GE Fanuc B-65150E/04 Parameter Manual

GE Fanuc Automation

Computer Numerical Control Products

Alpha Series AC Servo Motor

Parameter Manual

GFZ-65150E/04 December 1999

Warnings, Cautions, and Notes
as Used in this Publication

Warning notices are used in this publication to emphasize that hazardous voltages, currents,
temperatures, or other conditions that could cause personal injury exist in this equipment or
may be associated with its use.

In situations where inattention could cause either personal injury or damage to equipment, a
Warning notice is used.

Caution notices are used where equipment might be damaged if care is not taken.

GFL-001

Warning

Caution

Note

Notes merely call attention to information that is especially significant to understanding and
operating the equipment.

This document is based on information available at the time of its publication. While efforts
have been made to be accurate, the information contained herein does not purport to cover all
details or variations in hardware or software, nor to provide for every possible contingency in
connection with installation, operation, or maintenance. Features may be described herein
which are not present in all hardware and software systems. GE Fanuc Automation assumes
no obligation of notice to holders of this document with respect to changes subsequently made.

GE Fanuc Automation makes no representation or warranty, expressed, implied, or statutory
with respect to, and assumes no responsibility for the accuracy, completeness, sufficiency, or
usefulness of the information contained herein. No warranties of merchantability or fitness for
purpose shall apply.

©Copyright 1999 GE Fanuc Automation North America, Inc.

All Rights Reserved.

B-65150E/04 DEFINITION OF WARNING, CAUTION, AND NOTE

DEFINITION OF WARNING, CAUTION, AND NOTE

This manual includes safety precautions for protecting the user and preventing damage to the m achine.
Precautions are classified into Warning and Caution according to their bearing on safety. Also,
supplementary information is described as a Note. Read the Warning, Caution, and Note thoroughly
before attempting to use the machine.

WARNING





CAUTION





NOTE





!

s-1

CONTENTS

B-65150E/04

DEFINITION OF WARNING, CAUTION, AND NOTE.................................s-1

1 OVERVIEW.............................................................................................. 1

1.1 SERVO SOFTWARE AND MODULES SUPPORTED BY EACH NC MODEL ........................................2

1.2 ABBREVIATIONS OF THE NC MODELS COVERED BY THIS MANUAL...............................................4

1.3 RELATED MANUALS..............................................................................................................................5

2 SETTING α SERIES SERVO PARAMETERS ......................................... 7

2.1 INITIALIZING SERVO PARAMETERS....................................................................................................7

2.1.1 Before Servo Parameter Initialization............................................................................................................. 7

2.1.2 Parameter Initialization Flow......................................................................................................................... 8

2.1.3 Servo Parameter Initialization Procedure....................................................................................................... 9

2.1.4 Setting Servo Parameters When a Separate Detector for the Serial Interface Is Used.................................. 23

2.1.5 Actions for Invalid Servo Parameter Setting Alarms.................................................................................... 29

3 α SERIES PARAMETER ADJUSTMENT............................................... 39

3.1 SERVO ADJUSTMENT SCREEN..........................................................................................................40

3.2 ACTIONS FOR ALARMS.......................................................................................................................43

3.3 PROCEDURES FOR GAIN ADJUSTMENT AND VIBRATION-DAMPING CONTROL..........................50

3.3.1 Gain Adjustment Procedure.......................................................................................................................... 50

3.3.2 Vibration in the Stop State........................................................................................................................... 53

3.3.3 Vibration during Travel................................................................................................................................ 55

3.3.4 Cumulative Feed...........................................................................................................................................57

3.3.5 Overshoot..................................................................................................................................................... 58

3.4 ADJUSTING PARAMETERS FOR HIGH SPEED AND HIGH PRECISION...........................................59

3.4.1 Level-up HRV Control Adjustment Procedure ............................................................................................ 59

3.4.2 Cutting Feed/Rapid Traverse Switchable Function...................................................................................... 67

3.4.3 Servo Parameter Adjustment Procedure for Achieving High Speed and High Precision............................. 71

3.4.4 High-Speed Positioning Adjustment Procedure........................................................................................... 84

3.4.5 Rapid Traverse Positioning Adjustment Procedure...................................................................................... 87

4 SERVO FUNCTION DETAILS ............................................................... 92

4.1 LIST OF SERVO FUNCTIONS..............................................................................................................93

4.2 HRV CONTROL.....................................................................................................................................96

4.3 LEVEL-UP HRV CONTROL.................................................................................................................101

4.4 VIBRATION SUPPRESSION FUNCTION IN THE STOP STATE........................................................103

4.4.1 250 µsec Acceleration Feedback Function................................................................................................. 103

4.4.2 Velocity Loop High Cycle Management Function..................................................................................... 104

4.4.3 Function for Changing the Proportional Gain in the Stop State ................................................................. 107

4.4.4 N Pulse Suppression Function.................................................................................................................... 110

−

CONTENTS B-65150E/04

4.5 MACHINE-RESONANCE SUPPRESSION FUNCTION.......................................................................112

4.5.1 Machine Speed Feedback Function............................................................................................................ 112

4.5.2 Observer Function...................................................................................................................................... 116

4.5.3 Torque Command Filter.............................................................................................................................120

4.5.4 Dual Position Feedback Function...............................................................................................................122

4.5.5 Vibration-damping Control Function......................................................................................................... 130

4.5.6 Vibration Suppression Filter Function....................................................................................................... 133

4.5.7 Current Loop 1/2PI Function .....................................................................................................................134

4.6 SHAPE-ERROR SUPPRESSION FUNCTION.....................................................................................137

4.6.1 Feed-forward Function ..................................................................................................... .......................... 137

4.6.2 Advanced Preview Feed-forward Function................................................................................................ 141

4.6.3 RISC Feed-forward Function..................................................................................................................... 144

4.6.4 Backlash Acceleration Function................................................................................................................. 146

4.6.5 Two-stage Backlash Acceleration Function ............................................................................................... 149

4.6.6 Static Friction Compensation Function...................................................................................................... 160

4.7 OVERSHOOT COMPENSATION ........................................................................................................162

4.8 HIGH-SPEED POSITIONING FUNCTION...........................................................................................171

4.8.1 Position Gain Switch Function................................................................................................................... 171

4.8.2 Low-speed Integration Function................................................................................................................. 175

4.8.3 Fine Acceleration/Deceleration (FAD) Function........................................................................................ 177

4.9 DUMMY SERIAL FEEDBACK FUNCTIONS........................................................................................188

4.9.1 Dummy Serial Feedback Functions............................................................................................................ 188

4.9.2 How to Use the Dummy Feedback Functions for a Multiaxis Servo Amplifiers

When an Axis Is Not in Use....................................................................................................................... 191

4.10 BRAKE CONTROL FUNCTION...........................................................................................................192

4.11 STOP DISTANCE REDUCTION FUNCTION.......................................................................................197

4.11.1 Emergency Stop Distance Reduction Function Type 1.............................................................................. 197

4.11.2 Emergency Stop Distance Reduction Function Type 2.............................................................................. 200

4.11.3 Separate Detector Hardware Disconnection Stop Distance Reduction Function........................................201

4.11.4 OVL and OVC Alarm Stop Distance Reduction Function......................................................................... 204

4.11.5 Overall Use of the Stop Distance Reduction Functions..............................................................................204

4.12 ABNORMAL-LOAD DETECTION FUNCTION.....................................................................................205

4.12.1 Abnormal-load Detection Function............................................................................................................ 205

4.12.2 Unexpected Disturbance Detection Performed Separately for Cutting and Rapid Traverse....................... 214

4.13 FUNCTION FOR OBTAINING CURRENT OFFSETS AT EMERGENCY STOP..................................216

4.14 LINEAR MOTOR PARAMETER SETTING ..........................................................................................217

4.14.1 Procedure for Setting the Initial Parameters of Linear Motors................................................................... 217

4.14.2 Linear Motor Thrust Ripple Correction......................................................................................................225

4.15 TORQUE CONTROL FUNCTION........................................................................................................232

4.16 USAGE OF THE SERVO SOFTWARE FOR SUPER-PRECISION MACHINING................................235

4.17 TANDEM CONTROL FUNCTION........................................................................................................242

4.17.1 Preload Function ........................................................................................................................................ 248

4.17.2 Damping Compensation Function.............................................................................................................. 251

4.17.3 Velocity Feedback Averaging Function..................................................................................................... 254

−

B-65150E/04 CONTENTS

4.17.4 Servo Alarm 2-axis Simultaneous Monitor Function................................................................................. 255

4.17.5 Motor Feedback Sharing Function............................................................................................................. 255

4.17.6 Full-closed Loop Feedback Sharing Function............................................................................................ 256

4.17.7 Full Preload Function................................................................................................................................. 257

4.17.8 Position Feedback Switching Function ......................................................................................................262

4.17.9 Adjustment................................................................................................................................................. 264

4.17.10 Notes on Tandem Control.......................................................................................................................... 268

4.17.11 Block Diagrams.......................................................................................................................................... 270

4.18 SERVO AUTO TUNING.......................................................................................................................272

4.19 SERVO CHECK BOARD OPERATING PROCEDURE........................................................................278

5 DETAILS OF PARAMETERS .............................................................. 291

5.1 DETAILS OF Series 0-C AND 15-A SERVO PARAMETERS (9041, 9046 SERIES)...........................292

5.2 DETAILS OF THE SERVO PARAMETERS FOR Series 15, 16, 18, 20, 21, Power Mate

(SERIES 9060, 9064, 9065, 9066, 9070, 9080, 9081, 9090, AND 90A0)............................................299

6 PARAMETER LIST.............................................................................. 317

6.1 FOR Series 0-C AND 15-A ..................................................................................................................318

6.2 PARAMETERS FOR STANDARD CONTROL.....................................................................................326

6.3 PARAMETERS FOR HRV CONTROL.................................................................................................334

APPENDIX
A DIFFERENCES BETWEEN THE PARAMETERS

FOR THE Series 15-A AND Series 15-B (15i-A) ................................ 347

B ANALOG SERVO INTERFACE SETTING PROCEDURE ................... 350

C PARAMETERS SET WITH VALUES IN DETECTION UNITS.............. 355

C.1 PARAMETERS FOR Series 15i...........................................................................................................356

C.2 PARAMETERS FOR Series 15-B........................................................................................................358

C.3 PARAMETERS FOR Series 16, 18, AND 21.......................................................................................360

C.4 PARAMETERS FOR Series 0-C..........................................................................................................361

C.5 PARAMETERS FOR THE Power Mate i..............................................................................................362

C.6 PARAMETERS FOR THE Power Mate -E...........................................................................................363

D FUNCTION-SPECIFIC SERVO PARAMETERS .................................. 364

−

B-65150E/04 1. OVERVIEW

1 OVERVIEW

This manual describes the servo parameters of the following NC
models using an α servo system. The descriptions include the servo
parameter start-up and adjustment procedures. The meaning of each
parameter is also explained.

− 1 −

1. OVERVIEW B-65150E/04

1.1 SERVO SOFTWARE AND MODULES SUPPORTED BY

EACH NC MODEL

NC product name

Series 0-MODEL C
Series 15-MODEL A

Series 15-MODEL B (Note 2)
Series 16-MODEL A
Series 18-MODEL A
Series 20-MODEL A
Series 21-MODEL A
Series 21-MODEL B
Power Mate-MODEL D
Power Mate-MODEL F
Power Mate-MODEL H
Power Mate-MODEL I
Series 15-MODEL B (Note 2)
Series 16-MODEL B
Series 18-MODEL B
Series 16-MODEL C
Series 18-MODEL C

Series 15-B (FS15-B) (Note 2)
Series 16-C (FS16-C)
Series 18-C (FS18-C)

Series 16i -MODEL A (Note 3)
Series 18i -MODEL A
Series 21i -MODEL A
Power Mate i -MODEL D
Power Mate i -MODEL H

Series 15i-MODEL A

Power Mate-MODEL E (PME)

Series and edition of applicable servo

software

Series 9046/A(01) and subsequent editions
(Supporting standard and high-speed
positioning)
Series 9041/A(01) and subsequent editions
(Supporting dual position feedback)

Series 9060/J(10) and subsequent editions 320C25 module

Series 9060/J(10) and subsequent editions
(Supporting standard and high-speed
positioning)
Series 9066/F(06) and subsequent editions
(Supporting FAD & HRV control) (Note 1)

Series 9070/A(01) and subsequent editions

Series 9080/E(05) and subsequent editions
(Supporting FAD & HRV control and linear
motor)
Series 9081/A(01) and subsequent editions
(Supporting SUPER-precision machining)
Series 9090/A(01) and subsequent editions
(Supporting i series CNC)
Series 90A0/A(01) and subsequent editions
(Supporting i series CNC and level-up HRV
control)
Series 90A0/A(01) and subsequent editions
(Supporting i series CNC and level-up HRV
control)
Series 9064/E(05) and subsequent editions
(Standard)
Series 9065/A(01) and subsequent editions
(Supporting HRV control)

Serial axis board

320C25 module

320C51 module
320C52 module

320C52 module

320C52 servo card

320C543 servo card

320C543 servo card

Module

− 2 −

B-65150E/04 1. OVERVIEW

NOTE 1 For some models of the Series 21, Power Mate-D, and

Power Mate-F, the NC software and servo software are
integrated.
The NC software of the following series and editions
includes servo software supporting the α servo motor.

Series21-TA Series 8866/001B and subsequent editions
Series21-TB control A type Series DE01/001A and subsequent editions

Power Mate-D
Power Mate-F Series 8870/001A and subsequent editions

Series 8831/001A and subsequent editions
Series 8836/001A and subsequent editions

NOTE 2 The servo software series of the Series 15-B depends on the

incorporated servo module, as shown below:

Servo software CNC CPU Servo module

Series 9060 68030 320C25 module
Series 9070 68040 320C51 module
Series 9080
Series 9081

68040 320C52 module

NOTE 3 The servo software series of the Series 16i, 18i, 21i, and

Power Mate i depend on the incorporated servo card, as
shown below.

Servo software Servo card

Series 9090 320C52 card
Series 90A0 320C543 card

− 3 −

1. OVERVIEW B-65150E/04

1.2 ABBREVIATIONS OF THE NC MODELS COVERED BY

THIS MANUAL

The models covered by this manual, and their abbreviations are :

NC product name Abbreviations

FANUC Series 0-MODEL C Series 0-C Series 0
FANUC Series 15-MODEL A Series 15-A
FANUC Series 15-MODEL B Series 15-B
FANUC Series 15i-MODEL A
FANUC Series 16-MODEL A Series 16-A
FANUC Series 16-MODEL B Series 16-B
FANUC Series 16-MODEL C Series 16-C
FANUC Series 16i-MODEL A
FANUC Series 18-MODEL A Series 18-A
FANUC Series 18-MODEL B Series 18-B
FANUC Series 18-MODEL C Series 18-C
FANUC Series 18i-MODEL A
FANUC Series 20-MODEL A Series 20-A Series 20
FANUC Series 21-MODEL A Series 21-B
FANUC Series 21-MODEL B Series 21-C
FANUC Series 21i-MODEL A
FANUC Power Mate-MODEL D Power Mate-D
FANUC Power Mate-MODEL F Power Mate-F
FANUC Power Mate-MODEL H Power Mate-H
FANUC Power Mate-MODEL I Power Mate-I
FANUC Power Mate i-MODEL D Power Mate i-D
FANUC Power Mate i-MODEL H Power Mate i-H

FANUC Power Mate-MODEL E Power Mate-E

Series 15i-A

Series 16i-A

Series 18i-A

Series 21i-A

Series 15 (Note 1)

Series 16 (Note 1)

Series 18 (Note 1)

Series 21 (Note 1)

Power Mate (Note 2)

Power Mate-E
(Note 2)

NOTE

1 In this manual, a reference to the Series 15, 16, 18, or

21, without a specific model name refers to all the
models of the series.

2 In this manual, Power Mate refers to the Power

Mate-D, Power Mate-F, Power Mate-H, Power Mate-I,
Power Mate i-D, and Power Mate i-H.
The Power Mate-E, which uses different servo
software and different parameter numbers, is
designated by its full name or as Power Mate-E.

− 4 −

B-65150E/04 1. OVERVIEW

1.3 RELATED MANUALS

The following ten kinds of manuals are available for FANUC SERV O
MOTOR α/β series.
In the table, this manual is marked with an asterisk (*).

Table 1. Related manuals of SERVO MOTOR α/β series

Document name Document

FANUC AC SERVO MOTOR α series
DESCRIPTIONS

FANUC AC SERVO MOTOR β series
DESCRIPTIONS

FANUC AC SPINDLE MOTOR α series
DESCRIPTIONS

FANUC SERVO AMPLIFIER α series
DESCRIPTIONS

FANUC CONTROL MOTOR AMPLIFIER α series
(SERVO AMPLIFIER UNIT)
DESCRIPTIONS

FANUC CONTROL MOTOR α series
MAINTENANCE MANUAL

FANUC CONTROL MOTOR AMPLIFIER α series
(SERVO AMPLIFIER UNIT)
MAINTENANCE MANUAL

FANUC SERVO MOTOR β series
MAINTENANCE MANUAL

FANUC AC SERVO MOTOR α series
PARAMETER MANUAL

FANUC AC SPINDLE MOTOR α series
PARAMETER MANUAL

number

B-65142E

B-65232EN

B-65152E

B-65162E

B-65192EN

B-65165E

B-65195EN

B-65235EN

B-65150E

B-65160E

Major contents Major usage

• Specification

• Characteristics

• External dimensions

• Connections

• Specification

• Characteristics

• External dimensions

• Connections

• Specification

• Characteristics

• External dimensions

• Connections

• Specifications and

functions

• Installation

• External dimensions

and maintenance
area

• Connections

• Start up procedure

• Troubleshooting

• Maintenance of motor

• Start up procedure

• Troubleshooting

• Start up procedure

• Troubleshooting

• Maintenance of motor

• Initial setting

• Setting parameters

• Description of

parameters

• Initial setting

• Setting parameters

• Description of

parameters

• Selection of motor

• Connection of

motor

• Selection of
amplifier

• Connection of
amplifier

• Start up the
system
(Hardware)

• Troubleshooting

• Maintenance of

motor

• Start up the
system
(Hardware)

• Troubleshooting

• Start up the

system
(Hardware)

• Troubleshooting

• Maintenance of

motor

• Start up the
system (Software)

• Turning the
system
(Parameters)

*

− 5 −

1. OVERVIEW B-65150E/04

Other manufactures’ products referred to in this manual

* IBM is registered trademark of International Business Machines

Corporation.

* MS-DOS and Windows are registered trademarks of Microsoft

Corporation.
* 486SX and 486DX2 are registered trademarks of Intel corporation.
All other product names identified throughout this manual are
trademarks or registered trademarks of their respective companies.

In this manual, the servo parameters are explained using the following
notation:

(Example)

No. 1875

No. 2021

Series 0-CSeries 15

No. 8X21

No. 1021

Servo parameter function name

Load inertia ratio

Series16, 18, 20, 21
Power Mate

Power Mate-E

The α servo motor can take either of the following configurations:

α

motor

+

α

pulse coder

The following α pulse coders are available.

Pulse coder name Resolution Type

αA64 65,536 pulse/rev Absolute
αI64 65,536 pulse/rev Incremental
αA1000 1,000,000 pulse/rev Absolute

When parameters are set, these pulse coders are all assumed to have a
resolution of 1,000,000 pulses per motor revolution.

NOTE

The αA1000 is used for 0.1-µm detection control and
high-speed high-precision control.

− 6 −

B-65150E/04 2. SETTING α SERIES SERVO PARAMETERS

2 SETTING α SERIES SERVO PARAMETERS

2.1 INITIALIZING SERVO PARAMETERS

2.1.1 Before Servo Parameter Initialization

Before starting servo parameter initialization, confirm the following:
<1> NC model (ex.: Series 15-B)
<2> Servo motor model (ex.:
<3> Pulse coder built in a motor (ex.:
<4> Is the separate position detector used? (ex.: Not used)
<5> Distance the machine tool moves per revolution of the motor

(ex.: 10 mm per one revolution)
<6> Machine detection unit (ex.: 0.001 mm)
<7> NC command unit (ex.: 0.001 mm)

α 6/2000)
α A1000)

− 7 −

2. SETTING α SERIES SERVO PARAMETERS B-65150E/04



2.1.2 Parameter Initialization Flow

On the servo setting and servo adjustment screens, set the following:

In emergency stop state, switch on NC.

Initialization bits

Motor No.
AMR
CMR
Move direction

Reference counter
Velocity gain

Make settings for using separate detector.
No. 1807#3 = 1, 1815#1 = 1 (Series 15)
Set bits 0 to 3 of No. 37 to 1. (Series 0-C)
No. 1815#1 = 1 (Series 16, 18, 21, Power Mate)
No. 1002 = 10001000 (Power Mate-E)

Set flexible feed gear.

00000000 (except Power Mate-E) (Note)
00011000 (for Power Mate-E)
See (4) in Subsec. 2.1.3.
00000000
See (6) in Subsec. 2.1.3.
111 (Clockwise as viewed from detector)

−111 (Counterclockwise as viewed from detector)
See (10) in Subsec. 2.1.3.
Set 100% if the machine inertia is unknown.
(Equivalent to load inertia ratio parameter)

Which system is being used?

← See (7) in Subsec. 2.1.3. →

Semi-closed loopClosed loop

Set flexible feed gear.

Number of velocity pulses
Number of position pulses

8192 (Note)
Ns (Note)

For the phase A/B separate
detector and serial linear scale:
Ns: Number of feedback pulses per motor

revolution, received from the separate

detector
For the serial rotary scale:
Ns: 12500 × (motor-to-table deceleration ratio)
Example: When the motor rotates ten turns while

the table rotates one turn

1

12500 × = 1250

10

Set Ns to 1250.

NOTE

When initialization bit 0 is set to 1, the settings of the
number of velocity pulses and the number of position
pulses must be reduced by a factor of 10.

Number of velocity pulses
Number of position pulses

Turn power off then on.

End of parameter setting

− 8 −

8192 (Note)
12500 (Note

B-65150E/04 2. SETTING α SERIES SERVO PARAMETERS

2.1.3 Servo Parameter Initializ ati on Procedure

(1) Switch on the NC in an emergency stop state.

Enable parameter writing (PWE = 1).

(2) Initialize servo parameters on the servo setting screen.

For a Power Mate with no CRT, specify a value for an item
number on the servo setting screen. See Fig. 2.1.3.
To display the servo setting screen, follow the procedure below,
using the key on the NC.

 Series 0-C

0389 SVS

SVS (#0) 0: Displays the servo screen.

 Series 15

 Series 16, 18, 20, 21

3111 SVS

SVS (#0) 1: Displays the servo screen.

Press the key several times, and the serv o setting screen w ill

PARAM

appear.

If no servo screen appears, set the following parameter as shown, and
switch the NC off and on again.

#7 #6 #5 #4 #3 #2 #1 #0

SERVICE

Press the key several times, and the servo setting screen will
appear.

SYSTE

→ [SYSTEM] → [ ] → [SV-PRM]

If no servo screen appears, set the following parameter as shown, and
switch the NC off and on again.

#7 #6 #5 #4 #3 #2 #1 #0

− 9 −

2. SETTING α SERIES SERVO PARAMETERS B-65150E/04

When the following screen appears, move the cursor to the item you
want to specify, and enter the value directly.

Servo set

X axis
INITIAL SET BITS
Motor ID No.
AMR
CMR
Feed gear N
(N/M) M
Direction Set
Velocity Pulse No.
Position Pulse No.
Ref. counter

Fig. 2.1.3 Servo setting menu Correspondence of Power Mate

00001010

00000000

8192
12500
10000

16

2

1
100
111

01000 N0000

Z axis

00001010

16

00000000

2

1
100
111

8192
12500
10000

Power Mate Power Mate-E

No. 2000
2020
2001
1820
2084
2085
2022
2023
2024
1821

No. 1000
1020
1001
100
1084
1085
1022
1023
1024
324

(3) Start initialization.

#7 #6 #5 #4 #3 #2 #1 #0

INITIAL SET BIT PRMC DGPR PLC0

( Note)

Start initialization (Keep the NC power on until step (11).)

DGPR (#1) = 0 Automatically set to 1 after initialization.

NOTE

Once initialization has been completed, the Series
0-C and Series 15-A automatic al ly set bit 3 (PRMC )
for initialization to 0, while other NC models set the
bit to 1. Note that the bit 3 (PRMC) bit must be set to
0 for the Series 0-C and Series 15-A.

(4) Specify the motor ID No.

Select the motor ID No. of the servo motor to be used, according
to the motor model and drawing num ber (the m iddle four dig its of
A06B-XXXX-BXXX) listed in the tables on subsequent pages.

− 10 −

B-65150E/04 2. SETTING α SERIES SERVO PARAMETERS

α series servo motor

Motor model α1/3000 α2/2000 α2/3000 α2.5/3000 α3/3000
Motor
specification
Motor type No. 61 46 62 84 15

Motor model α6/2000 α6/3000 α12/2000 α12/3000 α22/1500
Motor
specification
Motor type No. 16 17 18 19 27

Motor model α22/2000 α22/3000 α30/1200 α30/2000 α30/3000
Motor
specification
Motor type No.2021282223

Motor model α40/FAN α40/2000 α65 α100 α150
Motor
specification
Motor type No. 29 30 39 40 41

0371 0372 0373 0374 0123

0127 0128 0142 0143 0146

0147 0148 0151 0152 0153

0158 0157 0331 0332 0333

Motor model α300/2000 α400/2000
Motor
specification
Motor type No. 111 112

αL series servo motor

Motor model αL3/3000 αL6/3000 αL9/3000 α
Motor
specification
Motor type No. 56 or 68* 57 or 69* 58 or 70* 59 60

0561 0562 0564 0571 0572

0337 0338

L25/3000αL50/2000

Use the motors mark ed by * with the serv o software that supports HRV
control (Series 9066, 9080, 9081, 9090, and 90A0).

αC series servo motor

Motor model αC3/2000 αC6/2000 αC12/2000 αC22/1500
Motor
specification
Motor type No. 7 8 9 10

αHV series servo motor

Motor model α3HV α6HV α12HV α22HV α30HV
Motor
specification
Motor type No. 1 2 3 102 103

0121 0126 0141 0145

0171 0172 0176 0177 0178

− 11 −

2. SETTING α SERIES SERVO PARAMETERS B-65150E/04

αM series servo motor

Motor model αM2/3000 α
Motor
specification
Motor type No.9899242526

Motor model α

Motor
specification
Motor type No. 100 101 108 110

Motor model αM6HV αM9HV αM22HV αM30HV
Motor
specification
Motor type No. 104 105 106 107

Linear motor

Motor model 1500A 3000B 6000B 9000B 15000C
Motor
specification
Motor type No.9091929394

0376 0377 0161 0162 0163

M22/3000αM30/3000

0165 0166 170 170

0182 0183 0185 0186

0410 0411 0412 0413 0414

M2.5/3000

αM3/3000 αM6/3000 αM9/3000

αM40/3000FAN

(360A amplifier

driving)

αM40/3000

(130A amplifier

driving)

Remark)

β series servo motor

Motor model β0.5 β1/3000 β2/3000 β3/3000 β6/2000
Motor
specification
Motor type No.1335363334

0113 0031 0032 0033 0034

These motor type Nos. may not be supported depending on the servo
software being used.
The following lists the motor type Nos. together with the applicable
servo software series and editions.

− 12 −

B-65150E/04 2. SETTING α SERIES SERVO PARAMETERS

α series servo motor

Servo software
Motor series
model and
motor type number

9

0

0

0

0

0

0

0

0

0

0

0

6

6

A

9

8

8

7

6

6

4

4

5

4

0

0

1

0

0

6

0

6

1

9

9

9

9

9

9

9

9

9

9

α1/3000 61 A B M A C A C A A E A
α2/2000 46 A B M A C A C A A E A
α2/3000 62 A B M A C A C A A E A
α2.5/3000 84 A B M A C A C A A E A
α3/3000 15 A B M A C A C A A E A
α6/2000 16 A B M A C A C A A E A
α6/3000 17 A B M A C A C A A E A
α12/2000 18 A B M A C A C A A E A
α12/3000 19 A B M A C A C A A E A
α22/1500 27 A B M A C A C A A E A
α22/2000 20 A B M A C A C A A E A
α22/3000 21 A B M A C A C A A E A
α30/1200 28 A B M A C A C A A E A
α30/2000 22 A B M A C A C A A E A
α30/3000 23 A B M A C A C A A E A
α40/FAN 29 ABMACACAAEA
α40/2000 30 A B M A C A C A A E A
α65 39ABMACACAAEA
α100 40 A B M A C A C A A E A
α150 41 A B M A C A C A A E A
α300/2000 111 Y M K
α400/2000 112 Y M K

αL series servo motor

Servo software
Motor series
model and
motor type number

9

0

0

0

0

0

0

0

0

0

0

0

6

6

A

9

8

8

7

6

6

4

4

5

4

0

0

1

0

0

6

0

6

1

9

9

9

9

9

9

9

9

9

9

αL3/3000 5668ABMAICAKCEAAAAEA

αL6/3000 5769ABMAICAKCEAAAAEA

αL9/3000 5870ABMAICAKCEAAAAEA

αL25/3000 59 A B M A C A C A A E A
αL50/3000 60 A B M A C A C A A E A

αC series servo motor

Servo software
Motor series
model and
motor type number

9

0

0

0

0

0

0

0

0

0

0

0

6

6

A

9

8

8

7

6

6

4

4

5

4

0

0

1

0

0

6

0

6

1

9

9

9

9

9

9

9

9

9

9

αC3/2000 7 A B M A C A C A A E A
αC6/2000 8 A B M A C A C A A E A
αC12/2000 9 A B M A C A C A A E A
αC22/1500 10 A B M A C A C A A E A

− 13 −

2. SETTING α SERIES SERVO PARAMETERS B-65150E/04

αHV series servo motor

9

9

9

9

9

9

9

9

9

9

Servo software
Motor series
model and
motor type number

α3HV 1 W B M A A A A F A
α6HV 2 W B M A A A A F A
α12HV 3 A B M A C A C A A E A
α22HV 102 I K E D A
α30HV 103 I K E D A

αM series servo motor

Servo software

Motor series
model and
motor type number

αM2/3000 98 I K E D A
αM2.5/3000 99 I K E D A
αM3/3000 24 A B M A C A C A A E A
αM6/3000 25 A B M A C A C A A E A
αM9/3000 26 A B M A C A C A A E A
αM22/3000 100 I K E D A
αM30/3000 101 I K E D A
αM40/3000

(360A driving)
αM40/3000
(130A driving)

αM6HV 104 I K E D A
αM9HV 105 I K E D A
αM22HV 106 I K E D A
αM30HV 107 I K E D A

9

0

0

0

0

0

0

0

0

9

8

8

7

6

6

4

4

0

1

0

0

6

0

6

1

9

9

9

9

9

9

9

9

0

0

0

0

0

0

0

0

9

8

8

7

6

6

4

4

0

1

0

0

6

0

6

1

108 Y L D

110 Y L D

0

0

0

6

6

A

5

4

0

9

9

9

0

0

0

6

6

A

5

4

0

Linear motor

9

9

9

9

9

9

9

Servo software

Motor series
model and
motor type number
1500A 90 D A A A A
3000B 91 D A A A A
6000B 92 D A A A A
9000B 93 D A A A A
15000C 94 K S J C

9

0

0

0

0

0

0

0

0

9

8

8

7

6

6

4

4

0

1

0

0

6

0

6

1

− 14 −

9

9

9

0

0

0

6

6

A

5

4

0

B-65150E/04 2. SETTING α SERIES SERVO PARAMETERS

Reference)
β series servo motor

9

9

9

9

9

9

9

9

9

9

Servo software

Motor series
model and
motor type number

β0.5/3000 13 A B M A C A C A A E A
β1/3000 35 A B M A C A C A A E A
β2/3000 36 A B M A C A C A A E A
β3/3000 33 G W B H A C A A F A
β6/2000 34 A B M A C A C A A E A

9

0

0

0

0

0

0

0

0

0

0

0

6

6

A

9

8

8

7

6

6

4

4

5

4

0

0

1

0

0

6

0

6

1

(5) Set AMR as described below:

α pulse coder 00000000

(6) Set CMR with the scale of a distance the NC instructs the machine

to move.
CMR = Command unit / Detection unit

CMR 1/2 to 48 Setting value = CMR × 2

Usually, CMR = 1, so specify 2.

(7) Specify the flexible feed gear (F⋅FG ). This function m akes it easy

to specify a detection unit for the leads and gear reduction ratios
of various ball screws by changing the number of position
feedback pulses from the pulse coder or separate detector.

Setting for the α pulse coder in the semi-closed mode

F⋅FG numerator (≤ 32767) per motor revolution

= (as irreducible fraction)

F⋅FG denominator (≤ 32767) 1,000,000 (Note 2)

(Note 1) Necessary position feedback pulses

NOTE

1 For both F⋅FG number and denominator, the maximum

setting value (after reduced) is 32767.

2 α pulse coders assume one million pulses per motor

revolution, irrespective of resolution, for the flexible
feed gear setting.

3 If the calculation of the number of pulses required per

motor revolution involves π, such as when a rack and
pinion are used, assume π to be approximately
355/113.

4 The setting for serial pulse coder A is the same as for

the α pulse coder.

− 15 −

2. SETTING α SERIES SERVO PARAMETERS B-65150E/04

Example of setting

For detection in 1 µm units, specify as follows:

Ball screw lead

(mm/rev)

10
20
30

Number of necessary

position pulses

(pulses/rev)

10000
20000
30000

F⋅FG

1/100
2/100 or 1/50
3/100

Example of setting

If the machine is set to detection in 1,000 degree units with a gear
reduction ratio of 10:1 for the rotation axis, the table rotates by 360/10
degrees each time the motor makes one turn.
1000 position pulses are necessary for the table to rotate through one
degree.
The number of position pulses necessary for the motor to make one turn
is:

360/10 × 1000 = 36000 with reference counter = 36000

F⋅FG numerator 36000 36

==

F⋅FG denominator 1,000,000 1000

Setting for use of a separate detector (full-closed)

F⋅FG numerator (≤ 32767) to a predetermined amount of travel

F⋅FG denominator (≤ 32767) Number of position pulses corresponding

Number of position pulses corresponding

= (as irreducible fraction)

to a predetermined amount of travel from

a separate detector

DMR can also be used with the parallel type separate position detector,
provided that F⋅FG = 0.

Example of setting

To detect a distance of 1 µm using a 0.5-µm scale, set the following:

Numerator of F⋅FG L/1 1

= =

Denominator of F⋅FG L/0.5 2

(8) Specify the direction in which the motor rotates.

111 Clockwise as viewed from the pulse coder

−111 Counterclockwise as viewed from the pulse coder

− 16 −

B-65150E/04 2. SETTING α SERIES SERVO PARAMETERS

(9) Specify the number of velocity pulses and the number of position

pulses.

Full-closed

Command
unit (µm)
Initialization
bit
Number of
velocity
pulses
Number of
position
pulses

Semi-closed

1 0.1 1 0.1 1 0.1 1 0.1

b0 = 0 b0 = 0 b0 = 0 b0 = 0 b0 = 1 b0 = 0 b0 = 1 b0 = 0 b0 = 0

8192 8192 8192 8192 819 8192 819 8192 8192

12500 12500 12500 Ns Ns/10 Ns Ns/10 Np Np

Parallel type

Serial liner

scale

Serial rotary

scale

Ns : Number of position pulses from the separate detector when

the motor makes one turn

Np: 12500 × (motor-to-table deceleration ratio or acceleration

ratio)
(Example: When the motor rotates ten turns while the table
rotates one turn: Np = 12500/10 = 1250)

 Series 0−C

Conventionally, the initialization bit, bit 0 (high-resolution bit), was
changed according to the command unit. The command unit and
initialization bit 0 have no longer been interrelated with each other in
all CNCs except the Series 0-C and Series 15-A.
Of course, the conventional setting method may also be used. For
easier setting, however, set the bit as follows:

Semi-closed: Initialization bit bit 0 = 0
Full-closed: Initialization bit bit 0 = 1

Only when the number of position pulses exceeds

32767.
In the above table, the number of position pulses is likely to exceed
32767 when the command unit is 0.1 µm in full-closed mode.
When using a separate detector (full-closed mode), also specify the
following parameters:

(When using t he separate serial detector, see Subsec. 2.1.4.)

#7 #6 #5 #4 #3 #2 #1 #0

0037 STP8 STP7 STP4 STPZ STPY STPX

STPX to 8 (#0 to #5) The separate position detector is:

0: Not used for the X-axis, Y-axis, Z-axis, fourth axis, seventh axis,

or eighth axis

1: Used for the X-axis, Y-axis, Z-axis, fourth axis, seventh axis,

and eighth axis

− 17 −

2. SETTING α SERIES SERVO PARAMETERS B-65150E/04

 Series 15, 16, 18, 20, 21,

Power Mate

#7 #6 #5 #4 #3 #2 #1 #0

1807 PFSE

−

↑ Must be specified only for Series 15.

PFSE (#3) The separate position detector is:

0: Not used
1: Used

CAUTION

This parameter is used only for Series 15.

#7 #6 #5 #4 #3 #2 #1 #0

1815 OPTX

↑

Must be specified for all NCs.

OPTX (#1) The separate position detector is:

0: Not used
1: Used

 Power Mate−E

NOTE

For Series 16, 18, 20, and 21, setting this parameter
causes bit 3 of parameter No. 2002 to be set to 1
automatically.

#7 #6 #5 #4 #3 #2 #1 #0

1002 GRSL PFSE

−

GRSL (#7) The separate position detector is:

PFSE (#3) 0: Not used

1: Used
Specify the same value for both GRSL and PFSE.

(10) Specify the reference counter.

The reference counter is used in making a return to the reference
position by a grid method.

Semi-closed loop

Count on the
reference counter

Number of position pulses corresponding to a

=

single motor revolution or the same number
divided by an integer value

− 18 −

B-65150E/04 2. SETTING α SERIES SERVO PARAMETERS

Example of setting

α pulse coder and semi-closed loop (1-µm detection)

Ball screw lead

(mm/revolution)

10
20
30

Necessary number of

position pulses

(pulse/revolution)

10000
20000
30000

Reference

counter

10000
20000
30000

Grid width

(mm)

10
20
30

When the number of position pulses corresponding to a single motor
revolution does not agree with the reference counter setting, the
position of the zero point depends on the start point.
Should this occur, eliminate the difference by changing the detection
unit.

Example of setting

System using a detection unit of 1 µm, a ball screw lead of 20
mm/revolution, a gear reduction ratio of 1/17, the number of position
pulses corresponding to a single motor revolution set to 1176.47, and
the reference counter set to 1176

In this case, increase all the following parameter values by a factor of
17, and set the detection unit to 1/17 µm.

Parameter modification Series 0-C

FFG
CMR
Reference counter
Effective area
Position error limit in traveling
Position error limit in the stop state
Backlash

Servo screen
Servo screen
Servo screen

Nos. 500 to 503

(All other CNC parameters set in detection units, such as the amount of
grid shift and pitch error compensation magnification, are also
multiplied by 17.)

CAUTION

In addition to the above parameters, there are some
parameters that are to be set in detection units.
For details, see Appendix C.

Making these modifications eliminates the difference between the
number of position pulses corresponding to a single motor revolution
and the reference counter setting.
Number of position pulses corresponding to a single motor revolution =
20000
Reference counter setting = 20000

504 to 507
593 to 596
535 to 538

Series 15, 16,

18, 20, 21,

Power Mate

Servo screen
Servo screen
Servo screen

Nos. 1826, 1827

1828
1829
1851, 1852

Power

Mate-E

Nos. 1084, 1085

100
324
200
202
231
221

− 19 −

2. SETTING α SERIES SERVO PARAMETERS B-65150E/04

CAUTION

In rotation axis control for the Series 16, 18, and
Power Mate, continuous revolution in the same
direction will result in an error if the result of the
following calculation is other than an integer, even if
the reference counter setting is an integer. Therefore,
set parameter No. 1260 so that the result of the
calculation is an integer.
(Amount of travel per rotation of the rotation axis
(parameter No. 1260)) × CMR ×

21

6

(reciprocal of flexible feed gear) × 2

/10
This problem has been corrected in the following
system software version and later versions:
B0F2/04 (16iM)
B1F2/04 (16iT)
BDF2/04 (18iM)
BEF2/04 (18iT)
DDF2/04 (21iM)
DEF2/04 (21iT)

Full-closed loop

Reference counter
setting

Z-phase (reference-position) interval divided by

=

the detection unit, or this value sub-divided by an
integer value

Example of setting

Example 1) When the Z-phase interval is 50 mm and the detection

unit is 1 µm:
Reference counter setting = 50,000/1 = 50,000

Example 2) When a rotation axis is used and the detection unit is

0.001°:
Reference counter setting = 360/0.001 = 360,000

Example 3) When a linear scale is used and a single Z phase exists:

Set the reference counter to 10000, 50000, or another
round number.

(11) When using an S-series amplifier, set the following parameters:

#7 #6 #5 #4 #3 #2 #1 #0
1809 8X04 DLY1 DLY0 TIB1 TIB2 TRW1 TRW0 TIB0 TIA0
2004 1004 01000110

(↑ S-series amplifier)

1866 8X54 Current dead band compensation (PDDP)
2054 1054

Set value 3787 (S-series amplifier)

− 20 −

B-65150E/04 2. SETTING α SERIES SERVO PARAMETERS

(12) Switch the NC off and on again.

This completes servo parameter initialization.
If an invalid servo parameter setting alarm occurs, go to Subsec.

2.1.4.
If a servo alarm related to pulse coders occurs for an axis for
which a servo motor or amplifier is not connected, specify the
following parameter.
A feedback connector is used in conventional Series 0-C and 15­A models. However it cannot be used in a system designed for
operation with an

α pulse coder.

This parameter should be specified instead of the dummy
connector.

#7 #6 #5 #4 #3 #2 #1 #0
1953 8X09 SERD
2009 1009

SERD (#0) The dumm y serial feedback function is: (See Sec. 4.6 for function detail)

0 : Not used
1 : Used

 Series 0−C

0021 APC8 APC7 APC4 APCZ APCY APCX

APCX to 8 (#0 to #5) The absolute position detector is:

 Series 15, 16, 18, 20, 21,

Power Mate

1815 APCX

APCX (#5) The absolute position detector is:

(13) When you are going to use an

α pulse coder as an absolute pulse

coder, use the following procedure.
This procedure is somewhat different from one for conventional
pulse coders. (Steps 3 to 5 have been added.)

1. Specify the following parameter, then switch the NC off.

#7 #6 #5 #4 #3 #2 #1 #0

0: Not used for the X-axis, Y-axis, Z-axis, fourth axis, seventh axis,

or eighth axis.

1: Used for the X-axis, Y-axis, Z-axis, fourth axis, seventh axis, and

eighth axis.

#7 #6 #5 #4 #3 #2 #1 #0

0: Not used
1: Used

− 21 −

2. SETTING α SERIES SERVO PARAMETERS B-65150E/04

 Power Mate−E

#7 #6 #5 #4 #3 #2 #1 #0

0017 APCX

APCX (#0) An absolute position detector is:

0: Not used
1: Used

2. After making sure that the battery for the pulse coder is
connected, switch the NC on.

3. A request to return to the reference
position is displayed.

4. Cause the motor to make one turn by jogging.

5. Turn off and on the CNC.

These steps
were added
for the α
pulse coder.

6. A request to return to the reference position is displayed.

7. Do the zero return.

− 22 −

B-65150E/04 2. SETTING α SERIES SERVO PARAMETERS

2.1.4 Setting Servo Parameters When a Separate Detector for the

Serial Interface Is Used

(1) Overview

When a separate detector of the serial output type is used, there is a
possibility that the detection unit becomes finer than the detection unit
currently used. Accordingly, a few modifications are made to the
setting method and values of servo parameters.
When using a separate detector of the serial output type, follow the
method explained below to set parameters.

(2) Series and editions of applicable servo software

Series 9080/M (13) and subsequent editions (Series 15-B, 16-C, and
18-C)
Series 90A0/H (08) and subsequent editions (Series 15i, 16i, 21i,
Power Mate i)

(3) Separate detectors of the serial output type

(1) The serial output type linear scales currently available are listed

below:

Minimum

resolution

Mitsutoyo Co., Ltd. 0.5 µm Not required
Heidenhein Co., Ltd. 0.1 µm Not required
Sony Precision Technology Inc. 0.1 µm Incremental

Backup

(2) The serial output type rotary encoders currently available are

listed below:

Minimum

resolution

(Note 1)

FANUC 220 pulse/rev Required
Heidenhein Co., Ltd.

20

2

pulse/rev Not required

Backup

(Note 2)

NOTE

1 The minimum resolution of a rotary encoder is the

resolution of the encoder itself.
FANUC’s rotary encoder, however, is treated as
having a resolution of 1,000,000 pulses per revolution
because of the servo software configuration.

2 Only data within one revolution is backed up; data for

more than one revolution is not backed up.

− 23 −

2. SETTING α SERIES SERVO PARAMETERS B-65150E/04

(4) Setting parameters

Linear type

In addition to the conventional settings for a separate detector (bit 1 of
parameter No. 1815 (Series 15, 16, and 18), bit 3 of parameter No. 1807
(Series 15), and if needed, FSSB), note the following parameters:

[Flexible feed gear]

Parameter Nos. 2084 and 2085 (Series 16 and 18) or Nos. 1977 and
1978 (Series 15-B)
[Flexible feed gear N/M]
= Detection unit of the detector (µm)/least input increment of the

controller (µm)

[Number of position pulses]

Parameter No. 2024 (Series 16 and 18) or No. 1891 (Series 15-B)
Number of position pulses = the amount of movement per motor
revolution (mm)/detection unit of the detector (mm)

* If the number of position pulses exceeds 32767 as a result of the

above calculation, set bit 0 of parameter No. 2000 (Series 16 and 18)
or No. 1804 (Series 15-B) to 1, and reduce the following parameter
values by a factor of 10:
Number of position pulses: No. 2024 (Series 16 and 18),

No. 1891 (Series 15-B)

Number of velocity pulses: No. 2023 (Series 16 and 18),

No. 1876 (Series 15-B)

(Example of parameter setting)

This completes parameter setting. Turn the power off then back on.
If an invalid parameter setting alarm is then issued, check the following
parameters:
* Number of position pulses: No. 2024 (Series 16 and 18) or

No. 1891 (Series 15-B) > 13100
If the above formula is satisfied, modify the parameter by referencing
supplementary 1 of Table 2.1.5.

 The Series 16 is used.
 A linear scale with a minimum resolution of 0.1 µm is used.
 The least input increment of the controller is 1 µm.
 The amount of movement per motor revolution is 16 mm.

To enable a separate detector, set bit 1 of parameter No. 1815 to 1.

First, calculate the parameters for the flexible feed gear.
[Flexible feed gear] Parameter Nos. 2084 and 2085
[Flexible feed gear N/M]
= Detection unit of the detector (µm)/least input increment of the

controller (µm)

= 0.1 µm/1 µm = 1/10

− 24 −