Pressure
Freescale Semiconductor
+
100 kPa On-Chip Temperature
Compensated and Calibrated
Silicon Pressure Sensors
The MPX2100 series devices silicon piezoresistive pressure sensors
providing a highly accurate and linear voltage output directly proportional to
the applied pressure. The sensor is a single, monolithic silicon diaphragm
with the strain gauge and a thin-film resistor network integrated on-chip.
The chip is laser trimmed for precise span and offset calibration an
temperature compensation.
Features
• Temperature Compensated Over 0°C to +85°C
• Available in Absolute, Differential and Gauge Configurations
• Easy to Use Chip Carrier Package Options
• Ratiometric to Supply Voltage
• ±0.25% Linearity (MPX2100D Series)
MPX2100
Rev 10, 10/2008
MPX2100
Series
0 to 100 kPa (0 to 14.5 psi)
40 mV Full Scale Span
(Typical)
Application Examples
• Pump/Motor Controllers
• Robotics
• Level Indicators
• Medical Diagnostics
• Pressure Switching
• Barometers
Device Name
Unibody Package (MPX2100 Series)
MPX2100A
MPX2100D
MPX2100AP
MPX2100GP
MPX2100DP
MPX2100GVP
MPX2100ASX
MPX2100A/D
CASE 344-15
Package
Options
Tray 344
Tray 344
Tray 344B
Tray 344B
Tray 344C
Tray 344D
Tray 344F
MPX2100AP/GP
CASE 344B-01
Case
No.
ORDERING INFORMATION
# of Ports Pressure Type
None Single Dual Gauge Differential Absolute
• •
• •
• •
• •
• •
• •
• •
PACKAGES
MPX2100DP
CASE 344C-01
MPX2100GVP
CASE 344D-01
MPX2100ASX
CASE 344F-01
Device
Marking
MPX2100A
MPX2100D
MPX2100AP
MPX2100GP
MPX2100DP
MPX2100GVP
MPX2100A
© Freescale Semiconductor, Inc., 2002, 2008. All rights reserved.
Pressure
Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip.
V
S
3
Thin Film
Temperature
Sensing
Element
GND
Compensation
and Calibration
Circuitry
1
Figure 1. Temperature Compensated Pressure Sensor Schematic
Voltage Output versus Applied Differential Pressure
The differential voltage output of the sensor is directly
proportional to the differential pressure applied.
The absolute sensor has a built-in reference vacuum. The
output voltage will decrease as vacuum, relative to ambient,
is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the pressure
side (P1) relative to the vacuum side (P2). Similarly, output
voltage increases as increasing vacuum is applied to the
vacuum side (P2) relative to the pressure side (P1).
2
+V
OUT
4
-V
OUT
MPX2100
Sensors
2 Freescale Semiconductor
Operating Characteristics
Table 1. Operating Characteristics
(VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristics Symbol Min Typ Max Unit
Pressure Range
Supply Voltage
Supply Current
Full Scale Span
(4)
Offset
Sensitivity
Linearity
Pressure Hysteresis
Temperature Hysteresis
Temperature Effect on Full Scale Span
Temperature Effect on Offset
Input Impedance
Output Impedance
Response Time
Warm-Up
Offset Stability
(1)
(2)
(3)
MPX2100D Series
MPX2100A Series
(5)
MPX2100D Series
MPX2100A Series
(5)
(0 to 100 kPa)
(5)
(-40°C to +125°C)
(5)
(5)
(6)
(10% to 90%)
(7)
Pressure
P
OP
V
S
I
o
V
FSS
V
off
ΔV/ΔP— 0.4 —mV/kPa
—
—
——± 0.1 — %V
——± 0.5 — %V
TCV
FSS
TCV
off
Z
in
Z
out
t
R
——20—ms
——± 0.5 — %V
0—100kPa
—1016Vdc
—6.0—mAdc
38.5 40 41.5 mV
-1.0
-2.0
-0.25
-1.0
-1.0 — 1.0 %V
—
—
—
—
1.0
2.0
0.25
1.0
%V
mV
FSS
FSS
FSS
FSS
-1.0 — 1.0 mV
1000 — 2500 Ω
1400 — 3000 Ω
—1.0—ms
FSS
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self-heating.
3. Full Scale Span (V
minimum rated pressure.
4. Offset (V
) is defined as the output voltage at the minimum rated pressure.
off
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
FSS
5. Accuracy (error budget) consists of the following:
Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
T emperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and
from the minimum or maximum operating temperature points, with zero differential pressure applied.
Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum
or maximum rated pressure, at 25°C.
TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a
specified step change in pressure.
7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
MPX2100
Sensors
Freescale Semiconductor 3
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