Fluke MFC-CB User Manual

MFC-CB™

MFC Control Box

Operation and Maintenance Manual

MFC-CB™ Operation and Maintenance Manual

Information in this document is subject to change without notice. No part of this document may be reproduced or transmitted in any form or by any means, electronic or mechanical, for any purpose, without the express written permission of DH Instruments, a Fluke Company 4765 East Beautiful Lane Phoenix AZ 85044-5318 USA.

DH Instruments strives to ensure the accuracy of its published materials; however, no warranty, expressed or implied, is provided. DH Instruments disclaims any responsibility or liability for any direct or indirect damages resulting from the use of the information in this manual or products described in it. Mention of any product does not constitute an endorsement by DH Instruments of that product. This manual was originally composed in English and subsequently translated into other languages. The fidelity of the translation cannot be guaranteed. In case of conflict between the English version and other language versions, the English version predominates.

DH Instruments, DH, DHI, MFC-CB, molbox, MFC-CB, molbloc and CalTool are trademarks, registered and otherwise, of DH Instruments, a Fluke Company.

Document No. 550123b-01 040330

Printed in the USA.

TABLE OF CONTENTS

TABLE OF CONTENTS ................................................................................				I
TABLES	...................................................................................................			IV
FIGURES .................................................................................................				IV
ABOUT THIS MANUAL ...............................................................................				V
1. INTRODUCTION ....................................................................................				1
1.1	PRODUCT OVERVIEW .............................................................................................................................			1
1.2	SPECIFICATIONS .....................................................................................................................................			1
	1.2.1	GENERAL SPECIFICATIONS...........................................................................................................................		1
	1.2.2	ANALOG OUTPUT SPECIFICATIONS .............................................................................................................		2
	1.2.3	ANALOG INPUT SPECIFICATIONS .................................................................................................................		2
	1.2.4 VALVE TEST POINT SPECIFICATIONS ..........................................................................................................			2
	1.2.5 FRONT AND REAR PANELS............................................................................................................................			3
		1.2.5.1	FRONT PANEL ..................................................................................................................................	3
	1.2.6	1.2.5.2	REAR PANEL ....................................................................................................................................	4
	1.2.6	INTERNAL VIEW ...............................................................................................................................................		5
		1.2.6.1	DISPLAY ............................................................................................................................................	5
		1.2.6.2	POWER SUPPLY ..............................................................................................................................	5
		1.2.6.3	POWER ENTRY MODULE ................................................................................................................	6
		1.2.6.4	MICRO BOARD .................................................................................................................................	6
		1.2.6.5	MAIN BOARD ....................................................................................................................................	6
2. INSTALLATION .....................................................................................				7
2.1	UNPACKING AND INSPECTION ..............................................................................................................			7
	2.1.1	REMOVING FROM PACKAGING .....................................................................................................................		7
	2.1.2	INSPECTING CONTENTS.................................................................................................................................		7
2.2	SITE REQUIREMENTS..............................................................................................................................			8
2.3	INITIAL SETUP..........................................................................................................................................			8
	2.3.1	PREPARING FOR OPERATION .......................................................................................................................		8
	2.3.2 MFC-CB TO MFC OR MFM CONNECTION......................................................................................................			8
2.4	POWER UP AND VERIFICATION.............................................................................................................			8
	2.4.1	POWER UP ........................................................................................................................................................		8
	2.4.2	CHECK/SET SECURITY LEVEL .......................................................................................................................		9
3. OPERATION .......................................................................................				11
3.1	GENERAL MANUAL OPERATION .........................................................................................................			11
	3.1.1	MAIN RUN SCREEN........................................................................................................................................		11
	3.1.2	GENERAL OPERATING PRINCIPLES ...........................................................................................................		12
		3.1.2.1 KEYPAD LAYOUT AND PROTOCOL .............................................................................................		12
		3.1.2.2	SOUNDS..........................................................................................................................................	13
		3.1.2.3	SOFT [ON/OFF] KEY.......................................................................................................................	14
		3.1.2.4 ACTIVE DEVICE CHANNEL INDICATION......................................................................................		14
		3.1.2.5 DIRECT FUNCTION KEYS SUMMARY ..........................................................................................		14
3.2	DIRECT FUNCTION KEYS......................................................................................................................			16
	3.2.1	[K].....................................................................................................................................................................		16
	3.2.2	[UNIT]...............................................................................................................................................................		17
	3.2.3	[POWER]..........................................................................................................................................................		18
	3.2.4	[DISPLAY]........................................................................................................................................................		19
		3.2.4.1	<1DEV1&2> .....................................................................................................................................	20
		3.2.4.2	<2SUM> ...........................................................................................................................................	21
		3.2.4.3	<3DIF>(DIFFERENCE)....................................................................................................................	21
		3.2.4.4	<4RATIO> ........................................................................................................................................	22
		3.2.4.5	<5UNIT>...........................................................................................................................................	23

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MFC-CB™ Operation and Maintenance Manual

	3.2.5	3.2.4.6	<6CLEAN> .......................................................................................................................................	24
	3.2.5	[DEV1/2]...........................................................................................................................................................		25
	3.2.6	[MFC]................................................................................................................................................................		25
	3.2.7	[DRIVERS] (OPTIONAL) .................................................................................................................................		27
	3.2.8	[SET MFC]........................................................................................................................................................		27
	3.2.9	[←] AND [→] (JOG MFC SET POINT) ............................................................................................................		28
3.3	[SETUP]...................................................................................................................................................			29
	3.3.1	<1MFC> (EDIT MFC PROFILES) ....................................................................................................................		30
	3.3.2	<2JOG>............................................................................................................................................................		31
	3.3.3	<3RES> (RESOLUTION) .................................................................................................................................		32
	3.3.4	<4FLOWU> (FLOW UNITS).............................................................................................................................		32
	3.3.5	<5ADJ> (ADJUSTMENT) ................................................................................................................................		33
3.4	[SPECIAL] ...............................................................................................................................................			35
	3.4.1	<1RESET>........................................................................................................................................................		36
		3.4.1.1	<1SETS>..........................................................................................................................................	36
		3.4.1.2	<2UNITS> ........................................................................................................................................	37
		3.4.1.3	<3MFC> ...........................................................................................................................................	37
		3.4.1.4	<4CAL> ............................................................................................................................................	37
	3.4.2	3.4.1.5	<5ALL>.............................................................................................................................................	38
	3.4.2	<2LEVEL>........................................................................................................................................................		38
	3.4.3	3.4.2.1	SECURITY LEVELS ........................................................................................................................	39
	3.4.3	<3PREFS>........................................................................................................................................................		42
		3.4.3.1	<1SCRSVR> ....................................................................................................................................	42
		3.4.3.2	<2SOUND> ......................................................................................................................................	43
		3.4.3.3	<3TIME> ..........................................................................................................................................	43
	3.4.4	3.4.3.4	<4ID> ...............................................................................................................................................	44
	3.4.4	<4CAL> ............................................................................................................................................................		45
	3.4.5	<5REMOTE> ....................................................................................................................................................		45
		3.4.5.1	<1COM1> AND <2COM2> ..............................................................................................................	46
		3.4.5.2	<3IEEE-488>....................................................................................................................................	46
	3.4.6	3.4.5.3	<4RS232 SELF-TEST>....................................................................................................................	46
	3.4.6	<6XBOX>	.........................................................................................................................................................	47
	3.4.7	<7LOG>............................................................................................................................................................		49

4. REMOTE OPERATION .........................................................................				51
4.1	OVERVIEW ..............................................................................................................................................			51
4.2	INTERFACING.........................................................................................................................................			51
	4.2.1	RS232 INTERFACE .........................................................................................................................................		52
		4.2.1.1	COM1...............................................................................................................................................	52
	4.2.2	4.2.1.2	COM2...............................................................................................................................................	53
	4.2.2	IEEE-488 (GPIB) ..............................................................................................................................................		53
4.3	COMMANDS............................................................................................................................................			54
	4.3.1	COMMAND SYNTAX .......................................................................................................................................		54
	4.3.2	COMMAND SUMMARY...................................................................................................................................		54
	4.3.3	ERROR MESSAGES .......................................................................................................................................		55
	4.3.4	COMMAND DESCRIPTIONS...........................................................................................................................		56
		4.3.4.1 IEEE STD. 488.2 COMMON AND STATUS COMMANDS..............................................................		56
		4.3.4.2	MFC-CB COMMANDS.....................................................................................................................	59
4.4	STATUS SYSTEM ...................................................................................................................................			74
	4.4.1	STATUS REPORTING SYSTEM .....................................................................................................................		74
		4.4.1.1	STATUS BYTE REGISTER .............................................................................................................	74
		4.4.1.2	STANDARD EVENT REGISTER .....................................................................................................	76

5. MAINTENANCE, ADJUSTMENTS AND CALIBRATION ............................			77
5.1	OVERVIEW ..............................................................................................................................................		77
5.2	VERIFICATION AND CALIBRATION OF ELECTRICAL SIGNALS .......................................................		78
	5.2.1 PRINCIPLE.......................................................................................................................................................		78
	5.2.2 FRONT PANEL ADJUSTMENT OF ELECTRICAL SIGNALS........................................................................		79
	5.2.2.1	PRINCIPLES....................................................................................................................................	79
	5.2.2.2	<1SENSE>.......................................................................................................................................	80
	5.2.2.3	<2MEAS> (MEASURE)....................................................................................................................	80
	5.2.2.4	<3SET> ............................................................................................................................................	81
	5.2.2.5	<4VALVE> .......................................................................................................................................	83
	5.2.2.6	<5CAL DATE> .................................................................................................................................	83
5.3	RELOADING EMBEDDED SOFTWARE INTO FLASH MEMORY .........................................................		84

Page II

	TABLE OF CONTENTS
6. TROUBLESHOOTING ..........................................................................		85
6.1	OVERVIEW ..............................................................................................................................................	85
7. APPENDIX ..........................................................................................		87
7.1	CALCULATIONS .....................................................................................................................................	87
	7.1.1 ELECTRICAL SET POINT AND MEASUREMENT CALCULATIONS ...........................................................	87
	7.1.2 CONVERTING BETWEEN ELECTRICAL UNITS AND FLOW OR %FS UNITS............................................	88
7.2	DEVICE CHANNEL CONNECTORS AND CABLES...............................................................................	89
	7.2.1 POPULAR CONFIGURATIONS ......................................................................................................................	91
7.3	DRIVERS .................................................................................................................................................	92
7.4	GLOSSARY .............................................................................................................................................	94
7.5	WARRANTY STATEMENT......................................................................................................................	95

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MFC-CB™ Operation and Maintenance Manual

TABLES
Table 1.	MFC-CB Delivery List ................................................................................................................	7
Table 2.	Summary of MFC-CB Direct Function Key Operation.............................................................	15
Table 3.	Available Flow Units ................................................................................................................	33
Table 4.	Security Levels - Functions NOT Executed Per Function/Level .............................................	40
Table 5.	COM1 and COM2 Available Settings ......................................................................................	46
Table 6.	COM1 DB-9F Pin Designation.................................................................................................	52
Table 7.	COM2 DB-9M Pin Designation................................................................................................	53
Table 8.	Command Summary................................................................................................................	54
Table 9.	Error Messages .......................................................................................................................	55
Table 10.	Status Byte Register................................................................................................................	74
Table 11.	Standard Event Register .........................................................................................................	76
Table 12.	Troubleshooting Checklist .......................................................................................................	85
Table 13.	MFC-CB DEV1 and DEV2 Connector Pin Out........................................................................	89
Table 14.	Common MFC Connector Pin Out ..........................................................................................	91
Table 15.	Brooks MFC Connector Pin Out..............................................................................................	92
Table 16.	Driver Output ...........................................................................................................................	92
Table 17.	External Drivers .......................................................................................................................	93
Table 18.	DHI Authorized Service Providers...........................................................................................	95
FIGURES
Figure 1.	MFC-CB Front Panel .................................................................................................................	3
Figure 2.	MFC-CB Rear Panel..................................................................................................................	4
Figure 3.	MFC-CB Internal View...............................................................................................................	5
Figure 4.	MFC-CB Keypad Layout..........................................................................................................	12
Figure 5.	MFC-CB with MFC Switchbox Schematic ...............................................................................	48
Figure 6.	Status Byte Register................................................................................................................	74
Figure 7.	Driver Cable Schematic...........................................................................................................	93

Page IV

ABOUT THIS MANUAL

This manual provides the user with the basic information necessary to set up and operate an MFC-CB MFC Control Box. It also includes a great deal of additional information provided to help you optimize MFC-CB use and take full advantage of its many features and functions.

Before using the manual, take a moment to familiarize yourself with the Table of Contents structure. All first time MFC-CB users should read Sections 1 and 2. Section 3 provides a comprehensive description of general MFC-CB operating principles. Section 4 is for remote operation from an external computer. Section 5 provides maintenance and calibration information. Section 6 is a quick troubleshooting guide. Use Section 6 to troubleshoot unexpected MFC-CB behavior based on the symptoms of that behavior.

Certain words and expressions have specific meaning as they pertain to MFC-CB. Section 7.4 is useful as a quick reference for the definition of specific words and expressions as they are used in this manual.

FOR THOSE OF YOU WHO “DON’T READ MANUALS”, GO DIRECTLY TO SECTION 2.3, INITIAL SETUP, TO SET UP YOUR MFC-CB. THEN GO TO SECTION 2.4, POWER UP AND VERIFICATION. THIS WILL GET YOU RUNNING QUICKLY WITH MINIMAL RISK OF CAUSING DAMAGE TO YOURSELF OR YOUR MFC-CB. THEN… WHEN YOU HAVE QUESTIONS OR START TO WONDER ABOUT ALL THE GREAT FEATURES YOU MIGHT BE MISSING, GET INTO THE MANUAL!

Manual Conventions

(CAUTION) is used in throughout the manual to identify user warnings and cautions.

(NOTE) is used throughout the manual to identify operating and applications advice and additional explanations.

[ ] indicates direct function keys (e.g., [UNIT]).

< > indicates MFC-CB screen menus and displays (e.g., <1yes>).

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MFC-CB™ Operation and Maintenance Manual

NOTES

Page vi

1. INTRODUCTION

1.1 PRODUCT OVERVIEW

MFC-CB is a two channel analog input/output device designed to set and read voltage and current signals from analog Mass Flow Controllers (MFC) and Mass Flow Meters (MFM). A DH Instruments MFC Switchbox may be connected to either channel allowing switching of the channel’s control between five permanently powered channels. As an option, (8) external 12 V drivers can also be included to excite peripheral equipment such as solenoid valves.

MFC-CB provides a local user interface via a front panel key pad and display and includes advanced on-board functions. Remote communication capability is supported by RS232 and IEEE-488 interfaces.

MFC-CB is intended for applications where convenient local and remote control of analog MFCs and/or MFMs is desired, for example in setting up an MFC calibration system using a DH Instruments molbox1 or molbox RFM flow standard.

1.2 SPECIFICATIONS

1.2.1GENERAL SPECIFICATIONS

Power Requirements	100 to 240 VAC, 50 to 60 Hz, 38 VA max. consumption
Power Supply Output	± 15 VDC @ 1 Amp max, 0.5 Amp per channel
Operating Temperature Range	15 to 35 °C
Storage Temperature Range	-20 to 70 °C
Warm Up Time	1 hour for best electrical measurement specifications
Vibration	Meets MIL-T-28800D
Weight	2 kg (4.4 lb)
Dimensions	8 cm H x 22.5 cm W x 20 cm D
	(3.1 in. x 8.9 in. x 7.9 in.) approx.
Microprocessor	Motorola 68302, 16 MHz
Communication Ports	RS232 (COM1), RS232 (COM2), IEEE-488,
	DHI MFC Switchbox
Electrical Connections	DEV1 and DEV2: 25 pin female DSUB
CE Conformance	Available. Must be specified.

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MFC-CB™ Operation and Maintenance Manual

1.2.2ANALOG OUTPUT SPECIFICATIONS

VOLTAGE OUTPUT

Range	0 to 6 VDC
Uncertainty	± 0.015 %FS
Resolution	0.1 mVDC
Output Impedance (max)	100 Ω per channel
Load Impedance (min)	10 kΩ per channel
Short Circuit Protection	Yes (indefinite)

CURRENT OUTPUT

Range	4 to 20 mA
Uncertainty	± 0.025 %FS
Resolution	0.4 μA
Maximum Load	500 Ω (compliance voltage: 10 VDC)
Short Circuit Protection	Yes (indefinite)

1.2.3ANALOG INPUT SPECIFICATIONS

VOLTAGE INPUT (MEASURE AND SENSE)

Range	0 to 6 VDC
Min to Max Measurable	-0.25 to 6.00 VDC
Uncertainty	± 0.015 %FS
Resolution	0.1 mVDC
Input Impedance (min)	1 MΩ

CURRENT INPUT (MEASURE)

Range	4 to 20 mA
Min to Max Measurable	4 to 20 mA
Uncertainty	± 0.025 %FS
Resolution	0.4 μA
Input Impedance	250 Ω

1.2.4VALVE TEST POINT SPECIFICATIONS

Range +2 to +15 VDC (in reference to -15 VDC)

Accuracy ± 0.1 %FS

Resolution 0.3 mVDC

Page 2

1. INTRODUCTION

1.2.5FRONT AND REAR PANELS

1.2.5.1FRONT PANEL

The front panel assembly provides a 2 x 20 vacuum fluorescent display, a membrane keypad for local user interface and a SOFT ON/OFF key.

4		3		2

1.Display

2.Multi-Function Keypad

3.Remote Communication Indicator

4.SOFT ON/OFF Key and Indicator

Figure 1. MFC-CB Front Panel

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MFC-CB™ Operation and Maintenance Manual

1.2.5.2REAR PANEL

The rear panel assembly provides DEVICE1 and DEVICE2 analog input/output channels, a 12 V drivers connection, communications interfaces and the power connection module.

1.Electrical power connector (IEC60320)

2.Power ON/OFF switch

3.Connector for 12V DRIVERS

4.Connector for MFC Switchbox control

5.DEVICE1 electrical input/output connection

6.DEVICE2 electrical input/output connection

7.COM2 connection for pass through communication

8.COM1 connection for host computer

9.IEEE-488 connection for host computer

Figure 2. MFC-CB Rear Panel

Page 4

1. INTRODUCTION

1.2.6INTERNAL VIEW

1.Power entry module

2.Micro board

3.Main board (under power supply and micro board)

4.Display

5.Power supply

Figure 3. MFC-CB Internal View

1.2.6.1DISPLAY

2 x 20 vacuum fluorescent, alpha-numeric display mounted to front panel.

1.2.6.2POWER SUPPLY

MFC-CB has one 65 W switching power supply with three DC voltage outputs:

•5 VDC @ 7 Amp max.

•+15 VDC @ 2.5 Amp max.

•-15 VDC @ 2 Amp max.

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MFC-CB™ Operation and Maintenance Manual

1.2.6.3POWER ENTRY MODULE

Includes ON/OFF switch, fuse (1 Amp @ 250 VAC) and AC filter.

1.2.6.4MICRO BOARD

The micro board supports a Motorola 68302 micro-controller, EPROM, EEPROM, 128k x 16 bit NVRAM, 8 Mbit flash memory; RS232 and IEEE-488.2 communications; keypad and display control. An I/O port controls other ports and devices within MFC-CB.

1.2.6.5MAIN BOARD

The main board is controlled by the micro board (see Section 1.2.6.4). The main board supports the drivers for the 12 V external drivers, MFC/MFM voltage supply, MFC/MFM control signal input and output.

Page 6

2. INSTALLATION

2.1 UNPACKING AND INSPECTION

2.1.1REMOVING FROM PACKAGING

MFC-CB is delivered, along with its standard accessories, in a corrugated container with polyurethane inserts to hold it in place.

Remove the MFC-CB and its accessories from the shipping container and remove each item from its protective plastic bag.

2.1.2INSPECTING CONTENTS

Check that all items are present and have no visible damage.

An MFC-CB is delivered complete with:

Table 1. MFC-CB Delivery List

DESCRIPTION	PART #

MFC-CB Mass Flow Control Box	401710 or 401710-CE
Report of Calibration	550100
ACCESSORIES
Operation and Maintenance Manual	550123

Power Cord (7.5 ft.)	100770 or 100770-CE

(2) MFC Cable and Connections Kit	401230 or 401230-CE
molbox1/MFC-CB Analog Calibration Cable	401256
Drivers Connector	401635 (optional)
General Accessories Disk (Important: Includes	102987
system support software and documentation)

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MFC-CB™ Operation and Maintenance Manual

2.2 SITE REQUIREMENTS

Install MFC-CB on any stable surface at a convenient height. The front feet are extendible so that the unit can be inclined for easier viewing.

MFC-CB can also be mounted in a standard 19-in. rack using the optional rack mount kit (P/N 401465). For additional information, contact your DHI Sales Representative.

If the MFC-CB will be used with an optional DHI MFC Switchbox, consider placement of the Switchbox and the connection and disconnection of MFC cables (see Section 3.4.6, Figure 5).

2.3 INITIAL SETUP

2.3.1PREPARING FOR OPERATION

No special preparation of MFC-CB is required prior to putting it into operation.

Connect the power cord supplied to the MFC-CB and to a power source.

2.3.2MFC-CB TO MFC OR MFM CONNECTION

Prepare an MFC-CB to MFC or MFM cable using one of the kits provided with the MFC-CB (see Section 7.2 for information on cable pin out) or an optional preassembled cable if you have one.

Connect the MFC-CB to MFC/MFM cable to the DEV1 or DEV2 25 pin DSUB connection on the MFC-CB rear panel.

If you are using an optional MFC Switchbox, connect the Switchbox to the DEV1 or DEV2 MFC-CB rear panel connection and then connect the MFC or MFM to the MFC Switchbox (see the MFC Switchbox User’s Manual and Section 3.4.6, Figure 5).

2.4 POWER UP AND VERIFICATION

2.4.1POWER UP

Turn ON the MFC-CB rear panel main power switch. Observe the front panel display as MFC-CB initializes, error checks and goes to the MAIN run screen (see Section 3.1.1).

The front panel ON/OFF key controls a SOFT ON/OFF (see Section 3.1.2.3). This allows

MFC-CB’s front panel to be turned off while maintaining the power supply to devices that are connected to it.

If the MFC-CB fails to reach the MAIN run screen, service may be required. Record the sequence of operations and displays observed and contact a DHI Authorized Service Provider.

Page 8

2. INSTALLATION

2.4.2CHECK/SET SECURITY LEVEL

MFC-CB has a security system based on user levels. By default, the security system is set to “low”, which includes certain access restrictions, and there is no password required to change the security level. See Section 3.4.2 and Table 4 for information on the security level system. As part of the MFC-CB startup, set your desired security level and a password.

MFC-CB is delivered with the security level set to low to avoid inadvertent altering of critical internal settings but with access to changing security levels unrestricted. It is recommended that the low security level be maintained at all times and password protection be implemented if control over setting of security levels is desired.

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MFC-CB™ Operation and Maintenance Manual

NOTES

Page 10

3. OPERATION

3.1 GENERAL MANUAL OPERATION

MFC-CB is designed to offer the optimum balance between simple, intuitive operation and the availability of a variety of functions with a high level of operator discretion. The local operator interface is through the front panel’s 2 x 20 character alpha-numeric display and a 4 x 4 multi-function keypad.

3.1.1MAIN RUN SCREEN

The MFC-CB MAIN run screen is its home display that is reached on power up and from which other functions and menus are accessed. It is the top level of all menu structures.

The MAIN run screen is where the MFC-CB is left in normal operation. It displays the set point output, if applicable, and the measurement from the MFC or MFM as well as a variety of additional information if desired.

→SSSSSSaUNITKaMMMMMM

D DISPLAY MODE Dn,c

10		9		8

1.<→> Active channel indication in DEV1&2 DISPLAY mode (see Section 3.2.4.1). Blank if not in DEV1&2 DISPLAY mode.

2.<SSSSSS>: Numerical value and sign of the set point (see Section 3.2.8).

3.<a>: Indicates whether a user adjustment is being applied to the set point (see Section 3.3.5). <a> if an adjustment is being applied, blank if no adjustment is being applied.

4.<UNIT>: Unit of measure of the set point and measurement numerical values (see Section 3.2.2).

5.<K>: Indicates whether a gas correction factor (K factor) is being applied (see Section 3.2.1). <K> if a factor is being applied, blank if no factor is being applied.

6.<a>: Indicates whether a user adjustment is being applied to the measurement value (see Section 3.3.5). <a> if an adjustment is being applied, blank if no adjustment is being applied.

7.<MMMMMM>: Numerical value of the measurement from the MFC or MFM.

8.<Dn,c>: Indicates which device channel is being displayed on the top line of the display. <n> is <1> for DEV1, <2> for DEV2. <c> indicates the current channel of the MFC Switchbox if a Switchbox is connected to DEVn, blank if no Switchbox is in use (see Section 3.4.6).

9.<DISPLAY MODE DATA>: Information displayed depends on current DISPLAY mode (see Section 3.2.4).

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MFC-CB™ Operation and Maintenance Manual

10.<D>: Indication of what is being displayed on the bottom line of the display as set by the DISPLAY function (see Section 3.2.4). Possible indications include:

•<→>: Current DISPLAY mode is DEV1&DEV2 (see Section 3.2.4.1) and the active device channel is DEV2. The arrow is on the first line if the active device channel is DEV1.

•<Σ> and far right of bottom line is Dn + Dn: Current DISPLAY mode is SUM (see Section 3.2.4.2).

• < > and far right of bottom line is Dn - Dn: Current DISPLAY mode is DIF (see Section 3.2.4.3).

•<blank> and far right of bottom line is Dn/Dn: Current DISPLAY mode is RATIO (see Section 3.2.4.4).

•Blank, and no characters other than Dn on bottom line: Current DISPLAY mode is CLEAN (see Section 3.2.4.5).

When a number is too large to show in the allocated display space, MFC-CB displays <********>.

MFC-CB has a SCREEN SAVER function that causes the display to dim if no key is pressed for 10 minutes. Pressing a key restores full power to the display. The screen saver activation time can be changed or screen saving can be completely suppressed (see Section 3.4.3.1).

3.1.2GENERAL OPERATING PRINCIPLES

3.1.2.1KEYPAD LAYOUT AND PROTOCOL

MFC-CB has a 4 x 4 keypad for local operator access to direct functions, function menus and for data entry.

1.The Editing and Execution keys are for execution, suspending execution, backing up in menus and editing entries.

2.The Menu/Data keys provide access to function menus from the MAIN run screen. The menu name is on the bottom half of the key. The SETUP menu is for more frequently used functions. The SPECIAL menu is for functions that are not generally used as a part of day to day operation. These keys enter numerical values when editing.

3.The Function/Data keys allow very commonly used functions to be accessed directly from the MAIN run screen by a single keystroke. The name of the function is on the bottom half of the key (see Section 3.1.2.5). These keys enter numerical values when editing.

Figure 4. MFC-CB Keypad Layout

Page 12

3. OPERATION

Key press confirmation is provided by both tactile and audible feedback. A single beep confirms a valid entry. A descending two note tone signals an invalid entry. The audible entry feedback can be suppressed or modified (see Section 3.4.3.2).

Pressing the [ENTER] key generally causes execution or forward movement in the menu tree.

Pressing the [ESCAPE] key generally allows movement back in the menu tree and/or causes execution to cease or suspend without changes being implemented. Pressing [ESCAPE] repeatedly eventually returns to the MAIN run screen. From the MAIN run screen, pressing [ESCAPE] allows momentary viewing of the MFC-CB identification screen.

Pressing the [+/-] key changes a numerical sign when editing. From the MAIN run screen, it provides a momentary view of the active MFC profile (see Section 3.3.1).

Pressing the [←] and [→] keys allows reverse and forward cursor movement when editing data entry. These keys are also used to scroll through choices. When in the MAIN run screen, they are used by the JOG function to increment the MFC set point up and down (see Section 3.2.9).

Menu selections can be made by pressing the number of the selection directly or by pressing [←] or [→] to place the cursor on the number of the desired selection and pressing [ENTER].

Some screens go beyond the two lines provided by the display. This is indicated by a flashing down arrow in the second line of the display. Press [←] and [→] to move the cursor to access the lines that are not visible or directly enter the number of the hidden menu choice if you know it.

3.1.2.2SOUNDS

MFC-CB is equipped with a variable frequency tone device to provide audible feedback and alarms. Sounds are used for the following indications:

Valid key press: Brief beep. Choice between three frequencies or NO sound is available (see Section 3.4.5.2).

Invalid key press: Descending two tone “blurp”. Choice of NO sound is available (see Section 3.4.5.2).

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MFC-CB™ Operation and Maintenance Manual

3.1.2.3SOFT [ON/OFF] KEY

MFC-CB is equipped with a SOFT [ON/OFF] key and indicator LED on the bottom left hand corner of the front panel. The purpose of the SOFT ON/OFF key is to put MFC-CB into a dormant mode in which the display is turned OFF.

When MFC-CB is SOFT OFF, power is still supplied to DEV1 and DEV2 and the MFC set points are maintained if the rear panel main power switch is on.

When MFC-CB is ON, the ON/OFF indicator is ON continuously. When MFC-CB is SOFT OFF and the main power switch is on, the ON/OFF indicator blinks every 5 seconds.

When MFC-CB is SOFT OFF, receiving a remote command turns it ON.

3.1.2.4ACTIVE DEVICE CHANNEL INDICATION

The MFC-CB active device channel (DEV1 or DEV2) is the channel whose set point and measurement values are displayed on the top line of the MFC-CB display. The characters on the bottom right hand corner of the display (<D1> or <D2>) indicate which channel is currently active. The active channel is the channel that is affected by all channel specific settings and adjustments.

Channel specific MFC-CB settings include:

•[K] (see Section 3.2.1).

•[UNIT] (see Section 3.2.2).

•[MFC] (see Section 3.2.6).

•[SETUP], <2jog> (see Section 3.3.2).

•[SETUP], <5adj> (see Section 3.3.5).

•[SET MFC] (see Section 3.2.8).

Regardless of which channel is currently active from the display, both DEV1 and DEV2 are always active in the sense that their set point is maintained.

3.1.2.5DIRECT FUNCTION KEYS SUMMARY

Local operation of MFC-CB is through the front panel, 4 x 4, pressure sensitive keypad. To minimize the use of multi-layered menu structures, the keypad numerical keys also provide direct access to commonly used functions. The function accessed is labeled on the bottom half of the each key. Direct function keys are active whenever MFC-CB is in its MAIN run screen. Table 2 summarizes the operation of the direct function keys. See the corresponding manual sections for full detail on each direct function.

It may be useful to keep a copy of Table 2 near the MFC-CB, especially when first becoming acquainted with its operation.

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3. OPERATION

Table 2. Summary of MFC-CB Direct Function Key Operation

Direct Function Keys are active from the MAIN run screen

See corresponding manual sections for full detail

.	Menu of commonly used setup features including creating and editing MFC
SETUP	profiles, adjusting set point jog value and display resolution.

0	Menu of less frequently used internal functions and settings including resets,
0	user preferences, internal calibration, remote interface setup and Switchbox
SPECIAL	setup.

1	Toggle active device channel between DEV1 and DEV2.
DEV1/2

2	Select MFC profile which sets V or mA operation and the electrical signal
MFC	to flow unit relationship.

3	Turn ON and OFF MFC-CB’s optional 12 V drivers.
DRIVERS

5	Display the set point unaltered by K and/or adjustment values and the
POWER	valve test point.

6	Define the DISPLAY function for the second line of the MFC-CB display.
DISPLAY	Choices include DEV1&2, sum, difference, ratio, 2nd unit, clean.

7	Set/change an MFC gas correction factor (K factor).
K

9	Set point and measure unit (electrical, %FS, flow).
UNIT	Set point and measure unit (electrical, %FS, flow).
UNIT

+/-	View a summary of the active MFC profile for the active channel
+/-	(DEV1 or DEV2).

ENTER	Enter a set point to output on the active device channel.
SET MFC	Enter a set point to output on the active device channel.

Í	Î	Jog the set point up or down.

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MFC-CB™ Operation and Maintenance Manual

3.2 DIRECT FUNCTION KEYS

3.2.1[K]

PURPOSE

To specify a gas measurement conversion factor, K, to be applied to the active device channel when using and MFC or MFM calibrated with one gas to set and/or measure the flow of another gas.

PRINCIPLE

MFCs and MFMs respond differently to different gas species due the different specific heats of the gases and different behavior in the device. Therefore, the calibration of an MFC or MFM with one gas may not be valid with another gas. MFC manufacturers often provide gas conversion factors, known as K factors, to convert an MFC from the gas it was calibrated with to another gas.

The MFC-CB’s K function allows the device manufacturer’s K factor to be entered and applied to the active channel so that set points and measurement values are automatically adjusted by the K factor. This feature can be useful when using an MFC calibrated with one gas to control or measure a different gas.

MFC-CB applies the K factor only when the unit of measure is a flow unit. When the unit of measure is an electrical unit (V or mA) or %FS, the K factor has no effect.

See Section 7.1.1 for details on the calculations used to apply the K factor.

When using MFC-CB in conjunction with a molbox/molbloc mass flow standard to calibrate or verify an MFC, the K factor function of the MFC-CB is NOT normally used. K factors are applied to the molbox measured flow to simulate a process gas with a surrogate gas (see the molbox Operation and Maintenance manual Section concerning K factors).

OPERATION

To enable a gas conversion factor press [K] from the MAIN run screen. The display is:

If <2off> is selected, no conversion factor will be applied. If <1on> is selected, the next screen is:

K factor: (1.0000)
1off 2on	D1

K factor:

1.00000 D1

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3. OPERATION

The value of the gas conversion factor can be edited as desired. Press [ENTER] to return to the MAIN run screen with the entered K factor active. The K factor is only used if the current unit of measure is a flow unit (see Section 3.2.2). The letter <K> is always appended to the flow unit indication in the run screens when the K function is ON (e.g., sccmK).

Turning K ON or OFF or making a change to the K factor value resets the active device channel output to zero.

K factor ON/OFF and the K factor value are device channel specific (DEV1, DEV2). Settings made for one device channel do not affect the other channel.

3.2.2[UNIT]

PURPOSE

To specify the unit of measure in which MFC-CB displays set points and measured values on the active device channel.

PRINCIPLE

MFC-CB operates in either volts (V) or milliamps (mA). It also converts V or mA to flow values using a simple linear relationship between the voltage or current range and the flow range in a flow unit (see Section 7.1.2).

The electrical mode and range in which to operate as well as the flow unit and the flow unit range are specified by the active MFC profile for each device channel (see Section 3.3.1).

The units of measure available to display MFC-CB set points and measurements are V or mA, %FS and a flow unit if the MFC profile specifies a flow unit. MFC profiles #1 and #2 are factory default profiles that do not specify a specific flow range. MFC profile #1 specifies operation from 0 to 5 V and MFC profile #2 specifies operation from 4 to 20 mA. When using profile #1 or #2, no flow unit is available.

OPERATION

	To change the unit of measure press [UNIT].
				1V 2%FS 3sccm

	The display is:
	The display is:

Select the desired unit of measure. Operation returns to the MAIN run screen with the display unit changed to the selected unit.

The flow unit available under [UNIT] is determined by the MFC profile active for the device channel. When using MFC profile #1 or #2, no flow unit is available as none is specified by the profile. To work in a flow unit, set up and use a custom MFC profile (see Section 3.3.1). MFC profile #1 is 0 to 5 V. MFC profile #2 is 4 to 20 mA.

The UNIT function is device channel specific. The unit setting for one device channel does not affect the other device channel.

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MFC-CB™ Operation and Maintenance Manual

3.2.3[POWER]

PURPOSE

To display of the set value unaltered by K or adjustment values and to display the valve test point.

PRINCIPLE

The electrical value actually output by MFC-CB in response to a set point entry may be different from the set point value due to the application of a K factor (see Section 3.2.1) and/or an adjustment factor (see Section 3.3.5). See Section 7.1.1 for details on the calculation of the actual set point. The [POWER] screen displays the actual electrical value output by MFC-CB in response to a set point input.

Some mass flow controllers allow access to a valve test point voltage measurement to assist in troubleshooting the MFC’s operation. MFC-CB can measure and display the valve test point voltage. A display of this value is available by pressing the [POWER] function key.

The valve test point is always in Volts (V), even for an MFC whose set point and flow measurement are in current (mA.).

For MFC-CB to display the valve test point, the MFC being used must support valve test point measurement and be properly connected to the MFC-CB. Refer to the MFC manufacturer’s documentation for information on the valve test point and to Section 7.2 for information on MFC-CB DEV1 and DEV2 connections and pin outs.

OPERATION

To display the set point and MFC valve test point press [POWER] from the run screen. The display is:

Set point: 2.0000 V			1.	Actual set point for active device channel.
Set point: 2.0000 V			1.	Actual set point for active device channel.
Valve: 3.475 V D1			2.	Active device channel indicator.
		3.		Current valve test point reading.
	2	3.		Current valve test point reading.

Press [ESCAPE] or [ENTER] to return to the MAIN run screen.

The POWER run screen displays the actual MFC set point which may be different from the entered set point due to the application of a K factor and/or adjustment factors (see Section 7.2).

The POWER screen is a run screen from which other functions can be accessed. For example, while in the POWER screen, press [SET MFC] to change the MFC set point, [DEV1/2] to change device channels or [MFC] to select a new MFC profile.

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3. OPERATION

3.2.4[DISPLAY]

PURPOSE

To select, from a variety of choices, the information that is displayed on the second line of the MFC-CB display.

PRINCIPLE

MFC-CB supports a variety of advanced DISPLAY functions that are displayed on the bottom line of the MFC-CB display. The available DISPLAY functions are:

•DEV1&2 (see Section 3.2.4.1): Displays both device channels simultaneously with DEV1 always on the top line and DEV2 always on the bottom line. This function can be useful when working with two MFCs simultaneously.

• SUM (see Section	3.2.4.2):	Displays the sum of the two device
channel measurements.	Requires that DEV1 and DEV2 be set to the same unit

of measure. This function can be useful to view the combined flow of two MFCs.

•DIF (see Section 3.2.4.3): Displays the difference between the inactive device

channel and the active device channel measurements (inactive channelactive channel). Requires that DEV1 and DEV2 be set to the same unit of measure. This function can be useful to view the difference between two flow rates.

•RATIO (see Section 3.2.4.4): Displays the ratio of the inactive device channel measurement and the active device channel measurement (inactive

channel/active channel). Requires that DEV1 and DEV2 be set to the same unit of measure. This function can be useful to view the ratio of two flow rates.

•UNIT (see Section 3.2.4.5): Allows the current device channel measurement to be

viewed in two of its available units of measure simultaneously. This function can be used to display the MFC sensor’s electrical output and corresponding flow rate simultaneously.

•CLEAN (see Section 3.2.4.6): Blanks out the second line of the display except for the active device channel indicator. This function is used when only a simple display of set point and measurement for the active device channel with no other information is wanted. The CLEAN DISPLAY is MFC-CB’s default display.

OPERATION

To select a DISPLAY function, press [DISPLAY] from the MAIN run screen.

The display is:

1DEV1&2 2sum 3dif

4ratio 5unit 6clean

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MFC-CB™ Operation and Maintenance Manual

The cursor is on the active DISPLAY function. Selecting a DISPLAY function returns to the run screen with the selected DISPLAY function active.

See PRINCIPLE above and Sections 3.2.4.1 through 3.2.4.6 for details on each DISPLAY function.

The default DISPLAY function is CLEAN which causes the second line of the display to be empty except for the active device channel indicator at the far right (see Section 3.1.1).

3.2.4.1<1DEV1&2>

PURPOSE

To view both MFC-CB device channels simultaneously.

See Section 3.2.4, PRINCIPLE.

OPERATION

To activate the DEV1&2 DISPLAY, press [DISPLAY] and select <1DEV1&2>. Selecting <1DEV1&2> returns to the MAIN run screen with the DEV1&2 DISPLAY active.

With the DEV1&2 DISPLAY active, the MAIN run screen is:

			1.		Active device channel indicator.
Æ 4.0000 V		3.9985	1.		Active device channel indicator.
Æ 4.0000 V		3.9985		2.	Standard set point and measurement line for
	2.0000 V	2.0036		2.	Standard set point and measurement line for
	2.0000 V	2.0036			DEV1.
			3.		Standard set point and measurement line for
			3.		Standard set point and measurement line for
					DEV2.
					DEV2.

DEV1 is always on the top line and DEV2 is always on the bottom line, regardless of which device channel was active when the DEV1&2 DISPLAY was selected. The device channel indicator <Æ> indicates which device channel is active for set point changes and other functions. Press [DEV1/2] to toggle the active device channel indicator between DEV1 and DEV2.

To go to a DISPLAY other than DEV1&2, press [DISPLAY] and make a new DISPLAY choice.

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3. OPERATION

3.2.4.2<2SUM>

PURPOSE

To display the sum of DEV1 and DEV2 measurement values.

See Section 3.2.4, PRINCIPLE.

OPERATION

To activate the SUM DISPLAY, press [DISPLAY] and select <2sum>. To reach the SUM DISPLAY, it is required that DEV1 and DEV2 be set in the same unit of measure. If the SUM DISPLAY is attempted while the unit of measure on the two device channels is not the same, an error message displays. In this case, set both channels to the same unit of measure and retry.

With the SUM DISPLAY active the MAIN run screen is:

100.00 sccm 99.998

ε 150.005			D1+D2

			2
			2

1.Standard MAIN run screen top line for the active device channel.

2.Indication of sum calculation, the active device channel is to the right.

3.Sum of DEV1 and DEV2 measurements.

While in the SUM DISPLAY, changing the unit of measure causes the display to revert back to the CLEAN DISPLAY. This can happen by making a unit change using [UNIT] or by selecting a new MFC profile using [MFC].

To switch the SUM DISPLAY from D2 + D1 to D1 + D2 and vice versa, change the active channel by pressing [DEV1/2].

To go to a DISPLAY other than SUM, press [DISPLAY] and make a new DISPLAY choice.

3.2.4.3<3DIF>(DIFFERENCE)

PURPOSE

To display the difference between the measurement of the inactive device channel and of the active device channel.

See Section 3.2.4, PRINCIPLE.

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MFC-CB™ Operation and Maintenance Manual

OPERATION

To activate the DIF DISPLAY, press [DISPLAY] and select <3dif>. To reach the DIF DISPLAY, it is required that DEV1 and DEV2 be set in the same unit of measure. If the DIF DISPLAY is attempted while the unit of measure on the two device channels is not the same, an error message appears. In this case, set both channels to the same unit of measure and retry.

With the DIF DISPLAY active, the MAIN run screen is:

100.00 sccm 99.998

0.035 D2-D1

1.Standard MAIN screen top line for the active device channel.

2.Indication of difference calculation formula, the active device channel is to the right.

3.Difference of the inactive and active device channel measurements.

While in the DIF DISPLAY, changing the unit of measure causes the display to revert back to the CLEAN DISPLAY. This can happen by making a unit change using [UNIT] or by selecting a new MFC profile using [MFC].

To switch the DIF DISPLAY from D2 – D1 to D1 – D2 and vice versa, change the active channel by pressing [DEV1/2].

To go to a DISPLAY other than DIF, press [DISPLAY] and make a new DISPLAY choice.

3.2.4.4<4RATIO>

PURPOSE

To display the ratio of the measurements of the inactive device channel and the active device channel.

See Section 3.2.4, PRINCIPLE.

OPERATION

To activate the RATIO DISPLAY, press [DISPLAY] and select <4ratio>. To reach the RATIO DISPLAY, it is required that DEV1 and DEV2 be set in the same unit of measure. If the RATIO DISPLAY is attempted while the unit of measure on the two device channels is not the same, an error message appears. In this case, set both channels to the same unit of measure and retry.

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+ 74 hidden pages

Fluke MFC-CB User Manual

TABLE OF CONTENTS

TABLES

FIGURES

ABOUT THIS MANUAL

1. INTRODUCTION

1.1 PRODUCT OVERVIEW

1.2 SPECIFICATIONS

1.2.1GENERAL SPECIFICATIONS

1.2.2ANALOG OUTPUT SPECIFICATIONS

1.2.3ANALOG INPUT SPECIFICATIONS

1.2.4VALVE TEST POINT SPECIFICATIONS

1.2.5FRONT AND REAR PANELS

1.2.5.1FRONT PANEL

1.2.5.2REAR PANEL

1.2.6INTERNAL VIEW

4.Display

5.Power supply

1.2.6.3POWER ENTRY MODULE

1.2.6.4MICRO BOARD

1.2.6.5MAIN BOARD

2. INSTALLATION

2.1 UNPACKING AND INSPECTION

2.1.1REMOVING FROM PACKAGING

2.1.2INSPECTING CONTENTS

2.2 SITE REQUIREMENTS

2.3 INITIAL SETUP

2.3.1PREPARING FOR OPERATION

2.4 POWER UP AND VERIFICATION

2.4.1POWER UP

2.4.2CHECK/SET SECURITY LEVEL

3. OPERATION

3.1 GENERAL MANUAL OPERATION

3.1.1MAIN RUN SCREEN

3.1.2GENERAL OPERATING PRINCIPLES

3.1.2.1KEYPAD LAYOUT AND PROTOCOL

3.1.2.2SOUNDS

3.1.2.3SOFT [ON/OFF] KEY

3.1.2.4ACTIVE DEVICE CHANNEL INDICATION

3.1.2.5DIRECT FUNCTION KEYS SUMMARY

3.2 DIRECT FUNCTION KEYS

3.2.2[UNIT]

3.2.3[POWER]

3.2.4[DISPLAY]

3.2.4.3<3DIF>(DIFFERENCE)

3.2.4.4<4RATIO>