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Ground Master
®
Equipment Ground Monitors
Know whether your equipment is properly
grounded at all times
Proper grounding is crucial for safe and uninterrupted operation of equipment. In
critical environments broken ground connection may result in personnel exposure to
dangerous voltage, equipment lockup or malfunction and damage to sensitive components.
Ground Master offers continuous monitoring of proper ground connection of up to 8
tools and up to 16 tools in tandem with another Ground Master. With individual
status indication, Ground Master shows which ground connection is being monitored,
which one is OK and which one has failed. Enabling switches for each ground
connection allow for accurate and safe indication.
With safety in mind, every ground connection has individual easily-replaceable fuse to
prevent dangerous voltages from miswiring propagating to other equipment.
In addition to ground connection, Ground Master offers monitoring of EMI on each
ground, assisting in diagnostics of lockups and malfunction.
Ground Master provides intelligent information to a facility monitoring system with
detailed status on each ground connection. Ground Master RT provides relay closure
and logic signal to the tool so that it can be shut down in case of ground failure.
www.credencetech.com
Applications
Front-End Semiconductors
Photolithography Equipment
Wafer Handlers
Back-End Semiconductor Tools
GMR Head Testers
Any Sensitive Equipment Locations
Industrial Robotics
Tool Clusters
Medical Environment
Military
Wherever ESD and EMI are an Issue
Features
Continuous ground monitoring
ANSI/ESDA S.20.20 compliant
Adjustable alarm threshold
EMI monitoring on each ground
Safety protection for each ground
Enable switches for each ground
Industrial network interface
Connection to Facility Monitoring
System
Connection to the Tool
Key Advantages
ANSI/ESDA S.20.20
Compliant
Ground Master measures ground impedance
in accordance with requirements of ANSI/
ESDA S.20.20 standard.
Adjustable Alarm Threshold
The alarm threshold can be easily adjusted at
any time in a range of 1 to 20 Ohms
Safety
Each ground connection is protected by
individual fuses to protect equipment in case
of miswiring of neutral, power and ground.
EMI
Ground Master monitors EMI on each
ground and indicates EMI status
Output to Data Acquisition or
Facility Monitoring System
Ground Master® monitors provide intelligent
output to a data acquisition or facility
monitoring system. Power can be supplied
via the same cable from FMS as well.
Output to the Tool
Ground Master® RT provides relay closure
and logic signal to the tool to shut it down
when any of the grounds fail.
Ground Master
Ground Monitors
Models CTC065
CTC065RT
Credence
Technologies
®
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Specification
Ground ImpedanceGround Impedance
Ground Impedance
Ground ImpedanceGround Impedance
Alarm Threshold 1...20 Ohms
EMI on Ground 0dBm
IndicationIndication
Indication
IndicationIndication
Visual LEDs for each channel
Audio Buzzer
OtherOther
Other
OtherOther
Enable switches Each channel
ConectivityConectivity
Conectivity
ConectivityConectivity
Interface
Current Interface 4...20 mA
Relay Output N/C Relay Contacts
MODBUS Interface MOSBUS Std. Compliant
Data Connector RJ45
(user-adjustable)
Broadband
plus Logic Level Output
Ground Master® RT Shown
Application Example:
Monitoring of Assembly Tool
Many assembly tools consist of several parts which are not
always grounded. Their ground connection may also be
broken during maintenance, modifications and even in
normal use. Ground Master® can monitor ground connection of every single part of the entire tool to assure its
compliance with the standards and uninterrupted operation
of the tool. Ground Master® RT can provide relay closure or
logic level signal to the tool to stop in case of ground failure.
GeneralGeneral
General
GeneralGeneral
Power (local or network)
Voltage 24V DC
Current Consumption <250mA
Dimension (approx.) 4.5” x 3.6” x 1.1”
(without mounting bracket) 114mm x 92mm x 28mm
Safety First:
Grounding is Safety Issue
While grounding is very important for ESD protection, its
foremost objective is to protect personnel from exposure to
high voltage. Improperly done wiring in the facility or inside
the tools can easily bring high voltage on exposed surfaces
of equipment creating a safety hazard. Patent-pending
Ground Master is the only instrument that uses individual
fuses for each ground to prevent propagation of high voltage
on ground wiring of equipment to other tools.
Ordering
Information
Ground Master® comes with:
four spare fuses
grounding hardware
universal power adapter
User’s guide.
Please contact factory for other options and accessories.
©2004, Credence Technologies, Inc. Ground Master is a registered trademarks of Credence Technologies, Inc. Patent Pending. QFA02204
CTC-065-X
Interface
Current Loop 4..20mA 3
Relay Closure / Logic Level RT
MODBUS 5
Credence
Technologies, Inc.
3601-A Caldwell Dr.
Soquel, CA 95073 U.S.A.
Tel. 831-459-7488
FAX 831-427-3513
www.credencetech.com
[email protected]
All specifications are subject to change without notice. Made in U.S.A.
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