Freescale Semiconductor
Technical Data
MPXA6115A
Rev 4, 10/2007
High Temperature Accuracy
Integrated Silicon Pressure Sensor
for Measuring Absolute Pressure,
On-Chip Signal Conditioned,
Temperature Compensated and
Calibrated
The MPXA6115A/MPXH6115A series sensor integrates on-chip, bipolar op
amp circuitry and thin film resistor networks to provide a high output signal and
temperature compensation. The small form factor and high reliability of on-chip
integration make the pressure sensor a logical and economical choice for the
system designer.
The MPXA6115A/MPXH6115A series piezoresistive transducer is a state-ofthe-art, monolithic, signal conditioned, silicon pressure sensor. This sensor
combines advanced micromachining techniques, thin film metallization, and
bipolar semiconductor processing to provide an accurate, high level analog
output signal that is proportional to applied pressure.
Figure 1 shows a block diagram of the internal circuitry integrated on a
pressure sensor chip.
Features
• Improved Accuracy at High Temperature
• Available in Small and Super Small Outline Packages
• 1.5% Maximum Error over 0° to 85°C
• Ideally suited for Microprocessor or Microcontroller-Based Systems
• Temperature Compensated from -40° to +125°C
• Durable Thermoplastic (PPS) Surface Mount Package
MPXA6115A
MPXH6115A
SERIES
INTEGRATED PRESSURE SENSOR
15 TO 115 kPA (2.2 TO 16.7 psi)
0.2 TO 4.8 V OUTPUT
SMALL OUTLINE PACKAGE
MPXA6115A6U/6T1
CASE 482-01
MPXA6115C6U/C6T1
CASE 482A-01
SUPER SMALL OUTLINE PACKAGE
MPXA6115AC7U
CASE 482C-03
Typical Applications
• Aviation Altimeters
• Industrial Controls
• Engine Control/Manifold Absolute Pressure (MAP)
• Weather Station and Weather Reporting Device Barometers
ORDERING INFORMATION
Device Type Options Case No. MPX Series Order No. Packing Options Device Marking
SMALL OUTLINE PACKAGE
Basic Element Absolute, Element Only 482 MPXA6115A6U Rails MPXA6115A
Absolute, Element Only 482 MPXA6115A6T1 Tape & Reel MPXA6115A
Ported Element Absolute, Axial Port 482A MPXA6115AC6U Rails MPXA6115A
Absolute, Axial Port 482A MPXA6115AC6T1 Tape & Reel MPXA6115A
Absolute, Axial Port 482C MPXA6115AC7U Rails MPXA6115A
SUPER SMALL OUTLINE PACKAGE
Basic Element Absolute, Element Only 1317 MPXH6115A6U Rails MPXH6115A
Absolute, Element Only 1317 MPXH6115A6T1 Tape & Reel MPXH6115A
Ported Element Absolute, Axial Port 1317A MPXH6115AC6U Rails MPXH6115A
Absolute, Axial Port 1317A MPXH6115AC6T1 Tape & Reel MPXH6115A
MPXH6115A6U/6T1
CASE 1317-04
MPXH6115AC6U/C6T1
CASE 1317A-03
© Freescale Semiconductor, Inc., 2007. All rights reserved.
SMALL OUTLINE PACKAGE
PIN NUMBERS
(1)
1 N/C 5 N/C
2 V
S
6 N/C
3 GND 7 N/C
4 V
OUT
8 N/C
1. Pins 1, 5, 6, 7, and 8 are internal device connections. Do not
connect to external circuitry or ground. Pin 1 is denoted by the
notch in the lead.
SUPER SMALL OUTLINE PACKAGE
PIN NUMBERS
(1)
1 N/C 5 N/C
2 V
S
6 N/C
3 GND 7 N/C
4 V
OUT
8 N/C
1. Pins 1, 5, 6, 7, and 8 are internal device connections. Do not
connect to external circuitry or ground. Pin 1 is denoted by the
notch in the lead
V
S
Sensing
Element
GND
Thin Film
Temperature
Compensation
and
Gain Stage #1
Pins 1, 5, 6, 7, and 8 are NO CONNECTS
Gain Stage #2
and Ground
Reference
Shift
Circuitry
Figure 1. Fully Integrated Pressure Sensor Schematic
Table 1. Maximum Ratings
Maximum Pressure (P1 > P2) P
Storage Temperature T
Operating Temperature T
Output Source Current @ Full Scale Output
Output Sink Current @ Minimum Pressure Offset
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
2. Maximum Output Current is controlled by effective impedance from V
(1)
Rating Symbol Value Units
max
stg
A
(2)
(2)
+0.5mAdc
I
o
Io--0.5mAdc
to Gnd or V
out
to VS in the application circuit.
out
V
OUT
400 kPa
-40° to +125°°C
-40° to +125°°C
MPXA6115A
Sensors
2 Freescale Semiconductor
Table 2. Operating Characteristics (V
= 5.0 Vdc, T
S
= 25°C unless otherwise noted, P1 > P2)
A
Characteristic Symbol Min Typ Max Unit
Pressure Range P
Supply Voltage
(1)
Supply Current I
Minimum Pressure Offset
@ V
= 5.0 Volts
S
Full Scale Output
@ V
S
Full Scale Span
@ V
S
Accuracy
(3)
= 5.0 Volts
(4)
= 5.0 Volts
(5)
(2)
(0 to 85°C)
(0 to 85°C)
(0 to 85°C)
(0 to 85°C)
V
V
OP
V
S
o
V
off
FSO
FSS
———±1.5 %V
15 — 115 kPa
4.75 5.0 5.25 Vdc
-6.010mAdc
0.133 0.200 0.268 Vdc
4.633 4.700 4.768 Vdc
4.433 4.500 4.568 Vdc
FSS
Sensitivity V/P — 45.9 — mV/kPa
Response Time
Warm-Up Time
Offset Stability
(6)
(7)
(8)
t
R
—1.0—ms
——20—ms
——±0.25 — %V
FSS
1. Device is ratiometric within this specified excitation range.
2. Offset (V
3. Full Scale Output (V
4. Full Scale Span (V
) is defined as the output voltage at the minimum rated pressure.
off
) is defined as the output voltage at the maximum or full rated pressure.
FSO
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
FSS
minimum rated pressure.
5. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span
at 25°C due to all sources of error including the following:
• Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
• Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum
or maximum rated pressure at 25°C.
• TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
• TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a
specified step change in pressure.
7. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized.
8. Offset Stability is the product's output deviation when subjected to 1000 cycles of Pulsed Pressure, Temperature Cycling with Bias Test.
MPXA6115A
Sensors
Freescale Semiconductor 3
.
Fluoro Silicone
Gel Die Coat
Die
P1
Wire Bond
Lead
Frame
Absolute Element
Sealed Vacuum Reference
Stainless
Steel Cap
Thermoplastic
Case
Die Bond
Figure 2. Cross Sectional Diagram SSOP (Not to Scale)
5.0
Transfer Function:
4.5
V
= Vs* (.009*P-.095) ± Error
out
4.0
V
= 5.0 Vdc
S
TEMP = 0 to 85ºC
3.5
3.0
2.5
2.0
Output (Volts)
1.5
1.0
0.5
0
5
101520253035404550
Pressure (ref: to sealed vacuum) in kPa
+5.0 V
VS Pin 2
100 nF
MPXA6115A
MPXH6115A
GND Pin 3
Figure 3. Typical Application Circu it
(Output Source Current Operation)
MAX
MIN
556065707580859095
100
to ADC
Pin 4
V
out
105
TYP
110
115
47 pF
120
51 K
Figure 4. Output versus Absolute Pressure
Figure 2 illustrates the absolute sensing chip in the basic
Super Small Outline chip carrier (Case 1317).
Figure 3 shows a typical application circuit (output source
current operation).
Figure 4 shows the sensor output signal relative to
pressure input. Typical minimum and maximum output
curves are shown for operation over 0 to 85×C temperature
range. The output will saturate outside of the rated pressure
range.
A fluorosilicone gel isolates the die surface and wire bonds
from the environment, while allowing the pressure signal to
be transmitted to the silicon diaphragm. The MPXA6115A/
MPXH6115A series pressure sensor operating
characteristics, internal reliability and qualification tests are
based on use of dry air as the pressure media. Media other
than dry air may have adverse effects on sensor performance
and long-term reliability. Contact the factory for information
regarding media compatibility in your application.
MPXA6115A
Sensors
4 Freescale Semiconductor
Transfer Function (MPXA6115A/MPXH6115A)
Nominal Transfer Value: Vout = VS x (0.009 x P - 0.095)
± (Pressure Error x Temp. Factor x 0.009 x VS)
VS = 5.0 ± 0.25 Vdc
Temperature Error Band
4.0
3.0
Temperature
Error
Factor
2.0
1.0
0.0
NOTE: The Temperature Multiplier is a linear response from 0ºC to -40ºC and from 85ºC to 125ºC
Pressure Error Band
3.0
2.0
1.0
0.0
-1.0
Pressure Error (kPa)
-2.0
-3.0
MPXA6115A/MPXH6115A SERIES
Break Points
Temp Multiplier
- 40 3
0 to 85 1
125 1.75
-40 -20 0 20 40 60
Temperature in Cº
Error Limits for Pressure
20
40 60 80 100 120
14012010080
Pressure (in kPa)
Pressure Error (Max)
15 to 115 (kPa) ±1.5 (kPa)
MPXA6115A
Sensors
Freescale Semiconductor 5
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