RM2610
HIOKI RM2612A961-02
Instruction Manual
ELECTRODE RESISTANCE
MEASUREMENT SYSTEM
Be sure to read this manual before using the instrument.
When using the instrument for the
rst time
Part Names and Functions
Preparing for Measurement
Basic Measurement
Oct. 2021 Revised edition 2
RM2612A961-02 21-10H
p.9 FAQ
p.19 Maintenance and Service
p.35 List of Error Messages
Troubleshooting
Video
Scan this code to watch the
instructional video(s).
Carrier charges may apply.
*600539422*
p.91
p.107
p.114
p.6
EN
HIOKI RM2612A961-02
Contents
HIOKI RM2612A961-02
Measurement Process
Introduction
About the Notations Used in This Manual
Product Components
Operating Precautions
........................................................2
.....................................1
.....3
.......................................5
.....................................6
1 Overview 9
1.1 Product Overview and Features
1.2 Part Names and Functions
RM2610 Electrode Resistance
Measurement System
RM2611 Electrode Resistance Meter
RM9003 Press Unit
RM9004 Test Fixture
1.3 USB License Key and Screens
(RM2612 Resistance Calculation
Software)
USBlicensekey
Main screen
Settings screen
...............................................16
..............................................16
.................................9
...................................12
.................................14
.......................................16
.........................................17
...........9
...................9
.........10
2 Preparing for
Measurement
2.1 Installing the RM2612 Resistance
Calculation Software
Installationconrmationitemsand
precautions
Installation procedure
2.2 Mounting the RM9004 Test Fixture
on the RM9003 Press Unit
2.3 Connecting the RM9005
Connection Cable
2.4 Connecting the RM2611 Electrode
Resistance Meter’s Power Cord
2.5 Connecting the RM2611 Electrode
Resistance Meter to a PC with a
USB Cable
2.6 Connecting the Z2001
Temperature Sensor
Connecting the Z2001 Temperature
Sensor to the RM2611 Electrode
Resistance Meter
Connecting the Z2001 Temperature
Sensor to the RM9003 Press Unit
2.7 Turning the RM2611 Electrode
Resistance Meter On and Off
Turning the main power switch on and off
Entering and exiting the standby state
...............................................19
.............................................27
19
............................19
................................20
..................24
.................................25
.........26
............................28
......................................28
.............28
.............29
..29
.......29
2.8 Launching the RM2612
Resistance Calculation Software
Verify the connection between the
RM2611 Electrode Resistance Meter
and the PC
2.9 Pre-use Inspection
SHORT inspection method
OPEN inspection method
...............................................31
...............................32
........................33
..........................34
.......30
3 Basic Measurement 35
3.1 Setting the Operating Mode
3.2 Setting the Resistance Range
3.3 ConguringtheContactCheck
Function
3.4 SavingContactCheckResults
3.5 Entering Electrode Sheet
Information
3.6 Saving Measured Values
Saving the current measurement results
3.7 Loading an Electrode Sheet into
the RM9003 Press Unit
Operating the RM9004 Test Fixture
using only the up/down lever (disabling
thelockreleaselever)
3.8 Starting Measurement
3.9 CheckingMeasurementResults
.................................................38
.............................................41
...............................46
................35
............37
...........40
.....................43
....44
.......................45
.........................47
........48
4 Customizing
Measurement Conditions
4.1 Choosing the Measurement Speed
4.2 Auto Start Function
4.3 Rejecting Error Data during
Measurement (Error Data
RejectionFunction)
4.4 Choosing the Unit for Composite
Layer Resistance
4.5 Setting the Limit Iteration Number
4.6 Setting the Reduction Factor
4.7 Entering the Initial Iteration Value
4.8 Choosing the Model Area
4.9 Choosing the Element Size
4.10 Switching the Display Language
4.11 CheckingtheSoftwareVersion
4.12 Outputting a 2D Potential
Distribution File
4.13 Choosing the CSV Save Format
4.14 Setting Whether to Beep at
Measurement Completion
4.15 Setting Administrator Mode
..............................52
..............................53
..................................55
..............57
....................59
.................60
.....................................63
...................65
.................66
51
...51
.....56
......58
........61
..........62
........64
1
2
3
4
5
6
7
8
9
10
Index
RM2612A961-02
i
Contents
HIOKI RM2612A961-02
5 Analysis 69
5.1 Analyzing One Potential
Measurement under Multiple
Conditions
.............................................69
6 Saving and Loading
Measurement Conditions
6.1 Saving Measurement Conditions
6.2 Loading Measurement Conditions
73
.......73
.....74
7 Specications 75
7.1 RM2611 Electrode Resistance Meter
7.2 RM2612 Resistance Calculation
Software
7.3 Output File Formats
Contactcheckbitpattern
7.4 ContactCheckResultsFileOutput
Format
7.5 Inspection Results File Format
.................................................78
.............................85
...........................87
....................................................88
...........89
75
8 FAQ 91
8.1 About the reduction factor
8.2 How is interface resistance
calculated?
8.3 Whatisthenitevolumemodel?
8.4 Can electrode sheets coated on
both sides be measured?
8.5 What is volume resistivity?
8.6 What is surface resistivity? How
do composite layer volume
resistivity and composite layer
surface resistivity differ?
8.7 HowshouldIcongurethe
settings for a collector with an
undercoat?
8.8 What are analysis results?
8.9 What is measurement reliability?
8.10 How much does entering an
incorrect value for the composite
layerthicknessaffectanalysis
results?
8.11 Under what circumstances do
contact errors occur?
............................................95
.........................................101
...............................................104
...................94
.......97
....................98
.................99
....................100
...............102
....103
........................105
9 Maintenance and
Service
9.1 Troubleshooting
Before having your product repaired
9.2 Updating the Software
9.3 Initializing the Software
Factory default settings
9.4 List of Error Messages
RM2611 Electrode Resistance Meter
RM2612 Resistance Calculation Software
9.5 Cleaning the System
RM2611 Electrode Resistance Meter
RM9003 Press Unit
RM9004 Test Fixture
9.6 Calibration
9.7 Disposing of the RM2611
Electrode Resistance Meter
Removing the lithium battery
107
..................................109
........109
.......................110
...................... 111
........................... 112
....................... 114
....... 114
115
.......................... 117
....... 117
................................. 11 7
............................... 118
...........................................119
.............. 11 9
................... 119
10 Appendix 121
10.1 RackMounting
10.2 Dimensional Drawings
Index 127
User’s License Agreement
....................................121
.......................124
ii
Measurement Process
HIOKI RM2612A961-02
Install the RM2612 Resistance Calculation Software on your
computer.
Installing the software
(p. 19)
• Connect the RM2611 Electrode Resistance Meter to the RM9004
Test Fixture with the RM9005 Connection Cable.
• Connect the RM2611 Electrode Resistance Meter to the computer
with a USB cable.
Connecting the
equipment (p. 24)
Measurement Process
1
2
3
4
Completing the pre-start
inspection (p. 32)
Conguring settings
Loading the
measurement target
(p. 45)
• Turn on the RM2611 Electrode Resistance Meter.
Check to ensure the RM2610 Electrode Resistance Measurement
System and optional equipment are not experiencing any
malfunctions or failures.
• “Basic Measurement” (p. 35)
• “Customizing Measurement Conditions” (p. 51)
• Load the electrode sheet into the RM9003 Press Unit.
5
6
7
8
9
Making measurements
Saving the results
Completing work
10
• “3.9 Checking Measurement Results” (p. 48)
• “3.9 Checking Measurement Results” (p. 48)
• “6.1 Saving Measurement Conditions” (p. 73)
Index
Complete measurement and turn off the system.
1
Introduction
HIOKI RM2612A961-02
Introduction
Thank you for choosing the Hioki RM2610 Electrode Resistance Measurement System. Preserve
this manual carefully and keep it handy to make full use of this product for a long time. Familiarize
yourself with the separate document entitled “Operating Precautions” before using the product.
Following manuals are available for the instrument. See manuals relevant to your purpose.
Name Manual contents
RM2610 Probe Maintenance
Guide*
Operating Precautions Information to ensure safe use of the product
RM2611 Electrode Resistance
Meter Instruction Manual
RM2610 Electrode Resistance
Measurement System Instruction
Manual (this manual)
RM9003 Press Unit Instruction
Manual
RM9004 Test Fixture Instruction
Manual
RM9005 Connection Cable
Instruction Manual
Information about the proper probe maintenance
procedures for obtaining correct measurement
results
Information about the RM2611 Electrode
Resistance Measurement Meter
Information about RM2611 Electrode Resistance
Meter and RM2612 Resistance Calculation
Software functionality, settings, specications, etc.
Information about the RM9003 Press Unit
Information about the RM9004 Test Fixture
Information about the RM9005 Connection Cable
*: Carefully read the guide before use. The guide can be downloaded from Hioki’s website. (p. 19)
Latest edition of instruction manual
Availability
Downloadable
edition
Printed edition
(0990A905)
Printed edition
(RM2611A961)
Printed edition
(RM2612A961)
Printed edition
(RM9003A961)
Printed edition
(RM9004A961)
Printed edition
(RM9005A960)
The contents of this manual are subject to change, for example as a result of product
improvements or changes to specications.
The latest edition can be downloaded from Hioki’s website.
https://www.hioki.com/global/support/download
Intended audience
This instruction manual has been written for use by individuals who use the product or provide
information about how to use the product. In explaining how to use the product, it assumes
electrical knowledge (equivalent of the knowledge possessed by a graduate of an electrical
program at a technical high school).
Trademarks
• Microsoft and Excel are either registered trademarks or trademarks of Microsoft Corporation in
the United States and other countries.
• Intel is the trademark of Intel Corporation or its subsidiaries in the U.S. and/or other countries.
• Other products and company names are trade names, registered trademarks, or trademarks of
their respective owners.
License agreement
The product ships with the RM2612 Resistance Calculation Software. Use of the software indicates
acceptance of the terms of the license agreement found at the end of this manual.
2
About the Notations Used in This Manual
HIOKI RM2612A961-02
About the Notations Used in This Manual
Safety notations
This manual classies seriousness of risks and hazard levels as described below.
1
DANGER
WARNING
CAUTION
IMPORTANT
Symbols on equipment
Indicates an imminently hazardous situation that will result in death of or serious
injury to the operator.
Indicates a potentially hazardous situation that may result in death of or serious
injury to the operator.
Indicates a potentially hazardous situation that may result in minor or moderate
injury to the operator or damage to the product or malfunction.
Indicates information or content that is particularly important from the standpoint
of operating or maintaining the product.
Indicates useful advice concerning product performance and operation.
Indicates a high-voltage hazard. Failure to verify safety or improper handling of
the product could lead to an electric shock, burns, or death.
Indicates an action that must not be performed.
Indicates an action that must be performed.
2
3
4
5
6
Other symbols
*
(p. ) Indicates the page number to reference.
START
(Bold)
[ ]
Windows
Indicates the need for caution or the presence of danger. For more information
about locations where this symbol appears on product components, see “Operating
Precautions” (p. 6), warning messages listed at the beginning of operating
instructions, and the document entitled “Operating Precautions” that comes with the
RM2611 Electrode Resistance Meter.
Instructs the reader to see below for additional information.
Indicates the default setting. When initialized, the product will revert to this value.
The names of user interface elements on the screen are printed in bold or enclosed in
brackets.
Unless otherwise noted, the term “Windows” is used to refer to Windows 7, Windows 8,
and Windows 10.
7
8
9
10
Index
3
About the Notations Used in This Manual
HIOKI RM2612A961-02
Accuracy notations
Hioki denes measurement tolerances in terms of f.s. (full scale), rdg. (reading), dgt. (digit), and
setting values, as indicated below.
(Maximum display value)
f.s.
The maximum displayable value or scale length. This is usually the name of the
currently selected range.
rdg.
dgt.
setting
(Reading or displayed value)
The value currently being measured and indicated on a measuring instrument.
(Resolution)
The smallest displayable unit on a digital measuring instrument, i.e., the input value
that causes the digital display to show a “1” as the least-signicant digit.
(Setting)
Indicates the value set as the output voltage, current, or other quantity.
4
Product Components
HIOKI RM2612A961-02
Product Components
The RM2610 Electrode Resistance Measurement system (“the product”) consists of the
components in the table below. To purchase an option*1, please contact your authorized Hioki
distributor or reseller.
Product Description Accessories
RM2611 Electrode Resistance Meter
Potential measurement
(Calculated based on
resistance values)
• Instruction manual*
• Operating Precautions
(0990A905)
• Power cord
• USB cable
• Z2001 Temperature Sensor
1
2
2
RM2612 Resistance Calculation
Software*
RM9003 Press Unit*
RM9004 Test Fixture*
RM9005 Connection Cable*
1
1
1
Measurement and control
software
• Instruction manual (this
manual)*
• PC application CD*
• USB license key
2
3
3
4
Measurement
(The RM9003 Press Unit
is used to connect the
RM9004 Test Fixture.)
• Instruction manual*
• Quick manual
2
5
6
Measurement
(The RM9004 Test Fixture
is connected to the RM2611
Electrode Resistance Meter
in order to measure the
composite layer resistivity
and interface resistance of
lithium-ion battery electrode
sheets.)
1
Connection • Instruction manual*
• Instruction manual*
• Test xture case
• Mounting screws ×4
• Probe inspection board
2
7
8
2
*1
Options are subject to change. Please check Hioki’s website for the latest information.
*2
The latest version of each instruction manual can be downloaded from Hioki’s website.
*3
The PC application software can be updated to the latest version (p. 110).
9
10
Index
5
Operating Precautions
HIOKI RM2612A961-02
Operating Precautions
Familiarize yourself with the separate document entitled “Operating Precautions” before using
the product and to observe the following precautionary information to ensure that the product can
be used safely and in a manner that allows it to perform as described in its specications. Use
of the product should conform not only to its specications, but also to the specications of all
accessories, options, and other equipment in use.
Installing the product
CAUTION
Do not place the product on an unstable or uneven surface. Doing so could cause the
product to fall or turn over, causing bodily injury or damage to the product.
This product may cause interference if used in residential areas. Such use must be avoided unless
the user takes special measures to reduce electromagnetic emissions to prevent interference to the
reception of radio and television broadcasts.
Shipping precautions
Use the original product packaging when shipping the product. Store the packaging material after
opening the product.
CAUTION
To avoid damage to the product, avoid subjecting it to vibration or mechanical shock
during transport and handling. Exercise particular care to avoid subjecting the product
to mechanical shock, for example by dropping it.
Precautions related to use of the PC application CD
• Exercise care to keep the disc’s recording surface free of dirt and scratches. When writing text
and other information on the label surface, use a writing implement with a soft tip.
• Place the disc in a protective case and avoid exposure to direct sunlight as well as high
temperature and humidity.
• Hioki is not liable for any computer system issues arising from, or accompanying, use of this disc.
6
RM9004 Test Fixture (option)
HIOKI RM2612A961-02
• Do not touch the tips of the probes. When an object other than the measurement
target comes into contact with probes, they may be damaged.
• To avoid damaging the probes, always use the RM9004 Test Fixture in combination
with the RM9003 Press Unit. Use of the xture without the RM9003 Press Unit is
considered outside the scope of the product warranty.
IMPORTANT
• Always use the test xture case when storing or transporting the test xture.
• Electrode sheets that have been measured by the instrument cannot be used in production batteries due
to pressure marks left by the probes. Hioki is not liable for use of electrode sheets after measurement.
Operating Precautions
CAUTION
1
2
3
4
5
6
7
8
9
10
Index
7
Operating Precautions
HIOKI RM2612A961-02
8
1
HIOKI RM2612A961-02
Overview
1.1 Product Overview and Features
The product comprises an electrode resistance measurement system that measures the composite
layer volume resistivity and interface resistance of electrode sheets used in lithium-ion batteries. Its
principal applications are research, development, and quality control.
New indicators for LIB electrode sheets: Quantifying composite layer resistivity and
interface (contact) resistance
The product isolates and quanties composite layer resistivity and interface resistance for LIB electrode
sheets. This information can be used in the evaluation of batteries in R&D and quality control to speed up
the development process.
Easy-to-understand display and simple measurement method
Simply move the cursor to a parameter to display guidance such as an explanation of the parameter and
the applicable input range. Additionally, you can isolate and calculate composite layer resistance and
interface resistance simply by placing the probes in contact with the surface of an electrode sheet and
making measurements.
Improved work efciency (automatic start function)
The instrument detects when the probes make contact with the sample and starts measurement,
eliminating the need to click [Start]. (This function is disabled by default.)
High level of safety
To prevent malfunctions caused by unintended operation, the RM9003 Press Unit has a lock lever. Probes
can be raised and lowered by pulling the lock lever forward.
1
Overview
Easy maintenance
Probes can easily be inspected and cleaned since the system is designed so that the tips of the probes
can be rotated to face forward without removing the RM9004 Test Fixture from the RM9003 Press Unit.
1.2 Part Names and Functions
RM2610 Electrode Resistance Measurement System
RM2612 Resistance Calculation Software
RM9005 Connection Cable
RM9003 Press Unit,
RM9004 Test Fixture
RM2611 Electrode Resistance Meter
PC
9
Part Names and Functions
HIOKI RM2612A961-02
RM2611 Electrode Resistance Meter
CAUTION
Do not connect anything to the maintenance ports (labeled “6” and “7” in the gure
below). Connecting a cable to the maintenance ports could cause instrument
malfunction or damage.
(Front)
(Rear)
1
Keys
2
(Front)
(Rear)
3
4
10
(Do not use.)
(Do not use.)
(Do not use.)
2
5
6
7
8
9
10
11
Part Names and Functions
HIOKI RM2612A961-02
No.
1
2
3
4
5
6
7
8
9
10
11
Keys
Name Description See
Display Displays the error number.
Stand Tilts the RM2611 Electrode Resistance Meter so that the
instrument’s screen is easier to see.
Test xture connector Connect the RM9005 Connection Cable here.
Power inlet Connect the included power cord here.
Main power switch Turns the instrument on and off.
Maintenance port Not used.
Maintenance port Not used.
TEMP.SENSOR terminal Connect the included Z2001 Temperature Sensor here.
Serial number The 9-digit serial number indicates the year of manufacture (rst
two digits) and the month of manufacture (next two digits). Do not
remove this sticker as the number is important.
Fuse holder Holds the fuse that protects the measurement circuit. This is not a
customer-replaceable part. Please contact your authorized Hioki
distributor or reseller if you have an issue with the fuse.
USB port Connects the RM2611 Electrode Resistance Meter to a PC.
p. 114
–
p. 25
p. 26
p. 29
–
–
p. 28
–
–
p. 27
1
Overview
IMPORTANT
Do not operate the keys on the RM2611 Electrode Resistance Measure (excerpt for the standby key).
Do not use.
Do not use.
Name Description See
Standby key Toggles the RM2611 Electrode Resistance Meter’s standby state.
• No light: Power off (no power is being supplied)
• Glowing red: Standby state (power is being supplied)
• Glowing green: Power on
Standby key
p. 29
11
Part Names and Functions
HIOKI RM2612A961-02
RM9003 Press Unit
To avoid equipment damage, turn off the RM2611 Electrode Resistance Meter before
connecting or disconnecting the RM9005 Connection Cable.
IMPORTANT
• When connecting the RM9005 Connection Cable, insert the cable into the connector rmly and tighten it in
place with screws. If the screws loosen, the resulting poor contact could cause a measurement error.
• The device ships with the up/down lever locked with the lock release lever clamp knob. Loosen the knob
before using the device for the rst time.
CAUTION
1
7
8
9
13
(Rear)
11
(Front)
10
2
11
3
4
5
6
12
13
(Rear)
14
15
12
Part Names and Functions
HIOKI RM2612A961-02
No.
Up/down lever Raises and lowers the RM9004 Test Fixture.
1
Test xture clamp knob Rotates the RM9004 Test Fixture’s probe toward the front. (The
2
Test xture insertion rail Guides the RM9004 Test Fixture as it is inserted.
3
Test xture lock lever Clamps the RM9004 Test Fixture in place. p. 24
4
RM9004 Test Fixture Places the probe in contact with the electrode sheet and
5
Measurement stage Accommodates the electrode sheet under measurement.
6
Lock release lever Releases the RM9003 Press Unit’s up/down lever. When
7
Lock release lever clamp
8
knob
Lock disable pin When this pin is enabled, the RM9004 Test Fixture can be raised
9
Clamp Clamps the RM9005 Connection Cable.
10
Name Description See
knob is used when cleaning the RM9004 Test Fixture.)
measures the sheet.
lowering the RM9004 Test Fixture, pull the up/down lever towards
you while pulling the lock release lever. The lock will engage
automatically when the up/down lever is raised.
Tightening the lock release lever clamp knob locks the lock
release lever in place so that it cannot be moved. (When
transporting the product, tighten the lock release lever clamp
knob after placing the up/down lever in the raised position.)
and lowered using the up/down lever alone.
–
p. 118
p. 24
p. 118
p. 14
p. 45
p. 45
p. 45
p. 107
p. 46
p. 25
1
Overview
Serial number The 9-digit serial number indicates the year of manufacture (rst
11
two digits) and the month of manufacture (next two digits). Do not
remove this sticker as the number is important.
Shaft Supports the mechanism that moves the RM9004 Test Fixture up
12
and down. Do not touch as the shaft is coated with lubricating oil.
Grounding cable Connect the grounding cable to the RM9004 Test Fixture’s
13
ground terminal. It is recommended to connect the cable to the
terminal in order to facilitate stable measurement.
Maintenance plunger Locks the RM9004 Test Fixture in place. (The plunger is used
14
when cleaning the RM9004 Test Fixture.)
Graduated plate Indicates where to position electrode sheets. The probes will
15
make contact at the intersection of the thick graduated lines.
–
–
p. 24
p. 118
p. 45
13
Part Names and Functions
HIOKI RM2612A961-02
RM9004 Test Fixture
IMPORTANT
The RM9004 Test Fixture’s probes are consumable parts. They require periodic replacement but are not
customer-replaceable. Please contact your authorized Hioki distributor or reseller for more information.
It is recommended to purchase a spare RM9004 Test Fixture since the probe replacement process is timeconsuming.
Front and top of the RM9004 Test Fixture
1
(Top)
2
(Front)
No.
Mounting screws ×4 Hold the RM9004 Test Fixture and the test xture case together. When
1
Test xture case Used to store or transport the RM9004 Test Fixture.
2
Name Description
using the RM9004 Test Fixture, remove the mounting screw found at each
of the four corners on top of the xture and remove the RM9004 Test Fixture
from its case.
14
Bottom and rear of the RM9004 Test Fixture
HIOKI RM2612A961-02
Part Names and Functions
(Rear)
2
3
(Bottom)
5
No.
Connector Connect the RM9005 Connection Cable here.
1
Name Description See
1
4
p. 25
1
Overview
Ground terminal Connect the RM9003 Press Unit’s grounding cable here. It is
2
recommended to connect the cable to the terminal in order to
facilitate stable measurement.
Probe guard Protects the probes to prevent damage.
3
Serial number The 9-digit serial number indicates the year of manufacture (rst
4
two digits) and the month of manufacture (next two digits). Do not
remove this sticker as the number is important.
Probes Make contact with, and measure, the measurement target. The
5
probe layout is shown below.
p. 24
–
–
–
15
USB License Key and Screens (RM2612 Resistance Calculation Software)
HIOKI RM2612A961-02
1.3 USB License Key and Screens (RM2612 Resistance Calculation Software)
USB license key
CAUTION
Exercise care when using the USB license key because static electricity could damage
the USB license key or cause a malfunction of the product.
IMPORTANT
License authentication is performed when the RM2612 Resistance Calculation Software is launched and
when measurement is started. Do not remove the USB license key while the application is running.
Insert the USB license key into the PC’s USB port.
Model
Serial number
Main screen
The Main screen is used to enter measurement and calculation conditions, to start and stop
measurement, and to display analysis results.
16
USB License Key and Screens (RM2612 Resistance Calculation Software)
HIOKI RM2612A961-02
Settings screen
The Settings screen is used to congure detailed settings such as the operating mode and
measurement conditions.
1
Overview
17
USB License Key and Screens (RM2612 Resistance Calculation Software)
HIOKI RM2612A961-02
18
2
HIOKI RM2612A961-02
Carefully read the RM2610 Probe Maintenance Guide before use. The guide can be downloaded from
Hioki’s website. (Registration is required for downloading.)
https://www.hioki.com/global/support/download/guides?keyword=RM2610
Preparing for Measurement
2.1 Installing the RM2612 Resistance Calculation Software
IMPORTANT
• Install the RM2612 Resistance Calculation Software before connecting the RM2611 Electrode Resistance
Meter to the PC with a USB cable. If you have already connected a USB cable, remove the cable and
install the software.
• If you have Internet connectivity and can download les, the RM2612 Resistance Calculation Software’s
PC application can be updated. For more information, see “9.2 Updating the Software” (p. 110).
Installation conrmation items and precautions
What the RM2612 Resistance Calculation Software includes
• Dedicated Hioki USB driver
• RM2612 Resistance Calculation Software: setup_RM2612App_v(version number)*.exe
* The version number enclosed in the parentheses indicates the software version number.
System requirements (recommended)
Operating system Windows 7 pro (32-bit/64-bit)
Windows 8 pro (32-bit/64-bit)
Windows 10 pro (32-bit/64-bit)
CPU 4 threads or better
Memory 8 GB or better recommended (4 GB of available RAM required)
Display 1,024 × 768 or better
HDD At least 2 GB of available space
Interface USB 2.0 or better
2
Preparing for Measurement
Measurement times vary with the measurement target and PC processing capacity.
Reference: Calculation time is about 35 s for a PC with an Intel Core i5-7200U. (Time varies with
the measurement target.)
19
Installing the RM2612 Resistance Calculation Software
HIOKI RM2612A961-02
Installation procedure
Install all of the following:
• Microsoft .NET Framework 4.8 or later
• USB driver
• RM2612 Resistance Calculation Software
Installing Microsoft .NET Framework 4.8
Download and install the Microsoft .NET Framework from the Microsoft® website (see URL below)
(download the runtime version). If Microsoft .NET Framework 4.8 has already been installed on
your PC, proceed to “Installing the USB driver.”
https://dotnet.microsoft.com/download/dotnet-framework/net48
For more information about how to install Microsoft .NET Framework 4.8, see the Microsoft®
website.
20
Installing the RM2612 Resistance Calculation Software
HIOKI RM2612A961-02
Installing the USB driver
A dedicated USB driver is required in order to connect the RM2611 Electrode Resistance Meter
to a PC for the rst time. The following procedure can be skipped if the dedicated USB driver has
already been installed on your PC. The USB driver can be found on the RM2612 Resistance
Calculation Software’s PC application CD or downloaded from the Hioki website (http://www.hioki.
com/en/). Do not connect the RM2611 Electrode Resistance Meter to your PC until the installation
of the USB driver is complete.
Log in to the PC with administrative privileges, for example as “administrator.”
1
Exit all applications running on the PC.
2
Double-click X:\driver\HiokiUsbCdcDriver.msi (where “X” indicates the CD-ROM drive) on
3
the RM2612 Resistance Calculation Software’s installation disc or the [HiokiUsbCdcDriver]
le you downloaded from the website.
2
Preparing for Measurement
The installer will launch. Follow the instructions on the screen to install the driver.
4
It may take some time for the dialog box to display depending on the PC and its settings.
Connect the RM2611 Electrode Resistance Meter to the PC with a USB cable.
5
The RM2611 Electrode Resistance Meter will be recognized automatically.
Uninstalling the USB driver
Uninstall the driver if you no longer need it.
Choose [Start] button-[Control Panels]-[Uninstall Programs].
1
Right-click [HIOKI USB CDC Driver].
2
3
Click [Uninstall] on the shortcut menu.
21
Installing the RM2612 Resistance Calculation Software
HIOKI RM2612A961-02
Installing the RM2612 Resistance Calculation Software
Log in to the PC with administrative
1
privileges, for example as “administrator.”
Exit all applications running on the PC.
2
Double-click on [setup_RM2612App_
3
v (version number).exe] on the RM2612
Resistance Calculation Software’s PC
application CD.
Choose a language and click [OK].
4
Click [Next].
5
The setup wizard will launch.
Specify the installation folder and click
6
[Next].
Specify where to create the program icon
7
and click [Next].
22
Installing the RM2612 Resistance Calculation Software
HIOKI RM2612A961-02
Choose [Create a desktop icon] and click
8
[Next].
Review the settings and click [Install].
9
The installation will continue.
2
Preparing for Measurement
Click [Finish].
10
An icon will be created on the desktop.
Installation is complete
IMPORTANT
The RM2612 Resistance Calculation Software will not
launch without a USB license key (p. 30).
Uninstalling the RM2612 Resistance Calculation Software
Uninstall the RM2612 Resistance Calculation Software if you no longer need it.
Choose [Start] button-[Control Panels]-[Uninstall Programs].
1
2
3
Right-click [RM2612App Version X.XX.XX].
Click [Uninstall] on the shortcut menu.
23
Mounting the RM9004 Test Fixture on the RM9003 Press Unit
HIOKI RM2612A961-02
2.2 Mounting the RM9004 Test Fixture on the RM9003 Press Unit
IMPORTANT
Exercise care not to lose the test xture case’s mounting screws, which you will need in order to store the
RM9004 Test Fixture during transport.
Preparations
Remove the four mounting screws from the top of the
RM9004 Test Fixture and remove the test xture from the
test xture case.
3
Test xture lock lever
2
1
Assembly
Place the RM9003 Press Unit’s up/down
1
lever in the raised position.
Orienting the connector side of the
2
RM9004 Test Fixture so that it’s facing
the rear, slide the test xture into position
along the RM9003 Press Unit’s test xture
insertion rails.
Push the test xture toward the rear until it won’t
go any further.
Pull the test xture lock lever toward you
3
and downward and then let go.
The RM9004 Test Fixture will lock in place.
Connect the grounding cable on the rear
4
of the RM9003 Press Unit to the ground
terminal on the RM9004 Test Fixture.
4
24
Connecting the RM9005 Connection Cable
HIOKI RM2612A961-02
2.3 Connecting the RM9005 Connection Cable
CAUTION
To avoid damaging the cable, connect and disconnect the RM9005 Connection Cable
only after turning off the RM2611 Electrode Resistance Meter.
IMPORTANT
When connecting the RM9005 Connection Cable, tighten the screws after securely inserting the connector.
Loose screws could result in incomplete contact, causing measurement errors.
Verify that the RM2611 Electrode
1
Resistance Meter’s main power switch (on
the rear of the instrument) is in the OFF (○)
position.
Connect the male side connector of the
2
RM9005 Connection Cable to the test
xture connector on the RM2611 Electrode
2
1
Resistance Meter and tighten the screws
that hold it in place.
2
Preparing for Measurement
Connect the female side connector of
3
the RM9005 Connection Cable to the
connector on the RM9004 Test Fixture and
screws that hold it in place.
Secure the RM9005 Connection Cable in
4
place with the cable clamp.
There are screws for attaching the cable clamp on
the left and right sides of the RM9003 Press Unit.
Choose the appropriate side based on the position
of the device.
4
3
25
Connecting the RM2611 Electrode Resistance Meter’s Power Cord
HIOKI RM2612A961-02
2.4 Connecting the RM2611 Electrode Resistance Meter’s Power Cord
Verify that the RM2611 Electrode
1
Resistance Meter’s main power switch (on
the rear of the instrument) is in the OFF (○)
position.
Verify that the outlet provides the correct
2
supply voltage and connect the power
cord to the power inlet on the instrument.
Insert the power cord’s male plug into the
3
2
outlet.
1
If power is interrupted while the
instrument is turned on (for example, by
tripping a circuit breaker), the instrument
will start up the next time power is
supplied even if the standby key is not
pressed.
26
Connecting the RM2611 Electrode Resistance Meter to a PC with a USB Cable
HIOKI RM2612A961-02
2.5 Connecting the RM2611 Electrode Resistance Meter to a PC with a USB Cable
CAUTION
• Before connecting the USB cable to the PC, be sure that you have installed the
RM2612 Resistance Calculation Software. Installing the RM2612 Resistance
Calculation Software after connecting the instrument to a PC with the USB cable will
cause the instrument to malfunction or damage it.
• To avoid damage, do not disconnect the USB cable while the instrument is sending or
receiving data.
• Use the same ground for the RM2611 Electrode Resistance Meter and the PC. If
different ground circuits are used, there will be a potential difference between the
RM2611 Electrode Resistance Meter ground and the PC ground. Connecting the USB
cable while such a potential difference exists will cause the instrument to malfunction
or damage it.
2
Preparing for Measurement
Verify that the RM2611 Electrode
1
Resistance Meter’s main power switch (on
the rear of the instrument) is in the OFF (○)
position.
Connect the USB cable to the USB port
2
on the rear of the RM2611 Electrode
Resistance Meter.
Connect the USB cable to a USB port on
3
the PC.
1
2
27
Connecting the Z2001 Temperature Sensor
HIOKI RM2612A961-02
2.6 Connecting the Z2001 Temperature Sensor
Connecting the Z2001 Temperature Sensor to the RM2611 Electrode
Resistance Meter
When connecting the Z2001 Temperature Sensor to the RM2611 Electrode Resistance Meter,
insert the connector rmly as far as it will go.
Verify that the RM2611 Electrode
1
Resistance Meter’s main power switch (on
the rear of the instrument) is in the OFF (○)
position.
Connect the Z2001 Temperature Sensor to
2
the TEMP.SENSOR terminal on the rear of
the RM2611 Electrode Resistance Meter.
1
2
Connecting the Z2001 Temperature Sensor to the RM9003 Press Unit
Remove the temperature sensor mounting
1
screw on the RM9003 Press Unit.
Insert the Z2001 Temperature Sensor into
2
the temperature sensor mounting clamp
on the RM9003 Press Unit.
(Insert the wire until the base of the
sensor unit protrudes about 1 cm past the
1 2 3
1 cm
clamp.)
Tighten the screw on the RM9003 Press
3
Unit’s temperature sensor mounting
clamp.
28
Turning the RM2611 Electrode Resistance Meter On and Off
HIOKI RM2612A961-02
2.7 Turning the RM2611 Electrode Resistance Meter On and Off
Turning the main power switch on and off
Place the RM2611 Electrode Resistance Meter’s main
power switch (on the rear of the instrument) in the
ON
OFF
ON (|) or OFF (○) position.
When the main power switch is turned on, the instrument
will enter the standby state with the same settings as
when the main power switch was turned off the last time.
2
Preparing for Measurement
Entering and exiting the standby state
Press the standby key.
(Exit the standby state when starting measurement.)
Standby on
(red)
Standby off
(green)
When the instrument enters the standby state, the
standby key will glow red.
When the instrument exits the standby state, the standby
key will glow green.
29
Launching the RM2612 Resistance Calculation Software
HIOKI RM2612A961-02
2.8 Launching the RM2612 Resistance Calculation Software
IMPORTANT
The RM2612 Resistance Calculation Software will not launch if the USB license key has not been inserted.
Insert the USB license key into a USB port on the PC on which you wish to launch the
1
RM2612 Resistance Calculation Software.
Double-click the icon created when you installed the software as described in “Installing
2
the RM2612 Resistance Calculation Software” (p. 22).
30
Launching the RM2612 Resistance Calculation Software
HIOKI RM2612A961-02
Verify the connection between the RM2611 Electrode Resistance Meter and the PC
1
2
3
Choose [Settings].
1
Choose [System].
2
Verify that [Communications settings] shows [(COMxx) HIOKI USB Device [RM2611]].
3
If the [Communications settings] eld is blank, the RM2611 Electrode Resistance Meter is
not properly connected. Check the following items.
2
Preparing for Measurement
If you are unable to establish a connection
• Have you turned on the RM2611 Electrode Resistance Meter? (p. 29)
If the RM2611 Electrode Resistance Meter has not been turned on, nothing will be displayed in
the [Communications settings] eld.
• Have you connected the RM2611 Electrode Resistance Meter to the PC with a USB cable?
(p. 27)
If the instrument has not been connected to the PC with a USB cable, nothing will be displayed
in the [Communications settings] eld.
• Have you installed the dedicated Hioki USB driver? (p. 19)
If the USB driver has not been installed, nothing will be displayed in the [Communications
settings] eld.
To update the contents of the [Communications settings] eld, close and reopen the [Settings]
dialog box.
31
Pre-use Inspection
HIOKI RM2612A961-02
2.9 Pre-use Inspection
To ensure that the system is operating properly, conduct an inspection and check instrument
operation to ensure that no damage has occurred during storage or transport.
(To complete the OPEN and SHORT inspections, use the probe check board that came with the
RM9004 Test Fixture.)
CAUTION
Wipe the probe check board’s gold-plated conductive surface clean with a cloth that has
been slightly moistened with alcohol prior to use.
Do not move the probe inspection board while the inspection is in progress. Doing so
could damage the probes.
Has the instrument been damaged? If so, have it repaired.
Is the insulation on the power cord or
connection cords torn, or is any metal
exposed?
When you turn on the RM2611 Electrode
Resistance Meter, is the HIOKI logo
displayed on the screen?
Has the instrument been properly
connected?
Did you perform SHORT inspection?
Cord damage could result in electric shock. Do not use
the instrument. Replace the damaged cord with an
undamaged cord.
If the HIOKI logo is not displayed on the screen, there
may be a wiring break in the power cord or internal
damage in the RM2611 Electrode Resistance Meter.
Have the instrument repaired.
Verify that all equipment has been properly connected.
• “Mounting the RM9004 Test Fixture on the RM9003
Press Unit” (p. 24)
• “Connecting the RM9005 Connection Cable” (p. 25)
• “Connecting the RM2611 Electrode Resistance Meter’s
Power Cord” (p. 26)
• “Connecting the RM2611 Electrode Resistance Meter
to a PC with a USB Cable” (p. 27)
• “Connecting the Z2001 Temperature Sensor” (p. 28)
Verify continuity between the probes, RM2611 Electrode
Resistance Meter, and measurement target (p. 33).
Once continuity of all probes has been veried, the
[Pass.] dialog box will be displayed.
If any continuity issues are found, the [Abnormal
contact resistance.] or [Abnormal potential
distribution.] dialog box will be displayed. If you see
frequent errors after changing the measurement location
and verifying continuity again, probes may be suffering
incomplete contact. Take the following steps:
• Use the error rejection function (p. 53)
• Clean the tips of the probes with air (p. 118)
• Replace the probes
32
Did you perform OPEN inspection?
Verify that the probes are isolated from each other
(p. 34).
Once all probes are conrmed to be isolated, the [Pass.]
] dialog box will be displayed.
If the [Abnormal insulation resistance.] dialog box is
displayed, there may be an insulation defect (continuity)
between probes. Clean the tips of the probes with air
(p. 118) and repeat the OPEN inspection.
SHORT inspection method
HIOKI RM2612A961-02
Pre-use Inspection
Probe check
board
4
Up/down lever
1
Gold-plated conductive surface
2
Lock release lever
4
Lock release lever
3
clamp knob
You will need: The probe check board
Verify that the up/down lever is in the
1
raised position.
Place the probe check board’s gold-
2
plated conductive surface (the board
came with the RM9004 Test Fixture) on the
measurement stage.
The probes make contact with the bold graduated
marks on the graduated plate. Position the probe
check board so that the probes will make contact
with the center of the gold-plated conductive
surface.
Verify that the clamp knob on the lock
3
release lever is loose.
Pull the up/down lever toward you and
4
down while pulling the lock release lever
toward you.
The RM9004 Test Fixture will move downward
under its own weight.
Verify that the RM9004 Test Fixture is fully
5
lowered.
2
Preparing for Measurement
5
Choose [Check] on the RM2612 Resistance
6
Calculation Software screen.
Choose [RM9004].
7
Choose [SHORT] to perform the SHORT
8
inspection. (The [Pass.] dialog box will be
displayed if the continuity of all probes is
veried.)
If any continuity issues are found, the [Abnormal contact
resistance.] or [Abnormal potential distribution.] dialog
box will be displayed. If you see frequent errors after
changing the measurement location and verifying continuity
again, the probe may be suffering incomplete contact. Take
the following steps:
• Use the error rejection function (p. 53)
• Clean the tips of the probes with air (p. 118)
• Replace the probes
Once the inspection is complete, raise the
9
up/down lever.
After verifying that the RM9004 Test Fixture
10
is fully raised, remove the probe check
board from the measurement stage.
33
Pre-use Inspection
HIOKI RM2612A961-02
OPEN inspection method
Probe check
board
4
Up/down lever
1
Non-conductive surface
2
Lock release lever
4
Lock release lever
3
clamp knob
You will need: The probe check board
Verify that the up/down lever is in the
1
raised position.
Place the probe check board’s non-
2
conductive surface (the board came
with the RM9004 Test Fixture) on the
measurement stage.
The probes make contact with the bold graduated
marks on the graduated plate. Position the probe
check board so that the probes will make contact
with the center of the non-conductive surface.
Verify that the clamp knob on the lock
3
release lever is loose.
Pull the up/down lever toward you and
4
down while pulling the lock release lever
toward you.
The RM9004 Test Fixture will move downward
under its own weight.
Verify that the RM9004 Test Fixture is fully
5
lowered.
5
Choose [Check] on the RM2612 Resistance
6
Calculation Software screen.
Choose [RM9004].
7
Choose [OPEN] to perform the OPEN
8
inspection. (The [Pass.] dialog box will be
displayed if the isolated state of all probes
is veried.)
If the [Abnormal insulation resistance.] dialog box is
displayed, there may be an insulation defect (continuity)
between probes. Clean the tips of the probes with air
(p. 118) and repeat the OPEN inspection.
Once the inspection is complete, raise the
9
up/down lever.
After verifying that the RM9004 Test Fixture
10
is fully raised, remove the probe check
board from the measurement stage.
34
3
HIOKI RM2612A961-02
Basic Measurement
3.1 Setting the Operating Mode
1
2
3
3
Basic Measurement
4
Choose [Settings].
1
Choose [Measurement].
2
Choose the [Mode] from the following options:
3
Meas.+Analysis
Meas. Perform potential measurement and save the results to a le. One
Analysis Load a potential measurement le, performs analysis, and save
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
4
main screen.)
Perform potential measurement and analysis and save the results to
a le.
le will be created for each measurement.
the results to a le. Multiple potential analysis les can be specied
together.
35
Setting the Operating Mode
HIOKI RM2612A961-02
About operating modes
Start of measurement End of measurement
You can choose the operating mode in order to streamline measurement work. When measuring a
small number of electrode sheets, it is recommended to set the mode to [Meas.+Analysis] so that
potential measurement and analysis are performed for each sheet.
When measuring multiple electrode sheets, efciency suffers as the analysis step in
[Meas.+Analysis] results in wait times. By choosing either [Meas.] or [Analysis] as the mode,
you can use the time it takes for analysis results to be generated more effectively by grouping
together analysis of multiple boards, boosting work efciency.
This section describes the workow when measuring multiple electrode sheets.
IMPORTANT
Each mode has its own [File output] setting. Before clicking [Start], check the [File output]
settings.
Potential measurement Analysis
Meas. Analysis
Meas. + Analysis
1
6
8
2, 7
3, 9
Choose [Meas.] under [Mode].
1
Click [OK] to accept the settings.
2
Place an electrode sheet in the RM9003 Press Unit and click [Start] to
3
perform potential measurement (p. 45).
A potential le for analysis use with a lename created by appending a time
4
stamp to the lename as set in [Path (Analysis results)] will be output. (One
Potential measurement
le will be output for each measurement.)
Repeat the measurement step for each sheet (Step 3).
5
36
6
7
8
9
Analysis
Choose [Analysis] under [Mode].
Click [OK] to accept the settings.
Select [Analysis result] under [File output].
Click [Start] to display a le selection dialog box. Select multiple les output
during [Meas.] operation and click [Open]. (Analysis will be performed one
le at a time, and analysis results will be appended to the analysis results
le.)
3.2 Setting the Resistance Range
HIOKI RM2612A961-02
Setting the Resistance Range
3
Basic Measurement
To indicate that potential measurement results obtained using the 10 MΩ range are merely values for
reference purposes, values of the composite layer volume resistivity and interface resistance appear dimmed.
Auto range
Resistance range When [Auto range] is disabled, allows you to select the resistance
Choosing the range
Although [Auto range] selects the optimal resistance range automatically, measurement will take
more time than when the resistance range has been selected.
When measuring multiple electrode sheets with the same resistance value, perform the rst
measurement using [Auto range] and then choose the resistance range that was used by the [Auto
range] function to perform the second and subsequent measurements in order to save time.
Change the setting as necessary.
• Select [Auto range].
Start of measurement End of measurement
Potential measurement Analysis
Select the optimal resistance range automatically (recommended).
range you wish to use. The measurement current (output current) is
displayed next to the resistance range.
1000 m
, 10 Ω, 100 Ω, 1000 Ω, 10 kΩ, 100 kΩ, 1000 kΩ, 10 M
Ω
*Potential measurement results obtained using the 10 MΩ range
are merely values for reference purposes.
*
Ω
Contact
check
• Choose a resistance range.
Start of measurement End of measurement
Potential measurement Analysis
Contact
check
The potential measurement using the 10 M
time is needed.
Auto range
Measurement
Measurement
range requires a longer time because the delay
Ω
37
Conguring the Contact Check Function
HIOKI RM2612A961-02
3.3 Conguring the Contact Check Function
The contact check function measures the contact resistance of the measurement target and probes
before measurement to detect probe contact errors and prevent decreased reliability of measured
values due to incomplete probe contact. The function can identify pins with incomplete contact and
prevent measurement errors.
1
2
3
4
5
Choose [Settings].
1
Choose [Measurement].
2
Choose one of the following settings for [Contact check]:
3
ON
OFF Disable the contact check function. (Skip step 4 below.)
Enter the error data threshold at which to stop measurement in the [Threshold] eld.
4
Initial value Valid setting range
2.000E+04 1
Enable the contact check function.
to 10 M
Ω
Ω
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
5
main screen.)
38
Conguring the Contact Check Function
HIOKI RM2612A961-02
Using the contact check function
The contact check function improves the accuracy of potential measurement by detecting
incomplete probe contact. Ordinarily you should enable the function, although you can shorten
measurement times by disabling it. Change the setting as necessary.
• Enable the contact check function.
Start of measurement End of measurement
Potential measurement Analysis
Contact
check
• Disable the contact check function.
Start of measurement End of measurement
Potential measurement Analysis
Auto range
Auto range
Measurement
Measurement
3
Basic Measurement
39
Saving Contact Check Results
HIOKI RM2612A961-02
3.4 Saving Contact Check Results
Contact check results can be output to a le. The lename is generated by adding “CC_” to the
beginning of the lename set as the analysis results path. Results will be appended to the le if
the name of an existing le is entered as the analysis results path. For more information about the
output format, see “7.3 Output File Formats” (p. 85).
1
2
3
4
Choose [Settings].
1
Choose [File].
2
Choose one of the following settings for [Contact check results]:
3
ON Save contact check results.
OFF
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
4
main screen.)
Do not save contact check results.
40
Entering Electrode Sheet Information
HIOKI RM2612A961-02
3.5 Entering Electrode Sheet Information
In order to calculate electrode resistance, you will need to enter information about the electrode
sheet being measured. Analysis cannot be performed without this information.
IMPORTANT
If the operating mode is set to [Analysis], the electrode sheet information stored in the specied potential
data for analysis le will be used instead of the electrode sheet information on the screen.
1
2
3
4
Enter the composite layer thickness in the [Composite layer thick. [μm]] eld.
1
Valid setting range Initial value Format
0.0001 μm to 1000 μm 50 Decimal or exponential with 5 signicant digits
Enter the collector layer thickness in the [Collector layer thick. [μm]] eld.
2
3
Basic Measurement
3
Valid setting range Initial value Format
0.0001 μm to 1000 μm 20 Decimal or exponential with 5 signicant digits
Enter the collector resistivity in the [Collector resistivity [Ωcm]] eld.
Valid setting range Initial value Format
1.0000E-10 to 1.0000E+5 2.7000E-06* Decimal or exponential with 5 signicant digits
*Volume resistivity of aluminum
Volume resistivity (reference values)
You can choose between aluminum and copper from the pull-down menu.
Aluminum 2.7000E-06
Copper 1.7000E-06
41
Entering Electrode Sheet Information
HIOKI RM2612A961-02
Enter a comment if desired in the [Comment] eld (up to 30 characters).
4
The comment entered here will be added to the output le. Please note that commas (“,”)
and semicolons (“;”) cannot be entered in this eld.
42
Saving Measured Values
HIOKI RM2612A961-02
3.6 Saving Measured Values
Measurement results and potential distribution data for analysis are saved in the CSV format. If
you choose the data you wish to output before measurement, a CSV le will be created when
measurement ends.
IMPORTANT
Measurement results will not be saved if you do not choose which data to output. The available settings for
[File output] vary with the operating mode, so check which types of data are available before clicking [Start].
3
Basic Measurement
3
4
1
2
Choose the type(s) of data you wish to output under [File output] (choose the data you wish
1
to output to a le).
You can choose multiple types of data.
Analysis result Save composite layer resistivity, interface resistance results, and
measurement conditions. For more information about output file
formats, see “7.3 Output File Formats” (p. 85).
Potential data for analysis Save potential measurement results. The data can then be used in
[Analysis] operating mode (p. 35).
Specify the name of the le to which you wish to save the measurement results and click
2
[Browse].
Specify a folder and le for each data type. Be sure to specify a lename as well as a folder.
For more information about output le formats, see “7.3 Output File Formats” (p. 85).
3
4
Path (analysis results) If you specify the name of an existing file, measurement results will
be appended to the file. If you specify the name of a new file, the file
will be created.
Path (potential data for
analysis)
Enter the name of the lename you wish to use.
Click [Open] to save the lename.
Generate one le for each potential measurement performed. A time
stamp is appended to each lename so that you can differentiate
among results.
43
Saving Measured Values
HIOKI RM2612A961-02
Saving the current measurement results
Even if you did not choose data to save under [File output] before measurement, you can save the
last analysis results and potential distribution data for analysis as a CSV le by choosing [Save le]
on the [File] menu and choosing [Analysis results] or [Potential data for analysis]. The data will
be saved to the lename set with the [Path (analysis results)] eld.
IMPORTANT
If using this functionality to save analysis results or potential data for analysis, be sure to choose [Save le]
before changing settings or electrode sheet information.
44
Loading an Electrode Sheet into the RM9003 Press Unit
HIOKI RM2612A961-02
3.7 Loading an Electrode Sheet into the RM9003 Press Unit
CAUTION
Do not move the electrode sheet if the RM9004 Test Fixture is in contact with it. Doing
so may damage the probes.
Start measurement after verifying that the RM9004 Test Fixture is in contact with the
electrode sheet. Measurement cannot be performed if the RM9004 Test Fixture is not in
contact with the electrode sheet.
IMPORTANT
Exercise caution not to pinch your ngers or other body parts when lowering the RM9004 Test Fixture.
1
2
Lock release lever
4
Verify that the up/down lever is in the
1
raised position.
Place an electrode sheet on the
2
measurement stage.
The probes will make contact with the bold
graduated marks on the graduated plate.
Verify that the clamp knob on the lock
3
release lever is loose.
3
Basic Measurement
4
5
Up/down lever
Lock release lever
3
clamp knob
Pull the up/down lever toward you and
4
down while pulling the lock release lever
toward you.
The RM9004 Test Fixture will move downward
under its own weight.
Start measurement once the RM9004 Test
5
Fixture is fully lowered. (p. 47)
Once measurement completes, raise the
6
up/down lever.
Remove the electrode sheet from the
7
measurement stage after verifying that the
RM9004 Test Fixture is fully raised.
45
Loading an Electrode Sheet into the RM9003 Press Unit
HIOKI RM2612A961-02
Operating the RM9004 Test Fixture using only the up/down lever
(disabling the lock release lever)
IMPORTANT
When the lock release lever is disabled, the RM9004 Test Fixture can be raised and lowered using only the
up/down lever. Exercise care not to pinch your ngers or other body parts by unintentionally lowering the
RM9004 Test Fixture.
1
2
Verify that the up/down lever is in the
1
raised position.
Move the lock disable pin toward the
2
inside while pulling the lock release lever
toward you.
The lock release lever will be disabled, allowing
the RM9004 Test Fixture to be raised and lowered
using only the up/down lever.
To reenable the lock release lever, perform this
procedure in reverse to return the pin to its original
position.
46
3.8 Starting Measurement
HIOKI RM2612A961-02
IMPORTANT
• Allow the instrument to warm up for at least 60 minutes to ensure measurement accuracy.
• Do not touch the RM9004 Test Fixture or other system components during measurement.
Starting Measurement
3
Basic Measurement
Start Starts measurement.
Abort Aborts measurement.
Repeat analysis Uses the potential measurement results from the last measurement
to repeat analysis. Use this function if you entered an incorrect value
for the composite layer thickness or if you wish to repeat analysis
after increasing the limit iteration number or decreasing the reduction
factor after analysis has generated an error.
Counter function
The RM2612 Resistance Calculation Software provides functionality for counting the number of
measurements the instrument has performed. This information is output to the analysis results le
and potential distribution data for analysis le as a rough indicator of the number of measurements
performed by the RM9004 Test Fixture. See “7.3 Output File Formats” (p. 85).
47
Checking Measurement Results
HIOKI RM2612A961-02
3.9 Checking Measurement Results
Once potential measurement and analysis have completed normally, the measurement results will
be displayed.
IMPORTANT
If the error rejection function is enabled, measured values will be shown in red if error data has been
rejected.
Composite volume resistivity Indicates the calculated layer resistivity. You can choose between
volume resistivity and surface resistivity in the settings.
Interface resistance Indicates the calculated interface resistance.
Temperature Indicates the temperature near the RM9004 Test Fixture as measured
by the RM2611 Electrode Resistance Meter. The temperature when
potential measurement was completed is shown.
48
Pin contact
HIOKI RM2612A961-02
Result Indicates FAIL if there was a contact error or PASS if there was no
Error count Indicates the number of probes exhibiting a contact error.
Potential meas. reliability
Consistency Indicates PASS if the relative magnitudes of the potential
Error rate [%] Indicates how many potential measurement results generated
Checking Measurement Results
contact error.
measurement results suggest the proper potential gradient near the
center. Indicates FAIL if the proper relationship is not observed, in
which case operation will not proceed to analysis.
measurement errors as a percentage of all potential measurement
results. (This value is not the same as the number of probes
generating contact errors.)
Variation [%] If multiple potential measurements were performed, indicates the
amount of variation among potential results (i.e., the coefcient of
variability) as a percentage.
Analysis results
Iteration number Indicates the number of iterative analyses performed, calculated as
the number of iterations divided by the limit iteration number.
Coincidence Indicates the extent to which the measured potential distribution
matches the calculated potential distribution. A value of 1.000
indicates a perfect match, while smaller values indicate a less perfect
match. (Negative values are possible.)
History Displays the measurement history. New results are appended to
the history as they are obtained. When analysis is performed, the
history displays the composite layer resistivity, interface resistance,
and temperature. If the operating mode is set to [Meas.], only the
temperature [°C] will be shown.
3
Basic Measurement
49
Checking Measurement Results
HIOKI RM2612A961-02
50
Customizing Measurement
HIOKI RM2612A961-02
4
Conditions
4.1 Choosing the Measurement Speed
You can choose the measurement speed from four options: FAST, MEDIUM, SLOW1, and SLOW2.
1
2
4
3
4
Choose [Settings].
1
Choose [Measurement].
2
Choose one of the following settings for [Speed]:
3
FAST The measurement speed can be set to any of the following four
MEDIUM
SLOW1
SLOW2
values: FAST, MEDIUM, SLOW1, and SLOW2. MEDIUM, SLOW1,
and SLOW2 have increased measurement precision compared
to FAST, making measurements less susceptible to the effects of
the external environment. However, those settings result in longer
measurement times than FAST.
Customizing Measurement Conditions
4
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
main screen.)
51
Auto Start Function
HIOKI RM2612A961-02
4.2 Auto Start Function
The auto start function allows you to start measurement automatically when the probes make
contact with an electrode sheet. Since measurement starts without requiring you to click [Start],
this function is convenient when you need to measure multiple electrode sheets in a row. You
can set the time (delay time) allowed to elapse from the time the probes make contact with the
electrode sheet until measurement begins.
1
2
3
4
5
6
Choose [Settings].
1
Choose [Measurement].
2
Choose one of the following settings for [Auto start]:
3
ON When you click [Start], measurement will start once the time entered
in the [Delay time [ms]] eld has elapsed after the probes make
contact with the measurement target. (If you encounter numerous
contact errors, try increasing the delay time.)
OFF
Require user operation to start measurement. (Skip step 4 below.)
Enter the time to allow to elapse before measurement starts in the [Delay time [ms]] eld (0
4
ms to 2000 ms).
Click [OK] to accept the settings. (Clicking [OK] will cause you to return to the main screen.)
5
Click [Start] on the main screen.
6
The instrument will begin monitoring the state of probe contact. Once the probes make
contact with the electrode sheet, it will start measurement once the [Delay time [ms]] has
elapsed. Once measurement is complete, the instrument will verify that probes are in the
open state and then begin monitoring the contact state again.
52
Rejecting Error Data during Measurement (Error Data Rejection Function)
HIOKI RM2612A961-02
4.3 Rejecting Error Data during Measurement (Error Data Rejection Function)
You can reject error data during measurement. Measurement will continue until a set threshold is
exceeded, even if current errors, over-range errors, or contact errors are encountered.
Rejected error data
• Data with current errors
• Current channel data with a consistency result of FAIL
• Potential data from probes with contact errors
1
4
2
3
4
5
Choose [Settings].
1
Choose [Measurement].
2
Choose one of the following settings for [Error data rejection]:
3
ON Reject error data.
Customizing Measurement Conditions
OFF
Do not reject error data. (Skip step 4 below.) Potential measurement
will stop if a single probe generates a contact error or if a single
potential measurement step generates an error.
53
Rejecting Error Data during Measurement (Error Data Rejection Function)
HIOKI RM2612A961-02
Enter the error data threshold at which you wish to stop measurement in the [Tolerance [%]]
4
eld.
Valid setting range Initial value Format
0.1 to 100.0 20.0 1 signicant decimal digit (0.0)
Threshold (reference)
Potential measurement will stop when an error exceeding the tolerance occurs. The tolerance is
set as a percentage, and the initial setting is 20%. It is recommended to use a setting of 10% to 20%.
Use of a larger tolerance will increase tolerance for errors, but doing so will increase uncertainty in
measurement results.
Tolerance [%]:
Potential measurement uses a large number of probes and involves multiple measurements. The
error rate [%] is dened as the ratio of the number of measurements in which the instrument was
unable to measure potential, for example due to a contact error or measurement error, to the
total number of measurements, and tolerance [%] is dened as the amount of tolerance to exhibit
relative to the error rate [%]. If all measurements were completed normally, the error rate would
be 0%, while if all measurements failed, the error rate would be 100%. Determine the tolerance
based on the electrode sheet being measured.
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
5
main screen.)
54
Choosing the Unit for Composite Layer Resistance
HIOKI RM2612A961-02
4.4 Choosing the Unit for Composite Layer Resistance
You can set the unit used to measure composite layer resistance to either Volume resistivity [
cm
or Surface resistivity [
Ω
^2
].
1
2
3
Ω
cm]
4
Customizing Measurement Conditions
4
Choose [Settings].
1
Choose [Measurement].
2
Choose one of the following settings for [Composite layer unit]:
3
Volume resistivity [Ωcm]
Surface resistivity [
Comparing the interface resistance [Ωcm2] and resistance (p. 99, p. 100)
Formula:
Composite layer volume resistivity [
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
4
main screen.)
Both the composite layer volume resistivity [
output to the analysis results le.
cm^2] Output the composite layer resistivity as surface resistivity [
Ω
Output the composite layer resistivity as volume resistivity [
Use this setting when calculating material properties.
Use this setting when comparing the interface resistance [
resistance.
cm] × composite layer thickness [cm]
Ω
Ω
cm] and surface resistivity [Ωcm2] will be
cm].
Ω
cm2].
Ω
cm2] and
Ω
55
Setting the Limit Iteration Number
HIOKI RM2612A961-02
4.5 Setting the Limit Iteration Number
This section describes how to set the limit on how many times analysis is performed.
1
2
3
4
Choose [Settings].
1
Choose [Analysis].
2
Enter the upper limit for iterative calculations in the [Limit iteration number] eld.
3
Valid setting range Initial value Format
1 to 999 30 3-digit integer (000)
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
4
main screen.)
What is the limit iteration number?
Set the [Limit iteration number] eld to the maximum number of times to perform calculations
before ending analysis. The instrument performs calculations repeatedly until the results converge,
at which point it ends measurement and displays measured values. Ordinarily the initial value can
be used, although the setting can be changed as necessary.
Start of measurement End of measurement
Potential measurement Analysis
56
Contact
check
Auto range
Iteration
Measurement
Setting the Reduction Factor
HIOKI RM2612A961-02
4.6 Setting the Reduction Factor
You can set the magnitude of the correction applied during iterative calculation of interface
resistance (i.e., the reduction factor) to a value from 0.0001 to 1.0000.
1
2
4
3
4
Choose [Settings].
1
Choose [Analysis].
2
Enter the desired value in the [Reduction factor] eld.
3
Valid setting range Initial value Format
0.0001 to 1.0000 1.0000 Decimal with 4 signicant digits to the right of
the decimal point (0.0000)
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
4
main screen.)
Customizing Measurement Conditions
What is the reduction factor?
The reduction factor is a parameter for adjusting the magnitude of the correction applied
during iterative calculation of interface resistance. Use of a small value results in a more stable
convergence process but incurs longer calculation times. When convergence is stable, it is
recommended to use the initial setting of 1.0000. The setting can be changed as necessary
(p. 94).
57
Entering the Initial Iteration Value
HIOKI RM2612A961-02
4.7 Entering the Initial Iteration Value
This section describes how to enter the initial value for iterative calculations.
1
2
3, 4
5
Choose [Settings].
1
Choose [Analysis].
2
Choose one of the following initial resistance values for [Initial iteration value]:
3
Auto calc.
Previous result (Skip step 4 below.)
Input Enter the [Composite resistivity [
Enter values for [Composite resistivity [Ωcm]] and [Interface resistance [Ωcm^2]].
4
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
5
main screen.)
Valid setting range Initial value Format
1.0E-10 to 1.0E+5 1.000E+00 Decimal or exponential
(Skip step 4 below.)
If [Previous result] is selected, the initial resistance value will be
used as the [Auto calc.] value if the previous analysis result is FAIL.
cm]] and [Interface resistance
Ω
[
cm^2]] (step 4).
Ω
58
Choosing the Model Area
HIOKI RM2612A961-02
4.8 Choosing the Model Area
This section describes how to choose a model area according to the measurement precision you
require. Although measurement precision increases in proportion to the model area, calculation
times will increase as well.
1
2
4
3
4
Choose [Settings].
1
Choose [Analysis].
2
Choose one of the following settings for [Model area]:
3
NORMAL
MEDIUM Perform analysis using a model area that is about 2.5 times greater
WIDE Perform analysis using a model area that is about 4 times greater
Perform analysis using the standard model area.
than the standard area (NORMAL).
than the standard area (NORMAL).
Customizing Measurement Conditions
4
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
main screen.)
What is model area? (p. 97)
Although increasing the model area setting will allow you to make measurements that more
closely approach actual physical phenomena, calculation times will increase. Change the setting
to reect the degree of measurement precision that you require.
59
Choosing the Element Size
HIOKI RM2612A961-02
4.9 Choosing the Element Size
This section describes how to choose the element size.
1
2
3
4
Choose [Settings].
1
Choose [Analysis].
2
Choose one of the following settings for [Element size]:
3
NORMAL
FINE Perform measurements at 1/4 of the standard element size (NORMAL).
SUPER FINE Perform measurements at 1/9 of the standard element size (NORMAL).
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
4
main screen.)
Perform measurements at the standard element size.
60
What is element size?
Although using a small element size setting will allow you to make measurements that more
closely approach actual physical phenomena, calculation times will increase. Change the setting
to reect the degree of measurement precision you require.
Element
NORMAL FINE SUPER FINE
Switching the Display Language
HIOKI RM2612A961-02
4.10 Switching the Display Language
This section describes how to choose the display language used by the RM2612 Resistance
Calculation Software. Japanese, English, Simplied Chinese and Korean are available.
4
Language
(Japanese) Use Japanese as the display language.
日本語
English Use English as the display language.
简体中文
한국어
The default to the application language is set to the one chosen at the time of the
installation.
Use Simplied Chinese as the display language.
Use Korean as the display language.
Customizing Measurement Conditions
61
Checking the Software Version
HIOKI RM2612A961-02
4.11 Checking the Software Version
This section describes how to check the PC application’s software version.
IMPORTANT
If you have Internet connectivity and can download les, the RM2612 Resistance Calculation Software’s PC
application can be updated. For more information, see “9.2 Updating the Software” (p. 110).
1
2
3
Choose [Version].
1
Check the software version.
2
The dialog box displays the version of the PC application and the version of the analysis
DLL used internally by the software.
Click [OK].
3
62
Outputting a 2D Potential Distribution File
HIOKI RM2612A961-02
4.12 Outputting a 2D Potential Distribution File
You can output a 2D potential distribution le of 5×5 potential measurements by enabling [Save 2D
potential]. Data is subject to averaging processing.
The 2D potential distribution le allows you to view the potential gradient that exists when current
ows to the electrode sheet. It can be used when you wish to perform analysis using a method
other than the RM2610 Electrode Resistance Measurement System.
The output le uses a lename derived by adding “vpot_” to the beginning of the lename specied
as the analysis results path.
For more information about the le format, see “2D Potential distribution le format” (p. 86).
1
4
2
3
4
Choose [Settings].
1
Choose [File].
2
Choose one of the following settings for [Save 2D potential]:
3
ON Save 2D potential file output results.
Customizing Measurement Conditions
4
OFF
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
main screen.)
Do not save 2D potential le output results.
63
Choosing the CSV Save Format
HIOKI RM2612A961-02
4.13 Choosing the CSV Save Format
This section describes how to set the decimal symbol and choose the data delimiter for analysis
results les and 2D potential distribution les.
IMPORTANT
You cannot choose the comma (“,”) as both the decimal symbol and the data delimiter.
1
2
3
4
Choose [Settings].
1
Choose [File].
2
Choose one of the following settings for [CSV save settings]:
3
Decimal symbol
. (Period) Use the period (“.”) as the decimal symbol.
, (Comma) Use the comma (“,”) as the decimal symbol.
Data delimiter
, (Comma) Use the comma (“,”) as the data delimiter.
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
4
main screen.)
64
; (Semicolon) Use the semicolon (“;”) as the data delimiter.
Setting Whether to Beep at Measurement Completion
HIOKI RM2612A961-02
4.14 Setting Whether to Beep at Measurement Completion
This section describes how to set whether to beep when measurement completes.
1
2
4
3
4
Choose [Settings].
1
Choose [Measurement].
2
Choose one of the following settings for [Beep at nish]:
3
ON Beep when measurement completes.
OFF
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
4
main screen.)
Do not beep when measurement completes.
Customizing Measurement Conditions
65
Setting Administrator Mode
HIOKI RM2612A961-02
4.15 Setting Administrator Mode
This functionality is not ordinarily used. Congure this setting only when you need to perform a
special operation or verify system operation.
IMPORTANT
Follow instructions from Hioki when inspecting the RM2611 Electrode Resistance Meter.
1
3
2
4
Choose [Settings].
1
Choose [Administrator].
2
Enter the [Password] (default password: rm2612).
3
Click [OK].
4
66
Setting Administrator Mode
HIOKI RM2612A961-02
Congure the following settings:
5
Debug le Enabling this setting causes intermediate reverse-analysis calculation
results to be output to a le (for debugging use) (initial value: OFF).
If you are unable to obtain satisfactory analysis results even after
adjusting the reduction factor and other initial values, Hioki may ask
you to send this le for examination (the le format is not publicly
available).
Enable RM2611 check Enabling this setting performs an inspection of the RM2611 Electrode
Resistance Meter (initial value: OFF).
Use this setting if you encounter issues as a way to discover
potential causes. (Ordinarily, there is no need to inspect the RM2611
Electrode Resistance Meter.)
Selecting the [Enable RM2611 check] checkbox in administrator
mode will add [RM2611] to the [Check] on the main screen, allowing
issues with the instrument to be diagnosed. Inspection results
are output to a le, and you may be asked to send it to Hioki for
examination. (A special jig is needed in order to inspect the RM2611.)
4
Customizing Measurement Conditions
Password
Measurement counter Click [Reset] to reset the measurement counter to 0. The counter is
Set the password for accessing administrator mode. This setting may
be changed as necessary.
Initial value: rm2612
incremented after each potential measurement to provide a rough
guide as to the number of measurements that have been made with
the RM9004 Test Fixture. Its value is output to the analysis results
output le. Please reset the counter after replacing the RM9004 Test
Fixture’s probes.
67
Setting Administrator Mode
HIOKI RM2612A961-02
68
5
HIOKI RM2612A961-02
Analysis
5.1 Analyzing One Potential Measurement under Multiple Conditions
Analysis can be performed continuously simply by specifying multiple analysis conditions for a
single potential measurement datale. When determining the analysis conditions, there is no need
to perform multiple manual steps. The software can store up to 100 sets of conditions.
1
2
3
Choose [Settings].
1
Choose [Measurement].
2
Choose [Analysis] as the [Mode].
3
When specifying multiple analysis conditions, those conditions will apply to one le of
potential data output for analysis use. Please save that le prior to setting the conditions.
5
Analysis
69
Analyzing One Potential Measurement under Multiple Conditions
HIOKI RM2612A961-02
4
5
6
Choose [Analysis].
4
Choose [Multiple].
5
Click [Settings].
6
7
Change the settings. The following four settings can be changed:
7
Model area NORMAL, MEDIUM
Element size NORMAL, FINE, SUPER FINE
Limit iteration number 1 to 999 (valid setting range)
Reduction factor 0.0001 to 1.0000 (valid setting range)
, WIDE
70
Analyzing One Potential Measurement under Multiple Conditions
HIOKI RM2612A961-02
Cursor
• Adding rows
Click [Add Row] to add a row at the end of the list.
• Deleting rows
Move the cursor ( ) to the row you wish to delete and click [Del Row] to delete the selected row.
You can also select and delete multiple rows by holding down the SHIFT key or CTRL key on the
PC while selecting rows with the mouse, or by dragging with the mouse.
8
Click [OK] to accept the changes.
8
To cancel the conguration changes, click [Cancel].
5
Analysis
71
Analyzing One Potential Measurement under Multiple Conditions
HIOKI RM2612A961-02
10
9
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
9
main screen.)
Click [Start] to open a dialog box that will ask you to choose a le and start analysis.
10
Number of le being analyzed
Number of multiple analysis
conditions set
Progress will be displayed during analysis.
72
Saving and Loading
HIOKI RM2612A961-02
6
Measurement Conditions
6.1 Saving Measurement Conditions
This section describes how to save the current measurement conditions in a user-specied folder
on the PC.
1
2
1
2
3
4
3
Choose [Settings].
1
Choose [File].
2
Click [Save Conguration] to display the [Save settings le] dialog box.
3
5
6
Saving and Loading Measurement Conditions
7
8
9
4
5
4
10
5
Provide a name for the le and choose a location in which to save the le.
索引
Click [Save] to save the le.
73
Loading Measurement Conditions
HIOKI RM2612A961-02
6.2 Loading Measurement Conditions
This section describes how to load previously saved measurement conditions.
1
2
3
4
Choose [Settings].
1
Choose [File].
2
Choose [Load Conguration] to display the [Load settings le] dialog box.
3
4
5
Choose the le you wish to load.
4
Click [Open].
5
74
7
HIOKI RM2612A961-02
Product components: See p. 5.
For more information about RM9003 Press Unit, RM9004 Test Fixture, and RM9005 Connection Cable
specications, please see those products’ respective instruction manuals.
Specications
7.1 RM2611 Electrode Resistance Meter
General specications
Operating environment Indoors, Pollution Degree 2, altitude of up to 2000 m (6562 ft.)
1
2
Operating temperature and humidity 0°C to 40°C (32°F to 104°F), 80% RH or less (no condensation)
Storage temperature and humidity 0°C to 50°C (32°F to 122°F), 80% RH or less (no condensation)
Standards Safety EN61010
EMC EN61326 Class A
Power supply Commercial power
Rated supply voltage: 100 V to 240 V AC (designed to accommodate
voltage uctuations of ±10% relative to the rated supply voltage)
Rated supply frequency: 50 Hz, 60 Hz
Anticipated transient overvoltage: 2500 V
Maximum rated power: 40 VA (not including PC power)
Interfaces • USB port (for connecting the instrument to a PC)
• Test xture connector
• TEMP.SENSOR terminal (for connecting the instrument to the Z2001
Temperature Sensor)
Dimensions Approx. 215W × 80H × 306.5D mm (8.46″W × 3.15″H × 12.07″D)
Weight Approx. 3.4 kg (119.9 oz.)
Product warranty period 3 years
Fuse F1.6AH 250 V ×1
Accessories See p. 5
3
4
5
6
7
7
Specications
Options See p. 5
Input, output, and measurement specications
Basic specications
Measured parameters DC resistance and temperature
Automatic measurement is performed via the RM2612 Resistance
Calculation Software. Measurement cannot be performed using the
RM2611 Electrode Resistance Meter alone.
Resistance measurement signal Constant current
Resistance measurement method DC 4-terminal method
Resistance measurement terminal Test xture connector
Resistance measurement range Ranges: 1000 m
For more information about range parameters, see “Table 1. RM2611
Electrode Resistance Meter Measurement Ranges” (p. 76).
*Potential measurement results obtained using the 10 M
merely values for reference purposes.
, 10 Ω, 100 Ω, 1000 Ω, 10 kΩ, 100 kΩ, 1000 kΩ, 10 MΩ*
Ω
range are
Ω
8
9
10
索引
75
RM2611 Electrode Resistance Meter
HIOKI RM2612A961-02
Constant current generation range 1 μA (min.) to 10 mA (max.)
For more information about range parameters, see “Table 1. RM2611
Electrode Resistance Meter Measurement Ranges” (p. 76).
Test xture connector D-sub 50-pin receptacle
Temperature measurement terminal TEMP.SENSOR terminal (for connecting the instrument to the Z2001
Temperature Sensor)
Test xture connector pin assignments
No. Pin name No. Pin name No. Pin name
1 TP6 18 TP16 34 N.C.
2 TP12 19 TP23 35 TP3
3 TP19 20 TP30 36 TP44
4 TP26 21 TP37 37 TP2
5 TP33 22 TP8 38 TP43
6 TP40 23 TP15 39 TP1
7 TP11 24 TP22 40 TP42
8 TP18 25 TP29 41 TP13
9 TP25 26 TP36 42 TP7
10 TP32 27 N.C. 43 TP20
11 TP39 28 N.C. 44 TP14
12 TP10 29 TP5 45 TP27
13 TP17 30 TP46 46 TP21
14 TP24 31 TP4 47 TP34
15 TP31 32 TP45 48 TP28
16 TP38 33 N.C. 49 TP41
17 TP9 50 TP35
Table 1. RM2611 Electrode Resistance Meter Measurement Ranges
f.s.= 1,000,000 dgt.
Range
Max. measurement
range
*1
Measurement range
Measurement
current
Max. open
voltage
*1: Negative values: To -10% f.s.
*2: Potential measurement results obtained using the 10 M
76
1000 m
10
100
1000
10 k
100 k
1000 k
10 M
Ω
Ω
Ω
Ω
Ω
Ω
Ω
*2
Ω
1200.000 m
12.00000
120.0000
1200.000
12.00000 k
120.0000 k
1200.000 k
12.00000 MΩ0.00000 M
Ω
Ω
Ω
Ω
Ω
Ω
Ω
0.000 m
0.00000
0.0000
0.000
0.00000 k
0.0000 k
0.000 k
to 1200.000 m
Ω
to 12.00000
Ω
to 120.0000
Ω
to 1200.000
Ω
to 12.00000 k
Ω
to 120.0000 k
Ω
to 1200.000 k
Ω
to 12.00000 M
Ω
Ω
Ω
Ω
Ω
Ω
Ω
Ω
Ω
Ω
range are merely values for reference purposes.
10 mA 5.5 V
10 mA 5.5 V
10 mA 5.5 V
1 mA 5.5 V
1 mA 20 V
100 µA 20 V
10 µA 20 V
1 µA 20 V
Accuracy specications
HIOKI RM2612A961-02
RM2611 Electrode Resistance Meter
Accuracy guarantee
conditions
Resistance measurement
accuracy
Temperature measurement
accuracy
Table 2. RM2611 Electrode Resistance Meter Resistance Measurement Accuracy (Test Fixture
Connector Resistance Measurement Accuracy)
Range
1000 m
10
100
Ω
Ω
Ω
Resistance measurement accuracy is dened when using the test xture connector.
Guaranteed accuracy period: 1 year
Guaranteed accuracy period after adjustment made by Hioki: 1 year
Temperature and humidity for guaranteed accuracy: 23°C ±5°C (73°F ±9°F),
80% RH or less
Warm-up time: 60 min. or greater
Power supply frequency: 50 Hz ±2 Hz, 60 Hz ±2 Hz
See Table 2 (p. 77).
See Table 3 (p. 77).
Max.
measurement
range
1200.000 m
12.00000
120.0000
Resistance measurement
accuracy (FAST)
% rdg. + % f.s.
Ω
Ω
Ω
0.5 + 1.0 0.3 + 0.7
0.2 + 0.2 0.1 + 0.1
0.2 + 0.2 0.1 + 0.1
Resistance measurement
accuracy
(MEDIUM, SLOW1, SLOW2)
% rdg. + % f.s.
1
2
3
4
5
1000
Ω
10 k
Ω
100 k
Ω
1000 k
Ω
* 12.00000 M
10 M
Ω
*Potential measurement results obtained using the 10 M
Table 3. Temperature Measurement Accuracy (Z2001 Temperature Sensor)
Measurement range: -10.0°C to 99.9°C
Measurement period (speed): 2 ±0.2 s
Guaranteed accuracy period: 1 year
Combination accuracy with the Z2001 Temperature Sensor
Temperature range Accuracy
-10.0°C to 9.9°C ±(0.55 + 0.009 × |
10.0°C to 30.0°C ±0.50 °C
30.1°C to 59.9°C ±(0.55 + 0.012 × |
60.0°C to 99.9°C ±(0.92 + 0.021 × |
t
: Measurement temperature (°C); standalone accuracy of RM2611 Electrode Resistance Meter: ±0.2°C
1200.000
12.00000 k
120.0000 k
1200.000 k
Ω
Ω
Ω
Ω
Ω
0.2 + 0.2 0.1 + 0.1
0.2 + 0.2 0.1 + 0.1
0.2 + 0.2 0.1 + 0.1
1.0 + 1.0 0.5 + 0.5
3.0 + 3.0 3.0 + 1.0
range are merely values for reference purposes.
Ω
t
-10|) °C
t
-30|) °C
t
-60|) °C
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Specications
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Interface specications
USB USB 2.0 (Full Speed) Connector: Series B receptacle
Exclusively for connecting the RM2611 Electrode Resistance Meter to a PC
索引
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RM2612 Resistance Calculation Software
HIOKI RM2612A961-02
7.2 RM2612 Resistance Calculation Software
General specications
Operating requirement
(PC)
Accessories See p. 5
Product warranty period 1 year
CPU: Intel® Core™ i7, 2.4 GHz, 4 threads or better (recommended)
RAM: 8 GB or more recommended (4 GB available RAM required)
Hard disk: 2 GB or more available space
Display: 1024 × 768 pixels or more, 65536 colors or more
Interface: USB 2.0 or better
Operating system: Windows 7 (32-bit/64-bit)
Windows 8 (32-bit/64-bit)
Windows 10 (32-bit/64-bit)
Microsoft .NET Framework 4.8
(as of 2020/10/15)
Functional specications (PC application functions)
Analysis parameters • Composite layer volume resistivity [Ωcm], composite layer surface resistivity [Ωcm2]
(user-switchable)
• Interface resistance [
Analysis method Inverse problem analysis of potential distribution using the nite volume method
Display and output format • Composite layer volume resistivity and interface resistance
Exponential notation: 4 signicant digits, “0.000E+00,” “
• Temperature
Decimal notation, “00.0°C”
Ω
cm2]
cm/Ωcm2”
Ω
Measurement times
(representative values)
Resistance range selection
functionality
Potential measurement
speed
• Contact check: 4 s
• Auto range: 8 s
• Potential measurement: 18 s (MEDIUM)
• Analysis: 30 s (until completion using the standard iteration number)
Total: Approx. 60 s
Conditions
• Observed values when measuring a standard positive electrode sheet (reference)
• Fine volume model area: NORMAL; element size: NORMAL
• Calculation times are reference values obtained using an Intel
2.4 GHz processor.
• Calculation times depend on the processing throughput of the PC.
• Measurement times are subject to change in the event the software is updated.
• Auto range: ON/OFF (via checkbox)
Automatic selection of the optimal resistance range for potential measurement (initial
value: ON)
• Resistance range selection (when Auto range is OFF)
1000 m
*Potential measurement results obtained using the 10 M
for reference purposes.
FAST, MEDIUM, SLOW1, SLOW2 (initial value: MEDIUM)
, 10 Ω, 100 Ω, 1000 Ω, 10 kΩ, 100 kΩ, 1000 kΩ, 10 MΩ*
Ω
®
Core™ i7 4-core
range are merely values
Ω
78
RM2612 Resistance Calculation Software
HIOKI RM2612A961-02
Operating modes Operating modes (initial value: potential measurement + analysis)
• Potential measurement + analysis
• Potential measurement
• Analysis
Explanation of operation
• Potential measurement + analysis: Instrument performs potential measurement and
then analysis.
• Potential measurement: Instrument saves measured potential data to a le (one le
per measurement).
• Analysis: Instrument loads a potential le saved during potential measurement,
analyzes the le, and saves the results to a le. Multiple les can be selected, and
analysis can be performed continuously.
Current error detection The instrument detects current errors, aborts measurement, and recommends that
the user change the range.
Display: “ERROR”
Resistance over-range
detection
Contact check function Contact check ON/OFF
The instrument detects over-range events and recommends that the user change
the range.
Display: “ERROR”
Resistance threshold: 1
(Initial values: ON, 20 kΩ [2.000E+04])
Input format: Decimal, exponential, up to 3 decimal places “0.000E+0”
• Display: “CONTACT ERROR”
• The instrument performs a simple measurement of the contact resistance between
the probes and the measurement target using two-terminal measurement and
concludes that a contact error has occurred if the resulting value is less than the
applicable threshold.
• Contact error probe identication (estimation) function
The instrument combines measurements of the resistance between probes using
two terminals and identies which probes triggered the contact error.
to 10 M
Ω
Ω
1
2
3
4
5
6
Measurement reliability
indicator function
Error data rejection
function
Counter function Functionality for counting the number of measurements performed since the
Comment entry function Text entered into the comment eld is linked to the measurement target and output
Provides the following data for measured potential:
• Consistency (legitimacy of the relative magnitude of center 5 points): PASS/FAIL
• Variability per current channel: Current coefcient of variability [%]
• Percentage of data rejected by the error data rejection function (error rate): [%]
(Measurement is stopped in the event of a FAIL result for consistency.)
Rejection function ON/OFF (initial value: OFF)
Rejection of error data
• Data with current errors is rejected.
• Current channel data with a consistency result of FAIL is rejected.
• Potential data from probes with contact errors is rejected from the calculation
process.
application was launched (can be reset by user)
Counter values are output to analysis results les and potential les for analysis to
serve as a rough guide to the number of measurements performed by the RM9004
Test Fixture.
to a le.
1 comment per measurement (up to 30 characters)
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Specications
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RM2612 Resistance Calculation Software
HIOKI RM2612A961-02
Entry of analysis conditions • Upper limit on iterative calculations: 1 to 999 calculations
Initial value: 30 [calculations]
Input format: 3-digit integer “000”
• Reduction factor: 1.0E-4 to 1
Initial value: 1.0
Input format: Decimal, up to 4 decimal places, “0.0000”
• Resistance value initial value: Automatic calculation / user-entered value / reference
to analysis results
Composite layer volume resistivity and interface resistance input range: 1.0E-10 to
1.0E+5
Input format: Decimal, exponential
• Finite volume model area: NORMAL, MEDIUM, WIDE
Initial value: NORMAL
• Element size: NORMAL, FINE, SUPER FINE
Initial value: NORMAL
User-entered information
about measurement
targets
Analysis reliability display
function
Temperature measurement
function
Information necessary for analysis
• Composite layer thickness [μm]
Valid setting range: 1.0E-4 μm to 1000 μm
Input format: Decimal or exponential, 5 signicant digits
• Collector thickness [μm]
Valid setting range: 1.0E-4 μm to 1000 μm
Input format: Decimal or exponential, 5 signicant digits
• Collector volume resistivity [
Valid setting range: 1.0E-10 to 1.0E+5
Input format: Decimal or exponential, 5 signicant digits
Initial value: Volume resistivity of aluminum
• Display of candidate values for collector volume resistivity
(aluminum [2.7000E-6
Display of reliability of analysis results
• Iteration number [iterations]
• Agreement between measured potential and calculated potential (coefcient of
determination)
Measurement of the ambient temperature near the test xture (using the Z2001
Temperature Sensor)
Results can be displayed along with measured values on the screen and output to a
le.
cm]
Ω
cm] and copper [1.7000E-6 Ωcm])
Ω
Progress display Display of progress in the form of a progress bar
Condition save function • The application launches with the same conditions that were in effect when it was
File save function • Analysis results le
Test xture continuity test
function
80
Separate progress bars are shown for potential measurement and analysis.
last exited.
• Measurement and analysis conditions can be saved to a le and loaded as desired.
• Potential le for analysis (can be used in repeated analysis)
• 2D potential distribution le
The user can specify the folder in which les are saved.
Test of probes using the probe check board (RM9004 Test Fixture inspection)
• OPEN Inspection
• SHORT Inspection
Identication of probes with continuity defects
RM2612 Resistance Calculation Software
HIOKI RM2612A961-02
Measurement start/stop Methods for starting measurement:
• Click [Start] in the application.
• Press the [F5] key.
Methods for stopping measurement:
• Click [Abort] in the application.
Re-analysis function Re-analysis after changing analysis conditions and measurement target information
Previously measured potential data is used to repeat the analysis process. Reanalysis can be performed after changing analysis conditions and measurement
target information.
1
Auto start function • Perform one measurement when the probes make contact with an electrode sheet:
ON / OFF
• Start delay: Can be set from 0 ms to 2000 ms
Initial value: OFF; delay: 500 ms
Security • A USB license key is required in order to launch the application.
• Functionality for automatically updating the application to a new version (Internetconnected installations only)
Language Japanese, English, Simplied Chinese, Korean
Effects on analysis results (reference values)
The following tables provide information about various effects for use as reference values when the RM2611
Electrode Resistance Meter and RM9004 Test Fixture are used together.
Effect on calculation results of probe position precision (reference values)
Effect on resistance calculation results of probe position precision for a typical electrode sheet, where misalignment
of probe coordinates is given by Δx and Δy and where the standard deviation for Δx and Δy is σ = 5 μm
Parameters of the electrode sheet used as a model
Negative
electrode
Positive
electrode
Coefcient of variability [%] = (Standard deviation) / (Average value) × 100
Coefcient of variability for composite layer volume
resistivity: 2.3%
Coefcient of variability for interface resistance: 3.6%
Coefcient of variability for composite layer volume
resistivity: 2.7%
Coefcient of variability for interface resistance: 2.5%
Composite layer thickness: 33 μm
Composite layer resistivity: 0.13
Interface resistance: 0.06
Composite layer thickness: 70 μm
Composite layer resistivity: 10
Interface resistance: 1
Ω
cm
Ω
Ω
Ω
cm
cm
cm2
2
2
3
4
5
6
7
7
Effect of modeling
Effect of element size on calculated potential values in the nite volume model (reference values)
Parameters of the electrode sheet used as a model
Negative
electrode
Positive
electrode
NORMAL: 2.7%
FINE: 2.0%
SUPER FINE: 0.9%
NORMAL: 3.3%
FINE: 2.9%
SUPER FINE: 1.4%
Composite layer thickness: 33 μm
Composite layer resistivity: 0.13
Interface resistance: 0.06
Composite layer thickness: 70 μm
Composite layer resistivity: 10
Interface resistance: 1
Ω
Ω
cm
Ω
Ω
cm
cm
cm2
2
Specications
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10
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RM2612 Resistance Calculation Software
V
2
10=
−
×
v
v
( ) v ( )
( )
00%
[]
V
2
10=
−
×
v
v
( ) v ( )
( )
00%
[]
δ
V
2
10=
−
×
v
( ) v ( )
00%
[]
HIOKI RM2612A961-02
Calculation results with negative electrode representative values
Change in calculated potential values caused by element size
(Potential 120 μm from the probe applying the current)
NORMAL
[%]
FINE
SUPER FINE
Minimum
element size
Potential difference
0.01 0.1
Element size (where NORMAL = 1)
Calculation results with positive electrode representative values
Change in calculated potential values caused by element size
(Potential 120 μm from the probe applying the current)
NORMAL
3
2.5
2
1.5
1
0.5
0
1
3.50
3.00
[%]
FINE
SUPER FINE
Minimum
element size
Potential difference
0.01 0.1
Element size (where NORMAL = 1)
Minimum element size is set internally by Hioki.
The potential difference
V
δ
2
Effect of ne volume model area on calculated potential values (reference values)
Negative
electrode
Positive
electrode
NORMAL: 2.0%
MEDIUM: 0.17%
WIDE: 0.04%
NORMAL: 0.61%
MEDIUM: 0.023%
WIDE: 0.003%
is dened as follows:
Minimum element size
vv ( ) v ( )
Minimum element size
( )
−
Element size
Parameters of the electrode sheet used as a model
Composite layer thickness: 33 μm
Composite layer resistivity: 0.13
Interface resistance: 0.06
Composite layer thickness: 70 μm
Composite layer resistivity: 10
Interface resistance: 1
2.50
2.00
1.50
1.00
0.50
0.00
1
10=
×
00%
[]
cm
Ω
cm2
Ω
cm
Ω
2
cm
Ω
82
RM2612 Resistance Calculation Software
V
3
10=
−
×
v
v
( ) v ( )
( )
00%
[]
V
3
10=
−
×
v
v
( ) v ( )
( )
00%
[]
δ
V
3
10=
−
×
v
( ) v ( )
00%
[]
HIOKI RM2612A961-02
Calculated results with negative electrode representative values
Change caused by model area
(Potential 120 μm from the probe applying the current)
2.20
2.00
1.80
1.60
[%]
1.40
1.20
1.00
0.80
0.60
0.40
0.20
Potential difference
0.00
0 5
Calculation results with positive electrode representative values
Change caused by model area
(Potential 120 μm from the probe applying the current)
NORMAL
MEDIUM
WIDE
Maximum area:
Model area = 64
10 15 20
Model area (where NORMAL = 1)
1
2
3
4
0.80
0.60
[%]
0.40
0.20
Potential difference
0.00
0 5
Maximum area size is set internally by Hioki.
The potential difference
δ
V
3
is dened as follows:
Maximum area Area
vv ( ) v ( )
NORMAL
MEDIUM
Model area (where NORMAL = 1)
WIDE
10 15 20
−
Maximum area
( )
Maximum area:
Model area = 64
10=
×
00%
[]
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Specications
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RM2612 Resistance Calculation Software
HIOKI RM2612A961-02
Comparison of potential values for the nite volume model and an analytical
solution
The following table compares calculated potential values from an analytical solution and calculated potential values
from the nite volume model for a single-layer substance:
Parameters of the electrode sheet used as a model
NORMAL: 3.1%
Single-layer substance
Analytical solution: Solution obtained by solving the Poisson equation for potential algebraically
Comparison of potential values for the nite volume model
and an analytical solution
(Potential 120 μm from the probe applying the current)
3.50
FINE: 2.0%
SUPER FINE: 1.0%
Volume resistivity: 0.1
Thickness: 100 μm
cm
Ω
3.00
2.50
2.00
1.50
1.00
0.50
Potential difference [%]
0.00
0 0.2
The difference
Calculation time based on element size and nite volume model area (reference values) [typ. min.]
relative to the analytical solution is dened as follows:
Element size
equivalent to
SUPER FINE
Element size
equivalent to FINE
0.4 0.6 1
Element size (where NORMAL = 1)
Analytical solution
Analytical solution
NORMAL FINE SUPER FINE
Finite volume model
Element size
equivalent to
NORMAL
0.8
solution
Element size
Finite volume
model area
• Figures in the table are reference values. Actual times will vary with the electrode sheet’s resistance values and
potential state.
• In actual usage, calculation times are augmented by contact check times and potential measurement times.
84
NORMAL 0.3 3 6
MEDIUM 0.8 11 18
WIDE 2 12 33
7.3 Output File Formats
HIOKI RM2612A961-02
Analysis results le format
Output File Formats
Header Description
Counter Counter [measurements]
Date Measurement start date
Time Measurement start time
Comment Comment (up to 30 characters)
cm]
Ω
Ω
cm]
cm2]
Composite volume resistivity [ohm cm] Composite layer volume resistivity [
Interface resistance [ohm cm^2] Interface resistance [
Composite surface resistivity [ohm cm^2] Composite layer surface resistivity [
Range [ohm] Resistance range
Speed Potential measurement speed
TF-Type Fixed value of 1
Composite layer thickness [um] Composite layer thickness [μm]
Collector layer thickness [um] Collector thickness [μm]
Collector resistivity [ohm cm] Collector volume resistivity [
Model area Model area {NORMAL | MEDIUM | WIDE}
Element size Element size {NORMAL | FINE | SUPER FINE}
Limit iteration number Limit iteration number [iterations]
Ω
cm2]
Ω
1
2
3
4
5
Reduction factor Reduction factor
Initial composite resistivity [ohm cm] Composite layer volume resistivity initial value setting [
Initial Interface resistance [ohm cm^2] Interface resistance initial value setting [
Contact check-V Contact check results (32-bit hexadecimal value) (p. 87)
Contact check-I Contact check results (32-bit hexadecimal value) (p. 87)
Potential consistency Potential distribution consistency
Variation-V Potential variability [%]
Error data Number of error data rejections [rejections]
Measurement Time [s] Potential measurement time [s]
Temperature [deg C] Temperature [°C]
Calculation Analysis results {PASS | FAIL}
Iteration number Iteration number [iterations]
Coincidence Coincidence
Calculation Time [s] Analysis time [s]
RM2611 SN RM2611 Electrode Resistance Meter serial number
RM2611 Version RM2611 Electrode Resistance Meter rmware version
RM2612 Version PC application version
Ω
cm2]
6
cm]
Ω
7
7
Specications
8
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10
RM2612 Analysis version Analysis unit version
索引
85
Output File Formats
HIOKI RM2612A961-02
2D Potential distribution le format
Header Description
Counter Counter [measurements]
Date Measurement start date
Time Measurement start time
Comment Comment (up to 30 characters)
Range [ohm] Resistance range
Speed Potential measurement speed
TF-Type Fixed value of 1
Composite layer thickness [um] Composite layer thickness [μm]
Collector layer thickness [um] Collector thickness [μm]
Collector resistivity [ohm cm] Collector volume resistivity [
Contact check-V Contact check results (32-bit hexadecimal value) (p. 87)
Contact check-I Contact check results (32-bit hexadecimal value) (p. 87)
Potential consistency Potential distribution consistency
Variation-V Potential variability [%]
Error data Number of error data rejections [rejections]
Measurement Time [s] Potential measurement time [s]
Temperature [deg C] Temperature [°C]
RM2611 S/N RM2611 Electrode Resistance Meter serial number
RM2611 Version RM2611 Electrode Resistance Meter rmware version
RM2612 Version PC application version
RM2612 Analysis version Analysis unit version
V-Data 5×5 potential data
cm]
Ω
V-data (5×5 potential data)
Source probe position
86
Potential measurement
probe position
(5×5 = 25 locations)
Drain probe position
Output File Formats
HIOKI RM2612A961-02
Contact check bit pattern
Analysis results les and 2D potential distribution les output contact check results for potential
followed by current along with measurement results.
Probes that exhibited a contact error are indicated by a bit with the value 1, while normally
functioning probes are indicated by a bit with the value 0.
Voltage probes*1 (Contact check-V): 25 bits of information (output as a 32-bit hexadecimal
value)
31 24 23 16 15 8 7 0
0 0 0 0 0 0 0
Rsv. Rsv. Rsv. Rsv. Rsv. Rsv. Rsv. TP36 TP29 TP22 TP15 TP8 TP37 TP30 TP23 TP16 TP9 TP38 TP31 TP24 TP17 TP10 TP39 TP32 TP25 TP18 TP11 TP40 TP33 TP26 TP19 TP12
Current probes*2 (Contact check-I) : 20 bits of information (output as a 32-bit hexadecimal
value)
31 24 23 16 15 8 7 0
0 0 0 0 0 0 0 0 0 0 0 0
Rsv. Rsv. Rsv. Rsv. Rsv. Rsv. Rsv. Rsv. Rsv. Rsv. Rsv. Rsv. TP35 TP28 TP21 TP14 TP7 TP42 TP43 TP44 TP45 TP46 TP41 TP34 TP27 TP20 TP13 TP1 TP2 TP3 TP4 TP5
1
2
3
4
(TOP VIEW)
*1: Probes used to measure voltage (25 locations inside periphery)
TP8, TP9, TP10, TP11, TP12, TP15, TP16, TP17, TP18, TP19, TP22, TP23, TP24, TP25,
TP26, TP29, TP30, TP31, TP32, TP33, TP36, TP37, TP38, TP39, TP40
*2: Probes used to apply current to the measurement target (20 locations around the periphery)
TP1, TP2, TP3, TP4, TP5, TP13, TP20, TP27, TP34, TP41, TP46, TP45, TP44, TP43,
TP42, TP35, TP28, TP21, TP14, TP7
• The TP interval is 120 μm in both the lengthwise and widthwise directions.
• TP6 has no electrical function, but rather is used to detect the orientation of the test xture.
5
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Specications
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Contact Check Results File Output Format
HIOKI RM2612A961-02
7.4 Contact Check Results File Output Format
The time, date, and contact resistance [Ω] resulting from a simple measurement of each probe are
output to the le. If the analysis results le has the same name, this data is appended to that le.
IMPORTANT
Output resistance values are the result of a simple measurement process and as such differ from the true
probe contact resistance.
88
Inspection Results File Format
HIOKI RM2612A961-02
7.5 Inspection Results File Format
When a SHORT inspection (p. 33) and OPEN inspection (p. 34) are performed for the RM9004
Test Fixture, the results are output to a le in the same folder as the analysis results le.
RM9004 SHORT inspection results le format
(Filename: CHECK_RM9004_SHORT.csv)
1
Contact resistance inspection
No. Header Description
Date Inspection start date
1
Time Inspection start time
2
Threshold RM9004 contact resistance judgment threshold [
3
Result RM9004 contact resistance inspection results
4
TP
5
Resistance measured value inspection
No. Header Description
Date Inspection start date
6
Time Inspection start time
7
% rdg. Resistance measurement judgment width (% rdg.)
8
% f.s. Resistance measurement judgment width (% f.s.)
9
Result Resistance measurement inspection result
10
R-250Data Resistance measured values [
11
Probe contact resistance values [Ω]
] (250 patterns)
Ω
2
3
]
Ω
4
5
6
11
1 2 3 4
10
7
7
56 7 8 9
Specications
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Inspection Results File Format
HIOKI RM2612A961-02
RM9004 Test Fixture OPEN inspection results le format
(Filename: CHECK_RM9004_OPEN.csv)
No. Header Description
Date Inspection start date
1
Time Inspection start time
2
Threshold RM9004 OPEN judgment threshold [
3
Result RM9004 OPEN inspection result
4
TP
5
*A measured value of 1.00E+30 indicates sufciently high insulation resistance.
Probe insulation resistance values [Ω]*
1 2 3 4 5
]
Ω
90
HIOKI RM2612A961-02
8
Q.
A.
Q.
A.
Q.
A.
Q.
FAQ
About the reduction factor (p. 94)
The reduction factor is a parameter for adjusting the magnitude of the correction applied
during iterative calculation of interface resistance. Use of a small value results in a more stable
convergence process but incurs longer calculation times.
How is interface resistance calculated? (p. 95)
By combining multipoint potential measurement (resistance measurement) and inverse analysis
calculations, it is possible to isolate and calculate the composite layer volume resistivity and
interface resistance for lithium-ion battery electrode sheets.
What is the nite volume model? (p. 97)
The nite volume model signies a calculation domain that has been segregated into a nite
number of elements (known as a mesh) in order to perform numerical calculations using the
nite volume method (FVM).
What kind of electrode sheets can be measured?
A.
Q.
A.
Q.
Electrode sheet requirements*
*Whether a given electrode sheet can be measured depends on the balance of composite layer
thickness, composite layer resistance, and interface resistance. The above information is not
intended to provide a guarantee that any given electrode sheet can be measured.
Electrode sheets must:
• Have a conductive composite layer.
• Have a surface that lacks an insulating coating (for the measurement probes to contact).
• Have a rm composite layer (if the composite layer is too soft, the measurement probes will
stick into the composite layer, resulting in unstable potential readings).
• Have a composite layer that is not too thin (guideline: composite layer thickness of 20 μm or
greater).
• Have a composite layer that is not too thick (guideline: composite layer thickness of 200 μm or
less).
• Have an interface resistance that is not too high.
• Have an interface resistance that is not too low.
• Have a composite layer resistance that is not too high.
• Have a composite layer resistance that is not too low.
Can electrode sheets coated on both sides be measured? (p. 98)
It makes no difference whether the electrode sheet being measured is coated on one side or
both sides.
What is volume resistivity? (p. 99)
8
FAQ
A.
Q.
Volume resistivity is a physical property that indicates the comparative difculty with which
electricity passes through a material. It is also known as resistivity, specic resistance, and
electrical resistivity. Volume resistivity is measured in [
What is surface resistivity? How do composite layer volume resistivity and
composite layer surface resistivity differ? (p. 100)
m].
Ω
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HIOKI RM2612A961-02
A.
Q.
A.
Q.
A.
Q.
A.
Surface resistivity indicates the difculty with which electricity ows perpendicular to a surface
that has no thickness or that is thin enough that its thickness can be ignored. The property is
converted to a unit area and measured in [
the sheet’s area.
What precautions apply when performing maintenance of probe tips?
For more information about probe maintenance, refer to “RM9004 Test Fixture” (p. 118).
Performing measurements while the tips of the probes are dirty will lead to probe wear and
greater measurement error. Consequently, the probe tips should be cleaned regularly with air.
Is it possible to verify that the system is making the same measurements every
day?
Yes. Use the probe check board to complete the pre-start inspection (p. 32) before you start
using the system daily. Inspection items include SHORT inspection (to check continuity among
the probes, RM2611 Electrode Resistance Meter, and the measurement target) and OPEN
inspection (to verify that probes are isolated from one other).
How should I congure the settings for a collector with an undercoat? (p. 101)
You can evaluate such a sheet by ignoring the thickness of the undercoat when you enter the
conditions. The resistance value obtained by adding together the interface resistance between
the collector and the undercoat, the resistance of the undercoat itself, and the interface
resistance between the undercoat and the composite will be output as the interface resistance.
m2]. The value is unique and does not depend on
Ω
Q.
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It is possible to measure a sheet that has soaked up electrolyte? Additionally, is
it possible to measure an electrode sheet from a disassembled battery?
If the electrode sheet is dry, yes. However, caution is necessary as any remaining electrolyte
will corrode and damage the probes.
What are analysis results? (p. 102)
Analysis reliability provides an indicator of whether the inverse problem was performed
correctly. Although the value is not intended to serve as an indicator of the absolute value or
accuracy of the interface resistance or composite layer volume resistivity, it does offer a way to
check the status of analysis.
What is measurement reliability? (p. 103)
Measurement reliability provides an indicator of whether potential measurement has been
performed correctly. It allows you to check the status of potential measurement. Measurement
reliability is indicated by three values: consistency, error rate, and variability (coefcient of
variability).
How much does entering an incorrect value for the composite layer thickness
affect analysis results? (p. 104)
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HIOKI RM2612A961-02
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How much entry of an inaccurate value affects analysis results depends on a variety of
parameters, including electrode sheet resistance, composite thickness, and collector thickness.
Please enter as accurate a thickness as possible before performing analysis. Additionally, the
system provides re-analysis capability to repeat analysis for previous measurements (p. 47).
Why am I encountering frequent contact errors and measurement reliability
errors?
The instrument may not be properly acquiring the potential distribution. Possible causes include
cases in which measurement current pathways are not well-formed in the test area, for example
due to there being only a small amount of conductive auxiliary agent, or a mixture of locations
where there is conductive auxiliary agent and other locations where there is none. Enable the
error rejection function and repeat measurement. You may be able to obtain results that more
closely approach an accurate value by measuring multiple locations similarly and performing
statistical processing (averaging, variability, etc.) of the results.
Can I measure an electrode that has not yet been pressed?
You may be able to do so, depending on the softness of the composite layer. Such
measurement is possible as long as the composite layer has a certain level of rmness,
regardless of whether it has been pressed. If the composite layer is too soft, the probes may
become embedded in the composite, resulting in a measurement reliability error or an analysis
reliability error.
Under what circumstances do contact errors occur? (p. 105)
A.
Q.
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Contact errors are reported more often when the effect on measurement of the contact
resistance between the probes and the measurement target becomes more pronounced.
In terms of specic operation, 2-terminal resistance measurement is used to measure the
resistance between the probes and the measurement target, and a contact error is concluded
to have occurred if a certain threshold is exceeded.
What will happen if I use a PC with other than the recommended system
requirements?
The system will function in most cases if you use a CPU that is not recommended (Intel®
Core™ i7, 2.4 GHz, 4 threads or better), but PC application processing may slow.
8
FAQ
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About the reduction factor
HIOKI RM2612A961-02
8.1 About the reduction factor
In iterative calculations performed as part of an inverse problem analysis, calculations exhibit
unstable convergence if the initial value differs greatly from the solution.
As shown by the line labeled “Large reduction factor” in the graph, excessive correction of the
iterative calculation may result in negative resistance values. Adjusting the reduction factor in such
cases may stabilize the iterative calculation.
The reduction factor is a parameter that regulates the magnitude of correction performed in the
iterative calculation. The initial value of 1.0 results in maximum correction. Reducing this value (it
must be greater than 0) has the effect of reducing the magnitude of correction, with the result that a
phenomenon in which iteration undergoes too much correction can be reduced as shown in the line
labeled “Small reduction factor” in the graph.
However, smaller reduction factors increase calculation times since more iteration is needed in
order for calculations to converge. Consequently, it is recommended to use the initial value of 1.0
for the reduction factor when convergence is table.
Interface resistance (composite layer volume resistivity)
Large reduction factor
Small reduction factor
Calculation times: Longer
Calculation stability: Higher
Iteration number
Calculation error
(negative resistance value)
Calculation times: Shorter
Calculation stability: Lower
94
Small (>0) Large (≤1)
Reduction factor
How is interface resistance calculated?
HIOKI RM2612A961-02
8.2 How is interface resistance calculated?
By combining multipoint potential measurement (resistance measurement) and inverse analysis
calculations, it is possible to isolate and calculate the composite layer volume resistivity and
interface resistance for lithium-ion battery electrode sheets.
In this way, it is possible to calculate interface resistance by means of a simple series of operations:
conguring several settings, placing probes in contact with the surface of the electrode sheet, and
stating measurement.
When you click [Start], the system performs the following steps automatically:
The electrode sheet is treated as a virtual electrode sheet consisting of two layers and
1
one interface layer, and the resistance of each layer is labeled R1, R2, and r (modeling).
A constant current is applied to the surface of the electrode sheet, and the potential
2
distribution occurring on the surface is measured at multiple points (to acquire the
observed potential).
A calculated potential that agrees with the observed potential is calculated repeatedly
3
(using curvilinear regression) while treating R1 and r as the variables.
The R1 and r values for which the observed potential and calculated potential agree are
4
output as the composite layer volume resistivity and interface resistance.
Electrode sheet: Observed potential
Constant current
source
Enlarged view of
measurement probes
Probes
(It doesn’t matter whether the electrode sheet that is
measured is coated on one side or both sides. The
composite layer resistivity and interface resistance on the
probed surface are output.)
Composite
layer
Interface
Collector
Virtual electrode sheet:
Calculated potential
R1
r
R2
(R1 and R2 thickness [μm], and R2 volume
resistivity are entered by the user.)
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FAQ
95
How is interface resistance calculated?
HIOKI RM2612A961-02
Modeling
1
Composite layer
R1
R2
Update
resistance
value
Don’t
agree
Potential
2
measurement
Calculation of
3
potential using a
simulation
Composite
layer
Interface
Electrode sheet
Virtual electrode
sheet
Interface
Collector
Collector
R3
R3
V
d
Surface potential
distribution
(representative)
V
R1
d
R2
Surface potential
distribution
(representative) as
calculated by simulation
Comparison
4
of observed potential
and calculated
potential
Agree
Output (end)
5
V
Surface potential
distribution
(representative)
V
d
Surface potential
distribution
(representative) as
calculated by simulation
d
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