FREESCALE MPX 2200AP Datasheet

Freescale Semiconductor

Technical Data

MPX2200

Rev 11, 12/2006

200 kPa On-Chip Temperature Compensated & Calibrated Pressure Sensors

The MPX2200 series device is a silicon piezoresistive pressure sensor
providing a highly accurate and linear voltage output - directly proportional to the
applied pressure. The sensor is a single monolithic silicon diaphragm with the
strain gauge and a thin-film resistor network integrated on-chip. The chip is laser
trimmed for precise span and offset calibration and temperature compensation.
They are designed for use in applications such as pump/motor controllers,
robotics, level indicators, medical diagnostics, pressure switching, barometers,
altimeters, etc.

Features

• Temperature Compensated Over 0°C to + 85°C

• ±0.25% Linearity (MPX2200D)

• Easy-to-Use Chip Carrier Package Options

• Available in Absolute, Differential and Gauge Configurations

Typical Applications

• Pump/Motor Controllers

• Robotics

• Level Indicators

• Medical Diagnostics

• Pressure Switching

• Barometers

• Altimeters

MPX2200

SERIES

0 TO 200 kPA (0 TO 29 psi)

40 mV FULL SCALE SPAN

(TYPICAL)

UNIBODY PACKAGES

MPX2200A/D
CASE 344-15

MPX2200AP/GP

CASE 344B-01

ORDERING INFORMATION

Device

Type

Basic
Element

Ported
Elements

1. MPX2200 series pressure sensors are available in absolute, differential and gauge

Absolute, Differential 344 MPX2200A

Differential 344C MPX2200DP MPX2200DP

Absolute, Gauge 344B MPX2200AP

Gauge, Vacuum 344D MPX2200GVP MPX2200GVP

configurations. Devicesare available in the basic element package or with pressure
port fittings which provide printed circuit board mounting ease and barbed hose
pressure connections.

Options Case No.

(1)

MPX Series

Order Number

MPX2200D

MPX2200GP

Device

Marking

MPX2200A
MPX2200D

MPX2200AP
MPX2200GP

MPX2200DP

CASE 344C-01

MPX2200GVP

CASE 344D-01

PIN NUMBER

1

1

2

1. Pin 1 in noted by the notch in the lead.

GND

+V

OUT

3

4

V

S

-V

OUT

© Freescale Semiconductor, Inc., 2006. All rights reserved.

V

S

3

Thin Film

1

Temperature

Compensation

and

Calibration

Circuitry

Sensing
Element

GND

Figure 1. Temperature Compensation Pressure Sensor Schematic

VOLTAGE OUTPUT VS. APPLIED DIFFERENTIAL PRESSURE

The differential voltage output of the sensor is directly
proportional to the differential pressure applied.

The absolute sensor has a built-in reference vacuum. The
output voltage will decrease as vacuum, relative to ambient,
is drawn on the pressure (P1) side.

The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the pressure

Table 1. Maximum Ratings

Maximum Pressure (P1 > P2) P

Storage Temperature T

Operating Temperature T

(1)

Rating Symbol Value Unit

(P1) side relative to the vacuum (P2) side. Similarly, output
voltage increases as increasing vacuum is applied to the
vacuum (P2) side relative to the pressure (P1) side.

Figure 1 illustrates a block diagram of the internal circuitry

on the stand-alone pressure sensor chip.

MAX

STG

A

2

+V

OUT

4

-V

OUT

800 kPa

-40 to +125 °C

-40 to +125 °C

1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

MPX2200

Sensors

2 Freescale Semiconductor

Table 2. Operating Characteristics (V

= 10 VDC, TA = 25°C unless otherwise noted, P1 > P2)

S

Characteristic Symbol Min Typ Max Units

Differential Pressure Range

Supply Voltage

(2)

(1)

Supply Current I

Full Scale Span

(4)

Offset

(3)

V

V

P

OP

V

S

O

FSS

OFF

0 — 200 kPa

— 10 16 V

— 6.0 — mAdc

38.5 40 41.5 mV

-1.0 — 1.0 mV

DC

Sensitivity ∆V/∆Ρ — 0.2 — mV/kPa

Linearity

(5)

MPX2200D Series
MPX2200A Series

Pressure Hysteresis

Temperature Hysteresis

Temperature Coefficient of Full Scale Span

Temperature Coefficient of Offset

(5)

(0 to 200 kPa)

(5)

(- 40°C to +125°C)

(5)

(5)

Input Impedance Z

Output Impedance Z

Response Time

(6)

(10% to 90%)

— -0.25

-1.0

—
—

0.25

1.0

— — ±0.1 — %V

— — ±0.5 — %V

TCV

TCV

IN

OUT

t

R

FSS

OFF

-1.0 — 1.0 %V

-1.0 — 1.0 mV

1300 — 2500 W

1400 — 3000 W

— 1.0 — ms

%V

FSSl

FSS

FSS

FSS

Warm-Up Time — — 20 — ms

Offset Stability

(7)

— — ±0.5 — %V

FSS

1. 1.0 kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self-heating.

3. Full Scale Span (V
minimum related pressure.

4. Offset (V

) is defined as the output voltage at the minimum rated pressure.

OFF

) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

FSS

5. Accuracy (error budget) consists of the following:

• Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified

pressure range.

• Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is cycled to

and from the minimum or maximum operating temperature points, with zero differential pressure applied.

• Pressure Hysteresis: Output deviation at any pressure with the specified range, when this pressure is cycled to and from the minimum

or maximum rated pressure at 25°C.

• TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.

• TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C.

6. Response Time is defined as the time form the incremental change in the output to go from 10% to 90% of its final value when subjected
to a specified step change in pressure.

7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

MPX2200

Sensors
Freescale Semiconductor 3