Freescale MPX5100, MPXV5100 Technical Data

Freescale Semiconductor

Technical Data

MPX5100

Rev 10, 05/2005

Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated, and
Calibrated

The MPX5100 series piezoresistive transducer is a state-of-the-art monolithic
silicon pressure sensor designed for a wide range of applications, but particularly
those employing a microcontroller or microprocessor with A/D inputs. This
patented, single element transducer combines advanced micromachining
techniques, thin-film metallization, and bipolar processing to provide an accurate,
high level analog output signal that is proportional to the applied pressure.

Features

• 2.5% Maximum Error over 0° to 85°C

• Ideally suited for Microprocessor or Microcontroller-Based Systems

• Patented Silicon Shear Stress Strain Gauge

• Available in Absolute, Differential and Gauge Configurations

• Durable Epoxy Unibody Element

• Easy-to-Use Chip Carrier Option

Typical Applications

• Patient Monitoring

• Process Control

• Pump/Motor Control

•Pressure Switching

ORDERING INFORMATION

Device

Type

UNIBODY PACKAGE (MPX5100 SERIES)

Basic
Elements

Ported
Elements

Options

Absolute 867 MPX5100A MPX5100A

Differential 867 MPX5100D MPX5100D

Differential Dual Ports 867C MPX5100DP MPX5100DP

Absolute, Single Port 867B MPX5100AP MPX5100AP

Gauge, Single Port 867B MPX5100GP MPX5100GP

Gauge, Axial PC Mount 867F MPX5100GSX MPX5100D

Gauge, Axial Port, SMT 482A MPXV5100GC6U MPXV5100G

Gauge, Axial Port, DIP 482C MPX5V100GC7U MPXV5100G

Gauge, Dual Port, SMT 1351 MPXV5100DP MPXV5100

Case

No.

MPX Series Order

Number

Device Marking

MPX5100/MPXV5100

SERIES

INTEGRATED PRESSURE SENSOR

0 to 100 kpa (0 to 14.5 psi)

15 to 115 kPa

(2.2 to 16.7 psi)

0.2 to 4.7 V Output

SMALL OUTLINE PACKAGES

MPXV5100GC6U

CASE 482A-01

MPXV5100DP

CASE 1351-01

PIN NUMBER

1 N/C 5 N/C
2 V

3 GND 7 N/C
4 V

1. Pins 1, 5, 6, 7, and 8 are internal device
connections. Do not connect to external
circuitry or ground. Pin1 is noted by the
notch in the lead.

S

OUT

PIN NUMBER

1 V

2 GND 5 N/C
3 V

1. Pins 4, 5, and 6 are internal device
connections. Do not connect to external
circuitry or ground. Pin 1 is noted by the
notch in the lead.

OUT

S

MPXV5100GC7U

CASE 482C-03

(1)

6 N/C

8 N/C

(1)

4 N/C

6 N/C

UNIBODY PACKAGES

MPX5100A/D
CASE 867-08

MPX5100AP/GP

CASE 867B-04

© Freescale Semiconductor, Inc., 2005. All rights reserved.

MPX5100DP

CASE 867C-05

MPX5100GSX

CASE 867F-03

V

S

Sensing
Element

Thin Film

Temperature

Compensation

and Gain
Stage # 1

Gain Stage # 2

and Ground

Reference

Shift Circuitry

V

OUT

Pins 1 and 5 through 8 are NO CONNECTS for small outline packages

GND

Pins 4, 5, and 6 are NO CONNECTS for unibody packages

Figure 1. Fully Integrated Pressure Sensor Schematic

TABLE 1. Maximum Ratings

Maximum Pressure (P1 > P2) P

Storage Temperature T

Operating Temperature T

1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

(1)

Rating Symbol Value Unit

MAX

STG

A

400 kPa

-40° to +125°C °C

-40° to +125°C °C

TABLE 2. Operating Characteristics (VS = 5.0 VDC, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in

Figure 4 required to meet electrical specifications.)

Characteristic Symbol Min Typ Max Unit

Pressure Range

(1)

Gauge, Differential: MPX5100D/MPX5100G/MPXV5100G
Absolute: MPX5100A

Supply Voltage

(2)

Supply Current I

Minimum Pressure Offset

= 5.0 V

@ V

S

Full Scale Output

= 5.0 V

@ V

S

Full Scale Span

@ V

Accuracy

= 5.0 V

S

(6)

(5)

(3)

(0 to 85°C)

(4)

Differential and Absolute (0 to 85°C)

Differential and Absolute (0 to 85°C)

Sensitivity V/P — 45 — mV/kPa

Response Time

(7)

Output Source Current at Full Scale Output I

Warm-Up Time

Offset Stability

(8)

(9)

1. 0.1 kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range.

3. Offset (V

4. Full Scale Output (V

5. Full Scale Span (V
minimum rated pressure.

) is defined as the output voltage at the minimum rated pressure.

OFF

) is defined as the output voltage at the maximum or full rated pressure.

FSO

) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

FSS

6. Accuracy (error budget) consists of the following:

• Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range.

• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to

and from the minimum or maximum operating temperature points, with zero differential pressure applied.

• Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum

or maximum rated pressure at 25°C.

• TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C.

• TcOffset: Output deviation with minimum pressure applied over the temperature range of 0° to 85°C, relative to 25°C.

• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of V

P

OP

V

S

O

V

OFF

V

FSO

V

FSS

0

15

—
—

100
115

4.75 5.0 5.25 V

— 7.0 10 mAdc

0.088 0.20 0.313 V

4.587 4.700 4.813 V

— 4.500 — V

— — — ±2.5 %V

t

O+

R

— 1.0 — ms

— 0.1 — mAdc

— — 20 — ms

— — ±0.5 — %V

at 25°C.

FSS

kPa

DC

DC

DC

DC

FSS

FSS

MPX5100

Sensors

2 Freescale Semiconductor

7. Response Time is defined as the time for the incremental changed in the output to go from 10% to 90% of its final value when sugected to
a specified step change in pressure.

8. Warm-Up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.

9. Offset Stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING

Figure 2 shows the sensor output signal relative to

pressure input. Typical, minimum, and maximum output
curves are shown for operation over a temperature range of
0× to 85×C using the decoupling circuit shown in Figure 4.
The output will saturate outside of the specified pressure
range.

Figure 3 illustrates both the Differential/Gauge and the

Absolute Sensing Chip in the basic chip carrier (Case 867). A
fluorosilicone gel isolates the die surface and wire bonds from
the environment, while allowing the pressure signal to be
transmitted to the sensor diaphragm.

The MPX5100 series pressure sensor operating
characteristics, and internal reliability and qualification tests
are based on use of dry air as the pressure media. Media,
other than dry air, may have adverse effects on sensor
performance and long-term reliability. Contact the factory for
information regarding media compatibility in your application.

5

V

= VS*(0.009*P+0.04)

out

± (Pressure Error * Temperature Factor * 0.009 * V
VS = 5.0 V ± 0.25 Vdc

4

PE = 2.5
TM = 1
TEMP = 0 to 85° C

3

MAX

2

Output Voltabe (V)

1

0

0

10

20

30

40

MIN

Pressure (kPa)

50

60

TYP

70

Figure 2. Output Vs. Pressure Differential

S

80

90

100

Span Range (Typ)

110

(Typ)

Offset

Output Range (Typ)

Fluorosilicone

Gel Die Coat

Wire Bond

Lead Frame

Die

Differential/Gauge Element

Stainless Steel

Metal Cover

Epoxy Plastic

Case

Die Bond

Figure 3. Cross Sectional Diagrams (Not to Scale)

Figure 4 shows the recommended decoupling circuit for

interfacing the output of the integrated sensor to the A/D input

1.0 µF

0.01

µ

F

Fluorosilicone Gel

Wire Bond

Lead Frame

Die Coat

Die

Absolute Element

Stainless Steel

Metal Cover

Epoxy Plastic

Case

Die Bond

of a microprocessor or microcontroller. Proper decoupling of
the power supply is recommended.

+

5.0 V

Vs

GND

IPS

IPS

V

OUT

OUTPUT

OUTPUT

470 pF

Figure 4. Recommended Power Supply Decoupling and Output Filtering

(For additional output filtering, please refer to Application Note AN1646.)

MPX5100

Sensors
Freescale Semiconductor 3

Transfer Function (MPX5100D, MPX5100G, MPXV5100G

V

Nominal Transfer Value:

= VS (P x 0.009 + 0.04)

OUT

± (Pressure Error x Temp. Mult. x 0.009 x V

= 5.0 V ±5% P kPa

V

S

Temperature Error Multiplier

MPX5100D/MPX5100G/MPXV5100G Series

Break Points

4.0

3.0

2.0

1.0

Temp Multiplier

- 40 3

0 to 85° C 1

+125° 3

)

S

0.0

Pressure Error Band

3.0

2.0

1.0

0.0

Error (kPa)

-1.0

-2.0

-3.0

-40 -20 0 20 40 60
Temperature in ° C

Note: The Temperature Multiplier is a linear response from 0° to -40° C and from 85° to 125° C.

14012010080

MPX5100D/MPX5100G/MPXV5100G Series

Error Limits for Pressure

020406080100

120

Pressure in kPa

Pressure Error (max)

0 to 100 kPa ± 2.5 kPa

MPX5100

Sensors

4 Freescale Semiconductor