001
SME-8301
SME-8310
SME-8311
30.5 mm
φ
30.0 mm
φ
50.0 mm
φ
19.6 mm
φ
57.0 mm
φ
34.0 mm
φ
70.0 mm
φ
24.1 mm
φ
Applied Measurement
SME-8320
50.0 mm
φ
70.0 mm
φ
75
Setting Resistivity Calculation (Resistivity Measurement Function)
HIOKI SM7110A961-06
If [EDIT] is selected
Numerical value can also be changed with the numeric keypad. See “Methods for changing
numerical values” (p. 28).
Set the diameter of the main electrode (D1).
1
0.0 mm to 100.0 mm (Can be set in increments of 0.1 mm, default setting: 50.0 mm)
Move to the next
digit (left or right)
Change the
numerical value
(up or down)
Settle
Cancel
Set the inner diameter of the counter electrode (D2).
2
0.0 mm to 100.0 mm (Can be set in increments of 0.1 mm, default setting: 70.0 mm)
Move to the next
digit (left or right)
Change the
numerical value
(up or down)
Set the thickness (t) of the object to be measured.
3
0.0 mm to 100.0 mm (Can be set in increments of 0.1 mm, default setting: 0.1 mm)
Move to the next
digit (left or right)
Change the
numerical value
(up or down)
Settle
Cancel
Settle
Cancel
76
Further Accelerating Measurement (Function of Updating Drawing During Measurement)
HIOKI SM7110A961-06
Set the electrode constant (K).
4
0.01 to 999.99 (Can be set in increments of 0.01, default setting: 500.00)
You can enter the electrode constant (K) to calculate liquid volume resistivity (RL).
The electrode constant (K) is listed on the test report of the SME-8330 Liquid Sample Electrode.
Settle
Move to the next
digit (left or right)
Change the
numerical value
(up or down)
Cancel
4
4.15 Further Accelerating Measurement (Function of Updating Drawing During Measurement)
Usually, measured values displayed on the screen are updated every time a measurement
completes. In this case, you need to wait until the screen is updated for some time, a period from
when a measurement completes (the EOM is output) to when the next TRIG is accepted. Set this
function setting to [OFF] to accelerate further the measurement by omitting measured value display
updating.
Procedure to display the settings screen: (Measurement screen) MENU key >
[ON] Updates the measured value display every measurement (default setting).
[OFF] Does not update the measured value display (Update the display when the setting is changed).
[MEAS] tab
Applied Measurement
77
Sweep Function
HIOKI SM7110A961-06
4.16 Sweep Function
Before using the functionality described in this section, please review “Before performing a
measurement” (p. 12).
The sweep function allows you to make measurements while varying the applied voltage. Applied
voltage settings are congured rst as a step list, which may contain up to 999 steps and which
may be generated in an automatic or manual manner.
The step list can be generated automatically by entering the start voltage, stop voltage and step
voltage or number of steps. In addition, you can add, delete, or change step list steps and enter
use-specied voltage settings.
Enabling and disabling the step function
Press the F1 key [SWEEP] on the measurement screen to toggle the sweep function on and o.
When the sweep function is enabled, the sweep list measurement screen will be displayed.
Normal measurement screen
(Sweep function disabled)
Toggling the sweep function on and o causes the trigger setting display area on the measurement
screen to be toggled on and o.
Sweep
function
[ON]
[OFF]
Trigger setting display Measurement state
SWP Measurement using the sweep function
INT or EXT
automatic testing (sequence program function)
Sweep list measurement screen
(Sweep function enabled)
Normal measurement,
78
Sweep function limitations
HIOKI SM7110A961-06
The following settings are limited when the sweep function is enabled:
Setting Limitation See
Trigger settings Cannot be set to [EXTERNAL]. If set to [EXTERNAL], will be
changed to [INTERNAL].
Sweep Function
p. 58
Sequence program function Will be set to [OFF]. Setting the sequence program function to
[ON] will cause the sweep function to be set to [OFF].
Memory function Will be set to [OFF]. When using the sweep function, measured
values are saved in internal memory, regardless of whether the
memory function is ON or OFF. Enabling the memory function
will have no eect on instrument operation.
Voltage value for resistance
calculation
Measured value display
mode
Applied voltage for
measurement
Data output function Data will be output after each step’s measurement completes.
Comparator function Judgment sounds for the comparator function will be generated
Current limiter Will be set according to the highest set voltage within the step
Cannot be set to [EXT.V]. Setting to [EXT.V] will cause the
setting to be changed to [MES.V].
Cannot be set during sweep measurement.
The applied voltage will switch to the electric discharge state
[DISC (D)] when sweep measurement completes. Settings
related to normal measurement will not change, even if the
sweep function is enabled.
The voltage setting for each step will be added to output data.
after each step’s measurement completes. The judgment results
external I/O signal will be output after sweep measurement
completes.
list.
p. 52
p. 113
p. 56
p. 39
p. 41
p. 152
p. 101
p. 65
4
Applied Measurement
Panel save/load Sweep function settings are not included in the settings that
are saved when panels are saved. When a panel is loaded, the
sweep function will be disabled.
Internal memory list Data will be deleted at the following times:
Sweep list
When the applied voltage changes during sweep measurement, a momentary voltage drop will occur if
the voltage generator range also changes. For more information about voltage generator ranges, see
the voltage measurement accuracy and voltage generation accuracy in “11.2 Input/Output/Measurement
Specications” (p. 156)
• When memory data is cleared
• When the step list is cleared
• When sweep measurement starts
• When sweep list settings are updated (when the start voltage
[START], stop voltage [STOP], division method [DIV], or
step voltage [STEPV] or number of steps [STEPN] setting is
changed and applied)
p. 105
p. 113
p. 80
79
Sweep Function
HIOKI SM7110A961-06
Sweep function settings
When the sweep function is enabled, measurements are made using the following settings:
[SPEED]* Measurement speed Sets the measurement speed.
[RANGE]* Current range Sets the current range.
[AVG]* Average function Sets the extent to which to reduce measured value variability.
[HOLD] Hold delay time Sets the delay time that is allowed to elapse from the start of
measurement to the rst step.
[DELAY] Measurement delay
time
Sets the delay time that is allowed to elapse from the start of
voltage application to the start of measurement for each step.
[STEP.T] Step time Sets the step time (cycle).
[FAILSTOP] Fail stop Causes measurement to stop depending on the comparator
judgment.
[AUTOFINE] Automatic ne steps Enables automatic ne step operation based on the measured
value and comparator threshold value.
[START] Start voltage Sets the start voltage.
[STOP] Stop voltage Sets the stop voltage.
[DIV] Division method Sets the division method to use between the start voltage and the
stop voltage.
[STEPV] Step voltage Sets the amount to increase the voltage between steps (when the
division method [DIV] is STEP).
[STEPN] Number of steps Sets how many steps to measure (when the division method [DIV]
is NUM).
[REVRS] Reverse function Automatically reverses direction and measures the set steps.
* Setting also applies during normal measurement.
Measurement
start
Charging
Sweep measurement
Measurement
end
Hold delay
Voltage
change
Measurement
Measurement time
Measurement
delay
Step time
Measurement
Measurement
Measurement
Measurement
Measurement time Measurement time Measurement time Measurement time
Measurement
delay
Step time Step time Step time Step time
Measurement
delay
Measurement
delay
Measurement
delay
80
Sweep Function
HIOKI SM7110A961-06
• In the event the sum of the measurement delay time and the measurement time exceeds the step time,
the function will wait for the current step’s measurement to complete before proceeding to the next step.
• In the event auto-range operation causes the measurement time to increase such that it exceeds the step
time, the function will wait for the current step’s measurement to complete before proceeding to the next
step.
• If the following settings are entered before creating an automatic step list, they will apply to the resulting
step list: start voltage [START], stop voltage [STOP], division method [DIV], step voltage [STEPV] or
number of steps [STEPN].
• If you wish to congure a custom step list, you can do so on the step list settings screen.
If the sweep function is disabled, press the F1 key [SWEEP] on the measurement screen to enable
it.
Press the F4 key [SWPSET].
1
4
The sweep list settings screen will be displayed.
Set the measurement speed, current range, and average processing.
2
See “3 Basic Measurement” (p. 39)
Applied Measurement
81
Sweep Function
HIOKI SM7110A961-06
Set the hold delay time, measurement delay time, and step time.
3
Press F3 key [ms/s] to change the units.
Hold delay time 0 ms to 999.9 s (default setting: 0.0 s)
Measurement delay time 10 ms to 999.9 s (default setting: 0.1 s)
Step time 15 ms to 999.9 s (default setting: 1.0 s)
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
The delay function used in normal measurement (with the sweep function o) is disabled during
measurement using the sweep function. Please set the hold delay time and measurement delay time
on the sweep list settings screen.
Select whether to use the fail stop function.
4
[ON] Use the fail stop function.
[OFF] Do not use the fail stop function. (default setting)
When you set the fail stop function [FAILSTOP] to [ON] with the F2 key, sweep measurement will end
if a measured value exceeds the range dened by the comparator threshold values.
See “6 Judging Measured Value (Comparator Function)” (p. 101)
If the reverse function [REVRS] is enabled, the sweep function will stop progressing forward through
the steps if the fail stop function operates and instead switch to reverse operation from the current
step.
82
Sweep Function
HIOKI SM7110A961-06
Select whether to use the automatic ne step function.
5
[ON] Use the automatic ne step function.
[OFF] Do not use the automatic ne step function. (default setting)
When you set the automatic ne step function [AUTOFINE] to [ON] with the F2 key, the function will
divide the current step’s set voltage and the next step’s set voltage to measure a ne step in between
the two if the measured value is close to the comparator’s threshold value. This function makes it
possible to measure variation in a ner-grained manner.
See “6 Judging Measured Value (Comparator Function)” (p. 101)
Automatic ne step operation functions as follows:
4
Applied Measurement
When comparator function UPPER = ON
Measured value > Upper Limit × 0.1 (10%) Interval between steps is divided at 1/2.
Measured value > Upper Limit × 0.5 (50%) Interval between steps is divided at 1/5.
Measured value > Upper Limit × 0.8 (80%) Interval between steps is divided at 1/10.
When comparator function LOWER = ON
Measured value < Lower Limit × 10 Interval between steps is divided at 1/2.
Measured value < Lower Limit × 2 Interval between steps is divided at 1/5.
Measured value < Lower Limit × 1.25 Interval between steps is divided at 1/10.
Set the start voltage and stop voltage.
6
(If you wish to set custom steps without creating an automatic step list, proceed to Step
Start voltage 0.1 V to 1000.0 V* (default setting: 0.1 V)
Stop voltage 0.1 V to 1000.0 V* (default setting: 0.1 V)
* SM7120: Valid setting range extended to 2000.0 V.
11
)
.
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
83
Sweep Function
HIOKI SM7110A961-06
Set the division method.
7
Set how to divide the interval between the start voltage and the stop voltage: by specifying
the step voltage or by specifying the number of steps.
Set the step voltage or the number of steps.
8
[STEP] Divide by specifying the step voltage. (default setting)
[NUM] Divide by specifying the number of steps.
If dividing by specifying the step voltage [STEPV] ([DIV] = STEP)
Start voltage 0.1 V to 1000.0 V* (default setting: 0.1 V)
* SM7120: Valid setting range extended to 2000.0 V.
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
If dividing by specifying the number of steps [STEPN] ([DIV] = NUM)
Number of steps 1 to 999 (default setting: 1)
84
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
Create an automatic step list.
HIOKI SM7110A961-06
9
Create an automatic step list based on the start voltage [START], stop voltage [STOP],
division method [DIV], and step voltage [STEPV] or number of steps [STEPN].
Press the F1 key [APPLY] to create the automatic step list.
A conrmation dialog box will be displayed.
Sweep Function
4
To cancel the operation, press the F4 key [CANCEL] or the ESC key.
Press the F2 key [OK] to create an automatic step list based on the settings.
• When you create an automatic step list, all previous step list settings will be cleared. In addition,
step list measured values and memory data will be cleared.
• If the start voltage is 0.1 V and the step voltage resolution is 1.0 V, the start voltage will be treated
as 0 V when creating steps.
• When creating an automatic step list, the nal step’s voltage may be lower than the stop voltage
[STOP] depending on the step voltage [STEPV] or number of steps [STEPN] setting. The nal
step’s voltage will never exceed the stop voltage [STOP].
Select whether to use the reverse function.
10
[ON] Use the reverse function.
[OFF] Do not use the reverse function. (default setting)
Applied Measurement
85
Sweep Function
HIOKI SM7110A961-06
When you set the reverse function [REVRS] to [ON] with the F2 key, the function will perform
additional sweep measurement in the reverse order of the step list once the nal step
completes in sweep measurement.
Review and change the step list as desired.
11
You can review and change the step list settings with the F4 key [MODIFY].
On the step list settings screen, you can review or change step voltage settings and add or
delete steps.
F1 key [INSERT] Adds a step.
F2 key [DELETE] Deletes a step.
F3 key [CLEAR] Clears all steps.
F4 key [EDIT] Sets the step voltage.
Pressing the F4 key
[EDIT] enables the
numerical value to be
changed.
• Adding a step with [INSERT] adds one step underneath the step row highlighted by the cursor. The
voltage setting will be copied from the step highlighted by the cursor.
• Deleting a step with [DELETE] deletes the step row highlighted by the cursor.
• Clearing all steps with [CLEAR] deletes the voltage settings for all steps and sets step 001 to 0.1 V.
A conrmation message will be displayed before the steps are cleared.
• By setting a step’s voltage with [EDIT], you can change the voltage setting highlighted by the
cursor as desired.
• Steps with a voltage setting (MES.V) of [------] will not be measured.
• On the step list settings screen, only forward-direction settings are displayed, regardless of the
reverse [REVRS] setting (ON/OFF).
86
If automatic step list settings are not applied
HIOKI SM7110A961-06
In some instances, changes to the automatic step list settings may not be applied to the step list.
Change one of the following settings on the sweep settings screen:
1
start voltage [START], stop voltage [STOP], division method [DIV], or step voltage
[STEPV] or number of steps [STEPN] setting.
Press the MENU key [EXIT] or the ESC key.
2
A conrmation dialog box will be displayed.
Sweep Function
4
F2 key [OK] Applies the automatic step list settings and switches to the sweep measurement
screen.
F3 key [NOAPLY] Switches to the sweep measurement screen without applying the automatic
step list settings.
F4 key [CANCEL] Returns to the sweep settings screen without applying the automatic step list
settings.
• The changed sweep function settings will remain intact even if you don’t apply them to the step list.
Please note that in this case, the sweep function settings will not match the step list settings.
• Once you close the conrmation dialog box, no additional conrmation dialog box will be displayed
until the settings are changed again.
Applied Measurement
87
Sweep Function
HIOKI SM7110A961-06
Performing sweep measurement
Reviewing the step list
Review the step list before starting sweep measurement.
Pressing the F2 key [PRVIEW] on the sweep list measurement screen will display a step list review
screen on which you can review the list of steps that will be measured.
Sweep list measurement screen Step list review screen
• Step list settings cannot be changed on the step list review screen.
• The review function setting will be applied to the step list review screen when it is displayed.
Starting and stopping sweep measurement
Press the START key to apply the measurement voltage and start sweep measurement.
Press the STOP key to end voltage application and sweep measurement.
Switching the measurement screen
Pressing the F3 key [MONI] while the sweep function is enabled switches the display screen to the
sweep list measurement screen or the sweep normal measurement screen.
On the sweep list measurement screen, you can check other steps’ measured values while sweep
measurement is in progress.
On the sweep normal measurement screen, you can review the voltage monitor value, temperature,
and humidity in addition to the current step’s measured value. (The temperature and humidity
sensor is optional [p. 3]. )
88
Sweep list measurement screen Sweep normal measurement screen
Measuring Components or Circuits
HIOKI SM7110A961-06
Measurement Methods Suitable
5
for Various Objects to Be
Measured
Insulation resistance objects to be measured vary in material, shape, electrical characteristics, and
other properties, and the suitable insulation resistance measurement method varies depending on
the object.
This chapter describes suitable insulation resistance measurement methods for dierent objects.
5.1 Measuring Components or Circuits
Measurement principle
Generally, insulation resistance is measured by measuring a current that ows from a terminal
through a measured object to another terminal, and converting the result into a resistance value.
To measure only the current that ows through the measured object, the current that does not
ow through the object (e.g., current that ows through the insulator of the object holder) must be
diverted to the GUARD terminal (on the common side of the current measurement block) so that it
does not ow into the INPUT terminal. That is, “guarding” is to make the current owing through the
outside of the measured object directly ow to the common side to prevent it from owing into the
INPUT terminal.
If you use a measurement xture, generally the component holder of the xture must be guarded.
However, measuring the insulation resistance of the xture in addition to that of the measured
object may not be problem if the insulation resistance of the xture is much, for example,
hundredfold or more, higher that of the object.
Although the structure of an actual xture may vary depending on the shape of the object to be
measured, the guard circuit must be congured in such a way that the current not owing through
the object is diverted to the GUARD terminal.
5
Measurement Methods Suitable for Various Objects to Be Measured
89
Measuring Components or Circuits
HIOKI SM7110A961-06
Measurement with use of a measurement xture
Design the circuit in order that the currents owing through the outside of all the objects to be
measured ow through the guard circuit and connect the guard circuit to the GUARD terminal of the
instrument.
Example of use: (Use a measurement xture with a guard installed)
Sample (Rx)
11
Terminal A
22
Insulator a (Ra)
33
Terminal B
22
33
11
44
55
66
44
Insulator b (Rb)
55
Holding plate
66
(guard)
Principle of the guard
(a) Measurement without a guard (b) Measurement with a guard
A B
Ra Rb
Measurement voltage source Measurement voltage source
Rx
A B
i1 + i
i
1
i
2
2
A
Ra Rb
The gures “Example of use” and “Principles of the guard” explains the eectiveness of the guard.
Considering how the current ows from Terminal A to Terminal B in the “Example of use,” 2 ow
channels are found.
• Current pathway passing through the measured object (Rx)
• Current pathway passing through in the following order: Insulator a (Ra), holding plate, Insulator
b (Rb), and Terminal B.
Connect Terminal A to the OUTPUT terminal and Terminal B to the INPUT terminal of the
instrument, and then start a measurement. Thus, the sum of the insulation resistance (Rx) of the
measured object, the current that ows through the insulation resistance Ra of Insulator a, and the
current that ows through the insulation resistance Rb of Insulator b is measured. “Principle of the
guard” shows the equivalent circuit of this case.
As you can clearly see from the equivalent circuit in “(a) Measurement without a guard,” both
the current i
, which ows through the measured object, and the current i2, which ows through
1
Insulators a and b, ow into the input circuit through Terminal B.
Next, use a metal plate as the holding plate of the holder, and connect it to the GUARD terminal
of the instrument. This ensures that only the current owing through the measured object ows
into the INPUT terminal; the current that ows through Insulators a and b is excluded. (See “(b)
Measurement with a guard.”)
This equivalent circuit shows that the current i2, which ows through Insulator a, does not ow
into the input circuit, but directly ows into the common current measurement block, and that only
current i1, which ows through the measured object, ows into the input circuit.
Rx
i
1
i
2
C
i
1
A
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Measuring Components or Circuits
HIOKI SM7110A961-06
Measurement without use of a measurement xture
Connect the optional Pin Type Lead or Clip Type Lead to the measured object and perform
measurement.
Both the measuring leads do not have a guard on the end connected to the OUTPUT terminal but
have a guard on the other end connected to the INPUT terminal.
Pin Type Lead The structure of the lead is designed to guard also the test rods, so that you can
perform measurement while holding the test rods in your hands.
Clip Type Lead The clip parts have no guard, connect them to the terminals of the object to be
measured and perform measurement with your hands kept away from them.
See “2.2 Connecting Measurement Leads to Instrument” (p. 30), and “3.5 Connecting
Measurement Leads or Electrode to Object to Be Measured” (p. 45)
The insulation resistance value varies depending on the insulation material. However, the measurement
time, measurement voltage, and temperature also have a signicant impact on the measured value.
Impact of the measurement time
A circuit of an insulator is schematically considered as a complex circuit in which resistance and capacitance
are included serially or parallel; thus, applying a voltage to the insulator results in the dielectric absorption
current and leakage current equivalent to the charging current owing.
The insulation resistance can be obtained by measuring the leakage current and converting it into a
resistance value. Generally, the dielectric absorption current is considerably larger than the leakage current,
and the time constant may also be very large depending on the type of the insulator. Therefore, in some
cases, it may take a long time for the dielectric absorption current to become smaller than the leakage
current. If a resistant value of such an insulator is measured, measuring for a short time results in a small
insulation resistance value; the longer the measurement time, the higher will be the insulation resistance
value.
5
Measurement Methods Suitable for Various Objects to Be Measured
Impact of measurement voltage
The time constant and insulation resistance value of the dielectric absorption current may considerably vary
depending on the voltage applied to the insulator. Generally, the higher the measurement voltage, the lower
will be the insulation resistance value.
Impact of temperature
Temperature also has an impact on insulation resistance values. Although they will vary depending on
the type of the insulator, generally the higher the temperature, the lower will be the insulation resistance.
Accurate insulation resistance not only it takes time, but also it is dicult to perform measurement.
In some cases, you cannot freely determine the measurement voltage due to the dielectric strength of the
object toe be measured. However, a measurement time value of 1 minute is used, and 1-minute insulation
resistance value is expressed with the measurement voltage as, for example, “1000 M
V DC.”
To compare the insulation resistance, you must determine the measurement voltage and time to perform
measurement. However, it may be important to reduce the measurement time (or inspection time) in a
production process. In such cases, it is important to determine the time in the range that allows correlation
with the 1-minute value.
at a voltage of 500
Ω
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Measuring Components or Circuits
HIOKI SM7110A961-06
Automatic measurement
If you have many objects or points to be measured, “automatic measurement” is useful. The
function performs measurement by automatically switching objects, measurement xtures, or
measurement terminals to be measured.
For automatic measurement, the switch timing must be aligned with the instrument operation.
The following are the 2 methods to align the timing.
When switching objects to be
measured according to the INDEX
signal output from Pin 29 of the
instrument’s EXT I/O terminal
When a trigger pulse is input to
Pin 1 of the EXT I/O terminal of the
instrument at the timing of switching
the objects to be measured
• Set the trigger mode of the instrument to Internal trigger mode
or External trigger mode.
Internal trigger mode
• When the START key is pressed, measurement starts.
External trigger mode
• After the START key is pressed, when a manual trigger is input,
measurement starts.
• Set the trigger mode of the instrument to External trigger mode.
• After the START key is pressed, when a trigger pulse is input to
Pin 1 of the instrument’s EXT I/O terminal, measurement starts.
• The conditions of the external trigger signal are as follows:
• Pulse width: 200 µs or greater
• Drive output: Open collector or TTL output
• Drive current: 1 mA or higher sink current
For details, see the following pages:
Trigger mode: “4.5 Changing Measurement Starting Conditions (Trigger Function)” (p.
58)
EXT I/O terminal: “9 External Control (EXT I/O)” (p. 123)
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Measuring Components or Circuits
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When automatically measuring an object with a large capacitance (such as a
capacitor)
Improving the reliability of insulation resistance measurement
Set the contact check function that checks connections (contacts) in the measurement circuit
including the measured object and the measurement xture.
See “4.13 Contact Check (Executing Contact Check, Setting Reference Value)” (p. 72).
Reducing the measurement time and improving the measurement accuracy
Pre-charge the measured object before measurement.
Connection to the CHARGE terminal (p. 34) and the following settings are required:
See “4.8 Setting Pre-charge” (p. 64) and “4.9 Limiting Current Flowing Through Measured Object
(Current Limiter)” (p. 65)
Shorting plug
SM7110/SM7120
INPUT
Ammeter
A
Rc
Rx
Negative side Positive side
Rc is the measured object after Rx.
Example of CHARGE terminal connection (A grounded measured object)
Negative
side
Measured
object
Positive
side
Charging
Measured
object
GUARD
GROUND
OUTPUT
CHARGE
Measurement
−
voltage
+
source
Current limiter
5
Measurement Methods Suitable for Various Objects to Be Measured
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Measuring Flat Sample
HIOKI SM7110A961-06
5.2 Measuring Flat Sample
Measuring insulation resistance of an object with no terminals installed requires something that can
function as terminals to be attached on the object.
The measurement method varies depending on the type of the terminal.
What function as terminals
It must be possible to switch the objects to be measured easily. Therefore, items with a structure that allows
them to function as terminals just by contacting the object is often used.
The terminals used for measurement must have proper contact with the object to be measured without any
loose connection.
For a solid insulation material, the method of bringing terminals (electrode) that have a specic pin shape
or those with smooth at surfaces, which can contact with smooth surfaces of objects to be measured
without any space between them, into close contact with the object to be measured is employed to measure
insulation resistance. (The shape and structure of the terminals varies depending on the shape and
characteristics of the object to be measured.)
Measurement using pin type terminals
Insulation resistance is classied into “volume resistance,” which is the current owing through the
measured object and “surface resistance,” which is the current owing along the surface of the
sample. To measure both of them together, use pin type terminals.
Example of pin creation
Make 2 holes (such as tapered holes) with a predened diameter at a certain interval on the at
sample. Apply material with relatively low insulation resistance, such as petroleum jelly, to the pins
and insert the pins into the holes to use them as terminals for measurement.
These pins are of a simple structure and provide relatively steady contacts, eliminating the need for
smoothing the surface of the sample to obtain a at surface.
Setting the instrument
Press the MODE key to switch the measurement mode to resistance value measurement mode,
and then perform measurement. (p. 39)
Measurement using an electrode for measuring surface resistance
The electrode for measuring surface resistance is used as terminals for measurement by pressing
it on the surface of the object to be measured. It provides an easy method to perform measurement
if the objects to be measured are relatively soft.
This electrode cannot exactly separate the volume resistance but can essentially measure the
surface resistance because it is generally lower.
In particular, this method is useful for objects to be measured that have been subjected to surface
anti-static treatment.
Setting the instrument
Press the MODE key to switch the measurement mode to sureface resistivity measurement mode,
and then preform measurement. (p. 39)
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Measuring Flat Sample
HIOKI SM7110A961-06
Measurement using an electrode for a at sample
The “volume resistance” and “surface resistance” must be measured separately because their
properties are dierent from each other.
To compare dierent insulating materials in terms of insulation resistance, the insulating materialspecic resistance values that are not aected by the shape of the terminal are required. They are
considered to be the volume resistivity or surface resistivity. Use an electrode (such as optional
Model SME-8310 or SME-8311) to determine the volume resistance value or the surface resistance
value. Then, multiply the values by each of the electrode constants to calculate the volume
resistance value or the surface resistivity. The instrument can automatically calculate the volume
resistivity or the surface resistivity.
Setting the instrument
Settings for calculating the resistivity are required.
See “4.14 Setting Resistivity Calculation (Resistivity Measurement Function)” (p. 74).
Press the MODE key to switch the measurement mode to volume resistivity measurement mode,
and then perform measurement. (p. 39)
Volume resistance measurement and surface resistivity measurement
(the functional role of the guard electrode)
A guard is required for measuring volume resistance and surface resistivity.
Hioki provides Model SME-8310 Plate Sample Electrode and Model SME-8311 Electrode for Flat
Sample as options.
Both the devices consists of 3 electrodes: “main electrode,” “counter electrode,” and “guard
electrode.”
Because measurement using Model SME-8301 Surface Resistance Measurement Electrode is equivalent
to the measurement described in “Surface resistance measurement (1) Measurement without the guard
electrode (p. 96),” it cannot provide accurate surface resistance measurement.
Volume resistance measurement
(1) Measurement without the guard electrode
Because the current owing along the surface of the measured object is also measured
unnecessarily, the current owing across the object in the thickness direction cannot be separately
measured.
Internal ammeter of the Super Megohm Meter
5
Measurement Methods Suitable for Various Objects to Be Measured
Main electrode
Measured object
Counter electrode
Current to be measured
owing across the object in the
thickness direction
A
(−)
(+)
Current owing along the surface of
the measured object
Internal power
supply of the Super
Megohm Meter
95
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