FREESCALE MPX 53GP Datasheet

Pressure

Freescale Semiconductor

50 kPa Uncompensated
Silicon Pressure Sensors

The MPX53 series silicon piezoresistive pressure sensors provide a very
accurate and linear voltage output, directly proportional to the applied
pressure. These standard, low cost, uncompensated sensors permit
manufacturers to design and add their own external temperature
compensating and signal conditioning networks. Compensation techniques
are simplified because of the predictability of Freescale's single element
strain gauge design.

Features

• Low Cost

• Patented Silicon Shear Stress Strain Gauge Design

• Ratiometric to Supply Voltage

• Easy to Use Chip Carrier Package Options

• 60 mV Span (Typical)

• Differential and Gauge Options

MPX53

Rev 7, 05/2009

MPX53

Series

0 to 50 kPa (0 to 7.25 psi)

60 mV Full Scale Span

(Typical)

Application Examples

• Air Movement Control

• Environmental Control Systems

• Level Indicators

• Leak Detection

• Medical Instrumentation

• Industrial Controls

• Pneumatic Control Systems

• Robotics

Device Name

Unibody Package (MPX53 Series)

MPX53D
MPX53DP
MPX53GP

Small Outline Package (MPXV53G Series)

MPXV53GC7U

Package

Options

Tape & Reel

Rail 344C • •
Rail 344B • •

Rail 482C • •

MPXV53GC7U
CASE 482C-03

Case

No.

344 • •

ORDERING INFORMATION

# of Ports Pressure Type

None Single Dual Gauge Differential Absolute

UNIBODY PACKAGESSMALL OUTLINE PACKAGE

MPX53D

CASE 344-15

MPX53GP

CASE 344B-01

MPX53DP

CASE 344C-01

Device

Marking

MPX53D
MPX53DP
MPX53GP

MPXV53G

© Freescale Semiconductor, Inc., 2007-2009. All rights reserved.

Pressure

Operating Characteristics

Table 1. Operating Characteristics (VS = 3.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)

Characteristic Symbol Min Typ Max Units

Pressure Range
Supply Voltage
Supply Current I
Full Scale Span

(4)

Offset
Sensitivity ΔV/ΔΡ — 1.2 — mV/kPa
Linearity — –0.6 — 0.4 %V
Pressure Hysteresis (0 to 50 kPa) — — ±0.1 — %V
Temperature Hysteresis — — ±0.5 — %V
Temperature Coefficient of Full Scale Span TCV
Temperature Coefficient of Offset TCV
Temperature Coefficient of Resistance TCR 0.21 — 0.27 %ZIN/°C
Input Impedance Z
Output Impedance Z
Response Time
Warm-Up Time
Offset Stability

1. 1.0 kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self-heating.

3. Full Scale Span (V
minimum rated pressure.

4. Offset (V

5. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a
specified step change in pressure.

6. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure is stabilized.

7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

(1)

(2)

(3)

(5)

(10% to 90%)

(6)

(7)

) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

FSS

) is defined as the output voltage at the minimum rated pressure.

OFF

V
V

P

V

OUT

OP

S

O

FSS

OFF

IN

t

R

FSS

OFF

0 — 50 kPa
— 3.0 6.0 V
— 6.0 — mAdc
45 60 90 mV

0 20 35 mV

–0.22 — -0.16 %V

— ±15 — µV/°C

355 — 505 Ω
750 — 1875 Ω

— 1.0 — ms

— — 20 — ms
— — ±0.5 — %V

DC

FSS

FSS

FSS

FSS

/°C

FSS

MPX53

Sensors

2 Freescale Semiconductor

Maximum Ratings

Pressure

Table 2. Maximum Ratings

Maximum Pressure (P1 > P2) P
Burst Pressure (P1 > P2) P
Storage Temperature T
Operating Temperature T

1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

(1)

Rating Symbol Value Unit

MAX
Burst
STG

A

Figure 1 shows a schematic of the internal circuitry on the stand-alone pressure sensor chip.

3

+V

S

2

+V

Sensor

1

GND

OUT

4

-V

OUT

175 kPa

200 kPa
–40 to +125 °C
–40 to +125 °C

Figure 1. Uncompensated Pressure Sensor Sche ma ti c

Voltage Output versus Applied Differential Pressure

The differential voltage output of the sensor is directly
proportional to the diff ere n ti a l pressure (P1) relative to the
vacuum side (P2). Similarly, output voltage increases as

increasing vacuum is applied to the vacuum side (P2) relative
to the pressure side (P1).

MPX53

Sensors
Freescale Semiconductor 3