Fluke MFC-CB User Manual
MFC-CB™
MFC Control Box
Operation and Maintenance Manual
©2001~2007 DH Instruments, a Fluke Company
MFC-CB™ Operation and Maintenance Manual
© 2001~2007 DH Instruments, a Fluke Company All rights reserved.
Information in this document is subject to change without notice. No part of this document may be reproduced or
transmitted in any form or by any means, electronic or mechanical, for any purpose, without the express written
permission of DH Instruments, a Fluke Company 4765 East Beautiful Lane Phoenix AZ 85044-5318 USA.
DH Instruments strives to ensure the accuracy of its published materials; however, no warranty, expressed or
implied, is provided. DH Instruments disclaims any responsibility or liability for any direct or indirect damages
resulting from the use of the information in this manual or products described in it. Mention of any product does not
constitute an endorsement by DH Instruments of that product. This manual was originally composed in English and
subsequently translated into other languages. The fidelity of the translation cannot be guaranteed. In case of conflict
between the English version and other language versions, the English version predominates.
DH Instruments, DH, DHI, MFC-CB, molbox, MFC-CB, molbloc and CalTool are trademarks, registered and
otherwise, of DH Instruments, a Fluke Company.
Document No. 550123b-01
040330
Printed in the USA.
©2001~2007 DH Instruments, a Fluke Company
TABLE OF CONTENTS
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TABLE OF CONTENTS................................................................................ I
TABLES................................................................................................... IV
FIGURES .................................................................................................IV
ABOUT THIS MANUAL............................................................................... V
1. INTRODUCTION .................................................................................... 1
1.1 PRODUCT OVERVIEW .............................................................................................................................1
1.2 SPECIFICATIONS .....................................................................................................................................1
2. INSTALLATION..................................................................................... 7
2.1 UNPACKING AND INSPECTION .............................................................................................................. 7
2.2 SITE REQUIREMENTS..............................................................................................................................8
2.3 INITIAL SETUP.......................................................................................................................................... 8
2.4 POWER UP AND VERIFICATION.............................................................................................................8
1.2.1 GENERAL SPECIFICATIONS ...........................................................................................................................1
1.2.2 ANALOG OUTPUT SPECIFICATIONS .............................................................................................................2
1.2.3 ANALOG INPUT SPECIFICATIONS ................................................................................................................. 2
1.2.4 VALVE TEST POINT SPECIFICATIONS ..........................................................................................................2
1.2.5 FRONT AND REAR PANELS............................................................................................................................3
1.2.6 INTERNAL VIEW ...............................................................................................................................................5
2.1.1 REMOVING FROM PACKAGING .....................................................................................................................7
2.1.2 INSPECTING CONTENTS .................................................................................................................................7
2.3.1 PREPARING FOR OPERATION .......................................................................................................................8
2.3.2 MFC-CB TO MFC OR MFM CONNECTION ...................................................................................................... 8
2.4.1 POWER UP ........................................................................................................................................................8
2.4.2 CHECK/SET SECURITY LEVEL .......................................................................................................................9
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1.2.5.1 FRONT PANEL ..................................................................................................................................3
1.2.5.2 REAR PANEL ....................................................................................................................................4
1.2.6.1 DISPLAY ............................................................................................................................................5
1.2.6.2 POWER SUPPLY ..............................................................................................................................5
1.2.6.3 POWER ENTRY MODULE ................................................................................................................6
1.2.6.4 MICRO BOARD .................................................................................................................................6
1.2.6.5 MAIN BOARD ....................................................................................................................................6
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3. OPERATION ....................................................................................... 11
3.1 GENERAL MANUAL OPERATION ......................................................................................................... 11
3.2 DIRECT FUNCTION KEYS...................................................................................................................... 16
Page I ©2001~2007 DH Instruments, a Fluke Company
3.1.1 MAIN RUN SCREEN........................................................................................................................................11
3.1.2 GENERAL OPERATING PRINCIPLES ...........................................................................................................12
3.1.2.1 KEYPAD LAYOUT AND PROTOCOL .............................................................................................12
3.1.2.2 SOUNDS..........................................................................................................................................13
3.1.2.3 SOFT [ON/OFF] KEY.......................................................................................................................14
3.1.2.4 ACTIVE DEVICE CHANNEL INDICATION......................................................................................14
3.1.2.5 DIRECT FUNCTION KEYS SUMMARY ..........................................................................................14
3.2.1 [K].....................................................................................................................................................................16
3.2.2 [UNIT] ...............................................................................................................................................................17
3.2.3 [POWER]..........................................................................................................................................................18
3.2.4 [DISPLAY]........................................................................................................................................................19
3.2.4.1 <1DEV1&2> .....................................................................................................................................20
3.2.4.2 <2SUM> ...........................................................................................................................................21
3.2.4.3 <3DIF>(DIFFERENCE)....................................................................................................................21
3.2.4.4 <4RATIO> ........................................................................................................................................22
3.2.4.5 <5UNIT>...........................................................................................................................................23
MFC-CB™ Operation and Maintenance Manual
3.2.5 [DEV1/2] ...........................................................................................................................................................25
3.2.6 [MFC]................................................................................................................................................................25
3.2.7 [DRIVERS] (OPTIONAL) .................................................................................................................................27
3.2.8 [SET MFC]........................................................................................................................................................27
3.2.9 [←] AND [→] (JOG MFC SET POINT) ............................................................................................................28
3.3 [SETUP] ...................................................................................................................................................29
3.3.1 <1MFC> (EDIT MFC PROFILES) ....................................................................................................................30
3.3.2 <2JOG> ............................................................................................................................................................31
3.3.3 <3RES> (RESOLUTION) .................................................................................................................................32
3.3.4 <4FLOWU> (FLOW UNITS).............................................................................................................................32
3.3.5 <5ADJ> (ADJUSTMENT) ................................................................................................................................33
3.4 [SPECIAL] ...............................................................................................................................................35
3.4.1 <1RESET>........................................................................................................................................................36
3.4.2 <2LEVEL> ........................................................................................................................................................38
3.4.3 <3PREFS>........................................................................................................................................................42
3.4.4 <4CAL> ............................................................................................................................................................45
3.4.5 <5REMOTE> ....................................................................................................................................................45
3.4.6 <6XBOX> .........................................................................................................................................................47
3.4.7 <7LOG>............................................................................................................................................................49
3.2.4.6 <6CLEAN> .......................................................................................................................................24
3.4.1.1 <1SETS>..........................................................................................................................................36
3.4.1.2 <2UNITS> ........................................................................................................................................37
3.4.1.3 <3MFC> ...........................................................................................................................................37
3.4.1.4 <4CAL> ............................................................................................................................................37
3.4.1.5 <5ALL>.............................................................................................................................................38
3.4.2.1 SECURITY LEVELS ........................................................................................................................39
3.4.3.1 <1SCRSVR> ....................................................................................................................................42
3.4.3.2 <2SOUND> ......................................................................................................................................43
3.4.3.3 <3TIME> ..........................................................................................................................................43
3.4.3.4 <4ID> ...............................................................................................................................................44
3.4.5.1 <1COM1> AND <2COM2> ..............................................................................................................46
3.4.5.2 <3IEEE-488>....................................................................................................................................46
3.4.5.3 <4RS232 SELF-TEST>....................................................................................................................46
4. REMOTE OPERATION ......................................................................... 51
4.1 OVERVIEW ..............................................................................................................................................51
4.2 INTERFACING......................................................................................................................................... 51
4.2.1 RS232 INTERFACE .........................................................................................................................................52
4.2.2 IEEE-488 (GPIB) ..............................................................................................................................................53
4.2.1.1 COM1...............................................................................................................................................52
4.2.1.2 COM2...............................................................................................................................................53
4.3 COMMANDS............................................................................................................................................ 54
4.3.1 COMMAND SYNTAX .......................................................................................................................................54
4.3.2 COMMAND SUMMARY ...................................................................................................................................54
4.3.3 ERROR MESSAGES .......................................................................................................................................55
4.3.4 COMMAND DESCRIPTIONS...........................................................................................................................56
4.3.4.1 IEEE STD. 488.2 COMMON AND STATUS COMMANDS..............................................................56
4.3.4.2 MFC-CB COMMANDS.....................................................................................................................59
4.4 STATUS SYSTEM ...................................................................................................................................74
4.4.1 STATUS REPORTING SYSTEM .....................................................................................................................74
4.4.1.1 STATUS BYTE REGISTER .............................................................................................................74
4.4.1.2 STANDARD EVENT REGISTER .....................................................................................................76
5. MAINTENANCE, ADJUSTMENTS AND CALIBRATION ............................ 77
5.1 OVERVIEW ..............................................................................................................................................77
5.2 VERIFICATION AND CALIBRATION OF ELECTRICAL SIGNALS .......................................................78
5.3 RELOADING EMBEDDED SOFTWARE INTO FLASH MEMORY .........................................................84
5.2.1 PRINCIPLE.......................................................................................................................................................78
5.2.2 FRONT PANEL ADJUSTMENT OF ELECTRICAL SIGNALS........................................................................79
5.2.2.1 PRINCIPLES....................................................................................................................................79
5.2.2.2 <1SENSE>.......................................................................................................................................80
5.2.2.3 <2MEAS> (MEASURE)....................................................................................................................80
5.2.2.4 <3SET> ............................................................................................................................................81
5.2.2.5 <4VALVE> .......................................................................................................................................83
5.2.2.6 <5CAL DATE> .................................................................................................................................83
©2001~2007 DH Instruments, a Fluke Company Page II
TABLE OF CONTENTS
6. TROUBLESHOOTING .......................................................................... 85
6.1 OVERVIEW ..............................................................................................................................................85
7. APPENDIX.......................................................................................... 87
7.1 CALCULATIONS .....................................................................................................................................87
7.2 DEVICE CHANNEL CONNECTORS AND CABLES...............................................................................89
7.3 DRIVERS .................................................................................................................................................92
7.4 GLOSSARY .............................................................................................................................................94
7.5 WARRANTY STATEMENT......................................................................................................................95
7.1.1 ELECTRICAL SET POINT AND MEASUREMENT CALCULATIONS ...........................................................87
7.1.2 CONVERTING BETWEEN ELECTRICAL UNITS AND FLOW OR %FS UNITS............................................88
7.2.1 POPULAR CONFIGURATIONS ......................................................................................................................91
Page III ©2001~2007 DH Instruments, a Fluke Company
MFC-CB™ Operation and Maintenance Manual
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Table 1. MFC-CB Delivery List ................................................................................................................ 7
Table 2. Summary of MFC-CB Direct Function Key Operation............................................................. 15
Table 3. Available Flow Units ................................................................................................................ 33
Table 4. Security Levels - Functions NOT Executed Per Function/Level ............................................. 40
Table 5. COM1 and COM2 Available Settings ...................................................................................... 46
Table 6. COM1 DB-9F Pin Designation................................................................................................. 52
Table 7. COM2 DB-9M Pin Designation................................................................................................ 53
Table 8. Command Summary................................................................................................................ 54
Table 9. Error Messages ....................................................................................................................... 55
Table 10. Status Byte Register................................................................................................................ 74
Table 11. Standard Event Register ......................................................................................................... 76
Table 12. Troubleshooting Checklist ....................................................................................................... 85
Table 13. MFC-CB DEV1 and DEV2 Connector Pin Out........................................................................ 89
Table 14. Common MFC Connector Pin Out ..........................................................................................91
Table 15. Brooks MFC Connector Pin Out.............................................................................................. 92
Table 16. Driver Output ........................................................................................................................... 92
Table 17. External Drivers ....................................................................................................................... 93
Table 18. DHI Authorized Service Providers........................................................................................... 95
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Figure 1. MFC-CB Front Panel
Figure 2. MFC-CB Rear Panel.................................................................................................................. 4
Figure 3. MFC-CB Internal View............................................................................................................... 5
Figure 4. MFC-CB Keypad Layout.......................................................................................................... 12
Figure 5. MFC-CB with MFC Switchbox Schematic ............................................................................... 48
Figure 6. Status Byte Register................................................................................................................ 74
Figure 7. Driver Cable Schematic........................................................................................................... 93
©2001~2007 DH Instruments, a Fluke Company Page IV
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ABOUT THIS MANUAL
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This manual provides the user with the basic information necessary to set up and operate an
MFC-CB MFC Control Box. It also includes a great deal of additional information provided to help
you optimize MFC-CB use and take full advantage of its many features and functions.
Before using the manual, take a moment to familiarize yourself with the Table of Contents structure.
All first time MFC-CB users should read Sections 1 and 2. Section 3 provides a comprehensive
descri
external co
trouble
symptom
Certain words and expressions have specific meaning as they pertain to MFC-CB. Section 7.4 is
useful
this manual.
FOR THOSE OF YOU WHO “DON’T READ MANUALS”, GO DIRECTLY TO SECTION 2.3, INITIAL SETUP, TO
SET UP YOUR MFC-CB. THEN GO TO SECTION 2.4, POWER UP AND VERIFICATION. THIS WILL GET YOU
R
THEN… WHEN YOU HAVE QUESTIONS OR START TO WONDER ABOUT ALL THE GREAT FEATURES
YOU MIGHT BE MISSING, GET INTO THE MANUAL!
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ption of general MFC-CB operating principles. Section 4 is for remote operation from an
mputer. Section 5 provides maintenance and calibration information. Section 6 is a quick
shooting guide. Use Section 6 to troubleshoot unexpected MFC-CB behavior based on the
s of that behavior.
as a quick reference for the definition of specific words and expressions as they are used in
UNNING QUICKLY WITH MINIMAL RISK OF CAUSING DAMAGE TO YOURSELF OR YOUR MFC-CB.
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Manual Conventions
(CAUTION) is used in throughout the manual to identify user warnings and cautions.
(NOTE) is used throughout the manual to identify operating and applications advice and
additional explanations.
[ ] indicates direct function keys (e.g., [UNIT]).
< > indicates MFC-CB screen menus and displays (e.g., <1yes>).
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©2001~2007 DH Instruments, a Fluke Company Page vi
1. INTRODUCTION
1. INTRODUCTION
1.1 PRODUCT OVERVIEW
MFC-CB is a two channel analog input/output device designed to set and read voltage and current
signals from analog Mass Flow Controllers (MFC) and Mass Flow Meters (MFM). A DH Instruments
MFC Switchbox may be connected to either channel allowing switching of the channel’s control
between five permanently powered channels. As an option, (8) external 12 V drivers can also be
included to excite peripheral equipment such as solenoid valves.
MFC-CB provides a local user interface via a front panel key pad and display and includes advanced
on-board functions. Remote communication capability is supported by RS232 and IEEE-488 interfaces.
MFC-CB is intended for applications where convenient local and remote control of analog MFCs and/or
MFMs is desired, for example in setting up an MFC calibration system using a DH Instruments
molbox1 or molbox RFM flow standard.
1.2 SPECIFICATIONS
1.2.1 GENERAL SPECIFICATIONS
Power Requirements
Power Supply Output
Operating Temperature Range
Storage Temperature Range
Warm Up Time
Vibration
Dimensions
Microprocessor
Communication Ports
Electrical Connections
CE Conformance
Weight
100 to 240 VAC, 50 to 60 Hz, 38 VA max. consumption
± 15 VDC @ 1 Amp max, 0.5 Amp per channel
15 to 35 °C
-20 to 70 °C
1 hour for best electrical measurement specifications
Meets MIL-T-28800D
2 kg (4.4 lb)
8 cm H x 22.5 cm W x 20 cm D
(3.1 in. x 8.9 in. x 7.9 in.) approx.
Motorola 68302, 16 MHz
RS232 (COM1), RS232 (COM2), IEEE-488,
DHI MFC Switchbox
DEV1 and DEV2: 25 pin female DSUB
Available. Must be specified.
Page 1 ©2001~2007 DH Instruments, a Fluke Company
MFC-CB™ Operation and Maintenance Manual
1.2.2 ANALOG OUTPUT SPECIFICATIONS
VOLTAGE OUTPUT
Range
Uncertainty
Resolution
Output Impedance (max)
Load Impedance (min)
Short Circuit Protection
0 to 6 VDC
± 0.015 %FS
0.1 mVDC
100 Ω per channel
10 kΩ per channel
Yes (indefinite)
CURRENT OUTPUT
Range
Uncertainty
Resolution
Maximum Load
Short Circuit Protection
4 to 20 mA
± 0.025 %FS
0.4 μA
500 Ω (compliance voltage: 10 VDC)
Yes (indefinite)
1.2.3 ANALOG INPUT SPECIFICATIONS
VOLTAGE INPUT (MEASURE AND SENSE)
Range
Min to Max Measurable
Uncertainty
Resolution
Input Impedance (min)
0 to 6 VDC
-0.25 to 6.00 VDC
± 0.015 %FS
0.1 mVDC
1 MΩ
CURRENT INPUT (MEASURE)
Range
Min to Max Measurable
Uncertainty
Resolution
Input Impedance
4 to 20 mA
4 to 20 mA
± 0.025 %FS
0.4 μA
250 Ω
1.2.4 VALVE TEST POINT SPECIFICATIONS
Range
Accuracy
Resolution
©2001~2007 DH Instruments, a Fluke Company Page 2
+2 to +15 VDC (in reference to -15 VDC)
± 0.1 %FS
0.3 mVDC
1. INTRODUCTION
1.2.5 FRONT AND REAR PANELS
1.2.5.1 FRONT PANEL
The front panel assembly provides a 2 x 20 vacuum fluorescent display, a membrane
keypad for local user interface and a SOFT ON/OFF key.
4
1
1. Display
2. Multi-Function Keypad
3. Remote Communication Indicator
4. SOFT ON/OFF Key and Indicator
3
2
Figure 1. MFC-CB Front Panel
Page 3 ©2001~2007 DH Instruments, a Fluke Company
MFC-CB™ Operation and Maintenance Manual
1.2.5.2 REAR PANEL
The rear panel assembly provides DEVICE1 and DEVICE2 analog input/output
channels, a 12 V drivers connection, communications interfaces and the power
connection module.
1. Electrical power connector (IEC60320)
2. Power ON/OFF switch
3. Connector for 12V DRIVERS
4. Connector for MFC Switchbox control
5. DEVICE1 electrical input/output connection
6. DEVICE2 electrical input/output connection
7. COM2 connection for pass through communication
8. COM1 connection for host computer
9. IEEE-488 connection for host computer
Figure 2. MFC-CB Rear Panel
©2001~2007 DH Instruments, a Fluke Company Page 4
1. INTRODUCTION
1.2.6 INTERNAL VIEW
1. Power entry module
2. Micro board
3. Main board (under power supply
and micro board)
4. Display
5. Power supply
Figure 3. MFC-CB Internal View
1.2.6.1 DISPLAY
2 x 20 vacuum fluorescent, alpha-numeric display mounted to front panel.
1.2.6.2 POWER SUPPLY
MFC-CB has one 65 W switching power supply with three DC voltage outputs:
• 5 VDC @ 7 Amp max.
• +15 VDC @ 2.5 Amp max.
• -15 VDC @ 2 Amp max.
Page 5 ©2001~2007 DH Instruments, a Fluke Company
MFC-CB™ Operation and Maintenance Manual
1.2.6.3 POWER ENTRY MODULE
Includes ON/OFF switch, fuse (1 Amp @ 250 VAC) and AC filter.
1.2.6.4 MICRO BOARD
The micro board supports a Motorola 68302 micro-controller, EPROM, EEPROM,
128k x 16 bit NVRAM, 8 Mbit flash memory; RS232 and IEEE-488.2
communications; keypad and display control. An I/O port controls other ports and
devices within MFC-CB.
1.2.6.5 MAIN BOARD
The main board is controlled by the micro board (see Section 1.2.6.4). The main
board supports the drivers for the 12 V external drivers, MFC/MFM voltage supply,
MFC/MFM control signal input and output.
©2001~2007 DH Instruments, a Fluke Company Page 6
2. INSTALLATION
2.1 UNPACKING AND INSPECTION
2.1.1 REMOVING FROM PACKAGING
MFC-CB is delivered, along with its standard accessories, in a corrugated container with
polyurethane inserts to hold it in place.
Remove the MFC-CB and its accessories from the shipping container and remove each item
from its protective plastic bag.
2.1.2 INSPECTING CONTENTS
2. INSTALLATION
Check that all items are present and have no visible damage.
An MFC-CB is delivered complete with:
Table 1. MFC-CB Delivery List
DESCRIPTION PART #
MFC-CB Mass Flow Control Box 401710 or 401710-CE
Report of Calibration 550100
ACCESSORIES
Operation and Maintenance Manual 550123
Power Cord (7.5 ft.) 100770 or 100770-CE
(2) MFC Cable and Connections Kit 401230 or 401230-CE
molbox1/MFC-CB Analog Calibration Cable 401256
Drivers Connector 401635 (optional)
General Accessories Disk (Important: Includes
system support software and documentation)
102987
Page 7 ©2001~2007 DH Instruments, a Fluke Company
MFC-CB™ Operation and Maintenance Manual
2.2 SITE REQUIREMENTS
Install MFC-CB on any stable surface at a convenient height. The front feet are extendible so that
the unit can be inclined for easier viewing.
MFC-CB can also be mounted in a standard 19-in. rack using the optional rack mount kit
(P/N 401465). For additional information, contact your DHI Sales Representative.
If the MFC-CB will be used with an optional DHI MFC Switchbox, consider placement of the
Switchbox and the connection and disconnection of MFC cables (see Section 3.4.6, Figure 5).
2.3 INITIAL SETUP
2.3.1 PREPARING FOR OPERATION
No special preparation of MFC-CB is required prior to putting it into operation.
Connect the power cord supplied to the MFC-CB and to a power source.
2.3.2 MFC-CB TO MFC OR MFM CONNECTION
Prepare an MFC-CB to MFC or MFM cable using one of the kits provided with the MFC-CB
(see Section 7.2 for information on cable pin out) or
have one.
Connect the MFC-CB to MFC/MFM cable to the DEV1 or DEV2 25 pin DSUB connection on
the MFC-CB rear panel.
If you are using an optional MFC Switchbox, connect the Switchbox to the DEV1 or DEV2
MFC-CB rear panel connection and then connect the MFC or MFM to the MFC Switchbox (see
the MFC Switchbox User’s Manual and Section 3.4.6, Figure 5).
2.4 POWER UP AND VERIFICATION
2.4.1 POWER UP
Turn ON the MFC-CB rear panel main power switch. Observe the front panel display as
MFC-CB initializes, error checks and goes to the MAIN run screen (see Section 3.1.1).
The front panel ON/OFF key controls a SOFT ON/OFF (see Section 3.1.2.3). This allows
MFC-CB’s front panel to be turned off while maintaining the power supply to devices that are
connected to it.
an optional preassembled cable if you
If the MFC-CB fails to reach the MAIN run screen, service may be required. Record the
sequence of operations and displays observed and contact a DHI Authorized Service Provider.
©2001~2007 DH Instruments, a Fluke Company Page 8
2. INSTALLATION
2.4.2 CHECK/SET SECURITY LEVEL
MFC-CB has a security system based on user levels. By default, the security system is set to
“low”, which includes certain access restrictions, and there is no password required to change
the security level. See Section 3.4.2 and Table 4 for information on the security level system.
As part of the
MFC-CB is delivered with the security level set to low to avoid inadvertent altering of critical
internal settings but with access to changing security levels unrestricted. It is recommended
that the low security level be maintained at all times and password protection be
implemented if control over setting of security levels is desired.
MFC-CB startup, set your desired security level and a password.
Page 9 ©2001~2007 DH Instruments, a Fluke Company
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©2001~2007 DH Instruments, a Fluke Company Page 10
3. OPERATION
3.1 GENERAL MANUAL OPERATION
MFC-CB is designed to offer the optimum balance between simple, intuitive operation and the
availability of a variety of functions with a high level of operator discretion. The local operator
interface is through the front panel’s 2 x 20 character alpha-numeric display and a 4 x 4
multi-function keypad.
3.1.1 MAIN RUN SCREEN
The MFC-CB MAIN run screen is its home display that is reached on power up and from
which other functions and menus are accessed. It is the top level of all menu structures.
The MAIN run screen is where the MFC-CB is left in normal operation. It displays the set
point output, if applicable, and the measurement from the MFC or MFM as well as a variety of
additional information if desired.
3. OPERATION
SSSSSSaUNITKaMMMMMM→
10
3. <a
<a
4. <UNIT>: Unit of measure of the set point and measurement numerical values (see Section 3.2.2).
5. <K>:
<K> if a factor i
6. <a>: Indicates whether a user adjustment is being applied to the measurement value (see
Section 3.3.5). <a
7. <MMMMMM>: Numerical value of the measurement from the MFC or MFM.
8. <Dn,c>: Indicates which device channel is being displayed on the top line of the display. <n> is
<1> for DEV1, <2> for DEV2. <c> indicates the current channel of the MFC Switchbox if a
Switchbox is connected to DEVn, blank if no Switchbox is in use (see Section 3.4.6).
9. <DISPLAY MODE DATA>: Information displayed depends on current DISPLAY mode (see
Section 3.2.4).
3
2
D DISPLAY MODE Dn,c
9
>: Indicates whether a user adjustment is being applied to the set point (see Section 3.3.5).
> if an adjustment is being applied, blank if no adjustment is being applied.
Indicates whether a gas correction factor (K factor) is being applied (see Section 3.2.1).
8
s being applied, blank if no factor is being applied.
> if an adjustment is being applied, blank if no adjustment is being applied.
1. <→> Active channel indication in DEV1&2
DISPLAY mode (see Section 3.2.4.1). Blank if not
in DEV1&
2. <SSSSSS>: Numerical value and sign of the set
point (see Section 3.2.8).
2 DISPLAY mode.
©2001~2002 DH Instruments, Inc Page 11 .
MFC-CB™ Operation and Maintenance Manual
10. <D>: Indication of what is being displayed on the bottom line of the display as set by the DISPLAY
function (see Section 3.2.4). Possible indications include:
• <→>: Current DISPLAY mode is DEV1&DEV2 (see Section 3.2.4.1) and the active device
chan
nel is DEV2. The arrow is on the first line if the active device channel is DEV1.
• <Σ> and far right of bottom line is Dn + Dn: Current DISPLAY mode is SUM (see
Section 3.2.4.2).
• <Δ> and far right of bottom line is Dn - Dn: Current DISPLAY mode is DIF (see
Section 3.2.4.3).
• <blank> and far right of bottom line is Dn/Dn: Current DISPLAY mode is RATIO (see
Section 3.2.4.4).
• Blan
k, and no characters other than Dn on bottom line: Current DISPLAY mode is CLEAN
(see Section 3.2.4.5).
When a number is too large to show in the allocated display space, MFC-CB
displays <********>.
MFC-CB has a SCREEN SAVER function that causes the display to dim if no key is pressed for
10 minutes. Pressing a key restores full power to the display. The screen saver activation
time can be changed or screen saving can be completely suppressed (see Section 3.4.3.1).
3.1.2 GENERAL OPERATING PRINCIPLES
3.1.2.1 KEYPAD LAYOUT AND PROTOCOL
MFC-CB has a 4 x 4 keypad for local operator access to direct functions, function
menus and for data entry.
1
3
2
1. The Editing and Execution keys are for
execution, suspending execution,
backing up in menus and editing entries.
2. The Menu/Data keys provide access to
function menus from the MAIN run
screen. The menu name is on the
bottom half of the key. The SETUP
menu is for more frequently used
functions. The SPECIAL menu is for
functions that are not generally used as
a part of day to day operation. These keys
enter numerical values when editing.
3. The Function/Data keys allow very
commonly used functions to be
accessed directly from the MAIN run
screen by a single keystroke. The name
of the function is on the bottom half of
the key (see Section 3.1.2.5). These keys
enter num
erical values when editing.
Figure 4. MFC-CB Keypad Layout
©2001~2007 DH Instruments, a Fluke Company Page 12
3. OPERATION
Key press confirmation is provided by both tactile and audible feedback. A single
beep confirms a valid entry. A descending two note tone signals an invalid entry.
The audible entry feedback can be suppressed or modified (see Section 3.4.3.2).
Pressin
g the [ENTER] key generally causes execution or forward movement in the
menu tree.
Pressing the [ESCAPE] key generally allows movement back in the menu tree and/or
causes execution to cease or suspend without changes being implemented.
Pressing [ESCAPE] repeatedly eventually returns to the MAIN run screen. From the
MAIN run screen, pressing [ESCAPE] allows momentary viewing of the MFC-CB
identification screen.
Pressing the [+/-] key changes a numerical sign when editing. From the MAIN run
screen, it provides a momentary view of the active MFC profile (see Section 3.3.1).
Pressin
g the [←] and [→] keys allows reverse and forward cursor movement when
editing data entry. These keys are also used to scroll through choices. When in the
MAIN run screen, they are used by the JOG function to increment the MFC set point
up and down (see Section 3.2.9).
selections can be made by pressing the number of the selection directly or by
Menu
pressing [←] or [→] to place the cursor on the number of the desired selection and
pressing [ENTER].
Some screens go beyond the two lines provided by the display. This is indicated by a
flashing down arrow in the second line of the display. Press [←] and [→] to move the
cursor to access the lines that are not visible or directly enter the number of the
hidden menu choice if you know it.
3.1.2.2 SOUNDS
MFC-CB is equipped with a variable frequency tone device to provide audible
feedback and alarms. Sounds are used for the following indications:
Valid key press:
valid key press:
In
Brief beep. Choice between three frequencies or NO sound is
available (see Section 3.4.5.2).
Descending two tone “blurp”. Choice of NO sound is available
(see Section 3.4.5.2).
Page 13 ©2001~2007 DH Instruments, a Fluke Company
MFC-CB™ Operation and Maintenance Manual
3.1.2.3 SOFT [ON/OFF] KEY
MFC-CB is equipped with a SOFT [ON/OFF] key and indicator LED on the bottom
left hand corner of the front panel. The purpose of the SOFT ON/OFF key is to put
MFC-CB into a dormant mode in which the display is turned OFF.
When MFC-CB is SOFT OFF, power is still supplied to DEV1 and DEV2 and the
MFC set points are maintained if the rear panel main power switch is on.
When MFC-CB is ON, the ON/OFF indicator is ON continuously. When MFC-CB is
SOFT OFF and the main power switch is on, the ON/OFF indicator blinks every
5 seconds.
When MFC-CB is SOFT OFF, receiving a remote command turns it ON.
3.1.2.4 ACTIVE DEVICE CHANNEL INDICATION
The MFC-CB active device channel (DEV1 or DEV2) is the channel whose set point
and measurement values are displayed on the top line of the MFC-CB display.
The characters on the bottom right hand corner of the display (<D1> or <D2>)
indicate which channel is currently active. The active channel is the channel that is
affected by all channel specific settings and adjustments.
Channel specific MFC-CB settings include:
• [K] (see Section 3.2.1).
• [UNIT] (see Section 3.2.2).
• [MFC] (see Section 3.2.6).
• [SETUP], <2jog> (see Section 3.3.2).
• [SETUP], <5adj> (see Section 3.3.5).
• [SET MFC] (see Section 3.2.8).
Regardless of which channel is currently active from the display, both DEV1 and
DEV2 are always active in the sense that their set point is maintained.
3.1.2.5 DIRECT FUNCTION KEYS SUMMARY
Local operation of MFC-CB is through the front panel, 4 x 4, pressure
sensitive keypad. To minimize the use of multi-layered menu structures, the keypad
numerical keys also provide direct access to commonly used functions. The function
accessed is labeled on the bottom half of the each key. Direct function keys are
active whenever MFC-CB is in its MAIN run screen. Table 2 summarizes the
operation of the direct fun
detail on each direct function.
It may be useful to keep a copy of Table 2 near the MFC-CB, especially when first
becoming acquainted with its operation.
ction keys. See the corresponding manual sections for full
©2001~2007 DH Instruments, a Fluke Company Page 14
3. OPERATION
Table 2. Summary of MFC-CB Direct Function Key Operation
Direct Function Keys are active from the MAIN run screen
See corresponding manual sections for full detail
.
SETUP
Menu of commonly used setup features including creating and editing MFC
profiles, adjusting set point jog value and display resolution.
SPECIAL
0
Menu of less frequently used internal functions and settings including resets,
user preferences, internal calibration, remote interface setup and Switchbox
setup.
1
DEV1/2
Toggle active device channel between DEV1 and DEV2.
2
MFC
Select MFC profile which sets V or mA operation and the electrical signal
to flow unit relationship.
DRIVERS
3
Turn ON and OFF MFC-CB’s optional 12 V drivers.
5
POWER
Display the set point unaltered by K and/or adjustment values and the
valve test point.
DISPLAY
6
Define the DISPLAY function for the second line of the MFC-CB display.
Choices include DEV1&2, sum, difference, ratio, 2
nd
unit, clean.
7
K
Set/change an MFC gas correction factor (K factor).
9
UNIT
Set point and measure unit (electrical, %FS, flow).
+/-
View a summary of the active MFC profile for the active channel
(DEV1 or DEV2).
ENTER
SET MFC
Enter a set point to output on the active device channel.
Í
Î
Jog the set point up or down.
Page 15 ©2001~2007 DH Instruments, a Fluke Company
MFC-CB™ Operation and Maintenance Manual
3.2 DIRECT FUNCTION KEYS
3.2.1 [K]
PURPOSE
To specify a gas measurement conversion factor, K, to be applied to the active device
channel when using and MFC or MFM calibrated with one gas to set and/or measure the
flow of another gas.
PRINCIPLE
MFCs and MFMs respond differently to different gas species due the different specific
heats of the gases and different behavior in the device. Therefore, the calibration of an
MFC or MFM with one gas may not be valid with another gas. MFC manufacturers often
provide gas conversion factors, known as K factors, to convert an MFC from the gas it
was calibrated with to another gas.
The MFC-CB’s K function allows the device manufacturer’s K factor to be entered and
applied to the active channel so that set points and measurement values are
automatically adjusted by the K factor. This feature can be useful when using an MFC
calibrated with one gas to control or measure a different gas.
MFC-CB applies the K factor only when the unit of measure is a flow unit. When the unit
of measure is an electrical unit (V or mA) or %FS, the K factor has no effect.
See Section 7.1.1 for details on the calculations used to apply the K factor.
When using MFC-CB in conjunction with a molbox/molbloc mass flow standard to calibrate
or verify an MFC, the K factor function of the MFC-CB is NOT normally used. K factors are
applied to the molbox measured flow to simulate a process gas with a surrogate gas (see
the molbox Operation and Maintenance manual Section concerning K factors).
OPERATION
To enable a gas conversion factor press [K] from the
MAIN run screen. The display is:
If <2off> is selected, no conversion factor will
be applied. If <1on> is selected, the next screen is:
K factor: (1.0000)
1off 2on D1
K factor:
1.00000 D1
©2001~2007 DH Instruments, a Fluke Company Page 16
3. OPERATION
m
The value of the gas conversion factor can be edited as desired. Press [ENTER] to
return to the MAIN run screen with the entered K factor active. The K factor is only
used if the current unit of measure is a flow unit (see Section 3.2.2). The letter <K>
ways appended to the flow unit indication in the run screens when the K
is al
function is ON (e.g., sccmK).
Turning K ON or OFF or making a change to the K factor value resets the active device
channel output to zero.
K factor ON/OFF and the K factor value are device channel specific (DEV1, DEV2).
Settings made for one device channel do not affect the other channel.
3.2.2 [UNIT]
PURPOSE
To specify the unit of measure in which MFC-CB displays set points and measured
values on the active device channel.
PRINCIPLE
MFC-CB operates in either volts (V) or milliamps (mA). It also converts V or mA to flow
values using a simple linear relationship between the voltage or current range and the
flow range in a flow unit (see Section 7.1.2).
The el
unit range are specified by the active MFC profile for each device channel (see
Section 3.3.1).
The unit
mA, %FS and a flow unit if the MFC profile specifies a flow unit. MFC profiles #1 and #2
are factory default profiles that do not specify a specific flow range. MFC profile #1
specifies operation from 0 to 5 V and MFC profile #2 specifies operation from 4 to 20 mA.
When using profile #1 or #2, no flow unit is available.
OPERATION
To change the unit of measure press [UNIT].
The display is:
Select the desired unit of measure. Operation returns to the MAIN run screen with the
display unit changed to the selected unit.
ectrical mode and range in which to operate as well as the flow unit and the flow
s of measure available to display MFC-CB set points and measurements are V or
1V 2%FS 3scc
The flow unit available under [UNIT] is determined by the MFC profile active for the
device channel. When using MFC profile #1 or #2, no flow unit is available as none is
specified by the profile. To work in a flow unit, set up and use a custom MFC profile (see
Section 3.3.1). MFC profile #1 is 0 to 5 V. MFC profile #2 is 4 to 20 mA.
The UNIT function is device channel specific. The unit setting for one device channel does
not affect the other device channel.
Page 17 ©2001~2007 DH Instruments, a Fluke Company
MFC-CB™ Operation and Maintenance Manual
V
3.2.3 [POWER]
PURPOSE
To display of the set value unaltered by K or adjustment values and to display the valve
test point.
PRINCIPLE
The electrical value actually output by MFC-CB in response to a set point entry may be
different from the set point value due to the application of a K factor (see Section 3.2.1)
and/or a
cal
value output by MFC-CB in response to a set point input.
Some mass flow controllers allow access to a valve test point voltage measurement to
assist in troubleshooting the MFC’s operation. MFC-CB can measure and display the
valve test point voltage. A display of this value is available by pressing the [POWER]
function key.
The valve test point is always in Volts (V), even for an MFC whose set point and flow
measurement are in current (mA.).
n adjustment factor (see Section 3.3.5). See Section 7.1.1 for details on the
culation of the actual set point. The [POWER] screen displays the actual electrical
For MFC-CB to display the valve test point, the MFC being used must support valve test
point measurement and be properly connected to the MFC-CB. Refer to the MFC
manufacturer’s documentation for information on the valve test point and to Section 7.2
formation on MFC-CB DEV1 and DEV2 connections and pin outs.
for in
OPERATION
To display the set point and MFC valve test point press [POWER] from the run screen.
The display is:
Set point: 2.0000
Valve: 3.475 V D1
Press [ESCAPE] or [ENTER] to return to the MAIN run screen.
1. Actual set point for active device channel.
2. Active device channel indicator.
2
3. Current valve test point reading.
The POWER run screen displays the actual MFC set point which may be different from the
entered set point due to the application of a K factor and/or adjustment factors (see
Section 7.2).
The POWER screen is a run screen from which other functions can be accessed.
For example, while in the POWER screen, press [SET MFC] to change the MFC set point,
[DEV1/2] to change device channels or [MFC] to select a new MFC profile.
©2001~2007 DH Instruments, a Fluke Company Page 18
3. OPERATION
3.2.4 [DISPLAY]
PURPOSE
To select, from a variety of choices, the information that is displayed on the second line of
the MFC-CB display.
PRINCIPLE
MFC-CB supports a variety of advanced DISPLAY functions that are displayed on the
bottom line of the MFC-CB display. The available DISPLAY functions are:
• DEV1&2 (see Section 3.2.4.1): Displays both device channels simultaneously with
DEV1 always on the top line and DEV2 always on the bottom line. This function can
be useful when working with two MFCs simultaneously.
• SUM (see Section 3.2.4.2): Displays the sum of the two device
channel measurements. Requires that DEV1 and DEV2 be set to the same unit
of measure. This function can be useful to view the combined flow of two MFCs.
• DIF (see Section 3.2.4.3): Displays the difference between the inactive device
channel and the active device channel measurements (inactive channelactive channel). Requires that DEV1 and DEV2 be set to the same unit of measure.
This function can be useful to view the difference between two flow rates.
• RATIO (see Section 3.2.4.4): Displays the ratio of the inactive device channel
measurement and the active device channel measurement (inactive
channel/active channel). Requires that DEV1 and DEV2 be set to the same unit
of measure. This function can be useful to view the ratio of two flow rates.
• UNIT (see Section 3.2.4.5): Allows the current device channel measurement to be
viewed in two of its available units of measure simultaneously. This function can be
used to display the MFC sensor’s electrical output and corresponding flow
rate simultaneously.
• CLEAN (see Section 3.2.4.6): Blanks out the second line of the display except for
the active device channel indicator. This function is used when only a simple display
of set point and measurement for the active device channel with no other information
is wanted. The CLEAN DISPLAY is MFC-CB’s default display.
OPERATION
To select a DISPLAY function, press [DISPLAY] from the MAIN run screen.
The display is:
1DEV1&2 2sum 3dif
4ratio 5unit 6clean
2
Page 19 ©2001~2007 DH Instruments, a Fluke Company
MFC-CB™ Operation and Maintenance Manual
The cursor is on the active DISPLAY function. Selecting a DISPLAY function returns to
the run screen with the selected DISPLAY function active.
See PRINCIPLE above and Sections 3.2.4.1 through 3.2.4.6 for details on each
DISPLAY func
tion.
The default DISPLAY function is CLEAN which causes the second line of the display to be
empty except for the active device channel indicator at the far right (see Section 3.1.1).
3.2.4.1 <1DEV1&2>
PURPOSE
To view both MFC-CB device channels simultaneously.
See Section 3.2.4, PRINCIPLE.
OPERATION
To activate the DEV1&2 DISPLAY, press [DISPLAY] and select <1DEV1&2>.
Selecting <1DEV1&2> returns to the MAIN run screen with the DEV1&2
DISPLAY active.
With the DEV1&2 DISPLAY active, the MAIN run screen is:
Æ
4.0000 V 3.9985
2.0000 V 2.0036
DEV1 is always on the top line and DEV2 is always on the bottom line,
regardless of which device channel was active when the DEV1&2 DISPLAY
was selected. The device channel indicator <
is active for set point changes and other functions. Press [DEV1/2] to toggle the
active device channel indicator between DEV1 and DEV2.
To go to a DISPLAY other than DEV1&2, press [DISPLAY] and make a new
DISPLAY choice.
1. Active device channel indicator.
2. Standard set point and measurement line for
DEV1.
3. Standard set point and measurement line for
DEV2.
Æ> indicates which device channel
©2001~2007 DH Instruments, a Fluke Company Page 20
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