HELIX 9600 Installation, Operation And Maintenance Instructions

9600 (High Voltage) Compressor Installation,

Operation, and Maintenance Instructions

HELIX TECHNOLOGY CORPORATION

http://www.helixtechnology.com

The information in this document is believed to be accurate and reliable. However, Helix Technology Corporation, cannot accept any financial or other responsibilities that may

result from the use of this information. No warranties are granted or extended by this document.

Helix Technology Corporation reserves the right to change any or all information contained herein without prior written notice. Revisions may be issued at the time of such changes and/or deletions.

Any duplication of this manual or any of its parts without expressed written permission from Helix Technology Corporation is strictly prohibited.

Any correspondence regarding this document should be forwarded to:

Helix Technology Corporation Mansfield Corporate Center Nine Hampshire Street Mansfield, Massachusetts 02048-9171 U.S.A.

Telephone: (508) 337-5000 FAX: (508) 337-5464

The following Helix Technology Corporation trademarks and service marks may appear in this document:

Conductron

Cryogenerator

GOLDLink

Helix Technology.. Your Vacuum Connection

On-Board

Stabil-Ion

Vacuum Assurance

Convectron

Cryo-Torr

Granville-Phillips

Micro-Ion

RetroEase

ThinLine™

Cryodyne

CTI-Cryogenics

GUTS

Mini-Convectron

RetroFast

TurboPlus

Cryogem

FastRegen™

Helix

Mini-Ion™

Stabil-1

TrueBlue

All other trademarks or registered trademarks are the property of their respective holders.

Figures

Tables

Safety Conventions

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-1

Signal Word Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-1

Safety Shape Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-2

References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . S-2

Section 1 - 9600 Compressor Description

General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

Compressor Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

System Documentation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

CTI-CRYOGENICS Helium Refrigeration System . . . . . . . . . . . . . . . . . . . . . . . . 1-1

Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

Cooling Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

Component Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

System Circuit Breaker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9

Elapsed Time Meter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9

Control Circuit Breaker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9

Power ON Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9

Gas Charge Flared Fitting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9

Helium Pressure Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

Power Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

Return Gas Coupling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

Cooling Water IN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

Cooling Water OUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

Cryopump Electrical Outlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

Compressor Remote Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

Supply Gas Coupling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

Multiple On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12

Multiple Cryo-Torr Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

Section 2 - Unpacking and Inspection

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

Shipping Carton Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

Removal from Shipping Carton . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

Compressor Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Helium "OFF" Condition Pressure Verification . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Shipping Carton Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Section 3 - Installation

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

Supply and Return Water Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Hard Water Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Flexible Water Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Phase Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

Connecting/Disconnecting Helium Flex Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

Connecting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

Disconnecting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

Single On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8

Multiple On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

Helium Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

Power Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

Multiple Cryo-Torr Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14

Helium Line Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14

Power Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14

Section 4 - Operation

Adjusting System Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

"OFF" Condition Helium System Pressure Verification . . . . . . . . . . . . . . . . . . . . . 4-1

Compressor Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

Replacement of Helium Circuit Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Section 5 - Maintenance

Scheduled Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

Adsorber Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

Adjusting System Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

Reducing Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

Increasing Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6

Adding Helium . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6

Appendix A - Customer Support Information

Customer Support Center Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1

Guaranteed Up-Time Support (GUTS®) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1

Product Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1

E-mail . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1

Appendix B - Flow Diagram

Appendix C - Troubleshooting Procedures

Troubleshooting the Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-1

Technical Inquiries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-1

Appendix D - Schematic

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D-1

Index

Figures

Figure 1-1: 9600 Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

Figure 1-2: 9600 Compressor Dimensions. . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Figure 1-3: Water Flow Rate versus Pressure Drop . . . . . . . . . . . . . . . . . . . . . 1-6

Figure 1-4: 9600 Compressor Rear View Component Locations. . . . . . . . . . . 1-8

Figure 1-5: 9600 Compressor Connected to Multiple On-Board Cryopumps 1-12

Figure 1-6: 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps 1-13

Figure 3-1:9600 Compressor Installation Flowchart . . . . . . . . . . . . . . . . . . . . 3-2

Figure 3-2: 9600 Compressor Circuit Breaker Terminals (Cover Removed) . 3-5

Figure 3-3:Connecting/Disconnecting Helium Flex Line Couplings. . . . . . . . 3-8

Figure 3-4: Single On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . 3-9

Figure 3-5: Single Cryo-Torr Cryopump Installation. . . . . . . . . . . . . . . . . . . 3-10

Figure 3-6: Recommended Multiple On-Board Cryopump or Waterpump Installation

(Splitter Box located at Process Tool) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12

Figure 3-7: Alternative Multiple On-Board Cryopump or Waterpump Installation

(Splitter Box located at Compressor) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13

Figure 3-8: Multiple Cryo-Torr Cryopump Installation . . . . . . . . . . . . . . . . . 3-15

Figure 3-9: Multiple Cryo-Torr Cryopump Installation . . . . . . . . . . . . . . . . . 3-16

Figure 5-1: Disconnecting Self Sealing Couplings. . . . . . . . . . . . . . . . . . . . . . 5-2

Figure 5-2: Adsorber Location in 9600 Compressor (Rear Panel Removed). . 5-4

Figure 5-3: Helium Pressure Control Components. . . . . . . . . . . . . . . . . . . . . . 5-5

Figure B-1: 9600 Compressor Flow Diagram P/N 8135001 Rev. A . . . . . . . . B-2

Figure D-1: 9600 High Voltage Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . D-4

Tables

Table 1-1:Compressor Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

Table 1-2:Electrical Input Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

Table 1-3:Cooling Water Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

Table 1-4:General Compressor Operating Specifications . . . . . . . . . . . . . 1-7

Table 1-5:Cryopump Electrical Outlet Pin Assignments . . . . . . . . . . . . . 1-11

Table 1-6:Compressor Remote Connector Pin Assignments . . . . . . . . . . 1-11

Table 4-1:9600 Compressor Helium ("OFF" Condition) Charge. . . . . . . . 4-1

Table 5-1:Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . 5-1

Table C-1:Compressor Troubleshooting Procedures . . . . . . . . . . . . . . . . . C-2

Table D-1:Basic Control Assembly Legend. . . . . . . . . . . . . . . . . . . . . . . . D-1

Table D-2:On-Board/Cryo Electrical Module P/N 8135127G002 Legend D-2

Table D-3:On-Board Output Module P/N 8135148G001 Legend . . . . . . . D-3

Safety Conventions

Introduction

Follow all safety precautions during installation, normal operation, and when servicing CTI-Cryogenics products.

This chapter explains the safety conventions used throughout this manual. CTI-Cryogenics uses a specific format for cautions and warnings, which includes standard signal words and safety shapes.

See also the Customer Support appendix or call your local Customer Support Center for assistance.

Signal Word Descriptions

All cautions and warnings contain signal words, which call attention to safety messages and designate the degree of hazard seriousness. The following table shows the signal words and their meanings that may be used in this document.

Term Example Definition

CAUTION

WARNING

A signal word accompanied by a safety shape that indicates a potentially hazardous situation or unsafe practice.

If not avoided, the action may result in minor

or moderate personal injury or equipment damage. A CAUTION is highlighted in

yellow. A signal word that indicates a situation or

unsafe practice, which if not avoided may result in equipment damage. A CAUTION is highlighted in yellow.

A signal word accompanied by a safety shape that indicates indicates a potentially hazardous situation.

If not avoided, the action may result in serious injury or death. A WARNING is highlighted in orange.

Safety Shape Descriptions

Example Term Shape Definition

All cautions and warnings contain safety shapes, which have specific safety meanings. The following table shows some of the safety shapes used in this document and their meanings.

References

General Warning

High Voltage Indicates a high voltage hazard.

Hot Surface

For more information about safety standards, see the following documents:

Indicates a general hazard. Details about this hazard appear in the safety notice explanation.

Indicates a surface is hot enough to cause discomfort or a burn.

• ISO 7010: 2003(E), Graphic symbols - Safety colours and safety signs - Safety signs used in workplaces and public areas

• ISO 3864-1: 2002(E), Graphic symbols - Safety colours and safety signs - Part 1: Design principles for safety signs in workplaces and public areas

Section 1 - 9600 Compressor Description

General

This manual provides the information required to install, operate, and maintain the CTI-CRYOGENICS 9600 Compressor .

NOTE: All personnel with installation, operation, and maintenance responsibilities should become familiar with the contents of both the 9600 Compressor Installation, Operation, Maintenance, and appropriate cryopump manuals to ensure safe, high quality, and reliable system performance.

CAUTION

Refer to “Appendix A - Customer Support Information” to contact the local Customer Support Center for information on connecting 9600 Compressors to a manifold with other CTI-CRYOGENICS compressors.

Compressor Configurations

The 9600 Compressor supports either On-Board or Cryo-Torr Cryopumps. For multiple cryopump installations, an On-Board Splitter Box or CryoTorr Interface can be used for cold head power distribution that reduces total cable requirements as shown in Figure 1-5 and Figure 1-6.

System Documentation

The manuals for a system cover two basic components: the cryopump and the Compressor. A manual is shipped with each system component to provide information for installation and operation of that component. A loose-leaf binder with index tab separators is also provided so you can compile a complete set of tabulated manuals.

CTI-CRYOGENICS Helium Refrigeration System

The operation of CTI-CRYOGENICS’ cryopumps is based upon a closed loop helium expansion cycle. The system is made up of two major

CTI-CRYOGENICS Helium Refrigeration System

components: the cryopump, which contains the cold head, and the helium Compressor which compresses the helium gas.

Refrigeration is produced in the cryopump cold head through periodic expansion of high pressure helium in a regenerative process. The high pressure helium is provided by the Compressor. Low pressure helium returning from the cold head is compressed into the necessary high pressure to be returned to the cold head. The energy required to compress the helium is rejected as heat through the cooling water.

High pressure room temperature helium is transferred to the cold head through the supply lines. After expansion, low pressure helium is returned to the Compressor (at or near room temperature) to repeat the cycle in a closed loop fashion. Large separation distances can be accommodated between the Compressor and the cryopump.

In the Compressor, helium is compressed using a highly reliable oil lubricated commercial Compressor. Helium purification takes place via several stages of oil removal. The final stage of purification is performed with a replaceable adsorber cartridge. In order to maintain peak efficiency, the adsorber must be replaced every three years. The 9600 Compressor is shown in Figure 1-1.

Figure 1-1: 9600 Compressor

Specifications

Dimensions

The dimensions of the Compressor are shown in Figure 1-2.

19.52 in. (496 mm)

14.4 in. (366 mm)

21.50 in. (546 mm)

23.36 in. (593 mm)

3.18 in. (81 mm)

Figure 1-2: 9600 Compressor Dimensions

1.28 (32mm)

CAUTION

Do not place a weight greater than 75 lbs. (34Kg) on top of the Compressor.

Weight

Electrical

The weight of the Compressor is listed in Table 1-1.

Table 1-1: Compressor Weight

Weight lbs./kg

267/121kg

The electrical specifications of the Compressor are listed in Table 1-2.

Table 1-2: Electrical Input Specifications

Parameter Value

Operating Voltage Range/Frequency 342-457V/50 Hz

342-506V/60 Hz

Phase 3

Nominal Input Power 5.5 KW/60 Hz

5KW/50 Hz Nominal Power Factor 0.85 Rated FL/LR* Current 8/40

Minimum Electrical Service 15 Amps

*FL/LR = Full Load/Locked Rotor

Cooling Water

The water used to cool the Compressor must meet the specifications shown in Table 1-3 for proper system operation.

Table 1-3: Cooling Water Specifications

Parameter Value

Maximum Inlet Temperature 90°F (32°C)

Minimum Inlet Temperature 50°F (10°C)

Flow Rate 2.75 ±1.25 gpm (10.4 ± 4.7 lpm)

NOTE: Water conditioning may be required for ap plications not meetin g these requirements.

Specifications

Table 1-3: Cooling Water Specifications (Continued)

Parameter Value

Pressure Drop (inlet-to-outlet)

See Figure 1-3

Maximum Inlet Pressure 100 psi (6.9 bars)

Alkalinity 6.0 - 8.0 pH

Calcium Carbonate < 75 ppm

NOTE: Water conditioning may be required for ap plications not meetin g these requirements.

WATER PRESSURE DROP (Bars)

.07 .49

.21

.35

.63

4.00

3.50

3.00

2.50

2.00

1.50

WATER FLOW RATE (GPM)

EPT

.77

15.2

13.3

11.40

9.50

7.60

5.70

WATER FLOW RATE (LPM)

1.00

0.50 1

NOTE: Figure 1-3 defines the water flow rate through the Compressor as a function of the pressure drop from

water inlet to water outlet. You must provide the correct pressure drop in your water supply system to ensure that

WATER PRESSURE DROP (PSID)

3.80

1.90

Figure 1-3: Water Flow Rate versus Pressure Drop

General

The information in Table 1-4 provides general Compressor operating specifications.

Table 1-4: General Compressor Operating Specifications

Specification Values Part Number 8135901G001

Input Power Cable

(Customer Supplied)

Nominal Helium Pressure

Ambient Operating Tem-

perature Range

Interface

Gas Supply Connector

Gas Return Connector

Remote Control Receptacle

Adsorber Service Schedule 3 Years

600 VAC 12 Gauge, 3 conductor wire with ground Must conform to local electrical codes

Refer to 50 - 100º F (10 - 38º C)

Cryopump Power Receptacles: mates with the CTI-CRYOGENICS supplied cryopump power cable for single pump use.

Mates with remote junction box power cable for multiple cryopump use.

1/2 in. Aeroquip self-sealing coupling

24VAC, 2.7A inductive mates with P5 connector Type MS3106A*

Table 4-1

* Supplied by CTI-CRYOGENICS

NOTE: The 9600 Compressor is designed for continuous operation and should remain ON when the cryopumps are in a regeneration cycle.

Component Description

The components of the 9600 Compressor that are accessible from the rear panel are shown in Figure 1-4 and described in the following paragraphs.

Elapsed Time Meter

Control Circuit Breaker

Gas Charge Flared Fitting

Helium Pressure Gauge

Gas Charge Control Valve

Return Gas Coupling

Power Inlet

Power ON Indicator

System Circuit Breaker

Cryopump Electrical Outlet

Compressor Remote Connector

Supply Gas Coupling

Rear Panel

Cooling Water IN

Cooling Water OUT

Figure 1-4: 9600 Compressor Rear View Component Locations

+ 50 hidden pages

HELIX 9600 Installation, Operation And Maintenance Instructions

Specifications and Main Features

Frequently Asked Questions

User Manual

Table of Contents

Table of Contents

Figures

Tables

Safety Conventions

Section 1 - 9600 Compressor Description

Section 2 - Unpacking and Inspection

Section 3 - Installation

Section 4 - Operation

Section 5 - Maintenance

Appendix A - Customer Support Information

Appendix B - Flow Diagram

Appendix C - Troubleshooting Procedures

Appendix D - Schematic

Index

Figures

Tables

Safety Conventions

Introduction

Signal Word Descriptions

Safety Shape Descriptions

References

Section 1 - 9600 Compressor Description

General

Compressor Configurations

System Documentation

CTI-CRYOGENICS Helium Refrigeration System

Specifications

Component Description