100 slm with molbloc-L, and up to
5000 slm with molbloc-S
• Select from 20 different gases with
molbloc-L and 10 with molbloc-S
• Accredited measurement uncertainty
of ± 0.5 % of reading with 100:1
rangeability
• Internal valving for on-board purge,
leak test and tare support
• Includes advanced measurement
functions such as totalize, average,
hi/lo and deviation
• Complete front panel control and
RS232 and IEEE-488 remote
communications
• Measures mass and volume flow with
user setable reference pressure and
temperature conditions
molbox RFM is a support unit
for making mass flow measurements using molbloc-L
laminar and molbloc-S sonic
flow elements.
molbloc flow elements are
connected to molbox RFM with
two pressure connections and
one data line. molbox RFM reads
calibration data off the molbloc
EEPROM and measures molbloc
upstream and downstream
pressure with its built-in high
accuracy Reference Pressure
Transducers (RPTs). An ohmic
measurement system reads
the resistance of the molbloc
platinum resistance thermometers from which molbloc
temperature is calculated. Using
the molbloc calibration data,
pressures, temperature and gas
properties stored in molbox RFM
memory, the flow rate of the gas
flowing through the molbloc is
calculated. For molbloc-L flow
elements, a microrange option
is available to increase flow
measurement resolution and
accuracy under 10 % FS of the
flow range.
molbox RFM and molbloc flow
elements are useful in a variety
of measurement, test and calibration applications in which
highly accurate measurement of
low gas flows where maximum
accuracy is the most notable
specification is needed. molbox
RFM is specifically designed for
applications in which a highly
compact presentation, great
rangeability and reduced cost
are the primary considerations.
A second model, molbox1, is
available for applications in
which lowest possible uncertainty is the top priority.
To configure your mass flow
calibration system, see the
pages that follow to select the
molbloc and pressure dependent calibrations to best cover
your flow ranges and pressure
conditions. molstic mounting
systems and COMPASS® for
molbox calibration software
are available to complete the
system (see molstic and
COMPASS product brochures).
Flow measurement specications
molbox RFM measures the flow through molbloc flow elements. The flow range, usable
operating pressure, and differential pressure for molbloc-L, or the flow range and absolute
pressure range for molbloc-S, depend on the molbloc element used and the calibration
options. For molbloc-L ranges up to 3E4, the resolution and accuracy under 10 % FS are
improved by the microrange option. For the 1E5-L molbloc, the microrange option is
necessary to achieve the specification.
Predicted S tabi lity: Max imum change in zero and span over one year for typical molbox R FM
and molbloc used under typical condit ions. A s sta bility ca n only be predicted, stabilit y for a
specific mol box RFM should be es tabl ished from experience.
3
Measu rement Uncertainty: Ma ximum dev iation of the mol box R FM flow i ndic ation f rom the
true value of t he flow through the mol bloc including precision, sta bil ity and DHI calibration
standard u ncer tainty. Meas urement uncerta inty specificat ions for molblocs are valid only
for gases with which the molbloc has been ca librated. All molbloc s are c ali brated for N2.
Cali brations with other gases are optiona l. DHI calibrat ion capabil ity is not mai ntai ned at
all times for all ga ses on a ll molbloc des ignations . Check for avai labilit y before ordering.
3
1 second1 second
dependent calibration type (see molbloc-L tables)
± 0.0023 % FS under 1 % FS
± 0.001 % FS under 1 % FS
± 0.25 % of reading from 1 % to 100 % FS,
± 0.0025 % FS under 1% FS
2
± 0.15 % of reading from 1 % to 100 % FS,
± 0.0015 % FS under 1 % FS
± 0.5 % of reading from 1 % to 100 % FS,
± 0.005 % FS under 1 % FS
molbloc-S (all ranges)
Specifications are the same as a molbox RFM
without Microrange. The Microrange transducer is disabled whenever the molbox RFM is
connected to a molbloc-S.
0 to molbloc full scale depending on gas and molbloc pressure
dependent calibration type (see molbloc-L tables)
± 0.25 % of reading from 5 % to 100 % FS,
± 0.0125 % FS under 5 % FS
± 0.2 % of reading from 5 % to 100 % FS,
± 0.01 % FS under 5% FS
± 0.32 % of reading from 5 % to 100 % FS,
± 0.016 % FS under 5 % FS
± 0.2 % of reading from 5 % to 100 % FS,
± 0.01 % FS under 5 % FS
± 0.5 % of reading from 5 % to 100 % FS,
± 0.025 % FS under 5 % FS
Pressure dependent calibration types for molbloc-S
The operating range of molbloc-S is dependent upon the absolute upstream
pressure. Two different calibration options are offered to accommodate
the requirement of the user's application. The Standard Pressure (SP)
calibration of 50 kPa to 500 kPa absolute (7 psia to 70 psia) gives the most
flexibility and allows partial use of the range without a vacuum. The Low
Pressure (LP) calibration of 20 kPa to 200 kPa (3 psia to 30 psia) requires
Calibration type Operating pressure Considerations
Standard pressure50 kPa to 500 kPa
Low pressure20 kPa to 200 kPa
absolute
(7 psia to 70 psia)
absolute
(3 psia to 30 psia)
Must be flowing
to a vacuum to
obtain full range
the use of a vacuum downstream. The resulting flow range for different
gases at these pressures can be found in the molbloc-S range table below.
molbloc-S ranges with standard and low pressure calibrations
molbloc-S designator, KF (sccm/kPa), and full scale flow (slm @ 0°C)
Ratio = I nverse square root density rat io of the c urrent gas to nitrogen
KF = Pressu re to flow c onversion rat io, scc m/k Pa
To esti mate a flow in a given gas at a g iven pr essure: Flow( slm ) = KF * pressu re in k Pa absolute/1000 * Gas Rat io
Cal types:
SP = Sta ndard Pressure c ali bration 50 kPa to 500kPa ab solute; table shows flow @ 500 kPa, flow @ 50 kPa is 10 % of value shown.
LP = Low Pressure c ali bration 20 kPa to 200 kPa; table shows flow @ 200 k Pa, flow @ 20 kPa is 10 % of value shown.
min imum = t able shows es timated mi nimum flow w ithout vacuu m if atmopheric pressure i s ~ 100 kPa
Note: Non-S tand ard Pressure (NSP) c ali brations ar e avai lable up to 600 k Pa absolute
This gas is not cur rently supported by the molbox RF M
2
The vapor pressure of octa fluorocyclobutane is
230 kPa a bsolute, SP operation i s not possible
All flows are nominal and approx imate; in gas es other
than N 2 and Air, flows may var y up to 10 % due to
differences in characteristics and manufacturing
Pressure dependent calibration types for molbloc-L
Different pressure dependent calibration options for
molbloc-Ls determine the range of operating pressures over which a molbloc-L can be used within
its mass flow measurement specifications. The
calibration option also affects the molbloc-L flow
range and the differential pressure associated with
the flow range. The different calibration options
are offered to accomodate the requirement of the
user’s application. All molbloc-Ls are delivered
with an N2 calibration (full mod, low pressure)
by default. Calibrations with other gases or N2
calibration other than full mod, low pressure, must
A bold value ind icates that the max imum flow is limite d by the maxi mum Reynolds numb er value of 1200 which
is reached before the normal differential pressu re range is reached. I n that c ase, t he second value give s the
min imum flow for which measurement unc erta int y (acc uracy) is equa l to the nominal unc ertaint y spec ification.
Divide the second va lue by 10 when using mol box R FM microra nge option.
Where t here is no value in the field (– ), this indicates that the ma ximum Rey nolds nu mber is reached before the
different ial pressu re reac hes 5 kPa (1 kPa in t he cas e of the 1E5 molbloc ), t herefore cal ibration with th at gas is
not useful.
2010020040010002000100002000040000N/A
2
25100120250600200020006200—N/A
6
15305015030014002800—N/A
95019 005700
N/AN/AN/AN/AN/AN /AN/AN/AN/AN/A
10
4020035070018 00400060002000020000N/A
4020035070018 00400070002200022000N/A
40200400900200045002200045000130000N/A
2
3517 5350700170 03500130003300042000N/A
4
5020020040010003500350011000 —N/A
201002004001000200037001200012000N/A
4
25100120250600200018 0 06000—N/A
251252404501200250040001200012000N/A
3
251252505001250250066002000040000N/A
2
2512525050012502500110002000020000
O
N/AN/AN/AN/AN/AN /AN/AN/AN/AN/A
8
2010020040010002000100002000040000N/A
2
255010 025050026005400—
15305015030015003000—
501002002300450013800N/A
2000400012700
200012000
120024007300
3060150150030008800
140025008800
150030009000
1
Due to low v apor pre ssure, only downstream calibration t ype is
available.
2
The operating press ure range is g reater than t he vapor press ure va lue
for molbloc-SN2, He, Ar, H2, O2, CH4, Air, N2O, SF6, CO2, CO
(-QM2-B200)
100 slm with molbloc-L, and up to 5000 slm with molbloc-S
Ordering information
Model
molbox RFM Reference flow monitor
Includes
Users manual, calibration certificate, power cord, (2) molbox RFM to molbloc
pressure lines, (1) molbox RFM to molbloc data line, (2) Straight through
pressure quick connectors
Options
RFM 02 Microrange
Accessories
RFM-RMK (401465) Rack mount kit
mfc-CB Analog MFC interface system (see mfc-CB brochure)
molstic molbloc mounting systems (see molstic brochure)
COMPASS® for molbox for Windows (401211) Calibration software
Fluke Calibration
PO Box 9090, Everett, WA 98206 U.S.A.
Fluke Europe B.V.
PO Box 1186, 5602 BD
Eindhoven, The Netherlands
For more information call:
In the U.S.A. (800) 443-5853 or
Fax (425) 446-5116
In Europe/M-East/Africa +31 (0) 40 2675 200 or
Fax +31 (0) 40 2675 222
In Canada (800)-36-FLUKE or
Fax (905) 890-6866
From other countries +1 (425) 446-5500 or
Fax +1 (425) 446-5116
Web access: http://www.fluke.com