FREESCALE MPXH 6115AC6U Datasheet

Pressure

Freescale Semiconductor

High Temperature Accuracy
Integrated Silicon Pressure Sensor
for Measuring Absolute Pressure,
On-Chip Signal Conditioned,
Temperature Compensated and
Calibrated

The MPXxx6115A series sensor integrates on-chip, bipolar op amp
circuitry and thin film resistor networks to provide a high output signal and
temperature compensation. The small form factor and high reliability of on­chip integration make the pressure sensor a logica l and economical choice
for the system designer.

The MPXxx6115A series piezoresistive transducer is a state-of-the-art,
monolithic, signal conditioned, silicon pressure sensor. This sensor combines
advanced micromachining techniques, thin film metallization, and bipolar
semiconductor processing to provide an accurate, high level analog output
signal that is proportional to applied pressure.

Features

MPXA6115A

Rev 6, 06/2010

MPXA6115A

MPXAZ6115A

MPXH6115A

MPXHZ6115A

Series

15 to 115 kPa (2.2 to 16.7 psi)

0.2 to 4.8 V Output

Application Examples

• Aviation Altimeters

• Industrial Controls

• Engine Control/Manifold Absolute
Pressure (MAP)

• Weather Station and Weather
Reporting Device Barometers

• Resistant to High Humidity and Common Automotive Media

• Improved Accuracy at High Temperature

• Available in Small and Super Small Outline Packages

• 1.5% Maximum Error over 0° to 85°C

• Ideally suited for Microprocessor or Microcontroller-Based Systems

• Temperature Compensated from -40° to +125°C

• Durable Thermoplastic (PPS) Surface Mount Package

ORDERING INFORMATION

Device Name

Small Outline Package (MPXA6115A Series)

MPXA6115A6U
MPXA6115A6T1
MPXA6115AC6U
MPXA6115AC6T1
MPXA6115AC7U

Small Outline Package (Media Resistant Gel) (MPXAZ6115A Series)

MPXAZ6115A6U
MPXAZ6115AC6U
MPXAZ6115AC6T1
MPXAZ6115AP
MPXAZ6115APT1

Super Small Outline Package (MPXH6115A Series)

MPXH6115A6U
MPXH6115A6T1
MPXH6115AC6U
MPXH6115AC6T1

Case

No.

482 • • MPXA6115A

482 • • MPXA6115A
482A • • MPXA6115A
482A • • MPXA6115A
482C • • MPXA6115A

482 • • MPXAZ6115A
482A • • MPXAZ6115A
482A • • MPXAZ6115A
1369 • • MPXAZ6115A
1369 • • MPXAZ6115A

1317 • • MPXH6115A
1317 • • MPXH6115A

1317A • • MPXH6115A
1317A • • MPXH6115A

None Single Dual Gauge Differential Absolute

# of Ports Pressure Type

Device

Marking

© Freescale Semiconductor, Inc., 2007-2010. All rights reserved.

Pressure

ORDERING INFORMATION

Small Outline Package (Media Resistant Gel) (MPXHZ6115A Series)

MPXHZ6115A6U
MPXHZ6115A6T1
MPXHZ6115AC6U
MPXHZ6115AC6T1

1317 • • MPXHZ6115A
1317 • • MPXHZ6115A

1317A • • MPXHZ6115A
1317A • • MPXHZ6115A

SMALL OUTLINE PACKAGES

MPXA6115A6U/T1

MPXAZ6115A6U

CASE 482

MPXA6115AC6U/T1

MPXAZ6115AC6U/T1

CASE 482A

MPXA6115AC7U

CASE 482C

SUPER SMALL OUTLINE PACKAGES

MPXH6115A6U/T1

MPXHZ6115A6U/T1

CASE 1317

MPXH6115AC6U/T1

MPXHZ6115AC6U/T1

CASE 1317A

MPXAZ6115AP/T1

CASE 1369

MPXA6115A

Sensors

2 Freescale Semiconductor

Pressure

Operating Characteristics

Table 1. Operating Characteristics (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)

Characteristic Symbol Min Typ Max Unit

Pressure Range P
Supply Voltage

(1)

Supply Current I
Minimum Pressure Offset

@ V

= 5.0 Volts

S

Full Scale Output

@ V

S

Full Scale Span

@ V

S

Accuracy

(3)

= 5.0 Volts

(4)

= 5.0 Volts

(5)

(2)

(0 to 85°C)

(0 to 85°C)

(0 to 85°C)

(0 to 85°C)

OP

V

S

o

V

off

V

FSO

V

FSS

———±1.5 %V
Sensitivity V/P — 45.9 — mV/kPa
Response Time
Warm-Up Time
Offset Stability

(6)

(7)

(8)

t

R

——20—ms

——±0.25 — %V

15 — 115 kPa

4.75 5.0 5.25 Vdc
—6.010mAdc

0.133 0.200 0.268 Vdc

4.633 4.700 4.768 Vdc

4.433 4.500 4.568 Vdc

FSS

—1.0—ms

FSS

1. Device is ratiometric within this specified excitation range.

2. Offset (V

3. Full Scale Output (V

4. Full Scale Span (V
minimum rated pressure.

) is defined as the output voltage at the minimum rated pressure.

off

) is defined as the output voltage at the maximum or full rated pressure.

FSO

) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

FSS

5. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span
at 25°C due to all sources of error including the following:

Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to

and from the minimum or maximum operating temperature points, with zero differential pressure applied.

Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum

or maximum rated pressure at 25°C.
TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative to 25°C.

6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a
specified step change in pressure.

7. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized.

8. Offset Stability is the product's output deviation when subjected to 1000 cycles of Pulsed Pressure, Temperature Cycling with Bias Test.

MPXA6115A

Sensors
Freescale Semiconductor 3

Pressure

Maximum Ratings

Table 2. Maximum Ratings

(1)

Rating Symbol Value Units

Maximum Pressure (P1 > P2) P
Storage Temperature T
Operating Temperature T

Output Source Current @ Full Scale Output
Output Sink Current @ Minimum Pressure Offset

(2)

(2)

max

stg

A

+0.5mAdc

I

o

-40° to +125°°C

-40° to +125°°C

Io--0.5mAdc

1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

2. Maximum Output Current is controlled by effective impedance from V

to Gnd or V

out

to VS in the application circuit.

out

Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip.

V

S

2

Sensing
Element

Thin Film

Temperature

Compensation

and

Gain Stage #1

Gain Stage #2

and Ground

Reference

Shift

Circuitry

4

400 kPa

V

OUT

3

GND

Pins 1, 5, 6, 7, and 8 are NO CONNECTS

Figure 1. Fully Integrated Pressure Sensor Schematic

MPXA6115A

Sensors

4 Freescale Semiconductor

On-chip Temperature Compensation and Calibration

Pressure

Figure 2 illustrates the absolute sensing chip in the basic

Super Small Outline chip carrier (Case 1317).

Figure 3 shows a typical application circuit (output source

current operation).

Figure 4 shows the sensor output signal relative to

pressure input. Typical minimum and maximum output
curves are shown for operation over 0° to 85°C temperature
range. The output will saturate outside of the rated pressure
range.

Fluorosilicone

Gel Die Coat

Wire Bond

Lead

Frame

Absolute Element

Sealed Vacuum Refe re n c e

Figure 2. Cross Sectional Diagram SSOP/SOP (not to scale)

+5.0 V

A fluorosilicone gel isolates the die surface and wire bonds
from the environment, while allowing the pressure signal to
be transmitted to the silicon diaphragm. The MPXxx6115A
series pressure sensor operating characteristics, internal
reliability and qualification tests are based on use of dry air as
the pressure media. Media other than dry air ma y hav e
adverse effects on sensor performance and long-term
reliability. Contact the factory for information regarding media
compatibility in your application.

Die

P1

Stainless

Steel Cap

Thermoplastic

Case

Die Bond

100 nF

5.0

4.5

4.0

3.5

3.0

2.5

2.0

Output (Volts)

1.5

1.0

0.5
0

VS Pin 2

MPXxx6115A

Pin 4

V

out

GND Pin 3

Figure 3. Typical Application Circuit

(Output Source Current Operation)

Transfer Function:
V

= Vs* (.009*P-.095) ± Error

out

V

= 5.0 Vdc

S

TEMP = 0 to 85ºC

MIN

5

101520253035404550

Pressure (ref: to sealed vacuum) in kPa

556065707580859095

MAX

47 pF

51 K

100

to ADC

TYP

110

105

115

120

Figure 4. Output vs. Absolute Pressure

MPXA6115A

Sensors
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Pressure

Transfer Function (MPXxx6115A)

Nominal Transfer Value: V

Temperature Error Band

4.0

3.0

Temperature

Error

Factor

2.0

1.0

0.0

NOTE: The Temperature Multiplier is a linear response from 0ºC to -40ºC and from 85ºC to 125ºC

Pressure Error Band

3.0

= VS x (0.009 x P - 0.095)

out

± (Pressure Error x Temp. Factor x 0.009 x VS)
VS = 5.0 ± 0.25 Vdc

MPXxxA6115A SERIES

Break Points

Temp Multiplier

- 40 3

0 to 85 1

125 1.75

-40 -20 0 20 40 60
Temperature in Cº

Error Limits for Pressure

14012010080

Pressure Error (kPa)

2.0

1.0

0.0

-1.0

-2.0

-3.0

20

40 60 80 100 120

Pressure (in kPa)

Pressure Error (Max)

15 to 115 (kPa) ±1.5 (kPa)

MPXA6115A

Sensors

6 Freescale Semiconductor