Freescale MMA7331L User Manual

Freescale Semiconductor
Technical Data
±4g, ±12g Three Axis Low-g
Document Number: MMA7331L
Rev 0, 04/2008
The MMA7331L is a low power, low profile capacitive micromachined accelerometer featuring signal conditioning, a 1-pole low pass filter, temperature compensation, self test, and g-Select which allows for the selection between 2 sensitivities. Zero-g offset and sensitivity are factory set and require no external devices. The MMA7331L includes a Sleep Mode that makes it ideal for handheld battery powered electronics.
Features
3mm x 5mm x 1.0mm LGA-14 Package
Low Current Consumption: 400 μA
Sleep Mode: 3 μA
Low Voltage Operation: 2.2 V – 3.6 V
Selectable Sensitivity (±4g, ±12g)
Fast Turn On Time (0.5 ms Enable Response Time)
Self Test for Freefall Detect Diagnosis
Signal Conditioning with Low Pass Filter
Robust Design, High Shocks Survivability
RoHS Compliant
Environmentally Preferred Product
Low Cost
Typical Applications
3D Gaming: Tilt and Motion Sensing, Event Recorder
HDD MP3 Player: Freefall Detection
Laptop PC: Freefall Detection, Anti-Theft
Cell Phone: Image Stability, Text Scroll, Motion Dialing, E-Compass
Pedometer: Motion Sensing
PDA: Text Scroll
Navigation and Dead Reckoning: E-Compass Tilt Compensation
Robotics: Motion Sensing
ORDERING INFORMATION
Part Number
MMA7331LT
MMA7331LR1 MMA7331LR2
Temperature
Range
-40 to +85°C 1977-01 LGA-14 Tray
-40 to +85°C 1977-01 LGA-14 7” Tape & Reel
-40 to +85°C 1977-01 LGA-14 13” Tape & Reel
Package Drawing
Package Shipping
MMA7331L
MMA7331L: XYZ AXIS
ACCELEROMETER
±4g, ±12g
Bottom View
14 LEAD
LGA
CASE 1977-01
Top View
N/C
N/C
X
Y
Z
V
V
123456
OUT
OUT
OUT
SS
DD
Sleep
14
7
Self Test
N/C
N/C
g-Select
N/C
8 9 10 11 12 13
N/C
* This document contains certain information on a new product. Specifications and information herein are subject to change without notice.
© Freescale Semiconductor, Inc., 2008. All rights reserved.
Figure 1. Pin Connections
g-Select
g-Select
V
V
DD
DD
Sleep
Sleep
Self Test
Self Test
G-CELL
G-CELL
SENSOR
SENSOR
OSCILLATOR
OSCILLATOR
C to V
C to V
CONVERTER
CONVERTER
SELFTEST
SELFTEST
CLOCK
CLOCK
GEN
GEN
GAIN
GAIN
+
+
FILTER
FILTER
CONTROL LOGIC
CONTROL LOGIC
NVM TRIM
NVM TRIM
CIRCUITS
CIRCUITS
V
V
SS
SS
X-TEMP
X-TEMP
COMP
COMP
Y-TEMP
Y-TEMP
COMP
COMP
Z-TEMP
Z-TEMP
COMP
COMP
Figure 2. Simplified Accelerometer Functional Block Diagram
Table 1. Maximum Ratings
(Maximum ratings are the limits to which the device can be exposed without causing permanent damage.)
X
X
OUT
OUT
Y
Y
OUT
OUT
Z
Z
OUT
OUT
Rating Symbol Value Unit
Maximum Acceleration (all axis) g Supply Voltage V Drop Test Storage Temperature Range T
1. Dropped onto concrete surface from any axis.
(1)

ELECTRO STATIC DISCHARGE (ESD)

WARNING: This device is sensitive to electrostatic
discharge.
Although the Freescale accelerometer contains internal 2000 V ESD protection circuitry, extra precaution must be taken by the user to protect the chip from ESD. A charge of over 2000 volts can accumulate on the human body or associated test equipment. A charge of this magnitude can
alter the performance or cause failure of the chip. When handling the accelerometer, proper ESD precautions should be followed to avoid exposing the device to discharges which may be detrimental to its performance.
max
DD
D
drop
stg
±5000 g
–0.3 to +3.6 V
1.8 m
–40 to +125 °C
MMA7331L
Sensors
2 Freescale Semiconductor
Table 2. Operating Characteristics
Unless otherwise noted: -40°C < TA < 85°C, 2.2 V < VDD < 3.6 V, Acceleration = 0g, Loaded output
(1)
Characteristic Symbol Min Typ Max Unit
Operating Range
Supply Voltage Supply Current Supply Current at Sleep Mode Operating Temperature Range
(2)
(3)
(4)
(4)
V
DD
I
DD
I
DD
T
A
2.2 — —
-40
2.8
400
3
3.6
600
10
+85
V
μA μA
°C
Acceleration Range, X-Axis, Y-Axis, Z-Axis
g-Select: 0 g-Select: 1
g
FS
g
FS
— —
±4
±12
— —
g g
Output Signal
Zero g (T
(4)
Zero g
= 25°C, VDD = 2.8 V)
A
(5), (6)
V
OFF
V
, T
OFF
A
1.316
-2.0
1.4
±0.5
1.484 +2.0
V
mg/°C
Sensitivity (TA = 25°C, VDD = 2.8 V)
4g 12g
Sensitivity
S
4g
S
(4)
S,T
12g
A
289.5
75.2
-0.0075
308
83.6
±0.002
326.5
91.9
+0.0075
mV/g mV/g %/°C
Bandwidth Response
XY Z
Output Impedance
f
-3dBXY
f
-3dBZ
Z
O
— — 24
400 300
32
— — 40
Hz Hz kΩ
Self Test
Output Response
X
, Y
OUT
Z
OUT
Input Low Input High
OUT
Δg
Δg
STXY
STZ
V
IL
V
IH
+0.05
+0.8
V
0.7 V
SS
DD
-0.1
+1.0
— —
+1.2
0.3 V V
DD
DD
g g V V
Noise
Power Spectral Density RMS (0.1 Hz – 1 kHz)
(4)
n
PSD
350 μg/
Hz
Control Timing
Power-Up Response Time Enable Response Time Self Test Response Time
(7)
(8)
(9)
t
RESPONSE
t
ENABLE
t
ST
— — —
1.0
0.5
2.0
2.0
2.0
5.0
ms ms ms
Sensing Element Resonant Frequency
XY Z
Internal Sampling Frequency
f
GCELLXY
f
GCELLZ
f
CLK
— — —
6.0
3.4 11
— — —
kHz kHz kHz
Output Stage Performance
Full-Scale Output Range (I
Nonlinearity, X Cross-Axis Sensitivity
OUT
, Y
OUT
(10)
= 3 µA) V
OUT
, Z
OUT
FSO
NL
OUT
V
XY, XZ, YZ
VSS+0.1 VDD–0.1 V
-1.0 +1.0 %FSO
-5.0 +5.0 %
1. For a loaded output, the measurements are observed after an RC filter consisting of an internal 32kΩ resistor and an external 3.3nF capacitor (recommended as a minimum to filter clock noise) on the analog output for each axis and a 0.1μF capacitor on V bandwidth is determined by the Capacitor added on the output. f = 1/2π * (32 x 10
3
) * C. C = 3.3 nF corresponds to BW = 1507HZ, which is
- GND. The output sensor
DD
the minimum to filter out internal clock noise.
2. These limits define the range of operation for which the part will meet specification.
3. Within the supply range of 2.2 and 3.6 V, the device operates as a fully calibrated linear accelerometer. Beyond these supply limits the device may operate as a linear device but is not guaranteed to be in calibration.
4. This value is measured with g-Select in 4g mode.
5. The device can measure both + and – acceleration. With no input acceleration the output is at midsupply. For positive acceleration the output will increase above V
/2. For negative acceleration, the output will decrease below VDD/2.
DD
6. For optimal 0g offset performance, adhere to AN3484 and AN3447.
7. The response time between 10% of full scale V
input voltage and 90% of the final operating output voltage.
DD
8. The response time between 10% of full scale Sleep Mode input voltage and 90% of the final operating output voltage.
9. The response time between 10% of the full scale self test input voltage and 90% of the self test output voltage.
10. A measure of the device’s ability to reject an acceleration applied 90° from the true axis of sensitivity.
MMA7331L
Sensors Freescale Semiconductor 3

PRINCIPLE OF OPERATION

The Freescale accelerometer is a s urface-micromachined
integrated-circuit accelerometer.
The device consists of a surface micromachined capacitive sensing cell (g-cell) and a signal conditioning ASIC contained in a single package. The sensing element is sealed hermetically at the wafer level using a bulk micromachined cap wafer.
The g-cell is a mechanical structure formed from semiconductor materials (polysilicon) using semiconductor processes (masking and etching). It can be modeled as a set of beams attached to a movable central mass that move between fixed beams. The movable beams can be deflected from their rest position by subjecting the system to an acceleration (Figure 3).
As the beams attached to the central mass move, the distance from them to the fixed beams on one side will increase by the same amount that the distance to the fixed beams on the other side decreases. The change in distance is a measure of acceleration.
The g-cell beams form two back-to-back capacitors (Figure 3). As the center beam moves with acceleration, the distance between the beams changes and each capacitor's value will change, (C = Aε/D). Where A is the area of the beam, ε is the dielectric constant, and D is the distance between the beams.
The ASIC uses switched capacitor techniques to measure the g-cell capacitors and extract the acceleration data from the difference between the two capacitors. The ASIC also signal conditions and filters (switched capacitor) the signal, providing a high level output voltage that is ratiometric and proportional to acceleration.
Acceleration
g-Select
The g-Select feature allows for the selection between two sensitivities. Depending on the logic input placed on pin 10, the device internal gain will be changed allowing it to function with a 4g or 12g sensitivity (Table 3). This feature is ideal when a product has applications requiring two different sensitivities for optimum performance. The sensitivity can be changed at anytime during the operation of the product. The g-Select pin can be left unconnected for applications requiring only a 4g sensitivity as the device has an internal pull-down to keep it at that sensitivity (308mV/g)).

Table 3. g-Select Pin Description

g-Select g-Range Sensitivity
0 4g 308 mV/g 1 12g 83.6 mV/g
Sleep Mode
The 3 axis accelerometer provides a Sleep Mode that is ideal for battery operated products. When Sleep Mode is active, the device outputs are turned off, providing significant reduction of operating current. A low input signal on pin 7 (Sleep Mode) will place the device in this mode and reduce the current to 3 μA typ. For lower power consumption, it is recommended to set g-Select to 4g mode. By placing a high input signal on pin 7, the device will resume to normal mode of operation.
Filtering
The 3 axis accelerometer contains an onboard single-pole switched capacitor filter. Because the filter is realized using switched capacitor techniques, there is no requirement for external passive components (resistors and capacitors) to set the cut-off frequency.
Ratiometricity
Ratiometricity simply means the output offset voltage and sensitivity will scale linearly with applied supply voltage. That is, as supply voltage is increased, the sensitivity and offset increase linearly; as supply voltage decreases, offset and sensitivity decrease linearly. This is a key feature when interfacing to a microcontroller or an A/D converter because
Figure 3. Simplified Transducer Physical Model

SPECIAL FEA T URES

it provides system level cancellation of supply induced errors in the analog to digital conversion process.
Self Test
The sensor provides a self test feature that allows the verification of the mechanical and electrical integrity of the accelerometer at any time before or after installation.
This
feature is critical in applications such as hard disk drive protection where system integrity must be ensured over the life of the product. Customers can use self test to verify the solderability to confirm that the part was mounted to the PCB correctly. When the self test function is initiated, an electrostatic force is applied to each axis to cause it to deflect. The X- and Y-axis are deflected slightly while the Z-axis is trimmed to deflect 1g. This procedure assures that both the mechanical (g-cell) and electronic sections of the accelerometer are functioning.
MMA7331L
Sensors
4 Freescale Semiconductor
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